JP5879449B2 - Plasma processing equipment - Google Patents

Description

  The present invention relates to a plasma processing apparatus, and more particularly to a plasma processing apparatus suitable for performing surface treatment of a sample such as a semiconductor element using plasma.

  As one of conventional plasma processing apparatuses, there is an induction type plasma processing apparatus that generates plasma by connecting a high frequency power source to a coiled induction antenna provided on the outer periphery of a vacuum vessel and supplying power. In such a plasma processing apparatus using an induction antenna, the coupling state between the induction antenna and the plasma in the vacuum chamber changes depending on the reaction product adhering to the processing chamber, and the etching rate, uniformity thereof, and verticality of the etching shape are changed. There is a problem in that the adhesion state of the reaction product to the etching sidewall changes over time. As a method for preventing this, Patent Document 1 discloses a method of installing a Faraday shield that is capacitively coupled with plasma between an induction antenna provided on the outer periphery of a vacuum vessel and plasma, and applying a high frequency voltage thereto. Yes. This high frequency voltage generates a self-bias on the inner wall of the vacuum vessel, attracts ions in the plasma by the electric field in the sheath, and causes sputtering on the inner wall surface of the vacuum vessel. The sputter is used to suppress or remove reaction products, and to clean the inner wall of the vacuum vessel. For example, in a method for controlling a high frequency voltage (Faraday Shield Voltage: hereinafter referred to as FSV) applied to a Faraday shield, during the plasma treatment of a sample, an FSV that can suppress the adhesion of reaction products to the inner wall of the vacuum vessel is applied, and a vacuum is applied. When cleaning the inner wall of the container, a high frequency voltage higher than the FSV during the plasma processing of the sample is applied to remove the reaction product adhering to the inner wall of the vacuum container. In order to make the above-mentioned FSV a set FSV, the correlation between the FSV and the variable capacitor is stored in a database in advance, and the variable capacitor corresponding to the set FSV is obtained by referring to the database. Control has been performed so that the capacitance of the capacitor becomes the above-described required capacitance of the variable capacitor.

JP 2004-235545 A

  However, due to variations in the capacitance and inductance of the variable capacitor of the series resonant circuit, data must be collected and managed for each plasma processing device or for each unit exchange such as an automatic matching unit with a built-in variable capacitor and inductance. I must. Even if the capacitance of the variable capacitor is controlled to be constant, the plasma impedance changes due to the influence of outgas from reaction products deposited on the inner wall of the vacuum vessel as the plasma treatment of the sample proceeds. The high-frequency voltage applied to cannot be controlled to be constant. For this reason, this invention provides the plasma processing apparatus which can control the high frequency voltage applied to a Faraday shield stably and with high precision.

    The present invention relates to a vacuum processing chamber in which a sample is plasma-processed, a sample stage disposed in the vacuum processing chamber, on which the sample is placed, an induction antenna disposed outside the vacuum processing chamber, and a high frequency to the induction antenna. In the plasma processing apparatus, comprising: a high-frequency power source that supplies power; and a Faraday shield that is capacitively coupled to the plasma to which a high-frequency voltage is applied from the high-frequency power source via a matching unit, the matching unit is a series having a variable capacitor and an inductance A resonance circuit; a motor control unit that controls a motor for controlling the capacity of the variable capacitor; and a high-frequency voltage detection unit that detects a high-frequency voltage applied to the Faraday shield. The series resonant circuit operates in a capacitive region or in an inductive region with the resonance point of the series resonant circuit as a boundary. A predetermined high-frequency voltage applied to the Faraday shield and the high-frequency voltage detection based on a signal for switching the operation, a predetermined high-frequency voltage applied to the Faraday shield, and a high-frequency voltage detected by the high-frequency voltage detector The capacitance of the variable capacitor is controlled so that the difference from the high frequency voltage detected by the unit is smaller than a predetermined allowable value, and the series resonance circuit is set to operate in the capacitive region by the signal, When the high-frequency voltage detected by the high-frequency voltage detector is smaller than a predetermined high-frequency voltage applied to the Faraday shield, the capacitance of the variable capacitor is controlled so as to reduce the capacitance of the variable capacitor. .

  According to the present invention, the high-frequency voltage applied to the Faraday shield can be controlled stably and with high accuracy.

