JP5885409B2 - Scale protection structure for displacement detection scale - Google Patents

Scale protection structure for displacement detection scale Download PDF

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JP5885409B2
JP5885409B2 JP2011141011A JP2011141011A JP5885409B2 JP 5885409 B2 JP5885409 B2 JP 5885409B2 JP 2011141011 A JP2011141011 A JP 2011141011A JP 2011141011 A JP2011141011 A JP 2011141011A JP 5885409 B2 JP5885409 B2 JP 5885409B2
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scale
cover glass
height defining
defining portion
substrate
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JP2013007676A (en
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川田　洋明
洋明 川田
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Mitutoyo Corp
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Priority to CN201210208247.3A priority patent/CN102840872B/en
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Description

本発明は、変位検出用スケールの目盛保護構造に係り、特にスケールに起因してリニアエンコーダ、円弧エンコーダ及びロータリーエンコーダ等に発生する出力変動を低減する際に適用して好適な変位検出用スケールの目盛保護構造に関する。 The present invention relates to a scale protection structure for a displacement detection scale, and more particularly to a displacement detection scale that is suitable for application when reducing output fluctuations generated in a linear encoder, arc encoder, rotary encoder, etc. due to the scale. It relates to the scale protection structure.

従来、例えばリニアエンコーダは、図１にその概要を示すように、スケール１０と、これに対向配置された検出器２０とを備えており、該スケール１０を両矢印で示す測定方向に移動させることによりスケール１０と検出器２０の相対変位を検出している。   Conventionally, for example, a linear encoder includes a scale 10 and a detector 20 disposed so as to face the scale 10 as shown in FIG. 1 and moves the scale 10 in a measurement direction indicated by a double arrow. Thus, the relative displacement between the scale 10 and the detector 20 is detected.

このようなエンコーダを構成する従来のスケール１０は、ガラス製のスケール基板１２の一主面に成膜技術により目盛部１４がパターン形成されている。   In the conventional scale 10 constituting such an encoder, a scale portion 14 is patterned on one main surface of a glass scale substrate 12 by a film forming technique.

このように、主にガラスでできたスケール１０に検出器２０を対面させて使用するエンコーダには、スケール１０上の目盛部１４をキズや汚れから保護するために、図示されているようにカバーガラス１６を、該スケール１０に接着して一体化したものがある。   In this way, the encoder used with the detector 20 facing the scale 10 mainly made of glass has a cover as shown in order to protect the scale portion 14 on the scale 10 from scratches and dirt. There is one in which the glass 16 is bonded and integrated with the scale 10.

特開２００２−３１８１３７号公報JP 2002-318137 A

しかしながら、前記のようにカバーガラス１６をスケール１０に接着して一体化させるために、図２に模式的に示すように、カバーガラス１６を目盛部１４の上面部に形成した接着層（剤）１８の上に配置して接着する場合、図中幅方向とは直交する前記測定（移動）方向に存在する接着剤の厚さのむらにより、検出器２０から検出値として出力されるエンコーダ出力の変動の原因となるという問題があった。   However, in order to adhere and integrate the cover glass 16 to the scale 10 as described above, an adhesive layer (agent) in which the cover glass 16 is formed on the upper surface portion of the scale portion 14 as schematically shown in FIG. In the case of arranging and adhering to 18, the fluctuation of the encoder output outputted as the detection value from the detector 20 due to the uneven thickness of the adhesive existing in the measurement (movement) direction orthogonal to the width direction in the figure. There was a problem of causing.

なお、特許文献１には、基板上にパターン形成したスケール電極（目盛部）の上にコーティング層を形成することにより、有害なクーラントや油等がスケール電極側へ浸入することを防止する技術が開示されているが、このスケール構造でもコーティング層とカバーガラスに対応するスケールカバーとの接合には接着剤を使用しているため、同様の問題が存在する。   Patent Document 1 discloses a technique for preventing harmful coolant, oil, or the like from entering the scale electrode side by forming a coating layer on the scale electrode (scale portion) patterned on the substrate. Although disclosed, this scale structure also has a similar problem because an adhesive is used for joining the coating layer and the scale cover corresponding to the cover glass.

