JP5903465B2 - Method for transferring carbon nanotube array and method for manufacturing carbon nanotube structure - Google Patents

Description

  The present invention relates to a carbon nanotube array transfer method and a carbon nanotube structure manufacturing method, and more particularly to a carbon nanotube array transfer method and a carbon nanotube film or a carbon nanotube wire manufacturing method.

  Carbon nanotubes (Carbon Nanotube, CNT) were discovered by Iijima in 1991 and are expected to be one of the important new materials in the 21st century. Since carbon nanotubes have excellent mechanical, electrical, and thermal properties, they are expected to be applied in a wide range of fields such as electronics, biotechnology, energy, and composite materials. However, since one carbon nanotube has a nano-scale size, it is difficult to use. Currently, a macroscopic carbon nanotube structure having a large size can be formed using a plurality of carbon nanotubes as a raw material. The macroscopic carbon nanotube structure is, for example, a carbon nanotube film composed of a plurality of carbon nanotubes and a carbon nanotube wire composed of a plurality of carbon nanotubes.

  Patent Document 1 discloses that a carbon nanotube film is drawn directly from a carbon nanotube array. The carbon nanotube film is a self-supporting structure composed of a plurality of carbon nanotubes connected to each other by an intermolecular force, and has excellent transparency and macroscopic dimensions. In a carbon nanotube film drawn directly from a carbon nanotube array, a plurality of carbon nanotubes are arranged along the same direction, so that the carbon nanotube film has excellent conductivity and thermal conductivity in the axial direction of the carbon nanotube. Can be applied. For example, it is fields such as touch panels, liquid crystal displays, speakers, heating devices, thin film transistors, and light emitting diodes.

  The principle of forming the carbon nanotube film is that when the carbon nanotubes in the super-aligned carbon nanotube array are tightly coupled by intermolecular force and some of the carbon nanotubes are pulled out, the adjacent carbon nanotubes are terminated by the intermolecular force. Are connected at the ends and pulled out, so that a carbon nanotube film composed of a plurality of carbon nanotubes connected at the ends can be formed. However, carbon nanotubes are mutually adsorbed between carbon nanotubes only by intermolecular force, and a carbon nanotube film is formed. Once the morphology of the carbon nanotube array is destroyed or changed, uniform carbon The nanotube film cannot be pulled out continuously. Therefore, in the conventional method, after the carbon nanotube array is grown on the surface of the growth substrate (generally, single crystal silicon), the carbon nanotube array grown directly on the growth substrate is extracted, and the carbon nanotube array is extracted. Earn a film.

  Currently, carbon nanotube array producers provide users with both carbon nanotube arrays and growth substrates. However, this increases the period until the growth substrate is recovered and cannot be used quickly as a growth substrate for a new carbon nanotube array. In addition, high-cost single crystal silicon is easily broken during transportation. Moreover, the above-mentioned problems exist in drawing out carbon nanotube wires directly from the carbon nanotube array.

Chinese Patent Application No. 1014589575 Chinese Patent Application No. 101239712

  Therefore, in order to solve the above problems, the present invention provides a method for transferring a carbon nanotube array and a method for manufacturing a carbon nanotube structure, which are low in cost and simple in production process.

  The transfer method of a carbon nanotube array of the present invention is a first step of providing an alternative substrate and a growth substrate, and has a carbon nanotube array on the surface of the growth substrate, and the carbon nanotube array is adjacent to the growth substrate. The surface is a first surface, the surface opposite to the first surface is a second surface, and the form of the carbon nanotube array can ensure that the carbon nanotube structure is continuously drawn from the carbon nanotube array. A second step of placing the substitute substrate on the second surface of the carbon nanotube array and placing a liquid phase medium between the substitute substrate and the second surface of the carbon nanotube array; , Between the alternative substrate and the second surface of the carbon nanotube array. A third step of solidifying the medium in the liquid phase into a solid medium, moving at least one of the substitute substrate and the growth substrate to separate the substitute substrate and the growth substrate, and A fourth step of detaching the carbon nanotube array from the growth substrate and transferring to the alternative substrate, and increasing the temperature, thereby increasing the temperature of the solid between the alternative substrate and the second surface of the carbon nanotube array. A fifth step of removing a medium, wherein after removing the solid medium, the form of the carbon nanotube array can ensure that the carbon nanotube structure is continuously drawn from the carbon nanotube array; The carbon nanotube structure includes a plurality of carbon nanotubes connected end to end. Including the drive.

