JP5658419B2 - Refrigerator, cooling trap - Google Patents

Description

  The present invention relates to a refrigerator and a cooling trap using the refrigerator, for example, a heat storage type refrigerator having a cylinder structure and a cooling trap using the refrigerator.

  The cooling trap is a vacuum exhaust device effective for exhausting the inside of the vacuum vessel, in particular, exhausting moisture, and includes a refrigerator that cools a cooling panel installed in the vacuum vessel. Conventionally, GM (Gifford-McMahon) type refrigerators are generally used as refrigerators for cooling traps (for example, Patent Documents 1 and 2).

Japanese Patent Laid-Open No. 10-184541 JP 2009-19500 A

  Due to demands for reducing the footprint of vacuum equipment, miniaturization of refrigerators is desired. However, since the GM refrigerator is configured to supply refrigerant gas compressed by a compressor, there is a problem that downsizing is difficult.

  Therefore, it is conceivable to reduce the size by using a regenerative refrigerator having a cylinder structure such as a free piston type Stirling refrigerator as a cooling trap refrigerator. This is because a refrigerator having such a structure can be used as a refrigerator for a cooling trap in terms of refrigeration capacity and size.

  For example, a free piston type Stirling refrigerator (hereinafter referred to as a Stirling refrigerator) is provided with a cooling stage at the tip of a thin cylindrical cylinder in which a piston reciprocates. A cooling panel is attached to the cooling stage via a heat transfer member. When a Stirling refrigerator is used as a refrigerator for a cooling trap, the heat transfer member connected to the cooling panel is connected to the tip of a thin cylindrical cylinder in a cantilever structure. Therefore, it is considered that the following problems occur when the Stirling refrigerator is used as a refrigerator for a cooling trap.

  That is, when the cylindrical cylinder of the Stirling refrigerator is bent by the force applied from the object to be cooled (cooling panel, heat transfer member) supported by the cooling stage, the piston that reciprocates in the axial direction inside the cylinder has an appropriate clearance. It is considered that inconveniences such as being unable to be secured or coming into contact with a structure or an inner wall in the cylindrical cylinder are caused. In this case, problems such as a decrease in refrigeration capacity, an increase in vibration, and abnormal noise may occur, and the performance of the cooling trap may decrease.

  As a countermeasure, it is conceivable to increase the strength by increasing the thickness of the cylindrical cylinder of the Stirling refrigerator, thereby eliminating the deflection due to the force applied from the object to be cooled. However, the heat transfer effect from the thick cylindrical cylinder increases the amount of heat flowing into the cooling stage. As a result, the capacity of the refrigerator is lowered, and the performance of the cooling trap may be lowered.

  From the above, in order to use a Stirling refrigerator as a refrigerator for a cooling trap, a structure in which no force is applied to the cylinder cylinder of the refrigerator, or a structure in which the cylinder cylinder does not bend even when force is applied, and these It is necessary to configure so that the assembly and adjustment can be performed within the required accuracy.

  The present invention has been made in view of the above problems, and an object thereof is to provide a cooling trap using a refrigerator having a cylinder structure such as a Stirling refrigerator. Alternatively, the present invention is a refrigerator having a cylinder structure that has a sufficient cooling capacity and uses a thin cylinder but the cylinder does not bend or the deflection of the cylinder is within an allowable range, or It aims at providing the cooling trap using this refrigerator.

  The refrigerator according to the present invention includes a housing portion, a cylinder portion having a portion supported by the housing portion and a cooling portion, and the end portion and the housing portion so as to support an end portion of the cylinder portion. And a support member disposed on the surface.

  The cooling trap of the present invention is characterized by comprising a trap section for capturing gas in a vacuum vessel and the refrigerator.

  The refrigerator may be a Stirling refrigerator, for example.

  According to the present invention, a cooling trap using a regenerative refrigerator having a cylinder structure such as a Stirling refrigerator can be provided. Alternatively, according to the present invention, it is possible to provide a cooling trap having a sufficient refrigeration capacity by using a thin cylindrical cylinder, but the cylindrical cylinder does not bend or the deflection of the cylindrical cylinder is within an allowable range. Can do.

  Other features and advantages of the present invention will become apparent from the following description with reference to the accompanying drawings. In the accompanying drawings, the same or similar components are denoted by the same reference numerals.

