JP5829212B2 - Manufacturing method of microscope optical system - Google Patents

Description

The present invention relates to a method for manufacturing a microscope optical system.

  When a diffractive optical element is used in the microscope optical system, it has advantages in correcting chromatic aberration as compared with the prior art, and a microscope objective lens having high optical performance and low cost can be designed. However, when such a diffractive optical element is used in a microscope optical system, not only light of the order that contributes to image formation but also light of other orders (hereinafter referred to as “unnecessary order light”) Since it permeates, flare occurs. In order to make the flare caused by unnecessary-order light in such a diffractive optical element inconspicuous, it is known that the spot of unnecessary-order light on the image plane may be enlarged (see, for example, Patent Document 1).

Japanese Patent Laid-Open No. 11-125709

  However, when a diffractive optical element is used for the objective lens of the microscope optical system, flare caused by unnecessary orders of light in the diffractive optical element cannot be effectively suppressed unless the design is performed in consideration of the characteristics of the microscope optical system. There was a problem.

  The present invention has been made in view of such a problem, and an object of the present invention is to provide a microscope optical system with less flare caused by unnecessary-order light of a diffractive optical element.

の条件を満足することを特徴とする。 In order to solve the above-described problems, a microscope optical system manufacturing method according to a first aspect of the present invention includes a diffractive optical element, an objective lens that condenses light from an object into a substantially parallel light beam, and the objective lens. a manufacturing method of a microscope optical system for chromatic and second objective lenses, a a substantially condenses the parallel beam to form an image of the object from the lens, using the m-order light of the diffraction optical element for imaging In this case, the angle at which light of the maximum NA emitted from an object located on the optical axis is incident on the diffractive optical element and light of a different order from the m-order light exiting from the diffractive optical element is incident on the second objective lens. Is θ and the diameter of the entrance pupil to the second objective lens is D [mm],

It satisfies the following conditions.

の条件を満足することを特徴とする。 A method for manufacturing a microscope optical system according to a second aspect of the present invention includes a diffractive optical element, an objective lens that collects light from an object to form a substantially parallel light beam, and a substantially parallel light beam from the objective lens. the a second objective lens and the method of the microscope optical system that have a for forming an image of an object focused on the optical diffraction optical element of the maximum NA coming from objects located on the optical axis Of the diffracted light that enters and exits from the diffractive optical element, the difference between the emission angle of the light of the order used for imaging and the emission angle of the unnecessary light is δθ, and the light of the order used for imaging The exit height is hdo, the exit angle is θdoe, the diameter of the entrance pupil to the second objective lens is D [mm], and the lens constituting the objective lens is a lens located on the image side from the diffractive optical element. When the focal length of the lens group is f1, the following formula

It satisfies the following conditions.

In such a method of manufacturing a microscope optical system, the diffractive optical element is preferably a close-contact multilayer diffractive optical element.

Further, in such a method for manufacturing a microscope optical system, the diffractive optical element has a diffraction grating pattern formed on a joint surface between resin layers having different refractive indexes, and each of the resin layers is disposed on a flat substrate. It is preferable.

In such a method of manufacturing a microscope optical system , it is preferable that a lens group including lenses on the image side of the diffractive optical element among lenses constituting the objective lens has a negative refractive power.

  If the present invention is configured as described above, it is possible to provide a microscope optical system with little flare caused by unnecessary-order light of the diffractive optical element.

It is explanatory drawing for demonstrating the structure of a microscope optical system. It is explanatory drawing which shows the relationship between the diffractive optical element and 2nd lens group which comprise an objective lens, and a 2nd objective lens. It is explanatory drawing for demonstrating the structure of a microscope system. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a lens configuration diagram showing a configuration of a microscope optical system according to a first example, where (a) shows the whole, (b) shows an objective lens, and (c) shows a second objective lens and a prism. It is a spot diagram of the microscope optical system concerning the 1st example, and (a) shows 0th order light and (b) shows secondary light. It is a lens block diagram which shows the structure of the microscope optical system which concerns on 2nd Example, (a) shows the whole, (b) shows an objective lens, (c) shows a 2nd objective lens and a prism. It is a spot diagram of the microscope optical system which concerns on 2nd Example, (a) shows 0th-order light, (b) shows secondary light. It is a lens block diagram which shows the structure of the microscope optical system which concerns on 3rd Example, Comprising: (a) shows the whole, (b) shows an objective lens, (c) shows a 2nd objective lens and a prism. It is a spot diagram of the microscope optical system which concerns on 3rd Example, Comprising: (a) shows 0th-order light and (b) shows secondary light. It is a lens block diagram which shows the structure of the microscope optical system which concerns on 4th Example, (a) shows the whole, (b) shows an objective lens, (c) shows a 2nd objective lens and a prism. It is a spot diagram of the microscope optical system which concerns on 4th Example, Comprising: (a) shows 0th-order light and (b) shows secondary light. It is a lens block diagram which shows the structure of the microscope optical system which concerns on 5th Example, Comprising: (a) shows the whole, (b) shows an objective lens, (c) shows a 2nd objective lens and a prism. It is a spot diagram of the microscope optical system which concerns on 5th Example, Comprising: (a) shows 0th-order light, (b) shows secondary light. It is a lens block diagram which shows the structure of the microscope optical system which concerns on 6th Example, (a) shows the whole, (b) shows an objective lens, (c) shows a 2nd objective lens and a prism. It is a spot diagram of the microscope optical system which concerns on 6th Example, Comprising: (a) shows 0th-order light and (b) shows secondary light.

  In the microscope optical system, there is a problem that flare is easily noticeable by using dark field illumination. On the other hand, since it is an optical system including the illumination system, a very bright light source is inside and outside the field of view and does not become a flare source. However, when a diffractive optical element is used in this microscope optical system, unnecessary order light of the diffractive optical element becomes a problem in addition to the flare caused by normal multiple reflection. In such flare caused by unnecessary order light, the amount of flare is determined by the diffraction efficiency of the order, and the illuminance is determined by the size of the spot on the imaging surface. Therefore, in a microscope optical system using a diffractive optical element, it is necessary to increase the diffraction efficiency of light of the use order that contributes to image formation and to increase the flare spot due to light of unnecessary order.