本発明は、前記従来の問題点を解決するべくなされたもので、カバーガラスを目盛部に接着する接着剤の厚さむらに起因するエンコーダの出力変動を防止することができる変位検出用スケールの目盛保護構造を提供することを課題とする。 The present invention has been made to solve the above-described conventional problems, and is a displacement detection scale that can prevent output fluctuation of an encoder due to uneven thickness of an adhesive that bonds a cover glass to a scale portion. It is an object to provide a scale protection structure.

本発明は、スケール基板上に検出器との相対移動方向に沿って形成された目盛部が、その上面側に配されたカバーガラスで保護された変位検出用スケールの目盛保護構造において、前記カバーガラスが、前記目盛部の周囲に配設された高さ規定部を介して、前記スケール基板上に支持され、前記高さ規定部が、前記カバーガラスの下面に、前記目盛部の全周囲に対応するパターンで連続した同一厚さに予め成膜形成され、且つ、その下端が前記スケール基板の上面に当接され、更に、前記スケール基板と前記カバーガラスとが、前記高さ規定部の周囲に配置した接着剤で接合されているようにしたことにより、前記課題を解決したものである。 The present invention provides a scale protection structure for a displacement detection scale in which a scale portion formed along a relative movement direction with respect to a detector on a scale substrate is protected by a cover glass disposed on the upper surface thereof. glass, through the height defining portion disposed around the scale portion, said supported on the scale substrate, said height defining portion, the lower surface of the cover glass, the entire circumference of the graduation The film is formed in advance in the same thickness with a corresponding pattern, and the lower end of the film is in contact with the upper surface of the scale substrate. Further, the scale substrate and the cover glass are arranged around the height defining portion. The above-mentioned problems are solved by being bonded with an adhesive disposed in the above.

本発明は、前記接着剤を、前記高さ規定部の全周囲に配置することができ、又、前記高さ規定部と前記目盛部を同種の金属で形成することができ、更に、前記高さ規定部を、クロム、銅又はアルミニウムからなる金属で形成することができる。 According to the present invention, the adhesive can be disposed all around the height defining portion, and the height defining portion and the scale portion can be formed of the same kind of metal. The thickness defining portion can be formed of a metal made of chromium, copper, or aluminum.

本発明によれば、カバーガラスを、その下面に形成した高さ規定部を介してスケール基板上に支持するようにしたので、目盛部とカバーガラスとの間から接着剤（層）を除外できることから、接着剤の厚さむらに起因する目盛部とスケールカバーとの間の隙間（間隔）のばらつきを排除できるため、該隙間を一定にすることが可能となり、変位検出用スケールのエンコーダ出力を安定させることが可能となる。 According to the present invention, since the cover glass is supported on the scale substrate via the height defining portion formed on the lower surface, the adhesive (layer) can be excluded from between the scale portion and the cover glass. Therefore, it is possible to eliminate the variation in the gap (interval) between the scale portion and the scale cover due to the uneven thickness of the adhesive, so that the gap can be made constant, and the encoder output of the displacement detection scale can be reduced. It becomes possible to stabilize.

従来のエンコーダの概要を示す概略断面図Schematic sectional view showing the outline of a conventional encoder 従来のエンコーダに使用されるスケール構造を模式的に示す横断面図Cross-sectional view schematically showing the scale structure used in a conventional encoder 本発明に係る一実施形態のスケール構造を模式的に示す横断面図The cross-sectional view which shows typically the scale structure of one Embodiment which concerns on this invention 前記実施形態のスケール構造の製造工程の特徴を示す、図３に対応する断面図Sectional drawing corresponding to FIG. 3 which shows the characteristics of the manufacturing process of the scale structure of the said embodiment. 前記実施形態のスケール構造を模式的に示す、途中を省略した平面図The top view which abbreviate | omitted the middle typically showing the scale structure of the said embodiment

