JP5748631B2 - Optical component and optical module - Google Patents

Description

  The present invention relates to an optical component and an optical module, and more particularly to an optical component that is used by being fixed to a mounting base and an optical module that is optically aligned by fixing the optical component to a fixing groove.

  2. Description of the Related Art As an optical module for optical communication or the like, a module in which a V groove (V-GROOVE) is provided on an optical component mounting base is known. The V-groove of the mounting base is a positioning mechanism for mounting and fixing an optical fiber and a lens. For example, optical axis alignment with a laser diode can be facilitated. Thereby, miniaturization of the optical module was promoted.

  As a fixing method to the mounting base, a method using an adhesive and a method using a solder are known. However, in the method using an adhesive, a component evaporating from the adhesive is not preferable for the lens. For this reason, it has been studied to metallize the side surface of the lens so that it can be fixed with solder to the conventional lens structure that has been fixed using an adhesive.

  For example, as disclosed in Patent Document 1, a mounting structure of an optical module in which metallization is formed on a spherical lens and solder is filled between the metallization and the substrate metallization is known. However, since the spherical lens has a degree of freedom of rotation when placed, it is extremely difficult to place the partial metallized surface facing the substrate metallized in the small spherical lens, and this mounting structure is not practical. It was.

  There is an optical module that uses a lens in which a cylindrical side surface and an optical lens surface are formed instead of a spherical lens, and performs positioning in a V groove on a lens mounting base on the cylindrical side surface. In this case, it is sufficient that metallization can be performed only on the cylindrical side surface so that the cylindrical side surface of the lens can be fixed with solder. However, if metallization is performed on the optical lens surface, the optical characteristics are impaired. Therefore, it is necessary to protect the optical lens surface and form the metallization only on the cylindrical side surface. For this purpose, a process of forming a protective material on the optical lens surface and a special manufacturing apparatus are necessary, and it is difficult to apply to mass production of small lenses.

  Therefore, instead of partially metallizing a small lens, as disclosed in Patent Document 2, a method of manufacturing an optical component in which a thin annular metal ring is filled with glass and a lens is formed by press molding has been proposed.

JP 2002-162542 A Japanese Patent Laid-Open No. 2003-206144

  However, in the method of manufacturing an optical component in which glass is filled in an annular metal ring, it has been difficult to machine the metal ring to have a diameter smaller than about 2 mm. Furthermore, the annular metal processing that can be practically produced requires a thickness of at least about 0.4 mm. For this reason, when the lens diameter is reduced, the metal ring cannot be thinned in proportion thereto. Accordingly, the outer diameter of the metal ring necessary for obtaining a lens having a predetermined focal length and numerical aperture (NA) becomes large, so that it is practically limited to an optical component having a relatively large outer size. In this method, it has not been possible to reduce the size to an external size that can replace a small lens made of only glass.

  Further, in the structure in which the annular metal ring is provided on the side surface of the lens, the thermal expansion coefficient of the metal ring is larger than the thermal expansion coefficient of the lens material. For this reason, the thickness of the metal ring is relatively increased with the miniaturization of the lens. In extreme cases, the glass of the lens is broken or a side effect occurs that birefringence occurs. Moreover, peeling may occur on the joint surface between the metal ring and the lens due to the solder heating when the metal ring on the side surface of the lens is fixed to the optical module.

  If such an optical component maintains the outer dimension accuracy of the metal ring, the optical axis alignment with the laser diode can be made unnecessary only by mounting and fixing in the V groove of the mounting base of the optical module. . However, due to the limit of the external size of the structure using the metal ring, it has not been able to sufficiently meet the demand for downsizing the optical module in which it is desired to fix the small lens with solder.

  The present invention has been made to solve the above-described problems, and in particular, an object thereof is to provide an optical component that can be fixed by soldering and an optical module that can be easily aligned with the optical axis.

The present invention provides an optical component including a first optical surface and a second optical surface through which light passes, and a cylindrical side surface, wherein the cylindrical side surface includes a metal member, the first optical surface, and the second optical surface. And the metal member is fixed to the glass member and wound in the circumferential direction of the cylindrical side surface, and the first optical surface and the second optical surface of the glass member The surface is formed by press molding, and the metal member is integrated with the cylindrical side surface by the press molding .