  In general, in a microscope optical system, a light beam from an object is made into a substantially parallel light beam by an infinite objective lens, and an image is formed by a second objective lens. If a CCD camera is placed at the imaging position of the second objective lens, an image can be acquired, and if an eyepiece is placed, visual observation is possible, and switching between image acquisition and visual observation is possible. In such a microscope optical system, it is more suitable to use a CCD camera that can adjust the imaging time longer for observing a dark object, but flare tends to be a problem. Since the microscope optical system is an enlargement system, the object height is small, and even if the object height is different, the optical path difference in the objective lens is small. Therefore, when considering flare due to a diffractive optical element, there is no problem considering only on-axis object light.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. First, description will be made based on the microscope optical system MS shown in FIG. This microscope optical system MS includes an objective lens OL that collects light from an object to form a substantially parallel light beam, and a second objective lens IL that collects the substantially parallel light beam and forms an image of the object. It is configured. The objective lens OL is configured to condense the light from the object into a convergent light beam, and then convert the converged light beam into a substantially parallel light beam. The position where the light from the object is the convergent light beam. The diffractive optical element GD is disposed on the surface. Therefore, in the following description, a lens group that is configured with a lens that is closer to the object side than the diffractive optical element GD is referred to as a first lens group G1, and a lens group that is configured with a lens that is located on the image side relative to the diffractive optical element GD. Is referred to as a second lens group G2.

  The diffractive optical element GD (diffractive optical surface) has a negative dispersion value (Abbe number = −3.453 in the examples described later), large dispersion, and anomalous dispersion (partial dispersion ratio in the examples described later). (Ng−nF) / (nF−nC) = 0.2956) is strong, and therefore has strong chromatic aberration correction capability. The Abbe number of the optical glass is usually about 30 to 80, but the Abbe number of the diffractive optical element has a negative value as described above. In other words, the diffractive optical surface of the diffractive optical element GD has a dispersion characteristic that is opposite to that of ordinary glass (refractive optical element), and the refractive power decreases as the wavelength of light decreases, and the longer the wavelength of light, the greater the bending property. Have. Therefore, a large achromatic effect can be obtained by combining with an ordinary refractive optical element. Therefore, by using the diffractive optical element GD, it becomes possible to correct chromatic aberration that cannot be achieved with ordinary optical glass.

  As shown in FIG. 1, it can be seen that in order to increase the spot on the imaging plane of the light of unnecessary order generated by the diffractive optical element GD, it is sufficient to increase the incident angle θ to the second objective lens IL. . Since the objective lens OL and the second objective lens IL are substantially parallel, the incident angle with respect to the second objective lens IL is approximately 0 ° in the case of light emitted from an on-axis object. Further, since the brighter image is formed as the image-side numerical aperture (NA) of the microscope optical system MS is larger, the flare is less noticeable.

  In the microscope optical system MS shown in FIG. 1, the incident angle of the unnecessary order light generated in the diffractive optical element GD by the light beam having the maximum NA out of the light radiated from the on-axis object is θ relative to the second objective lens IL. When the focal length of the second objective lens IL is f2, the height from the optical axis of the spot formed on the image plane by the unnecessary order light is represented by f2 tan θ. As a result of the inventor's trial production, when the image side NA is 0.015, when the light from the object is collected by an optical system having a resolution normally required for a microscope, it is caused by light of an unnecessary order on the image plane. It has been found that flare is inconspicuous if the spot is increased to a radius of about 2.0 mm. Therefore, it can be seen that it is sufficient that the incident angle θ of the light of the unnecessary order due to the light beam having the maximum NA to the second objective lens IL satisfies the following expression (a).

  Here, NA in the formula (a) is NA on the image side.

  Further, when this equation (a) is expressed by the diameter D [mm] (D = 2 × f2 × NA) of the entrance pupil to the second objective lens IL, it is expressed as the following equation (1). That is, if unnecessary order light is incident on the second objective lens IL at an incident angle θ represented by the conditional expression (1), when NA = 0.015, the radius of the spot becomes 2.0 mm or more, and flare Can be made inconspicuous. The unnecessary order light is light of orders other than the order used for imaging an object in the microscope optical system MS among the diffracted light emitted from the diffractive optical element GD. Therefore, if the diffracted light used for image formation is m-order light, unnecessary-order light can be expressed as m-1 order light or m + 1 order light. Further, since the m-2 order light and the m + second order light having a larger order difference than the m order light have a larger optical path than the m-1 order light and the m + 1 order light, the m-1 order light and the m + 1 order light are different. The spot diameter is larger than the next light. Therefore, in the present invention, the m-1st order light and the m + 1st order light that are the diffracted lights closest to the mth order light will be described, and the image of the diffracted light having a larger difference from the mth order light will be a larger spot. Since it is self-evident, a detailed explanation is omitted.

  As shown in FIG. 2, the focal length of a lens group (second lens group G2) composed of lenses located on the image side of the diffractive optical element GD is f1, and the light beam having the maximum NA emitted from the on-axis object is diffracted optically. Of the diffracted light that enters the element GD and exits from the diffractive optical element GD, the emission angle of the light of the order used for image formation is θdoe, and the height at which this maximum NA light beam exits the diffractive optical element GD Is the focus, the light beam emitted from the diffractive optical element GD is focused at a point (point A shown in FIG. 2) separated by hdoe / tan (θdoe), and the objective lens OL and the second objective lens IL. Since A is a parallel system, the point A is the focal position of the second lens group G2.

  In the microscope optical system MS, the lens group on the image side (second lens group G2) from the diffractive optical element GD often has a negative refractive power. In this case, the point A is a lens group having a focal length f1 ( This is the virtual image position for the second lens group G2). At this time, a ray height h ′ at point A of a ray of unnecessary order light (assuming that it differs from the imaging ray by an angle δθ as shown in FIG. 2) is expressed by the following equation (b).

  In addition, among the lens groups constituting the objective lens OL, the exit angle of the light beam by the unnecessary order light that exits the lens group (second lens group G2) configured by the lens disposed on the image side from the diffractive optical element GD. That is, the incident angle θ with respect to the second objective lens IL is expressed as the following equation (c).

  As described above, when θ represented by the equation (c) is substituted into the equation (1), the following equation (2) is obtained. In the microscope optical system 1 having an image-side NA of 0.015, It can be seen that it is sufficient to satisfy this equation (2) in order to increase the spot of unnecessary order light to a radius of about 2 mm.

  However, no aberration correction is performed on the image formed by the second lens group G2. For this reason, there is a difference between the notation based on the equations (b) and (c) derived from the paraxial relational expression and the actual ray tracing result. The angle of incidence on the second objective lens IL generally tends to be larger than that in the equation (c), and the consistency between the equations (1) and (2) is better when corrected by about 10%. Become. Therefore, it is desirable to correct the above equation (2) to the following equation (2 ′).

