JP5639846B2 - 3-axis magnetic sensor - Google Patents

3-axis magnetic sensor Download PDF

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JP5639846B2
JP5639846B2 JP2010238543A JP2010238543A JP5639846B2 JP 5639846 B2 JP5639846 B2 JP 5639846B2 JP 2010238543 A JP2010238543 A JP 2010238543A JP 2010238543 A JP2010238543 A JP 2010238543A JP 5639846 B2 JP5639846 B2 JP 5639846B2
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JP2012093114A (en
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長幸 小野
長幸 小野
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Tokin Corp
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本発明は、互いに直交するX軸方位、Y軸方位、Z軸方位の磁界の強さを検出するための3軸磁気センサに関するものであり、特に地磁気の検出等に好適な3軸磁気センサに関するものである。   The present invention relates to a three-axis magnetic sensor for detecting magnetic field strengths in an X-axis direction, a Y-axis direction, and a Z-axis direction that are orthogonal to each other, and more particularly to a three-axis magnetic sensor suitable for detecting geomagnetism. Is.

従来、互いに直交するX軸、Y軸、Z軸の3軸方位の磁界成分を検出する3軸磁気センサは、3軸方位に対応する3つの磁気センサ素子(以下、「センサ素子」と称す。)を組み合わせて構成されている。各々のセンサ素子の検出軸間の直交度を調整するために、ヘルムホルツコイル等で作る均一磁界空間内に3軸磁気センサを設置し、各軸の磁気センサの出力電圧を検出しながら各軸それぞれのセンサ素子の固定位置を、ねじ等を用いて機械的に微調整して直交度調整を行っている。   Conventionally, a three-axis magnetic sensor that detects magnetic field components in three axes of the X, Y, and Z axes orthogonal to each other is referred to as three magnetic sensor elements corresponding to the three axes (hereinafter referred to as “sensor elements”). ). In order to adjust the orthogonality between the detection axes of each sensor element, a 3-axis magnetic sensor is installed in a uniform magnetic field created by Helmholtz coils, etc., and each axis is detected while detecting the output voltage of the magnetic sensor of each axis. The fixing position of the sensor element is mechanically finely adjusted using screws or the like to adjust the orthogonality.

図3は従来の3軸磁気センサの製品の概略斜視図であり、X軸方位センサ素子11、Y軸方位センサ素子12、Z軸方位センサ素子13をそれぞれの検出軸が直交するように調整し、固定用ブロック14に取付用ねじ15で固定している。ここで、X軸方位センサ素子11、Y軸方位センサ素子12、Z軸方位センサ素子13を固定用ブロック14に取り付ける際には、それぞれのセンサ素子の寸法上の中心(以下、「センサ素子の中心」と称す。)をそれぞれ3方位の固定用ブロック14の取付け面の寸法上の中心軸16a(以下、「中心軸16a」と称す。)上にくる様に配置する必要がある。そして、それぞれのセンサ素子を調整のために動かした時もセンサ素子の中心が出来るだけ中心軸16aからずれることなく直交度調整を行うことが調整工数を削減する上で重要である。   FIG. 3 is a schematic perspective view of a conventional three-axis magnetic sensor product. The X-axis azimuth sensor element 11, the Y-axis azimuth sensor element 12, and the Z-axis azimuth sensor element 13 are adjusted so that their detection axes are orthogonal to each other. The fixing block 14 is fixed with mounting screws 15. Here, when the X-axis azimuth sensor element 11, the Y-axis azimuth sensor element 12, and the Z-axis azimuth sensor element 13 are attached to the fixing block 14, the dimensional center of each sensor element (hereinafter referred to as “sensor element of the sensor element”). (Referred to as “center”) must be arranged so as to be on the center axis 16a (hereinafter referred to as “center axis 16a”) on the dimension of the mounting surface of the fixing block 14 in three directions. And, when each sensor element is moved for adjustment, it is important to adjust the orthogonality without shifting the center of the sensor element from the center axis 16a as much as possible in order to reduce the adjustment man-hours.