  As a result, the metal member is fixed to the optical component having the first optical surface and the second optical surface formed of the glass member to form the cylindrical side surface, so that the positional accuracy is kept high even for a small optical component. It is easy to fix to the mounting base by soldering or thermocompression. Furthermore, when it fixes to a mounting base by solder or thermocompression bonding, the stress resulting from the difference of the thermal expansion coefficient of a glass member and a metal member differs from the case of a cyclic | annular metal ring. Specifically, in the expansion and contraction between the glass member and the metal ring on the outer periphery thereof, a stress that tightens the glass member or creates a gap between the glass member and the metal ring acts. However, the wound metal member can disperse the stress in the winding direction, that is, in the circumferential direction of the cylindrical side surface. Thereby, peeling of the metal member at the time of heating of solder etc. can be prevented.

Therefore, an optical component of a small lens that can be fixed by soldering can be realized.
Moreover, if it is press molding, the optical surface of a lens can be formed with high precision, and a glass member and a metal member can be closely_contact | adhered by integrally molding a metal member. At this time, since the metal member and the glass member are strongly adhered and integrated, the outer diameter of the metal member can be set to a predetermined dimension after the glass member is solidified.

  Further, the metal member is discontinuous in the circumferential direction, and the glass member is exposed and the glass member and the metal member are formed on the same circumference on the side surface of the column that is discontinuous. Is preferred. As a result, the optical axis of the optical component coincides with the cylindrical central axis of the cylindrical side surface, and there is no step in the circumferential direction, so that the mounting height at the time of fixing is stable and the optical axis shift can be suppressed.

  The length of the metal member in the optical axis direction is equal to or less than the length of the cylindrical side surface in the optical axis direction, and the metal member is sandwiched between outer peripheral portions of the first optical surface and the second optical surface. It is preferably located on the side. If the thin metal member protrudes from one of the optical surfaces, the protruding portion may be deformed or damaged when the optical component is handled. The length of the metal member in the optical axis direction is set to be equal to or less than the length of the cylindrical side surface in the optical axis direction so as not to protrude from the cylindrical side surface sandwiched between the outer peripheral portions of the first optical surface and the second optical surface. In this case, the protruding portion of the metal member is not generated. Therefore, it is possible to prevent the adverse effect on the optical performance due to the deformation of the metal member and the generation of foreign matters due to the damage of the protruding portion.

  The metal member preferably contains Au. In this case, since the connection with the solder material is good, fixing with solder is easy.

  The metal member preferably has a plating film. By using a plating film having good adhesion to the solder material, it is possible to prevent a peeling failure with the solder material.

  The present invention provides an optical module having a semiconductor element that emits light and a mounting base on which the semiconductor element is installed, and the mounting base includes a groove portion on which the optical component is placed, and the optical component is disposed in the groove portion. It is fixed and optically coupled to the semiconductor element. In the small optical component in which the metal member described above is wound, the optical module can be easily aligned because it can be placed and fixed in the groove portion of the mounting base.

  According to the optical component of the present invention, the metal member is fixed to the optical component formed of the glass member to form the cylindrical side surface. The mounting base can be easily fixed by crimping. Further, when the metal member is wound around the glass member when being fixed to the mount, the stress caused by the difference in thermal expansion can be dispersed in the circumferential direction of the cylindrical side surface. Thereby, peeling of the metal member at the time of heating of solder etc. can be prevented. Therefore, a small lens that can be fixed by soldering can be realized.

It is a perspective view which shows the optical component of this embodiment. It is a side view which shows the optical component of this embodiment. It is a front view which shows the optical component of this embodiment. It is a side view which shows the optical module of this embodiment. It is sectional drawing of the optical module cut | disconnected along the VV line | wire of FIG. It is explanatory drawing which shows the process of manufacturing the optical component of this embodiment. It is explanatory drawing which shows the state shape | molded in the process of FIG. It is a side view which shows the 1st modification of the optical component of this embodiment. It is a side view which shows the 2nd modification of the optical component of this embodiment. It is a side view which shows the 3rd modification of the optical component of this embodiment. It is a side view which shows the 4th modification of the optical component of this embodiment.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. For easy understanding, the dimensions of the drawings are appropriately changed.

  FIG. 1 is a perspective view showing an optical component 1 of the present embodiment, FIG. 2 is a side view, and FIG. 3 is a front view. Both ends of the substantially cylindrical shape of the optical component 1 are a first optical surface 10a and a second optical surface 10b, and light is incident on or emitted from these optical surfaces.

