JP5742594B2 - Powder supply apparatus, injection processing system, and electrode material manufacturing method - Google Patents

Description

The present invention relates to a powder supply apparatus and an injection processing system, and further relates to a method for manufacturing an electrode material using them.

Various types of powder supply devices that supply micron-sized powder in a dry environment at a constant rate have been commercialized. For example, a spiral spring type, drum type, pressure feed / suction type powder supply device (see, for example, Patent Document 1) and the like are known.

JP 2010-65246 A

However, in the conventional powder supply apparatus, when supplying micron-sized powder in a small amount by a certain amount, it is difficult to stably supply the powder due to characteristics such as cohesiveness of the powder.

This invention is made in view of such a problem, and it aims at providing the powder supply apparatus, the injection processing system, the negative electrode manufacturing method, and the positive electrode manufacturing method which stabilized the supply amount of the powder. .

In order to achieve such an object, the powder supply device according to the aspect of the present invention includes a disk-shaped powder supply disk in which a receiving part for receiving powder is formed on the upper surface side of the outer peripheral part, and the powder supply disk can be rotated inside. The powder holding disk is received by the receiving portion according to the rotation of the powder supply disk rotating in the disk holding tank, covering a part of the powder supply disk and covering the part of the powder supply disk. A cover member that forms a gap portion through which the powder can pass, a first gas supply passage that supplies a first gas to the gap portion, and the receiving portion that communicates with the gap portion by the first gas. A powder discharge passage for discharging powder desorbed from the container, wherein the powder discharge passage and the first gas supply passage are opposed to each other through the gap portion, and are located in the gap portion. Extending along the bottom of It is formed so as.

The above-described powder supply apparatus includes a powder supply port in which an outlet end of the powder discharge passage opens and a second gas supply passage that supplies a second gas into the powder supply port. Is preferred.

In the above-described powder supply apparatus, the powder supply port may have a substantially circular cross section, and the second gas supply passage may open to the powder supply port with a gas supply nozzle coaxial with the substantially circular cross section. preferable.

Further, in the above-described powder supply device, the receiving portion is formed in a tapered shape on the upper surface side of the outer periphery of the powder supply disk, and the powder discharge passage is formed in a linear shape extending obliquely below the gap portion, It is preferable that the first gas supply passage is formed in a straight line extending obliquely above the gap portion.

Further, in the above-mentioned powder supplying device comprises a powder holding tank the powder is stored, in the bottom portion of the powder holding tank, the hole located above the receiving portion is formed, the powder holding tank It is preferable that the stored powder falls from the hole and is received by the receiving portion.
Further, at this time, a blade member for moving the powder stored in the powder holding tank is rotatably disposed inside the powder holding tank, and the powder stored in the powder holding tank by the rotation of the blade member. Is preferably dropped from the hole and received by the receiving portion.

Moreover, the injection processing system according to the aspect of the present invention includes a powder supply device that supplies powder, and the powder supplied from the powder supply device is mixed with a gas jet and injected into a base material to be collided. An injection processing apparatus for forming a film on the surface of the substrate, and the powder supply apparatus according to the aspect of the present invention is used as the powder supply apparatus.

In the above-described injection processing system, it is preferable that the injection processing device is directly connected to the powder supply device.

Further, the method for producing an electrode material according to an aspect of the present invention is a method for producing an electrode material used for a secondary battery, wherein powder containing an active material is supplied using a powder supply device, and the powder supply device The supplied powder is mixed with a gas jet and injected onto the electrode base material to collide with it to form a film on the surface of the electrode base material. The powder supply device according to the aspect of the present invention is used as the powder supply device. Used.

In the above-described electrode material manufacturing method, the active material is preferably silicon (Si).

According to the present invention, even when the amount of powder supplied is small, the powder can be stably supplied.

It is sectional drawing of a supply pipe and a 3rd tank. 1 is a schematic configuration diagram of an injection processing system according to a first embodiment. It is a top view of the powder supply apparatus concerning a 1st embodiment. It is a perspective view of a supply pipe and a 3rd tank. (A) is a graph which shows the time-dependent change of the powder injection quantity by the powder supply apparatus of 1st Embodiment, (b) is a graph which shows the time-dependent change of the powder injection quantity by the conventional powder supply apparatus. (A) is a graph which shows the time-dependent change of the average injection quantity by the powder supply apparatus of 1st Embodiment, (b) is a graph which shows the time-dependent change of the average injection quantity by the conventional powder supply apparatus. (A) is a schematic block diagram of a lithium ion secondary battery, (b) is a schematic block diagram (sectional drawing) of the negative electrode for lithium ion secondary batteries. It is a flowchart which shows the manufacturing method of the negative electrode (or positive electrode) used for a lithium ion secondary battery. (A) is a schematic block diagram of the injection processing system which concerns on 2nd Embodiment, (b) is sectional drawing along arrow IX-IX in (a). It is an expanded sectional view showing the neighborhood of the injection processing device concerning a 2nd embodiment. It is a perspective view of the powder supply disk which concerns on 2nd Embodiment. It is a perspective view of the nozzle unit which concerns on 2nd Embodiment. It is sectional drawing seen from the arrow XIII-XIII in FIG.

Hereinafter, preferred embodiments of the present invention will be described. An injection processing system 1 according to the first embodiment is shown in FIG. 2, and this injection processing system 1 includes a powder supply device 10 that supplies powder (solid fine particles) PW and a powder PW supplied from the powder supply device 10. Are mixed with a gas jet and jetted onto a base material (for example, an electrode base material 131 described later) to collide with the jet processing device 60 for forming a film on the surface of the base material. The powder supply apparatus 10 includes a box-shaped casing unit 11, a storage tank 20 that is supported on the upper part of the casing unit 11 and stores the powder PW, and a storage tank 2.
And a powder supply port 55 for supplying the powder PW stored at 0 to the external injection processing device 60.

A first stepping motor 12 that rotationally drives a first impeller 22 provided in the storage tank 20 is disposed on the right side inside the housing portion 11 in FIG. The rotating shaft 12 a of the first stepping motor 12 extends vertically upward, and its tip is connected to the first motor coupling 15. A second stepping motor 13 that rotationally drives a second impeller 32 provided in the storage tank 20 is disposed in the center of the housing 11 in FIG. The rotating shaft 13 a of the second stepping motor 13 extends vertically upward, and its tip is connected to the second motor coupling 16. The powder supply disk 4 provided in the storage tank 20 is on the left side inside the casing 11 in FIG.
A third stepping motor 14 that rotationally drives 5 is disposed. Third stepping motor 1
The rotating shaft 14 a of 4 extends vertically upward, and its tip is connected to the third motor coupling 17.