また、図4は従来の3軸磁気センサにおける、X軸方位センサ素子11と固定用ブロック14のねじ止めの前の状態を示した概略斜視図である。各センサ素子の直交度調整においては、固定用ブロック14に取り付けるX軸方位センサ素子11の取付用穴17は取付用ねじ15の大きさよりも大きめに加工してあり、その遊びの範囲でX軸方位センサ素子11を回動して微調整し、取付用ねじ15で固定する手法をとっていた。   FIG. 4 is a schematic perspective view showing a state of the conventional triaxial magnetic sensor before screwing the X axis direction sensor element 11 and the fixing block 14. In adjusting the orthogonality of each sensor element, the mounting hole 17 of the X-axis azimuth sensor element 11 attached to the fixing block 14 is processed to be larger than the size of the mounting screw 15, and the X-axis is within the range of play. The direction sensor element 11 is rotated and finely adjusted, and a method of fixing with the mounting screw 15 is employed.

図5(a)は直交度調整の際に、X軸方位センサ素子11の中心を、中心軸16aに一致させて理想的に回動した場合の図で、固定用ブロック14の取付用ねじ穴18に対し、取付用穴17が中心軸16aを軸として矢印に示すように回動するため、X軸方位センサ素子11の中心は変動しない。   FIG. 5A is a diagram when the center of the X-axis azimuth sensor element 11 is ideally rotated so as to coincide with the central axis 16a when adjusting the orthogonality. The screw hole for mounting the fixing block 14 is shown in FIG. 18, the mounting hole 17 rotates about the central axis 16 a as indicated by the arrow, so that the center of the X-axis orientation sensor element 11 does not vary.

しかし、前述の通り、取付用穴17は取付用ねじ15の大きさよりも大きめに加工してあるため、実際に調整、固定する際には図5(b)に示すように取付用穴17の遊びでX軸方位センサ素子11の中心は本来の中心軸16aよりも、図中Aの分だけ変動した位置16bになってしまう場合がある。つまり、X軸方位センサ素子11の中心が本来あるべき中心軸16a上からずれてしまうため、X軸方位センサ素子11を正確な位置で固定できなくなり、そのずれが結果として調整誤差となってしまう。従って、その調整誤差を修正するために再調整という手直し工数がかかってしまうという欠点があった。   However, as described above, since the mounting hole 17 is processed to be larger than the size of the mounting screw 15, when the adjustment hole is actually adjusted and fixed, as shown in FIG. In some cases, the center of the X-axis azimuth sensor element 11 may be at a position 16b that is changed by an amount A in the drawing from the original center axis 16a. That is, since the center of the X-axis azimuth sensor element 11 is deviated from the center axis 16a which should be originally, the X-axis azimuth sensor element 11 cannot be fixed at an accurate position, and the deviation results in an adjustment error. . Therefore, there has been a drawback that a correction man-hour of readjustment is required to correct the adjustment error.

この問題を解決するための一手段として、特許文献1には、センサ素子と固定用ブロックの間に回転板を設けるという技術が記載されている。   As a means for solving this problem, Patent Document 1 describes a technique of providing a rotating plate between a sensor element and a fixing block.

図6を用いて特許文献1におけるセンサ素子の固定状態を説明する。   The fixed state of the sensor element in Patent Document 1 will be described with reference to FIG.

回転板24は中心に円柱状突起25が設けてあり、またセンサ素子21を固定するための保持爪27を具備している。一方、センサ素子21は前記回転板24の保持爪27と嵌合する位置に保持凹部28を具備しており、また固定用ブロック23には前記回転板24の円柱状突起25を挿入するための円形穴29が設けてある。   The rotating plate 24 is provided with a cylindrical protrusion 25 at the center, and includes a holding claw 27 for fixing the sensor element 21. On the other hand, the sensor element 21 includes a holding recess 28 at a position where the sensor element 21 is fitted with the holding claw 27 of the rotating plate 24, and the fixing block 23 is used for inserting the columnar protrusion 25 of the rotating plate 24. A circular hole 29 is provided.