  A method of manufacturing a carbon nanotube structure is a first step of providing a first substrate and a second substrate, and has a carbon nanotube array on a surface of the first substrate, and the carbon nanotube array is adjacent to the first substrate. The surface to be the first surface, the surface facing the first surface is the second surface, and the form of the carbon nanotube array can ensure that the carbon nanotube structure is continuously drawn from the carbon nanotube array, A first step; placing the second substrate on the second surface of the carbon nanotube array; and placing a liquid phase medium between the second substrate and the second surface of the carbon nanotube array. Before being installed between the second substrate and the second surface of the carbon nanotube array. A third step of solidifying the liquid phase medium into a solid medium, and moving at least one of the second substrate and the first substrate to separate the second substrate from the first substrate; A fourth step of detaching the carbon nanotube array from the first substrate and transferring to the second substrate, and raising the temperature between the second substrate and the second surface of the carbon nanotube array. A fifth step of removing the solid medium, wherein after the solid medium is removed, the shape of the carbon nanotube array can ensure that the carbon nanotube structure is continuously pulled out of the carbon nanotube array. The fifth step and pulling out the carbon nanotube structure from the carbon nanotube array transferred to the second substrate A sixth step, wherein, the carbon nanotube structure comprises a plurality of carbon nanotubes are connected end to end.

  Compared with the prior art, the method for transferring a carbon nanotube array and the method for producing a carbon nanotube structure of the present invention have the following advantageous effects. In the step of growing the carbon nanotube array and the step of extracting the carbon nanotube structure from the carbon nanotube array, the carbon nanotube array is transferred and installed from the growth substrate to a different substrate, so in the step of extracting the carbon nanotube structure from the carbon nanotube array, The substrate on which the carbon nanotube array is installed can be made of a low cost material. This allows carbon nanotube array producers to transfer carbon nanotube arrays to alternative substrates, providing users with both carbon nanotube arrays and alternative substrates, and costly growth substrates to be quickly recovered, simplifying the production process To do. Therefore, the method for transferring a carbon nanotube array and the method for producing a carbon nanotube structure of the present invention are advantageous for industrial application to a carbon nanotube film and a carbon nanotube wire. To do.

It is a figure which shows the transfer method of the carbon nanotube array which concerns on Embodiment 1 of this invention. It is a scanning electron micrograph of the carbon nanotube film pulled out from the carbon nanotube array which concerns on Embodiment 1 of this invention. It is a figure which shows the transfer method of the carbon nanotube array which concerns on one example of this invention. It is a figure which shows the transfer method of the carbon nanotube array which concerns on another example of this invention. It is a figure which shows the manufacturing method of the carbon nanotube structure which concerns on Embodiment 2 of this invention. 2 is a photograph of a carbon nanotube film drawn from a carbon nanotube array transferred to an alternative substrate according to Embodiment 1 of the present invention.

  Embodiments of the present invention will be described below with reference to the drawings.

(Embodiment 1)
Referring to FIG. 1, the method for transferring a carbon nanotube array 10 according to the present invention is a step of providing an alternative substrate 30 and a growth substrate 20, and having the carbon nanotube array 10 on the surface of the growth substrate 20. The surface adjacent to the growth substrate 20 is the first surface 102, the surface opposite to the first surface 102 is the second surface 104, and the form of the carbon nanotube array 10 is to form the carbon nanotube structure 40 from the carbon nanotube array 10. Step (S 1) that can ensure continuous pulling, and the alternative substrate 30 is placed on the second surface 104 of the carbon nanotube array 10, and the liquid phase is placed between the alternative substrate 30 and the second surface 104 of the carbon nanotube array 10. Installing the medium 60 in the state (S2), and an alternative group 30 and solidifying the medium 60 in the liquid phase placed between the second surface 104 of the carbon nanotube array 10 into a solid medium 60 ′, and at least one of the alternative substrate 30 and the growth substrate 20 By moving one of them to separate the alternative substrate 30 and the growth substrate 20, detaching the carbon nanotube array 10 from the growth substrate 20, and transferring to the alternative substrate 30 (S 4); Removing the solid medium 60 ′ between the alternative substrate 30 and the second surface 104 of the carbon nanotube array 10, and after removing the solid medium 60, the form of the carbon nanotube array 10 is a carbon nanotube structure. A step (S5) that can ensure that 40 is continuously pulled out of the carbon nanotube array 10; including.

