JP5851187B2

JP5851187B2 - Vacuum valve

Info

Publication number: JP5851187B2
Application number: JP2011220707A
Authority: JP
Inventors: 糸谷　孝行; 孝行糸谷
Original assignee: Mitsubishi Electric Corp
Current assignee: Mitsubishi Electric Corp
Priority date: 2011-10-05
Filing date: 2011-10-05
Publication date: 2016-02-03
Anticipated expiration: 2031-10-05
Also published as: JP2013080647A

Description

この発明は、例えばセラミックからなる絶縁容器内に固定側電極および可動側電極が配置され、耐電圧性能の向上が図られる真空バルブに関するものである。 The present invention relates to a vacuum valve in which a stationary electrode and a movable electrode are disposed in an insulating container made of ceramic, for example, and the withstand voltage performance is improved.

従来の真空バルブとして、特許文献１（特開昭５８−１０６７４５号公報）に記載されたものがあり、その概略を図５に示す。図５において、セラミックからなる絶縁容器１１の両端には陰極端子１２と陽極端子１３が配置され、絶縁容器１１の中央部１１ａには内周側に突出する段部１４が設けられている。絶縁容器１１の中央部１１ａに内周側に突出する段部１４を設けることにより、絶縁容器１１の内沿面の耐電圧性能の向上を図っている。 As a conventional vacuum valve, there is one described in Patent Document 1 (Japanese Patent Laid-Open No. 58-106745), and its outline is shown in FIG. In FIG. 5, the cathode terminal 12 and the anode terminal 13 are arrange | positioned at the both ends of the insulating container 11 which consists of ceramics, and the step part 14 which protrudes in the inner peripheral side is provided in the center part 11a of the insulating container 11. In FIG. By providing a stepped portion 14 that protrudes toward the inner peripheral side at the central portion 11 a of the insulating container 11, the withstand voltage performance of the inner surface of the insulating container 11 is improved.

また、従来の他の真空バルブとして、特許文献２（実公昭５９−６５８７号公報）に記載されたものがあり、その概略を図６に示す。図６において、１は接点、２は電極でこの部分で電流の遮断が行われる。３は固定通電軸で固定側蓋板４を貫通して電極２の一方に接合されている。５は可動通電軸でベローズ６を介して可動側蓋板７と接続され、先端は電極２のもう一方に接続されている。
８はアークシールドで、電流遮断時、接点１間で発生したアークが直接セラミックからなる絶縁容器９の内面に接触するのを防いでいる。このアークシールド８は、絶縁容器９を２個使って、中間に支持することにより、両接点から電気的に絶縁されている。
１０は絶縁容器９の両端側にそれぞれ配置された電界緩和シールドで、絶縁容器９の封着部を電界緩和するために設けられている。そして、アークシールド８と電界緩和シールド１０のそれぞれの対向する側が絶縁容器９の表面に対して１０〜２５度の傾斜角度を有している。
すなわち、アークシールド８は、その支持部８ａは絶縁容器９と平行してのび、この支持部８ａと連続してのびる中間部８ｂは絶縁容器９の内面から離れるように１０〜２５度の傾斜を持って延びている。そして、この中間部８ｂの端部をリング状に丸めている。
また、電界緩和シールド１０においても、平行部１０ａから１０〜２５度の傾斜部１０ｂを持ち、傾斜部１０ｂの端部も丸めている。
このように、アークシールド８と電界緩和シールド１０を絶縁容器９の内面から離れるように１０〜２５度の傾斜角度で傾斜させ先端部を丸めた形状とすることにより、絶縁容器９の内沿面の耐電圧性能の向上を図っている。 As another conventional vacuum valve, there is one described in Patent Document 2 (Japanese Utility Model Publication No. 59-6687), and its outline is shown in FIG. In FIG. 6, 1 is a contact, 2 is an electrode, and current is cut off at this portion. Reference numeral 3 denotes a fixed energizing shaft that penetrates the fixed side cover plate 4 and is joined to one of the electrodes 2. A movable energizing shaft 5 is connected to the movable side cover plate 7 via the bellows 6, and the tip is connected to the other end of the electrode 2.
An arc shield 8 prevents an arc generated between the contacts 1 from directly contacting the inner surface of the insulating container 9 made of ceramic when the current is interrupted. The arc shield 8 is electrically insulated from both contacts by using two insulating containers 9 and supporting them in the middle.
Reference numeral 10 denotes electric field relaxation shields disposed on both ends of the insulating container 9, and is provided to relax the electric field at the sealing portion of the insulating container 9. The opposing sides of the arc shield 8 and the electric field relaxation shield 10 have an inclination angle of 10 to 25 degrees with respect to the surface of the insulating container 9.
That is, the arc shield 8 has a support portion 8a extending parallel to the insulating container 9, and an intermediate portion 8b extending continuously from the support portion 8a is inclined by 10 to 25 degrees so as to be away from the inner surface of the insulating container 9. It has extended. And the edge part of this intermediate part 8b is rounded in the ring shape.
The electric field relaxation shield 10 also has an inclined portion 10b of 10 to 25 degrees from the parallel portion 10a, and the end of the inclined portion 10b is also rounded.
As described above, the arc shield 8 and the electric field relaxation shield 10 are inclined at an inclination angle of 10 to 25 degrees so as to be separated from the inner surface of the insulating container 9, and the tip portion is rounded. Improvement of withstand voltage performance.

また、従来のさらに他の真空バルブとして、特許文献３（特開昭６４−２１８３８号公報）に記載されたものがあり、その概略を図７に示す。図７において、２１はセラミックからなる絶縁容器であり、２２は絶縁容器２１の中央部の内壁面に設けられた帯状突出部で、複数の止め金具２５を介してアークシールド２３を機械的に保持するとともに、アークシールド２３を固定側電極２４ａおよび可動側電極２４ｂから電気的に絶縁している。そして、絶縁容器２１の外壁面に帯状突出部２６ａ，２６ｂを設けている。この帯状突出部２６ａ，２６ｂを設けたことにより、絶縁容器２１の肉厚を厚くし、電圧コンディショニングの歩留り向上を図るとともに絶縁容器２１の貫通破壊を抑制して耐電圧性能の向上を図っている。 Another conventional vacuum valve is described in Patent Document 3 (Japanese Patent Laid-Open No. 64-21838), and an outline thereof is shown in FIG. In FIG. 7, 21 is an insulating container made of ceramic, and 22 is a belt-like protruding portion provided on the inner wall surface of the central portion of the insulating container 21, and mechanically holds the arc shield 23 via a plurality of fasteners 25. In addition, the arc shield 23 is electrically insulated from the fixed side electrode 24a and the movable side electrode 24b. And the strip | belt-shaped protrusion parts 26a and 26b are provided in the outer wall surface of the insulating container 21. As shown in FIG. By providing the strip-like protrusions 26a and 26b, the insulation container 21 is increased in thickness to improve the yield of voltage conditioning and to improve the withstand voltage performance by suppressing the through-breakage of the insulation container 21. .

特開昭５８−１０６７４５号公報JP 58-106745 A 実公昭５９−６５８７号公報Japanese Utility Model Publication No.59-6687 特開昭６４−２１８３８号公報Japanese Unexamined Patent Publication No. 64-21838

上述した従来の真空バルブでは、耐電圧性能を高くするために、真空バルブの完成後に高電圧（通常は定格電圧の数倍程度の電圧）を印加して意図的に絶縁破壊を繰り返すことにより、絶縁破壊によるアークで真空バルブの電極表面の微小突起、微粒子、吸着ガス、付着物を除く電圧コンディショニングが行われている。 In the above-described conventional vacuum valve, in order to increase the withstand voltage performance, by applying a high voltage (usually a voltage several times the rated voltage) after completion of the vacuum valve and intentionally repeating dielectric breakdown, Voltage conditioning is performed to remove minute protrusions, fine particles, adsorbed gas, and deposits on the electrode surface of the vacuum valve with an arc caused by dielectric breakdown.

この電圧コンディショニング工程の時間短縮のため、より高い電圧を印加した場合に、セラミックからなる絶縁容器の貫通破壊が発生し、製造不良が発生する。単純にセラミックからなる絶縁容器の肉厚を厚くすると、今度は真空バルブが大形化してしまうという問題点があった。 In order to shorten the time of this voltage conditioning process, when a higher voltage is applied, a through-breakage of an insulating container made of ceramic occurs, resulting in a manufacturing defect. If the thickness of the insulating container made of simply ceramic is increased, there is a problem in that the vacuum valve is increased in size.

