JP5582889B2 - Heat transfer system - Google Patents

Description

  The present invention relates to a heat transfer system, a heat transfer system startup method, and a heat transfer system maintenance method.

  An X-ray tube apparatus as a heat transfer system includes a rotary anode X-ray tube in which a cathode and an anode target are stored in a vacuum envelope, a housing for storing the rotary anode X-ray tube, a stator, and the like. Such a rotary anode X-ray tube includes a cooling mechanism for cooling the heat generated by the anode target or the like when it is released.

The following proposals have been made for an X-ray tube apparatus equipped with a cooling mechanism.
The rotary anode X-ray tube and stator are immersed in insulating oil, and the cooling performance is excellent in the heat generation part such as a recoil electron trap provided near the anode target or a part of the vacuum envelope. An X-ray tube device that cools by flowing an aqueous coolant, and circulates the coolant between these flow paths and the heat exchanger.

  For example, Patent Documents 1 to 3 disclose an X-ray tube apparatus that uses an aqueous coolant and includes a circulation cooling mechanism. The circulation cooling mechanism uses a dedicated heat exchanger, circulation pump, hose and the like. In particular, when the aqueous coolant cools the high voltage portion, an ion exchange resin filter is used in the X-ray tube device to prevent the electrical conductivity of the aqueous coolant from increasing during use.

JP 2000-65766 A Special table 2004-532505 gazette International Publication No. 2005/38853 Pamphlet

In the conventional X-ray tube apparatus as described above, the metal in the flow path of the aqueous coolant may be corroded, and the following problems may occur.
Example 1 (Corrosion problem of cooling flow path inside anode target support made of copper-based metal):
Since an anode target support body requires high thermal conductivity, it is often composed of copper. The cooling flow path inside the anode target support may be corroded to form corrosion holes on the inner surface. Since the flow of the coolant is inhibited inside the corrosion hole, the corrosion hole becomes deeper as time passes, the anode target support becomes insufficiently cooled, the temperature of the anode target rises, and as a result, the discharge of the X-ray tube Occur.

  In addition, there is a risk that the anode target is also pierced and connected to the corrosion hole, so that the vacuum in the X-ray tube cannot be maintained. In order to prevent the occurrence of such a problem, conventionally, the inner surface of the cooling flow path inside the anode target support is covered with a noble metal film such as gold that hardly corrodes.

  However, if noble metal plating, which is relatively low cost, is used as the noble metal film, the film is worn out in a short time due to the flow of the cooling liquid (the plating is peeled off), the underlying copper is exposed, and copper corrosion progresses. There was a problem that. Further, there is a method of extending the life by brazing a thicker noble metal plate on the inner surface of the anode target support, but in this case, the cost becomes high.

Example 2 (corrosion problem of internal channel of recoil electron supplement from anode target):
Recoil-electron supplements need to have high thermal conductivity, and are often made of a metal containing copper as a main component. The cooling flow path inside the anode target support may corrode, and corrosion holes may be formed on the inner surface. Since the flow of the coolant is inhibited inside the corrosion hole, the corrosion hole becomes deeper with time, the cooling of the recoil electron supplement becomes insufficient, and the temperature of the recoil electron supplement rises. As a result, X A discharge of the tube occurs.

  In addition, there is a risk that the vacuum space in the X-ray tube and the corrosion hole are connected and a vacuum in the X-ray tube cannot be maintained. When the preventive measure using the noble metal film as in Example 1 is adopted, the same problem as that described in Example 1 occurs.

Example 3 (Corrosion problem of metal piping constituting the flow path of the coolant heat exchanger):
In many cases, the metal pipe constituting the flow path of the heat exchanger section is made of a metal mainly composed of copper. The inside of the metal pipe constituting the coolant flow path may corrode and open a hole in the metal pipe, and the coolant may leak out. Therefore, in order to improve the corrosion resistance, the above-described corrosion problem can be avoided by configuring the flow path using stainless steel or titanium instead of copper. However, since these alternative materials have low thermal conductivity, the heat exchange performance deteriorates and cannot be employed when a high cooling rate is required.

Example 4 (Clogging due to deposits due to corrosion and problems of poor airtightness):
Accompanying the corrosion of the metal mainly composed of copper in the various circulation channels as described above, copper ions dissolved in the coolant are deposited inside the circulation channel as metallic copper or a copper compound. As a result of clogging in the circulation flow path due to these deposits, the flow rate of the cooling liquid is lowered, which may cause insufficient cooling of the X-ray tube.

  In addition, since these deposits are easy to peel off and move, when the pipe is attached to the X-ray tube by a connector that can be attached and detached, the deposit is interposed in the hermetic seal portion of the connector so that the deposit is airtight. May be damaged, and a problem of leakage of the coolant may occur. In the cooling mechanism, such a pipe with a connector is often used for connection with an X-ray tube.

  The present invention has been made in view of the above points, and an object of the present invention is to provide a heat transfer system and a heat transfer system that can reduce internal corrosion due to an aqueous coolant, have high reliability over a long period of time, and have excellent cooling performance. An object is to provide a start-up method and a heat transfer system maintenance method.

A heat transfer system according to an embodiment includes:
Contains a water-based coolant that conducts heat from the outside, and has a sealed cooling channel,
A circulation flow path that is communicated with the cooling flow path through an airtight joint, contains the aqueous coolant, and can maintain airtightness;
A circulation pump that is airtightly attached to the circulation flow path and circulates the water-based coolant between the cooling flow path and
The attached airtightly to the circulation flow path, and at least one gas filled region inert gas filled, before Symbol inlet of the inert gas opening into the gas filled region, moths opened in the gas filled region A container capable of maintaining airtightness in a state in which the introduction port and the discharge port are closed ,
A gas that is provided in the vessel, divides the coolant-filled region where the water-based coolant is present and the gas-filled region, is impermeable to the water-based coolant, and is permeable to the gas An exchange membrane,
A first opening / closing portion that is airtightly attached to the inlet of the container and is switchable between an open state in which the inert gas can be introduced into the gas-filled region and a closed state in which the airtightness of the container can be maintained; ,
A second opening / closing portion that is airtightly attached to the discharge port of the container, and is switchable between an open state in which the gas can be discharged from the gas-filled region to the outside and a closed state in which the airtightness of the container can be maintained. It is characterized by providing.