  When the light beam from a certain point on the object side is condensed at one point on the imaging plane, the light amount per unit area on the imaging plane at that time is inversely proportional to the spot area, so The brightness due to light of different diffraction orders is inversely proportional to the spot area on the imaging plane. That is, the brightness due to light of a diffraction order different from that of m-order light becomes darker in inverse proportion to the square of the spot diameter on the imaging plane. Therefore, the flare light itself generated by the diffractive optical element GD becomes dark on the imaging surface.

  When the diffractive optical element GD is disposed at a position close to the object of the objective lens OL, the diffractive optical element GD is disposed at a place where the light beam passing through the objective lens OL is spread, and the incident angle to the diffractive optical element GD is increased. It is easy and disadvantageous in terms of diffraction efficiency. In addition, if the diffractive optical element GD is disposed in a place where the light beam in the intermediate portion of the objective lens OL is nearly parallel, high-order aberrations are likely to occur because the light beam is wide. Therefore, as described above, by configuring the objective lens OL so that the refractive power of the lens group (second lens group G2) on the image side from the diffractive optical element GD is negative, the object of the second lens group G2 is configured. It is desirable to arrange the diffractive optical element GD at a position on the side where the light beam passing through the objective lens OL is converged.

  In such a microscope optical system MS, since the light quantity of the entire flare is determined by the diffraction efficiency of the diffractive optical element GD, it is important to increase the diffraction efficiency. The following three points can be cited as factors that reduce the diffraction efficiency of the diffractive optical element GD. That is, first, when the wavelength of light passing through the diffractive optical surface of the diffractive optical element GD is different from the blaze wavelength, and second, when the incident angle to the diffractive optical surface of the diffractive optical element GD is different from the blaze condition Third, the shape of the diffractive optical surface of the diffractive optical element GD is deviated from the blaze shape. The third factor is a problem of a shape error in manufacturing the diffractive optical surface, but the first and second factors are problems that inevitably occur in order to ensure a certain wavelength range and field of view. In this case, the above problem can be solved by making the diffractive optical element GD a close-contact multilayer diffractive optical element.

The close-contact multi-layer diffractive optical element uses two different optical materials that approximately satisfy the following formula (d), and forms a diffractive optical surface by providing a diffraction grating pattern on the joint surface between the two optical materials. Yes. Of the two optical materials, the refractive indexes for the d-line, F-line, and C-line of the medium of one optical material are n _1d , n _1F , and n _1C , respectively, and the d-line and F of the medium of the other optical material are The refractive indexes for the line and the C line are n _2d , n _2F , and n _2C , respectively.

  This close-contact multi-layer diffractive optical element can increase the diffraction efficiency in a wide wavelength region including g-line to C-line. Therefore, the objective lens OL used in the microscope optical system MS according to the present embodiment can be used in a wide wavelength region. The diffraction efficiency indicates a ratio η (= I1 / I0 × 100 [%]) between the incident intensity I0 and the intensity I1 of the first-order diffracted light when the first-order diffracted light is used in the transmission type diffractive optical element. The close-contact multilayer diffractive optical element is a so-called separated multilayer diffractive optical element in which two diffraction element elements formed with a diffraction grating pattern are arranged close to each other so that the diffraction grating patterns face each other. Since the manufacturing process can be simplified in comparison, it has the advantages of high mass production efficiency and good diffraction efficiency with respect to the incident angle of light. Therefore, the objective lens OL according to the present embodiment using the multi-contact diffractive optical element GD is easy to manufacture, and the diffraction efficiency is improved.

  Further, the diffraction grating pattern of the diffraction grating of the multi-contact diffractive optical element GD is formed on the joint surface of the diffraction element elements arranged on the flat substrate. In this way, even if the diffraction grating elements are arranged on the flat substrate to form the diffraction grating pattern, it becomes very easy to form the diffraction grating pattern as compared with the case of forming it on a spherical surface or the like, and an accurate diffraction grating pattern can be obtained. It is easy to obtain.

  The microscope optical system MS according to the present embodiment as described above is used in a microscope system 1 as shown in FIG. In FIG. 3, the microscope system 1 observes a preparation 2 including a sample S, and includes a first light source device 6, a second light source device 7, an objective lens 8 (OL), and a second objective lens 9 ( IL), an eyepiece optical system 11 for guiding a light beam from an image formed by the microscope optical system MS to the user's eyeball, and a stage 10 movable while supporting the preparation 2 ,including. A focusing operation can be performed by moving the stage 10 in the optical axis direction of the objective lens 8. Of course, a separate focus detection mechanism may be provided, and the amount of movement of the stage 10 may be controlled based on the output from the focus detection mechanism. The microscope system 1 includes a body 15, and each of the first light source device 6, the second light source device 7, the objective lens 8, the second objective lens 9, and the stage 10 is supported by the body 15. Has been.

  The microscope system 1 includes a first illumination optical system (transmission illumination optical system) 17 that illuminates the preparation 2 using light emitted from the first light source device 6, and light emitted from the second light source device 7. Is provided with a second illumination optical system (epi-illumination optical system) 18 for illuminating the preparation 2. Here, the light emitted from the second light source device 7 is also part of the second illumination optical system 18 of the objective lens 8, and the light from the second light source device 7 is converted into the objective lens 8 by the optical path synthesis member 16. Lead to. The optical path combining member 16 may employ a mirror in which the optical axis of the objective lens 8 and the vicinity thereof are transparent and a reflection film is formed on the outer peripheral portion, or a half mirror. In the former case, dark field observation is possible. In the latter case, bright field observation is possible with epi-illumination.

  In addition, an imaging unit may be mounted at a position where an image formed by the objective lens 8 and the second objective lens 9 is formed. Of course, the light beam from the objective lens 8 may be divided by an optical path dividing means (not shown), a second objective lens may be separately provided, and the imaging means may be mounted at a position where an image is formed by the second objective lens. The microscope system 1 may be an upright microscope or an inverted microscope. Further, either the first light source device 6 or the second light source device 7 may be used.

