JP5850087B2 - Robot, control device and robot system - Google Patents

Description

The present invention, robot, control apparatus, relates to a robot system.

2. Description of the Related Art Conventionally, a device such as a robot that moves a terminal device attached to the tip of an arm to a desired position by rotating the arm and operates the terminal device at the position is known. For example, a feeding / unloading material apparatus that includes a gripping terminal and feeds / unprocesses a workpiece with respect to a processing apparatus, a painting robot that includes a painting terminal, a welding robot that includes a welding terminal, and the like are known.
When driving a robot, a control method is used in which the rotation angle of a drive source such as a motor driving a robot arm is measured, and the tip position of the arm is controlled based on the measured angle information. However, because the transmission mechanism and the arm that transmit the driving force from the drive source to the arm are not rigid, the transmission mechanism and the arm are deformed. In some cases, the position does not necessarily match the actual position. In addition, there is a problem that vibration is generated by the deformation of the transmission mechanism and the arm during operation. To solve these problems, a method has been devised in which an inertial sensor is attached to the tip of an arm to measure the movement of the tip, and the obtained angular velocity information from the inertial sensor is used for control. Patent Document 1 discloses a method for controlling an articulated robot that can perform high-precision positioning even when rigidity is low by controlling an arm operation based on an output signal of an inertial sensor, and can prevent a reduction in accuracy due to vibration. And an articulated robot.

  However, in order to obtain the arm rotation angle from the output of the inertial sensor, it is necessary to integrate the output of the inertial sensor. Repeating the integration makes it more susceptible to the drift of the reference potential of the inertial sensor, and the control device There was a problem that the possibility of misrecognizing information increased. Patent Document 2 discloses an error that varies at a low frequency such as a drift of a reference potential by using a low frequency component of an output of an angle sensor and an output of an angular velocity sensor using only a high frequency component of an integrated value of an output for control. A robot control apparatus and a robot control method in which factors are eliminated are disclosed.

Japanese Patent Laid-Open No. 7-9374 JP 2005-242794 A

  However, there is a possibility that the output of the inertial sensor may include errors due to the effects of noise or the delay of signal transmission, and the possibility that the control device may erroneously recognize information due to these errors increases. was there. The influence of noise of the inertial sensor and the influence of signal transmission delay are phenomena that occur even at high frequencies, and are problems that cannot be dealt with by the control device and control method disclosed in Patent Document 2.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A robot according to this application example detects an arm having one end rotatably supported, a drive source for rotating the arm, a rotation angle of the drive source, and the drive. An angle sensor that outputs rotation angle information of the source, an inertia sensor that is attached to the arm, detects an angular velocity at which the arm rotates, and outputs angular velocity information of the arm, and a rotation operation of the arm A control command generation unit that outputs a control command that defines a control command, comprising a control switching determination unit and an arm operation control unit, wherein the control switching determination unit controls the drive source To determine whether to use the angular velocity information when controlling the movement of the arm, and when the control switching determination unit determines to use the angular velocity information, Previous The first control is performed based on the control command, the rotation angle information, and the angular velocity information to control the drive source to control the operation of the arm, and the control switching determination unit is configured to control the angular velocity information. If it is decided not to use the second control different from the first control based on the control command and the rotation angle information, the drive source is controlled and the second control is performed. The operation of the arm is controlled.

According to the robot according to this application example, the control switching determination unit determines whether to use the angular velocity information when controlling the operation of the arm, and the arm operation control unit follows the determination of the control switching determination unit. The first control is performed based on the control command, the rotation angle information, and the angular velocity information, or the second control is performed based on the control command and the rotation angle information. Thus, in order to carry out appropriate control, the angular velocity information is appropriately used when the effect by using the angular velocity information is large and when the effect is small, or when the error of the angular velocity information is relatively large and small. Controls that are used or not used can be selected and implemented. Further, it is possible to select and implement a control method that is effective using the angular velocity information.
The first control is a control method that can suppress vibration and the like by using a control command, rotation angle information, and angular velocity information, and is a control method called, for example, state feedback control. The second control is a control method that can stably reach the target position using the control command and the rotation angle information. For example, the PID based on the angle of the angle sensor and the angular velocity of the differential value thereof. (Proportional Integral Differential) control.

  Application Example 2 A robot according to this application example detects an arm whose one end is rotatably supported, a drive source for rotating the arm, and a rotation angle of the drive source, An angle sensor that outputs rotation angle information of the drive source, an inertia sensor that is attached to the arm, detects an angular velocity at which the arm rotates, and outputs angular velocity information of the arm, and a rotation of the arm A control command generation unit that outputs a control command that defines a dynamic motion, and includes a control switching determination unit and an arm operation control unit, wherein the control switching determination unit controls the drive source To determine a weighting constant of the angular velocity information when controlling the operation of the arm, and the arm operation control unit includes the control command, the rotation angle information, and the control switching determination unit. Depending on the angular velocity information obtained by multiplying the boss was the weighted constant, and controls the operation of the arm by controlling the drive source.

  According to the robot according to this application example, the control switching determination unit determines the weighting constant of the angular velocity information, and the arm operation control unit determines the control command, the rotation angle information, and the weighting constant determined by the control switching determination unit. The arm motion is controlled using the multiplied angular velocity information. This makes it possible to determine the weighting constant in a comprehensive manner by determining the weighting constant by comprehensively considering the effect of using the angular velocity information and the effect of the error in the angular velocity information when performing appropriate control. It is possible to control the operation of the arm so that the effect of the use is increased and the influence of the error of the angular velocity information is reduced.

  Application Example 3 The robot according to the application example previously sets a threshold value in the angular velocity information, and the control switching determination unit compares the angular velocity information with the threshold value to determine whether to use the angular velocity information. Alternatively, it is preferable to determine a weighting constant for the angular velocity information.

  According to this robot, the angular velocity information is compared with a threshold value, and whether to use the angular velocity information or a weighting constant of the angular velocity information is determined. By using the angular velocity information, it is possible to perform more suitable control than when not using it. However, when the angular velocity is reduced, the effect of using the angular velocity information is reduced, and the accuracy is lower than when only the angular information is used due to the influence of errors in the angular velocity information due to noise or the like. By comparing the angular velocity information with a threshold and determining whether or not to use the angular velocity information, or by determining the weighting constant of the angular velocity information, the effect of using the angular velocity information comprehensively increases and an error in angular velocity information is exerted. It is possible to control the operation of the arm with less influence.

  Application Example 4 The robot according to the application example previously sets a threshold value for the rotation angle information, and the control switching determination unit uses the angular velocity information by comparing the rotation angle information with the threshold value. It is preferable to determine whether or not or the weighting constant of the angular velocity information.

  According to this robot, the rotation angle information is compared with a threshold value, and whether to use the angular velocity information or the weighting constant of the angular velocity information is determined. By using the angular velocity information, it is possible to perform more suitable control than when not using it. However, in a state where the rotation angle becomes large and approaches the target angle, the angular velocity becomes small, and when the angular velocity becomes small, the effect of using the angular velocity information is reduced, and the influence of the angular velocity information error due to noise, etc. The accuracy is lower than when only angle information is used. By comparing the rotation angle information with a threshold and determining whether or not to use angular velocity information, or by determining the weighting constant of the angular velocity information, the effect of using the angular velocity information comprehensively increases, resulting in an error in angular velocity information. It is possible to control the operation of the arm so as to reduce the influence of.

  Application Example 5 The robot according to the application example previously sets a threshold value for one or more integral values of the angular velocity information, and the control switching determination unit sets the one or more integral values of the angular velocity information to the threshold values. It is preferable to determine whether to use the angular velocity information or to determine a weighting constant for the angular velocity information.

  According to this robot, one or more integral values of angular velocity information are compared with a threshold value, and whether to use angular velocity information or a weighting constant of angular velocity information is determined. By using the angular velocity information, it is possible to perform more suitable control than when not using it. However, when the angular velocity is reduced, the effect of using the angular velocity information is reduced, and the accuracy is lower than when only the angular information is used due to the influence of errors in the angular velocity information due to noise or the like. Comparing one or more integral values of angular velocity information with a threshold value and determining whether to use angular velocity information or determining a weighting constant for angular velocity information increases the effect of using angular velocity information comprehensively. The effect of the error of the angular velocity information is reduced, and the arm operation can be controlled. Comparing one or more integral values of angular velocity information with a threshold value can be the same criterion as when comparing angular velocity information with a threshold value. By handling one or more integral values of angular velocity information, the unit can be handled in common with the rotation angle information and the like.

  Application Example 6 The robot according to the application example previously sets a threshold value for one or more differential values of the rotation angle information, and the control switching determination unit performs one or more differentiations of the rotation angle information. It is preferable to compare the value with the threshold value to determine whether to use the angular velocity information or to determine a weighting constant for the angular velocity information.

  According to this robot, one or more differential values of the rotation angle information are compared with a threshold value, and whether to use the angular velocity information or a weighting constant of the angular velocity information is determined. By using the angular velocity information, it is possible to perform more suitable control than when not using it. However, in a state where the rotation angle becomes large and approaches the target angle, the angular velocity becomes small, and when the angular velocity becomes small, the effect of using the angular velocity information is reduced, and the influence of the angular velocity information error due to noise, etc. The accuracy is lower than when only angle information is used. By comparing one or more differential values of angle information with a threshold and determining whether or not to use angular velocity information, or by determining a weighting constant for angular velocity information, the effect of using angular velocity information comprehensively increases. The effect of the error of the angular velocity information is reduced, and the arm operation can be controlled. Comparing one or more differential values of the rotation angle information with the threshold value can be the same criterion as when comparing the rotation angle information with the threshold value. By handling one or more differential values of the rotation angle information, the unit can be handled in common with the angular velocity information and the like.

  Application Example 7 The robot according to the application example previously sets a threshold on the time axis based on the feature point of the control command, and the control switching determination unit uses the elapsed time from the feature point as the threshold value. In comparison, it is preferable to determine whether to use the angular velocity information or to determine a weighting constant for the angular velocity information.

According to this robot, the elapsed time from the feature point of the control command is compared with a threshold value, and whether or not the angular velocity information is used or the weighting constant of the angular velocity information is determined. By using the angular velocity information, it is possible to perform more suitable control than when not using it. However, as the angular velocity decreases, the effect of using the angular velocity information decreases and the influence of errors in angular velocity information due to noise or the like increases. By comparing the elapsed time from the feature point of the control command with a threshold and determining whether or not to use angular velocity information, or by determining a weighting constant for angular velocity information, the effect of using angular velocity information comprehensively increases. The effect of the error of the angular velocity information is reduced, and the arm operation can be controlled.
For example, when a certain time or more has elapsed from the feature point of the control command such as the target position of movement, the value of the angular velocity information becomes the value of the angular velocity at the feature point defined in the control command. By comparing the elapsed time from the feature point of the control command with the threshold value, it is possible to use the same judgment standard as when comparing the angular velocity information with the threshold value. By using the elapsed time as a reference, the control can be simplified as compared with the case where angular velocity information or the like is compared with a threshold value.