As shown in FIGS. 2 and 3, the storage tank 20 includes a first tank 21 positioned at the uppermost stage, a second tank 31 positioned below the first tank 21 (lower left side in FIG. 2), It is comprised from the 3rd tank 41 located in the lower side (lower left side in FIG. 2) of the two tanks 31. FIG. The first tank 21 is formed in a bottomed cylindrical shape capable of storing the powder PW, and rotatably holds a first impeller 22 for stirring the powder PW therein. The first impeller 22 is configured to have a plurality of blade members, and the powder PW stored in the first tank 21 is stirred and moved by rotating about the rotational symmetry axis of the first impeller 22. Be able to. In the lower central part of the first impeller 22, the first tank 2
The upper end portion of the first drive shaft 23 extending through the bottom portion of 1 is extended. The lower end portion of the first drive shaft 23 is coupled to the first motor coupling 15, whereby the rotational driving force of the first stepping motor 12 is transmitted through the first motor coupling 15 and the first drive shaft 23 to the first blade. It is transmitted to the car 22. On the outer peripheral side of the bottom of the first tank 21, a hole 25 is formed above the second tank 31, and is stored in the first tank 21 by the rotation of the first impeller 22 (blade member). The powder PW falls from the hole 25 and is stored in the second tank 31.

The second tank 31 is formed in a bottomed cylindrical shape capable of storing the powder PW, and rotatably holds a second impeller 32 for stirring the powder PW therein. The second impeller 32 is configured to have a plurality of blade members, and rotates around the rotationally symmetric axis of the second impeller 32, whereby the second tank 31.
The powder PW stored in the container can be stirred and moved. Connected to the lower center portion of the second impeller 32 is an upper end portion of a second drive shaft 33 that extends vertically through the bottom of the second tank 31. The lower end portion of the second drive shaft 33 is connected to the second motor coupling 16, so that the rotational driving force of the second stepping motor 13 is applied to the second motor coupling 16.
And transmitted to the second impeller 32 via the second drive shaft 33. On the outer peripheral side of the bottom of the second tank 31, an arc-shaped hole 35 is formed above the receiving part 47 formed in the powder supply disk 45 of the third tank 41, and the second impeller 32. With the rotation of the blade member, the powder PW stored in the second tank 31 falls from the hole 35 and is received by the receiving portion 47 of the powder supply disk 45.

In addition, a height detector (not shown) for detecting the height of the powder PW stored in the second tank 31 is disposed inside the second tank 31. The height detection signal of the height detector is output to a controller (not shown), and the controller detects the powder P in the second tank 31 detected by the height detector.
When the height of W is lower than a predetermined height, the operation of the first stepping motor 12 is controlled so that the first impeller 22 is rotated and the powder PW is dropped from the first tank 21 to the second tank 31. Thereby, since the height of the powder PW in the second tank 31 can be kept within a predetermined range, the density (self-weight) of the powder PW in the second tank 31 becomes substantially constant and is received by the receiving portion 47. The amount of powder (volume and density) can be kept constant at all times. The second stepping motor 13
The operation of the third stepping motor 14 is also controlled by the above-described controller (not shown).

The 3rd tank 41 is formed in the container shape which can receive the powder supply disk 45, and is holding | maintaining the powder supply disk 45 so that rotation is possible centering around a rotational symmetry axis. The powder supply disk 45 is connected to the third tank 41.
It is formed in a disk shape facing upwards inside. In the lower central part of the powder supply disk 45, there is a third tank 4
The upper end portion of the third drive shaft 46 extending through the bottom portion of 1 is extended. The lower end portion of the third drive shaft 46 is connected to the third motor coupling 17, whereby the rotational driving force of the third stepping motor 14 is supplied to the powder supply disk via the third motor coupling 17 and the third drive shaft 46. 45. On the upper surface side of the outer peripheral portion of the powder supply disk 45, a tapered receiving portion 47 that receives the powder PW that has fallen from the second tank 31 to the third tank 41 through the hole 35 is formed. A plurality of partition walls 48 are formed on the upper surface side of the outer periphery of the powder supply disk 45, and the receiving portions 47 are partitioned into a plurality of pockets by the partition walls 48.

In the third tank 41, a ceiling part 42 is formed so as to cover a part of the third tank 41, and this ceiling part 4
2, a cover member 50 that covers the vicinity of the outer periphery of the powder supply disk 45 is attached. As shown in FIGS. 1 and 4, the cover member 50 is formed in a block shape extending over the outer peripheral portion of the third tank 41 and the ceiling portion 42, and the powder supply disc 45 rotates between the powder supply disc 45. Accordingly, the gap GP is formed so that the powder PW received by the receiving portion 47 can pass therethrough. In addition,
The cross-sectional shape of the gap GP is a right triangle that matches the shape of the partition wall 48 of the powder supply disk 45. Under the cover member 50, the powder PW that passes through the gap GP is supplied to the powder supply port 55.
A powder discharge passage 51 is formed which leads to The powder discharge passage 51 is formed in a straight line extending obliquely downward from the gap GP, and communicates the gap GP with the powder supply port 55. That is, the powder discharge passage 51 is formed across the lower portion of the cover member 50, the side portion of the third tank 41, and the side portion of the powder supply port 55, and the inlet end portion of the powder discharge passage 51 is the gap portion G.
In addition to opening in P, the outlet end of the powder discharge passage 51 opens into the powder supply port 55.

On the other hand, a first gas supply passage 52 that supplies gas to the gap GP described above is formed in the upper portion of the cover member 50. The first gas supply passage 52 is formed in a straight line extending in the vertical direction on the upstream side of the first gas supply passage 52 and supplies gas into the first gas supply passage 52 at the upper end portion of the first gas supply passage 52. A device 54 is connected. The downstream side of the first gas supply passage 52 is formed in a straight line extending obliquely upward from the gap portion GP, and the first gas supply passage 52 is bent halfway. Thus, the downstream side of the first gas supply passage 52 and the powder discharge passage 51 are opposed to each other via the gap GP, and extend along the bottom surface of the receiving portion 47 located in the gap GP. It is formed.

As a result, the first gas supplied from the first gas supply device 54 reaches the gap GP through the first gas supply passage 52, and is located at the opening of the first gas supply passage 52. PW
Collide with. As a result, the powder PW located at the opening of the first gas supply passage 52 is transferred to the receiving portion 4.
7 is separated (desorbed) from the powder discharge passage 51 and led to the powder supply port 55 together with the first gas. At this time, since the first gas supply passage 52 and the powder discharge passage 51 are formed so as to extend along the bottom surface of the receiving portion 47, the force received by the powder PW of the receiving portion 47 from the first gas is received. The powder PW is discharged along the bottom surface of the portion 47 in the direction of the powder discharge passage 51, and the entire amount of the powder PW is discharged to the powder discharge passage 51 without any other obstacles. Further, since the powder supply disk 45 is always rotating at a constant angular velocity from the hole 35 of the second rod 31 toward the gas supply passage 52, the powder supply disc 45 is always at a constant speed at the opening of the first gas supply passage 52. The powder PW is supplied. As a result, the powder PW located at the front end in the rotational direction of the powder supply disk 45
Are continuously cut out (desorbed) and discharged into the powder discharge passage 51 at a constant discharge speed (discharge amount per unit time, the same applies hereinafter), thereby realizing a quantitative supply of powder. Since both the downstream side of the first gas supply passage 52 and the cross section in the extending direction of the powder discharge passage 51 are rectangular cross sections extending vertically, the front end of the powder PW is always maintained in a flat shape. It is possible to prevent the powder PW of the receiving portion 47 from being unexpectedly collapsed and to stably supply the powder. The first gas supplied by the first gas supply device 54 is, for example, air, nitrogen gas, argon gas, neon gas, helium gas, or the like, and is appropriately selected according to the type of the powder PW.

