JP5736067B2 - Electric heater, method of manufacturing electric heater, and heating apparatus provided with the same - Google Patents

Description

  The present invention relates to an electric heater, an electric heater manufacturing method, and a heating apparatus. More specifically, a plate-like heating element in which a current path is formed by forming a slit, and an insulator that supports the heating element, and a pair of heating elements positioned in the width direction along the slit of the heating element. The present invention relates to an electric heater supported by the insulator at a width direction end, a method for manufacturing the electric heater, and a heating device.

  Conventionally, as an electric heater as described above, for example, the one described in Patent Document 1 is known. In this electric heater, the insulator is divided and formed in the vertical direction and the heating element is locked therebetween. However, the insulator is divided into upper and lower parts, and a fixing pin is passed through these insulators in the vertical direction and fixed. For this reason, the insulator is formed to be wide by the amount of penetration of the fixing pin, and the heat capacity of the insulator is increased. Further, if the insulator is formed wide, the exposed area of the heating element to the heating space is reduced by that amount, the temperature distribution becomes non-uniform, and the heating efficiency is lowered. As a result, the response of temperature rise / fall was still insufficient.

JP 2002-359061 A

  In view of such conventional circumstances, the present invention provides an electric heater and an electric heater that reduce the heat capacity of the insulator and reduce the exposed area of the insulator with respect to the heating space to make the temperature distribution uniform and improve the response of temperature rise and fall An object of the present invention is to provide a manufacturing method and a heating apparatus.

  In order to achieve the above object, the electric heater according to the present invention is characterized by including a plate-like heating element in which a current path is formed by forming a slit, and an insulator that supports the heating element. In the structure supported by the insulator at a pair of width direction ends located in the width direction along the slit, the heating element is supported so that the width direction is along the horizontal direction, A fixing member that is fixed to a base material, and the fixing member is formed into a tubular shape by bending a plate-like body and has an opening that is partially opened along its longitudinal direction, and each width direction The insulator located at the end includes a pair of divided bodies having a horizontal portion along the horizontal direction and a vertical portion continuous from the horizontal portion in the vertical direction, and the pair of divided bodies are fitted to the fixing member. Of the fixing member A groove portion is formed, one end of the groove portion communicates with the opening, the end in the width direction is inserted into the groove portion in the longitudinal direction, and the horizontal portion of one divided body and the other divided body The first bent portion is sandwiched between the vertical portion.

  According to this configuration, since the insulator is fitted and fixed to the fixing member, it is sufficient that the insulator has a thickness that can ensure insulation of the heating element, and the insulator can be thinned. Moreover, the fixing member can be formed thin by bending, and it is sufficient that the fixing member has strength capable of supporting and supporting the insulator. Therefore, the heat capacities of the insulator and the fixing member can be reduced. Further, since the insulator formed thin as described above is fitted and fixed to the tubular fixing member, the exposed portion of the insulator on the heating space side can be reduced and the heating surface density can be improved. Therefore, the temperature distribution can be made uniform and the response to temperature rise and fall can be improved. In addition, since the heating element is inserted and held in the groove portion of the insulator, it is possible to prevent the exfoliation from the insulator.

  And it consists of a pair of division body which has the horizontal part along the said horizontal direction, and the vertical part which continues in the vertical direction from the horizontal part. Since a groove part is comprised by a pair of division body, each division body can be formed still thinner. Thereby, the heat capacity of the insulator can be further reduced.

  The opening portion opens at least in the width direction on a side surface of the fixing member, and the groove portion is formed in the vertical direction, and one end of the groove portion is communicated with the opening portion in the horizontal direction. The end may be bent at the first bent portion so as to be oriented in the vertical direction. According to the said structure, an insulator and a fixing member can be provided narrowly with respect to the width direction, and the part exposed to the heating space side of an insulator can be reduced. Thereby, a heating surface density can be improved and the response of raising / lowering temperature can be improved.

  Further, the opening is opened at least in the vertical direction on the lower surface of the fixing member, and the groove is formed in the horizontal direction, and one end of the groove is communicated with the opening in the vertical direction, A width direction end portion may be bent toward the heat generating body so as to be oriented in the horizontal direction, and a part of the insulator may be positioned between the heat generating body and the width direction end portion. According to the above configuration, since most of the insulator is covered with the heating element, the exposed portion of the insulator with respect to the heating space can be further reduced by the heating element. Thereby, a heating surface density can be improved and the response of raising / lowering temperature can be improved.

At least two sets of the heating elements may be provided, a pair of the insulators may be arranged so as to be line-symmetric with respect to the vertical direction, and the heating elements may be arranged in parallel in the width direction. The electric heater according to any one of the above can be implemented as a heating device including the electric heater.
In order to achieve the above object, the method of manufacturing the electric heater according to the present invention is characterized in that a plate-like heating element in which a current path is formed by forming a slit, and an insulator that supports the heating element. In the method of manufacturing an electric heater supported by the insulator at a pair of width direction end portions positioned in the width direction along the slit, the heat generating element has the width direction along a horizontal direction. The fixing member is fixed to a base material, and the fixing member is formed into a tubular shape by bending a plate-like body and partially opened along its longitudinal direction. An insulator having an opening and located at each width direction end is composed of a pair of divided bodies having a horizontal portion along the horizontal direction and a vertical portion continuous in the vertical direction from the horizontal portion, The divided body is fitted into the fixing member. A groove is formed inside the fixing member, and one end of the groove communicates with the opening, and the end in the width direction is inserted into the groove toward the longitudinal direction. The first bent portion is sandwiched between the horizontal portion and the vertical portion of the other divided body.