The accompanying drawings are included in the specification, constitute a part thereof, show an embodiment of the present invention, and are used to explain the principle of the present invention together with the description.
It is the schematic of a vacuum processing apparatus provided with the cooling trap which concerns on the 1st Embodiment of this invention. It is the schematic of the cooling trap which concerns on the 1st Embodiment of this invention. It is the schematic of the internal structure of the refrigerator which concerns on the 1st Embodiment of this invention. It is an enlarged view of the refrigerator upper part which concerns on the 1st Embodiment of this invention. It is the schematic which looked at the refrigerator concerning the 1st Embodiment of this invention from upper direction. It is the schematic which shows the mode of the supporting member attached to the refrigerator which concerns on the 2nd Embodiment of this invention. It is the schematic which shows the supporting member attached to the refrigerator which concerns on the 3rd Embodiment of this invention. It is the schematic which shows the supporting member attached to the refrigerator which concerns on the 3rd Embodiment of this invention.

  Embodiments of the present invention will be described with reference to the drawings. The members, arrangements, and the like described below are examples embodying the invention and do not limit the present invention, and it is needless to say that various modifications can be made in accordance with the spirit of the present invention. The configurations of the described embodiments can be applied in combination as appropriate. In the drawings described below, components having the same function are denoted by the same reference numerals, and repeated description thereof is omitted.

  In this embodiment, a free piston type Stirling refrigerator will be described as an example, but the present invention can be applied to a refrigerator having a cylinder. For example, the present invention can be suitably applied to a regenerative refrigerator such as a pulse tube refrigerator or a Stirling pulse tube refrigerator. In this specification, when it is described as a Stirling refrigerator without particular notice, it refers to all regenerative refrigerators having a cylinder structure.

  Similarly, in this specification, a heat transfer bar and a cooling panel supported by a cantilever structure will be described. However, in the present invention, a member to be cooled is supported by a cantilever structure on a cooling portion provided on the outer surface of the cylinder. Therefore, it can be suitably applied to a refrigerator and a cooling trap having a structure in which a force is applied to the cylinder. The cylinder part is a member in which a region where refrigerant gas expands is formed, and is not limited to a configuration in which a member such as a piston operates.

(First embodiment)
1 is a schematic diagram of a vacuum processing apparatus having a cooling trap according to a first embodiment of the present invention, FIG. 2 is a schematic diagram of a cooling trap, FIG. 3 is a schematic diagram of the internal structure of a refrigerator, and FIG. 4 is a refrigerator. FIG. 6 is an enlarged view of the upper part, and FIG. 5 is a schematic view of the refrigerator viewed from above. In order to prevent complication of the drawing, the illustration is omitted except for a part.

  A vacuum processing apparatus including a cooling trap will be described with reference to FIG. The vacuum processing apparatus 1 includes a cooling trap 10 and a turbo molecular pump (TMP) 7 as an evacuation apparatus 5 connected to the vacuum vessel 3. Inside the vacuum vessel 3, a predetermined vacuum process is performed on a material to be processed such as a substrate. The vacuum process can be, for example, a film formation process by sputtering or CVD, or an etching process, but is not limited thereto. Although the cooling trap 10 of this embodiment is attached between the vacuum vessel 3 and the TMP 7, a cooling trap may be attached inside the vacuum vessel 3.

  The cooling trap will be described with reference to FIG. The cooling trap 10 includes a refrigerator 14, a trap container 12, and a cooling panel 18 (trap unit). The trap container 12 is connected to the vacuum container 3, the TMP 7, and the refrigerator 14. The cooling panel 18 is connected to the refrigerator 14 via a heat transfer bar 27 and is disposed in the trap container 12. The cooling panel 18 captures gas from inside the vacuum vessel 3. The heat transfer bar 27 (heat transfer member) is arranged in a cantilever structure in which one end is connected to the cooling stage 23 (heat transfer block 25) of the refrigerator 14 and the other end is connected to the cooling panel 18.

  The trap container 12 is a container that separates the atmosphere from the vacuum, and is made of, for example, aluminum. The trap container 12 can accommodate the heat transfer block 25, the heat transfer bar 27, and the cooling panel 18 therein. Inside the trap container 12, the exhaust port of the vacuum container 3, the intake port of the TMP 7, and the cooling unit of the refrigerator 14 can be communicated with each other. In this embodiment, the refrigerator 14 attached to the trap container 12 is a free piston type Stirling refrigerator having the ability to cool a thin cylindrical cooling panel 18 to a cryogenic temperature at which moisture can be captured in a vacuum. The cooling unit can include, for example, a portion to be cooled on the tip side of the cylinder 21 and a cooling stage 23. The other end side of the cylinder 21 includes, for example, a portion on the cooling stage 23 side of the cylinder 21.