  Application Example 8 The robot according to the application example previously sets a threshold value for the noise that affects the angular velocity information, and the control switching determination unit compares the noise that affects the angular velocity information with the threshold value. It is preferable to determine whether to use the angular velocity information or a weighting constant of the angular velocity information.

  According to this robot, the noise affecting the angular velocity information is compared with a threshold value, and whether or not the angular velocity information is used or the weighting constant of the angular velocity information is determined. By using the angular velocity information, it is possible to perform more suitable control than when not using it. However, if the noise that affects the angular velocity information increases, the effect of the angular velocity information decreases because the influence of the error in the angular velocity information due to noise or the like increases. By comparing the noise that affects the angular velocity information with a threshold value and determining whether to use the angular velocity information, or by determining the weighting constant of the angular velocity information, the influence of the error in the angular velocity information is reduced. Control can be implemented.

  Application Example 9 A conveying apparatus according to this application example detects a moving unit supported slidably, a driving source for moving the moving unit, a driving amount by the driving source, and the driving source. A position sensor that outputs position information of the motor, an inertia sensor that is attached to the moving unit and outputs acceleration information of acceleration acting on the moving unit when the moving unit is moved, and movement of the moving unit A control command generation unit that outputs a control command that defines an operation, and includes a control switching determination unit and an operation control unit, wherein the control switching determination unit controls the drive source Thus, when controlling the moving operation of the moving unit, it is determined whether to use the acceleration information, and the operation control unit determines that the control switching determining unit determines to use the acceleration information. The control The first control is performed based on the command, the position information, and the acceleration information to control the driving source to control the moving operation of the moving unit, and the control switching determining unit determines the acceleration information. If it is decided not to use, the second control different from the first control is performed based on the control command and the position information, thereby controlling the drive source and It is characterized by controlling the moving operation.

According to the transport apparatus according to this application example, the control switching determination unit determines whether to use acceleration information when controlling the moving operation of the moving unit, and the operation control unit determines the control switching determination unit. Accordingly, the first control is performed based on the control command, the position information, and the acceleration information, or the second control is performed based on the control command and the position information. Thus, in order to carry out appropriate control, the acceleration information is appropriately used when the effect by using the acceleration information is large and when the effect is small, or when the error of the acceleration information is relatively large and small. Controls that are used or not used can be selected and implemented. Further, it is possible to select and implement a control method that is effective to use acceleration information.
The first control is a control method that can suppress vibration and the like by using the control command, position information, and acceleration information, and is a control method called state feedback control, for example. The second control is a control method capable of stably reaching a target position using a control command and position information, for example, PID control based on an angle of an angle sensor or an angular velocity of a differential value thereof. It is.

  Application Example 10 A transport apparatus according to this application example detects a moving unit supported slidably, a driving source for moving the moving unit, a driving amount by the driving source, and the driving source. A position sensor that outputs position information of the motor, an inertia sensor that is attached to the moving unit and outputs acceleration information of acceleration acting on the moving unit when the moving unit is moved, and movement of the moving unit A control command generation unit that outputs a control command that defines an operation, and includes a control switching determination unit and an operation control unit, wherein the control switching determination unit controls the drive source Thus, a weighting constant of the acceleration information when controlling the moving operation of the moving unit is determined, and the operation control unit is configured to determine the weighting constant determined by the control command, the position information, and the control switching determination unit. Depending on the said acceleration information multiplied by, and controls the movement of the moving part by controlling the driving source.

  According to the transport apparatus according to this application example, the control switching determination unit determines the weighting constant of the acceleration information, and the operation control unit multiplies the control command, the position information, and the weighting constant determined by the control switching determination unit. The moving operation of the moving unit is controlled using the acceleration information. Thus, the acceleration information is comprehensively determined by determining the weighting constant in consideration of the effect of using the acceleration information and the influence of the error of the acceleration information in comprehensively for performing appropriate control. It is possible to control the movement operation of the moving unit, in which the effect of the use is increased and the influence of the error of the acceleration information is reduced.

  Application Example 11 The transport apparatus according to the application example described above sets a threshold value in advance in the acceleration information, and whether or not the control switching determination unit uses the acceleration information by comparing the acceleration information with the threshold value. Or a weighting constant of the acceleration information is preferably determined.

  According to this transport apparatus, the acceleration information is compared with a threshold value, and whether to use the acceleration information or the weighting constant of the acceleration information is determined. By using acceleration information, it is possible to carry out more suitable control than when it is not used, but when the acceleration is reduced, the effect of using the acceleration information is reduced and the influence of the error of the acceleration information due to noise or the like is reduced. The accuracy is lower than when only the position information is used. By comparing the acceleration information with a threshold value and determining whether to use the acceleration information, or by determining the weighting constant of the acceleration information, the effect of using the acceleration information comprehensively increases, resulting in an error in the acceleration information. It is possible to control the movement operation of the moving unit with less influence.

  Application Example 12 In the transfer device according to the application example described above, whether a threshold value is set in advance in the position information, and whether the control switching determination unit uses the acceleration information by comparing the position information with the threshold value. Or a weighting constant of the acceleration information is preferably determined.

  According to this transport device, position information is compared with a threshold value, and whether to use acceleration information or a weighting constant for acceleration information is determined. By using the acceleration information, it is possible to perform more suitable control than when not using it. However, in a state where the movement amount is larger than a certain amount and the movement is performed at a position where the movement is performed at a constant speed, or in a state where the movement speed is reduced due to approaching the target position, the acceleration is reduced. When the acceleration is reduced, the effect of using the acceleration information is reduced, and the accuracy is lower than when only the position information is used due to the influence of an error in the acceleration information due to noise or the like. By comparing the position information with a threshold value and determining whether or not to use acceleration information, or by determining a weighting constant for acceleration information, the effect of using the acceleration information comprehensively increases, resulting in an error in acceleration information. It is possible to control the movement operation of the moving unit with less influence.

  [Application Example 13] In the transfer device according to the application example, a threshold value is set in advance for one or more integral values of the acceleration information, and the control switching determination unit sets the one or more integral values of the acceleration information. It is preferable to determine whether to use the acceleration information or to determine a weighting constant for the acceleration information in comparison with a threshold value.

  According to this transport apparatus, one or more integral values of acceleration information are compared with a threshold value, and whether to use acceleration information or a weighting constant for acceleration information is determined. By using acceleration information, it is possible to carry out more suitable control than when it is not used, but when the acceleration is reduced, the effect of using the acceleration information is reduced and the influence of the error of the acceleration information due to noise or the like is reduced. The accuracy is lower than when only the receiving position information is used. Comparing one or more integral values of acceleration information with a threshold value and determining whether or not to use acceleration information or determining a weighting constant for acceleration information increases the effect of using acceleration information comprehensively. Therefore, it is possible to control the movement operation of the moving unit, which is less affected by the error in the acceleration information. Comparing one or more integral values of acceleration information with a threshold value can be the same criterion as when comparing acceleration information with a threshold value. By handling one or more integral values of acceleration information, the unit can be handled in common with position information and the like.

  [Application Example 14] In the transfer device according to the application example, a threshold value is set in advance for one or more differential values of the position information, and the control switching determination unit sets the one or more differential values of the position information. It is preferable to determine whether to use the acceleration information or to determine a weighting constant for the acceleration information in comparison with a threshold value.

  According to this transport apparatus, one or more differential values of position information are compared with a threshold value, and whether or not to use acceleration information or a weighting constant for acceleration information is determined. By using the acceleration information, it is possible to perform more suitable control than when not using it. However, in a state where the moving amount is larger than a certain amount and moving at a position where it moves at a constant speed, or in a state where the moving speed decreases as it approaches the target position, the acceleration decreases, and the acceleration decreases. The effect of using acceleration information is reduced, and the accuracy is lower than when only position information is used due to the influence of errors in acceleration information due to noise or the like. Comparing one or more differential values of position information with a threshold value and determining whether to use acceleration information or determining a weighting constant for acceleration information will increase the effect of using acceleration information comprehensively. Therefore, it is possible to control the movement operation of the moving unit, which is less affected by the error in the acceleration information. Comparing one or more differential values of position information with a threshold value can be the same criterion as when comparing position information with a threshold value. By handling one or more differential values of the position information, the unit can be easily handled in common with the acceleration information.

  [Application Example 15] The transport apparatus according to the application example previously sets a threshold on the time axis based on the feature point of the control command, and the control switching determination unit sets the elapsed time from the feature point to the threshold value. It is preferable to determine whether to use the acceleration information or a weighting constant of the acceleration information.

According to this transport device, the elapsed time from the feature point of the control command is compared with a threshold value, and whether to use acceleration information or a weighting constant of acceleration information is determined. By using acceleration information, it is possible to carry out more suitable control than when it is not used, but when the acceleration is reduced, the effect of using the acceleration information is reduced and the influence of the error of the acceleration information due to noise or the like is reduced. The accuracy is lower than when only the receiving position information is used. Comparing the elapsed time from the feature point of the control command with a threshold value and determining whether to use acceleration information or determining a weighting constant for acceleration information, the effect of using acceleration information comprehensively increases. Therefore, it is possible to control the movement operation of the moving unit, which is less affected by the error in the acceleration information.
For example, when a certain time or more has elapsed from the feature point of the control command such as the target position to move, the value of the acceleration information becomes the value of the acceleration at the feature point defined in the control command. By comparing the elapsed time from the feature point of the control command with the threshold value, it is possible to use the same determination criterion as when the acceleration information is compared with the threshold value. By using the elapsed time as a reference, the control can be simplified as compared with a case where acceleration information or the like is compared with a threshold value.

  [Application Example 16] In the transfer device according to the application example, a threshold value is set in advance for noise that affects the acceleration information, and the control switching determination unit compares the noise that affects the acceleration information with the threshold value. It is preferable to determine whether to use the acceleration information or to determine a weighting constant for the acceleration information.

