JP5749378B1 - Flow rate measuring method and flow rate measuring device - Google Patents

Flow rate measuring method and flow rate measuring device Download PDF

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JP5749378B1
JP5749378B1 JP2014101884A JP2014101884A JP5749378B1 JP 5749378 B1 JP5749378 B1 JP 5749378B1 JP 2014101884 A JP2014101884 A JP 2014101884A JP 2014101884 A JP2014101884 A JP 2014101884A JP 5749378 B1 JP5749378 B1 JP 5749378B1
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良廣 本間
良廣 本間
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Cosmo Instruments Co Ltd
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Abstract

【課題】どのような特性のワークでも高い精度で流量を測定する。【課題を解決する手段】電空レギュレータを調整して基準ワークに対し規定圧PPを含む所定範囲の一連のテスト圧の気体を順次供給し、そのときのそれぞれの流量を流量計で測定し、基準ワークの特性曲線として記憶部に記憶する。測定対象ワークに対し上記所定範囲内のテスト圧Pbの気体を供給し、そのときの流量を流量値Qbとして流量計で測定し、演算部は基準ワークの特性曲線から規定圧PPとテスト圧Pbにそれぞれ対応する流量値QmPとQmbを読み取り、測定対象ワークの規定圧PPでの流量をQPとすると、Qmb：Qb＝QmP：QPの比例関係が成立すると近似して流量値QPを流量値QmPと、Qmbと、Qbとから計算する。【選択図】 図２An object of the present invention is to measure a flow rate with high accuracy on a workpiece having any characteristics. [Means for Solving the Problems] A series of test pressure gases including a specified pressure PP are sequentially supplied to a reference workpiece by adjusting an electropneumatic regulator, and each flow rate at that time is measured by a flow meter. The characteristic curve of the reference workpiece is stored in the storage unit. Supply a gas with the test pressure Pb within the above specified range to the workpiece to be measured, and measure the flow rate at that time with a flow meter as the flow rate value Qb. If the flow rate at the specified pressure PP of the workpiece to be measured is QP, the flow rate value QP is approximated as the proportional relationship of Qmb: Qb = QmP: QP is established, And Qmb and Qb. [Selection] Figure 2

Description

この発明はワークに規定のテスト圧の気体を供給し、ワークに流れる気体の流量を測定する方法、及びその方法を使った流量測定装置に関する。   The present invention relates to a method for supplying a gas having a specified test pressure to a workpiece and measuring the flow rate of the gas flowing through the workpiece, and a flow rate measuring apparatus using the method.

例えばエンジンの吸排気バルブ、シリンダヘッド、ジョイント管、ガスコック、などのワークの良否を判定する場合、ワークに規定の圧力の気体（例えば空気）を供給し、そこに流れる気体流量の大きさを規定の値と比較してワークの良否を判断する。その場合、ワークに規定のテスト圧が加わっていなければ、正確な良否判定をすることができない。   For example, when judging the quality of workpieces such as engine intake / exhaust valves, cylinder heads, joint pipes, gas cocks, etc., a gas with a specified pressure (for example, air) is supplied to the workpiece, and the amount of gas flowing therethrough is specified. The quality of the workpiece is judged by comparing with the value of. In that case, if the prescribed test pressure is not applied to the workpiece, it is not possible to make an accurate pass / fail judgment.

図１はこの分野の従来技術と考えることができる流量測定装置の概念的なブロック図を示す。この流量測定装置１００では配管１３の一端に空圧源１１が接続され、他端にワーク２０が接続され、空圧源１１側からレギュレータ（減圧弁）１２、流量計１５、作動弁１６がこの順に配管１３に直列に挿入されている。レギュレータ１２と流量計１５の間において配管１３に圧力ゲージ１４が接続されており、作動弁１６とワーク２１の間において配管１３に圧力計１７が接続されている。流量計１５からの測定流量信号と圧力計１７からの検出圧力信号が制御装置３０に与えられる。制御装置３０は演算部３１と、記憶部３２と、表示部３３とを含んでいる。記憶部３２には測定処理手順のプログラムと、予め決めたテスト圧許容誤差値が記憶されている。   FIG. 1 shows a conceptual block diagram of a flow measuring device that can be considered as prior art in this field. In this flow measuring device 100, a pneumatic pressure source 11 is connected to one end of a pipe 13, a work 20 is connected to the other end, and a regulator (pressure reducing valve) 12, a flow meter 15, and an operating valve 16 are connected to the pneumatic pressure source 11 side. The tube 13 is inserted in series in this order. A pressure gauge 14 is connected to the pipe 13 between the regulator 12 and the flow meter 15, and a pressure gauge 17 is connected to the pipe 13 between the operation valve 16 and the workpiece 21. A measured flow signal from the flow meter 15 and a detected pressure signal from the pressure gauge 17 are supplied to the control device 30. The control device 30 includes a calculation unit 31, a storage unit 32, and a display unit 33. The storage unit 32 stores a measurement processing procedure program and a predetermined test pressure allowable error value.

流量計１５としては差圧式流量計、層流式流量計、熱線式流量計など、どのような形式の流量計でもよい。演算部３１は例えばマイクロプロセッサーで構成し、制御装置３０に取り込まれた流量信号と圧力信号はそれぞれ図示してないＡ／Ｄ変換器によりディジタル信号に変換されて演算部３１に与えられるものとする。演算部３１は記憶部３２に記憶されているプログラムに従って測定手順を実行する。   The flow meter 15 may be any type of flow meter such as a differential pressure flow meter, a laminar flow meter, or a hot wire flow meter. The calculation unit 31 is constituted by, for example, a microprocessor, and the flow rate signal and the pressure signal taken into the control device 30 are converted into digital signals by an A / D converter (not shown) and supplied to the calculation unit 31. . The calculation unit 31 executes a measurement procedure according to a program stored in the storage unit 32.

測定に当たっては、作動弁１６を閉じた状態で測定対象ワーク２０を配管１３の他端に取り付け、圧力ゲージ１４の表示圧力がほぼ規定圧となるようレギュレータ１２を調整する。次に作動弁１６を導通させてワーク２０に圧力調整した空気を供給するが、減圧調整するレギュレータ１２の性能や空圧源１１の元圧変動、空圧原１１からワーク２０にいたる経路による圧力損失などによりワーク２０に与えられる実際の圧力は規定圧からかなりずれた圧力となってしまう場合がある。そこで、圧力計１７の表示圧力をモニターし、圧力値が規定圧となるよう更にレギュレータ１２を調整すればワーク２０の正確な流量を求めることができるが、レギュレータ１２の調整は一般に手動であり調整精度が粗く、ワークごとにそのようなレギュレータ１２を微細調整するのは多大の労力と時間を要する。   In the measurement, the workpiece 20 is attached to the other end of the pipe 13 with the operation valve 16 closed, and the regulator 12 is adjusted so that the display pressure of the pressure gauge 14 becomes substantially the specified pressure. Next, the operation valve 16 is turned on to supply the pressure-adjusted air to the work 20, but the performance of the regulator 12 for adjusting the pressure reduction, the original pressure fluctuation of the air pressure source 11, the pressure by the path from the air pressure source 11 to the work 20. The actual pressure applied to the workpiece 20 due to loss or the like may become a pressure considerably deviated from the specified pressure. Therefore, by monitoring the display pressure of the pressure gauge 17 and further adjusting the regulator 12 so that the pressure value becomes the specified pressure, the accurate flow rate of the workpiece 20 can be obtained. However, the regulator 12 is generally manually adjusted. The precision is rough, and it takes a lot of labor and time to finely adjust such a regulator 12 for each workpiece.

