JP5903236B2 - Device for detecting disturbances - Google Patents

Description

  The present invention relates to an apparatus for detecting disturbances such as sound and vibration.

  For example, various processing apparatuses used for manufacturing semiconductor devices and the like include means for driving a holding unit for holding a workpiece, means for driving a processing unit for processing a workpiece, means for conveying the workpiece, etc. And a control unit for controlling each of the drive units and a personal computer for exchanging information with the control unit. Then, processing is performed in which information necessary for the operation of the apparatus is sent from the personal computer to the control means, or the personal computer receives log data indicating the state of the apparatus from the control means (for example, see Patent Document 1). .

JP 2003-326458 A

  However, in factories where various devices are installed, there is a problem in that the control of various means constituting the device may become abnormal due to disturbance caused by vibrations and sounds generated by the surrounding environment including other devices and facilities. doing.

  When the resonance occurs because the natural frequency of the hard disk drive provided in the personal computer and the frequency of the disturbance are close to each other, the inventor does not properly operate the head unit for reading / writing the disk in the hard disk drive. As a result, the head portion is no longer positioned at a desired position on the disk, and information cannot be read from the disk.

  However, there is no way to check the natural frequency of a hard disk drive because the manufacturer keeps it secret. In order to investigate by itself, it is necessary to find the resonance frequency by continuously applying a sound in a wide frequency band to the hard disk drive, and it is also necessary to investigate the frequency of the target that may cause disturbance. Requires a lot of effort.

  The present invention has been considered in view of such problems, and an object of the present invention is to enable detection in advance of disturbances that cause abnormalities in the control of various driving means constituting the apparatus due to resonance.

The present invention relates to various drive means, control means for controlling the various drive means, a personal computer having at least a memory and a hard disk drive, and exchanging information with the control means, and a monitor connected to the personal computer. A device configured to cut off information exchange between the control unit and the personal computer before generating the disturbance and testing the disturbance, a hard disk drive and a memory provided in the personal computer, The amount of information exchanged between the hard disk drive and the memory is displayed on the monitor with a disturbance detection system comprising communication instruction means for communicating a certain amount of information between Disturbance is detected by the decrease of.

  In the present invention, since a certain amount of information is communicated between the hard disk drive and the memory, the amount of communication of information is reduced when a disturbance occurs, so that the disturbance can be detected. Therefore, it is possible to detect a disturbance that causes an abnormality in the control of the various drive means before causing the abnormality. Also, it is efficient because there is no need to check the natural frequency of the hard disk drive or the frequency of the target that may be a disturbance.

It is a block diagram which shows an example of the apparatus which detects a disturbance. It is explanatory drawing which shows the example by which the result of the test | inspection for disturbance detection was displayed on the monitor.

  The apparatus 1 shown in FIG. 1 includes a first means 11, a second means 12, a third means 13,..., An n-th means 1n, which are various drive means for realizing functions necessary for the apparatus. These drive means are controlled by the control means 2. Each driving means includes a driver for rotating the motor, sensors for monitoring various values, and the like.

  The control means 2 is connected to a personal computer (PC) 4 mounted on the apparatus 1 via the switch unit 3. A monitor 5 is connected to the PC 4. In a state in which the control means 2 and the PC 4 are electrically connected, the control means 2 receives information from the PC 4 to control each driving means, and the PC 4 controls the status of each driving means from the control means 2. It is possible to perform control or display on the monitor 5 by providing the log information regarding. The switch unit 3 can electrically control the connection by turning on / off the transistor, etc., and can switch between a connected state and a non-connected state by a command from the blocking unit 6 and block information exchange. The PC 4 performs display processing of the monitor 5, log management, instructions to the control means 2, communication with an external optional device, and the like.

  The PC 4 includes at least a CPU 40, a memory 41, and a hard disk drive (HDD) 42. The HDD 42 includes a disk 420 on which data is recorded, and a head unit 421 that writes information to the disk 420 and reads information from the disk 420. The CPU 40, the memory 41, and the head unit 421 are connected to each other via an internal bus and can transfer data.

  The PC 4 is provided with communication instruction means 43 for communicating a certain amount of information between the memory 41 and the HDD 42. Normally, some information is always exchanged between the memory 41 and the HDD 42. However, the communication instruction unit 43 stops the exchange of the normal information and forcibly keeps it constant separately from the normal information. Only the amount of information is transferred from the memory 41 to the HDD 42 or from the HDD 42 to the memory 41. While data transfer is being performed between the memory 41 and the HDD 42 under the control of the communication instruction means 43, the CPU 40 can monitor the data transfer amount and display it on the monitor 5. The communication instruction means 43 can be activated by operating an input means such as a keyboard or a mouse provided in the PC 4, for example.

  For example, when the apparatus 1 is introduced into a factory or when the installation environment of the apparatus 1 is changed, in order to operate the apparatus 1 normally, by confirming the occurrence of a disturbance and specifying the occurrence location, the apparatus 1 1 to prevent troubles from occurring. Specifically, it is inspected whether the HDD 42 of the PC 4 is functioning normally.

(1) Function stop step Since the HDD 42 is always accessed during normal operation of the PC 4, for example, first, the PC 4 configuring the device 1 is set to the sleep mode, and all the driving means of the device 1 are stopped. Power is supplied only to the PC 4.

(2) Write step The communication instructing means 43 is activated to start communication of information between the memory 41 and the disk 420 of the HDD 42. The information may be only one-way communication transferred from one to the other, or may be two-way communication. The communication instructing unit 43 executes a pseudo-write program in the CPU 40 to make the data transfer amount per unit time between the memory 41 and the HDD 42 constant. Before starting the communication instruction unit 43, the blocking unit 6 is operated to turn off the switch unit 3, that is, the control unit 2 and the PC 4 are not electrically connected.

(3) Monitor start step The CPU 40 executes a monitoring program for monitoring the amount of data transferred between the memory 41 and the HDD 42. For example, if the operating system of the PC 4 is Windows (registered trademark), a data transfer amount can be confirmed by activating a function called a performance monitor that is provided as standard in Windows (registered trademark).

(4) Disturbance generation step Next, a disturbance is actually generated by operating other devices and equipment such as a factory in which the device 1 is installed. As disturbances, there are those that generate sounds, vibrations, etc., such as valve opening and closing sounds and buzzers in surrounding devices and equipment, which are generated one by one.

(5) Confirmation Step As shown in FIG. 2, the data transfer amount between the memory 41 and the HDD 42 is analyzed by the CPU 40 by a graph with the horizontal axis representing time and the vertical axis representing transfer information amount, and is displayed on the monitor 5. The Since the amount of data is kept constant by an instruction from the communication instruction unit 43, the graph extends in parallel with the horizontal axis if there is no disturbance and resonance with the HDD.

  On the other hand, when the disturbance and the HDD 42 resonate, the amount of transfer information decreases as shown in the center of the graph of FIG. Therefore, the disturbance occurring at that time can be determined to be a disturbance that resonates with the disk 420 or the head portion 421 of the HDD 42 and adversely affects the operation of the HDD 42. If all the disturbances are tested and the amount of transfer information does not change, it can be determined that resonance does not occur in the environment and the apparatus 1 including the PC 4 operates normally without any problem.

  When a disturbance that adversely affects the operation of the head unit 421 is detected in this way, the control unit 2 and the PC 4 are electrically disconnected by the blocking unit 6, and various abnormalities in the HDD 42 are detected. It does not affect the driving means, and it is possible to avoid the occurrence of abnormality in various driving means. In addition, all the other devices and facilities in the factory where the device 1 is installed are operated to inspect the influence of the disturbance, and when there is the influence of the disturbance, the sound and vibration are generated one by one and inspected. It may be.

  As described above, since the blocking means 6 and the communication instruction means 43 function as a disturbance detection system and the disturbance causing resonance with the HDD 42 is confirmed, the disturbance during operation of the apparatus 1 is confirmed. If no occurrence occurs, no abnormality due to disturbance will occur in the apparatus 1.

1: devices 11, 12, 13,..., 1n: various driving means 2: control means 3: switch unit 4: personal computer (PC)
40: CPU 41: Memory 42: Hard disk drive (HDD) 420: Disk 421: Head unit 43: Communication instruction means 5: Monitor 6: Blocking means

Claims (1)

At least from various drive means, control means for controlling the various drive means, a personal computer having at least a memory and a hard disk drive, and exchanging information with the control means, and a monitor connected to the personal computer A configured device comprising:
A blocking means for blocking the exchange of information between the control means and the personal computer before generating a disturbance and testing for the disturbance, and a certain amount between the hard disk drive and the memory provided in the personal computer; A communication instruction means for communicating information, and a disturbance detection system comprising:
An apparatus for detecting a disturbance by a decrease in the amount of information exchanged between the hard disk drive and the memory so that the amount of information exchanged between the hard disk drive and the memory is displayed on the monitor.

Images