  In the following, six examples of the microscope optical system MS according to the present embodiment will be shown. In each example, the phase difference of the diffractive optical surface formed on the diffractive optical element GD is a normal refractive index and will be described later. The calculation was made by the ultrahigh refractive index method using the aspherical formula (d). The ultrahigh refractive index method uses a certain equivalent relationship between the aspherical shape and the grating pitch of the diffractive optical surface. In this embodiment, the diffractive optical surface is represented by data of the ultrahigh refractive index method. That is, it is shown by an aspherical expression (d) and its coefficient, which will be described later. In this embodiment, d-line, C-line, F-line and g-line are selected as the calculation target of the aberration characteristics. The wavelengths of these d-line, C-line, F-line and g-line used in this example and the refractive index values used for calculation of the ultrahigh refractive index method set for each spectral line are shown in the following table. It is shown in 1.

(Table 1)
Wavelength Refractive index (by ultra-high refractive index method)
d-line 587.562nm 10001.0000
C line 656.273nm 11170.4255
F line 486.133nm 8274.7311
g-line 435.835nm 7418.6853

In each embodiment, the height of the aspheric surface in the direction perpendicular to the optical axis is y, and the distance (sag amount) along the optical axis from the tangential plane of the apex of each aspheric surface to each aspheric surface at height y. Is S (y), r is the radius of curvature of the reference sphere (vertex radius of curvature), κ is the constant, and An is the nth-order aspherical coefficient. In the following examples, “E−n” indicates “× 10 ⁻ⁿ ”.

S (y) = (y ² / r) / {1+ (1−κ × y ² / r ² ) ^1/2 }
+ A2 × y ² + A4 × y ⁴ + A6 × y ⁶ + A8 × y ⁸ (d)

  In each example, the lens surface on which the diffractive optical surface is formed is marked with an asterisk (*) on the right side of the surface number in the table, and the aspherical expression (d) indicates the performance of the diffractive optical surface. The specifications are shown.

[First embodiment]
First, a microscope optical system MS1 shown in FIG. 4 will be described as a first embodiment. The microscope optical system MS1 includes an objective lens OL, a second objective lens IL, and a prism PR in order from the object side. The objective lens OL includes a first lens group G1, a diffractive optical element GD, and a second lens group G2 in order from the object side. Further, in order from the object side, the first lens group G1 includes a positive meniscus lens L1 having a concave surface facing the object side, a positive meniscus lens L2 having a concave surface facing the object side, and a negative meniscus lens L3 having a convex surface facing the object side. The lens includes a cemented lens in which the biconvex lens L4 is cemented, and a cemented lens in which the biconvex lens L5, the biconcave lens L6, and the biconvex lens L7 are cemented. Further, in the diffractive optical element GD, a flat optical glass L8, two optical members L9 and L10 formed from different resin materials, and a flat optical glass L11 are joined in this order from the object side. Then, a diffraction grating pattern (diffractive optical surface) is formed on the joint surface of the optical members L9 and L10. That is, the diffractive optical element GD is a contact multilayer diffractive optical element. The second lens group G2 includes a cemented lens in which a biconcave lens L12, a biconvex lens L13, and a biconcave lens L14 are cemented in order from the object side. The second objective lens IL includes a cemented lens in which a biconvex lens L15 and a negative meniscus lens L16 having a concave surface facing the object side are cemented in order from the object side, and a cemented lens in which a biconvex lens L17 and a biconcave lens L18 are cemented. Consists of lenses. Note that the prism PR is made of optical glass whose both ends are flat. In addition, the prism PR considers only the optical path length and does not represent the actual shape (the same applies to the following embodiments).

  Table 2 shows the specifications of the microscope optical system MS1 according to the first example shown in FIG. In Table 2, f represents the focal length of the entire objective lens OL, f1 represents the focal length of the second lens group G2 constituting the objective lens OL, and f2 represents the entire system of the second objective lens IL. , Β denotes the magnification, NA denotes the numerical aperture on the object side and the image side of the optical system combining the objective lens OL and the second objective lens IL, and d0 denotes the first lens (from the object plane) The distance on the optical axis to the vertex of the object-side lens surface (first surface) of the positive meniscus lens L1) is indicated, D is the diameter of the entrance pupil to the second objective lens IL, and hdoe is the distance from the on-axis object. The height at which the emitted beam with the maximum NA exits the diffractive optical element GD indicates the height, and θdoe indicates the angle at which the beam with the maximum NA that exits from the axial object exits the diffractive optical element GD (the first order that contributes to imaging The angle at which the diffracted light is emitted. The first column m is the number of each optical surface from the object side, the second column r is the radius of curvature of each optical surface, and the third column d is on the optical axis from each optical surface to the next optical surface. The distance (surface spacing), the fourth column nd indicates the refractive index with respect to the d-line, and the fifth column νd indicates the Abbe number. Here, the numbers of the optical surfaces shown in the first column m (* on the right indicate lens surfaces formed as diffractive optical surfaces) correspond to the surface numbers 1 to 29 shown in FIG. In the second column r, the curvature radius 0.000 indicates a plane. In the case of a diffractive optical surface, the second column r indicates the radius of curvature of the spherical surface that serves as a reference for the base aspherical surface. Yes. In the fourth column nd, the refractive index 1.000 of air is omitted. The fifth column νd is expressed as νd = (nd−1) / (nF−nC) where nF is the refractive index for the F-line and nC is the refractive index for the C-line. Further, Table 2 also shows values corresponding to the conditional expressions (1) and (2), that is, condition corresponding values. The description of the specification table is the same in the following embodiments.

  Unless otherwise specified, “mm” is generally used as the unit of curvature radius r, surface interval d, focal length f of objective lens, and other length units listed in all the following specifications. Since the same optical performance can be obtained even when proportional expansion or reduction is performed, the unit is not limited to “mm”, and other appropriate units may be used.