センサ素子21と回転板24は保持爪27と保持凹部28で予め固定されて、回転板24の円柱状突起25と固定用ブロック23の円形穴29を勘合させることにより、センサ素子21の中心が変動することなく回転板24を回動させることができ、任意の位置で取付用ねじ31をセンサ素子21の取付用穴22および回転板24の取付用穴26を介し、固定用ブロック23に設けられた取付用ねじ穴30に締め込み固定することにより、それぞれのセンサ素子の直交度を図3の構成の3軸磁気センサに比べ効率よく調整することができるというものである。   The sensor element 21 and the rotating plate 24 are fixed in advance by a holding claw 27 and a holding recess 28, and the center of the sensor element 21 is centered by fitting the columnar protrusion 25 of the rotating plate 24 and the circular hole 29 of the fixing block 23. The rotating plate 24 can be rotated without fluctuation, and the mounting screw 31 is provided in the fixing block 23 through the mounting hole 22 of the sensor element 21 and the mounting hole 26 of the rotating plate 24 at an arbitrary position. By tightening and fixing in the mounting screw holes 30, the orthogonality of each sensor element can be adjusted more efficiently than the three-axis magnetic sensor having the configuration shown in FIG.

実用新案登録第2535764号公報Utility Model Registration No. 2535764

しかし、特許文献1の技術によれば、センサ素子と固定用ブロックの間に、新たに回転板という部品が必要となる。一般に、部品点数が増えるとコストの面だけでなく、完成品の製品重量の増加や、組立工程が増加してしまうため、できるだけ部品点数は少ない方が望ましい。   However, according to the technique of Patent Document 1, a part called a rotating plate is newly required between the sensor element and the fixing block. In general, when the number of parts increases, not only in terms of cost, but also increases the product weight of the finished product and the assembly process, so it is desirable that the number of parts is as small as possible.

したがって本発明の課題は、各々のセンサ素子の直交度調整において、調整時にセンサ素子の中心が変動することなく効率の良い調整ができ、且つ部品点数を増やすことなく構成した3軸磁気センサを提供することにある。   Accordingly, an object of the present invention is to provide a three-axis magnetic sensor that can be efficiently adjusted without changing the center of the sensor element during adjustment in the adjustment of the orthogonality of each sensor element, and is configured without increasing the number of parts. There is to do.

本発明は、各々のセンサ素子の直交度調整において、部品点数を増やさず、且つ調整時にセンサ素子の中心が変動することなく効率の良い調整ができるように3軸磁気センサの構造を検討したものである。   The present invention examined the structure of a three-axis magnetic sensor so that the degree of orthogonality of each sensor element can be adjusted efficiently without increasing the number of components and without changing the center of the sensor element during adjustment. It is.

すなわち、本発明の3軸磁気センサは、互いに直交するX軸、Y軸、Z軸の3軸方位に対応する3つの磁気センサ素子を組み合わせ固定した3軸磁気センサであって、板状で、外縁が円弧状の鍔部を、巻線を挟んで対向する部分の同じ側にある外側辺に、前記巻線の軸に並行な方向に突出させて一体に形成た磁気センサ素子と、前記鍔部の外縁に内接する円弧状の縁部を有する壁部を少なくとも一部に備えた、前記磁気センサ素子を固定する、ガイド部を有した固定用ブロックと、前記磁気センサ素子と前記固定用ブロックを固定するひとつ以上の取付け部材を備え、前記鍔部には前記取付部材を挿入することができる円弧状の長穴を備え、前記固定用ブロックには前記長穴と相対する位置に前記取付け部材を挿入する穴部が形成され、前記鍔部の外縁と前記壁部の内縁は当接し、前記壁部の円弧の中心を軸として回動可能に配し、前記磁気センサ素子を所望する回動位置で前記取付け部材を用いて固定可能に構成したことを特徴とする。 That is, the triaxial magnetic sensor of the present invention is a triaxial magnetic sensor in which three magnetic sensor elements corresponding to the three axial directions of the X axis, the Y axis, and the Z axis orthogonal to each other are combined and fixed . outer edges of the arc-shaped flange portion, the outer edges on the same side of the portion opposite to each other with respect to the winding, the magnetic sensor element formed integrally to project in a direction parallel to the axis of the winding, with at least a portion of the wall portion having an arcuate edge inscribed in the outer edge of the flange portion, to fix the magnetic sensor element, the solid-titration, block having a guide portion, the magnetic sensor element wherein with one or more attachment members for securing the fixing block, in the collar portion comprises an arcuate elongated hole capable of inserting the mounting only member, the elongated hole relative to the fixed block and A hole for inserting the mounting member is formed at a position where The outer edge of the recording part and the inner edge of the wall part come into contact with each other, and are arranged so as to be rotatable about the center of the arc of the wall part, and the magnetic sensor element is fixed using the mounting member at a desired rotational position. It is configured to be possible.