  According to the characteristics of the electric heater, the method for manufacturing the electric heater, and the heating device according to the present invention, it is possible to reduce the heat capacity of the insulator and reduce the exposed area of the insulator with respect to the heating space, thereby improving the response of raising and lowering the temperature. It has become possible.

  Other objects, configurations, and effects of the present invention will become apparent from the following embodiments of the present invention.

It is a front view of the electric heater which concerns on 1st embodiment of this invention. It is the sectional view on the AA line of FIG. It is a top view of the thin plate member before a curve. It is a partial enlarged front view near an insulator. It is a front view which shows the modification of 1st embodiment. FIG. 4A is a diagram corresponding to FIG. 4 illustrating the second embodiment of the present invention, and FIG. 4B is a diagram corresponding to FIG. 4 illustrating a modified example of FIG. (A) is the partial expanded sectional view of the insulator vicinity in 3rd embodiment of this invention, (b) is the partially expanded sectional view of the insulator vicinity which shows the modification of (a). (A) is a top view of the thin plate member before a curve in 3rd embodiment, (b) is the partial expanded side view of the width direction edge part of the heat generating body in 3rd embodiment. FIG. 5 is a view corresponding to FIG. 4 showing a fourth embodiment of the present invention. FIG. 9 is a diagram corresponding to FIG. 4 and showing a modification of the fourth embodiment. FIG. 6 is a view corresponding to FIG. 4 showing a fifth embodiment of the present invention. FIG. 4A is a diagram corresponding to FIG. 4 illustrating the sixth embodiment of the present invention, and FIG. 4B is a diagram corresponding to FIG. 4 illustrating the seventh embodiment of the present invention. FIG. 5 is a view corresponding to FIG. 4 showing still another embodiment of the present invention.

Next, a first embodiment of the present invention will be described with reference to FIGS.
As shown in FIG. 1, the electric heater 1 according to the present invention includes a heating element 10 and a pair of insulators 20 and 20 that support the heating element 10. The pair of insulators 20 and 20 are positioned at both ends in the width direction X of the heating element 10, and are fixed to the fixing member 40 by the fasteners 30. The fixing member 40 is fixed to a frame 2 as a base material made of, for example, a steel material via a heat insulating member 3 such as a ceramic fiber. In addition, a lead member 50 that supplies power to the heating element 10 is fixed to the fixing member 40 in a state of being electrically insulated from the frame 2.

  As shown in FIG. 1, for example, the electric heater 1 is provided with a support member 101 that is suspended and supported in the furnace by welding or the like, and constitutes a heating unit 100. The heating unit 100 is installed mainly on the ceiling of a furnace and is implemented as a heating device that heats an object to be heated that is put into the furnace.

  As shown in FIGS. 1 and 2, the heating element 10 is formed in a plate shape and a rectangular shape, and a meandering current path 12 is formed by alternately cutting a plurality of slits 11 from the width direction X. As shown in FIG. 1, a space between the pair of width direction end portions 13, 13 in the heating element 10 is gently curved in the longitudinal direction Y perpendicular to the slit 11, and the vertical direction Z downward side (furnace inside side). It has a convex shape. Further, the current path end portions 12 x and 12 y positioned at the end portion in the longitudinal direction Y of the heating element 10 are bent upward in the vertical direction Z and connected to the lead member 50.

  As shown in FIG. 3, the heating element 10 is manufactured from a thin plate member 10 'made of a conductive material such as an Fe-Cr-Al alloy or a nickel chromium alloy. The width direction end portion 13 is formed by bending a pair of end portions 13 ′ and 13 ′ in the width direction X of the thin plate member 10 ′ upward in the vertical direction Z by the first bent portion 14 ′. Further, the bent portion 16 is formed by bending the distal end portion of the width direction end portion 13 outwardly of the thin plate member 10 ′ toward the lower side in the vertical direction Y by the second bent portion 15 ′. The heating elements in the following embodiments have the same material and configuration unless otherwise specified.

  As shown in FIGS. 1 and 4, the insulator 20 includes a first divided body 21 and a second divided body 22 that are divided in the horizontal direction along the width direction X. The first and second divided bodies 21 and 22 are made of a so-called ceramic material or silicon nitride material mainly composed of alumina, alumina siliceous, mullite, zircon, or cordierite. Are electrically insulated from each other. Insulators and divided bodies in the following embodiments have the same materials and configurations unless otherwise specified.

  The first and second divided bodies 21 and 22 are formed in a long shape in the longitudinal direction Y orthogonal to the width direction X. By dividing the insulator 20 with respect to the horizontal direction, each of the divided bodies 21 and 22 can be formed narrow with respect to the width direction X. Thereby, the heat capacity of the whole insulator 20 can be suppressed, the temperature distribution with respect to the heating space can be made uniform, and the response to the temperature rise and fall can be improved. Further, by forming each of the divided bodies 21 and 22 narrow, the exposed area of the insulator 20 with respect to the heating space S (inside the furnace) below the vertical direction Z can be reduced.

