JP5883407B2 - Position adjusting jig, machine tool including chuck device including the same, inspection device including chuck device including the same, and deformable member used therefor - Google Patents

Description

  The present invention relates to a position adjusting jig having a deformable member for supporting and positioning a workpiece having a rod-like or tubular portion, a machine tool including a chuck device including the position adjusting jig, and a position adjusting tool. The present invention relates to an inspection device including a chuck device including a jig, and a deformable member used for a position adjusting jig.

  Japanese Examined Patent Publication No. 2-27081 (hereinafter referred to as Patent Document 1) includes a plurality of disc spring-like thin plates as a position adjusting jig including a deformable member that supports and positions a bar or tube. The lathe chuck configuration is described. The plurality of disc spring-like thin plates support an annular workpiece as a pipe member from the outer peripheral surface of the workpiece. Each disc spring-like thin plate has an annular shape.

  In the chuck, a plurality of thin plates are stacked along the axial direction of the workpiece, in other words, along the axial direction of the operating device including the chuck. When a plurality of thin plates support the workpiece, the diameter of the inner edge of each thin plate decreases and the inner edge of each thin plate can clamp the outer peripheral surface of the workpiece. According to the lathe chuck described in Patent Document 1, the dimension in the axial direction of the operating device including the chuck can be made relatively small, so that a workpiece having a small axial dimension can be processed.

JP-B-2-27081

  However, in the lathe chuck described in Patent Document 1, in order to firmly support the workpiece, in other words, it is necessary to use a plurality of thin plates so that a sufficient radial load can be obtained from the thin plates. On the other hand, when using a plurality of thin plates so as to obtain a sufficient radial load, it is necessary to apply a relatively large thrust load to the plurality of thin plates in order to appropriately deform these thin plates.

  The required thrust load increases depending on the number of thin plates and the spring constant. In addition, the radial load obtained for a thrust load having a predetermined weight also increases in accordance with the number of thin plates and the spring constant. Therefore, in the lathe chuck described in Patent Document 1, even when a predetermined amount of thrust load is applied to the thin plate in order to deform each thin plate, the workpiece (work) is tightened more than necessary by a plurality of thin plates. There is a risk of it. Thereby, there exists a possibility of damaging a workpiece | work. On the other hand, when a sufficient thrust load cannot be obtained, the radial load necessary for supporting the workpiece is insufficient. Therefore, when a sufficient thrust load cannot be obtained when a plurality of thin plates support the workpiece, the axis of the workpiece cannot be adjusted appropriately, and centering is difficult.

  Accordingly, an object of the present invention is to provide a position adjusting jig provided with a deformable member capable of appropriately adjusting the axis of the workpiece without damaging a workpiece having a small axial dimension. A machine tool including a chuck device including the same, and an inspection device including the chuck device including the same. Another object of the present invention is to provide a deformable member used for the position adjusting jig.

  The position adjusting jig according to the present invention includes a deformable member, a shaft member, and a pressing portion. The deformable member has a substantially annular shape. The deformable member is for supporting a workpiece having a rod-like or tubular portion. A deformable member is attached to the shaft member. The pressing portion presses the deformable member attached to the shaft member. The deformable member has an inclined portion. The inclined portion is inclined with respect to a direction substantially orthogonal to the axial direction of the shaft member. A plurality of outer slits and a plurality of inner slits are formed in the inclined portion. The outer slit extends along the radial direction of the deformable member from the outer peripheral edge to the inner peripheral edge of the deformable member. The inner slit extends along the radial direction from the inner periphery to the outer periphery of the deformable member.

  In the inclined portion, the same number of outer slits and inner slits are formed. Further, in the inclined portion, the outer slits and the inner slits are alternately arranged at equal intervals along the circumferential direction of the deformable member. When the pressing part presses the deformable member, the outer peripheral edge of the deformable member moves radially outward, and the inner periphery of the deformable member moves radially inward. The deformable member is elastically deformed.

  In the position adjusting jig according to the present invention, when the pressing portion presses the deformable member, the outer peripheral edge moves radially outward, and the inner peripheral edge moves radially inward. The deformable member is elastically deformed so as to move. With such deformation, the deformable member is elastically deformed so that the dimension of each slit is enlarged at the tip of each of the outer and inner slits along the circumferential direction of the deformable member. By arranging the slits at equal intervals along the circumferential direction, the outer peripheral edge sandwiched between the two outer slits adjacent to each other in the deformable member is concentrically circularly outward in the radial direction. The inner peripheral edge between the two inner slits adjacent to each other in the deformable member moves concentrically and radially inward in a substantially equal amount. Thereby, it is possible to form a cylinder that is virtually formed by connecting the surfaces where the deformable member and the workpiece are in contact with each other and that has a relatively high roundness. That is, in the position adjusting jig according to the present invention, the axis of the workpiece can be adjusted appropriately.

  In addition, since the deformable member has a plurality of slits, the deformable member can be easily deformed even with a relatively small thrust load. Even when a relatively small thrust load is applied to the deformable member, the radial loads applied to the workpiece are divided at equal intervals along the circumferential direction by arranging the slits at equal intervals along the circumferential direction. Therefore, the axis of the workpiece can be adjusted appropriately without tightening the workpiece more than necessary. In this way, since a sufficient radial load can be obtained with a relatively small thrust load, there is no possibility that the workpiece is tightened more than necessary by the deformable member, and damage to the workpiece can be prevented.

  Furthermore, the number of contact portions between the deformable member and the workpiece and the area of the contact surface can be increased according to the number of the plurality of outer slits and the number of the plurality of inner slits. Therefore, the weight of the radial load obtained from a predetermined thrust load can be earned. Thus, since a sufficient radial load can be obtained using the deformable member, the axis of the workpiece can be adjusted appropriately. On the other hand, the plurality of outer slits and the plurality of inner slits can increase the number of contact portions between the deformable member and the workpiece and the area of the contact surface. Can be supported. Therefore, in the position adjusting jig according to the present invention, it is possible to appropriately support even a workpiece having a limited dimension in the axial direction and appropriately adjust the axis of the workpiece.

  By doing so, it is possible to provide a position adjusting jig including a deformable member capable of appropriately adjusting the axis of the workpiece without damaging a workpiece having a small axial dimension. it can.

  In addition, since it is possible to appropriately adjust the axis of the workpiece without using a large number of deformable members, it is possible to provide a relatively inexpensive jig for position adjustment, and the jig for position adjustment. Can be reduced in weight. Further, since the plurality of slits are formed, the deformable member and the position adjusting jig can be reduced in weight.

  The position adjusting jig according to the present invention preferably includes a plurality of deformable members.

  According to this configuration, the number of contact portions between the deformable member and the workpiece and the area of the contact surface can be increased according to the number of deformable members. Therefore, the weight of the radial load obtained from a predetermined thrust load can be earned.

  In the position adjusting jig according to the present invention, the number of outer slits in each deformable member is preferably the same. The number of inner slits in each deformable member is preferably the same. In the position adjusting jig according to the present invention, preferably, a plurality of outer slits in one deformable member substantially coincide with the inner slit positions in another adjacent deformable member. The deformable members overlap each other.

  According to this configuration, the number of the plurality of contact portions between the deformable member and the workpiece can be doubled as compared with the case where one deformable member is used, and the contact portions are arranged along the circumferential direction. Each can be arranged at equal intervals. Therefore, the weight of the radial load obtained from the predetermined thrust load can be further increased, and the axis of the workpiece can be adjusted more appropriately.

  In the position adjusting jig according to the present invention, the outer peripheral edge of the deformable member preferably has a circular shape.

  According to this configuration, the workability of the deformable member can be simplified. That is, the disk-shaped deformable member can be easily processed and manufactured.

  In the position adjusting jig according to the present invention, the inclined portion is preferably inclined in a range of 5 ° or more and 20 ° or less with respect to a direction substantially orthogonal to the axial direction of the shaft member.

  According to this configuration, since the deformable member can be appropriately deformed within the range of the elastic limit, the deformable member can be used repeatedly in order to appropriately adjust the axis of the workpiece.

  In the position adjusting jig according to the present invention, preferably, a cylindrical member interposed between the pressing portion and the deformable member is attached to the shaft member.

  According to this structure, it can respond to the workpiece | work in which the level | step difference was formed, or the workpiece | work which has a big dimension of an axial direction. Further, since the deformable member can be appropriately deformed within the range of the elastic limit, the deformable member can be used repeatedly in order to appropriately adjust the axis of the workpiece.

  The machine tool according to the present invention preferably includes a chuck device including any one of the above-described position adjusting jigs.

  ADVANTAGE OF THE INVENTION According to this invention, there is no possibility of damaging the workpiece | work with a small dimension of an axial direction, and machine tools, such as a lathe and a grinding machine, which can adjust the axial center of a workpiece | work appropriately can be provided. In addition, when the pressing portion presses the deformable member toward the main shaft side of the chuck device, the deformable member presses the workpiece in the radial direction and follows the configuration of the known chuck device. The workpiece can be pressed toward the main shaft. Therefore, the workpiece can be reliably supported and the axis of the workpiece can be adjusted appropriately.

  In the position adjusting jig, the inner diameter and the outer diameter of the deformable member can be changed only by moving the deformable member relatively small in the axial direction. Therefore, there is no need to provide extra clearance between the shaft member and the deformable member and between the workpiece and the deformable member, so that the position adjusting jig and the chuck device are adversely affected by chips generated during processing. Can be prevented.

  Further, according to this configuration, the deformable member attached to the shaft member can be appropriately selected according to the shape of the workpiece to be processed, and a plurality of deformable members can be used in the machine tool. .

  In the machine tool according to the present invention, the position adjusting jig is preferably detachably attached to the chuck device.

  According to this configuration, it is possible to use a deformable member and a position adjusting jig having appropriate dimensions according to the dimension or shape of the workpiece to be processed. That is, the deformable member attached to the shaft member or the position adjusting jig can be used as appropriate depending on the size or shape of the workpiece to be processed.

  The inspection device according to the present invention preferably includes a chuck device including any one of the above-described position adjusting jigs.

  According to this configuration, it is possible to provide an inspector that can appropriately adjust the axis of the workpiece without damaging the workpiece having a small axial dimension.

  In the position adjusting jig according to the present invention, the position adjusting jig is preferably detachably attached to the inspection device.

  According to this configuration, it is possible to use a deformable member and a position adjusting jig having appropriate dimensions according to the size or shape of the workpiece to be inspected or measured. That is, the deformable member attached to the shaft member or the position adjusting jig can be used while being appropriately replaced according to the size or shape of the workpiece.

  The position adjustment jig according to the present invention is preferably a position adjustment jig used for alignment adjustment of equipment.

  Thus, the position adjusting jig of the present invention can be used for alignment adjustment of equipment.

  The deformable member according to the present invention has a substantially annular shape and includes an inclined portion. The inclined portion is inclined with respect to a direction substantially orthogonal to an axis passing through the center of the ring. A plurality of outer slits and a plurality of inner slits are formed in the inclined portion. The plurality of outer slits extend along the radial direction of the deformable member from the outer peripheral edge to the inner peripheral edge of the deformable member. The plurality of inner slits extend in the radial direction from the inner periphery to the outer periphery of the deformable member. In the inclined portion, the same number of outer slits and inner slits are formed and are alternately arranged at equal intervals along the circumferential direction of the deformable member.

