JP5836709B2 - Turbine valve control device and turbine equipment - Google Patents

Description

  The present invention relates to a high pressure control oil-driven turbine valve control device and turbine equipment for controlling the flow rate of a working fluid of a turbine.

  As turbines for power generation such as thermal power and nuclear power, there are steam turbines, gas turbines, combined cycle turbines in which waste heat from the gas turbines is recovered and used to increase plant efficiency by combining a gas turbine and a steam turbine. In particular, from the viewpoint of increasing energy efficiency in recent years, all of them are mainly cycles with larger capacities.

  In any turbine cycle, each turbine is provided with a control valve for controlling the flow rate of the working fluid of the turbine in order to control the rotation speed (turbine speed) and the load.

  That is, when steam generated in a boiler, a nuclear reactor, or a steam generator reaches the steam turbine, the steam flow rate is controlled by the steam control valve of the steam turbine, thereby controlling the speed and load of the steam turbine. Further, in the gas turbine, the speed and load of the gas turbine are controlled by controlling the gas fuel flow rate by the gas fuel control valve.

  Turbine equipment valves other than speed control and load control, valves other than steam control valves and fuel control valves, such as for control during start-up / transition, emergency shut-off, or other control required in each operation mode Often have various control functions.

For example, in a steam turbine, in addition to the steam control valve, the steam flow rate at startup is controlled by a main steam stop valve. In the gas turbine, for the purpose of improving the environmental measures and combustion efficiency in addition to the gas fuel control valve, the gas fuel distribution control for distributing control of the fuel of the low NO _X combustion is performed.

  Among the control valves, such as the control valve for steam and the control valve for gas fuel, the control valve that requires high accuracy and responsiveness is driven by a servo valve using high-pressure control oil. An oil cylinder, a valve opening degree detection means, and a control device are included.

  In a control valve for steam or gas in a thermal power plant or nuclear power plant, an electrohydraulic control type control valve using such a servo valve is used.

  These control valves are driven by hydraulic pressure by supplying high-pressure control oil to an oil cylinder directly connected to the valve stem.

  Control of the amount of high-pressure control oil in the oil cylinder is performed by a servo valve. That is, the opening degree of the control valve is controlled by supplying the control oil from the servo valve to the oil cylinder and discharging the control oil from the oil cylinder.

  The opening control by the servo valve is always feedback controlled so that the control valve opening command value in the control circuit matches the actual opening of the control valve.

  Now, the so-called fail-safe concept is applied to the servo valve, and in the event of a loss of control signal, assuming that some abnormality occurs in the control circuit, the servo valve is set to operate in a safe direction. Has a built-in neutral bias.

  Thus, in order to operate the fail safe function, that is, when the control signal is lost, the oil cylinder operates in the safe side (generally in the closing direction, but depending on the application of the valve, but in the opening direction), a neutral bias is incorporated in the servo valve. Yes. When the oil cylinder is opened and closed, the neutral point bias compensation signal is added by an amount that cancels the neutral point bias of the servo valve in the adder in the opening control circuit in order to compensate for the neutral point bias.

  The neutral point bias built into the servo valve is generally about 10% to 20% of the servo valve rated current.

  That is, during normal operation, control is performed until the deviation that is the output of the adder becomes zero, but even in that case, the servo valve always keeps the valve opening at a predetermined opening. A neutral point bias compensation current for compensating the bias is added via an adder.

JP 2004-21669 A

  Since the servo valve described above is a precision device in which a spool having a diameter of about several millimeters to several tens of millimeters is moved in a gap of micron and the stroke of the spool is also moved in micron, the neutral point bias value is likely to fluctuate.

  Here, even if the valve opening setting value is constant, if the neutral point bias built in the servo valve fluctuates, the neutral point bias compensation value added by the control circuit is constant. The actual opening of the valve will change. At this time, the actual fluctuation amount of the valve opening is a value obtained by dividing the neutral point bias fluctuation amount in the servo valve by the amplifier gain.

  Various factors such as mechanical factors such as the positional relationship between the spool and bushing deviating due to some cause, drift due to changes in oil temperature or ambient temperature, or temperature drift of electrical components such as servo valve coils, etc. However, the mechanism is not completely elucidated.

  Taking a steam control valve as an example, when controlling the speed or load of a steam turbine, a feedback loop for controlling the speed and load of the turbine is generally installed.

  For this reason, even if a neutral point bias fluctuation occurs in the servo valve, the steam control valve opening is corrected so as to become a predetermined opening by another feedback loop required from the turbine, so that no problem occurs. .

  However, when the control from the plant side requires constant valve opening control (limiter operation) instead of speed / load control, the valve opening may shift by the amount corresponding to the servo valve neutral point bias fluctuation. As a result, the intended steam flow rate cannot be obtained.

  Furthermore, for example, in modern gas turbine plants, particularly in combined cycle plants, a low NOx combustor is often used. This combustor is a complex and very fine-grained fuel in order to achieve low NOx. There are load zones where flow rate control and fuel distribution control are required, and even a deviation of the fuel valve opening of less than 1% is not allowed.

  For example, if the neutral point bias fluctuates during operation with a constant valve opening set value signal at the fuel distribution valve, a deviation occurs in the fuel distribution valve opening, causing combustion vibration of the combustor, backfire or blowing. The turbine may be brought to an emergency stop, such as disappearance, or the turbine may be damaged.

  In the above, the neutral point bias built into the servo valve has been described as an example. However, due to other factors such as temperature drift (summer and winter, etc.) due to ambient temperature change of LVDT, or heat generation of LVDT itself The actual opening degree of the valve can also vary due to the reason described in the neutral point variation of the servo valve, due to temperature drifts or ambient temperature changes of the control circuit itself (summer and winter, etc.).

  Also, if the fluctuation of the neutral point is due to foreign matter clogging, corrosion, damage, etc. in the sliding parts of the servo valve spool, etc., the servo valve spool stick, etc. will also occur with prolonged operation Can do.

  In any case, if the above-mentioned problems occur, the safety and reliability of the turbine will be significantly impaired, and the stable supply of energy will be hindered, such as being forced to stop for a long time for repairs. There was a problem that the impact on the environment would be enormous.

  Therefore, the present invention is to solve such a problem, and even when the servo valve neutral point bias fluctuates during turbine operation, the fluctuation of the actual opening of the control valve can be corrected and stable operation can be maintained. The purpose is to do so.