  As shown in FIG. 4, the 1st division body 21 is exhibiting substantially plate shape, and the curved part 23 which curves to the heat generating body 10 side is formed. A cutout 24 is formed on one side of the second divided body 22 (on the first divided body 21 side). The notch 24 opens so as to face the curved portion 23 of the first divided body 21. A protrusion 25 that slightly protrudes toward the first divided body 21 is provided below the notch 24, and a gap 26 is formed between the protrusion 25 and the first divided body 21. It is formed wider. In addition, the first and second divided bodies 21 and 22 are formed with through holes 27 through which a fastener 30 described later passes. The through hole 27 is provided above the bending portion 23 and the cutout portion 24.

  Here, the bent portion 16 of the end portion 13 in the width direction is engaged with the cutout portion 24 of the second divided body 22. The movement of the second bent portion 15 of the width direction end portion 13 toward the heating element 10 is restricted by the curved portion 23 of the first divided body 21. On the other hand, movement of the bent portion 16 to the other side is restricted by the cutout portion 24. The gap 26 restricts the movement of the heating element 10 in the width direction X and prevents the width direction end portion 13 from falling off.

  In this manner, the heating element 10 is locked between the first and second divided bodies 21 and 22 by sandwiching the width direction end portion 13 between the bending portion 23 and the notch portion 24. As a result, the curved portion 23, the cutout portion 24, and the gap 26 are combined to restrict movement in the width direction X due to thermal deformation during heat generation / cooling of the heat generating element 10, so To prevent. Furthermore, since the first bent portion 14 of the heating element 10 is located below the insulator 20, the first divided body 21 is supported so as to cover the heating space with the heating element 10, and the heating space of the insulator 20. The exposed part with respect to can be further reduced.

  The fastener 30 penetrates the divided bodies 21 and 22 in the width direction X, and fastens and fixes the divided bodies 21 and 22 to the fixing member 40. Since the fastener 30 is positioned above the width direction end portion 13 by the through hole 27, the fastener 30 does not hinder heat dissipation from the heating element 10. Moreover, since the fastener 30 fastens each divided body 21 and 22 in the width direction X, it becomes possible to form the insulator 20 further narrower and to suppress the heat capacity of the insulator 20. As this fastener 30, the volt | bolt 31 as a rod-shaped member is used, for example.

  As shown in FIG. 1, for example, a channel member in which a plate-like object is formed in a channel shape is used as the fixing member 40, and is fixed to the frame 2 by attachment means 41 such as bolts, screws, and welding. The lead member 50 is made of a thin plate member that is substantially the same as the heating element 10 and is fixed to the frame 2 through an insulating member 51 such as an insulator and is fixed by a fixing tool 52.

Here, an assembly manufacturing procedure of the electric heater 1 in the present embodiment will be described.
First, the curved portion 23 of the first divided body 21 and the cutout portion 24 of the second divided body 22 are fitted into the fixing member 40 fixed in advance to the frame 2 so as to face each other. Next, the bolt 31 is passed through the through holes 27 of the divided bodies 21 and 22 and is fastened and fixed to the fixing member 40 by the nut 32. And the width direction edge part 13 of the heat generating body 10 is inserted in the notch part 24 through the space | gap 26 toward the longitudinal direction Y. FIG. Thereby, the width direction edge part 13 is latched between the 1st, 2nd division bodies 21 and 22, and the heat generating body 10 is suspended and supported by the insulator 20. FIG.

In the present embodiment, the electric heater 1 is configured by a single heating element 10, but may be configured by a plurality of heating elements 10.
For example, an electric heater 1A according to a modification as shown in FIG. 5 includes a plurality of heating elements 10 arranged in parallel, and the above-described insulator 20 and each heating element on the outermost side in the width direction X of the heating element group. A second insulator 20 </ b> A is provided between 10. The second insulator 20A includes the first divided bodies 21 and 21 and a second divided body 22A sandwiched between the pair of first divided bodies 21 and 21. The first divided body 21 is arranged symmetrically with respect to the second divided body 22A.

  22 A of 2nd division bodies are substantially T-shaped, and the notch parts 24 and 24 are each formed in the both sides | surfaces (each 1st division bodies 21 and 21 side). The second divided body 22A is formed with a through hole 27A that communicates with the through hole 27 of the first divided body 21. The first divided bodies 21 and 21 and the second divided body 22A are fastened and fixed to the fixing member 40 by passing the bolts 31 through the through holes 27 and 27A.

  Here, it is also possible to use the insulator 20 as the second insulator 20A. However, in such a case, since the second divided body 22 located on the outer side in the width direction X with respect to the heating element 10 overlaps between the heating elements 10, the heat capacity of the insulator increases accordingly. Moreover, it is difficult to place adjacent heating elements 10 close to each other. On the other hand, in the second insulator 20A, the second divided body 22A is shared between the two adjacent heating elements 10. Thereby, the second insulator 20A can be formed narrow with respect to the width direction X, and the heat capacity of the second insulator 20A can be suppressed. In addition, the adjacent widthwise end portions 13 of the heating elements 10 can be arranged closer to each other, and the heating elements 10 can be arranged densely in the width direction X. Therefore, the heating surface density with respect to the heating space can be increased, the temperature distribution can be made uniform, and the response of raising and lowering the temperature can be improved.

  In the modification shown in FIG. 5, four heating elements 10 are arranged in parallel, but the number of heating elements 10 is not limited to this. Further, in the modified example of the first embodiment, the heating element 10 is electrically connected in series between the lead members 50, 50, but it is also possible to connect them in parallel.