As shown in FIG. 1, the powder supply port 55 is formed in a vertically extending tubular shape whose inner space has a substantially circular cross section, and the upper end portion supplies gas into the powder supply port 55 via the gas supply nozzle 56. While being connected with the 2nd gas supply apparatus 59, a lower end part is connected with the connection pipe 57 (refer FIG. 2) connected to the exterior. The gas supply nozzle 56 is formed in a short tubular shape extending vertically within the powder supply port 55, and the upper part of the gas supply nozzle 56 is fitted to the upper part of the powder supply port 55 so as to be coaxial with the powder supply port 55. It is arranged. The upper end portion of the gas supply nozzle 56 is connected to the second gas supply device 59, and a second gas supply passage 56 a that allows the gas supplied from the second gas supply device 59 to pass inside the gas supply nozzle 56. It is formed. The gas supply nozzle 56 has an outer diameter smaller than the inner diameter of the middle part (and lower part) of the powder supply port 55, and the lower part of the gas supply nozzle 56 is inside the powder supply port 55 (middle part). It is located near the opening of the powder discharge passage 51.

Thereby, the second gas supplied from the second gas supply device 59 is the gas supply nozzle 5.
Along with the powder PW which has reached the powder supply port 55 through the second gas supply passage 56a in 6 and led into the powder supply port 55 from the powder discharge passage 51 by the first gas described above,
It is guided to the outside (injection processing device 60) through the powder supply port 55 and the connection pipe 57. At this time, the ejector effect of the gas ejected from the gas supply nozzle 56 into the powder supply port 55 also acts to suck the powder PW in the powder discharge passage 51 toward the powder supply port 55. . The second gas supplied by the second gas supply device 59 is, for example, air, nitrogen gas, argon gas, neon gas, helium gas, or the like, and is appropriately selected according to the type of the powder PW.

As shown in FIG. 2, the connection pipe 57 has a base end connected to the powder supply port 55 and a tip connected to the injection processing device 60 (external device), and is supplied from the powder supply port 55. The PW is guided to the injection processing device 60. This injection processing apparatus 60 is an injection processing apparatus that forms a film by a powder jet deposition method. As shown in FIG. 2, a nozzle unit 61 and an acceleration gas are supplied to the nozzle unit 61 as shown in FIG. Acceleration gas supply unit 65 for supplying gas, a moving unit (not shown) for moving the base material relative to the nozzle unit 61, gas supply by the acceleration gas supply unit 65, and relative movement of the base material by the moving unit A control unit (not shown) and the like, and a nozzle unit 6
The powder (solid fine particles) PW supplied to 1 is dispersed and accelerated by a gas flow flowing inside the nozzle, and is sprayed from the tip of the nozzle onto a base material (for example, an electrode base material 131 described later).

The nozzle unit 61 includes a nozzle block 62 serving as a base, a rectangular hollow pipe-shaped injection nozzle 63 whose tip is projected and fixed from the nozzle block 62, and a rectangular hollow pipe whose opening dimension in the vertical direction is smaller than that of the injection nozzle 63. The tip end side has a powder supply nozzle (not shown) inserted on the same axis from the base end side of the injection nozzle 63. That is, the base end portion of the injection nozzle 63 and the tip end portion of the powder supply nozzle are partially overlapped, and the overlapping portion has a slit-like shape with a vertical channel width of about 0.05 to 0.3 mm. Acceleration gas jet channel (
(Not shown) is formed. The injection nozzle 63 and the powder supply nozzle (not shown)
It is formed using a corrosion resistant material such as ceramics.

The nozzle block 62 is formed with an acceleration gas introduction path (not shown) connected to the above-described upper and lower acceleration gas jet paths on the base end side of the injection nozzle 63, and an acceleration gas supply unit 65 is provided in these acceleration gas introduction paths. Connected. The gas supplied by the acceleration gas supply unit 65 is, for example, air, nitrogen gas, argon gas, neon gas, helium gas, etc., and powder (solid fine particles)
It is appropriately selected according to the type of PW. The nozzle block 62 is formed with a powder supply path (not shown) connected to the base end side of the powder supply nozzle, and a connection pipe 57 is connected to the powder supply path.
Is connected.

In the injection processing system 1 configured as described above, in the powder supply device 10, the first impeller 22 (blade member) is rotated clockwise (or counterclockwise) in FIG. 3 by the rotational drive of the first stepping motor 12. , The powder (solid fine particles) PW stored in the first tank 21 moves while being stirred, falls from the hole 25 of the first tank 21, and is stored in the second tank 31. Next, when the second impeller 32 (blade member) rotates counterclockwise (or clockwise) in FIG. 3 by the rotational drive of the second stepping motor 13, the powder PW stored in the second tank 31 is agitated. It is moved while being dropped, falls from the hole 35 of the second tank 31, and the powder supply disk 4
5 receiving portions 47.

Next, when the powder supply disk 45 is rotated clockwise (or counterclockwise) in FIG. 3 by the rotational drive of the third stepping motor 14, the powder PW received in the receiving portion 47 of the powder supply disk 45 is powdered. It rotates together with the supply disk 45 and reaches the gap GP between the cover member 50 and the powder supply disk 45. Here, as shown in FIG. 1, the first gas supply device 5
The first gas supplied from 4 to the first gas supply passage 52 of the cover member 50 reaches the gap GP through the first gas supply passage 52, and at this time, the powder PW passing through the gap GP. Is cut out (extruded) to the powder discharge passage 51 side, and guided to the powder supply port 55 from the powder discharge passage 51 together with the cut out powder PW. Further, the second gas supplied from the second gas supply device 59 to the gas supply nozzle 56 reaches the powder supply port 55 through the second gas supply passage 56a in the gas supply nozzle 56, and is described above. Together with the powder PW introduced into the powder supply port 55 from the powder discharge passage 51 by the first gas, it is guided to the injection processing device 60 through the powder supply port 55 and the connection pipe 57. At this time, the gas supply nozzle 5
Ejector effect of the gas ejected from 6 into the powder supply port 55 also acts, and the powder PW in the powder discharge passage 51 is sucked to the powder supply port 55 side and mixed with the gas from the gas supply nozzle 56 Is supplied to the injection processing device 60.