この発明は、上記のような課題を解決するためになされたものであり、その目的は、大形化することなく絶縁性能の高い真空バルブを提供するものである。 The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a vacuum valve having high insulation performance without increasing its size.

この発明に係わる真空バルブは、筒状からなる絶縁容器と、前記絶縁容器の一方側端部を閉塞する固定側端板と、前記絶縁容器の他方側端部を閉塞する可動側端板と、前記固定側端板を貫通して配設された固定側通電軸の先端部に設けられた固定側電極と、前記可動側端板を貫通して配設された可動側通電軸の先端部に前記固定側電極と相対向して設けられた可動側電極と、前記絶縁容器の一方側端部および他方側端部との間で前記絶縁容器の一方側端部および他方側端部の内周面より内周側に突出するテーパ部を有する段部と、前記固定側電極と前記可動側電極の周囲を囲繞するように配設され、両端部は前記段部のある範囲内に配置されたアークシールドと、前記固定側端板に取り付けられ前記絶縁容器の一方側の端部の内周面と前記段部の内周面との間に位置して前記アークシールドと相対向するように配置され、前記絶縁容器の前記内周面から内径側に離れるように傾斜部を有し、前記傾斜部の先端部は前記段部の内周面より内径側に位置する第１の電界緩和シールドと、前記可動側端板に取り付けられ前記絶縁容器の端部の内周面と前記段部の内周面との間に位置して前記アークシールドと相対向するように配置された第２の電界緩和シールドとを備えたものである。 A vacuum valve according to the present invention includes a cylindrical insulating container, a fixed end plate that closes one end of the insulating container, a movable end plate that closes the other end of the insulating container, A fixed-side electrode provided at the tip of a fixed-side energizing shaft disposed through the fixed-side end plate, and a distal-end portion of a movable-side energized shaft disposed through the movable-side end plate Inner peripheries of the one end and the other end of the insulating container between the movable electrode provided opposite to the fixed electrode and the one end and the other end of the insulating container a stepped portion having a tapered portion that protrudes to the inner peripheral side of the plane, is disposed so as to surround the periphery of the movable-side electrode and the fixed electrode, both end portions are disposed within a range of the step portion arc shield and one side of the end portion inner peripheral surface and the step of the insulating container is attached to the fixed side end plate Inner being arranged to pre-Symbol arc shield and facing each other positioned between the circumferential surface has an inclined portion away radially inwardly from the inner peripheral surface of the insulating container, the tip of the inclined portion of the parts are a first electric field relaxation shield located on the inner peripheral surface by Ri inner diameter side of the stepped portion, the inner peripheral surface of the inner peripheral surface of the end portion of said insulating container is attached to the movable side end plate and the stepped portion is obtained by a second electric field relaxation shield is arranged to pre-Symbol arc shield and facing each other located between the.

また、この発明に係わる真空バルブは、筒状からなる絶縁容器と、前記絶縁容器の一方側端部を閉塞する固定側端板と、前記絶縁容器の他方側端部を閉塞する可動側端板と、前記固定側端板を貫通して配設された固定側通電軸の先端部に設けられた固定側電極と、前記可動側端板を貫通して配設された可動側通電軸の先端部に前記固定側電極と相対向して設けられた可動側電極と、前記絶縁容器の一方側端部および他方側端部との間で前記絶縁容器の一方側端部および他方側端部の内周面より内周側に突出するテーパ部を有する段部と、前記固定側電極と前記可動側電極の周囲を囲繞するように配設され、両端部は前記段部のある範囲内に配置されたアークシールドと、前記固定側端板に取り付けられ前記絶縁容器の一方側の端部の内周面と前記段部の内周面との間に位置して前記アークシールドと相対向するように配置され、前記絶縁容器の前記内周面から内径側に離れるように傾斜部を有し、前記傾斜部の先端部は前記段部の内周面より内径側に位置する第１の電界緩和シールドと、前記可動側端板に取り付けられ前記絶縁容器の端部の内周面と前記段部の内周面との間に位置して前に前記アークシールドと相対向するように配置され、前記絶縁容器の前記内周面から内径側に離れるように傾斜部を有し、前記傾斜部の先端部は前記段部の内周面より内径側に位置する第２の電界緩和シールドとを備えたものである。 The vacuum valve according to the present invention includes a cylindrical insulating container, a fixed side end plate that closes one end of the insulating container, and a movable end plate that closes the other end of the insulating container. A fixed-side electrode provided at a distal end portion of a fixed-side energizing shaft disposed through the fixed-side end plate; and a distal end of a movable-side energized shaft disposed through the movable-side end plate. Between the movable side electrode provided opposite to the fixed side electrode and the one side end and the other side end of the insulating container between the one side end and the other side end of the insulating container. a stepped portion having a tapered portion that protrudes to the inner peripheral side of the inner peripheral surface is disposed so as to surround the periphery of the movable-side electrode and the fixed electrode, in the range both ends with the step portion and placed arc shield, the inner peripheral surface of the end portion of one side of the insulating container is attached to the stationary end plate and Is arranged to pre-Symbol arc shield and facing each other positioned between the inner peripheral surface of the Kidan portion has an inclined portion away radially inwardly from the inner peripheral surface of said insulating container, the inclined tip parts are a first electric field relaxation shield located on the inner peripheral surface by Ri inner diameter side of the stepped portion, the inner peripheral surface of the end portion of said insulating container is attached to the movable side end plate and the stepped portion Located between the inner peripheral surface and disposed so as to face the arc shield before , and having an inclined portion so as to be separated from the inner peripheral surface of the insulating container toward the inner diameter side, the tip of the inclined portion parts are provided with a second electric field relaxation shield is positioned on the inner diameter side Ri by the inner peripheral surface of the stepped portion.

また、この発明に係わる真空バルブは、筒状からなる第１の絶縁容器と、筒状からなる第２の絶縁容器と、前記第１の絶縁容器の一方側端部を閉塞する固定側端板と、前記第２の絶縁容器の一方側端部を閉塞する可動側端板と、前記第１の絶縁容器の他方側の端部と前記第２の絶縁容器の他方側の端部との間に配設された金属容器と、前記固定側端板を貫通して配設された固定側通電軸の先端部に設けられた前記金属容器内に位置する固定側電極と、前記可動側端板を貫通して配設された可動側通電軸の先端部に前記固定側電極と相対向して設けられた前記金属容器内に位置する可動側電極と、前記第１の絶縁容器の一方側端部および他方側端部との間で前記第１の絶縁容器の一方側端部および他方側端部の内周面より内周側に突出するテーパ部を有する第１の段部と、前記第２の絶縁容器の一方側端部および他方側端部との間で前記第２の絶縁容器の一方側端部および他方側端部の内周面より内周側に突出するテーパ部を有する第２の段部と、一方側の端部が前記金属容器に接続され他方側の端部は前記第１の段部のある範囲内に配置された第１のアークシールドと、一方側の端部が前記金属容器に接続され他方側の端部は前記第２の段部のある範囲内に配置された第２のアークシールドと、前記固定側端板に取り付けられ前記第１の絶縁容器の一方側端部の内周面と前記第１の段部の内周面との間に位置して前記第１のアークシールドと相対向するように配置され、前記第１の絶縁容器の内周面から内径側に離れるように傾斜部を有し、前記傾斜部の先端部は前記第１の段部の内周面より内径側に位置する第１の電界緩和シールドと、前記可動側端板に取り付けられ前記第２の絶縁容器の一方側端部の内周面と前記第２の段部の内周面との間に位置して前記第２のアークシールドと相対向するように配置された第２の電界緩和シールドとを備えたものである。 The vacuum valve according to the present invention includes a cylindrical first insulating container, a cylindrical second insulating container, and a fixed end plate that closes one end of the first insulating container. If, between the second and the movable-side end plate for closing one side end portion of the insulating container, the other side end portion of said first of said the other end of the insulating container second insulating container A fixed-side electrode located in the metal container provided at a distal end portion of a fixed-side current-carrying shaft disposed through the fixed-side end plate, and the movable-side end plate A movable-side electrode located in the metal container provided opposite to the fixed-side electrode at a distal end portion of a movable-side energizing shaft disposed so as to penetrate, and one end of the first insulating container tape that protrudes to the inner peripheral side of the inner peripheral surface of one side end and the other end portion of the first insulating container between the parts and the other end A first step portion having a section, the inner peripheral surface of one side end and the other end portion of the second insulating container between one side end portion and the other side end portion of the second insulating container a second step portion having a tapered portion that protrudes more inner peripheral side, one end portion of the end portion of the side is connected to the metal container other side is disposed within the range of the first step portion A first arc shield, an end on one side connected to the metal container, and an end on the other side disposed within a range of the second step, and the fixed side so that opposing the front Symbol first arc shield positioned between the inner peripheral surface of the inner peripheral surface of one side end portion of the first insulating container attached to the end plate and the first step portion arranged, from the inner circumferential surface of the first insulating container has an inclined portion away radially inward, the tip portions of the inclined portion of the first stepped portion A first electric field relaxation shield located Ri inner diameter side by the peripheral surface, the inner circumference of the inner peripheral surface of one side end portion of the second insulating container mounted on the movable side end plate and the second step portion it is obtained by a second electric field relaxation shield disposed before Symbol to second arc shield and facing each other positioned between the surfaces.