そこで、圧力ゲージ１４の読みがほぼ規定圧となるようレギュレータ１２を粗調整し、流量計１５からの測定流量と圧力計１７による検出圧力を制御部３０の演算部３１に取り込む。演算部３１は検出圧力と記憶部３２に記憶されている規定圧との圧力誤差を計算する。その圧力誤差の絶対値が記憶部３２に記憶されているテスト圧許容誤差値以下であれば測定流量値を規定圧での流量とみなして表示部３３に表示する。圧力誤差の絶対値がテスト圧許容誤差値より大であった場合は適正な圧力の空気がワーク２０に与えられていないので、作動弁１６を閉じてレギュレータ１２を再度調整し、同様の測定と判定を繰り返す。   Therefore, the regulator 12 is roughly adjusted so that the reading of the pressure gauge 14 becomes almost the specified pressure, and the measured flow rate from the flow meter 15 and the detected pressure by the pressure gauge 17 are taken into the calculation unit 31 of the control unit 30. The calculation unit 31 calculates a pressure error between the detected pressure and the specified pressure stored in the storage unit 32. If the absolute value of the pressure error is equal to or less than the test pressure allowable error value stored in the storage unit 32, the measured flow rate value is regarded as the flow rate at the specified pressure and displayed on the display unit 33. When the absolute value of the pressure error is larger than the test pressure allowable error value, the air of the appropriate pressure is not given to the workpiece 20, so the operating valve 16 is closed, the regulator 12 is adjusted again, and the same measurement is performed. Repeat the determination.

同種の多数のワークの良否を検査する場合は、作動弁１６閉じた状態でまず良品であるマスターワーク（基準ワークとも呼ぶ）を配管１３に取り付け、圧力ゲージ１４をモニターしながらほぼ規定圧となるようレギュレータ１２を粗調整し、作動弁１６を開いた後に更に圧力計１７の読みが規定圧となるようレギュレータ１２を精調整し、その状態で流量計１５の測定流量を標準流量として記憶部３２に保存する。その後は先に説明したと同様に各ワークについて圧力ゲージ１４の読みがほぼ規定圧となるようレギュレータ１２を調整し、そのときの測定流量と標準流量との誤差が標準流量に対し所定の割合以下であれば良品と判定し、そうでなければ不良と判定するよう制御装置３０は構成される。   When inspecting the quality of a large number of workpieces of the same type, a good master workpiece (also referred to as a reference workpiece) is first attached to the pipe 13 with the actuating valve 16 closed, and the pressure gauge 14 is monitored to obtain a substantially specified pressure. After the regulator 12 is coarsely adjusted and the operation valve 16 is opened, the regulator 12 is further finely adjusted so that the reading of the pressure gauge 17 becomes a specified pressure, and in this state, the measured flow rate of the flow meter 15 is set as the standard flow rate in the storage unit 32. Save to. Thereafter, as described above, the regulator 12 is adjusted so that the reading of the pressure gauge 14 becomes almost the specified pressure for each workpiece, and the error between the measured flow rate and the standard flow rate is less than a predetermined ratio with respect to the standard flow rate. If so, the control device 30 is configured to determine that the product is a non-defective product and to determine that the product is defective if not.

ところが、前述のように様々な原因でワークにいつも正確な規定圧が印加されているとは限らない。テスト圧の規定圧からのずれがテスト圧許容誤差値以内であったとしても、テスト圧許容誤差値を大きく設定すれば、大きな流量誤差を許容することになり、この誤差はいくら精度の良い流量計を使用しても除去できず、テスト圧の規定圧からのずれは再現性の悪い、ばらつきの多い計測をもたらすことになる。またテスト圧が微圧の場合や、大流量の場合は配管の圧力損失でワークに加わるテスト圧が計測ごとに変わってしまう。この場合も正しい流量計測が行われない。テスト圧許容誤差値を小さく設定すれば、レギュレータ１２の調整に多大な時間と労力を要することになる。   However, as described above, an accurate specified pressure is not always applied to the workpiece for various reasons. Even if the deviation of the test pressure from the specified pressure is within the allowable error value of the test pressure, if the allowable error value of the test pressure is set large, a large flow rate error will be allowed. Even if a meter is used, it cannot be removed, and the deviation of the test pressure from the specified pressure will result in measurement with poor reproducibility and a large amount of variation. In addition, when the test pressure is very small or when the flow rate is large, the test pressure applied to the workpiece changes with each measurement due to the pressure loss of the piping. Even in this case, correct flow rate measurement is not performed. If the test pressure allowable error value is set to be small, adjustment of the regulator 12 will require a great deal of time and labor.

これらの問題を解決する方法としてレギュレータ１２として電気的に圧力調整可能な微圧レギュレータや電空レギュレータを用いて、圧力計１７からの検出圧力によりレギュレータ１２をフィードバック制御し、ワークテスト圧をコントロールすることが考えられる（例えば特開2001-27555号公報参照）。しかし、このフィードバック制御方式は費用がかさむこととフィードバックのハンティングが収斂するのに時間がかかるため制御に時間がかかり計測時間が延びる欠点がある。   As a method for solving these problems, a fine pressure regulator or an electropneumatic regulator that can be electrically adjusted as the regulator 12 is used, and the regulator 12 is feedback-controlled by the detected pressure from the pressure gauge 17 to control the work test pressure. (For example, see JP-A-2001-27555). However, this feedback control method has the disadvantages that it is expensive and it takes time to converge feedback hunting, so that control takes time and measurement time is extended.