  Next, another embodiment of the present invention will be described. In the following embodiments, the same members as those in the first embodiment are denoted by the same reference numerals, and different portions from the above embodiments will be mainly described.

  In 2nd embodiment shown to Fig.6 (a), the width direction edge part of a heat generating body and the shape of an insulator differ from the said 1st embodiment. In the electric heater 1A according to the second embodiment, the width direction end portion 13A of the heating element 10A is formed to be oriented downward in the vertical direction Y by the first bent portion 14A.

  The insulator 20B includes a first divided body 21B and a second divided body 22B that form a pair. The first divided body 21B has a plate shape, and an inclined portion 23B is formed at the lower end thereof. The inclined portion 23B is inclined at an acute angle with respect to the vertical direction Z along the heating element 10A. On the other hand, the second divided body 22B is substantially J-shaped, and a protruding portion 25B that protrudes toward the groove portion 24B and the inclined portion 23B is formed on the first divided body 21B side. A gap 26B wider than the thickness of the heating element 10A is formed between the protruding portion 25B and the inclined portion 23B.

  In the present embodiment, the heating element 10A is locked between the first and second divided bodies 21B and 22B by sandwiching the widthwise end portion 13A of the heating element 10A by the inclined portion 23B and the groove 24B. As a result, the inclined portion 23B, the groove portion 24B, and the air gap 26B are combined to restrict movement in the width direction X due to thermal deformation during heat generation / cooling of the heat generating body 10A, and prevent falling off and coming off from the insulator 20. To do.

  Thus, also in the electric heater 1A according to the second embodiment, each of the divided bodies 21B and 22B can be formed narrowly as in the first embodiment, and the heat capacity of the insulator 20B is suppressed. Can do. In addition, by forming the insulator 20B to be narrow, it is possible to reduce the exposed portions of the divided bodies 21B and 22B with respect to the heating space side, to make the temperature distribution uniform, and to improve the temperature rising / falling response. Become.

Here, also in the second embodiment, it is possible to arrange a plurality of heating elements in parallel as in the modified example of the first embodiment.
In the electric heater 1C according to the modified example of the second embodiment, as shown in FIG. 6B, a second insulator 20C is provided between the heating elements 10A arranged in parallel. The second insulator 20C includes the first divided body 21B of the second embodiment described above and a second divided body 22C sandwiched between the pair of first divided bodies 21B and 21B.

  22 C of 2nd division bodies are substantially T-shaped, and the protrusion part 25C which protrudes to the groove part 24C and the inclination part 23B side is formed in the both sides | surfaces (each 1st division body 21B, 21B side). The second divided body 22C is formed with a through hole 27C communicating with the through hole 27B of the first divided body 21B.

  Also in this modified example, as in the modified example of the first embodiment, the second divided body 22C is shared between the adjacent heating elements 10B. Thereby, the insulator 20C can be formed narrow, and the heat capacity of the entire insulator 20C can be suppressed. In addition, it is possible to increase the heating surface density with respect to the heating space, and it is possible to improve the temperature rise / fall response.

  In the third embodiment shown in FIGS. 7 and 8, the configuration of the heating element and the insulator is different from the above embodiments. As shown in FIG. 7A, an electric heater 1D according to the third embodiment includes a heating element 10B, a pair of divided bodies 61 and 61, and a soot tube as an insulator inserted into the pair of divided bodies 61 and 61. And an insulator 60 composed of 62.

  In the heating element 10B, a plurality of substantially circular through holes 17 are formed in the pair of width direction end portions 13B and 13B at an appropriate interval. As shown in FIG. 8, between the pair of width direction end portions 13B, 13B in the heating element 10B is formed so as to form a gentle arc shape (arch shape) in the longitudinal direction Y perpendicular to the slit 11. The lower side (furnace inner side) has a convex shape. When the heating element 10B is softened by heat generation and thermally expanded, the weight of the heating element 10B acts in the vertical direction Z and has a shape like a catenary curve. This shape is mechanically stable, and even when softened, the shape of the heating element 10B is maintained and falling off is prevented.

  As shown in FIG. 8, the heating element 10B is manufactured by forming the slit 11 in the thin plate member 10 ′ and forming the through holes 17 in the pair of end portions 13′13 ′ in the width direction X. . The width direction end portion 13B is formed so that the entire thin plate member 10 ′ is formed in an arc shape along the width direction X, and the end portion 13 ′ is bent inside the arc formed by the thin plate member 10 ′ at the first bent portion 14 ′. Is formed. Here, bending to the inside of the arc means that both width direction end portions 13B and 13B are oriented parallel to each other along the substantially vertical direction Z. With this configuration, even if the heating element is softened by heating, the heating element 10B is vertically supported by the width direction end portions 13B and 13B, and unnecessary stress is not generated in the support portion.

As shown in FIG. 7A, a recess 63 is formed in the lower part of the divided body 61, and a through hole 64 through which the soot tube 62 passes is formed in the recess 63. In addition, a second through hole 65 through which the bolt 31 as the fastener 30 passes is formed in the upper part of the divided body 61. The divided body 61 and the soot tube 62 are made of the same insulating material as in the above embodiments, and electrically insulate the heating element 10B from the frames 2 and 2 ′. The pair of divided bodies 61 and 61 are fastened and fixed to the fixing member 40 by the bolts 31 and the nuts 32 with the concave portions 63 and 63 facing each other. Thereby, the groove | channel 66 which inserts the width direction edge part 13B of the heat generating body 10B is formed toward the perpendicular direction Z. As shown in FIG.