  The carbon nanotube structure 40 includes a plurality of carbon nanotubes connected at the ends, a macroscopic structure formed by connecting the plurality of carbon nanotubes to each other by an intermolecular force and connecting the ends at the ends. For example, a carbon nanotube film or a carbon nanotube wire. Preferably, the carbon nanotube structure 40 includes only a plurality of carbon nanotubes connected at the ends.

  The carbon nanotube array 10 is grown on the surface of the growth substrate 20 by a CVD (chemical vapor deposition) method. The carbon nanotubes in the carbon nanotube array 10 are basically parallel to each other and perpendicular to the surface of the growth substrate 20. Adjacent carbon nanotubes are in contact with each other and bonded by intermolecular forces. The carbon nanotube array 10 includes a first surface 102 and a second surface 104 opposite the first surface 102. Carbon nanotubes grow on the surface of the growth substrate 20 to form the carbon nanotube array 10. One end of the carbon nanotube adjacent to the growth substrate 20 is defined as the lower end of the carbon nanotube, and the end opposite to the lower end is defined as the upper end of the carbon nanotube. In the growth substrate 20, the first surface 102 is formed with the lower end of the carbon nanotube in the carbon nanotube array 10, and the second surface 104 is formed with the upper end of the carbon nanotube in the carbon nanotube array 10. The first surface 102 of the carbon nanotube array 10 is disposed close to the surface of the growth substrate 20 or on the surface of the growth substrate 20. The first surface 102 is the lower growth end of each carbon nanotube in the carbon nanotube array 10. The second surface 104 is away from the surface of the growth substrate 20 and is the upper growth end of the carbon nanotube array 10.

  By controlling the growth conditions, the carbon nanotube array 10 is essentially free of impurities. The impurities are, for example, amorphous carbon or residual metal particles of the catalyst. Since the carbon nanotube array 10 is basically free of impurities, and the carbon nanotubes are in close contact with each other and have a large intermolecular force between adjacent carbon nanotubes, some carbon nanotubes (carbon nanotubes) When pulling out the segment, the carbon nanotubes adjacent to the part of the carbon nanotube are connected to each other by the action of intermolecular force, and can be pulled out continuously, so that a self-standing structure (for example, carbon nanotube film or carbon A nanotube wire). The carbon nanotube array 10 that is pulled out by connecting the carbon nanotubes at the ends is a super aligned carbon nanotube array. The super-aligned carbon nanotube array is described in Patent Document 1.

  The growth substrate 20 is a substrate suitable for the growth of the super aligned carbon nanotube array, and the material thereof is, for example, P-type silicon, N-type silicon, or silicon oxide.

  The carbon nanotube structure 40 drawn out from the carbon nanotube array 10 includes a plurality of carbon nanotubes connected at the ends. Specifically, the carbon nanotube structure 40 may be a carbon nanotube film. The carbon nanotube film is a self-supporting structure, and includes a plurality of carbon nanotubes arranged basically in the same direction. Referring to FIG. 2, a plurality of carbon nanotubes in the carbon nanotube film are arranged along the same direction. The extending direction of the plurality of carbon nanotubes is basically parallel to the surface of the carbon nanotube film. The plurality of carbon nanotubes are connected by intermolecular force. Specifically, each carbon nanotube in the plurality of carbon nanotubes is connected to the adjacent carbon nanotubes in the extending direction and the ends thereof by intermolecular force, so that the carbon nanotube film can realize a self-supporting structure. Further, the carbon nanotube film can include a plurality of carbon nanotube segments. The plurality of carbon nanotube segments are connected to each other by an intermolecular force along the long axis direction. Each carbon nanotube segment includes a plurality of carbon nanotubes connected in parallel to each other by intermolecular force. In a single carbon nanotube segment, the lengths of the plurality of carbon nanotubes are the same.

