JP5704629B2 - Proportional poppet type two-stage high-speed solenoid valve with vibration absorber - Google Patents

Description

  The present invention relates to a proportional poppet type two-stage high-speed solenoid valve equipped with a vibration absorber that operates a poppet with a pilot valve to supply a working fluid to an actuator, and is generated while the solenoid valve is being driven. It is intended to effectively reduce unavoidable noise, poppet wear, working fluid pulsation, internal leakage, and the like.

  Conventionally, oil such as mineral oil has been used as a working fluid (pressure medium) for operating a drive system. However, in recent years, demands and regulations for system safety and environmental protection tend to be stricter. In order to avoid dangers such as environmental pollution and fire due to oil leakage, development of a hydraulic system using water as a working fluid is desired.

  Since water has significantly different physical properties from mineral oil, it contains many problems to be solved regarding the performance and durability of the equipment, but with the latest material technology, processing technology, design, etc., hydraulic pumps, hydraulic actuators, It is considered that it can be applied to water pressure equipment such as a water pressure servo valve, and efforts to put the water pressure system into practical use are being actively promoted.

  As a solenoid valve that uses oil as a working fluid, a valve having a structure in which a balance piston is arranged to reduce power is known. Such a structure is a two-way hydraulic solenoid valve having a P port connected to the supply side route and an A port connected to the supply side route, and has an advantage that it can be operated at a high speed and has very little internal leakage. Widely used in hydraulic system control.

  By the way, when the conventional solenoid valve is applied to a hydraulic system using water as a working fluid, it corresponds from the A port when the supply pressure exceeds a certain value (about 2 MPa) even though the valve body is in the closed position. There was an inevitable problem that a large amount of water leaked out.

  This is probably because the balance piston does not have an O-ring as a seal member, and water has a lower viscosity than oil. In addition to avoidance, it is essential to consider problems such as high-speed operability, rust, lubrication, and cavitation erosion, and it is difficult to use conventional solenoid valves for water pressure. there were.

  As a prior art regarding this point, a first space region and a second space region are provided in the body of the electromagnetic valve, respectively, and a main valve (poppet) elastically supported via a spring is provided in the first space region. An auxiliary valve (ball valve) is arranged in the second space area, and the passage of the valve seat is opened and closed by the operation of the auxiliary valve (PWM control), thereby following the pressure change in the first space area There has been proposed a two-stage solenoid valve having a structure in which the working fluid is supplied to the actuator by opening and closing the valve seat of the main valve (see, for example, Patent Document 1).

  The above-mentioned two-stage solenoid valve has the advantage that there is no internal leakage even when water is used as the working fluid, and it can be operated at high speed, and has the possibility of easily constructing a hydraulic system. However, this type of solenoid valve is not only unavoidable that its rear end collides with the back surface of the valve seat of the auxiliary valve and generates noise when the main valve reciprocates. In addition, there was a problem that it was difficult to avoid the pulsation of the working fluid, and there was still room for improvement.

JP 2003-156170 A

  The problem of the present invention is that even when water is used as a working fluid, there is no internal leakage, and high speed operation and power saving are possible, while noise, valve wear, and pulsation of the working fluid are reduced. A proportional poppet type two-stage high-speed solenoid valve having a vibration absorber that can be realized is proposed.

The present invention is a two-stage solenoid valve that controls the opening and closing of a path leading to an actuator by operating a poppet disposed in a body by driving a pilot valve with a drive system comprising a combination of a solenoid, a core and a yoke. And
Within said body, a first spatial region which joins the working fluid body feed path leading to the working fluid supply path and the actuator, and a second spatial region having a bypass path leading to the working fluid feed path Provide partition walls to form each,
A valve seat having a feeding port for feeding working fluid toward the actuator in the first space region, a supply port for the working fluid, having one end connected to the valve seat and the other end being the partition wall And a poppet that is supported so as to be reciprocally movable through an elastic member in the sleeve and closes the feeding port of the valve seat in an initial posture,
In the second space region, a pilot valve elastically supported via a spring and driven by the drive system is disposed,
A narrow-diameter inlet-side passage connected to the first space region, a narrow-diameter outlet-side passage connected to the second space region and opened by driving of the pilot valve, and the inlet-side passage. And a gap portion that is connected to each of the outlet passages and forms a space region with an enlarged volume between them,
The poppet has an open end at its front end and rear end, and the flow of the working fluid is induced by driving the pilot valve so that the pressure balance at the front end and rear end of the poppet is broken and the poppet is placed in the valve seat. Forming at least one trunk portion through-path (control throttle) that separates the first space region and the working fluid feed path from each other,
The open end provided at the rear end of the poppet is a proportional poppet type two-stage high-speed solenoid valve provided with a vibration absorber formed on the side wall of the poppet and having a square shape, A vibration absorber for reducing pressure vibration is configured by the inlet-side passage (throttle), the outlet-side passage (throttle), and the gap.

  On the outer surface of the body part of the poppet, at least one annular groove (labyrinth groove) that goes around the body part can be provided.

  A valve having a feeding port for feeding the working fluid toward the actuator in the first space area, wherein the body of the solenoid valve is divided into a first space area and a second space area by a partition wall. A seat, a sleeve having a supply port for the working fluid and having one end connected to the valve seat and the other end connected to the partition wall, and supported in an initial posture in a reciprocating manner in the sleeve via an elastic member A poppet that closes the feed opening of the valve seat is disposed, and a pilot valve that is elastically supported via a spring and driven by the drive system is disposed in the second space region and the second space region. And the working fluid feed path are connected via a bypass path, so that even if water is used as the working fluid, there is no internal leakage and it is possible to operate at high speed. The construction of pressure systems becomes easy.

  Since water can be applied as the working fluid, it is superior in fire resistance and heat resistance unlike electromagnetic valves driven by electric or hydraulic drive, and it is possible to effectively avoid the environmental pollution that is especially a concern in hydraulic drive type. It can be widely applied not only to the food processing industry, disaster prevention industry, and semiconductor industry, but also to industries that handle agricultural machinery and underwater machinery.

  The partition wall is provided with an entrance side passage (aperture), an exit side passage (aperture), and an air gap portion connected to these passages to form a space region with an enlarged volume between them to constitute a vibration absorber. Even if the poppet functioning as a main valve is activated by the above, the pressure vibration in the control chamber (the space formed on the rear end side of the poppet in the first space region) is attenuated, so that the poppet is displaced gently (stroke end) As a result, depending on the driving conditions, the collision at the stroke end and the tip can be avoided. As a result, the operating noise can be reduced, the wear can be reduced, and the pulsation of the working fluid can be avoided. Becomes smaller.

  In addition, by providing a passage (body passage path) that functions as a control throttle inside the poppet, it becomes possible to reduce the gap (sliding gap) formed between the outer peripheral surface of the poppet and the sleeve, The leakage of the working fluid from the gap is reduced, and accurate flow control can be performed.

It is the figure which showed typically the embodiment of the proportional poppet type two-stage high-speed solenoid valve provided with the vibration absorber according to this invention about the cross section. It is the figure which expanded and showed the principal part of the high-speed solenoid valve shown in FIG. It is explanatory drawing of the operating condition of the high-speed solenoid valve according to this invention. The present invention is an external perspective view of a poppet suitable for use in the present invention. It is the figure which showed typically the hydraulic circuit which uses the high-speed solenoid valve according to this invention. It is the graph which showed the result of having investigated the operation delay characteristic of a pilot valve. 3 is a graph showing the relationship between duty and pilot flow rate. It is the graph which showed the result of investigating the relationship between a duty and a main flow rate (flow rate of a poppet). 4 is a graph showing the flow variation of the poppet of the high speed solenoid valve according to the present invention. It is the graph which showed the result of having investigated the leakage condition of the working fluid of the high-speed solenoid valve according to this invention. It is the graph which measured the poppet displacement at the time of operating the high-speed solenoid valve according to this invention. It is the graph which measured the change of the average flow volume at the time of operating the high-speed solenoid valve according to this invention. (A) (b) is the figure which showed the suitable poppet applied to this invention, (a) is sectional drawing, (b) is an external appearance perspective view.

Hereinafter, the present invention will be described more specifically with reference to the drawings.
FIG. 1 schematically shows, in section, an embodiment of a proportional poppet type two-stage high-speed solenoid valve equipped with a vibration absorber according to the present invention.

  In the figure, 1 is the body of the solenoid valve. The body 1 is provided with a space for incorporating a poppet that functions as a pilot valve and a main valve, which will be described later.

Also, 2 is disposed in the body 1, the space within the body 1, a first spatial region K _1, a partition wall for dividing the second spatial region K _2. The partition wall 2 is fitted with a wall body 2a having a recess opened downward, and a seal member such as an O-ring is fitted to the lower surface of the wall body 2a so that the recess is sealed inside the partition wall 2. It is comprised from the cover body 2c which forms the space | gap part 2b. And at the center of the lid member 2c, a small-diameter entry side passage leading to the first space region K ₁ (stop) 2c ₁ is formed in the center portion of the block 2a, the second spatial region K It said input-side passage 2c ₁ outlet side passage 2a ₁ of small diameter leading to ₂ have been formed and the exit-side passages 2a ₁ are respectively connected to the void portion 2b. Here, the entrance side passage 2c ₁ , the exit side passage 2a ₁ , and the gap 2b connect the first space region K ₁ and the second space region K ₂ and form a conduction path through which the working fluid flows. This conduction path forms a spatial region in which the volume (volume) of the part is expanded by the gap 2b, and vibration is absorbed by the entrance side passage 2c ₁ , the exit side passage 2a ₁ and the gap 2b. Configure the vessel.

3 is a valve seat disposed in the first space region K _1. A seal member such as an O-ring is disposed between the valve seat 3 and the inner wall surface of the body 1 so as to maintain a liquid-tight state. A supply port 3a is provided. 4 is a sleeve disposed in a first spatial region K _1. This sleeve 4 has a working fluid supply port 4 a, and is composed of a cylindrical body having one end connected to the valve seat 3 and the other end connected to the partition wall 2.

  Reference numeral 5 denotes a poppet (main valve) disposed in the sleeve 4. The poppet 5 has a cylindrical body portion 5a having a diameter that forms a very small gap with the inner wall of the sleeve 4 (a gap that prevents the working fluid from leaking and affecting the controllability of the poppet 5). And a conical valve portion 5b which is provided at the front end of the body portion 5a and directly contacts the feed port 3a of the valve seat 3 and closes the feed port 3a. And the space surrounded by the partition wall 2 is configured as a control chamber M, and the pressure receiving areas of the front end (lower side in the figure) and the rear end (upper side in the figure) of the poppet 5 are substantially equal or the rear end. Is set to be slightly larger.

The body part 5a of the poppet 5 is provided with a body part through-path 5c that penetrates the inside from the front end part toward the rear end part and forms a control throttle of the electromagnetic valve. The valve part 5b includes a body part An entrance-side opening end 5c ₁ that forms the entrance of the through-passage 5c is formed, and an exit-side opening end 5c ₂ that forms the exit of the trunk-part penetration passage 5c is formed on the side wall of the rear end. . The exit side open end 5c ₂ is provided at a position where an overlap margin t as shown in FIG. 2 is secured so as to form a very small gap with the sleeve 4 when the operation of the poppet 5 is stopped. (The control characteristic of the poppet 5 can be changed by adjusting the overlap margin t.) As for the shape of the main body part of the body through-passage path 5c and the entrance side open end 5c ₁ , any shape such as a circle or a square (square such as a square or a rectangle) can be applied. The side opening end 5c ₂ is preferably formed in a square (square) shape so that the poppet 5 is displaced in proportion to the flow rate of the working fluid passing through the exit side opening end 5c ₂ .

  Reference numeral 6 denotes an elastic member that sits in a recess 6 a provided in the central portion of the partition wall 2 and supports the poppet 5 so as to be reciprocally movable within the sleeve 4. The poppet 5 supported by the elastic member 6 closes the feeding port 3a of the valve seat 3, and this is the initial posture of the poppet 5.

7 is a sleeve made of a non-magnetic material in which the first half part enters the second space region K ₂ and the second half part protrudes from the second space region K ₂ , and 8 is arranged inside the front half part of the sleeve 7. The pilot valve 9 is an elastic member that supports the pilot valve 8 in a reciprocating manner in the sleeve 7.

The pilot valve 8 controls the pilot flow rate in the outlet passage 2 a _1, and the valve body 8 a shown in the example of the ball type, and holds the valve body 8 a and resists the urging force of the elastic member 9 in the sleeve 7. Te slidable, and consist plunger 8b which projects the rear end with the sleeve 7 from the second spatial region K _2, the said plunger 8b, and always constant pressure acting around the An inverted T-shaped through-hole 8b ₁ is formed.

  Reference numeral 10 denotes a spacer made of a nonmagnetic material and surrounding the latter half of the sleeve 7. The spacer 10 has a ring 10a formed of a nonmagnetic material at the end.

11 is a fixing ring that firmly holds the sleeve 7 to the body 1 together with the spacer 10 by screwing, 12 is a core disposed close to the ring 10a with a gap at the end face of the plunger 8b, and 13 is attached to the core 12. The yoke 14 connected to form a magnetic path is a solenoid wound so as to surround a gap formed by the end face of the core 12 and the plunger 8b, and a combination of the solenoid 14, the core 12, and the yoke 13 at constitutes the drive system of the pilot valve 8 as appropriate to the core 12 side together with the valve body 8a plunger 8b on the pilot flow rate by opening and closing the outlet side passage 2 a ₁ by repeatedly sucked by the driving system Take control.

Further, 15 leads into the first space region K _1, working fluid supply path for supplying hydraulic fluid to the spatial region K ₁ in the first, 16 the working fluid supplied through the hydraulic fluid supply path 15 to the Akuchuta This is a working fluid feed path for feeding. The working fluid supply path 15 and the working fluid feed path 16 are joined together in the _first space region K1.

Reference numeral 17 denotes a bypass path that connects the second space region K ₂ and the working fluid feed path 16. The working fluid that has passed through the partition wall 1 by driving the pilot valve 8 operates through the bypass path 17. It is fed into the fluid feed path 16.

The solenoid valve configured as described above is operated by applying an overexcitation voltage and a demagnetization voltage to the solenoid 14 of the drive system using a pulse width modulation (PWM) high-speed drive dedicated electric circuit. 14 outlet side passage 2a ₁ of the overexcitation voltage and compatible with the valve body 8a of the application of a degaussing voltage pilot valve 8 reciprocates the pilot valve 8 the partition wall 2 is opened and closed.

The main part 3 when the outlet-side passage 2a ₁ in the reciprocating of the valve body 8a of the pilot valve 8 is opened, the control chamber through the barrel through path 5c of the poppet 5 (control chamber) M The pressure of the rear end side of the poppet 5 becomes lower than the pressure on the front end side (the pressure balance between the front end and the rear end of the poppet 5 is lost). The seat 3 floats up from the feed port (valve seat) 3a of the seat 3 and enters an open state, and the working fluid flows to the working fluid feed path 16 connected to the actuator.

On the other hand, when the outlet passage 2a ₁ is closed during the reciprocating motion of the pilot valve 8, the pressure at the rear end of the poppet 5 and the pressure at the front end are maintained in an equilibrium state, and the poppet 5 is biased by the urging force of the elastic member 6. The valve portion 5b is pressed against the feeding port 3a, and the feeding of the working fluid to the actuator is stopped.

  The electromagnetic valve according to the present invention can control the flow rate of the working fluid by adjusting the frequency of the PWM carrier as described above (having the feature that the displacement amount of the poppet 5 also varies in proportion to the flow rate in the pilot valve 8). The pilot valve 8 can be operated at high speed with low power using a small solenoid 14, and the feed port 3a is Since the poppet 5 is opened and closed by the reciprocating movement of the poppet 5 in synchronization with the reciprocating movement of the pilot valve 8, as long as the pilot valve 8 is operating, the working fluid continuously flows into the feed path 16 and the driving of the pilot valve 8 is continued. When the operation is stopped, the poppet 5 reliably matches the supply port 3a and the supply of the working fluid is stopped.

  Further, when the poppet 5 reciprocates by driving the pilot valve 8, the rear end surface collides with the lid body 2b of the partition wall 2 at the stroke end, while the front end portion collides with the feeding port 3a constituting the valve seat. In this case, the collision sound at that time becomes the operating sound. However, the electromagnetic valve according to the present invention is provided with a vibration absorber so that the pressure vibration in the control chamber M is attenuated, so that the poppet 5 is gently displaced. Depending on the driving conditions of the pilot valve 8, it is possible to avoid a collision at the stroke end of the poppet 5 and a collision with the valve seat 3 (feeding port 3a) at the tip, preventing or reducing operating noise. The wear of the valve portion 5b and the valve seat due to the collision is reduced, and further, the pulsation of the working fluid is reduced. Here, when water is used as the working fluid, the volume elastic modulus of water is about 1.4 times that of oil, and if the working fluid is water even if the same pressure fluctuation is absorbed, the volume of the vibration absorber The (volume) needs to be about 1.4, and an increase in the size of the solenoid valve itself is unavoidable. For this reason, in the present invention, as a method of lowering the effective bulk modulus of water in the vibration absorber, the thickness of the vibration absorber is reduced while ensuring the pressure resistance strength of the vibration absorber to prevent the vibration absorber from being enlarged.

  FIG. 4 is a perspective view showing the appearance of the poppet 5. The outer surface of the poppet 5 can be provided with at least one annular groove (labyrinth groove) 18 that circulates around the trunk, and the annular groove 18 causes a fluid sticking phenomenon between the poppet 5 and the sleeve 7 and malfunction. It is possible to prevent wear.

  For the poppet 5, a groove (vertical groove) extending from the front end to the rear end is provided in the body 5 a to form a gap (about 30 μm) between the sleeve 8 and this gap functions as a control throttle. Thus, the feed port 3a can be opened by breaking the pressure balance between the front and rear ends of the poppet 5, but when the poppet 5 is provided with one or more annular grooves 18 as described above, Since the annular groove 18 and the groove portion formed in the body portion of the poppet 5 intersect, the leakage of the working fluid (gap leakage flow rate) increases and the effective length of the sliding gap is shortened as a result. There is concern that the controllability deteriorates (the responsiveness of the poppet 5 with respect to the pilot flow rate decreases (the dead zone increases). The solenoid valve according to the present invention generates a flow of the working fluid through the trunk through passage 5c. Therefore, the leakage flow rate of the working fluid can be reduced, and even if the annular groove 18 is provided, it does not cross the passage.

  FIG. 5 is a view schematically showing a hydraulic circuit using the electromagnetic valve having the configuration shown in FIG. Using such a water pressure circuit, the flow rate is controlled by a pulse width modulation (PWM) high-speed drive dedicated electric circuit that applies overexcitation voltage and demagnetization voltage to the solenoid 14 of the drive system, and the operation delay characteristics of the pilot valve 8 are investigated. The result of having performed is shown in FIG.

  This investigation pays attention to the fact that a large impact is generated at the moment when the valve element 8a or the plunger 8b of the pilot valve 8 contacts the partition wall 1 or the core 12, and the impact is measured using an impact sensor. As is apparent from FIG. 6, the time of about 1 ms from the on / off input signal to the generation of the shock signal is the open / close operation delay time of the pilot valve 8, and it can be seen that it can be operated at high speed.

  FIG. 7 is a graph showing the relationship between the duty (ratio of the ON time in the input signal to the total time (on / off time)) and the pilot flow rate.

  From FIG. 7, it is clear that the pilot flow rate in the pilot valve 8 generally tends to increase linearly with the duty.

  FIG. 8 is a diagram showing the results of investigating the relationship between the duty and the main flow rate (the flow rate of the poppet 5). Since the solenoid valve of the present invention is a two-stage solenoid valve, the main flow rate is larger than the pilot flow rate, but it is clear that the characteristics of the pilot flow rate are reflected as they are and have the same tendency as in FIG.

  5 is a graph showing the flow rate variation of the poppet 5 when the load pressure is applied in the range of 0 to 6 MPa by adjusting the opening degree of the valve disposed in the working fluid supply path 15 in the hydraulic circuit shown in FIG. 9 shows. As is apparent from FIG. 9, the larger the load pressure is, the smaller the flow rate is. However, when the load pressure is 1 MPa, the duty is 70% or less, and the load is larger than the no-load state. It is assumed that the load pressure works on (lower part) and the poppet 5 opens more.

  FIG. 10 shows that the maximum stroke of the poppet is 0.75 mm, the sliding gap (gap (radius) formed between the poppet and the sleeve) is 8 μm, and the length of the sliding gap is 6.5 mm. Poppet with two annular grooves 18 (size: width 0.5 mm, depth 0.5 mm) on the outer surface and grooves (size: width 0.5 mm, depth 1 mm) for forming a control aperture ( A solenoid valve incorporating the comparative example (the annular groove 18 and the groove portion intersect each other, the overlap margin is 0.17 mm), and two annular grooves (size: width 0.5 mm, depth, which are the same as the above conditions) 0.5 mm) and a solenoid valve equipped with a poppet 5 as shown in FIG. 1 above (the exit side opening end of the trunk through-path has a square shape with a width of 0.4 mm and a length of 0.65 mm). None Poppet provided at the position 4.77mm from the rear end of the poppet In regard is a graph showing the results of the examination of conditions (leakage from between the poppet and the sleeve) leakage of the working fluid.

  As is apparent from FIG. 10, in the solenoid valve according to the present invention, it is clear that the leakage of the working fluid between the poppet 5 and the sleeve 4 is small.

11 and 12 show that the volume of the control chamber M is 33 cm ³ , the inlet side passage 2c ₁ and the outlet side passage 2a ₁ are 0.6 mm, the volume of the gap portion is 32 cm ³ , the maximum displacement of the poppet is 0.72 mm, Using a solenoid valve with a gap formed between the sleeve and the sleeve of 8 μm (radius), a PWM (pulse width modulation) signal (50 Hz) is input (duty (ratio) 0.1% from 10% to 90%) It is a figure showing the result of measuring the poppet displacement and the average flow rate when the pilot valve is driven by intermittently increasing at intervals of seconds and inputting a signal continuously for 0.1 second for each duty (ratio). .

  As is clear from FIG. 11, while the signal is continuously input, the poppet moves slightly between the stroke end (0.72 mm) and the valve seat (0 mm) with a duty ratio of 10 to 90%. Thus, it can be confirmed that the poppet does not collide at either the front end portion or the rear end portion, and that it is effective to suppress noise and wear by applying the vibration absorber.

  In addition, as shown in FIG. 12, the average flow rate of the poppet increased with increasing duty (ratio), and it was confirmed that the responsiveness was good. Note that the average flow rate of the poppet is slightly larger than the reference line (the line connecting the duty (ratio) 0% and 100%) in the figure, but this is because the poppet is offset from the valve seat. This is thought to be due to the slight vibration at the center.

  In the solenoid valve according to the present invention, all of its constituent members can be made of stainless steel. Particularly, the poppet 5 and the feed port 3a constituting the valve seat and the valve body 8a of the pilot valve 8 and the valve thereof. The seat is preferably made of heat-treated stainless steel, but any steel material such as carbon steel can be used as long as it is subjected to a surface treatment such as plating, and is not limited to stainless steel.

  The poppet 5 is shown as an example in which a conical valve portion 5b is provided at the tip, but FIGS. 13 (a) and 13 (b) are provided with a rod 5d having a diameter smaller than the body 5a and having a tapered tip. It is also possible to apply the stepped poppet 5 as shown in FIG. 5, and such a structure is useful for reducing the weight of the poppet 5 and improving the responsiveness, and further processing the body through-path 5c. There is an advantage that is easy to do.

The flow rate of the poppet 5 is basically controlled by controlling the pilot flow rate of the pilot valve 8, but the trunk portion through path 5c provided in the poppet 5 has a great influence on the control range of the pilot flow rate. Thus, the size, the opening shape, the number of passages, and the like are appropriately changed according to the performance of the electromagnetic valve and the supply condition of the working fluid. In the example shown, the the egress opening end 5c ₂ by bending the body portion through the path 5c in the rear end portion of the poppet 5 shows the case of forming the side wall of the poppet 5, the working fluid by bending of the passage If there is a concern that the flow of the air will be affected, the passage may be curved. At least one trunk portion penetration path 5c is provided depending on the size and the sectional shape of the passage. In consideration of the balance of the poppet 5, it is best to provide three passages 5c between the body portions at equal intervals.

The volume (volume) of the gap portion 2b and the size (opening diameter, length, cross-sectional shape, number, etc.) of the entry side path 2c ₁ and the exit side path 2a ₁ connected to the gap portion 2b are the performance of the solenoid valve, the size of the poppet It sets suitably by etc.

  Even if water is used as the working fluid, there is no internal leakage, and it is possible to reduce noise, valve wear, and working fluid pulsation while enabling high-speed operation and power saving. A proportional poppet type two-stage high-speed solenoid valve can be provided.

DESCRIPTION OF SYMBOLS 1 Body 2 Partition wall 2a Wall main body 2b Space | gap part 2c Lid 3 Valve seat 3a Feeding port 4 Sleeve 4a Supply port 5 Poppet 5a Body part 5b Valve part 6 Elastic member 7 Sleeve 8 Pilot valve 8a Valve body 8b Plunger 9 Elasticity Member 10 Spacer 10a Ring 11 Fixed ring 12 Core 13 Yoke 14 Solenoid 15 Working fluid supply path 16 Working fluid feed path 17 Bypass path 18 Annular groove (labyrinth groove)
K ₁ first spatial region K ₂ second spatial region

Claims (2)

An electromagnetic valve that controls opening and closing of a path connected to an actuator by operating a poppet arranged in the body by driving a pilot valve with a drive system composed of a combination of a solenoid, a core and a yoke,
Within said body, a first spatial region which joins the working fluid body feed path leading to the working fluid supply path and the actuator, and a second spatial region having a bypass path leading to the working fluid feed path Provide partition walls to form each,
A valve seat having a feeding port for feeding working fluid toward the actuator in the first space region, a supply port for the working fluid, having one end connected to the valve seat and the other end being the partition wall And a poppet that is supported so as to be reciprocally movable through an elastic member in the sleeve and closes the feeding port of the valve seat in an initial posture,
A pilot valve supported by an elastic member and driven by the drive system is disposed in the second space region,
In the partition wall, an entrance side passage connected to the first space region, an exit side passage connected to the second space region and opened by driving of the pilot valve, the entrance side passage and the exit side passage A gap is formed to form a space region with an enlarged volume between the respective connections,
The poppet has an opening end at its front end and rear end, and the flow of the working fluid is induced by driving the pilot valve to move the poppet away from the valve seat so that the first space region and the working fluid Forming at least one trunk-passing path that communicates with the feeding path;
A proportional poppet type two-stage high-speed solenoid valve provided with a vibration absorber, wherein an opening end provided at a rear end portion of the poppet is formed on a side wall of the poppet and has a square shape.   The proportional poppet type two-stage high-speed solenoid valve having a vibration absorber according to claim 1, wherein the poppet has at least one annular groove that goes around the outer surface of the body portion.

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