  The cylindrical side surface of the optical component 1 includes a glass member 10 that forms the first optical surface 10 a and the second optical surface 10 b, and a metal member 20. The metal member 20 surrounds the cylindrical side surface in an annular shape and is wound in the circumferential direction, and is divided by the discontinuous portion 30.

  In the discontinuous portion 30 of the metal member 20, the glass member 10 exposed at the discontinuous portion 30 is stretched on the same circumference as the metal member 20. Further, the inner surface 20 a of the metal member 20 is fixed to the glass member 10.

  In FIG. 4, the side view of the optical module 2 provided with the optical component 1 is shown. FIG. 5 is a cross-sectional view of the optical module 2 cut along the line VV in FIG. A semiconductor element 60 such as a laser diode is installed on the mounting base 50, and light is emitted in the optical axis direction of the optical component 1. The light incident on the optical surface of the optical component 1 is refracted and adjusted to a desired optical state and passes therethrough.

  The mounting base 50 is obtained by processing a Si substrate, and is provided with a V-groove (V-GROOVE) 51. Note that the generic term V-groove is also used for trapezoidal grooves as shown in FIG. The optical component 1 placed in the V groove 51 is fixed by a fixing material 55 such as Au—Sn solder. Since the optical axis 61 of the optical component 1 is aligned with the axis of the cylindrical side surface and there is no step in the circumferential direction, the mounting height at the time of fixing is stable, and the optical axis shift can be suppressed.

  As described above, the metal member 20 is fixed to the optical component 1 having the first optical surface 10a and the second optical surface 10b formed of the glass member 10 to form the cylindrical side surface. However, it is easy to fix to the mounting base 50 by soldering or thermocompression bonding while maintaining high positional accuracy. Thereby, the optical axis alignment with the semiconductor element 60 can be performed only by placing the optical component 1 in the V-groove 51. Therefore, even if the optical component 1 is downsized, the optical axis of the optical module 2 can be easily adjusted, and the optical module 2 can be downsized. Moreover, when fixing to the mounting base 50 by soldering or thermocompression bonding, the stress resulting from the difference in thermal expansion coefficient between the glass member 10 and the metal member 20 can be dispersed in the winding direction, that is, the circumferential direction of the cylindrical side surface. Thereby, peeling of the metal member 20 at the time of heating of solder etc. can be prevented.

  6 and 7 are explanatory views showing steps for manufacturing the optical component 1 of the present embodiment. Here, a process of integrally molding the optical component 1 by a manufacturing method of press molding a glass aspheric lens will be described.

  As shown in FIG. 6, a lower mold 73 is disposed on the trunk mold 71, and the band-shaped metal member 20 is inserted along the inner peripheral surface of the trunk mold 71. The metal member 20 is formed, for example, by thinning Ti by rolling, forming a laminated structure by forming a Pt film and an Au film, and rolling the thin metal sheet cut into a single plate shape so that the Au film is the outer peripheral surface. It is flexible. Here, the length of the metal member 20 in the circumferential direction is formed to be shorter than the length of the inner peripheral surface of the body mold 71 and can be easily inserted. In this way, the metal member 20 is placed at a position in contact with the lower mold 73.

  Next, the glass base material 15 which will comprise a lens after shaping | molding is arrange | positioned. The glass base material 15 is, for example, a spherical glass of L-BAL35 manufactured by OHARA, and has optical characteristics such as a desired refractive index.

  Thereafter, the body mold 71 is heated by a heater (not shown) arranged around the body mold 71. As the body mold 71 is heated, the glass base material 15 disposed inside the body mold 71 is softened. In this state, the upper mold 72 approaches and presses the glass base material 15 from above and below with a predetermined pressure. Molded as shown in FIG.

  At this time, the softened glass base material 15 also expands in the direction of the inner peripheral surface of the barrel die 71 and presses the inner surface side of the metal member 20, and the metal member 20 presses the inner peripheral surface of the barrel die 71 with the pressure. Pressed against. The inner diameter of the body mold 71 is determined in consideration of the shrinkage of the dimensions due to the cooling of the glass base material 15.