Here, the result of having performed the performance comparison with the powder supply apparatus 10 of 1st Embodiment and the conventional powder supply apparatus is shown in FIG. 5 and FIG. FIG. 5A is a graph showing a change over time of the powder injection amount (total supply amount) by the powder supply apparatus 10 of the first embodiment, and FIG. 5B is a powder injection amount by the conventional powder supply apparatus. It is a graph which shows a time-dependent change of (total supply amount). The powder PW used in the experiment is an alumina powder. As can be seen from FIG. 5, the powder supply apparatus 10 of the first embodiment.
Compared with the conventional powder supply device, the change over time of the powder injection amount (total supply amount) is linear (especially,
Even if the supply amount is 0.05 g / sec to 0.3 g / sec and the supply amount of the powder PW is very small, the powder PW can be supplied at a constant supply amount. Moreover, in the conventional powder supply apparatus, N = 4 measurements were performed under the same conditions. However, the measurement result greatly varies, and the powder supply apparatus 10 of the first embodiment is compared with the conventional powder supply apparatus. The reproducibility of the powder injection amount (total supply amount) is also high.

FIG. 6A is a graph showing the change over time of the average injection amount (supply amount) by the powder supply device of the first embodiment, and FIG. 6B is the average injection amount (supply by the conventional powder supply device). It is a graph which shows a time-dependent change of quantity. The average injection amount (supply amount) is an average per 30 seconds.
As can be seen from FIG. 6, the powder supply device 10 of the first embodiment has an average injection amount (in the range of 0.05 g / sec to 0.3 g / sec) compared to the conventional powder supply device. The variation in supply amount is small, and in particular, the average injection amount (supply amount) at 0.1 g / sec is very stable.

Thus, according to the powder supply device 10 of the first embodiment, the powder discharge passage 51 and the first gas supply passage 52 formed in the cover member 50 that covers a part of the powder supply disk 45 are respectively the cover members. 50 and the powder supply disk 45 are opposed to each other via a gap GP and extend along the bottom surface of the receptacle 47 located in the gap GP, so that the receptacle located in the gap GP. The powder PW received in 47 can be cut out (extruded) in the same direction as the flow direction of the gas supplied from the first gas supply passage 52 and guided from the powder discharge passage 51 to the powder supply port 55. Even when the supply amount of PW is very small, the powder PW can be stably supplied.

Furthermore, the powder PW located at the front end in the rotational direction of the powder supply disk 45 is continuously cut out (desorbed) and discharged to the powder discharge passage 51 at a constant discharge speed. Even when the amount of supply is small with a powder that is difficult to receive and has high cohesiveness, the powder PW can be stably supplied. Further, by changing the rotational speed of the powder supply disk 45, the shape of the receiving portion 47, the cross-sectional dimensions of the powder discharge passage 51 and the first gas supply passage 52, etc., the powder PW
Can be easily controlled.

Further, since the second gas supply passage 56a opens into the powder supply port 55 with the gas supply nozzle 56 coaxial with the substantially circular cross section of the powder supply port 55, the gas supplied from the first gas supply passage 52 is used. The effect of pushing the powder PW from the powder discharge passage 51 into the powder supply port 55 and the ejector effect (suction effect) of the gas ejected from the gas supply nozzle 56 into the powder supply port 55 are combined. To powder supply port 55,
Efficient guidance can be achieved without causing stagnation or adhesion / deposition on the route. further,
The powder PW guided from the powder discharge passage 51 to the powder supply port 55 is collided with the wall surface by the above-described pushing effect and ejector effect (suction effect), and abrupt expansion from the powder discharge passage 51 to the powder supply port 55. Since it is mixed with the gas ejected from the gas supply nozzle 56 by the turbulent flow, the dispersibility of the powder PW can be improved. Further, the gas supply nozzle 56
Since the pressure of the gas ejected from the gas can be easily changed and the allowable range of the pressure is large, it is influenced downstream of the powder supply port 55 (for example, pressure loss in the connection pipe 57 and the external device). And can respond flexibly.

In addition, the receiving portion 47 is formed in a tapered shape on the upper surface side of the outer peripheral portion of the powder supply disk 45, the powder discharge passage 51 is formed in a straight line extending obliquely below the gap portion GP, and the first gas supply passage 52 is formed. Is formed in a straight line extending obliquely above the gap portion GP, so that the powder PW received in the receiving portion 47 located in the gap portion GP is supplied from the first gas supply passage 52 more efficiently. It can be cut out (extruded) in the same direction as the gas flow direction and guided from the powder discharge passage 51 to the powder supply port 55.

Further, since the powder PW stored in the second tank 31 falls from the hole 35 and is received by the receiving portion 47 by the rotation of the second impeller 32, the rotation of the second impeller 32 is performed. By adjusting the number and the like, the powder PW can be filled in the receiving portion 47 without a gap.

As described above, the powder (solid fine particles) PW is transferred from the powder supply device 10 to the injection processing device 60.
In the injection processing device 60, the powder PW mixed with the gas in the powder supply device 10 is supplied to the powder supply path (not shown) and the powder supply nozzle (not shown) of the nozzle block 62.
It passes through and reaches into the injection nozzle 63. At this time, the operation of the acceleration gas supply unit 65 is controlled by a control unit (not shown), and the pressure / flow rate of the acceleration gas supplied from the acceleration gas supply unit 65 to the nozzle unit 61 is controlled. The powder PW supplied from 10 and reaching the injection nozzle 63 is accelerated by the accelerating gas, and the injection nozzle 6
3 is ejected from the tip of 3 toward a base material (for example, an electrode base material 131 described later).

Specifically, when the acceleration gas is supplied from the acceleration gas supply unit 65 to the acceleration gas introduction passage (not shown) of the nozzle block 62 at a predetermined pressure (˜2 MPa), the supplied acceleration gas is supplied to the acceleration gas jet passage (not shown). ) And is ejected into the ejection nozzle 63 and ejected from the tip of the ejection nozzle 63. At this time, in the exit region of the accelerating gas jet flow path in the injection nozzle 63, a large turbulent flow is generated in front of the outlet of the powder supply nozzle due to an ejector effect or the like due to a cross-sectional area difference from the powder supply nozzle (not shown). The powder PW passing through the supply nozzle is entrained and dispersed in the turbulent flow of the acceleration gas ejected from the acceleration gas jet flow channel in front of the outlet of the powder supply nozzle, and is accelerated by the gas flow to be released from the tip of the injection nozzle 63. Material (for example, electrode base material 131 described later)
It is injected toward

According to the injection processing system 1 of the first embodiment, since the powder supply device 10 that can stably supply the powder PW is provided even when the supply amount of the powder (solid fine particles) PW is small, the powder P
Even when the injection amount of W is small, the injection amount of the powder PW can be kept constant, and efficient and stable processing can be performed.

The spray processing system 1 for forming a film by the powder jet deposition method has been described above. However, the cross-sectional shape of the nozzle unit 61 is not limited to a rectangle, but a circle (perfect circle or ellipse). ), Polygonal, or circular (rectangular) nozzles may be arranged in a staggered manner. Further, as described above, the gas supplied from the first gas supply device 54 and the second gas supply device 59 and the acceleration gas supplied from the acceleration gas supply unit 65 to the nozzle unit 61 are the base material and powder. It can be appropriately selected according to the processing object such as PW. These gases may be the same type or different types of gas, or the type or mixing ratio of the gas may be changed as the film forming process proceeds. By using an inert gas such as a Group 18 element gas or nitrogen gas as the gas to be used, it is possible to suppress the oxidizing action in the process of attaching the powder PW. Further, if a gas having a small mass such as helium is used, the collision speed of the powder PW can be increased, and if air is used, the film formation cost can be reduced.