To achieve the above object, the present invention provides a flow rate control circuit that calculates a flow rate command value based on a turbine speed signal and a load signal and outputs a control valve opening command signal of a turbine control valve, and a turbine control valve The control valve opening feedback signal from the valve opening detector for detecting the opening and the control valve opening command signal are input to the servo valve that adjusts the amount of oil in the cylinder for driving the control valve for the turbine. An opening control circuit for outputting a command signal; and a correction control unit; and a turbine valve control device that controls a turbine control valve that is driven by high-pressure control hydraulic pressure, wherein the flow rate control circuit includes: A flow rate command value for the turbine control valve is calculated based on the turbine speed signal and the load signal and a flow rate command signal is output, and a control valve opening command signal is calculated based on the flow rate command signal. A control valve opening command signal calculation unit, wherein the opening control circuit subtracts the control valve opening feedback signal from the control valve opening command signal to calculate a deviation signal; and the deviation A servo amplifier for amplifying a signal, a constant generator for outputting a neutral point bias compensation value for compensating for a neutral point bias component added in a normal state in the servo valve, the neutral point bias compensation value, and the servo amplifier A servo circuit adding unit that calculates a total value of the output and outputs a servo valve opening command signal, and the correction control unit receives the control valve actual opening signal as an input, A degree-of-opening flow rate conversion unit that converts a degree signal into a flow rate equivalent signal and outputs an actual flow rate equivalent signal, and a correction circuit unit based on the actual flow rate equivalent signal. Added at the time of abnormality A correction value signal for compensating the neutral point bias, and outputs to at least one of the flow control circuit and the opening control circuit, characterized in that.

The turbine equipment according to the present invention includes a turbine, a turbine control valve that controls a flow rate of a working fluid of the turbine, a turbine control valve oil cylinder device that drives the turbine control valve, and the oil cylinder A high-pressure control oil generator for supplying the hydraulic oil, a high-pressure oil pump for feeding oil from the high-pressure control oil generator to the oil cylinder, a servo valve for adjusting the amount of oil in the oil cylinder, and the turbine control A valve opening detector for detecting the opening of the valve, a rotation speed measuring device for measuring the rotation speed of the turbine and generating a turbine speed signal, a load measuring device for measuring a load of the turbine and generating a load signal, and A flow rate control circuit that calculates a flow rate command value based on a turbine speed signal and a load signal and outputs a control valve opening command signal of the turbine control valve, and a control valve opening feedback signal from the valve opening detector And an opening control circuit that receives the control valve opening command signal and outputs the opening command signal to the servo valve, and a correction control unit, and controls the turbine control valve. A flow rate control circuit that calculates a flow rate command value of the turbine control valve based on the turbine speed signal and a load signal and outputs a flow rate command signal; and A control valve opening command signal calculation unit that calculates a control valve opening command signal based on the flow rate command signal, the opening control circuit from the control valve opening command signal to the control valve opening feedback signal A subtractor that calculates a deviation signal by reducing the value, a servo amplifier that amplifies the deviation signal, and a neutral point bias compensation value for compensating for a neutral point bias component that is normally added in the servo valve A constant generator for outputting, a servo circuit adding unit for calculating a total value of the neutral point bias correction value and the servo amplifier output and outputting a servo valve opening command signal, the correction control unit comprising: An opening flow rate conversion unit that receives the control valve actual opening signal, converts it into a flow rate equivalent signal and outputs an actual flow rate equivalent signal, and a correction circuit unit based on the actual flow rate equivalent signal, and the circuit unit, a correction value signal for compensating the neutral point bias component which is added at the time of abnormality in the servo valve, and outputs to at least one of the flow control circuit and the opening control circuit, and characterized in that To do.

  According to the present invention, even when the servo valve neutral point bias fluctuates during turbine operation, fluctuations in the actual opening of the control valve can be corrected and stable operation can be maintained.

It is a conceptual diagram which shows the relationship in the thermal power plant or nuclear power plant of 1st Embodiment of the turbine valve control apparatus which concerns on this invention. It is a block diagram which shows the structure of 1st Embodiment of the turbine valve control apparatus which concerns on this invention. It is a block diagram which shows the structure of 2nd Embodiment of the turbine valve control apparatus which concerns on this invention. It is a block diagram which shows the structure of 3rd Embodiment of the turbine valve control apparatus which concerns on this invention. It is a block diagram which shows the structure of 4th Embodiment of the turbine valve control apparatus which concerns on this invention. It is a block diagram which shows the structure of 5th Embodiment of the turbine valve control apparatus which concerns on this invention. It is a block diagram which shows the structure of 6th Embodiment of the turbine valve control apparatus which concerns on this invention. It is a block diagram which shows the structure of 7th Embodiment of the turbine valve control apparatus which concerns on this invention.

  Hereinafter, embodiments of a turbine valve control device according to the present invention will be described with reference to the drawings. Here, the same or similar parts are denoted by common reference numerals, and redundant description is omitted.

[First Embodiment]
(Description of configuration)
FIG. 1 is a conceptual diagram showing the relationship in the thermal power plant or nuclear power plant of the first embodiment of the turbine valve control device according to the present invention.

  FIG. 1 shows a case where the turbine system is a steam turbine. Therefore, the steam control valve 6 is the turbine control valve.

  The steam generated by the steam generator 1 flows into the steam turbine 2 via the main steam stop valve 5 and the steam control valve 6, and this thermal energy is converted into mechanical energy. Converted into energy.

  Here, the amount of steam that flows in is adjusted by the opening degree of the steam control valve 6. The steam that has worked in the steam turbine 2 flows into the condenser 3 and is cooled to become condensed water. The condensate is heated by a feed water heater (not shown) and sent again to the steam generator 1 by the feed water pump 4.

  The opening degree of the steam control valve 6 directly affects the rotation speed or output of the steam turbine 2, that is, the load, and high accuracy and responsiveness are required. For this reason, a drive device using a high-pressure hydraulic system is used. That is, it is driven by a device (hereinafter referred to as “regulator / valve oil cylinder device 8”) comprising a drive shaft directly connected to the steam control valve 6, a piston directly connected to the drive shaft, and a cylinder housing the piston.

  The hydraulic oil in the adjusting valve oil cylinder device 8 is sent to the adjusting valve oil cylinder device 8 via the high pressure oil pipe 13 by the oil pressure generator 11 and the high pressure oil pump 12. At this time, the servo valve 10 is connected to the upper and lower portions of the cylinder of the adjusting valve oil cylinder device 8 in order to adjust the oil amount above and below the piston 8 a in the adjusting valve oil cylinder device 8.

