JP5787633B2

JP5787633B2 - Imaging device

Info

Publication number: JP5787633B2
Application number: JP2011129525A
Authority: JP
Inventors: 直人布施; 克己浅田
Original assignee: Canon Inc
Current assignee: Canon Inc
Priority date: 2011-06-09
Filing date: 2011-06-09
Publication date: 2015-09-30
Anticipated expiration: 2031-06-09
Also published as: JP2012257121A

Description

本発明は、撮像素子を撮像面と垂直な軸方向に位置制御するための撮像素子駆動手段を備えた撮像装置に関するものである。 The present invention relates to an image pickup apparatus including an image pickup element driving unit for controlling the position of an image pickup element in an axial direction perpendicular to an image pickup surface.

従来、静止画や動画を撮影するカメラにおいて、光軸方向に変位する板バネで支持された撮像素子をアクチュエータで駆動して、自動焦点調整（以下ＡＦ）を行う撮像装置がある。例えば特許文献１に記載の撮像装置では、弾性変形自在な基板で支持された撮像素子をＶＣＭにより駆動している。また、特許文献２に記載の撮像装置では、一対のバイモルフ型圧電素子をＸ字型に交差する形態で組み合わせた構造をもつアクチュエータにより、撮像素子を光軸方向に駆動している。 2. Description of the Related Art Conventionally, there is an imaging apparatus that performs automatic focus adjustment (hereinafter referred to as AF) by driving an imaging element supported by a leaf spring that is displaced in the optical axis direction with an actuator in a camera that captures a still image or a moving image. For example, in the imaging device described in Patent Document 1, an imaging element supported by an elastically deformable substrate is driven by a VCM. In the imaging apparatus described in Patent Document 2, the imaging element is driven in the optical axis direction by an actuator having a structure in which a pair of bimorph piezoelectric elements are combined in a form that intersects in an X shape.

特開２００６−１５３９７０号公報JP 2006-153970 A 特開２００６−１２１７６９号公報JP 2006-121769 A

しかしながら、特許文献１および特許文献２に開示されている機構では、特許文献１にみられる弾性変形自在な基板や、特許文献２にみられるバイモルフにより撮像素子が支持されている。そのため、撮影時のシャッターの駆動による振動が、撮像素子に伝わり、撮像素子を不必要に振動させ、撮影画像における像振れの原因となってしまう。 However, in the mechanism disclosed in Patent Document 1 and Patent Document 2, the image pickup element is supported by an elastically deformable substrate found in Patent Document 1 or a bimorph found in Patent Document 2. For this reason, the vibration caused by the driving of the shutter at the time of shooting is transmitted to the image sensor, unnecessarily vibrates the image sensor and causes image blur in the captured image.

（発明の目的）
本発明の目的は、光軸方向に変位する板バネで支持された撮像素子をアクチュエータで駆動してＡＦを行う撮像装置において、撮影時のシャッターの駆動により撮像素子に伝わる振動を低減し、高い外乱抑制特性を持つ撮像装置を提供することにある。 (Object of invention)
An object of the present invention is to reduce vibration transmitted to an image pickup device by driving a shutter at the time of shooting in an image pickup device that performs AF by driving an image pickup device supported by a plate spring that is displaced in the optical axis direction by an actuator. An object of the present invention is to provide an imaging apparatus having disturbance suppression characteristics.