  Since the deformable member according to the present invention has a plurality of slits, the deformable member can be easily deformed even with a relatively small thrust load. Even when a relatively small thrust load is applied to the deformable member, the radial loads applied to the workpiece supported by the deformable member are circumferentially arranged by arranging the slits at equal intervals along the circumferential direction. Therefore, the axis of the workpiece can be adjusted appropriately without tightening the workpiece more than necessary. In this way, since a sufficient radial load can be obtained with a relatively small thrust load, there is no possibility that the workpiece is tightened more than necessary by the deformable member, and damage to the workpiece can be prevented.

  Further, the number of contact portions between the deformable member and the workpiece and the area of the contact surface can be increased according to the number of the plurality of outer slits and the number of the plurality of inner slits. Therefore, the weight of the radial load obtained from a predetermined thrust load can be earned. Thus, since a sufficient radial load can be obtained using the deformable member, the axis of the workpiece can be adjusted appropriately. On the other hand, the plurality of outer slits and the plurality of inner slits can increase the number of contact portions between the deformable member and the workpiece and the area of the contact surface. Can be supported. Therefore, according to the deformable member used in the position adjusting jig according to the present invention, it is possible to appropriately support even a workpiece having a limited axial dimension and to appropriately adjust the axis of the workpiece. .

  By doing so, it is possible to provide a deformable member used in a position adjusting jig that can appropriately adjust the axis of the workpiece without damaging a workpiece having a small axial dimension. it can.

  In addition, the deformable member can be manufactured by a relatively simple process such as forming a plurality of slits in a material having a substantially annular shape. Further, by forming a plurality of slits, the deformable member can be reduced in weight.

  As described above, according to the present invention, there is no risk of damaging a workpiece having a small axial dimension, and a position adjusting jig including a deformable member capable of appropriately adjusting the axis of the workpiece, A machine tool including the chuck device including the same and an inspection device including the chuck device including the machine tool can be provided. Moreover, according to this invention, the deformable member used for said position adjustment jig can be provided.

It is a front view of a chuck device including an example of a position adjusting jig according to the present invention. It is sectional drawing of the II-II line of FIG. It is a front view of the shaft member in an example of the position adjusting jig according to the present invention. It is sectional drawing of the IV-IV line of FIG. It is a partial front view of the press part in an example of the position adjusting jig according to the present invention. It is sectional drawing of the VI-VI line of FIG. It is a rear view of the deformable member in an example of the position adjusting jig according to the present invention. It is sectional drawing of the VIII-VIII line of FIG. It is a front view of the deformable member exaggeratingly showing the size of the outer slit and the size of the inner slit of the deformable member in an example of the position adjusting jig according to the present invention. It is a front view of the deformable member exaggeratingly showing a deformed state of the deformable member in an example of the position adjusting jig according to the present invention. It is a figure which exaggeratedly shows the state which two deformable members piled up mutually in an example of a position adjustment jig according to the present invention changed, and is a figure seen from the front of one deformable member. It is a figure which exaggeratedly shows the state which two deformable members piled up mutually in an example of a position adjusting jig according to the present invention changed, and is a figure seen from the front of the other deformable member. It is a side view which shows typically a part of two deformable member mutually piled up in an example of the position adjustment jig | tool according to this invention. It is a figure for demonstrating the state which two deformable members piled up mutually in the example of the position adjustment jig | tool according to this invention deform | transformed, Comprising: It is a side view which shows two deformable members typically . It is sectional drawing of the chuck | zipper apparatus containing the 1st another example of the position adjustment jig | tool according to this invention. It is sectional drawing of the chuck | zipper apparatus containing the 2nd another example of the position adjustment jig | tool according to this invention. It is sectional drawing of the chuck | zipper apparatus containing the 3rd another example of the position adjustment jig | tool according to this invention. It is sectional drawing of 4th another example of the jig for position adjustment according to this invention. It is sectional drawing of an example of the jig | tool for position adjustment used for examples of the detector according to this invention, a machine tool, etc. It is sectional drawing of another example of the position adjustment jig | tool used for examples of the detector according to this invention, a machine tool, etc. It is sectional drawing of another example of the jig | tool for position adjustment used for examples of the detector according to this invention, a machine tool, etc. It is sectional drawing of another example of the position adjustment jig | tool used for examples of a detector, a machine tool, etc. according to this invention. It is sectional drawing of an example of the position adjustment jig | tool according to this invention as a position adjustment jig | tool used for alignment adjustment of an apparatus. It is sectional drawing of an example of the chuck | zipper apparatus containing an example of the position adjustment jig | tool according to this invention provided with the deformable member for supporting a rod-shaped workpiece | work.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(First embodiment)
1 and 2 show a chuck device 10 including a position adjusting jig according to the present invention. FIG. 1 is a front view of a chuck device 10 including an example of a position adjusting jig according to the present invention. 2 is a cross-sectional view taken along line II-II in FIG. The chuck device 10 according to the first embodiment is configured to grip a workpiece to be machined in a machine tool, and is a chuck device for a lathe, for example, in a machine tool. In addition, the chuck apparatus 10 of 1st Embodiment can be used also for a grinder etc. among machine tools, for example.

  As shown in FIG. 2, the chuck device 10 includes a face plate 7. An annular stopper 6 is attached to the face plate 7. The chuck device 10 includes a position adjusting jig (hereinafter referred to as a jig) 100. The jig 100 is detachably fixed to the face plate 7 by a plurality of fixing members such as bolts. The jig 100 includes a main shaft 30 as an example of a shaft member, a plurality of deformable members 111, 112, 113, and 114, and a pressing portion. The pressing portion has a configuration including a clamp shaft 40, a long bolt 8, nuts 81 and 82, and a coil spring 9. A disc-shaped cap 1 is fixed to the clamp shaft 40.

  FIG. 3 is a front view of a main shaft 30 as an example of a shaft member. 4 is a cross-sectional view taken along line IV-IV in FIG. The main shaft 30 includes a body portion 31 and a flange portion 32 having a cylindrical shape. A hollow portion 33 is formed inside the body portion 31. In the jig 100 (see FIG. 2) fixed to the chuck device 10, the body portion 31 extends in a direction substantially coincident with the axial direction of the workpiece 2. That is, the direction in which the body portion 31 extends, in other words, the axial direction of the main shaft 30 is substantially the same as the direction in which the main shaft (not shown) extends in the chuck device 10 (see FIG. 2).

  The flange portion 32 protrudes outward in the radial direction from the body portion 31 in the entire circumferential direction of the body portion 31. A plurality of bolt holes 34 are formed in the flange portion 32. The plurality of bolt holes 34 are arranged at equal intervals along the circumferential direction. The base of the flange portion 32 protrudes toward the tip 36 so that the dimension in the axial direction is larger than that of other portions. This protruding portion functions as the stopper surface 35. As will be described later, the stopper surface 35 is a surface on which the deformable member 114 and the main shaft 30 come into contact (see FIG. 2).

  FIG. 5 is a front view of the clamp shaft 40 as a part of the pressing portion. 6 is a cross-sectional view taken along line VI-VI in FIG. The clamp shaft 40 includes a shaft portion 41 and a flange portion 42 having a substantially cylindrical shape. A hollow portion 43 is formed inside the shaft portion 41. A plurality of steps are formed in the hollow portion 43 along the shape of the long bolt 8 (see FIG. 2). Of these steps, the second step from the flange portion 42 functions as a pedestal 45 at one end of the coil spring 9 (see FIG. 2). The pedestal at the other end of the coil spring 9 is a head 83 of the long bolt 8 (see FIG. 2).

  As shown in FIG. 2, the clamp shaft 40 is attached to the main shaft 30 by inserting the shaft portion 41 into the hollow portion 33 of the main shaft 30. The shaft portion 41 is slidable with respect to the body portion 31. The long bolt 8 and the coil spring 9 are accommodated in the hollow portion 43 of the clamp shaft 40. A nut 81 and a nut 82 are attached to the threaded portion of the long bolt 8. The nut 81 and the nut 82 are integrated by fixing the nut 81 and the nut 82 with a plurality of bolts. The nuts 81 and 82 are interlocked with the operation of a hydraulic mechanism (not shown). That is, the load by the hydraulic mechanism acts on the nuts 81 and 82 and the long bolt 8 so as to move the long bolt 8 in the left-right direction in FIG.

  The deformable members 111, 112, 113, and 114 are attached to the body portion 31 of the main shaft 30. The deformable members 111, 112, 113, 114 are such that the back surface of the deformable member 111 and the back surface of the deformable member 112 face each other, and the back surface of the deformable member 113 and the back surface of the deformable member 114 face each other. In addition, it is attached to the main shaft 30. These deformable members 111, 112, 113, 114 have a substantially annular shape. Therefore, the deformable members 111, 112, 113, 114 are attached to the main shaft 30 so that the entire inner peripheral edges of the deformable members 111, 112, 113, 114 face the entire surface of the body portion 31. . The deformable members 111, 112, 113, 114 are attached to the body portion 31 in the order of the deformable members 111, 112, 113, 114 along the direction from the tip 36 of the main shaft 30 toward the flange portion 32. At this time, the deformable member 111 is attached to the body portion 31 so as to contact the flange portion 42 of the clamp shaft 40. The deformable member 114 is attached to the body portion 31 so as to contact the stopper surface 35 of the main shaft 30.

  The liner 5 is disposed between the deformable member 112 and the deformable member 113 along the axial direction of the main shaft 30. The liner 5 has a cylindrical shape. The main shaft 30 passes through the annular deformable members 111, 112, 113, and 114 and the cylindrical liner 5. The liner 5 is disposed between the flange portion 42 of the clamp shaft 40 and the deformable members 113 and 114. The deformable members 111 and 112 are disposed between the flange portion 42 of the clamp shaft 40 and the liner 5. With such an arrangement, with respect to the deformable members 111, 112, 113, 114 and the liner 5 attached to the main shaft 30, the liner 5 includes the clamp shaft 40 as a part of the pressing portion, the deformable members 111, 112, 113, 114.

  The jig 100 is attached to the face plate 7 by fixing the flange portion 32 of the main shaft 30 to the face plate 7 in the jig 100. Therefore, the main shaft 30 moves together with the face plate 7 of the chuck device 10. When the pressing portion including the clamp shaft 40 presses the deformable members 111, 112, 113, 114, a force that causes the long bolt 8 to be pulled rightward in FIG. , 82 and the long bolt 8. Further, the clamp shaft 40 moves to the right in FIG. 2 based on the spring force of the coil spring 9 as a compression spring. Thereby, the flange part 42 of the clamp shaft 40 presses the deformable member 111. Further, the flange portion 42 of the clamp shaft 40 presses the deformable member 113 through the liner 5. At this time, the stopper surface 35 of the flange portion 32 of the main shaft 30 functions as a stopper that restricts the movement of the deformable members 111, 112, 113, 114 and the liner 5 with respect to the main shaft 30. Further, the liner 5 functions as a stopper that restricts the movement of the deformable members 111 and 112 with respect to the main shaft 30.

  Next, the configuration of the deformable members 111 to 114 will be described. FIG. 7 is a rear view of the deformable member 113. 8 is a cross-sectional view taken along line VIII-VIII in FIG. As shown in FIG. 7, the deformable member 113 has a substantially annular shape. In the deformable member 113, the outer peripheral edge 131 positioned at the outer end in the radial direction and the inner peripheral edge 133 positioned at the inner end in the radial direction have a circular shape.

  The deformable member 114 has substantially the same shape and configuration as the deformable member 113 (see FIG. 2). As the deformable member 114, the same member as the deformable member 113 is used. The deformable member 111 and the deformable member 112 have substantially the same shape and configuration as each other, and have shapes similar to the deformable members 113 and 114 (see FIG. 2). The deformable members 111 and 112 are the same as each other. The deformable member 111 and the deformable member 112 only have different dimensions from the deformable members 113 and 114, and have the same configuration.

  The deformable member 113 is formed with a cylindrical portion 137. The inner peripheral edge 133 is an inner edge of the cylindrical portion 137. From the cylindrical part 137, the inclined part 132 extends outward in the radial direction. The radially outer end of the inclined portion 132 is continuous with the outer peripheral edge 131. A portion of the deformable member 113 forming the outer peripheral edge 131 extends in a direction substantially parallel to the axial direction of the cylindrical portion 137. The end surface 134 of this portion protrudes from one end surface 136 of the cylindrical portion 137 along the direction from the front to the back of the deformable member 113 (in other words, the direction from the right to the left in FIG. 8). Yes. The other end surface 135, end surface 136, and end surface 134 of the cylindrical portion 137 extend along a direction substantially orthogonal to the axial direction of the cylindrical portion 137.

  The inclined portion 132 is inclined with respect to a direction substantially orthogonal to the axial direction of the cylindrical portion 137. When the deformable member 113 is attached to the main shaft 30, the axial direction of the cylindrical portion 137 substantially coincides with the axial direction of the main shaft 30 (see FIG. 2). That is, the straight line indicating the axis (not shown) of the cylindrical portion 137 substantially matches the straight line indicating the axis (not shown) of the main shaft 30 (see FIG. 2). Therefore, when the deformable member 113 is attached to the main shaft 30, the inclined portion 132 is inclined with respect to a direction substantially orthogonal to the axial direction of the main shaft 30. The inclined portion 132 is preferably inclined in a range of 5 ° or more and 20 ° or less with respect to a direction substantially orthogonal to the axial direction of the main shaft 30. FIG. 8 shows an angle δ as an angle between a direction substantially orthogonal to the axial direction of the cylindrical portion 137 and a direction in which the inclined portion 132 extends. A preferable range of the angle δ is not less than 5 ° and not more than 20 °.

  As shown in FIG. 7, the deformable member 113 has a plurality of outer slits 138 and a plurality of inner slits 139. The plurality of outer slits 138 and the plurality of inner slits 139 are formed in the inclined portion 132 (see FIG. 8). The outer slit 138 extends along the radial direction from the outer peripheral edge 131 toward the inner peripheral edge 133. The outer slit 138 extends from the outer peripheral edge 131 to the outer edge of the cylindrical portion 137. The inner slit 139 extends along the radial direction from the inner peripheral edge 133 toward the outer peripheral edge 131. The inner slit 139 extends from the inner peripheral edge 133 to a position that substantially coincides with the inner end of the end surface 134 along the radial direction of the deformable member 113.

  In the inclined portion 132, the same number of outer slits 138 and inner slits 139 are formed. In the inclined portion 132, six outer slits 138 and inner slits 139 are formed, respectively. In the inclined portion 132, the outer slits 138 and the inner slits 139 are alternately arranged at equal intervals along the circumferential direction of the deformable member 113.

  The dimension of the outer slit 138 along the circumferential direction (that is, the width of the outer slit 138) and the dimension of the inner slit 139 along the circumferential direction (that is, the width of the inner slit 139) are substantially the same. A preferable example of the range of the width value of the outer slit 138 and the range of the width value of the inner slit 139 is 0.2 mm or more and 0.3 mm or less. The deformable member 113 is manufactured, for example, by grinding a steel material such as SCM. Moreover, it is preferable that the hardening process is given as heat processing of steel materials.

  Next, elastic deformation of the deformable members 111 to 114 will be described. The pressing portion including the clamp shaft 40 (see FIG. 2) directly presses the deformable member 111 by moving toward the main shaft (not shown) of the chuck device 10 (see FIG. 2). As the pressing portion moves, the deformable members 111 to 114 are pressed. Thereby, the deformable members 111 to 114 are elastically deformed. FIG. 9 is a front view of the deformable member 113 exaggeratingly showing the size of the outer slit 138 and the size of the inner slit 139 of the deformable member 113. FIG. 10 is a front view of the deformable member 113 exaggeratingly showing a deformed state of the deformable member 113. In FIG. 10, the movement of the outer peripheral edge 131 is particularly exaggerated as the deformable member 113 is deformed.

  The deformable member 113 to be pressed is elastically deformed so that the outer peripheral edge 131 moves radially outward and the inner peripheral edge 133 moves radially inward (FIGS. 9 and 10). And). At this time, the deformable member 113 is elastically deformed so that the direction in which the inclined portion 132 extends is in a direction parallel to a direction substantially orthogonal to the axial direction of the cylindrical portion 137 (see FIGS. 8 and 10). With such deformation, the deformable member 113 is formed such that the dimensions of the slits 138 and 139 increase at the distal ends 38 and 39 of the outer and inner slits 138 and 139 along the circumferential direction of the deformable member 113. Is elastically deformed (see FIGS. 9 and 10).

  Since the outer slit 138 and the inner slit 139 are arranged at equal intervals along the circumferential direction, the outer peripheral edge 131 sandwiched between the two outer slits 138 adjacent to each other in the deformable member 113 is substantially concentric. The inner peripheral edge 133 sandwiched between two adjacent inner slits 139 in the deformable member 113 is reduced in the radial direction at approximately the same amount in the radial direction with an equal amount (FIGS. 9 and 10). And). Due to such deformation, the radially outward portions of the outer peripheral edge 131 of the deformable member 113 are formed at equal intervals along the circumferential direction, and the inner peripheral edge 133 is radially inward. The bulging portions are formed at equal intervals along the circumferential direction.

  By deforming the deformable member 113 in this way, the inner peripheral edge 133 of the deformable member 113 is firmly tightened inward in the radial direction of the main shaft 30 (see FIG. 2), and in the circumferential direction. Tighten almost evenly along. Further, the outer peripheral edge 131 firmly tightens the work 2 (see FIG. 2) outward in the radial direction and substantially uniformly tightens along the circumferential direction. Thus, the deformable member 113 supports the tubular work 2 while firmly fastening the main shaft 30.

  As shown in FIG. 2, a deformable member 113 and a deformable member 114 having the same configuration are used for the jig 100. The jig 100 uses a deformable member 111 and a deformable member 112 having the same configuration.

  FIG. 11 is an exaggerated view showing the deformed state of the two deformable members 113 and 114 stacked on each other, as viewed from the front of the deformable member 113 (in other words, from the back of the deformable member 114). FIG. FIG. 12 is a diagram exaggeratingly illustrating a state in which the two deformable members 113 and 114 overlapped with each other are deformed, as viewed from the front of the deformable member 114. Similarly to the inclined portion of the deformable member 113, an outer slit 148 and an inner slit 149 are formed in the inclined portion 142 of the deformable member 114. When the deformable member 113 and the deformable member 114 are attached to the main shaft 30 (see FIG. 2), the position of the outer slit 138 in the deformable member 113 is the position of the inner slit 149 in the adjacent deformable member 114. So that the deformable member 113 and the deformable member 114 overlap each other.

  As described above, when the deformable member 113 is pressed, portions of the outer peripheral edge 131 of the deformable member 113 that bulge outward in the radial direction are formed at equal intervals along the circumferential direction. In addition, portions that bulge inward in the radial direction at the inner peripheral edge 133 are formed at equal intervals along the circumferential direction (see FIG. 11). Similarly, when the deformable member 114 is pressed, portions of the outer peripheral edge 141 that bulge outward in the radial direction are formed at equal intervals along the circumferential direction, and the inner peripheral edge 143 has a radius. The portions bulging inward in the direction are formed at equal intervals along the circumferential direction (see FIG. 12).

  The deformable member 113 and the deformable member 114 overlap each other so that the position of the outer slit 138 in the deformable member 113 substantially coincides with the position of the inner slit 149 in the deformable member 114. Therefore, a portion that bulges outward in the radial direction on the outer peripheral edge 131 of the deformable member 113 and a portion that bulges outward in the radial direction on the outer peripheral edge 141 of the deformable member 114 extend along the circumferential direction. And alternately formed at equal intervals. Further, a portion that bulges inward in the radial direction at the inner peripheral edge 133 of the deformable member 113 and a portion that bulges inward in the radial direction at the inner peripheral edge 143 of the deformable member 114 extend along the circumferential direction. And alternately formed at equal intervals. In this way, the number of contact portions between the deformable members 113 and 114 and the work 2 can be doubled as compared with the case where only the deformable member 113 and the work 2 are in contact with each other. Furthermore, the contact portions can be arranged at equal intervals along the circumferential direction.

  Next, elastic deformation of the deformable members 113 and 114 in the axial direction of the cylindrical portions 137 and 147 when the deformable members 113 and 114 are pressed will be described with reference to FIGS. FIG. 13 is a side view schematically showing a part of the two deformable members 113 and 114 stacked on each other. FIG. 14 is a side view schematically illustrating the two deformable members 113 and 114 for explaining a state in which the two deformable members 113 and 114 overlapped with each other are deformed.

  Before the deformable member 113 is elastically deformed, the end surface 134 protrudes from the end surface 136 of the cylindrical portion 137 along the direction from the left to the right in FIG. Similarly, before the deformable member 114 is elastically deformed, the end surface 144 protrudes from the end surface 146 of the cylindrical portion 147 along the direction from right to left in FIG. Before the deformable members 113 and 114 are elastically deformed, that is, in a steady state of the deformable members 113 and 114, when the end surface 134 and the end surface 144 come into contact with each other, the end surfaces along the axial direction of the cylindrical portions 137 and 147 A gap is created between 136 and the end face 146.

  The end surface 145 of the deformable member 114 is in contact with the stopper surface 35 of the main shaft 30 as shown in FIG. When the deformable members 113 and 114 receive a load due to the pressing portion, the end surface 144 is pressed by the end surface 134, whereby the positions of the end surfaces 134 and 144 move to the right in FIG. 13 and the end surfaces 136 and 146 Is closed (see FIGS. 13 and 14). The positions of these end faces 134, 144, 136, and 146 along the axial direction of the cylindrical portions 137 and 147 substantially coincide with each other.

  Further, when the deformable members 113 and 114 are pressed respectively, it is possible that the direction in which the inclined portions 132 and 142 extend is in a direction parallel to a direction substantially orthogonal to the axial direction of the cylindrical portions 137 and 147. The deformation members 113 and 114 are elastically deformed. That is, the deformable member 113 and the deformable member 114 are elastically deformed so that the inclined portions 132 and 142 stand while the deformable member 113 pushes the deformable member 114. As a result, the outer peripheral edges 131 and 141 move outward in the radial direction, and the inner peripheral edges 133 and 143 move inward in the radial direction even if not exaggerated in FIGS. Accordingly, the deformable members 113 and 114 can be supported by tightening the main shaft 30 (see FIG. 2) and tightening the workpiece 2.

  As shown in FIG. 2, in the jig 100, the deformable members 111 and 112 whose radial dimensions are smaller than the deformable members 113 and 114 are also attached to the main shaft 30. The deformable members 111 and 112 are arranged at positions closer to the tip 36 of the main shaft 30 than the deformable members 113 and 114. As described above, by using the deformable members 111 and 112 in addition to the deformable members 113 and 114, the jig 100 can correspond to the tubular workpiece 2 having a step formed on the inner peripheral edge.

