JP5812346B2 - Terahertz electromagnetic wave or X-ray generator, fluorescent X-ray analyzer and film thickness measuring device - Google Patents

Description

  The present invention relates to a terahertz electromagnetic wave or X-ray generator, a fluorescent X-ray analyzer, and a film thickness measuring device, and is particularly applied when configuring a small terahertz electromagnetic wave generator or X-ray generator used in a narrow place. It is useful.

  A laser plasma X-ray source is known as an X-ray source of an X-ray inspection apparatus that detects the inside of a structure by non-destructive inspection, such as a thinning amount of piping (see, for example, Patent Document 1 and Non-Patent Document 1). A laser plasma X-ray source generates high-temperature and high-density plasma instantaneously by condensing and irradiating a high-intensity short pulse laser, and generates X-rays via electrons in the plasma. It is expected as an X-ray source that can inspect narrow areas.

  However, this type of laser plasma X-ray source has a problem that the structure itself is complicated due to having a laser device, a laser beam transmission system, and the like, and that periodic maintenance is required. Yes. Thus, the advent of an X-ray source that can generate a desired X-ray with a simple structure and can be substantially maintenance-free is desired.

  On the other hand, Non-Patent Document 2 describes that X-rays are generated when a wound adhesive tape is peeled off in a vacuum. That is, it refers to the possibility of X-ray generation by stripping discharge.

JP 2009-047440 A

"Evaluation of X-ray converter system for development of laser plasma X-ray source" Report of Central Research Institute of Electric Power: H05014 (March 2005) Carlos G, et al, Nature 455, 1089-1092 (2008)

  As an X-ray source using stripping discharge described in Non-Patent Document 2, the one shown in FIG. 5 is conceivable. As shown in FIG. 2A, the entire adhesive tape that causes the peeling discharge at the peeling portion is initially wound around the first rotating roller 01. The adhesive tape 03 in this state is wound around the second rotating roller 02 as shown in FIG. 5B while the first rotating roller 01 and the second rotating roller 02 are rotated synchronously. Here, the adhesive tape 03 wound around the outermost periphery of the first rotating roller 01 is peeled off when being moved and wound toward the second rotating roller 02 side. With such peeling, X-rays are generated at the peeling point. The generation point of the X-rays due to the peeling discharge at this time is shown with a symbol P01 in the drawing. X-rays are emitted in the normal direction of the tangent of the circle formed by the adhesive tape at the peeling point P01.

  However, when radiation is generated according to such a principle, a small size and low voltage drive are possible, but the adhesive tape 03 wound around the first rotating roller 01 is wound around the second rotating roller 02 and moved. As a result, the diameter of the adhesive tape 03 wound around the first and second rotary rollers 01 and 02 changes with time, and as a result, the generation point P01 also moves and the X-ray radiation direction becomes unstable. The big problem of becoming. In addition, after the adhesive tape 03 is wound and moved around the second rotating roller 02, it is necessary to reverse the rotation directions of the first rotating roller 01 and the second rotating roller 02. There is also a problem that the structure of the drive system becomes complicated.

  In view of the above prior art, the present invention is a compact terahertz electromagnetic wave or X-ray generator capable of low-voltage driving that can stably emit a terahertz electromagnetic wave or X-ray in a predetermined direction by peeling discharge. An object is to provide an X-ray analyzer and a film thickness measuring device.

  According to a first aspect of the present invention for achieving the above object, the first and second rotating rollers formed to be rotatable around two central axes arranged separately in the horizontal direction, and the first rotating roller. And a first bonding member that is affixed to at least one outer peripheral surface of the second rotating roller and is formed of a dielectric material, and is hung between the first and second rotating rollers, and an inner peripheral surface is It becomes the 2nd junction member formed with the dielectric material joined by contact with the 1st junction member, and the 1st and 2nd rotations with rotation of the 1st and 2nd rotation rollers A belt-like shape that moves between rollers and irradiates a peeling charged terahertz electromagnetic wave or peeling charged X-ray by peeling off after the second bonding member is bonded to the first bonding member and moved along with the movement. Having a wire loop-shaped member It is no THz radiation, characterized in the X-ray generator.

  According to this aspect, since the loop-shaped member moves with the rotation of the first and second rotating rollers, the second bonding member is bonded to the first bonding member and moved after the second bonding member is moved. As a result, a peeling charged terahertz electromagnetic wave or a peeling charged X-ray is irradiated. That is, the loop member is charged because it is made of a dielectric material. As a result, peeling discharge is generated at the peeling point at the moment when the loop-shaped member is peeled, and X-rays and terahertz electromagnetic waves are generated accordingly.

  Here, the loop-shaped member is hung between the first and second rotating rollers and moves between the first and second rotating rollers as the first and second rotating rollers rotate. It is a contact or tangent between the loop-shaped member and the first and / or second rotating roller, and this contact or tangent is at a fixed position. For this reason, the position of the peeling discharge is constant, and X-rays and terahertz electromagnetic waves generated thereby are stably emitted in a predetermined direction. Incidentally, the radiation direction of the X-rays and the terahertz electromagnetic waves in this case is an extension direction of a straight line connecting the center of the first and / or second rotating roller and the peeling point, and the X-rays and the terahertz electromagnetic waves are stably transmitted in this direction. Radiated.

  According to a second aspect of the present invention, in the terahertz electromagnetic wave or X-ray generator described in the first aspect, the first and second rotating rollers, the first and second joining members, and the loop-shaped member are: A terahertz electromagnetic wave or X-ray generator is characterized in that these are stored in a vacuum state in a vacuum container.

  According to this aspect, X-rays or terahertz electromagnetic waves due to peeling discharge can be generated more easily and stably.

  According to a third aspect of the present invention, in the terahertz electromagnetic wave or X-ray generator described in the first or second aspect, the first bonding member is formed of an adhesive. X-ray generator.

  According to this aspect, since the adhesive state due to the adhesive is forcibly peeled off, a good peeling discharge can be generated.

  According to a fourth aspect of the present invention, in the terahertz electromagnetic wave or X-ray generator described in the first or second aspect, the first and second joining members are formed of surface fasteners. It is an electromagnetic wave or X-ray generator.

  According to this aspect, it is possible to satisfactorily realize stable joining and peeling over a long period of time by the function of the hook-and-loop fastener.

  According to a fifth aspect of the present invention, in the terahertz electromagnetic wave or X-ray generator described in any one of the first to fourth aspects, the first and second rotating rollers have different diameters. Terahertz electromagnetic wave or X-ray generator.

  According to this aspect, it is possible to arbitrarily select the separation point at which separation discharge occurs by arbitrarily selecting the ratio of the diameter of the first rotating roller and the diameter of the second rotating roller. As a result, the radiation direction of X-rays or terahertz electromagnetic waves can be arbitrarily selected.

  According to a sixth aspect of the present invention, in the terahertz electromagnetic wave or X-ray generator described in any one of the first to fifth aspects, an interval between the first rotating roller and the second rotating roller is set. A terahertz electromagnetic wave or X-ray generator characterized in that it can be adjusted.

  According to this aspect, it is possible to adjust the tension applied to the loop member stretched between the first and second rotating rollers.

  A seventh aspect of the present invention is the terahertz electromagnetic wave or the X-ray generator described in any one of the second to sixth aspects. A detection means (X-ray spectrometer for irradiating the sample with the peeled charged X-ray and detecting the fluorescent X-ray emitted from the sample to obtain the type of the sample and the amount (concentration) of the element in the sample And a fluorescent X-ray analyzer.

  According to this aspect, by irradiating the sample with peeled charged X-rays, the sample and the amount thereof can be well identified by analyzing the fluorescent X-rays emitted from the sample. That is, it is possible to provide a fluorescent X-ray analyzer that can be used even in a narrow space and has excellent portability.

  According to an eighth aspect of the present invention, in the X-ray fluorescence spectrometer described in the seventh aspect, the loop member is formed of a strip member, and the detection means is a linear member irradiated from the strip member. The fluorescent X-ray analyzer is characterized by detecting and analyzing linear fluorescent X-rays emitted from the sample based on the peeled charged X-rays.

  According to this aspect, since linear peeled charged X-rays and corresponding linear fluorescent X-rays can be easily obtained, analysis of a predetermined linear portion of the sample can be performed efficiently.

  According to a ninth aspect of the present invention, in the X-ray fluorescence analyzer described in the eighth aspect, an X-ray transmission window for X-ray transmission that extends in the width direction of the strip-shaped member and extends in the axial direction of the vacuum vessel is provided. The vacuum vessel has a structure that extends in the same direction as the axial direction that transmits fluorescent X-rays emitted from the sample based on the irradiated X-rays, and has a positional relationship with the X-ray emission window with respect to the sample. The fluorescent X-ray analyzer is characterized in that the detection means has a fluorescent X-ray incident window held constant.

  According to this aspect, by transmitting through the X-ray emission window and the fluorescent X-ray incident window, X-ray attenuation can be suppressed as much as possible, and predetermined good fluorescent X-ray analysis can be performed.

  According to a tenth aspect of the present invention, in the fluorescent X-ray analysis apparatus according to any one of the seventh to ninth aspects, the detection means irradiates a reference sample with the peeled charged X-ray and the reference sample A storage means for storing film thickness information for each of a plurality of materials specified by the wavelength of the fluorescent X-ray based on the intensity of the fluorescent X-ray emitted from the sample; A film thickness measuring apparatus configured to measure the film thickness of a specific element by detecting the intensity of a fluorescent X-ray emitted at a specific wavelength and comparing the intensity with the stored contents of the storage means It is in.

  According to this aspect, the film thickness of the sample can be easily measured together with the type thereof by fluorescent X-ray analysis. As a result, it is possible to provide a film thickness measuring apparatus that can be used even in a narrow portion and has excellent portability.

  According to the present invention, it is possible to continuously generate X-rays or terahertz electromagnetic waves by peeling discharge at the same position for each rotation of the first and second rotating rollers. As a result, it is possible to easily provide a small terahertz electromagnetic wave or X-ray generator having a simple structure and excellent design flexibility. Here, since the terahertz electromagnetic wave is less permeable than X-rays, it can be properly used for non-destructive inspection of resin or the like, and X-rays can be appropriately used for non-destructive inspection of metal or the like. In addition, since it is a terahertz electromagnetic wave or X-ray generator that is small and simple in structure, it can be substantially maintenance-free, and the driving force of the first and second rotating rollers is obtained by a battery-driven motor. You can also.

  Furthermore, when the sample is irradiated with X-rays obtained by peeling charging, fluorescent X-rays are emitted from the sample, and satisfactory fluorescent X-ray analysis can be performed using the fluorescent X-rays.

BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic block diagram which shows notionally the generator of the terahertz electromagnetic wave thru | or X-ray which concerns on the 1st Embodiment of this invention, (a) is a top view, (b) is AA 'sectional view taken on the line. It is a schematic block diagram which shows notionally the generator of the terahertz electromagnetic wave thru | or X-ray which concerns on the 2nd Embodiment of this invention, (a) is a top view, (b) is a BB 'sectional view taken on the line. FIG. 6 is an enlarged view conceptually showing an extracted part of a terahertz electromagnetic wave or X-ray generator according to a third embodiment of the present invention. FIG. 10 is an enlarged view conceptually showing an extracted part of a terahertz electromagnetic wave or X-ray generator according to a fourth embodiment of the present invention. It is explanatory drawing which shows the principle of peeling discharge notionally. It is a characteristic view which shows the characteristic of the fluorescent X ray obtained from the sample sample. It is a principle figure which shows the film thickness measurement principle by a fluorescent X ray analysis. It is a characteristic view which shows the fluorescent X ray analysis from the sample which simulated the galvanization surface. It is a figure which shows the fluorescent X-ray characteristic with respect to zinc thickness, (a) is the relationship between zinc thickness and fluorescent X-ray peak intensity, (b) is the relationship between the fluorescent X-ray peak intensity ratio of zinc and iron, and zinc thickness. Show. It is a schematic perspective view which shows the linear fluorescent X-ray analyzer which concerns on the 5th Embodiment of this invention.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

<First Embodiment>
1A and 1B are schematic configuration diagrams conceptually showing a terahertz electromagnetic wave or X-ray generator according to a first embodiment of the present invention, where FIG. 1A is a plan view and FIG. 1B is a cross-sectional view along line AA ′. It is.

  As shown in the figure, the terahertz electromagnetic wave or X-ray generator I according to this embodiment includes the first and second rotating rollers 1 and 2, the loop-shaped member 5, the motor 8, and the like. The base plate 7 is housed in a vacuum vessel 6 and configured. The vacuum vessel 6 is connected to a vacuum pump (not shown) through the exhaust port 9 to be evacuated. A predetermined degree of vacuum is maintained by sealing the exhaust port 9 in a vacuumed state. Of course, the vacuum pump may be continuously driven to maintain a predetermined degree of vacuum. The first and second rotating rollers 1 and 2 are rollers having the same diameter, and are fixed to rotating shafts 3 and 4 which are vertical shafts rotatably supported by the base plate 7. It is configured to rotate around.

  An adhesive 1 </ b> A is applied to the outer peripheral surface of the first rotating roller 1 in this embodiment. The loop-shaped member 5 is formed of a tape-shaped film that is a dielectric material hung between the first and second rotating rollers 1 and 2. That is, the loop member 5 can be suitably formed of a plastic material such as polyimide or acrylic. The loop-shaped member 5 moves between the two rotating rollers 1 and 2 as the first and second rotating rollers 1 and 2 rotate, and is attached to the adhesive 1A along with the movement and then peeled off. Is done. Here, in this embodiment, the rotary shaft 3 is configured to be rotationally driven by a motor 8 disposed on the base plate 7. This is because the adhesive 1 </ b> A is applied, and the first rotating roller 1 side where the adhesion and peeling with the loop-shaped member 5 are repeated requires a large torque. When the motor 8 is configured to rotationally drive the second rotating roller 2, there is a possibility that the loop-shaped member 5 slips even if the second rotating roller 2 rotates. That is, there is a possibility that only the second rotating roller 2 is idle.

  In this embodiment, the distance between the first rotating roller 1 and the second rotating roller 2 is formed to be adjustable. Although not shown, this can be easily realized by providing a mechanism for moving the rotary shaft 3 linearly with respect to the base plate 7 in the horizontal direction, for example. As described above, it is not essential to adjust the distance between the first rotating roller 1 and the second rotating roller 2, but this allows the tension of the loop-shaped member 5 to be adjusted appropriately. Thus, the radiation dose can be adjusted.

  According to this embodiment, the loop-shaped member 5 moves and adheres to the adhesive 1A as the first and second rotating rollers 1 and 2 rotate, and after a predetermined amount of rotation (half rotation), the adhesive It peels from 1A. Here, since the loop-shaped member 5 is formed of a plastic material which is a dielectric material, it is charged. As a result, at the moment when the loop-shaped member 5 is peeled off, a peeling discharge is generated at the peeling point, and accordingly, X-rays and terahertz electromagnetic waves are emitted.

  In the case of this embodiment, since the first and second rotating rollers 1 and 2 have the same diameter, the loop member 5 is stretched in parallel between the rotating rollers 1 and 2. Therefore, the peeling point which is a contact point between the loop member 5 and the first rotating roller 1 is a perpendicular line extending from the center of the rotating shaft 3 in the radial direction of the first rotating roller 1 and the loop member in FIG. This is the intersection with 5. Such an intersection is a fixed point and becomes a generation point P11 of X-rays and terahertz electromagnetic waves. For this reason, the generation point P11 of the X-ray and the terahertz electromagnetic wave due to the peeling discharge is constant, and the X-ray and the terahertz electromagnetic wave generated thereby are also in a predetermined direction, that is, an extension direction of a straight line connecting the center of the rotation axis 3 and the generation point P11. Is stably emitted.

  Here, the amount of radiation of the emitted X-rays and terahertz electromagnetic waves is defined by the width of the loop-shaped member 5. That is, the amount of radiation of X-rays and terahertz electromagnetic waves is an integral value in the width direction, and becomes stronger as the width becomes wider. Further, since terahertz electromagnetic waves are less permeable than X-rays, it is preferable to use them separately for non-destructive inspections such as resins and X-rays for non-destructive inspections such as metals.

<Second Embodiment>
2A and 2B are schematic configuration diagrams conceptually showing a terahertz electromagnetic wave or X-ray generator according to a second embodiment of the present invention, where FIG. 2A is a plan view and FIG. 2B is a cross-sectional view taken along line BB ′. It is.

  As shown in the figure, the terahertz electromagnetic wave or X-ray generator II according to the present embodiment includes a first rotating roller 11, a second rotating roller 12, and a loop-shaped member 15 having an outer peripheral surface coated with an adhesive 11A. The motor 18 and the like are housed in the vacuum vessel 16 together with the base plate 17 on which these are disposed. The vacuum container 16 is connected to a vacuum pump (not shown) through the exhaust port 19 so that the inside thereof is evacuated.

  Here, the diameters of the first and second rotating rollers 11 and 12 in this embodiment are different. In the case of this embodiment, (the diameter of the first rotating roller 11) <(the diameter of the second rotating roller 12), and the rotating shafts 13 and 14 which are vertical shafts rotatably supported by the base plate 17 are satisfied. And is configured to rotate around the axis of the rotary shafts 13 and 14.

  As in the first embodiment shown in FIG. 1, the loop-shaped member 15 is formed of a tape-like film that is hung between the first and second rotating rollers 11 and 12 and is the same dielectric material as in FIG. Has been. The loop-shaped member 15 moves between the rotating rollers 11 and 12 as the first and second rotating rollers 11 and 12 rotate, and is adhered to the adhesive 11A along with the movement and then peeled off. Is done. In this embodiment, the rotating shaft 13 is driven to rotate by a motor 18 disposed on the base plate 17. This is because adhesion and separation from the loop-shaped member 15 are performed on the rotating shaft 13 side, and as in the case of the first embodiment, a correspondingly large torque is required.

  Also in this embodiment, as in the first embodiment shown in FIG. 1, the distance between the first rotating roller 11 and the second rotating roller 12 is formed to be adjustable.

  Also in this embodiment, after the first and second rotating rollers 11 and 12 are rotated, the loop-shaped member 15 formed of a dielectric moves and is adhered to the adhesive 11A and rotated by a predetermined amount. Since it is peeled from the pressure-sensitive adhesive 11A, the peeling discharge is generated at the peeling point at the moment when the loop-shaped member 15 is peeled off. As a result, X-rays and terahertz electromagnetic waves are radiated as in the first embodiment.

  On the other hand, since the first and second rotating rollers 11 and 12 in this embodiment have different diameters, the peeling point can be moved in the circumferential direction by the ratio of the diameters of the two. This is because the peeling point is defined by the contact point between the loop-shaped member 15 and the first and second rotating rollers 11 and 12. Therefore, the generation point P21 of the X-ray and the terahertz electromagnetic wave due to the peeling discharge in this embodiment is constant, and the X-ray and the terahertz electromagnetic wave generated thereby are also in a predetermined direction, but the center of the rotating shaft 13 and the generation point P21 are connected. The direction of the straight line is extended.

  Thus, according to this embodiment, the generation point P21 of the X-rays and the terahertz electromagnetic wave is arbitrarily adjusted by arbitrarily selecting the ratio of the diameter of the first rotating roller 11 and the diameter of the second rotating roller 12. It becomes possible.

<Third Embodiment>
FIG. 3 is an enlarged view conceptually showing an extracted part of a terahertz electromagnetic wave or X-ray generator according to the third embodiment of the present invention. This embodiment corresponds to the first embodiment shown in FIG. 1, and a portion corresponding to the first rotating roller 1 in FIG. 1 is extracted.

  As shown in FIG. 3, in this embodiment, a first joining member 21 </ b> A made of a dielectric material is attached to the outer peripheral surface of the first rotating roller 21. On the other hand, the loop-shaped member 25 includes a base film 25A and a second bonding member 25B formed of a dielectric material on the inner surface of the base film 25A so as to be bonded to the first bonding member 21A. Here, the first joining member 21A and the second joining member 25B can be suitably formed using a hook-and-loop fastener (magic tape <registered trademark>). Note that the second rotating roller in which the loop-shaped member 25 is stretched between the first rotating roller 21 and the second rotating roller 2 shown in FIG. Also in this embodiment, the portions other than the first rotating roller 21 and the loop-shaped member 25 to which the first joining member 21A is adhered are configured in the same manner as in the first embodiment shown in FIG. .

  In the third embodiment, the loop-shaped member 25 is moved along with the rotation of the first rotating roller 21 and the second rotating roller (only the first rotating roller is shown in the figure, the same applies hereinafter). Are moved between the second rotating roller 21 and the second rotating roller, and the second bonding member 25B is bonded to the first bonding member 21A along with the movement, and then peeled off. As a result, as in the first embodiment, X-rays and terahertz electromagnetic waves are radiated from the generation point P31.

<Fourth embodiment>
FIG. 4 is an enlarged view conceptually showing an extracted part of a terahertz electromagnetic wave or X-ray generator according to the fourth embodiment of the present invention. This embodiment corresponds to the second embodiment shown in FIG. 2, and a portion corresponding to the first rotating roller 11 in FIG. 2 is extracted.

  As shown in FIG. 4, this embodiment is different from the third embodiment shown in FIG. 3 in that the first rotating roller 31 and the second rotating roller (only the first rotating roller is shown in the figure. The only difference is the difference in diameter. That is, the first bonding member 31A formed of a dielectric material is also attached to the outer peripheral surface of the first rotating roller 31 in this embodiment. On the other hand, the loop-shaped member 35 includes a base film 35A and a second bonding member 35B formed of a dielectric material on the inner surface of the base film 35A so as to be bonded to the first bonding member 31A. Here, the first joining member 31A and the second joining member 35B can also be suitably formed using a hook-and-loop fastener (magic tape <registered trademark>). Note that the second rotating roller in which the loop-shaped member 35 is stretched between the first rotating roller 31 and the second rotating roller 12 shown in FIG. That is, the diameter of the first rotating roller 31 is smaller than the diameter of the second rotating roller. Also in this embodiment, the portions other than the first rotating roller 31 and the loop-shaped member 35 to which the first joining member 31A is adhered are configured in the same manner as in the second embodiment shown in FIG. .

  In the fourth embodiment, the loop-shaped member 35 moves between the first rotating roller 31 and the second rotating roller in accordance with the rotation of the first rotating roller 31 and the second rotating roller. Accordingly, the second bonding member 35B is bonded to the first bonding member 31A and moved, and then peeled off. As a result, as in the second embodiment, X-rays and terahertz electromagnetic waves are emitted from a specific generation point P41 determined by (the diameter of the first rotating roller 31) / (the diameter of the second rotating roller). .

<Other embodiments>
In each of the above embodiments, the predetermined peeling is configured to occur in the vacuum containers 6 and 16, but it is not always necessary to be accommodated in the vacuum containers 6 and 16. In particular, terahertz electromagnetic waves are radiated well even in the atmosphere.

  In each of the above embodiments, the peeling discharge is generated on the first rotating roller side. However, the peeling discharge may be generated only on the second rotating roller side. Needless to say, it may be configured to occur not only on the second rotating roller side. In the former case, an adhesive is applied only to the second rotating rollers 2 and 12 (in the case of the first and second embodiments), or the first joining member is adhered (third). And in the case of the fourth embodiment). In the latter case, the adhesive is applied to the second rotating rollers 2 and 12 side as well as the first rotating rollers 1 and 11 side (in the case of the first and second embodiments), or the first The bonding member is attached (in the case of the third and fourth embodiments). Here, the radiation direction of X-rays or the like on the second rotating roller side is a drawing drawn from the center of the rotating shafts 4 and 14 toward the contact point between the second rotating rollers 2 and 12 and the loop members 5 and 15. 1 (a) is a lower line in FIG. 2 (a).

  In the second and fourth embodiments, peeling discharge is generated only on the first rotating rollers 11 and 31 having a small diameter. Such a configuration is suitable when it is desired to frequently generate terahertz electromagnetic waves and X-rays. On the contrary, when the occurrence frequency may be small, it may be configured such that the peeling discharge is generated on the second rotating shaft side having a large diameter.

  Furthermore, the loop member is not limited to the tape member. As long as it is formed of a dielectric member, a linear member may be used. Moreover, a piezo tape can also be used for the material.

  The energy of X-rays obtained by peeling charging in each of the above-described embodiments is currently about 10 to 20 keV, which is sufficient for irradiating a sample to emit fluorescent X-rays. Therefore, it is possible to construct a fluorescent X-ray analyzer having excellent performance by taking advantage of the small size, excellent portability, and good use even in a narrow space.

  Hereinafter, reference will be made to the application of fluorescent X-ray analysis. X-ray fluorescence analysis is a technique often used for composition analysis of the sample surface. Fluorescent X-rays are also called intrinsic X-rays and characteristic X-rays because they have energy (wavelength) specific to the element. By using this, analysis of the elements that make up the sample is performed by fluorescent X-ray analysis ( x-ray fluorescence analysis (XRE). In fluorescent X-ray analysis, the type of element is determined from the energy (wavelength) of fluorescent X-ray, and the amount (concentration) of the element is determined from fluorescent X-ray intensity.

  An experiment for proof of principle was conducted here. As the X-ray generator, an X-ray generator using peeling electrification similar to the above embodiment was used. On the other hand, as the fluorescent X-ray detector, an X-ray spectrometer excellent in energy resolution in a low energy X-ray region was used.

Samples were around me, (a) boiled egg shells broken into bags, (b) copper plate tape, (c) tungsten (W) plate (0.1 mm), (d) SUS plate ( ^T 5 mm).

  The results are shown in FIGS. 6 (a), (b), (c), and (d). 6A to 6D, it can be seen that a fluorescent X-ray peak corresponding to the main component of the sample specimen can be observed.

  From the above results, it has been clarified that the strip tape-type peeling charged X-ray source according to this embodiment can be used for fluorescent X-ray analysis.

  As an application example of such fluorescent X-ray analysis, there is a thin film thickness measurement. In recent years, thickness reduction of zinc plating applied to steel towers has been reported. If the thickness of the galvanizing becomes too thin, effects such as corrosion resistance are reduced, leading to deterioration of the steel bar material. Therefore, it is very important to know the remaining film thickness of galvanization for the safety management of steel tower facilities.

  On the other hand, the thickness of the thin film can be measured by performing fluorescent X-ray analysis as described above. The measurement principle is shown in FIG. In this example, a steel tower is assumed, the metal is iron, and the plating is zinc. In the figure, there is no plating on the left side and a thick plating layer on the right side. When there is no plating at all, no fluorescent X-rays of zinc as a plating composition are observed, so only fluorescent X-rays of iron as a bare metal are observed. On the other hand, when the plating layer is sufficiently thick, the incident X-rays are considerably attenuated in the plating layer before reaching the metal layer, so that the primary X-ray intensity for exciting iron atoms becomes small. Furthermore, the fluorescent X-rays of iron generated in the metal layer are attenuated again in the thick plating layer and do not reach the detector. Therefore, only the fluorescent X-ray of zinc which is a plating composition is observed. In the intermediate region between them, fluorescent X-rays of both zinc and iron can be observed, and the intensity thereof depends on the thickness of the plating layer.

  The features of this method using X-ray fluorescence analysis are that non-destructive measurement is possible, unlike the microscopic section method and electrolysis method, and measurement in the thin film region is possible compared to eddy current and magnetic methods. And so on. However, if the metal and plating are the same element, such as copper plating on brass (brass), the observed X-ray energy will be the same, and it will be discriminated whether the X-ray comes from the metal or plating. It is not possible to determine the plating thickness.

  Although the thickness of the galvanization varies considerably depending on the coating method and the material, the approximate thickness is given in Table 1.

Although it is considered that an alloy layer is formed in the region where the plating thickness is 100 μm or less, for the purpose of proof of principle, a zinc thin film with a thickness of 0 to 100 μm is placed on a 1 mm thick iron as a simulation sample. An experiment was conducted to see if there was a difference in the X-ray spectra. The experimental conditions were the same as in the X-ray fluorescence analysis except that the degree of vacuum was ˜4 × 10 ⁻³ mbar and the irradiation time was 5 minutes.

The obtained result is shown in FIG. In FIG. 8A in which no zinc thin film is placed, only fluorescent X-rays from iron are observed, and no fluorescent X-rays of zinc are observed. In FIG. 8B of the zinc thin film ^t 25 μm, although the intensity is low, the fluorescent X-rays from iron can be confirmed as shown in the enlarged view in the figure. In FIG. 8B to FIG. 8D where the zinc thin film is installed, two fluorescent X-ray peaks K _α and K _β from zinc can be observed. In any of the energy distributions shown in FIGS. 8A to 8D, a fluorescent X-ray peak of Ni is generated, which is caused by SUS constituting the apparatus.

9A and 9B show the relationship between the fluorescent X-ray peak intensity and the zinc thickness, and the relationship between the zinc and iron peak intensity ratio and the zinc thickness, respectively. In FIG. 7A, the dependence of iron _{Kα on} the zinc thickness is remarkable, but qualitatively, the result as expected from FIG. 7B showing the principle could be obtained. As for (b) in the figure, the signal intensity ratio in the absence of the zinc thin film is theoretically 0, and should approach infinity as the thin film becomes thicker. Absent. Further, this ratio is reversed at the zinc thicknesses of 50 μm and 100 μm, but this is considered to be caused by an increase in error because it is divided by the fluorescent X-ray signal intensity from iron, which is almost the background level. Basically, as the plating becomes thicker, the fluorescent X-rays from the plating increase. Therefore, in the region where the zinc thin film (plating layer) is thick, the evaluation is based only on the fluorescent X-ray intensity from zinc rather than taking the signal intensity ratio. Seems to be better. In this case, the stability of the X-ray source intensity is important.

  On the other hand, when paying attention to the thickness range of 0 to 50 μm, it can be seen that in this region, the intensity ratio changes by about five digits and changes very sensitively according to the plating thickness. Therefore, application to the measurement of the remaining film thickness in this region is expected. Furthermore, if the intensity and energy of the peel-off charged X-ray source can be increased, the fluorescent X-ray intensity also increases, so that the evaluation range can be expanded and the measurement accuracy can be improved. In addition, fluorescent X-ray peaks of Si, Ca, Ti, and Zn have been observed from anticorrosive epoxy resins used as coating agents in power distribution facilities, so the application of this method to coating thickness measurement is also considered. It is done.

<Fifth embodiment>
A preferred embodiment to which such fluorescent X-ray analysis is applied will be described as a fifth embodiment. FIG. 10 is a schematic perspective view showing a line-shaped X-ray fluorescence analyzer according to the fifth embodiment of the present invention. As shown in the figure, the basic structure is a linear X-ray fluorescence spectrometer constructed using an X-ray generator similar to the X-ray generator according to the first embodiment shown in FIG. It is. Therefore, parts corresponding to those in FIG. 1 are denoted by the same reference numerals, and redundant description is omitted.

  The X-ray generator I in this embodiment forms a line-shaped peeled charged X-ray having an arbitrary length by forming the loop-shaped member 5 to be long. Here, an X-ray emission window 6A is formed in the radial direction from the center of the first rotating roller 1 at the separation point. The X-ray emission window 6 </ b> A is a linear X-ray transmission window extending in the width direction of the loop-shaped member 5 and extending in the axial direction of the cylindrical vacuum vessel 6. Specifically, the vacuum vessel 6 formed of SUS, anodized, or the like can be easily formed by reducing the thickness of only the X-ray emission window 6A.

  The sample IV is irradiated with the linearly peeled charged X-ray transmitted through the X-ray emission window 6A of the X-ray generator I. As a result, linear fluorescent X-rays are emitted from the sample IV. An X-ray detector III configured with an X-ray spectrometer has a detector main body (not shown) housed in a housing 42. Here, the housing 42 is provided with a fluorescent X-ray incident window 42A for allowing linear fluorescent X-rays emitted from the sample IV to enter without being attenuated.

  Here, the X-ray generator I and the X-ray detector III are arranged on a table 40 formed so as to be movable via wheels 41. On the table 40, the X-ray generator I and the X-ray detector III are positioned and fixed so that the positional relationship between the X-ray emission window 6A and the fluorescent X-ray incident window 42A with respect to the sample IV is constant. .

  X-ray attenuation can be suppressed as much as possible by transmitting the X-ray emission window 6A and the fluorescent X-ray incident window 42A as in the present embodiment.

  As described above, the feature of X-ray generation from peeling electrification is that the configuration is simple and the design flexibility is excellent. In this embodiment, it can be constructed as a measurement diagnosis system that makes use of this design flexibility.

  According to this embodiment, the linear distribution of the sample IV is obtained by analyzing the fluorescent X-ray from the sample IV corresponding to the line shape of the peeled charged X-ray. In addition, the X-ray generator I and the X-ray detector III are synchronized and scanned in the horizontal direction (the positional relationship in the horizontal direction is kept constant), so that the two-dimensional composition distribution of the target sample IV and the two The dimension plating thickness distribution can be easily obtained.

  It should be noted that the length of the linear peeled charged X-ray obtained in this embodiment can be easily and arbitrarily selected by adjusting the width of the loop-shaped member 5 and the dimensions of the rotating rollers 1 and 2. That is, the length of the X-ray generation region can be easily changed by simply replacing the loop tape or the like.

  In addition, the film thickness of each of the plurality of materials specified by the wavelength of the fluorescent X-ray is based on the intensity of the fluorescent X-ray emitted from the reference sample when the X-ray detector III is irradiated with the peeled charged X-ray on the reference sample If the storage means for storing the information is provided, the intensity at a specific wavelength of the fluorescent X-ray emitted by irradiating the sample IV with the peeling charged X-ray is detected and compared with the stored contents of the storage means. Thus, the film thickness of a specific element can be accurately measured. Similarly, the data of the reference sample is stored in the storage means, and by comparing the stored content with the actually measured data, it is possible to contribute to an accurate analysis of the sample IV to be analyzed.

  As described above in detail with the embodiment, the peel-off charged X-ray source has a simple configuration because it generates X-rays simply by contacting and peeling the adhesive tape or dielectric in vacuum. Very flexible. Therefore, it is expected not only to reduce the size of the X-ray generator, but also to develop an X-ray source according to the shape of each measurement object.

Further, by measuring the energy distribution using an X-ray spectrometer, it was possible to confirm the generation of X-rays of about 10 to 20 keV in the loop tape method as in the one-way winding method. In the X-ray emission spatial distribution measured using the imaging plate, as expected, the strength was highest in the vicinity of the peeling point of the adhesive substance attached to the loop tape and the rotating shaft. Regarding the degree of vacuum dependence of the X-ray intensity, it was observed at a high vacuum higher than 4 × 10 ⁻² mbar, and the intensity was maximum at 4 to 5 × 10 ⁻³ mbar.

  In addition, regarding the material dependency, it was confirmed that X-rays were generated even without an adhesive, such as a combination of an epoxy resin and a transparent adhesive tape.

  Furthermore, as an application example of the X-ray source of the present invention, the applicability to fluorescent X-ray analysis and film thickness measurement was examined. Several samples were measured, and fluorescent X-ray peaks such as Ca, Cr, Fe, Ni, Cu, and W could be confirmed. As a result, it has been clarified that a loop tape-type peel-off charged X-ray source can be used for fluorescent X-ray analysis.

  In the thin film thickness measurement, assuming the measurement of the remaining film thickness of zinc plating applied to the steel tower, a zinc thin film with a thickness of 0 to 100 microns is placed on 1 mm thick iron, and the difference in the fluorescent X-ray spectrum is examined. As a result, a remarkable difference appeared in the fluorescent X-ray spectrum when the thickness of the zinc thin film was 0 to 50 μm. When the fluorescent X-ray intensity ratio of zinc and iron was examined, it was found that the intensity ratio changed by about 5 digits in the above-mentioned region and changed very sensitively according to the plating thickness. Furthermore, if the intensity (dose) and energy of the peel-off charged X-ray source can be increased, the fluorescent X-ray intensity also increases, so that the evaluation range can be expanded and the measurement accuracy can be improved.

  The present invention can be effectively used in the industrial field where non-destructive inspection is performed using X-rays and terahertz electromagnetic waves.

I, II Terahertz electromagnetic wave or X-ray generator
III X-ray detector IV Sample 1, 11, 21, 31 First rotating roller 1A, 11A Adhesive 2, 12 Second rotating roller 3, 4, 13, 14 Rotating shaft 5, 15, 25, 35 Loop shape Members 6 and 16 Vacuum container 6A X-ray emission window 21A First coupling member 25B Second coupling member 42A Fluorescent X-ray incident window

Claims (10)

First and second rotating rollers formed so as to be rotatable around two central axes disposed separately in the horizontal direction;
A first joining member that is adhered to at least one outer peripheral surface of the first and second rotating rollers and formed of a dielectric material;
A second joining member formed of a dielectric material that is hung between the first and second rotating rollers and has an inner peripheral surface joined by contact with the first joining member; After moving between the first and second rotating rollers as the first and second rotating rollers rotate, and after the second bonding member is bonded to the first bonding member and moved along with the movement A terahertz electromagnetic wave or X-ray generator characterized by having a strip-like or strip-like loop-shaped member that emits a peeled charged terahertz electromagnetic wave or a peeled charged X-ray when peeled. The terahertz electromagnetic wave or X-ray generator according to claim 1,
A terahertz electromagnetic wave or X-ray generator characterized in that the first and second rotating rollers, the first and second joining members, and the loop-shaped member are housed in a vacuum state in a vacuum container. The terahertz electromagnetic wave or X-ray generator according to claim 1 or 2,
The terahertz electromagnetic wave or X-ray generator, wherein the first joining member is made of an adhesive. The terahertz electromagnetic wave or X-ray generator according to claim 1 or 2,
The terahertz electromagnetic wave or X-ray generator, wherein the first and second joining members are formed of a hook-and-loop fastener. In the terahertz electromagnetic wave or X-ray generator according to any one of claims 1 to 4,
A terahertz electromagnetic wave or X-ray generator, wherein the first and second rotating rollers have different diameters. In the terahertz electromagnetic wave generator or the X-ray generator according to any one of claims 1 to 5,
A terahertz electromagnetic wave or X-ray generator characterized in that an interval between the first rotating roller and the second rotating roller can be adjusted. Among the terahertz electromagnetic wave or X-ray generators according to any one of claims 2 to 6, an X-ray generator having the vacuum vessel;
Detection means (X) that irradiates the sample with the peeled charged X-ray from the generator and detects the fluorescent X-ray emitted from the sample to obtain the type of the sample and the amount (concentration) of the element in the sample X-ray fluorescence analyzer characterized by having an X-ray spectrometer. In the fluorescent X-ray analyzer according to claim 7,
The loop-shaped member is formed of a band-shaped member, and the detection means detects and analyzes linear fluorescent X-rays emitted from the sample based on the linear peeled charged X-rays irradiated from the band-shaped member. An X-ray fluorescence analyzer characterized by that. The fluorescent X-ray analyzer according to claim 8,
The vacuum vessel has an X-ray emission window for X-ray transmission that is in the width direction of the belt-like member and extends in the axial direction of the vacuum vessel.
Fluorescence that extends in the same direction as the axial direction that transmits fluorescent X-rays emitted from the sample based on the irradiated X-rays and that maintains a positional relationship with the X-ray emission window with respect to the sample. An X-ray fluorescence analyzer characterized in that the detection means has an X-ray incident window. In the fluorescent X-ray analyzer according to any one of claims 7 to 9,
The detection means includes
Film thickness information for each of a plurality of materials specified by the wavelength of the fluorescent X-ray is stored based on the intensity of the fluorescent X-ray emitted from the reference sample by irradiating the reference sample with the peeled charged X-ray. Storage means;
The film thickness of a specific element is measured by detecting the intensity at a specific wavelength of fluorescent X-rays emitted by irradiating the sample with the exfoliated X-ray and comparing it with the stored contents of the storage means. A film thickness measuring apparatus characterized by comprising.