JP5677306B2 - Organic thin film transistor - Google Patents
Organic thin film transistor Download PDFInfo
- Publication number
- JP5677306B2 JP5677306B2 JP2011532905A JP2011532905A JP5677306B2 JP 5677306 B2 JP5677306 B2 JP 5677306B2 JP 2011532905 A JP2011532905 A JP 2011532905A JP 2011532905 A JP2011532905 A JP 2011532905A JP 5677306 B2 JP5677306 B2 JP 5677306B2
- Authority
- JP
- Japan
- Prior art keywords
- group
- carbon atoms
- film transistor
- thin film
- organic thin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010409 thin film Substances 0.000 title claims description 119
- 125000004432 carbon atom Chemical group C* 0.000 claims description 107
- 238000002347 injection Methods 0.000 claims description 79
- 239000007924 injection Substances 0.000 claims description 79
- 239000004065 semiconductor Substances 0.000 claims description 72
- 150000001875 compounds Chemical class 0.000 claims description 69
- 239000000463 material Substances 0.000 claims description 53
- -1 dithienobenzene Chemical compound 0.000 claims description 43
- 125000000217 alkyl group Chemical group 0.000 claims description 41
- 239000000758 substrate Substances 0.000 claims description 34
- 239000012212 insulator Substances 0.000 claims description 32
- 125000001188 haloalkyl group Chemical group 0.000 claims description 22
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 21
- 229910052757 nitrogen Inorganic materials 0.000 claims description 18
- 125000004663 dialkyl amino group Chemical group 0.000 claims description 17
- 125000001424 substituent group Chemical group 0.000 claims description 17
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims description 16
- 125000002029 aromatic hydrocarbon group Chemical group 0.000 claims description 15
- 125000004438 haloalkoxy group Chemical group 0.000 claims description 15
- 125000005843 halogen group Chemical group 0.000 claims description 15
- 125000004433 nitrogen atom Chemical group N* 0.000 claims description 13
- 150000002894 organic compounds Chemical class 0.000 claims description 13
- 125000004093 cyano group Chemical group *C#N 0.000 claims description 12
- 125000003545 alkoxy group Chemical group 0.000 claims description 10
- 125000006615 aromatic heterocyclic group Chemical group 0.000 claims description 10
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 9
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 claims description 9
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 claims description 8
- 125000004390 alkyl sulfonyl group Chemical group 0.000 claims description 8
- 125000004122 cyclic group Chemical group 0.000 claims description 8
- SLIUAWYAILUBJU-UHFFFAOYSA-N pentacene Chemical compound C1=CC=CC2=CC3=CC4=CC5=CC=CC=C5C=C4C=C3C=C21 SLIUAWYAILUBJU-UHFFFAOYSA-N 0.000 claims description 8
- 125000003282 alkyl amino group Chemical group 0.000 claims description 7
- 125000005103 alkyl silyl group Chemical group 0.000 claims description 7
- 125000004414 alkyl thio group Chemical group 0.000 claims description 7
- 125000004441 haloalkylsulfonyl group Chemical group 0.000 claims description 7
- 125000004995 haloalkylthio group Chemical group 0.000 claims description 7
- IANQTJSKSUMEQM-UHFFFAOYSA-N 1-benzofuran Chemical compound C1=CC=C2OC=CC2=C1 IANQTJSKSUMEQM-UHFFFAOYSA-N 0.000 claims description 6
- FCEHBMOGCRZNNI-UHFFFAOYSA-N 1-benzothiophene Chemical compound C1=CC=C2SC=CC2=C1 FCEHBMOGCRZNNI-UHFFFAOYSA-N 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- KAESVJOAVNADME-UHFFFAOYSA-N Pyrrole Chemical compound C=1C=CNC=1 KAESVJOAVNADME-UHFFFAOYSA-N 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 6
- WDECIBYCCFPHNR-UHFFFAOYSA-N chrysene Chemical compound C1=CC=CC2=CC=C3C4=CC=CC=C4C=CC3=C21 WDECIBYCCFPHNR-UHFFFAOYSA-N 0.000 claims description 6
- TXCDCPKCNAJMEE-UHFFFAOYSA-N dibenzofuran Chemical compound C1=CC=C2C3=CC=CC=C3OC2=C1 TXCDCPKCNAJMEE-UHFFFAOYSA-N 0.000 claims description 6
- IYYZUPMFVPLQIF-UHFFFAOYSA-N dibenzothiophene Chemical compound C1=CC=C2C3=CC=CC=C3SC2=C1 IYYZUPMFVPLQIF-UHFFFAOYSA-N 0.000 claims description 6
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 claims description 6
- YNPNZTXNASCQKK-UHFFFAOYSA-N phenanthrene Chemical compound C1=CC=C2C3=CC=CC=C3C=CC2=C1 YNPNZTXNASCQKK-UHFFFAOYSA-N 0.000 claims description 6
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 claims description 4
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical compound N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 claims description 4
- XBDYBAVJXHJMNQ-UHFFFAOYSA-N Tetrahydroanthracene Natural products C1=CC=C2C=C(CCCC3)C3=CC2=C1 XBDYBAVJXHJMNQ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052731 fluorine Inorganic materials 0.000 claims description 4
- 125000000623 heterocyclic group Chemical group 0.000 claims description 4
- 125000006340 pentafluoro ethyl group Chemical group FC(F)(F)C(F)(F)* 0.000 claims description 4
- 229920006395 saturated elastomer Polymers 0.000 claims description 4
- IFLREYGFSNHWGE-UHFFFAOYSA-N tetracene Chemical compound C1=CC=CC2=CC3=CC4=CC=CC=C4C=C3C=C21 IFLREYGFSNHWGE-UHFFFAOYSA-N 0.000 claims description 4
- 125000002023 trifluoromethyl group Chemical group FC(F)(F)* 0.000 claims description 4
- 125000001153 fluoro group Chemical group F* 0.000 claims description 3
- FNQJDLTXOVEEFB-UHFFFAOYSA-N 1,2,3-benzothiadiazole Chemical compound C1=CC=C2SN=NC2=C1 FNQJDLTXOVEEFB-UHFFFAOYSA-N 0.000 claims description 2
- 239000005964 Acibenzolar-S-methyl Substances 0.000 claims description 2
- CZPWVGJYEJSRLH-UHFFFAOYSA-N Pyrimidine Chemical compound C1=CN=CN=C1 CZPWVGJYEJSRLH-UHFFFAOYSA-N 0.000 claims description 2
- FZWLAAWBMGSTSO-UHFFFAOYSA-N Thiazole Chemical compound C1=CSC=N1 FZWLAAWBMGSTSO-UHFFFAOYSA-N 0.000 claims description 2
- 150000001721 carbon Chemical group 0.000 claims description 2
- 125000003367 polycyclic group Chemical group 0.000 claims description 2
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 125000004429 atom Chemical group 0.000 claims 1
- 239000010410 layer Substances 0.000 description 172
- 238000000034 method Methods 0.000 description 55
- 239000010408 film Substances 0.000 description 52
- 229910052751 metal Inorganic materials 0.000 description 45
- 239000002184 metal Substances 0.000 description 45
- 230000006870 function Effects 0.000 description 27
- 239000000126 substance Substances 0.000 description 18
- 230000005669 field effect Effects 0.000 description 17
- 238000000151 deposition Methods 0.000 description 15
- 239000010931 gold Substances 0.000 description 15
- 230000015572 biosynthetic process Effects 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 12
- 239000006185 dispersion Substances 0.000 description 11
- 239000011777 magnesium Substances 0.000 description 11
- 238000000576 coating method Methods 0.000 description 10
- 230000008021 deposition Effects 0.000 description 10
- 239000010419 fine particle Substances 0.000 description 10
- 239000000243 solution Substances 0.000 description 10
- 238000004544 sputter deposition Methods 0.000 description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 9
- 229910052737 gold Inorganic materials 0.000 description 9
- 239000012298 atmosphere Substances 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 8
- 239000010949 copper Substances 0.000 description 8
- 150000002739 metals Chemical class 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 239000007772 electrode material Substances 0.000 description 7
- 238000005401 electroluminescence Methods 0.000 description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 7
- 229910052749 magnesium Inorganic materials 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- 238000007639 printing Methods 0.000 description 7
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 6
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 6
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 6
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 6
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 6
- 239000011575 calcium Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 239000001301 oxygen Substances 0.000 description 6
- 229910052760 oxygen Inorganic materials 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 229910052709 silver Inorganic materials 0.000 description 6
- 238000001771 vacuum deposition Methods 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 5
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical group C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 description 5
- 150000004703 alkoxides Chemical class 0.000 description 5
- 238000007743 anodising Methods 0.000 description 5
- 238000001035 drying Methods 0.000 description 5
- 239000011572 manganese Substances 0.000 description 5
- 239000010955 niobium Substances 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000000746 purification Methods 0.000 description 5
- 239000011734 sodium Substances 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- 229920001940 conductive polymer Polymers 0.000 description 4
- 239000003792 electrolyte Substances 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- RBTKNAXYKSUFRK-UHFFFAOYSA-N heliogen blue Chemical compound [Cu].[N-]1C2=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=NC([N-]1)=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=N2 RBTKNAXYKSUFRK-UHFFFAOYSA-N 0.000 description 4
- 229910010272 inorganic material Inorganic materials 0.000 description 4
- 229910052744 lithium Inorganic materials 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 4
- IEQIEDJGQAUEQZ-UHFFFAOYSA-N phthalocyanine Chemical class N1C(N=C2C3=CC=CC=C3C(N=C3C4=CC=CC=C4C(=N4)N3)=N2)=C(C=CC=C2)C2=C1N=C1C2=CC=CC=C2C4=N1 IEQIEDJGQAUEQZ-UHFFFAOYSA-N 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 230000004044 response Effects 0.000 description 4
- 239000004332 silver Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- 238000000859 sublimation Methods 0.000 description 4
- 230000008022 sublimation Effects 0.000 description 4
- 238000003786 synthesis reaction Methods 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- 239000011701 zinc Substances 0.000 description 4
- BCASZEAAHJEDAL-PHEQNACWSA-N 1,4-bis[(e)-2-(4-methylphenyl)ethenyl]benzene Chemical compound C1=CC(C)=CC=C1\C=C\C(C=C1)=CC=C1\C=C\C1=CC=C(C)C=C1 BCASZEAAHJEDAL-PHEQNACWSA-N 0.000 description 3
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- 239000004373 Pullulan Substances 0.000 description 3
- 229920001218 Pullulan Polymers 0.000 description 3
- RWRDLPDLKQPQOW-UHFFFAOYSA-N Pyrrolidine Chemical compound C1CCNC1 RWRDLPDLKQPQOW-UHFFFAOYSA-N 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 229910052791 calcium Inorganic materials 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000002612 dispersion medium Substances 0.000 description 3
- 229910052738 indium Inorganic materials 0.000 description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 3
- 150000002484 inorganic compounds Chemical class 0.000 description 3
- 229910052809 inorganic oxide Inorganic materials 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 229910052741 iridium Inorganic materials 0.000 description 3
- 229910052746 lanthanum Inorganic materials 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 239000011368 organic material Substances 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- 239000004417 polycarbonate Substances 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229910052700 potassium Inorganic materials 0.000 description 3
- 239000002243 precursor Substances 0.000 description 3
- 235000019423 pullulan Nutrition 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229910052702 rhenium Inorganic materials 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 229910052708 sodium Inorganic materials 0.000 description 3
- PCCVSPMFGIFTHU-UHFFFAOYSA-N tetracyanoquinodimethane Chemical compound N#CC(C#N)=C1C=CC(=C(C#N)C#N)C=C1 PCCVSPMFGIFTHU-UHFFFAOYSA-N 0.000 description 3
- 229930192474 thiophene Natural products 0.000 description 3
- 239000011135 tin Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229910052727 yttrium Inorganic materials 0.000 description 3
- 229910052725 zinc Inorganic materials 0.000 description 3
- 125000001731 2-cyanoethyl group Chemical group [H]C([H])(*)C([H])([H])C#N 0.000 description 2
- JESXATFQYMPTNL-UHFFFAOYSA-N 2-ethenylphenol Chemical compound OC1=CC=CC=C1C=C JESXATFQYMPTNL-UHFFFAOYSA-N 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 2
- UEXCJVNBTNXOEH-UHFFFAOYSA-N Ethynylbenzene Chemical compound C#CC1=CC=CC=C1 UEXCJVNBTNXOEH-UHFFFAOYSA-N 0.000 description 2
- 229910001111 Fine metal Inorganic materials 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 2
- 239000002033 PVDF binder Substances 0.000 description 2
- NQRYJNQNLNOLGT-UHFFFAOYSA-N Piperidine Chemical compound C1CCNCC1 NQRYJNQNLNOLGT-UHFFFAOYSA-N 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 229910020776 SixNy Inorganic materials 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- RWBMMASKJODNSV-UHFFFAOYSA-N [1]benzothiolo[2,3-g][1]benzothiole Chemical compound C1=CC=C2C3=C(SC=C4)C4=CC=C3SC2=C1 RWBMMASKJODNSV-UHFFFAOYSA-N 0.000 description 2
- VNSWULZVUKFJHK-UHFFFAOYSA-N [Sr].[Bi] Chemical compound [Sr].[Bi] VNSWULZVUKFJHK-UHFFFAOYSA-N 0.000 description 2
- 150000001335 aliphatic alkanes Chemical class 0.000 description 2
- 150000001340 alkali metals Chemical class 0.000 description 2
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 2
- 150000001342 alkaline earth metals Chemical class 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 239000010407 anodic oxide Substances 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 229910052788 barium Inorganic materials 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- 229910002115 bismuth titanate Inorganic materials 0.000 description 2
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 2
- 239000004327 boric acid Substances 0.000 description 2
- 229910052792 caesium Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 2
- 238000003795 desorption Methods 0.000 description 2
- 239000003599 detergent Substances 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 239000008151 electrolyte solution Substances 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 229910052733 gallium Inorganic materials 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 238000007733 ion plating Methods 0.000 description 2
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- ZXEKIIBDNHEJCQ-UHFFFAOYSA-N isobutanol Chemical compound CC(C)CO ZXEKIIBDNHEJCQ-UHFFFAOYSA-N 0.000 description 2
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 2
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 239000002923 metal particle Substances 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 2
- YTVNOVQHSGMMOV-UHFFFAOYSA-N naphthalenetetracarboxylic dianhydride Chemical compound C1=CC(C(=O)OC2=O)=C3C2=CC=C2C(=O)OC(=O)C1=C32 YTVNOVQHSGMMOV-UHFFFAOYSA-N 0.000 description 2
- 125000001624 naphthyl group Chemical group 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 229920003986 novolac Polymers 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000012071 phase Substances 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000004926 polymethyl methacrylate Substances 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 229920000915 polyvinyl chloride Polymers 0.000 description 2
- 239000004800 polyvinyl chloride Substances 0.000 description 2
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 2
- 150000004032 porphyrins Chemical class 0.000 description 2
- 239000011591 potassium Substances 0.000 description 2
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- 229910052701 rubidium Inorganic materials 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- 229910052706 scandium Inorganic materials 0.000 description 2
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical compound [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910001936 tantalum oxide Inorganic materials 0.000 description 2
- 229910052714 tellurium Inorganic materials 0.000 description 2
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 2
- FHCPAXDKURNIOZ-UHFFFAOYSA-N tetrathiafulvalene Chemical compound S1C=CSC1=C1SC=CS1 FHCPAXDKURNIOZ-UHFFFAOYSA-N 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 2
- 239000011787 zinc oxide Substances 0.000 description 2
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical group C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- IJAAWBHHXIWAHM-UHFFFAOYSA-N 1,4-bis(2-phenylethenyl)benzene Chemical compound C=1C=CC=CC=1C=CC(C=C1)=CC=C1C=CC1=CC=CC=C1 IJAAWBHHXIWAHM-UHFFFAOYSA-N 0.000 description 1
- QKLPIYTUUFFRLV-YTEMWHBBSA-N 1,4-bis[(e)-2-(2-methylphenyl)ethenyl]benzene Chemical compound CC1=CC=CC=C1\C=C\C(C=C1)=CC=C1\C=C\C1=CC=CC=C1C QKLPIYTUUFFRLV-YTEMWHBBSA-N 0.000 description 1
- XBDQJALUKGQTAV-UHFFFAOYSA-N 1,4-bis[2-(3-methylphenyl)ethenyl]benzene Chemical compound CC1=CC=CC(C=CC=2C=CC(C=CC=3C=C(C)C=CC=3)=CC=2)=C1 XBDQJALUKGQTAV-UHFFFAOYSA-N 0.000 description 1
- SWJPEBQEEAHIGZ-UHFFFAOYSA-N 1,4-dibromobenzene Chemical compound BrC1=CC=C(Br)C=C1 SWJPEBQEEAHIGZ-UHFFFAOYSA-N 0.000 description 1
- 125000006083 1-bromoethyl group Chemical group 0.000 description 1
- IDQBJILTOGBZCR-UHFFFAOYSA-N 1-butoxypropan-1-ol Chemical compound CCCCOC(O)CC IDQBJILTOGBZCR-UHFFFAOYSA-N 0.000 description 1
- 125000001478 1-chloroethyl group Chemical group [H]C([H])([H])C([H])(Cl)* 0.000 description 1
- JLBXCKSMESLGTJ-UHFFFAOYSA-N 1-ethoxypropan-1-ol Chemical compound CCOC(O)CC JLBXCKSMESLGTJ-UHFFFAOYSA-N 0.000 description 1
- SVIZHJGLXNKEHP-UHFFFAOYSA-N 1-heptoxyethanol Chemical compound CCCCCCCOC(C)O SVIZHJGLXNKEHP-UHFFFAOYSA-N 0.000 description 1
- OYTCWIBDTYOGCL-UHFFFAOYSA-N 1-heptoxypropan-1-ol Chemical compound CCCCCCCOC(O)CC OYTCWIBDTYOGCL-UHFFFAOYSA-N 0.000 description 1
- LHENQXAPVKABON-UHFFFAOYSA-N 1-methoxypropan-1-ol Chemical compound CCC(O)OC LHENQXAPVKABON-UHFFFAOYSA-N 0.000 description 1
- QACWCDDNEROCPA-UHFFFAOYSA-N 1-pentoxyethanol Chemical compound CCCCCOC(C)O QACWCDDNEROCPA-UHFFFAOYSA-N 0.000 description 1
- HRDPFSGJSQGPIW-UHFFFAOYSA-N 1-pentoxypropan-1-ol Chemical compound CCCCCOC(O)CC HRDPFSGJSQGPIW-UHFFFAOYSA-N 0.000 description 1
- NQRACBRRMUBSDA-UHFFFAOYSA-N 17-azahexacyclo[10.9.2.02,7.03,19.08,23.015,22]tricosa-1(21),2(7),3,5,8,10,12(23),13,15(22),19-decaene-16,18-dione Chemical compound C12=CC=C3C=CC=C4C5=CC=CC=6C(=CC=C(C1=C34)C56)C(NC2=O)=O NQRACBRRMUBSDA-UHFFFAOYSA-N 0.000 description 1
- 238000005160 1H NMR spectroscopy Methods 0.000 description 1
- UVAMFBJPMUMURT-UHFFFAOYSA-N 2,3,4,5,6-pentafluorobenzenethiol Chemical compound FC1=C(F)C(F)=C(S)C(F)=C1F UVAMFBJPMUMURT-UHFFFAOYSA-N 0.000 description 1
- MLJLGKWMLOIYDL-UHFFFAOYSA-N 2,6-bis(2-phenylethynyl)anthracene Chemical compound C1=CC=CC=C1C#CC1=CC=C(C=C2C(C=CC(=C2)C#CC=2C=CC=CC=2)=C2)C2=C1 MLJLGKWMLOIYDL-UHFFFAOYSA-N 0.000 description 1
- SBJIDUSVEICMRY-UHFFFAOYSA-N 2,7-diphenyl-[1]benzothiolo[3,2-b][1]benzothiole Chemical compound C1=CC=CC=C1C1=CC=C2C(SC3=CC(=CC=C33)C=4C=CC=CC=4)=C3SC2=C1 SBJIDUSVEICMRY-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- 125000005999 2-bromoethyl group Chemical group 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- KZNRNQGTVRTDPN-UHFFFAOYSA-N 2-chloro-1,4-dimethylbenzene Chemical group CC1=CC=C(C)C(Cl)=C1 KZNRNQGTVRTDPN-UHFFFAOYSA-N 0.000 description 1
- 125000001340 2-chloroethyl group Chemical group [H]C([H])(Cl)C([H])([H])* 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- 125000004777 2-fluoroethyl group Chemical group [H]C([H])(F)C([H])([H])* 0.000 description 1
- YEYKMVJDLWJFOA-UHFFFAOYSA-N 2-propoxyethanol Chemical compound CCCOCCO YEYKMVJDLWJFOA-UHFFFAOYSA-N 0.000 description 1
- MHIITNFQDPFSES-UHFFFAOYSA-N 25,26,27,28-tetrazahexacyclo[16.6.1.13,6.18,11.113,16.019,24]octacosa-1(25),2,4,6,8(27),9,11,13,15,17,19,21,23-tridecaene Chemical compound N1C(C=C2C3=CC=CC=C3C(C=C3NC(=C4)C=C3)=N2)=CC=C1C=C1C=CC4=N1 MHIITNFQDPFSES-UHFFFAOYSA-N 0.000 description 1
- VRBFTYUMFJWSJY-UHFFFAOYSA-N 28804-46-8 Chemical compound ClC1CC(C=C2)=CC=C2C(Cl)CC2=CC=C1C=C2 VRBFTYUMFJWSJY-UHFFFAOYSA-N 0.000 description 1