  The upper mold 72 and the lower mold 73 are designed to form a desired optical function surface. When the glass base material 15 is press-molded, the first optical surface 10a and the second optical surface 10b are formed as shown in FIG. Transcribed. If it is press molding, the aspherical lens surface can be formed with high accuracy, and the glass member 10 and the metal member 20 can be brought into close contact with each other by integrally molding the metal member 20. The glass member 10 that has been cooled in this state and the glass base material 15 is molded and the metal member 20 are strongly in close contact with each other and have a first optical surface 10a and a second optical surface 10b. Thus, an optical component 1 in which 10 and the metal member 20 are integrated is obtained. After the glass member 10 is solidified, the outer diameter dimension of the metal member 20 can be set to a predetermined dimension.

An antireflection film is formed on the first optical surface 10a and the second optical surface 10b as necessary. For example, a SiO ₂ / TiO ₂ multilayer film is formed by vapor deposition.

  When an aspherical lens is filled in an annular metal ring, the metal ring needs to have a thickness of at least about 0.4 mm. When the metal member 20 is formed by winding on the glass member 10, the metal member 20 can be thinned because a stretching process can be adopted. Therefore, the optical component 1 is suitable for downsizing. The size of the optical component 1 is, for example, a dimension between the optical surfaces of 0.645 mm and an outer dimension of the cylindrical side surface of 1.0 mm. The Ti thickness of the metal member 20 is about 0.1 μm to 10 μm, and the Pt film and Au film are about 0.01 μm to 1 μm. The width of the metal member 20 in the optical axis direction is 0.3 mm to 0.6 mm, more preferably 0.4 mm to 0.5 mm.

  The Au film and the Pt film are preferably formed by plating. Since the Au film has good connectivity with the solder material, it is easy to fix with solder. In addition, by using a plating film having good adhesion to the solder material, it is possible to prevent the peeling failure with the solder material. A Pt film is formed to improve the adhesion between Ti and Au, but the Pt film can be omitted.

  The metal member 20 is preferably a material having good adhesion to the glass member 10. Although Au may be used as the metal member 20, it is preferable to use Ti or stainless steel because it is expensive.

  On the other hand, the cylindrical side surface between the optical surface 10a and the metal member 20 and the cylindrical side surface between the outer peripheral portion of the optical surface 10b and the metal member 20 are a cylindrical side surface composed of the metal member 20 and the discontinuous portion 30. It has the same or slightly smaller cylindrical shape. When the thickness of the metal member 20 is 10 μm, the mounting position of the metal member 20 at the time of press molding is designed by designing the lower mold 73 so as to have a cylindrical shape with an inner diameter that is about 50 μm smaller on the optical surface 10 b side. Is stable.

  As shown in FIG. 4, the optical module 2 is manufactured by fixing the optical component 1 formed in this way at a predetermined position of the mounting base 50.

  The V-groove 51 provided in the mounting base 50 is manufactured to a predetermined dimension so that the optical axes 61 of the semiconductor element 60 and the optical component 1 coincide. When the outer shape of the optical component 1 is 1 mm, the trapezoidal V groove 51 has a groove width on the Si surface of 1.2 mm and a depth of about 0.6 mm.

Such a V groove 51 is formed by the following method, for example. First, a SiO ₂ film previously formed on a Si substrate is patterned by photolithography and etching. Subsequently, the V groove 51 using the crystal orientation of the Si substrate is formed by anisotropic etching using a KOH aqueous solution with the SiO ₂ film as a mask. Further, it is preferable to form an Au film with a thickness of about 0.1 μm on the inner surface of the V groove 51.

  The optical component 1 is placed in the V groove 51 of the mounting base 50, and is fixed by adjusting the distance from the optical surface (10a or 10b) facing the semiconductor element 60. For fixing, the fixing material 55 is filled before the optical component 1 is placed or after the optical component 1 is placed, and the metal member 20 and the V-groove 51 are joined.

  An adhesive may be used as the fixing material 55. In the case of fixing using an adhesive, it is preferably applied to a thickness that is optimal for maintaining the fixing strength. In addition, attention must be paid to the stability of the adhesive over time in the bonding process, the difficulty of handling, and the problem that components that volatilize from the adhesive affect the optical surface. From the problem of such an adhesive, it is preferable that it can be fixed with solder without using an adhesive. Solder has no worry about volatile components affecting the optical surface.