他の解決方法として、ワークの特性がオリフィス特性であるとみなしてベルヌイの定理とボイル・シャルルの法則から導出した換算式を使って規定圧からずれたテスト圧で測定された流量を規定圧での流量に換算することが例えば特開2013-134180号公報に提案されている。しかし、実際のワークはオリフィス特性から外れるものもたくさんあり、そのようなワークの場合は、換算式が当てはまらず、規定圧での流量を精度よく求めることはできない。   As another solution, the flow rate measured at the test pressure deviating from the specified pressure using the conversion formula derived from Bernoulli's theorem and Boyle-Charles's law, assuming that the workpiece characteristics are orifice characteristics, is the specified pressure. For example, Japanese Unexamined Patent Application Publication No. 2013-134180 proposes conversion to a flow rate of However, there are many actual workpieces that deviate from the orifice characteristics. For such workpieces, the conversion formula does not apply, and the flow rate at the specified pressure cannot be obtained with high accuracy.

この発明の目的は、上述の問題点を解決し、フィードバック制御を使用せず、どのような特性のワークであっても、テスト圧が規定圧からある程度ずれても高い精度で規定圧での流量値が得られる流量測定方法及び流量測定装置を提供することである。   The object of the present invention is to solve the above-mentioned problems, do not use feedback control, and regardless of the characteristics of the workpiece, the flow rate at the specified pressure with high accuracy even if the test pressure deviates from the specified pressure to some extent. To provide a flow rate measuring method and a flow rate measuring device capable of obtaining a value.

この発明によるワークの流量を測定する流量測定方法は、
(a) 基準ワークに対し規定圧PPを含む所定範囲の一連のテスト圧の気体を供給し、そのときの流量をそれぞれ測定し、上記基準ワークの特性曲線として記憶部に記憶する工程と、
(b) 測定対象ワークに対し上記所定範囲内の任意のテスト圧Pbの気体を供給し、そのときの流量を測定して流量値Qbとして上記記憶部に保持する工程と、
(c) 上記基準ワークの上記特性曲線上の上記規定圧PPと上記テスト圧Pbにそれぞれ対応する流量値QmPとQmbを読み取り、上記規定圧PPでの測定対象ワークの流量をQPとすると、Qmb：Qb＝QmP：QPの比例関係が成立すると近似して上記測定対象ワークの上記規定圧PPでの上記流量QPを上記流量値QmPと、Qmbと、Qbとから演算部により計算で求める工程と、
を含むことを特徴とする。 A flow rate measuring method for measuring the flow rate of a workpiece according to the present invention is as follows:
(a) supplying a series of test pressure gases in a predetermined range including a specified pressure P P to the reference workpiece, measuring the flow rates at that time, and storing them in the storage unit as a characteristic curve of the reference workpiece;
(b) supplying a gas having an arbitrary test pressure P b within the predetermined range to the workpiece to be measured, measuring a flow rate at that time, and holding the flow rate value Q b in the storage unit;
(c) Read the flow rate values Q mP and Q mb corresponding to the specified pressure P P and the test pressure P b on the characteristic curve of the reference workpiece, respectively, and determine the flow rate of the workpiece to be measured at the specified pressure P P. When Q P, Q mb: Q b = Q mP: Q the flow rate Q P and the flow rate value Q mP of proportionality approximated to be taken by the specified pressure P P of the measured workpiece P, Q Steps to calculate by calculation unit from mb and Q b ,
It is characterized by including.

この発明による流量測定装置は、
与えられた圧力の気体を供給する空圧源と、上記空圧源が一端に接続された配管と、 上記配管に直列に挿入され、制御信号に応答して上記気体の圧力を調整する電空レギュレータと、上記電空レギュレータの、上記空圧源と反対側において上記配管に直列に挿入された流量計と、上記流量計の、上記空圧源と反対側において上記配管に接続された圧力計と、上記電空レギュレータに上記気体の圧力を調整する制御信号を与え、上記流量計により測定された流量信号と上記圧力計により測定された圧力信号が与えられ、上記配管の他端に接続されたワークの規定圧での流量を計算する制御部と、を含み、
上記制御部は、
上記配管に接続された基準ワークに対し上記電空レギュレータを制御して規定圧PPを含む所定範囲の一連のテスト圧の気体を供給したときのそれらの一連のテスト圧での上記流量計で測定された流量を上記基準ワークの特性曲線として記憶し、上記配管の他端に接続された測定対象ワークに対し上記所定範囲内の任意のテスト圧Pbの気体を供給したときの上記流量計により測定された流量値Qbを保持し、上記基準ワークの特性曲線上の上記規定圧PPと上記テスト圧Pbでの流量値をそれぞれQmP及びQbとし、上記測定対象ワークの上記規定圧での流量をQPとすると、Qmb：Qb＝QmP：QPの比例関係が成立すると近似して上記測定対象ワークの上記規定圧PPでの流量値QPを上記流量QmPとQmbとQbとから計算する計算式を記憶した記憶部と、
上記電空レギュレータの設定圧力を制御する制御信号を発生し、上記記憶部に記憶された上記基準ワークの上記特性曲線から上記規定圧PPでの流量値QmP及び上記テスト圧Pbでの流量値Qmbを読み取り、上記流量値QmP, Qmbと上記測定対象ワークについて測定した上記テスト圧Pbでの上記流量値Qbとから上記測定対象ワークの上記規定圧PPでの流量値QPを上記記憶部に記憶された上記計算式を使って計算する演算部と、
計算された上記流量値QPを表示する表示部と、
を含むことを特徴とする。 The flow rate measuring device according to the present invention is:
An air pressure source for supplying a gas of a given pressure; a pipe connected to one end of the air pressure source; and an electropneumatic that is inserted in series in the pipe and adjusts the pressure of the gas in response to a control signal A regulator, a flow meter inserted in series with the pipe on the side opposite to the pneumatic source of the electropneumatic regulator, and a pressure gauge connected to the pipe on the side opposite to the pneumatic source of the flow meter And a control signal for adjusting the pressure of the gas to the electropneumatic regulator, a flow signal measured by the flow meter and a pressure signal measured by the pressure meter are provided, and connected to the other end of the pipe. A control unit for calculating a flow rate at a specified pressure of the workpiece,
The control unit
With the above flow meter at a series of test pressures when a series of test pressure gases including a specified pressure P P are supplied to the reference work connected to the piping by controlling the electropneumatic regulator. the measured flow is stored as a characteristic curve of the reference work, the flow meter when the supply of any test pressure P b of the gas in the predetermined range with respect to a connected measured workpiece to the other end of the pipe holding the flow rate value Q b measured by the flow rate value in the above specified pressure P P and the test pressure P b on the characteristic curve of the reference workpiece and Q mP and Q b, respectively, above the measurement object work When the flow rate at the specified pressure and Q P, Q mb: Q b = Q mP: Q flow rate value Q P to the flow rate at the specified pressure P P of the proportional relationship is approximated to hold the measurement target workpiece P A storage unit storing a calculation formula calculated from Q mP , Q mb, and Q b ;
A control signal for controlling the set pressure of the electropneumatic regulator is generated, and the flow rate value Q mP at the specified pressure P P and the test pressure P b are calculated from the characteristic curve of the reference workpiece stored in the storage unit. The flow rate value Q mb is read and the flow rate value Q mP , Q mb and the flow rate value Q b at the test pressure P b measured for the measurement target workpiece are measured at the specified pressure P P of the measurement target workpiece. a calculation unit for the value Q P is calculated using the stored the above equation in the storage unit,
A display unit for displaying the calculated the flow rate value Q P,
It is characterized by including.