  Here, based on FIG. 3, the structure of the refrigerator of this embodiment is demonstrated. The refrigerator 14 includes a structure arranged in the upper casing 24 such as a support member 44 described later, but is omitted in FIG. 3 for simplification. In this embodiment, a free piston type Stirling refrigerator (hereinafter referred to as refrigerator 14) is used. The refrigerator 14 includes a housing 22 (housing portion) formed integrally with the cylinder 21 (cylinder portion) and an upper casing 24 connected to the housing 22.

  Further, inside the housing 22, a drive piston 31 driven by a linear motor 32, a free piston 35 that reciprocates mainly inside the cylinder 21, and a phase adjustment spring 36 that adjusts the phase of the movement of the free piston 35, have. The upper casing 24 has a structure that can be connected to the trap container 12 in an airtight manner. The refrigerator 14 of the present embodiment has a configuration that does not include the trap container 12, the heat transfer bar 27, and the cooling panel 18. The cooling trap 10 can be configured by attaching the heat transfer bar 27 and the cooling panel 18 to the refrigerator 14 with the upper casing 24 connected to the trap container 12. A method for assembling the cooling trap 10 will be described later.

  Further, the cylinder 21 is configured to be connected to the housing 22 at one end side and to be cooled at the other end side. That is, an expansion region in which the refrigerant gas expands is defined on the front end side (the other end side) inside the cylinder 21, and a compression region in which the refrigerant gas is compressed is defined in the space between the free piston 35 and the drive piston 31. A heat exchanger 37 is provided in the refrigerant gas flow path between the compression region and the expansion region. Since heat is radiated from the compressed refrigerant gas in the compression region, a heat radiation pair (not shown) as a heat radiating portion is provided at the lower end outside the cylinder 21 in contact with the compression region. In the expansion region, the expanded refrigerant gas absorbs heat, and a cooling stage 23 is provided here. For example, helium gas may be used as the refrigerant gas, but other gases may be used.

  As described above, the refrigerator 14 is configured such that the cooling stage 23 provided at the tip of the cylinder 21 is cooled. A free piston 35 is provided inside the cylinder 21 so as to be capable of reciprocating. The refrigerant gas is repeatedly compressed and expanded by the movement of the free piston 35 and the drive piston 31 in the cylinder 21, and the cooling stage 23 is cooled. The structure of the refrigerator described based on FIG. 3 is an example, and the present invention can be applied to, for example, general heat storage type refrigerators having a cylinder structure.

  Based on FIG.4, 5, the structure of the upper part of the refrigerator 14 is demonstrated. FIG. 5 is a schematic view seen from above with the lid 24a removed. A cooling panel 18 is attached to the cooling stage 23 via a heat transfer block 25 and a heat transfer bar 27, and the cooling panel 18 is cooled as the temperature of the cooling stage 23 decreases. The heat transfer block 25 can be, for example, a copper member arranged directly on the cooling stage 23. The heat transfer bar 27 may be, for example, a copper bar-like member connected to the heat transfer block 25 and the cooling panel 18.

  When the refrigerator is operated in a vacuum state and the cooling stage 23 at the upper part of the refrigerator 14 is cooled, cold heat is transferred from the cooling stage 23 to the circular heat transfer block 25, and the heat transfer bar 27 located above the heat transfer bar 27 is provided. To be cooled. Then, the cooling panel 18 connected to the heat transfer bar 27 is cooled. Moisture that jumps in from the inside of the vacuum vessel 3 or moisture that returns from the turbo molecular pump 7 side is captured on the surface of the cooled cooling panel 18. The cooling stage 23, the heat transfer block 25, the heat transfer bar 27, and the cooling panel 18 are each fixed with screws 47, and the contact surface of each component is an indium sheet (see FIG. (Not shown) can be inserted.

  At the center of the heat transfer block 25, a hole (through hole) 25a penetrating in the vertical direction is formed. A shaft-like extending member 41 made of stainless steel is press-fitted into the through hole 25a and fixed by caulking. The extending member 41 is selected from a material having low thermal conductivity. Here, it is preferable to chamfer the heat transfer block 25 so that the crimped portion does not protrude, or to provide a relief hole in the cooling stage 23. Thereby, the cooling stage 23 and the whole heat transfer block 25 can be stuck. The heat transfer bar 27 of this embodiment is attached to the heat transfer block 25 at a position where it does not interfere with the extending member 41. When the extending member 41 is attached to the cooling stage 23 (cylinder side) via the heat transfer block 25, the extending member 41 is fixed as a member extending in the axial direction of the cylinder 21.

