JP5764941B2 - Semiconductor device - Google Patents

Description

  The present invention relates to a semiconductor device provided with a temperature detection element.

  In order to detect heat generated by the semiconductor device, a temperature detection element may be provided on the substrate surface side of the semiconductor device. When the temperature detection element is installed, a dedicated area for installing the temperature detection element is usually formed outside the cell area. This increases the chip size of the semiconductor device. On the other hand, in patent document 1, the temperature detection element is arrange | positioned in the vicinity of the semiconductor element structure in the cell area | region of a semiconductor device. This shortens the time for detecting the heat generation of the semiconductor element and suppresses an increase in the chip size. The temperature detection element is a diode having a PN junction in which a rectangular P-type semiconductor and an N-type semiconductor are joined along the long side direction.

JP 2000-31290 A

  In Patent Document 1, in order to further reduce the time for the temperature detection element to detect the heat generation of the semiconductor element, the width in the short side direction of the rectangular temperature detection element is reduced so that the heat generation part extends to the PN junction surface. What is necessary is just to make distance smaller. However, the P-type semiconductor and the N-type semiconductor of the temperature detection element need to have a certain width to be electrically connected to the wiring. When the minimum contact width of a P-type semiconductor (in this specification, the width necessary for electrical connection between a semiconductor and a wiring is referred to as a minimum contact width) is WPmin, and the minimum contact width of an N-type semiconductor is WNmin 1, the width W of the temperature detection element (width in the short side direction of the rectangular shape) needs to satisfy W ≧ WPmin + WNmin.

The present application provides a semiconductor device including a temperature detection element having a P-type region and an N-type region. The P-type region of the temperature detection element of the semiconductor device has a P-type connection portion for electrically connecting the semiconductor and the wiring , and P extending from the P-type connection portion in the first direction along the surface of the semiconductor device. The N-type region includes an N-type connection portion for electrically connecting the semiconductor and the wiring , and a first direction from the N-type connection portion along the P-type junction portion. An N-type region extending in the opposite direction and having an N-type junction joined to the P-type junction. The width in the second direction along the surface of the semiconductor device of the P-type junction and orthogonal to the first direction is narrower than the width in the second direction of the P-type connection , and the width of the N-type junction in the second direction. Is narrower than the width of the N-type connecting portion in the second direction.

According to the semiconductor device described above, the width in the second direction of the P-type junction and the width in the second direction of the N-type junction are narrowed, and the distance from the heat generating part to the PN junction surface is further reduced. The detection element can further reduce the time for detecting the heat generation of the semiconductor element, and the width of the P-type connection portion in the second direction and the width of the N-type connection portion in the second direction can be increased. It is possible to ensure both electrical connection between the N-type region and the wiring.

The width of the temperature detection element in the second direction may be equal to or smaller than the width of the P-type connection portion in the second direction, or may be equal to or smaller than the width of the N-type connection portion in the second direction.

When the semiconductor element is an insulated gate semiconductor element , the longitudinal direction of the insulated gate is preferably parallel to the first direction.

  A polysilicon region may be formed at the end of the portion where the P-type region and the N-type region are joined.

When the semiconductor substrate is viewed in plan, the P-type junction and the N-type junction may be arranged in a region sandwiched between the P-type connection and the N-type connection.

  According to the present application, it is possible to further reduce the time for the temperature detection element to detect the heat generation of the semiconductor element and to ensure the electrical connection between the P-type region and the N-type region and the wiring.

1 is a plan view of a semiconductor device of Example 1. FIG. FIG. 2 is an enlarged view of the vicinity of the temperature detection element in FIG. 1 and shows a state where a surface electrode is removed. It is the III-III sectional view taken on the line of FIG. 3 is a plan view of a temperature detection element according to Embodiment 1. FIG. It is a top view of the temperature detection element which concerns on a modification. It is a top view of the temperature detection element which concerns on a modification. It is a top view of the temperature detection element which concerns on a modification. It is a top view of the temperature detection element which concerns on a modification. It is a top view of the temperature detection element which concerns on a modification. It is a top view of the temperature detection element which concerns on a modification. It is a top view of the temperature detection element which concerns on a modification. It is a top view of the temperature detection element which concerns on a modification.

