JP5858597B2 - Cleaning agent for tungsten wiring semiconductor - Google Patents

Cleaning agent for tungsten wiring semiconductor Download PDF

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Publication number
JP5858597B2
JP5858597B2 JP2010017772A JP2010017772A JP5858597B2 JP 5858597 B2 JP5858597 B2 JP 5858597B2 JP 2010017772 A JP2010017772 A JP 2010017772A JP 2010017772 A JP2010017772 A JP 2010017772A JP 5858597 B2 JP5858597 B2 JP 5858597B2
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Japan
Prior art keywords
cleaning agent
semiconductor
acid
tungsten
hydroxide
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JP2010017772A
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Japanese (ja)
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JP2011159658A (en
Inventor
睦 中西
睦 中西
祐吉 小路
祐吉 小路
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アドバンスド テクノロジー マテリアルズ,インコーポレイテッド
アドバンスド テクノロジー マテリアルズ,インコーポレイテッド
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Priority to JP2010017772A priority Critical patent/JP5858597B2/en
Priority claimed from US13/575,452 external-priority patent/US9045717B2/en
Publication of JP2011159658A publication Critical patent/JP2011159658A/en
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