  A support member 44 having a circular shape and an opening formed in the center portion is attached to the upper end side of the extending member 41. The support member 44 is made of a material having low thermal conductivity, and is made of stainless steel having a thickness of 0.1 to 0.5 mm in this embodiment. Two E-rings 49a are arranged in a portion (attachment portion 42) to which the support member 44 of the extension member 41 is attached, and the two E-rings 49a support the support member 44 so as to be sandwiched from above and below. . Washers 49b are respectively attached to the gaps between the support member 44 and the two E rings 49a. This is to prevent the opening of the support member 44 from entering the fixing groove of the E-ring 49 a formed in the mounting portion 42. Since the inner diameter of the opening formed at the center of the support member 44 is made the same as the outer diameter division method of the attachment portion 42 of the extension member 41, the support member 44 is attached to the attachment portion 42 of the extension member 41. It can be attached without gaps.

  The outer peripheral portion of the support member 44 is fixed to a fixing surface 45 provided on the upper casing 24 with a plurality of screws. The support member 44 is fixed to the upper casing 24 in a state in which the support member 44 is tightly stretched from the central opening to the outer periphery, and the support position of the extension member 41 is fixed by the tensile stress of the support member 44. ing. Since the extending member 41 is connected to the cylinder 21 via the heat transfer block 25 and the cooling stage 23, the position of the cylinder 21 is fixed by fixing the extending member 41 to the upper casing 24 by the support member 44. be able to. That is, the structure having the support member 44 and the extending member 41 can suppress the deflection of the cylinder 21 even if the heat transfer bar 27 and the cooling panel 18 are attached to the cooling stage 23 (heat transfer block 25). The state in which the support member 44 is tightly stretched is a state in which the support member 44 is stretched with a tension that can suppress at least the deflection of the extending member 41.

  The support member 44 is disposed between the end portion and the housing 22 so as to support the end portion (upper end portion) of the cylinder 21. In this example, the extending member 41 and the cooling block 25 are disposed between the end portion of the cylinder 21 and the support member 44, and the upper casing 24 is disposed between the extending member 41 and the housing 22. However, the end of the cylinder 21 and the support member 44 may be directly connected. The other part of the cylinder 21 is supported directly or indirectly by the housing 22. In other words, the end portion of the cylinder 21 having a portion supported by the housing 22 is supported by the housing 22 via the support member 44.

  The support member 44 is made of, for example, stainless steel having a thickness of 0.1 to 0.5 mm, and is connected to the distal end of the extending member 41, so that the thermal contact with the cooling stage 23 side of the cylinder 21 is small and heat insulation. Excellent in properties. Therefore, the influence on the refrigeration capacity of the refrigerator 14 can be minimized. Further, the support member 44 need not be circular as long as it is a member that connects the extending member 41 and the upper casing 24 side (housing side) so that the cylinder 21 does not bend. The mounting location of the outer peripheral portion of the support member 44 is not limited to the upper casing 24 and may be attached to a member (housing side) fixed to the housing 22.

  The structure in which the support member suppresses the deflection of the cylinder 21 will be further described. First, the deflection of the cylinder 21 occurs because the heat transfer bar 27 that transmits cold heat to the cooling panel 18 is attached to the cylinder 21 side in a cantilever structure. Specifically, this is a phenomenon in which the cylinder 21 bends toward the cooling panel 18 due to the weight of the cooling panel 18 attached to the tip of the heat transfer bar 27.

  The support member 44 is a member for preventing the deflection of the cylinder 18 and suppresses the deflection by pulling the cylinder 21 in the direction opposite to the direction in which the cooling panel 18 is provided. Therefore, the support member may be a strip shape, a wire shape, or an X shape described later as long as it can pull the tip side of the cylinder 21 in the direction opposite to the direction in which the cylinder 21 bends. For example, when a strip-shaped plate member is used, the extension member 41 may be connected to a screw located on the opposite side of the cooling surface 18 in the fixed surface 45.

  The attachment portion 42 of the support member 44 is not limited to the distal end of the extending member 41, but is desirably closer to the cooling stage 23 than the heat exchanger 37 of the cylinder 21. The attachment portion 42 of the support member 44 may be provided, for example, at the distal end portion of the cylinder 21. As the axial dimension of the extending member 41 is increased and the distance between the cooling stage 23 and the support member 44 is increased, the force for suppressing the deflection of the cylinder 21 can be increased. The support member 44 is inside the upper casing 24 of the refrigerator 14 and is arranged in a space (vacuum side) communicating with the inside of the vacuum vessel 3 when connected to the trap vessel 12.