  The opening of the servo valve 10 is controlled by a signal from the steam control valve control device 100. As a result, the amount of oil above and below the piston in the control valve oil cylinder device 8 changes, and the opening of the steam control valve 6 is controlled. Is done. When the opening of the steam control valve 6 ends at a constant value, the servo valve 10 is in the neutral position.

  The steam control valve control device 100 uses the opening signal of the steam control valve 6 from the valve opening detector 9 and the turbine speed signal c and the load signal d from the rotational speed measuring device 14 and the load measuring device 15 as feedback signals. use. Specifically, the load measuring device 15 is a wattmeter or the like that measures a generator output.

  FIG. 2 is a block diagram showing the configuration of the first embodiment of the turbine valve control apparatus according to the present invention. As shown in the figure, the steam control valve control device 100 is roughly divided into a flow rate control circuit 110, an opening degree control circuit 120, and a correction control unit 130.

  Here, the flow rate control circuit 110 calculates a deviation of the set values of the turbine speed and the load based on the turbine speed signal c and the load signal d, multiplies it by a gain, and outputs a required flow rate signal 111 and The control flow rate calculation unit 111 has a control valve opening degree command signal calculation unit 112 that converts the required flow rate signal into the opening degree of the steam control valve 6 and outputs a steam control valve opening degree command signal e.

  The opening degree control circuit 120 includes a servo circuit subtraction unit 121, a servo amplifier 122, a constant generator 123, and a servo circuit addition unit 124.

  The servo circuit subtraction unit 121 inputs the steam control valve opening command signal e which is an output from the control valve opening command signal calculation unit 112 and the steam feedback valve 6 opening feedback signal b from the valve detector 9. As a result, the opening feedback signal b is subtracted from the steam control valve opening command signal e, and a deviation signal is output. This deviation signal is amplified by the servo amplifier 122. The constant generator 123 applies a constant current corresponding to canceling the neutral point bias in order to compensate for the neutral point bias for the servo valve 10.

  The servo circuit adding unit 124 adds a constant voltage from the constant generator 123 to the deviation signal amplified by the servo amplifier 122, and the result is a servo valve opening command signal that is an opening command signal of the servo valve 10. It outputs to the servo valve 10 as a.

  When the opening of the servo valve 10 is changed in response to the servo valve opening command signal a, the steam control valve 6 finally shifts to an opening corresponding to the opening command signal e from the flow control circuit 110. As a result, steam corresponding to the opening degree of the steam control valve 6 flows through the steam turbine 2 due to the steam control valve flow rate characteristics as shown in FIG.

  The correction control unit 130 includes an opening degree flow rate conversion unit 131 and a correction circuit unit 150, as shown in FIG. The correction circuit unit 150 is a part that processes the output of the opening flow rate conversion unit 131 and includes a correction circuit subtraction unit 132 and a first correction circuit addition unit 133.

  The opening flow rate conversion unit 131 receives the opening feedback signal b of the steam control valve 6 from the valve opening detector 9 and receives the relationship between the opening and flow rate of the steam control valve 6, that is, the steam control valve flow rate described above. A flow rate signal corresponding to the opening degree signal is output by a characteristic simulating the characteristic. The correction circuit subtraction unit 132 subtracts this output from the required flow rate signal that is the output of the required flow rate calculation unit 111 of the flow rate control circuit 110 and outputs a correction value signal corresponding to the flow rate.

  The first correction circuit adding unit 133 adds the required flow rate signal that is the output of the required flow rate calculating unit 111 of the flow rate control circuit 110 to the correction value signal corresponding to the flow rate from the correction circuit subtracting unit 132, and controls the control valve opening command A steam control valve opening degree command signal e to the opening degree control circuit 120 is set via the signal calculation unit 112.

(Description of action)
The present embodiment is mainly intended to correct the actual opening of the valve even when the neutral point fluctuation of the servo valve 10 occurs. As shown in FIG. 2, as a means for detecting a neutral point bias fluctuation of the servo valve 10 during actual operation, an opening degree flow rate conversion unit 131 that converts the actual opening degree of the steam control valve 6 into a flow rate equivalent signal is provided. The correction circuit subtraction unit 132 calculates the difference between the flow rate signal converted by the opening flow rate conversion unit 131 and the flow rate signal set value (the required flow rate signal that is the output of the required flow rate calculation unit 111). Further, the first correction circuit adding unit 133 adds this deviation and the flow rate signal set value (the required flow rate signal that is the output of the required flow rate calculating unit 111). As a result, the actual opening of the valve is corrected, and an opening corresponding to the set opening of the steam control valve 6 originally set by the flow rate setting signal can be obtained.

  Here, the present embodiment is effective when the control by the flow rate control circuit 110, which is a control circuit higher than the opening degree control circuit 120, is not substantially performed. In such a case, in the case of a steam turbine, for example, it is a case of a state of constant valve opening control called limiter operation.

  When the neutral point bias fluctuation occurs in the servo valve 10 due to some cause, the flow rate of the steam control valve 6 is different from the opening degree flow rate conversion unit due to the difference of the opening degree of the steam control valve 6 corresponding to the neutral point bias fluctuation amount. It is estimated that a difference from the flow rate set at 131 has occurred.

  At this time, the difference between the flow rate that is estimated to actually flow through the steam control valve 6 and the flow rate that should flow is the back flow calculated based on the opening feedback signal b that is a signal corresponding to the actual opening of the steam control valve 6. The correction value signal from the correction circuit subtraction unit 132 corresponds to the difference between the flow rates.

  Accordingly, the correction value signal corresponding to the flow rate is added to the flow rate setting signal by the first correction circuit adding unit 133, which corresponds to the necessary amount for correcting the steam control valve opening to the initially set opening. A flow command signal is output. This flow command signal is converted into a steam control valve opening command signal e in the control valve opening command signal calculation unit 112. The steam control valve opening command signal e is an opening command signal corresponding to a necessary amount for correcting the steam control valve opening to the initially set opening, and this signal is sent to the opening control circuit 120. This is the steam control valve opening command signal e.