Next, a method for manufacturing a negative electrode of a lithium ion secondary battery by forming a film having an active material on the surface of the electrode base material by the jet processing system 1 having the above configuration will be described. First, an example of a lithium ion secondary battery will be described with reference to FIG. As shown in FIG. 7A, the lithium ion secondary battery 101 includes a positive electrode 102 and a negative electrode 103.
And a separator 104 provided between the positive electrode 102 and the negative electrode 103, and a laminate film 105 that accommodates the separator 104. The positive electrode 102, the separator 104, and the negative electrode 103 are each formed in a thin plate shape and are stacked in this order,
It is enclosed in a laminate film 105 together with an electrolytic solution (not shown). In this state, the positive electrode 102 is electrically connected to the positive electrode tab 107 exposed to the outside of the laminate film 105 through the positive electrode terminal lead 106, and the negative electrode 103 is connected to the outside of the laminate film 105 through the negative electrode terminal lead 108. It is electrically connected to the exposed negative electrode tab 109.

As the positive electrode 102, for example, a known positive electrode in which a lithium transition metal oxide such as lithium cobaltate is attached and formed on an aluminum foil as a current collector as a positive electrode active material is used. The positive electrode 102 faces the negative electrode 103 with the separator 104 interposed therebetween, and is connected to the negative electrode 103 via an electrolytic solution (not shown). As an electrolytic solution (not shown), for example, those obtained by dissolving a known electrolyte LiClO ₄ or the like and LiPF ₆ in a known solvent such as propylene carbonate and ethylene carbonate (non-aqueous electrolyte) is used.

As shown in FIG. 1B, the negative electrode 103 includes an electrode base material 131 that is a current collector, and a positive electrode 102.
A film 13 having an active material formed on one or both surfaces of the electrode substrate 131 facing the electrode 13
2 and configured. The electrode base 131 is formed in a thin plate shape using, for example, a highly conductive copper foil. The film 132 having an active material is silicon (Si: silicon) serving as a negative electrode active material.
And Cu ₃ Si, which is an alloy of copper and silicon, and copper (Cu), which is a binder, and unevenness is formed on the surface.

To manufacture the negative electrode 103 of the lithium ion secondary battery 101 configured as described above,
First, as shown in the flowchart of FIG. 8, the powder (solid fine particles) PW containing silicon and copper is supplied to the injection processing device 60 using the above-described powder supply device 10 (step S101).
). Next, the powder PW is sprayed at a spray speed equal to or lower than the sonic speed in an environment of normal temperature and normal pressure using the spray processing device 60 to form a film 132 of the negative electrode material on the electrode substrate 131 that is a current collector. (Step S102). That is, film formation using a powder jet deposition method is performed. Thereby, a stable solid material film can be formed with a simple and highly flexible configuration that does not use a heating device, a supersonic nozzle, a decompression facility, or the like.

In addition, the powder (solid fine particles) PW used for film formation of such a negative electrode material is composed of silicon (Si: silicon) as an active material having a high lithium compound forming ability, and conductive copper (C
It is formed by mechanical alloying using u) as a raw material.
Here, “a material having a high ability to form a lithium compound” refers to a material that easily forms an alloy with lithium or an intermetallic compound. Mechanical alloying is a method for producing powders that are alloyed by a mechanical process. A mechanical energy is applied to a mixture of raw material powders by a high-energy ball mill or the like, and the alloy remains solid by repeated crushing and cold rolling. Is done. In this embodiment, mechanical energy is given to the mixed powder of silicon and copper by a ball mill or the like,
By alloying by repeated crushing and cold rolling, powder (solid fine particles) PW containing three phases of silicon, copper, and Cu ₃ Si which is an alloy of copper (Cu) and silicon (Si) is generated. The

The injection speed of the powder PW at this time is set mainly by controlling the type and pressure of the acceleration gas supplied to the nozzle unit 61. For example, when the acceleration gas is air, 5P
Injected at a speed of 0 to 300 m / sec or less. The powder PW injected with the accelerating gas is a surface to be adhered (a surface to which the powder PW collides and adheres) of the electrode substrate 131 disposed at a distance of about 0.5 to 2 mm from the nozzle tip. The electrode substrate (current collector) 131 collides with and adheres to the surface of the electrode base material (current collector) 131, which is the film surface of the electrode material adhered during film formation. At this time,
By causing the nozzle unit 61 and the electrode base material 131 to move relative to each other while spraying the powder PW, the negative electrode material film 132 is formed on the electrode base material 131 at normal temperature and normal pressure.

According to the manufacturing method of the negative electrode 103 used in the lithium ion secondary battery 101 of the present embodiment, the powder supply apparatus 10 that can stably supply the powder PW even when the supply amount of the powder (solid fine particles) PW is very small. Therefore, even if the injection amount of the powder PW is very small, the injection amount of the powder PW can be kept constant, and the negative electrode material film 132 can be efficiently formed on the electrode substrate 131 with a small injection amount of the powder PW. , Can be formed stably.

In the above-described embodiment, the film 132 formed on the negative electrode 103 of the lithium ion secondary battery 101 is composed of silicon, copper, and an alloy of copper and silicon, but is not limited thereto. For example, it may be composed of silicon, nickel (Ni), and an alloy of nickel and silicon. Even with such a configuration, it is possible to obtain the same effect as in the above-described embodiment. Nickel and silicon alloys are NiSi, NiSi ₂ ,
And at least one of a mixture of NiSi and NiSi ₂ .

Moreover, in the above-mentioned embodiment, although the injection processing system 1 demonstrated the method of manufacturing the negative electrode 103 of the lithium ion secondary battery 101 by forming the film | membrane which has an active material on the surface of an electrode base material, The present invention is not limited to this, and the positive electrode 102 of the lithium ion secondary battery 101 can be manufactured. For example, as in the case of the negative electrode 103, first, the powder supply device 10 is used to supply powder (solid fine particles) PW containing a lithium-based alloy material to the injection processing device 60 (step S101). Can be used to spray a powder PW at an injection speed equal to or lower than the speed of sound in an environment of normal temperature and normal pressure, whereby a film of a positive electrode material can be formed on the electrode substrate (step S102). According to such a manufacturing method of the positive electrode 102, the same effect as that in the case of manufacturing the negative electrode 103 can be obtained.

In addition, the electrode base material (not shown) for positive electrodes is formed in thin plate shape using the highly conductive aluminum foil, for example. Further, as the positive electrode material (film material), for example, lithium cobalt oxide (LiCoO ₂ ) serving as a positive electrode active material can be used. Further, not limited to lithium cobaltate, LiNiO ₂ , LiMn ₂ O ₄ , LiMnO ₂ , Li _x TiS ₂ , Li _x V ₂ O ₅ , V ₂ Mo
O ₈ , MoS ₂ , LiFePO ₄ or the like can be used.