  The present application discloses a semiconductor device including a temperature detection element having a P-type region and an N-type region. The P-type region of the temperature detection element of this semiconductor device has a P-type contact portion and a P-type junction extending from the P-type contact portion in the first direction, and the N-type region includes the N-type contact portion and And an N-type junction extending from the N-type contact portion along the P-type junction in the direction opposite to the first direction and joined to the P-type junction. The width in the second direction perpendicular to the first direction of the P-type junction is narrower than the width in the second direction of the P-type contact, and the width in the second direction of the N-type junction is the same as that of the N-type contact. It is narrower than the width in two directions.

  According to the semiconductor device described above, the width in the second direction of the P-type junction and the width in the second direction of the N-type junction are narrowed, and the distance from the heat generating part to the PN junction surface is further reduced. The detection element further reduces the time for detecting the heat generation of the semiconductor element, and the width of the P-type contact portion in the second direction and the width of the N-type contact portion in the second direction are increased to increase the P-type region and the N-type. It is possible to ensure electrical connection between the region and the wiring.

  The width of the P-type region in the second direction is the widest in the P-type contact portion, and the width of the N-type region in the second direction is the widest in the N-type contact portion. For example, the width of the P-type contact portion in the second direction is set to the minimum contact width WPmin of the P-type semiconductor, and the width of the N-type contact portion in the second direction is set to be the minimum contact width of the N-type semiconductor WNmin. Can do. In this case, when the semiconductor device is viewed in plan, the P-type junction and the N-type junction are arranged in a region sandwiched between the P-type contact and the N-type contact so that the second of the temperature detection elements is arranged. The direction width W can be W <WPmin + WNmin. According to the present application, since the width is narrower than that of the conventional temperature detection element and the distance between the element region and the PN junction surface can be reduced, a semiconductor device including a temperature detection element with a shorter temperature detection time can be provided. .

  The width of the temperature detection element in the second direction may be equal to or smaller than the width of the P-type contact portion in the second direction, or may be equal to or smaller than the width of the N-type contact portion in the second direction. The width W of the temperature detection element in the second direction can be reduced to the wider one of WPmin and WNmin. Further, the sum of the widths of the P-type junction and the N-type junction in the second direction can be made smaller than the width of the temperature detection element in the second direction.

  In the case where an insulated gate semiconductor element is formed in the semiconductor device, the longitudinal direction of the insulated gate is preferably parallel to the first direction. Note that the insulated gate is not limited to a linear shape, and may be a curved shape or a rectangular shape. For example, when the longitudinal direction of the insulated gate is an arc, the first direction is a direction along the arc, and the normal vector of the arc is the second direction.

  A polysilicon region may be formed at the end of the portion where the P-type region and the N-type region are joined. The polysilicon region suppresses current leakage from the end of the portion where the P-type region and the N-type region are joined.

  As shown in FIG. 1, the semiconductor device 10 includes a semiconductor substrate 100, surface electrodes 101 a to 101 c, small signal pads 102 a to 102 e, and a temperature detection element 120 formed on the surface of the semiconductor substrate 100. An insulating film 104 is formed in a region of the semiconductor substrate 100 where the surface electrodes 101a to 101c and the small signal pads 102a to 102e are not formed, and the temperature detecting element 120 is formed on the surface of the insulating film 104 (FIG. 3). A gate wiring is also formed on the semiconductor substrate 100, but is not shown in FIG. The temperature detecting element 120 is formed at the center when the semiconductor device 10 is viewed in plan. The central portion of the semiconductor device 10 when viewed in plan is a portion where the temperature easily rises when the semiconductor device 10 generates heat. Thus, the temperature detection element is preferably formed in a portion where the temperature is likely to rise when the semiconductor device generates heat.

  As shown in FIG. 2, the temperature detection element 120 includes a P-type region 121 and an N-type region 122. The P-type region 121 is formed of a P-type semiconductor material, and includes a P-type joint portion 121 a and a P-type contact portion 121 b that is electrically connected to the wiring 123. The N-type region 122 is formed of an N-type semiconductor material, and includes an N-type junction portion 122 a and an N-type contact portion 122 b that is electrically connected to the wiring 124. The P-type contact portion 121b is a portion having the widest width in the Y direction of the P-type region 121, and has a constant width in the X direction. The N-type contact portion 122b is a portion having the widest width in the Y direction of the N-type region 122, and has a constant width in the X direction.

  The P-type joint portion 121a extends from the P-type contact portion 121b in the positive direction (first direction) of the X axis. The N-type joint portion 122a extends from the N-type contact portion 122b in the negative direction of the X axis. The P-type region 121 and the N-type region 122 are L-shaped, and are joined together to form a rectangular temperature detection element 120. The temperature detection element 120 has a rectangular shape with a long side parallel to the X direction and a short side parallel to the Y direction. The P-type joint 121a and the N-type joint 122a are joined on a plane parallel to the X direction. A surface parallel to the Y direction (second direction orthogonal to the first direction) of the P-type joint 121a at the end of the P-type joint 121a in the positive direction of the X axis is joined to the N-type contact 122b. Yes. At the end of the N-type joint 122a in the negative direction of the X-axis, the surface parallel to the Y direction of the N-type joint 122a is joined to the P-type contact part 121b. When the semiconductor device 10 is viewed in plan, the P-type junction 121a and the N-type junction 122a are arranged in a region sandwiched between the P-type contact 121b and the N-type contact 122b.

  As shown in FIGS. 2 and 3, the temperature detection element 120 is formed between the element regions 111 b where the semiconductor elements are formed, and no semiconductor element is formed below the temperature detection element 120. On the semiconductor substrate 100, gate wirings 112b are formed on both sides of the element region 111b in the X direction, and wirings 123 and 124 connected to the temperature detection element 120 are formed on the outer sides thereof. A semiconductor element having a trench gate 14 is formed in the element region 111b. The trench gate 14 is formed so that the longitudinal direction is parallel to the X direction, and the long side direction of the temperature detection element 120 and the longitudinal direction of the trench gate 14 are parallel. In FIG. 3, a semiconductor element having the trench gate 14 is illustrated as an example of the semiconductor element, but the form of the semiconductor element is not limited to this. For example, it may be a planar gate type semiconductor element or a semiconductor element having no insulated gate such as a diode. When a planar gate type semiconductor element is formed, it is preferable that the long side direction of the temperature detecting element and the longitudinal direction of the planar gate are arranged in parallel as in FIG.

  As shown in FIG. 4, in the temperature detection element 120, the width W1 of the P-type contact portion 121b and the width W2 of the N-type contact portion 122b are the same, and the width W of the temperature detection element 120 is W = W1 = W2. is there. The width of the P-type joint portion 121a along the Y direction is narrower than the width W1 of the P-type contact portion 121b, and the width of the N-type joint portion 122a along the Y direction is narrower than the width W2 of the N-type contact portion 122b. The sum of the width of the P-type joint 121a and the width of the N-type joint 122a along the Y direction is W.

  As described above, according to the semiconductor device 10 according to the first embodiment, in the temperature detection element 120, the width of the P-type junction 121a and the width of the N-type junction 122a along the Y direction (that is, Y of the P-type junction 121a). The width in the direction and the width in the Y direction of the N-type junction 122a) are reduced, and the distance in the Y direction from the element region 111b, which is the heat generating portion, to the PN junction surface between the P-type junction 121a and the N-type junction 122a And the width W1 of the P-type contact portion 121b and the width W2 of the N-type contact portion 122b along the Y direction (the width W1 of the P-type contact portion 121b in the Y direction and the width of the N-type contact portion 122b in the Y direction). It is possible to make the width W2) wide. For this reason, it is possible to further shorten the time for the temperature detection element 120 to detect the heat generation from the element region 111a and to ensure electrical connection between the P-type region 121 and the N-type region 122 and the wirings 123 and 124. it can.

  Further, according to the semiconductor device 10 described above, when the minimum contact width of the P-type semiconductor is WPmin and the minimum contact width of the N-type semiconductor is WNmin, the width W of the temperature detection element 120 is W <WPmin + WNmin. can do. For example, when the minimum contact width WPmin of the P-type semiconductor is equal to or smaller than the minimum contact width WNmin of the N-type semiconductor (WPmin ≦ WNmin), it can be designed as W = W1 = W2 (= WNmin). Conversely, when the minimum contact width WPmin of the P-type semiconductor is equal to or larger than the minimum contact width WNmin of the N-type semiconductor (WPmin ≧ WNmin), it can be designed as W = W1 (= WPmin) = W2. The width W of the temperature detection element 120 can be reduced to the wider one of WPmin and WNmin. According to this embodiment, it is possible to provide a semiconductor device including a temperature detection element that is narrower than a conventional temperature detection element and has a shorter temperature detection time.

(Modification)
The shapes of the P-type region and the N-type region are not limited to the L-shape described in the first embodiment. For example, as shown in FIG. 5, the temperature detection element 130 includes a rectangular wave-shaped P-type joint 131a and an N-type joint 132a when viewed in plan, and the P-type joint 131a and the N-type joint 132a. May be bonded to each other at the rectangular surfaces to form a PN junction surface. Similar to the first embodiment, the P-type contact portion 131b is a portion of the P-type region 131 having the widest width in the Y direction, and has a constant width in the X direction. The N-type contact portion 132b is a portion having the widest width in the Y direction of the N-type region 132, and has a constant width in the X direction. The positive end of the X-axis of the P-type joint 131a is joined to the N-type contact 132b, and the negative end of the X-axis of the N-type joint 132a is joined to the P-type contact 131b. Yes.

  Further, as shown in FIG. 6, the temperature detecting element 140 includes a P-shaped joint portion 141a and an N-type joint portion 142a having a wave shape when viewed in plan, and the P-type joint portion 141a and the N-type joint portion 142a. May be joined to each other on the corrugated surface to form a PN junction surface. As in the first embodiment, the P-type contact portion 141b is a portion having the widest width in the Y direction of the P-type region 141, and has a constant width in the X direction. The N-type contact portion 142b is a portion having the widest width in the Y direction of the N-type region 142, and has a constant width in the X direction. The positive end of the X-axis of the P-type joint 141a is joined to the N-type contact 142b, and the negative end of the X-axis of the N-type joint 142a is joined to the P-type contact 141b. Yes. As shown in FIGS. 5 and 6, the PN junction surfaces of the temperature detection elements 130 and 140 are wider than those of the temperature detection element 120. By appropriately changing the shapes of the P-type junction and the N-type junction, the area of the PN junction surface can be appropriately changed.

  Further, as shown in FIG. 7, the temperature detection element 150 includes a triangular P-type joint 151 a and an N-type joint 152 a in plan view, and these are joined together to form a PN junction surface. It may be. An end surface in the negative direction of the X-axis of the P-type region 151 is a P-type contact portion 151b, and the P-type region 151 has the widest width in the Y direction. An end surface in the positive direction of the X axis of the N-type region 152 is an N-type contact portion 152b, and the N-type region 152 has the widest width in the Y direction. The wiring (not shown) of the temperature detection element 150 is joined to the P-type contact portion 151b and the N-type contact portion 152b, which are end faces. The width of the P-type contact portion 151b in the Y direction is wider than that of the P-type junction portion 151a, and the width of the N-type contact portion 152b in the Y direction is wider than that of the N-type junction portion 151a. Thus, the P-type contact portion 151b and the N-type contact portion 152b do not have to have a certain width in the X-axis direction. An end in the positive direction of the X axis of the P-type joint 151a reaches the N-type contact portion 152b, and an end in the negative direction of the X-axis of the N-type joint 152a reaches the P-type contact 151b. Since the configuration of the temperature detection element shown in FIGS. 5 to 7 other than those described above is the same as that of the temperature detection element 120 of the first embodiment, the 120th reference numbers are the 130th, 140th, and 150th, respectively. Duplicated explanation is omitted by replacing it with the base.

  Further, as shown in FIGS. 8 to 11, the ends of the joining portions of the P-type regions 121, 131, 141, 151 and the N-type regions 122, 132, 142, 152 of the temperature detection elements 120, 130, 140, 150 are joined. Further, polysilicon regions 126, 127, 136, 137, 146, 147, 156, and 157 may be formed in the portion. Due to the high-resistance polysilicon region, current leakage occurs from the end portion (end portion of the PN junction surface) where the P-type regions 121, 131, 141, 151 and the N-type regions 122, 132, 142, 152 are joined. This can be suppressed. In the manufacturing process of a semiconductor device, the high-resistance polysilicon region is formed by performing masking or the like on the end portion of the junction between the P-type region and the N-type region when ion implantation is performed on the P-type region and the N-type region. It can be easily formed by not implanting ions.

  In the above embodiments and modifications, the rectangular temperature detection element has been described as an example, but the shape of the temperature detection element is not limited to this. For example, as shown in FIG. 12, an arc-shaped temperature detection element 160 may be used. In this case, the first direction is the direction of the arrow L along the circumference of the arc, and the second direction is the direction of the arrow R indicating the radial direction of the arc. Since the first direction of the temperature detecting element is the same as that of the temperature detecting element 120 of the first embodiment except that the first direction is curved, the duplicated explanation is omitted by replacing the reference number 120 series with the 160 series. In the case where an arc-shaped insulated gate is formed in the element region of the semiconductor device, a temperature detecting element 160 as shown in FIG. 12 can be suitably used. If the temperature detection element 160 is arranged so that the first direction of the temperature detection element 160 is parallel to the longitudinal direction of the arc-shaped insulated gate, the distance between the element region and the temperature detection element 160 can be reduced. Thus, the shape of the temperature detection element can be changed according to the shape of the insulated gate and the shape of the element region so that the distance between the element region and the PN junction surface of the temperature detection element can be reduced. In addition, the sum of the widths of the P-type junction and the N-type junction along the second direction can be made smaller than the width of the temperature detection element.

  Further, in the above-described embodiments and modifications, one temperature detection element is formed at the center when the semiconductor device is viewed in plan, but the present invention is not limited to this. The temperature detection element may be formed at any position on the semiconductor substrate, or a plurality of temperature detection elements may be formed. For example, one may be formed at the center of each element region.

  As mentioned above, although the Example of this invention was described in detail, these are only illustrations and do not limit a claim. The technology described in the claims includes various modifications and changes of the specific examples illustrated above.

  The technical elements described in this specification or the drawings exhibit technical usefulness alone or in various combinations, and are not limited to the combinations described in the claims at the time of filing. In addition, the technology exemplified in this specification or the drawings can achieve a plurality of objects at the same time, and has technical usefulness by achieving one of the objects.

DESCRIPTION OF SYMBOLS 10 Semiconductor device 14 Trench gate 100 Semiconductor substrate 101a-101c Surface electrode 102a-102e Small signal pad 104 Insulating film 111b Element area | region 112b Gate wiring 120,130,140,150,160 Temperature detection element 126,127,136,137,146 , 147, 156, 157 Polysilicon regions 121, 131, 141, 151, 161 P-type regions 121a, 131a, 141a, 151a, 161a P-type junctions 121b, 131b, 141b, 151b, 161b P-type contact portions 122, 132 , 142, 152, 162 N-type regions 122a, 132a, 142a, 152a, 162a N-type junctions 122b, 132b, 142b, 152b, 162b N-type contact parts 123, 124

Claims (6)

A semiconductor substrate having a semiconductor element formed on one surface side;
Are arranged via an insulating film on one surface side of the semiconductor substrate, it is disposed at a position not overlapping with the semiconductor device in a plan view of the semiconductor substrate, and have a P-type region and the N-type region A temperature detecting element for detecting the temperature of the semiconductor element formed on the semiconductor substrate , and a semiconductor device comprising:
The P-type region has a P-type connection for electrically connecting the semiconductor and the wiring, and a P-type connection extending from the P-type connection in the first direction along the surface of the semiconductor substrate. ,
The N-type region includes an N-type connection portion for electrically connecting the semiconductor and the wiring, and extends from the N-type connection portion along the P-type junction portion in the direction opposite to the first direction, and the P-type junction portion. An N-type joint that is joined,
The width of the second direction along the surface of the semiconductor substrate of the P-type junction and orthogonal to the first direction is narrower than the width of the P-type connection portion in the second direction.
The width of the N-type junction in the second direction is narrower than the width of the N-type connection in the second direction.   2. The semiconductor device according to claim 1, wherein a width of the temperature detection element in the second direction is equal to or smaller than a width of the P-type connection portion in the second direction.   3. The semiconductor device according to claim 1, wherein a width of the temperature detection element in the second direction is equal to or smaller than a width of the N-type connection portion in the second direction. The semiconductor device according to claim 1, wherein the semiconductor element is an insulated gate semiconductor element , and a longitudinal direction of the insulated gate is parallel to the first direction.   The semiconductor device according to claim 1, wherein a polysilicon region is formed at an end portion of a portion where the P-type region and the N-type region are joined. 6. The semiconductor device according to claim 1, wherein the P-type junction and the N-type junction are arranged in a region sandwiched between the P-type connection and the N-type connection when the semiconductor substrate is viewed in plan. The semiconductor device according to claim 1.

Images