また、この発明に係わる真空バルブは、筒状からなる第１の絶縁容器と、筒状からなる第２の絶縁容器と、前記第１の絶縁容器の一方側端部を閉塞する固定側端板と、前記第２の絶縁容器の一方側端部を閉塞する可動側端板と、前記第１の絶縁容器の他方側の端部と前記第２の絶縁容器の他方側の端部との間に配設された金属容器と、前記固定側端板を貫通して配設された固定側通電軸の先端部に設けられた前記金属容器内に位置する固定側電極と、前記可動側端板を貫通して配設された可動側通電軸の先端部に前記固定側電極と相対向して設けられた前記金属容器内に位置する可動側電極と、前記第１の絶縁容器の一方側端部および他方側端部との間で前記第１の絶縁容器の一方側端部および他方側端部の内周面より内周側に突出するテーパ部を有する第１の段部と、前記第２の絶縁容器の一方側端部および他方側端部との間で前記第２の絶縁容器の一方側端部および他方側端部の内周面より内周側に突出するテーパ部を有する第２の段部と、一方側の端部が前記金属容器に接続され他方側の端部は前記第１の段部のある範囲内に配置された第１のアークシールドと、一方側の端部が前記金属容器に接続され他方側の端部は前記第２の段部のある範囲内に配置された第２のアークシールドと、前記固定側端板に取り付けられ前記第１の絶縁容器の一方側端部の内周面と前記第１の段部の内周面との間に位置して前記第１のアークシールドと相対向するように配置され、前記第１の絶縁容器の内周面から内径側に離れるように傾斜部を有し、前記傾斜部の先端部は前記第１の段部の内周面より内径側に位置する第１の電界緩和シールドと、前記可動側端板に取り付けられ前記第２の絶縁容器の一方側端部の内周面と前記第２の段部の内周面との間に位置して前記第２のアークシールドと相対向するように配置され、前記第２の絶縁容器の内周面から内径側に離れるように傾斜部を有し、前記傾斜部の先端部は前記第２の段部の内周面より内径側に位置する第２の電界緩和シールドとを備えたものである。 The vacuum valve according to the present invention includes a cylindrical first insulating container, a cylindrical second insulating container, and a fixed end plate that closes one end of the first insulating container. If, between the second and the movable-side end plate for closing one side end portion of the insulating container, the other side end portion of said first of said the other end of the insulating container second insulating container A fixed-side electrode located in the metal container provided at a distal end portion of a fixed-side current-carrying shaft disposed through the fixed-side end plate, and the movable-side end plate A movable-side electrode located in the metal container provided opposite to the fixed-side electrode at a distal end portion of a movable-side energizing shaft disposed so as to penetrate, and one end of the first insulating container tape that protrudes to the inner peripheral side of the inner peripheral surface of one side end and the other end portion of the first insulating container between the parts and the other end A first step portion having a section, the inner peripheral surface of one side end and the other end portion of the second insulating container between one side end portion and the other side end portion of the second insulating container a second step portion having a tapered portion that protrudes more inner peripheral side, one end portion of the end portion of the side is connected to the metal container other side is disposed within the range of the first step portion A first arc shield, an end on one side connected to the metal container, and an end on the other side disposed within a range of the second step, and the fixed side so that opposing the front Symbol first arc shield positioned between the inner peripheral surface of the inner peripheral surface of one side end portion of the first insulating container attached to the end plate and the first step portion arranged, from the inner circumferential surface of the first insulating container has an inclined portion away radially inward, the tip portions of the inclined portion of the first stepped portion A first electric field relaxation shield located Ri inner diameter side by the peripheral surface, the inner circumference of the inner peripheral surface of one side end portion of the second insulating container mounted on the movable side end plate and the second step portion It is arranged so that the opposed front Stories second arc shield positioned between the surface has an inclined portion away radially inwardly from the inner peripheral surface of the second insulating container, the inclined portion the tip portion is obtained by a second electric field relaxation shield located on the inner peripheral surface by Ri inner diameter side of the second step portion.

この発明に係わる真空バルブによれば、大形化することなく絶縁性能の向上を図ることができる真空バルブを得ることができる。 According to the vacuum valve of the present invention, it is possible to obtain a vacuum valve capable of improving the insulation performance without increasing the size.

この発明の実施の形態１に係わる真空バルブを示す断面図である。It is sectional drawing which shows the vacuum valve concerning Embodiment 1 of this invention. この発明の実施の形態２に係わる真空バルブを示す断面図である。It is sectional drawing which shows the vacuum valve concerning Embodiment 2 of this invention. この発明の実施の形態３に係わる真空バルブを示す断面図である。It is sectional drawing which shows the vacuum valve concerning Embodiment 3 of this invention. この発明の実施の形態４に係わる真空バルブを示す断面図である。It is sectional drawing which shows the vacuum valve concerning Embodiment 4 of this invention. 従来の真空バルブを示す要部断面図である。It is principal part sectional drawing which shows the conventional vacuum valve. 従来の真空バルブの他の例を示す断面図である。It is sectional drawing which shows the other example of the conventional vacuum valve. 従来の真空バルブのさらに他の例を示す断面図である。It is sectional drawing which shows the other example of the conventional vacuum valve.

実施の形態１．
以下、この発明の実施の形態１を図１に基づいて説明する。図１はこの発明の実施の形態１に係わる真空バルブを示す断面図である。 Embodiment 1 FIG.
A first embodiment of the present invention will be described below with reference to FIG. 1 is a sectional view showing a vacuum valve according to Embodiment 1 of the present invention.

図１において、１０１はセラミックからなる筒状の絶縁容器であり、例えば中央部で連結された２個の絶縁容器１０１ａ，１０１ｂで構成された場合を示している。１０２は絶縁容器１０１ａの一方側となる端部を塞ぐ固定側端板、１０３は絶縁容器１０１ｂの一方側となる端部を塞ぐ可動側端板であり、これら固定側端板１０２、絶縁容器１０１ａ，１０１ｂ、可動側端板１０３とにより真空容器が構成される。 In FIG. 1, reference numeral 101 denotes a cylindrical insulating container made of ceramic, and shows a case where it is constituted by two insulating containers 101a and 101b connected at the center, for example. Reference numeral 102 denotes a fixed-side end plate that closes one end of the insulating container 101a. Reference numeral 103 denotes a movable-side end plate that closes one end of the insulating container 101b. The fixed-side end plate 102 and the insulating container 101a. 101b and the movable side end plate 103 constitute a vacuum vessel.

１０４は固定側端板１０２を貫通して配設された固定側通電軸、１０５は可動側端板１０３を貫通してベローズ１０６を介して配設された可動側通電軸、１０７は絶縁容器１０１内に位置する固定側通電軸１０４の先端部に設けられた固定側電極、１０８は絶縁容器１０１内に位置する可動側通電軸１０５の先端部に固定側電極１０７と相対向して設けられた可動側電極である。 Reference numeral 104 denotes a fixed energizing shaft disposed through the fixed end plate 102, 105 a movable energizing shaft disposed through the movable end plate 103 via a bellows 106, and 107 an insulating container 101. The fixed-side electrode 108 provided at the tip of the fixed-side energizing shaft 104 positioned inside is provided opposite to the fixed-side electrode 107 at the tip of the movable-side energizing shaft 105 positioned in the insulating container 101. It is a movable electrode.