  Therefore, it is preferable to provide a through hole in a part of the support member 44 so that the support member 44 does not hinder evacuation, and has an opening into which a tool can be inserted when the heat transfer block 25 described later is assembled. May be. An example of the shape of the opening will be described later with reference to FIG. The extending member 41 is provided substantially coaxially with the central axis (axial direction) of the cylinder 21, but may be provided at another position. For example, one end side of the extending member 41 may be directly attached to the cooling stage 23 or may be attached to the heat transfer bar 27. The shape of the extending member 41 does not have to be a rod shape, and may be a curved plate member.

  A method for assembling the cooling trap 10 will be described. First, the refrigerator 14 of the present embodiment includes the support member 44, the extending member 41, and the upper casing 24, but does not include the trap container 12, the heat transfer block 25, the heat transfer bar 27, and the cooling panel 18. It is a configuration. To assemble the cooling trap 10, first, the upper casing 24 of the refrigerator 14 is connected to the trap container 12, and the heat transfer block 25 and the heat transfer bar 27 are connected to the cooling stage 23 with the lid 24 a of the upper casing 24 opened. Attach to. The heat transfer bar 27 can be inserted into the trap container 12 from the upper (or lower) opening of the trap container 12, and one end side thereof can be moved to the attachment portion with the heat transfer block 25 in the upper casing 24.

  When the heat transfer block 25 and the heat transfer bar 27 are attached, the support member 44 may be temporarily removed. When an opening is formed in the support member 44, a tool such as a screwdriver or a wrench may be inserted through the opening and the heat transfer block 25 and the heat transfer bar 27 may be screwed to the cooling stage 23 side. After attaching the heat transfer bar 27, the cooling panel 18 is attached to the front end side of the heat transfer bar 27. The cooling panel 18 is inserted into the trap container 12 from the upper (or lower) opening of the trap container 12 and attached to the tip (other end) of the heat transfer bar 27.

  The effect of the refrigerator 14 or the cooling trap of this embodiment will be described. In the refrigerator 14 of the present embodiment, an extending member 41 fixed to the cooling stage 23 side (cooling unit side) of the cylinder 21 is fixed to the upper casing 24 side via a support member 44. Therefore, even if the heat transfer bar 27 and the cooling panel 18 are attached, the cylinder 21 is less likely to be deformed due to the force applied by the cantilever structure. And since the cooling panel 18 is a structure which does not contact other than the cooling stage 23 side member, it is not necessary to consider shrinkage | contraction of the heat-transfer bar 27 and the cooling panel 18 accompanying a temperature fall. That is, the deflection of the cylinder 21 can be suppressed while preventing the heat input to the cooling stage 23. And the cooling trap 10 provided with the advantage of the refrigerator 14 can be comprised. By providing the refrigerator of the present embodiment as a refrigerator for the cooling trap, a small cooling trap can be configured.

  Further, since the refrigerator 14 can handle the casing 22, the cylinder 21, the upper casing 24, the extending member 41, and the support member 44 as a unit, the extending member is attached when the heat transfer bar 27 and the cooling panel 18 are attached. There is no need to remove 41. Furthermore, when the support member 44 is provided with an opening through which a tool is passed, it is not necessary to remove the extending member 41 and the support member 44 when the heat transfer bar 27 and the cooling panel 18 are attached. Therefore, work such as positioning and adjustment when the cooling trap 10 is assembled becomes unnecessary.

(Second Embodiment)
A second embodiment of the present invention will be described based on FIG. The same components as those of the first embodiment are denoted by the same reference numerals, and description thereof is omitted. The main difference between this embodiment and the first embodiment described above is the configuration of the support member. Specifically, in the support member 44 of the first embodiment, a circular thin plate member is attached between the extending member 41 and the fixed surface 45 in a planar state. On the other hand, in the support member 54 of the present embodiment, the support member 54 is attached in a conical shape when attached between the extending member 41 and the fixed surface 45.

  The support member 54 is attached so as to be convex (convex shape) toward the cooling stage 23. Even if the cylinder 21 or the extending member 41 contracts due to cold heat when the cooling trap is used, the pulling force for fixing the extending member 41 in the support member 54 does not decrease. On the contrary, the pulling force of the support member 54 increases due to the contraction of the constituent members due to the cold. According to the configuration of the present embodiment, since the fixing force of the extending member 41 by the support member 54 can be increased by utilizing the contraction of the member due to cold heat, a more reliable refrigerator can be configured. . Needless to say, this embodiment can also be applied to support members 64 and 65 described later.