Here, an assembly manufacturing procedure of the electric heater 1D in the present embodiment will be described.
First, the groove portion 66 into which the width direction end portion 13B of the heating element 10B is inserted is formed with the pair of divided bodies 61 and 61 facing each other. The width direction end 13B of the heating element 10B is inserted into the groove 66 from below. After insertion, the tub tube 62 is inserted and connected to the through hole 17 of the heating element 10B and the through holes 64, 64 of the pair of divided bodies 61, 61. These connected members are fitted into a fixing member 40 previously attached to the frame 2, and the divided bodies 61 and 61 are fastened and fixed by the fastener 30. As a result, the width direction end portion 13B is locked to the soot tube 62 in the groove portion 66, and the heating element 10B is suspended from the insulator 60.

  Also in the present embodiment, each divided body 21B, 22B can be formed narrowly as in the above embodiments, and the heat capacity of the insulator 60 can be suppressed. Moreover, by forming it narrowly, the exposed part with respect to the heating space side of each division body 61 and 61 can be reduced, it becomes possible to make temperature distribution uniform and to improve the response of raising / lowering temperature. Further, since the first bent portion 14B is positioned below the insulator 60, one of the divided bodies 61 is supported so as to be covered with the heating space 10B with respect to the heating space S, and the exposed portion of the insulator 60 with respect to the heating space S is supported. Can be further reduced.

Here, also in the third embodiment, it is possible to arrange a plurality of heating elements in parallel as in the modified examples of the above embodiments.
In the electric heater 1E according to the modified example of the third embodiment, as shown in FIG. 7B, a second insulator 60A is provided between the heating elements 10B arranged in parallel. The second insulator 60 </ b> A includes the above-described divided bodies 61 and 61 and a second divided body 67 sandwiched between the pair of divided bodies 61 and 61.

  The second divided body 67 has recesses 68 formed on both side surfaces in the width direction X, respectively. In the recess 68, a through hole 69 a that communicates with the through holes 64, 64 of the respective divided bodies 61, 61 and penetrates the soot tube 62 is formed. Moreover, the 2nd through-hole 69b connected with the 2nd through-holes 65 and 65 of the division bodies 61 and 61 is formed in the upper part.

  The heating element 10B is locked to the second insulator 60A by inserting the soot tube 62 into the through holes 64, 69a of the divided bodies 61, 61 and the second divided body 67 and the through holes 17 of the heating element 10E. The heating elements 10B are arranged in parallel. Also in this modified example, since the second divided body 67 located outside the width direction X is common to the heating element 10B, the second insulator 60A can be configured to be narrow, and the heat capacity of the second insulator 60A can be increased. Can be suppressed. Moreover, the heating surface density with respect to the heating space S can be increased, the temperature distribution can be made uniform, and the temperature rising / falling response can be improved.

  In the fourth embodiment shown in FIGS. 9 and 10, the configurations of the heating element and the insulator are different from those in the above embodiments. As shown in FIG. 9, the electric heater 1F according to the fourth embodiment includes a plurality of heating elements 10C, an integrated insulator 70 to which these heating elements 10C are attached, the insulator 70 fixed, and the frame 2 And a fixing member 40A to be attached.

  The heating element 10 </ b> C is formed in a substantially circular arc shape having a slit 11 in the same manner as in each of the above-described embodiments and being convex downward. Unlike the above embodiments, the width direction end portion 13C of the heating element 10C is not bent. A through hole 17 through which the penetrating member 80 passes is formed in the width direction end portion 13C. The fixing member 40A is formed in a substantially L shape in the longitudinal direction Y view.

  The insulator 70 has a plate shape as a whole, and includes a vertical portion 71 and a horizontal portion 72 that is bent at least in the width direction X from the vertical portion 71. The vertical portion 71 is formed with a through hole 73 through which the previous fastener 30 passes. The horizontal portion 72 is inclined at an acute angle with respect to the vertical direction Z so as to follow the heating element 10 </ b> C, and a second through hole 74 through which the penetrating member 80 passes is formed. Thus, by forming the horizontal portion 72 to which the heating element 10C is attached continuously from the vertical portion 71, the volume of the entire insulator 70 can be reduced, and the heat capacity of the insulator 70 can be suppressed. It becomes possible. Moreover, the lateral portion 72 may be formed so that the width direction end portion 13 </ b> C can be attached, and the lateral portion 72 can be formed narrow with respect to the width direction X. Thereby, the exposure to the heating space S side of the horizontal part 72 can be reduced, a heating surface density can be improved, temperature distribution can be made uniform, and heating efficiency can be improved. For the penetrating member 80, for example, a bolt 81 is used.

Here, attachment of the heating element 10C to the insulator 70 will be described.
The bolt 81 passes through the through hole 74 of the horizontal portion 72 and the through hole 17 of the heating element 10 </ b> C, and the width direction end portion 13 </ b> C is attached to the lower surface 72 a of the horizontal portion 72 by the nut 82. Here, it is also possible to attach to the upper surface 72b of the horizontal part 72 like the heat generating body 10C ′ shown by the alternate long and short dash line in FIG. However, by attaching to the lower surface 72a side of the horizontal portion 72, the heating element 10C can be positioned so as to cover the horizontal portion 72 with respect to the heating space, and the exposed portion of the insulator 70 on the heating surface side can be reduced. it can. Moreover, the adjacent heating elements 10C can be arranged close to each other, and the heating surface density can be improved. Accordingly, the aspect in which the heating element 10C is attached to the lower surface 72a is superior in these respects.