(Explanation of effect)
As described above, according to the present embodiment, even when the neutral point fluctuation of the servo valve 10 occurs during the operation of the steam turbine 2, the opening / flow rate conversion unit 131 adjusts the opening / closing amount from the opening feedback signal b of the steam control valve 6. It is converted into a valve flow rate equivalent signal and the flow rate setting signal is corrected. Thereby, it becomes possible to maintain the opening degree of the predetermined steam control valve 6.

[Second Embodiment]
(Description of configuration)
FIG. 3 is a block diagram showing the configuration of the second embodiment of the turbine valve control apparatus according to the present invention.

  The present embodiment and the first embodiment are common to the flow rate control circuit 110 and the opening degree control circuit 120, and are the same in that the correction control unit 130 includes the opening degree flow rate conversion unit 131 and the correction circuit unit 150. However, the configuration of the correction circuit unit 150 is different.

  The correction circuit unit 150 of this embodiment includes a correction circuit subtraction unit 132, a correction circuit calculation unit 134, and a second correction circuit addition unit 135.

  The difference from the first embodiment is that the correction circuit unit 150 in the first embodiment outputs a flow rate signal to the flow rate control circuit 110, but the correction circuit unit 150 in the present embodiment is different from the opening degree control circuit 120. It is a point which outputs an opening correction signal.

  The correction circuit subtraction unit 132 outputs a correction value signal obtained by subtracting the flow rate signal of the opening flow rate conversion unit 131 from the required flow rate signal that is the output of the required flow rate calculation unit 111 of the flow rate control circuit 110.

  This correction value signal is a value having a linear relationship with the flow rate, and can be said to be a flow rate equivalent signal.

  The correction circuit calculation unit 134 performs a calculation to convert the correction value signal corresponding to the flow rate from the correction circuit subtraction unit 132 into a neutral point bias correction value of the servo valve 10.

  The second correction circuit adding unit 135 adds the neutral point bias correction value to the neutral point bias compensation value that is the output of the constant generator 123, and outputs a new neutral point bias compensation value.

(Description of action)
When the neutral point bias fluctuation occurs in the servo valve 10 due to some cause, the flow rate of the steam control valve 6 is different from the opening degree flow rate conversion unit due to the difference of the opening degree of the steam control valve 6 corresponding to the neutral point bias fluctuation amount. It is estimated that a difference from the flow rate set at 131 has occurred.

  The difference between the flow rate of the steam control valve at this time and the control target flow rate is a flow rate calculated backward based on the opening feedback signal b which is a signal corresponding to the actual opening of the steam control valve 6 and a flow rate setting signal. It is estimated from the difference from the required flow rate signal that is the output of the required flow rate calculation unit 111, that is, the signal from the correction circuit subtraction unit 132. Therefore, the signal from the correction circuit subtraction unit 132 is a linear signal with respect to the flow rate, and can be said to be a correction value signal corresponding to the flow rate.

  The correction value signal corresponding to the flow rate is converted into a neutral point bias correction value by the correction circuit calculation unit 134. The neutral point bias correction value is added to the neutral point bias compensation value output from the constant generator 123 by the second correction circuit adding unit 135 to become a new neutral point bias compensation value.

  The servo circuit adding unit 124 adds the new neutral point bias compensation value to the deviation signal amplified by the servo amplifier 122, and the result is a servo valve opening command signal that is an opening command signal of the servo valve 10. It outputs to the servo valve 10 as a.

  When the neutral point bias value of the servo valve 10 is constant, the output of the constant generator 123 is added to the command signal to the servo valve 10 to compensate for this neutral point bias value. Even when there is a fluctuation, the output of the opening control circuit 120 is maintained at the desired opening required value by adding a new neutral point bias compensation value that is corrected for the fluctuation. It is possible to obtain a predetermined valve opening degree.

(Explanation of effect)
As described above, according to the present embodiment, even when a neutral point fluctuation occurs in the servo valve 10 during the turbine operation, the servo valve 10 is obtained from the opening feedback signal b of the steam control valve 6 using the opening flow rate conversion unit 131. Since the neutral point bias compensation value is corrected, it becomes possible to maintain a predetermined valve opening degree.

[Third Embodiment]
(Description of configuration)
FIG. 4 is a block diagram showing the configuration of the third embodiment of the turbine valve control apparatus according to the present invention.

  This embodiment is the same as the second embodiment in that the flow rate control circuit 110 and the opening degree control circuit 120 are common and the correction control unit 130 includes the opening degree flow rate conversion unit 131 and the correction circuit unit 150. However, the configuration of the correction circuit unit 150 is different.

  The correction circuit unit 150 of the present embodiment includes a correction circuit subtraction unit 132, a correction circuit calculation unit 134, a correction circuit determination unit 136, a second correction circuit addition unit 135, and an alarm generator 137.

  The present embodiment is different in that a correction circuit determination unit 136 and an alarm generator 137 are provided after the correction circuit calculation unit 134.

  The correction circuit calculation unit 134 is the same as that of the second embodiment in that the correction value signal corresponding to the flow rate from the correction circuit subtraction unit 132 is converted into a neutral point bias correction value of the servo valve 10.

  The correction circuit determination unit 136 determines whether or not the neutral point bias correction value signal output from the correction circuit calculation unit 134 is within a predetermined range, and if it is within the predetermined range, this neutral point bias correction value. Is output to the second correction circuit adder 135 as it is.

  When the value is equal to or higher than the predetermined upper limit value or lower than the predetermined lower limit value, the correction circuit determination unit 136 determines that the degree of fluctuation of the neutral point bias of the servo valve 10 is abnormal and generates an abnormality determination signal as an alarm. To the device 137.

  Various determination methods can be used other than the generation of the alarm. For example, an upper limit value and a lower limit value may be used for display, and a predetermined value higher than the upper limit value and a predetermined value lower than the lower limit value may be used for interlock. Also, with respect to the processing of the neutral point bias correction value that is the output of the correction circuit computing unit 134 in the case of occurrence of an abnormality, a method of using the neutral point bias correction value as it is or a switching circuit (not shown) is provided. In the case of fluctuations greater than or equal to the value, a processing unit such as stopping the valve opening correction or tripping the turbine may be provided.

(Description of action)
When a neutral point bias fluctuation occurs in the servo valve 10, a servo valve neutral point bias correction signal is output from the correction circuit calculation unit 134 as in the second embodiment. If this value is greater than or equal to the predetermined upper limit value or less than the lower limit value, the correction circuit determination unit 136 outputs an abnormality determination signal based on the output value of the correction circuit calculator 134, and the alarm generator 137 In response to the judgment signal, an alarm is issued to alert the operator, etc., that there is an abnormal condition.