また、本発明の3軸磁気センサは、前記壁部の円弧の中心と、前記長穴の円弧の中心が、前記磁気センサ素子の回動の中心軸上にあることを特徴とする。 Further, the three-axis magnetic sensor of the present invention, the arc center of the wall portion, the center of the arc of the elongated hole, characterized in that on the central axis of rotation the magnetic sensor element.

また、本発明の3軸磁気センサは、前記取付け部材が取付け用ねじであり、前記長穴は円弧状溝であることを特徴とする。   In the triaxial magnetic sensor of the present invention, the attachment member is an attachment screw, and the elongated hole is an arcuate groove.

また、本発明の3軸磁気センサは、前記ガイド部が円形凹部であることを特徴とする。 In the three-axis magnetic sensor of the present invention, the guide portion is a circular recess.

また、本発明の3軸磁気センサは、前記ガイド部が長円形凹部であることを特徴とする。 In the triaxial magnetic sensor of the present invention, the guide portion is an oval concave portion.

また、本発明の3軸磁気センサは、前記ガイド部が突出部であることを特徴とする。 The triaxial magnetic sensor according to the present invention is characterized in that the guide portion is a protruding portion.

以上、述べたように、本発明によれば3軸磁気センサの直交度調整において、調整時にセンサ素子の中心が変動してしまうという従来の欠点を改善することができる。また、センサ素子と固定用ブロックの間に回転板という新たな部品を使用することもないため、部品点数が増えることからくるコスト面でも有利となり、さらに製品重量の増加や組立工程の増加も抑えることができる。   As described above, according to the present invention, in the orthogonality adjustment of the three-axis magnetic sensor, the conventional defect that the center of the sensor element fluctuates during the adjustment can be improved. In addition, a new component called a rotating plate is not used between the sensor element and the fixing block, which is advantageous in terms of cost due to the increase in the number of components, and further suppresses an increase in product weight and assembly process. be able to.

すなわち、本発明により、調整時にセンサ素子の中心が変動することなく効率的な直交度調整ができ、且つ部品点数を増やすことなく構成した3軸磁気センサおよび固定装置を提供することができる。   That is, according to the present invention, it is possible to provide a three-axis magnetic sensor and a fixing device that can be efficiently adjusted without changing the center of the sensor element during adjustment and that are configured without increasing the number of components.

本発明の3軸磁気センサの実施の形態1における任意の方位のセンサ素子と固定用ブロックの取り付け前の概略斜視図。The schematic perspective view before the attachment of the sensor element of arbitrary directions and the fixing block in Embodiment 1 of the 3-axis magnetic sensor of this invention. 本発明の3軸磁気センサの実施の形態1における任意の方位のセンサ素子と固定用ブロックの概略斜視図であり、図2(a)はセンサ素子を固定用ブロックに組込み後、直交度調整している平面図、図2(b)は直交度調整が終り、センサ素子を固定用ブロックに固定した時の平面図。FIG. 2 is a schematic perspective view of a sensor element having an arbitrary orientation and a fixing block according to the first embodiment of the three-axis magnetic sensor of the present invention. FIG. FIG. 2B is a plan view when the orthogonality adjustment is completed and the sensor element is fixed to the fixing block. 従来の3軸磁気センサの製品の概略斜視図。The schematic perspective view of the product of the conventional triaxial magnetic sensor. 従来の3軸磁気センサにおけるX軸方位センサ素子と固定用ブロックの取り付け前の概略斜視図。The schematic perspective view before the attachment of the X-axis azimuth | direction sensor element and fixing block in the conventional triaxial magnetic sensor. 従来の3軸磁気センサにおけるX軸方位センサ素子であり、図5(a)はX軸方位センサ素子の中心を固定用ブロックの取付け面の中心軸に一致させて理想的に回動した場合の説明図、図5(b)はX軸センサ素子の中心が回動時に固定用ブロックの取付け面の中心軸からずれた場合の説明図。FIG. 5A shows an X-axis azimuth sensor element in a conventional three-axis magnetic sensor, and FIG. 5A shows a case where the center of the X-axis azimuth sensor element coincides with the central axis of the mounting surface of the fixing block. FIG. 5B is an explanatory diagram when the center of the X-axis sensor element is displaced from the central axis of the mounting surface of the fixing block during rotation. 従来(特許文献1)の3軸磁気センサにおける任意の方位のセンサ素子と回転板と固定用ブロックの取り付け前の概略斜視図。The schematic perspective view before the attachment of the sensor element of the arbitrary directions in the conventional (patent document 1) triaxial magnetic sensor, a rotating plate, and a fixing block. 本発明の3軸磁気センサの実施の形態2における固定用ブロックの概略斜視図。The schematic perspective view of the block for fixation in Embodiment 2 of the triaxial magnetic sensor of this invention. 本発明の3軸磁気センサの実施の形態3における固定用ブロックの概略斜視図。The schematic perspective view of the block for fixation in Embodiment 3 of the triaxial magnetic sensor of this invention.