上記目的を達成するために、本発明の撮像装置は、被写体を撮像するための撮像素子と、前記撮像素子を支持し、前記撮像素子の撮像面と垂直な軸方向に力を受けて変形する板バネと、前記板バネに抗して前記撮像素子を光軸方向に移動させる撮像素子駆動手段と、前記撮像素子の光入射側に位置し、前記撮像素子への光入射を制御するシャッター装置と、前記シャッター装置を駆動するためのシャッター駆動信号を発生するシャッター駆動信号発生手段とを備えた撮像装置であって、前記シャッター装置を駆動することにより発生する外乱による、前記撮像素子の振動を抑制するために、前記シャッター駆動信号に基づいて、前記撮像素子を駆動する駆動信号を生成し、前記撮像素子駆動手段を制御する制御器と、第一、中央、第二のリンクと四つの回転対偶から構成される平面三節リンク機構を有し、前記撮像素子は、撮像面が前記平面三節リンク機構の可動面と垂直の関係となるように、前記平面三節リンク機構の前記中央のリンクに取り付けられ、前記撮像素子駆動手段は、第一の撮像素子駆動手段と第二の撮像素子駆動手段により構成され、駆動方向が前記撮像素子の撮像面と平行であり、かつ、互いに逆方向であり、前記平面三節リンク機構の前記第一のリンクには、回転対偶を介して前記第一の撮像素子駆動手段が接続され、前記平面三節リンク機構の前記第二のリンクには、回転対偶を介して前記第二の撮像素子駆動手段が接続されを有することを特徴とするものである。
また、別の側面の撮像装置は、被写体を撮像するための撮像素子と、前記撮像素子を支持し、前記撮像素子の撮像面と垂直な軸方向に力を受けて変形する板バネと、前記板バネに抗して前記撮像素子を光軸方向に移動させる撮像素子駆動手段と、前記撮像素子の光入射側に位置し、前記撮像素子への光入射を制御するシャッター装置と、前記シャッター装置を駆動するためのシャッター駆動信号を発生するシャッター駆動信号発生手段とを備えた撮像装置であって、前記シャッター装置を駆動することに起因する前記撮像素子の振動を計測する計測手段と、前記シャッター装置を駆動することにより発生する外乱による、前記撮像素子の振動を抑制するために、前記計測手段により得られた信号に基づいて、前記撮像素子を駆動する駆動信号を生成し、前記撮像素子駆動手段を制御する制御器と、第一、中央、第二のリンクと四つの回転対偶から構成される平面三節リンク機構を有し、前記撮像素子は、撮像面が前記平面三節リンク機構の可動面と垂直の関係となるように、前記平面三節リンク機構の前記中央のリンクに取り付けられ、前記撮像素子駆動手段は、第一の撮像素子駆動手段と第二の撮像素子駆動手段により構成され、駆動方向が前記撮像素子の撮像面と平行であり、かつ、互いに逆方向であり、前記平面三節リンク機構の前記第一のリンクには、回転対偶を介して前記第一の撮像素子駆動手段が接続され、前記平面三節リンク機構の前記第二のリンクには、回転対偶を介して前記第二の撮像素子駆動手段が接続されることを特徴とするものである。
また、別の側面の撮像装置は、被写体を撮像するための撮像素子と、前記撮像素子を支持し、前記撮像素子の撮像面と垂直な軸方向に力を受けて変形する板バネと、前記板バネに抗して前記撮像素子を光軸方向に移動させる撮像素子駆動手段と、前記撮像素子の光入射側に位置し、前記撮像素子への光入射を制御するシャッター装置と、前記シャッター装置を駆動するためのシャッター駆動信号を発生するシャッター駆動信号発生手段とを備えた撮像装置であって、前記シャッター装置を駆動することにより発生する外乱による、前記撮像素子の振動を抑制するために、前記シャッター駆動信号に基づいて、前記撮像素子を駆動する駆動信号を生成し、前記撮像素子駆動手段を制御する制御器と、前記板バネを支持し、前記板バネが変形した時に支点として機能して前記板バネが前記撮像素子を前記光軸方向に移動することを可能にする支持部材と、前記板バネに固定され、前記撮像素子の移動と連動して前記撮像素子とは反対方向に移動する錘とを有し、前記撮像素子駆動手段として圧電素子を用い、前記板バネを変形させるように前記圧電素子を前記板バネに接続することを特徴とするものである。
また、別の側面の撮像装置は、被写体を撮像するための撮像素子と、前記撮像素子を支持し、前記撮像素子の撮像面と垂直な軸方向に力を受けて変形する板バネと、前記板バネに抗して前記撮像素子を光軸方向に移動させる撮像素子駆動手段と、前記撮像素子の光入射側に位置し、前記撮像素子への光入射を制御するシャッター装置と、前記シャッター装置を駆動するためのシャッター駆動信号を発生するシャッター駆動信号発生手段とを備えた撮像装置であって、前記シャッター装置を駆動することに起因する前記撮像素子の振動を計測する計測手段と、前記シャッター装置を駆動することにより発生する外乱による、前記撮像素子の振動を抑制するために、前記計測手段により得られた信号に基づいて、前記撮像素子を駆動する駆動信号を生成し、前記撮像素子駆動手段を制御する制御器と、前記板バネを支持し、前記板バネが変形した時に支点として機能して前記板バネが前記撮像素子を前記光軸方向に移動することを可能にする支持部材と、前記板バネに固定され、前記撮像素子の移動と連動して前記撮像素子とは反対方向に移動する錘とを有し、前記撮像素子駆動手段として圧電素子を用い、前記板バネを変形させるように前記圧電素子を前記板バネに接続することを特徴とするものである。 In order to achieve the above object, an imaging apparatus according to the present invention supports an imaging element for imaging a subject, the imaging element, and is deformed by receiving a force in an axial direction perpendicular to an imaging surface of the imaging element. A plate spring, an image sensor driving unit that moves the image sensor in the optical axis direction against the plate spring, and a shutter device that is positioned on the light incident side of the image sensor and controls light incidence on the image sensor And a shutter drive signal generating means for generating a shutter drive signal for driving the shutter device, wherein vibration of the image sensor due to disturbance generated by driving the shutter device is detected. to suppress, on the basis of the shutter drive signal, it generates a drive signal for driving the imaging device, and a controller for controlling the image pickup device driving means, the first, middle, second phosphorus And have a four planar three-link mechanism composed of a turning pair, the imaging device, so that the imaging surface is movable perpendicular to the surface of the relationship of the planar three-link mechanism, the center of the flat three-link mechanism The image sensor driving means is composed of a first image sensor driving means and a second image sensor driving means, and the driving direction is parallel to the imaging surface of the image sensor and is opposite to each other. The first imaging element driving means is connected to the first link of the planar three-bar linkage mechanism via a rotation pair, and the second link of the planar three-bar linkage mechanism is rotated. The second image sensor driving means is connected via a kinematic pair .
An imaging device according to another aspect includes an imaging element for imaging a subject, a leaf spring that supports the imaging element and is deformed by receiving a force in an axial direction perpendicular to an imaging surface of the imaging element, Image sensor driving means for moving the image sensor in the optical axis direction against a leaf spring, a shutter device positioned on the light incident side of the image sensor and controlling light incident on the image sensor, and the shutter device An image pickup apparatus comprising a shutter drive signal generating means for generating a shutter drive signal for driving the image sensor, the measuring means for measuring the vibration of the image pickup device caused by driving the shutter apparatus, and the shutter A drive signal for driving the image sensor based on a signal obtained by the measuring means in order to suppress vibration of the image sensor due to disturbance generated by driving the apparatus. A controller for generating and controlling the image sensor driving means, and a plane three-bar linkage mechanism composed of a first link, a center link, a second link, and four rotary pairs. It is attached to the central link of the planar three-bar linkage mechanism so as to be perpendicular to the movable surface of the planar three-bar link mechanism, and the imaging element driving means includes a first imaging element driving means and a second imaging element. The first link of the planar three-bar linkage mechanism is connected to the first link via a rotating pair, the driving unit being configured by driving means, the driving direction being parallel to the imaging surface of the imaging element and opposite to each other. The image pickup element driving means is connected, and the second image pickup element drive means is connected to the second link of the planar three-bar linkage mechanism through a rotating pair.
An imaging device according to another aspect includes an imaging element for imaging a subject, a leaf spring that supports the imaging element and is deformed by receiving a force in an axial direction perpendicular to an imaging surface of the imaging element, Image sensor driving means for moving the image sensor in the optical axis direction against a leaf spring, a shutter device positioned on the light incident side of the image sensor and controlling light incident on the image sensor, and the shutter device In order to suppress vibration of the image sensor due to disturbance generated by driving the shutter device, the image pickup device includes a shutter drive signal generating unit that generates a shutter drive signal for driving the shutter. Based on the shutter drive signal, a drive signal for driving the image sensor is generated, a controller for controlling the image sensor drive means, the leaf spring is supported, and the leaf spring is deformed. A support member that functions as a fulcrum and allows the plate spring to move the image sensor in the optical axis direction, and is fixed to the plate spring and interlocks with the movement of the image sensor. Has a weight that moves in the opposite direction, a piezoelectric element is used as the image sensor driving means, and the piezoelectric element is connected to the plate spring so as to deform the plate spring.
An imaging device according to another aspect includes an imaging element for imaging a subject, a leaf spring that supports the imaging element and is deformed by receiving a force in an axial direction perpendicular to an imaging surface of the imaging element, Image sensor driving means for moving the image sensor in the optical axis direction against a leaf spring, a shutter device positioned on the light incident side of the image sensor and controlling light incident on the image sensor, and the shutter device An image pickup apparatus comprising a shutter drive signal generating means for generating a shutter drive signal for driving the image sensor, the measuring means for measuring the vibration of the image pickup device caused by driving the shutter apparatus, and the shutter A drive signal for driving the image sensor based on a signal obtained by the measuring means in order to suppress vibration of the image sensor due to disturbance generated by driving the apparatus. A controller that generates and controls the image sensor driving means and the leaf spring, and functions as a fulcrum when the leaf spring is deformed, and the leaf spring moves the image sensor in the optical axis direction. And a weight that is fixed to the leaf spring and moves in the direction opposite to the imaging element in conjunction with the movement of the imaging element, and uses a piezoelectric element as the imaging element driving means The piezoelectric element is connected to the leaf spring so as to deform the leaf spring.