この発明の流量測定方法及び測定装置によれば、どのような特性のワークであってもフィードバック制御を行わず、従って簡単な構成で短時間にかつ高い精度で流量測定が可能である。   According to the flow rate measuring method and measuring apparatus of the present invention, feedback control is not performed for a workpiece having any characteristics, and therefore, the flow rate can be measured with high accuracy in a short time with a simple configuration.

従来の技術による流量測定装置の概念的ブロック図。The conceptual block diagram of the flow measuring device by a prior art. この発明の流量測定原理を説明するためのグラフ。The graph for demonstrating the flow measurement principle of this invention. この発明の流量測定方法を説明するためのフロー図。The flowchart for demonstrating the flow measuring method of this invention. この発明の流量測定装置を説明するための概念的ブロック図。The conceptual block diagram for demonstrating the flow volume measuring apparatus of this invention. この発明による流量測定装置により得られたマスターワークＭの圧力対流量の測定結果を示す表。The table | surface which shows the measurement result of the pressure with respect to the flow volume of the masterwork M obtained by the flow volume measuring apparatus by this invention. この発明による流量測定装置により得られたワークＡの圧力対流量の測定結果と各テスト圧に対する、規定圧での換算流量を表で示す図。The figure which shows the conversion flow rate by the regulation pressure with respect to the measurement result of the pressure with respect to the workpiece | work A obtained by the flow volume measuring apparatus by this invention, and each test pressure in a table | surface. この発明による流量測定装置により得られたワークＢの圧力対流量の測定結果と各テスト圧に対する、規定圧での換算流量を表で示す図。The figure which shows the conversion flow rate in the regulation pressure with respect to the measurement result of the pressure with respect to the workpiece | work B obtained by the flow volume measuring apparatus by this invention, and each test pressure in a table | surface. この発明による流量測定装置により得られたワークＣの圧力対流量の測定結果と各テスト圧に対する、規定圧での換算流量を表で示す図。The figure which shows the conversion flow rate by the regulation pressure with respect to the measurement result of the pressure of the workpiece | work C obtained by the flow volume measuring apparatus by this invention with respect to each test pressure, and a test pressure. この発明による流量測定装置により得られたワークＤの圧力対流量の測定結果と各テスト圧に対する、規定圧での換算流量を表で示す図。The figure which shows the conversion flow rate in the regulation pressure with respect to the measurement result of the pressure with respect to the workpiece | work D obtained by the flow volume measuring apparatus by this invention, and each test pressure in a table | surface. この発明による流量測定装置により得られたワークＥの圧力対流量の測定結果と各テスト圧に対する、規定圧での換算流量を表で示す図。The figure which shows the conversion flow rate by the regulation pressure with respect to the measurement result of the pressure with respect to the workpiece | work E obtained by the flow volume measuring apparatus by this invention, and each test pressure in a table | surface. 図６の表に示す圧力対流量と換算流量をグラフで示す図。The figure which shows the pressure versus flow volume and conversion flow volume which are shown in the table | surface of FIG. 6 with a graph. 図７の表に示す圧力対流量と換算流量をグラフで示す図。The figure which shows the pressure versus flow volume and conversion flow volume which are shown in the table | surface of FIG. 7 with a graph. 図８の表に示す圧力対流量と換算流量をグラフで示す図。The figure which shows the pressure versus flow volume and conversion flow volume which are shown in the table | surface of FIG. 8 with a graph. 図９の表に示す圧力対流量と換算流量をグラフで示す図。The figure which shows the pressure versus flow volume and conversion flow volume which are shown in the table | surface of FIG. 9 with a graph. 図１０の表に示す圧力対流量と換算流量をグラフで示す図。The figure which shows the pressure versus flow volume and conversion flow volume which are shown in the table | surface of FIG. 10 with a graph.

［発明の原理］
まず、この発明において使用される近似測定法を図２を参照して説明する。本来ワークの圧力対流量特性は実線で示すような曲線であるが、同種のワークであっても、それらの寸法ばらつきや製造ミスのためワークの圧力対流量特性はワークごとに異なっているとみなさなければならない。この発明で使用する近似測定法では、それぞれのワークの圧力対流量特性曲線（以降、単に特性曲線とも呼ぶ）上の同じ第１の圧力（例えばPP）に対する流量と同じ第２の圧力（例えばPb）に対する流量の２点間を結ぶ直線の延長は図２のグラフの圧力軸上（Ｑ＝０）の同一点Pcで交差するものと近似する。この近似を前提とすれば、測定対象ワークのテスト圧Pbでの測定流量Qbと、そのテスト圧Pbでのマスターワークの特性曲線上の流量Qmbと、規定圧PPでのマスターワークの特性曲線上の流量QmPと、測定対象ワークの規定圧PPでの流量QPとの間に比例関係Qmb：Qb＝QmP：QPが成立するので、この比例関係を使って測定対象ワークの規定圧PPでの換算流量QPを計算することができる。 [Principle of the Invention]
First, an approximate measurement method used in the present invention will be described with reference to FIG. Originally, the pressure-flow characteristics of workpieces are curves as shown by solid lines, but even for the same type of workpieces, the pressure-flow characteristics of workpieces are considered to differ from workpiece to workpiece due to dimensional variations and manufacturing errors. There must be. In the approximate measurement method used in the present invention, a second pressure (for example, the same flow rate as that for the same first pressure (for example, P P ) on the pressure-flow characteristic curve (hereinafter also simply referred to as a characteristic curve) of each workpiece is used. The extension of the straight line connecting the two points of the flow rate with respect to P b ) approximates that it intersects at the same point P c on the pressure axis (Q = 0) in the graph of FIG. By this approximation assumes a measured flow rate Q b of the test pressure P b to be measured workpiece, and the flow rate Q mb on the characteristic curve of the master work at the test pressure P b, the master at the specified pressure P P and the flow rate Q mP in the work characteristic curve, proportional Q mb between the flow rate Q P at specified pressure P P of the measurement object work: Q b = Q mP: since Q P is satisfied, the proportional relationship The converted flow rate Q P at the specified pressure P P of the workpiece to be measured can be calculated.

［測定手順］
規定圧での換算流量を求める具体的な手順を図３を参照して説明する。 [Measurement procedure]
A specific procedure for obtaining the converted flow rate at the specified pressure will be described with reference to FIG.

