JP5691984B2 - Sliding member and manufacturing method thereof - Google Patents

Description

  The present invention relates to a sliding member coated with an amorphous carbon coating and a method for manufacturing the same, and more particularly to a sliding member having excellent wear resistance and a method for manufacturing the same.

  Conventionally, sliding members are used in various devices such as engines and transmissions in automobiles. There, various research and developments are underway to reduce the sliding resistance of the sliding member to reduce energy loss and to meet future fuel efficiency regulations for protecting the global environment.

  For example, one such research and development is a technique for coating the sliding surface in order to improve the wear resistance of a sliding member made of structural steel or high alloy steel and to obtain low friction characteristics. is there. In recent years, amorphous carbon materials such as nanodiamond particle-like carbon (DLC) have attracted attention as this coating material. The film on which the amorphous carbon material is formed (amorphous carbon film) is a hard film mainly composed of carbon, and since the carbon of the hard film also acts as a solid lubricant, it has a low sliding property. It is a coating that can achieve both dynamic resistance and high wear resistance.

  For example, as such a technique, a sliding member has been proposed in which a nickel-phosphorous plating layer is used as a base of a base material and an amorphous carbon coating (DLC coating) is applied on the nickel-phosphorous plating layer. (For example, see Patent Document 1).

  According to such a sliding member, the adhesion can be improved by forming the amorphous carbon film on the base material via the nickel-phosphorous plating layer. Furthermore, it is possible to suppress a decrease in the adhesiveness due to the difference in thermal expansion coefficient between the base material and the amorphous carbon film.

JP 2002-194565 A

  However, when the sliding member described in Patent Document 1 is repeatedly slid with respect to the mating member in the lubricating oil, significant wear may occur on the sliding surface. In particular, when applied to a cylinder bore and piston ring for an internal combustion engine, a cylinder and a piston constituting a fuel injection valve, etc., these members are smaller and have higher surface pressure than other members. Due to the use of various fuels and the like, the oil film is easily cut between the sliding member and the counterpart member, and as a result, significant wear may occur on both sides.

  In recent years, the performance of automobile engine parts has been greatly improved due to higher output and higher rotation. In the sliding member used in the above-described engine, as disclosed in Patent Document 1, the surface of the base member of the sliding member is used. In some cases, sufficient sliding characteristics cannot be obtained by simply coating an amorphous carbon film.

  In view of such a point, the present invention aims to cover the surface of the base material with an amorphous carbon coating, which is used as a sliding member with high surface pressure and high sliding frequency. An object of the present invention is to provide a sliding member and a manufacturing method of the sliding member that can suppress the wear of the amorphous carbon film on the surface even if used.

  As a result of intensive studies, the inventors have provided a nucleus for growing an amorphous carbon material in the underlying layer (coating) when forming an amorphous carbon coating. Starting from the nucleus, the amorphous carbon film that grows so that the amorphous carbon spreads along the film thickness direction. New findings were obtained that it was harder and improved in wear resistance.

  The present invention is based on such new knowledge of the inventors, and the manufacturing method of the sliding member according to the present invention covers the surface of a substrate with a nickel plating film in which nanodiamond particles are dispersed. And using the nanodiamond particles exposed on the surface of the nickel plating film as a nucleus and growing amorphous carbon from the nanodiamond particles in the film thickness direction, the amorphous carbon film on the surface of the nickel plating film And a step of coating at least.

  According to the present invention, since amorphous carbon grows on the surface of the nickel plating film coated on the surface of the base material with the exposed nanodiamond particles as nuclei, the hardness of the obtained amorphous carbon film Is higher than that without using nanodiamond particles. That is, amorphous carbon grown using nanodiamond particles as a nucleus becomes a columnar body along the film thickness direction, and this columnar body has a crystal structure close to that of nanodiamond particles. As a result, the obtained amorphous carbon film is superior in wear resistance and can reduce the friction coefficient as compared with the conventional one.

  The nanodiamond particle size is not particularly limited as long as amorphous carbon can be grown in the film thickness direction using the nanodiamond particle as a nucleus. However, as a more preferred embodiment, in the step of coating the nickel plating film, nanodiamond particles having a nanodiamond particle size in the range of 10 to 50 nm are added.

  According to this aspect, by setting the particle diameter of the nanodiamond particles in the above-described range, the wear resistance of the sliding member coated with the amorphous carbon coating on the surface, and the resistance of the counterpart member sliding on the sliding member. Abrasion can be improved.

  That is, when the nanodiamond particles have a particle size of less than 10 nm, it is considered that the amorphous carbon does not grow sufficiently with the nanodiamond particles as a nucleus in the step of forming the amorphous carbon film. Therefore, the hardness of the amorphous carbon film cannot be sufficiently increased. In addition, when the particle diameter of the nanodiamond particles exceeds 50 nm, the nanodiamond particles are difficult to uniformly disperse on the surface of the nickel plating film. As a result, the surface roughness of the deposited amorphous carbon coating increases, wear of the mating member increases, and the friction coefficient increases.

  In addition, the ratio of the nanodiamond particles is not particularly limited as long as amorphous carbon can be grown in the film thickness direction using the nanodiamond particles as a nucleus. However, as a more preferred embodiment, in the step of coating the nickel plating film, the nanodiamond particles are added so that the nanodiamond particles are contained in 5 to 20% by mass in the nickel plating film.

  According to this aspect, by setting the addition amount of the nanodiamond particles in the above-described range, the wear resistance of the sliding member coated with the amorphous carbon coating on the surface, and the resistance of the counterpart member sliding on the sliding member. Abrasion can be improved.

  That is, when the nanodiamond particles contained in the nickel plating film is less than 5% by mass, amorphous carbon does not grow sufficiently with the nanodiamond particles as a nucleus in the step of forming the amorphous carbon film. Therefore, the hardness of the amorphous carbon film cannot be sufficiently increased. Moreover, when the nanodiamond particle | grains contained in a nickel plating film exceed 20 mass%, it becomes difficult to disperse | distribute nanodiamond particles uniformly on the surface of a nickel plating film. As a result, the surface roughness of the deposited amorphous carbon coating increases, wear of the mating member increases, and the friction coefficient increases. In addition to this, the holding power of the nanodiamond particles by the nickel plating film cannot be said to be sufficient, and the nanodiamond particles fall off during sliding, resulting in a decrease in wear resistance.

  As the present invention, the above-mentioned sliding member having wear resistance is also disclosed. The sliding member according to the present invention includes a nickel plating film in which nanodiamond particles are dispersed on the surface of a base material, and a film thickness from the nanodiamond particles on the surface of the nickel plating film with the nanodiamond particles as a nucleus. An amorphous carbon film containing amorphous carbon grown in the direction is coated.

  According to the present invention, the nano diamond particles dispersed on the surface of the nickel plating film are dispersed, and the amorphous carbon grown from the nano diamond particles is larger than the other parts of the amorphous carbon film as described above. And hard. Thereby, the hardness of an amorphous carbon film can be raised rather than what does not contain a nano diamond particle. Thereby, the wear resistance of the sliding member and the mating member can be improved, and the friction coefficient can be reduced.

  More preferably, the nanodiamond particles have a particle size in the range of 10 to 50 nm. According to this aspect, as described above, by setting the particle diameter of the nanodiamond particles in the above-described range, the wear resistance of the sliding member coated with the amorphous carbon coating on the surface, and sliding on this The wear resistance of the mating member can be improved.

  That is, as described above, when the particle size of the nanodiamond particles is less than 10 nm, the hardness of the amorphous carbon coating is not sufficiently high, and when the particle size of the nanodiamond particles exceeds 50 nm. The surface roughness of the amorphous carbon coating increases, the wear of the mating member increases, and the friction coefficient increases.

  More preferably, the nickel plating film contains 5 to 20% by mass of nanodiamond particles. According to this aspect, by setting the addition amount of the nanodiamond particles in the above-described range, the wear resistance of the sliding member coated with the amorphous carbon coating on the surface, and the resistance of the counterpart member sliding on the sliding member. Abrasion can be improved.

  That is, as described above, when the nanodiamond particles contained in the nickel plating film is less than 5% by mass, the hardness of the amorphous carbon film cannot be sufficiently increased. Moreover, when the nanodiamond particle | grains contained in a nickel plating film exceed 20 mass%, the surface roughness of an amorphous carbon film is large, wear of a mating member increases, and a friction coefficient also becomes high. In addition, the nanodiamond particles fall off during sliding, and wear resistance decreases.

  According to the present invention, even if the surface of the base material is coated with an amorphous carbon coating, and this is used as a sliding member with a high surface pressure and a high sliding frequency, Wear can be suppressed.

The typical conceptual diagram of the sliding member which concerns on embodiment of this invention. The figure which showed the result of the abrasion test of the sliding member which concerns on Example 1 and 2, and Comparative Examples 1-3. FIG. 6 is a diagram illustrating a result of a wear test of a sliding member according to Example 3. The figure which showed the result of the abrasion test of the sliding member which concerns on Example 4. FIG.

The following embodiments of the present invention will be described. FIG. 1 is a schematic conceptual view of a sliding member according to an embodiment of the present invention.
[Nickel plating coating process]
First, as shown in FIG. 1, a base member 10 of a sliding member is prepared. Examples of the base material include carbon steel (JIS: S45C, S30C, etc.), alloy steel such as chromium steel, chromium molybdenum steel (JIS standard: SCr, SCM, etc.), alloy tool steel (JIS standard: SKS, SKD, etc.) And iron-based substrates of special purpose steels (JIS standards: SUS, SUJ, SUP, etc.) such as stainless steel, bearing steel, and spring steel. However, the present invention is not limited to these metal materials. For example, aluminum, titanium, silicon, or the like may be used as long as a nickel plating film described later can be suitably formed on the substrate surface. .

  The surface of the base material 10 thus prepared is coated with a nickel plating film 20 in which nanodiamond particles 21 are dispersed. Specifically, the nano diamond particles 21 are dispersed in a nickel plating solution, and the nickel plating film 20 is coated on the surface of the substrate 10 using the nickel plating solution. Moreover, as long as the nickel plating film 20 in which the nano diamond particles 21 are dispersed can be coated on the surface of the base material, the plating may be performed by any plating method such as electrolytic plating and electroless plating, and the plating method is particularly limited. Is not to be done.

  In the present embodiment, nanodiamond particles having a nanodiamond particle size in the range of 10 to 50 nm are added, and the nanodiamond particles 21 are contained in the nickel plating film 20 in an amount of 5 to 20% by mass. In addition, nanodiamond particles are added. As a result, as will be apparent from the examples performed by the inventors, which will be described later, the wear resistance of the sliding member with the amorphous carbon coating coated on the surface, and the wear resistance of the mating member that slides on the sliding member. Can be improved.

  Moreover, it is preferable that the thickness of a nickel plating film is 0.1 micrometer or more. By setting it as the film thickness of this range, the adhesiveness of the base material 10 and the amorphous carbon film 30 mentioned later is securable. Furthermore, the nanodiamond particles 21 can be suitably held in the coating during sliding.

[Amorphous carbon film coating process]
Next, an amorphous carbon coating 30 is coated on the surface of the nickel plating coating 20. Specifically, amorphous carbon is grown on the surface of the nickel plating film while growing amorphous carbon in the film thickness direction from the nanodiamond particles 21 using the exposed nanodiamond particles 21 as nuclei on the surface of the nickel plating film 20. A carbon coating 30 is applied.

  As a result, amorphous carbon is grown on the surface of the nickel plating film 20 coated on the surface of the base material 10 so that the exposed nanodiamond particles 21 serve as nuclei so as to spread toward the surface. The surface hardness of the crystalline carbon coating 30 is higher than that without using the nanodiamond particles.

  That is, the amorphous carbon grown using the nanodiamond particles 21 as a nucleus becomes a columnar body 31 that is grown so as to spread on the surface of the amorphous carbon coating 30 along the film thickness direction. Unlike the portion 32, the crystal structure is close to that of nanodiamond particles. As a result, the obtained amorphous carbon film 30 is superior in wear resistance and can reduce the friction coefficient as compared with the conventional one.

  The amorphous carbon coating 30 is a coating (DLC coating) made of so-called DLC (diamond-like carbon). If a carbon columnar body can be obtained, the film may be formed by physical vapor deposition (PVD) using sputtering, vacuum vapor deposition, ionization vapor deposition, ion plating, etc., and plasma treatment or the like is utilized. The film may be formed by chemical vapor deposition (CVD), or may be formed by a combination of these methods. The amorphous carbon coating 30 may contain additional elements such as Si, Ti, Cr, Fe, W, and B, and the surface hardness of the coating is adjusted by adding such elements. You can also.

  The film thickness of the amorphous carbon film 30 is preferably 0.5 to 10 μm, and the surface hardness (the hardness of the portion where the amorphous carbon has grown) is preferably Hv1500 or more. By setting it as such a range, the adhesiveness of a film is high and the sliding member 1 with abrasion resistance can be obtained.

  Note that the hardness of the amorphous carbon film 30 can be adjusted by changing the bias voltage or the like when the film is formed by PVD. In addition, the surface roughness of the amorphous carbon coating 30 can be adjusted to a desired value by controlling the surface roughness of the substrate 10 before film formation and the film formation conditions.

  In this way, even if the surface of the substrate 10 is coated with the amorphous carbon coating 30 via the nickel plating coating 20, and this is used as the sliding member 1 having a high surface pressure and a high sliding frequency. The wear of the amorphous carbon coating 30 on the surface can be suppressed. Furthermore, the wear of the mating member sliding with the sliding member 1 can also be reduced.

Hereinafter, the present invention will be described by way of examples.
Example 1
<Process to coat nickel plating film>
As a base material of the sliding member, a 16 mm × 6 mm × 10 mm dice test piece (surface roughness Ra 0.1 μm) was prepared from a rod of stainless steel (JIS standard: SUS440C, hardened product, surface hardness Hv500). . Next, a Ni-P plating film in which nanodiamond particles were dispersed was coated on the surface of the dice test piece constituting 16 mm × 6 mm as shown below.

Specifically, a nano-diamond particle having an anionic functional group introduced on the surface of a polycrystalline nano-diamond particle having an average particle diameter of 20 nm is added with a surfactant and sufficiently stirred. It added in the electrolytic Ni-P plating solution (pH 5.0). The composition of the electroless Ni—P plating solution is as follows: NiSO ₄ .6H ₂ O is 0.1 mol / L, NaH ₂ PO ₂ .H ₂ O is 0.25 mol / L, and the complexing agent is 0.15 to 0. 0.5 mol / L, Bi is 0.1 to 0.2 mol / L, and the pH adjuster is NaOH · H ₂ SO ₄ .

  Nanodiamond particles were added to the electroless Ni—P plating solution so that the nanodiamond particles (average particle size 20 nm) were contained in 10% by mass in the nickel plating film. Furthermore, as a surfactant for improving the dispersibility of the nanodiamond particles in the plating solution, ridialyldimethylammonium chloride (PDADMAC) was further added.

  Then, generally known pretreatments such as degreasing and acid activity were performed on the surface of the dice specimen as a base material, and the plating treatment was performed by immersing in the above-described plating solution. Thus, a surface of 16 mm × 6 mm of the dice test piece was coated with a 0.5 μm Ni-P plating film.

<Process for coating amorphous carbon film>
An amorphous carbon film (DLC film) was coated on the surface of the Ni-P plating film in which nanodiamond particles were dispersed by an unbalanced magnetron sputtering method. Specifically, a graphite target was used, a base material (dice test piece) was placed in the processing chamber, and the base material temperature was 180 ° C. Next, a gas containing 5% by volume of CH ₄ (methane) in Ar as a reaction gas was allowed to flow into the processing chamber, and a bias voltage of 100 V was applied. As a result, the surface of the substrate was coated with an amorphous carbon film having a thickness of 1.5 μm, and a sliding member corresponding to the present invention was obtained. The obtained amorphous carbon coating had a surface roughness Ra of 0.12 μm and a surface hardness of Hv2000.

(Comparative Example 1)
A sliding member was produced in the same manner as in Example 1. The difference from Example 1 is that the step of coating the nickel plating film is not performed. That is, in the case of Comparative Example 1, a 16 mm × 6 mm × 10 mm dice test piece (JIS standard: SUS440C, quenched product, surface hardness Hv500, surface roughness Ra 0.1 μm) is directly formed on the surface constituting 16 mm × 6 mm. The amorphous carbon film was coated by the unbalanced magnetron sputtering method under the same conditions as in Example 1. Thereby, the sliding member which coat | covered the amorphous carbon film with a film thickness of 1.5 micrometers on the base-material surface was obtained. The obtained amorphous carbon coating had a surface roughness Ra of 0.12 μm and a surface hardness of Hv1800.

(Comparative Example 2)
A sliding member was produced in the same manner as in Example 1. The difference from Example 1 is that nanodiamond particles are not added to the electroless Ni-P plating solution in the step of coating the nickel plating film. That is, in the case of Comparative Example 2, a 16 mm × 6 mm × 10 mm dice test piece (JIS standard: SUS440C, quenched product, surface hardness Hv500, surface roughness Ra 0.1 μm) is formed on the surface constituting nanometers. A Ni-P plating film in which diamond particles are not dispersed was coated.

  And on the same conditions as Example 1, the surface of the Ni-P plating film was coated with an amorphous carbon film by an unbalanced magnetron sputtering method. Thereby, the sliding member which coat | covered the amorphous carbon film with a film thickness of 1.5 micrometers on the base-material surface was obtained. The obtained amorphous carbon coating had a surface roughness Ra of 0.12 μm and a surface hardness of Hv1800.

(Example 2)
A sliding member was produced in the same manner as in Example 1. The difference from Example 1 is the step of coating an amorphous carbon film. In Example 2, the surface of the Ni-P plating film in which nanodiamond particles are dispersed is applied to the surface by plasma CVD. It is the point which coat | covered the crystalline carbon film (DLC) film.

Specifically, a base material (dice test piece) was placed in the processing chamber, and the base material temperature was set to 190 ° C. Next, a gas containing 5% by volume of CH ₄ (methane) in Ar as a reaction gas was introduced into the processing chamber, and a bias voltage was applied at 100V. As a result, the surface of the base material was coated with an amorphous carbon film having a thickness of 1.8 μm, and a sliding member corresponding to the present invention was obtained. The obtained amorphous carbon coating had a surface roughness Ra of 0.13 μm and a surface hardness of Hv1700.

(Comparative Example 3)
A sliding member was produced in the same manner as in Example 2. The difference from Example 1 is that nanodiamond particles are not added to the electroless Ni-P plating solution in the step of coating the nickel plating film. That is, in the case of Comparative Example 2, a 16 mm × 6 mm × 10 mm dice test piece (JIS standard: SUS440C, quenched product, surface hardness Hv500, surface roughness Ra 0.1 μm) is formed on the surface constituting nanometers. A Ni-P plating film in which diamond particles are not dispersed was coated.

  And on the same conditions as Example 2, the surface of the Ni-P plating film was coated with an amorphous carbon film by plasma CVD. Thereby, the sliding member which coat | covered the amorphous carbon film with a film thickness of 1.5 micrometers on the base-material surface was obtained. The obtained amorphous carbon film had a surface roughness Ra of 0.13 μm and a surface hardness of Hv1500.

<Abrasion test>
Cylindrical test pieces having an outer diameter of 35 mm, an inner diameter of 30 mm, and a width of 10 mm were produced using carbon steel (JIS standard: S30C) as the mating member of the sliding members of Examples 1 and 2 and Comparative Examples 1 to 3. The cylindrical specimen was quenched and tempered, and the outer peripheral surface of the cylindrical specimen was polished. The surface roughness of the peripheral surface of the obtained cylindrical test piece was Ra 0.16 μm, and the surface hardness was Hv290.

  Then, the surface of 16 mm × 6 mm (that is, the surface coated with the amorphous carbon film) of the sliding members (dice test pieces) of Examples 1 and 2 and Comparative Examples 1 to 3, and the cylindrical test piece An abrasion test was performed in which a cylindrical test piece was rotated for 30 minutes under the conditions of a load of 60 kgf and a rotation speed of 160 rpm while contacting the outer peripheral surface and supplying lubricating oil (SAE5W-30). The results are shown in FIG.

  The wear amount of the dice test piece corresponding to the sliding member shown in FIG. 2 is the wear scar depth, and the wear amount of the cylindrical test piece is the wear weight. Moreover, the value of the friction coefficient shown in Table 1 is the value of the friction coefficient immediately after 30 minutes from the start of the wear test.

[Result 1 and discussion]
As shown in FIG. 2, in the case of Examples 1 and 2, the amount of wear of each of the dice test piece (sliding member) and the cylindrical test piece (mating member) was less than those of Comparative Examples 1 to 3. . As shown in Table 1, in Examples 1 and 2, the friction coefficient was smaller than those in Comparative Examples 1 to 3. In Examples 1 and 2, the hardness of the amorphous carbon adjacent to the nanodiamond particles exposed on the surface of the nickel plating film was higher than that of the other parts.

  From the above, in the case of Examples 1 and 2, when the surface of the nickel plating film was coated with the amorphous carbon film, the nano diamond particles exposed on the surface of the nickel plating film were used as nuclei. It is considered that the growth of amorphous carbon in the film thickness direction increased the hardness of the amorphous carbon film and improved the wear resistance.

  That is, it is considered that amorphous carbon grown using nanodiamond particles as nuclei has a columnar body along the film thickness direction, and this columnar body has a crystal structure close to that of nanodiamond particles. As a result, it is considered that the obtained amorphous carbon film is superior in wear resistance and has a reduced friction coefficient as compared with the conventional one.

(Example 3)
A sliding member was produced in the same manner as in Example 1. The difference from Example 1 is that in the step of coating the nickel plating film, as shown in FIG. 3, only the average particle diameter of the nanodiamond particles is changed (in order, the average particle diameter is 5 nm, 10 nm, 20 nm, 45 nm). , 60 nm), a surface of a dice test piece coated with a nickel plating film. In any case, the amount of nanodiamond particles added is 10% by mass with respect to the nickel plating film.

  The average particle size (particle size) here refers to a dynamic light scattering particle size distribution analyzer (nanoanalyzer (trade name: Delsa Nano · S) (specification: 30 mW semiconductor laser, measurement principle: photon correlation method)). The average value of the particle size obtained from the particle size distribution was used, and a wear test was conducted in the same manner as in Example 1. The results are shown in FIG.

[Result 2 and discussion]
As shown in FIG. 3, by adding nanodiamond particles having a nanodiamond particle size in the range of 10 to 50 nm, the wear resistance of the sliding member and the wear resistance of the mating member sliding on the slide member are added. It is thought that the property is further improved.

  When the nanodiamond particles have a particle size of less than 10 nm, it is considered that the amorphous carbon does not grow sufficiently with the nanodiamond particles as a nucleus in the step of forming the amorphous carbon film. The hardness of the crystalline carbon film cannot be sufficiently increased. Further, when the particle diameter of the nanodiamond particles exceeds 50 nm, it is considered that the nanodiamond particles are difficult to uniformly disperse on the surface of the nickel plating film. As a result, the surface roughness of the deposited amorphous carbon coating increases, wear of the mating member increases, and the friction coefficient increases.

Example 4
A sliding member was produced in the same manner as in Example 1. The difference from Example 1 is that, in the step of coating the nickel plating film, as shown in FIG. 4, the amount (dispersion amount) of nanodiamond particles added to the nickel plating film is changed (average dispersion in order). The amount is 4 mass%, 5 mass%, 10 mass%, 18 mass%, 25 mass%), and a nickel plating film is coated on the surface of the dice test piece. And the abrasion test was done like Example 1. FIG. The result is shown in FIG.

[Result 2 and discussion]
As shown in FIG. 4, by adding nanodiamond particles such that the nanodiamond particles are contained in the nickel plating film in an amount of 5 to 20% by mass, the wear resistance of the sliding member, and sliding to this is achieved. It is considered that the wear resistance of the mating member is further improved.

  When the nanodiamond particles contained in the nickel plating film are less than 5% by mass, it is considered that the amorphous carbon does not grow sufficiently with the nanodiamond particles as a nucleus in the step of forming the amorphous carbon film. Thus, it is considered that the hardness of the amorphous carbon film could not be sufficiently increased.

  Moreover, when the nanodiamond particle | grains contained in a nickel plating film exceed 20 mass%, it becomes difficult to disperse | distribute nanodiamond particles uniformly on the surface of a nickel plating film. As a result, it is considered that the surface roughness of the formed amorphous carbon coating increases, wear of the mating member increases, and the friction coefficient increases. In addition to this, it was confirmed that the nanodiamond particles were not sufficiently retained by the nickel plating film, and the nanodiamond particles dropped off during sliding, resulting in a decrease in wear resistance.

  Although the embodiments of the present invention have been described in detail above, the present invention is not limited to the above-described embodiments, and various designs can be made without departing from the spirit of the present invention described in the claims. It can be changed.

1: sliding member, 10: base material, 20: nickel plating film, 21: nanodiamond particles, 30: amorphous carbon film, 31: columnar body

Claims (4)

Coating the surface of the substrate with a nickel plating film in which nanodiamond particles are dispersed;
The step of coating the surface of the nickel plating film with the amorphous carbon film while growing the amorphous carbon in the film thickness direction from the nanodiamond particles using the nanodiamond particles exposed on the surface of the nickel plating film as a nucleus and, at least look at including the,
In the step of coating the nickel plating film, a nanodiamond particle having a particle diameter of 10 to 50 nm is added . In the step of coating said nickel plating film, the so said in the nickel plating film nanodiamond particles have contains 5-20% by weight, sliding according to claim 1, characterized in that the addition of the nanodiamond particles Manufacturing method of moving member. A nickel-plated film in which nano-diamond particles are dispersed on the surface of the substrate, and amorphous carbon grown in the film thickness direction from the nano-diamond particles with the nano-diamond particles as a nucleus on the surface of the nickel-plated film. Containing amorphous carbon coating ,
The nanodiamond particles have a particle size in the range of 10 to 50 nm . The sliding member according to claim 3 , wherein the nickel plating film contains 5 to 20 mass% of nanodiamond particles.

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