  The carbon nanotube film also includes a small number of random carbon nanotubes. However, since most of the carbon nanotubes are arranged along the same direction, the extending direction of the random carbon nanotubes does not affect the extending direction of most of the carbon nanotubes. Specifically, a large number of carbon nanotubes in the carbon nanotube film are slightly curved rather than absolutely linear. Or, it may not be completely arranged in the extending direction and may be slightly shifted. Accordingly, among a large number of carbon nanotubes arranged along the same direction, adjacent carbon nanotubes may partially contact each other. In practice, the carbon nanotube film has a plurality of voids, that is, voids between adjacent carbon nanotubes. Thereby, the carbon nanotube film has excellent transparency. And the intermolecular force of the part which the adjacent carbon nanotubes contact, and the intermolecular force of the part connected by an end can maintain the self-supporting structure of a carbon nanotube film. The thickness of the carbon nanotube film is 0.5 nm to 100 μm, preferably 0.5 nm to 10 μm. When the width of the carbon nanotube structure 40 is small, the carbon nanotube structure 40 is a carbon nanotube wire having a self-supporting structure.

  A self-supporting structure is a form in which a carbon nanotube film can be used independently without using a support material. That is, it means that the carbon nanotube film can be suspended by supporting the carbon nanotube film from opposite sides without changing the structure of the carbon nanotube film or the carbon nanotube wire. Since the carbon nanotubes in the carbon nanotube film or the carbon nanotube wire are connected by intermolecular force, a self-supporting structure is realized.

  A method of pulling out a carbon nanotube film from the carbon nanotube array 10 is disclosed in Patent Document 2.

  The alternative substrate 30 is a solid substrate, and is a soft substrate or a hard substrate. The alternative substrate 30 has a surface on which the carbon nanotube array 10 is installed. When the carbon nanotube array 10 is transferred from the growth substrate 20 to the alternative substrate 30, the carbon nanotube array 10 is placed upside down on the surface of the alternative substrate 30. Further, in the process of transferring the carbon nanotube array 10 from the growth substrate 20 to the alternative substrate 30, the form of the carbon nanotube array 10 is basically maintained, and the carbon nanotube structure 40 is continuously pulled out from the carbon nanotube array 10. Can be guaranteed. That is, the carbon nanotube array 10 maintains the form of a super aligned carbon nanotube array.

  In step (S2), the liquid phase medium 60 is placed on the second surface of the carbon nanotube array 10 in the form of fine droplets or a liquid film. The liquid phase medium 60 is water or a low molecular weight organic solvent. The low molecular weight organic solvent is one of ethyl alcohol, acetone, and methyl alcohol. In order to prevent the liquid phase medium 60 from penetrating the carbon nanotube array 10 and affecting the form of the carbon nanotube array 10, the amount of the liquid phase medium 60 is small. Preferably, the liquid phase medium 60 is a liquid that does not wet the carbon nanotubes, for example, water. The liquid phase medium 60 on the second surface of the carbon nanotube array 10 is composed of a plurality of droplets or a liquid film. The diameter of the droplet and the thickness of the liquid film are 10 m to 300 m, respectively. In the present embodiment, the liquid phase medium 60 is water.

In step (S <b> 2), the shape of the carbon nanotube array 10 is basically maintained, and it is possible to ensure that the carbon nanotube structure 40 is continuously pulled out from the carbon nanotube array 10. The alternative substrate 30 applies as little pressure (f) to the carbon nanotube array 10 as possible. When the alternative substrate 30 applies pressure to the carbon nanotube array 10, the applied pressure is small. The magnitude of the pressure is selected so that the shape of the carbon nanotube array 10 can be maintained and the carbon nanotube structure 40 is continuously pulled out from the carbon nanotube array 10. Preferably, the pressure is 0 <f <2 N / cm ² . When pressure is applied to the carbon nanotube array 10, the carbon nanotubes in the carbon nanotube array 10 are basically perpendicular to the surface of the growth substrate 20.