使用される記号の定義は次の通りである。
PP：規定圧
Pb：測定対象ワークに与えられるテスト圧
QmP：規定圧PPに対するマスターワーク特性曲線上の流量値
Qmb：テスト圧Pbに対するマスターワーク特性曲線上の流量値
Qb：テスト圧Pbでの測定対象ワークの測定流量値
QP：テスト圧Pbで測定流量Qbのワークに対する規定圧PPでの計算で求めた換算流量値
ステップＳ１：まず、マスターワークで規定圧PPを含む所定範囲で一連のテスト圧に対する流量を測定し、マスターワークの特性曲線として記憶する。 The definitions of the symbols used are as follows.
P P : Specified pressure
P b : Test pressure applied to the workpiece to be measured
Q mP : Flow rate value on the master work characteristic curve for the specified pressure P P
Q mb : Flow rate value on the master work characteristic curve for the test pressure P b
Q b : Measurement flow rate value of workpiece to be measured at test pressure P b
For First, a series of tests pressure in a predetermined range including the specified pressure P P in the master work: Q P: test pressure P b in the measured flow rate Q b in terms determined by the calculations in specified pressure P P with respect to the workpiece flow value step S1 The flow rate is measured and stored as a masterwork characteristic curve.

ステップＳ２：次に上記所定範囲内のテスト圧Pbで測定対象ワークの流量Qbを測定する。 Step S2: Next to measure the flow rate Q b of the measurement object work in a test pressure P b in the predetermined range.

ステップＳ３：マスターワークの記憶されている特性曲線上の規定圧PPに対する流量値QmPとテスト圧Pbに対する流量値Qmbを読み取り、これらと測定対象ワークのテスト圧Pbでの測定流量値Qbと規定圧PPでの流量値QPの関係が図２において比例関係Qmb：Qb＝QmP：Qpを満たすと近似して測定対象ワークの規定圧PPでの換算流量QPを次式 Step S3: The flow rate value Q mP for the specified pressure P P on the stored characteristic curve of the master workpiece and the flow rate value Q mb for the test pressure P b are read, and these and the measured flow rate at the test pressure P b of the workpiece to be measured. the value Q b and standard pressure P proportional Q mb relationship of the flow rate value Q P is 2 at P: Q b = Q mP: conversion at specified pressure P P of the measurement target workpiece approximates to meet the Q p Flow rate Q P

Figure 0005749378
Figure 0005749378

で計算し、表示する。 Calculate and display with.

ステップＳ１におけるマスターワーク特性曲線の測定において、マスターワークに与えるテスト圧としては、規定圧PPを含む所定範囲内で一定間隔の一連のテスト圧を順次与え、それらのテスト圧での流量をそれぞれ測定し、特性曲線として記憶する。このテスト圧の一定間隔は後述のこの発明の流量測定装置で使用する電空レギュレータの分解能が設定可能な最小幅であり、その最小幅かそれより大の幅を一定間隔とする。例えば、規定圧PPを含む所定範囲で１００点のテスト圧での流量を取得すると、圧力計の測定圧力に対する特性曲線の１ステップの読み取り誤差は１％となる。読み取り誤差を例えば０．５％以下にするには２００点以上のテスト圧で流量データを取得することが必要である。実用的には２００〜５００点の流量データを特性曲線として取得することが望まれる。 In the measurement of the master work characteristic curve in step S1, as a test pressure given to the master work, a series of test pressures at regular intervals within a predetermined range including the specified pressure P P are sequentially given, and the flow rates at those test pressures are respectively determined. Measure and store as characteristic curve. The constant interval of the test pressure is the minimum width that can be set for the resolution of the electropneumatic regulator used in the flow rate measuring device of the present invention, which will be described later, and the minimum width or a width larger than that is the constant interval. For example, when the flow rate at 100 test pressures in a predetermined range including the specified pressure P P is acquired, the reading error of one step of the characteristic curve with respect to the pressure measured by the pressure gauge is 1%. In order to reduce the reading error to 0.5% or less, for example, it is necessary to acquire flow rate data with a test pressure of 200 points or more. Practically, it is desired to acquire flow rate data of 200 to 500 points as a characteristic curve.

［実施例］
図４はこの発明を実施する流量測定装置の概念的ブロック図を示す。この実施例による流量測定装置２００の空圧源１１、配管１３、流量計１５、作動弁１６、圧力計１７を含む構成は図１に示した従来の流量測定装置１００の構成と同様であり、説明を省略する。この発明の流量測定装置２００においては、マスターワーク２０ｍの圧力対流量特性曲線を測定するため、一連の多数のテスト圧を順次発生できるよう、電空レギュレータ１８を図１におけるレギュレータ１２の代わりに使用する。 [Example]
FIG. 4 shows a conceptual block diagram of a flow rate measuring apparatus embodying the present invention. The configuration including the pneumatic pressure source 11, the pipe 13, the flow meter 15, the operating valve 16, and the pressure gauge 17 of the flow rate measuring device 200 according to this embodiment is the same as the configuration of the conventional flow rate measuring device 100 shown in FIG. Description is omitted. In the flow measuring device 200 of the present invention, the electropneumatic regulator 18 is used in place of the regulator 12 in FIG. 1 so that a series of test pressures can be sequentially generated in order to measure the pressure-flow characteristic curve of the master work 20 m . use.

また、制御部４０の構成が演算部４１と、記憶部４２と、表示部４３を含む点も図１の流量測定装置１００と類似しているが、図１の制御部３０とは機能が以下の点で異なる。即ち、制御部４０の記憶部４２は式(1)を演算する処理プログラムを含む測定手順のプログラムを予め格納している。また記憶部４２には流量計１５で測定した流量値、圧力計１７で測定した圧力値、及び演算部４１の演算結果が一時的に保持される。測定手順のプログラムは規定圧PPを含む所定範囲の一連のテスト圧を順次発生するように電空レギュレータ１８を制御する制御信号を順次発生するプログラムも含んでいる。 1 is similar to the flow rate measuring device 100 of FIG. 1 in that the configuration of the control unit 40 includes a calculation unit 41, a storage unit 42, and a display unit 43, but the function of the control unit 30 of FIG. Is different. That is, the storage unit 42 of the control unit 40 stores in advance a measurement procedure program including a processing program for calculating the expression (1). The storage unit 42 temporarily holds the flow value measured by the flow meter 15, the pressure value measured by the pressure gauge 17, and the calculation result of the calculation unit 41. The measurement procedure program also includes a program for sequentially generating control signals for controlling the electropneumatic regulator 18 so as to sequentially generate a series of test pressures in a predetermined range including the specified pressure P P.