  As described above, the jig 100 includes at least the deformable member 113, the main shaft 30, the clamp shaft 40, and the pressing portion. The deformable member 113 has a substantially annular shape. The deformable member 113 is for supporting the tubular workpiece 2. A deformable member 113 is attached to the main shaft 30. The pressing portion including the clamp shaft 40, the long bolt 8, the nuts 81 and 82, and the coil spring 9 presses the deformable member 113 attached to the main shaft 30. The deformable member 113 has an inclined portion 132. The inclined portion 132 is inclined with respect to a direction substantially orthogonal to the axial direction of the main shaft 30. In the inclined portion 132, six outer slits 138 and six inner slits 139 are formed. The outer slit 138 extends along the radial direction of the deformable member 113 from the outer peripheral edge 131 of the deformable member 113 toward the inner peripheral edge 133. The inner slit 139 extends along the radial direction from the inner peripheral edge 133 of the deformable member 113 toward the outer peripheral edge 131.

  In the inclined portion 132, the same number of outer slits 138 and inner slits 139 are formed. In the inclined portion 132, the outer slits 138 and the inner slits 139 are alternately arranged at equal intervals along the circumferential direction of the deformable member 113. When the pressing portion presses the deformable member 113, the outer peripheral edge 131 of the deformable member 113 moves outward in the radial direction, and the inner peripheral edge 133 of the deformable member 113 is inward in the radial direction. The deformable member 113 is elastically deformed so as to move to the position.

  In the jig 100, when the pressing portion presses the deformable member 113, the outer peripheral edge 131 moves radially outward and the inner peripheral edge 133 moves radially inward. The deformable member 113 is elastically deformed. With such deformation, the deformable member 113 is formed such that the dimensions of the slits 138 and 139 increase at the distal ends 38 and 39 of the outer and inner slits 138 and 139 along the circumferential direction of the deformable member 113. Is elastically deformed. Since the slits 138 and 139 are arranged at equal intervals along the circumferential direction, the outer peripheral edge 131 sandwiched between the two outer slits 138 adjacent to each other in the deformable member 113 is concentrically formed in substantially equal amounts. The inner peripheral edge 133 that moves outward in the radial direction and is sandwiched between two adjacent inner slits 139 in the deformable member 113 moves concentrically inwardly in the radial direction in substantially equal amounts. Thereby, it is a cylinder formed virtually by connecting the surfaces where the deformable member 113 and the workpiece 2 are in contact with each other, and a cylinder having a relatively high roundness can be formed. That is, in the jig 100, the axis of the workpiece 2 can be adjusted appropriately.

  Further, since the plurality of slits 138 and 139 are formed in the deformable member 113, the deformable member 113 can be easily deformed even with a relatively small thrust load. Even when a relatively small thrust load is applied to the deformable member 113, the radial load applied to the workpiece 2 is increased along the circumferential direction by arranging the slits 138, 139 at equal intervals along the circumferential direction. Since it is divided at equal intervals, the axis of the workpiece 2 can be adjusted appropriately without tightening the workpiece 2 more than necessary. Thus, since a sufficient radial load can be obtained with a relatively small thrust load, there is no possibility that the workpiece 2 is tightened more than necessary by the deformable member 113, and damage to the workpiece 2 can be prevented.

  Further, according to the number of the plurality of outer slits 138 and the number of the plurality of inner slits 139, the number of contact portions between the deformable member 113 and the workpiece 2 and the area of the contact surface can be increased. Therefore, the weight of the radial load obtained from a predetermined thrust load can be earned. Thus, since sufficient radial load can be obtained using the deformable member 113, the axis of the workpiece 2 can be adjusted appropriately. On the other hand, since the plurality of outer slits 138 and the plurality of inner slits 139 can increase the number of contact portions between the deformable member 113 and the work 2 and the area of the contact surface, for example, even a single deformable member 113 can be used. 2 can be supported appropriately. Therefore, the jig 100 can appropriately support the workpiece 2 whose axial dimension is limited and can appropriately adjust the axis of the workpiece 2.

  In this way, the jig 100 including the deformable member 113 capable of appropriately adjusting the axis of the work 2 without damaging the work 2 having a small axial dimension is provided. Can do.

  The jig 100 includes deformable members 111, 112, 113, and 114 as a plurality of deformable members.

  According to this configuration, according to the number of deformable members attached to the main shaft 30, the number of contact portions between the deformable member and the workpiece 2 and the area of the contact surface can be increased. Therefore, the weight of the radial load obtained from a predetermined thrust load can be earned.

  In the jig 100, among the deformable members 111, 112, 113, and 114, for example, the number of outer slits 138 and 148 in the deformable members 113 and 114 is the same. Among the deformable members 111, 112, 113, 114, for example, the number of inner slits 139, 149 in the deformable members 113, 114 is the same. Further, in the jig 100, the deformable member 113 and the deformable member 114 overlap each other so that the position of the outer slit 138 in the deformable member 113 substantially coincides with the position of the inner slit 149 in the adjacent deformable member 114. Yes. Similarly, the deformable member 111 and the deformable member 112 are arranged so that the position of the outer slit (no reference number) in the deformable member 111 substantially matches the position of the inner slit (no reference number) in the adjacent deformable member 112. Overlap each other.

  According to this configuration, the number of contact portions between the deformable members 113 and 114 and the work 2 can be doubled as compared with the case where only one deformable member 113 is used, and the contact portions are They can be arranged at regular intervals along the circumferential direction. Therefore, the weight of the radial load obtained from the predetermined thrust load can be further increased, and the axis of the workpiece 2 can be adjusted more appropriately.

  In the jig 100, for example, the outer peripheral edge 131 of the deformable member 113 has a circular shape.

  According to this configuration, the processability of each of the deformable members 111, 112, 113, 114 can be simplified. That is, the disk-shaped deformable members 111, 112, 113, 114 can be easily processed and manufactured.

  In the jig 100, for example, the inclined portion 132 of the deformable member 113 is inclined in a range of 5 ° or more and 20 ° or less with respect to a direction substantially orthogonal to the axial direction of the main shaft 30.

  According to this configuration, the deformable member 113 can be appropriately deformed within the range of the elastic limit, and thus, for example, the deformable member 113 can be repeatedly used to appropriately adjust the axis of the workpiece 2. .

  In the jig 100, the liner 5 interposed between the pressing portion and the deformable members 111, 112, 113, 114 is attached to the main shaft 30.

  According to this structure, it can respond to the workpiece | work 2 in which the level | step difference was formed, or the workpiece | work 2 which has a big dimension of an axial direction. Further, since the deformable members 111, 112, 113, 114 can be appropriately deformed within the range of the elastic limit, the deformable members 111, 112, 113, 114 are used to appropriately adjust the axis of the workpiece 2. Can be used repeatedly.

  The machine tool includes a chuck device 10 including a jig 100. By doing in this way, the machine tool which can adjust the axis center of the workpiece | work 2 appropriately without having a possibility of damaging the workpiece | work 2 with a small dimension of an axial direction can be provided. When the pressing portion presses the deformable members 111 to 114 toward the main shaft (not shown) of the chuck device 10, the deformable members 111 to 114 press the workpiece 2 in the radial direction. The workpiece 2 can be pressed toward the main shaft side of the chuck device 10 according to the configuration of the known chuck device. Therefore, the workpiece 2 can be reliably supported and the axis of the workpiece 2 can be adjusted appropriately.

  Further, in the jig 100, the inner diameter and the outer diameter of the deformable members 111, 112, 113, 114 can be changed only by moving the deformable members 111, 112, 113, 114 relatively small in the axial direction. it can. Therefore, there is no need to provide extra clearance between the main shaft 30 and the deformable members 111, 112, 113, 114 and between the workpiece 2 and the deformable members 111, 112, 113, 114. It is possible to prevent the jig 100 and the chuck device 10 from being adversely affected by chips that are sometimes generated.

  Further, according to this configuration, it is possible to attach the deformable members 111 to 114 whose radial dimensions between the outer peripheral edge and the inner peripheral edge are adjusted to the main shaft 30 according to the shape of the workpiece 2 to be processed. The deformable members 111 to 114 can be appropriately selected, and the deformable members 111 to 114 can be used as a plurality of deformable members in the machine tool.

  Furthermore, according to the configuration in which the jig 100 is detachably attached to the chuck device 10, the deformable members 111 to 114 and the jig 100 having appropriate dimensions are used according to the size or shape of the workpiece 2 to be processed. Can do. That is, the deformable members 111 to 114 or the jig 100 attached to the main shaft 30 can be used while being appropriately replaced according to the size or shape of the workpiece 2 to be processed.

  Of the deformable members 111 to 114, for example, the deformable member 113 has a substantially annular shape and includes an inclined portion 132. The inclined portion 132 is inclined with respect to a direction substantially perpendicular to an axis passing through the center of the ring. In the inclined portion 132, a plurality of outer slits 138 and a plurality of inner slits 139 are formed. The plurality of outer slits 138 extend along the radial direction of the deformable member 113 from the outer peripheral edge 131 of the deformable member 113 toward the inner peripheral edge 133. The plurality of inner slits 139 extend along the radial direction from the inner peripheral edge 133 of the deformable member 113 toward the outer peripheral edge 131. In the inclined portion 132, the same number of outer slits 138 and inner slits 139 are formed and are alternately arranged at equal intervals along the circumferential direction of the deformable member 113.

  Since the deformable member 113 is formed with a plurality of slits 138 and 139, the deformable member 113 can be easily deformed even with a relatively small thrust load. Even when a relatively small thrust load is applied to the deformable member, the slits 138 and 139 are arranged at equal intervals along the circumferential direction, so that the radial applied to the workpiece 2 supported by the deformable member 113 is radial. Since the load is divided at equal intervals along the circumferential direction, the axis of the workpiece 2 can be appropriately adjusted without tightening the workpiece 2 more than necessary. Thus, since a sufficient radial load can be obtained with a relatively small thrust load, there is no possibility that the workpiece 2 is tightened more than necessary by the deformable member 113, and damage to the workpiece 2 can be prevented.

  Further, according to the number of the plurality of outer slits 138 and the number of the plurality of inner slits 139, the number of contact portions between the deformable member 113 and the workpiece 2 and the area of the contact surface can be increased. Therefore, the weight of the radial load obtained from a predetermined thrust load can be earned. Thus, since a sufficient radial load can be obtained using the deformable member, the axis of the workpiece 2 can be adjusted appropriately. On the other hand, the plurality of outer slits 138 and the plurality of inner slits 139 can increase the number of contact portions between the deformable member 113 and the workpiece 2 and the area of the contact surface. Thus, the workpiece 2 can be supported appropriately. Therefore, according to, for example, the deformable member 113 used in the jig 100, it is possible to appropriately support the workpiece 2 whose axial dimension is limited and appropriately adjust the axis of the workpiece 2.

  By doing so, the deformable members 111 and 112 used in the position adjusting jig capable of appropriately adjusting the axis of the work 2 without damaging the work 2 having a small axial dimension. , 113, 114 can be provided.

  In addition, the deformable members 111, 112, 113, and 114 can be manufactured by a relatively simple process such as forming a plurality of slits in a material having a substantially annular shape. Further, by forming a plurality of slits, the deformable members 111, 112, 113, 114 can be reduced in weight.

  As described above, in the state before the deformable members 111 to 114 are elastically deformed, for example, the outer peripheral edge 131 of the deformable member 113 of the deformable members 111 to 114 has a circular shape, and the inner peripheral edge 133 is a circular shape. Has a shape. However, in the state after elastic deformation, for example, the outer peripheral edge 131 of the deformable members 111 to 114 is a circle so that the outer peripheral edge 131 and the inner peripheral edge 133 before elastic deformation have a larger radius of curvature than after the deformation. The deformable members 111 to 114 may be configured so as to have a shape and the inner peripheral edge 133 has a circular shape. According to this configuration, the area where the deformable members 111, 112, 113, 114 and the work 2 are in contact with each other and the area where the deformable members 111, 112, 113, 114 and the main shaft 30 are in contact are increased. Therefore, the workpiece 2 can be supported more firmly. Further, a line connecting these contact surfaces can be formed in a circular shape that is closer to a perfect circle.