(Table 2)
f = 4
f1 = -22.4
f2 = 200
β = 50x
NA (object side) = 0.8
NA (image side) = 0.016
d0 = 3.38
D = 6.4
hdoe = 6.1
θdoe = 8.0 [°]

m r d nd νd
1 -4.220 4.00 1.903 35.7
2 -5.421 0.20
3 -47.354 4.00 1.603 65.5
4 -12.900 0.20
5 85.133 1.10 1.517 52.4
6 12.610 8.00 1.498 82.5
7 -16.869 0.20
8 30.992 5.35 1.640 60.1
9 -17.900 1.20 1.738 32.3
10 9.973 5.60 1.498 82.5
11 -32.895 3.00
12 0.000 2.50 1.517 64.1
13 0.000 0.06 1.528 34.7
14 0.000 0.00 10001.000 -3.5
15 * 0.000 0.06 1.557 50.2
16 0.000 3.00 1.517 64.1
17 0.000 16.10
18 -67.221 1.70 1.652 58.5
19 12.651 2.70 1.717 29.5
20 -9.076 1.25 1.517 52.3
21 8.270 91.00
22 75.043 5.10 1.623 57.0
23 -75.043 2.00 1.750 35.2
24 1600.580 7.50
25 50.256 5.10 1.668 42.0
26 -84.541 1.80 1.613 44.4
27 36.911 5.50
28 0.000 30.00 1.569 56.0
29 0.000 143.81

Diffraction optical surface data 15th surface κ = 1 A2 = -5.9524E-08 A4 = 3.8419E-10
A6 = -4.8802E-12 A8 = 6.5871E-15

Condition-corresponding value (1) Left side | θ | (0th order) = 0.74 [°] | θ | (second order) = 0.72 [°]
Right side = 0.54 [°]
(2) Left side | δθ | (0th order-1st order) = 0.37 [°]
| Δθ | (secondary-1st order) = 0.37 [°]
Right side = 0.27 [°]
(2 ') Right side = 0.25 [°]

  The condition-corresponding values shown in Table 2 are obtained using first-order diffracted light as imaging light and unnecessary-order light as 0th-order and second-order diffracted light. Thus, it can be seen that all the conditional expressions (1) and (2) are satisfied in the first embodiment. Also in the following embodiments, first-order diffracted light is used as the imaging light.

  FIG. 5 shows a spot diagram of 0th order light and secondary light (unnecessary order light) in the first embodiment. In the spot diagram shown in FIG. 5, B indicates the object height (the same applies to the following embodiments). As shown in FIG. 5, the zero-order light and the secondary light, which are unnecessary-order lights, have a height of 1.9 mm or more from the optical axis of the spot, so that the microscope optical system MS1 according to the first example is The flare caused by the zero-order light and the secondary light can be made inconspicuous on the image plane.

[Second Embodiment]
Next, a microscope optical system MS2 shown in FIG. 6 will be described as a second embodiment. The microscope optical system MS2 is also composed of an objective lens OL, a second objective lens IL, and a prism PR in order from the object side. The objective lens OL includes a first lens group G1, a diffractive optical element GD, and a second lens group G2 in order from the object side. Further, in order from the object side, the first lens group G1 includes a positive meniscus lens L1 having a concave surface facing the object side, a positive meniscus lens L2 having a concave surface facing the object side, a biconvex lens L3, and a negative surface having a concave surface facing the object side. A cemented lens in which the meniscus lens L4 is cemented, a cemented lens in which the biconvex lens L5, the biconcave lens L6, and the biconvex lens L7 are cemented, and a cemented lens in which the biconvex lens L8 and the negative meniscus lens L9 having a concave surface facing the object side are cemented. Consists of lenses. Further, in the diffractive optical element GD, a flat optical glass L10, two optical members L11 and L12 formed of different resin materials, and a flat optical glass L13 are joined in this order from the object side. In addition, a diffraction grating pattern (diffractive optical surface) is formed on the joint surface of the optical members L11 and L12. That is, the diffractive optical element GD is a contact multilayer diffractive optical element. The second lens group G2 includes a biconcave lens L12 and a cemented lens in which the biconcave lens L13 and the biconvex lens L14 are cemented in order from the object side. Further, the second objective lens IL includes a cemented lens in which a biconvex lens L15 and a biconcave lens L16 are cemented in order from the object side, and a cemented lens in which a biconvex lens L17 and a biconcave lens L18 are cemented. Note that the prism PR is made of optical glass whose both ends are flat.

  Table 3 shows the specifications of the microscope optical system MS2 according to the second example shown in FIG. In addition, the surface number shown in Table 3 corresponds with the surface numbers 1-33 shown in FIG.

(Table 3)
f = 1.33
f1 = -4.83
f2 = 200
β = 150x
NA (object side) = 0.9
NA (image side) = 0.006
d0 = 2.95
D = 2.387
hdoe = 4.50
θdoe = 15.50 [°]

m r d nd νd
1 -5.290 3.50 1.804 39.6
2 -5.030 0.15
3 -18.200 2.90 1.603 65.5
4 -9.566 0.15
5 27.978 6.20 1.498 82.6
6 -12.264 1.30 1.569 56.0
7 -19.297 0.20
8 30.758 5.60 1.498 82.6
9 -13.300 1.00 1.673 38.2
10 12.192 6.70 1.498 82.6
11 -14.331 0.15
12 21.570 4.70 1.498 82.6
13 -10.130 1.00 1.804 39.6
14 -89.173 0.70
15 0.000 2.50 1.517 64.1
16 0.000 0.06 1.528 34.7
17 0.000 0.00 10001.000 -3.5
18 * 0.000 0.06 1.557 50.2
19 0.000 3.00 1.517 64.1
20 0.000 12.00
21 -6.151 1.70 1.517 52.4
22 6.151 3.00
23 -4.178 1.00 1.734 51.5
24 6.681 2.20 1.785 25.6
25 -7.986 121.00
26 75.043 5.10 1.623 57.0
27 -75.043 2.00 1.750 35.2
28 1600.580 7.50
29 50.256 5.10 1.668 42.0
30 -84.541 1.80 1.613 44.4
31 36.911 5.50
32 0.000 30.00 1.569 56.0
33 0.000 143.78

Diffraction optical surface data 18th surface κ = 1 A2 = -7.3529E-08 A4 = 1.2704E-09
A6 = -3.6213E-11 A8 = 1.4394E-13

Condition-corresponding value (1) Left side | θ | (0th order) = 2.01 [°] | θ | (second order) = 1.75 [°]
Right side = 1.43 [°]
(2) Left side | δθ | (0th order-1st order) = 0.41 [°]
| Δθ | (secondary-first order) = 0.42 [°]
Right side = 0.39 [°]
(2 ') Right side = 0.35 [°]

  Thus, it can be seen that all the conditional expressions (1) and (2) are satisfied in the second embodiment. FIG. 7 shows a spot diagram of the 0th order light and the secondary light (unnecessary order light) in the second embodiment. As shown in FIG. 7, since the zero-order light and the secondary light, which are unnecessary-order lights, have a height from the optical axis of the spot of 5.0 mm or more, the microscope optical system MS2 according to the second example has The flare caused by the zero-order light and the secondary light can be made inconspicuous on the image plane.

