JP5718131B2 - Heater device - Google Patents

Description

  The present invention relates to a heater device for drying or heat-treating a long substrate.

  Conventionally, a heater device using far-infrared rays has been proposed in the case of drying or heat-treating a long substrate (for example, see Patent Document 1).

  In this heater device, a radiation surface for radiating far infrared rays is formed on the lower surface of an infrared radiator having a rectangular cross section, and a plurality of infrared radiators are arranged above a traveling substrate. And in order to heat this infrared radiator, the oil or vapor | steam is supplied in the inside.

JP-A-7-69447

  The infrared radiators are arranged along the running path of the elongated base material. When the running path is inclined with respect to the horizontal plane, each infrared radiator is inclined and installed. There is a need to. When an infrared radiator having a rectangular cross section is installed at an angle, air may accumulate inside the infrared radiator. In this case, the accumulated air reacts with a heat medium such as oil or steam in a high temperature state, and the heat medium is oxidized, and there is a problem that the inside is likely to deteriorate.

  In addition, if there is air even in a part of the inside of the infrared radiator, there is a problem that unevenness occurs in the temperature distribution of the infrared radiator.

  Therefore, in view of the above problems, the present invention provides a heater device in which air does not accumulate in the heater body even when the heater body through which the heat medium flows is attached at an inclination.

The present invention provides a heater that dries an upper surface of a long base material that travels along the travel path, the travel path having an inclination angle θ (where 0 <= θ <90 °) with respect to a horizontal plane. An apparatus, a cylindrical heater body having a semicircular cross section with a flat bottom surface, a radiation surface for radiating far-infrared rays provided on the bottom surface of the heater body, and a heat medium opened at one end surface of the heater body A plurality of heater portions having an inlet of the heater and an outlet of the heat medium opened on the other end surface of the heater body are arranged along the travel path, and the inlet and the outlet are the one. relative to the position provided on the end face and the other end face, extending normal from the center of the lower surface, said inlet and said outlet to said theta ° rotational position upward is provided to the normal line, said flow The inlet and the outlet are circular, and the inlet and the outlet are Each having a circular cross section, to which the connection pipes through which the heat medium flows are respectively connected, the apex of the heater body having a semicircular cross section, the uppermost position of the inner circumference of the circular inlet, and the circular outlet Each of the heater devices is arranged such that the uppermost position on the inner circumference and the uppermost position on the inner circumference of the connection pipe having a circular cross section are in a straight line .

  According to the present invention, air does not accumulate inside the heater body.

1 is an overall view of a heat treatment apparatus showing an embodiment of the present invention. It is the figure of the state which looked at the inside of the heat processing chamber from the lower surface. It is a longitudinal cross-sectional view of a heater main body. It is the sectional view on the AA line in FIG.

  Hereinafter, the heat processing apparatus 10 which has the heater apparatus of one Embodiment of this invention is demonstrated based on FIGS.

  A coating liquid containing an organic solvent is coated on the surface of the long base 1 such as a metal foil or a ceramic sheet used for an electrode for a lithium ion battery. Therefore, in drying or heat treatment of these base materials 1, it is necessary to promote the divergence of the organic solvent from the inside of the coating part and promote the evaporation of the coating liquid from the surface of the coating part. is there. Therefore, the heat treatment apparatus 10 of the present embodiment is provided with a first heater device 12 for far infrared rays and a second heater device 14 for blowing and drying hot air inside the heat treatment chamber 12.

  As described above, in the case of an electrode for a lithium ion battery, the long base 1 is a metal foil, a metal foil having a hole, a mesh-like metal foil, or the like. In the case of a ceramic sheet, A film made of synthetic resin.

(1) Configuration of Heat Treatment Apparatus 10 First, the configuration of the heat treatment apparatus 10 will be described with reference to FIGS.

  The heat treatment chamber 16 of the heat treatment apparatus 10 has a rectangular shape and is attached with an inclination of θ ° (where 0 ° <= θ <90 ° and θ = 30 ° in the drawing) with respect to the horizontal plane. A carry-in port 18 for the substrate 1 is opened on the front surface of the heat treatment chamber 16, and a carry-out port 20 for the substrate 1 is opened on the rear surface. The travel path of the base material 1 is inclined by θ ° as in the heat treatment chamber 16, and the base material 1 travels in the front-rear direction along the travel path.

  On the lower surface of the traveling path of the heat treatment chamber 16, three traveling rollers 22 for allowing the base material 1 to travel stably are provided at predetermined intervals.

  Three upper nozzles 24 for blowing hot air at predetermined intervals are provided above the traveling path. In addition, a lower nozzle 26 that blows hot air obliquely downward with respect to the substrate 1 is provided below the traveling path and between the traveling rollers 22. The upper nozzle 24 and the lower nozzle 26 constitute a second heater device 14 that blows hot air.

  Two sets of heater units 28 for drying the upper surface of the substrate 1 by far infrared rays are arranged above the traveling path and between the upper nozzles 24 with a predetermined interval as a set. These heater portions 28 constitute the first heater device 12 for far infrared rays.

(2) Structure of the upper nozzle 24 The structure of the upper nozzle 24 will be described with reference to FIGS.

  The upper nozzle 24 includes an upper base portion 30 formed of a rectangular box and an upper nozzle portion 32 provided on the lower surface of the upper base portion 30, and a plurality of punching holes 34 are formed on the lower surface of the upper nozzle portion 32. It is open. An opening is formed between the upper surface of the upper nozzle portion 32 and the upper base portion 30, and hot air supplied to the upper base portion 30 spreads left and right inside the upper base portion 30, and then is supplied to the upper nozzle portion 32 and downward from the punching hole 34. Is blown out.

(3) Configuration of Lower Nozzle 26 Next, the structure of the lower nozzle 26 will be described with reference to FIG.

  The lower nozzle 26 includes a lower base portion 36 and a lower nozzle portion 38 provided above the lower base portion 36. In the front part of the upper surface of the lower nozzle part 38, a slit part 40 opened obliquely upward is provided. Hot air is supplied to the lower base portion 36, spreads left and right inside the lower base portion 36, and then supplied from the lower base portion 36 to the lower nozzle portion 38 through the opening. The hot air supplied to the lower nozzle portion 38 is blown obliquely upward from the slit portion 40.

(4) Configuration of Heater 28 Next, the configuration of the heater 28 will be described with reference to FIGS.

  The heater part 28 has a heater body 42 which is a stainless steel semi-circular cylindrical body. The lower surface of the heater main body 42 is flat, and ceramic is sprayed on the lower surface to form a radiation surface 44 for radiating far infrared rays. An inflow port 48 into which oil heated to 100 ° C. to 600 ° C. flows is opened at one end face 46 having a semicircular cross section of the heater body 42. This inflow port 48 is circular, and as shown in FIG. 3, the normal line extends from the center of the lower surface of the heater body 42, and the circular inflow port 48 is at a position inclined by θ ° above the normal line. The center O is located. That is, the inflow port 48 is located at the apex which is the uppermost position of the heater body 42 having a semicircular cross section. In particular, as shown in FIG. 4, the apex which is the top position of the heater body 42 having a semicircular cross section, the top position of the inner periphery of the circular inlet 48, and the inner periphery of the connection pipe 54 having a circular section. It is good to arrange each so that the top position of each is in a straight line. The heated oil outlet 50 is provided on the other end surface 52 of the heater body 42 having a semicircular cross section. Similarly to the inflow port 48, the position where the outflow port 50 is provided extends the normal from the center of the lower surface, and the center O of the circular outflow port 50 is located at a position rotated upward by θ °. Also in this case, as shown in FIG. 4, the apex which is the top position of the heater body 42 having a semicircular cross section, the top position on the inner periphery of the circular outlet 50, and the connection pipe 54 having a circular cross section. It is preferable to arrange each so that the uppermost position of the inner circumference is in a straight line.

  A connection pipe 54 having a circular cross section for flowing oil is connected to the inlet 48 of the heater body 42. A connecting pipe 54 having a circular cross section is also connected to the outlet 50. As shown in FIG. 2, the connection pipe 54 and the connection pipe 54 are connected in order so that oil flows to the next heater body 42 arranged side by side.

(5) Operation state of heat treatment chamber 16 Next, the operation state of the heat treatment chamber 16 will be described.

  The long base 1 is carried in from the carry-in port 18 of the heat treatment chamber 16. The inclination of the travel path of the base material 1 is θ ° with respect to the horizontal plane. The base material 1 carried into the heat treatment chamber 16 travels in the front-rear direction along the travel path while being inclined by θ °. In this case, the base material 1 stably travels on the travel path by the travel roller 22.

  The upper nozzle 24 heats the upper surface of the traveling base material 1 by blowing hot air from directly above to promote the evaporation of the coating liquid from the surface of the coating portion of the base material 1 and dry it.

  The lower nozzle 26 blows hot air obliquely on the lower surface of the base material 1 to heat and dry the lower surface of the base material 1 and to make the base material 1 run stably.

  Heated oil flows into the heater sections 28 arranged in a plurality, and far infrared rays are radiated from the radiation surface 44 by the heat of the oil, and the coating of the upper surface of the substrate 1 is performed by the emitted far infrared rays. Promote organic solvent divergence from the inside of the unit.

  Thereafter, the base material 1 is carried out from the carry-out port 20 of the heat treatment chamber 16.

(6) Effect According to the present embodiment, the upper surface and the lower surface of the substrate 1 are heat-treated, and the coated part is dried. In this case, the coating portion of the substrate 1 is heated by hot air from the upper nozzle 24 and the lower nozzle 26. It is heated from the surface and dried. Moreover, the organic solvent of the coating part of the upper surface of the base material 1 can be diffused from the inside with the heater part 28. FIG.

  Further, since the heater portion 28 has a flat structure on the side facing the base material 1 and has a semicircular cross-sectional shape on the opposite side, when the heater body 42 is manufactured, the inlet 48 and the outlet 50 are provided. It can be easily manufactured simply by opening it according to the inclination of the travel path. That is, a commercially available circular stainless steel pipe is formed by drawing to produce a cylindrical heater body 42 combining a flat surface and a semicircle, and the heater body 42 is aligned with the width direction of the heat treatment chamber 16. The inlet 48 and the outlet 50 may be opened so as to be cut to a predetermined length and match the inclination angle.

  Moreover, since the side facing the base material 1 is the flat radiation surface 44, far infrared rays can be efficiently radiated to the base material 1, and the drying speed can be increased.

  Further, since the air inside the heater main body 42 flows out of the heater main body 42 from the outlet 50 provided at the top of the semicircular shape, no air remains inside the heater main body 42 and heated oil and air Less time for oil contact, less oil oxidation, and longer oil life. That is, the inflow port 48 and the outflow port 50 have a semicircular heater body 42 that is inclined at θ ° and opens at the apex thereof, so that even if air flows in from the inflow port 48 together with oil, the heater Since it flows through the apex portion of the main body 42 and is discharged from the outlet 50 as it is, air does not stay inside the heater main body 42. In particular, as shown in FIG. 4, the top of the heater body 42 having a semicircular cross section, the top position of the inner periphery of the circular inlet 48, and the inner periphery of the circular outlet 50. When the uppermost position and the uppermost position of the inner circumference of the connection pipe 54 having a circular cross section are arranged in a straight line, air easily passes through the heater main body 42 together with oil, so that the inside of the heater main body 42 Will not stay.

  Further, since the heater main body 42 has a cross-sectional radius, it is economical because the amount of oil filled in the heater main body 42 can be reduced as compared with a rectangular cross-section infrared radiator.

  Moreover, since the heater main body 42 has a semicircular cross section, the surface area is reduced, unnecessary heat radiation is reduced, and energy is saved.

(7) Modification Example In the above embodiment, the heater device 14 that blows hot air is provided with the upper nozzle 24 and the lower nozzle 26, but the configurations of the upper nozzle 24 and the lower nozzle 26 are nozzles having other structures. There may be. For example, the upper nozzle 24 and the lower nozzle 26 may be provided with two parallel slit-shaped air outlets, and hot air may be blown directly below and directly above the air outlets.

  Further, only the heater device 12 may be provided without providing the upper nozzle 24 and the lower nozzle 26.

  In the above embodiment, the inclination angle θ = 30 °. However, the inclination angle θ is not limited to 30 °, and may be 0 ° <= θ <90 °. For example, θ = 0 ° (horizontal state), It may be 1.5 ° or 12 °.

  Although one embodiment of the present invention has been described above, this embodiment is presented as an example and is not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the spirit of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

DESCRIPTION OF SYMBOLS 10 ... Heat processing apparatus, 12 ... Heater apparatus, 16 ... Heat processing chamber, 42 ... Heater main body, 44 ... Radiation surface, 46 ... One end surface, 48 ... Inlet, 50 ... Outlet, 52 ... Other end, 54 ... Connection pipe

Claims (3)

A heater device that dries an upper surface of a long base material that travels along the traveling path, the traveling path having an inclination angle θ (where 0 <= θ <90 °) with respect to a horizontal plane. ,
A cylindrical heater body with a semicircular cross section with a flat bottom surface;
A radiation surface for radiating far-infrared rays provided on the lower surface of the heater body;
An inlet of a heat medium opened at one end surface of the heater body;
An outlet of the heat medium that opens to the other end surface of the heater body;
A plurality of heater parts having a
With respect to the positions where the inlet and the outlet are provided on the one end face and the other end face, a normal line is extended from the center of the lower surface, and the inlet is located at a position rotated by θ ° above the normal line. And the outlet is provided ,
The inlet and the outlet are circular,
The inflow port and the outflow port are circular in cross section and connected to connection pipes through which the heat medium flows, respectively.
The apex of the heater body having a semicircular cross section, the uppermost position of the inner periphery of the circular inlet, the uppermost position of the inner periphery of the circular outlet, and the inner periphery of the connection pipe having a circular section. Each is arranged so that the top position is in a straight line,
A heater device characterized by that. The heat medium is an oil of 100 ° C. to 600 ° C.,
The heater device according to claim 1. Ceramic is sprayed on the lower surface of the heater body to form the radiation surface.
The heater device according to claim 1 or 2 , wherein

Images