以下、図面を参照して、本発明の実施の形態について詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

図３は、本発明に係る一実施形態のスケール構造を模式的に示す、前記図２に相当する横断面図であり、図４はその製造工程の特徴を示す対応断面図である。   FIG. 3 is a cross-sectional view corresponding to FIG. 2 schematically showing a scale structure of an embodiment according to the present invention, and FIG. 4 is a corresponding cross-sectional view showing the characteristics of the manufacturing process.

本実施形態のスケール１０は、前記図２に示した従来のものと同様に、ガラス製のスケール基板１２上にスパッタリングやめっき等の通常の成膜技術によりパターン形成された目盛部１４と、該目盛部１４を保護するためにその上面（表面）側に配設されたカバーガラス１６とを備えている。   The scale 10 according to the present embodiment is similar to the conventional one shown in FIG. 2 in that the scale portion 14 is formed by patterning on a glass scale substrate 12 by a normal film forming technique such as sputtering or plating, In order to protect the scale part 14, the cover glass 16 arrange | positioned by the upper surface (surface) side is provided.

本実施形態においては、前記高さ規定部３０は、支持前の状態を図４に示すように、前記カバーガラス１６の図中下面に、前記目盛部１４の周囲に対応するパターンに予め成膜形成されている。次いで、この状態のカバーガラス１６を矢印方向に下降させ、高さ規定部３０の下端をスケール基板１２の上面に当接させた該カバーガラス１６を、前記目盛部１４の周囲に配設された高さ規定部３０を介して前記スケール基板１２上に支持させる。その後、更に、前記スケール基板１２と前記カバーガラス１６とを、前記高さ規定部３０の全周囲に接着剤を封止して形成した接着層３２により接合する。   In the present embodiment, the height defining portion 30 is formed in advance in a pattern corresponding to the periphery of the scale portion 14 on the lower surface of the cover glass 16 in the figure as shown in FIG. Is formed. Next, the cover glass 16 in this state is lowered in the direction of the arrow, and the cover glass 16 in which the lower end of the height defining portion 30 is brought into contact with the upper surface of the scale substrate 12 is disposed around the scale portion 14. It is supported on the scale substrate 12 via the height defining portion 30. Thereafter, the scale substrate 12 and the cover glass 16 are further bonded together with an adhesive layer 32 formed by sealing an adhesive around the entire height defining portion 30.

前記高さ規定部３０は、測定方向の途中を省略した図５の平面図に示すように、前記目盛部１４を取り囲む全周囲に対応する前記カバーガラス１６の下面に、連続した形状で、且つ、図示は省略するが同一高さ（厚さ）に形成されている。このように連続した同一高さにすることにより、目盛部１４に対する高い密着性を確保することができる。従って、その周囲の接着剤の封止を容易に行うことができる。 The height defining portion 30 has a continuous shape on the lower surface of the cover glass 16 corresponding to the entire circumference surrounding the scale portion 14, as shown in the plan view of FIG. Although not shown, they are formed at the same height (thickness). Thus, the high adhesiveness with respect to the scale part 14 is securable by making it the same continuous height. Therefore, the surrounding adhesive can be easily sealed .

この高さ規定部３０は、前記目盛部１４が主にクロム（Ｃｒ）、銅（Ｃｕ）、アルミニウム（Ａｌ）等を成膜することで形成されている場合には、該目盛部１４を保護するための前記カバーガラス１６にも、それぞれ同種のクロム、銅、アルミニウム等の金属で、目盛部１４を若干超える厚さの成膜パターンを形成し、前記のような所定位置に配置した形状にすることが、温度変化に対する安定性を確保するうえでも有効である。   The height defining portion 30 protects the scale portion 14 when the scale portion 14 is formed mainly by depositing chromium (Cr), copper (Cu), aluminum (Al), or the like. The cover glass 16 is also made of the same kind of metal such as chrome, copper, aluminum, etc., and a film formation pattern having a thickness slightly exceeding the scale portion 14 is formed and arranged in the predetermined position as described above. It is also effective to secure stability against temperature changes.

ここで、前記目盛部１４の好適な厚さとしては１００ｎｍ〜３０μｍを、前記高さ規定部３０の好適な厚さとしては、カバーガラス１６と目盛部１４との隙間が、３０ｎｍ〜０．１ｍｍ程度となる厚さを、それぞれ挙げることができる。但し、それぞれ適用するエンコーダの特性により異なる。   Here, as a suitable thickness of the scale part 14, 100 nm to 30 μm, and as a suitable thickness of the height defining part 30, a gap between the cover glass 16 and the scale part 14 is 30 nm to 0.1 mm. The thickness which becomes a grade can be mentioned, respectively. However, it depends on the characteristics of the encoder to be applied.

このように、スケール基板１２やカバーガラス１６に形成する成膜パターンの厚みむらは、一般的に１０ｎｍ〜５０ｎｍ程度であることから、目盛部１４はもとより高さ規定部３０も非常に安定した厚さで形成することができる。しかも、高さ規定部３０をスケール基板１２上に支持するために、スケール基板１２と高さ規定部３０の間及び高さ規定部３０とカバーガラス１６の間のいずれにも接着剤を使用していない。従って、測定（移動）方向における目盛部１４とカバーガラス１６との隙間のばらつきを大きく低減でき、しかも両者間から前記図２の接着層１８を排除できることから、その厚さのむらに起因するエンコーダ出力の変動を確実に防止することが可能となる。   Thus, since the thickness unevenness of the film formation pattern formed on the scale substrate 12 and the cover glass 16 is generally about 10 nm to 50 nm, the thickness defining portion 30 as well as the scale portion 14 has a very stable thickness. Can be formed. Moreover, in order to support the height defining portion 30 on the scale substrate 12, an adhesive is used between the scale substrate 12 and the height defining portion 30 and between the height defining portion 30 and the cover glass 16. Not. Accordingly, the variation in the gap between the scale portion 14 and the cover glass 16 in the measurement (moving) direction can be greatly reduced, and the adhesive layer 18 of FIG. It is possible to surely prevent the fluctuations.

また、前記のように接着層３２を高さ規定部３０の全周囲に配設して封止することにより、目盛部１４に対する異物侵入を防止できることから信頼性を確保するうえで好ましいが、そこまでの必要性が無い場合には、該接着層３２を周囲に部分的に配設するようにしてもよい。また、この接着層３２を形成する接着剤としては、通常のアクリル製やエポキシ製等を使用できるが、特に高さ規定部３０の全周囲を封止する場合には、更に信頼性を高めるために、水分やガス分等の目盛劣化成分の浸透を阻害するガラス、セラミック又は金属等の粉末材料を混合した接着剤を使用してもよい。   Further, as described above, the adhesive layer 32 is disposed around the entire height defining portion 30 and sealed, which can prevent foreign matter from entering the scale portion 14. If there is no need for the above, the adhesive layer 32 may be partially disposed around the periphery. In addition, as an adhesive for forming the adhesive layer 32, ordinary acrylic, epoxy, or the like can be used. In particular, when the entire periphery of the height defining portion 30 is sealed, the reliability is further improved. In addition, an adhesive in which a powder material such as glass, ceramic, or metal that inhibits the penetration of scale-degrading components such as moisture and gas may be used.

なお、前記実施形態では、スケール基板１２がガラス製である場合を示したが、これに限定されず、例えば反射型の光電式スケール等の場合はセラミック製や金属製であってもよい。   In the embodiment, the scale substrate 12 is made of glass. However, the present invention is not limited to this. For example, in the case of a reflective photoelectric scale, the scale substrate 12 may be made of ceramic or metal.

また、目盛部１４が直線的な移動を検出するリニアエンコーダ用のスケールを例に説明したが、これに限定されず、円弧上の移動を検出する円弧エンコーダ用、回転の移動を検出するロータリーエンコーダ用のいずれの目盛部が形成されているスケールであってもよい。また、光透過型の光電式スケールのみではなく、前記のように反射型であってもよく、更には静電容量式や磁気式、電磁誘導式などの各種スケールにも適用できることはいうまでもない。   Further, the scale for the linear encoder for detecting the linear movement of the scale unit 14 has been described as an example. It may be a scale on which any scale part is formed. Further, not only the light transmission type photoelectric scale but also the reflection type as described above may be applied to various scales such as a capacitance type, a magnetic type, and an electromagnetic induction type. Absent.

１０…スケール
１２…スケール基板
１４…目盛部
１６…カバーガラス
１８…接着層（剤）
２０…検出器
３０…高さ規定部
３２…接着層（剤） DESCRIPTION OF SYMBOLS 10 ... Scale 12 ... Scale board 14 ... Scale part 16 ... Cover glass 18 ... Adhesive layer (agent)
20 ... Detector 30 ... Height defining part 32 ... Adhesive layer (agent)

Claims (4)

スケール基板上に検出器との相対移動方向に沿って形成された目盛部が、その上面側に配されたカバーガラスで保護された変位検出用スケールの目盛保護構造において、
前記カバーガラスが、前記目盛部の周囲に配設された高さ規定部を介して、前記スケール基板上に支持され、
前記高さ規定部が、前記カバーガラスの下面に、前記目盛部の全周囲に対応するパターンで連続した同一厚さに予め成膜形成され、且つ、その下端が前記スケール基板の上面に当接され、
更に、前記スケール基板と前記カバーガラスとが、前記高さ規定部の周囲に配置した接着剤で接合されていることを特徴とする変位検出用スケールの目盛保護構造。 In the scale protection structure of the scale for detecting displacement, the scale part formed along the relative movement direction with the detector on the scale substrate is protected by the cover glass arranged on the upper surface side thereof.
The cover glass is supported on the scale substrate via a height defining portion disposed around the scale portion,
Said height defining portion, the lower surface of the cover glass, are pre deposited formed in the same thickness which is continuous in a pattern corresponding to the entire periphery of the scale part, and, abutting a lower end to the upper surface of the scale substrate And
Further, the scale protecting structure for a scale for detecting displacement, wherein the scale substrate and the cover glass are joined with an adhesive disposed around the height defining portion. 前記接着剤が、前記高さ規定部の全周囲に配置されていることを特徴とする請求項１に記載の変位検出用スケールの目盛保護構造。 The scale protection structure for a displacement detection scale according to claim 1, wherein the adhesive is disposed all around the height defining portion . 前記高さ規定部と前記目盛部が同種の金属で形成されていることを特徴とする請求項１又は２に記載の変位検出用スケールの目盛保護構造。 The scale protection structure for a displacement detection scale according to claim 1, wherein the height defining portion and the scale portion are formed of the same kind of metal . 前記高さ規定部が、クロム、銅又はアルミニウムからなる金属で形成されていることを特徴とする請求項１乃至３のいずれかに記載の変位検出用スケールの目盛保護構造。   The scale-protecting structure for a displacement detection scale according to any one of claims 1 to 3, wherein the height defining portion is made of a metal made of chromium, copper, or aluminum.
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JP2011141011A JP5885409B2 (en) 2011-06-24 2011-06-24 Scale protection structure for displacement detection scale
US13/524,239 US8739424B2 (en) 2011-06-24 2012-06-15 Structure for protecting scale graduations
EP12172464.5A EP2538180B1 (en) 2011-06-24 2012-06-18 Structure for protecting scale graduations
CN201210208247.3A CN102840872B (en) 2011-06-24 2012-06-19 The scale protection structure of scale

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