演算部４１はマスターワーク２０ｍに対して一連のテスト圧で順次測定した流量をマスターワーク２０ｍの特性曲線として記憶部４２に記憶しておき、測定対象ワーク２０に対して測定したテスト圧Pbでの流量Qbと、特性曲線上のPPとPbでの流量QmP,Qmbとを記憶部４２に処理プログラムとして記憶されている式(1)に代入して規定圧PP時のワーク２０の流量QPを計算し、表示部４３に表示する。記憶部４２は圧力計１７で測定した圧力値、流量計１５で測定した流量値、及び演算部４１による演算結果を一時的に保持する例えばランダムアクセスメモリと、式(1)の処理プログラムを含む測定手順プログラムを予め格納した例えばハードディスクのような記憶デバイスとで構成してもよい。 Calculating section 41 stores the flow rate was measured sequentially in a series of tests pressure to the master work 20 m in the storage unit 42 as the characteristic curve of the master work 20 m, test pressure P measured relative to the measurement object work 20 and the flow rate Q b at b, the flow rate Q mP, into equation (1) stored as a processing program and a Q mb in the storage unit 42 specified pressure P P in P P and P b on the characteristic curve the flow rate Q P of the work 20 when calculated on the display unit 43. The storage unit 42 includes, for example, a random access memory that temporarily holds the pressure value measured by the pressure gauge 17, the flow value measured by the flow meter 15, and the calculation result by the calculation unit 41, and the processing program of Expression (1). For example, it may be configured by a storage device such as a hard disk in which the measurement procedure program is stored in advance.

流量測定は以下のようにして行われる。   The flow rate is measured as follows.

作動弁１６が閉じた状態で、配管１３の、空圧源１１とは反対側の端にマスターワーク２０ｍを取り付け、次に作動弁１６を開いて電空レギュレータ１８からの空気をマスターワーク２０ｍに供給する。次に、制御部４０からの制御信号により規定圧PPを含む所定範囲でテスト圧を一定幅で順次変化させるよう電空レギュレータ１８を制御する。そのときの流量計１５による測定流量と圧力計１７による測定圧力が制御部４０の演算部４１に与えられる。演算部４１は与えられた一連の流量とそれに対応する一連の圧力をマスターワークの特性曲線として記憶部４２に格納する。 With the working valve 16 closed, the master work 20 m is attached to the end of the pipe 13 opposite to the air pressure source 11, and then the working valve 16 is opened to allow air from the electropneumatic regulator 18 to flow into the master work 20. m . Then, to control the electropneumatic regulator 18 so as to sequentially vary the test pressure at a constant width in a predetermined range including the specified pressure P P by a control signal from the control unit 40. The measured flow rate by the flow meter 15 and the measured pressure by the pressure gauge 17 at that time are given to the calculation unit 41 of the control unit 40. The calculation unit 41 stores the given series of flow rates and the corresponding series of pressures in the storage unit 42 as a masterwork characteristic curve.

作動弁１６を閉じ、マスターワーク２０ｍを測定対象ワーク２０に取り替える。作動弁１６を開いて圧力計１７の読みが規定圧PP近傍となるよう電空レギュレータ１８を調整する。 The operation valve 16 is closed, and the master workpiece 20 m is replaced with the workpiece 20 to be measured. Reading of the pressure gauge 17 to open the operating valve 16 adjusts the electropneumatic regulator 18 to be a specified pressure P P neighborhood.

演算部４１はこのときの流量計１５による測定流量Qbと圧力計１７による測定圧力Pbを取り込み、記憶部４２に保持されている特性曲線上の規定圧PPに対する流量QmPとテスト圧Pbに対する流量Qbを読み出し、これらQb, Qmb, QmPを記憶部４２から読み出した式(1)に代入して測定対象ワーク２０の規定圧PPでの換算流量値QPを計算し、表示部４３に表示する。 The computing unit 41 takes in the measured flow rate Q b by the flow meter 15 and the measured pressure P b by the pressure meter 17 at this time, and the flow rate Q mP and the test pressure with respect to the specified pressure P P on the characteristic curve held in the storage unit 42. reading the flow rate Q b for P b, these Q b, Q mb, the conversion flow rate value Q P at specified pressure P P of a measurement target workpiece 20 into equation (1) reading the Q mP from the storage unit 42 Calculate and display on the display unit 43.

必要に応じて測定対象ワーク２０を次のものに取り替えてステップＳ２，Ｓ３，Ｓ４により同様の手順で換算流量値QPを計算することをそれぞれの測定対象ワークについて繰り返してもよい。更に、各測定対象ワークの流量値QPとマスターワークの流量値QmPとの差を計算し、差の絶対値が所定の値以下の場合は良品と判定し、所定の値より大の場合は不良品と判定し、良否を表示部４３に表示させるように構成してもよい。 Step S2 replacing the measurement target workpiece 20 as necessary include the following, S3, S4 may be repeated for each of the measurement target workpiece to calculate the converted flow rate value Q P in the same procedure by. Furthermore, the difference between the flow rate value Q P of each workpiece to be measured and the flow rate value Q mP of the master workpiece is calculated, and if the absolute value of the difference is less than or equal to the predetermined value, it is determined as a non-defective product. May be determined to be defective and pass / fail may be displayed on the display unit 43.

［実測による検証実験］
この発明による近似測定方式が実際にはどの程度精度が高いのかを検証する実験を行った。 [Verification experiment by actual measurement]
An experiment was conducted to verify how accurate the approximate measurement method according to the present invention is in practice.

ワークは1/4シンフレックスジョイントであり、流量の異なるものを6個作製した。そのうちの、流量が中間の1個をマスターワークMと見立て、残りの５個を測定対象ワークＡ〜Ｅとし、マスターワークMの規定圧PPを含む所定範囲の一連のテスト圧での流量をマスターワークの特性曲線とした。 The work was a 1/4 symflex joint, and 6 pieces with different flow rates were made. Of which the flow rate regarded that one of the intermediate and master work M, the remaining five of the measured workpiece A-E, the flow rate of a series of tests pressure in a predetermined range including the specified pressure P P of the master work M A masterwork characteristic curve was used.

具体的には、まずマスターワークMでテスト圧基準値（規定圧PP）を1.000kPaとし、その±20%範囲内で変化する0.800kPa〜1.200kPaのテスト圧に対する測定流量データを採取し、特性曲線とした。その後ワークA〜Eのそれぞれに対しテスト圧(Pb) 0.800kPa〜1.200kPaでの流量(Qb)を測定し、式(1)により規定圧PPでの換算流量値(QP)を計算した。 Specifically, first, with Masterwork M, the test pressure reference value (specified pressure P P ) is set to 1.000 kPa, and the measured flow rate data for the test pressure of 0.800 kPa to 1.200 kPa that changes within the ± 20% range is collected. A characteristic curve was obtained. After that, measure the flow rate (Q b ) at the test pressure (P b ) 0.800 kPa to 1.200 kPa for each of the workpieces A to E, and calculate the converted flow rate value (Q P ) at the specified pressure P P using equation (1). Calculated.