- DMEVMYSQZPJFOK-UHFFFAOYSA-N 3,4,5,6,9,10-hexazatetracyclo[12.4.0.02,7.08,13]octadeca-1(18),2(7),3,5,8(13),9,11,14,16-nonaene Chemical group N1=NN=C2C3=CC=CC=C3C3=CC=NN=C3C2=N1 DMEVMYSQZPJFOK-UHFFFAOYSA-N 0.000 description 1
- OGGKVJMNFFSDEV-UHFFFAOYSA-N 3-methyl-n-[4-[4-(n-(3-methylphenyl)anilino)phenyl]phenyl]-n-phenylaniline Chemical group CC1=CC=CC(N(C=2C=CC=CC=2)C=2C=CC(=CC=2)C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C=C(C)C=CC=2)=C1 OGGKVJMNFFSDEV-UHFFFAOYSA-N 0.000 description 1
- LDMRLRNXHLPZJN-UHFFFAOYSA-N 3-propoxypropan-1-ol Chemical compound CCCOCCCO LDMRLRNXHLPZJN-UHFFFAOYSA-N 0.000 description 1
- RJCHVBHJXJDUNL-UHFFFAOYSA-N 5,8-dicarbamoylnaphthalene-1,4-dicarboxylic acid Chemical compound C1=CC(C(O)=O)=C2C(C(=N)O)=CC=C(C(O)=N)C2=C1C(O)=O RJCHVBHJXJDUNL-UHFFFAOYSA-N 0.000 description 1
- VYQBXRLSOGGQPU-UHFFFAOYSA-N 6-(dithieno[2,3-a:2',3'-d]thiophen-6-yl)dithieno[2,3-a:2',3'-d]thiophene Chemical compound C1=CSC2=C1SC1=C2SC(C2=CC=3SC=4C=CSC=4C=3S2)=C1 VYQBXRLSOGGQPU-UHFFFAOYSA-N 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical group [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- ALLZRPZUSMGILZ-UHFFFAOYSA-N 9,10-bis(phenylcarbamoyl)perylene-3,4-dicarboxylic acid Chemical compound C=12C3=C(C(=O)NC=4C=CC=CC=4)C=CC=1C(C1=4)=CC=C(C(O)=O)C=4C(C(=O)O)=CC=C1C2=CC=C3C(=O)NC1=CC=CC=C1 ALLZRPZUSMGILZ-UHFFFAOYSA-N 0.000 description 1
- WEROGEOPARLSCA-UHFFFAOYSA-N 9,10-dicarbamoyl-7,8-dioctylperylene-3,4-dicarboxylic acid Chemical compound C(CCCCCCC)C1=C(C=2C3=CC=C(C=4C(=CC=C(C5=CC=C(C(=C1C(O)=N)C5=2)C(O)=N)C=43)C(=O)O)C(=O)O)CCCCCCCC WEROGEOPARLSCA-UHFFFAOYSA-N 0.000 description 1
- 229920003026 Acene Polymers 0.000 description 1
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- JMQPPHPYGAOVCB-UHFFFAOYSA-N C1Oc(ccc(C#Cc(cc2)ccc2C#Cc(cc2)cc3c2OCCO3)c2)c2OC1 Chemical compound C1Oc(ccc(C#Cc(cc2)ccc2C#Cc(cc2)cc3c2OCCO3)c2)c2OC1 JMQPPHPYGAOVCB-UHFFFAOYSA-N 0.000 description 1
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical class C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
- QBFKQXBKBXASDR-UHFFFAOYSA-N CCCCCCc(cc1)ccc1C#Cc1c(cccc2C#Cc3ccc(CCCCCC)cc3)c2ccc1 Chemical compound CCCCCCc(cc1)ccc1C#Cc1c(cccc2C#Cc3ccc(CCCCCC)cc3)c2ccc1 QBFKQXBKBXASDR-UHFFFAOYSA-N 0.000 description 1
- UDODWCJBZXHNOV-UHFFFAOYSA-N Cc(cc1)ccc1C#Cc(c1ccc2)cccc1c2C#Cc1ccc(C)cc1 Chemical compound Cc(cc1)ccc1C#Cc(c1ccc2)cccc1c2C#Cc1ccc(C)cc1 UDODWCJBZXHNOV-UHFFFAOYSA-N 0.000 description 1
- DXMKEVQLLKHRDI-UHFFFAOYSA-N Cc1ccc2c(C#Cc3ccc(C(F)(F)F)cc3)cccc2c1C#Cc1ccc(C(F)(F)F)cc1 Chemical compound Cc1ccc2c(C#Cc3ccc(C(F)(F)F)cc3)cccc2c1C#Cc1ccc(C(F)(F)F)cc1 DXMKEVQLLKHRDI-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910021595 Copper(I) iodide Inorganic materials 0.000 description 1
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229920000219 Ethylene vinyl alcohol Polymers 0.000 description 1
- 229910052693 Europium Inorganic materials 0.000 description 1
- DQBGWZPWXVQCMI-UHFFFAOYSA-N FC(c(cc1)ccc1C#Cc(ccc1c2)cc1ccc2C#Cc1ccc(C(F)(F)F)cc1)(F)F Chemical compound FC(c(cc1)ccc1C#Cc(ccc1c2)cc1ccc2C#Cc1ccc(C(F)(F)F)cc1)(F)F DQBGWZPWXVQCMI-UHFFFAOYSA-N 0.000 description 1
- RMTUPGUJICFOPZ-UHFFFAOYSA-N Fc(cc1)ccc1C#Cc1ccc(cc(cc2)C#Cc(cc3)ccc3F)c2c1 Chemical compound Fc(cc1)ccc1C#Cc1ccc(cc(cc2)C#Cc(cc3)ccc3F)c2c1 RMTUPGUJICFOPZ-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 229910005793 GeO 2 Inorganic materials 0.000 description 1
- 229910000799 K alloy Inorganic materials 0.000 description 1
- 229910018068 Li 2 O Inorganic materials 0.000 description 1
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 1
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 1
- 229910015621 MoO Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 229920000144 PEDOT:PSS Polymers 0.000 description 1
- 229930040373 Paraformaldehyde Natural products 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- 239000006087 Silane Coupling Agent Substances 0.000 description 1
- 229920002125 Sokalan® Polymers 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- MCEWYIDBDVPMES-UHFFFAOYSA-N [60]pcbm Chemical compound C123C(C4=C5C6=C7C8=C9C%10=C%11C%12=C%13C%14=C%15C%16=C%17C%18=C(C=%19C=%20C%18=C%18C%16=C%13C%13=C%11C9=C9C7=C(C=%20C9=C%13%18)C(C7=%19)=C96)C6=C%11C%17=C%15C%13=C%15C%14=C%12C%12=C%10C%10=C85)=C9C7=C6C2=C%11C%13=C2C%15=C%12C%10=C4C23C1(CCCC(=O)OC)C1=CC=CC=C1 MCEWYIDBDVPMES-UHFFFAOYSA-N 0.000 description 1
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 description 1
- NPRDEIDCAUHOJU-UHFFFAOYSA-N [Pt].N1C(C=C2N=C(C=C3NC(=C4)C=C3)C=C2)=CC=C1C=C1C=CC4=N1 Chemical compound [Pt].N1C(C=C2N=C(C=C3NC(=C4)C=C3)C=C2)=CC=C1C=C1C=CC4=N1 NPRDEIDCAUHOJU-UHFFFAOYSA-N 0.000 description 1
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 229910001413 alkali metal ion Inorganic materials 0.000 description 1
- 229910001420 alkaline earth metal ion Chemical group 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 238000002048 anodisation reaction Methods 0.000 description 1
- 125000005428 anthryl group Chemical group [H]C1=C([H])C([H])=C2C([H])=C3C(*)=C([H])C([H])=C([H])C3=C([H])C2=C1[H] 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- QQHJESKHUUVSIC-UHFFFAOYSA-N antimony lead Chemical compound [Sb].[Pb] QQHJESKHUUVSIC-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 238000007611 bar coating method Methods 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 229910052454 barium strontium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 229910021523 barium zirconate Inorganic materials 0.000 description 1
- DQBAOWPVHRWLJC-UHFFFAOYSA-N barium(2+);dioxido(oxo)zirconium Chemical compound [Ba+2].[O-][Zr]([O-])=O DQBAOWPVHRWLJC-UHFFFAOYSA-N 0.000 description 1
- 125000000499 benzofuranyl group Chemical group O1C(=CC2=C1C=CC=C2)* 0.000 description 1
- 125000004196 benzothienyl group Chemical group S1C(=CC2=C1C=CC=C2)* 0.000 description 1
- 239000004305 biphenyl Substances 0.000 description 1
- 229910000416 bismuth oxide Inorganic materials 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 125000005997 bromomethyl group Chemical group 0.000 description 1
- XZCJVWCMJYNSQO-UHFFFAOYSA-N butyl pbd Chemical compound C1=CC(C(C)(C)C)=CC=C1C1=NN=C(C=2C=CC(=CC=2)C=2C=CC=CC=2)O1 XZCJVWCMJYNSQO-UHFFFAOYSA-N 0.000 description 1
- XMKPNRNCEZGCTH-UHFFFAOYSA-N c(cc1)ccc1C#Cc(c1ccc2)cccc1c2C#Cc1ccccc1 Chemical compound c(cc1)ccc1C#Cc(c1ccc2)cccc1c2C#Cc1ccccc1 XMKPNRNCEZGCTH-UHFFFAOYSA-N 0.000 description 1
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 1
- 125000000609 carbazolyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3NC12)* 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000010538 cationic polymerization reaction Methods 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000012824 chemical production Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 125000004218 chloromethyl group Chemical group [H]C([H])(Cl)* 0.000 description 1
- KRVSOGSZCMJSLX-UHFFFAOYSA-L chromic acid Substances O[Cr](O)(=O)=O KRVSOGSZCMJSLX-UHFFFAOYSA-L 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000975 co-precipitation Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000000366 colloid method Methods 0.000 description 1
- 238000004440 column chromatography Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229920000547 conjugated polymer Polymers 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- XCJYREBRNVKWGJ-UHFFFAOYSA-N copper(II) phthalocyanine Chemical compound [Cu+2].C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 XCJYREBRNVKWGJ-UHFFFAOYSA-N 0.000 description 1
- LSXDOTMGLUJQCM-UHFFFAOYSA-M copper(i) iodide Chemical compound I[Cu] LSXDOTMGLUJQCM-UHFFFAOYSA-M 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000002484 cyclic voltammetry Methods 0.000 description 1
- 125000001995 cyclobutyl group Chemical group [H]C1([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 1
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 125000005509 dibenzothiophenyl group Chemical group 0.000 description 1
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 1
- 238000007607 die coating method Methods 0.000 description 1
- 125000001028 difluoromethyl group Chemical group [H]C(F)(F)* 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000012156 elution solvent Substances 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 125000004216 fluoromethyl group Chemical group [H]C([H])(F)* 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 229910052730 francium Inorganic materials 0.000 description 1
- KLMCZVJOEAUDNE-UHFFFAOYSA-N francium atom Chemical compound [Fr] KLMCZVJOEAUDNE-UHFFFAOYSA-N 0.000 description 1
- 229910003472 fullerene Inorganic materials 0.000 description 1
- AWJWCTOOIBYHON-UHFFFAOYSA-N furo[3,4-b]pyrazine-5,7-dione Chemical compound C1=CN=C2C(=O)OC(=O)C2=N1 AWJWCTOOIBYHON-UHFFFAOYSA-N 0.000 description 1
- 229910021397 glassy carbon Inorganic materials 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- KDEZIUOWTXJEJK-UHFFFAOYSA-N heptacene Chemical compound C1=CC=CC2=CC3=CC4=CC5=CC6=CC7=CC=CC=C7C=C6C=C5C=C4C=C3C=C21 KDEZIUOWTXJEJK-UHFFFAOYSA-N 0.000 description 1
- QSQIGGCOCHABAP-UHFFFAOYSA-N hexacene Chemical compound C1=CC=CC2=CC3=CC4=CC5=CC6=CC=CC=C6C=C5C=C4C=C3C=C21 QSQIGGCOCHABAP-UHFFFAOYSA-N 0.000 description 1
- 238000004128 high performance liquid chromatography Methods 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000000976 ink Substances 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- COQAIRYMVBNUKQ-UHFFFAOYSA-J magnesium;barium(2+);tetrafluoride Chemical compound [F-].[F-].[F-].[F-].[Mg+2].[Ba+2] COQAIRYMVBNUKQ-UHFFFAOYSA-J 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- ZGEGCLOFRBLKSE-UHFFFAOYSA-N methylene hexane Natural products CCCCCC=C ZGEGCLOFRBLKSE-UHFFFAOYSA-N 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- LNOPIUAQISRISI-UHFFFAOYSA-N n'-hydroxy-2-propan-2-ylsulfonylethanimidamide Chemical compound CC(C)S(=O)(=O)CC(N)=NO LNOPIUAQISRISI-UHFFFAOYSA-N 0.000 description 1
- 125000004108 n-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000003136 n-heptyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000001280 n-hexyl group Chemical group C(CCCCC)* 0.000 description 1
- 125000000740 n-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 239000012044 organic layer Substances 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- UJMWVICAENGCRF-UHFFFAOYSA-N oxygen difluoride Chemical compound FOF UJMWVICAENGCRF-UHFFFAOYSA-N 0.000 description 1
- SJHHDDDGXWOYOE-UHFFFAOYSA-N oxytitamium phthalocyanine Chemical compound [Ti+2]=O.C12=CC=CC=C2C(N=C2[N-]C(C3=CC=CC=C32)=N2)=NC1=NC([C]1C=CC=CC1=1)=NC=1N=C1[C]3C=CC=CC3=C2[N-]1 SJHHDDDGXWOYOE-UHFFFAOYSA-N 0.000 description 1
- NFHFRUOZVGFOOS-UHFFFAOYSA-N palladium;triphenylphosphane Chemical compound [Pd].C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1.C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 NFHFRUOZVGFOOS-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000006072 paste Substances 0.000 description 1
- 125000003933 pentacenyl group Chemical group C1(=CC=CC2=CC3=CC4=CC5=CC=CC=C5C=C4C=C3C=C12)* 0.000 description 1
- 125000005003 perfluorobutyl group Chemical group FC(F)(F)C(F)(F)C(F)(F)C(F)(F)* 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 1
- 125000005561 phenanthryl group Chemical group 0.000 description 1
- 238000000016 photochemical curing Methods 0.000 description 1
- 238000001420 photoelectron spectroscopy Methods 0.000 description 1
- 239000012994 photoredox catalyst Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229920002493 poly(chlorotrifluoroethylene) Polymers 0.000 description 1
- 229920000052 poly(p-xylylene) Polymers 0.000 description 1
- 229920000553 poly(phenylenevinylene) Polymers 0.000 description 1
- 229920000172 poly(styrenesulfonic acid) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920002401 polyacrylamide Polymers 0.000 description 1
- 229920000058 polyacrylate Polymers 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000767 polyaniline Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000005023 polychlorotrifluoroethylene (PCTFE) polymer Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229940005642 polystyrene sulfonic acid Drugs 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- BITYAPCSNKJESK-UHFFFAOYSA-N potassiosodium Chemical compound [Na].[K] BITYAPCSNKJESK-UHFFFAOYSA-N 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- YFGMQDNQVFJKTR-UHFFFAOYSA-N ptcdi-c8 Chemical compound C=12C3=CC=C(C(N(CCCCCCCC)C4=O)=O)C2=C4C=CC=1C1=CC=C2C(=O)N(CCCCCCCC)C(=O)C4=CC=C3C1=C42 YFGMQDNQVFJKTR-UHFFFAOYSA-N 0.000 description 1
- 125000002943 quinolinyl group Chemical group N1=C(C=CC2=CC=CC=C12)* 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
- 238000001953 recrystallisation Methods 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 230000002940 repellent Effects 0.000 description 1
- 239000005871 repellent Substances 0.000 description 1
- 229920003987 resole Polymers 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 1
- YYMBJDOZVAITBP-UHFFFAOYSA-N rubrene Chemical compound C1=CC=CC=C1C(C1=C(C=2C=CC=CC=2)C2=CC=CC=C2C(C=2C=CC=CC=2)=C11)=C(C=CC=C2)C2=C1C1=CC=CC=C1 YYMBJDOZVAITBP-UHFFFAOYSA-N 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 1
- MABNMNVCOAICNO-UHFFFAOYSA-N selenophene Chemical compound C=1C=C[se]C=1 MABNMNVCOAICNO-UHFFFAOYSA-N 0.000 description 1
- 238000001338 self-assembly Methods 0.000 description 1
- 238000010898 silica gel chromatography Methods 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- 125000005504 styryl group Chemical group 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 125000001935 tetracenyl group Chemical group C1(=CC=CC2=CC3=CC4=CC=CC=C4C=C3C=C12)* 0.000 description 1
- 229910052716 thallium Inorganic materials 0.000 description 1
- BKVIYDNLLOSFOA-UHFFFAOYSA-N thallium Chemical compound [Tl] BKVIYDNLLOSFOA-UHFFFAOYSA-N 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- ALYPESYVXOPFNK-UHFFFAOYSA-N thieno[2',3':4,5]thieno[3,2-b]thieno[2',3':4,5]thieno[2,3-d]thiophene Chemical compound C1=CSC2=C1SC1=C2SC2=C1SC1=C2SC=C1 ALYPESYVXOPFNK-UHFFFAOYSA-N 0.000 description 1
- CRUIOQJBPNKOJG-UHFFFAOYSA-N thieno[3,2-e][1]benzothiole Chemical compound C1=C2SC=CC2=C2C=CSC2=C1 CRUIOQJBPNKOJG-UHFFFAOYSA-N 0.000 description 1
- 125000001544 thienyl group Chemical group 0.000 description 1
- WEMNATFLVGEPEW-UHFFFAOYSA-N thiophene Chemical compound C=1C=CSC=1.C=1C=CSC=1 WEMNATFLVGEPEW-UHFFFAOYSA-N 0.000 description 1
- 150000003577 thiophenes Chemical class 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- PYJJCSYBSYXGQQ-UHFFFAOYSA-N trichloro(octadecyl)silane Chemical compound CCCCCCCCCCCCCCCCCC[Si](Cl)(Cl)Cl PYJJCSYBSYXGQQ-UHFFFAOYSA-N 0.000 description 1
- 229910001935 vanadium oxide Inorganic materials 0.000 description 1
- 210000000707 wrist Anatomy 0.000 description 1
- 229910052845 zircon Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C22/00—Cyclic compounds containing halogen atoms bound to an acyclic carbon atom
- C07C22/02—Cyclic compounds containing halogen atoms bound to an acyclic carbon atom having unsaturation in the rings
- C07C22/04—Cyclic compounds containing halogen atoms bound to an acyclic carbon atom having unsaturation in the rings containing six-membered aromatic rings
- C07C22/08—Cyclic compounds containing halogen atoms bound to an acyclic carbon atom having unsaturation in the rings containing six-membered aromatic rings containing fluorine
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C25/00—Compounds containing at least one halogen atom bound to a six-membered aromatic ring
- C07C25/18—Polycyclic aromatic halogenated hydrocarbons
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C25/00—Compounds containing at least one halogen atom bound to a six-membered aromatic ring
- C07C25/18—Polycyclic aromatic halogenated hydrocarbons
- C07C25/22—Polycyclic aromatic halogenated hydrocarbons with condensed rings
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D495/00—Heterocyclic compounds containing in the condensed system at least one hetero ring having sulfur atoms as the only ring hetero atoms
- C07D495/02—Heterocyclic compounds containing in the condensed system at least one hetero ring having sulfur atoms as the only ring hetero atoms in which the condensed system contains two hetero rings
- C07D495/04—Ortho-condensed systems
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/80—Constructional details
- H10K10/82—Electrodes
- H10K10/84—Ohmic electrodes, e.g. source or drain electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/464—Lateral top-gate IGFETs comprising only a single gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Thin Film Transistor (AREA)
- Heterocyclic Carbon Compounds Containing A Hetero Ring Having Oxygen Or Sulfur (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Electrodes Of Semiconductors (AREA)
Description
本発明は、有機薄膜トランジスタに関する。さらに詳しくはソース電極及びドレイン電極と接合する電荷注入層が、低い接触抵抗を有する化合物を含むことにより、高速動作及び低電圧駆動が可能である有機薄膜トランジスタに関する。 The present invention relates to an organic thin film transistor. More specifically, the present invention relates to an organic thin film transistor capable of high-speed operation and low-voltage driving because a charge injection layer bonded to a source electrode and a drain electrode contains a compound having a low contact resistance.
薄膜トランジスタ(TFT)は、液晶表示装置等の表示用のスイッチング素子として広く用いられている。代表的なTFTの断面構造を図1に示す。図1に示すように、TFTは、基板上にゲート電極、絶縁体層、有機半導体層をこの順に有し、有機半導体層上に、所定の間隔をあけて形成されたソース電極及びドレイン電極を有している。有機半導体層がチャネル領域を成しており、ゲート電極に印加される電圧でソース電極とドレイン電極の間に流れる電流が制御されることによってオン/オフ動作する。 Thin film transistors (TFTs) are widely used as display switching elements for liquid crystal display devices and the like. A cross-sectional structure of a typical TFT is shown in FIG. As shown in FIG. 1, a TFT has a gate electrode, an insulator layer, and an organic semiconductor layer in this order on a substrate, and has a source electrode and a drain electrode formed on the organic semiconductor layer with a predetermined interval. Have. The organic semiconductor layer forms a channel region, and an on / off operation is performed by controlling a current flowing between the source electrode and the drain electrode with a voltage applied to the gate electrode.
従来、このTFTは、アモルファスや多結晶のシリコンを用いて作製されていたが、シリコンを用いたTFTの作製に用いられるCVD(Chemical Vapor Deposition)装置は、非常に高額であるため、TFTを用いた表示装置等の大型化は、製造コストの大幅な増加を伴うという問題点があった。また、アモルファスや多結晶のシリコンを成膜するプロセスは非常に高い温度下で行われるので、基板として使用可能な材料の種類が限られてしまい、軽量な樹脂基板等は使用できないという問題があった。 Conventionally, this TFT has been manufactured using amorphous or polycrystalline silicon. However, since a CVD (Chemical Vapor Deposition) apparatus used for manufacturing a TFT using silicon is very expensive, the TFT is used. The increase in the size of the display device, etc., has been accompanied by a significant increase in manufacturing cost. In addition, since the process of forming amorphous or polycrystalline silicon is performed at a very high temperature, the types of materials that can be used as a substrate are limited, and a lightweight resin substrate cannot be used. It was.
上記問題を解決するために、アモルファスや多結晶のシリコンに代えて有機物を用いたTFTが提案されている。有機物でTFTを形成する際に用いる成膜方法として、真空蒸着法や塗布法等が知られているが、これらの成膜方法によれば、製造コストの上昇を抑えつつ素子の大型化が実現可能になり、成膜時に必要となるプロセス温度を比較的低温にすることができる。このため、有機物を用いたTFTでは、基板に用いる材料の選択時の制限が少ないといった利点があり、その実用化が期待されている。
有機物を用いたTFTは盛んに報告されており、例えば非特許文献1〜16等を挙げることができる。In order to solve the above problem, a TFT using an organic substance instead of amorphous or polycrystalline silicon has been proposed. Vacuum deposition and coating methods are known as film formation methods used when forming TFTs with organic materials. However, according to these film formation methods, an increase in the size of the element can be realized while suppressing an increase in manufacturing cost. Therefore, the process temperature required for film formation can be made relatively low. For this reason, a TFT using an organic substance has an advantage that there are few restrictions when selecting a material used for a substrate, and its practical use is expected.
TFTs using organic substances have been actively reported, and examples thereof include Non-Patent Documents 1 to 16.
TFTの有機化合物層に用いる有機物としては、p型では共役系ポリマーやチオフェン等の多量体(特許文献1〜5等)、金属フタロシアニン化合物(特許文献6等)、ペンタセン等の縮合芳香族炭化水素(特許文献7及び8等)等が、単体又は他の化合物との混合物の状態で用いられている。
また、n型の材料では、例えば特許文献9には、1,4,5,8−ナフタレンテトラカルボキシルジアンヒドライド(NTCDA)等が開示されており、特許文献10には、フッ素化フタロシアニンが開示されている。
これら有機TFTには、ソース電極及びドレイン電極と有機半導体との接触抵抗が大きく、駆動電圧が高いという問題があった。さらに、接触抵抗が大きくなりすぎると電界効果移動度が低下し、ON/OFF比も低下するという欠点があった。Organic materials used in the organic compound layer of TFT include p-type polymers such as conjugated polymers and thiophenes (Patent Documents 1 to 5 etc.), metal phthalocyanine compounds (Patent Document 6 etc.), and condensed aromatic hydrocarbons such as pentacene. (Patent Documents 7 and 8, etc.) are used in the form of a simple substance or a mixture with other compounds.
In addition, as for n-type materials, for example, Patent Document 9 discloses 1,4,5,8-naphthalene tetracarboxyl dianhydride (NTCDA) and the like, and
These organic TFTs have a problem that the contact resistance between the source and drain electrodes and the organic semiconductor is large, and the drive voltage is high. Furthermore, when the contact resistance becomes too large, the field effect mobility is lowered and the ON / OFF ratio is also lowered.
一般に有機TFTにおいては、電界効果移動度の算出には下記式(1)及び(2)が使われる。式(1)は、線形領域と呼ばれるドレイン電圧が小さい領域で成り立つ式であり、式(2)は飽和領域と呼ばれるドレイン電圧が大きい領域で成り立つ式である。
上記式は、有機半導体とソース電極及びドレイン電極との接合がオーミック接合であり、電荷注入障壁が存在しない理想的な場合には、μが物質固有の値と近くなる。しかしながら、一般に有機半導体と金属電極との間には接触抵抗が存在するため、ドレイン電圧が小さな領域では電流と電圧の関係が(1)の式からのずれを生じ、この領域のスィッチング特性が良好でない。さらに、金属/有機半導体界面での電圧降下が生じ、その分だけ有機半導体にかかる実効的な電圧が低下するため、式(1)及び(2)の電界効果移動度が小さく算出され、応答速度やオンオフ比の低下、駆動電圧の上昇等の問題があった。 In the above equation, in an ideal case where the junction between the organic semiconductor and the source and drain electrodes is an ohmic junction and there is no charge injection barrier, μ is close to the value specific to the substance. However, since there is generally a contact resistance between the organic semiconductor and the metal electrode, the current-voltage relationship deviates from the equation (1) in the region where the drain voltage is small, and the switching characteristics in this region are good. Not. Furthermore, a voltage drop occurs at the metal / organic semiconductor interface, and the effective voltage applied to the organic semiconductor decreases accordingly, so that the field-effect mobility of the equations (1) and (2) is calculated to be small, and the response speed In addition, there are problems such as a decrease in on / off ratio and an increase in drive voltage.
この問題を解決するため、ソース電極及びドレイン電極と有機半導体の間に中間層(電荷注入層)を挿入することが一般に行われている。当該中間層の材料として、例えば特許文献11では、有機エレクトロルミネッセンス(EL)素子の正孔注入材料(4,4’−ビス[フェニル(3−メチルフェニル)アミノ]ビフェニル)(TPD)及び電子注入材料2−(4−ビフェニルイル)−5−(4−tert−ブチルフェニル)−1,3,4−オキサジアゾール)(PBD)が用いられている。 In order to solve this problem, an intermediate layer (charge injection layer) is generally inserted between the source and drain electrodes and the organic semiconductor. As the material of the intermediate layer, for example, in Patent Document 11, a hole injection material (4,4′-bis [phenyl (3-methylphenyl) amino] biphenyl) (TPD) and electron injection of an organic electroluminescence (EL) element are used. The material 2- (4-biphenylyl) -5- (4-tert-butylphenyl) -1,3,4-oxadiazole) (PBD) is used.
特許文献12は、ソース電極及びドレイン電極が、それぞれキャリア中継膜とキャリア伝導膜を含み、有機半導体と接したキャリア中継膜を構成する金属は、その仕事関数が有機半導体のイオン化ポテンシャルの近傍であることを開示する。また、特許文献13は、ソース電極及びドレイン電極と有機半導体膜の間に無機物からなる電荷注入層を挿入した有機薄膜トランジスタを開示する。そのほか特許文献14では、電極と有機半導体層との間にカーボンナノチューブを設けている。特許文献15では、銅フタロシアニン等からなる中間層を形成し,特許文献16では、ポリフッ化ビニリデン等の永久双極子モーメントを有する中間層を形成している。特許文献17では、ヘキサアザトリフェニレン系の材料を用いて中間層を形成している。
In
非特許文献17において、電極をペンタフルオロチオフェノールにて処理することによって、電極と有機半導体との間の電荷注入効率を向上させようといった試みがなされている。
また、上記技術の組み合わせも考えられ、特許文献18ではそれぞれ正孔輸送性を有する有機化合物と金属酸化物を含む層、並びに電子輸送性を有する有機化合物とアルカリ金属又はアルカリ土類金属を含む層が、電極と有機半導体の間に挿入されている。
しかしながら、これら開示の材料を用いたのでは、若干の低電圧化は可能なものの、実用的に不十分な性能であった。In Non-Patent Document 17, an attempt is made to improve the charge injection efficiency between the electrode and the organic semiconductor by treating the electrode with pentafluorothiophenol.
A combination of the above techniques is also conceivable. In Patent Document 18, a layer containing an organic compound having a hole transporting property and a metal oxide, and a layer containing an organic compound having an electron transporting property and an alkali metal or alkaline earth metal, respectively. Is inserted between the electrode and the organic semiconductor.
However, when these disclosed materials were used, although the voltage could be slightly lowered, the performance was insufficient practically.
別の低電圧化技術として、非特許文献18では、ソース電極、有機半導体層及びドレイン電極を縦方向に積層し、ゲート電極をソース電極とドレイン電極の間に挿入している。縦型トランジスタ構造を用いると、有機EL素子と同様の電荷輸送材料を用いることができるため(非特許文献18、電荷輸送材料として銅フタロシアニンを使用)、電極との接触抵抗を小さくして電荷注入を促進し、低電圧化が試みられている。
しかしながら、上記縦型トランジスタ構造では、電極からの電荷注入をよくすると、OFF電流が大きくなりON/OFF比が低下するという問題があった。As another voltage reduction technique, in Non-Patent Document 18, a source electrode, an organic semiconductor layer, and a drain electrode are stacked in a vertical direction, and a gate electrode is inserted between the source electrode and the drain electrode. When the vertical transistor structure is used, the same charge transport material as that of the organic EL element can be used (Non-patent Document 18, copper phthalocyanine is used as the charge transport material), so that the contact resistance with the electrode is reduced and charge injection is performed. To lower the voltage.
However, the vertical transistor structure has a problem that if the charge injection from the electrode is improved, the OFF current increases and the ON / OFF ratio decreases.
また、特許文献19には、有機薄膜トランジスタの有機半導体層に使用する材料として、両末端がフェニル基であって、その間に2以上の三重結合と1以上の2価の芳香族炭化水素基或いは芳香族複素環基が交互に結合する化合物が開示されている。しかし、この化合物を、有機半導体層及びソース電極間並びに前記有機半導体層及びドレイン電極間にそれぞれ設置された電荷注入層に使用することについては開示も示唆もない。 Patent Document 19 discloses that a material used for an organic semiconductor layer of an organic thin film transistor is a phenyl group at both ends, and two or more triple bonds and one or more divalent aromatic hydrocarbon groups or aromatics between them. A compound in which group heterocyclic groups are alternately bonded is disclosed. However, there is no disclosure or suggestion of using this compound in the charge injection layer disposed between the organic semiconductor layer and the source electrode and between the organic semiconductor layer and the drain electrode.
ここで、有機半導体層は、ソース電極からドレイン電極に電荷を移動する機能を担うため、移動度の大きな材料からなることが要求される。そして、電荷注入層を有する有機薄膜トランジスタにおいては、有機半導体層に移動度以外の機能が求められる程度は低い。特に、本発明の有機薄膜トランジスタのように、電荷注入層に有機化合物を使用する場合には、有機物同士の接触となるため、界面間でのスムーズな電荷移動が起こり易い。このため、移動度以外の機能の重要性は更に低いものとなる。 Here, since the organic semiconductor layer has a function of moving charges from the source electrode to the drain electrode, it is required to be made of a material having high mobility. And in the organic thin-film transistor which has a charge injection layer, the grade for which functions other than a mobility are calculated | required by an organic-semiconductor layer is low. In particular, when an organic compound is used for the charge injection layer as in the organic thin film transistor of the present invention, organic substances are brought into contact with each other, so that smooth charge transfer between the interfaces tends to occur. For this reason, the importance of functions other than mobility is further reduced.
一方、電荷注入層には、電極から電荷を注入する機能が求められる。電荷注入層の移動度も重要ではあるが、好ましくは5μm〜100μmとされるチャネル長と比較して極端に短い0.3nm〜100nmを好適とする電荷注入層の膜厚を考慮すると、有機半導体層に求められる場合よりも移動度の重要性は低い。例えば、特許文献11で中間層材料に使用されるTPDやPBD、そして特許文献15で使用される銅フタロシアニンの移動度は高いものではない。 On the other hand, the charge injection layer is required to have a function of injecting charges from the electrodes. The mobility of the charge injection layer is also important, but considering the thickness of the charge injection layer preferably 0.3 nm to 100 nm, which is extremely shorter than the channel length of preferably 5 μm to 100 μm, the organic semiconductor Mobility is less important than what is required for a layer. For example, the mobility of TPD and PBD used for the intermediate layer material in Patent Document 11 and copper phthalocyanine used in Patent Document 15 are not high.
電荷注入層には、金属等の無機材料からなる電極との接触抵抗を低減する機能が求められる。また、電荷の授受によりソースおよびドレイン電極は、電荷注入層との界面で酸化還元を繰り返す。このため、電荷注入層用の材料には、酸化還元に対する耐性が要求される。
このように、有機半導体層用として優れた材料が、電荷注入層用の材料に容易に転用できるものではない。The charge injection layer is required to have a function of reducing contact resistance with an electrode made of an inorganic material such as metal. In addition, the source and drain electrodes repeat oxidation and reduction at the interface with the charge injection layer due to charge transfer. For this reason, the material for the charge injection layer is required to have resistance to oxidation and reduction.
Thus, an excellent material for an organic semiconductor layer cannot be easily transferred to a material for a charge injection layer.
本発明は、前記の課題を解決するためになされたもので、応答速度(駆動速度)が高速で、しかもオン/オフ比が大きく,低電圧で駆動できる有機薄膜トランジスタ及びそれを利用した有機薄膜発光トランジスタを提供することを目的とする。 The present invention has been made in order to solve the above-described problems. An organic thin film transistor that has a high response speed (driving speed), a large on / off ratio, and can be driven at a low voltage, and an organic thin film light emitting device using the organic thin film transistor. An object is to provide a transistor.
本発明者らは、前記目的を達成するために鋭意研究を重ねた結果、有機薄膜トランジスタの電荷注入層に、下記一般式(1)で表される化合物を用いることにより、前記の目的を達成できることを見出し,本発明を完成したものである。
すなわち、本発明は、少なくとも基板上にゲート電極、ソース電極、ドレイン電極の3端子、絶縁体層及び有機半導体層が設けられ、ソース−ドレイン間電流をゲート電極に電圧を印加することによって制御する有機薄膜トランジスタにおいて、前記有機半導体層とソース-ドレイン間に電荷注入層を設置し,前記電荷注入層が下記式(1)で表される化合物を含む有機薄膜トランジスタを提供するものである。As a result of intensive studies to achieve the above object, the present inventors can achieve the above object by using a compound represented by the following general formula (1) in the charge injection layer of the organic thin film transistor. And the present invention has been completed.
That is, in the present invention, at least three terminals of a gate electrode, a source electrode, and a drain electrode, an insulator layer, and an organic semiconductor layer are provided on a substrate, and a source-drain current is controlled by applying a voltage to the gate electrode. In the organic thin film transistor, a charge injection layer is provided between the organic semiconductor layer and the source-drain, and the charge injection layer provides an organic thin film transistor containing a compound represented by the following formula (1).
[式(1)式中、Ar1は下記式(2)で表され、Ar3は下記式(3)で表される。[In the formula (1), Ar 1 is represented by the following formula (2), and Ar 3 is represented by the following formula (3).
(式(2)及び(3)式中、R1〜R10は、それぞれ独立に、水素原子、ハロゲン原子、炭素数1〜30のアルキル基、炭素数1〜30のハロアルキル基、炭素数1〜30のアルコキシ基、炭素数1〜30のハロアルコキシ基、炭素数1〜30のアルキチオ基、炭素数1〜30のハロアルキルチオ基、炭素数1〜30のアルキルアミノ基、炭素数2〜30のジアルキルアミノ基(アルキル基は互いに結合して窒素原子を含む環構造を形成してもよい)、炭素数1〜30のアルキルスルホニル基、炭素数1〜30のハロアルキルスルホニル基、炭素数6〜60の芳香族炭化水素基、炭素数1〜60の芳香族複素環基、炭素数3〜30のアルキルシリル基、又はシアノ基であり、これら各基は置換基を有していてもよい。
R1〜R5及びR6〜R10は隣接するもの同士で飽和又は不飽和の環状構造を形成していてもよい。)
Ar2は、置換基を有してもよい炭素数6〜60の2価の芳香族炭化水素基、置換基を有してもよい炭素数2〜60の2価の芳香族複素環基である。
nは1〜20の整数である。](In the formulas (2) and (3), R 1 to R 10 are each independently a hydrogen atom, a halogen atom, an alkyl group having 1 to 30 carbon atoms, a haloalkyl group having 1 to 30 carbon atoms, or 1 carbon atom. -30 alkoxy group, haloalkoxy group having 1-30 carbon atoms, alkthio group having 1-30 carbon atoms, haloalkylthio group having 1-30 carbon atoms, alkylamino group having 1-30 carbon atoms, 2-30 carbon atoms. Dialkylamino group (the alkyl groups may be bonded to each other to form a ring structure containing a nitrogen atom), an alkylsulfonyl group having 1 to 30 carbon atoms, a haloalkylsulfonyl group having 1 to 30 carbon atoms, or 6 to 6 carbon atoms It is a 60 aromatic hydrocarbon group, a C1-C60 aromatic heterocyclic group, a C3-C30 alkylsilyl group, or a cyano group, and each of these groups may have a substituent.
R 1 to R 5 and R 6 to R 10 may be adjacent to each other to form a saturated or unsaturated cyclic structure. )
Ar 2 is an optionally substituted divalent aromatic hydrocarbon group having 6 to 60 carbon atoms and an optionally substituted divalent aromatic heterocyclic group having 2 to 60 carbon atoms. is there.
n is an integer of 1-20. ]
また、本発明は、有機薄膜トランジスタにおいて、ソース−ドレイン間を流れる電流を利用して発光を得、ゲート電極に電圧を印加することによって発光を制御する有機薄膜発光トランジスタを提供するものである。 In addition, the present invention provides an organic thin film transistor that obtains light emission by using a current flowing between a source and a drain in an organic thin film transistor and controls light emission by applying a voltage to a gate electrode.
本発明の有機薄膜トランジスタは、応答速度(駆動速度)が高速化されており、しかもオン/オフ比が大きく、駆動電圧も低いのでトランジスタとしての性能が高いものであり、発光可能な有機薄膜発光トランジスタとしても利用できる。 The organic thin film transistor of the present invention has a high response speed (driving speed), a large on / off ratio, a low driving voltage, and has high performance as a transistor, and can emit light. Can also be used.
本発明の有機薄膜トランジスタは、少なくとも基板上にゲート電極、ソース電極、ドレイン電極の3端子、絶縁体層及び有機半導体層が設けられ、ソース−ドレイン間電流をゲート電極に電圧を印加することによって制御する有機薄膜トランジスタにおいて、前記有機半導体層とソース-ドレイン間に電荷注入層を設置し、前記電荷注入層が下記一般式(1)で表される化合物を含む。 The organic thin film transistor of the present invention is provided with at least three terminals of a gate electrode, a source electrode, and a drain electrode, an insulator layer, and an organic semiconductor layer on a substrate, and a source-drain current is controlled by applying a voltage to the gate electrode. In the organic thin film transistor, a charge injection layer is provided between the organic semiconductor layer and the source-drain, and the charge injection layer contains a compound represented by the following general formula (1).
一般式(1)式において、Ar1は下記一般式(2)で表され、Ar3は下記一般式(3)で表される。
一般式(2)及び(3)において、R1〜R10は、それぞれ独立に、水素原子、ハロゲン原子、炭素数1〜30のアルキル基、炭素数1〜30のハロアルキル基、炭素数1〜30のアルコキシ基、炭素数1〜30のハロアルコキシ基、炭素数1〜30のアルキルチオ基、炭素数1〜30のハロアルキルチオ基、炭素数1〜30のアルキルアミノ基、炭素数2〜30のジアルキルアミノ基(アルキル基は互いに結合して窒素原子を含む環構造を形成してもよい)、炭素数1〜30のアルキルスルホニル基、炭素数1〜30のハロアルキルスルホニル基、炭素数6〜60の芳香族炭化水素基、炭素数1〜60の芳香族複素環基、炭素数3〜30のアルキルシリル基、又はシアノ基であり、これら各基は置換基を有していてもよい。
R1〜R5及びR6〜R10は隣接するもの同士で飽和又は不飽和の環状構造を形成していてもよい。In the general formulas (2) and (3), R 1 to R 10 are each independently a hydrogen atom, a halogen atom, an alkyl group having 1 to 30 carbon atoms, a haloalkyl group having 1 to 30 carbon atoms, or 1 to carbon atoms. 30 alkoxy groups, 1-30 haloalkoxy groups, 1-30 alkylthio groups, 1-30 haloalkylthio groups, 1-30 alkylamino groups, 2-30 carbon atoms Dialkylamino group (the alkyl groups may be bonded to each other to form a ring structure containing a nitrogen atom), an alkylsulfonyl group having 1 to 30 carbon atoms, a haloalkylsulfonyl group having 1 to 30 carbon atoms, or 6 to 60 carbon atoms. An aromatic hydrocarbon group, an aromatic heterocyclic group having 1 to 60 carbon atoms, an alkylsilyl group having 3 to 30 carbon atoms, or a cyano group, and each of these groups may have a substituent.
R 1 to R 5 and R 6 to R 10 may be adjacent to each other to form a saturated or unsaturated cyclic structure.
以下、前記R1〜R10が示す各基の具体例を説明する。
前記ハロゲン原子としては、フッ素、塩素、臭素及びヨウ素原子が挙げられる。
前記アルキル基としては、メチル基、エチル基、プロピル基、イソプロピル基、n−ブチル基、s−ブチル基、イソブチル基、t−ブチル基、n−ペンチル基、n−ヘキシル基、n−ヘプチル基、n−オクチル基、n−ノニル基、n−デシル基、n−ウンデシル基、n−ドデシル基、n−トリデシル基、n−テトラデシル基等が挙げられる。
前記ハロアルキル基としては、例えば、クロロメチル基、1−クロロエチル基、2−クロロエチル基、2−クロロイソブチル基、1,2−ジクロロエチル基、1,3−ジクロロイソプロピル基、2,3−ジクロロ−t−ブチル基、1,2,3−トリクロロプロピル基、ブロモメチル基、1−ブロモエチル基、2−ブロモエチル基、2−ブロモイソブチル基、1,2−ジブロモエチル基、1,3−ジブロモイソプロピル基、2,3−ジブロモ−t−ブチル基、1,2,3−トリブロモプロピル基、ヨードメチル基、1−ヨードエチル基、2−ヨードエチル基、2−ヨードイソブチル基、1,2−ジヨードエチル基、1,3−ジヨードイソプロピル基、2,3−ジヨード−t−ブチル基、1,2,3−トリヨードプロピル基、フルオロメチル基、1−フルオロエチル基,2−フルオロエチル基、2−フルオロイソブチル基、1,2−ジフロロエチル基、ジフルオロメチル基、トリフルオロメチル基、ペンタフルオロエチル基、パーフルオロイソプロピル基、パーフルオロブチル基、パーフルオロシクロヘキシル基等が挙げられる。
前記アルコキシ基は、−OX1で表される基であり、X1の例としては、前記アルキル基で説明したものと同様の例が挙げられ、前記ハロアルコキシ基は、−OX2で表される基であり、X2の例としては、前記ハロアルキル基で説明したものと同様の例が挙げられる。
前記アルキルチオ基は、−SX1で表される基であり、X1の例としては、前記アルキル基で説明したものと同様の例が挙げられ、前記ハロアルキルチオ基は、−SX2で表される基であり、X2の例としては、前記ハロアルキル基で説明したものと同様の例が挙げられる。Hereinafter, specific examples of each group represented by R 1 to R 10 will be described.
Examples of the halogen atom include fluorine, chlorine, bromine and iodine atoms.
Examples of the alkyl group include methyl group, ethyl group, propyl group, isopropyl group, n-butyl group, s-butyl group, isobutyl group, t-butyl group, n-pentyl group, n-hexyl group, and n-heptyl group. N-octyl group, n-nonyl group, n-decyl group, n-undecyl group, n-dodecyl group, n-tridecyl group, n-tetradecyl group and the like.
Examples of the haloalkyl group include chloromethyl group, 1-chloroethyl group, 2-chloroethyl group, 2-chloroisobutyl group, 1,2-dichloroethyl group, 1,3-dichloroisopropyl group, 2,3-dichloro- t-butyl group, 1,2,3-trichloropropyl group, bromomethyl group, 1-bromoethyl group, 2-bromoethyl group, 2-bromoisobutyl group, 1,2-dibromoethyl group, 1,3-dibromoisopropyl group, 2,3-dibromo-t-butyl group, 1,2,3-tribromopropyl group, iodomethyl group, 1-iodoethyl group, 2-iodoethyl group, 2-iodoisobutyl group, 1,2-diiodoethyl group, 1, 3-diiodoisopropyl group, 2,3-diiodo-t-butyl group, 1,2,3-triiodopropyl group, fluoromethyl group, -Fluoroethyl group, 2-fluoroethyl group, 2-fluoroisobutyl group, 1,2-difluoroethyl group, difluoromethyl group, trifluoromethyl group, pentafluoroethyl group, perfluoroisopropyl group, perfluorobutyl group, perfluoro A cyclohexyl group etc. are mentioned.
The alkoxy group is a group represented by —OX 1 , and examples of X 1 include the same examples as described for the alkyl group, and the haloalkoxy group is represented by —OX 2. Examples of X 2 include the same examples as described for the haloalkyl group.
The alkylthio group is a group represented by —SX 1 , and examples of X 1 include the same examples as described for the alkyl group, and the haloalkylthio group is represented by —SX 2. Examples of X 2 include the same examples as described for the haloalkyl group.
前記アルキルアミノ基は、−NHX1で表される基であり、ジアルキルアミノ基は−NX1X3で表される基であり、X1及びX3は、それぞれ前記アルキル基で説明したものと同様の例が挙げられる。なお、ジアルキルアミノ基のアルキル基は互いに結合して窒素原子を含む環構造を形成してもよく、環構造としては、例えば、ピロール、ピロリジン、ピペリジン等が挙げられる。
前記アルキルスルホニル基は、−SO2X1で表される基であり、X1の例としては、前記アルキル基で説明したものと同様の例が挙げられ、前記ハロアルキルスルホニル基は、−SO2X2で表される基であり、X2の例としては、前記ハロアルキル基で説明したものと同様の例が挙げられる。
前記芳香族炭化水素基としては、例えば、フェニル基、ナフチル基、アントリル基、フェナントリル基、フルオレニル基、ペリレニル基、テトラセニル基、ペンタセニル基等が挙げられる。
前記芳香族複素環基としては、例えば、チオフェニル基、ジチエノフェニル基、ベンゾフラニル基、ベンゾチオフェニル基、キノリニル基、カルバゾリル基、ジベンゾフラニル基、ジベンゾチオフェニル基、ベンゾチアジアゾニル基等が挙げられる。
前記アルキルシリル基としては、−SiX1X2X3で表される基であり、X1、X2及びX3は、それぞれ前記アルキル基で説明したものと同様の例が挙げられる。
前記飽和環状構造としては、シクロブタン環、シクロペンタン環、シクロヘキサン環、1,4ジオキサン環等が挙げられる。
前記不飽和環状構造としては、前記芳香族炭化水素基で説明したものと同様の例が挙げられる。The alkylamino group is a group represented by —NHX 1 , the dialkylamino group is a group represented by —NX 1 X 3 , and X 1 and X 3 are the same as those described for the alkyl group, respectively. Similar examples are given. The alkyl group of the dialkylamino group may be bonded to each other to form a ring structure containing a nitrogen atom, and examples of the ring structure include pyrrole, pyrrolidine, piperidine and the like.
The alkylsulfonyl group is a group represented by —SO 2 X 1 , and examples of X 1 include the same examples as described for the alkyl group, and the haloalkylsulfonyl group includes —SO 2 a group represented by X 2, examples of X 2 are examples similar to those described in the haloalkyl group.
Examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, an anthryl group, a phenanthryl group, a fluorenyl group, a perylenyl group, a tetracenyl group, and a pentacenyl group.
Examples of the aromatic heterocyclic group include a thiophenyl group, a dithienophenyl group, a benzofuranyl group, a benzothiophenyl group, a quinolinyl group, a carbazolyl group, a dibenzofuranyl group, a dibenzothiophenyl group, and a benzothiadiazonyl group. Can be mentioned.
The alkylsilyl group is a group represented by —SiX 1 X 2 X 3 , and examples of X 1 , X 2 and X 3 are the same as those described for the alkyl group.
Examples of the saturated cyclic structure include a cyclobutane ring, a cyclopentane ring, a cyclohexane ring, and a 1,4 dioxane ring.
Examples of the unsaturated cyclic structure include the same examples as those described for the aromatic hydrocarbon group.
一般式(1)において、Ar2は、置換基を有してもよい炭素数6〜60の2価の芳香族炭化水素基、置換基を有してもよい炭素数2〜60の2価の芳香族複素環基である。
前記炭素数6〜60の2価の芳香族炭化水素基としては、炭素数6〜30の芳香族炭化水素基が好ましく、例えば、ベンゼン、ナフタレン、アントラセン、フェナントレン、テトラセン、クリセン又はペンタセン等の2価の残基が挙げられ、ベンゼン、ナフタレン、アントラセン、フェナントレン、テトラセン、クリセン、ペンタセンの2価の残基が好ましい。
前記炭素数2〜60の2価の芳香族複素環基としては、炭素数6〜60(好ましくは炭素数8〜60)の縮合多環式芳香族複素環が好ましく、縮合多環式芳香族複素環基はベンゼン環又はナフタレン環を含む構造であると好ましく、ベンゼン環を含む構造であるとより好ましい。例えば、ピロール、ピリジン、ピリミジン、イミダゾール、チアゾール、ジチエノベンゼン、ベンゾチアジアゾール、キノリン、ベンゾチオフェン、ベンゾジチオフェン、ジベンゾチオフェン、ベンゾチエノベンゾチオフェン、ベンゾフラン又はジベンゾフラン等の2価の残基が挙げられ、ジチエノベンゼン、ベンゾチオフェン、ジベンゾチオフェン、ベンゾフラン、ジベンゾフランの2価の残基が好ましい。
Ar2の置換基としては、炭素数1〜30のアルキル基や炭素数1〜30のハロアルキル基が挙げられる。具体的な基としては、前記R1〜R10が示すアルキル基やハロアルキル基で説明された基を挙げることができる。
一般式(1)において、nは1〜20の整数であり、1でも2以上の複数であってもよいが1〜5の整数であると好ましい。In General Formula (1), Ar 2 is a divalent aromatic hydrocarbon group having 6 to 60 carbon atoms which may have a substituent, and a divalent having 2 to 60 carbon atoms which may have a substituent. An aromatic heterocyclic group.
The divalent aromatic hydrocarbon group having 6 to 60 carbon atoms is preferably an aromatic hydrocarbon group having 6 to 30 carbon atoms, and examples thereof include 2 such as benzene, naphthalene, anthracene, phenanthrene, tetracene, chrysene or pentacene. And divalent residues such as benzene, naphthalene, anthracene, phenanthrene, tetracene, chrysene, and pentacene are preferable.
The divalent aromatic heterocyclic group having 2 to 60 carbon atoms is preferably a condensed polycyclic aromatic heterocyclic ring having 6 to 60 carbon atoms (preferably 8 to 60 carbon atoms), and is preferably a condensed polycyclic aromatic ring. The heterocyclic group is preferably a structure containing a benzene ring or a naphthalene ring, and more preferably a structure containing a benzene ring. For example, divalent residues such as pyrrole, pyridine, pyrimidine, imidazole, thiazole, dithienobenzene, benzothiadiazole, quinoline, benzothiophene, benzodithiophene, dibenzothiophene, benzothienobenzothiophene, benzofuran or dibenzofuran can be mentioned. The divalent residues of dithienobenzene, benzothiophene, dibenzothiophene, benzofuran and dibenzofuran are preferred.
Examples of the substituent for Ar 2 include an alkyl group having 1 to 30 carbon atoms and a haloalkyl group having 1 to 30 carbon atoms. Specific examples of the group include groups described for the alkyl group or haloalkyl group represented by R 1 to R 10 .
In the general formula (1), n is an integer of 1 to 20, and may be 1 or a plurality of 2 or more, but is preferably an integer of 1 to 5.
前記一般式(2)、(3)において、R1、R2、R4、R5、R6、R7、R9及びR10が全て水素原子であり、R3及びR8の少なくとも一方がハロゲン原子、炭素数1〜12のアルキル基、炭素数1〜8のハロアルキル基、炭素数1〜8のハロアルコキシ基、又は炭素数2〜16のジアルキルアミノ基(アルキル基は互いに結合して窒素原子を含む環構造を形成してもよい)であり、ハロゲン原子、アルキル基、ハロアルキル基、ハロアルコキシ基、又はジアルキルアミノ基でない場合には水素原子であると好ましい。
また、R3及びR8の少なくとも一方が炭素数1〜12の直鎖状アルキル基であることも好ましい。In the general formulas (2) and (3), R 1 , R 2 , R 4 , R 5 , R 6 , R 7 , R 9 and R 10 are all hydrogen atoms, and at least one of R 3 and R 8 Is a halogen atom, an alkyl group having 1 to 12 carbon atoms, a haloalkyl group having 1 to 8 carbon atoms, a haloalkoxy group having 1 to 8 carbon atoms, or a dialkylamino group having 2 to 16 carbon atoms (the alkyl groups are bonded to each other). A ring structure containing a nitrogen atom may be formed), and when it is not a halogen atom, an alkyl group, a haloalkyl group, a haloalkoxy group, or a dialkylamino group, it is preferably a hydrogen atom.
It is also preferable that at least one of R 3 and R 8 is a linear alkyl group having 1 to 12 carbon atoms.
本発明において、一般式(1)で表される化合物が、下記の一般式(4)で表される化合物であると好ましい。
一般式(4)において、R1〜R14は、それぞれ一般式(1)におけるR1〜R10と同様の基を示し、同様の具体例が挙げられ、R1〜R5、R6〜R10、R11〜R12、R13〜R14は隣接するもの同士で飽和又は不飽和の環状構造を形成していてもよく、前記と同様の具体例が挙げられる。また、nは1〜20の整数であり、1〜5の整数であると好ましい。
前記一般式(4)において、R11〜R14が、それぞれ独立に、水素原子、ハロゲン原子、炭素数1〜12のアルキル基、炭素数1〜8のハロアルキル基、炭素数1〜8のアルコキシ基、炭素数1〜8のアルキチオ基、炭素数2〜8のジアルキルアミノ基(アルキル基は互いに結合して窒素原子を含む環構造を形成してもよい)、炭素数1〜8のアルキルスルホニル基、又はシアノ基であると好ましい。In General Formula (4), R 1 to R 14 each represent the same group as R 1 to R 10 in General Formula (1), and the same specific examples can be given, and R 1 to R 5 , R 6 to R 10 , R 11 to R 12 , and R 13 to R 14 may be adjacent to each other to form a saturated or unsaturated cyclic structure, and specific examples similar to those described above can be given. Moreover, n is an integer of 1-20, and it is preferable in it being an integer of 1-5.
In the general formula (4), R 11 to R 14 are each independently a hydrogen atom, a halogen atom, an alkyl group having 1 to 12 carbon atoms, a haloalkyl group having 1 to 8 carbon atoms, or an alkoxy having 1 to 8 carbon atoms. Group, an alkylthio group having 1 to 8 carbon atoms, a dialkylamino group having 2 to 8 carbon atoms (the alkyl groups may be bonded to each other to form a ring structure containing a nitrogen atom), alkylsulfonyl having 1 to 8 carbon atoms Group or a cyano group is preferred.
また、一般式(4)において、R1、R2、R4、R5、R6、R7及びR9〜R14が全て水素原子であり、R3及びR8の少なくとも一方がハロゲン原子、炭素数1〜12のアルキル基、炭素数1〜8のハロアルキル基、炭素数1〜8のハロアルコキシ基、又は炭素数2〜16のジアルキルアミノ基(アルキル基は互いに結合して窒素原子を含む環構造を形成してもよい)であり、ハロゲン原子、アルキル基、ハロアルキル基、ハロアルコキシ基、又はジアルキルアミノ基でない場合には水素原子であると好ましい。また、上記において、R3及びR8の少なくとも一方が炭素数1〜12の直鎖状アルキル基であることも好ましい。
さらに、一般式(4)において、R1〜R14のいずれかが、フッ素原子、シアノ基、トリフルオロメチル基、又はペンタフルオロエチル基であると好ましい。In the general formula (4), R 1 , R 2 , R 4 , R 5 , R 6 , R 7 and R 9 to R 14 are all hydrogen atoms, and at least one of R 3 and R 8 is a halogen atom. An alkyl group having 1 to 12 carbon atoms, a haloalkyl group having 1 to 8 carbon atoms, a haloalkoxy group having 1 to 8 carbon atoms, or a dialkylamino group having 2 to 16 carbon atoms (the alkyl groups are bonded to each other to form a nitrogen atom). And a hydrogen atom when it is not a halogen atom, an alkyl group, a haloalkyl group, a haloalkoxy group, or a dialkylamino group. In the above, it is also preferable that at least one of R 3 and R 8 is a linear alkyl group having 1 to 12 carbon atoms.
Further, in the general formula (4), one of R 1 to R 14 is a fluorine atom, a cyano group, a trifluoromethyl group, or is a pentafluoroethyl group.
本発明において、一般式(1)で表される化合物が、下記の一般式(5)で表される化合物であると好ましい。
R1〜R10は、式(1)と同様である。
R15〜R22は、それぞれ独立に、水素原子、炭素数1〜30のアルキル基、炭素数1〜30のハロアルキル基、炭素数1〜30のアルコキシ基、炭素数1〜30のハロアルコキシ基、炭素数1〜30のアルキルチオ基、炭素数1〜30のハロアルキルチオ基、炭素数1〜30のアルキルアミノ基、炭素数2〜30のジアルキルアミノ基(アルキル基は互いに結合して窒素原子を含む環構造を形成してもよい)、炭素数1〜30のアルキルスルホニル基、炭素数1〜30のハロアルキルスルホニル基、炭素数6〜60の芳香族炭化水素基、炭素数1〜60の芳香族複素環基、炭素数3〜30のアルキルシリル基、又はシアノ基であり、これら各基は置換基を有していてもよく、これら各基の具体例としては前記一般式(1)のR1〜R10と同様の具体例が挙げられる。
また、R1〜R5及びR6〜R10は隣接するもの同士で飽和の環状構造を形成していてもよく、環状構造の具体例としては、前記と同様の具体例が挙げられる。
一般式(5)において、R1、R2、R4、R5、R6、R7、R9、R10及びR15〜R22が全て水素原子であり、R3及びR8の少なくとも一方がハロゲン原子、炭素数1〜12のアルキル基(特に直鎖状のアルキル基)、炭素数1〜8のハロアルキル基、炭素数1〜8のハロアルコキシ基、又は炭素数2〜16のジアルキルアミノ基(アルキル基は互いに結合して窒素原子を含む環構造を形成してもよい)であり、ハロゲン原子、アルキル基、ハロアルキル基、ハロアルコキシ基、又はジアルキルアミノ基でない場合には水素原子であると好ましい。
さらに、一般式(5)において、R1〜R22のいずれかが、フッ素原子、シアノ基、トリフルオロメチル基、又はペンタフルオロエチル基であると好ましい。R 1 to R 10 are the same as in formula (1).
R 15 to R 22 are each independently a hydrogen atom, an alkyl group having 1 to 30 carbon atoms, a haloalkyl group having 1 to 30 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, or a haloalkoxy group having 1 to 30 carbon atoms. An alkylthio group having 1 to 30 carbon atoms, a haloalkylthio group having 1 to 30 carbon atoms, an alkylamino group having 1 to 30 carbon atoms, a dialkylamino group having 2 to 30 carbon atoms (the alkyl groups are bonded to each other to form a nitrogen atom) A ring structure that includes 1 to 30 carbon atoms, a haloalkylsulfonyl group having 1 to 30 carbon atoms, an aromatic hydrocarbon group having 6 to 60 carbon atoms, and an aromatic group having 1 to 60 carbon atoms. A group heterocyclic group, an alkylsilyl group having 3 to 30 carbon atoms, or a cyano group, and each of these groups may have a substituent. Specific examples of these groups include those of the general formula (1). R 1 ~R 0 include the same specific examples as.
R 1 to R 5 and R 6 to R 10 may be adjacent to each other to form a saturated cyclic structure, and specific examples of the cyclic structure include the same specific examples as described above.
In the general formula (5), R 1 , R 2 , R 4 , R 5 , R 6 , R 7 , R 9 , R 10 and R 15 to R 22 are all hydrogen atoms, and at least R 3 and R 8 One is a halogen atom, an alkyl group having 1 to 12 carbon atoms (particularly a linear alkyl group), a haloalkyl group having 1 to 8 carbon atoms, a haloalkoxy group having 1 to 8 carbon atoms, or a dialkyl having 2 to 16 carbon atoms. An amino group (the alkyl group may be bonded to each other to form a ring structure containing a nitrogen atom), and if not a halogen atom, an alkyl group, a haloalkyl group, a haloalkoxy group, or a dialkylamino group, It is preferable.
Furthermore, in General formula (5), it is preferable that any of R 1 to R 22 is a fluorine atom, a cyano group, a trifluoromethyl group, or a pentafluoroethyl group.
以下、本発明の有機薄膜トランジスタの有機半導体層に用いられる一般式(1)、(4)及び(5)で表される化合物の具体例を挙げるが、これらに限定されるものではない。
式(1)で表される化合物は、好ましくはイオン化ポテンシャルが5.2eV以上であり、より好ましくは5.3eV以上である。また、式(1)で表される化合物のイオン化ポテンシャルの上限は、例えば7.0eVである。
式(1)で表される化合物のイオン化ポテンシャルが5.2eV以上である場合、酸化しにくく大気安定性が高い。
上記イオン化ポテンシャルは、例えば光電子分光法やサイクリックボルタンメトリ法により測定できる。The compound represented by the formula (1) preferably has an ionization potential of 5.2 eV or more, more preferably 5.3 eV or more. Moreover, the upper limit of the ionization potential of the compound represented by Formula (1) is 7.0 eV, for example.
When the ionization potential of the compound represented by formula (1) is 5.2 eV or more, it is difficult to oxidize and has high atmospheric stability.
The ionization potential can be measured by, for example, photoelectron spectroscopy or cyclic voltammetry.
本発明の有機薄膜トランジスタのような電子デバイスにおいては材料の純度の高いものを用いることにより電界効果移動度やオン/オフ比の高いデバイスを得ることができる。従って、式(1)で表される化合物を必要に応じて、カラムクロマトグラフィー、再結晶、蒸留、昇華等の手法により精製を加えることが望ましい。好ましくはこれらの精製方法を繰り返し用いたり、複数の方法を組み合わせることにより純度を向上させることが可能である。さらに必要に応じて精製の最終工程として昇華精製を少なくとも2回以上繰り返すことが望ましい。これらの手法を用いることによりHPLCで測定した式(1)で表される化合物の純度90%以上の材料を用いることが好ましく、さらに好ましくは95%以上、特に好ましくは99%以上の材料を用いることにより、有機薄膜トランジスタの電界効果移動度やオン/オフ比を高め、駆動電圧を下げて本来材料の持っている性能を引き出すことができる可能性がある。 In an electronic device such as the organic thin film transistor of the present invention, a device having a high field effect mobility and a high on / off ratio can be obtained by using a material having high purity. Therefore, it is desirable to purify the compound represented by the formula (1) by a technique such as column chromatography, recrystallization, distillation, sublimation, etc., if necessary. Preferably, it is possible to improve the purity by repeatedly using these purification methods or combining a plurality of methods. Furthermore, it is desirable to repeat sublimation purification at least twice or more as the final step of purification as necessary. By using these techniques, it is preferable to use a material having a purity of 90% or more, more preferably 95% or more, particularly preferably 99% or more of the compound represented by the formula (1) measured by HPLC. Accordingly, there is a possibility that the field effect mobility and the on / off ratio of the organic thin film transistor can be increased and the driving voltage can be lowered to bring out the performance inherent to the material.
以下、本発明の有機薄膜トランジスタの素子構成について説明する。
本発明の有機薄膜トランジスタの素子構成としては、少なくとも基板上にゲート電極、ソース電極、ドレイン電極の3端子、絶縁体層、有機半導体層が設けられ、前記有機半導体層とソース-ドレイン間に電荷注入層を設置しソース−ドレイン間電流をゲート電極に電圧を印加することによって制御する薄膜トランジスタであれば、限定されず、公知の素子構成を有するものであってもよい。これらのうち、代表的な有機薄膜トランジスタの素子構成として素子A〜Dを図2〜5に示す。このように、電極の位置、層の積層順等によりいくつかの構成が知られており、本発明の有機薄膜トランジスタは、電界効果トランジスタ(FET:Field Effect Transistor)構造を有している。有機薄膜トランジスタは、有機半導体層(有機化合物層)と、相互に所定の間隔をあけて対向するように形成されたソース電極及びドレイン電極と、ソース電極、ドレイン電極からそれぞれ所定の距離をあけて形成されたゲート電極とを有し、ゲート電極に電圧を印加することによってソース−ドレイン電極間に流れる電流を制御する。ここで、ソース電極とドレイン電極の間隔は本発明の有機薄膜トランジスタを用いる用途によって決定され、通常は0.1μm〜1mm、好ましくは1μm〜100μm、さらに好ましくは5μm〜100μmである。Hereinafter, the element structure of the organic thin-film transistor of this invention is demonstrated.
As an element configuration of the organic thin film transistor of the present invention, at least three terminals of a gate electrode, a source electrode, and a drain electrode, an insulator layer, and an organic semiconductor layer are provided on a substrate, and charge is injected between the organic semiconductor layer and the source-drain. Any thin film transistor may be used as long as it is a thin film transistor in which a layer is provided and the source-drain current is controlled by applying a voltage to the gate electrode. Among these, the elements A to D are shown in FIGS. As described above, several configurations are known depending on the position of the electrode, the layer stacking order, and the like, and the organic thin film transistor of the present invention has a field effect transistor (FET) structure. The organic thin film transistor is formed with an organic semiconductor layer (organic compound layer), a source electrode and a drain electrode formed to face each other with a predetermined distance, and a predetermined distance from the source electrode and the drain electrode. And a current flowing between the source and drain electrodes is controlled by applying a voltage to the gate electrode. Here, the distance between the source electrode and the drain electrode is determined by the use of the organic thin film transistor of the present invention, and is usually 0.1 μm to 1 mm, preferably 1 μm to 100 μm, and more preferably 5 μm to 100 μm.
素子A〜Dのうち、図4の素子Cを例としてさらに詳しく説明すると、素子Cの有機薄膜トランジスタ4は、基板10上に、ゲート電極70及び絶縁体層60をこの順に有し、絶縁体層60上に、有機半導体層50が形成され,その上に所定の間隔をあけて形成された一対のソース電極20及びドレイン電極30を有し、更にソース電極20及びドレイン電極30と有機半導体層50との間に電荷注入層40が挿入されている。有機半導体層50がチャネル領域を成しており、ゲート電極70に印加される電圧でソース電極20とドレイン電極30の間に流れる電流が制御されることによってオン/オフ動作する。本発明で、式(1)で表される化合物を含む電荷注入層40が、ソース電極20及び有機半導体層50間並びにドレイン電極30及び有機半導体層50間に積層していることにより、ソース電極20及びドレイン電極30と有機半導体層50との接触抵抗を小さくし、駆動電圧を低くすることができる。
Of the elements A to D, the element C of FIG. 4 will be described in more detail as an example. The organic thin film transistor 4 of the element C includes a
(有機半導体層)
本発明で用いられる有機半導体としては特に制限を受けるものではない。一般に開示されているような、有機TFTに用いられる有機半導体を用いることができる。
以下に具体例を示す。(Organic semiconductor layer)
The organic semiconductor used in the present invention is not particularly limited. Organic semiconductors used for organic TFTs as generally disclosed can be used.
Specific examples are shown below.
(有機半導体層に使用される材料)
高い電界効果移動度が得られるため、通常、結晶性の材料が用いられる。具体的には、次のような材料を例示することができる。
(1)ナフタレン、アントラセン、テトラセン、ペンタセン、ヘキサセン、ヘプタセン等の、置換基のついてもよいアセン類、例として1,4−ビススチリルベンゼン、1,4−ビス(2−メチルスチリル)ベンゼン、1,4−ビス(3−メチルスチリル)ベンゼン(4MSB)、1,4−ビス(4−メチルスチリル)ベンゼン、ポリフェニレンビニレン等C6H5−CH=CH−C6H5で表されるスチリル構造を有する化合物、このような化合物のオリゴマーやポリマー
(2)以下に示すチオフェン環を含む化合物
(ア)α−4T、α−5T、α−6T、α−7T、α−8Tの誘導体等の置換基を有してもよいチオフェンオリゴマー
(イ)ポリヘキシルチオフェン、ポリ(9,9−ジオクチルフルオレニル−2,7−ジイル−コ−ビチオフェン)等のチオフェン系高分子等のチオフェン系高分子
(ウ)ビスベンゾチオフェン誘導体、α,α’−ビス(ジチエノ[3,2−b:2’,3’−d]チオフェン)、ジチエノチオフェン−チオフェンのコオリゴマー、ペンタチエノアセン等の縮合オリゴチオフェン特にチエノベンゼン骨格又はジチエノベンゼン骨格を有する化合物、ベンゾチエノベンゾチオフェン誘導体
(3)また、セレノフェンオリゴマー、無金属フタロシアニン、銅フタロシアニン、鉛フタロシアニン、チタニルフタロシアニン、白金ポルフィリン、ポルフィリン、ベンゾポルフィリン等のポルフィリン類、テトラチアフルバレン(TTF)及びその誘導体、ルブレン及びその誘導体等
(4)テトラシアノキノジメタン(TCNQ)、11,11,12,12−テトラシアノナフト−2,6−キノジメタン(TCNNQ)らのキノイドオリゴマー、C60、C70、PCBM等のフラーレン類、N,N’−ジフェニル−3,4,9,10−ペリレンテトラカルボン酸ジイミド、N,N’−ジオクチル−3,4,9,10−ペリレンテトラカルボン酸ジイミド(C8−PTCDI)、NTCDA、1,4,5,8−ナフタレンテトラカルボキシルジイミド(NTCDI)等のテトラカルボン酸類等が挙げられる。
尚、有機半導体層に使用される材料は、後述する電荷注入層に使用される材料とは異なる材料であることが好ましい。(Materials used for organic semiconductor layers)
Since high field effect mobility can be obtained, a crystalline material is usually used. Specifically, the following materials can be exemplified.
(1) Acenes which may be substituted, such as naphthalene, anthracene, tetracene, pentacene, hexacene, heptacene, such as 1,4-bisstyrylbenzene, 1,4-bis (2-methylstyryl) benzene, 1 , 4-bis (3-methylstyryl) benzene (4MSB), 1,4-bis (4-methylstyryl) benzene, polyphenylene vinylene and the like, a styryl structure represented by C 6 H 5 —CH═CH—C 6 H 5 (2) Compounds containing a thiophene ring shown below (a) Substitution of α-4T, α-5T, α-6T, α-7T, α-8T derivatives, etc. Thiophene oligomer which may have a group (a) Polyhexylthiophene, poly (9,9-dioctylfluorenyl-2,7-diyl-co-bithio (U) Bisbenzothiophene derivatives, α, α′-bis (dithieno [3,2-b: 2 ′, 3′-d] thiophene), dithieno Thiophene-thiophene co-oligomer, condensed oligothiophene such as pentathienoacene, especially compound having thienobenzene skeleton or dithienobenzene skeleton, benzothienobenzothiophene derivative (3), selenophene oligomer, metal-free phthalocyanine, copper phthalocyanine, lead Porphyrins such as phthalocyanine, titanyl phthalocyanine, platinum porphyrin, porphyrin, benzoporphyrin, tetrathiafulvalene (TTF) and its derivatives, rubrene and its derivatives, etc. (4) tetracyanoquinodimethane (TCNQ), 11, 11, 12, 12-Tet Quinoid oligomers such as cyanonaphth-2,6-quinodimethane (TCNNQ), fullerenes such as C60, C70, PCBM, N, N′-diphenyl-3,4,9,10-perylenetetracarboxylic acid diimide, N, N ′ -Tetracarboxylic acids such as dioctyl-3,4,9,10-perylenetetracarboxylic acid diimide (C8-PTCDI), NTCDA, 1,4,5,8-naphthalenetetracarboxylic diimide (NTCDI), and the like.
In addition, it is preferable that the material used for an organic-semiconductor layer is a material different from the material used for the charge injection layer mentioned later.
(基板)
本発明の有機薄膜トランジスタにおける基板は、有機薄膜トランジスタの構造を支持する役目を担うものであり、材料としてはガラスの他、金属酸化物や窒化物等の無機化合物、プラスチックフィルム(PET,PES,PC)や金属基板又はこれら複合体や積層体等も用いることが可能である。また、基板以外の構成要素により有機薄膜トランジスタの構造を十分に支持し得る場合には、基板を使用しないことも可能である。また、基板の材料としてはシリコン(Si)ウエハが用いられることが多い。この場合、Si自体を図6に示すゲート電極兼基板12として用いることができる。また、Siの表面を酸化し、SiO2を形成して絶縁体層62として活用することも可能である。この場合、図6に示すように、基板兼ゲート電極のSi基板12にリード線接続用の電極として、Au等の金属層を成膜することもある。(substrate)
The substrate in the organic thin film transistor of the present invention plays a role of supporting the structure of the organic thin film transistor. As a material, in addition to glass, inorganic compounds such as metal oxides and nitrides, plastic films (PET, PES, PC) It is also possible to use metal substrates or composites or laminates thereof. Further, when the structure of the organic thin film transistor can be sufficiently supported by the components other than the substrate, it is possible not to use the substrate. Further, a silicon (Si) wafer is often used as a material for the substrate. In this case, Si itself can be used as the gate electrode /
(電極)
本発明の有機薄膜トランジスタにおける、ゲート電極、ソース電極及びドレイン電極の材料としては、導電性材料であれば特に限定されず、白金、金、銀、ニッケル、クロム、銅、鉄、錫、アンチモン、鉛、タンタル、インジウム、パラジウム、テルル、レニウム、イリジウム、アルミニウム、ルテニウム、ゲルマニウム、モリブデン、タングステン、酸化スズ、酸化インジウム・スズ(ITO)、フッ素ドープ酸化亜鉛、亜鉛、炭素、グラファイト、グラッシーカーボン、銀ペースト及びカーボンペースト、リチウム、ベリリウム、ナトリウム、マグネシウム、カリウム、カルシウム、スカンジウム、チタン、マンガン、ジルコニウム、ガリウム、ニオブ、ナトリウム−カリウム合金、マグネシウム/銅混合物、マグネシウム/銀混合物、マグネシウム/アルミニウム混合物、マグネシウム/インジウム混合物、アルミニウム/酸化アルミニウム混合物、リチウム/アルミニウム混合物等が用いられ、これらはスパッタ法もしくは真空蒸着法により成膜を行う。(electrode)
In the organic thin film transistor of the present invention, the material for the gate electrode, the source electrode and the drain electrode is not particularly limited as long as it is a conductive material. Platinum, gold, silver, nickel, chromium, copper, iron, tin, antimony, lead , Tantalum, indium, palladium, tellurium, rhenium, iridium, aluminum, ruthenium, germanium, molybdenum, tungsten, tin oxide, indium tin oxide (ITO), fluorine-doped zinc oxide, zinc, carbon, graphite, glassy carbon, silver paste And carbon paste, lithium, beryllium, sodium, magnesium, potassium, calcium, scandium, titanium, manganese, zirconium, gallium, niobium, sodium-potassium alloy, magnesium / copper mixture, magnesium / silver mixture, Magnesium / aluminum mixture, magnesium / indium mixture, aluminum / aluminum oxide mixture, a lithium / aluminum mixture, etc. are used, it forms a film by sputtering or vacuum deposition method.
本発明の有機薄膜トランジスタにおいて、ソース電極、ドレイン電極としては、上記の導電性材料を含む、溶液、ペースト、インク、分散液等の流動性電極材料を用いて形成したものも利用可能である。また、溶媒や分散媒体としては、有機半導体へのダメージを抑制するため、水を60質量%以上、好ましくは90質量%以上含有する溶媒又は分散媒体であることが好ましい。金属微粒子を含有する分散物としては、例えば、公知の導電性ペースト等を用いてもよいが、通常粒子径が0.5nm〜50nm、1nm〜10nmの金属微粒子を含有する分散物であると好ましい。この金属微粒子の材料としては、例えば、白金、金、銀、ニッケル、クロム、銅、鉄、錫、アンチモン鉛、タンタル、インジウム、パラジウム、テルル、レニウム、イリジウム、アルミニウム、ルテニウム、ゲルマニウム、モリブデン、タングステン、亜鉛等を用いることができる。
これらの金属微粒子を、主に有機材料からなる分散安定剤を用いて、水や任意の有機溶剤である分散媒中に分散した分散物を用いて電極を形成するのも好ましい。このような金属微粒子の分散物の製造方法としては、ガス中蒸発法、スパッタリング法、金属蒸気合成法等の物理的生成法や、コロイド法、共沈法等の、液相で金属イオンを還元して金属微粒子を生成する化学的生成法が挙げられ、好ましくは、特開平11−76800号公報、同11−80647号公報、同11−319538号公報、特開2000−239853号公報等に示されたコロイド法、特開2001−254185号公報、同2001−53028号公報、同2001−35255号公報、同2000−124157号公報、同2000−123634号公報等に記載されたガス中蒸発法により製造された金属微粒子の分散物である。
これらの金属微粒子分散物を用いて前記電極を成形し、溶媒を乾燥させた後、必要に応じて100℃〜300℃、好ましくは150℃〜200℃の範囲で形状様に加熱することにより、金属微粒子を熱融着させ、目的の形状を有する電極パターンを形成する。In the organic thin film transistor of the present invention, as the source electrode and the drain electrode, those formed using a fluid electrode material such as a solution, paste, ink, or dispersion liquid containing the above conductive material can be used. Further, the solvent or dispersion medium is preferably a solvent or dispersion medium containing 60% by mass or more, preferably 90% by mass or more of water, in order to suppress damage to the organic semiconductor. As the dispersion containing metal fine particles, for example, a known conductive paste or the like may be used, but a dispersion containing metal fine particles usually having a particle size of 0.5 nm to 50 nm, 1 nm to 10 nm is preferable. . Examples of the material of the fine metal particles include platinum, gold, silver, nickel, chromium, copper, iron, tin, antimony lead, tantalum, indium, palladium, tellurium, rhenium, iridium, aluminum, ruthenium, germanium, molybdenum, tungsten. Zinc or the like can be used.
It is also preferable to form an electrode using a dispersion in which these metal fine particles are dispersed in water or a dispersion medium which is an arbitrary organic solvent using a dispersion stabilizer mainly composed of an organic material. As a method for producing such a dispersion of metal fine particles, metal ions can be reduced in the liquid phase, such as a physical generation method such as gas evaporation method, sputtering method, metal vapor synthesis method, colloid method, coprecipitation method, etc. And a chemical production method for producing metal fine particles, preferably disclosed in JP-A-11-76800, JP-A-11-80647, JP-A-11-319538, JP-A-2000-239853, and the like. Colloidal method, gas evaporation method described in JP-A-2001-254185, 2001-53028, 2001-35255, 2000-124157, 2000-123634, etc. This is a dispersion of produced metal fine particles.
After forming the electrode using these metal fine particle dispersions and drying the solvent, if necessary, by heating to a shape in the range of 100 ° C to 300 ° C, preferably 150 ° C to 200 ° C, Metal fine particles are thermally fused to form an electrode pattern having a desired shape.
さらに、ゲート電極、ソース電極及びドレイン電極の材料として、ドーピング等で導電率を向上させた公知の導電性ポリマーを用いることも好ましく、例えば、ポリアニリン、ポリピロール、ポリチオフェン、ポリエチレンジオキシチオフェン(PEDOT)とポリスチレンスルホン酸の錯体等も好適に用いられる。 Furthermore, it is also preferable to use a known conductive polymer whose conductivity has been improved by doping or the like as a material for the gate electrode, the source electrode, and the drain electrode. A polystyrene sulfonic acid complex or the like is also preferably used.
ソース電極及びドレイン電極を形成する材料は、前述した例の中でも電荷注入材料との接触面において電気抵抗が少ないものが好ましい。この際の電気抵抗は、前述のようにすなわち電流制御デバイスを作製したとき電界効果移動度と対応しており、大きな電界効果移動度を得る為には出来るだけ抵抗が小さいことが必要である。接触抵抗の要因には種々ある。例えば,電極と有機化合物の付着力,付着面積,電極と有機化合物の界面での相互作用(界面での分極,電荷移動,鏡像効果等)等である。中でも重要なのが電極材料の仕事関数と電荷注入層とのエネルギー準位との大小関係である。
電極材料の仕事関数(W)をa、電荷注入層のイオン化ポテンシャルを(Ip)をb、電荷注入層の電子親和力(Af)をcとすると、以下の関係式を満たすことが好ましい。ここで、a,b及びcはいずれも真空準位を基準とする正の値である。Of the above-described examples, the material for forming the source electrode and the drain electrode is preferably a material having low electrical resistance on the contact surface with the charge injection material. The electrical resistance at this time corresponds to the field effect mobility when the current control device is manufactured as described above, and the resistance needs to be as small as possible in order to obtain a large field effect mobility. There are various factors of contact resistance. For example, the adhesion force between the electrode and the organic compound, the adhesion area, the interaction at the interface between the electrode and the organic compound (polarization at the interface, charge transfer, mirror image effect, etc.). Of particular importance is the magnitude relationship between the work function of the electrode material and the energy level of the charge injection layer.
When the work function (W) of the electrode material is a, the ionization potential of the charge injection layer is (Ip) is b, and the electron affinity (Af) of the charge injection layer is c, it is preferable that the following relational expression is satisfied. Here, a, b, and c are all positive values with reference to the vacuum level.
p型有機薄膜トランジスタの場合には、b−a<1.5eV(式(I))であることが好ましく、さらに好ましくはb−a<1.0eVである。電荷注入層との関係において上記関係が維持できれば高性能なデバイスを得ることができるが、特に電極材料の仕事関数はできるだけ大きいものを選ぶことが好ましく、仕事関数4.0eV以上であることが好ましく、さらに好ましくは仕事関数4.2eV以上である。
金属の仕事関数の値は、例えば化学便覧 基礎編II−493頁(改訂3版 日本化学会編 丸善株式会社発行1983年)に記載されている4.0eV又はそれ以上の仕事関数をもつ有効金属の前記リストから選別すればよく、高仕事関数金属は、主としてAg(4.26,4.52,4.64,4.74eV),Al(4.06,4.24,4.41eV),Au(5.1,5.37,5.47eV),Be(4.98eV),Bi(4.34eV),Cd(4.08eV),Co(5.0eV),Cu(4.65eV),Fe(4.5,4.67,4.81eV),Ga(4.3eV),Hg(4.4eV),Ir(5.42,5.76eV),Mn(4.1eV),Mo(4.53,4.55,4.95eV),Nb(4.02,4.36,4.87eV),Ni(5.04,5.22,5.35eV),Os(5.93eV),Pb(4.25eV),Pt(5.64eV),Pd(5.55eV),Re(4.72eV),Ru(4.71eV),Sb(4.55,4.7eV),Sn(4.42eV),Ta(4.0,4.15,4.8eV),Ti(4.33eV),V(4.3eV),W(4.47,4.63,5.25eV),Zr(4.05eV)である。これらの中でも、貴金属(Ag,Au,Cu,Pt),Ni,Co,Os,Fe,Ga,Ir,Mn,Mo,Pd,Re,Ru,V,Wが好ましい。金属以外では、ITO、ポリアニリンやPEDOT:PSSのような導電性ポリマー及び炭素が好ましい。電極材料としてはこれらの高仕事関数の物質を1種又は複数含んでいても、仕事関数が前記式(I)を満たせば特に制限を受けるものではない。In the case of a p-type organic thin film transistor, it is preferable that ba <1.5 eV (formula (I)), and more preferably ba <1.0 eV. If the above relationship can be maintained in relation to the charge injection layer, a high-performance device can be obtained. In particular, the work function of the electrode material is preferably as large as possible, and the work function is preferably 4.0 eV or more. More preferably, the work function is 4.2 eV or more.
The value of the work function of the metal is, for example, an effective metal having a work function of 4.0 eV or more described in Chemical Handbook II-493 (revised 3 edition, published by the Chemical Society of Japan, Maruzen Co., Ltd. 1983). The high work function metal is mainly Ag (4.26, 4.52, 4.64, 4.74 eV), Al (4.06, 4.24, 4.41 eV), Au (5.1, 5.37, 5.47 eV), Be (4.98 eV), Bi (4.34 eV), Cd (4.08 eV), Co (5.0 eV), Cu (4.65 eV), Fe (4.5, 4.67, 4.81 eV), Ga (4.3 eV), Hg (4.4 eV), Ir (5.42, 5.76 eV), Mn (4.1 eV), Mo (4 .53, 4.55, 4.95 eV), Nb (4.02, 4.36). 4.87 eV), Ni (5.04, 5.22, 5.35 eV), Os (5.93 eV), Pb (4.25 eV), Pt (5.64 eV), Pd (5.55 eV), Re ( 4.72 eV), Ru (4.71 eV), Sb (4.55, 4.7 eV), Sn (4.42 eV), Ta (4.0, 4.15, 4.8 eV), Ti (4.33 eV) ), V (4.3 eV), W (4.47, 4.63, 5.25 eV), Zr (4.05 eV). Among these, noble metals (Ag, Au, Cu, Pt), Ni, Co, Os, Fe, Ga, Ir, Mn, Mo, Pd, Re, Ru, V, and W are preferable. Other than metals, conductive polymers such as ITO, polyaniline and PEDOT: PSS and carbon are preferred. Even if one or more of these high work function substances are included as the electrode material, there is no particular limitation as long as the work function satisfies the formula (I).
n型有機薄膜トランジスタの場合にはa−c<1.5eV(式(II))であることが好ましく,さらに好ましくはa−c<1.0eVである。電荷注入層との関係において上記関係が維持できれば高性能なデバイスを得ることができるが、特に電極材料の仕事関数はできるだけ小さいものを選ぶことが好ましく、仕事関数4.3eV以下であることが好ましく、さらに好ましくは仕事関数3.7eV以下である。
低仕事関数金属の具体例としては、例えば化学便覧基礎編II−493頁(改訂3版 日本化学会編 丸善株式会社発行1983年)に記載されている4.3eV又はそれ以下の仕事関数をもつ金属の前記リストから選別すればよく、Ag(4.26eV),Al(4.06,4.28eV),Ba(2.52eV),Ca(2.9eV),Ce(2.9eV),Cs(1.95eV),Er(2.97eV),Eu(2.5eV),Gd(3.1eV),Hf(3.9eV),In(4.09eV),K(2.28eV),La(3.5eV),Li(2.93eV),Mg(3.66eV),Na(2.36eV),Nd(3.2eV),Rb(4.25eV),Sc(3.5eV),Sm(2.7eV),Ta(4.0,4.15eV),Y(3.1eV),Yb(2.6eV),Zn(3.63eV)等が挙げられる。これらの中でも、Ba,Ca,Cs,Er,Eu,Gd,Hf,K,La,Li,Mg,Na,Nd,Rb,Y,Yb,Znが好ましい。電極材料としてはこれらの低仕事関数の物質を1種又は複数含んでいても、仕事関数が前記式(II)を満たせば特に制限を受けるものではない。ただし、低仕事関数金属は、大気中の水分や酸素に触れると容易に劣化してしまうので、必要に応じてAgやAuのような空気中で安定な金属で被覆することが望ましい。被覆に必要な膜厚は10nm以上必要であり、膜厚が厚くなるほど酸素や水から保護することができるが、実用上、生産性を上げる等の理由から1μm以下にすることが望ましい。In the case of an n-type organic thin film transistor, it is preferable that ac <1.5 eV (formula (II)), and more preferably ac <1.0 eV. If the above relationship can be maintained in relation to the charge injection layer, a high-performance device can be obtained. In particular, the work function of the electrode material is preferably as small as possible, and the work function is preferably 4.3 eV or less. More preferably, the work function is 3.7 eV or less.
As a specific example of the low work function metal, for example, it has a work function of 4.3 eV or less as described in Chemical Handbook Basics, pages II-493 (revised 3 edition, published by the Chemical Society of Japan, Maruzen Co., Ltd. 1983). What is necessary is just to select from the said list | wrist of a metal, Ag (4.26 eV), Al (4.06, 4.28 eV), Ba (2.52 eV), Ca (2.9 eV), Ce (2.9 eV), Cs (1.95 eV), Er (2.97 eV), Eu (2.5 eV), Gd (3.1 eV), Hf (3.9 eV), In (4.09 eV), K (2.28 eV), La ( 3.5 eV), Li (2.93 eV), Mg (3.66 eV), Na (2.36 eV), Nd (3.2 eV), Rb (4.25 eV), Sc (3.5 eV), Sm (2 .7 eV), Ta (4.0, 4.15 eV), Y (3.1 eV), Yb (2.6 eV), Zn (3.63 eV) and the like. Among these, Ba, Ca, Cs, Er, Eu, Gd, Hf, K, La, Li, Mg, Na, Nd, Rb, Y, Yb, and Zn are preferable. Even if one or more of these low work function substances are included as the electrode material, there is no particular limitation as long as the work function satisfies the above formula (II). However, since the low work function metal easily deteriorates when exposed to moisture and oxygen in the atmosphere, it is desirable to coat with a stable metal in the air such as Ag or Au as necessary. The film thickness necessary for the coating is 10 nm or more, and as the film thickness increases, the film can be protected from oxygen and water. However, for practical reasons, the thickness is preferably 1 μm or less for the purpose of increasing productivity.
前記電極の形成方法としては、例えば、蒸着、電子ビーム蒸着、スパッタリング、大気圧プラズマ法、イオンプレーティング、化学気相蒸着、電着、無電解メッキ、スピンコーティング、印刷又はインクジェット等の手段により形成される。また、必要に応じてパターニングする方法としては、上記の方法を用いて形成した導電性薄膜を、公知のフォトリソグラフ法やリフトオフ法を用いて電極形成する方法、アルミニウムや銅等の金属箔上に熱転写、インクジェット等により、レジストを形成しエッチングする方法がある。また、導電性ポリマーの溶液あるいは分散液、金属微粒子を含有する分散液等を直接インクジェット法によりパターニングしてもよく、塗工膜からリソグラフやレーザーアブレーション等により形成してもよい。さらに導電性ポリマーや金属微粒子を含有する導電性インク、導電性ペースト等を凸版、凹版、平版、スクリーン印刷等の印刷法でパターニングする方法も用いることができる。
このようにして形成された電極の膜厚は電流の導通さえあれば特に制限はないが、好ましくは0.2nm〜10μm、さらに好ましくは4nm〜300nmの範囲である。この好ましい範囲内であれば、膜厚が薄いことにより抵抗が高くなり電圧降下を生じることがない。また、厚すぎないため膜形成に時間がかからず、保護層や有機半導体層等他の層を積層する場合に、段差が生じることが無く積層膜が円滑にできる。
また、本実施形態の有機薄膜トランジスタでは、例えば、電荷注入効率を更に向上させる目的で、電荷注入層とソース電極及びドレイン電極との間に、バッファ層を設けてもよい。バッファ層としてはn型有機薄膜トランジスタに対しては有機ELの陰極に用いられるLiF、Li2O、CsF、NaCO3、KCl、MgF2、CaCO3等のアルカリ金属、アルカリ土類金属イオン結合を持つ化合物が望ましい。また、Alq等有機ELで電子注入層、電子輸送層として用いられる化合物を挿入してもよい。
p型有機薄膜トランジスタに対してはFeCl3、TCNQ、F4−TCNQ、HAT等のシアノ化合物、CFxやGeO2、SiO2、MoO3、V2O5、VO2、V2O3、MnO、Mn3O4、ZrO2、WO3、TiO2、In2O3、ZnO、NiO、HfO2、Ta2O5、ReO3、PbO2等のアルカリ金属、アルカリ土類金属以外の金属酸化物、ZnS、ZnSe等の無機化合物が望ましい。これらの酸化物は多くの場合、酸素欠損を起こし、これが正孔注入に好適である。更にはTPDやNPD等のアミン系化合物やCuPc等有機EL素子において正孔注入層、正孔輸送層として用いられる化合物でもよい。また、上記の化合物二種類以上からなるものが望ましい。The electrode may be formed by means such as vapor deposition, electron beam vapor deposition, sputtering, atmospheric pressure plasma method, ion plating, chemical vapor deposition, electrodeposition, electroless plating, spin coating, printing or ink jet. Is done. In addition, as a method of patterning as necessary, a conductive thin film formed using the above method is formed using a known photolithographic method or a lift-off method, on a metal foil such as aluminum or copper. There is a method in which a resist is formed and etched by thermal transfer, ink jet, or the like. Alternatively, a conductive polymer solution or dispersion, a dispersion containing metal fine particles, or the like may be directly patterned by an ink jet method, or may be formed from a coating film by lithography, laser ablation, or the like. Further, a method of patterning a conductive ink or conductive paste containing a conductive polymer or fine metal particles by a printing method such as relief printing, intaglio printing, lithographic printing, or screen printing can also be used.
The thickness of the electrode formed in this way is not particularly limited as long as current conduction is present, but it is preferably in the range of 0.2 nm to 10 μm, more preferably 4 nm to 300 nm. If it is in this preferable range, the resistance is increased due to the thin film thickness, and a voltage drop does not occur. In addition, since the film is not too thick, it does not take time to form the film, and when another layer such as a protective layer or an organic semiconductor layer is laminated, the laminated film can be smooth without causing a step.
In the organic thin film transistor of this embodiment, for example, a buffer layer may be provided between the charge injection layer and the source and drain electrodes for the purpose of further improving the charge injection efficiency. The buffer layer has an alkali metal or alkaline earth metal ion bond such as LiF, Li 2 O, CsF, NaCO 3 , KCl, MgF 2 , and CaCO 3 used for an organic EL cathode for an n-type organic thin film transistor. Compounds are desirable. Moreover, you may insert the compound used as an electron injection layer and an electron carrying layer by organic EL, such as Alq.
For p-type organic thin film transistors, cyano compounds such as FeCl 3 , TCNQ, F 4 -TCNQ, HAT, CFx, GeO 2 , SiO 2 , MoO 3 , V 2 O 5 , VO 2 , V 2 O 3 , MnO, Mn 3 O 4 , ZrO 2 , WO 3 , TiO 2 , In 2 O 3 , ZnO, NiO, HfO 2 , Ta 2 O 5 , ReO 3 , metal oxides other than alkaline earth metals, such as PbO 2 , Inorganic compounds such as ZnS and ZnSe are desirable. In many cases, these oxides cause oxygen vacancies, which are suitable for hole injection. Further, amine compounds such as TPD and NPD, and compounds used as a hole injection layer and a hole transport layer in an organic EL device such as CuPc may be used. Moreover, what consists of two or more types of said compounds is desirable.
(絶縁体層)
本発明の有機薄膜トランジスタにおける絶縁体層の材料としては、電気絶縁性を有し薄膜として形成できるものであるのなら特に限定されず、金属酸化物(珪素の酸化物を含む)、金属窒化物(珪素の窒化物を含む)、高分子、有機低分子等室温での電気抵抗率が10Ωcm以上の材料を用いることができ、特に、比誘電率の高い無機酸化物皮膜が好ましい。
無機酸化物としては、酸化ケイ素、酸化アルミニウム、酸化タンタル、酸化チタン、酸化スズ、酸化バナジウム、チタン酸バリウムストロンチウム、ジルコニウム酸チタン酸バリウム、ジルコニウム酸チタン酸鉛、チタン酸鉛ランタン、チタン酸ストロンチウム、チタン酸バリウム、フッ化バリウムマグネシウム、ランタン酸化物、フッ素酸化物、マグネシウム酸化物、ビスマス酸化物、チタン酸ビスマス、ニオブ酸化物,チタン酸ストロンチウムビスマス、タンタル酸ストロンチウムビスマス、五酸化タンタル、タンタル酸ニオブ酸ビスマス、トリオキサイドイットリウム及びこれらを組合せたものが挙げられ、酸化ケイ素、酸化アルミニウム、酸化タンタル、酸化チタンが好ましい。
また、窒化ケイ素(Si3N4、SixNy(x、y>0))、窒化アルミニウム等の無機窒化物も好適に用いることができる。(Insulator layer)
The material of the insulator layer in the organic thin film transistor of the present invention is not particularly limited as long as it has electrical insulation and can be formed as a thin film. Metal oxide (including silicon oxide), metal nitride ( (Including silicon nitride), polymers, low molecular organic molecules, and the like, materials having an electrical resistivity at room temperature of 10 Ωcm or more can be used, and an inorganic oxide film having a high relative dielectric constant is particularly preferable.
Inorganic oxides include silicon oxide, aluminum oxide, tantalum oxide, titanium oxide, tin oxide, vanadium oxide, barium strontium titanate, barium zirconate titanate, lead zirconate titanate, lead lanthanum titanate, strontium titanate, Barium titanate, barium magnesium fluoride, lanthanum oxide, fluorine oxide, magnesium oxide, bismuth oxide, bismuth titanate, niobium oxide, strontium bismuth titanate, strontium bismuth tantalate, tantalum pentoxide, niobium tantalate Examples thereof include bismuth acid, trioxide yttrium, and combinations thereof, and silicon oxide, aluminum oxide, tantalum oxide, and titanium oxide are preferable.
In addition, inorganic nitrides such as silicon nitride (Si 3 N 4 , SixNy (x, y> 0)) and aluminum nitride can be suitably used.
さらに、絶縁体層は、アルコキシド金属を含む前駆物質で形成されていてもよく、この前駆物質の溶液を、例えば基板に被覆し、これを熱処理を含む化学溶液処理をすることにより絶縁体層が形成される。
前記アルコキシド金属における金属としては、例えば、遷移金属、ランタノイド、又は主族元素から選択され、具体的には、バリウム(Ba)、ストロンチウム(Sr)、チタン(Ti)、ビスマス(Bi)、タンタル(Ta)、ジルコン(Zr)、鉄(Fe)、ニッケル(Ni)、マンガン(Mn)、鉛(Pb)、ランタン(La)、リチウム(Li)、ナトリウム(Na)、カリウム(K)、ルビジウム(Rb)、セシウム(Cs)、フランシウム(Fr)、ベリリウム(Be)、マグネシウム(Mg)、カルシウム(Ca)、ニオブ(Nb)、タリウム(Tl)、水銀(Hg)、銅(Cu)、コバルト(Co)、ロジウム(Rh)、スカンジウム(Sc)及びイットリウム(Y)等が挙げられる。また、前記アルコキシド金属におけるアルコキシドとしては、例えば、メタノール、エタノール、プロパノール、イソプロパノール、ブタノール、イソブタノール等を含むアルコール類、メトキシエタノール、エトキシエタノール、プロポキシエタノール、ブトキシエタノール、ペントキシエタノール、ヘプトキシエタノール、メトキシプロパノール、エトキシプロパノール、プロポキシプロパノール、ブトキシプロパノール、ペントキシプロパノール、ヘプトキシプロパノールを含むアルコキシアルコール類等から誘導されるものが挙げられる。Further, the insulator layer may be formed of a precursor containing an alkoxide metal, and the insulator layer is formed by coating a solution of the precursor on a substrate, for example, and subjecting the solution to a chemical solution treatment including heat treatment. It is formed.
The metal in the alkoxide metal is selected from, for example, a transition metal, a lanthanoid, or a main group element. Specifically, barium (Ba), strontium (Sr), titanium (Ti), bismuth (Bi), tantalum ( Ta), zircon (Zr), iron (Fe), nickel (Ni), manganese (Mn), lead (Pb), lanthanum (La), lithium (Li), sodium (Na), potassium (K), rubidium ( Rb), cesium (Cs), francium (Fr), beryllium (Be), magnesium (Mg), calcium (Ca), niobium (Nb), thallium (Tl), mercury (Hg), copper (Cu), cobalt ( Co), rhodium (Rh), scandium (Sc), yttrium (Y), and the like. Examples of the alkoxide in the alkoxide metal include, for example, alcohols including methanol, ethanol, propanol, isopropanol, butanol, isobutanol, methoxyethanol, ethoxyethanol, propoxyethanol, butoxyethanol, pentoxyethanol, heptoxyethanol, Examples thereof include those derived from alkoxy alcohols including methoxypropanol, ethoxypropanol, propoxypropanol, butoxypropanol, pentoxypropanol, heptoxypropanol, and the like.
本発明において、絶縁体層を上記したような材料で構成すると、絶縁体層中に分極が発生しやすくなり、トランジスタ動作のしきい電圧を低減することができる。また、上記材料の中でも、特に、Si3N4、SixNy、SiONx(x、y>0)等の窒化ケイ素で絶縁体層を形成することもできる。
有機化合物を用いた絶縁体層としては、ポリイミド、ポリアミド、ポリエステル、ポリアクリレート、光ラジカル重合系、光カチオン重合系の光硬化性樹脂、アクリロニトリル成分を含有する共重合体、ポリビニルアルコール、ノボラック樹脂、及びシアノエチルプルラン等を用いることもできる。In the present invention, when the insulator layer is made of the above-described material, polarization easily occurs in the insulator layer, and the threshold voltage for transistor operation can be reduced. In addition, among the above materials, the insulator layer can be formed of silicon nitride such as Si 3 N 4 , SixNy, and SiONx (x, y> 0).
As an insulator layer using an organic compound, polyimide, polyamide, polyester, polyacrylate, photo radical polymerization system, photo cation polymerization system photo-curing resin, copolymer containing acrylonitrile component, polyvinyl alcohol, novolac resin, Also, cyanoethyl pullulan or the like can be used.
その他、ワックス、ポリエチレン、ポリクロロピレン、ポリエチレンテレフタレート、ポリオキシメチレン、ポリビニルクロライド、ポリフッ化ビニリデン、ポリサルホン、ポリイミドシアノエチルプルラン、ポリ(ビニルフェノール)(PVP)、ポリ(メチルメタクレート)(PMMA)、ポリカーボネート(PC)、ポリスチレン(PS)、ポリオレフィン、ポリアクリルアミド、ポリ(アクリル酸)、ノボラック樹脂、レゾール樹脂、ポリイミド、ポリキシリレン、エポキシ樹脂に加え、プルラン等の高い誘電率を持つ高分子材料を使用することも可能である。
絶縁体層に用いる有機化合物材料、高分子材料として、特に好ましいのは撥水性を有する有機化合物であり、撥水性を有することにより絶縁体層と有機半導体層との相互作用を抑え、有機半導体が本来保有している凝集性を利用して有機半導体層の結晶性を高めデバイス性能を向上させることができる。このような例としては、YasudaらJpn.J.Appl.Phys. Vol.42 (2003) pp.6614-6618に記載のポリパラキシリレン誘導体やJanos Veresら Chem.Mater., Vol.16 (2004) pp.4543-4555に記載のものが挙げられる。
また、図2及び図5に示すようなトップゲート構造を用いるときに、このような有機化合物を絶縁体層の材料として用いると、有機半導体層に与えるダメージを小さくして成膜することができるため有効な方法である。In addition, wax, polyethylene, polychloropyrene, polyethylene terephthalate, polyoxymethylene, polyvinyl chloride, polyvinylidene fluoride, polysulfone, polyimide cyanoethyl pullulan, poly (vinylphenol) (PVP), poly (methyl methacrylate) (PMMA), polycarbonate ( In addition to PC), polystyrene (PS), polyolefin, polyacrylamide, poly (acrylic acid), novolac resin, resole resin, polyimide, polyxylylene, epoxy resin, high molecular materials with high dielectric constant such as pullulan may be used. Is possible.
As the organic compound material or polymer material used for the insulator layer, an organic compound having water repellency is particularly preferable. By having water repellency, the interaction between the insulator layer and the organic semiconductor layer is suppressed, Utilizing the inherent cohesion, the crystallinity of the organic semiconductor layer can be increased and the device performance can be improved. Examples of such compounds include polyparaxylylene derivatives described in Yasuda et al. Jpn. J. Appl. Phys. Vol. 42 (2003) pp. 6614-6618 and Janos Veres et al. Chem. Mater., Vol. 16 (2004). ) The thing of pp.4543-4555 is mentioned.
Further, when such a top gate structure as shown in FIGS. 2 and 5 is used, if such an organic compound is used as a material for the insulator layer, the film can be formed with reduced damage to the organic semiconductor layer. Therefore, it is an effective method.
前絶縁体層は、前述したような無機又は有機化合物材料を複数用いた混合層であってもよく、これらの積層構造体であってもよい。この場合、必要に応じて誘電率の高い材料と撥水性を有する材料を混合したり、積層することによりデバイスの性能を制御することもできる。 The pre-insulator layer may be a mixed layer using a plurality of inorganic or organic compound materials as described above, or may be a laminated structure thereof. In this case, the performance of the device can be controlled by mixing or laminating a material having a high dielectric constant and a material having water repellency, if necessary.
また、前記絶縁体層は、陽極酸化膜、又は該陽極酸化膜を構成として含んでもよい。陽極酸化膜は封孔処理されることが好ましい。陽極酸化膜は、陽極酸化が可能な金属を公知の方法により陽極酸化することにより形成される。陽極酸化処理可能な金属としては、アルミニウム又はタンタルを挙げることができ、陽極酸化処理の方法には特に制限はなく、公知の方法を用いることができる。陽極酸化処理を行なうことにより、酸化被膜が形成される。陽極酸化処理に用いられる電解液としては、多孔質酸化皮膜を形成することができるものならばいかなるものでも使用でき、一般には、硫酸、燐酸、蓚酸、クロム酸、ホウ酸、スルファミン酸、ベンゼンスルホン酸等あるいはこれらを2種類以上組み合わせた混酸又はそれらの塩が用いられる。陽極酸化の処理条件は使用する電解液により種々変化するので一概に特定し得ないが、一般的には、電解液の濃度が1〜80質量%、電解液の温度5〜70℃、電流密度0.5〜60A/cm2、電圧1〜100ボルト、電解時間10秒〜5分の範囲が適当である。好ましい陽極酸化処理は、電解液として硫酸、リン酸又はホウ酸の水溶液を用い、直流電流で処理する方法であるが、交流電流を用いることもできる。これらの酸の濃度は5〜45質量%であることが好ましく、電解液の温度20〜50℃、電流密度0.5〜20A/cm2で20〜250秒間電解処理するのが好ましい。
絶縁体層の厚さとしては、層の厚さが薄いと有機半導体に印加される実効電圧が大きくなるので、デバイス自体の駆動電圧、閾電圧を下げることができるが、逆にソースーゲート間のリーク電流が大きくなるので、適切な膜厚を選ぶ必要があり、通常1nm〜5μm、好ましくは5nm〜2μm、さらに好ましくは100nm〜1μmである。The insulator layer may include an anodic oxide film or the anodic oxide film as a configuration. The anodized film is preferably sealed. The anodized film is formed by anodizing a metal that can be anodized by a known method. Examples of the metal that can be anodized include aluminum and tantalum, and the anodizing method is not particularly limited, and a known method can be used. An oxide film is formed by anodizing. Any electrolyte solution that can form a porous oxide film can be used as the anodizing treatment. Generally, sulfuric acid, phosphoric acid, oxalic acid, chromic acid, boric acid, sulfamic acid, benzenesulfone, and the like can be used. An acid or the like or a mixed acid obtained by combining two or more of these or a salt thereof is used. The treatment conditions for anodization vary depending on the electrolyte used, and thus cannot be specified in general. In general, the electrolyte concentration is 1 to 80% by mass, the electrolyte temperature is 5 to 70 ° C., and the current density. 0.5 to 60 a / cm 2, voltage 1 to 100 V, the electrolysis time of 10 seconds to 5 minutes is suitable. A preferred anodizing treatment is a method in which an aqueous solution of sulfuric acid, phosphoric acid or boric acid is used as the electrolytic solution and the treatment is performed with a direct current, but an alternating current can also be used. The concentration of these acids is preferably 5 to 45% by mass, and the electrolytic treatment is preferably performed for 20 to 250 seconds at an electrolyte temperature of 20 to 50 ° C. and a current density of 0.5 to 20 A / cm 2 .
As the thickness of the insulator layer, if the layer thickness is thin, the effective voltage applied to the organic semiconductor increases, so the drive voltage and threshold voltage of the device itself can be lowered, but conversely the leakage between the source and gate Since the current increases, it is necessary to select an appropriate film thickness, which is usually 1 nm to 5 μm, preferably 5 nm to 2 μm, and more preferably 100 nm to 1 μm.
また、前記絶縁体層と有機半導体層の間に、任意の配向処理を施してもよい。その好ましい例としては、絶縁体層表面に撥水化処理等を施し絶縁体層と有機半導体層との相互作用を低減させ有機半導体層の結晶性を向上させる方法であり、具体的には、シランカップリング剤、例えば、オクタデシルトリクロロシラン、トリクロロメチルシラザンや、アルカン燐酸、アルカンスルホン酸、アルカンカルボン酸等の自己組織化配向膜材料を、液相又は気相状態で、絶縁膜表面に接触させ自己組織化膜を形成後、適度に乾燥処理を施す方法が挙げられる。また、液晶の配向に用いられるように、絶縁膜表面にポリイミド等で構成された膜を設置し、その表面をラビング処理する方法も好ましい。 Moreover, you may perform arbitrary orientation processing between the said insulator layer and an organic-semiconductor layer. A preferable example thereof is a method for improving the crystallinity of the organic semiconductor layer by reducing the interaction between the insulator layer and the organic semiconductor layer by performing a water repellent treatment or the like on the surface of the insulator layer. A silane coupling agent such as octadecyltrichlorosilane, trichloromethylsilazane, or a self-organized alignment film material such as alkane phosphoric acid, alkane sulfonic acid, or alkane carboxylic acid is brought into contact with the insulating film surface in a liquid phase or gas phase. An example is a method of appropriately drying after forming the self-assembled film. In addition, a method in which a film made of polyimide or the like is provided on the surface of the insulating film and the surface is rubbed so as to be used for liquid crystal alignment is also preferable.
前記絶縁体層の形成方法としては、真空蒸着法、分子線エピタキシャル成長法、イオンクラスタービーム法、低エネルギーイオンビーム法、イオンプレーティング法、CVD法、スパッタリング法、特開平11−61406号公報、同11−133205号公報、特開2000−121804号公報、同2000−147209号公報、同2000−185362号公報に記載の大気圧プラズマ法等のドライプロセスや、スプレーコート法、スピンコート法、ブレードコート法、デイップコート法、キャスト法、ロールコート法、バーコート法、ダイコート法等の塗布による方法、印刷やインクジェット等のパターニングによる方法等のウェットプロセスが挙げられ、材料に応じて使用できる。ウェットプロセスは、無機酸化物の微粒子を、任意の有機溶剤又は水に必要に応じて界面活性剤等の分散補助剤を用いて分散した液を塗布、乾燥する方法や、酸化物前駆体、例えば、アルコキシド体の溶液を塗布、乾燥する、いわゆるゾルゲル法が用いられる。 As a method for forming the insulator layer, a vacuum deposition method, a molecular beam epitaxial growth method, an ion cluster beam method, a low energy ion beam method, an ion plating method, a CVD method, a sputtering method, JP-A-11-61406, 11-133205, JP-A 2000-121804, 2000-147209, 2000-185362, etc., dry process such as atmospheric pressure plasma method, spray coating method, spin coating method, blade coating Examples thereof include wet processes such as a method by coating such as a method, a dip coating method, a cast method, a roll coating method, a bar coating method, and a die coating method, and a patterning method such as printing and ink jetting. The wet process is a method of applying and drying a liquid in which fine particles of inorganic oxide are dispersed in an arbitrary organic solvent or water using a dispersion aid such as a surfactant as required, or an oxide precursor, for example, A so-called sol-gel method in which a solution of an alkoxide body is applied and dried is used.
本発明の有機薄膜トランジスタにおける有機半導体層の膜厚は、特に制限されることはないが、通常、0.5nm〜1μmであり、2nm〜250nmであると好ましい。
また、有機半導体層の形成方法は特に限定されることはなく公知の方法を適用でき、例えば、分子線蒸着法(MBE法)、真空蒸着法、化学蒸着、材料を溶媒に溶かした溶液のディッピング法、スピンコーティング法、キャスティング法、バーコート法、ロールコート法等の印刷、塗布法及びベーキング、エレクトロポリマラインゼーション、溶液からのセルフ・アセンブリ、及びこれらの組合せた手段により、前記したような有機半導体層の材料で形成される。
有機半導体層の結晶性を向上させると電界効果移動度が向上するため、気相からの成膜(蒸着,スパッタ等)を用いる場合は成膜中の基板温度を高温で保持することが望ましい。その温度は50〜250℃が好ましく、70〜150℃であるとさらに好ましい。また、成膜方法に関わらず成膜後にアニーリングを実施すると高性能デバイスが得られるため好ましい。アニーリングの温度は50〜200℃が好ましく、70〜200℃であるとさらに好ましく、時間は10分〜12時間が好ましく、1〜10時間であるとさらに好ましい。Although the film thickness of the organic-semiconductor layer in the organic thin-film transistor of this invention is not restrict | limited in particular, Usually, it is 0.5 nm-1 micrometer, and it is preferable in it being 2 nm-250 nm.
In addition, a method for forming the organic semiconductor layer is not particularly limited, and a known method can be applied. For example, molecular beam deposition (MBE), vacuum deposition, chemical deposition, dipping of a solution in which a material is dissolved in a solvent Organic, as described above, by means of printing, spin coating, casting, bar coating, roll coating, etc., coating and baking, electropolymerization, self-assembly from solution, and combinations thereof It is made of a semiconductor layer material.
When the crystallinity of the organic semiconductor layer is improved, the field effect mobility is improved. Therefore, when film formation from a gas phase (evaporation, sputtering, etc.) is used, it is desirable to maintain the substrate temperature during film formation at a high temperature. The temperature is preferably 50 to 250 ° C, and more preferably 70 to 150 ° C. In addition, it is preferable to perform annealing after film formation regardless of the film forming method because a high-performance device can be obtained. The annealing temperature is preferably 50 to 200 ° C, more preferably 70 to 200 ° C, and the time is preferably 10 minutes to 12 hours, more preferably 1 to 10 hours.
本発明において、電荷注入層には、一般式(1)、(4)又は(5)から選ばれる材料1種類を用いてもよく、複数を組み合わせたり、ペンタセンやチオフェンオリゴマー等の公知の半導体を用いて複数の材料からなる混合薄膜又はこれら材料単独からなる層あるいは混合膜を積層して用いてもよい。また、ソース電極、ドレイン電極それぞれに対して異なる電荷注入層を設けてもよい。電荷注入層の膜厚は好ましくは,0.1nm〜1μm,更に好ましくは0.3nm〜100nmであり,成膜法は有機半導体層と同様の成膜法を用いることが可能である。
また、電荷注入層は、図7の42に示すように、有機半導体層52とソース−ドレイン電極の間で、ソース−ドレイン電極が設けられていない部分にも設置する態様であってもよい。この場合、金属マスクを使用せずに電荷注入層を設置することができるので、生産性の面で利点がある。In the present invention, for the charge injection layer, one kind of material selected from the general formula (1), (4) or (5) may be used, or a plurality of known materials such as pentacene and thiophene oligomer may be combined. A mixed thin film made of a plurality of materials, a layer made of these materials alone, or a mixed film may be laminated and used. Further, different charge injection layers may be provided for the source electrode and the drain electrode, respectively. The film thickness of the charge injection layer is preferably 0.1 nm to 1 μm, more preferably 0.3 nm to 100 nm, and a film formation method similar to that of the organic semiconductor layer can be used.
Further, as shown in 42 of FIG. 7, the charge injection layer may be provided in a portion where the source-drain electrode is not provided between the
本発明の有機薄膜トランジスタの形成方法としては、特に限定されず公知の方法によればよいが、所望の素子構成に従い、基板投入、ゲート電極形成、絶縁体層形成、有機半導体層形成、電荷注入層形成、ソース電極形成、ドレイン電極形成までの一連の素子作製工程を全く大気に触れることなく形成すると、大気との接触による大気中の水分や酸素等による素子性能の阻害を防止できるため好ましい。やむをえず、一度大気に触れさせなければならないときは、有機半導体層成膜以後の工程は大気に全く触れさせない工程とし、有機半導体層成膜直前には、有機半導体層を積層する面(例えば素子Bの場合は絶縁層に一部ソース電極、ドレイン電極が積層された表面)を紫外線照射、紫外線/オゾン照射、酸素プラズマ、アルゴンプラズマ等で清浄化・活性化した後、有機半導体層を積層することが好ましい。
さらに、例えば、大気中に含まれる酸素、水等の有機半導体層に対する影響を考慮し、有機薄膜トランジスタ素子の外周面の全面又は一部に、ガスバリア層を形成してもよい。ガスバリア層を形成する材料としては、この分野で常用されるものを使用でき、例えば、ポリビニルアルコール、エチレン−ビニルアルコール共重合体、ポリ塩化ビニル、ポリ塩化ビニリデン、ポリクロロトリフロロエチレン等が挙げられる。さらに、前記絶縁体層で例示した、絶縁性を有する無機物も使用できる。A method for forming the organic thin film transistor of the present invention is not particularly limited and may be a known method. According to a desired element configuration, the substrate is charged, the gate electrode is formed, the insulator layer is formed, the organic semiconductor layer is formed, and the charge injection layer It is preferable to form a series of device manufacturing steps from formation, source electrode formation, and drain electrode formation without exposure to the atmosphere, because the device performance can be prevented from being impaired by moisture, oxygen, etc. in the atmosphere due to contact with the atmosphere. When it is unavoidable that the atmosphere must be exposed to the atmosphere once, the process after the organic semiconductor layer is formed is not exposed to the atmosphere at all. In the case of B, the surface on which the source electrode and the drain electrode are partially stacked on the insulating layer) is cleaned and activated by ultraviolet irradiation, ultraviolet / ozone irradiation, oxygen plasma, argon plasma, etc., and then the organic semiconductor layer is stacked. It is preferable.
Further, for example, in consideration of the influence on the organic semiconductor layer such as oxygen and water contained in the atmosphere, a gas barrier layer may be formed on the whole or a part of the outer peripheral surface of the organic thin film transistor element. As the material for forming the gas barrier layer, those commonly used in this field can be used, and examples thereof include polyvinyl alcohol, ethylene-vinyl alcohol copolymer, polyvinyl chloride, polyvinylidene chloride, and polychlorotrifluoroethylene. . Furthermore, the inorganic substance which has the insulation illustrated in the said insulator layer can also be used.
本発明はまた、前記有機薄膜トランジスタにおいて、ソース−ドレイン間を流れる電流を利用して発光を得、ゲート電極に電圧を印加することによって発光を制御する有機薄膜発光トランジスタを提供する。
本発明における、有機薄膜トランジスタはソース、ドレイン電極から注入した電荷を用いて発光素子として用いることもできる。すなわち、有機薄膜トランジスタを発光素子(有機EL)の機能を兼ねた有機薄膜発光トランジスタとして用いることができる。これは、ソース−ドレイン電極間に流れる電流をゲート電極で制御することにより発光強度を制御できる。発光を制御するためのトランジスタと発光素子を統合できるため、ディスプレイの開口率向上や作製プロセスの簡易化によるコストダウンが可能となり実用上の大きなメリットを与える。有機発光トランジスタとして用いるときは、上記詳細な説明で述べた内容で十分であるが本発明の有機薄膜トランジスタを有機発光トランジスタとして動作させるためにはソース、ドレインの一方から正孔、もう一方から電子を注入する必要あり、発光性能を向上させるため以下の条件を満たすことが好ましい。The present invention also provides an organic thin film light emitting transistor that controls light emission by obtaining light emission using a current flowing between a source and a drain and applying a voltage to a gate electrode.
The organic thin film transistor according to the present invention can also be used as a light emitting element using charges injected from the source and drain electrodes. That is, the organic thin film transistor can be used as an organic thin film light emitting transistor that also functions as a light emitting element (organic EL). In this case, the emission intensity can be controlled by controlling the current flowing between the source and drain electrodes with the gate electrode. Since the transistor for controlling light emission and the light emitting element can be integrated, the aperture ratio of the display can be improved and the cost can be reduced by the simplification of the manufacturing process, which provides a great practical advantage. When used as an organic light-emitting transistor, the contents described in the above detailed description are sufficient, but in order to operate the organic thin-film transistor of the present invention as an organic light-emitting transistor, holes from one of the source and drain and electrons from the other are used. In order to improve the light emission performance, it is preferable to satisfy the following conditions.
(ソース,ドレイン)
本発明の有機薄膜発光トランジスタは、正孔の注入性を向上させるため、少なくとも一方は正孔注入性電極であることが好ましい。正孔注入電極とは上記仕事関数4.2eV以上の物質を含む電極である。
また、電子の注入性を向上させるため少なくとも一方は電子注入性電極であることが好ましい。電子注入性電極とは上記仕事関数4.3eV以下の物質を含む電極である。更に好ましくは一方が正孔注入性であり、かつ、もう一方が電子注入性である電極を備える有機薄膜発光トランジスタである。(Source, drain)
In the organic thin film light emitting transistor of the present invention, at least one of them is preferably a hole injecting electrode in order to improve hole injecting property. A hole injection electrode is an electrode containing a substance having a work function of 4.2 eV or higher.
In order to improve the electron injection property, at least one of them is preferably an electron injection electrode. An electron injecting electrode is an electrode containing a substance having a work function of 4.3 eV or less. More preferably, it is an organic thin film light-emitting transistor provided with an electrode in which one is hole-injecting and the other is electron-injecting.
さらに好ましくは一方の電極下に正孔注入層を備え、かつ、もう一方の電極下に電子注入層を備える有機薄膜発光トランジスタである。 More preferably, it is an organic thin film light emitting transistor provided with a hole injection layer under one electrode and an electron injection layer under the other electrode.
次に、実施例を用いて本発明をさらに詳しく説明する。
合成例1(化合物(1)の合成)
上記化合物(1)を以下合成経路に従って合成した。
Synthesis Example 1 (Synthesis of Compound (1))
The compound (1) was synthesized according to the following synthesis route.
300ミリリットルの3つ口フラスコに1,4−ジブロモベンゼン7.50g(31.7mmol)、テトラキストリフェニルホスフィンパラジウム1.83g(1.59mmol)、ヨウ化銅(I)0.604g(3.17mmol)を入れ、アルゴン置換した。これにトリエチルアミン150ミリリットル、エチニルベンゼン10.5ミリリットル(95.4mmol)を加え、アルゴン雰囲気下、9時間加熱還流した。反応液に水100ミリリットル、塩化メチレン100ミリリットルを加え、有機層を分離し、無水硫酸マグネシウムで乾燥した。エバポレーターで減圧濃縮した後、得られた固体をシリカゲルカラムクロマトグラフィー(溶出溶媒:塩化メチレン/へキサン=1/10)で精製し、化合物(1)を2.55g(9.16mmol,収率29%)得た。 In a 300 ml three-necked flask, 7.50 g (31.7 mmol) of 1,4-dibromobenzene, 1.83 g (1.59 mmol) of tetrakistriphenylphosphine palladium, 0.604 g (3.17 mmol) of copper (I) iodide ) And replaced with argon. To this, 150 ml of triethylamine and 10.5 ml (95.4 mmol) of ethynylbenzene were added and heated to reflux for 9 hours under an argon atmosphere. 100 ml of water and 100 ml of methylene chloride were added to the reaction solution, and the organic layer was separated and dried over anhydrous magnesium sulfate. After concentration under reduced pressure with an evaporator, the obtained solid was purified by silica gel column chromatography (elution solvent: methylene chloride / hexane = 1/10) to obtain 2.55 g (9.16 mmol, yield 29) of compound (1). %)Obtained.
得られた化合物が化合物(1)であることは、1H−NMR(90MHz)及びFD−MS(フィールドディソープションマス分析)測定により確認した。
FD−MSの測定結果を以下に示す。
FD−MS,calcd for C48H30S2=278,found,m/z=278(M+,100)
また、化合物(1)を220℃で昇華精製を行った結果、昇華精製により得られた化合物(1)の純度は99.5%であった。It was confirmed by 1 H-NMR (90 MHz) and FD-MS (field desorption mass analysis) that the obtained compound was compound (1).
The measurement results of FD-MS are shown below.
FD-MS, calcd for C 48 H 30 S 2 = 278, found, m / z = 278 (M +, 100)
Moreover, as a result of sublimation purification of the compound (1) at 220 ° C., the purity of the compound (1) obtained by sublimation purification was 99.5%.
上記FD−MS(フィールドディソープションマス分析)測定に用いた装置及び測定条件を以下に示す。
<FD−MS測定>
装置:HX110(日本電子社製)
条件:加速電圧 8kV
スキャンレンジ m/z=50〜1500The apparatus and measurement conditions used for the FD-MS (field desorption mass analysis) measurement are shown below.
<FD-MS measurement>
Device: HX110 (manufactured by JEOL Ltd.)
Condition: Acceleration voltage 8kV
Scan range m / z = 50-1500
実施例1(有機薄膜トランジスタの製造)
Si基板(P型比抵抗1Ωcmゲート電極兼用)を熱酸化法にて表面を酸化させ、基板上に300nmの熱酸化膜を作製して絶縁体層とした。さらに基板の一方に成膜したSiO2膜をドライエッチングにて完全に除去した後、スパッタ法にてクロムを20nmの膜厚で成膜し、さらにその上に金(Au)を100nmスパッタにて成膜し取り出し電極とした。
この基板を、中性洗剤,純水,アセトン及びエタノールで各30分超音波洗浄し、さらにオゾン洗浄を行った。Example 1 (Production of organic thin film transistor)
A surface of a Si substrate (also used as a P-type specific resistance 1 Ωcm gate electrode) was oxidized by a thermal oxidation method, and a 300 nm thermal oxide film was formed on the substrate to form an insulator layer. Further, after the SiO 2 film formed on one side of the substrate is completely removed by dry etching, chromium is deposited to a thickness of 20 nm by sputtering, and further gold (Au) is sputtered by 100 nm by sputtering. A film was formed and taken out as an electrode.
This substrate was ultrasonically cleaned with a neutral detergent, pure water, acetone and ethanol for 30 minutes each, and further subjected to ozone cleaning.
次に、上記基板を真空蒸着装置(ULVAC社製,EX−400)に設置し、絶縁体層上に1,4−ビス(4−メチルスチリル)ベンゼン(4MSB)を0.05nm/sの蒸着速度で50nm膜厚の有機半導体層として成膜した。次いで、金属マスクを通して合成例1で調製した化合物(1)を0.05nm/sの蒸着速度で、20nm膜厚の電荷注入層を成膜した。さらに金を50nmの膜厚で成膜することにより、互いに接しない電荷注入層並びにソース電極及びドレイン電極を、間隔(チャンネル長L)が75μmになるように形成した。そのときソース電極とドレイン電極の幅(チャンネル幅W)は5mmとなるように成膜して有機薄膜トランジスタを作製した(図6参照)。 Next, the substrate was placed in a vacuum vapor deposition apparatus (ULVAC, EX-400), and 1,4-bis (4-methylstyryl) benzene (4MSB) was vapor-deposited at 0.05 nm / s on the insulator layer. The film was formed as an organic semiconductor layer having a thickness of 50 nm at a speed. Next, a charge injection layer having a thickness of 20 nm was formed from the compound (1) prepared in Synthesis Example 1 through a metal mask at a deposition rate of 0.05 nm / s. Further, by depositing gold with a film thickness of 50 nm, a charge injection layer and a source electrode and a drain electrode which are not in contact with each other were formed so that a distance (channel length L) was 75 μm. At that time, an organic thin film transistor was manufactured by forming a film so that the width of the source electrode and the drain electrode (channel width W) was 5 mm (see FIG. 6).
得られた有機薄膜トランジスタのゲート電極に0〜−100Vのゲート電圧を印加し、ソース−ドレイン間に電圧を印加して電流を流した。得られた有機薄膜トランジスタは、電子が有機半導体層のチャンネル領域(ソース−ドレイン間)に誘起され、p型トランジスタとして動作した。その結果、電流飽和領域でのソース−ドレイン電極間の電流のオン/オフ比は1×106であった。
有機薄膜トランジスタの正孔の電界効果移動度μS及び閾値電圧VTを式(2)より算出したところμS=0.15cm2/Vs,VT=−20Vであった。また、式(1)から、線形領域において電界効果移動度μLを算出するとμS=0.15cm2/Vsであった。A gate voltage of 0 to −100 V was applied to the gate electrode of the obtained organic thin film transistor, and a current was applied by applying a voltage between the source and drain. In the obtained organic thin film transistor, electrons were induced in the channel region (between source and drain) of the organic semiconductor layer, and operated as a p-type transistor. As a result, the on / off ratio of the current between the source and drain electrodes in the current saturation region was 1 × 10 6 .
The field effect mobility μ S and the threshold voltage V T of the holes of the organic thin film transistor were calculated from the formula (2). As a result, μ S = 0.15 cm 2 / Vs and V T = −20V. Further, from the formula (1), the field effect mobility μ L in the linear region was calculated to be μ S = 0.15 cm 2 / Vs.
得られた有機薄膜トランジスタの出力曲線を図8に示す。図8から、ドレイン電圧が0V近傍領域(丸で囲われた部分)では、出力曲線が直線であり接触抵抗が低減されたことが判明した。 The output curve of the obtained organic thin film transistor is shown in FIG. From FIG. 8, it was found that the output curve is a straight line and the contact resistance is reduced in the region where the drain voltage is in the vicinity of 0V (the circled portion).
実施例2
化合物(1)の代わりに化合物(42)を用いて電荷注入層を成膜した他は実施例1と同様にして有機薄膜トランジスタを製造し、評価した。結果を表1に示す。Example 2
An organic thin film transistor was manufactured and evaluated in the same manner as in Example 1 except that the charge injection layer was formed using the compound (42) instead of the compound (1). The results are shown in Table 1.
実施例3
化合物(1)の代わりに化合物(162)を用いて電荷注入層を成膜した他は実施例1と同様にして有機薄膜トランジスタを製造し、評価した。結果を表1に示す。Example 3
An organic thin film transistor was manufactured and evaluated in the same manner as in Example 1 except that the charge injection layer was formed using the compound (162) instead of the compound (1). The results are shown in Table 1.
実施例4
化合物(1)の代わりに化合物(9)を用いて電荷注入層を成膜した他は実施例1と同様にして有機薄膜トランジスタを製造し、評価した。結果を表1に示す。Example 4
An organic thin film transistor was manufactured and evaluated in the same manner as in Example 1 except that the charge injection layer was formed using the compound (9) instead of the compound (1). The results are shown in Table 1.
実施例5
化合物(1)の代わりに化合物(43)を用いて電荷注入層を成膜した他は実施例1と同様にして有機薄膜トランジスタを製造し、評価した。結果を表1に示す。Example 5
An organic thin film transistor was manufactured and evaluated in the same manner as in Example 1 except that the charge injection layer was formed using the compound (43) instead of the compound (1). The results are shown in Table 1.
実施例6
化合物(1)の代わりに化合物(60)を用いて電荷注入層を成膜した他は実施例1と同様にして有機薄膜トランジスタを製造し、評価した。結果を表1に示す。Example 6
An organic thin film transistor was manufactured and evaluated in the same manner as in Example 1 except that the charge injection layer was formed using the compound (60) instead of the compound (1). The results are shown in Table 1.
実施例7
化合物(1)の代わりに化合物(70)を用いて電荷注入層を成膜した他は実施例1と同様にして有機薄膜トランジスタを製造し、評価した。結果を表1に示す。Example 7
An organic thin film transistor was manufactured and evaluated in the same manner as in Example 1 except that the charge injection layer was formed using the compound (70) instead of the compound (1). The results are shown in Table 1.
実施例8
化合物(1)の代わりに化合物(110)を用いて電荷注入層を成膜した他は実施例1と同様にして有機薄膜トランジスタを製造し、評価した。結果を表1に示す。Example 8
An organic thin film transistor was manufactured and evaluated in the same manner as in Example 1 except that the charge injection layer was formed using the compound (110) instead of the compound (1). The results are shown in Table 1.
実施例9
化合物(1)の代わりに化合物(171)を用いて電荷注入層を成膜した他は実施例1と同様にして有機薄膜トランジスタを製造し、評価した。結果を表1に示す。Example 9
An organic thin film transistor was manufactured and evaluated in the same manner as in Example 1 except that the charge injection layer was formed using the compound (171) instead of the compound (1). The results are shown in Table 1.
実施例10
1,4−ビス(4−メチルスチリル)ベンゼンの代わりにN,N’−ジオキシl−3,4,9,10−ペリレンジカルボキシイミド(PTCDI−C8)を用いて有機半導体層を成膜し、化合物(1)の代わりに化合物(65)を用いて電荷注入層を成膜し、Auの代わりにCaを0.05nm/sの蒸着速度で20nm真空蒸着し、その後Agを0.05nm/sの蒸着速度で50nm蒸着しCaを被覆してソース電極及びドレイン電極を成膜した他は実施例1と同様にして有機薄膜トランジスタを製造した。
得られた有機薄膜トランジスタのゲート電極に0〜+100Vのゲート電圧を印加してn型駆動させた他は実施例1と同様にして評価した。結果を表1に示す。Example 10
An organic semiconductor layer was formed using N, N′-dioxyl-3,4,9,10-perylenedicarboximide (PTCDI-C8) instead of 1,4-bis (4-methylstyryl) benzene. Then, a compound (65) is used instead of the compound (1) to form a charge injection layer, and instead of Au, Ca is vacuum-deposited at a deposition rate of 0.05 nm / s to 20 nm, and then Ag is 0.05 nm / An organic thin film transistor was manufactured in the same manner as in Example 1 except that the source electrode and the drain electrode were formed by depositing 50 nm at a deposition rate of s and covering Ca.
Evaluation was performed in the same manner as in Example 1 except that a gate voltage of 0 to +100 V was applied to the gate electrode of the obtained organic thin film transistor to drive n-type. The results are shown in Table 1.
実施例11
MoO3を0.05nm/sの蒸着速度で10nm真空蒸着してAuからなるソース電極及びドレイン電極と化合物(60)からなる電荷注入層の間にバッファ層として挿入した他は実施例6と同様にして有機薄膜トランジスタを製造し、評価した。結果を表1に示す。Example 11
Except that MoO 3 was vacuum-deposited by 10 nm at a deposition rate of 0.05 nm / s and inserted as a buffer layer between the source and drain electrodes made of Au and the charge injection layer made of the compound (60), the same as in Example 6. Thus, an organic thin film transistor was manufactured and evaluated. The results are shown in Table 1.
実施例12
化合物(65)の代わりに化合物(163)を用いて電荷注入層を成膜した他は実施例10と同様にして有機薄膜トランジスタを製造し、評価した。結果を表1に示す。Example 12
An organic thin film transistor was manufactured and evaluated in the same manner as in Example 10 except that the charge injection layer was formed using the compound (163) instead of the compound (65). The results are shown in Table 1.
実施例13
化合物(1)を蒸着する代わりに化合物(174)をトルエンに0.5質量%溶解させ、当該溶液を用いてスピンコート法により成膜し、窒素雰囲気下80℃にて乾燥させることにより電荷注入層を成膜した他は実施例1と同様にして有機薄膜トランジスタを製造し、評価した。結果を表1に示す。Example 13
Instead of depositing the compound (1), 0.5% by mass of the compound (174) is dissolved in toluene, and the solution is used to form a film by a spin coating method, followed by drying at 80 ° C. in a nitrogen atmosphere, thereby injecting charges. An organic thin film transistor was manufactured and evaluated in the same manner as in Example 1 except that the layer was formed. The results are shown in Table 1.
実施例14
実施例1の有機薄膜トランジスタ製造工程において、化合物(1)を用いた電荷注入層を成膜する際、金属マスクを通さず化合物(1)を0.05nm/sの蒸着速度で、10nm膜厚の電荷注入層を成膜し、図7に示すトランジスタを製造した。この素子の評価結果を表1に示す。Example 14
In the organic thin film transistor manufacturing process of Example 1, when the charge injection layer using the compound (1) was formed, the compound (1) was deposited at a deposition rate of 0.05 nm / s with a thickness of 10 nm without passing through the metal mask. A charge injection layer was formed to manufacture the transistor shown in FIG. The evaluation results of this element are shown in Table 1.
比較例1
電荷注入層を成膜しなかった他は実施例1と同様にして有機薄膜トランジスタを製造し、評価した。結果を表1に示す。
また、得られた有機薄膜トランジスタの出力曲線を図9に示す。図9から、ドレイン電圧が0V近傍領域(丸で囲われた部分)では、出力曲線が折れ曲がり直線から外れ、接触抵抗が大きく、式(1)の特性から逸脱していることがわかった。Comparative Example 1
An organic thin film transistor was manufactured and evaluated in the same manner as in Example 1 except that the charge injection layer was not formed. The results are shown in Table 1.
Moreover, the output curve of the obtained organic thin-film transistor is shown in FIG. From FIG. 9, it was found that in the region where the drain voltage is near 0V (the part surrounded by a circle), the output curve is bent and deviates from the straight line, the contact resistance is large and deviates from the characteristic of the equation (1).
比較例2
電荷注入層を成膜しなかった他は実施例10と同様にして有機薄膜トランジスタを製造し、評価した。結果を表1に示す。Comparative Example 2
An organic thin film transistor was manufactured and evaluated in the same manner as in Example 10 except that the charge injection layer was not formed. The results are shown in Table 1.
実施例15(有機薄膜発光トランジスタの製造)
Si基板(P型比抵抗1Ωcmゲート電極兼用)を熱酸化法にて表面を酸化させ、基板上300nmの熱酸化膜を作製して絶縁体層とした。さらに基板の一方に成膜したSiO2膜をドライエッチングにて完全に除去した後、スパッタ法にてクロムを20nmの膜厚で成膜し、さらにその上に金(Au)を100nmスパッタにて成膜し、取り出し電極とした。
この基板を、中性洗剤,純水,アセトン及びエタノールで各30分超音波洗浄した。Example 15 (Production of Organic Thin Film Light-Emitting Transistor)
The surface of a Si substrate (also used as a P-type specific resistance 1 Ωcm gate electrode) was oxidized by a thermal oxidation method to produce a 300 nm thermal oxide film on the substrate to form an insulator layer. Further, after the SiO 2 film formed on one side of the substrate is completely removed by dry etching, chromium is deposited to a thickness of 20 nm by sputtering, and further gold (Au) is sputtered by 100 nm by sputtering. A film was formed and used as an extraction electrode.
This substrate was ultrasonically cleaned with a neutral detergent, pure water, acetone and ethanol for 30 minutes each.
次に、真空蒸着装置(ULVAC社製,EX−900)に設置し、絶縁体層(SiO2)上に4MSBを0.05nm/sの蒸着速度で100nm膜厚の有機半導体発光層として成膜した。次いで、チャンネル長75μm,チャネル幅5mmの金属マスクを設置し,化合物(180)を電荷注入層として蒸着速度0.05nm/sで10nm成膜した。次に基板を蒸発源に対して45度傾けた状態でマスクを通して金を50nmの膜厚で成膜した。次に基板を逆方向に45度傾けた状態でMgを100nm蒸着することにより、互いに接しないソース電極及びドレイン電極が実質的に正孔注入性電極(Au)と電子輸送性電極(Mg)を備えた有機薄膜発光トランジスタを作製した。
製造した有機薄膜発光トランジスタのソース−ドレイン電極間に−100Vを印加し、ゲート電極に−100V印加すると、50cd/m2の青色発光が得られた。Next, it is installed in a vacuum deposition apparatus (ULVAC, EX-900), and 4 MSB is deposited on the insulator layer (SiO 2 ) as a 100 nm thick organic semiconductor light emitting layer at a deposition rate of 0.05 nm / s. did. Next, a metal mask having a channel length of 75 μm and a channel width of 5 mm was installed, and a compound (180) was deposited as a charge injection layer to a thickness of 10 nm at a deposition rate of 0.05 nm / s. Next, gold was deposited to a thickness of 50 nm through the mask in a state where the substrate was tilted 45 degrees with respect to the evaporation source. Next, by depositing Mg with a thickness of 100 nm in a state where the substrate is tilted 45 degrees in the opposite direction, the source electrode and the drain electrode which are not in contact with each other substantially form a hole injecting electrode (Au) and an electron transporting electrode (Mg). An organic thin film light emitting transistor provided was prepared.
When −100 V was applied between the source and drain electrodes of the manufactured organic thin film light-emitting transistor and −100 V was applied to the gate electrode, blue light emission of 50 cd / m 2 was obtained.
実施例16(トップコンタクト型有機薄膜トランジスタの製造)
図4に示す構造を有するトップコンタクト型有機薄膜トランジスタを下記のようにして製造した。
シャドウマスクを用い、スパッタリングによって、ガラス基板上に100nmのITO膜を作製しゲート電極とした。さらにその上にポリ(クロロ−p−キシレン)(パリレンC)を熱化学蒸着で500nmの厚さに成膜し、ゲート絶縁層とした。Example 16 (Production of top contact type organic thin film transistor)
A top contact type organic thin film transistor having the structure shown in FIG. 4 was manufactured as follows.
Using a shadow mask, an ITO film having a thickness of 100 nm was formed on a glass substrate by sputtering to form a gate electrode. Further, poly (chloro-p-xylene) (parylene C) was formed thereon to a thickness of 500 nm by thermal chemical vapor deposition to form a gate insulating layer.
次に、上記基板を真空蒸着装置(ULVAC社製,EX−400)に設置し、絶縁体層上に2,7−ジフェニル[1]ベンゾチエノ[3,3−b]−[1]−ベンゾチオフェン(DPh−BTBT)を室温下、0.05nm/sの蒸着速度で40nm膜厚の有機半導体層として成膜した。次いで、金属マスクを通して化合物(60)(2,6−ビス(2−フェニルエチニル)アントラセン;DPEA)を0.05nm/sの蒸着速度で、10nm膜厚の電荷注入層を成膜した。さらに金を50nmの膜厚で成膜することにより、互いに接しない電荷注入層並びにソース電極及びドレイン電極を、間隔(チャンネル長L)が50μmになるように形成した。そのときソース電極とドレイン電極の幅(チャンネル幅W)は1mmとなるように成膜して有機薄膜トランジスタを作製した(図4参照)。 Next, the substrate is placed in a vacuum deposition apparatus (ULVAC, EX-400), and 2,7-diphenyl [1] benzothieno [3,3-b]-[1] -benzothiophene is formed on the insulator layer. (DPh-BTBT) was deposited as an organic semiconductor layer having a thickness of 40 nm at a deposition rate of 0.05 nm / s at room temperature. Next, a charge injection layer having a thickness of 10 nm was formed from the compound (60) (2,6-bis (2-phenylethynyl) anthracene; DPEA) through a metal mask at a deposition rate of 0.05 nm / s. Further, by depositing gold with a film thickness of 50 nm, the charge injection layer and the source and drain electrodes which are not in contact with each other were formed so that the interval (channel length L) was 50 μm. At that time, an organic thin film transistor was manufactured by forming a film so that the width (channel width W) of the source electrode and the drain electrode was 1 mm (see FIG. 4).
得られたトップコンタクト型有機薄膜トランジスタについて、ゲート電極に0〜−25Vのゲート電圧を印加し、ソース−ドレイン間に−25Vの電圧を印加して電流を流した以外は、実施例1と同様にして正孔の電界効果移動度μs及び閾値電圧Vtを飽和領域特性に関する式(2)より算出した。結果を表2に示す。About the obtained top contact type organic thin film transistor, a gate voltage of 0 to −25 V was applied to the gate electrode, and a current was applied by applying a voltage of −25 V between the source and the drain. Then, the hole field-effect mobility μ s and the threshold voltage V t were calculated from the equation (2) regarding the saturation region characteristics. The results are shown in Table 2.
比較例3及び4
電荷注入層を、それぞれ表2に示す化合物に代えた以外は実施例16と同様にして有機薄膜トランジスタを作製し、電界効果移動度μs及び閾値電圧Vtを求めた。結果を表2に示す。Comparative Examples 3 and 4
An organic thin film transistor was fabricated in the same manner as in Example 16 except that the charge injection layer was replaced with the compound shown in Table 2, and the field effect mobility μ s and the threshold voltage V t were determined. The results are shown in Table 2.
表2の結果から、電荷注入層に化合物(60)(DPEA)を採用した実施例16の素子は、ペンタセン(比較例3)やMoO3(比較例4)の素子よりも優れた電界効果移動度と閾値電圧を示した。特に、一般的な有機半導体として用いられるペンタセンを電荷注入層に用いた場合に、良好な電界効果移動度と閾値電圧が得られていないことから、有機半導体層を構成する材料に求められる特性と電荷注入材層を構成する材料に求められる特性が異なるものであることがわかる。From the results of Table 2, the device of Example 16 employing the compound (60) (DPEA) in the charge injection layer is superior to the device of pentacene (Comparative Example 3) or MoO 3 (Comparative Example 4) in field effect migration. Degree and threshold voltage are shown. In particular, when pentacene used as a general organic semiconductor is used for the charge injection layer, good field-effect mobility and threshold voltage are not obtained. It can be seen that the characteristics required for the material constituting the charge injection material layer are different.
本発明の有機薄膜トランジスタは、電荷注入層として特定構造の化合物を用いることにより、応答速度(駆動速度)が高速化,オン/オフ比が大きく、駆動電圧が低くなるトランジスタとしての性能が高いものであり、発光可能な有機薄膜発光トランジスタとしても利用できる。
また、本発明の有機薄膜トランジスタは、薄膜ディスプレイのための電子デバイスのような表示用電子機器、プラスチックICカードや情報タグのようなウエアラブル電子機器、バイオセンサーのような医療機器や測定装置に用いることができる。The organic thin film transistor of the present invention has a high performance as a transistor in which a response speed (driving speed) is increased, an on / off ratio is large, and a driving voltage is lowered by using a compound having a specific structure as a charge injection layer. Yes, it can also be used as an organic thin film light emitting transistor capable of emitting light.
The organic thin film transistor of the present invention is used for display electronic devices such as electronic devices for thin film displays, wearable electronic devices such as plastic IC cards and information tags, medical devices such as biosensors, and measuring devices. Can do.
上記に本発明の実施形態及び/又は実施例を幾つか詳細に説明したが、当業者は、本発明の新規な教示及び効果から実質的に離れることなく、これら例示である実施形態及び/又は実施例に多くの変更を加えることが容易である。従って、これらの多くの変更は本発明の範囲に含まれる。
この明細書に記載の文献の内容を全てここに援用する。Although several embodiments and / or examples of the present invention have been described in detail above, those skilled in the art will appreciate that these exemplary embodiments and / or embodiments are substantially without departing from the novel teachings and advantages of the present invention. It is easy to make many changes to the embodiment. Accordingly, many of these modifications are within the scope of the present invention.
The entire contents of the documents described in this specification are incorporated herein by reference.
Claims (18)
前記有機半導体層及びソース電極間並びに前記有機半導体層及びドレイン電極間にそれぞれ電荷注入層を有し、
前記電荷注入層が下記式(1)で表される化合物を含み、前記電荷注入層と前記有機半導体層が、異なる材料から構成される有機薄膜トランジスタ。
Ar2は、置換基を有してもよい炭素数6〜60の2価の芳香族炭化水素基、又は置換基を有してもよい炭素数2〜60の2価の芳香族複素環基である。
Ar3は、下記式(3)で表される置換基である。
nは、1〜20の整数である。)
A charge injection layer between the organic semiconductor layer and the source electrode and between the organic semiconductor layer and the drain electrode,
Look containing a compound wherein the charge injection layer is represented by the following formula (1), wherein the organic semiconductor layer and the charge injection layer, an organic thin film transistor comprised of different materials.
Ar 2 is a divalent aromatic hydrocarbon group having 6 to 60 carbon atoms which may have a substituent, or a divalent aromatic heterocyclic group having 2 to 60 carbon atoms which may have a substituent. It is.
Ar 3 is a substituent represented by the following formula (3).
n is an integer of 1-20. )
R11〜R14は、それぞれ水素原子、ハロゲン原子、炭素数1〜30のアルキル基、炭素数1〜30のハロアルキル基、炭素数1〜30のアルコキシ基、炭素数1〜30のハロアルコキシ基、炭素数1〜30のアルキルチオ基、炭素数1〜30のハロアルキルチオ基、炭素数1〜30のアルキルアミノ基、炭素数2〜30のジアルキルアミノ基(2つのアルキル基は互いに結合して窒素原子を含む環構造を形成してもよい)、炭素数1〜30のアルキルスルホニル基、炭素数1〜30のハロアルキルスルホニル基、炭素数6〜60の芳香族炭化水素基、炭素数1〜60の芳香族複素環基、炭素数3〜30のアルキルシリル基又はシアノ基であり、これらの基は置換基をさらに有していてもよい。
R11及びR12並びにR13及びR14は、それぞれ互いに結合して、飽和又は不飽和の環状構造を形成してもよい。) The organic thin film transistor according to claim 1, wherein the compound represented by the formula (1) is a compound represented by the following formula (4).
R 11 to R 14 are each a hydrogen atom, a halogen atom, an alkyl group having 1 to 30 carbon atoms, a haloalkyl group having 1 to 30 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, or a haloalkoxy group having 1 to 30 carbon atoms. , An alkylthio group having 1 to 30 carbon atoms, a haloalkylthio group having 1 to 30 carbon atoms, an alkylamino group having 1 to 30 carbon atoms, and a dialkylamino group having 2 to 30 carbon atoms (two alkyl groups are bonded to each other to form nitrogen A ring structure containing an atom), an alkylsulfonyl group having 1 to 30 carbon atoms, a haloalkylsulfonyl group having 1 to 30 carbon atoms, an aromatic hydrocarbon group having 6 to 60 carbon atoms, and 1 to 60 carbon atoms. An aromatic heterocyclic group, an alkylsilyl group having 3 to 30 carbon atoms, or a cyano group, and these groups may further have a substituent.
R 11 and R 12 and R 13 and R 14 may be bonded to each other to form a saturated or unsaturated cyclic structure. )
R15〜R22は、それぞれ水素原子、炭素数1〜30のアルキル基、炭素数1〜30のハロアルキル基、炭素数1〜30のアルコキシ基、炭素数1〜30のハロアルコキシ基、炭素数1〜30のアルキルチオ基、炭素数1〜30のハロアルキルチオ基、炭素数1〜30のアルキルアミノ基、炭素数2〜30のジアルキルアミノ基(2つのアルキル基は互いに結合して窒素原子を含む環構造を形成してもよい)、炭素数1〜30のアルキルスルホニル基、炭素数1〜30のハロアルキルスルホニル基、炭素数6〜60の芳香族炭化水素基、炭素数1〜60の芳香族複素環基、炭素数3〜30のアルキルシリル基又はシアノ基であり、これらの基は置換基をさらに有していてもよい。) The organic thin film transistor according to claim 1, wherein the compound represented by the formula (1) is a compound represented by the following formula (5).
R 15 to R 22 are each a hydrogen atom, an alkyl group having 1 to 30 carbon atoms, a haloalkyl group having 1 to 30 carbon atoms, an alkoxy group having 1 to 30 carbon atoms, a haloalkoxy group having 1 to 30 carbon atoms, and a carbon number. An alkylthio group having 1 to 30 carbon atoms, a haloalkylthio group having 1 to 30 carbon atoms, an alkylamino group having 1 to 30 carbon atoms, and a dialkylamino group having 2 to 30 carbon atoms (the two alkyl groups are bonded to each other to contain a nitrogen atom) A ring structure may be formed), a C1-C30 alkylsulfonyl group, a C1-C30 haloalkylsulfonyl group, a C6-C60 aromatic hydrocarbon group, a C1-C60 aromatic It is a heterocyclic group, a C3-C30 alkylsilyl group, or a cyano group, and these groups may further have a substituent. )
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011532905A JP5677306B2 (en) | 2009-09-25 | 2010-09-21 | Organic thin film transistor |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009221229 | 2009-09-25 | ||
JP2009221229 | 2009-09-25 | ||
PCT/JP2010/005706 WO2011036866A1 (en) | 2009-09-25 | 2010-09-21 | Organic thin-film transistor |
JP2011532905A JP5677306B2 (en) | 2009-09-25 | 2010-09-21 | Organic thin film transistor |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014264865A Division JP2015109455A (en) | 2009-09-25 | 2014-12-26 | Organic thin film transistor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2011036866A1 JPWO2011036866A1 (en) | 2013-02-14 |
JP5677306B2 true JP5677306B2 (en) | 2015-02-25 |
Family
ID=43795634
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011532905A Expired - Fee Related JP5677306B2 (en) | 2009-09-25 | 2010-09-21 | Organic thin film transistor |
JP2014264865A Pending JP2015109455A (en) | 2009-09-25 | 2014-12-26 | Organic thin film transistor |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014264865A Pending JP2015109455A (en) | 2009-09-25 | 2014-12-26 | Organic thin film transistor |
Country Status (3)
Country | Link |
---|---|
JP (2) | JP5677306B2 (en) |
TW (1) | TW201116504A (en) |
WO (1) | WO2011036866A1 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5811640B2 (en) * | 2011-07-04 | 2015-11-11 | ソニー株式会社 | Electronic device and semiconductor device manufacturing method |
CN111128707B (en) * | 2014-08-26 | 2023-06-16 | 株式会社尼康 | Method for manufacturing element and transfer substrate |
KR20170101302A (en) * | 2015-02-04 | 2017-09-05 | 바스프 에스이 | An organic field effect transistor having a low contact resistance |
WO2017159657A1 (en) * | 2016-03-18 | 2017-09-21 | Dic株式会社 | Novel compound and semiconductor material containing same |
JP6897083B2 (en) * | 2016-12-19 | 2021-06-30 | Dic株式会社 | Organic compounds and semiconductor materials containing them |
JP2018177639A (en) * | 2017-04-03 | 2018-11-15 | Dic株式会社 | Novel compound and semiconductor material containing the same |
DE102019200810B4 (en) * | 2019-01-23 | 2023-12-07 | Technische Universität Dresden | ORGANIC THIN FILM TRANSISTOR AND METHOD FOR PRODUCING THE SAME |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10125924A (en) * | 1996-10-17 | 1998-05-15 | Matsushita Electric Ind Co Ltd | Org. thin film transistor, liq. crystal element and org. light emitting element |
WO2007145293A1 (en) * | 2006-06-16 | 2007-12-21 | Asahi Glass Company, Limited | Novel fluorine-containing aromatic compounds, organic semiconductor materials, and organic this film devices |
WO2008044695A1 (en) * | 2006-10-12 | 2008-04-17 | Idemitsu Kosan Co., Ltd. | Organic thin film transistor device and organic thin film light-emitting transistor |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000150168A (en) * | 1998-11-13 | 2000-05-30 | Toppan Printing Co Ltd | Heat resistance and low resistance hole carrier material and organic thin film electroluminescent element |
JP2005135600A (en) * | 2003-10-28 | 2005-05-26 | Idemitsu Kosan Co Ltd | Organic electroluminescent element |
JP2005327797A (en) * | 2004-05-12 | 2005-11-24 | Matsushita Electric Ind Co Ltd | Organic field effect transistor and its fabrication process |
KR100647683B1 (en) * | 2005-03-08 | 2006-11-23 | 삼성에스디아이 주식회사 | Organic thin film transistor and flat display apparatus comprising the same |
JP5121162B2 (en) * | 2005-04-22 | 2013-01-16 | 株式会社半導体エネルギー研究所 | Semiconductor element, light emitting device, and electrical apparatus |
KR101182263B1 (en) * | 2005-04-22 | 2012-09-17 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | Electrode for organic transistor, organic transistor, and semiconductor device |
JP2009206108A (en) * | 2006-06-16 | 2009-09-10 | Asahi Glass Co Ltd | Organic semiconductor material and organic thin-film device |
JP5258312B2 (en) * | 2008-01-31 | 2013-08-07 | 株式会社東芝 | Semiconductor device |
-
2010
- 2010-09-21 WO PCT/JP2010/005706 patent/WO2011036866A1/en active Application Filing
- 2010-09-21 JP JP2011532905A patent/JP5677306B2/en not_active Expired - Fee Related
- 2010-09-23 TW TW099132207A patent/TW201116504A/en unknown
-
2014
- 2014-12-26 JP JP2014264865A patent/JP2015109455A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10125924A (en) * | 1996-10-17 | 1998-05-15 | Matsushita Electric Ind Co Ltd | Org. thin film transistor, liq. crystal element and org. light emitting element |
WO2007145293A1 (en) * | 2006-06-16 | 2007-12-21 | Asahi Glass Company, Limited | Novel fluorine-containing aromatic compounds, organic semiconductor materials, and organic this film devices |
WO2008044695A1 (en) * | 2006-10-12 | 2008-04-17 | Idemitsu Kosan Co., Ltd. | Organic thin film transistor device and organic thin film light-emitting transistor |
Also Published As
Publication number | Publication date |
---|---|
TW201116504A (en) | 2011-05-16 |
JPWO2011036866A1 (en) | 2013-02-14 |
WO2011036866A1 (en) | 2011-03-31 |
JP2015109455A (en) | 2015-06-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5368797B2 (en) | Organic thin film transistor device and organic thin film light emitting transistor | |
JP5337490B2 (en) | Organic thin film transistor and organic thin film light emitting transistor | |
JP5666474B2 (en) | Polycyclic fused ring compound and organic thin film transistor using the same | |
JP5490005B2 (en) | Compound for organic thin film transistor and organic thin film transistor using the same | |
JP5299807B2 (en) | Benzodithiophene derivative, organic thin film transistor and organic thin film light emitting transistor using the same | |
US8207525B2 (en) | Organic thin film transistor and organic thin film light emitting transistor | |
JPWO2007094361A1 (en) | Organic thin film transistor and organic thin film light emitting transistor | |
US20100243993A1 (en) | Organic thin film transistor and organic thin film light-emitting transistor | |
JP5460599B2 (en) | Compound for organic thin film transistor and organic thin film transistor using the same | |
WO2011074231A1 (en) | Polycyclic ring-fused compound and organic thin film transistor utilizing same | |
JP2015109455A (en) | Organic thin film transistor | |
US8203139B2 (en) | Organic thin film transistor and organic thin film light-emitting transistor using an organic semiconductor layer having an aromatic hydrocarbon group or an aromatic heterocyclic group in the center thereof | |
JP5452476B2 (en) | COMPOUND FOR ORGANIC THIN FILM TRANSISTOR AND ORGANIC THIN FILM TRANSISTOR | |
JP5308164B2 (en) | Organic thin film transistor and organic thin film light emitting transistor | |
JP5329404B2 (en) | Organic thin film transistor and organic thin film light emitting transistor | |
JP5528330B2 (en) | Compound for organic thin film transistor and organic thin film transistor using the same | |
JP2008147587A (en) | Organic thin-film transistor and organic thin-film light-emitting transistor | |
JP2010275239A (en) | New condensed aromatic ring compound and organic thin film transistor using the same | |
JP5308162B2 (en) | Organic thin film transistor and organic thin film light emitting transistor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20130425 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20140415 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140613 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20141202 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20141226 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5677306 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |