JP5703055B2 - Ink jet head and method of manufacturing ink jet head - Google Patents

Description

  Embodiments described herein relate generally to an inkjet head and an inkjet head manufacturing method.

  An ink jet head of an ink jet printer includes a drive element and a nozzle plate. The drive element is formed by bonding two piezoelectric materials, for example, and a plurality of groove-shaped pressure chambers are formed. The pillars separating the pressure chambers are deformed in a shear mode when a voltage is applied to the drive elements, and pressurize the ink in the pressure chambers. The pressurized ink in the pressure chamber is ejected from nozzles provided on the nozzle plate.

  When the column portion of the drive element is deformed in the shear mode, not only the pressure chamber in which ink ejection is instructed but also other pressure chambers adjacent to the pressure chamber are affected. If the column portion that separates the pressure chamber from the other pressure chamber is deformed in the shear mode, the ink in the other pressure chamber may be pressurized and erroneous ejection may occur.

  In order to prevent erroneous ink ejection, for example, an ink jet head in which pressure chambers used for ink ejection and air channels without ink supply are alternately arranged is used. Since the pressure chamber and the air channel are adjacent to each other, erroneous ink ejection is prevented.

JP 2008-94037 A

  The process for forming the pressure chamber in the inkjet head is different from the process for forming the air channel in the inkjet head. For this reason, if an air channel is formed in the ink jet head, the processing process of the ink jet head becomes complicated, and the manufacturing cost and the yield may be deteriorated.

  An object of the present invention is to provide an inkjet head that suppresses erroneous ink ejection and a method for manufacturing an inkjet head that suppresses erroneous ink ejection.

An inkjet head according to one embodiment
A base, a nozzle plate, a plurality of first nozzles, and a plurality of second nozzles for preventing erroneous ejection are provided. The base includes a plurality of pressure chambers to which ink is supplied, and a plurality of driving elements that are deformed when a voltage is applied and pressurize the ink in the pressure chamber. The nozzle plate is attached to the base. The plurality of first nozzles are provided in the nozzle plate and open to the pressure chamber, and the drive element to which an ink discharge voltage is applied is deformed to discharge ink in the pressure chamber. The plurality of second nozzles are provided in the nozzle plate and open to the pressure chamber. When the driving element to which the ink discharge voltage is applied is deformed, the opening area is larger than that of the first nozzle. The ink in the pressure chamber is stopped. The second nozzles are arranged alternately with the first nozzles.

1 is a perspective view of an ink jet head according to a first embodiment. Sectional drawing which shows the inkjet head of 1st Embodiment along the F2-F2 line | wire of FIG. Sectional drawing which shows the inkjet head of 1st Embodiment along the F3-F3 line | wire of FIG. Sectional drawing which shows a part of nozzle plate of 1st Embodiment. Sectional drawing which shows the inkjet head which the pillar part of 1st Embodiment deform | transformed in the share mode. The graph which shows the relationship between the diameter of a nozzle, and the range which ink discharges from a nozzle when a voltage is applied to an electrode. Sectional drawing which shows the nozzle plate before the 1st and 2nd nozzle is formed in 1st Embodiment. Sectional drawing which shows a part of nozzle plate which concerns on 2nd Embodiment. Sectional drawing which shows the nozzle plate before the 1st and 2nd nozzle is formed in 2nd Embodiment. Sectional drawing which shows a part of nozzle plate which concerns on 3rd Embodiment. The top view which shows the mask of the laser beam machine which concerns on 4th Embodiment. Sectional drawing which shows a part of nozzle plate of 4th Embodiment.

  The first embodiment will be described below with reference to FIGS. 1 to 7. FIG. 1 is a perspective view of an ink jet head 10 according to the first embodiment. FIG. 2 is a sectional view showing the inkjet head 10 along the line F2-F2 in FIG. FIG. 3 is a cross-sectional view showing the inkjet head 10 along the line F3-F3 in FIG.

  As shown in FIG. 1, the ink jet head 10 is a so-called end shooter type ink jet head, and includes a base portion 13, a lid member 14, and a nozzle plate 15. As shown in FIG. 2, the lid member 14 is attached to the upper surface 13 a of the base portion 13. The nozzle plate 15 is attached to the front surface 13 b of the base portion 13.

  The base 13 is formed, for example, by bonding two piezoelectric plates 17 and 18 made of lead zirconate titanate (PZT) so that their polarization directions are opposite to each other. As shown in FIG. 3, the base portion 13 is provided with a plurality of first pressure chambers 21, a plurality of second pressure chambers 22, and a plurality of column portions 23. The plurality of first pressure chambers 21 is an example of several pressure chambers. The plurality of second pressure chambers 22 is an example of an extra pressure chamber.

  The plurality of first pressure chambers 21 are each formed in a groove shape, and are provided in parallel with each other in the longitudinal direction of the base portion 13. The first pressure chambers 21 open to the upper surface 13a and the front surface 13b of the base portion 13, respectively. The first pressure chamber 21 is closed by the lid member 14 and the nozzle plate 15. The width L1 of the first pressure chamber 21 shown in FIG. 3 is, for example, 85 μm. The depth L2 of the first pressure chamber 21 is, for example, 300 μm.

  The plurality of second pressure chambers 22 are formed in the same shape as the first pressure chambers 21 and are alternately arranged with the first pressure chambers 21. The second pressure chamber 22 is closed by the lid member 14 and the nozzle plate 15. The width L3 of the second pressure chamber 22 shown in FIG. 3 is, for example, 85 μm. The depth of the second pressure chamber 22 is 300 μm, similar to the depth L2 of the first pressure chamber 21.

  The plurality of column portions 23 are respectively formed between the first pressure chamber 21 and the second pressure chamber 22. The column portion 23 separates the first pressure chamber 21 and the second pressure chamber 22 and forms the side surfaces of the first pressure chamber 21 and the second pressure chamber 22. The width L4 of the column part 23 shown in FIG. 3 is 85 μm.

  As indicated by a thick line in FIG. 3, the electrodes 25 cover the inner surfaces of the first pressure chamber 21 and the second pressure chamber 22. The electrode 25 is formed of, for example, a nickel thin film, but is not limited thereto, and may be formed of, for example, gold or copper. Since the electrodes 25 are formed on both side surfaces of the column portion 23, the column portion 23 functions as a drive element.

  As shown in FIG. 1, a plurality of wirings 27 are provided on the upper surface 13 a of the base portion 13. The plurality of wirings 27 are formed, for example, by laser patterning a nickel thin film formed on the upper surface 13a. As indicated by bold lines in FIG. 2, the plurality of wirings 27 are respectively provided between the rear end of the upper surface 13 a and the plurality of electrodes 25. One end of the wiring 27 is connected to the electrode 25.

  On the other hand, the other end of the wiring 27 is electrically connected to an IC, for example. This IC applies a voltage to the electrode 25 via the wiring 27 based on a signal input from the control unit of the ink jet printer, and deforms the column part 23 in the shear mode.

  The lid member 14 is attached to the upper surface 13a of the base 13 by adhesion, for example. An ink supply path 28 is provided in the lid member 14. The ink supply path 28 opens to the plurality of first pressure chambers 21 and the plurality of second pressure chambers 22 and is connected to the ink tank. The ink in the ink tank is supplied to the first pressure chamber 21 and the second pressure chamber 22 through the ink supply path 28, respectively. The thickness L5 of the front wall 14a of the lid member 14 shown in FIG. 2 is 1 mm.

  The nozzle plate 15 is formed of a rectangular film made of polyimide. The material of the nozzle plate 15 is not limited to this, and any material that can be laser processed may be used. The thickness of the nozzle plate 15 is, for example, 50 μm. The nozzle plate 15 is attached to the front surface 13b of the base portion 13 by adhesion, for example. The inner surface 15 a of the nozzle plate 15 faces the first pressure chamber 21 and the second pressure chamber 22.

  As indicated by a two-dot chain line in FIG. 3, the nozzle plate 15 is provided with a plurality of first nozzles 31 and a plurality of second nozzles 32. The plurality of first nozzles 31 correspond to the plurality of first pressure chambers 21 and are arranged side by side in the longitudinal direction of the nozzle plate 15. The plurality of first nozzles 31 are open to the plurality of first pressure chambers 21.

  The plurality of second nozzles 32 correspond to the plurality of second pressure chambers 22 and are alternately arranged with the first nozzles 31. The plurality of second nozzles 32 are open to the plurality of second pressure chambers 22. FIG. 4 is a cross-sectional view showing a part of the nozzle plate 15. As shown in FIG. 4, the second nozzle 32 is formed such that its diameter increases toward the inner surface 15 a of the nozzle plate 15.

  The opening area of the first nozzle 31 is smaller than the opening area of the second nozzle 32. For example, the diameter D1 of the first nozzle 31 is 20 μm, and the diameter D2 of the second nozzle 32 is 40 μm. Each nozzle opening area is a cross-sectional area of each nozzle at a position where the liquid level S of the ink is formed by surface tension when ink is supplied to each pressure chamber, for example, a minimum cross-sectional area. Similarly, the diameter of each nozzle is the diameter of each nozzle at the position where the ink level S is formed when ink is supplied to each pressure chamber.

  The inkjet head 10 having the above-described configuration performs printing as follows, for example. The inkjet head 10 is designed to perform printing by discharging, for example, 3 picoliters of ink from the first nozzle 31.

  By the user's operation, the control unit of the ink jet printer inputs a print signal to the IC connected to the wiring 27. Based on this print signal, the IC applies a driving pulse voltage of 21 V, for example, to the electrode 25 of the first pressure chamber 21 via the wiring 27. The drive pulse voltage of 21 V is an example of a predetermined ink discharge voltage.

  FIG. 5 is a cross-sectional view showing the inkjet head 10 in which the column portion 23 is deformed in the shear mode. As shown in FIG. 5, when a drive pulse voltage is applied to the electrode 25, the column part 23 is deformed in the shear mode, and the volume of the first pressure chamber 21 is expanded. Accordingly, the volume of the second pressure chamber 22 adjacent to the first pressure chamber 21 is reduced. In addition, when a voltage is applied to the electrode 25, the volume of the first pressure chamber 21 may be reduced and the volume of the second pressure chamber 22 may be expanded.

  As the volume of the second pressure chamber 22 is reduced, the ink in the second pressure chamber 22 is pressurized. The pressurized ink in the second pressure chamber 22 remains at the second nozzle 32 without being discharged from the second nozzle 32 due to surface tension. That is, the ink in the second pressure chamber 22 stays by the second nozzle 32 when the column portion 23 to which the drive pulse of 21 V is applied to the electrode 25 is deformed.

  When the voltage applied to the electrode 25 of the first pressure chamber 21 is released, the column portion 23 returns to its original shape, and the volume of the first pressure chamber 21 is reduced. As a result, the ink supplied to the first pressure chamber 21 is pressurized. The pressurized ink in the first pressure chamber 21 is ejected from the first nozzle 31. That is, the ink in the first pressure chamber 21 is ejected from the first nozzle 31 by deforming the column portion 23 to which the drive pulse voltage of 21 V is applied to the electrode 25.

  By applying a drive pulse voltage of 21 V to the electrode 25, 3 picoliters of ink is ejected from the first nozzle 31. The optimum drive pulse voltage for ejecting 3 picoliters of ink as designed by the inkjet head 10 having the above-described configuration is 21V. Note that a drive pulse voltage in the range of 20 V to 22 V, for example, is applied to the electrode 25 depending on user settings and other conditions. The driving pulse voltage of 20V is an example of the first voltage, and the driving pulse voltage of 22V is an example of the second voltage.

  FIG. 6 is a graph showing the relationship between the diameter of the nozzle and the range in which ink is ejected from the nozzle when a voltage is applied to the electrode 25. In FIG. 6, “applied voltage” represents a voltage applied to the electrode 25. Furthermore, the solid line in the graph indicates the range of applied voltage that ink is ejected from the nozzle having the nozzle diameter. That is, when a voltage in the range of the solid line is applied to the electrode 25, the column portion 23 is deformed in the shear mode, so that the ink in the pressure chamber is pressurized and the ink is ejected from the nozzle. On the other hand, when a voltage outside the range of the solid line is applied to the electrode 25, the ink remains without being ejected from the nozzle even when the ink in the pressure chamber is pressurized.

  As shown in FIG. 6, when a voltage of 21 V is applied to the electrode 25, ink is ejected from a nozzle having a nozzle diameter of 20 μm, while ink is not ejected from a nozzle having a nozzle diameter of 40 μm. Therefore, as described above, when a drive pulse voltage of 21 V is applied to the electrode 25, the ink in the first pressure chamber 21 is ejected from the first nozzle 31, while the ink in the second pressure chamber 22 is ejected from the second nozzle. Stay at 32.

  Further, even when a driving pulse voltage in the range of 20V to 22V is applied to the electrode 25, the ink in the first pressure chamber 21 is ejected from the first nozzle 31. On the other hand, the ink in the second pressure chamber 22 remains in the second nozzle 32 without being discharged. As shown in FIG. 6, the same applies to the case where the nozzle diameter of the second nozzle 32 is 50 μm.

  Next, an example of a method for manufacturing the inkjet head 10 having the above-described configuration will be described. First, for example, a thermosetting adhesive is applied to one piezoelectric plate 17 by, for example, screen printing. However, the present invention is not limited to this, and the adhesive may be applied by other methods such as spin coater, spray coating, and brush coating. The other piezoelectric plate 18 is laminated on the piezoelectric plate 17 coated with an adhesive. For example, the base 13 is formed by thermally curing the adhesive with an autoclave device. Note that the adhesive may be thermally cured in a later step.

  Next, a plurality of first pressure chambers 21 and a plurality of second pressure chambers 22 are formed in the base portion 13. The plurality of first and second pressure chambers 21 and 22 are formed by cutting the base portion 13 with a diamond wheel of a dicing saw used for cutting an IC wafer, for example. By forming the first and second pressure chambers 21, 22, a plurality of column parts 23 are formed.

  Next, the electrode 25 is formed on each inner surface of the first and second pressure chambers 21 and 22. Further, the wiring 27 is formed on the upper surface 13 a of the base portion 13. The electrode 25 and the wiring 27 are formed using, for example, an electroless plating method. Next, patterning is performed by laser irradiation to remove the nickel thin film from portions other than the electrode 25 and the wiring 27.

  After the electrode 25 and the wiring 27 are formed on the base 13, the lid member 14 is attached to the upper surface 13 a of the base 13 using a thermosetting adhesive, and the first and second nozzles 31 are formed on the front surface 13 b of the base 13. , 32 is attached before the nozzle plate 15 is formed. The lid member 14 and the nozzle plate 15 are fixed to the base 13 by thermally curing the adhesive. At this time, the adhesive applied to the piezoelectric plates 17 and 18 may be thermally cured.

  FIG. 7 is a cross-sectional view showing the nozzle plate 15 before the first and second nozzles 31 and 32 are formed. A protective film 35 is attached in advance to the outer surface 15 b of the nozzle plate 15. The protective film 35 is made of polyester, for example. The thickness of the protective film 35 is, for example, 15 μm. The protective film 35 covers the entire outer surface 15 b of the nozzle plate 15.

  Next, the nozzle plate 15 is irradiated with excimer laser light to form a plurality of first nozzles 31 and a plurality of second nozzles 32. Below, the process of forming the 1st nozzle 31 and the 2nd nozzle 32 is demonstrated concretely.

  First, the laser processing machine 40 is opposed to the position where the first nozzle 31 of the nozzle plate 15 is formed. This laser processing machine 40 has a common mask 41 for forming the first and second nozzles 31 and 32, and irradiates excimer laser light from one irradiation port opened in the mask 41. . 7 schematically shows the laser processing machine 40. The magnitude relationship between the laser processing machine 40 and the nozzle plate 15 and the distance between the laser processing machine 40 and the nozzle plate 15 are shown in FIG. It is different from what is shown.

  As shown in FIG. 7, in order to form the first nozzle 31, the condensing point C <b> 1 of the laser beam of the laser processing machine 40 is set inside the nozzle plate 15. The condensing point C <b> 1 is set at a position close to the outer surface 15 b of the nozzle plate 15.

  Laser light is irradiated from the laser processing machine 40 toward the nozzle plate 15, for example, 200 times. Thereby, the first nozzle 31 is formed on the nozzle plate 15. By setting the condensing point C <b> 1 inside the nozzle plate 15, the first nozzle 31 is formed in a shape confined inside the nozzle plate 15 as shown in FIG. 4. The laser beam machine 40 is moved to sequentially form a plurality of first nozzles 31.

  Next, as shown in FIG. 7, in order to form the second nozzle 32, the condensing point C <b> 2 of the laser beam of the laser processing machine 40 is set outside the inkjet head 10. The condensing point C2 is set at a position close to the outer surface 15b of the nozzle plate 15.

  Laser light is irradiated from the laser processing machine 40 toward the nozzle plate 15, for example, 300 times. Thereby, the second nozzle 32 is formed in the nozzle plate 15. By setting the condensing point C <b> 2 outside the inkjet head 10, the opening area of the second nozzle 32 is larger than the opening area of the first nozzle 31 as shown in FIG. 4. Further, the second nozzle 32 is formed so that its diameter increases toward the inner surface 15 a of the nozzle plate 15. The laser beam machine 40 is moved to form a plurality of second nozzles 32 in sequence.

  By such a process, a plurality of first nozzles 31 and a plurality of second nozzles 32 are formed on the nozzle plate 15. The process for forming the first and second nozzles 31 and 32 is not limited to this. For example, the second nozzle 32 may be formed before the first nozzle 31, or the nozzle plate 15 in which the first and second nozzles 31 and 32 are formed in advance may be bonded to the base portion 13. good. Further, a plurality of first nozzles 31 may be formed in a lump using a laser processing machine having a plurality of irradiation ports, and a plurality of second nozzles 32 may be formed in a lump.

  Next, the protective film 35 is peeled off from the nozzle plate 15 and removed. The ink jet head 10 is manufactured as described above.

  According to the inkjet head 10 having the above-described configuration, even if the column portion 23 is deformed in the shear mode in order to eject the ink in the first pressure chamber 21, the ink in the second pressure chamber 22 is second due to the surface tension. Stays at nozzle 32. Thereby, erroneous ejection of ink can be suppressed. Further, since the second nozzle 32 is provided, the second pressure chamber 22 can be easily cleaned.

  The inkjet head 10 having the above configuration suppresses erroneous ink ejection by making the opening area of the second nozzle 32 larger than the opening area of the first nozzle 31. For this reason, parts other than the first and second nozzles 31 and 32 can use the same components as the conventional inkjet head, and an increase in manufacturing cost can be suppressed.

  The first nozzles 31 and the second nozzles 32 are alternately arranged. Thereby, when the ink in the first pressure chamber 21 is ejected, it is not necessary to consider the influence on the adjacent pressure chamber, and the inkjet head 10 can be driven at high speed.

  Furthermore, even when a drive pulse voltage in the range of 20 V to 22 V is applied to the electrode 25, the ink in the first pressure chamber 21 is ejected from the first nozzle 31, while the second pressure chamber 22 The ink remains in the second nozzle 32 without being ejected. Thereby, for example, even if the voltage applied to the electrode 25 fluctuates due to the setting of printing conditions, it is possible to prevent erroneous ink ejection.

  The first nozzle 31 is formed by setting the condensing point C1 of the laser beam of the laser processing machine 40 inside the nozzle plate 15. On the other hand, the second nozzle 32 is formed by setting the condensing point C <b> 2 of the laser beam of the laser processing machine 40 outside the inkjet head 10. In this way, the first nozzle 31 and the second nozzle 32 are separately formed by changing the position of the laser condensing point. Thereby, it is not necessary to change the mask 41 for forming the first nozzle 31 and the second nozzle 32, and the manufacturing process of the inkjet head 10 can be simplified. Further, the first and second nozzles 31 and 32 can be made separately by the common laser processing machine 40, and it is not necessary to introduce a dedicated laser processing machine or a mask.

  By setting the condensing point C2 of the laser beam of the laser processing machine 40 outside the inkjet head 10, the opening area of the second nozzle 32 can be formed larger than the opening area of the first nozzle 31. Therefore, a nozzle having a large opening area can be easily formed.

  Next, a second embodiment will be described with reference to FIGS. Note that, in a plurality of embodiments disclosed below, components having the same functions as those of the inkjet head 10 of the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

  FIG. 8 is a cross-sectional view showing a part of the nozzle plate 15. As shown in FIG. 8, the second nozzle 32 </ b> A is formed so that its shape expands toward the outer surface 15 b of the nozzle plate 15.

  In the second nozzle 32 </ b> A, the ink liquid level S is formed at the boundary between the second nozzle 32 </ b> A and the outer surface 15 b of the nozzle plate 15. Therefore, as shown in FIG. 8, the opening area of the second nozzle 32A is the maximum cross-sectional area of the second nozzle 32A. The opening area of the second nozzle 32 </ b> A is larger than the opening area of the first nozzle 31. For example, the diameter D3 of the second nozzle 32A is 50 μm.

  When the drive pulse voltage of 21 V is applied to the electrode 25, the column portion 23 is deformed in the shear mode, and the volume of the second pressure chamber 22 is reduced. Similarly to the first embodiment, even if the ink in the second pressure chamber 22 is pressurized by reducing the volume of the second pressure chamber 22, the ink in the second pressure chamber 22 Stays with the nozzle 32.

  FIG. 9 is a cross-sectional view showing the nozzle plate 15 before the first and second nozzles 31 and 32A are formed. As shown in FIG. 9, when the second nozzle 32 </ b> A is formed, the condensing point C <b> 3 of the laser beam of the laser processing machine 40 is set inside the second pressure chamber 22. The condensing point C3 is set at a position close to the inner surface 15a of the nozzle plate 15.

  After setting the condensing point C3, the laser beam is irradiated from the laser processing machine 40 toward the nozzle plate 15, for example, 300 times. Thereby, the second nozzle 32 </ b> A is formed in the nozzle plate 15. By setting the condensing point C3 inside the second pressure chamber 22, the opening area of the second nozzle 32A is larger than the opening area of the first nozzle 31, as shown in FIG. Furthermore, the second nozzle 32 </ b> A is formed so that its diameter increases as it goes toward the outer surface 15 b of the nozzle plate 15.

  According to the inkjet head 10 having the above-described configuration, it is possible to suppress erroneous ink ejection as in the inkjet head 10 according to the first embodiment.

  Next, a third embodiment will be described with reference to FIG. FIG. 10 is a cross-sectional view showing a part of the nozzle plate 15. As shown in FIG. 10, the second nozzle 32 </ b> B is formed in a shape constricted inside the nozzle plate 15.

  When forming the second nozzle 32 </ b> B, the condensing point C <b> 4 of the laser beam of the laser processing machine 40 is set inside the nozzle plate 15 and close to the second pressure chamber 22. For this reason, as in the second embodiment, in the second nozzle 32 </ b> A, the ink liquid level S is formed at the boundary between the second nozzle 32 </ b> A and the outer surface 15 b of the nozzle plate 15. Therefore, as shown in FIG. 10, the opening area of the second nozzle 32B is the maximum cross-sectional area of the second nozzle 32B. The opening area of the second nozzle 32B is larger than the opening area of the first nozzle 31. For example, the diameter D4 of the second nozzle 32B is 50 μm.

  According to the inkjet head 10 having the above-described configuration, it is possible to suppress erroneous ink ejection, as in the inkjet head 10 of the second embodiment.

  Next, a third embodiment will be described with reference to FIG. 11 and FIG. FIG. 11 is a plan view showing a mask 41A of the laser processing machine 40A. FIG. 12 is a cross-sectional view showing a part of the nozzle plate 15.

  As shown in FIG. 11, the mask 41 </ b> A has a plurality of first irradiation ports 44 and a plurality of second irradiation ports 45. The first irradiation port 44 is provided corresponding to the first nozzle 31. The second irradiation ports 45 are provided corresponding to the second nozzles 32 and are arranged alternately with the first irradiation ports 44. The opening area of the second irradiation port 45 is larger than the opening area of the first irradiation port 44.

  When forming the first and second nozzles 31 and 32 </ b> C on the nozzle plate 15, laser light is irradiated from the plurality of first irradiation ports 44, for example, 200 times. At the same time, laser light is irradiated from the plurality of second irradiation ports 45, for example, 200 times. As a result, the plurality of first nozzles 31 and the plurality of second nozzles 32C are collectively formed.

  As shown in FIG. 12, the opening area of the second nozzle 32 </ b> C formed by the laser light emitted from the second irradiation port 45 is larger than the opening area of the first nozzle 31. For example, the diameter D5 of the second nozzle 32C is 40 μm.

  According to the inkjet head 10 having the above-described configuration, it is possible to suppress erroneous ink ejection as in the inkjet head 10 according to the first embodiment.

  Although several embodiments of the present invention have been described, these embodiments are presented by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the invention described in the claims and the equivalents thereof.

  DESCRIPTION OF SYMBOLS 10 ... Inkjet head, 13 ... Base, 15 ... Nozzle plate, 15a ... Inner surface, 15b ... Outer surface, 21 ... First pressure chamber, 22 ... Second pressure chamber, 23 ... Column, 31 ... First nozzle, 32, 32A, 32B, 32C ... second nozzle, 40, 40A ... laser beam machine, 41, 41A ... mask, 44 ... first irradiation port, 45 ... second irradiation port.

Claims (9)

A base having a plurality of pressure chambers to which ink is supplied, and a plurality of drive elements that are deformed when a voltage is applied to pressurize the ink in the pressure chambers;
A nozzle plate attached to the base;
A plurality of first nozzles that are provided in the nozzle plate, open to the pressure chamber, and eject the ink in the pressure chamber by deforming the drive element to which an ink discharge voltage is applied;
An erroneous ejection that is provided in the nozzle plate and opens into the pressure chamber, has an opening area larger than that of the first nozzle, and retains ink in the pressure chamber when the driving element to which the ink ejection voltage is applied is deformed. A plurality of second nozzles for prevention ,
The inkjet head, wherein the second nozzles are alternately arranged with the first nozzles . In the first nozzle, a voltage in a range between a first voltage lower than the ink discharge voltage and a second voltage higher than the ink discharge voltage is applied to the drive element. And ejecting ink in the first pressure chamber corresponding to the first nozzle ,
The second nozzle has ink in a second pressure chamber corresponding to the second nozzle when a voltage in a range between the first voltage and the second voltage is applied to the driving element. The inkjet head according to claim 1 , wherein: The inkjet head according to claim 2 , wherein the second nozzle is formed to have a diameter that increases toward one surface of the nozzle plate. A base having a plurality of pressure chambers to which ink is supplied, and a plurality of drive elements that are deformed when a voltage is applied to pressurize the ink in the pressure chambers;
A nozzle plate attached to the base;
A plurality of first nozzles that are provided in the nozzle plate, open to the pressure chamber, and eject the ink in the pressure chamber by deforming the drive element to which an ink discharge voltage is applied;
An erroneous ejection that is provided in the nozzle plate and opens into the pressure chamber, has an opening area larger than that of the first nozzle, and retains ink in the pressure chamber when the driving element to which the ink ejection voltage is applied is deformed. A plurality of second nozzles for prevention ,
The second nozzle is a method of manufacturing an ink jet head arranged alternately with the first nozzle ,
By laser processing with a condensing point set inside the nozzle plate, the plurality of first nozzles are formed on the nozzle plate,
The plurality of second nozzles having an opening area larger than that of the first nozzle are formed on the nozzle plate by laser processing in which a condensing point is set at a position different from that when forming the first nozzle. A method of manufacturing an ink-jet head. 5. The method of manufacturing an ink jet head according to claim 4 , wherein the first nozzle and the second nozzle are formed by changing a position of a condensing point of a laser irradiated from a common laser processing machine. . 6. The method of manufacturing an ink jet head according to claim 5 , wherein a condensing point for laser processing when forming the second nozzle is set outside the ink jet head. 6. The inkjet head according to claim 5 , wherein a condensing point of laser processing when forming the second nozzle is set inside a second pressure chamber corresponding to the second nozzle . Production method. The condensing point of laser processing when forming the second nozzle is set in a position close to the second pressure chamber corresponding to the second nozzle inside the nozzle plate. A method for manufacturing an ink jet head according to claim 5 . A base having a plurality of pressure chambers to which ink is supplied, and a plurality of drive elements that are deformed when a voltage is applied to pressurize the ink in the pressure chambers;
A nozzle plate attached to the base;
A plurality of first nozzles that are provided in the nozzle plate, open to the pressure chamber, and eject the ink in the pressure chamber by deforming the drive element to which an ink discharge voltage is applied;
An erroneous ejection that is provided in the nozzle plate and that opens into the pressure chamber, has an opening area larger than that of the first nozzle, and retains ink in the pressure chamber when the driving element to which the ink ejection voltage is applied is deformed. A plurality of second nozzles for prevention ,
The second nozzle is a method of manufacturing an ink jet head arranged alternately with the first nozzle ,
A first laser irradiation port for irradiating a laser for forming the first nozzle, and a first laser irradiation port for irradiating a laser for forming the second nozzle and having an opening area larger than that of the first laser irradiation port; A method of manufacturing an ink jet head, wherein the first nozzle and the second nozzle are collectively formed by laser processing using a mask having two laser irradiation ports.

Images