以下、本発明の実施の形態を図面を用いて説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

図1は本発明の3軸磁気センサの実施の形態1における任意の方位のセンサ素子と固定用ブロックの概略斜視図である。磁気センサはセンサ素子1および、外縁が円弧状になっている鍔部3から成っている。また鍔部3には取付用ねじ6を挿入することができる溝幅の円弧状溝2を具備している。   FIG. 1 is a schematic perspective view of a sensor element and a fixing block in an arbitrary direction according to Embodiment 1 of the three-axis magnetic sensor of the present invention. The magnetic sensor is composed of a sensor element 1 and a flange 3 whose outer edge is arcuate. Further, the flange portion 3 is provided with an arc-shaped groove 2 having a groove width into which a mounting screw 6 can be inserted.

一方、固定用ブロック4には、センサ素子1を組み込んだ際に、鍔部3の円弧状の外縁が内接するようなガイド部である円形凹部5が形成されている。また、円形凹部5には、鍔部3に形成された円弧状溝2と相対する位置にセンサ素子1を固定するための取付用ねじ6を挿入する穴部(取付用ねじ穴)7が設けられている。取付用ねじ6の材質は非磁性の金属またはプラスチック樹脂などを用いるのが望ましい。なお、取付用ねじ6は固定状態を維持できれば良く、ボルトの他、リベットや割りピン等を用いてもかまわない。   On the other hand, the fixing block 4 is formed with a circular concave portion 5 which is a guide portion in which the arc-shaped outer edge of the flange portion 3 is inscribed when the sensor element 1 is assembled. The circular concave portion 5 is provided with a hole portion (mounting screw hole) 7 into which a mounting screw 6 for fixing the sensor element 1 is fixed at a position facing the arc-shaped groove 2 formed in the flange portion 3. It has been. The material of the mounting screw 6 is preferably nonmagnetic metal or plastic resin. The mounting screw 6 only needs to maintain a fixed state, and a rivet, a split pin or the like may be used in addition to the bolt.

ここで、センサ素子1の寸法上の中心を通るようにセンサ素子1の取付け面側から延ばした垂線(図示なし)上に鍔部3の外縁の円弧および円弧状溝2の円弧の中心が存在し、かつ固定用ブロック4の円形凹部5の内径の中心は固定用ブロック14の取付け面の中心軸8上にある。なお、ここではセンサ素子1は任意の方位(例えば、X軸方位)のセンサ素子として説明しているが、図3に示したと同様に、他の2軸(Y軸方位、Z軸方位)のセンサ素子の中心も固定用ブロックの取付け面の中心軸上にある。   Here, the arc of the outer edge of the flange 3 and the center of the arc of the arc-shaped groove 2 exist on a perpendicular line (not shown) extending from the mounting surface side of the sensor element 1 so as to pass through the center of the dimension of the sensor element 1. The center of the inner diameter of the circular recess 5 of the fixing block 4 is on the central axis 8 of the mounting surface of the fixing block 14. Here, the sensor element 1 is described as a sensor element having an arbitrary orientation (for example, the X-axis orientation). However, as shown in FIG. 3, the other two axes (Y-axis orientation, Z-axis orientation) The center of the sensor element is also on the central axis of the mounting surface of the fixing block.