  The number of outer slits 138 and the number of inner slits 139 respectively formed in six are the most preferable examples in the deformable member 113, for example. In the deformable member 113, for example, the outer slit 138 and the inner slit 139 are: What is necessary is just two or more.

  As a method for manufacturing the deformable members 111, 112, 113, 114, grinding is a particularly preferable example, and the manufacturing method of the deformable members 111, 112, 113, 114 is not limited to grinding. Further, as a material of the deformable members 111, 112, 113, 114, a steel material among metal materials is a particularly preferable example, and the material of the deformable members 111, 112, 113, 114 is not particularly limited. The deformable members 111, 112, 113, and 114 only need to be configured to be elastically deformed substantially equally in the circumferential direction and the radial direction at the inclined portion by receiving a pressing force.

  The deformable members 111 and 112 are increased by increasing the axial dimension of the flange portion 32 of the main shaft 30 and the flange portion 42 of the clamp shaft 40 or by increasing the axial dimension of the liner 5. It is possible to adjust the axis of the workpiece 2 using only one of them and only one of the deformable members 113 and 114. When it is possible to appropriately adjust the axis of the workpiece 2 without using a large number of deformable members, a relatively inexpensive jig 100 can be provided, and the jig 100 can be reduced in weight. Can do. In addition, since a plurality of slits are formed in the deformable members 111 to 114, the deformable members 111 to 114 and the jig 100 can be reduced in weight.

  In addition, the jig | tool according to this invention and the chuck apparatus containing a jig | tool can be replaced | exchanged suitably according to the shape of the workpiece | work 2 to support. 15, 16, and 17 show a modification of the jig according to the present invention and a chuck device including the modification, respectively. FIG. 18 shows a modification of the jig according to the present invention. In addition, about the structure similar to the chuck apparatus 10 and the jig | tool 100 (all refer FIG. 2), the same code | symbol is attached | subjected and description is abbreviate | omitted below.

  FIG. 15 is a cross-sectional view of a chuck device 10a including a first other example (a jig 100a) of a position adjusting jig according to the present invention. The jig 100a is fixed to the face plate 7 by a plurality of fixing members such as bolts. The jig 100a includes a main shaft 3a as an example of a shaft member, a plurality of deformable members 113 and 114, and a pressing portion. The pressing portion has a configuration including a clamp shaft 4 a, a long bolt 8, nuts 81 and 82, and a coil spring 9.

  The main shaft 3a has a cylindrical shape. A portion protruding in a flange shape is formed at one end of the main shaft 3a. The clamp shaft 4a has a substantially cylindrical shape. Moreover, the part which protrudes in a flange shape is formed in the end of the clamp shaft 4a. Three steps are formed along the shape of the long bolt 8 inside the clamp shaft 4a.

  The clamp shaft 4a is attached to the main shaft 3a by being inserted into the main shaft 3a. The clamp shaft 4a is slidable with respect to the main shaft 3a. A long bolt 8 and a coil spring 9 are accommodated in the clamp shaft 4a. A load by a hydraulic mechanism (not shown) acts on the nuts 81 and 82 and the long bolt 8 so as to move the long bolt 8 in the left-right direction in FIG.

  The deformable members 113 and 114 are attached to the main shaft 3a so that the back surface of the deformable member 113 and the back surface of the deformable member 114 face each other. The deformable member 113 is attached to the main shaft 3a so as to contact the flange-shaped portion of the clamp shaft 4a. The deformable member 114 is attached to the main shaft 3a so as to contact the flange-shaped portion of the main shaft 3a.

  The jig 100a is attached to the face plate 7 by fixing the main shaft 3a to the face plate 7 in the jig 100a. The main shaft 3a moves together with the face plate 7 of the chuck device 10a. When the pressing portion including the clamp shaft 4a presses the deformable members 113 and 114, the flange-shaped portion of the clamp shaft 4a directly presses the deformable member 113. Further, the clamp shaft 4 a presses the deformable member 114 via the deformable member 113. The deformable members 113 and 114 sandwiched between the clamp shaft 4a and the main shaft 3a are elastic so that the inner diameter and the outer diameter are expanded inward and outward in the radial direction by receiving a load from the pressing portion, respectively. Deform. Thus, according to the chuck device 10a provided with the jig 100a, the axis of the workpiece 2 having a relatively small dimension in the axial direction can be appropriately adjusted by the two deformable members 113 and 114. It should be noted that by using only one of the deformable members 113 and 114, for example, by enlarging the axial dimension of the flange-shaped portion of the main shaft 3a and the flange-shaped portion of the clamp shaft 4a, the workpiece The two axes can be adjusted.

  FIG. 16 is a cross-sectional view of a chuck device 10b including a second another example (jig 100b) of a position adjusting jig according to the present invention. The jig 100b is fixed to the face plate 7 by a plurality of fixing members such as bolts. The jig 100b includes a main shaft 3b as an example of a shaft member, a plurality of deformable members 111, 112, 113, and 114, and a pressing portion. The pressing portion has a configuration including a bolt 101, a washer 102, and a liner 103.

  The main shaft 3b has a cylindrical shape. A portion protruding in a flange shape is formed at one end of the main shaft 3b. A screw hole is formed at the other end of the main shaft 3b. This screw hole is screwed with the screw portion of the bolt 101.

  The main shaft 3b faces the back surface of the deformable member 111 and the back surface of the deformable member 112, and the back surface of the deformable member 113 and the back surface of the deformable member 114 face each other. , 112, 113, 114 are attached. Moreover, the liner 103 and the liner 5 are attached to the main shaft 3b. The liner 103 and the liner 5 have a cylindrical shape. The deformable members 111, 112, 113, 114, the liner 103, and the liner 5 are the liner 103, deformable members 111, 112, liner along the direction from the threaded portion of the main shaft 3 b toward the flange-shaped portion. 5 and the deformable members 113 and 114 are attached to the main shaft 3b in this order. The main shaft 3 b passes through the deformable members 111 to 114 and the liner 5. At this time, the deformable member 111 is attached to the main shaft 3 b so as to contact the liner 103. The deformable member 114 is attached to the main shaft 3b so as to contact the flange-shaped portion of the main shaft 3b.

  The jig 100b is attached to the face plate 7 by fixing the main shaft 3b to the face plate 7 in the jig 100b. The main shaft 3b moves together with the face plate 7 of the chuck device 10b. When the pressing portion including the bolt 101 presses the deformable members 111 to 114, the bolt 101 is tightened in the screw hole. Thereby, since the liner 103 moves toward the flange-shaped part of the main shaft 3b, the liner 103 presses the deformable member 111 directly. Further, the liner 103 presses the deformable member 113 through the liner 5. At this time, the flange-shaped part of the main shaft 3b functions as a stopper for restricting the movement of the deformable members 111, 112, 113, 114 and the liners 5, 103 with respect to the main shaft 3b. Further, the liner 5 functions as a stopper that limits the movement of the deformable members 111 and 112 with respect to the main shaft 3b.

  In the deformable members 111 to 114 sandwiched between the liner 103 and the main shaft 3b of the pressing portion, the inner diameter and the outer diameter are respectively changed inward and outward in the radial direction by receiving a load from the pressing portion. Elastically deforms to spread. As described above, according to the chuck device 10b provided with the jig 100b, by using the pressing portion including the bolt 101, the axis of the workpiece 2 provided with the step on the inner peripheral edge is changed to the four deformable members 111, 112, 113, 114 can be adjusted appropriately.

  One of the deformable members 111 and 112 is increased by increasing the axial dimension of the flange-shaped portion of the main shaft 3b or by increasing the axial dimension of the liner 5 or the liner 103. The axis of the workpiece 2 can be adjusted using only one and only one of the deformable members 113 and 114.

  FIG. 17 is a cross-sectional view of a chuck device 10c including a third other example (jig 100c) of a position adjusting jig according to the present invention. In the following, the same components as those of the chuck device 10b (see FIG. 16) are denoted by the same reference numerals, and description thereof is omitted. The jig 100c includes a main shaft 3c as an example of a shaft member, a plurality of deformable members 113 and 114, and a pressing portion.

  The main shaft 3c has a cylindrical shape. A portion protruding in a flange shape is formed at one end of the main shaft 3c. A screw hole is formed at the other end of the main shaft 3c. This screw hole is screwed with the screw portion of the bolt 101. The main shaft 3c is configured to have an axial dimension that is smaller than the axial dimension of the main shaft 3b (see FIG. 16) of the chuck device 10b with respect to the screw hole.

  The deformable members 113 and 114 are attached to the main shaft 3c so that the back surface of the deformable member 113 and the back surface of the deformable member 114 face each other. The deformable members 113 and 114 and the liner 103 are attached to the main shaft 3c in the order of the liner 103 and the deformable members 113 and 114 along the direction from the threaded portion of the main shaft 3c to the flange-shaped portion. At this time, the deformable member 113 is attached to the main shaft 3 c so as to contact the liner 103. The deformable member 114 is attached to the main shaft 3c so as to contact the flange-shaped portion of the main shaft 3c.

  The jig 100c is attached to the face plate 7 by fixing the main shaft 3c to the face plate 7 in the jig 100c. The main shaft 3b moves together with the face plate 7 of the chuck device 10c. When the pressing portion including the bolt 101 presses the deformable members 113 and 114, the bolt 101 is tightened in the screw hole. Thereby, since the liner 103 moves toward the flange-shaped part of the main shaft 3c, the liner 103 presses the deformable member 113 directly. The deformable member 113 to be pressed presses the deformable member 114.

  In the deformable members 113 and 114 sandwiched between the liner 103 and the main shaft 3c of the pressing portion, the inner diameter and the outer diameter are respectively changed inward and outward in the radial direction by receiving a load from the pressing portion. Elastically deforms to spread. As described above, according to the chuck device 10c provided with the jig 100c, by using the pressing portion including the bolt 101, the axis of the workpiece 2 having a relatively small dimension in the axial direction is moved to the two deformable members 113, 114 can be adjusted appropriately. It should be noted that the axial center of the workpiece 2 is adjusted using only one of the deformable members 113 and 114 by increasing the axial dimension of the flange-shaped portion of the main shaft 3 c or the liner 103. be able to.

  FIG. 18 is a sectional view of a fourth other example (jig 100d) of the position adjusting jig according to the present invention. In the following, the same components as those of the jig 100c (see FIG. 17) are denoted by the same reference numerals, and description thereof is omitted. The jig 100d is attached to the face plate 7 (see FIG. 17) of the chuck device 10c in the same manner as the jig 100c. The jig 100d includes a main shaft 3d as an example of a shaft member, a plurality of deformable members 113 and 114, and a pressing portion.

  The main shaft 3d has a cylindrical shape. A flange portion 32d that protrudes in a flange shape is formed at one end of the main shaft 3d. A screw hole is formed at the other end of the main shaft 3d. A plurality of bolt holes (without reference numbers) are formed in the flange portion 32d. These bolt holes are arranged at equal intervals along the circumferential direction of the main shaft 3d. In the flange portion 32d, the surface facing the deformable member 114 is inclined from a direction substantially orthogonal to the axial direction of the main shaft 3d.