［実験結果］
図５の表１はマスターワークMに対する規定圧と、その規定圧から±2.5%、±5%、±10%、±15%、±20%とずれたテスト圧での実測流量値、及びそれらの、規定圧での実測流量値からの偏差を示す。 [Experimental result]
Table 1 in Fig. 5 shows the specified pressure for masterwork M, the measured flow rate values at test pressures that deviate from the specified pressure by ± 2.5%, ± 5%, ± 10%, ± 15%, and ± 20%, and those The deviation from the measured flow rate value at the specified pressure is shown.

図６の表２は測定対象ワークAの、マスターワークＭに対するとそれぞれ同じテスト圧での実測流量Qbと、その偏差、及び表１における特性曲線から読み取った基準圧（規定圧）PPでの実測流量QmPと各テスト圧Pbでの実測流量Qmbを使ってそれぞれのテスト圧Pbでの実測流量Qbに対し式(1)により計算した規定圧PPでの換算流量値QPと、その偏差を示す。図７〜１０の表３〜６も測定対象ワークAに対すると同様の測定対象ワークB〜Eに対する実測流量と規定圧での換算流量値を示す。図１１〜１５のグラフ１〜５は表２〜６に示されたそれぞれのテスト圧に対する実測流量値と規定圧での換算流量値をグラフで表したものである。○印がそれぞれのテスト圧での実測流量、×印が規定圧での換算流量を示す。 Table 2 measured workpiece A in FIG. 6, the relative master work M and the measured flow rate Q b of the respective same test pressure, the deviation and the reference pressure (standard pressure) P P read from the characteristic curve in Table 1 the measured flow rate Q mP and converted flow rate value of the actual measurement flow rate Q b regulations was calculated by equation (1) with respect to pressure P P in the actual flow rate Q each test pressure using the mb P b at each test pressure P b Shows Q P and its deviation. Tables 3 to 6 in FIGS. 7 to 10 also show the measured flow rate and the converted flow rate value at the specified pressure for the measurement target workpieces B to E similar to the measurement target workpiece A. Graphs 1 to 5 in FIGS. 11 to 15 are graphs showing measured flow rate values and converted flow rate values at specified pressures for the test pressures shown in Tables 2 to 6, respectively. ○ indicates the measured flow rate at each test pressure, and x indicates the converted flow rate at the specified pressure.

流量の大きいワークAに対する近似の場合も、流量の小さいワークEに対する近似の場合も、いずれもかなり良い近似結果を示している。換算流量は最大でも1.4%の誤差、ほとんどが1%以内の誤差で近似が行われていることがわかる。特にマスターワークMの半分以下である小さな流量のワークEにおいても換算流量は誤差0.7%以下の良好な結果であった。   Both the approximation for the workpiece A with a large flow rate and the approximation for the workpiece E with a small flow rate both show fairly good approximation results. It can be seen that the converted flow rate is approximated with an error of 1.4% at most, and most of it within 1%. In particular, even in the work E having a small flow rate that is less than half of the master work M, the converted flow rate was a good result with an error of 0.7% or less.

以上の結果からわかるように、前述の近似の前提は妥当なものであり、この発明による前提に基づく近似により誤差の少ない流量測定が可能であるといえる。   As can be seen from the above results, the above assumption of approximation is appropriate, and it can be said that the flow rate measurement with less error is possible by the approximation based on the assumption according to the present invention.

［この発明による近似方式を使った流量測定方法の特徴と効果］
本近似方式の特徴をあげると、
(1) マスターワークで規定圧を含む所定範囲の特性曲線を簡単に取得できる、
(2) 特性曲線を取得するために電空レギュレータを使用し、一連のテスト圧を発生させる、
(3) 近似とはいえ実際のワークからワーク特性曲線を取得するため、いかなる種類のワークでも使用できる、
(4) マスターワークと流量の大きさが違っていてもワーク特性の基本的な特性形状が合っていれば近似ができる、
など、実用性が高く、圧力変動に対応できる流量測定方法といえる。 [Characteristics and effects of flow measurement method using approximation method according to the present invention]
The characteristics of this approximation method are as follows:
(1) It is possible to easily obtain a characteristic curve within a specified range including the specified pressure with the master work.
(2) Use an electropneumatic regulator to obtain a characteristic curve and generate a series of test pressures.
(3) Although it is an approximation, the workpiece characteristic curve is obtained from the actual workpiece, so any type of workpiece can be used.
(4) Even if the flow rate is different from the master work, it can be approximated if the basic characteristic shape of the work is the same.
It can be said that the flow rate measurement method has high practicality and can cope with pressure fluctuation.

テスト圧変動に対しこの発明による近似方式を使用すれば、
(a) テスト圧が規定圧からずれても規定圧のときの流量を表示できるので流量測定精度が向上する、
(b) 低圧、大流量時の圧力損失による測定誤差を防ぎ、短時間で測定できフィードバック制御より短時間測定が可能、
(c) 流量のばらつきが大きなワーク（＝圧損がばらつく）でも規定のテスト圧判定が可能になるので歩留まりと再現性が向上、
(d) ソフトだけの対応で可能であり、フィードバック制御のようなハードの追加がいらないので材料コストがかからない、
など、高精度計測、歩留まり・再現性の向上、低価格などの点でユーザーにとって有用な効果があるといえる。 If the approximation method according to the present invention is used for the test pressure fluctuation,
(a) Since the flow rate at the specified pressure can be displayed even if the test pressure deviates from the specified pressure, the flow measurement accuracy is improved.
(b) Prevents measurement error due to pressure loss at low pressure and large flow rate, can be measured in a short time, and can be measured in a shorter time than feedback control.
(c) The specified test pressure can be judged even for workpieces with large flow rate variations (= pressure loss varies), improving yield and reproducibility.
(d) Only possible with software, and no additional hardware such as feedback control, so there is no material cost.
It can be said that there are useful effects for users in terms of high-precision measurement, improved yield / reproducibility, and low price.