図2(a)は本発明のセンサ素子を固定用ブロックに組み込み、直交度調整をしている時の平面図である。センサ素子1は鍔部3の外縁で円形凹部5に内接しているため、センサ素子1の中心が中心軸8からずれることなく回動させることができため、図2(b)に示すように、センサ素子1を回動させて効率よく直交度を調整することが可能となり、取付用ねじ6を鍔部3に形成された円弧状溝2を介して取付用ねじ穴7にねじ止めすることにより、出力特性の良好な位置でセンサ素子1を固定用ブロック4に固定することができる。   FIG. 2A is a plan view when the sensor element of the present invention is incorporated in a fixing block and the orthogonality is adjusted. Since the sensor element 1 is inscribed in the circular recess 5 at the outer edge of the flange part 3, the center of the sensor element 1 can be rotated without being deviated from the central axis 8, and as shown in FIG. The sensor element 1 can be rotated to efficiently adjust the orthogonality, and the mounting screw 6 is screwed into the mounting screw hole 7 via the arc-shaped groove 2 formed in the flange 3. Thus, the sensor element 1 can be fixed to the fixing block 4 at a position where the output characteristics are good.

また、部品点数も増えないため、製品コスト、製品重量、組立工数の増加も抑えることが可能となる。   Further, since the number of parts does not increase, it is possible to suppress an increase in product cost, product weight, and assembly man-hour.

ここでは任意の1軸について説明したが、同様にして各軸のセンサ素子の直交度を揃えることにより3軸磁気センサが完成する。   Although an arbitrary one axis has been described here, a triaxial magnetic sensor is completed by aligning the orthogonality of the sensor elements of each axis in the same manner.

図7は本発明の3軸磁気センサの実施の形態2における任意の方位の固定用ブロック32の概略斜視図であり、センサ素子の鍔部の外縁に内接する円弧状の縁部を有する壁部を両端に備えた長円形凹部34が形成されている。この長円形凹部34にセンサ素子を組み込み回動させて、実施例1と同様に効率よく直交度を調整することが可能となり、3軸磁気センサが完成する。   FIG. 7 is a schematic perspective view of a fixing block 32 having an arbitrary orientation according to the second embodiment of the three-axis magnetic sensor of the present invention, and a wall portion having an arcuate edge that is inscribed in the outer edge of the flange of the sensor element. Are formed at both ends. The sensor element is assembled and rotated in the oval recess 34, and the orthogonality can be adjusted efficiently as in the first embodiment, thereby completing the three-axis magnetic sensor.

図8は本発明の3軸磁気センサの実施の形態3における任意の方位の固定用ブロック33の概略斜視図であり、センサ素子の鍔部の外縁に内接する円弧状の縁部を有する壁部を備えた突出部35が形成されている。この突出部35にセンサ素子を組み込み回動させて、実施例1と同様に効率よく直交度を調整することが可能となり、3軸磁気センサが完成する。   FIG. 8 is a schematic perspective view of a fixing block 33 having an arbitrary orientation according to the third embodiment of the three-axis magnetic sensor of the present invention, and a wall portion having an arcuate edge that is inscribed in the outer edge of the flange of the sensor element. The protrusion part 35 provided with is formed. The sensor element is assembled and rotated in the projecting portion 35, and the orthogonality can be adjusted efficiently in the same manner as in the first embodiment, so that a three-axis magnetic sensor is completed.

以下に本発明の実施例を詳述する。   Examples of the present invention are described in detail below.

まず、本発明を実施するために図1に示すようにX軸方位の磁気センサを作製した。センサ素子1の形状は縦26mm、横26mm、高さ12mmとし、鍔部3の外縁寸法は直径37mm、厚みは1.5mmとした。鍔部3と円弧状溝2はセンサ素子1のベークライト製のボビンを成型する際に一体で形成させた。他の方位の磁気センサも同様の寸法とした。円形凹部5の深さは2mmとした。   First, in order to carry out the present invention, as shown in FIG. The shape of the sensor element 1 was 26 mm in length, 26 mm in width, and 12 mm in height. The outer edge dimension of the flange 3 was 37 mm in diameter and 1.5 mm in thickness. The flange 3 and the arc-shaped groove 2 were formed integrally when the bakelite bobbin of the sensor element 1 was molded. The magnetic sensor of other directions was also made the same size. The depth of the circular recess 5 was 2 mm.