本発明によれば、光軸方向に変位する板バネで支持された撮像素子をアクチュエータで駆動してＡＦを行う撮像装置において、撮影時のシャッターの駆動により撮像素子に伝わる振動を低減し、高い外乱抑制特性を持たせることができる。 According to the present invention, in an imaging device that performs AF by driving an imaging device supported by a leaf spring that is displaced in the optical axis direction by an actuator, vibration transmitted to the imaging device by driving a shutter during shooting is reduced, and high A disturbance suppressing characteristic can be provided.

本発明の実施例１を説明する概念図である。It is a conceptual diagram explaining Example 1 of this invention. 実施例１に係る板バネと撮像素子駆動手段の接続構造を表した概念図である。FIG. 3 is a conceptual diagram illustrating a connection structure between a leaf spring and an image sensor driving unit according to the first embodiment. 平面三節リンク機構のチルト自由度を示す図である。It is a figure which shows the tilt freedom degree of a planar three-bar linkage mechanism. 本発明の実施例２に係る板バネと撮像素子駆動手段の接続構造を表した概念図である。It is the conceptual diagram showing the connection structure of the leaf | plate spring which concerns on Example 2 of this invention, and an image pick-up element drive means. 本発明の実施例３を説明する概念図である。It is a conceptual diagram explaining Example 3 of this invention.

本発明を実施するための形態は、以下の実施例１ないし３に記載される通りである。 The mode for carrying out the present invention is as described in Examples 1 to 3 below.

図１（ａ）は、本発明の実施例１である撮像装置の基本的な構成を表した概念図を示している。撮像素子１は、撮像光学系が形成した被写体の光学像を光電変換するＣＭＯＳやＣＣＤであり、コントラストＡＦ時に撮像光学系の光軸方向に微小移動（ウォブリング）するように構成されている。 FIG. 1A is a conceptual diagram illustrating a basic configuration of an imaging apparatus that is Embodiment 1 of the present invention. The imaging device 1 is a CMOS or CCD that photoelectrically converts an optical image of a subject formed by the imaging optical system, and is configured to move (wobble) in the optical axis direction of the imaging optical system during contrast AF.