Claims (4)

ワークの流量を測定する流量測定方法であり、
(a) 基準ワークに対し規定圧PPを含む所定範囲の一連のテスト圧の気体を供給し、そのときの流量をそれぞれ測定し、上記基準ワークの特性曲線として記憶部に記憶する工程と、
(b) 測定対象ワークに対し上記所定範囲内の任意のテスト圧Pbの気体を供給し、そのときの流量を測定して流量値Qbとして上記記憶部に保持する工程と、
(c) 上記基準ワークの上記特性曲線上の上記規定圧PPと上記テスト圧Pbにそれぞれ対応する流量値QmPとQmbを読み取り、上記規定圧PPでの測定対象ワークの流量をQPとすると、Qmb：Qb＝QmP：QPの比例関係が成立すると近似して上記測定対象ワークの上記規定圧PPでの上記流量QPを上記流量値QmPと、Qmbと、Qbとから演算部により計算で求める工程と、
を含むことを特徴とする流量測定方法。 This is a flow measurement method that measures the flow rate of the workpiece.
(a) supplying a series of test pressure gases in a predetermined range including a specified pressure P P to the reference workpiece, measuring the flow rates at that time, and storing them in the storage unit as a characteristic curve of the reference workpiece;
(b) supplying a gas having an arbitrary test pressure P b within the predetermined range to the workpiece to be measured, measuring a flow rate at that time, and holding the flow rate value Q b in the storage unit;
(c) Read the flow rate values Q mP and Q mb corresponding to the specified pressure P P and the test pressure P b on the characteristic curve of the reference workpiece, respectively, and determine the flow rate of the workpiece to be measured at the specified pressure P P. When Q P, Q mb: Q b = Q mP: Q the flow rate Q P and the flow rate value Q mP of proportionality approximated to be taken by the specified pressure P P of the measured workpiece P, Q Steps to calculate by calculation unit from mb and Q b ,
A flow rate measuring method comprising: 請求項１記載の流量測定方法において、上記工程(d)は上記測定対象ワークの規定圧PPでの上記流量QPを次式
Figure 0005749378
 により計算することを特徴とする流量測定方法。 In flow measurement method according to claim 1, wherein said step (d) the following equation the flow rate Q P at specified pressure P P of the measurement object work
Figure 0005749378
 The flow rate measuring method characterized by calculating by. ワークの流量を測定する流量測定装置であり、
与えられた圧力の気体を供給する空圧源と、
上記空圧源が一端に接続された配管と、
上記配管に直列に挿入され、制御信号に応答して上記気体の圧力を調整する電空レギュレータと、
上記電空レギュレータの、上記空圧源と反対側において上記配管に直列に挿入された流量計と、
上記流量計の、上記空圧源と反対側において上記配管に接続された圧力計と、
上記電空レギュレータに上記気体の圧力を調整する制御信号を与え、上記流量計により測定された流量信号と上記圧力計により測定された圧力信号が与えられ、上記配管の他端に接続されたワークの規定圧での流量を計算する制御部と、
を含み、
上記制御部は、
上記配管に接続された基準ワークに対し上記電空レギュレータを制御して規定圧PPを含む所定範囲の一連のテスト圧の気体を供給したときのそれらの一連のテスト圧での上記流量計で測定された流量を上記基準ワークの特性曲線として記憶し、上記配管の他端に接続された測定対象ワークに対し上記所定範囲内の任意のテスト圧Pbの気体を供給したときの上記流量計により測定された流量値Qbを保持し、上記基準ワークの特性曲線上の上記規定圧PPと上記テスト圧Pbでの流量値をそれぞれQmP及びQbとし、上記測定対象ワークの上記規定圧での流量をQPとすると、Qmb：Qb＝QmP：QPの比例関係が成立すると近似して上記測定対象ワークの上記規定圧PPでの流量値QPを上記流量QmPとQmbとQbとから計算する計算式を記憶した記憶部と、
上記電空レギュレータの設定圧力を制御する制御信号を発生し、上記記憶部に記憶された上記基準ワークの上記特性曲線から上記規定圧PPでの流量値QmP及び上記テスト圧Pbでの流量値Qmbを読み取り、上記流量値QmP, Qmbと上記測定対象ワークについて測定した上記テスト圧Pbでの上記流量値Qbとから上記測定対象ワークの上記規定圧PPでの流量値QPを上記記憶部に記憶された上記計算式を使って計算する演算部と、
計算された上記流量値QPを表示する表示部と、
を含むことを特徴とする流量測定装置。 It is a flow rate measuring device that measures the flow rate of workpieces,
A pneumatic source for supplying a gas of a given pressure;
Piping with the pneumatic source connected to one end;
An electropneumatic regulator inserted in series in the piping and adjusting the pressure of the gas in response to a control signal;
A flow meter inserted in series with the pipe on the opposite side of the pneumatic source of the electropneumatic regulator;
A pressure gauge connected to the pipe on the opposite side of the air pressure source of the flow meter;
A control signal for adjusting the pressure of the gas is supplied to the electropneumatic regulator, a flow signal measured by the flow meter and a pressure signal measured by the pressure meter are given, and a work connected to the other end of the pipe A control unit that calculates the flow rate at the specified pressure of
Including
The control unit
With the above flow meter at a series of test pressures when a series of test pressure gases including a specified pressure P P are supplied to the reference work connected to the piping by controlling the electropneumatic regulator. the measured flow is stored as a characteristic curve of the reference work, the flow meter when the supply of any test pressure P b of the gas in the predetermined range with respect to a connected measured workpiece to the other end of the pipe holding the flow rate value Q b measured by the flow rate value in the above specified pressure P P and the test pressure P b on the characteristic curve of the reference workpiece and Q mP and Q b, respectively, above the measurement object work When the flow rate at the specified pressure and Q P, Q mb: Q b = Q mP: Q flow rate value Q P to the flow rate at the specified pressure P P of the proportional relationship is approximated to hold the measurement target workpiece P A storage unit storing a calculation formula calculated from Q mP , Q mb, and Q b ;
A control signal for controlling the set pressure of the electropneumatic regulator is generated, and the flow rate value Q mP at the specified pressure P P and the test pressure P b are calculated from the characteristic curve of the reference workpiece stored in the storage unit. The flow rate value Q mb is read and the flow rate value Q mP , Q mb and the flow rate value Q b at the test pressure P b measured for the measurement target workpiece are measured at the specified pressure P P of the measurement target workpiece. a calculation unit for the value Q P is calculated using the stored the above equation in the storage unit,
A display unit for displaying the calculated the flow rate value Q P,
A flow rate measuring device comprising: 請求項３記載の流量測定装置において、上記記憶部は上記測定対象ワークの上記規定圧PPでの流量値QPを計算する上記計算式として次式
Figure 0005749378
 を予め格納しており、上記演算部は上記式を使って上記流量値QPを計算するように構成されていることを特徴とする流量測定装置。 4. The flow rate measuring device according to claim 3, wherein the storage unit calculates the flow rate value Q P of the workpiece to be measured at the specified pressure P P as the following formula:
Figure 0005749378
 Has stored in advance, and the calculation unit the flow rate measuring apparatus characterized by being configured to calculate the upper Symbol flow quantity value Q P using the above equation.
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109405916A (en) * 2018-10-17 2019-03-01 合肥学院 A kind of double positive flow testing devices of valve mechanism cover check valve

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109405916A (en) * 2018-10-17 2019-03-01 合肥学院 A kind of double positive flow testing devices of valve mechanism cover check valve

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