また、固定用ブロック4の材質も磁気測定に影響を与えないようベークライトで作製し、取付用ねじ6は非磁性のステンレス鋼のボルトを使用した。   The material of the fixing block 4 was also made of bakelite so as not to affect the magnetic measurement, and the mounting screws 6 were non-magnetic stainless steel bolts.

つづいて、図2(a)に示すように本発明のセンサ素子1を固定用ブロック4の円形凹部5に組み込み、センサ素子1を回動させて直交度を調整し、最も出力特性が得られる位置で取付用ねじ6をねじ止めすることにより、センサ素子1を固定用ブロック4に固定した。   Next, as shown in FIG. 2A, the sensor element 1 of the present invention is incorporated in the circular recess 5 of the fixing block 4, and the sensor element 1 is rotated to adjust the orthogonality, thereby obtaining the most output characteristics. The sensor element 1 was fixed to the fixing block 4 by screwing the mounting screw 6 at the position.

同様にしてY、Z軸のセンサ素子1の直交度を調整し、固定することにより3軸磁気センサが完成した。なお、3軸磁気センサの作製数は10台とした。   Similarly, the three-axis magnetic sensor was completed by adjusting and fixing the orthogonality of the Y and Z-axis sensor elements 1. The number of triaxial magnetic sensors produced was 10.

(比較例)
比較例として、図4に示す構成を比較例1とし、図6に示す回転板24を有した構成を比較例2として作製した。数量はそれぞれ10台とした。センサ素子11の形状は鍔部を有していない他は実施例と同様とした。
(Comparative example)
As a comparative example, the configuration shown in FIG. 4 was made as Comparative Example 1, and the configuration having the rotating plate 24 shown in FIG. The quantity was 10 units each. The shape of the sensor element 11 was the same as that of the example except that it did not have a flange.

本発明による実施例と比較例とにおいて組立工程で手直しが必要になった回数の結果を表1に示す。   Table 1 shows the results of the number of times that reworking was required in the assembly process in the examples and comparative examples according to the present invention.

Figure 0005639846
Figure 0005639846

表1から明らかなように、実施例は比較例より手直し実施の回数が減少しており、本発明の効果が認められる。また、製品重量も実施例では円形凹部を形成したため約10%の製品重量を比較例1より削減できた。なお、比較例2は回転板を有しているため製品重量は増加した。   As is clear from Table 1, the number of reworking of the example is smaller than that of the comparative example, and the effect of the present invention is recognized. Further, the product weight was reduced by about 10% from the comparative example 1 because the circular recess was formed in the example. In addition, since the comparative example 2 has a rotating plate, the product weight increased.

以上、実施例を用いて、この発明の実施の形態を説明したが、この発明は、これらの実施例に限られるものではなく、この発明の要旨を逸脱しない範囲の設計変更があっても本発明に含まれる。すなわち、当業者であれば、当然なしえるであろう各種変形、修正もまた本発明に含まれる。   The embodiments of the present invention have been described above using the embodiments. However, the present invention is not limited to these embodiments, and the present invention is not limited to the scope of the present invention. Included in the invention. That is, various changes and modifications that can be naturally made by those skilled in the art are also included in the present invention.

1、21 磁気センサ素子
2 円弧状溝
3 鍔部
4、14、23、32、33 固定用ブロック
5 円形凹部
6、15、31 取付用ねじ
7、18、30 取付用ねじ穴
11 X軸方位センサ素子
12 Y軸方位センサ素子
13 Z軸方位センサ素子
8、16a 固定用ブロックの取付け面の中心軸
16b 変動した位置
17 取付用穴
22 センサ素子の取付用穴
24 回転板
25 円柱状突起
26 回転板の取付用穴
27 保持爪
28 保持凹部
29 円形穴
34 長円形凹部
35 突出部
1, 21 Magnetic sensor element 2 Arc-shaped groove 3 Gutter 4, 14, 23, 32, 33 Fixing block 5 Circular recess 6, 15, 31 Mounting screw 7, 18, 30 Mounting screw hole 11 X axis direction sensor Element 12 Y-axis azimuth sensor element 13 Z-axis azimuth sensor element 8, 16a Center axis 16b of mounting surface of fixing block Fluctuated position 17 Mounting hole 22 Sensor element mounting hole 24 Rotating plate 25 Cylindrical protrusion 26 Rotating plate Mounting hole 27 Holding claw 28 Holding recess 29 Circular hole 34 Oval recess 35 Projection

Claims (6)

互いに直交するX軸、Y軸、Z軸の3軸方位に対応する3つの磁気センサ素子を組み合わせ固定した3軸磁気センサであって、板状で、外縁が円弧状の鍔部を、巻線を挟んで対向する部分の同じ側にある外側辺に、前記巻線の軸に並行な方向に突出させて一体に形成た磁気センサ素子と、前記鍔部の外縁に内接する円弧状の縁部を有する壁部を少なくとも一部に備えた、前記磁気センサ素子を固定する、ガイド部を有した固定用ブロックと、前記磁気センサ素子と前記固定用ブロックを固定するひとつ以上の取付け部材を備え、前記鍔部には前記取付部材を挿入することができる円弧状の長穴を備え、前記固定用ブロックには前記長穴と相対する位置に前記取付け部材を挿入する穴部が形成され、前記鍔部の外縁と前記壁部の内縁は当接し、前記壁部の円弧の中心を軸として回動可能に配し、前記磁気センサ素子を所望する回動位置で前記取付け部材を用いて固定可能に構成したことを特徴とする3軸磁気センサ。 X-axis orthogonal to each other, Y-axis, a 3-axis magnetic sensor fixed combination of three magnetic sensor element corresponding to the three axes direction of Z-axis, a plate-shaped, outer edge of the arc-shaped flange portion, the winding across the on the same side of the portion facing to the outer sides, and the magnetic sensor element formed integrally to project in a direction parallel to the axis of the winding, arcuate inscribing the outer edge of the flange portion the wall portion having an edge with at least a portion, said fixing the magnetic sensor element, the solid-titration, block having a guide portion, over one fixing the fixing block and the magnetic sensor element a mounting member, the said flange portion includes an arc-shaped long hole capable of inserting the mounting only member, the hole portion and the the fixing block for inserting the attachment member to the opposite position and the slot The outer edge of the collar part and the inner edge of the wall part are in contact with each other , 3-axis magnetic sensor, characterized in that the pivotally arranged the center of the arc of the wall portion as an axis, and the magnetic sensor element is fixably constructed using the attachment member at a desired rotational position. 前記壁部の円弧の中心と、前記長穴の円弧の中心が、前記磁気センサ素子の回動の中心軸上にあることを特徴とする請求項1に記載の3軸磁気センサ。 And the center of the arc of the wall portion, the three-axis magnetic sensor according to claim 1 the center of the arc of the elongated hole, characterized in that on the central axis of the rotating of the magnetic sensor element. 前記取付け部材は取付け用ねじであり、前記長穴は円弧状溝であることを特徴とする請求項1または2に記載の3軸磁気センサ。   3. The three-axis magnetic sensor according to claim 1, wherein the attachment member is an attachment screw, and the elongated hole is an arcuate groove. 4. 前記ガイド部は円形凹部であることを特徴とする請求項1から3のうちいずれか1項に記載の3軸磁気センサ。   The three-axis magnetic sensor according to claim 1, wherein the guide portion is a circular recess. 前記ガイド部は長円形凹部であることを特徴とする請求項1または3に記載の3軸磁気センサ。 3-axis magnetic sensor according to claim 1 or 3 wherein the guide unit is characterized in that oblong recesses. 前記ガイド部は突出部であることを特徴とする請求項1から3のうちいずれか1項に記載の3軸磁気センサ。   The three-axis magnetic sensor according to any one of claims 1 to 3, wherein the guide portion is a protruding portion.
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