撮像素子１は、板バネ１０を介して撮像装置１００に固定されている。また、板バネ１０には、板バネ１０を光軸２の方向へ変位させるための撮像素子駆動手段３が接続されており、撮像素子駆動手段３は撮像装置１００に固定されている。シャッター装置７および、シャッター装置７を駆動するための駆動信号を発生するシャッター駆動信号発生手段８が撮像装置１００に備えられている。シャッター装置７は撮像素子１の光入射側に位置し、撮像素子１への光入射を制御する。シャッター装置７を駆動することにより発生した外乱による、撮像素子１の振動を抑制するために、シャッター駆動信号に基づいて、撮像素子駆動手段３を駆動するための駆動信号を生成し、撮像素子駆動手段３を制御する制御器１３が備えられている。 The imaging element 1 is fixed to the imaging device 100 via a leaf spring 10. The plate spring 10 is connected to an image sensor driving means 3 for displacing the plate spring 10 in the direction of the optical axis 2, and the image sensor driving means 3 is fixed to the imaging device 100. The imaging apparatus 100 includes a shutter device 7 and shutter drive signal generation means 8 that generates a drive signal for driving the shutter device 7. The shutter device 7 is located on the light incident side of the image sensor 1 and controls the light incident on the image sensor 1. In order to suppress vibration of the image sensor 1 due to disturbance generated by driving the shutter device 7, a drive signal for driving the image sensor drive means 3 is generated based on the shutter drive signal, and the image sensor is driven. A controller 13 for controlling the means 3 is provided.

図１（ｂ）は、実施例１における制御概念図を示している。シャッター駆動信号発生手段８により信号が発せられ、シャッター装置７が駆動される。制御器１３は、シャッター装置７が駆動されるに伴って撮像装置１００を介して撮像素子１に伝わる外乱を予め記憶している。シャッター駆動信号発生手段８により信号が発せられたタイミングと同時に、予め記憶した外乱が低減するよう撮像素子駆動手段３を駆動する信号を制御器１３が発生する。このようにして、シャッター駆動により撮像装置１００に伝わる外乱を抑制することで、高い外乱抑制特性を持たせることができる。 FIG. 1B shows a conceptual diagram of control in the first embodiment. A signal is generated by the shutter drive signal generating means 8, and the shutter device 7 is driven. The controller 13 stores in advance disturbances transmitted to the image sensor 1 via the imaging device 100 as the shutter device 7 is driven. Simultaneously with the timing when the signal is generated by the shutter drive signal generation means 8, the controller 13 generates a signal for driving the image sensor drive means 3 so as to reduce the previously stored disturbance. In this way, by suppressing the disturbance transmitted to the imaging device 100 by the shutter drive, it is possible to have a high disturbance suppression characteristic.

図２（ａ）は、実施例１に係る板バネ１０と撮像素子駆動手段３の接続構造を表した概念図を示している。四つの回転対偶４ａ、４ｂ、６ａ、６ｂおよび、三つのリンク５ａ、５ｂ、５ｃにより平面三節リンク機構が構成されている。この平面三節リンク機構は、理想的には、駆動平面（ＸＺ平面）以外の空間（Ｙ方向）には自由度を持たない。平面三節リンク機構における、中央のリンク５ｃに撮像素子１を備える。このとき撮像面は、平面三節リンク機構の可動面（ＸＺ平面）と垂直の関係にある。残りの第一のリンク５ａ、第二のリンク５ｂを、それぞれ回転対偶４ａ、４ｂを介して第一の撮像素子駆動手段３ａ、第二の撮像素子駆動手段３ｂにそれぞれ接続する。撮像素子駆動手段３を構成する第一と第二の撮像素子駆動手段３ａ、３ｂは、平面三節リンク機構の可動面（ＸＺ平面）上にあり、光軸２と垂直の関係にある駆動軸１２上を駆動方向としている。撮像素子駆動手段３ａ、３ｂをそれぞれ同じ量ｄだけ、撮像素子駆動手段３ａを＋Ｘ方向へ、撮像素子駆動手段３ｂを−Ｘ方向へ駆動することにより、撮像素子１は光軸２の方向へ駆動される。 FIG. 2A is a conceptual diagram illustrating a connection structure between the leaf spring 10 and the image sensor driving unit 3 according to the first embodiment. A planar three-bar linkage mechanism is constituted by the four rotary pairs 4a, 4b, 6a, 6b and the three links 5a, 5b, 5c. This planar three-bar linkage mechanism ideally has no degree of freedom in a space (Y direction) other than the drive plane (XZ plane). The image sensor 1 is provided in the central link 5c in the planar three-bar linkage mechanism. At this time, the imaging surface is perpendicular to the movable surface (XZ plane) of the planar three-bar linkage mechanism. The remaining first link 5a and second link 5b are connected to the first image sensor drive means 3a and the second image sensor drive means 3b via the rotation pairs 4a and 4b, respectively. The first and second image sensor drive units 3a and 3b constituting the image sensor drive unit 3 are on the movable surface (XZ plane) of the planar three-bar linkage mechanism, and the drive shaft 12 has a perpendicular relationship with the optical axis 2. The top is the driving direction. The image sensor 1 is driven in the direction of the optical axis 2 by driving the image sensor drive means 3a, 3b by the same amount d, the image sensor drive means 3a in the + X direction, and the image sensor drive means 3b in the -X direction. Is done.

平面三節リンク機構は、それ自体が一自由度のリンク機構であり、図３に示すチルト自由度を持っている。そのため、撮像素子駆動手段３ａ、３ｂにより撮像素子１を位置決めしても、外乱振動が入った場合には、図３に示すチルト自由度で振動する可能性がある。しかし、撮像素子１には板バネ１０ａ、１０ｂがそれぞれ光軸２に対して対象となる位置に設けられている。そして板バネ１０ａ、１０ｂは、それぞれ撮像装置１００に固定される。この板バネ１０ａ、１０ｂが、図３に示したチルト自由度を拘束して、撮像素子１の駆動方向に対してガイドの役割を果たし、他成分を抑制した駆動を行うことができる。 The planar three-bar linkage mechanism itself is a one-degree-of-freedom link mechanism and has a tilt degree of freedom shown in FIG. Therefore, even if the imaging device 1 is positioned by the imaging device driving units 3a and 3b, there is a possibility of vibration with the degree of freedom of tilt shown in FIG. However, the image sensor 1 is provided with leaf springs 10 a and 10 b at positions that are targets with respect to the optical axis 2. The leaf springs 10a and 10b are fixed to the imaging device 100, respectively. The leaf springs 10a and 10b can restrain the tilt freedom shown in FIG. 3, serve as a guide for the driving direction of the image sensor 1, and perform driving while suppressing other components.

このように撮像素子駆動手段３の接続構造に平面三節リンク機構および板バネ１０ａ、１０ｂを用いることで、図３に示すような、本来望ましいＺ方向への直進以外の変位を避けることが可能となる。さらにアクチュエータを撮像面と平行に配置することで、構造の簡素化及び薄型で省スペース化を図ることができる。 In this way, by using the planar three-bar linkage mechanism and the leaf springs 10a and 10b for the connection structure of the image sensor driving means 3, it is possible to avoid a displacement other than the originally desired straight movement in the Z direction as shown in FIG. Become. Furthermore, by arranging the actuator in parallel with the imaging surface, the structure can be simplified and the space can be saved with a thin shape.

図２（ｂ）は、図２（ａ）における、撮像素子駆動手段３を示した図である。本実施例１においては、撮像素子駆動手段３ａ、３ｂとして、コアレスＤＣモータを用いている。コアレスＤＣモータ３１ａ（３１ｂ）の出力軸に雄ネジを切り、そして直動部材３２ａ（３２ｂ）に雌ネジを切り、両者を螺合することによって、コアレスＤＣモータ３１ａ（３１ｂ）の回転出力を直動出力に変換している。 FIG. 2B is a diagram showing the image sensor driving unit 3 in FIG. In the first embodiment, coreless DC motors are used as the image sensor driving units 3a and 3b. A male screw is cut on the output shaft of the coreless DC motor 31a (31b), a female screw is cut on the linear motion member 32a (32b), and both are screwed together to directly rotate the rotational output of the coreless DC motor 31a (31b). It is converted to dynamic output.

本実施例１において、シャッター駆動信号発生手段８により信号が発せられ、シャッター装置７が駆動される。制御器１３は、シャッター装置７が駆動されるに伴って撮像装置１００を介して撮像素子１に伝わる外乱ｆを予め記憶している。シャッター駆動信号発生手段８により信号が発せられたタイミングと同時に、予め記憶した外乱が低減するよう撮像素子駆動手段３を駆動する信号ｆを制御器１３が発生する。このようにして、シャッター駆動により撮像装置１００に伝わる外乱を抑制することで、高い外乱抑制特性を有する撮像装置１００を提供することができる。 In the first embodiment, a signal is generated by the shutter drive signal generating means 8 and the shutter device 7 is driven. The controller 13 stores in advance a disturbance f transmitted to the image sensor 1 via the imaging device 100 as the shutter device 7 is driven. Simultaneously with the timing when the signal is generated by the shutter drive signal generating means 8, the controller 13 generates a signal f for driving the image sensor driving means 3 so as to reduce the disturbance stored in advance. In this way, by suppressing the disturbance transmitted to the imaging device 100 by driving the shutter, it is possible to provide the imaging device 100 having high disturbance suppression characteristics.

図４は、本発明の実施例２に係る板バネ１０と撮像素子駆動手段３の接続構造を表す概念図を示している。実施例２の基本的な構成は図１に示される通りのものである。 FIG. 4 is a conceptual diagram showing a connection structure between the leaf spring 10 and the image sensor driving unit 3 according to the second embodiment of the present invention. The basic configuration of the second embodiment is as shown in FIG.

撮像素子１は腕部１１を介して板バネ１０と接続されている。一対の腕部１１は光軸２に対して対称な位置に配置されており、光軸２と平行な状態にある。板バネ１０は光軸２と垂直な状態にある。一対の腕部１１がそれぞれ板バネ１０の両端に接続され、略Ｕ字形状を形作っている。一対の腕部１１はその先端において撮像素子１と接続されているため、一対の腕部１１と板バネ１０が形作る略Ｕ字形状の上面に撮像素子１が位置し、撮像面と板バネ１０は略平行な状態で固定されている。この結果、板バネ１０は撮像素子１の撮像面の平行を保ちながら、その中央を中心に光軸方向へ変形することができる。 The image sensor 1 is connected to the leaf spring 10 via the arm portion 11. The pair of arm portions 11 are arranged at symmetrical positions with respect to the optical axis 2 and are in a state parallel to the optical axis 2. The leaf spring 10 is in a state perpendicular to the optical axis 2. A pair of arm portions 11 are respectively connected to both ends of the leaf spring 10 to form a substantially U-shape. Since the pair of arms 11 is connected to the image sensor 1 at the tip thereof, the image sensor 1 is positioned on a substantially U-shaped upper surface formed by the pair of arms 11 and the leaf spring 10, and the imaging surface and the leaf spring 10. Are fixed in a substantially parallel state. As a result, the leaf spring 10 can be deformed in the optical axis direction around the center while keeping the imaging surface of the imaging device 1 parallel.

板バネ１０には、圧電素子１４と錘１５が備えられており、板バネ１０は、圧電素子１４による力を受けて変形することによって、撮像素子１を光軸方向に移動する弾性変形可能な変形部材である。板バネ１０は、一対の支持部材１６により支持されており、一対の支持部材１６は腕部１１と同様の配置で、光軸２に対して対称に配置され、撮像装置１００に固定されている。支持部材１６は、腕部１１よりも光軸に近い位置に配置されている。板バネ１０を圧電素子１４により変形させ、一対の支持部材１６を介して腕部１１を光軸方向に沿って変位させることができる。一対の腕部１１は、板バネ１０の両端部に接続されて撮像素子１を移動する変位部である。支持部材１６は、圧電素子１４の撓み変形に支障を与えることなく板バネ１０を支持している。本実施例２では、圧電素子１４の外側に支持部材１６が配置されており、板バネ１０を支持しているが、圧電素子１４の内側に支持部材１６が配置され、圧電素子１４を支持する構造でも良い。各支持部材１６は、撮像装置１００に固定され、板バネ１０が弾性変形する際に支点として機能する。 The leaf spring 10 includes a piezoelectric element 14 and a weight 15. The leaf spring 10 is deformed by receiving a force from the piezoelectric element 14, and can be elastically deformed to move the image sensor 1 in the optical axis direction. It is a deformable member. The leaf spring 10 is supported by a pair of support members 16, and the pair of support members 16 are arranged in the same manner as the arm portion 11, are arranged symmetrically with respect to the optical axis 2, and are fixed to the imaging device 100. . The support member 16 is disposed at a position closer to the optical axis than the arm portion 11. The plate spring 10 can be deformed by the piezoelectric element 14 and the arm portion 11 can be displaced along the optical axis direction via the pair of support members 16. The pair of arm portions 11 are displacement portions that are connected to both end portions of the leaf spring 10 and move the image sensor 1. The support member 16 supports the leaf spring 10 without hindering the bending deformation of the piezoelectric element 14. In the second embodiment, the support member 16 is disposed outside the piezoelectric element 14 and supports the leaf spring 10. However, the support member 16 is disposed inside the piezoelectric element 14 and supports the piezoelectric element 14. Structure may be sufficient. Each support member 16 is fixed to the imaging device 100 and functions as a fulcrum when the leaf spring 10 is elastically deformed.

一対の圧電素子１４は、板バネ１０の表裏面の中央に取り付けられている。圧電素子１４は、板バネ１０を変形させることによって一対の腕部１１を介して撮像素子１を光軸方向へ微小振動させる撮像素子駆動手段３である。 The pair of piezoelectric elements 14 is attached to the center of the front and back surfaces of the leaf spring 10. The piezoelectric element 14 is imaging element driving means 3 that causes the imaging element 1 to vibrate in the optical axis direction through a pair of arms 11 by deforming the leaf spring 10.

本実施例２の圧電素子１４は、いわゆるバイモルフ構造を構成している。本実施例２では、パラレル型の接続方式により、一定の電圧を上下の圧電素子１４に印加した場合、上下の圧電セラミックスが互いに逆方向に伸縮するように構成している。板バネ１０がその撮像素子側が凹むように変形した場合、支持部材１６を支点として、板バネ１０の先端に接続されている一対の腕部１１が変位し、それに伴い撮像素子１が光軸方向に沿って変位する（図４（ｂ））。板バネ１０がその撮像素子側が突出するように変形した場合は、撮像素子１は逆方向へ後退する。また、これらは電圧の大きさに応じた変位量が生じる。 The piezoelectric element 14 of Example 2 has a so-called bimorph structure. In the second embodiment, the upper and lower piezoelectric ceramics are configured to expand and contract in opposite directions when a constant voltage is applied to the upper and lower piezoelectric elements 14 by a parallel connection method. When the leaf spring 10 is deformed so that the image pickup device side is recessed, the pair of arms 11 connected to the tip of the plate spring 10 is displaced with the support member 16 as a fulcrum, and the image pickup device 1 is moved in the optical axis direction accordingly. (Fig. 4 (b)). When the leaf spring 10 is deformed so that the image sensor side protrudes, the image sensor 1 moves backward in the reverse direction. Moreover, the displacement amount according to the magnitude | size of a voltage arises for these.

錘１５は、板バネ１０の裏面に固定され、撮像素子１の移動と連動して撮像素子１とは光軸方向において反対方向に移動する。錘１５は、撮像素子１が光軸方向へ微小振動する際に撮像素子１および板バネ１０を含めた構造の重心が移動することによって発生する振動を相殺または低減する機能を有する。即ち、錘１５は、撮像素子１および板バネ１０を含めた構造の平衡を維持する平衡錘（カウンタウエイトまたはカウンタバランス）として機能する。 The weight 15 is fixed to the back surface of the leaf spring 10 and moves in the direction opposite to the image pickup device 1 in the optical axis direction in conjunction with the movement of the image pickup device 1. The weight 15 has a function of canceling or reducing vibration generated when the center of gravity of the structure including the image sensor 1 and the leaf spring 10 moves when the image sensor 1 slightly vibrates in the optical axis direction. That is, the weight 15 functions as a balance weight (counter weight or counter balance) that maintains the balance of the structure including the image sensor 1 and the leaf spring 10.

本実施例２において、シャッター駆動信号発生手段８により信号が発せられ、シャッター装置７が駆動される。制御器１３は、シャッター装置７が駆動されるに伴って撮像装置１００を介して撮像素子１に伝わる外乱を予め記憶している。シャッター駆動信号発生手段８により信号が発せられたタイミングと同時に、予め記憶した外乱が低減するよう圧電素子１４を駆動する信号を制御器１３が発生する。このようにして、シャッター駆動により撮像装置１００に伝わる外乱を抑制することで、高い外乱抑制特性を有する撮像装置１００を提供することができる。 In the second embodiment, a signal is generated by the shutter drive signal generating means 8 and the shutter device 7 is driven. The controller 13 stores in advance disturbances transmitted to the image sensor 1 via the imaging device 100 as the shutter device 7 is driven. At the same time when the signal is generated by the shutter drive signal generation means 8, the controller 13 generates a signal for driving the piezoelectric element 14 so as to reduce the previously stored disturbance. In this way, by suppressing the disturbance transmitted to the imaging device 100 by driving the shutter, it is possible to provide the imaging device 100 having high disturbance suppression characteristics.

図５（ａ）は、本発明の実施例３である撮像装置の基本的な構成を表した概念図を示している。撮像素子１は、撮像光学系が形成した光学像を光電変換するＣＭＯＳやＣＣＤであり、コントラストＡＦ時に撮像光学系の光軸方向に微小移動（ウォブリング）するように構成されている。 FIG. 5A is a conceptual diagram illustrating a basic configuration of an imaging apparatus that is Embodiment 3 of the present invention. The imaging device 1 is a CMOS or CCD that photoelectrically converts an optical image formed by the imaging optical system, and is configured to move (wobble) in the optical axis direction of the imaging optical system during contrast AF.

撮像素子１は、板バネ１０を介して撮像装置１００に固定されている。また、板バネ１０には、板バネ１０を光軸２の方向へ変位させるための撮像素子駆動手段３が接続されており、撮像素子駆動手段３は撮像装置１００に固定されている。シャッター装置７および、シャッター装置７を駆動するための駆動信号を発生するシャッター駆動信号発生手段８が撮像装置１００に備えられている。シャッター装置７は撮像素子１の光入射側に位置し、撮像素子１への光入射を制御する。シャッター装置７を駆動することにより発生した外乱による、撮像素子１の振動を抑制するために、シャッター装置７を駆動することに起因する撮像素子１の振動を計測するための計測手段９を備えている。計測手段９により得られた信号に基づいて、撮像素子駆動手段３を駆動するための駆動信号を生成し、撮像素子駆動手段３を制御する制御器１３が備えられている。 The imaging element 1 is fixed to the imaging device 100 via a leaf spring 10. The plate spring 10 is connected to an image sensor driving means 3 for displacing the plate spring 10 in the direction of the optical axis 2, and the image sensor driving means 3 is fixed to the imaging device 100. The imaging apparatus 100 includes a shutter device 7 and shutter drive signal generation means 8 that generates a drive signal for driving the shutter device 7. The shutter device 7 is located on the light incident side of the image sensor 1 and controls the light incident on the image sensor 1. In order to suppress vibration of the image sensor 1 due to disturbance generated by driving the shutter device 7, a measurement unit 9 is provided for measuring vibration of the image sensor 1 caused by driving the shutter device 7. Yes. A controller 13 that generates a drive signal for driving the image sensor driving unit 3 based on the signal obtained by the measuring unit 9 and controls the image sensor driving unit 3 is provided.

図５（ｂ）は、実施例３における制御概念図を示している。シャッター駆動信号発生手段８により信号が発せられ、シャッター装置７が駆動する。シャッター装置７の駆動により、撮像素子１００を介して撮像素子１に伝わる振動変位ｆを、計測手段９で計測し、その振動が低減するよう撮像素子駆動手段３を駆動する信号ｆを制御器１３が発生する。このようにして、シャッター駆動により撮像装置１００に伝わる外乱を抑制することで、高い外乱抑制特性を有する撮像装置１００を提供することができる。 FIG. 5B shows a conceptual diagram of control in the third embodiment. A signal is generated by the shutter drive signal generating means 8, and the shutter device 7 is driven. The vibration displacement f transmitted to the image pickup device 1 through the image pickup device 100 by driving the shutter device 7 is measured by the measuring unit 9 and a signal f for driving the image pickup device drive unit 3 is reduced so as to reduce the vibration. Will occur. In this way, by suppressing the disturbance transmitted to the imaging device 100 by driving the shutter, it is possible to provide the imaging device 100 having high disturbance suppression characteristics.

実施例３に係る板バネ１０と撮像素子駆動手段３の接続構造は、図２あるいは図４に示される接続構造と同様のものである。 The connection structure between the leaf spring 10 and the image sensor driving means 3 according to the third embodiment is the same as the connection structure shown in FIG. 2 or FIG.

図２の接続構造を用いた場合には、計測手段９により計測された振動を相殺あるいは低減するような信号が制御器１３からコアレスＤＣモータ３１ａ、３１ｂに対して出力される。 When the connection structure of FIG. 2 is used, a signal that cancels or reduces the vibration measured by the measuring means 9 is output from the controller 13 to the coreless DC motors 31a and 31b.

図４の接続構造を用いた場合には、計測手段９により計測された振動を相殺あるいは低減するような信号が制御器１３から圧電素子１４に対して出力される。 When the connection structure of FIG. 4 is used, a signal that cancels or reduces the vibration measured by the measuring means 9 is output from the controller 13 to the piezoelectric element 14.

１撮像素子
３撮像素子駆動手段
７シャッター装置
８シャッター駆動信号発生手段
９計測手段
１０板バネ
１３制御器 DESCRIPTION OF SYMBOLS 1 Image pick-up element 3 Image pick-up element drive means 7 Shutter apparatus 8 Shutter drive signal generation means 9 Measurement means 10 Leaf spring 13 Controller

Claims

An image sensor for imaging a subject;
A leaf spring that supports the image sensor and is deformed by receiving a force in an axial direction perpendicular to an imaging surface of the image sensor;
Image sensor driving means for moving the image sensor in the optical axis direction against the plate spring;
A shutter device that is located on the light incident side of the image sensor and controls light incidence on the image sensor;
An image pickup apparatus comprising: a shutter drive signal generating unit that generates a shutter drive signal for driving the shutter device;
In order to suppress vibration of the image sensor due to disturbance generated by driving the shutter device, a drive signal for driving the image sensor is generated based on the shutter drive signal, and the image sensor drive means is A controller to control ;
First, the central, a second link and four planar three bar linkage consists of revolving joints possess,
The imaging element is attached to the central link of the planar three-bar linkage so that the imaging plane is perpendicular to the movable surface of the planar three-bar linkage,
The image sensor driving means is composed of a first image sensor driving means and a second image sensor driving means, and the drive direction is parallel to the imaging surface of the image sensor and is opposite to each other.
The first imaging element driving means is connected to the first link of the planar three-bar linkage mechanism through a rotating pair,
Wherein the said second link of a planar three-link mechanism, through said turning pair second imaging device driving means is connected imaging apparatus according to claim Rukoto.

An image sensor for imaging a subject;
A leaf spring that supports the image sensor and is deformed by receiving a force in an axial direction perpendicular to an imaging surface of the image sensor;
Image sensor driving means for moving the image sensor in the optical axis direction against the plate spring;
A shutter device that is located on the light incident side of the image sensor and controls light incidence on the image sensor;
An image pickup apparatus comprising: a shutter drive signal generating unit that generates a shutter drive signal for driving the shutter device;
Measuring means for measuring vibrations of the image sensor caused by driving the shutter device;
In order to suppress vibration of the image sensor due to disturbance generated by driving the shutter device, a drive signal for driving the image sensor is generated based on a signal obtained by the measuring unit, and the imaging A controller for controlling the element driving means ;
First, the central, a second link and four planar three bar linkage consists of revolving joints possess,
The imaging element is attached to the central link of the planar three-bar linkage so that the imaging plane is perpendicular to the movable surface of the planar three-bar linkage,
The image sensor driving means is composed of a first image sensor driving means and a second image sensor driving means, and the drive direction is parallel to the imaging surface of the image sensor and is opposite to each other.
The first imaging element driving means is connected to the first link of the planar three-bar linkage mechanism through a rotating pair,
Wherein the said second link of a planar three-link mechanism, through said turning pair second imaging device driving means is connected imaging apparatus according to claim Rukoto.

The imaging device driving means, the imaging apparatus according to claim 1 or 2, characterized in that a coreless DC motor.

An image sensor for imaging a subject;
A leaf spring that supports the image sensor and is deformed by receiving a force in an axial direction perpendicular to an imaging surface of the image sensor;
Image sensor driving means for moving the image sensor in the optical axis direction against the plate spring;
A shutter device that is located on the light incident side of the image sensor and controls light incidence on the image sensor;
An image pickup apparatus comprising: a shutter drive signal generating unit that generates a shutter drive signal for driving the shutter device;
In order to suppress vibration of the image sensor due to disturbance generated by driving the shutter device, a drive signal for driving the image sensor is generated based on the shutter drive signal, and the image sensor drive means is A controller to control;
A support member that supports the leaf spring and functions as a fulcrum when the leaf spring is deformed, and allows the leaf spring to move the image sensor in the optical axis direction;
A weight fixed to the leaf spring and moving in the opposite direction to the image sensor in conjunction with the movement of the image sensor;
The piezoelectric elements used, an imaging apparatus characterized by connecting the piezoelectric element to deform the plate spring to the plate spring as the imaging element driving means.

An image sensor for imaging a subject;
A leaf spring that supports the image sensor and is deformed by receiving a force in an axial direction perpendicular to an imaging surface of the image sensor;
Image sensor driving means for moving the image sensor in the optical axis direction against the plate spring;
A shutter device that is located on the light incident side of the image sensor and controls light incidence on the image sensor;
An image pickup apparatus comprising: a shutter drive signal generating unit that generates a shutter drive signal for driving the shutter device;
Measuring means for measuring vibrations of the image sensor caused by driving the shutter device;
In order to suppress vibration of the image sensor due to disturbance generated by driving the shutter device, a drive signal for driving the image sensor is generated based on a signal obtained by the measuring unit, and the imaging A controller for controlling the element driving means;
A support member that supports the leaf spring and functions as a fulcrum when the leaf spring is deformed, and allows the leaf spring to move the image sensor in the optical axis direction;
A weight fixed to the leaf spring and moving in the opposite direction to the image sensor in conjunction with the movement of the image sensor;
An image pickup apparatus using a piezoelectric element as the image pickup element driving means, and connecting the piezoelectric element to the plate spring so as to deform the plate spring.