1 is a cross-sectional view of an inductively coupled plasma etching apparatus according to an embodiment of the present invention. It is a FSV control block diagram of the present invention. It is a FSV control circuit block diagram of this invention. It is a correlation diagram of FSV and variable capacitor VC3. It is a conceptual diagram which shows the FSV control method of this invention. It is a conceptual diagram which shows the function of a lower limit and an overvoltage detection.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a sectional view of an inductively coupled plasma etching apparatus using the present invention. The vacuum processing chamber 2 is formed with a conical window 12 made of an insulating material that closes the upper portion of the cylindrical vacuum processing chamber 2. Inside the vacuum processing chamber 2 is provided a sample stage 5 on which a sample 13 is placed, and plasma 6 is generated in the processing chamber to plasma-process the sample 13. The sample stage 5 is formed on a sample holder 9 including the sample stage. A processing gas is supplied into the vacuum processing chamber 2 from the gas supply device 4, and the gas in the processing chamber is evacuated to a predetermined pressure by the exhaust device 7. The supplied processing gas generates plasma 6 by the action of an electromagnetic field generated from the antennas 1 a and 1 b and the Faraday shield 8. In order to draw ions present in the plasma 6 into the sample 13, a second high-frequency power source 11 is connected to the sample stage 5 and high-frequency power is applied.

A coiled induction antenna 1 is disposed on the outer periphery of the window 12. The induction antenna 1 is divided into two systems of an upper antenna 1a and a lower antenna 1b each having two turns. The induction antenna 1 is supplied with high-frequency power (eg, 13.56 MHz, 27.12 MHz, 2 MHz, etc.) generated by the first high-frequency power supply 10 to obtain an electromagnetic field for generating plasma. At this time, the impedances of the upper antenna 1a and the lower antenna 1b are matched with the output impedance of the first high-frequency power supply 10 using a matching circuit including the variable capacitors VC1 and VC2. Furthermore, the high frequency current supplied to the induction antenna 1 is controlled to the upper antenna 1a and the lower antenna 1b by the variable capacitor VC4 mounted on the matching box 3 as a matching unit. A Faraday shield 8 that is capacitively coupled is provided between the induction antenna 1 and the plasma 6. A high-frequency voltage (Faraday Shield Voltage: hereinafter referred to as FSV) applied from the first high-frequency power source to the Faraday shield 8 through the matching box 3 is composed of a variable capacitor (VC3) and a coil (L ₂ ) mounted on the matching box 3. Controlled by the series resonant circuit 14. Next, the FSV automatic control configuration will be described with reference to FIG. 2 showing the FSV control block and FIG. 3 showing the FSV control circuit configuration which is the detailed configuration of FIG. In order to perform FSV automatic control, the matching box 3 includes a motor control unit 16, an FSV detection unit 15 that is a high-frequency voltage detection unit, and an abnormality detection unit 17. The motor control unit 16 includes a comparison circuit 18, a motor control circuit 19, and a lower limit 20, and includes an FSV command signal, a capacitance preset signal, an inductive / capacitive control switching signal, and an FSV detection unit 15 from the control unit 25. Feedback control is performed so that the FSV output becomes equal to the FSV command value based on the signal from. The FSV detection unit 15 includes a filter circuit 22, a detection circuit 23, and an amplification circuit 24, and detects an FSV output value. The abnormality detection unit 17 includes an FSV overvoltage detection circuit, and detects an overvoltage of the FSV that may lead to failure of the inductively coupled plasma etching apparatus.

  Next, the flow of FSV automatic control will be described. The motor control circuit 19 in the matching box 3 is switched to the inductive region or the capacitive region by the inductive / capacitive control switching signal of the series resonance circuit 14 transmitted from the control unit 25. The inductive / capacitive control switching signal is set before the output from the first high-frequency power supply 10 is started. In addition, the electrostatic capacity preset signal is set in advance so that the electrostatic capacity of the variable capacitor VC3 enters an area to be controlled. The inductive / capacitive control switching signal described above may be transmitted from the control unit 25 with inductivity or capacitive being set in a parameter of a plasma processing condition called a recipe. Similarly, the preset signal of the variable capacitor VC3 may be transmitted from the control unit 25 with the preset value of the variable capacitor VC3 set as a parameter of a plasma processing condition called a recipe. Next, the FSV output is divided to about 1/250 by the capacitors C2 and C3 with respect to the ground potential (not shown), and then the DC voltage is detected by the detection circuit 23 via the filter circuit 22 that removes harmonic components. Is amplified by the amplifier circuit 24 and detected.

  Next, the comparison circuit 18 compares the FSV detection value amplified to a voltage suitable for comparison with the FSV command and the FSV command value from the control unit 25. As a result of the comparison, the motor 21 of the variable capacitor VC3 is driven by the motor control circuit 19 on the basis of the control method of the respective capacitive or inductive areas set in advance, and the capacitance of the variable capacitor VC3 is determined. To control. This feedback control is performed until the error between the FSV command voltage and the FSV output becomes an allowable value. The above-described capacitance control of the variable capacitor VC3 is different for each of the capacitive and inductive regions.