It is a schematic structure figure showing the X-ray tube device concerning a 1st embodiment. It is sectional drawing of the X-ray tube shown in FIG. FIG. 3 is an enlarged sectional view of a part of the X-ray tube shown in FIG. 2. It is a schematic block diagram which shows the X-ray tube apparatus which concerns on 2nd Embodiment. It is a schematic block diagram which shows the X-ray tube apparatus which concerns on 3rd Embodiment. It is a schematic block diagram which shows the X-ray tube apparatus which concerns on 4th Embodiment. It is a schematic block diagram which shows the X-ray tube apparatus which concerns on 5th Embodiment. It is a schematic block diagram which shows the X-ray tube apparatus which concerns on 6th Embodiment. It is a schematic block diagram which shows the comparative example of the X-ray tube apparatus which concerns on the said 1st thru | or 4th embodiment. It is a schematic block diagram which shows the comparative example of the X-ray tube apparatus which concerns on the said 5th and 6th embodiment. It is a schematic block diagram which shows the X-ray tube apparatus which concerns on 7th Embodiment. It is a schematic block diagram which shows the X-ray tube apparatus which concerns on 8th Embodiment. It is a schematic block diagram which shows the X-ray tube apparatus which concerns on 9th Embodiment. It is a schematic block diagram which shows the X-ray tube apparatus which concerns on 10th Embodiment. It is a schematic block diagram which shows the X-ray tube apparatus which concerns on 11th Embodiment. It is a schematic block diagram which shows the X-ray tube apparatus which concerns on 12th Embodiment. It is a schematic block diagram which shows the X-ray tube apparatus which concerns on 13th Embodiment. It is a schematic block diagram which shows the X-ray tube apparatus which concerns on 14th Embodiment. It is a schematic block diagram which shows the X-ray tube apparatus which concerns on 15th Embodiment. It is a schematic block diagram which shows the X-ray tube apparatus which concerns on 16th Embodiment. It is a schematic block diagram which shows the X-ray tube apparatus which concerns on 17th Embodiment. It is a schematic block diagram which shows the X-ray tube apparatus which concerns on 18th Embodiment. It is a schematic block diagram which shows the X-ray tube apparatus concerning 19th Embodiment. It is a schematic block diagram which shows the cooling system which concerns on 20th Embodiment. It is the schematic which shows the modification of the cooling flow path for cooling the said X-ray tube. It is the schematic which shows the other modification of the cooling flow path for cooling the said X-ray tube.

  Hereinafter, a heat transfer system, a heat transfer system startup method, and a heat transfer system maintenance method will be described with reference to the drawings. In particular, a heat transfer system, a heat transfer system startup method, and an X-ray tube device as a heat transfer system maintenance method, an X-ray tube device startup method, and an X-ray tube device maintenance method will be described in detail.

  First, the X-ray tube apparatus and the startup method of the X-ray tube apparatus according to the first embodiment will be described in detail. First, the configuration of the X-ray tube apparatus started up by the above-described X-ray tube apparatus start-up method will be described.

  As shown in FIG. 1, the X-ray tube device includes an X-ray tube 1, a cooling flow path 3 of the X-ray tube 1, an aqueous coolant L, an aqueous coolant circulating device 5, a joint 6, And an inert gas cylinder 7. In this embodiment, pure water is used for the aqueous coolant L.

  As shown in FIGS. 1, 2, and 3, the X-ray tube 1 includes a vacuum envelope 151. The vacuum envelope 151 includes a vacuum vessel 152 and an anode target support 153. The vacuum container 152 is made of metal, for example. The anode target support 153 is formed of a high voltage insulating member. An anode target 155 is attached to the anode target support 153, and the anode target support 153 forms a part of the vacuum envelope 151. The anode target support 153 is formed integrally with a cylindrical portion and a ring portion connected to one end of the cylindrical portion.

  The anode target 155 is bonded to the anode target support 153. The anode target 155 is made of, for example, copper as a metal. The anode target 155 has a recess 155d. The recess 155d is formed in a groove shape. The anode target 155 has a target layer 155a. The target layer 155a is made of, for example, a tungsten alloy.

  The anode target 155 and the cathode 156 are accommodated in a vacuum envelope 151. A relatively positive voltage is applied to the anode target 155 and the focusing electrode 157. A relatively negative voltage is applied to the cathode 156. Here, a high voltage is applied to the anode target 155, and the cathode 156 is grounded. The inside of the vacuum envelope 151 is in a vacuum state. An X-ray output window 154 that transmits X-rays is airtightly provided in a part of the vacuum vessel 152.

  The cathode 156 emits electrons. The anode target 155 (target layer 155a) emits X-rays when irradiated with electrons emitted from the cathode 156.

  The X-ray tube 1 includes a tube portion 161 and a wall portion 162. The tube portion 161 is formed of a high voltage insulating material. The tube portion 161 is provided inside the anode target support 153. One end of the tube portion 161 extends to the outside of the vacuum envelope 151. The pipe part 161 forms an introduction path C1 for introducing the aqueous coolant L therein. The anode target support 153 and the pipe part 161 form a discharge path C2 for discharging the aqueous coolant L therebetween.