(Third embodiment)
A third embodiment of the present invention will be described based on FIGS. 7A and 7B. 7A and 7B are cross-sectional views corresponding to the AA cross-sectional view of FIG. 2 of the first embodiment. The same components as those of the first embodiment are denoted by the same reference numerals, and description thereof is omitted. The main difference between this embodiment and the first embodiment described above is the configuration of the support member. Specifically, the support member 44 of the first embodiment is a circular thin plate member, but the support members 64 and 65 of the present embodiment are trifurcated (see FIG. 7A) or X-shaped (see FIG. 7B). ). By making the support member trident or X-shaped, it is possible to access the heat transfer bar 27 even when the support members 64 and 65 are attached. Specifically, by removing the lid 24a of the upper casing 24, the screw fixing the heat transfer bar 27 and the like can be operated using a screwdriver or the like from the gap of the support member.

(Other embodiments)
Another embodiment will be described. In each embodiment mentioned above, in order to suppress the influence on the refrigerating capacity of refrigerator 14 as much as possible, support member 44 (54, 64, 65) is attached to extension member 41. However, when the refrigerating machine 14 has a high refrigerating capacity or a relatively low refrigerating capacity, the extension member 41 may be omitted and the support member 44 (54, 64, 65) may be attached to the cooling stage 23. Good. In this case, the outer peripheral portion of the support member 44 (54, 64, 65) is preferably fixed to the upper casing 24 on the lower side (cylinder 21 side) of the heat transfer bar 27.

  In the refrigerator 14 of each embodiment described above, the upper casing 24 is configured as a separate member from the trap container 12. However, a refrigerator having a configuration not including the upper casing 24 may be used, and a portion having the role of the upper casing may be configured in the trap container.

  In the refrigerator that does not include the upper casing 24, after the refrigerator is attached to the trap container, the heat transfer block 25 in which the extending member 41 is fixed by caulking is attached, and the upper cover of the trap container is opened. The heat transfer bar 27 is attached. Next, the support member 44 (54, 64, 65) is attached, and the outer peripheral part of the support member 44 (54, 64, 65) is fixed. Since the heat transfer bar 27 and the heat transfer block 25 are not removed from the cylinder 21 of the refrigerator when the cooling panel 18 is attached, operations such as positioning and adjustment during assembly are not required.

  The present invention is not limited to the above-described embodiment, and various changes and modifications can be made without departing from the spirit and scope of the present invention. Therefore, in order to make the scope of the present invention public, the following claims are attached.

  This application claims priority based on Japanese Patent Application No. 2012-64677 filed on Mar. 22, 2012, the entire contents of which are incorporated herein by reference.

DESCRIPTION OF SYMBOLS 1 Vacuum processing apparatus 3 Vacuum container 5 Vacuum exhaust apparatus 7 Turbo molecular pump (TMP)
DESCRIPTION OF SYMBOLS 10 Cooling trap 12 Trap container 14, 15 Refrigerator 18 Cooling panel 21 Cylinder 22 Case 23 Cooling stage 24 Upper casing 24a Lid 25 Heat transfer block 25a Through hole 27 Heat transfer bar 31 Drive piston 32 Linear motor 35 Free piston 36 Phase adjustment Spring 37 Heat exchanger 41 Extension member 42 Mounting portion 44, 54, 64, 65 Support member 44a Opening 45 Fixing surface 47 Screw

Claims (3)

A housing part;
A cylinder part having one end connected to the housing part and a cooling part provided at the other end for transmitting cold heat to the object to be cooled;
One end connected to the cooling part, and an extending member extending in the axial direction of the cylinder part,
An upper casing disposed so as to surround the extending member and connected to the casing;
A refrigerator comprising: a support member that connects the other end of the extension member and the upper casing so as to support the extension member.   The support member is provided so that a tensile force between the housing portion and the other end side of the extension member is increased when the extension member contracts due to cooling of the cooling unit. The refrigerator according to claim 1. A trap section for trapping gas in a vacuum vessel;
A refrigerator for cooling the trap part;
A cooling trap comprising: a heat transfer member connected at one end to the cooling unit of the refrigerator and connected at the other end to the trap unit;
The cooling trap according to claim 1 or 2, wherein the refrigerator is the refrigerator according to claim 1 or 2.

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