１０９ａおよび１０９ｂは少なくとも絶縁容器１０１ａの固定側の端部１０１ａ１および絶縁容器１０１ｂの可動側の端部１０１ｂ１の後述する第１の電界緩和シールドおよび第２の電界緩和シールドの配置スペースを残してそれら端部１０１ａ１，１０１ｂ１側内周面より内周側に突出する例えば１０〜２５度のテーパ部１０９ａ１，１０９ａ２，１０９ｂ１，１０９ｂ２を有する段部である。図は一例として、２個の絶縁容器１０１ａ，１０１ｂの両端部よりテーパ状に形成された段部１０９ａ，１０９ｂの場合を示している。この段部１０９ａ，１０９ｂにより絶縁容器１０１ａ，１０１ｂの肉厚を大きく構成して貫通破壊に耐える肉厚を確保している。 Reference numerals 109a and 109b denote at least the fixed-side end 101a1 of the insulating container 101a and the movable-side end 101b1 of the insulating container 101b, leaving the arrangement space for the first electric field relaxation shield and the second electric field relaxation shield described later. It is a step part which has taper part 109a1, 109a2, 109b1, 109b2 of 10 to 25 degree | times which protrudes inward from the inner peripheral surface of the part 101a1, 101b1 side. The figure shows, as an example, the case of stepped portions 109a and 109b formed in a tapered shape from both ends of two insulating containers 101a and 101b. The step portions 109a and 109b make the insulation containers 101a and 101b large in thickness to ensure a thickness that can withstand penetration failure.

１１０ａおよび１１０ｂは絶縁容器１０１ａ，１０１ｂ内で固定側電極１０７と可動側電極１０８の周囲を囲繞するように配設された第１のアークシールドおよび第２のアークシールドであり、電流遮断時、固定側電極１０７と可動側電極１０８との間で発生したアークが直接セラミックからなる絶縁容器１０１ａ，１０１ｂの内面に接触するのを防いでいる。これら第１のアークシールド１１０ａおよび第２のアークシールド１１０ｂは、絶縁容器１０１ａ，１０１ｂを２個使って、中間部で支持することにより、両電極から電気的に絶縁されている。 110a and 110b are a first arc shield and a second arc shield disposed so as to surround the fixed side electrode 107 and the movable side electrode 108 in the insulating containers 101a and 101b, and are fixed when the current is interrupted. The arc generated between the side electrode 107 and the movable side electrode 108 is prevented from directly contacting the inner surfaces of the insulating containers 101a and 101b made of ceramic. The first arc shield 110a and the second arc shield 110b are electrically insulated from both electrodes by using two insulating containers 101a and 101b and supporting them at an intermediate portion.

また、第１のアークシールド１１０ａおよび第２のアークシールド１１０ｂは、その支持部１１０ａ１，１１０ｂ１は絶縁容器１０１ａ，１０１ｂと平行してのび、この支持部１１０ａ１，１１０ｂ１と連続してのびる端部１１０ａ２，１１０ｂ２は絶縁容器１０１ａ，１０１ｂの内面から離れるように起点部１１０ａ３，１１０ｂ３を起点として１０〜２５度の傾斜を持って延びており、これら端部１１０ａ２，１１０ｂ２は段部１０９ａ，１０９ｂのある範囲内に配置されている。 Further, the first arc shield 110a and the second arc shield 110b have support portions 110a1 and 110b1 extending in parallel with the insulating containers 101a and 101b, and end portions 110a2 extending continuously with the support portions 110a1 and 110b1. 110b2 extends with an inclination of 10 to 25 degrees starting from the starting portions 110a3 and 110b3 so as to be separated from the inner surfaces of the insulating containers 101a and 101b, and these end portions 110a2 and 110b2 are within a certain range of the step portions 109a and 109b. Is arranged.

１１１は固定側端板１０２に取り付けられ、絶縁容器１０１ａの固定側の端部１０１ａ１側に第１のアークシールド１１０ａと相対向するように配置された第１の電界緩和シールドであり、絶縁容器１０１ａの端部封着部を電界緩和するために設けられている。そして、第１のアークシールド１１０ａと相対向する第１の電界緩和シールド１１１は、平行部１１１ａから絶縁容器１０１ａの内面から離れるように例えば１０〜２５度の傾斜部１１１ｂを持ち、先端部１１１ｃは絶縁容器１０１ａに設けた段部１０９ａより内径側に配置され、その端部をリング状に丸めている。また、第１の電界緩和シールド１１１の傾斜部１１１ｂは、段部１０９ａのテーパ部１０９ａ１と相対応された配置となっており、それらの傾斜角度は概ね平行に設定されているが多少の傾斜角度の相違は許容される。 Reference numeral 111 denotes a first electric field relaxation shield that is attached to the fixed-side end plate 102 and is disposed on the fixed-side end 101a1 side of the insulating container 101a so as to face the first arc shield 110a. The end sealing portion is provided for relaxing the electric field. And the 1st electric field relaxation shield 111 which opposes the 1st arc shield 110a has the inclination part 111b of 10-25 degrees so that it may leave | separate from the inner surface of the insulation container 101a from the parallel part 111a, and the front-end | tip part 111c is It arrange | positions from the step part 109a provided in the insulating container 101a to the inner diameter side, and the edge part is rounded in the ring shape. In addition, the inclined portion 111b of the first electric field relaxation shield 111 has an arrangement corresponding to the tapered portion 109a1 of the stepped portion 109a, and the inclination angles thereof are set substantially parallel to each other. Differences are acceptable.

１１２は可動側端板１０３に取り付けられ、絶縁容器１０１ｂの可動側の端部１０１ｂ１側に第２のアークシールド１１０ｂと相対向するように配置された第２の電界緩和シールドであり、絶縁容器１０１ｂの端部封着部を電界緩和するために設けられている。そして、第２のアークシールド１１０ｂと相対向する第２の電界緩和シールド１１２は、平行部１１２ａから絶縁容器１０１ｂの内面から離れるように例えば１０〜２５度の傾斜部１１２ｂを持ち、先端部１１２ｃは絶縁容器１０１ｂに設けた段部１０９ｂより内径側に配置され、その端部をリング状に丸めている。また、第２の電界緩和シールド１１２の傾斜部１１２ｂは、段部１０９ｂのテーパ部１０９ｂ１と相対応された配置となっており、それらの傾斜角度は概ね平行に設定されているが多少の傾斜角度の相違は許容される。 Reference numeral 112 denotes a second electric field relaxation shield that is attached to the movable side end plate 103 and is disposed on the movable side end 101b1 side of the insulating container 101b so as to face the second arc shield 110b. The end sealing portion is provided for relaxing the electric field. The second electric field relaxation shield 112 facing the second arc shield 110b has an inclined portion 112b of, for example, 10 to 25 degrees so as to be away from the inner surface of the insulating container 101b from the parallel portion 112a, and the tip end portion 112c is It arrange | positions from the step part 109b provided in the insulating container 101b to the inner-diameter side, The edge part is rounded in the ring shape. In addition, the inclined portion 112b of the second electric field relaxation shield 112 is arranged to correspond to the tapered portion 109b1 of the stepped portion 109b, and the inclination angles thereof are set substantially parallel to each other. Differences are acceptable.

１１３はペローズシールドであり、１１４は絶縁容器１０１ａと絶縁容器１０１ｂとを封着する封着部材であり、例えばリング状に形成され、リング状の内周側に第１のアークシールド１１０ａおよび第２のアークシールド１１０ｂが取り付けられている。 113 is a bellows shield, and 114 is a sealing member for sealing the insulating container 101a and the insulating container 101b. For example, the sealing member is formed in a ring shape, and the first arc shield 110a and the first arc shield are formed on the inner peripheral side of the ring shape. Two arc shields 110b are attached.

以上のように構成されたこの実施の形態１における真空バルブでは、第１の電界緩和シールド１１１および第２の電界緩和シールド１１２の無い部分にテーパ部１０９ａ１，１０９ａ２，１０９ｂ１，１０９ｂ２を有する段部１０９ａ，１０９ｂを設けているので、真空バルブの外径を大形化することなくセラミックからなる絶縁容器１０１ａ，１０１ｂの肉厚を大きく構成することができる。 In the vacuum valve according to the first embodiment configured as described above, the step portion 109a having the tapered portions 109a1, 109a2, 109b1, and 109b2 in the portions where the first electric field relaxation shield 111 and the second electric field relaxation shield 112 are not provided. 109b, the thickness of the insulating containers 101a and 101b made of ceramic can be increased without increasing the outer diameter of the vacuum valve.

また、第１の電界緩和シールド１１１および第２の電界緩和シールド１１２の先端部１１１ｃ，１１２ｃは絶縁容器１０１ａ，１０１ｂの段部１０９ａ，１０９ｂより内径側に配置しているので、段部１０９ａ，１０９ｂとの距離を確保することができ、絶縁性能をより一層高くすることができる。 Moreover, since the front-end | tip parts 111c and 112c of the 1st electric field relaxation shield 111 and the 2nd electric field relaxation shield 112 are arrange | positioned from the step part 109a, 109b of insulation container 101a, 101b to the inner diameter side, step part 109a, 109b The insulation performance can be further enhanced.

更に、絶縁容器１０１ａ，１０１ｂの段部１０９ａ，１０９ｂのテーパ部１０９ａ１，１０１ｂ１に、第１の電界緩和シールド１１１および第２の電界緩和シールド１１２の傾斜部１１１ｂ，１１２ｂを対応させているので、段部１０９ａ，１０９ｂのテーパ部１０９ａ１，１０９ｂ１と第１の電界緩和シールド１１１および第２の電界緩和シールド１１２の傾斜部１１１ｃ，１１２ｃとの距離を全体にわたって均一にすることができ、絶縁性能の弱点部の形成を防止することができる。 Further, the tapered portions 109a1 and 101b1 of the step portions 109a and 109b of the insulating containers 101a and 101b correspond to the inclined portions 111b and 112b of the first electric field relaxation shield 111 and the second electric field relaxation shield 112, respectively. The distance between the taper portions 109a1 and 109b1 of the portions 109a and 109b and the inclined portions 111c and 112c of the first electric field relaxation shield 111 and the second electric field relaxation shield 112 can be made uniform over the whole, and the weak point portion of the insulation performance Can be prevented.

また、第１のアークシールド１１０ａおよび第２のアークシールド１１０ｂの端部１１０ａ２，１１０ｂ２は絶縁容器１０１ａ，１０１ｂの段部１０９ａ，１０９ｂがある範囲内に配置しているので、第１のアークシールド１１０ａおよび第２のアークシールド１１０ｂの端部１１０ａ２，１１０ｂ２先端からのアークは段部１０９ａ，１０９ｂの肉厚な部分に飛ぶようになるので貫通破壊を防ぐことができる。 In addition, since the end portions 110a2 and 110b2 of the first arc shield 110a and the second arc shield 110b are disposed within a certain range of the step portions 109a and 109b of the insulating containers 101a and 101b, the first arc shield 110a. And since the arcs from the ends 110a2 and 110b2 of the second arc shield 110b fly to the thick portions of the stepped portions 109a and 109b, it is possible to prevent penetration failure.

以上のように、この発明では真空バルブの外径を大形化することなく、より高い電圧で電圧コンディショニングを行うことができることで、電圧コンディショニング工程の時間短縮を図ることができ、耐電圧性能の信頼性がより一層高い安価な真空バルブを提供することができる。 As described above, according to the present invention, voltage conditioning can be performed at a higher voltage without increasing the outer diameter of the vacuum valve, so that the time required for the voltage conditioning process can be shortened and the withstand voltage performance can be improved. An inexpensive vacuum valve with higher reliability can be provided.

実施の形態２．
この発明の実施の形態２を図２に基づいて説明する。図２はこの発明の実施の形態２に係わる真空バルブを示す断面図である。 Embodiment 2. FIG.
A second embodiment of the present invention will be described with reference to FIG. 2 is a cross-sectional view showing a vacuum valve according to Embodiment 2 of the present invention.

上述した実施の形態１においては、絶縁容器は２個に分割された絶縁容器１０１ａと絶縁容器１０１ｂとにより構成された場合について述べたが、一体構造体からなる絶縁容器１０１であってもよい。また、アークシールドも２個に分割された第１のアークシールド１１０ａと第２のアークシールド１１０ｂとにより構成された場合について述べたが、一体構造体からなるアークシールド１１０であってもよい。 In Embodiment 1 described above, the case where the insulating container is configured by the insulating container 101a and the insulating container 101b divided into two parts has been described. However, the insulating container 101 formed of an integral structure may be used. Moreover, although the case where the arc shield is constituted by the first arc shield 110a and the second arc shield 110b divided into two parts has been described, the arc shield 110 formed of an integral structure may be used.

すなわち、図２に示すように、一体構造体からなる絶縁容器１０１はその両端に端部１０１ａ１，１０１ｂ１がそれぞれ設けられ、それら端部１０１ａ１，１０１ｂ１側内周面より内周側に突出する例えば１０〜２５度のテーパ部１０９ａ１，１０９ｂ１を有する段部１０９が形成されている。また、一体構造体からなるアークシールド１１０は支持部材１１５により絶縁容器１０１に取り付けられている。 That is, as shown in FIG. 2, the insulating container 101 made of an integral structure is provided with end portions 101 a 1 and 101 b 1 at both ends thereof, and protrudes from the inner peripheral surface of the end portions 101 a 1 and 101 b 1 to the inner peripheral side, for example, 10. A step portion 109 having taper portions 109a1 and 109b1 of ˜25 degrees is formed. Further, the arc shield 110 made of an integral structure is attached to the insulating container 101 by a support member 115.

この実施の形態２によれば、絶縁容器１０１およびアークシールド１１０を一体構造体として構成したものであり、上述した実施の形態１と同様の効果を奏するとともに、構成体の簡素化を図ることができる。 According to the second embodiment, the insulating container 101 and the arc shield 110 are configured as an integral structure, and the effects similar to those of the first embodiment described above can be achieved, and the structure can be simplified. it can.

実施の形態３．
この発明の実施の形態３を図３に基づいて説明する。図３はこの発明の実施の形態３に係わる真空バルブを示す断面図である。 Embodiment 3 FIG.
A third embodiment of the present invention will be described with reference to FIG. 3 is a sectional view showing a vacuum valve according to Embodiment 3 of the present invention.

上述した実施の形態１，２においては、第１の電界緩和シールド１１１および第２の電界緩和シールド１１２の先端部１１１ｃ，１１２ｃがリング状に丸めて形成された場合について述べたが、この実施の形態３においては、第１の電界緩和シールド１１１および第２の電界緩和シールド１１２の先端部１１１ｄ，１１２ｄにはリング状に丸めた形状に形成していないものである。 In the first and second embodiments described above, the case where the tip portions 111c and 112c of the first electric field relaxation shield 111 and the second electric field relaxation shield 112 are formed in a ring shape has been described. In the third embodiment, the tip portions 111d and 112d of the first electric field relaxation shield 111 and the second electric field relaxation shield 112 are not formed into a ring shape.

この実施の形態３によれば、上述した実施の形態１，２と同様の効果を奏するとともに、第１の電界緩和シールド１１１および第２の電界緩和シールド１１２の形成作業が容易となり、製造コストの低減化を図ることができる。 According to the third embodiment, the same effects as those of the first and second embodiments described above can be obtained, and the first electric field relaxation shield 111 and the second electric field relaxation shield 112 can be easily formed. Reduction can be achieved.

実施の形態４．
この発明の実施の形態４を図４に基づいて説明する。図４はこの発明の実施の形態４に係わる真空バルブを示す断面図である。 Embodiment 4 FIG.
Embodiment 4 of the present invention will be described with reference to FIG. 4 is a sectional view showing a vacuum valve according to Embodiment 4 of the present invention.

図４において、２０１はセラミックからなる筒状の第１の絶縁容器、２０２はセラミックからなる筒状の第２の絶縁容器、２０３は第１の絶縁容器２０１の一方側となる端部２０１ａを塞ぐ固定側端板、２０４は第２の絶縁容器２０２の一方側となる端部２０２ａを塞ぐ可動側端板、２０５は第１の絶縁容器２０１の他方側なる端部２０１ｂと第２の絶縁容器２０２の他方側となる端部２０２ｂとの間に配設された金属容器（またはシリンダー）であり、これら固定側端板１０２、第１の絶縁容器２０１、金属容器（またはシリンダー）２０５、第２の絶縁容器２０２、可動側端板１０３とにより真空容器が構成される。なお、第１の絶縁容器２０１と金属容器（またはシリンダー）２０５とは封着部材２０６により一体的に接続され、金属容器（またはシリンダー）２０５と第２の絶縁容器２０２とは封着部材２０７により一体的に接続されている。 In FIG. 4, 201 is a cylindrical first insulating container made of ceramic, 202 is a cylindrical second insulating container made of ceramic, and 203 closes an end 201 a which is one side of the first insulating container 201. A fixed side end plate 204 is a movable side end plate that closes an end portion 202 a that is one side of the second insulating container 202, and 205 is an end portion 201 b that is the other side of the first insulating container 201 and the second insulating container 202. A metal container (or cylinder) disposed between the other end portion 202b of the first and second ends of the first fixed container 102, the first insulating container 201, the metal container (or cylinder) 205, and the second container. The insulating container 202 and the movable side end plate 103 constitute a vacuum container. The first insulating container 201 and the metal container (or cylinder) 205 are integrally connected by a sealing member 206, and the metal container (or cylinder) 205 and the second insulating container 202 are connected by a sealing member 207. Connected together.

２０８は固定側端板２０３を貫通して配設された固定側通電軸、２０９は可動側端板２０４を貫通してベローズ２１０を介して配設された可動側通電軸、２１１は金属容器（またはシリンダー）２０５内に位置する固定側通電軸２０８の先端部に設けられた固定側電極、２１２は第３の絶縁容器２０５内に位置する可動側通電軸２０９の先端部に固定側電極２１１と相対向して設けられた可動側電極である。 208 is a fixed energizing shaft disposed through the fixed end plate 203, 209 is a movable energizing shaft disposed through the bellows 210 through the movable end plate 204, and 211 is a metal container ( Or a fixed side electrode 212 provided at the distal end of the fixed energizing shaft 208 located in the cylinder 205, and a fixed side electrode 211 at the distal end of the movable energizing shaft 209 located in the third insulating container 205. It is the movable side electrode provided facing each other.

２１３は少なくとも第１の絶縁容器２０１の固定側の端部２０１ａの後述する第１の電界緩和シールドの配置スペースを残して端部２０１ａ側内周面より内周側に突出する例えば１０〜２５度のテーパ部２１３ａ，２１３ｂを有する第１の段部である。この第１の段部２１３により第１の絶縁容器２０１の肉厚を大きく構成して貫通破壊に耐える肉厚を確保している。 Reference numeral 213 denotes, for example, 10 to 25 degrees that protrudes from the inner peripheral surface of the end portion 201a side to the inner peripheral side, leaving a space for arranging a first electric field relaxation shield (described later) of the end portion 201a on the fixed side of the first insulating container 201. It is the 1st step part which has the taper parts 213a and 213b. The first step portion 213 is configured to increase the thickness of the first insulating container 201 to ensure a thickness that can withstand penetration failure.

２１４は少なくとも第２の絶縁容器２０２の可動側の端部２０２ａの後述する第２の電界緩和シールドの配置スペースを残して端部２０２ａ側内周面より内周側に突出する例えば１０〜２５度のテーパ部２１４ａ，２１４ｂを有する第２の段部である。この第２の段部２１４により第２の絶縁容器２０２の肉厚を大きく構成して貫通破壊に耐える肉厚を確保している。２１５はベローズシールドである。 Reference numeral 214 denotes, for example, 10 to 25 degrees protruding from the inner peripheral surface of the end portion 202a side to the inner peripheral side, leaving a space for arranging a second electric field relaxation shield (described later) of the movable side end portion 202a of the second insulating container 202. It is the 2nd step part which has the taper parts 214a and 214b. The thickness of the second insulating container 202 is increased by the second step portion 214 to ensure a thickness that can withstand penetration failure. Reference numeral 215 denotes a bellows shield.

２１６は一方側の端部２１６ａが金属容器（またはシリンダー）２０５に接続され、他方側の端部２１６ｂは第１の段部２１３のある範囲内に配置された第１のアークシールドであり、図は一例として、第１のアークシールド２１６の端部２１６ａ側は第１の絶縁容器２０１と平行してのび、起点部２１６ｃを起点として１０〜２５度の傾斜を持って第１の絶縁容器２０１の内面から離れるように延びる傾斜部２１６ｄが形成され、傾斜部２１６ｄの起点部２１６ｅを起点として端部２１６ｂ側が第１の絶縁容器２０１と平行に配置されている。また、第１のアークシールド２１６の傾斜部２１６ｄは、第１の段部２１３のテーパ部２１３ｂと相対応された配置となっており、それらの傾斜角度は概ね平行に設定されているが多少の傾斜角度の相違は許容される。 Reference numeral 216 denotes a first arc shield having one end 216a connected to a metal container (or cylinder) 205, and the other end 216b disposed within a range of the first step 213. As an example, the end 216a side of the first arc shield 216 extends in parallel with the first insulating container 201 and has an inclination of 10 to 25 degrees starting from the starting point 216c. An inclined portion 216 d extending away from the inner surface is formed, and the end portion 216 b side is arranged in parallel with the first insulating container 201 starting from the starting point portion 216 e of the inclined portion 216 d. In addition, the inclined portion 216d of the first arc shield 216 has an arrangement corresponding to the tapered portion 213b of the first stepped portion 213, and the inclination angles thereof are set substantially parallel to each other. Differences in tilt angle are allowed.

２１７は一方側の端部２１７ａが金属容器（またはシリンダー）２０５に接続され、他方側の端部２１７ｂは第２の段部２１４のある範囲内に配置された第２のアークシールドであり、図は一例として、第２のアークシールド２１７の端部２１７ａ側は第２の絶縁容器２０２と平行してのび、起点部２１７ｃを起点として１０〜２５度の傾斜を持って第２の絶縁容器２０２の内面から離れるように延びる傾斜部２１７ｄが形成され、傾斜部２１７ｄの起点部２１７ｅを起点として端部２１７ｂ側が第２の絶縁容器２０２と平行に配置されている。また、第２のアークシールド２１７の傾斜部２１７ｄは、第２の段部２１４のテーパ部２１４ｂと相対応された配置となっており、それらの傾斜角度は概ね平行に設定されているが多少の傾斜角度の相違は許容される。 Reference numeral 217 denotes an end 217a on one side connected to the metal container (or cylinder) 205, and an end 217b on the other side is a second arc shield disposed within a range of the second stepped portion 214. As an example, the end 217a side of the second arc shield 217 extends in parallel with the second insulating container 202, and has an inclination of 10 to 25 degrees starting from the starting point 217c. An inclined portion 217 d extending away from the inner surface is formed, and the end portion 217 b side is arranged in parallel with the second insulating container 202 with the starting point portion 217 e of the inclined portion 217 d as the starting point. In addition, the inclined portion 217d of the second arc shield 217 has an arrangement corresponding to the tapered portion 214b of the second stepped portion 214, and the inclination angles thereof are set substantially parallel to each other. Differences in tilt angle are allowed.

２１８は固定側端板２０３に取り付けられ、第１の絶縁容器２０１の固定側の端部２０１ａ側に第１のアークシールド２１６と相対向するように配置された第１の電界緩和シールドであり、第１の絶縁容器２０１の端部封着部を電界緩和するために設けられている。そして、第１のアークシールド２１６と相対向する第１の電界緩和シールド２１８は、平行部２１８ａから第１の絶縁容器２０１の内面から離れるように例えば１０〜２５度の傾斜部２１８ｂを持ち、先端部２１８ｃは第１の絶縁容器２０１に設けた第１の段部２１３より内径側に配置され、その端部をリング状に丸めている。また、第１の電界緩和シールド２１８の傾斜部２１８ｂは、第１の段部２１３のテーパ部２１３ａと相対応された配置となっており、それらの傾斜角度は概ね平行に設定されているが多少の傾斜角度の相違は許容される。 218 is a first electric field relaxation shield that is attached to the fixed side end plate 203 and disposed on the fixed side end 201a side of the first insulating container 201 so as to face the first arc shield 216; The end sealing portion of the first insulating container 201 is provided for relaxing the electric field. The first electric field relaxation shield 218 facing the first arc shield 216 has an inclined portion 218b of, for example, 10 to 25 degrees so as to be separated from the inner surface of the first insulating container 201 from the parallel portion 218a, The portion 218c is disposed on the inner diameter side from the first step portion 213 provided in the first insulating container 201, and its end is rounded into a ring shape. In addition, the inclined portion 218b of the first electric field relaxation shield 218 is arranged to correspond to the tapered portion 213a of the first stepped portion 213, and the inclination angles thereof are set almost in parallel. The difference in the inclination angle is acceptable.

２１９は可動側端板２０４に取り付けられ、第２の絶縁容器２０２の可動側の端部２０２ａ側に第２のアークシールド２１７と相対向するように配置された第２の電界緩和シールドであり、第２の絶縁容器２０２の端部封着部を電界緩和するために設けられている。そして、第２のアークシールド２１７と相対向する第２の電界緩和シールド２１９は、平行部２１９ａから第２の絶縁容器２０２の内面から離れるように例えば１０〜２５度の傾斜部２１９ｂを持ち、先端部２１９ｃは第２の絶縁容器２０２に設けた第２の段部２１４より内径側に配置され、その端部をリング状に丸めている。また、第２の電界緩和シールド２１９の傾斜部２１９ｂは、第２の段部２１４のテーパ部２１４ａと相対応された配置となっており、それらの傾斜角度は概ね平行に設定されているが多少の傾斜角度の相違は許容される。 219 is a second electric field relaxation shield that is attached to the movable side end plate 204 and is disposed on the movable side end 202a side of the second insulating container 202 so as to face the second arc shield 217, The end sealing portion of the second insulating container 202 is provided for relaxing the electric field. The second electric field relaxation shield 219 opposite to the second arc shield 217 has an inclined portion 219b of, for example, 10 to 25 degrees so as to be separated from the inner surface of the second insulating container 202 from the parallel portion 219a. The portion 219c is disposed on the inner diameter side of the second stepped portion 214 provided in the second insulating container 202, and its end is rounded into a ring shape. In addition, the inclined portion 219b of the second electric field relaxation shield 219 has an arrangement corresponding to the tapered portion 214a of the second stepped portion 214, and the inclination angle thereof is set to be approximately parallel. The difference in the inclination angle is acceptable.

以上のように構成されたこの実施の形態４における真空バルブでは、第１の電界緩和シールド２１８および第２の電界緩和シールド２１９の無い部分にテーパ部２１３ａ，２１４ｂ，２１４ａ，２１４ｂを有する第１の段部２１３および第２の段部２１４を設けているので、真空バルブの外径を大形化することなくセラミックからなる第１の絶縁容器２０１および第２の絶縁容器２０２の肉厚を大きく構成することができる。 In the vacuum valve according to the fourth embodiment configured as described above, the first electric field relaxation shield 218 and the portion without the second electric field relaxation shield 219 have the first tapered portions 213a, 214b, 214a, 214b. Since the step portion 213 and the second step portion 214 are provided, the thickness of the first insulating container 201 and the second insulating container 202 made of ceramic is increased without increasing the outer diameter of the vacuum valve. can do.

また、第１の電界緩和シールド２１８および第２の電界緩和シールド２１９の先端部２１８ｃ，２１９ｃは第１の絶縁容器２０１および第２の絶縁容器２０２の第１の段部２１３および第２の段部２１４より内径側に配置しているので、第１の段部２１３および第２の段部２１４との距離を確保することができ、絶縁性能をより一層高くすることができる。なお、第１の電界緩和シールド２１８および第２の電界緩和シールド２１９の先端部２１８ｃ，２１９ｃはリング状に丸めた形状としているが、必ずしもリング状に形成することはなく、上述した図３に示すような簡素な形状とすることもできる。 Further, the tip portions 218c and 219c of the first electric field relaxation shield 218 and the second electric field relaxation shield 219 are the first step portion 213 and the second step portion of the first insulating container 201 and the second insulating container 202, respectively. Since it is arranged on the inner diameter side with respect to 214, the distance between the first step portion 213 and the second step portion 214 can be secured, and the insulation performance can be further enhanced. In addition, although the front-end | tip parts 218c and 219c of the 1st electric field relaxation shield 218 and the 2nd electric field relaxation shield 219 are made into the shape rounded in the ring shape, they are not necessarily formed in a ring shape and are shown in FIG. 3 mentioned above. Such a simple shape can also be used.

更に、第１の絶縁容器２０１および第２の絶縁容器２０２の第１の段部２１３および第２の段部２１４のテーパ部２１３ａ，２１４ａに、第１の電界緩和シールド２１８および第２の電界緩和シールド２１９の傾斜部２１８ｂ，２１９ｂを対応させているので、第１の段部２１３および第２の段部２１４のテーパ部２１３ａ，２１４ａと第１の電界緩和シールド２１８および第２の電界緩和シールド２１９の傾斜部２１８ｃ，２１９ｃとの距離を全体にわたって均一にすることができ、絶縁性能の弱点部の形成を防止することができる。 Furthermore, the first electric field relaxation shield 218 and the second electric field relaxation are formed on the first step portion 213 and the taper portions 213a and 214a of the second step portion 214 of the first insulating container 201 and the second insulating container 202, respectively. Since the inclined portions 218b and 219b of the shield 219 are made to correspond, the tapered portions 213a and 214a of the first step portion 213 and the second step portion 214, the first electric field relaxation shield 218, and the second electric field relaxation shield 219, respectively. Thus, the distance from the inclined portions 218c and 219c can be made uniform over the whole, and the formation of the weak point portion of the insulating performance can be prevented.

ところで、この実施の形態４においては、固定側電極２１１および可動側電極２１２は金属容器（またはシリンダー）２０５内に配設され、第１の絶縁容器２０１および第２の絶縁容器２０２により両電極から電気的に絶縁されており、金属容器（またはシリンダー）２０５は浮遊電位（中間電位）となる。金属容器（またはシリンダー）２０５の外側に絶縁容器を配さないため、真空バルブはさらに小形化できる。
また、金属容器（またはシリンダー）２０５の電位は３０〜７０％程度となるため、金属容器（またはシリンダー）２０５は固定側端板２０３および可動側端板２０４より外形が大きくなってもよい。 By the way, in the fourth embodiment, the fixed side electrode 211 and the movable side electrode 212 are disposed in the metal container (or cylinder) 205, and the first insulating container 201 and the second insulating container 202 separate both electrodes. The metal container (or cylinder) 205 is electrically insulated and has a floating potential (intermediate potential). Since an insulating container is not disposed outside the metal container (or cylinder) 205, the vacuum valve can be further miniaturized.
Further, since the potential of the metal container (or cylinder) 205 is about 30 to 70%, the outer shape of the metal container (or cylinder) 205 may be larger than that of the fixed side end plate 203 and the movable side end plate 204.

また、第１のアークシールド２１６および第２のアークシールド２１７の端部２１６ｂ，２１７ｂは第１の絶縁容器２０１および第２の絶縁容器２０２の第１の段部２１３および第２の段部２１４がある範囲内に配置しているので、第１のアークシールド２１６および第２のアークシールド２１７の端部２１６ｂ，２１７ｂ先端からのアークは第１の段部２１３および第２の段部２１４の肉厚な部分に飛ぶようになるので貫通破壊を防ぐことができる。 Further, the end portions 216b and 217b of the first arc shield 216 and the second arc shield 217 are formed by the first step portion 213 and the second step portion 214 of the first insulating container 201 and the second insulating container 202, respectively. Since they are arranged within a certain range, the arcs from the ends 216b and 217b of the first arc shield 216 and the second arc shield 217 are thick at the first step 213 and the second step 214. Because it will fly to the important part, it can prevent the penetration destruction.

以上のように、この発明では真空バルブの外径を上述した各実施の形態よりもさらに小型化を図ることができ、より高い電圧で電圧コンディショニングを行うことができることで、電圧コンディショニング工程の時間短縮を図ることができ、耐電圧性能の信頼性がより一層高い安価な真空バルブを提供することができる。 As described above, according to the present invention, the outer diameter of the vacuum valve can be further reduced as compared with each of the above-described embodiments, and voltage conditioning can be performed at a higher voltage, thereby shortening the time of the voltage conditioning process. Therefore, it is possible to provide an inexpensive vacuum valve with higher reliability of withstand voltage performance.

この発明は、大形化することなく絶縁性能の向上を図ることができる真空バルブの実現に好適である。 The present invention is suitable for realizing a vacuum valve capable of improving the insulation performance without increasing the size.

１０１絶縁容器
１０１ａ絶縁容器
１０１ｂ絶縁容器
１０１ａ１端部
１０１ｂ１端部
１０２固定側端板
１０３可動側端板
１０４固定側通電軸
１０５可動側通電軸
１０７固定側電極
１０８可動側電極
１０９段部
１０９ａ段部
１０９ｂ段部
１０９ａ１テーパ部
１０９ｂ１テーパ部
１１０アークシールド
１１０ａアークシールド
１１０ｂアークシールド
１１０ａ２端部
１１０ｂ２端部
１１１第１の電界緩和シールド
１１１ｂ傾斜部
１１１ｃ先端部
１１２第２の電界緩和シールド
１１２ｂ傾斜部
１１２ｃ先端部
２０１第１の絶縁容器
２０１ａ端部
２０１ｂ端部
２０２第２の絶縁容器
２０２ａ端部
２０２ｂ端部
２０３固定側端板
２０４可動側端板
２０５金属容器
２０８固定側通電軸
２０９可動側通電軸
２１１固定側電極
２１２可動側電極
２１３第１の段部
２１３ａテーパ部
２１３ｂテーパ部
２１４第２の段部
２１４ａテーパ部
２１４ｂテーパ部
２１６第１のアークシールド
２１６ａ端部
２１６ｂ端部
２１６ｄテーパ部
２１７第２のアークシールド
２１７ａ端部
２１７ｂ端部
２１７ｄテーパ部
２１８第１の電界緩和シールド
２１８ｂ傾斜部
２１８ｃ先端部
２１９第２の電界緩和シールド
２１９ｂ傾斜部
２１９ｃ先端部 DESCRIPTION OF SYMBOLS 101 Insulating container 101a Insulating container 101b Insulating container 101a1 End part 101b1 End part 102 Fixed side end plate 103 Movable side end plate 104 Fixed side energizing shaft 105 Movable side energizing axis 107 Fixed side electrode 108 Movable side electrode 109 Step part 109a Step part 109b Step portion 109a1 Taper portion 109b1 Taper portion 110 Arc shield 110a Arc shield 110b Arc shield 110a2 End portion 110b2 End portion 111 First electric field relaxation shield 111b Inclination portion 111c Tip portion 112 Second electric field relaxation shield 112b Inclination portion 112c Tip portion 201 First insulating container 201a End portion 201b End portion 202 Second insulating container 202a End portion 202b End portion 203 Fixed side end plate 204 Movable side end plate 205 Metal container 208 Fixed side energization shaft 209 Movable side energization 211 fixed side electrode 212 movable side electrode 213 first step portion 213a taper portion 213b taper portion 214 second step portion 214a taper portion 214b taper portion 216 first arc shield 216a end portion 216b end portion 216d taper portion 217 second Arc shield 217a End portion 217b End portion 217d Tapered portion 218 First electric field relaxation shield 218b Inclined portion 218c Tip portion 219 Second electric field relaxation shield 219b Inclined portion 219c Tip portion

Claims

A cylindrical insulating container; a fixed end plate that closes one end of the insulating container; a movable end plate that closes the other end of the insulating container; and the fixed end plate The fixed-side electrode provided at the distal end of the fixed-side energizing shaft disposed in a manner opposite to the fixed-side electrode and the distal end of the movable-side energizing shaft disposed through the movable-side end plate. Between the movable side electrode provided on one side and the other side end of the insulating container from the inner peripheral surface of the one side end and the other side end of the insulating container. A step portion having a taper portion projecting to the side, an arc shield disposed so as to surround the periphery of the fixed side electrode and the movable side electrode, and both end portions disposed within a range of the step portion; Positioned between the inner peripheral surface of the one end of the insulating container and the inner peripheral surface of the stepped portion attached to the fixed-side end plate Arranged so as to face the arc shield, and has an inclined portion so as to be separated from the inner peripheral surface of the insulating container toward the inner diameter side, and the tip portion of the inclined portion has an inner diameter from the inner peripheral surface of the stepped portion. the first and the electric field relaxation shield, wherein a Kushirudo relative located between the inner peripheral surface and the inner peripheral surface of the stepped portion of the end portion of said insulating container is attached to the movable side end plate located on the side A vacuum valve comprising a second electric field relaxation shield arranged to face.

A cylindrical insulating container; a fixed end plate that closes one end of the insulating container; a movable end plate that closes the other end of the insulating container; and the fixed end plate The fixed-side electrode provided at the distal end of the fixed-side energizing shaft disposed in a manner opposite to the fixed-side electrode and the distal end of the movable-side energizing shaft disposed through the movable-side end plate. Projecting from the inner peripheral surface of the one end and the other end of the insulating container to the inner peripheral side between the movable side electrode provided and the one end and the other end of the insulating container A stepped portion having a taper portion, an arc shield disposed so as to surround the periphery of the fixed side electrode and the movable side electrode, and both end portions disposed within a range of the stepped portion, and the fixed side end Attached to the plate and positioned between the inner peripheral surface of one end of the insulating container and the inner peripheral surface of the stepped portion. It is arranged so as to face the shield, and has an inclined portion so as to be separated from the inner peripheral surface of the insulating container toward the inner diameter side, and the tip portion of the inclined portion is positioned on the inner diameter side from the inner peripheral surface of the stepped portion. A first electric field relaxation shield that is attached to the movable side end plate and is positioned between the inner peripheral surface of the end portion of the insulating container and the inner peripheral surface of the stepped portion so as to face the arc shield. A second electric field relaxation that has an inclined portion disposed away from the inner peripheral surface of the insulating container toward the inner diameter side, and a tip portion of the inclined portion is positioned on the inner diameter side of the inner peripheral surface of the stepped portion. A vacuum valve comprising a shield.

3. The vacuum valve according to claim 1, wherein the tapered portion of the step portion corresponds to the inclined portion of the first electric field relaxation shield or the second electric field relaxation shield.

The vacuum valve according to any one of claims 1 to 3, wherein the insulating container is constituted by two insulating containers.

The vacuum valve according to any one of claims 1 to 4, wherein the arc shield includes two arc shields.

A cylindrical first insulating container; a cylindrical second insulating container; a fixed-side end plate closing one end of the first insulating container; and one of the second insulating containers A movable side end plate closing a side end, a metal container disposed between an end on the other side of the first insulating container and an end on the other side of the second insulating container, A fixed side electrode located in the metal container provided at the tip of a fixed side energizing shaft disposed through the fixed side end plate, and a movable side disposed through the movable side end plate Between the movable side electrode located in the metal container provided opposite to the fixed side electrode at the tip of the current-carrying shaft, and one end and the other end of the first insulating container A first step portion having a tapered portion projecting inward from an inner peripheral surface of one end and the other end of the first insulating container; and the second step A second taper part that projects from the inner peripheral surface of the one end and the other end of the second insulating container to the inner peripheral side between the one end and the other end of the edge container. A step portion, one end portion is connected to the metal container, and the other end portion is a first arc shield disposed within a certain range of the first step portion, and one end portion is the end portion. A second arc shield that is connected to the metal container and has an end on the other side disposed within a range of the second stepped portion, and one end of the first insulating container that is attached to the fixed end plate Is disposed between the inner peripheral surface of the first step portion and the inner peripheral surface of the first step portion so as to be opposed to the first arc shield, and has an inner diameter from the inner peripheral surface of the first insulating container. A first electric field which has an inclined portion so as to be separated to the side, and a tip portion of the inclined portion is located closer to an inner diameter side than an inner peripheral surface of the first step portion. The second arc is located between the sum shield and the inner peripheral surface of one end of the second insulating container attached to the movable side end plate and the inner peripheral surface of the second stepped portion. A vacuum valve comprising: a second electric field relaxation shield arranged to face the shield.

A cylindrical first insulating container; a cylindrical second insulating container; a fixed-side end plate closing one end of the first insulating container; and one of the second insulating containers A movable side end plate closing a side end, a metal container disposed between an end on the other side of the first insulating container and an end on the other side of the second insulating container, A fixed side electrode located in the metal container provided at the tip of a fixed side energizing shaft disposed through the fixed side end plate, and a movable side disposed through the movable side end plate Between the movable side electrode located in the metal container provided opposite to the fixed side electrode at the tip of the current-carrying shaft, and one end and the other end of the first insulating container A first step portion having a tapered portion projecting inward from an inner peripheral surface of one end and the other end of the first insulating container; and the second step A second taper part that projects from the inner peripheral surface of the one end and the other end of the second insulating container to the inner peripheral side between the one end and the other end of the edge container. A step portion, one end portion is connected to the metal container, and the other end portion is a first arc shield disposed within a certain range of the first step portion, and one end portion is the end portion. A second arc shield that is connected to the metal container and has an end on the other side disposed within a range of the second stepped portion, and one end of the first insulating container that is attached to the fixed end plate Is disposed between the inner peripheral surface of the first step portion and the inner peripheral surface of the first step portion so as to be opposed to the first arc shield, and has an inner diameter from the inner peripheral surface of the first insulating container. A first electric field which has an inclined portion so as to be separated to the side, and a tip portion of the inclined portion is located closer to an inner diameter side than an inner peripheral surface of the first step portion. The second arc is located between the sum shield and the inner peripheral surface of one end of the second insulating container attached to the movable side end plate and the inner peripheral surface of the second stepped portion. It arrange | positions so that it may oppose with a shield, and it has an inclination part so that it may leave | separate to an internal diameter side from the internal peripheral surface of the said 2nd insulating container, and the front-end | tip part of the said inclined part is the internal peripheral surface of the said 2nd step part A vacuum valve comprising: a second electric field relaxation shield positioned closer to the inner diameter side.

The inclined portion of the first electric field relaxation shield is made to correspond to the tapered portion of the first step portion, and the inclined portion of the second electric field relaxation shield is made to correspond to the tapered portion of the second step portion. The vacuum valve according to claim 6 or 7, characterized in that

The first arc shield is provided with an inclined portion corresponding to the tapered portion of the first step portion, and the second arc shield is provided with an inclined portion corresponding to the tapered portion of the second step portion. The vacuum valve according to any one of claims 6 to 8, wherein the vacuum valve is characterized in that: