JP5807222B2 - Optical spectrum measuring device - Google Patents

Optical spectrum measuring device Download PDF

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JP5807222B2
JP5807222B2 JP2009163206A JP2009163206A JP5807222B2 JP 5807222 B2 JP5807222 B2 JP 5807222B2 JP 2009163206 A JP2009163206 A JP 2009163206A JP 2009163206 A JP2009163206 A JP 2009163206A JP 5807222 B2 JP5807222 B2 JP 5807222B2
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density
frequency comb
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JP2011017649A (en
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黒川 隆志
隆志 黒川
達俊 塩田
達俊 塩田
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NATIONAL UNIVERSITY CORPORATION TOKYO UNIVERSITY OF AGRICULUTURE & TECHNOLOGY
Saitama University NUC
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Description

本発明は、周波数コム光を用いた光スペクトル計測装置に関し、高分解能で広帯域な周波数範囲での掃引が可能な光スペクトル計測装置に関する。   The present invention relates to an optical spectrum measuring apparatus using frequency comb light, and more particularly to an optical spectrum measuring apparatus capable of sweeping in a wide frequency range with high resolution.

従来、周波数コム光を用いた光スペクトル計測装置として図7に示す構成の装
置が知られている(特許文献1等参照)。
この光スペクトル計測装置8では、光コム光源81が、たとえば4THzの範囲で、コム間隔が10GHzの光周波数コムを発生する。
Conventionally, an apparatus having a configuration shown in FIG. 7 is known as an optical spectrum measuring apparatus using frequency comb light (see Patent Document 1).
In the optical spectrum measuring apparatus 8, the optical comb light source 81 generates an optical frequency comb having a comb interval of 10 GHz in a range of 4 THz, for example.

波長可変フィルタ82は、光周波数コムを入射し、この光周波数コムを構成する成分光のうち1つの成分光を通過させる。
SSB光変調器83は、波長可変フィルタ82からの成分光を入射し、所定掃引幅(10GHz)で周波数掃引(たとえば数kHzから1MHz程度)された信号を試料85に照射する。そして、受光器84は、試料85からの透過光を受光する。
The wavelength tunable filter 82 receives an optical frequency comb and passes one component light among the component lights constituting the optical frequency comb.
The SSB light modulator 83 receives the component light from the wavelength tunable filter 82 and irradiates the sample 85 with a signal swept in frequency (for example, about several kHz to 1 MHz) with a predetermined sweep width (10 GHz). The light receiver 84 receives the transmitted light from the sample 85.

なお、図示しない制御装置は、波長可変フィルタ82の通過特性を制御信号により変更制御し、かつSSB変調器83に与える掃引信号を制御するとともに、受光器84が検出した信号をスペクトラムとして解析し、解析結果をディスプレイ等に出力する。
図7の光スペクトル計測装置8では、図8(A)に示すように、計測範囲が4THzの設定してあり、コム間隔は概ね10GHzである。波長可変フィルタ82により、光周波数コムのうちから1つのコム成分(図8(B)ではFn)を抽出する(切り出す)。この光スペクトル計測装置8によれば、計測範囲は大幅に拡大する。
The control device (not shown) changes and controls the pass characteristic of the wavelength tunable filter 82 by the control signal, controls the sweep signal applied to the SSB modulator 83, analyzes the signal detected by the light receiver 84 as a spectrum, The analysis result is output to a display or the like.
In the optical spectrum measurement device 8 of FIG. 7, as shown in FIG. 8A, the measurement range is set to 4 THz, and the comb interval is approximately 10 GHz. The tunable filter 82 extracts (cuts out) one comb component (Fn in FIG. 8B) from the optical frequency comb. According to this optical spectrum measurement device 8, the measurement range is greatly expanded.

そして、図8(C)に示すように、SSB変調装置83により、連続的な掃引が行われ、最終的には100kHz以下の計測精度が実現される。   Then, as shown in FIG. 8C, continuous sweeping is performed by the SSB modulation device 83, and finally a measurement accuracy of 100 kHz or less is realized.

特開2007−212427JP2007-212427

しかし、図7に示した光スペクトル計測装置8では、SSB変調器83は波長が大きく変わると印加電圧を調整しなおさねばならない。このため、一度に大きな波長範囲を測定する場合には不向きである。
また、図7に示した光スペクトル計測装置8では、波長可変フィルタ82では、1つのコムのみを切り出さねばならないが、このようなフィルタを安価に作成することは容易ではない。
However, in the optical spectrum measuring apparatus 8 shown in FIG. 7, the SSB modulator 83 has to adjust the applied voltage again when the wavelength changes greatly. For this reason, it is not suitable for measuring a large wavelength range at a time.
Further, in the optical spectrum measuring apparatus 8 shown in FIG. 7, the wavelength tunable filter 82 has to cut out only one comb, but it is not easy to produce such a filter at low cost.

本発明の目的は、上記の問題を解決するために提案されたものであって、幅広い周波数範囲での掃引が可能な光スペクトル計測装置を提供することである。   An object of the present invention is to provide an optical spectrum measuring apparatus that has been proposed to solve the above-described problems and that can sweep in a wide frequency range.

本発明は、〔1〕から〔4〕を要旨とする。
〔1〕
周波数コム光源と、コム光密度低減器と、掃引用変調器と、ビート生成器と、受光器とを備え、前記ビート生成器の入射光側に試料がセットされる光スペクトル計測装置において、
前記コム光密度低減器は、前記周波数コム光源が生成する周波数コム光を構成する周波数コム光要素を、それぞれ所定数ごとに選択した複数の低密度周波数コム光(典型的には、Nごとに選択したNの低密度周波数コム光。ただし、Nは2以上の整数)に配分し、当該分配した低密度周波数コム光の中から1つを順次選択して出射し、
前記掃引用変調器は、前記コム光密度低減器からの低密度周波数コム光を入射し、当該低密度周波数コム光を構成する周波数コム光要素のそれぞれについて掃引を行い、
前記ビート生成器は、前記各周波数コム光要素がそれぞれ掃引されてなる前記掃引用変調器から出射された低密度周波数コム光に特定周波数の参照光を加えてビートを生成し、
前記受光器は前記ビート生成器の出射光を検出する、
ことを特徴とする光スペクトル計測装置。
The gist of the present invention is [1] to [4].
[1]
In an optical spectrum measurement device comprising a frequency comb light source, a comb light density reducer, a sweeping modulator, a beat generator, and a light receiver, and a sample is set on the incident light side of the beat generator,
The comb light density reducer includes a plurality of low-density frequency comb light (typically for each N), each of which is selected for each predetermined number of frequency comb light elements constituting the frequency comb light generated by the frequency comb light source. N selected low density frequency comb lights, where N is an integer of 2 or more, and one of the distributed low density frequency comb lights is sequentially selected and emitted.
The sweeping modulator is incident on the low-density frequency comb light from the comb light density reducer, performs a sweep for each of the frequency comb optical elements constituting the low-density frequency comb light,
The beat generator generates a beat by adding a reference light of a specific frequency to a low density frequency comb light emitted from the reference modulator formed by sweeping each frequency comb optical element,
The light receiver detects light emitted from the beat generator;
An optical spectrum measuring apparatus characterized by that.

〔2〕
前記コム光密度低減器が、1または2以上の、インターリーバと光切換器との組から構成され、
前記インターリーバは、前記周波数コム光源が生成する周波数コム光を、それぞれ所定数ごとに選択した複数の低密度周波数コム光に配分して出射し、
前記光切換器は、インターリーバから出射される前記複数の低密度周波数コム光の中から1つを順次選択して出射する、
ことを特徴とする〔1〕に記載の光スペクトル計測装置。
[2]
The comb light density reducer is composed of one or more pairs of an interleaver and an optical switch,
The interleaver distributes the frequency comb light generated by the frequency comb light source to a plurality of low density frequency comb lights selected for each predetermined number, and emits the light.
The optical switch sequentially selects and emits one of the plurality of low density frequency comb lights emitted from an interleaver;
[1] The optical spectrum measuring apparatus according to [1].

〔3〕
前記掃引用変調器として光位相変調器を用いたことを特徴とする〔1〕または〔2〕に記載の光スペクトル計測装置。
[3]
The optical spectrum measuring apparatus according to [1] or [2], wherein an optical phase modulator is used as the sweeping modulator.

〔4〕
前記受光器は、
前記ビート生成器の出射光を受光して電気信号に変換する光電変換器と、
前記光電変換器の低周波成分を通過させるローパスフィルタと、
を含むことを特徴とする〔1〕から〔3〕の何れかに記載の光スペクトル計測装置。
[4]
The receiver is
A photoelectric converter that receives the emitted light of the beat generator and converts it into an electrical signal;
A low-pass filter that passes low-frequency components of the photoelectric converter;
The optical spectrum measuring apparatus according to any one of [1] to [3], including:

本発明の光スペクトル計測装置によれば、インターリーバにより高密度の周波数コム光を低密度化して処理を行うので、幅広い周波数範囲での掃引が可能となる。また、波長可変フィルタを使用していないので、幅広い周波数範囲でのスペクトルを一度に測定することができる。   According to the optical spectrum measuring apparatus of the present invention, processing is performed by reducing the density of high-frequency frequency comb light by an interleaver, and thus sweeping in a wide frequency range is possible. In addition, since a wavelength tunable filter is not used, a spectrum in a wide frequency range can be measured at a time.

また、掃引用変調器として光位相変調器を使用することで、調整が簡単ないし不要とできるし、高分解能かつ低損失の周波数掃引を行うことができる。
これにより、安定した測定結果を得ることができる。
Further, by using an optical phase modulator as the sweeping modulator, adjustment can be made simple or unnecessary, and high-resolution and low-loss frequency sweeping can be performed.
Thereby, a stable measurement result can be obtained.

さらに、掃引用変調器とビート生成器と受光器とをユニットとして複数備える構成では、単一試料についてのマルチパス測定、あるいは複数試料の同時測定を行うこともできる。   Furthermore, in a configuration including a plurality of sweeping modulators, beat generators, and light receivers as a unit, multipath measurement for a single sample or simultaneous measurement of a plurality of samples can be performed.

図1は本発明の光スペクトル計測装置の一実施形態を示す説明図である。FIG. 1 is an explanatory view showing an embodiment of an optical spectrum measuring apparatus of the present invention. (A)はN=2のときの周波数コム光を示す図、(B),(C)は低密度周波数コム光を示す図である。(A) is a figure which shows the frequency comb light in case of N = 2, (B), (C) is a figure which shows a low density frequency comb light. (A)はビート生成器の具体的構成を示す図、(B)は受光器の具体的構成を示す図である。(A) is a figure which shows the specific structure of a beat generator, (B) is a figure which shows the specific structure of a light receiver. コム光密度低減器が、1つのインターリーバと1つの光切換器から構成され、周波数コム光源が生成するコム光要素を2つごとに選択して2つの低密度周波数コム光を生成する光スペクトル計測装置を示す図である。An optical spectrum in which the comb optical density reducer is composed of one interleaver and one optical switch, and selects two comb optical elements generated by the frequency comb light source every two to generate two low density frequency comb lights It is a figure which shows a measuring device. コム光密度低減器が、2つのインターリーバと2つの光切換器から構成され、周波数コム光源が生成するコム光要素を4つごとに選択して2つの低密度周波数コム光を生成する光スペクトル計測装置を示す図である。An optical spectrum in which the comb optical density reducer is composed of two interleavers and two optical switchers, and selects four comb optical elements generated by the frequency comb light source to generate two low density frequency comb lights. It is a figure which shows a measuring device. (A)はコム光密度低減モジュールから構成したコム光密度低減器を示す図であり、(B)は周波数コム光と、中間密度周波数コム光と、低密度周波数コム光との周波数配置関係を示す図である。(A) is a figure which shows the comb light density reducer comprised from the comb light density reduction module, (B) shows the frequency arrangement | positioning relationship of a frequency comb light, an intermediate density frequency comb light, and a low density frequency comb light. FIG. 従来の周波数コム光を用いた光スペクトル計測装置の説明図である。It is explanatory drawing of the optical spectrum measuring device using the conventional frequency comb light. (A)は周波数コム光を示す図、(B)は光周波数コムのうちから1つのコム成分を切り出した様子を示す図、(C)は切り出したコム成分についてSSB変調装置により、連続的な掃引を行なう様子を示す図である。(A) is a diagram showing frequency comb light, (B) is a diagram showing a state in which one comb component is cut out from the optical frequency comb, and (C) is a diagram showing a continuous comb component by the SSB modulator. It is a figure which shows a mode that a sweep is performed.

図1は本発明の光スペクトル計測装置の一実施形態を示す説明図である。
図1において、光スペクトル計測装置1は、周波数コム光源11と、コム光密度低減器12と、掃引用変調器13と、ビート生成器14と、受光器15と、制御装置16と、表示出力装置17とがこの順で接続されおり、ビート生成器14の入射光側には試料18がセットされている。
FIG. 1 is an explanatory view showing an embodiment of an optical spectrum measuring apparatus of the present invention.
In FIG. 1, an optical spectrum measuring apparatus 1 includes a frequency comb light source 11, a comb light density reducer 12, a sweeping modulator 13, a beat generator 14, a light receiver 15, a control device 16, and a display output. The device 17 is connected in this order, and a sample 18 is set on the incident light side of the beat generator 14.

周波数コム光源11は周波数コム光L1を生成し、このコム光L1をコム光密度低減器12に出力する。
コム光密度低減器12は、制御装置16からの制御信号SWにより動作するもので、周波数コム光L1を構成する周波数コム光要素を、それぞれ所定数ごとに選択した複数の低密度周波数コム光(典型的には、Nごとに選択したNの低密度周波数コム光。ただし、Nは2以上の整数)に配分し、当該分配した低密度周波数コム光の中から1つを順次選択して出射する。
The frequency comb light source 11 generates the frequency comb light L1 and outputs the comb light L1 to the comb light density reducer 12.
The comb light density reducer 12 is operated by a control signal SW from the control device 16, and a plurality of low-density frequency comb light (frequency comb light elements constituting the frequency comb light L1 are selected for each predetermined number). Typically, N low density frequency comb lights selected for each N (where N is an integer equal to or greater than 2), and one of the distributed low density frequency comb lights is sequentially selected and emitted. To do.

図1ではコム光密度低減器12の出射光をL2で示す。なお、コム光密度低減器12は、図4,図5において後述するようにインターリーバと光切換器とから構成できる。   In FIG. 1, the emitted light of the comb light density reducer 12 is indicated by L2. The comb light density reducer 12 can be composed of an interleaver and an optical switch as will be described later with reference to FIGS.

Nの低密度周波数コム光をC1,C2,・・・,CNとすると、これらは以下のように表わすことができる。
1:{X0,X0±N,X0±2N,・・・・},
2:{X0±1,X0±(N+1),X0±(2N+1),・・・・},
3:{X0±2,X0±(N+2),X0±(2N+2),・・・・},
・・・
N:{X0±(N−1),X0±(N+(N−1)),X0±(2N+(N−1)),・・・・}
If N low-density frequency comb lights are C 1 , C 2 ,..., C N , they can be expressed as follows.
C 1 : {X 0 , X 0 ± N, X 0 ± 2N, ...},
C 2 : {X 0 ± 1, X 0 ± (N + 1), X 0 ± (2N + 1), ...},
C 3 : {X 0 ± 2, X 0 ± (N + 2), X 0 ± (2N + 2), ...},
...
C N : {X 0 ± (N−1), X 0 ± (N + (N−1)), X 0 ± (2N + (N−1)),.

ここで、中括弧内の数字は、周波数コム光要素に負を含む連続番号を付与したときの当該番号であり、X0は周波数コム光を構成する周波数コム光要素に付された任意番号である。 Here, the numbers in the curly braces are the numbers when the frequency comb optical elements are assigned consecutive numbers including negative, and X 0 is an arbitrary number assigned to the frequency comb optical elements constituting the frequency comb light. is there.

図2(A)にN=2のときの周波数コム光L1を示し、図2(B),(C)に低密度周波数コム光C1,C2を示す。図2(A)〜(C)では、X0=0としてある。 FIG. 2A shows the frequency comb light L1 when N = 2, and FIGS. 2B and 2C show the low density frequency comb lights C 1 and C 2 . 2A to 2C, X 0 = 0.

掃引用変調器13は制御装置16からの制御信号SWPにより動作するもので、コム光密度低減器12の出射光L2(低密度周波数コム光C1,C2,・・・,CNの何れか1つ)を入射し、当該低密度周波数コム光を構成する周波数コム光要素のそれぞれについて掃引を行う。掃引用変調器13として光位相変調器を用いることで、より高分解能の周波数掃引を行うことができる。 The sweeping modulator 13 is operated by a control signal SWP from the control device 16, and is emitted from the comb light density reducer 12 (any one of the low-density frequency comb lights C 1 , C 2 ,..., C N ). Or the frequency comb light element constituting the low density frequency comb light is swept. By using an optical phase modulator as the sweeping modulator 13, a higher-resolution frequency sweep can be performed.

ビート生成器14は制御装置16からの制御信号TWにより動作するもので、各周波数コム光要素がそれぞれ掃引されてなる掃引用変調器13から出射された低密度周波数コム光L3に特定周波数の参照光Lrefを加えてビートを生成する。   The beat generator 14 operates in response to a control signal TW from the control device 16 and refers to a specific frequency in the low density frequency comb light L3 emitted from the sweeping modulator 13 in which each frequency comb optical element is swept. Light Lref is added to generate a beat.

ビート生成器14は、図3(A)に示すように、参照用光源141と、合波器142とから構成することができる。合波器142は、低密度周波数コム光L3と、参照用光源141が発生する参照用光Lrefとを合波してL4として出射する。   The beat generator 14 can be composed of a reference light source 141 and a multiplexer 142 as shown in FIG. The multiplexer 142 combines the low density frequency comb light L3 and the reference light Lref generated by the reference light source 141, and outputs the combined light as L4.

受光器15は、ビート生成器14の出射光L4を検出する。受光器15は、図3(B)に示すように、光電変換器151とローパスフィルタ152とビート検出器153とから構成できる。光電変換器151は、ビート生成器14の出射光L4を受光してビート電気信号A1に変換し、ローパスフィルタ152は高次のビート電気信号を除去した信号A2を生成し、ビート検出器153は低次のビート信号A2の電圧値等を検出してデジタル処理等の処理が可能な情報に変換する。   The light receiver 15 detects the emitted light L4 from the beat generator 14. As shown in FIG. 3B, the light receiver 15 can be composed of a photoelectric converter 151, a low-pass filter 152, and a beat detector 153. The photoelectric converter 151 receives the emitted light L4 from the beat generator 14 and converts it into a beat electric signal A1, the low-pass filter 152 generates a signal A2 from which the higher-order beat electric signal is removed, and the beat detector 153 The voltage value or the like of the low-order beat signal A2 is detected and converted into information that can be processed by digital processing or the like.

制御装置16は、受光器15が検出した信号をスペクトラムとして解析し、前述したようにコム光密度低減器12と、掃引用変調器13と、ビート生成器14に制御信号を送出する。
表示出力装置17は、制御装置16による解析をディスプレイに表示し、あるいはプリンタに出力する。
The control device 16 analyzes the signal detected by the light receiver 15 as a spectrum, and sends a control signal to the comb light density reducer 12, the sweeping modulator 13, and the beat generator 14 as described above.
The display output device 17 displays the analysis by the control device 16 on a display or outputs it to a printer.

図4は本発明の光スペクトル計測装置の具体的な実施形態を示す説明図である。
図4における、光スペクトル計測装置1は、周波数コム光源11と、コム光密度低減器12と、掃引用変調器13と、ビート生成器14と、受光器15と、制御装置16と、表示出力装置17とがこの順で接続されおり、ビート生成器14の入射光側には試料18がセットされている。
FIG. 4 is an explanatory view showing a specific embodiment of the optical spectrum measuring apparatus of the present invention.
The optical spectrum measuring apparatus 1 in FIG. 4 includes a frequency comb light source 11, a comb light density reducer 12, a sweeping modulator 13, a beat generator 14, a light receiver 15, a control device 16, and a display output. The device 17 is connected in this order, and a sample 18 is set on the incident light side of the beat generator 14.

周波数コム光源11は周波数コム光L1を生成し、このコム光L1をコム光密度低減器12に出力する。コム光密度低減器12においてインターリーバ121は、周波数コム光源11からの周波数コム光L1を受光し、低密度周波数コム光C1,C2を生成する。光切換器122は、制御信号16からの制御信号(切換信号SW)により、C1,C2の何れかを選択して掃引用変調器13に送出する。 The frequency comb light source 11 generates the frequency comb light L1 and outputs the comb light L1 to the comb light density reducer 12. In the comb light density reducer 12, the interleaver 121 receives the frequency comb light L1 from the frequency comb light source 11, and generates low-density frequency comb lights C 1 and C 2 . The optical switch 122 selects either C 1 or C 2 according to the control signal (switch signal SW) from the control signal 16 and sends it to the sweeping modulator 13.

掃引用変調器13は、光切換器122の出射光L2(低密度周波数コム光C1またはC2)を入射し、制御信号16からの制御信号(掃引信号SWP)に基づき、C1またはC2を構成する周波数コム光要素のそれぞれについて掃引を行う。 Sweeping for modulator 13, emitted light L2 of the optical switching device 122 (low-density frequency comb light C 1 or C 2) is incident, based on the control signal from the control signal 16 (sweep signal SWP), C 1 or C Sweep is performed for each of the frequency comb optical elements constituting 2 .

上述したように、ビート生成器14は、掃引用変調器13からの掃引された低密度周波数コム光L3に、制御信号(検波用信号TW)により与えられる特定周波数の参照光Lrefを加えてビートを生成し受光器15に送出し、受光器15は、ビート生成器14の出射光L4を検出する。   As described above, the beat generator 14 adds the reference light Lref having a specific frequency given by the control signal (detection signal TW) to the swept low-density frequency comb light L3 from the reference modulator 13 to generate a beat. Is transmitted to the light receiver 15, and the light receiver 15 detects the emitted light L 4 of the beat generator 14.

そして、制御装置16は、受光器15が検出した信号をスペクトラムとして解析し、表示出力装置17は、解析をディスプレイに表示し、あるいはプリンタに出力する。   The control device 16 analyzes the signal detected by the light receiver 15 as a spectrum, and the display output device 17 displays the analysis on a display or outputs it to a printer.

図5は、コム光密度低減器を2段に構成した光スペクトル計測装置1を示す説明図であり、コム光密度低減器12をコム光密度低減モジュール12A,12Bとから構成してある。   FIG. 5 is an explanatory view showing an optical spectrum measuring apparatus 1 in which comb light density reducers are configured in two stages. The comb light density reducer 12 is composed of comb light density reduction modules 12A and 12B.

コム光密度低減器12Aにおいてインターリーバ121Aは、周波数コム光源11からの周波数コム光L1を受光し、低密度周波数コム光C01,C02を生成する。光切換器122Aは、制御信号16からの制御信号(切換信号SW1)により、C01,C02の何れかを選択してコム光密度低減器12Bに送出する。 In the comb light density reducer 12A, the interleaver 121A receives the frequency comb light L1 from the frequency comb light source 11, and generates low-density frequency comb lights C01 and C02 . The optical switch 122A selects either C 01 or C 02 according to the control signal (switch signal SW1) from the control signal 16, and sends it to the comb light density reducer 12B.

インターリーバ12Bは、低密度周波数コム光C01を入力しているときは低密度周波数コム光C1,C3を生成し、低密度周波数コム光C02を入力しているときは低密度周波数コム光C2,C4を生成する。そして、光切換器122Bは、制御信号16からの制御信号(切換信号SW2)により、低密度周波数コム光C01を入力しているときは低密度周波数コム光C1,C3の何れかを、低密度周波数コム光C02を入力しているときは低密度周波数コム光C2,C4の何れかを掃引用変調器13に送出する。図6に、周波数コム光L1と、中間密度周波数コム光C01,C02と、低密度周波数コム光C1,C2,C3,C4との周波数配置関係を示す。 The interleaver 12B generates the low density frequency comb light C 1 and C 3 when the low density frequency comb light C 01 is input, and the low density frequency when the low density frequency comb light C 02 is input. Comb lights C 2 and C 4 are generated. Then, the optical switch 122B receives one of the low density frequency comb lights C 1 and C 3 when the low density frequency comb light C 01 is input by the control signal (switch signal SW2) from the control signal 16. When the low density frequency comb light C 02 is being input, one of the low density frequency comb lights C 2 and C 4 is sent to the sweeping modulator 13. FIG. 6 shows a frequency arrangement relationship among the frequency comb light L1, the intermediate density frequency comb lights C 01 and C 02, and the low density frequency comb lights C 1 , C 2 , C 3 , and C 4 .

掃引用変調器13は、コム光密度低減器12の出射光L2(低密度周波数コム光C1,C2,C3,C4)を入射し、制御信号16からの制御信号(掃引信号SWP)に基づきC1,C2,C3,C4を構成する周波数コム光要素のそれぞれについて掃引を行う。 The sweeping modulator 13 receives the output light L2 (low-density frequency comb light C 1 , C 2 , C 3 , C 4 ) of the comb light density reducer 12, and receives a control signal (sweep signal SWP) from the control signal 16. ) Based on the frequency comb optical elements constituting C 1 , C 2 , C 3 , and C 4 .

ビート生成器14は、掃引用変調器13からの掃引された低密度周波数コム光L3に、制御信号(検波用信号TW)により与えられる特定周波数の参照光Lrefを加えてビートを生成し受光器15に送出し、受光器15は、ビート生成器14の出射光L4を検出する。   The beat generator 14 generates a beat by adding the reference light Lref having a specific frequency given by the control signal (detection signal TW) to the swept low density frequency comb light L3 from the sweeping modulator 13, and receives the light. 15, the light receiver 15 detects the emitted light L <b> 4 of the beat generator 14.

そして、制御装置16は、受光器15が検出した信号をスペクトラムとして解析し、表示出力装置17は、解析をディスプレイに表示し、あるいはプリンタに出力する。   The control device 16 analyzes the signal detected by the light receiver 15 as a spectrum, and the display output device 17 displays the analysis on a display or outputs it to a printer.

本発明の光スペクトル計測装置は、ガス成分の検出,結晶構造解析検出、流体速度検出等、幅広い分野での応用が可能である。   The optical spectrum measuring apparatus of the present invention can be applied in a wide range of fields such as detection of gas components, detection of crystal structure analysis, and detection of fluid velocity.

1 光スペクトル計測装置
11 周波数コム光源
12 コム光密度低減器
12A,12B コム光密度低減モジュール
13 掃引用変調器
14 ビート生成器
15 受光器
16 制御装置
17 表示出力装置
18 試料
121,121A,121B インターリーバ
122,122A,122B 光切換器
141 参照用光源
142 合波器
151 光電変換器
152 ローパスフィルタ
DESCRIPTION OF SYMBOLS 1 Optical spectrum measuring device 11 Frequency comb light source 12 Comb light density reducer 12A, 12B Comb light density reduction module 13 Sweep modulator 14 Beat generator 15 Light receiver 16 Control device 17 Display output device 18 Sample 121, 121A, 121B Inter Lever 122, 122A, 122B Optical switch 141 Light source for reference 142 Multiplexer 151 Photoelectric converter 152 Low pass filter

Claims (1)

周波数コム光源と、第1段および第2段のコム光密度低減モジュールから構成されたコム光密度低減器と、掃引用変調器と、ビート生成器と、受光器とを備え、前記ビート生成器の入射光側に試料がセットされる光スペクトル計測装置において、
前記各コム光密度低減モジュールのそれぞれが、インターリーバと光切換器とから構成され、
前記第1段のコム光密度低減モジュールの前記インターリーバは、前記周波数コム光源が生成する周波数コム光を構成する周波数コム光要素をそれぞれ2つごと選択した2つの低密度周波数コム光に配分し、前記第1段のコム光密度低減モジュールの前記光切換器は、前記2つの低密度周波数コム光の何れかを、前記第2段のコム光密度低減モジュールに送出し、
前記第2段のコム光密度低減モジュールの前記インターリーバは、前記第1段のコム光密度低減モジュールの前記光切換器からの低密度周波数コム光を構成する周波数コム光要素を、それぞれ2つごと選択した2つの低密度周波数コム光に配分し、前記第2段のコム光密度低減モジュールの前記光切換器は、前記第2段のコム光密度低減モジュールの前記インターリーバで配分された前記2つの低密度周波数コム光の何れかを、前記掃引用変調器に出射し、
前記掃引用変調器は、前記コム光密度低減器からの低密度周波数コム光を入射し、当該低密度周波数コム光を構成する周波数コム光要素のそれぞれについて掃引を行い、
前記ビート生成器は、前記各周波数コム光要素がそれぞれ掃引されてなる前記掃引用変調器から出射された低密度周波数コム光に特定周波数の参照光を加えてビートを生成し、
前記受光器は前記ビート生成器の出射光を検出する、
ことを特徴とする光スペクトル計測装置。
The beat generator comprises: a frequency comb light source; a comb light density reducer composed of a first stage and a second stage comb light density reduction module; a sweeping modulator; a beat generator; In an optical spectrum measurement device in which a sample is set on the incident light side of
Each of the comb light density reduction modules is composed of an interleaver and an optical switch,
The interleaver comb optical density reduction module of the first stage, the frequency comb light elements constituting the frequency comb light the frequency comb source generates for two low density frequency comb light selected 2 Tsugoto respectively And the optical switch of the first stage comb light density reduction module sends one of the two low density frequency comb lights to the second stage comb light density reduction module;
The interleaver of the second-stage comb light density reduction module has two frequency comb optical elements constituting low-density frequency comb light from the optical switch of the first-stage comb light density reduction module , respectively. allocated to two low density frequency comb light selected every said optical switching device of the second stage comb optical density-reducing module is allocated by the interleaver of the second stage comb optical density-reducing module One of the two low-density frequency comb lights is emitted to the sweeping modulator,
The sweeping modulator is incident on the low-density frequency comb light from the comb light density reducer, performs a sweep for each of the frequency comb optical elements constituting the low-density frequency comb light,
The beat generator generates a beat by adding a reference light of a specific frequency to a low density frequency comb light emitted from the reference modulator formed by sweeping each frequency comb optical element,
The light receiver detects light emitted from the beat generator;
An optical spectrum measuring apparatus characterized by that.
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