  As described above, the neutral point bias built in the servo valve is usually about 10% to 20% of the rated current. When this fluctuation is abnormally large, for example, when it exceeds 10%, There is a high possibility that a fatal abnormality has occurred in the servo valve such as foreign matter clogging, damage, stick, etc., not just the aforementioned fluctuation. That is, in such a situation, it is unlikely that normal valve opening control can be continued even if correction is performed.

  Therefore, when an alarm is issued, there is a high possibility that the neutral point bias fluctuation more than normally occurs in the servovalve. Therefore, the operator may take appropriate action or action appropriate to such a situation. it can.

(Explanation of effect)
As described above, according to the present embodiment, even when the neutral point fluctuation occurs in the servo valve 10 during the operation of the steam turbine 2, the correction circuit calculator 134 is used from the opening feedback signal b of the steam control valve 6. The neutral point bias compensation signal is corrected and the predetermined opening degree of the steam control valve 6 is maintained. Further, the alarm generator 137 allows the operator to take a response operation and a response action.

[Fourth Embodiment]
(Description of configuration)
FIG. 5 is a block diagram showing the configuration of the fourth embodiment of the turbine valve control apparatus according to the present invention.

  This embodiment is a modification of the third embodiment and a part of the correction circuit unit, and is otherwise the same as the third embodiment.

  This embodiment is the same as the third embodiment in that the flow rate control circuit 110 and the opening degree control circuit 120 are common, and the correction control unit 130 includes the opening degree flow rate conversion unit 131 and the correction circuit unit 150. However, the configuration of the correction circuit unit 150 is different.

  The correction circuit unit 150 according to this embodiment includes a correction circuit subtraction unit 132, a correction circuit calculation unit 134, a correction circuit determination unit 136, a second correction circuit addition unit 135, a correction circuit function generator 138, and a third correction circuit addition. Part 139. In other words, the alarm generator 137 is provided in the third embodiment, but in this embodiment, the correction circuit function generator 138 and the third correction circuit adder 139 are provided after the correction circuit determination unit 136 instead. The difference is that it is provided.

  The correction circuit determination unit 136 determines whether or not the neutral point bias correction value signal output from the correction circuit calculation unit 134 is within a predetermined range, and if it is within the predetermined range, this neutral point bias correction value. Is output to the second correction circuit adder 135 as it is.

  When the value is equal to or higher than the predetermined upper limit value or lower than the predetermined lower limit value, the correction circuit determination unit 136 outputs the second correction circuit addition unit 135 and inputs a predetermined treatment signal to the servo valve 10. The function generation command signal is output to the correction circuit function generator 138.

  The correction circuit function generator 138 receives the function generation command signal and outputs a treatment signal that changes with time. The third correction circuit addition unit 139 outputs the treatment signal to the second correction circuit addition unit 135. Is output to the servo circuit adding unit 124 of the opening degree control circuit 120.

  The servo circuit adding unit 124 adds the output of the third correction circuit adding unit 139 to the deviation signal amplified by the servo amplifier 122, and the result is the servo valve opening which is the opening command signal of the servo valve 10. A degree command signal a is output to the servo valve 10.

  In general, the response frequency f1 of the servo valve 10 alone is sufficiently larger than the response frequency f2 of the system including the adjusting valve oil cylinder device 8. That is, if there is a frequency region that is smaller than f1 and larger than f2, and the signal of the frequency f in this region is included in the output signal of the opening degree control circuit 120, the servo valve 10 responds to this, but the steam control valve 6 Does not respond and does not affect turbine speed or load.

  Therefore, the time-varying signal is a small amplitude signal (dither signal) having a frequency f smaller than f1 and larger than f2.

  As a means for protecting the hydraulic control system equipment and piping including the servo valve 10 and effectively operating the high frequency signal to the servo valve, the high frequency signal input to the servo valve 10 is one of the following, or It may be a combination.

  (A) A frequency within a range that is less than the upper limit of the frequency that can be responded by the servo valve 10 alone and is sufficiently larger than the upper limit of the frequency that can be responded of the system that includes the adjustable valve oil cylinder device 8, and changes periodically. Current value that changes in frequency or periodically, or an input in which both frequency and current value change periodically.

  (B) An input having a smooth continuous waveform such as a sine curve instead of a rectangular wave in order to minimize the influence of hydraulic pressure on pulsation.

  (C) In the above (a) or (b), the high frequency signal to the servo valve is intermittently or intermittently input at a constant time interval.

(Description of action)
When a neutral point bias fluctuation occurs in the servo valve 10, a servo valve neutral point bias correction signal is output from the correction circuit calculation unit 134 as in the third embodiment. The correction circuit determination unit 136 outputs the neutral point bias correction signal to the second correction circuit addition unit 135, and when this value is greater than or equal to a predetermined value, the correction circuit determination unit 136 A function generation command signal is output to the correction circuit function generator 138 when a predetermined treatment signal needs to be input to the servo valve 10. The correction circuit function generator 138 outputs a minute amplitude signal (dither signal) having a frequency at which the servo valve 10 responds but the steam control valve 6 does not respond, and a third correction circuit adder 139, a servo circuit adder Since the servo valve 10 is output to the servo valve 10 via 124 and responds to this, a slight change in the opening of the servo valve 10 occurs.

  When the neutral point variation of the servo valve 10 occurs, there is a possibility of a neutral point bias variation due to an increase in sliding resistance of internal components such as a spool of the servo valve 10 and a stick of a dynamic part in the servo valve 10.

  Therefore, especially when the above phenomenon is caused by a large internal sliding resistance or the like, adding the dither signal as described above eliminates the cause such as releasing the dynamic part from the stick. The fluctuation of the neutral point bias of the valve can be repaired. Further, during this time, the adjustable valve oil cylinder device 8 side does not respond in terms of frequency response characteristics, and therefore, favorable operation of the turbine is continued without affecting the controllability of the steam turbine 2.

(Explanation of effect)
As described above, according to the present embodiment, even when the neutral point fluctuation occurs in the servo valve 10 during operation of the steam turbine 2, the opening degree flow rate conversion unit 131 is used from the opening degree feedback signal b of the steam control valve 6. Then, the neutral point bias setting signal is corrected and the predetermined opening degree of the steam control valve 6 is maintained. Furthermore, by outputting a treatment signal from the correction circuit function generator 138, the neutral point bias generation factor in the servo valve 10 is removed, and stable operation is possible.

[Fifth Embodiment]
(Description of configuration)
FIG. 6 is a block diagram showing the configuration of the fifth embodiment of the turbine valve control apparatus according to the present invention.

  This embodiment is the same as the fourth embodiment in that the flow rate control circuit 110 and the opening degree control circuit 120 are common, and the correction control unit 130 includes the opening degree flow rate conversion unit 131 and the correction circuit unit 150. However, the configuration of the correction circuit unit 150 is different.

  The correction circuit unit 150 of this embodiment includes a correction circuit subtraction unit 132, a correction circuit calculation unit 134, a correction circuit determination unit 136, a second correction circuit addition unit 135, a correction circuit valve opening setting unit 140, and a fourth correction. A circuit adder 141 is included. That is, in the fourth embodiment, the correction circuit function generator 138 and the third correction circuit addition unit 139 are provided in the subsequent stage of the correction circuit determination unit 136. However, in this embodiment, the correction circuit valve opening setting unit 140 is provided. The fourth correction circuit adding unit 141 is provided, and the fourth correction circuit adding unit 141 is added to the opening command signal that is an output from the flow rate control circuit 110 to the opening control circuit 120.

  The correction circuit determination unit 136 determines whether or not the neutral point bias correction value signal output from the correction circuit calculation unit 134 is within a predetermined range, and if it is within the predetermined range, this neutral point bias correction value. Is output to the second correction circuit adder 135 as it is.

  When the value is equal to or greater than the predetermined upper limit value or equal to or less than the predetermined lower limit value, the correction circuit determination unit 136 outputs to the second correction circuit addition unit 135 and requires the operation of the steam control valve 6 to open the valve opening. The change generation command signal is output to the correction circuit valve opening setting device 140.

  The correction circuit valve opening setting device 140 receives the valve opening change generation command signal from the correction circuit determination unit 136, and outputs a signal that changes with time so that the steam control valve 6 performs the valve test operation. It outputs to the correction circuit addition part 141. The fourth correction circuit adding unit 141 generates a steam control valve opening command signal e of the steam control valve 6 that is an output signal from the control valve opening command signal calculation unit 112 of the flow rate control circuit 110 to the opening control circuit 120. The time-varying output from the correction circuit valve opening setting unit 140 is added to obtain a new opening command signal for the steam control valve 6.

  The time-varying signal is a signal indicating a change in the opening of the steam control valve 6 with respect to a time corresponding to a change in the opening of the steam control valve 6 during a normal valve test. Specifically, the steam control valve is finely closed, semi-closed or fully closed, and an opening setting for returning to the original valve opening is output.

(Description of action)
When a neutral point bias fluctuation occurs in the servo valve 10, a servo valve neutral point bias correction signal is output from the correction circuit computing unit 134, as in the fourth embodiment. The correction circuit determination unit 136 outputs the neutral point bias correction signal to the second correction circuit addition unit 135, and when this value is greater than or equal to a predetermined value, the correction circuit determination unit 136 The operation of the steam control valve 6 is required, and a valve opening change generation command signal is output to the correction circuit valve opening setting unit 140.

  From the correction circuit valve opening setting unit 140, the opening setting for causing the steam control valve to be finely closed, semi-closed or fully closed and returning to the original valve opening is output to the fourth correction circuit adding unit 141. The fourth correction circuit addition unit 141 adds the opening setting from the correction circuit valve opening setting unit 140 to the output of the control valve opening command signal calculation unit 112, and controls the opening as a new opening command signal. Output to the circuit.

  When the neutral point fluctuation of the servo valve occurs, the servo valve 10 is operated by outputting the opening setting signal from the correction circuit valve opening setting unit 140 to the fourth correction circuit adding unit 141. As a result, The steam control valve 6 also actually operates. In particular, when the fluctuation of the neutral point bias is caused by an increase in the internal sliding resistance of the servo valve 10, the factor is eliminated and the fluctuation of the neutral point bias of the servo valve 10 can be repaired. In this case, since the oil cylinder side also responds, the operation of both the servo valve 10 and the steam control valve 6 can be confirmed.

(Explanation of effect)
As described above, according to the present embodiment, the flow rate setting signal is corrected using the opening flow rate conversion unit 131 even when a neutral point fluctuation occurs in the servo valve 10 during turbine operation. Thus, the predetermined opening degree of the steam control valve 6 can be maintained, and the neutral point bias fluctuation factor can be removed by the actual operation of the servo valve 10 and the steam control valve 6.

[Sixth Embodiment]
(Description of configuration)
FIG. 7 is a block diagram showing the configuration of the sixth embodiment of the turbine valve control apparatus according to the present invention.

  This embodiment is a modification of the fifth embodiment, and has the same configuration as that of the fifth embodiment except for the parts described below.

  In the fifth embodiment, when the correction circuit determination unit 136 determines that the neutral point bias correction value that is the output of the correction circuit calculation unit 134 is not within a predetermined range, the correction circuit valve opening setting unit 140 A valve opening change generation command signal is output, and the correction circuit valve opening setting unit 140 receives the valve opening change generation command signal from the correction circuit determination unit 136 so that the steam control valve 6 performs a valve test operation. In this configuration, a signal that changes with time is output to the fourth correction circuit adder 141.

  On the other hand, in the present embodiment, a correction circuit timer 142 and an OR circuit 143 are provided. When the correction circuit determination unit 136 determines that the neutral point bias correction value that is the output of the correction circuit calculation unit 134 is not within the predetermined range, the correction circuit valve opening setting unit 140 is immediately instructed to generate a valve opening change command. Instead of outputting a signal, the signal is once input to the OR circuit 143. Further, even when the preset correction circuit timer 142 reaches the set time, a signal to that effect is issued and input to the OR circuit 143. In the OR circuit 143, when either the valve opening change generation command signal output from the correction circuit timer 142 or the output of the correction circuit timer 142 is input, the valve opening is set in the correction circuit valve opening setting unit 140. A change generation command signal is output.

  The subsequent configuration is the same as that of the fifth embodiment.

(Description of action)
When a neutral point bias fluctuation occurs in the servo valve 10, a servo valve neutral point bias correction signal is output from the correction circuit computing unit 134, as in the fifth embodiment. The correction circuit determination unit 136 outputs this neutral point bias correction signal to the second correction circuit addition unit 135, and when this value is greater than or less than a predetermined value, the operation of the steam control valve 6 is performed. A function generation command signal is output to the OR circuit 143 as necessary.