In the above-described embodiment, the lithium ion secondary battery 101 is formed in a laminate type. However, the present invention is not limited to this, and may be, for example, a cylindrical type, a square type, or a cell type.

Further, in the above-described embodiment, the method for manufacturing the positive electrode material and the negative electrode material used for the lithium ion secondary battery 101 has been exemplarily described. However, the injection processing system according to the aspect of the present invention is based on the powder jet deposition method. Any material that can be formed into a film can be used in the same manner for the production of secondary battery electrode materials, primary battery electrode materials, and fuel cell electrode materials having other configurations.

Moreover, in the above-mentioned embodiment, although the storage tank 20 has the 1st tank 21, the 2nd tank 31, and the 3rd tank 41, it is not restricted to this, Powder PW Depending on the type of the first tank 21, the first tank 21 may not be provided. Furthermore, the third tank 41 is not provided without the second tank 31.
Alternatively, the powder PW may be stored. The third tank 41 is not limited to the configuration using the above-described ceiling portion 42, the cover member 50, and the like, and may be any configuration as long as a certain amount of powder PW can be filled in the outer peripheral portion of the powder supply disk 45.

In the above-described embodiment, the gas supply nozzle 56 is provided inside the powder supply port 55. However, the present invention is not limited to this, and depending on the type of the powder PW, the gas supply nozzle 56 and the second The gas supply device 59 may not be provided.

Next, a second embodiment of the injection processing system will be described. As shown in FIG. 9, an injection processing system 201 according to the second embodiment mixes a powder supply device 210 that supplies powder (solid fine particles) PW and a powder PW supplied from the powder supply device 210 into a gas jet. And an injection processing device 260 that forms a film on the surface of the base material by being injected and collided with the base material (for example, the electrode base material 131 described above). In FIGS. 9 and 10, the powder P
The description of W is omitted. The powder supply apparatus 210 according to the second embodiment includes a box-shaped casing unit 211, a storage tank 220 that is supported on the upper part of the casing unit 211 and stores the powder PW, and the powder PW stored in the storage tank 220. And a powder supply port 255 for supplying to an external injection processing device 260.

On the upper back side of the casing 211 (upper right side of the casing 211 in FIG. 9), the storage tank 22
An electric motor 212 that rotationally drives an impeller 222 and a powder supply disk 245 provided at 0
Is disposed. The rotating shaft 212a of the electric motor 212 extends vertically downward, and its tip is connected to the gear mechanism 213. The gear mechanism 213 includes a first gear 214, a second gear 215, a third gear 216, and a fourth gear 217.

The first gear 214 is coupled to the lower end portion of the rotating shaft 212 a of the electric motor 212 and meshed with the second gear 215. The second gear 215 is an intermediate shaft 218 disposed inside the housing portion 211.
The first gear 214 and the third gear 216 are meshed with each other. The third gear 216 is coupled to the lower end portion of the impeller drive shaft 223 connected to the impeller 222, and the second gear 2
15 and the fourth gear 217 are engaged. The fourth gear 217 is coupled to the lower end portion of the disk drive shaft 246 connected to the powder supply disk 245 and meshed with the third gear 216. As a result, the rotational driving force of the electric motor 212 is transmitted to the impeller 222 and the powder supply disk 245 via the gear mechanism 213.

The storage tank 220 includes an upper tank 221 positioned on the upper side and a lower tank 231 positioned on the lower side (lower left side in FIG. 9) of the upper tank 221. The upper tank 221 is formed in a bottomed cylindrical shape capable of storing the powder PW, and rotatably holds an impeller 222 for stirring the powder PW therein. The impeller 222 is configured to have a plurality of blade members, and the powder PW stored in the upper tank 221 can be stirred and moved by rotating about the rotational symmetry axis of the impeller 222. It has become. An upper end portion of an impeller drive shaft 223 that extends vertically through the bottom portion of the upper tank 221 is connected to the lower center portion of the impeller 222. The third gear 216 is coupled to the lower end of the impeller drive shaft 223, so that the rotational driving force of the electric motor 212 is transmitted to the impeller 222 via the first to third gears 214 to 216 and the impeller drive shaft 223. Communicated. On the outer peripheral side of the bottom of the upper tank 221, an arc-shaped hole 225 is formed above the receiving part 247 formed on the powder supply disk 245 of the lower tank 231, as shown in FIG. Impeller 2
Due to the rotation of the blade 22 (blade member), the powder PW stored in the upper tank 221 falls from the hole 225 and is received by the receiving portion 247 of the powder supply disk 245.

The lower tank 231 is formed in a container shape capable of receiving the powder supply disk 245, and holds the powder supply disk 245 so as to be rotatable about the rotational symmetry axis. The powder supply disk 245 is formed in a disk shape facing upward in the lower tank 231. In the lower center part of the powder supply disk 245,
The upper end of a disk drive shaft 246 that extends vertically through the bottom of the lower tank 231 is connected.
A fourth gear 217 is coupled to the lower end portion of the disk drive shaft 246, thereby the electric motor 212.
Is transmitted to the powder supply disk 245 via the first to fourth gears 214 to 217 and the disk drive shaft 246. A tapered receiving portion 247 that receives the powder PW that has fallen from the upper tank 221 to the lower tank 231 through the hole 225 is formed on the upper surface of the outer periphery of the powder supply disk 245. As shown in FIG. 11, a plurality of partition walls 248 are formed on the upper surface side of the outer peripheral portion of the powder supply disk 245, and the receiving portions 247 are partitioned into a plurality of pockets by the partition walls 248.

A cover member 250 that covers the upper part and outer periphery of the powder supply disk 245 is attached to the lower tank 231. As shown in FIG. 10, the cover member 250 is formed in a block shape that constitutes a part of the ceiling part and the outer peripheral part of the lower tank 231, and the powder supply disk 2 between the powder supply disk 245.
According to the rotation of 45, the gap portion GP ′ through which the powder PW received by the receiving portion 247 can pass is formed. The cross-sectional shape of the gap GP ′ is a right triangle that matches the shape of the partition wall 248 of the powder supply disk 245. In the lower part on the side of the cover member 250, the gap GP
A powder discharge passage 251 is formed for guiding the powder PW passing through 'to the powder supply port 255.
The powder discharge passage 251 is formed in a straight line extending obliquely downward from the gap GP ′, and the gap G
P ′ and the powder supply port 255 are communicated with each other. That is, the inlet end of the powder discharge passage 251 opens into the gap GP ′, and the outlet end of the powder discharge passage 251 opens into the powder supply port 255 (a powder supply passage 256 described later).

On the other hand, a first gas supply passage 252 that supplies gas to the above-described gap GP ′ is formed in the upper portion of the cover member 250. An upstream side of the first gas supply passage 252 is formed so as to extend vertically, and a first gas is supplied into the first gas supply passage 252 through a gas supply port 253 provided at the upstream end. The gas supply device 254 is connected. The downstream side of the first gas supply passage 252 is formed in a straight line extending obliquely upward from the gap portion GP ′, and the first gas supply passage 252 is bent halfway. Thus, the first gas supply passage 2
The downstream side of 52 and the powder discharge passage 251 are formed so as to face each other through the gap GP ′ and to extend along the bottom surface of the receiving portion 247 located in the gap GP ′.

Thereby, the first gas supplied from the first gas supply device 254 reaches the gap GP ′ through the first gas supply passage 252 and is located at the opening of the first gas supply passage 252. Collides with powder PW. As a result, the powder PW located at the opening of the first gas supply passage 252
Is cut out (desorbed) from the receiving portion 247 and guided along with the first gas from the powder discharge passage 251 into the powder supply port 255. At this time, since the first gas supply passage 252 and the powder discharge passage 251 are formed so as to extend along the bottom surface of the receiving portion 247, the force that the powder PW of the receiving portion 247 receives from the first gas is received. The powder PW is discharged along the bottom surface of the portion 247 toward the powder discharge passage 251, and the entire amount of the powder PW is discharged to the powder discharge passage 251 without any other obstacles. Further, since the powder supply disk 245 always rotates at a constant angular velocity from the hole 225 of the upper tank 221 toward the gas supply passage 252, the opening of the first gas supply passage 252 is always at a constant speed. Powder PW is supplied. As a result, the powder PW located at the front end in the rotational direction of the powder supply disk 245 is continuously cut out (desorbed) and discharged to the powder discharge passage 251 at a constant discharge speed, thereby realizing a quantitative supply of powder. The Since both the downstream side of the first gas supply passage 252 and the cross section in the extending direction of the powder discharge passage 251 are rectangular cross sections extending vertically, the front end of the powder PW is always maintained flat. The powder PW in the receiving portion 247 is prevented from unexpectedly collapsing, and the powder can be stably supplied. Note that the first gas supplied by the first gas supply device 254 is the same as in the first embodiment, and is appropriately selected according to the type of the powder PW and the like.

The powder supply port 255 is formed in a tubular shape extending in a substantially horizontal direction, and is attached to a side portion of the lower tank 231. The nozzle unit 261 of the injection processing device 260 is directly connected to the tip of the powder supply port 255. A powder supply passage 256 extending in a substantially horizontal direction (longitudinal direction of the powder supply port 255) is formed in the center of the powder supply port 255, and the nozzle unit 261 is formed.
The inside of the powder supply nozzle 264 is in communication with the powder discharge passage 251. Powder discharge passage 25
The surface surrounding the powder supply passage 256 is formed as a conical curved surface so that the outlet end of one and the inlet end of the powder supply nozzle 264 are smoothly connected. A second gas supply passage 257 extending vertically from the base end portion of the powder supply passage 256 is formed inside the base end side of the powder supply port 255, and a second gas is supplied into the second gas supply passage 257. The gas supply device 259 is connected. In FIG. 10, two second gas supply devices 259 are provided, but the two second gas supply passages 257 are connected to one second gas supply device 259, respectively. Also good.

Thereby, the second gas supplied from the second gas supply device 259 reaches the powder supply passage 256 through the second gas supply passage 257 of the powder supply port 255, and is powdered by the first gas described above. Along with the powder PW guided from the discharge passage 251 to the powder supply passage 256,
It is guided to the outside (nozzle unit 261 of the injection processing device 260) through the powder supply passage 256. The second gas supplied by the second gas supply device 259 is the same as that in the first embodiment, and is appropriately selected according to the type of the powder PW.

The injection processing apparatus 260 of the second embodiment has the same configuration as the injection processing apparatus 60 of the first embodiment, and includes a nozzle unit 261, an acceleration gas supply unit 265, and the like as shown in FIG. . As shown in FIGS. 12 to 13, the nozzle unit 261 includes a nozzle block 262 that serves as a base, a rectangular hollow pipe-shaped injection nozzle 263 with a tip protruding from the nozzle block 262, and a base of the injection nozzle 263. It has a rectangular hollow pipe-like powder supply nozzle 264 disposed on the same axis on the end side. Powder supply nozzle 26
4 is smaller than the opening size of the injection nozzle 263, and the tip of the powder supply nozzle 264 is slightly inserted into the base end side of the injection nozzle 263 as shown in FIG. In the gap between the injection nozzle 263 and the powder supply nozzle 264, an outlet for the acceleration gas supplied into the injection nozzle 263 is formed.

Inside the nozzle block 262, as shown in FIG. 13, four acceleration gas introduction passages 262a are formed which are connected to the above-described acceleration gas ejection port and extend vertically and horizontally. Each of the four acceleration gas introduction paths 262a is connected to an acceleration gas supply unit 265 via an acceleration gas supply port 266 provided at the upstream end of each acceleration gas introduction path 262a. The gas supplied by the acceleration gas supply unit 265 is the same as that in the first embodiment, and the powder (solid fine particles) P
It is appropriately selected according to the type of W or the like. 10 and 13, a plurality of acceleration gas supply units 265 are provided, but four acceleration gas introduction paths 262a are each 1
It may be configured to be connected to two acceleration gas supply units 265. The injection nozzle 263 and the powder supply nozzle 264 are formed using a corrosion-resistant material such as ceramics. And the powder supply nozzle 264 is connected to the base end part of the injection nozzle 263, and the powder supply nozzle 264 is connected.
The powder supply port 255 of the powder supply apparatus 210 is connected to the base end of the powder.

In the injection processing system 201 configured as described above, in the powder supply device 210,
When the impeller 222 (blade member) is rotated by the rotational drive of the electric motor 212, the upper tank 2
The powder (solid fine particles) PW stored in 21 moves while being stirred, and the hole 22 of the upper tank 221 is moved.
5 and is received by the receiving portion 247 of the powder supply disk 245.

At this time, the rotation of the electric motor 212 causes the powder supply disk 245 to rotate in the opposite direction to the impeller 222, and the powder PW received in the receiving portion 247 of the powder supply disk 245 rotates and moves together with the powder supply disk 245. And reaches the gap GP ′ between the cover member 250 and the powder supply disk 245. Here, as shown in FIG. 10, the first gas supplied from the first gas supply device 254 to the first gas supply passage 252 of the cover member 250 passes through the first gas supply passage 252. The powder PW that has reached the gap GP ′ and passes through the gap GP ′ at this time is cut out (extruded) to the powder discharge passage 251 side, and the powder supplied from the powder discharge passage 251 to the powder supply port 255 together with the cut out powder PW. Guided to passage 256. Further, the second gas supplied from the second gas supply device 259 to the second gas supply passage 257 in the powder supply port 255 reaches the powder supply passage 256 through the second gas supply passage 257. ,
Together with the powder PW guided from the powder discharge passage 251 to the powder supply passage 256 by the first gas, it is guided to the injection processing device 260 through the powder supply passage 256.

As described above, powder (solid fine particles) is transferred from the powder supply device 210 to the injection processing device 260.
When the PW is supplied, in the injection processing device 260, the powder PW mixed with the gas in the powder supply device 210 passes through the powder supply nozzle 264 of the nozzle unit 261, and then the injection nozzle 26.
Reach within 3. At this time, the acceleration gas supply unit 26 is controlled by a control unit (not shown).
5, and the pressure / flow rate of the acceleration gas supplied from the acceleration gas supply unit 265 to the injection nozzle 263 of the nozzle unit 261 is controlled to reach the injection nozzle 263 by being supplied from the powder supply device 210. The powder PW is accelerated by the accelerating gas and sprayed from the tip of the spray nozzle 263 toward the base material (for example, the electrode base material 131 described above).

Thus, according to the injection processing system 201 and the powder supply apparatus 210 of the second embodiment, the same effects as those of the first embodiment can be obtained. Furthermore, the injection processing apparatus 260
Since the nozzle unit 261 is directly connected to the powder supply port 255 of the powder supply apparatus 210, the length of the pipe line from the powder supply apparatus 210 to the injection processing apparatus 260 can be minimized, and the injection amount of the powder PW Responsiveness and stability at the time of changing can be improved. The nozzle unit 261 is not connected to the powder supply port 255, and the powder supply device 21
It may be configured to be directly connected to the zero powder discharge passage 251.

Moreover, the negative electrode (or positive electrode) of a lithium ion secondary battery can be manufactured by the injection processing system 201 of 2nd Embodiment similarly to the case of 1st Embodiment, and it is the same as the case of 1st Embodiment. The effect of can be obtained.

In the above-described second embodiment, the cross-sectional shape of the nozzle unit 261 is not limited to a rectangle, but may be an appropriate shape such as a circular (perfect circle or oval), polygon, or circular (rectangular) nozzle. It can be shaped. In addition, the gas supplied from the first gas supply device 254 and the second gas supply device 259 and the acceleration gas supplied from the acceleration gas supply unit 265 to the nozzle unit 261 are the same as in the first embodiment. , Substrate and powder P
W or the like can be appropriately selected according to the object to be processed.

In each of the embodiments described above, the partition wall 48 (248) is provided in the receiving portion 47 (247). However, the partition wall 4 (248) is not limited to this, and depending on the type of the powder PW and the like, the partition wall 4
8 (248) may not be provided.

In each of the above-described embodiments, the receiving portion 47 (247) is provided with the powder supply disk 45 (24
5) is formed in a tapered shape on the upper surface side of the outer peripheral portion, but is not limited thereto, and may be formed in a gently concave curved surface. In this case, the powder discharge passage and the gas supply passage may be formed to extend in a curved shape along the bottom surface of the receiving portion.

In each of the embodiments described above, the powder supply apparatus 10 (210) supplies the powder PW to the injection processing apparatus 60 (260) that performs film formation by the powder jet deposition method. For example, a carrier for a thermal spraying apparatus in which powder such as ceramics is supplied into a plasma together with a carrier gas, and the powder vaporized by the plasma is sprayed onto a sample placed in a container to deposit the powder. You may make it supply the trace amount of the powder using gas.

1 Injection processing system (first embodiment)
DESCRIPTION OF SYMBOLS 10 Powder supply apparatus 20 Storage tank 21 1st tank (powder holding tank) 31 2nd tank (powder holding tank)
32 Second impeller (blade member) 35 Hole 41 Third tank (disc holding tank)
45 Powder Supply Disk 47 Receiving Portion 50 Cover Member 51 Powder Discharge Passage 52 First Gas Supply Passage 55 Powder Supply Port 56 Gas Supply Nozzle (56a Second Gas Supply Passage)
60 Injection Processing Device 101 Lithium Ion Secondary Battery 102 Positive Electrode 103 Negative Electrode 131 Electrode Base Material 132 Film GP Gap PW Powder 201 Injection Processing System (Second Embodiment)
210 Powder supply device 220 Storage tank 221 Upper tank (powder holding tank)
222 impeller 225 hole 231 lower tank (disk holding tank)
245 Powder supply disk 247 Receiving portion 250 Cover member 251 Powder discharge passage 252 First gas supply passage 255 Powder supply port 257 Second gas supply passage 260 Injection processing device GP ′ gap

Claims (10)

A disk-shaped powder supply disk in which a receiving part for receiving powder is formed on the upper surface side of the outer peripheral part;
A disk holding tank for rotatably holding the powder supply disk inside;
A gap part that covers a part of the powder supply disk and allows the powder received in the receiving part to pass between the powder supply disk and the powder supply disk that rotates in the disk holding tank according to the rotation of the powder supply disk. A cover member forming
A first gas supply passage for supplying a first gas to the gap;
A powder discharge passage that communicates with the gap and discharges the powder released from the receiving portion by the first gas;
The powder discharge passage and the first gas supply passage are formed to face each other via the gap and to extend along the bottom surface of the receiving portion located in the gap. Powder feeder. A powder supply port in which an outlet end of the powder discharge passage is opened, and
The powder supply apparatus according to claim 1, further comprising a second gas supply passage for supplying a second gas into the powder supply port. The powder supply port has a substantially circular cross-section;
The powder supply apparatus according to claim 2, wherein the second gas supply passage opens to the powder supply port with a gas supply nozzle coaxial with the substantially circular cross section. The receiving portion is formed in a tapered shape on the upper surface side of the outer peripheral portion of the powder supply disk,
The powder discharge passage is formed in a straight line extending obliquely below the gap, and the first gas supply passage is formed in a straight line extending obliquely above the gap. The powder supply apparatus as described in any one of 1-3. A powder holding tank for storing powder;
At the bottom of the powder holding tank, a hole is formed above the receiving part,
The powder supply apparatus according to any one of claims 1 to 4, wherein the powder stored in the powder holding tank falls from the hole and is received by the receiving unit. Inside the powder holding tank, a blade member for moving the powder stored in the powder holding tank is rotatably arranged,
The powder supply apparatus according to claim 5, wherein the powder stored in the powder holding tank falls from the hole and is received by the receiving unit by the rotation of the blade member. A powder supply device for supplying powder;
The powder supplied from the powder supply device is mixed with a gas jet, and injected and collided with the base material, thereby including an injection processing device that forms a film on the surface of the base material,
An injection processing system, wherein the powder supply device is the powder supply device according to any one of claims 1 to 6.   The injection processing system according to claim 7, wherein the injection processing apparatus is directly connected to the powder supply apparatus. A method for producing an electrode material used for a secondary battery,
Using a powder supply device, supply powder containing the active material,
The powder supplied from the powder supply device is mixed with a gas jet and jetted onto the electrode base material to collide, thereby forming a film on the surface of the electrode base material,
The said powder supply apparatus is the powder supply apparatus as described in any one of Claim 1 to 6, The manufacturing method of the electrode material characterized by the above-mentioned.   The method for producing an electrode material according to claim 9, wherein the active material is silicon (Si).

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