  Therefore, a circuit for switching the control direction of the variable capacitor by the inductive / capacitive control switching signal with the resonance point of the series resonant circuit 14 as a boundary is provided in the motor control circuit 19, and the inductive / capacitance transmitted from the control unit 25 is provided. The high frequency voltage applied to the Faraday shield 8 can be controlled by selectively using the capacitive and inductive regions by the sex control switching signal.

  The ion current density (Ion Current Flux) of the plasma is in accordance with the increase of the capacitance of the variable capacitor VC3 as shown in FIG. In the case of sex, the ion current density tends to decrease. In the present invention, as described above, the capacitive and inductive regions can be used properly, so that the plasma etching process or the plasma cleaning process can be performed while appropriately selecting the ion current density characteristics. Also, for example, in plasma etching processing, the FSV is controlled in a capacitive region where the gradient of the FSV change due to the change in capacitance is small, and the high frequency voltage change of the FSV during the plasma etching processing time is suppressed as much as possible. On the other hand, the plasma cleaning may be performed by controlling the FSV in an inductive region where the absolute value of the high-frequency voltage of the FSV is large to increase the plasma cleaning effect.

  Next, a method for controlling the capacitance in each of the capacitive and inductive regions will be described with reference to FIG. When the FSV is controlled in the capacitive region by the inductive / capacitive control switching signal, when the FSV detection value is smaller than the FSV command value, the capacitance of the variable capacitor VC3 is decreased, and the FSV detection value is FSV. When the value is larger than the command value, the motor 21 of the variable capacitor VC3 is rotated in the direction in which the capacitance of the variable capacitor VC3 increases, and feedback control is performed so that the difference between the FSV detection value and the FSV command value falls within the allowable value. Conversely, when controlling the FSV in the inductive region, the direction in which the capacitance of the variable capacitor VC3 is increased when the FSV detection value is smaller than the FSV command value, and variable when the FSV detection value is larger than the FSV command value. The motor 21 of the variable capacitor VC3 is rotated in the direction in which the capacitance of the capacitor VC3 decreases, and feedback control is performed so that the difference between the FSV detection value and the FSV command value falls within the allowable value.

  With the configuration of the present invention described above, the FSV can be controlled to be constant regardless of whether the series resonant circuit 14 is capacitive or inductive, and the time required for collecting data on the relationship between the FSV and the capacitance is greatly reduced. it can. In addition, since changes in the FSV plasma processing time can be suppressed, the influence on the plasma etching performance due to changes in the FSV can be reduced, and cleaning with good reproducibility can be performed.

  An object of the present invention is to perform FSV control while using different inductive and capacitive areas. However, in the vicinity of the resonance point, when the capacitance of the variable capacitor is changed due to an abrupt change in plasma, it is possible to go from the resonance point to the inductive, or from the inductive to the capacitive. In this case, since the control logic of the FSV is inverted, the control becomes impossible, and there is a risk that an excessive FSV is generated, leading to failure of the inductively coupled plasma etching apparatus.

  Therefore, since the lower limit 20 is provided in the present invention as shown in FIG. 6, a lower limit voltage value set in advance so that the control range does not change from capacitive to inductive or from inductive to capacitive. When the FSV becomes smaller, control is performed to forcibly reverse the control direction of the variable capacitor VC3. In this embodiment, the lower limit 20 is set using an analog circuit, but it may be set under plasma processing conditions.

  In addition, since an FSV overvoltage detection circuit that detects that the upper limit of the FSV has been exceeded is provided for the purpose of protecting the inductively coupled plasma etching apparatus, when an FSV overvoltage is detected by the FSV overvoltage detection circuit, A function of stopping the output of the first high-frequency power supply 10 is also provided. Although the FSV detection signal in this embodiment is a digital signal, the FSV detection signal may be directly acquired in analog to detect overvoltage.

DESCRIPTION OF SYMBOLS 1 Induction antenna 1a Upper antenna 1b Lower antenna 2 Vacuum processing chamber 3 Matching box 4 Gas supply device 5 Sample stand 6 Plasma 7 Exhaust device 8 Faraday shield 9 Sample holding part 10 First high frequency power source 11 Second high frequency power source 12 Window 13 Sample 14 Series resonance circuit 15 FSV detection unit 16 Motor control unit 17 Abnormality detection unit 18 Comparison circuit 19 Motor control circuit 20 Lower limit 21 Motor 22 Filter circuit 23 Detection circuit 24 Amplification circuit 25 Control unit

Claims (4)