  The jig 100d is attached to the face plate 7 by fixing the flange portion 32d of the main shaft 3d to the face plate 7 (see FIG. 17) in the jig 100d. When the pressing portion including the bolt 101 presses the deformable members 113 and 114, the bolt 101 is tightened in the screw hole. Thereby, since the liner 103 moves toward the flange portion 32d of the main shaft 3d, the liner 103 directly presses the deformable member 113. The deformable member 113 to be pressed presses the deformable member 114.

  In the deformable members 113 and 114 sandwiched between the liner 103 of the pressing portion and the stopper surface 35d formed at the base of the flange portion 32d, the inner diameter and the outer diameter are respectively changed by receiving a load from the pressing portion. Elastically deforms so as to spread radially inward and outward. As described above, according to the chuck device provided with the jig 100d, by using the pressing portion including the bolt 101, the axis of the workpiece 2 having a relatively small dimension in the axial direction is moved to the two deformable members 113 and 114. Can be adjusted appropriately. Note that the outer diameter and inner diameter of the two deformable members 113 and 114 used in the jig 100d are the outer diameter and inner diameter of the deformable members 113 and 114 used in the chuck device 10 (see FIG. 2) of the first embodiment. Is preferably smaller.

  In addition, by adjusting the axial dimension of the flange portion 32d of the main shaft 3d or the liner 103, the axial center of the workpiece 2 is adjusted using only one of the deformable members 113 and 114. Can do. Thus, even with a relatively small number of deformable members, for example, a contact portion between the deformable member 113 and the workpiece 2 by the plurality of outer slits 138 (see FIG. 10) and the plurality of inner slits 139 (see FIG. 10). Therefore, the work 2 can be supported appropriately. That is, in the jigs 100a, 100b, 100c, and 100d, even the workpiece 2 having a limited axial dimension is appropriately supported by using, for example, one deformable member 113 and the axis of the workpiece 2 is appropriately adjusted. can do.

  Furthermore, when the axis of the workpiece 2 can be appropriately adjusted without using a large number of deformable members, relatively inexpensive jigs 100a, 100b, 100c, and 100d can be provided. The jigs 100a, 100b, 100c, and 100d can be reduced in weight. Further, for example, by forming a plurality of slits 138, 139, the deformable member 113 and the jigs 100a, 100b, 100c, 100d can be reduced in weight.

  For example, in the jigs 100a, 100b, 100c, and 100d in which the back surface of the deformable member 113 is opposed to the back surface of the deformable member 114, the outer slit 138 in the deformable member 113 is the same as the jig 100 (see FIG. 2). The deformable member 113 and the deformable member 114 are overlapped with each other so that the positions of the inner slits 149 of the adjacent deformable members 114 substantially coincide with each other (see FIGS. 11 and 12).

  As described above, according to the machine tool (not shown) including the chuck devices 10a, 10b, and 10c including the jigs 100a, 100b, 100c, and 100d, the workpiece to be processed in the chuck devices 10a, 10b, and 10c. According to the shape of 2, the deformable member attached to the main shafts 3a, 3b, 3c, 3d can be appropriately selected, and a plurality of deformable members can be used.

  Furthermore, according to the configuration in which the jigs 100a, 100b, 100c, and 100d are detachably attached to the chuck devices 10a, 10b, and 10c, the deformable member having an appropriate size according to the size or shape of the workpiece 2 to be processed. 111 to 114 and jigs 100a, 100b, 100c, and 100d can be used. That is, the deformable members 111 to 114 or jigs 100a, 100b, 100c, and 100d attached to the main shafts 3a, 3b, 3c, and 3d are used while being appropriately replaced according to the size or shape of the workpiece 2 to be processed. Can do.

(Second Embodiment)
19 to 22 show a chuck device for an inspection device or machine tool including jigs 200a, 200b, 200c, and 200d as position adjustment jigs according to the present invention. 19 to 22 are sectional views of jigs 200a, 200b, 200c, and 200d used in an example of an inspection device according to the present invention. The chuck device according to the second embodiment has a configuration for gripping the workpiece 2 supported by the inspection device. The inspection device is used, for example, to inspect the position of the axis of the workpiece 2 to be inspected. Note that the chuck device of the second embodiment may be configured to grip the workpiece 2 to be processed in a machine tool such as a lathe or a polishing machine. That is, the center 50 described below may be a part of a machine tool.

  As shown in FIG. 19, the jig 200 a is fixed to an inspection device or machine tool (not shown) by the center 50. The jig 200a includes a main shaft 60 as an example of a shaft member, a deformable member 113, and a pressing portion. The pressing portion has a configuration including a bolt 201, a collar 202, and a liner 51. The collar 202 has an annular shape. The liner 51 has a cylindrical shape.

  The main shaft 60 includes a body portion 60a having a cylindrical shape and a flange portion 60c. The flange portion 60 c is formed at one end portion of the main shaft 60 in the axial direction. In the jig 200 a fixed to the center 50 from both sides in the axial direction, the body portion 60 a extends in a direction substantially coinciding with the axial direction of the workpiece 2. A threaded portion 60 b is formed at the other axial end portion of the main shaft 60. The screw part 60 b is screwed with the bolt 201. The collar 202 is attached to the screw portion 60b.

  The flange portion 32 protrudes outward in the radial direction from the body portion 60a in the entire circumferential direction of the body portion 60a. The surface of the flange portion 60c on the screw portion 60b side functions as a stopper surface 60d. The stopper surface 60d is a surface where the end surfaces 134 and 136 of the deformable member 113 and the main shaft 60 come into contact.

  The deformable member 113 is attached to the main shaft 60 so that the back surface of the deformable member 113 faces the stopper surface 60d. Further, the liner 51 is attached to the body portion 60 a so as to contact the deformable member 113. The deformable member 113, the collar 202, and the liner 51 are arranged in the order of the collar 202, the liner 51, and the deformable member 113 along the direction from the threaded portion 60b of the main shaft 60 to the flange portion 60c. Attached to.

  When the pressing portion including the bolt 201 presses the deformable member 113, the bolt 201 is fastened to the screw portion 60b. Thereby, since the collar 202 and the liner 51 move toward the flange portion 60c, the liner 51 directly presses the deformable member 113. At this time, the stopper surface 60 d of the flange portion 60 c functions as a stopper that restricts the movement of the deformable member 113 and the liner 51 with respect to the main shaft 60.

  In the deformable member 113 sandwiched between the liner 51 of the pressing portion and the flange portion 60c, the inner diameter and the outer diameter expand inward and outward in the radial direction by receiving a load from the pressing portion, respectively. It is elastically deformed. Thus, in the chuck device provided with the jig 200a, only one deformable member 113 is used. According to the chuck device provided with the jig 200a, the axis of the workpiece 2 can be adjusted by using the pressing portion including the bolt 201. In this way, even with a relatively small number of deformable members, a plurality of outer slits 138 (see FIG. 10) and a plurality of inner slits 139 (see FIG. 10) can be used for the contact portion between the deformable member 113 and the workpiece 2. Since the number and the area of the contact surface can be earned, the workpiece 2 can be appropriately supported. That is, in the jig 200a, even the workpiece 2 having a limited axial dimension can be appropriately supported using the single deformable member 113 and the axis of the workpiece 2 can be adjusted appropriately.

  Note that the deformable member 113 can be obtained as two deformable members by reducing the axial dimension of the flange-shaped portion of the main shaft 60 or by reducing the axial dimension of the liner 51 or the collar 202. 114, or the deformable members 111 and 112, the axis of the workpiece 2 can be adjusted.

  FIG. 20 shows a chuck device for an inspection device or machine tool including a jig 200b as a position adjusting jig according to the present invention. In the jig 200b, a liner 52 having an axial dimension smaller than the axial dimension of the liner 51 (see FIG. 19) is attached to the main shaft 60.

  The deformable members 113 and 114 are attached to the main shaft 60 so that the back surface of the deformable member 113 faces the back surface of the deformable member 114. Further, the liner 52 is attached to the body portion 60 a so as to contact the deformable member 113. The deformable members 113 and 114, the collar 202, and the liner 52 are formed of the collar 202, the liner 52, and the deformable members 113 and 114 along the direction from the threaded portion 60b of the main shaft 60 to the flange portion 60c. It is attached to the main shaft 60 in order.

  When the pressing portion including the bolt 201 presses the deformable members 113 and 114, the bolt 201 is fastened to the screw portion 60b. Thereby, since the collar 202 and the liner 52 move toward the flange portion 60c, the liner 52 directly presses the deformable member 113. The deformable member 113 to be pressed presses the deformable member 114. At this time, the stopper surface 60 d of the flange portion 60 c functions as a stopper that restricts the movement of the deformable members 113 and 114 and the liner 52 with respect to the main shaft 60.

  In the deformable members 113 and 114 sandwiched between the liner 52 of the pressing portion and the stopper surface 60d of the flange portion 60c, the inner diameter and the outer diameter are radially inward by receiving a load from the pressing portion. And elastically deform so as to spread outward. As described above, according to the chuck device including the jig 200b, by using the pressing portion including the bolt 201, the axis of the workpiece 2 having a relatively small dimension in the axial direction can be moved to the two deformable members 113 and 114. Can be adjusted more appropriately.

  Since the other configuration of the jig 200b is the same as that of the jig 200a (see FIG. 19), the same reference numerals are given and description thereof is omitted.

  In the jig 200b as well, as with the jig 100 (see FIG. 2), the position of the outer slit 138 in the deformable member 113 can be substantially matched with the position of the inner slit 149 in the adjacent deformable member 114. The deformable member 113 and the deformable member 114 overlap each other (see FIGS. 11 and 12).

  FIG. 21 shows a chuck device for an inspection device or machine tool including a jig 200c as a position adjusting jig according to the present invention. The jig 200c includes a main shaft 61 as an example of a shaft member, deformable members 111, 112, 113, and 114, and a pressing portion. The pressing portion includes a bolt 201, a collar 203, and liners 53 and 59. The collar 203 has an annular shape. The liner 53 and the liner 59 have a cylindrical shape.

  The main shaft 61 has an axial dimension larger than the axial dimension of the main shaft 60 (see FIG. 20). The main shaft 61 includes a body portion 61a and a flange portion 61c having a cylindrical shape. The flange portion 61 c is formed at one end portion of the main shaft 61 in the axial direction. A threaded portion 61 b is formed at the other axial end portion of the main shaft 61. The screw part 61 b is screwed with the bolt 201. The collar 203 is attached to the screw portion 61b.

  The main shaft 61 has deformable members 111 to 114 such that the back surface of the deformable member 111 faces the back surface of the deformable member 112 and the back surface of the deformable member 113 faces the back surface of the deformable member 114. Is attached. The liner 59 is attached to the main shaft 61 so as to contact the deformable member 111. Further, the liner 59 is attached to the body portion 61 a so as to contact the deformable member 112 and the deformable member 113. The deformable members 111 to 114, the collar 203, the liner 53, and the liner 59 are arranged along the direction from the threaded portion 61b of the main shaft 61 to the flange portion 61c along the collar 203, the liner 59, the deformable member 111, 112, the liner 53, and the deformable members 113 and 114 are attached to the main shaft 61 in this order.

  When the pressing portion including the bolt 201 presses the deformable members 111 to 114, the bolt 201 is fastened to the screw portion 61b. Thereby, since the collar 203 and the liner 59 move toward the flange portion 61c, the liner 59 directly presses the deformable member 111. Further, the liner 53 presses the deformable member 113 through the liner 59 and the deformable members 111 and 112. At this time, the stopper surface 61 d of the flange portion 61 c functions as a stopper that restricts the movement of the deformable members 111, 112, 113, 114 and the liners 59, 53 with respect to the main shaft 61. The liner 59 functions as a stopper that limits the movement of the deformable members 111 and 112 with respect to the main shaft 61.

  In the deformable members 111 to 114 sandwiched between the liner 59 of the pressing portion and the flange portion 61c, the inner diameter and the outer diameter are respectively changed inward and outward in the radial direction by receiving a load from the pressing portion. It is elastically deformed to spread. As described above, according to the chuck device including the jig 200c, by using the pressing portion including the bolt 201, the axis of the workpiece 2 having the step provided on the inner peripheral edge is moved to the four deformable members 111 and 112. , 113, 114 can be adjusted appropriately.

  It should be noted that only one of the deformable members 111 and 112 and only one of the deformable members 113 and 114 are increased by increasing the dimension of the liner 59 or the liner 53 in the axial direction. Can be used to adjust the axis of the workpiece 2.

  In the jig 200c, similarly to the jig 100 (see FIG. 2), the position of the outer slit 138 in the deformable member 113 can be substantially matched with the position of the inner slit 149 in the adjacent deformable member 114. The deformable member 113 and the deformable member 114 overlap each other (see FIGS. 11 and 12). Similarly, the deformable member 111 and the deformable member 112 are arranged so that the position of the outer slit (no reference number) in the deformable member 111 substantially matches the position of the inner slit (no reference number) in the adjacent deformable member 112. And overlap each other.

  FIG. 22 shows a chuck device for an inspector or machine tool including a jig 200d as a position adjusting jig according to the present invention. In the jig 200d, a liner 54 is attached to the main shaft 61 instead of the deformable member 112, the liner 53, and the deformable member 113 in the jig 200c (see FIG. 21). The liner 54 has a substantially cylindrical shape. A step is formed on the outer surface of the liner 54. The inner surface of the liner 54 has the shape of the inner surface of the tube along the shape of the body portion 61a. The end surfaces 54 a and 54 b of the liner 54 are opposed to the axial direction of the main shaft 61 by extending in a direction substantially orthogonal to the axial direction of the liner 54.

  The deformable members 111 and 114, the collar 203, and the liners 59 and 54 are arranged along the direction from the screw portion 61 b of the main shaft 61 to the flange portion 61 c along the collar 203, the liner 59, the deformable member 111, and the liner 54. And the deformable member 114 are attached to the main shaft 61 in this order. The deformable member 111 is attached to the body portion 61 a so as to face the end surface 54 a of the liner 54. The deformable member 114 is attached to the body portion 61 a so that the end surfaces 144 and 146 face the end surface 54 b of the liner 54.

  When the pressing part including the bolt 201 presses the deformable members 111 and 114, the bolt 201 is fastened to the screw part 61b. Thereby, since the collar 203 and the liner 59 move toward the flange portion 61c, the liner 59 directly presses the deformable member 111. The deformable member 111 to be pressed presses the deformable member 114 through the liner 54. At this time, the stopper surface 61 d of the flange portion 61 c functions as a stopper that limits the movement of the deformable members 111 and 114 and the liner 54 with respect to the main shaft 61 while being in contact with the end surface 145 of the deformable member 114.

  In the pressing portion, the liner 59, the deformable member 111 sandwiched between the liner 54, and the deformable member 114 sandwiched between the liner 54 and the stopper surface 61d receive an inner diameter by receiving a load from the pressing portion. And the outer diameter are elastically deformed so as to spread inward and outward in the radial direction, respectively. Thus, according to the chuck device provided with the jig 200d, by using the pressing portion including the bolt 201, the two deformable members 111 and 114 are arranged on the axis of the workpiece 2 having a step on the inner peripheral edge. Can be adjusted appropriately. The axial center of the workpiece 2 having a relatively small axial dimension can be adjusted more appropriately by the two deformable members 113 and 114.

  Since the other configuration of the jig 200d is the same as that of the jig 200c (see FIG. 21), the same reference numerals are given and description thereof is omitted.

  In the jig 200d as well, as with the jig 100 (see FIG. 2), the position of the outer slit (no reference number) in the deformable member 111 substantially matches the position of the inner slit 149 in the deformable member 114. The deformable member 111 and the deformable member 114 overlap each other through the liner 54.

  The jig 200d may use the deformable members 112 and 113 instead of the liner 54 in accordance with the dimension of the workpiece 2 in the axial direction. In this case, an annular collar may be disposed between the deformable member 112 and the deformable member 113. Also in the configuration using the deformable members 112 and 113 instead of the liner 54, it is preferable that the position of the outer slit (no reference number) in the deformable member 111 is variable as in the jig 100 (see FIG. 2). The deformable member 111 and the deformable member 112 overlap each other so as to substantially coincide with the position of the inner slit (no reference number) in the member 112. Preferably, the deformable member 113 and the deformable member 114 overlap each other so that the position of the outer slit 138 in the deformable member 113 substantially coincides with the position of the inner slit 149 in the deformable member 114 (see FIG. 11, 12).

  As described above, according to the configuration of the inspection device or the machine tool including the chuck device including the jigs 200a, 200b, 200c, and 200d, there is no possibility of damaging a work having a small axial dimension, and the axis of the work 2 An inspection device or a machine tool capable of appropriately adjusting the mind can be provided.

  The jigs 200a, 200b, 200c, and 200d are removably attached to the inspection device or machine tool by the center 50.

  According to this configuration, the deformable members 111 to 114 and the jigs 200a, 200b, 200c, and 200d having appropriate dimensions are provided in accordance with the size or shape of the workpiece 2 to be inspected or measured or the workpiece 2 to be processed. Can be used. That is, the deformable members 111 to 114 or the jigs 200a, 200b, 200c, and 200d attached to the main shafts 60 and 61 can be used while being appropriately replaced according to the size or shape of the workpiece 2.

(Third embodiment)
FIG. 23 shows a jig 300 used for alignment adjustment of the device 20 as a position adjusting jig according to the present invention. FIG. 23 is a cross-sectional view of a jig 300 as a position adjusting jig used for alignment adjustment of the device 20. 23, the left-right direction in FIG. 23 is the vertical up-down direction, and the up-down direction in FIG. 23 is the horizontal direction. That is, the jig 300 is preferably used so that the axial direction of the following main shaft 330 extends in a substantially vertical vertical direction, and the jig 300 supports the device 20 in a substantially vertical upward direction. .

  The device 20 as a work is formed with a hole as a tubular portion. The jig 300 is configured to be interlocked with the operation of a hydraulic mechanism (not shown). The jig 300 includes a main shaft 330 as an example of a shaft member, deformable members 113 and 114, and a pressing portion. The pressing portion has a configuration including a compression spring 309, a cap 303, and a clamp shaft 320. The cap 303 has a leg portion having a columnar shape and a lid portion having a disc shape. The leg portion and the lid portion are integral. A hole is formed in the center of the lid. The bolt 301 passes through this hole.

  The main shaft 330 has a substantially cylindrical shape. That is, the inside of the main shaft 330 is formed in a hollow shape. The main shaft 330 includes a shaft portion 331, a flange portion 332, and a base portion 334. The flange portion 332 is formed at the central portion of the main shaft 330 in the axial direction. Openings are formed at both axial ends of the main shaft 330. In the main shaft 330, the shaft portion 331, the flange portion 332, and the base portion 334 are arranged in the order of the shaft portion 331, the flange portion 332, and the base portion 334 along the axial direction of the main shaft 330. An O-ring 329 is attached to a groove formed near the boundary between the flange portion 332 and the base portion 334.

  The flange portion 332 protrudes outward in the radial direction from the shaft portion 331 in the entire circumferential direction of the shaft portion 331. A plurality of bolt holes are formed in the flange portion 332. The plurality of bolt holes are arranged at equal intervals along the circumferential direction. The base of the flange portion 332 protrudes toward the shaft portion 331 so that the dimension in the axial direction is larger than that of other portions. This protruding portion functions as a stopper surface 335. The stopper surface 335 is a surface where the end surface 145 of the deformable member 114 and the main shaft 330 are in contact with each other.

  The clamp shaft 320 includes a shaft portion 321, a screw portion 322, and a flange portion 323 having a substantially cylindrical shape. The screw portion 322 is screwed with the screw portion of the bolt 301. The clamp shaft 320 is attached to the main shaft 330 so as to be disposed inside the main shaft 330. An O-ring 328 is disposed between the base portion 334 of the main shaft 330 and the flange portion 323 of the clamp shaft 320. A hollow portion 333 is formed in a region surrounded by the main shaft 330 and the clamp shaft 320 inside the main shaft 330. A compression spring 309 is accommodated in the hollow portion 333.

  The clamp shaft 320 is slidable with respect to the main shaft 330. Further, the clamp shaft 320 is interlocked with the operation of a hydraulic mechanism (not shown). That is, the load by the hydraulic mechanism acts on the flange portion 323 so as to move the clamp shaft 320 in the left-right direction in FIG.

  The deformable members 113 and 114 are attached to the shaft portion 331 of the main shaft 330. The deformable members 113 and 114 are attached to the main shaft 330 so that the back surface of the deformable member 113 and the back surface of the deformable member 114 face each other. In the jig 300, similarly to the jig 100 (see FIG. 2), the deformable member is arranged so that the position of the outer slit 138 in the deformable member 113 substantially coincides with the position of the inner slit 149 in the deformable member 114. 113 and the deformable member 114 overlap each other (see FIGS. 11 and 12).

  The deformable members 113 and 114 are attached to the shaft portion 331 in the order of the deformable members 113 and 114 along the direction from the shaft portion 331 to the base portion 334 in the axial direction of the main shaft 330. The deformable member 113 is attached to the shaft portion 331 so as to contact the leg portion of the cap 303. The deformable member 114 is attached to the shaft portion 331 so that the end surface 145 contacts the stopper surface 335 of the main shaft 330. A cap 303 is attached to the main shaft 330 to which the deformable members 113 and 114 are attached so as to cover the shaft portion 331. Further, the bolt 301 that penetrates the cap 303 is screwed into the threaded portion 322 of the clamp shaft 320. The cap 303 is fixed to the clamp shaft 320 via the bolt 301.

  When the pressing portion including the clamp shaft 320 presses the deformable members 113 and 114, first, a force that the clamp shaft 320 is pressed to the left in FIG. To do. Next, when the load of the hydraulic mechanism is released, the position of the main shaft 330 with respect to the hydraulic mechanism along the axial direction of the main shaft 330 is fixed. Further, based on the spring force of the compression spring 309, the clamp shaft 320 moves to the right in FIG. 23 (that is, substantially vertically downward) with respect to the main shaft 330. Thereby, the cap 303 fixed to the clamp shaft 320 presses the deformable member 113. Further, the deformable member 113 to be pressed presses the deformable member 114.

  In the deformable members 113 and 114 sandwiched between the cap 303 of the pressing portion and the flange portion 332, the inner diameter and the outer diameter are respectively changed inward and outward in the radial direction by receiving a load from the pressing portion. It is elastically deformed to spread. By expanding the inner diameter and the outer diameter inward and outward in the radial direction, the device 20 can be tightened outward in the radial direction while the main shaft 330 is tightened inward in the radial direction. As described above, the alignment adjustment of the device 20 can be performed by using the jig 300.