[Third embodiment]
Next, a microscope optical system MS3 shown in FIG. 8 will be described as a third embodiment. This microscope optical system MS3 is also composed of an objective lens OL, a second objective lens IL, and a prism PR in this order from the object side. The objective lens OL includes a first lens group G1, a diffractive optical element GD, and a second lens group G2 in order from the object side. Further, the first lens group G1 includes, in order from the object side, a biconvex lens L1, a cemented lens in which the biconvex lens L2 and a negative meniscus lens L3 having a concave surface on the object side are cemented, and a positive lens having a convex surface on the object side. It comprises a meniscus lens L4. Further, in the diffractive optical element GD, a flat optical glass L5, two optical members L6 and L7 formed of different resin materials, and a flat optical glass L8 are joined in this order from the object side. In addition, a diffraction grating pattern (diffractive optical surface) is formed on the joint surfaces of the optical members L6 and L7. That is, the diffractive optical element GD is a contact multilayer diffractive optical element. The second lens group G2 is composed of a cemented lens in which, in order from the object side, a positive meniscus lens L9 having a concave surface facing the object side and a biconcave lens L10 are cemented. Further, the second objective lens IL is composed of, in order from the object side, a cemented lens in which the biconvex lens L11 and the biconcave lens L12 are cemented, and a cemented lens in which the biconvex lens L13 and the biconcave lens L14 are cemented. Note that the prism PR is made of optical glass whose both ends are flat.

  Table 4 shows the specifications of the microscope optical system MS3 according to the third example shown in FIG. The surface numbers shown in Table 4 coincide with the surface numbers 1 to 24 shown in FIG.

(Table 4)
f = 20
f1 = -14.2
f2 = 200
β = 10x
NA (object side) = 0.2
NA (image side) = 0.02
d0 = 38.00
D = 8
hdoe = 5.54
θdo = 17.15 [°]

m r d nd νd
1 48.798 3.00 1.697 55.5
2 -34.514 0.20
3 37.001 3.40 1.603 65.5
4 -26.906 1.10 1.847 23.8
5 -212.805 0.20
6 24.500 3.30 1.517 64.1
7 116.697 0.70
8 0.000 2.00 1.517 64.1
9 0.000 0.06 1.528 34.7
10 0.000 0.00 10001.000 -3.5
11 * 0.000 0.06 1.557 50.2
12 0.000 3.00 1.517 64.1
13 0.000 3.50
14 -23.277 3.50 1.805 25.4
15 -11.689 1.50 1.620 60.3
16 12.655 136.60
17 75.043 5.10 1.623 57.0
18 -75.043 2.00 1.750 35.2
19 1600.580 7.50
20 50.256 5.10 1.668 42.0
21 -84.541 1.80 1.613 44.4
22 36.911 5.50
23 0.000 30.00 1.569 56.0
24 0.000 143.81

Diffraction optical surface data 11th surface κ = 1 A2 = -4.9388E-08 A4 = 3.00081E-12
A6 = -3.3504E-19 A8 = -1.6682E-15

Condition-corresponding value (1) Left side | θ | (0th order) = 0.56 [°] | θ | (Second order) = 0.56 [°]
Right side = 0.43 [°]
(2) Left side | δθ | (0th order-1st order) = 0.36 [°]
| Δθ | (secondary-1st order) = 0.37 [°]
Right side = 0.31 [°]
(2 ') Right side = 0.28 [°]

  Thus, it can be seen that the third embodiment satisfies all the conditional expressions (1) and (2). FIG. 9 shows a spot diagram of zeroth order light and secondary light (unnecessary order light) in the third embodiment. As shown in FIG. 9, the zero-order light and the secondary light, which are unnecessary orders of light, have a height from the optical axis of the spot of 1.5 mm or more, and therefore the microscope optical system MS3 according to the third example has The flare caused by the zero-order light and the secondary light can be made inconspicuous on the image plane.

[Fourth embodiment]
Next, a microscope optical system MS4 shown in FIG. 10 will be described as a fourth embodiment. This microscope optical system MS4 is also composed of an objective lens OL, a second objective lens IL, and a prism PR in this order from the object side. The objective lens OL includes a first lens group G1, a diffractive optical element GD, and a second lens group G2 in order from the object side. Further, the first lens group G1 includes, in order from the object side, a biconvex lens L1, a cemented lens in which a negative meniscus lens L2 having a convex surface facing the object side and a biconvex lens L3 are cemented, and a negative lens having a convex surface directed to the object side. It is composed of a cemented lens in which a meniscus lens L4 and a positive meniscus lens L5 having a convex surface facing the object side are cemented. Further, in the diffractive optical element GD, the flat optical glass L6, two optical members L7 and L8 formed from different resin materials, and the flat optical glass L9 are joined in this order from the object side. A diffraction grating pattern (diffractive optical surface) is formed on the joint surface of the optical members L7 and L8. That is, the diffractive optical element GD is a contact multilayer diffractive optical element. The second lens group G2 includes, in order from the object side, a cemented lens in which a biconvex lens L10 and a biconcave lens L11 are cemented, and a cemented lens in which a positive meniscus lens L12 having a concave surface facing the object side and a biconcave lens L13 are cemented. Consists of lenses. Further, the second objective lens IL includes a cemented lens in which the biconvex lens L14 and the biconcave lens L15 are cemented in order from the object side, and a cemented lens in which the biconvex lens L16 and the biconcave lens L17 are cemented. Note that the prism PR is made of optical glass whose both ends are flat.

  Table 5 shows the specifications of the microscope optical system MS4 according to the fourth example shown in FIG. In addition, the surface number shown in Table 5 corresponds with the surface numbers 1-28 shown in FIG.

(Table 5)
f = 10
f1 = -7.60
f2 = 200
β = 20x
NA (object side) = 0.3
NA (image side) = 0.015
d0 = 30.60
D = 6
hdoe = 6.22
θdoe = 23.83 [°]

m r d nd νd
1 234.314 3.50 1.589 61.2
2 -25.703 0.15
3 28.645 1.00 1.785 25.7
4 16.720 5.20 1.498 82.5
5 -66.437 0.15
6 15.752 1.00 1.835 42.7
7 11.342 5.00 1.589 61.2
8 121.523 0.95
9 0.000 2.50 1.517 64.1
10 0.000 0.06 1.557 50.2
11 0.000 0.00 10001.000 -3.5
12 * 0.000 0.06 1.528 34.7
13 0.000 3.00 1.517 64.1
14 0.000 0.50
15 9.002 3.35 1.564 60.7
16 -39.060 1.00 1.804 39.6
17 5.900 2.90
18 -13.735 1.90 1.785 25.7
19 -5.202 1.00 1.640 60.1
20 15.201 136.30
21 75.043 5.10 1.623 57.0
22 -75.043 2.00 1.750 35.2
23 1600.580 7.50
24 50.256 5.10 1.668 42.0
25 -84.541 1.80 1.613 44.4
26 36.911 5.50
27 0.000 30.00 1.569 56.0
28 0.000 143.82

Diffraction optical surface data 12th surface κ = 1 A2 = -5.6000E-08 A4 = 3.2897E-10
A6 = -4.1539E-12 A8 = 2.0125E-14

Condition-corresponding value (1) Left side | θ | (0th order) = 0.91 [°] | θ | (second order) = 0.90 [°]
Right side = 0.57 [°]
(2) Left side | δθ | (0th order-1st order) = 0.39 [°]
| Δθ | (secondary-first order) = 0.39 [°]
Right side = 0.26 [°]
(2 ') Right side = 0.23 [°]

  Thus, it can be seen that the fourth embodiment satisfies all the conditional expressions (1) and (2). FIG. 11 shows a spot diagram of zeroth-order light and secondary light (unnecessary-order light) in the fourth embodiment. As shown in FIG. 11, the zero-order light and the secondary light, which are unnecessary orders of light, have a height from the optical axis of the spot of 2.0 mm or more, and therefore the microscope optical system MS4 according to the fourth example has The flare caused by the zero-order light and the secondary light can be made inconspicuous on the image plane.

[Fifth embodiment]
Next, a microscope optical system MS5 shown in FIG. 12 will be described as a fifth embodiment. The microscope optical system MS5 is also composed of an objective lens OL, a second objective lens IL, and a prism PR in this order from the object side. The objective lens OL includes a first lens group G1, a diffractive optical element GD, and a second lens group G2 in order from the object side. Further, the first lens group G1 includes, in order from the object side, a positive meniscus lens L1 having a concave surface facing the object side, a biconvex lens L2, and a cemented lens and a biconvex lens having a negative meniscus lens L3 having a concave surface facing the object side. L4 and a cemented lens in which a biconvex lens L5, a biconcave lens L6, and a positive meniscus lens L7 having a convex surface facing the object are cemented. Further, in the diffractive optical element GD, a flat optical glass L8, two optical members L9 and L10 formed from different resin materials, and a flat optical glass L11 are joined in this order from the object side. Then, a diffraction grating pattern (diffractive optical surface) is formed on the joint surface of the optical members L9 and L10. That is, the diffractive optical element GD is a contact multilayer diffractive optical element. The second lens group G2 includes, in order from the object side, a cemented lens in which a biconvex lens L12 and a biconcave lens L13 are cemented, and a cemented lens in which a biconcave lens L14, a biconvex lens L15, and a biconcave lens L16 are cemented. The Further, the second objective lens IL includes a cemented lens in which a biconvex lens L17 and a biconcave lens L18 are cemented in order from the object side, and a cemented lens in which a biconvex lens L19 and a biconcave lens L20 are cemented. Note that the prism PR is made of optical glass whose both ends are flat.

  Table 6 shows the specifications of the microscope optical system MS5 according to the fifth example shown in FIG. In addition, the surface number shown in Table 6 corresponds with the surface numbers 1-32 shown in FIG.

(Table 6)
f = 4
f1 = -5.09
f2 = 200
β = 50x
NA (object side) = 0.4
NA (image side) = 0.008
d0 = 22.51
D = 3.2
hdoe = 4.56
θdoe = 19.10 [°]

m r d nd νd
1 -120.028 3.40 1.697 55.5
2 -20.743 0.15
3 37.941 5.35 1.498 82.5
4 -21.400 1.00 1.720 34.7
5 -39.959 0.15
6 24.558 3.70 1.603 65.5
7 -143.315 0.15
8 16.120 4.35 1.498 82.5
9 -47.354 1.00 1.804 39.6
10 9.766 3.20 1.498 82.5
11 38.999 1.20
12 0.000 2.50 1.517 64.1
13 0.000 0.06 1.528 34.7
14 0.000 0.00 10001.000 -3.5
15 * 0.000 0.06 1.557 50.2
16 0.000 3.00 1.517 64.1
17 0.000 0.20
18 7.350 2.80 1.498 82.5
19 -42.071 1.00 1.804 39.6
20 7.151 3.90
21 -10.484 0.90 1.729 54.7
22 5.488 2.40 1.741 27.8
23 -3.461 0.90 1.624 47.0
24 5.396 100.00
25 75.043 5.10 1.623 57.0
26 -75.043 2.00 1.750 35.2
27 1600.580 7.50
28 50.256 5.10 1.668 42.0
29 -84.541 1.80 1.613 44.4
30 36.911 5.50
31 0.000 30.00 1.569 56.0
32 0.000 143.82

Diffraction optical surface data 15th surface κ = 1 A2 = -5.5556E-08 A4 = -9.0940E-14
A6 = -3.0689E-12 A8 = 1.7287E-15

Condition-corresponding value (1) Left side | θ | (0th order) = 1.20 [°] | θ | (Second order) = 1.23 [°]
Right side = 1.07 [°]
(2) Left side | δθ | (0th order-1st order) = 0.39 [°]
| Δθ | (secondary-first order) = 0.39 [°]
Right side = 0.37 [°]
(2 ') Right side = 0.33 [°]

  Thus, it can be seen that the fifth embodiment satisfies all the conditional expressions (1) and (2). FIG. 13 shows a spot diagram of zeroth-order light and secondary light (unnecessary-order light) in the fifth embodiment. As shown in FIG. 13, the zero-order light and the secondary light, which are unnecessary orders of light, have a height from the optical axis of the spot of 3.75 mm or more. Therefore, the microscope optical system MS5 according to the fifth example has The flare caused by the zero-order light and the secondary light can be made inconspicuous on the image plane.

[Sixth embodiment]
Finally, a microscope optical system MS6 shown in FIG. 14 will be described as a sixth embodiment. The microscope optical system MS6 is also composed of an objective lens OL, a second objective lens IL, and a prism PR in this order from the object side. The objective lens OL includes a first lens group G1, a diffractive optical element GD, and a second lens group G2 in order from the object side. Further, in order from the object side, the first lens group G1 includes a positive meniscus lens L1 having a concave surface facing the object side, a planoconvex lens L2 having a flat surface facing the object side, a biconvex lens L3, and a negative meniscus having a concave surface facing the object side. The lens includes a cemented lens in which the lens L4 is cemented, a cemented lens in which the biconvex lens L5, the biconcave lens L6, and the biconvex lens L7 are cemented, and a cemented lens in which the biconvex lens L8 and the biconcave lens L9 are cemented. Further, in the diffractive optical element GD, a flat optical glass L10, two optical members L11 and L12 formed of different resin materials, and a flat optical glass L13 are joined in this order from the object side. In addition, a diffraction grating pattern (diffractive optical surface) is formed on the joint surface of the optical members L11 and L12. That is, the diffractive optical element GD is a contact multilayer diffractive optical element. The second lens group G2 includes, in order from the object side, a cemented lens in which a negative meniscus lens L14 having a convex surface facing the object side, a biconvex lens L15, and a biconcave lens L16, and a biconcave lens L17 and a biconvex lens L18. It is composed of a cemented lens in which a biconcave lens L19 is cemented. Further, the second objective lens IL is composed of a cemented lens in which the biconvex lens L20 and the biconcave lens L21 are cemented in order from the object side, and a cemented lens in which the biconvex lens L22 and the biconcave lens L23 are cemented. Note that the prism PR is made of optical glass whose both ends are flat.

  Table 7 shows the specifications of the microscope optical system MS6 according to the sixth example shown in FIG. In addition, the surface number shown in Table 7 corresponds with the surface numbers 1-36 shown in FIG.

(Table 7)
f = 2
f1 = -3.54
f2 = 200
β = 100x
NA (object side) = 0.6
NA (image side) = 0.006
d0 = 12.18
D = 2.4
hdoe = 4.90
θdoe = 20.34 [°]

m r d nd νd
1 -17.818 3.20 1.729 54.6
2 -11.600 0.10
3 0.000 4.00 1.569 71.3
4 -20.743 0.10
5 45.256 5.90 1.498 82.6
6 -19.170 1.20 1.613 44.3
7 -39.808 0.10
8 29.510 4.60 1.498 82.6
9 -33.847 1.20 1.613 44.3
10 13.735 4.70 1.498 82.6
11 -80.931 0.20
12 15.883 3.90 1.498 82.6
13 -38.548 1.00 1.723 38.0
14 38.548 1.20
15 0.000 2.50 1.517 63.9
16 0.000 0.06 1.528 34.7
17 0.000 0.00 10001.000 -3.5
18 * 0.000 0.06 1.557 50.2
19 0.000 3.00 1.517 63.9
20 0.000 0.20
21 8.410 1.30 1.694 53.2
22 4.811 3.50 1.434 95.0
23 -20.594 1.00 1.673 32.2
24 6.950 5.20
25 -10.080 1.00 1.788 47.4
26 11.276 1.80 1.847 23.8
27 -3.092 0.70 1.694 53.2
28 4.719 140.50
29 75.043 5.10 1.623 57.0
30 -75.043 2.00 1.750 35.2
31 1600.580 7.50
32 50.256 5.10 1.668 42.0
33 -84.541 1.80 1.613 44.4
34 36.911 5.50
35 0.000 30.00 1.569 56.0
36 0.000 143.82

Diffraction optical surface data 18th surface κ = 1 A2 = -4.1167E-08 A4 = -8.5221E-11
A6 = -7.6001E-14 A8 = -3.0526E-17

Condition-corresponding value (1) Left side | θ | (0th order) = 1.54 [°] | θ | (second order) = 1.48 [°]
Right side = 1.43 [°]
(2) Left side | δθ | (0th order-1st order) = 0.32 [°]
| Δθ | (secondary-1st order) = 0.32 [°]
Right side = 0.34 [°]
(2 ') Right side = 0.30 [°]

  Thus, it can be seen that the sixth embodiment satisfies the above conditional expressions (1) and (2 ′). However, conditional expression (2) is not satisfied. This is due to aberrations. FIG. 15 shows a spot diagram of zeroth-order light and secondary light (unnecessary-order light) in the sixth embodiment. As shown in FIG. 15, the zeroth-order light and the second-order light, which are unnecessary-order lights, have a height from the optical axis of the spot of 5.0 mm or more, so that the microscope optical system MS6 according to the sixth example has The flare caused by the zero-order light and the secondary light can be made inconspicuous on the image plane.

MS microscope optical system OL objective lens IL second objective lens G1 first lens group GD diffractive optical element G2 second lens group 1 microscope system 10 stage 17 first illumination optical system 18 second illumination optical system

Claims (5)

An objective lens having a diffractive optical element and condensing light from an object into a substantially parallel light beam;
The method of manufacturing a microscope optical system for chromatic and second objective lenses, a a substantially condenses the parallel beam to form an image of the object from the objective lens,
When m-order light of the diffractive optical element is used for image formation, the maximum NA light emitted from the object located on the optical axis enters the diffractive optical element and exits from the diffractive optical element. When the angle at which light of a different order from the secondary light is incident on the second objective lens is θ and the diameter of the entrance pupil to the second objective lens is D [mm],

The manufacturing method of the microscope optical system characterized by satisfying the following conditions. An objective lens having a diffractive optical element and condensing light from an object into a substantially parallel light beam;
The method of manufacturing a microscope optical system for chromatic and second objective lenses, a a substantially condenses the parallel beam to form an image of the object from the objective lens,
Of the diffracted light emitted from the diffractive optical element when the maximum NA light emitted from the object located on the optical axis is incident on the diffractive optical element, the emission angle and unnecessary order of the light used for image formation Δθ is the difference from the light exit angle of the light, and the height at which the light of the order used for imaging is emitted is hdo, the exit angle is θdoe, and the diameter of the entrance pupil to the second objective lens is D [ mm] and the focal length of a lens group consisting of lenses on the image side of the diffractive optical element among the lenses constituting the objective lens is f1

The manufacturing method of the microscope optical system characterized by satisfying the following conditions. The method of manufacturing a microscope optical system according to claim 1, wherein the diffractive optical element is a contact multilayer type diffractive optical element. The diffractive optical element has a diffraction grating pattern formed on a joint surface between resin layers having different refractive indexes, and each of the resin layers is disposed on a flat substrate. 4. The method for producing a microscope optical system according to any one of 3 above. 5. The microscope according to claim 1, wherein a lens group including lenses on the image side of the diffractive optical element among lenses constituting the objective lens has negative refractive power. Manufacturing method of optical system.

Images