  When solder is used for the fixing material 55, the height of the optical component 1 is stabilized by filling the solder paste and heating, and can be fixed as it is when cooled. Au-Sn solder or the like is used because of long-term reliability requirements.

  In the small optical module 2, the optical axis shift has a great effect. For example, when the position of the optical component 1 is shifted by 10 μm in the height direction perpendicular to the optical axis direction, the coupling efficiency is reduced by about 10%. This means that the communication distance is shortened for optical fiber transmission. That is, more repeaters are required for long-distance transmission. With respect to this problem, the height of the optical component 1 can be stabilized by fixing with solder, so that high coupling efficiency can be stably obtained. Therefore, the optical component 1 that can be fixed by solder and the optical module 2 that can be easily aligned with the optical axis are suitable as products for long-distance transmission.

  It is preferable that the discontinuous portion 30 generated by winding the metal member 20 on the glass member 10 is sufficiently short with respect to the entire circumference. That is, it was formed in the length which provided the slight cut | interruption among the cylindrical shapes over a perimeter. More specifically, it is preferably provided at an interval of 1/10 to 1/1000 of the entire circumference. In this way, even if the metal member 20 is not fixed to the glass member 10, the metal member 20 does not cover the entire circumference in the circumferential direction due to thermal expansion due to heating. Therefore, stress due to thermal expansion can be relaxed. Since the discontinuous portion 30 without the metal member 20 is not fixed in the case of soldering, it is preferable that the discontinuous portion 30 is not positioned in the direction of the surface on which the mounting base 50 is placed, but the discontinuous portion 30 is 1/10 or less of the entire circumference. If it is provided in, it will not produce a malfunction, even if it is in the direction of the mounting base 50.

  In addition, by having the discontinuous part 30, the optical component 1 is not rotationally symmetric with respect to the central axis. Further, although the glass member 10 is exposed at the discontinuous portion 30, even if a step due to the thickness of the metal member 20 occurs in the discontinuous portion 30, the practical outer dimensions are maintained as long as the above-mentioned distance is provided. Therefore, even when applied to the optical module 2, there is no effect on the optical axis deviation.

  Further, a manufacturing method in which the belt-shaped metal member 20 is wound after the aspherical lens is molded is also possible. In this case, it is necessary to reduce the outer diameter of the aspherical lens by the thickness of the metal member 20 so that the outer dimension in a state where the metal member 20 is wound is set to a desired dimension.

  On the other hand, in the manufacturing method shown in FIGS. 6 and 7, the lens outer shape of the unrolled region of the metal member 20 can be formed with a predetermined outer dimension together with the region of the discontinuous portion 30. Since the outer dimension of the metal member 20 is also formed to a desired dimension, even if the thickness of the metal member 20 varies, there is no influence. Therefore, as compared with other manufacturing methods, the optical component 1 integrated by press molding is superior in external dimension accuracy.

  If the thin metal member 20 protrudes from any one of the optical surfaces, the protruding portion may be deformed or the protruding portion may be damaged when the optical component 1 is handled. The length of the metal member 20 in the optical axis direction is set equal to or less than the length of the cylindrical side surface in the optical axis direction so as not to protrude from the cylindrical side surface sandwiched between the outer peripheral portions of the first optical surface 10a and the second optical surface 10b. Then, since there is no protrusion, it is possible to prevent the occurrence of trouble in handling. In the case of press molding, since the metal member 20 is positioned by the body die 71 and the lower die 73, from the outer peripheral portions of the first optical surface 10a and the second optical surface 10b (in the vertical direction in FIG. 7). It does not protrude. Accordingly, since there is no protruding portion that is likely to be deformed or damaged, even the thin metal member 20 can prevent adverse effects on the optical performance due to the deformation and the generation of foreign matters due to the damage.

  As a comparative example, when a ring-shaped metal ring is used instead of the band-shaped metal member 20 as in the prior art, the metal ring cannot be inserted unless the metal ring has an outer shape slightly smaller than the body mold 71 in FIG. Moreover, in order to manufacture such a metal ring, a certain thickness is required. Therefore, a metal ring having a thickness that is slightly smaller than that of the body die 71 must be expanded by pressing the softened glass base material 15 to be formed into a desired shape. The combined stress with shrinkage will remain. As a result, if the shrinkage stress toward the center of the lens increases, the optical characteristics change from the original lens characteristics, and for example, birefringence occurs, which is not preferable. Further, if the outer diameter is made the same, the effective diameter of the glass lens is reduced by the thickness of the metal ring, so that it becomes impossible to obtain a numerical aperture at a desired focal length.

