JP5751484B2 - ナノ金属ガラス粒子集合体薄膜の製造方法 - Google Patents
ナノ金属ガラス粒子集合体薄膜の製造方法 Download PDFInfo
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- JP5751484B2 JP5751484B2 JP2011130026A JP2011130026A JP5751484B2 JP 5751484 B2 JP5751484 B2 JP 5751484B2 JP 2011130026 A JP2011130026 A JP 2011130026A JP 2011130026 A JP2011130026 A JP 2011130026A JP 5751484 B2 JP5751484 B2 JP 5751484B2
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Description
図1は、本発明で用いたRFマグネトロンスパッタ装置の模式図である。金属ガラスとして、組成がAu52Ag5Pd2Cu25Si10Al6の合金とPd78Si22の合金とをターゲットに用いて、Si基板上にナノ金属ガラス薄膜をスパッタリングした。スパッタリングの条件は、到達真空度が1×10−4Pa、成膜中のArガス圧が1Pa、スパッタリングのパワーが100Wで、RF電圧を間欠的に5分間ON−5分間OFFを繰り返した。この繰り返しで10時間スパッタリングしたAu−基ナノ金属ガラス薄膜の密度を測定した結果、13.33±0.14g/cm3であり、薄膜がナノ粒子の集合体で、空隙が存在するので、同一組成の均一な組織を持つバルク金属ガラスより、6%以上小さい値になった。
Claims (2)
- 真空引き、ガス置換が終了したRFマグネトロンスパッタ装置において、RF電圧印加直後のプラズマが不安定な状態で、RF電源を間欠的にON−OFFすることを特徴とするナノ金属ガラス粒子集合体薄膜の製造方法。
- 前記ガス置換ガスがアルゴンガスであり、前記RF電源の間欠的なON−OFFの間隔が、3分間以上、10分間以内であることを特徴とする請求項1記載のナノ金属ガラス粒子集合体薄膜の製造方法。
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JP2011130026A JP5751484B2 (ja) | 2011-06-10 | 2011-06-10 | ナノ金属ガラス粒子集合体薄膜の製造方法 |
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JP2011130026A JP5751484B2 (ja) | 2011-06-10 | 2011-06-10 | ナノ金属ガラス粒子集合体薄膜の製造方法 |
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JP2012255197A JP2012255197A (ja) | 2012-12-27 |
JP5751484B2 true JP5751484B2 (ja) | 2015-07-22 |
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JP2011130026A Expired - Fee Related JP5751484B2 (ja) | 2011-06-10 | 2011-06-10 | ナノ金属ガラス粒子集合体薄膜の製造方法 |
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Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH09217171A (ja) * | 1996-02-15 | 1997-08-19 | Anelva Corp | Ito透明導電膜の作製方法 |
AU3715597A (en) * | 1996-05-14 | 1997-12-05 | E.I. Du Pont De Nemours And Company | Catalyst compositions of nanoparticulate metal on a refractory support |
JPH10140332A (ja) * | 1996-11-08 | 1998-05-26 | Anelva Corp | 非晶質ito膜の作製方法 |
JP4905129B2 (ja) * | 2004-02-26 | 2012-03-28 | コニカミノルタホールディングス株式会社 | ナノ粒子付着基板の製造方法 |
US7666494B2 (en) * | 2005-05-04 | 2010-02-23 | 3M Innovative Properties Company | Microporous article having metallic nanoparticle coating |
JP2009064591A (ja) * | 2007-09-04 | 2009-03-26 | Hyogo Prefecture | 燃料電池用電極とその製造方法並びに該電極を用いた膜電極接合体 |
JP2010269982A (ja) * | 2009-05-22 | 2010-12-02 | Nikon Corp | カーボンナノチューブ集合体の製造方法 |
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