A high-frequency power is supplied to the induction antenna, a vacuum processing chamber in which the sample is plasma-processed, a sample stage disposed in the vacuum processing chamber, on which the sample is placed, an induction antenna disposed outside the vacuum processing chamber, and In a plasma processing apparatus comprising a high-frequency power source, and a Faraday shield that is capacitively coupled to the plasma by applying a high-frequency voltage from the high-frequency power source through a matching unit,
The matching unit includes a series resonance circuit having a variable capacitor and an inductance, a motor control unit that controls a motor for controlling the capacitance of the variable capacitor, and a high-frequency voltage detection that detects a high-frequency voltage applied to the Faraday shield. And comprising
The motor control unit is configured to apply a signal for switching whether the series resonant circuit operates in a capacitive region or an inductive region with a resonance point of the series resonant circuit as a boundary and a predetermined Faraday shield. The difference between the predetermined high-frequency voltage applied to the Faraday shield based on the high-frequency voltage and the high-frequency voltage detected by the high-frequency voltage detection unit and the high-frequency voltage detected by the high-frequency voltage detection unit is greater than a predetermined allowable value. The capacitance of the variable capacitor is controlled to be small and the series resonant circuit is set to operate in the capacitive region by the signal, and the high frequency voltage detected by the high frequency voltage detector is applied to the Faraday shield. When the voltage is smaller than a predetermined high-frequency voltage to be applied, the variable capacitor is allowed to have a small capacitance. The plasma processing apparatus characterized by controlling the capacitance of the capacitor. A high-frequency power is supplied to the induction antenna, a vacuum processing chamber in which the sample is plasma-processed, a sample stage disposed in the vacuum processing chamber, on which the sample is placed, an induction antenna disposed outside the vacuum processing chamber, and In a plasma processing apparatus comprising a high-frequency power source, and a Faraday shield that is capacitively coupled to the plasma by applying a high-frequency voltage from the high-frequency power source through a matching unit,
The matching unit includes a series resonance circuit having a variable capacitor and an inductance, a motor control unit that controls a motor for controlling the capacitance of the variable capacitor, and a high-frequency voltage detection that detects a high-frequency voltage applied to the Faraday shield. And comprising
The motor control unit is configured to apply a signal for switching whether the series resonant circuit operates in a capacitive region or an inductive region with a resonance point of the series resonant circuit as a boundary and a predetermined Faraday shield. The difference between the predetermined high-frequency voltage applied to the Faraday shield based on the high-frequency voltage and the high-frequency voltage detected by the high-frequency voltage detection unit and the high-frequency voltage detected by the high-frequency voltage detection unit is greater than a predetermined allowable value. The capacitance of the variable capacitor is controlled to be small and the series resonant circuit is set to operate in the inductive region by the signal, and the high-frequency voltage detected by the high-frequency voltage detector is applied to the Faraday shield. When the applied high-frequency voltage is higher than the predetermined high-frequency voltage, the variable capacitor is allowed to have a small capacitance. The plasma processing apparatus characterized by controlling the capacitance of the capacitor. A high-frequency power is supplied to the induction antenna, a vacuum processing chamber in which the sample is plasma-processed, a sample stage disposed in the vacuum processing chamber, on which the sample is placed, an induction antenna disposed outside the vacuum processing chamber, and In a plasma processing apparatus comprising a high-frequency power source, and a Faraday shield that is capacitively coupled to the plasma by applying a high-frequency voltage from the high-frequency power source through a matching unit,
The matching unit includes a series resonance circuit having a variable capacitor and an inductance, a motor control unit that controls a motor for controlling the capacitance of the variable capacitor, and a high-frequency voltage detection that detects a high-frequency voltage applied to the Faraday shield. And comprising
The motor control unit is configured to apply a signal for switching whether the series resonant circuit operates in a capacitive region or an inductive region with a resonance point of the series resonant circuit as a boundary and a predetermined Faraday shield. The difference between the predetermined high-frequency voltage applied to the Faraday shield based on the high-frequency voltage and the high-frequency voltage detected by the high-frequency voltage detection unit and the high-frequency voltage detected by the high-frequency voltage detection unit is greater than a predetermined allowable value. The capacitance of the variable capacitor is controlled to be small and the series resonant circuit is set to operate in the inductive region by the signal, and the high-frequency voltage detected by the high-frequency voltage detector is applied to the Faraday shield. When the voltage is smaller than a predetermined high frequency voltage to be applied, the variable capacitor is allowed to have a large capacity. The plasma processing apparatus characterized by controlling the capacitance of the capacitor. In the plasma processing apparatus according to any one of claims 1 to 3,
The motor control unit forcibly reverses the direction of controlling the capacity of the variable capacitor when the high-frequency voltage detected by the high-frequency voltage detection unit is smaller than a preset lower limit value. Processing equipment.

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