In the present embodiment, the horizontal portion 72 is formed by bending from the vertical portion 71 at an acute angle with respect to the vertical direction Z, but the inclination angle of the horizontal portion 72 is not limited to the above aspect.
For example, the electric heater 1G according to the first modified example of the fourth embodiment shown in FIG. 10A includes an insulator 70A having a lateral portion 72A that is bent at an obtuse angle with respect to the vertical direction Z. A heating element 10D that is gently curved convexly upward in the vertical direction Z is attached to the lateral portion 72A. The electric heater 1H according to the second modified example shown in FIG. 5B includes an insulator 70B having a lateral portion 72B that is bent substantially horizontally. A flat heating element 10E is attached to the horizontal portion 72B.

  Moreover, in the said 4th embodiment, the insulator 70 was each provided in the pair of width direction edge part of each heat generating body, and the heat generating body was arrange | positioned in parallel. However, in addition to an embodiment in which a pair of insulators 70 are provided symmetrically with respect to the vertical direction Z between adjacent heating elements, the second insulator 70C may be used. For example, as shown in FIG. 10C, in the electric heater 1J according to the third modified example, the second insulator 70C includes a vertical portion 71C and a pair of horizontal portions 72C and 72C branched from the vertical portion 71C. . Thereby, since the vertical portion 71C is common between the adjacent heating elements 10C, the insulator 70 can be formed to be narrower, and the surface density can be further improved.

  The electric heater 1K according to the fifth embodiment shown in FIG. 11 is different from the fourth embodiment in that an insulating pin 83 is provided instead of the bolt 81 as the penetrating member 80. Further, unlike the fourth embodiment, the horizontal portion 72D of the insulator 70D is not provided with a through hole.

  The insulating pin 83 is attached through the through hole 42 of the fixing member 40B in the vertical direction Z. The heating element 10C is attached to the horizontal part 72D by placing the end 13C in the width direction on the upper surface 72b of the horizontal part 72D and passing the insulating pin 83 through the through hole 17 of the heating element 10C. Thereby, the movement in the width direction X due to thermal deformation of the heating element is restricted, and the horizontal part 72D prevents the heating element 10C from dropping. Moreover, it is not necessary to form a plurality of through holes corresponding to the through holes 17 of the heating element 10C in the horizontal portion 72D, and the processing of the insulator becomes easy.

  In the sixth embodiment shown in FIG. 12A, the configurations of the insulator and the fixing member are different from those of the above embodiments. The electric heater 1L according to the sixth embodiment includes a plurality of heating elements 10F, an insulator 90, and a fixing member 40D that holds the insulator 90.

  The heating element 10F has the same configuration as that of the third embodiment, but the through hole 17 is not formed in the width direction end portion 13F. The fixing member 40D is formed into a tubular shape by bending a plate-like object such as a stainless steel plate into a substantially square shape, and an opening 43 is formed along the longitudinal direction Y on the side surface 44 on the heating element 10F side. Since the fixing member 40D is formed by bending a plate-like object, the fixing member 40D can be thinned, and the heat capacity of the fixing member 40D can be suppressed. An insulator 90 is fitted into the fixing member 40D in the longitudinal direction Y.

  The insulator 90 includes first and second divided bodies 91 and 92 that form a pair. The first divided body 91 is substantially L-shaped, and includes a horizontal portion 93 along the width direction X and a vertical portion 94 that continues from the horizontal portion 93 downward in the vertical direction Z. At the lower end of the vertical portion 94, an inclined surface 94a is formed along the heating element 10F.

  The second divided body 92 is substantially L-shaped, and includes a vertical portion 95 along the vertical direction Z and a horizontal portion 96 continuous in the horizontal direction from the vertical portion 95, and is supported by the lower portion 45 of the fixing member 40C. Yes. On the upper surface of the horizontal portion 96, an inclined surface 96a is formed along the heating element 10F.

  The first and second divided bodies 91 and 92 are fitted and fixed inside the fixing member 40D, and the groove 97 into which the width direction end portion 13F is inserted by the first and second divided bodies 91 and 92 is formed in the vertical direction Z. It is formed. One end of the groove 97 is formed with a gap 97 a formed by the inclined surfaces 94 a and 96 a and communicates with the opening 43.

  Thus, since the insulator 90 is comprised by the 1st, 2nd division bodies 91 and 92, the groove part 97 holding the width direction edge part 13F of the heat generating body 10F can be formed easily. In addition, since the first and second divided bodies 91 and 92 are fitted and fixed to the tubular fixing member 40D, it is sufficient that each of the divided bodies 91 and 92 has a thickness that can secure at least insulation. The entire 90 can be formed narrow in the width direction X. Thereby, the heat capacity of the insulator 90 can be suppressed. In addition, since each of the divided bodies 91 and 92 of the insulator 90 is formed thin and is fitted into and fixed to the tubular fixing member 40D, a portion exposed to the heating space S side of the insulator 90 can be reduced, and heating is performed. The surface density can be improved. Therefore, the temperature distribution can be made uniform and the response to temperature rise and fall can be improved. Furthermore, the insulator 90 may be inserted in the longitudinal direction Y, and the fixing operation can be easily performed.