  The wall 162 is provided in a region surrounded by the recess 155d and the anode target support 153. The wall part 162 is formed integrally with the pipe part 161 so as to surround the side surface of the end part of the pipe part 161. The wall 162 is provided with a gap between the recess 155d and the anode target support 153. The anode target 155 has a passage C3 provided therein. The passage C3 is connected to the introduction passage C1 and the discharge passage C2.

  The introduction passage C1, the discharge passage C2, and the passage C3 form a cooling passage 3 of the X-ray tube 1 through which the aqueous coolant L flows. The cooling flow path 3 airtightly contains the aqueous coolant L through which heat from the outside is conducted. Here, the cooling flow path 3 airtightly contains the aqueous coolant L through which at least part of the heat released from the anode target 155 (X-ray tube 1) is conducted. The aqueous coolant L introduced from the introduction path C1 circulates through the passage C3 and is discharged from the discharge path C2.

  The electrostatic deflection electrode 158 is provided inside the vacuum envelope 151 so as to surround the trajectory of electrons emitted from the cathode 156. The electrostatic deflection electrode 158 deflects electrons emitted from the cathode 156.

The circulation device 5 circulates the water-based coolant L with the cooling flow path 3 via the airtight joint 6.
Here, the joint 6 includes a hose 11, a hose 12, a connector 13, a connector 14, a plug 15, and a plug 16. A connector 13 is connected to one end of the hose 11 in an airtight manner, and a plug 15 is connected to the other end in an airtight manner. A connector 14 is hermetically connected to one end of the hose 12 and a plug 16 is hermetically connected to the other end. The connector 13 is airtightly connected to the introduction path C1 of the X-ray tube 1, and the connector 14 is airtightly connected to the discharge path C2 of the X-ray tube 1.

  The circulation device 5 includes a housing 20, a circulation channel 30, a heat exchanger 60, a flow rate sensor 70, a tank 80 as a container, a circulation pump 100, a valve 111, a valve 112, and a first opening / closing. And a valve 121 as a second opening / closing part.

  A socket 21 and a socket 22 are attached to the housing 20 in an airtight manner. A plug 15 is airtightly connected to the socket 21. The plug 16 is airtightly connected to the socket 22. The socket 21 and the plug 15 form a coupler 8 as a detachable coupler. The socket 22 and the plug 16 form a coupler 9 as a detachable coupler.

  The circulation channel 30 is communicated with the cooling channel 3 via the joint 6. The circulation flow path 30 accommodates the water-based coolant L and can maintain airtightness. The circulation channel 30 includes a conduit 31, a conduit 32, a conduit 33 and a conduit 35. The conduit 31 is airtightly connected to the socket 22, and the conduit 35 is airtightly connected to the socket 21. The conduit 31, the conduit 32, the conduit 33, and the conduit 35 are made of a metal such as copper, iron, an iron alloy, or steel. Here, the conduit 31 is made of copper, and the conduit 32, the conduit 33 and the conduit 35 are made of stainless steel.

The heat exchanger 60 is attached to the circulation channel 30 in an airtight manner, and discharges the heat of the aqueous coolant L to the outside. The heat exchanger 60 is formed by a part of the conduit 31 and the conduit 61. Both ends of the conduit 61 are drawn out of the housing 20. A valve 111 and a valve 112 are connected to both ends of the conduit 61. Here, tap water flows as a coolant in the conduit 61. When flowing tap water through the conduit 61, the valve 111 may be opened so that tap water can be introduced, and the valve 112 may be opened so that tap water can be discharged. Thereby, the heat of the aqueous coolant L flowing through the conduit 31 that is the secondary cooling system is conducted to the tap water flowing through the conduit 61 that is the primary cooling system, and the aqueous coolant L is cooled.
The flow sensor 70 is hermetically connected between the conduit 31 and the conduit 32.

  The tank 80 is airtightly attached to the circulation flow path 30. Specifically, the tank 80 is airtightly attached to the conduit 32 and the conduit 33. The tank 80 includes a water-based coolant filling region 81 filled with the water-based coolant L, at least one gas-filled region 82 filled with an inert gas in contact with and separated from the water-based coolant L, and an inert gas It has an inlet 83 and a gas outlet 84. For this reason, the gas-filled region 82 is divided by contact separation with the aqueous coolant L. Here, the tank 80 has one gas filling region 82. The tank 80 can maintain airtightness with the inlet 83 and the outlet 84 closed.

  The tank 80 is provided with a bellows 85 as a bellows mechanism, an ion exchange resin filter 86 as an ion exchange resin, an inert gas introduction pipe 87, and a gas discharge pipe 88.

  The bellows 85 is airtightly attached to the tank 80. The bellows 85 is extendable and can absorb the volume change due to the temperature of the coolant and keep the pressure in the gas-filled region 82 constant. As will be described later, when air (oxygen) gradually enters the closed system from the outside during use, most of the air is accommodated in the gas-filled region 82, but the gas-filled region by the bellows 85. The pressure in 82 can be kept constant. Here, the bellows 85 is formed of rubber. The bellows 85 is preferably formed of a material that does not easily transmit gas, that is, a material that is impermeable to gas. The bellows 85 is preferably formed by coating the surface with a gas barrier film such as an amorphous carbon film. The bellows 85 can absorb the expansion and contraction of the aqueous coolant L.

  In this case, as described later, when the X-ray tube apparatus is started up, the introduction of the inert gas is stopped without waiting for the inert gas to be dissolved in the aqueous coolant L to the saturation value, The operation of the pipe device may be started.