  As another comparative example, a method of forming the metal member 20 with a thin film such as sputtering or plating can be considered. However, when these metal thin films are formed on the side surface of the cylinder, it is necessary to protect the first optical surface 10a and the second optical surface 10b at the same time. After forming an aspherical lens into a small cylindrical shape, a protective material is provided so as to protect the optical surface, and sputtering or plating is performed only on the side surface of the cylinder, resulting in poor mass production and high cost.

  FIG. 8 is a side view showing a first modification of the optical component 1 of the present embodiment. The second optical surface 10b is not an aspherical lens shape but an optically flat surface. Such a shape can also be formed by a similar method. The first optical surface 10a may be a flat surface, and the second optical surface 10b may be an aspheric lens shape.

  FIG. 9 is a side view showing a second modification of the optical component 1 of the present embodiment. The outer peripheral portion of the second optical surface 10 b is formed so as to be located in the same plane as the end portion of the metal member 20. Since the aspherical lens shape of the second optical surface 10b is connected to the flat surface at the outer periphery, it can be formed by positioning the flat surface and the end of the metal member 20 to be the same surface in the optical axis direction. It is.

  FIG. 10 is a side view showing a third modification of the optical component 1 of the present embodiment. The first optical surface 10a and the second optical surface 10b are formed by exchanging with FIG. 9 which is the second modification. In this case, the end of the metal member 20 and the outer periphery of the first optical surface 10a are formed so as to be on the same surface in the optical axis direction.

  9 and 10, the length of the cylindrical side surface in the optical axis direction can be increased for a predetermined lens thickness. Therefore, if the width of the metal member 20 in the optical axis direction is increased, it is fixed to the mounting base 50. Is more stable. If the same mounting size is sufficient, the optical component 1 can be made thin, which is suitable for downsizing the optical module 2.

  FIG. 11 is a side view showing a fourth modification of the optical component 1 of the present embodiment. Since the discontinuous portion 30 does not need to be formed along the optical axis direction, the case where the discontinuous portion 30 is formed obliquely when viewed from the side surface is shown. Even if it is such an aspect, there exists an effect described in this embodiment.

  This modified example in which the discontinuous portion 30 is not parallel to the optical axis direction is not limited to FIG. 11, and can be combined with other modified examples.

  Furthermore, the discontinuous part 30 may be provided in several places in the circumferential direction by devising the attachment of the metal member 20 in press forming. This increases the effect of dispersing the stress.

DESCRIPTION OF SYMBOLS 1 Optical component 2 Optical module 10 Glass member 10a 1st optical surface 10b 2nd optical surface 15 Glass base material 20 Metal member 30 Discontinuous part 50 Mounting base 60 Semiconductor element 61 Optical axis 71 Body type 72 Upper type 73 Lower type

Claims (6)

In an optical component comprising a first optical surface and a second optical surface through which light passes, and a cylindrical side surface,
The cylindrical side surface is composed of a metal member and a glass member forming the first optical surface and the second optical surface,
The metal member is fixed to the glass member and wound in the circumferential direction of the cylindrical side surface ,
The optical component, wherein the first optical surface and the second optical surface of the glass member are formed by press molding, and the metal member is integrated with the cylindrical side surface by the press molding . It said metal member is a discontinuous to the circumferential direction, in the cylindrical side face formed with the discontinuous optical component according to claim 1 wherein the glass member is characterized by a Turkey be exposed.   The length of the metal member in the optical axis direction is equal to or less than the length of the cylindrical side surface in the optical axis direction, and the metal member is sandwiched between outer peripheral portions of the first optical surface and the second optical surface. The optical component according to claim 1, wherein the optical component is located on a side surface. The optical component according to any one of claims 1 to 3 , wherein the metal member contains Au. It said metal member is an optical component according to any one of claims 1 to 4, characterized in that it comprises a plating film. The optical module which has the semiconductor element which radiate | emits light, and the mounting base which installs the said semiconductor element, The said mounting base has the groove part which mounts the optical component of any one of Claims 1-5. An optical module comprising: the optical component fixed to the groove and optically coupled to the semiconductor element.