  Here, the width direction end portion 13F is inserted into the groove portion 97 and held. The first bent portion 14F of the width direction end portion 13F is sandwiched between the inclined surfaces 94a and 96a of the first and second divided bodies 91 and 92. As a result, the inclined surfaces 94a and 96a and the groove 97 combine to restrict the movement of the heat generating element 10F in the width direction X due to thermal deformation during heat generation / cooling, and prevent the falling off and removal from the insulator 90. To do.

The electric heater 1M according to the seventh embodiment shown in FIG. 12B is different from the sixth embodiment in the shapes of the heating element 10G, the insulator 90A, and the fixing member 40E.
The heating element 10G is gently curved in a convex shape downward in the vertical direction Z. The width direction end portion 13G is formed by bending the end portion of the heating element 10G in a semicircular shape toward the heating element 10G at the first bending portion 14G so as to be oriented in the width direction X. The fixing member 40E has an opening 43 formed in the lower surface 45 along the longitudinal direction Y.

  The insulator 90A includes a pair of first and second divided bodies 91A and 92A. The first divided body 91A is substantially L-shaped, and includes a horizontal portion 93A along the width direction X and a vertical portion 94A continuous from the horizontal portion 93A in the vertical direction Z, and is supported by the lower portion 45 of the fixing member 40E. ing. One end of the horizontal portion 93A is formed with a curved surface 93Aa along the first bent portion 14G of the heating element 10F.

  The second divided body 92A is substantially L-shaped, and includes a vertical portion 95A along the vertical direction Z and a horizontal portion 96A continuous from the vertical portion 95A in the horizontal direction X. The first and second divided bodies 91A and 92A are fitted and fixed inside the fixing member 40E, and the groove 97 into which the width direction end portion 13G is inserted by the first and second divided bodies 91A and 92A is formed in the horizontal direction X. It is formed. One end of the groove 97 is formed with a gap 97a formed by the curved surface 93Aa and the vertical portion 95A, and communicates with the opening 43.

  Also in the present embodiment, as in the sixth embodiment, the groove 97 that holds the width direction end portion 13G of the heating element 10G can be easily formed, and the entire insulator 90A can be formed narrow. . Thereby, the heat capacity of the insulator 90A can be suppressed, and the response can be improved. Further, in the present embodiment, since the width direction end portion 13G is oriented in the width direction X, the first divided body 91A is positioned above the heating element 10G. Therefore, the first divided body 91A is not exposed to the heating space S, and the exposed area of the insulator 90A can be further reduced.

  Here, the width direction end portion 13G is inserted into the groove portion 97 and held. The first bent portion 14G of the width direction end portion 13G is sandwiched between the curved surface 93Aa and the vertical portion 95A of the first divided body 91A. As a result, the curved surface 93Aa, the vertical portion 95A, and the groove portion 97A combine to restrict movement in the width direction X due to thermal deformation during heat generation / cooling of the heating element 10G and to prevent the insulator 90A from falling off or coming off. To prevent.

Finally, the possibilities of yet another embodiment of the present invention will be described.
In said 1st, 2nd embodiment, the shape of the width direction edge part of a heat generating body is not restricted to the said shape. For example, as shown in FIGS. 13A to 13D, a bent portion 16 ′ may be formed by bending the tip end portion of the width direction end portion 13 substantially at a right angle.

  Further, the bending direction of the bent portion 16 ′ may be any direction as long as it is a horizontal direction along the width direction X. However, as shown in FIGS. 13B and 13C, by aligning the bent portion 16 ′ toward the heating element 10, the one divided body is not exposed to the heating space S, and the insulator The exposed part with respect to 20 heating space S can be reduced. Thereby, the response of raising / lowering temperature can further be improved. Furthermore, in the aspect which arrange | positions the heat generating body 10 parallelly as shown to the same figure (c), the adjacent heat generating body 10 can be brought closer. In addition, the exposed portion of the second divided body 22c to the heating space S can be reduced, and the heating surface density can be further improved.

  In the first and second embodiments, the shape of the insulator is not limited to the above shape. For example, as shown in FIGS. 13A and 13D, the first divided body 21a may be bent with a substantially constant thickness. Thereby, the heat capacity of the first divided body 21a can be further reduced.

  Further, in the first and second embodiments, the heating element is formed so as to be curved downwardly. However, it can also be applied to a heating element that is convex upward or a heating element that is formed flat. In the case of the second embodiment, the inclined portions 23D and 23E may be inclined with respect to the vertical direction Z at an obtuse angle or perpendicular according to the shape of the heating element.

  In the third embodiment, the heating element 10 </ b> B is suspended and supported between the pair of divided bodies 61 and 61 by the soot tube 62 as an insulator. However, instead of the soot tube 62, the groove portion 66 may be filled and cured with an adhesive, and the heating element 10B may be suspended and supported between the pair of split bodies 61 and 61. Moreover, in the said 4th-7th embodiment, the aspect of the parallel arrangement | positioning of a heat generating body was demonstrated to the example. However, it is possible to configure an electric heater with a single heating element by providing an insulator at each of the pair of widthwise ends of the heating element.

  In the sixth and seventh embodiments, the insulator 90 is constituted by the first and second divided bodies 91 and 92. However, the present invention is not limited to this aspect, and the insulator 90 may be formed as a single body. However, in such a case, it is necessary to form a thick wall in order to form a groove into which the end of the heating element is inserted, and the sixth and seventh embodiments are superior in terms of reducing the heat capacity.

  The electric heater according to the present invention can be used as a heater for heat treatment of an object to be heated such as glass, ceramic, or metal. In addition, this electric heater can be installed as a heating unit, for example, in a furnace and used as a heating device. In addition, the electric heater, the electric heater manufacturing method, and the heating apparatus can be applied to, for example, a semiconductor manufacturing apparatus for a semiconductor wafer, a substrate processing apparatus for heating a glass substrate, and the like.

1, 1A to 1M, 1 ': Electric heater, 2, 2': Frame (base material), 3: Thermal insulation member, 10, 10A to 10M: Heating element, 10 ': Thin plate member, 11: Slit, 12: Current Path, 12x, 12y: current path end, 13, 13A-13M: width direction end, 13 ': end, 14, 14A-14M, 14': first bent portion, 15, 15 ': second bent Part, 16, 16 ′: bent part, 17: through hole, 20, 20A to 20C, 20a to 20d: insulator, 21, 21A, 21B, 21a, 21b: first divided body, 22, 22A to 22C, 22a to 22d: second divided body, 23: curved portion, 23B, 23C: inclined portion, 24: notched portion, 24A to 24C: groove portion, 25, 25A to 25C: protruding portion, 26, 26A to 26C: gap, 27 , 27A to 27C: through hole, 30: fastener (bolt) 31: bolt, 32: nut, 40, 40A to 40E: fixing member, 41: mounting means, 42: through hole, 43: opening, 44: side surface, 45: lower surface, 50: lead member, 51: insulating member, 52: Fixing tool, 60, 60A: Insulator, 61: Divided body (insulator), 62: Fence pipe, 63: Recessed part, 64: Through hole, 65: Second through hole, 66: Groove part, 67: Second divided body , 68: recessed portion, 69a: through hole, 69b: second through hole, 70, 70A to 70D: insulator, 71, 71C: vertical portion, 72, 72A to 72D: horizontal portion, 72a: lower surface, 72b: upper surface, 73: through hole, 74: second through hole, 80: penetrating member, 81: bolt, 82: nut, 90, 90A: insulator, 91, 91A: first divided body, 92, 92A: second divided body, 93, 93A: horizontal portion, 93Aa: curved surface, 94, 94A: lead Portion, 94a: inclined surface, 95, 95A: vertical portion, 96, 96A: horizontal portion, 96a: inclined surface, 97: groove portion, 97a: one end (gap), 100, 100A to 100C: heating unit, 101: support member , S: heating space, X: width direction, Y: longitudinal direction, Z: vertical direction

Claims (6)

A pair of widthwise end portions located in the width direction along the slit of the heating element, each including a plate-like heating element in which a current path is formed by forming a slit, and an insulator that supports the heating element. An electric heater supported by the insulator,
The heating element is supported so that the width direction is along the horizontal direction,
A fixing member fixed to the substrate;
The fixing member is formed into a tubular shape by bending a plate-like body and has an opening partly opened along the longitudinal direction thereof.
The insulator located at each width direction end consists of a pair of divided bodies having a horizontal portion along the horizontal direction and a vertical portion continuous in the vertical direction from the horizontal portion,
The pair of divided bodies are fitted and fixed to the fixing member and form a groove in the fixing member;
One end of the groove communicates with the opening,
An electric heater in which the widthwise end portion is inserted into the groove portion in the longitudinal direction, and the first bent portion is sandwiched between the horizontal portion of one divided body and the vertical portion of the other divided body. The opening portion opens at least in the width direction on a side surface of the fixing member, and the groove portion is formed in the vertical direction, and one end of the groove portion is communicated with the opening portion in the horizontal direction. The electric heater according to claim 1, wherein an end portion is bent so that the first bent portion is oriented in the vertical direction. The opening portion opens at least in the vertical direction on the lower surface of the fixing member, and the groove portion is formed in the horizontal direction, and one end of the groove portion is communicated with the opening portion in the vertical direction. The electric heater according to claim 1, wherein an end portion is bent toward the heat generating body so as to be oriented in the horizontal direction, and a part of the insulator is positioned between the heat generating body and the width direction end portion. 4. The heating element according to claim 1, wherein at least two sets of the heating elements are provided, a pair of the insulators are arranged so as to be line-symmetric with respect to the vertical direction, and the heating elements are arranged in parallel in the width direction. Electric heater. A pair of widthwise end portions located in the width direction along the slit of the heating element, each including a plate-like heating element in which a current path is formed by forming a slit, and an insulator that supports the heating element. A method of manufacturing an electric heater supported by the insulator,
The heating element is supported so that the width direction is along the horizontal direction,
A fixing member fixed to the substrate;
The fixing member is formed into a tubular shape by bending a plate-like body and has an opening partly opened along the longitudinal direction thereof.
The insulator located at each width direction end consists of a pair of divided bodies having a horizontal portion along the horizontal direction and a vertical portion continuous in the vertical direction from the horizontal portion,
The pair of divided bodies are fitted and fixed to the fixing member and form a groove in the fixing member;
One end of the groove communicates with the opening,
A method of manufacturing an electric heater, wherein the widthwise end portion is inserted into the groove portion in the longitudinal direction, and the first bent portion is sandwiched between the horizontal portion of one divided body and the vertical portion of the other divided body. . The heating apparatus provided with the electric heater in any one of Claims 1-4.

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