  According to this transport device, the noise that affects the acceleration information is compared with a threshold value, and whether to use the acceleration information or the weighting constant of the acceleration information is determined. By using the acceleration information, it is possible to perform more suitable control than when not using it, but if the noise that affects the acceleration information increases, the influence of the error of the acceleration information due to the noise increases, The effect of using acceleration information is reduced. Noise that affects acceleration information is compared with a threshold value to determine whether or not to use acceleration information or to determine the weighting constant of acceleration information, thereby reducing the effect of acceleration information errors. Operation control can be implemented.

  [Application Example 17] A control method using an inertial sensor according to this application example includes a moving source supported to be rotatable or slidable, a drive source for rotating or sliding the moving part, A control method using an inertial sensor for controlling using an output of an inertial sensor disposed in a moving unit, wherein a control command generating step for outputting a control command for defining a moving operation of the moving unit, and the drive source A position information detecting step of detecting position information of the motor, an inertial force information detecting step of detecting inertial force information acting on the moving unit when the moving unit is moved by the inertial sensor, and controlling the driving source. Thus, when controlling the moving operation of the moving unit, it is determined to use the inertial force information in the control switching determination step for determining whether to use the inertial force information and the control switching determination step. In such a case, by performing the first control based on the position information and the inertial force information, the drive source is controlled according to the control command to control the movement operation of the moving unit, and the control switching In the determination step, when it is determined not to use the inertial force information, the second control different from the first control is performed based on the position information, and the drive is performed according to the control command. And a drive control step of controlling a moving operation of the moving unit by controlling a source.

According to the control method using the inertial sensor according to this application example, when controlling the movement operation of the moving unit in the control switching determination step, it is determined whether to use the inertia force information, and in the drive control step, According to the determination in the control switching determination step, the first control is performed based on the control command, position information, and inertial force information, or the second control is performed based on the control command and position information. Thereby, in order to perform appropriate control, inertial force information is used when the effect of using inertial force information is large and when the effect is small, or when the error of inertial force information is relatively large and small. Controls that use or do not use information appropriately can be selected and implemented. Further, it is possible to select and implement a control method in which it is effective to use inertial force information.
The first control is a control method that can suppress vibration and the like by using control commands, position information, and inertial force information, and is a control method called, for example, state feedback control. The second control is a control method capable of stably reaching a target position using a control command and position information, for example, PID control based on an angle of an angle sensor or an angular velocity of a differential value thereof. It is.

  Application Example 18 In the control method using the inertial sensor according to this application example, the moving unit supported to be rotatable or slidable is provided with a drive source for rotating or sliding the moving unit. A control method using an inertial sensor for controlling using an output of an inertial sensor disposed in a moving unit, wherein a control command generating step for outputting a control command for defining a moving operation of the moving unit, and the drive source By detecting the driving amount by the position information detecting step for detecting the position information of the driving source and the inertial sensor detects the inertial force information acting on the moving unit when the moving unit is moved by the inertial sensor. An inertial force information detecting step; and a constant determining step for determining a weighting constant of the inertial force information when controlling the moving operation of the moving unit by controlling the drive source using the inertial force information; The moving operation of the moving unit is controlled by controlling the drive source using the control command, the position information, and the inertial force information multiplied by the weighting constant determined in the constant determining step. And a drive control step.

  According to the control method using the inertial sensor according to this application example, the weighting constant of the inertia force information is determined in the constant determination step, and the control command, the position information, and the control switching determination unit are determined in the drive control step. The moving operation of the moving unit is controlled using the inertial force information multiplied by the weighting constant. As a result, when appropriate control is performed, the weighting constant is determined by comprehensively considering the effect of using inertial force information and the effect of errors in the inertial force information. The effect of using the force information is increased, and the influence of the error of the inertial force information is reduced, and the moving operation of the moving unit can be controlled.

  Application Example 19 In the control method using the inertial sensor according to the application example, the control switching determination step or the constant determination step compares the inertial force information with a threshold value set in advance for the inertial force information. Then, it is preferable to be a step of determining whether to use the inertial force information or a step of determining a weighting constant of the inertial force information.

  According to the control method using the inertial sensor, in the control switching determination step or the constant determination step, the inertial force information is compared with a threshold value to determine whether to use the inertial force information or the weighting constant of the inertial force information is It is determined. By using inertial force information, it is possible to perform more suitable control than when it is not used.However, as inertial force decreases, the effect of using inertial force information decreases and inertial force information due to noise or the like is reduced. Under the influence of errors, the accuracy is lower than when only position information is used. By comparing the inertial force information with the threshold value and determining whether to use the inertial force information, or by determining the weighting constant of the inertial force information, the effect of using the inertial force information is increased, and the inertial force It is possible to control the movement operation of the moving unit, which is less affected by information errors.

  Application Example 20 In the control method using the inertial sensor according to the application example, the control switching determination step or the constant determination step compares the position information with a threshold value set in advance for the position information. Preferably, it is a step of determining whether to use the inertial force information or a step of determining a weighting constant of the inertial force information.

  According to the control method using the inertial sensor, the position information is compared with the threshold value in the control switching determination step or the constant determination step, and whether to use the inertia force information or the weighting constant of the inertia force information is determined. Is done. By using the inertial force information, more suitable control can be performed as compared with the case where it is not used. However, in a state where the moving amount is larger than a certain amount and moving at a position where it moves at a constant speed, or in a state where the moving speed decreases as it approaches the target position, the inertial force becomes small and the inertial force is reduced. When it becomes smaller, the effect of using the inertial force information is reduced, and the accuracy is lower than when only the position information is used due to the influence of an error of the inertial force information due to noise or the like. By comparing the position information with the threshold and determining whether to use inertial force information, or by determining the weighting constant of the inertial force information, the effect of using the inertial force information is increased, and the inertial force information It is possible to control the movement operation of the moving unit so that the influence of the error is small.

  [Application Example 21] In the control method using the inertial sensor according to the application example described above, the control switching determination step or the constant determination step is configured to calculate one or more integral values of the inertial force information with respect to the inertial force information. It is preferable that the step is a step of determining whether to use the inertial force information by comparing with a preset threshold value for one or more integral values, or a step of determining a weighting constant of the inertial force information.

  According to the control method using the inertial sensor, in the control switching determination step or the constant determination step, whether or not the inertial force information is used by comparing one or more integral values of the inertial force information with a threshold value, or A weighting constant for inertial force information is determined. By using inertial force information, it is possible to perform more suitable control than when it is not used.However, as inertial force decreases, the effect of using inertial force information decreases and inertial force information due to noise or the like is reduced. The accuracy is lower than when only position information is used due to the influence of errors. By using inertial force information comprehensively by comparing one or more integral values of inertial force information with a threshold and determining whether to use inertial force information, or by determining a weighting constant for inertial force information It is possible to control the moving operation of the moving unit, which increases the effect and reduces the influence of the error of the inertial force information. Comparing one or more integral values of inertial force information with a threshold value can be the same criterion as when comparing inertial force information with a threshold value. By handling one or more integral values of the inertial force information, the unit can be easily handled in common with the position information and the like.

  [Application Example 22] In the control method using the inertial sensor according to the application example described above, the control switching determination step or the constant determination step may calculate one or more differential values of the position information once. The differential value is preferably compared with a threshold value set in advance to determine whether to use the inertial force information or to determine a weighting constant for the inertial force information.

  According to the control method using the inertial sensor, in the control switching determination step or the constant determination step, whether or not the inertial force information is used by comparing one or more differential values of the position information with a threshold value, or inertial A weighting constant for force information is determined. By using the inertial force information, more suitable control can be performed as compared with the case where it is not used. However, in a state where the moving amount is larger than a certain amount and moving at a position where it moves at a constant speed, or in a state where the moving speed decreases as it approaches the target position, the inertial force becomes small and the inertial force is reduced. If it becomes smaller, the effect of using the inertial force information is reduced, and the accuracy is lower than when only the position information is used due to the influence of the error of the inertial force information due to noise or the like. Effects of using inertial force information comprehensively by comparing whether or not inertial force information is used by comparing one or more differential values of position information with a threshold, or by determining a weighting constant for inertial force information. And the influence of the error of the inertial force information is reduced, and the movement operation of the moving unit can be controlled. Comparing one or more differential values of position information with a threshold value can be the same criterion as when comparing position information with a threshold value. By handling one or more differential values of position information, the unit can be easily handled in common with inertial force information and the like.

  [Application Example 23] In the control method using the inertial sensor according to the application example, the control switching determination step or the constant determination step is configured so that an elapsed time from a feature point of the control command is set in advance. It is preferable that it is a step of determining whether or not to use the inertial force information, or a step of determining a weighting constant of the inertial force information by comparing with a threshold value on a time axis based on the feature point of the command.

According to the control method using the inertial sensor, in the control switching determination step or the constant determination step, whether the inertial force information is used by comparing the elapsed time from the feature point of the control command with a threshold value, or inertial A weighting constant for force information is determined. By using inertial force information, it is possible to perform more suitable control than when it is not used.However, as inertial force decreases, the effect of using inertial force information decreases and inertial force information due to noise or the like is reduced. The accuracy is lower than when only position information is used due to the influence of errors. Effects of using inertial force information comprehensively by comparing the elapsed time from the feature point of the control command with a threshold value and determining whether to use inertial force information or by determining the weighting constant of inertial force information And the influence of the error of the inertial force information is reduced, and the movement operation of the moving unit can be controlled.
For example, when a certain time or more has elapsed from the feature point of the control command such as the target position to move, the value of the inertia force information becomes the value of the inertia force at the feature point defined in the control command. By comparing the elapsed time from the feature point of the control command with the threshold value, it is possible to use the same determination criterion as when the inertial force information is compared with the threshold value. By using the elapsed time as a reference, the control can be simplified as compared with the case where inertia force information or the like is compared with a threshold value.

  [Application Example 24] In the control method using the inertial sensor according to the application example described above, the control switching determination step or the constant determination step determines noise that affects the inertial force information as the noise that has been set in advance. It is preferable that it is a step of determining whether or not to use the inertial force information as compared with a threshold value, or a step of determining a weighting constant of the inertial force information.

  According to the control method using the inertial sensor, in the control switching determination step or the constant determination step, noise that affects the inertial force information is compared with a threshold value to determine whether the inertial force information is used or whether the inertial force information is used. A weighting constant for the information is determined. By using inertial force information, it is possible to perform more suitable control than when it is not used, but if the noise that affects the inertial force information becomes large, the influence of the inertial force information error due to noise or the like becomes large. Therefore, the effect of using inertial force information is reduced. By comparing the noise that affects the inertial force information with a threshold and determining whether to use the inertial force information, or by determining the weighting constant of the inertial force information, the effect of the inertial force information error is reduced, It is possible to control the movement operation of the moving unit.

The external appearance perspective view which shows schematic structure of a feeding / dispensing material apparatus. The functional structure block diagram which shows the functional structure which drives a robot mechanism. The flowchart which shows the process of rotating a feeding / dispensing material arm by controlling the drive of an arm drive motor. (A) is explanatory drawing which shows the example of the threshold value of the relationship between time progress and angular velocity during rotating a feeding / dispensing material arm, and angular velocity. (B) is explanatory drawing which shows the example of the threshold value of the relationship between time progress and angular velocity before stopping, and the angular velocity threshold. The functional structure block diagram which shows the functional structure which drives a robot mechanism. The flowchart which shows the process of rotating a feeding / dispensing material arm by controlling the drive of an arm drive motor. (A) is explanatory drawing which shows the example of the threshold value of the relationship between time progress and angular velocity during rotating a feeding / dispensing material arm, and angular velocity. (B) is explanatory drawing which shows the example of angular velocity information. (A) is explanatory drawing which shows the example of the threshold value of the relationship between the passage of time during rotation of the feeding / dispensing material arm and the rotation angle. (B) is explanatory drawing which shows the example of the relationship between the time passage and angle just before a material supply arm stops, and the threshold value of an angle. (A) is an explanation showing an example of a threshold value defined on the time axis with respect to a target stop position, which is a feature point of a control command value, and a relationship between time lapse and angular velocity during rotation of the supply / discharge material arm Figure. (B) shows the relationship between the time lapse near the target stop position, which is a feature point of the control command value, and the angular velocity, and the threshold value defined on the time axis with respect to the target stop position, which is a feature point of the control command value. Explanatory drawing which shows an example. The external appearance perspective view which shows schematic structure of a feeding / dispensing material apparatus. The external appearance perspective view which shows schematic structure of a conveying apparatus. Explanatory drawing which shows schematic structure of the principal part of a laser printer.

  Hereinafter, an embodiment of a control method using a robot, a transfer device, and an inertial sensor will be described with reference to the drawings. In the drawings referred to in the following description, the vertical and horizontal scales of members or parts and the scales of each part may be shown differently from actual ones in order to display the constituent members in an easy-to-understand manner.

(First embodiment)
A first embodiment which is an embodiment of a control method using a robot, a transfer device, and an inertial sensor will be described. The present embodiment will be described with reference to an example of a feeding / dispensing device that is an example of a transport device. The supply / discharge material apparatus according to the present embodiment is, for example, a supply / discharge material apparatus that handles a wafer in which a plurality of semiconductor chips constituting a semiconductor device are partitioned in a semiconductor device manufacturing process.

<Feeding material equipment>
First, the mechanical configuration of the supply / discharge material apparatus 10 will be described with reference to FIG. FIG. 1 is an external perspective view showing a schematic configuration of the supply / discharge material apparatus.
As shown in FIG. 1, the supply / discharge material apparatus 10 includes a holding hand 12, a robot mechanism 20, a supply / discharge material apparatus control unit 30, an angular velocity sensor 32, and an angle sensor 34 (see FIG. 2). ing.

The robot mechanism 20 includes a hand holding mechanism 24, a supply / discharge material arm 21, an arm shaft portion 26, and a machine base 28. The machine base 28 supports the arm shaft portion 26 so as to be rotatable around the rotation axis of the arm shaft portion 26 and precisely positioned and fixed via a built-in bearing mechanism (not shown). The arm shaft portion 26 is connected to an arm drive motor 22 (see FIG. 2) built in the machine base 28 via an arm drive mechanism 23 (see FIG. 2), and is rotated by the arm drive motor 22. . An angle sensor 34 is connected to the arm drive motor 22, and the rotation angle of the arm drive motor 22 is measured by the angle sensor 34.
One end of the supply / discharge material arm 21 is fixed to the end of the arm shaft portion 26 opposite to the side supported by the machine base 28. The feed / release material arm 21 is rotated about the rotation axis of the arm shaft portion 26 by the arm drive motor 22. The rotation angle of the supply / discharge material arm 21 is approximately measured by measuring the rotation angle of the arm drive motor 22 by the angle sensor 34.

A hand holding mechanism 24 is fixed to the opposite end of the supply / discharge material arm 21 fixed to the arm shaft portion 26. The hand holding mechanism 24 includes a holding bearing 24a fixed to the supply / discharge material arm 21, and a holding mechanism shaft 24b supported by the holding bearing 24a so as to be slidable and capable of being precisely positioned and fixed. The holding mechanism shaft 24b can be slid in the axial direction of the holding mechanism shaft 24b with respect to the holding bearing 24a by a vertical drive source (not shown). The axial direction of the holding mechanism shaft 24 b is substantially parallel to the axial direction of the arm shaft portion 26.
The holding hand 12 is attached to the free end of the holding mechanism shaft 24b. By rotating the feeding / dispensing material arm 21, the holding hand 12 is positioned at a position facing the conveyance object. By sliding the holding mechanism shaft 24b with respect to the holding bearing 24a, the holding hand 12 is brought into and out of contact with the object to be conveyed, and the object to be conveyed held by the holding hand 12 is lifted from the placement place or placed. Or approach the place.
An angular velocity sensor 32 is fixed to the hand holding mechanism 24 to which the holding hand 12 is attached on the side opposite to the holding hand 12. That is, the angular velocity sensor 32 is fixed to the distal end of the supply / discharge material arm 21 and can measure the angular velocity at which the supply / discharge material arm 21 is rotated.
The material supply / control device controller 30 performs overall control of the operation of each part of the material supply / discharge material device 10 based on a control program input in advance via an information input / output device (not shown).

<Functional configuration of robot mechanism drive>
Next, a functional configuration for driving the robot mechanism 20 will be described with reference to FIG. FIG. 2 is a functional configuration block diagram showing a functional configuration for driving the robot mechanism.
As described above, in order to rotate the feed / release material arm 21, the feed / release material device 10 includes an arm drive motor 22, an arm drive mechanism 23, an angular velocity sensor 32, an angle sensor 34, and a feed / release material device. And a control unit 30.
As the angular velocity sensor 32, for example, a gyro sensor can be used. For example, an encoder can be used as the angle sensor 34. The feed / release material arm 21 corresponds to an arm, the robot mechanism 20 corresponds to a robot, the arm drive motor 22 corresponds to a drive source, and the angular velocity sensor 32 corresponds to an inertial sensor.

As shown in FIG. 2, the material supply / control device control unit 30 includes a robot control unit 31 for controlling the arm drive motor 22. The robot control unit 31 includes a control command generation unit 36, a control switching determination unit 37, an arm operation control unit 38, and a motor driver 39.
The control command generation unit 36 outputs an operation command for the supply / removal material arm 21 for executing an operation command for the robot mechanism 20 based on an operation command for material supply or material removal. The operation command is input to the material supply / discharge material device 10 from an input device (not shown). An operation command of the robot mechanism 20 based on the operation command is output from the overall control unit (not shown) included in the supply / discharge material apparatus control unit 30 to the control command generation unit 36. For example, the operation command of the supply / discharge material arm 21 output by the control command generation unit 36 is instructed as a trajectory at the tip of the supply / discharge material arm 21 as an angle of the supply / discharge material arm 21 for each time.

  The arm operation control unit 38 outputs a control signal of the arm drive motor 22 for executing the operation command of the supply / discharge material arm 21 output by the control command generating unit 36. The arm operation control unit 38 includes an angle information use control unit 38a and an angle information and angular velocity information use control unit 38b. The angle information use control unit 38a generates and outputs an optimal control signal for the arm drive motor 22 for executing the operation command for the material supply / discharge material arm 21 based on the angle information from the angle sensor 34. The angle information and angular velocity information use control unit 38b outputs an optimal control signal for the arm drive motor 22 to execute an operation command for the supply / discharge material arm 21, angle information from the angle sensor 34, and angular velocity from the angular velocity sensor 32. Generate and output based on information. Switching between the angle information use control unit 38 a and the angle information and angular velocity information use control unit 38 b is determined by the control switch determination unit 37. The angle information use control unit 38a and the angle information / angular velocity information use control unit 38b may each be provided with dedicated hardware, or the single hardware may be provided with the angle information use control unit 38a or the angle information by a control program. Also, it may function as the angular velocity information use control unit 38b. The angle information use control unit 38a and the angle information and angular velocity information use control unit 38b included in the arm operation control unit 38 or the arm operation control unit 38 correspond to the arm operation control unit.

  The control switching determination unit 37 selects and determines to use the angle information use control unit 38a or the angle information and angular velocity information use control unit 38b. The control switching determination unit 37 is based on the angle information from the angle sensor 34, the angular velocity information from the angular velocity sensor 32, or the operation command of the supply / discharge material arm 21 from the control command generation unit 36, etc. Alternatively, the use of the angle information and angular velocity information use control unit 38b is selected and determined.

<Rotation of feeding / discharging material arm 21>
Next, the step of rotating the supply / discharge material arm 21 by controlling the drive of the arm drive motor 22 to position the holding hand 12 disposed at the tip of the supply / discharge material arm 21 at a predetermined position. This will be described with reference to FIGS. FIG. 3 is a flowchart showing a process of rotating the supply / discharge material arm by controlling the drive of the arm drive motor. FIG. 4 is an explanatory diagram illustrating an example of an angular velocity threshold value used as a reference for switching control. FIG. 4A is an explanatory diagram showing an example of the relationship between the passage of time and the angular velocity during rotation of the feed / release material arm and the threshold value of the angular velocity, and FIG. 4B shows that the feed / release material arm stops. It is explanatory drawing which shows the example of the relationship between time progress just before and angular velocity, and the threshold value of angular velocity.

First, in step S21 of FIG. 3, it is determined whether or not there is a “motor stop command”. The motor stop command is a command for stopping the arm drive motor 22 and terminating the control.
When there is a motor stop command (YES in step S21), the supply / discharge material arm 21 is rotated by controlling the drive of the arm drive motor 22 to be held at the tip of the supply / discharge material arm 21. The step of positioning the hand 12 at a predetermined position is completed.
If there is no motor stop command (NO in step S21), the process proceeds to step S22.

  Next, in step S22, a control command value, angle information, and angular velocity information are acquired. Specifically, the control command value output from the control command generation unit 36 and input to the arm operation control unit 38 is input to the control switching determination unit 37. The angle information of the rotation angle of the supply / discharge material arm 21 obtained from the rotation angle of the arm drive motor 22 measured by the angle sensor 34 connected to the arm drive motor 22 is the control switching determination unit 37 and the arm operation control unit. 38. Angular velocity information of the angular velocity of the feeding / discharging material arm 21 measured by the angular velocity sensor 32 fixed near the tip of the feeding / discharging material arm 21 is input to the control switching determination unit 37 and the arm operation control unit 38.

  Next, in step S <b> 23, the control switching determination unit 37 determines whether or not the angular velocity of the supply / discharge material arm 21 exceeds a predetermined threshold from the angular velocity information output from the angular velocity sensor 32. The predetermined threshold is denoted as threshold S.

When the angular velocity of the material supply / release material arm 21 exceeds the predetermined threshold S (YES in step S23), the control switching determination unit 37 determines to use the angle information and angular velocity information use control unit 38b, and step S24 is performed. Proceed to
In step S24, the angle information and angular velocity information use control unit 38b calculates a torque command value from the control command value, the angle information, and the angular velocity information.

If the angular velocity of the feed / release material arm 21 is smaller than the predetermined threshold S (NO in step S23), the control switching determination unit 37 determines to use the angle information use control unit 38a, and proceeds to step S25.
In step S25, the angle information use control unit 38a calculates a torque command value from the control command value and the angle information.

As shown in FIG. 4 (a), the angular velocity information is obtained at the stage where the feeding / dispensing material arm 21 starts rotating and the angular velocity is equal to or less than the threshold value S and when the angular velocity approaches the target position and becomes smaller than the threshold value S. Control using the control command value and the angle information is performed without using it. The control uses, for example, PID (Proportional Integral Differential) control based on the angle of the angle sensor and the angular velocity of its differential value. The PID control in this case corresponds to the second control.
At a stage where the angular velocity is greater than the threshold value S in the middle of the rotation operation, control using the angular velocity information, the control command value, and the angle information is performed. For the control, for example, a control method called so-called state feedback control is used. The state feedback control in this case corresponds to the first control.
The angular velocity indicated by a two-dot chain line in FIG. 4 is an angular velocity designated for each elapsed time as a control command value. The angular velocities indicated by the broken lines in FIG. 4 are examples of angular velocities for each elapsed time when PID control is performed based on the angle of the angle sensor using the control command value and angle information and the angular velocity of the differential value. The angular velocity shown by the solid line in FIG. 4 is an example of the angular velocity for each elapsed time when the state feedback control or the like is performed using the control command value, the angular velocity information, and the angle information.
In FIG. 4, state feedback control or the like is performed in order to clearly indicate a broken line indicating the angular velocity when the PID control is performed and a solid line indicating the angular velocity when the state feedback control is performed. In this case, the solid line indicating the angular velocity is shifted toward the slower time.

  After step S24 or step S25, in step S26, the torque command value calculated by the angle information use control unit 38a or the angle information and angular velocity information use control unit 38b is input to the motor driver 39.

Next, in step S <b> 27, electric power corresponding to the torque command value is supplied to the arm drive motor 22 by the motor driver 39. The arm drive motor 22 generates a torque corresponding to the supplied power.
Next, in step S28, the arm drive mechanism 23 connected to the arm drive motor 22 is actuated by the torque generated by the arm drive motor 22, and the feed connected to the arm drive motor 22 via the arm drive mechanism 23 is performed. The angular speed of the material removal arm 21 is accelerated or decelerated by the torque generated by the arm drive motor 22.

  After step S28, the process returns to step S21, and if there is a motor stop command in step S21 (YES in step S21), the feed / release material arm 21 is rotated by controlling the drive of the arm drive motor 22. The process of positioning the holding hand 12 disposed at the tip of the supply / discharge material arm 21 at a predetermined position is completed.

As shown in FIG. 4B, when the control using the control command value and the angle information is performed, the feeding / discharging material arm 21 is rotated so as to return the holding hand 12 that has passed the target position. There is a possibility of residual vibration due to. Due to the occurrence of the residual vibration, a time is required until the residual vibration is settled until the supply / discharge material arm 21 substantially reaches the target position and then stops.
When the control using the control command value, the angular velocity information, and the angle information is performed, vibration hardly occurs. Therefore, it takes almost time to stop after the supply / discharge material arm 21 almost reaches the target position. I don't need it. When noise is included in the angular velocity information, vibration is generated by the noise, and accuracy is deteriorated. By making the threshold of the angular velocity for switching control larger than the angular velocity of vibration due to noise, the influence of noise can be eliminated. Even if the control is switched to the control using the control command value and the angle information, it is possible to suppress the occurrence of large vibration compared to the case of using the angular velocity information including noise.
Also, by setting the threshold of angular velocity for switching control to be smaller than the maximum angular velocity of residual vibration when control using the control command value and angle information is performed, the control command value and angular velocity information are obtained before the time of switching control. And it can suppress that a vibration arises by implementing control using angle information. For this reason, the maximum angular velocity of the residual vibration is reduced compared to the case where control using the control command value and angle information is performed without performing control using the control command value, angular velocity information, and angle information. The time until the residual vibration is settled can be reduced.

(Second embodiment)
Next, a second embodiment, which is an embodiment of a control method using a robot, a transfer device, and an inertial sensor, will be described. The feed / dispensing material device 210, which is an example of the transport device in the present embodiment, has a mechanical configuration substantially similar to that of the feed / control material device 10 described with reference to FIG. 1 in the first embodiment. . A functional configuration of a robot mechanism drive that is partially different from the supply / discharge material apparatus 10 and a process of rotating the supply / discharge material arm 21 will be described.

<Functional configuration of robot mechanism drive>
First, a functional configuration for driving the robot mechanism 20 in the supply / discharge material apparatus 210 of the present embodiment will be described with reference to FIG. FIG. 5 is a functional configuration block diagram showing a functional configuration for driving the robot mechanism.
As with the material supply / discharge material device 10, the material supply / discharge material device 210 includes an arm drive motor 22, an arm drive mechanism 23, an angular velocity sensor 32, an angle sensor 34, And a material supply / control device controller 230.

As shown in FIG. 5, the supply / discharge material apparatus control unit 230 includes a robot control unit 231 for controlling the arm drive motor 22. The robot control unit 231 includes a control command generation unit 36, a control switching determination unit 237, an arm operation control unit 238, a gain adjustment unit 235, and a motor driver 39.
The control command generation unit 36 outputs an operation command for the supply / removal material arm 21 for executing an operation command for the robot mechanism 20 based on an operation command for material supply or material removal. The operation command is input to the feed / dispensing material device 210 from an input device (not shown). An operation command of the robot mechanism 20 based on the operation command is output from the overall control unit (not shown) included in the material supply / discharge material device control unit 230 to the control command generation unit 36. For example, the operation command of the supply / discharge material arm 21 output by the control command generation unit 36 is instructed as a trajectory at the tip of the supply / discharge material arm 21 as an angle of the supply / discharge material arm 21 for each time.

The arm operation control unit 238 outputs a control signal of the arm drive motor 22 for executing the operation command of the supply / discharge material arm 21 output by the control command generation unit 36. The arm operation control unit 238 includes angle information and angular velocity information use control unit 238b. The angle information and angular velocity information use control unit 238 b receives an optimal control signal for the arm drive motor 22 for executing an operation command for the material supply / discharge material arm 21, angle information from the angle sensor 34, and angular velocity from the angular velocity sensor 32. Generate and output based on information. The gain adjusting unit 235 adjusts and outputs the gain of the angular velocity information when the angle information and angular velocity information use control unit 238b generates a control signal for the arm drive motor 22 based on the angular information and the angular velocity information. Switching of the gain of the angular velocity information is determined by the control switching determination unit 237. In this case, the gain adjustment unit 235 and the control switching determination unit 237 correspond to the control switching determination unit.
The gain of the angular velocity information corresponds to the weighting constant of the inertia force information. The angle information and angular velocity information use control unit 238b included in the arm operation control unit 238 or the arm operation control unit 238 corresponds to the arm operation control unit.

  The control switching determination unit 237 switches the gain of the angular velocity information based on the angle information from the angle sensor 34, the angular velocity information from the angular velocity sensor 32, or the operation command of the feed / release material arm 21 from the control command generator 36. To decide.

<Rotation of feeding / discharging material arm 21>
Next, in the supply / discharge material device 210, the supply / discharge material arm 21 is rotated by controlling the drive of the arm drive motor 22, and the holding hand 12 disposed at the tip of the supply / discharge material arm 21 is moved to a predetermined position. The step of positioning at a position will be described with reference to FIG. FIG. 6 is a flowchart showing a step of rotating the supply / discharge material arm by controlling the drive of the arm drive motor.

First, in step S41 of FIG. 6, it is determined whether or not there is a “motor stop command”. The motor stop command is a command for stopping the arm drive motor 22 and terminating the control.
When there is a motor stop command (YES in step S41), the supply / discharge material arm 21 is rotated by controlling the drive of the arm drive motor 22 to be held at the tip of the supply / discharge material arm 21. The step of positioning the hand 12 at a predetermined position is completed.
If there is no motor stop command (NO in step S41), the process proceeds to step S42.

  Next, in step S42, a control command value, angle information, and angular velocity information are acquired. Specifically, the control command value output from the control command generation unit 36 and input to the arm operation control unit 238 is also input to the control switching determination unit 237. The angle information of the rotation angle of the supply / discharge material arm 21 obtained from the rotation angle of the arm drive motor 22 measured by the angle sensor 34 connected to the arm drive motor 22 is the control switching determination unit 237 and the arm operation control unit. 238 is input. Angular velocity information of the angular velocity of the feeding / discharging material arm 21 measured by the angular velocity sensor 32 fixed near the tip of the feeding / discharging material arm 21 is input to the control switching determination unit 237 and the arm operation control unit 238.

  Next, in step S43, the control switching determination unit 237 determines from the angular velocity information output from the angular velocity sensor 32 whether or not the angular velocity of the supply / discharge material arm 21 exceeds a predetermined threshold value. The predetermined threshold is denoted as threshold S.

  When the angular velocity of the material supply / release material arm 21 exceeds the predetermined threshold S (YES in Step S43), the control switching determination unit 37 determines the gain of the angular velocity information as 1, and proceeds to Step S45.

If the angular velocity of the material supply / release material arm 21 is smaller than the predetermined threshold S (NO in step S43), the control switching determination unit 237 determines to change the gain of the angular velocity information, and proceeds to step S44.
In step S44, the gain adjustment unit 235 sets the angular velocity information gain to a value smaller than 1 when the angular information and angular velocity information use control unit 238b generates a control signal for the arm drive motor 22 based on the angular information and angular velocity information. And output to the angle information and angular velocity information use control unit 238b. Following step S44, the process proceeds to step S45.

  After step S43 or step S44, in step S45, the angle information and angular velocity information use control unit 238b calculates a torque command value from the gains of the control command value, angle information, angular velocity information, and angular velocity information.

  Next, in step S46, the torque command value calculated by the angle information and angular velocity information use control unit 238b is input to the motor driver 39.

Next, in step S <b> 47, electric power corresponding to the torque command value is supplied to the arm drive motor 22 by the motor driver 39. The arm drive motor 22 generates a torque corresponding to the supplied power.
Next, in step S48, the arm drive mechanism 23 connected to the arm drive motor 22 is actuated by the torque generated by the arm drive motor 22, and the feed connected to the arm drive motor 22 via the arm drive mechanism 23 is performed. The angular speed of the material removal arm 21 is accelerated or decelerated by the torque generated by the arm drive motor 22.

  After step S48, the process returns to step S41, and when there is a motor stop command in step S41 (YES in step S41), the feeding / discharging material arm 21 is rotated by controlling the drive of the arm drive motor 22. The process of positioning the holding hand 12 disposed at the tip of the supply / discharge material arm 21 at a predetermined position is completed.

(Third embodiment)
Next, a third embodiment as a modification of the first embodiment and the second embodiment will be described. In this embodiment, when calculating the torque designation value in the first embodiment or the second embodiment, the threshold used as a reference for determining use or non-use of angular velocity information or determining a gain value is as follows. Another example described above will be described.

<Threshold example 1>
First, another example of defining a threshold for angular velocity information will be described with reference to FIG. FIG. 7 is an explanatory diagram illustrating an example of an angular velocity threshold value used as a reference for switching control. FIG. 7A is an explanatory diagram showing an example of the relationship between the elapsed time and the angular velocity during the rotation of the feeding / dispensing material arm and the threshold value of the angular velocity, and FIG. 7B is an explanatory diagram showing an example of the angular velocity information. FIG.
The angular velocity indicated by the two-dot chain line in FIG. 7A is the angular velocity designated for each elapsed time as the control command value, and the angular velocity indicated by the solid line is a state using the control command value, the angular velocity information, and the angle information. It is an example of the angular velocity for every elapsed time at the time of implementing feedback control etc. The angular velocity indicated by a solid line in FIG. 7B is an angular velocity measured using an angular velocity sensor having a large dynamic range, and the angular velocity indicated by a broken line is an angular velocity measured using an angular velocity sensor having a relatively small dynamic range. is there.

In general, the output of the angular velocity sensor is output as a voltage, for example, and the voltage that can be output is finite. For this reason, if the resolution is increased, the dynamic range must be reduced. The dynamic range of the angular velocity sensor having a relatively small dynamic range shown in FIG. 7B is approximately 300 dps. When the angular velocity of the measurement target exceeds the dynamic range as shown in FIG. Is a constant value. For this reason, if the control of the robot is performed using the angular velocity information when the angular velocity of the measurement target exceeds the dynamic range, there is a high possibility that erroneous control will be performed. By reducing the dynamic range, it becomes possible to increase the resolution and to detect small fluctuations in the angular velocity, thus enabling precise control.
In this threshold value example, as shown in FIG. 7A, when the angular velocity exceeds the threshold value S2, control is performed so that the angular velocity information is not used or the gain of the angular velocity information is less than 1.

<Threshold example 2>
Next, an example of defining a threshold value for angle information will be described with reference to FIG. FIG. 8 is an explanatory diagram illustrating an example of an angle threshold value used as a reference for switching control. FIG. 8A is an explanatory view showing an example of the relationship between the passage of time and the rotation angle during rotation of the supply / discharge material arm and the threshold value of the angle, and FIG. It is explanatory drawing which shows the example of the relationship between time progress and the angle just before stopping, and the threshold value of an angle.
As shown in FIG. 8 (a), when the supply / discharge material arm 21 is rotated and the rotated angle exceeds the threshold value S3, the control command value and the angle information are used without using the angular velocity information. For example, PID control based on the angle of the angle sensor or the angular velocity of the differential value thereof, or state feedback control using the control command value, the angle information, and the angular velocity information with the gain set to less than 1, for example, is performed. At the stage where the rotation operation is started and the rotation angle is smaller than the threshold value S3, control using the angular velocity information, the control command value, and the angle information is performed. The control uses, for example, state feedback control.
The rotation angle indicated by the two-dot chain line in FIG. 8 is an angle designated for each elapsed time as the control command value, and the angle indicated by the broken line represents the angle of the angle sensor using the control command value and the angle information, It is an example of an angle for every elapsed time when PID control based on the angular velocity of the differential value is performed, and the angle shown by a solid line is a state feedback control using a control command value, angular velocity information, and angle information. It is an example of the angle for every elapsed time at the time of implementing.
In FIG. 8, state feedback control or the like is performed in order to separate and clearly show a broken line indicating an angle when performing PID control and a solid line indicating an angle when performing state feedback control or the like. The solid line indicating the angle in this case is shifted toward the later time.

As shown in FIG. 8B, when the control using the control command value and the angle information is performed, the feeding / discharging material arm 21 is rotated so as to return the holding hand 12 that has passed the target position. There is a possibility of residual vibration due to. Due to the occurrence of the residual vibration, a time is required until the residual vibration is settled until the supply / discharge material arm 21 substantially reaches the target position and then stops.
When the control using the control command value, the angular velocity information, and the angle information is performed, vibration hardly occurs. Therefore, it takes almost time to stop after the supply / discharge material arm 21 almost reaches the target position. I don't need it.

When noise is included in the angular velocity information, vibration is generated by the noise, and the accuracy is deteriorated. By setting the threshold value of the angle for switching control to a value farther from the vibration angle due to the noise of the angular velocity information with respect to the target stop position, the influence of noise can be eliminated. Even if the control is switched to the control using the control command value and the angle information, it is possible to suppress the occurrence of large vibration compared to the case of using the angular velocity information including noise.
In addition, control is performed by setting the angle threshold for switching control to an angle closer to the maximum vibration angle of the residual vibration when control using the control command value and angle information is performed for the target stop position. Prior to the point of switching, it is possible to suppress vibrations by performing control using the control command value, angular velocity information, and angle information. The turning position (angle) of the material supply / discharge material arm 21 at the time of switching the control is closer to the maximum deflection angle of the residual vibration when the control command value and the angle information are controlled with respect to the target stop position. Can be estimated. Even in the control using the control command value and the angle information, the feed material arm 21 can be moved without causing the vibration exceeding the maximum swing angle of the residual vibration when the control using the control command value and the angle information is performed. There is a high possibility that the target stop position can be reached. For this reason, compared with the case where control using the control command value and angle information is performed without performing control using the control command value and angular velocity information and angle information, the maximum deflection angle of the residual vibration is reduced, The time until the residual vibration is settled can be reduced.

<Threshold example 3>
Next, an example in which a threshold value is defined on the time axis for the feature point of the control command value will be described with reference to FIG. FIG. 9 is an explanatory diagram illustrating an example of threshold values defined on the time axis with respect to the feature points of the control command value as a reference for switching control. FIG. 9A shows an example of the threshold value defined on the time axis with respect to the target stop position, which is a characteristic point of the control command value, and the relationship between the passage of time and the angular velocity during the rotation of the supply / discharge material arm. It is explanatory drawing shown. FIG. 9B is defined on the time axis with respect to the relationship between the elapsed time and the angular velocity near the target stop position, which is a feature point of the control command value, and the target stop position, which is a feature point of the control command value. It is explanatory drawing which shows the example of a threshold value.

The angular velocity indicated by the two-dot chain line in FIG. 9 is the angular velocity designated as the control command value for each elapsed time, and the angle indicated by the solid line is the state feedback control using the control command value, the angular velocity information, and the angle information. It is an example of the angular velocity for every elapsed time at the time of implementing.
As shown in FIGS. 9A and 9B, the angular velocity information is used after the time T1 that is a threshold value has elapsed from the time when the angular velocity becomes zero and reaches the target stop position in the control command value. Without using the control command value and the angle information, for example, PID control based on the angle of the angle sensor or the angular velocity of the differential value, or the control command value, the angle information, and the angular velocity information with the gain set to less than 1. For example, the state feedback control used is performed. In the control command value, the angular velocity information, the control command value, and the angle information are used in the control command value until the angular velocity becomes zero and from the time when the angular velocity becomes zero to the time T1. Implement the controls that were present. The control uses, for example, state feedback control.

As shown in FIG. 9B, when a certain time T1 elapses from the time when the angular velocity of the control command value becomes zero, generally, the angular velocity of the supply / removal material arm 21 becomes zero. A state in which the torque command value that drives the arm driving motor 22 is output without the angular velocity of the supply / discharge material arm 21 being zero is a state in which there is a high possibility that an abnormality has occurred in the control system. The abnormality of the control system is, for example, a state where the angular velocity sensor 32 has failed or a state where angular velocity information is incorrect due to noise or the like. By performing control using the control command value and the angle information, or control using the control command value, the angle information, and the angular velocity information in which the gain is set to less than 1, these abnormal factors can be eliminated.
When a certain time T1 has elapsed from the time when the angular velocity of the control command value becomes zero, it can be estimated that the rotation position (angle) of the supply / discharge material arm 21 is close to the target stop position. For this reason, even in the control using the control command value and the angle information, there is a high possibility that the supply / discharge material arm 21 can be positioned at the target stop position with almost no vibration.

(Fourth embodiment)
Next, a fourth embodiment which is an embodiment of a control method using a robot, a transfer device, and an inertial sensor will be described. In this embodiment, an example of a robot or a transfer device that is different from the feeding / dispensing material device described in the first embodiment or the second embodiment will be described.

<Feeding material equipment>
A feeding / discharging material apparatus which is an embodiment of a control method using a robot, a transfer device, and an inertial sensor, and is the feeding / discharging material apparatus 10 or the feeding / discharging material described in the first embodiment or the second embodiment. A feed / dispensing material device 310 different from the device 210 will be described with reference to FIG. FIG. 10 is an external perspective view showing a schematic configuration of the supply / discharge material apparatus.
As shown in FIG. 10, the feeding / dispensing material device 310 includes a holding hand 12, a robot mechanism 320, a feeding / dispensing material device control unit 330, an angular velocity sensor 332a, an angular velocity sensor 332b, and two angle sensors (illustrated). (Omitted).

  The robot mechanism 320 includes a hand holding mechanism 24, a supply / discharge material arm 321, an arm shaft portion 326, and a machine base 328. The machine base 328 supports the arm shaft portion 326 through a built-in bearing mechanism (not shown) so that the arm shaft portion 326 can rotate around the rotation shaft of the arm shaft portion 326 and can be positioned and fixed precisely. The arm shaft portion 326 is connected to an arm drive motor (not shown) built in the machine base 328 via an arm drive mechanism (not shown), and is rotated by the arm drive motor. An angle sensor is connected to the arm drive motor, and the rotation angle of the arm drive motor is measured by the angle sensor.

One end of the supply / discharge material arm 321 is fixed to the end of the arm shaft portion 326 opposite to the side supported by the machine base 328. The feeding / dispensing material arm 321 includes an arm part 321a, an arm part 321b, and an arm joint part 323. One end of the arm part 321 a and one end of the arm part 321 b are connected by an arm joint part 323. One end of the arm portion 321 b opposite to the one end connected to the arm joint portion 323 is fixed to the arm shaft portion 326. Since the arm shaft portion 326 is rotatable about the rotation axis of the arm shaft portion 326 with respect to the machine base 328, the arm portion 321 b whose one end is fixed to the arm shaft portion 326 is relative to the machine base 328. The arm shaft portion 326 can freely rotate around the rotation axis.
The arm portion 321b supports the arm portion 321a so as to be rotatable about the rotation axis of the arm joint portion 323 via the arm joint portion 323. The portion of the arm joint portion 323 where the arm portion 321a is fixed is connected to an arm portion drive motor (not shown) built in the arm portion 321b via an arm portion drive mechanism (not shown). It is rotated by a drive motor. The arm part 321a and the arm part 321b can adjust the angle formed between each other in the arm joint part 323. That is, the feeding / discharging material arm 321 can bend and stretch at the arm joint portion 323. An arm angle sensor is connected to the arm drive motor, and the rotation angle of the arm drive motor is measured by the arm angle sensor. By measuring the rotation angle of the arm unit drive motor, the rotation angle of the arm unit 321a with respect to the arm unit 321b can be measured.
The axial direction of the rotation shaft of the arm shaft portion 326 and the axial direction of the rotation shaft of the arm joint portion 323 are substantially parallel to each other.

The hand holding mechanism 24 is fixed to the opposite end of the arm portion 321a fixed to the arm joint portion 323. The hand holding mechanism 24 includes a holding bearing 24a fixed to the arm portion 321a, and a holding mechanism shaft 24b supported by the holding bearing 24a so as to be slidable and capable of being accurately positioned and fixed. The holding mechanism shaft 24b can be slid in the axial direction of the holding mechanism shaft 24b with respect to the holding bearing 24a by a vertical drive source (not shown). The axial direction of the holding mechanism shaft 24 b is substantially parallel to the axial direction of the rotation shaft of the arm shaft portion 326 and the axial direction of the rotation shaft of the arm joint portion 323.
The holding hand 12 is attached to the free end of the holding mechanism shaft 24b. The holding hand 12 is positioned at a position facing the object to be transported by turning and bending the supply / discharge material arm 321. By sliding the holding mechanism shaft 24b with respect to the holding bearing 24a, the holding hand 12 is brought into and out of contact with the object to be conveyed, and the object to be conveyed held by the holding hand 12 is lifted from the placement place or placed. Or approach the place.

An angular velocity sensor 332 a is fixed to the hand holding mechanism 24 to which the holding hand 12 is attached on the side opposite to the holding hand 12. That is, the angular velocity sensor 332a is fixed to the tip of the arm portion 321a, and can measure the angular velocity at which the arm portion 321a is rotated.
An angular velocity sensor 332b is fixed to a side surface of one end connected to the arm joint portion 323 of the arm portion 321b. Therefore, the angular velocity sensor 332b is fixed to the tip of the arm portion 321b, and can measure the angular velocity at which the arm portion 321b is rotated.
The material supply / control device controller 330 performs overall control of the operation of each part of the material supply / discharge material device 310 based on a control program input in advance via an information input / output device (not shown). The material supply / control device controller 330 can control the operation of the arm unit 321b based on the angular velocity information obtained by the angular velocity sensor 332b and the angle information obtained by the angle sensor built in the machine base 328. At the same time, the relative movement of the arm part 321a with respect to the arm part 321b can be controlled by the angular speed information by the angular speed sensor 332a and the angle information by the arm angle sensor incorporated in the arm part 321b. That is, the operation of the arm portion 321a and the operation of the supply / discharge material arm 321 that controls the arm portion 321b can be controlled using the angular velocity information and the angle information as in the above-described embodiment.

<Conveyor>
Next, a transport device having a configuration in which a holding device or the like that holds a transport object moves in parallel along an orthogonal coordinate system will be described with reference to FIG. FIG. 11 is an external perspective view showing a schematic configuration of the transport apparatus. FIG. 11A is an external perspective view illustrating a schematic configuration of the ceiling-suspended conveyance device, and FIG. 11B is an external perspective view illustrating a schematic configuration of the head conveyance device in the printing apparatus.

<Ceiling suspension transfer device>
As shown in FIG. 11A, the ceiling-suspended transfer device 410 includes a main scanning direction moving mechanism 402, a sub-scanning direction moving mechanism 403, an elevating / lowering mechanism 404, a holding mechanism 412, a distance sensor, and an acceleration sensor. 432 and a transfer device controller (not shown).

The main scanning direction moving mechanism 402 includes a pair of main scanning guide rails 421 and 421 extending in the main scanning direction, a main scanning linear motor formed on the main scanning guide rail 421, and a main scanning formed on the scanning plate 422. And a slider. The scanning plate 422 is spanned between the pair of main scanning guide rails 421 and 421 and extends in the sub scanning direction substantially orthogonal to the main scanning direction. The scanning plate 422 is freely moved in the main scanning direction by a main scanning linear motor and a main scanning slider. The pair of main scanning guide rails 421 and 421 are fixed by being suspended from, for example, a ceiling.
The sub scanning direction moving mechanism 403 includes a sub scanning linear motor formed on the scanning plate 422 and a sub scanning slider formed on the sub scanning frame 423. The sub scanning frame 423 is freely moved in the sub scanning direction by a sub scanning linear motor and a sub scanning slider.
The elevating / lowering mechanism 404 includes a ball bearing disposed in the sub-scanning frame 423, a ball bearing drive motor, and a ball screw fixed to the elevating shaft 424. The elevating shaft 424 is moved up and down by a ball bearing, a ball bearing drive motor, and a ball screw.
The holding mechanism 412 fixed to the side opposite to the ball screw of the lifting shaft 424 is moved to an arbitrary position in the main scanning direction and the sub scanning direction by the main scanning direction moving mechanism 402 and the sub scanning direction moving mechanism 403, The lifting / lowering moving mechanism 404 can be brought into contact with the object to be conveyed.
The transport device control unit controls the operation of each unit of the suspended transport device 410 based on a control program input in advance via an information input / output device (not shown).

The main scanning linear motor, the sub-scanning linear motor, and the ball bearing driving motor are connected to a distance sensor that measures the driving distance of each.
An acceleration sensor 432a, an acceleration sensor 432b, or an acceleration sensor 432c is fixed to the sub-scanning frame 423 or the holding mechanism 412. The acceleration sensor 432a, the acceleration sensor 432b, and the acceleration sensor 432c can measure acceleration in the main scanning direction, the sub-scanning direction, or the up-down direction.
Movement distance information in each direction by a distance sensor connected to a main scanning linear motor, a sub-scanning linear motor, or a ball bearing drive motor, and in each direction by an acceleration sensor 432a, an acceleration sensor 432b, or an acceleration sensor 432c The movement of the holding mechanism 412 can be controlled by the acceleration information. As the distance sensor, for example, a linear encoder can be used. The distance sensor corresponds to the position sensor.

  When the movement control of the holding mechanism 412 is executed using the movement distance information and the acceleration information, a threshold value is set in advance in the movement distance information or the acceleration information, and the control switching determination unit of the transport device control unit moves the movement distance information. Alternatively, acceleration information or the like is compared with the threshold value, and whether to use acceleration information for control or a constant to be multiplied by the acceleration information is determined. The operation control unit of the transport device control unit performs control using the control command value and the movement distance information, control using the control command value, the movement distance information, and acceleration information, or the control command according to the determination of the control switching determination unit. Control using the value, the moving distance information, and the acceleration information multiplied by the gain of the acceleration information is performed. By performing the control, the operations of the main scanning direction moving mechanism 402, the sub scanning direction moving mechanism 403, and the lifting / lowering moving mechanism 404 are controlled, and the holding mechanism 412 is moved to an arbitrary position and positioned.

<Head transfer device>
As shown in FIG. 11B, the head transport device 460 moves the ejection head 462 of the printing device, and includes a head carriage 476, a carriage shaft 474, a drive belt 473, a drive pulley 472, and a drive. A motor 471, an acceleration sensor 482, and an encoder 484 are provided. The printing apparatus includes a printing apparatus control unit (not shown) that performs overall control of the operation of each unit of the printing apparatus.

The drive motor 471 is fixed to a device frame (not shown), and a drive pulley 472 is fixed to one end of the drive shaft. A drive belt 473 is stretched between the drive pulley 472 and a driven pulley (not shown), and the drive belt 473 is driven by a drive motor 471. The carriage shaft 474 is disposed in parallel with the extending direction of the drive belt 473. A head carriage 476 is supported on the carriage shaft 474 by being slidably fitted in the axial direction of the carriage shaft 474. The head carriage 476 is fixed to the drive belt 473, and is moved along the carriage shaft 474 by driving the drive belt 473. The ejection head 462 held by the head carriage 476 is moved in the axial direction of the carriage shaft 474 and is held at an arbitrary position.
The printing apparatus control unit controls the operation of each unit of the printing apparatus based on a control program input in advance via an information input / output apparatus (not shown).

  The encoder 484 is connected to the drive shaft of the drive motor 471, and can measure the moving distance of the ejection head 462 by measuring the rotation angle of the drive motor 471. The rotation angle information of the drive motor 471 corresponding to the position of the ejection head 462 corresponding to the moving distance is referred to as position information of the drive motor 471. The acceleration sensor 482 is fixed to the head carriage 476, and the acceleration acting on the head carriage 476 can be measured by driving the head carriage 476. The movement of the ejection head 462 held by the head carriage 476 can be controlled by the position information by the encoder 484 and the acceleration information by the acceleration sensor 482. The encoder 484 corresponds to a position sensor.

  When controlling the movement of the ejection head 462 using the position information and the acceleration information, a threshold value is set for the position information or the acceleration information, and the control switching determination unit of the printing apparatus control unit determines the position information or the acceleration information. Is compared with the threshold value to determine whether or not to use acceleration information for control, or to determine a weighting constant to multiply the acceleration information. The operation control unit of the printing apparatus control unit performs control using the control command value and the position information, control using the control command value, the position information, and acceleration information, or the control command value according to the determination of the control switching determination unit. Control using position information and acceleration information multiplied by a weighting constant is performed. By performing the control, the operation of the drive motor 471 is controlled, and the ejection head 462 held by the head carriage 476 is moved to an arbitrary position and positioned.

<Laser printer>
Next, as an example of controlling the rotation of the drum-shaped member, a laser printer 510 will be described with reference to FIG. FIG. 12 is an explanatory diagram showing a schematic configuration of a main part of the laser printer.
As shown in FIG. 12, the laser printer 510 includes a photosensitive drum 524, a drum driving motor 522, an encoder 534, a drive transmission mechanism 523, a charging device 541, a laser oscillation device 542, and a toner supply device 543. A transfer roller 544, a fixing roller 546 and a fixing roller 547, a toner recovery device 548, an angular velocity sensor 532, and a printer control unit (not shown).

The photosensitive drum 524 is connected to a drum drive motor 522 via a drive transmission mechanism 523, and is rotated about a rotation axis by the drum drive motor 522. The surface of the photosensitive drum 524 is negatively charged by the charging device 541, and the shape of the printed material is drawn by the laser oscillation device 542 leaving the charged portion in the shape of the printed material, and is supplied by the toner supply device 543. Toner adheres to the shape of the charged print. The sheet 549 is pressed against the photosensitive drum 524 by the transfer roller 544, and the toner is transferred to the sheet 549. The toner transferred to the paper 549 is fixed by applying pressure and heat by the fixing roller 546 and the fixing roller 547. Unnecessary toner is collected by the toner collecting device 548 on the surface of the photosensitive drum 524 to which the toner has been transferred, and the above steps are repeated again.
The printer control unit controls the operation of each unit of the laser printer 510 based on a control program input in advance via an information input / output device (not shown).

  An encoder 534 is connected to the drive shaft of the drum drive motor 522, and the rotation angle information of the photosensitive drum 524 can be acquired by measuring the rotation angle of the drum drive motor 522 by the encoder 534. . The angular velocity sensor 532 is fixed to the photosensitive drum 524, and information on the angular velocity at which the photosensitive drum 524 rotates can be acquired by the angular velocity sensor 532. The rotation of the photosensitive drum 524 can be controlled by the rotation angle information of the drum drive motor 522 by the encoder 534 and the angular velocity information by the angular velocity sensor 532.

  When the rotation control of the photosensitive drum 524 is executed using the rotation angle information and the angular velocity information, a threshold value is set for the rotation angle information or the angular velocity information, and the control switching determination unit of the printer control unit performs the rotation. The moving angle information or the angular velocity information is compared with the threshold value to determine whether or not to use the angular velocity information for control, or a weighting constant to be multiplied by the angular velocity information. The operation control unit of the printer device control unit performs control using the control command value and the rotation angle information, control using the control command value, rotation angle information, and angular velocity information according to the determination of the control switching determination unit, or Control is performed using the control command value, the rotation angle information, and the angular velocity information multiplied by the weighting constant. By performing the control, the operation of the drum drive motor 522 is controlled to rotate the photosensitive drum 524 by an arbitrary angle.

  As mentioned above, although preferred embodiment was described referring an accompanying drawing, suitable embodiment is not restricted to the said embodiment. The embodiment can of course be modified in various ways without departing from the scope, and can also be implemented as follows.

  (Modification 1) In the above embodiment, an example in which threshold values are defined for rotation angle information, angular velocity information, movement distance information, acceleration information, position information, and the like, and threshold values on the time axis with respect to feature points of control command values. Although the example which prescribes | regulates was demonstrated, the object which prescribes | regulates a threshold value is not restricted to these. To set a threshold for noise that affects the values of angular velocity information and acceleration information, and to determine whether to use or not use angular velocity information and acceleration information, or to adjust the influence of angular velocity information and acceleration information, depending on the level of the noise Alternatively, a constant for multiplying the angular velocity information or the acceleration information may be determined. Noise that affects the values of angular velocity information and acceleration information includes mechanical vibrations of the device itself, vibrations of devices existing in the surroundings, fluctuations in power supplied to the device, ambient electromagnetic noise, and the like. .

  (Modification 2) In the above-described embodiment, the example in which the threshold value is defined for the angular velocity information by the angular velocity sensor 32 and the acceleration information by the acceleration sensor 432 has been described, but the target for defining the threshold value is not limited thereto. The threshold value may be defined for one or more integral values of angular velocity information or acceleration information. The integral value of the acceleration information is speed information, and the speed information can be handled in the same manner as the angular velocity information. The twice integrated value of acceleration information and the integrated value of angular velocity information are information on the movement distance, and the information on the movement distance can be handled in the same manner as the angle information and the position information.

  (Modification 3) In the above-described embodiment, the example in which the threshold value is defined for the angle information by the angle sensor 34 and the movement distance information by the distance sensor has been described, but the target for defining the threshold value is not limited thereto. The threshold value may be defined for one or more differential values of angle information and movement distance information. The differential value of the angle information or the movement distance information is an angular velocity or a movement velocity, and can be handled in the same manner as the angular velocity information described above. The double differential value of the angle information or the movement distance information is angular acceleration or acceleration, and can be handled in the same manner as the acceleration information described above.

  (Modification 4) In the above-described embodiment, an example in which threshold values are defined for rotation angle information, angular velocity information, movement distance information, acceleration information, position information, and the like, and threshold values on the time axis with respect to feature points of control command values. The example which prescribes | regulates was demonstrated. The targets for which these threshold values are defined are used independently when executing the control, but the control may be performed using a plurality of targets for which the threshold values are defined. For example, the control without using the angular velocity information is executed only when both the rotation angle information and the angular velocity information exceed the threshold value, and the rotation is performed when at least one of the rotation angle information and the angular velocity information does not exceed the threshold value. Control using angle information and angular velocity information may be executed. Further, the rotation angle information, the angular velocity information, the movement distance information, the acceleration information, the position information, etc., the time axis with respect to the feature point of the control command value, and the values of the angular velocity information and the acceleration information described in the first modification are affected. You may combine with the noise level to exert. In this case, for example, only when both the rotation angle information, angular velocity information, movement distance information, acceleration information, position information, the time axis for the feature point of the control command value, and the noise level both exceed the threshold Then, control without using angular velocity information or the like is executed, and when at least one does not exceed the threshold value, control using rotational angle information or angular velocity information or the like is executed. As a result, it is possible to avoid a state in which control without using angular velocity information or the like is performed in order to avoid adverse effects due to noise even though the noise level of angular velocity information or the like is kept at a low level. it can.

  (Modification 5) In the embodiment, as examples of the robot and the transfer device, the supply / discharge material device 10 including the robot mechanism 20, the supply / discharge material device 310 including the robot mechanism 320, the ceiling transfer device 410, and the printing device. The head conveyance device 460 provided, the drum drive device provided in the laser printer 510, and the like have been described as examples. However, the robot and the transfer device that can be suitably controlled using the control method using the inertial sensor described above are not limited to these exemplified devices. By using the above-described control method using the inertial sensor, it is possible to suitably control an apparatus that preferably moves the moving body to a predetermined target position quickly and stops the moving body accurately and quickly.

  DESCRIPTION OF SYMBOLS 10,210 ... Feed / discharge material apparatus, 20 ... Robot mechanism, 21 ... Feed / release material arm, 22 ... Arm drive motor, 30, 230 ... Feed / feed material apparatus control part, 31,231 ... Robot control part, 32 ... Angular velocity sensor , 34 ... Angle sensor, 36 ... Control command generation unit, 37, 237 ... Control switching determination unit, 38, 238 ... Arm operation control unit, 235 ... Gain adjustment unit, 310 ... Feeding and unloading device, 320 ... Robot mechanism, 321 ... Material supply arm, 321a, 321b ... Arm part, 323 ... Arm joint part, 330 ... Feed / discharge material device control part, 332a, 332b ... Angular velocity sensor, 402 ... Main scanning direction moving mechanism, 403 ... Sub scanning direction moving mechanism 404 ... Elevating / lowering mechanism, 410 ... Ceiling-carrying conveying device, 432, 432a, 432b, 432c ... Inertial sensor, 460 ... Head conveying device, 462 ... Discharge Head, 471 ... driving motor, 476 ... head carriage, 482 ... acceleration sensor, 484 ... encoder, 510 ... laser printer, 522 ... drum driving motor, 524 ... photoconductor drum, 532 ... angular velocity sensor, 534 ... encoder.

Claims (9)

A pivotable arm;
An angle sensor for detecting the rotation angle of the arm;
An inertial sensor provided on the arm ,
If the angular velocity of the arm is greater than the first value, the signal from the angle sensor, and the the first control signal the arm based on is controlled from the inertial sensor is performed, the angular velocity of said arm If the value is equal to or less than the first value, a second control is performed in which the arm is controlled based on a signal from the angle sensor without using a signal from the inertia sensor . After pre-Symbol first control, the second robot according to claim 1 in which the control, characterized in that the dividing line of the. A drive unit for driving the arm,
Before SL We first control line, after the stop command from the driver it is output, the robot according to claim 1 in which the second control is characterized in that the dividing line. A control device for controlling a robot comprising a rotatable arm, an angle sensor for detecting a rotation angle of the arm, and an inertial sensor provided on the arm,
If the angular velocity of the arm is greater than the first value, the angle signal from the sensor, and the a first control for controlling the arm on the basis of a signal from the inertial sensor, serial angular velocity is the first arm And a second control for controlling the arm based on a signal from the angle sensor without using a signal from the inertial sensor .   The control device according to claim 4, wherein the second control is performed after the first control.   The control device according to claim 4, wherein the second control is performed after a stop command is output from a drive unit that drives the arm. A pivotable arm;
An angle sensor for detecting the rotation angle of the arm;
An inertial sensor provided on the arm;
A control unit for controlling the arm,
The control unit, when the angular velocity of the arm exceeds a first value, a first control for controlling the arm based on a signal from the angle sensor and a signal from the inertial sensor ; And a second control for controlling the arm based on a signal from the angle sensor without using a signal from the inertia sensor when an angular velocity is equal to or less than the first value .   The robot system according to claim 7, wherein the control unit performs the second control after the first control. A drive unit for driving the arm,
The robot system according to claim 7, wherein the control unit performs the first control, and performs the second control after a stop command is output from the drive unit.

Images