  The ion exchange resin filter 86 is provided inside the tank 80. The ion exchange resin filter 86 is immersed in the aqueous coolant L. Here, the ion exchange resin filter 86 is attached to the tip of the conduit 33. The ion exchange resin filter 86 prevents an increase in the ions generated when metal parts such as the circulation flow path 30, the X-ray tube 1 and the cooling flow path 3 are corroded, and suppresses an increase in the conductivity of the aqueous coolant L. can do. Thereby, the non-conductivity of the aqueous coolant L which is pure water can be maintained, and electrical defects such as discharge generated in the X-ray tube 1 can be suppressed.

  The inert gas introduction pipe 87 is airtightly attached to the introduction port 83. The inert gas introduction pipe 87 has, at one end, a discharge port 87 a that is immersed in the aqueous coolant L in the tank 80 and discharges an inert gas introduced from the introduction port 83. The other end of the inert gas introduction pipe 87 is drawn out of the housing 20.

  In this embodiment, since the circulation device 5 has the inert gas discharge port 87a, a gas bubbling method as a gas replacement method can be adopted. For this reason, in this embodiment, oxygen gas in the aqueous coolant L is replaced with an inert gas by a gas bubbling method, and dissolved oxygen in the aqueous coolant L is removed.

  The gas discharge pipe 88 is airtightly attached to the discharge port 84. Here, one end of the gas discharge pipe 88 is attached to the discharge port 84 in an airtight manner, and the other end is drawn to the outside of the housing 20.

  The valve 121 as the first opening / closing part is airtightly attached to the inlet 83 of the tank 80. Here, the valve 121 is airtightly attached to the inert gas introduction pipe 87 and is airtightly attached to the introduction port 83 via the inert gas introduction pipe 87. An inert gas cylinder 7 can be connected to the other side of the valve 121. The inert gas cylinder 7 is used when starting up the X-ray tube device, and may be connected to the valve 121 when starting up the X-ray tube device, and is not always connected to the valve 121. Also good. The valve 121 can be switched between an open state in which an inert gas can be introduced from the inert gas cylinder 7 into the gas filling region 82 and a closed state in which the airtightness of the tank 80 can be maintained.

  The valve 122 as the second opening / closing part is airtightly attached to the discharge port 84 of the tank 80. Here, the valve 122 is airtightly attached to the gas discharge pipe 88 and is airtightly attached to the discharge port 84 via the gas discharge pipe 88. The other side of the valve 122 is open. The valve 122 can be switched between an open state in which gas can be discharged to the outside from the gas filling region 82 and a closed state in which the airtightness of the tank 80 can be maintained.

  In addition, a vacuum pump may be connected to the other side of the valve 122 as necessary. In this case, by opening the valve 122, the gas-filled region 82 can be evacuated by a vacuum pump.

  The circulation pump 100 is attached to the circulation channel 30 in an airtight manner. Specifically, the circulation pump 100 is hermetically attached to the conduit 33 and the conduit 35. The circulation pump 100 circulates the aqueous coolant L between the circulation device 5 and the cooling flow path 3.

  Here, the aqueous coolant L will be described. An inert gas is dissolved in the aqueous coolant L. In this embodiment, an inert gas is dissolved in the aqueous coolant L in a saturated state. The aqueous coolant L is in contact with the inert gas in the gas filling region 82 in the tank 80. The oxygen gas dissolved in the aqueous coolant L (pure water) is replaced with an inert gas.

  Since the aqueous coolant L has a low dissolved oxygen content, corrosion of metal parts such as the circulation channel 30, the X-ray tube 1 and the cooling channel 3 can be suppressed.

Here, the inert gas will be described.
As the inert gas, various inert gases that do not cause metal corrosion, such as nitrogen gas, argon gas, and helium gas, can be used. Considering manufacturing costs and maintenance costs, it is desirable to use inexpensive nitrogen gas as the inert gas.
The X-ray tube device is configured as described above.

Next, a method for starting up the X-ray tube apparatus will be described.
First, an X-ray tube device including an X-ray tube 1 and a circulation device 5 is prepared. In the circulation device 5 prepared here, the gas filling region 82 of the tank 80 is not filled with the inert gas yet, and is filled with the atmosphere.

  Subsequently, the aqueous coolant L was introduced into the cooling channel 3, the joint 6, and the circulation device 5, and the circulation channel 30 was communicated with the cooling channel 3 via the joint 6, and the aqueous coolant L was introduced. Assemble the X-ray tube device into a module.

  Here, after introducing the water-based coolant L to the cooling flow path 3, the joint 6 and the circulation device 5, the cooling flow path 3 and the circulation flow path 30 are communicated, but the present invention is not limited to this, and various modifications are possible. It is. For example, at the time of maintenance for replacing the tube, the water-based coolant L is introduced only into the cooling flow path 3 of the X-ray tube 1 whose tube has been replaced, and has already been introduced into the joint 6 and the circulation device 5. The aqueous coolant L can be used continuously. Alternatively, in the joint 6 and the circulation device 5, the water-based coolant L may be replaced.

  Next, the circulation pump 100 is operated, and the aqueous coolant L is circulated between the circulation channel 30 and the cooling channel 3. Note that the heat exchanger 60 may not be operated while the circulation pump 100 is operated and the aqueous coolant L is circulated.

  Thereafter, with the circulation of the aqueous coolant L maintained, the valve 121 and the valve 122 are opened. Here, the valve 121 and the valve 122 are respectively switched from the closed state to the open state. Then, an inert gas is allowed to flow from the inert gas cylinder 7 connected to the valve 121 to the gas filling region 82 of the tank 80 through the valve 121, the inert gas introduction pipe 87 and the introduction port 83 by the gas bubbling method. The dissolved oxygen in the liquid L is removed. Since the discharge port 87a of the inert gas introduction pipe 87 is submerged in the aqueous coolant L, the inert gas can be introduced into the gas filling region 82 after bubbling through the aqueous coolant L. .

  As a result, the inert gas dissolves in the aqueous coolant L and dissolved oxygen can be efficiently removed. The inert gas and oxygen gas in the gas filling region 82 are discharged to the outside through the discharge port 84, the gas discharge pipe 88 and the valve 122. And the gas filling area | region 82 will be gradually filled with an inert gas.

  At this time, the amount of dissolved oxygen in the aqueous coolant L can be reduced by flowing an inert gas through the gas-filled region 82 for a certain period. Here, the above-mentioned fixed period is, for example, a period until the inert gas is dissolved in the aqueous coolant L to a saturation value.

The certain period may be shorter than the period until the inert gas is dissolved in the aqueous coolant L to the saturation value. That is, it may be a period in which the inert gas does not dissolve in the aqueous coolant L to the saturation value. In this case, the inert gas may be introduced to such an extent that the gas-filled region 82 is filled with the inert gas, more preferably, the bellows 85 is expanded by the inert gas. The amount of oxygen can be gradually reduced.
Further, as described above, the period during which the inert gas flows through the gas-filled region 82 only needs to overlap with the period during which the aqueous coolant L is circulated.

  Subsequently, the flow of the inert gas to the gas filling region 82 is stopped, and the valve 121 and the valve 122 are respectively switched to the closed state. For this reason, the airtightness of the tank 80 can be maintained. Thereby, start-up of the X-ray tube apparatus is completed.

  Here, before the inert gas is allowed to flow through the gas-filled region 82, the gas-filled region 82 may be further evacuated. For example, the gas-filled region 82 may be further evacuated after the aqueous coolant L is circulated and before the inert gas is allowed to flow through the gas-filled region 82. In this case, with the circulation of the aqueous coolant L maintained, the valve 122 is opened, and a vacuum pump is used to evacuate the gas-filled region 82 through the valve 122, the gas discharge pipe 88 and the discharge port 84 for a certain period. To do. Then, after the gas-filled region 82 is evacuated, the valve 122 is switched to a closed state, and the evacuation is stopped. As a result, it is possible to shorten the discharge time of oxygen and dissolved oxygen of the aqueous coolant L to the outside in the gas-filled region 82 and the time for flowing the inert gas.

  The X-ray tube apparatus startup method may be performed after the X-ray tube apparatus is assembled into a module for the first time, or during maintenance of the X-ray tube apparatus such as tube replacement, and is not always required. Thereby, the state where the amount of dissolved oxygen of the aqueous coolant L is low can be maintained after the start-up.

  According to the X-ray tube apparatus and the startup method of the X-ray tube apparatus according to the first embodiment configured as described above, the X-ray tube apparatus includes the X-ray tube 1, the cooling flow path 3, and the circulation. And a device 5. The circulation device 5 includes a circulation flow path 30, a circulation pump 100, a tank 80, a valve 121, and a valve 122.

  By the gas bubbling method, the amount of dissolved oxygen in the aqueous coolant L can be reduced. For this reason, the oxygen gas in the aqueous coolant L can be removed at low cost. Moreover, corrosion of metal parts, such as the circulation flow path 30, the X-ray tube 1, and the cooling flow path 3, can be suppressed. Even when the metal portion is made of a material mainly composed of copper which is easily corroded, the occurrence of corrosion can be suppressed. That is, internal corrosion of the X-ray tube apparatus due to the aqueous coolant L can be reduced. Since defects caused by corrosion such as formation of holes in the anode target 155 can be reduced, an X-ray tube apparatus having high reliability over a long period of time and a long product life can be obtained.

Moreover, since generation | occurrence | production of the metal ion etc. which arise by corrosion of a metal part can be suppressed, the lifetime of the ion exchange resin 86 can be extended.
Since the aqueous coolant L can be used, an X-ray tube device having excellent cooling performance can be obtained as compared with the case where the coolant is an insulating oil.

  Even when there is a path through which air (oxygen) slightly enters the sealed system of the cooling flow path 3, the joint 6, and the circulation device 5, such as the valve 121 and the valve 122, the gas filling region 82 is filled with an inert gas. Has been. Needless to say, the gas-filled region 82 is not in a vacuum state. Even if there is a slight intrusion of the atmosphere (oxygen) from the path such as the valve 121 and the valve 122 and the invading oxygen is dissolved in the aqueous coolant L, the oxygen is naturally replaced with an inert gas in the gas-filled region 82. Therefore, an increase in the amount of dissolved oxygen in the aqueous coolant L can be suppressed, and as a result, internal corrosion of the X-ray tube device can be reduced.

The bellows 85 provided in the tank 80 can absorb the expansion and contraction of the aqueous coolant L. For this reason, even if this cooling flow path 3, the joint 6, and the circulation device 5 form a closed system, the leakage of the aqueous coolant L when the aqueous coolant L expands or the shrinkage of the aqueous coolant L occurs. Inhalation of air into the aqueous coolant L can be prevented.
Since the circulation device 5 includes the ion exchange resin filter 86, an increase in ions such as metal ions in the aqueous coolant L can be prevented, and the non-conductivity of the aqueous coolant L can be further maintained.

  From the above, it is possible to reduce internal corrosion due to the aqueous coolant, and to obtain an X-ray tube device that is highly reliable over a long period of time and excellent in cooling performance, and a method for starting up the X-ray tube device.

  Next, an X-ray tube apparatus and a method for starting up the X-ray tube apparatus according to the second embodiment will be described in detail. In this embodiment, other configurations are the same as those of the first embodiment described above, and the same parts are denoted by the same reference numerals and detailed description thereof is omitted. The method for starting up the X-ray tube apparatus is the same as that in the first embodiment, and a detailed description thereof is omitted.

  As shown in FIG. 4, the X-ray tube device includes an X-ray tube 1, a cooling flow path 3 of the X-ray tube 1, an aqueous coolant L, a circulating device 5 for the aqueous coolant L, a joint 6, And an inert gas cylinder 7. In this embodiment, an aqueous glycol solution is used as the aqueous coolant L. Here, the anode target 155 is grounded, and a high voltage is applied to the cathode 156. In this embodiment, there is no problem even if the increase of ions in the aqueous coolant L is not prevented, so the circulation device 5 does not have the ion exchange resin filter 86.

  According to the X-ray tube device and the startup method of the X-ray tube device according to the second embodiment configured as described above, the X-ray tube device includes the X-ray tube 1, the cooling flow path 3, and the circulation. And a device 5. The circulation device 5 includes a circulation flow path 30, a circulation pump 100, a tank 80, a valve 121, and a valve 122.

  For this reason, the same effect as 1st Embodiment mentioned above can be acquired. Further, since the glycol target is used as the aqueous coolant L and the anode target is grounded, the circulation device 5 can be formed without the ion exchange resin filter 86.

  From the above, it is possible to reduce internal corrosion due to the aqueous coolant, and to obtain an X-ray tube device that is highly reliable over a long period of time and excellent in cooling performance, and a method for starting up the X-ray tube device.

  Next, an X-ray tube apparatus and a method for starting up the X-ray tube apparatus according to the third embodiment will be described in detail. In this embodiment, other configurations are the same as those of the first embodiment described above, and the same parts are denoted by the same reference numerals and detailed description thereof is omitted.

  As shown in FIG. 5, the X-ray tube device includes an X-ray tube 1, a cooling flow path 3 of the X-ray tube 1, an aqueous coolant L, a circulating device 5 for the aqueous coolant L, a joint 6, And an inert gas cylinder 7. In this embodiment, pure water is used for the aqueous coolant L. Here, a high voltage is applied to the anode target 155, and the cathode 156 is grounded.

  The circulation channel 30 further includes a conduit 34. The circulation pump 100 is airtightly attached to the conduit 34 and the conduit 35. The inert gas introduction pipe 87 does not have the discharge port 87a submerged in the aqueous coolant L. One end of the inert gas introduction pipe 87 is airtightly attached to the introduction port 83, and the other end is drawn out of the housing 20.

The circulation device 5 further includes a case 90 as a container, a valve 131 as a first opening / closing part, and a valve 132 as a second opening / closing part.
The case 90 is airtightly attached to the circulation channel 30. Specifically, the case 90 is hermetically attached to the conduit 33 and the conduit 34. The case 90 has at least one gas filling region 91 filled with an inert gas, an inert gas inlet 92, and a gas outlet 93. Here, the case 90 has one gas filling region 91. The case 90 can maintain airtightness with the inlet 92 and the outlet 93 closed.

The case 90 is provided with a hollow fiber membrane as a gas exchange membrane, an inert gas introduction pipe 96, and a gas discharge pipe 97. Here, for example, a hollow fiber membrane filter 94 is used as the hollow fiber membrane.
The hollow fiber membrane filter 94 is provided in the case 90. The hollow fiber membrane filter 94 has a flow path 95 for the aqueous coolant L formed therein. The hollow fiber membrane filter 94 is for contacting and separating the aqueous coolant L and the inert gas, and has a property of allowing gas to permeate but not allowing the aqueous coolant L to permeate.

  That is, the hollow fiber membrane filter 94 divides the coolant-filled region 98 and the gas-filled region 91 where the water-based coolant L exists, shows impermeability to the water-based coolant L, and is permeable to gas. It is shown. The gas-filled region 91 is filled with an inert gas in a state where the gas-filled region 91 is in contact with and separated from the aqueous coolant L (flow path 95, coolant-filled region 98).

  In this embodiment, since the circulation device 5 includes the hollow fiber membrane filter 94, a membrane deaeration method as a gas replacement method can be adopted. For this reason, in this embodiment, the oxygen gas in the aqueous coolant L is replaced with an inert gas by the membrane degassing method, and the dissolved oxygen in the aqueous coolant L is removed.

  The inert gas introduction pipe 96 is airtightly attached to the introduction port 92. Here, one end of the inert gas introduction pipe 96 is hermetically attached to the introduction port 92, and the other end is drawn out of the housing 20.

  The gas discharge pipe 97 is attached to the discharge port 93 in an airtight manner. Here, one end of the gas discharge pipe 97 is airtightly attached to the discharge port 93, and the other end is drawn out of the housing 20.

  The valve 131 is airtightly attached to the inlet 92 of the case 90. Here, the valve 131 is airtightly attached to the inert gas introduction pipe 96 and is airtightly attached to the introduction port 92 via the inert gas introduction pipe 96. The other side of the valve 131 can be connected to an inert gas cylinder 7. The valve 131 can be switched between an open state in which an inert gas can be introduced from the inert gas cylinder 7 into the gas-filled region 91 and a closed state in which the gas-filled region 91 (case 90) can be kept airtight.

  The valve 132 is airtightly attached to the discharge port 93 of the case 90. Here, the valve 132 is airtightly attached to the gas discharge pipe 97 and is airtightly attached to the discharge port 93 via the gas discharge pipe 97. The other side of the valve 132 is open. The valve 132 can be switched between an open state in which gas can be discharged to the outside from the gas filling region 91 and a closed state in which the gas tightness of the gas filling region 91 (case 90) can be maintained.

  In addition, a vacuum pump may be connected to the other side of the valve 132 as necessary. In this case, by opening the valve 132, the gas-filled region 91 can be evacuated with a vacuum pump.

Next, a method for starting up the X-ray tube apparatus will be described.
First, an X-ray tube device including an X-ray tube 1 and a circulation device 5 is prepared. In the circulation device 5 prepared here, the gas filling region 82 of the tank 80 and the gas filling region 91 of the case 90 are not filled with the inert gas yet, and are filled with the atmosphere.

  Subsequently, the aqueous coolant L was introduced into the cooling channel 3, the joint 6, and the circulation device 5, and the circulation channel 30 was communicated with the cooling channel 3 via the joint 6, and the aqueous coolant L was introduced. Assemble the X-ray tube device into a module.

  Here, after introducing the water-based coolant L to the cooling flow path 3, the joint 6 and the circulation device 5, the cooling flow path 3 and the circulation flow path 30 are communicated, but the present invention is not limited to this, and various modifications are possible. It is. For example, at the time of maintenance for replacing the tube, the water-based coolant L is introduced only into the cooling flow path 3 of the X-ray tube 1 whose tube has been replaced, and has already been introduced into the joint 6 and the circulation device 5. The aqueous coolant L can be used continuously. Alternatively, in the joint 6 and the circulation device 5, the water-based coolant L may be replaced.

  Next, the circulation pump 100 is operated, and the aqueous coolant L is circulated between the circulation channel 30 and the cooling channel 3. Note that the heat exchanger 60 may not be operated while the circulation pump 100 is operated and the aqueous coolant L is circulated.

  Thereafter, the valve 121, the valve 122, the valve 131, and the valve 132 are each opened while the circulation of the aqueous coolant L is maintained. Here, the valve 121, the valve 122, the valve 131, and the valve 132 are respectively switched from the closed state to the open state. Then, an inert gas flows from the inert gas cylinder 7 connected to the valve 121 to the gas filling region 82 of the tank 80 through the valve 121, the inert gas introduction pipe 87, and the introduction port 83.

  Thereby, the inert gas and oxygen gas in the gas filling region 82 are discharged to the outside through the discharge port 84, the gas discharge pipe 88 and the valve 122. And the gas filling area | region 82 will be gradually filled with an inert gas.

  In addition, at the same time as flowing an inert gas into the gas-filled region 82, an inert gas is flowed into the gas-filled region 91 of the case 90 through the valve 131, the inert gas introduction pipe 96 and the inlet 92 by the membrane degassing method. Then, dissolved oxygen in the aqueous coolant L is removed.

  The hollow fiber membrane filter 94 can contact-separate the aqueous coolant L and the inert gas, dissolve the inert gas in the aqueous coolant L, and remove dissolved oxygen. The inert gas and oxygen gas in the gas filling region 91 are discharged to the outside through the discharge port 93, the gas discharge pipe 97 and the valve 132. And the gas filling area | region 91 will be gradually filled with an inert gas.

  At this time, the amount of dissolved oxygen in the aqueous coolant L can be reduced by flowing an inert gas through the gas-filled region 82 and the gas-filled region 91 for a certain period. Here, the above-mentioned fixed period is, for example, a period until the inert gas is dissolved in the aqueous coolant L to a saturation value.

The certain period may be shorter than the period until the inert gas is dissolved in the aqueous coolant L to the saturation value. That is, it may be a period in which the inert gas does not dissolve in the aqueous coolant L to the saturation value. In this case, the inert gas may be introduced to such an extent that the gas filling region 82 and the gas filling region 91 are filled with the inert gas, whereby the amount of dissolved oxygen in the aqueous coolant L can be gradually reduced.
Further, as described above, the period during which the inert gas flows through the gas-filled region 82 and the gas-filled region 91 only needs to overlap with the period during which the aqueous coolant L is circulated.

  Subsequently, the flow of the inert gas to the gas filling region 82 and the gas filling region 91 is stopped, and the valve 121, the valve 122, the valve 131, and the valve 132 are respectively switched to the closed state. For this reason, the airtightness of the tank 80 and the case 90 can be maintained. Thereby, start-up of the X-ray tube apparatus is completed.

  Here, before the inert gas is allowed to flow through the gas filling region 82 and the gas filling region 91, the gas filling region 82 and the gas filling region 91 may be further evacuated. For example, after the water-based coolant L is circulated and before the inert gas is allowed to flow through the gas filling region 82 and the gas filling region 91, the gas filling region 82 and the gas filling region 91 are further evacuated. May be. In this case, with the circulation of the aqueous coolant L maintained, the valve 122 and the valve 132 are opened, and the gas filling region 82 is kept constant via the valve 122, the gas discharge pipe 88 and the discharge port 84 using a vacuum pump. A vacuum is evacuated for a period, and at the same time, the gas-filled region 91 is evacuated for a certain period through the valve 132, the gas discharge pipe 97 and the discharge port 93.

  Then, after evacuating the gas filling region 82 and the gas filling region 91, the valve 122 and the valve 132 may be switched to a closed state to stop the evacuation. As a result, it is possible to shorten the discharge time of the oxygen and the aqueous coolant L in the gas-filled region 82 and the gas-filled region 91 to the outside and the time for flowing the inert gas.

  The X-ray tube apparatus startup method may be performed after the X-ray tube apparatus is assembled into a module for the first time, or during maintenance of the X-ray tube apparatus such as tube replacement, and is not always required. Thereby, the state where the amount of dissolved oxygen of the aqueous coolant L is low can be maintained after the start-up.

  According to the X-ray tube device and the startup method of the X-ray tube device according to the third embodiment configured as described above, the X-ray tube device includes the X-ray tube 1, the cooling flow path 3, and the circulation. And a device 5. The circulation device 5 includes a circulation flow path 30, a circulation pump 100, a tank 80, a case 90, a valve 121, a valve 122, a valve 131, and a valve 132.