  In step (S2), the layered liquid phase medium 60 is formed on the surface of the alternative substrate 30 (S21), and the surface of the alternative substrate 30 on which the liquid phase medium 60 is formed is formed on the surface of the carbon nanotube array 10. Contacting with the second surface 104 (S22).

  In step (S <b> 21), the liquid phase medium 60 is formed into droplets, or the liquid phase medium 60 is atomized and sprayed on the surface of the alternative substrate 30.

  In step (S3), the liquid phase medium 60 placed between the alternative substrate 30 and the second surface 104 of the carbon nanotube array 10 is solidified into a solid medium 60 '. Specifically, the temperature is lowered below the freezing point of the liquid phase medium 60. Since the alternative substrate 30 and the carbon nanotube array 10 come into contact with the liquid phase medium 60, after the liquid phase medium 60 is solidified, the alternative substrate 30 and the carbon nanotube array 10 are tightly coupled. In order to more closely bond the alternative substrate 30 to the carbon nanotube array 10, the material of the alternative substrate 30 is preferably a material that wets the liquid phase medium 60. In this embodiment, the temperature is lowered below the freezing point of water to solidify the water into ice.

  Referring to FIG. 3, in one example, the temperature of the laminated structure composed of the alternative substrate 30, the liquid phase medium 60, the carbon nanotube array 10, and the growth substrate 20 is lowered to a freezing point or lower in the low temperature box 70. . The cold box 70 is a freezer compartment of a refrigerator. In the present embodiment, the temperature of the laminated structure composed of the alternative substrate 30, the liquid phase medium 60, the carbon nanotube array 10, and the growth substrate 20 is lowered below the freezing point in the low temperature box 70.

  Referring to FIG. 4, in another example, the liquid phase medium 60 can be changed to a solid medium 60 'by step (S2). When the liquid phase medium 60 is placed on the second surface 104 of the carbon nanotube array 10, first, the temperature of the alternative substrate 30 is lowered below the freezing point. Next, the alternative substrate 30 whose temperature has been lowered below the freezing point is brought into contact with the second surface 104 of the carbon nanotube array 10 having the liquid phase medium 60. Specifically, the temperature of the low temperature box 70 is lowered below the freezing point, and the alternative substrate 30 is taken out after a specific time is placed in the low temperature box 70. The temperature of the alternative substrate 30 can change the liquid phase medium 60 on the second surface 104 of the carbon nanotube array 10 to a solid medium 60 ′. Thereby, in the step (S3), it is not necessary to place the laminated structure including the alternative substrate 30, the liquid phase medium 60, the carbon nanotube array 10 and the growth substrate 20 in the low temperature box 70.

  In step (S 2), the carbon nanotube array 10 is bonded to the alternative substrate 30 and separated from the growth substrate 20. Preferably, all the carbon nanotubes in the carbon nanotube array 10 are detached from the growth substrate 20 at the same time. That is, the movement direction of at least one of the alternative substrate 30 and the growth substrate 20 is perpendicular to the surface of the growth substrate 20 on which the carbon nanotubes grow, and the carbon nanotubes in the carbon nanotube array 10 are moved along the growth direction of the carbon nanotubes. To be detached from the growth substrate 20. When the alternative substrate 30 and the growth substrate 20 move together, the moving direction of both is perpendicular to the surface of the growth substrate 20 on which the carbon nanotubes grow.

  In step (S5), by increasing the temperature, the solid medium 60 ′ is dissolved in the liquid phase medium 60 and the liquid phase medium 60 is dried, or the solid medium 60 ′ is directly sublimated. The solid medium 60 ′ is removed. The process of removing the solid medium 60 ′ does not affect the shape of the carbon nanotube array 10. Since the solid medium 60 'has a small thickness, after the solid medium 60' is removed, the carbon nanotube array 10 can come into contact with the surface of the alternative substrate 30 and is bonded by intermolecular force. In this embodiment, ice is dissolved in water and dried, or ice is sublimated directly to remove the ice.

  In order to ensure that the carbon nanotube structure 40 is continuously pulled out from the carbon nanotube array 10 after removing the solid medium 60 ′, the carbon nanotube array 10 is processed from step (S 1) to step (S 5). It is necessary to basically maintain the form.

  When the carbon nanotube structure 40 is pulled out from the carbon nanotube array 10, since the bonding force between the alternative substrate 30 and the carbon nanotube array 10 is small, the carbon nanotubes in the carbon nanotube array 10 may be pulled out end to end. The carbon nanotube structure 40 can be formed. In the method for transferring the carbon nanotube array 10 according to the present invention, in the step of transferring the carbon nanotube array 10, the bonding force between the carbon nanotube array 10 and the alternative substrate 30 is increased by the solid medium 60 ′ to The array 10 is separated from the growth substrate 20. In addition, before pulling out the carbon nanotube structure 40, the solid medium 60 ′ can be removed, and the bonding force between the carbon nanotube array 10 and the alternative substrate 30 can be continuously pulled out. Reduce by. Thereby, the material of the alternative substrate 30 is not limited, and is a soft material or a hard material. For example, one of metal, glass, quartz, silicon, silicon dioxide, plastic, resin, polymethyl methacrylate, and polyethylene terephthalate.

(Embodiment 2)
Referring to FIG. 5, a method for manufacturing the carbon nanotube structure 40 of the present invention is provided. The method of manufacturing the carbon nanotube structure 40 includes the steps (S1) and (S5), and further includes a step (S6) of extracting the carbon nanotube structure 40 from the carbon nanotube array 10 on the alternative substrate 30.

  The difference between the step (S6) and the step of extracting the carbon nanotube structure from the conventional carbon nanotube array is as follows. The carbon nanotube structure 40 is drawn from the carbon nanotube array 10 transferred to the alternative substrate 30, and is not directly drawn from the carbon nanotube array 10 grown on the growth substrate 20. Preferably, the carbon nanotube structure 40 is drawn from the carbon nanotube array 10 placed upside down on the surface of the alternative substrate 30. That is, the carbon nanotube structure 40 is pulled out from the lower growth portion of the carbon nanotube array 10.

  Step (S6) is a step of selecting a part of the carbon nanotube segments in the carbon nanotube array 10 placed on the surface of the alternative substrate 30 with the pulling tool 50 (S61), and moving the pulling tool 50 to specify A carbon nanotube segment selected at a speed of, and a plurality of carbon nanotube segments connected at the ends are pulled out to form a continuous carbon nanotube structure 40 (S62).

  In the step (S61), when pulling out the carbon nanotube film, an adhesive tape having a specific width or a strip having an adhesive is adopted, brought into contact with the carbon nanotube array 10, and a carbon nanotube segment having a specific width is selected. When pulling out the carbon nanotube wire, a narrow carbon nanotube segment is selected by a narrow tool (tweezers). In the step (S62), the direction in which the selected carbon nanotube segment is pulled out forms an angle α with the growth direction of the carbon nanotubes in the carbon nanotube array 10. The angle α is 0 ° to 90 ° (not including 0 °), and preferably 30 ° to 90 °.

  Step (S4) is different from step (S6). The step (S4) aims to be able to detach the entire carbon nanotube array 10 from the growth substrate 20 and maintain the form of the carbon nanotube array 10 after the carbon nanotube array 10 is detached from the growth substrate 20. The step (S6) aims to pull out the carbon nanotube film or the carbon nanotube wire from the carbon nanotube array 10. Therefore, the entire carbon nanotube array 10 is not detached from the alternative substrate 30, but some carbon nanotubes, for example, carbon nanotube segments are detached from the alternative substrate 30, and the extracted carbon nanotube segments move adjacent carbon nanotube segments, Adjacent carbon nanotube segments are connected end to end and pulled out, and are successively detached from the alternative substrate 30.

  The carbon nanotube array transfer method and the carbon nanotube structure manufacturing method of the present invention have the following advantageous effects. A simple process of spraying and freezing the liquid phase medium allows the carbon nanotube array to be firmly bonded to the alternative substrate, the material of the alternative substrate is not limited, and after removing the solid medium, the carbon nanotube array is carbonized. Nanotube structures can be pulled out. Thus, in the process of growing the carbon nanotube array and the process of extracting the carbon nanotube structure from the carbon nanotube array, the process of setting the carbon nanotube array on a different substrate from the growth substrate and extracting the carbon nanotube structure from the carbon nanotube array. The substrate on which the carbon nanotube array is installed can be made of a low cost material, and the carbon nanotube array producer can transfer the carbon nanotube array to an alternative substrate, and provide the user with both the carbon nanotube array and the alternative substrate. Costly growth substrates can be recovered quickly, simplifying the production process. Therefore, the method for transferring a carbon nanotube array and the method for producing a carbon nanotube structure of the present invention are advantageous for industrial application to a carbon nanotube film and a carbon nanotube wire. To do.

DESCRIPTION OF SYMBOLS 10 Carbon nanotube array 102 1st surface 104 2nd surface 20 Growth substrate 30 Alternative substrate 40 Carbon nanotube structure 50 Pulling tool 60 Liquid state medium 60 'Solid medium 70 Low temperature box

Claims (2)

A first step of providing an alternative substrate and a growth substrate, comprising a carbon nanotube array on a surface of the growth substrate, wherein the surface adjacent to the growth substrate is the first surface; A surface opposite the surface is a second surface, and the form of the carbon nanotube array ensures that the carbon nanotube structure is continuously drawn from the carbon nanotube array, a first step;
Placing the substitute substrate on the second surface of the carbon nanotube array and providing a liquid phase medium between the substitute substrate and the second surface of the carbon nanotube array;
Third, the temperature is lowered below the freezing point of the liquid phase medium, and the liquid phase medium placed between the alternative substrate and the second surface of the carbon nanotube array is solidified into a solid medium. Steps,
Moving at least one of the substitute substrate and the growth substrate to separate the substitute substrate and the growth substrate, detaching the carbon nanotube array from the growth substrate, and transferring to the substitute substrate; Steps,
A fifth step of removing the solid medium between the alternative substrate and the second surface of the carbon nanotube array by increasing the temperature, after removing the solid medium, The form of the array comprises a fifth step ensuring that the carbon nanotube structure is continuously withdrawn from the carbon nanotube array;
The method of transferring a carbon nanotube array, wherein the carbon nanotube structure includes a plurality of carbon nanotubes connected at ends. A first step of providing a first substrate and a second substrate, comprising a carbon nanotube array on a surface of the first substrate, wherein the surface adjacent to the first substrate is the first surface; The first step is to ensure that the surface opposite the first surface is a second surface, and the form of the carbon nanotube array continuously pulls the carbon nanotube structure from the carbon nanotube array;
Placing the second substrate on the second surface of the carbon nanotube array and providing a liquid phase medium between the second substrate and the second surface of the carbon nanotube array;
Reducing the temperature below the freezing point of the liquid phase medium, and solidifying the liquid phase medium disposed between the second substrate and the second surface of the carbon nanotube array into a solid medium; Three steps,
Moving at least one of the second substrate and the first substrate to separate the second substrate from the first substrate, detaching the carbon nanotube array from the first substrate; A fourth step to transfer to the substrate;
A fifth step of removing the solid medium between the second substrate and the second surface of the carbon nanotube array by raising the temperature, and after removing the solid medium, A nanotube array configuration ensures that the carbon nanotube structure is continuously withdrawn from the carbon nanotube array, a fifth step;
A sixth step of extracting a carbon nanotube structure from the carbon nanotube array transferred to the second substrate,
The method of manufacturing a carbon nanotube structure, wherein the carbon nanotube structure includes a plurality of carbon nanotubes connected at ends.