  In addition, by reducing the axial dimension of the leg portion of the cap 303 or attaching a cylindrical liner to the shaft portion 331, the device using any one of the deformable members 113 and 114 is used. Twenty alignment adjustments can be performed. Note that in the jig 300, the variable shape member to be used is changed by appropriately changing the axial dimension of the shaft portion 331 of the main shaft 330 according to the shape of the device 20 to be adjusted. Any one (one or more) of 111-114 can be selected suitably.

  As described above, the position adjusting jig of the present invention can be used for alignment adjustment of the device 20.

(Fourth embodiment)
FIG. 24 shows a chuck device including a jig 400 as a position adjusting jig according to the present invention. FIG. 24 is a cross-sectional view of an example of a chuck device including a jig 400 provided with deformable members 413 and 414 for supporting the rod-shaped workpiece 2. The chuck device is configured to grip the workpiece 2 to be machined in the machine tool, and is a lathe chuck device of the machine tool, for example.

  The chuck device includes a face plate 407. A columnar stopper 406 is attached to the face plate 407. The jig 400 is detachably fixed to the face plate 407 by a plurality of fixing members such as bolts 405. The jig 400 includes a cylinder 403 as an example of a shaft member, two deformable members 413 and 414, and a pressing portion. The pressing portion has a configuration including an annular face plate 402, a plurality of bolts 405, and a nut 401.

  The main shaft 408 of the chuck device is connected to a feeding device or a mechanical feeding device including a hydraulic mechanism (not shown). A support plate 409 is fixed to the main shaft 408. The face plate 402 and the tube 403 are connected to each other by the plurality of bolts 405 so that the axial center line of the face plate 402, the axial center line of the tube 403, and the axial center line of the main shaft 408 coincide with each other. Attached to. The plurality of bolts 405 pass through the face plate 402, the cylinder 403, the face plate 407, and the support plate 409. A nut 401 is screwed into an end portion of the bolt 405 protruding from the face plate 402. A nut 404 is screwed into an end portion of the bolt 405 protruding from the support plate 409.

  Inside the tube 403, liners 451 and 452 having a cylindrical shape and deformable members 413 and 414 having a substantially annular shape are arranged. The liners 451 and 452 and the deformable members 413 and 414 are connected to the tube 403 so that the outer peripheral edges of the liners 451 and 452 and the outer peripheral edges 433 and 443 of the deformable members 413 and 414 are opposed to the inner periphery of the tube 403. It is attached. The deformable members 413 and 414 and the liners 451 and 452 are slidable with respect to the tube 403 along the axial direction.

  The deformable member 413 and the deformable member 414 have the same configuration. The deformable members 413 and 414 are attached to the tube 403 so that the back surface of the deformable member 413 and the back surface of the deformable member 414 face each other. The deformable members 413 and 414 have a substantially annular shape. Therefore, the deformable members 413 and 414 are attached to the tube 403 so that the entire outer peripheral edges 433 and 443 of the deformable members 413 and 414 are opposed to the entire inner surface of the tube 403. In the state before the deformable members 413 and 414 are elastically deformed, a gap is generated between the end surface 436 and the end surface 446.

  The deformable members 413 and 414 and the liners 451 and 452 are deformable members 413 and 414, a liner 451, deformable members 413 and 414, along the direction from the face plate 402 to the face plate 407 in the axial direction of the tube 403. The liners 452 are arranged in this order. One deformable member 413 is arranged in the tube 403 so that the end surface 435 contacts the face plate 402. One deformable member 414 is attached to the cylinder 403 so that the end surface 445 contacts the liner 451. Furthermore, another deformable member 413 is disposed on the tube 403 so that the end surface 435 contacts the liner 451. Another deformable member 414 is attached to the cylinder 403 so that the end surface 445 contacts the liner 452.

  In the deformable members 413 and 414, unlike the deformable member 113 shown in FIGS. 7 and 8 used in the chuck device 10 (see FIG. 2) of the first embodiment, the cylindrical portion is located on the outside in the radial direction. And the outer periphery 433,443 is formed of the outer edge of the said cylindrical part. In the deformable members 413 and 414, the outer peripheral edges 433 and 443 positioned at the radially outer end and the inner peripheral edges 431 and 441 positioned at the radially inner end have a circular shape.

  The deformable members 413 and 414 have inclined portions 432 and 442. The inclined portions 432 and 442 are inclined with respect to a direction substantially orthogonal to the axial direction of the cylinder 403 when the deformable members 413 and 414 are attached to the cylinder 403. Although not shown, the inclined portions 432 and 442 are each formed with a plurality of outer slits and a plurality of inner slits. The outer slit extends along the radial direction from the outer peripheral edge 433 443 toward the inner peripheral edge 431 441. The inner slits extend along the radial direction from the inner peripheral edges 431 and 441 toward the outer peripheral edges 433 and 443.

  In the inclined portion 432, the same number of outer slits and inner slits are formed. In the inclined portion 442, the same number of outer slits and inner slits are formed. In the inclined portions 432 and 442, for example, six outer slits and inner slits are formed, respectively. Further, in the inclined portion 432, the outer slits and the inner slits are alternately arranged at equal intervals along the circumferential direction of the deformable member 413. In the inclined portion 442, the outer slits and the inner slits are alternately arranged at equal intervals along the circumferential direction of the deformable member 414.

  In the jig 400, similarly to the jig 100 (see FIG. 2), the deformable member 413 and the deformable member 413 are arranged so that the position of the outer slit in the deformable member 413 substantially coincides with the position of the inner slit in the deformable member 414. The deformable member 414 overlaps each other.

  In the jig 400, the face plate 402 moves in the axial direction of the main shaft 408 with respect to the cylinder 403 and the face plate 407 by rotating the nut 401 with respect to the bolt 405. Thereby, the deformable member 413 located on the side close to the face plate 402 is pressed by the face plate 402. By the deformable member 413 to be pressed, the deformable member 414 and the deformable members 413 and 414 located on the side close to the face plate 407 are pressed.

  The deformable members 413 and 414 to be pressed are elastically deformed so that the outer peripheral edges 433 and 443 move radially outward and the inner peripheral edges 431 and 441 move radially inward. . At this time, the deformable members 413 and 414 are elastically deformed so that the direction in which the inclined portions 432 and 442 extend is in a direction parallel to a direction substantially orthogonal to the axial direction of the tube 403. Along with such deformation, the deformable members 413 and 414 are elastically deformed so that the dimensions of the slits are enlarged at the tips of the outer and inner slits along the circumferential direction of the deformable members 413 and 414.

  When the deformable members 413 and 414 receive a load from the pressing portion, the end surface 435 of the deformable member 413 is pressed against the face plate 402. Further, the end surface 436 presses the end surface 446 and the end surface 434 presses the end surface 444 by the deformable member 413 to be pressed. At this time, the positions of these end faces 434, 444, 436, and 446 substantially coincide with each other.

  By deforming the deformable members 413 and 414 in this way, the inner peripheral edges 431 and 441 of the deformable members 413 and 414 are firmly tightened the work 2 inward in the radial direction and in the circumferential direction. Tighten almost evenly along. Further, the outer peripheral edges 433 and 443 firmly tighten the tube 403 outward in the radial direction, and tighten substantially uniformly along the circumferential direction. In this way, the deformable members 413 and 414 are supported by tightening the rod-shaped workpiece 2 while firmly tightening the cylinder 403.

  In the jig 400, the deformable member to be used is changed from the deformable members 413 and 414 by appropriately changing the axial dimension of the cylinder 403 according to the shape of the workpiece 2 to be processed. Either (one or more) can be selected as appropriate, and deformable members having different dimensions can be used in appropriate combination. As a result, it is possible to appropriately support a workpiece having an outer surface provided with a step, and to appropriately adjust the axis of the workpiece.

  The jig 400 configured as described above can exhibit the same operational effects as those of the chuck device 10 (see FIG. 2) of the first embodiment. For example, the deformable members 413 and 414 used in the jig 400 have the same functions and effects as those of the deformable members 111 to 114 used in the jig 100 of the chuck device 10 (see FIG. 2) of the first embodiment. Can be demonstrated.

  In addition, the jig | tool according to this invention for supporting the rod-shaped workpiece | work 2 is not limited to the jig | tool used for machine tools, such as a lathe and a grinding machine. The inspection device shown in FIGS. 19 to 22 or the jig used for alignment adjustment of the device 20 shown in FIG. 23 is also configured to support a rod-shaped workpiece (or device) inward in the radial direction. It may be.

  The embodiment disclosed above should be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above embodiments but by the scope of claims, and includes all modifications and variations within the meaning and scope equivalent to the scope of claims.

2: workpiece, 5: liner, 10: chuck device, 30: main shaft, 40: clamp shaft, 100: jig, 111, 112, 113, 114: deformable member, 131, 141: outer peripheral edge, 132, 142 : Inclined part, 133, 143: Inner edge, 138, 148: Outer slit, 139, 149: Inner slit

Claims (12)

A deformable member for supporting a workpiece having a substantially annular shape and having a rod-like or tubular portion;
A shaft member to which the deformable member is attached;
A pressing portion that presses the deformable member attached to the shaft member,
The deformable member has an inclined portion that is inclined with respect to a direction substantially orthogonal to the axial direction of the shaft member,
The inclined portion includes a plurality of outer slits extending along the radial direction of the deformable member from the outer peripheral edge to the inner peripheral edge of the deformable member, and from the inner peripheral edge of the deformable member to the outer peripheral edge. A plurality of inner slits extending along the radial direction,
In the inclined portion, the outer slit and the inner slit are formed in the same number as each other, arranged alternately and at equal intervals along the circumferential direction of the deformable member,
When the pressing portion presses the deformable member, the outer peripheral edge of the deformable member moves outward in the radial direction, and the inner peripheral edge of the deformable member is in the radial direction. A position adjusting jig in which the deformable member is elastically deformed so as to move inwardly.   The position adjusting jig according to claim 1, comprising a plurality of deformable members. The number of the outer slits in each of the deformable members is the same,
The number of the inner slits in each of the deformable members is the same,
The plurality of deformable members overlap each other so that the position of the outer slit in one of the deformable members substantially coincides with the position of the inner slit in another one of the deformable members adjacent to each other. 2. The position adjusting jig according to 2.   The position adjusting jig according to any one of claims 1 to 3, wherein the outer peripheral edge of the deformable member has a circular shape.   5. The position adjusting device according to claim 1, wherein the inclined portion is inclined in a range of 5 ° or more and 20 ° or less with respect to a direction substantially orthogonal to the axial direction of the shaft member. jig.   The position adjusting jig according to any one of claims 1 to 5, wherein a cylindrical member interposed between the pressing portion and the deformable member is attached to the shaft member.   A machine tool comprising a chuck device including the position adjusting jig according to any one of claims 1 to 6. The position adjusting jig is detachably attached to the chuck device.
The machine tool according to claim 7.   An inspection device comprising a chuck device including the position adjustment jig according to claim 1. The position adjusting jig is detachably attached to the inspection device.
The inspection device according to claim 9. The position adjustment jig is a position adjustment jig used for alignment adjustment of equipment.
The position adjusting jig according to any one of claims 1 to 6. A deformable member having a substantially annular shape and including an inclined portion inclined with respect to a direction substantially orthogonal to an axis passing through the center of the annular shape,
The inclined portion includes a plurality of outer slits extending along the radial direction of the deformable member from the outer peripheral edge to the inner peripheral edge of the deformable member, and from the inner peripheral edge of the deformable member to the outer peripheral edge. A plurality of inner slits extending along the radial direction,
In the inclined portion, the outer slits and the inner slits are formed in the same number as each other, and are alternately arranged at equal intervals along the circumferential direction of the deformable member.
Variable shape member.

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