  When the fluctuation of the neutral point bias of the servo valve 10 is caused by the large internal sliding resistance or the like, the factor is eliminated earlier by the action of the correction circuit timer 142, and the fluctuation of the neutral point bias of the servo valve Can be repaired.

(Explanation of effect)
As described above, according to this embodiment, even when a neutral point fluctuation occurs in the servo valve 10 during turbine operation, the flow rate setting signal is corrected using the opening flow rate conversion unit 131. The opening degree can be maintained.

  In addition to the configuration of the fifth embodiment, the preventive maintenance can be further enhanced by adding a correction circuit timer 142 and an OR circuit 143 to the configuration.

[Seventh Embodiment]
(Description of configuration)
FIG. 8 is a block diagram showing the configuration of the seventh embodiment of the turbine valve control apparatus according to the present invention.

  This embodiment is a modification of the fourth embodiment, and a switch unit 144 exists between the correction circuit determination unit 136 and the correction circuit function generator 138.

  The switch unit 144 holds the treatment signal from the correction circuit determination unit 136. The switch unit 144 receives the two signals, the treatment signal from the correction circuit determination unit 136 and the external signal, and outputs a command signal to the correction circuit function generator 138 under these AND conditions. The external signal may be an operation input from an input operator or the like, or may be a signal indicating that the plant has stopped.

(Description of action)
When the correction circuit determining unit 136 determines that the neutral point bias correction value from the correction circuit calculating unit 134 is not within the predetermined range, the correction circuit determining unit 136 immediately outputs a treatment signal output command to the correction circuit function generator 138. Instead, it is temporarily output to the switch unit 144 and the command signal is held by the switch unit 144.

  Thereafter, when the plant is stopped and a signal indicating that the plant is stopped is input to the switch unit, or when the operator inputs the AND condition in the switch unit 144, the result is that the turbine is stopped. A signal is emitted continuously or intermittently. As described above, since the high-frequency signal is input to the servo valve 10 only when the turbine is stopped, the influence on the hydraulic control system equipment and piping including the steam control valve 6 and the servo valve 10 is minimized.

  About an effect | action, it is the same as that of 4th Embodiment.

(Explanation of effect)
When high-frequency signal input to the servo valve 10 is performed during turbine operation, the control valve oil cylinder device 8 does not move, so there is no problem in control, but there is a possibility that the hydraulic system may be affected (for example, hydraulic pressure) This is very effective for pulsation caused by resonance of the piping system and high-frequency signal).

  In other words, when a waveform on a pulse is inputted so that only the spool of the servo valve 10 is actually operated, the hydraulic pressure may be sharpened. In the worst case, there is a possibility of damaging the hydraulic equipment such as the servo valve 10 and the hydraulic piping due to shock waves such as oil hammer. However, according to the above method, the hydraulic pressure is difficult to be sharpened. Can be solved.

  As described above, according to this embodiment, even when a neutral point fluctuation occurs in the servo valve 10 during turbine operation, the flow rate setting signal is corrected using the opening flow rate conversion unit 131. It is possible to solve the problem and to obtain a predetermined valve opening degree. Further, since the operation of the servo valve 10 by the treatment is performed after the plant is stopped, the influence on the equipment or the like is minimized.

[Other Embodiments]
In the above embodiment, the case of the steam control valve has been described, but the auxiliary valve of the main steam stop valve, the fuel control valve that controls the flow rate of the turbine working fluid in the gas turbine and the combined cycle, and the fuel distribution control valve, It is the same.

  Also, these embodiments are presented as examples and are not intended to limit the scope of the invention.

  For example, the correction operation is a feedback of the flow rate equivalent signal to the flow rate control circuit 110 in the first embodiment, a feedback operation to the opening command signal as in the fifth and sixth embodiments, or the second to second. Like what is fed back to the servo valve opening command signal “a” as in the fourth embodiment, the feedback portions may be combined not only as individual portions, but also as a combination thereof.

  Furthermore, these embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the invention described in the claims and equivalents thereof as well as included in the scope and gist of the invention.

DESCRIPTION OF SYMBOLS 1 Steam generator 2 Steam turbine 3 Condenser 4 Water supply pump 5 Main steam stop valve 6 Steam control valve (turbine control valve)
7 Generator 8 Adjustable valve oil cylinder device (turbine control valve oil cylinder device)
8a Piston 9 Valve opening detector 10 Servo valve 11 Oil pressure generator 12 High pressure oil pump 13 High pressure oil piping 14 Rotational speed measuring device 15 Load measuring device 100 Steam control valve control device (turbine valve control device)
DESCRIPTION OF SYMBOLS 110 Flow control circuit 111 Required flow rate calculation part 112 Control valve opening degree command signal calculation part 120 Opening degree control circuit 121 Servo circuit subtraction part 122 Servo amplifier 123 Constant generator 124 Servo circuit addition part 130 Correction control part 131 Opening flow rate conversion part 132 Correction circuit subtraction unit 133 First correction circuit addition unit 134 Correction circuit calculation unit 135 Second correction circuit addition unit 136 Correction circuit determination unit 137 Alarm generator 138 Correction circuit function generator 139 Third correction circuit addition unit 140 Correction circuit valve opening setting unit 141 Fourth correction circuit adding unit 142 Correction circuit timer 143 OR circuit 144 Switch unit 150 Correction circuit unit a Servo valve opening command signal b Opening feedback signal (control valve practicality signal)
c Turbine speed signal d Load signal e Steam control valve opening command signal (control valve opening command signal)

Claims (11)

A flow rate control circuit that calculates a flow rate command value based on the turbine speed signal and the load signal and outputs a control valve opening command signal of the turbine control valve, and a valve opening detector that detects the turbine control valve opening degree An opening degree control circuit for outputting an opening degree command signal to a servo valve that receives the control valve opening degree feedback signal and the control valve opening degree command signal and adjusts the amount of oil in the cylinder for driving the turbine control valve, and correction A turbine control unit for controlling a turbine control valve driven by high-pressure control oil pressure,
The flow rate control circuit
A required flow rate calculation unit that calculates a flow rate command value of the turbine control valve based on the turbine speed signal and a load signal and outputs a flow rate command signal;
A control valve opening command signal calculation unit for calculating a control valve opening command signal based on the flow command signal;
With
The opening degree control circuit is
A subtractor for calculating a deviation signal by subtracting the control valve opening feedback signal from the control valve opening command signal;
A servo amplifier for amplifying the deviation signal;
A constant generator for outputting a neutral point bias compensation value for compensating for a neutral point bias component that is normally added in the servo valve;
A servo circuit adding unit that calculates a total value of the neutral point bias compensation value and the servo amplifier output and outputs a servo valve opening command signal;
With
The correction control unit
An opening flow rate conversion unit that receives the control valve actual opening signal as an input, converts the control valve actual opening signal into a flow rate equivalent signal, and outputs an actual flow rate equivalent signal;
A correction circuit unit based on the actual flow rate equivalent signal;
The have the the correction circuit unit, a correction value signal for compensating the neutral point bias component which is added at the time of abnormality in the servo valve, at least one of an output of the flow control circuit and the opening control circuit To
A valve control apparatus for a turbine characterized by the above. The correction circuit unit includes:
A correction circuit subtracting unit that inputs the flow rate command signal and the actual flow rate equivalent signal, and subtracts the actual flow rate equivalent signal from the flow rate command signal;
A first correction circuit addition unit that receives the output of the correction circuit subtraction unit and the flow rate command signal and outputs a total value thereof;
The valve control device for a turbine according to claim 1, comprising: The correction circuit unit includes:
A correction circuit subtracting unit that inputs the flow rate command signal and the actual flow rate equivalent signal, and subtracts the actual flow rate equivalent signal from the flow rate command signal;
The correction circuit subtracting unit output as an input, a correction circuit arithmetic unit that outputs the neutral point bias compensation value correction signal,
A second correction circuit adding unit that adds the neutral point bias compensation value correction signal to the constant generator output and outputs the signal to the servo circuit adding unit;
The valve control device for a turbine according to claim 1, comprising: The correction circuit unit includes:
It is determined whether or not the neutral point bias compensation value correction signal is within a predetermined range, and if it is within the predetermined range, the value of the neutral point bias compensation value correction signal is output to the second correction circuit adding unit. A correction circuit determination unit that generates an abnormality determination signal when not in the predetermined range;
An alarm generator for issuing an alarm in response to the abnormality determination signal;
The turbine valve control device according to claim 3, further comprising: The correction circuit unit includes:
It is determined whether or not the neutral point bias compensation value correction signal is within a predetermined range, and if it is within the predetermined range, the value of the neutral point bias compensation value correction signal is output to the second correction circuit adding unit. A correction circuit determination unit that generates an abnormality determination signal when not in the predetermined range;
In response to the abnormality determination signal, a frequency signal in a region that is lower than the frequency that can be responded by the servo valve alone and sufficiently larger than the frequency that can be responded by the system including the oil cylinder device of the turbine control valve is generated. A correction circuit function generator;
A third correction circuit adder for adding the output from the correction circuit function generator to the second correction circuit adder output;
The turbine valve control device according to claim 3, further comprising:   6. The turbine valve control device according to claim 5, wherein the correction circuit function generator generates the high-frequency signal only when the turbine is stopped.   6. The correction circuit function generator is characterized in that at least one of a frequency and a current value periodically changes within a predetermined range, and generates the intermittent high frequency signal at a constant time interval. The turbine valve control device according to claim 6.   The said correction circuit function generator produces | generates the said high frequency signal which is a sine wave-like continuous waveform, and is intermittent at a fixed time interval, It is any one of Claim 5 thru | or 7 characterized by the above-mentioned. Turbine valve control device. The correction circuit unit includes:
It is determined whether or not the neutral point bias compensation value correction signal is within a predetermined range, and if it is within the predetermined range, the value of the neutral point bias compensation value correction signal is output to the second correction circuit adding unit. A correction circuit determination unit that generates an abnormality determination signal when not in the predetermined range;
A correction circuit valve opening degree setting unit that receives the abnormality determination signal and issues a valve opening requirement value for a time change;
A fourth correction circuit adding unit for adding the output from the correction circuit valve opening setting unit to the control valve opening command signal;
The turbine valve control device according to claim 3, further comprising: The correction circuit unit includes:
An OR circuit that receives the abnormality determination signal and the timer output as inputs and outputs them according to their OR conditions,
The correction circuit valve opening setting unit receives an output from the OR circuit,
The turbine valve control device according to claim 9. A turbine,
A turbine control valve for controlling the flow rate of the working fluid of the turbine;
A turbine control valve cylinder device for driving the turbine control valve;
A hydraulic pressure generator for supplying hydraulic oil for the oil cylinder;
A high pressure oil pump for feeding oil from the oil pressure generator to the oil cylinder;
A servo valve for adjusting the amount of oil in the oil cylinder;
A valve opening detector for detecting the opening of the turbine control valve;
A rotational speed measuring device for measuring the rotational speed of the turbine and generating a turbine speed signal;
A load measuring device for measuring a load of the turbine and generating a load signal;
A flow rate control circuit for calculating a flow rate command value based on the turbine speed signal and the load signal and outputting a control valve opening degree command signal for the turbine control valve, and a control valve opening degree feedback signal from the valve opening degree detector And a valve control device for controlling the turbine control valve, which has an opening control circuit that receives the control valve opening command signal and outputs an opening command signal to the servo valve, and a correction control unit. When,
A turbine facility comprising:
The flow rate control circuit
A required flow rate calculation unit that calculates a flow rate command value of the turbine control valve based on the turbine speed signal and a load signal and outputs a flow rate command signal;
A control valve opening command signal calculation unit for calculating a control valve opening command signal based on the flow command signal;
With
The opening degree control circuit is
A subtractor for calculating a deviation signal by subtracting the control valve opening feedback signal from the control valve opening command signal;
A servo amplifier for amplifying the deviation signal;
A constant generator for outputting a neutral point bias compensation value for compensating for a neutral point bias component that is normally added in the servo valve;
A servo circuit adding unit that calculates a total value of the neutral point bias correction value and the servo amplifier output and outputs a servo valve opening command signal;
With
The correction control unit
The control valve actual opening signal as an input, an opening flow rate conversion unit for converting into a flow rate equivalent signal and outputting an actual flow rate equivalent signal;
A correction circuit unit based on the actual flow rate equivalent signal;
The have the the correction circuit unit, a correction value signal for compensating the neutral point bias component which is added at the time of abnormality in the servo valve, at least one of an output of the flow control circuit and the opening control circuit To
Turbine equipment characterized by that.

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