  The amount of dissolved oxygen in the aqueous coolant L can be reduced by the membrane degassing method. For this reason, the oxygen gas in the aqueous coolant L can be removed at low cost. Moreover, corrosion of metal parts, such as the circulation flow path 30, the X-ray tube 1, and the cooling flow path 3, can be suppressed. Even when the metal portion is made of a material mainly composed of copper which is easily corroded, the occurrence of corrosion can be suppressed. That is, internal corrosion of the X-ray tube apparatus due to the aqueous coolant L can be reduced. Since defects caused by corrosion such as formation of holes in the anode target 155 can be reduced, an X-ray tube apparatus having high reliability over a long period of time and a long product life can be obtained.

Moreover, since generation | occurrence | production of the metal ion etc. which arise by corrosion of a metal part can be suppressed, the lifetime of the ion exchange resin 86 can be extended.
Since the aqueous coolant L can be used, an X-ray tube device having excellent cooling performance can be obtained as compared with the case where the coolant is an insulating oil.

  Even when there is a path through which air (oxygen) slightly enters the sealed system of the cooling flow path 3, the joint 6, and the circulation device 5, such as the valve 121, the valve 122, the valve 131, and the valve 132, the gas filling region 82. And the gas filling area | region 91 is satisfy | filled with the inert gas. Needless to say, the gas-filled region 82 and the gas-filled region 91 are not in a vacuum state. Even when there is a slight intrusion of the atmosphere (oxygen) from a path such as the valve 121, the valve 122, the valve 131, and the valve 132, and the invading oxygen is dissolved in the water-based coolant L, the oxygen Since the inert gas is naturally substituted in the gas-filled region 91, an increase in the amount of dissolved oxygen in the aqueous coolant L can be suppressed, and consequently, internal corrosion of the X-ray tube device can be reduced.

The bellows 85 provided in the tank 80 can absorb the expansion and contraction of the aqueous coolant L. For this reason, even if this cooling flow path 3, the joint 6, and the circulation device 5 form a closed system, the leakage of the aqueous coolant L when the aqueous coolant L expands or the shrinkage of the aqueous coolant L occurs. Inhalation of air into the aqueous coolant L can be prevented.
Since the circulation device 5 includes the ion exchange resin filter 86, an increase in ions such as metal ions in the aqueous coolant L can be prevented, and the non-conductivity of the aqueous coolant L can be further maintained.

  From the above, it is possible to reduce internal corrosion due to the aqueous coolant, and to obtain an X-ray tube device that is highly reliable over a long period of time and excellent in cooling performance, and a method for starting up the X-ray tube device.

  Next, an X-ray tube apparatus and a method for starting up the X-ray tube apparatus according to the fourth embodiment will be described in detail. In this embodiment, other configurations are the same as those of the above-described third embodiment, and the same portions are denoted by the same reference numerals and detailed description thereof is omitted. The method for starting up the X-ray tube apparatus is the same as that in the third embodiment, and a detailed description thereof is omitted.

  As shown in FIG. 6, the X-ray tube device includes an X-ray tube 1, a cooling flow path 3 of the X-ray tube 1, an aqueous coolant L, an aqueous coolant circulating device 5, a joint 6, And an inert gas cylinder 7. In this embodiment, an aqueous glycol solution is used as the aqueous coolant L. Here, the anode target 155 is grounded, and a high voltage is applied to the cathode 156. In this embodiment, there is no problem even if the increase of ions in the aqueous coolant L is not prevented, so the circulation device 5 does not have the ion exchange resin filter 86.

  According to the X-ray tube apparatus and the start-up method of the X-ray tube apparatus according to the fourth embodiment configured as described above, the X-ray tube apparatus includes the X-ray tube 1, the cooling flow path 3, and the circulation. And a device 5. The circulation device 5 includes a circulation flow path 30, a circulation pump 100, a tank 80, a case 90, a valve 121, a valve 122, a valve 131, and a valve 132.

  For this reason, the same effect as the above-described third embodiment can be obtained. Further, since the glycol target is used as the aqueous coolant L and the anode target is grounded, the circulation device 5 can be formed without the ion exchange resin filter 86.

  From the above, it is possible to reduce internal corrosion due to the aqueous coolant, and to obtain an X-ray tube device that is highly reliable over a long period of time and excellent in cooling performance, and a method for starting up the X-ray tube device.

  Here, a comparative example of the X-ray tube apparatus according to the above-described first to fourth embodiments will be described. In this comparative example, other configurations are the same as those of the first embodiment described above, and the same parts are denoted by the same reference numerals and detailed description thereof is omitted.

  As shown in FIG. 9, the X-ray tube device includes an X-ray tube 1, a cooling flow path 3 of the X-ray tube 1, an aqueous coolant L, an aqueous coolant circulating device 5, a joint 6, And an inert gas cylinder 7. In this embodiment, pure water is used for the aqueous coolant L. Here, a high voltage is applied to the anode target 155 and the cathode 156 is grounded.

  The circulation device 5 includes not the tank 80 but a tank 89a having an aqueous coolant filling region 81 and an opening, and a lid 89b that closes the opening of the tank 89a. The lid 89b does not airtightly close the opening of the tank 89a. The area surrounded by the tank 89a and the lid 89b is filled with the air in addition to the aqueous coolant L.

  An atmospheric component (oxygen or the like) is dissolved in the aqueous coolant L. For this reason, corrosion of metal parts, such as the circulation flow path 30, the X-ray tube 1, and the cooling flow path 3, is accelerated | stimulated. For this reason, in the comparative example of the X-ray tube apparatus according to the first to fourth embodiments described above, the internal corrosion of the X-ray tube apparatus is caused like the X-ray tube apparatus according to the first to fourth embodiments. It cannot be suppressed.

  Next, an X-ray tube apparatus and a method for starting up the X-ray tube apparatus according to the fifth embodiment will be described in detail. First, the configuration of the X-ray tube apparatus started up by the above-described X-ray tube apparatus start-up method will be described.

  As shown in FIG. 7, the X-ray tube device includes an X-ray tube 1, a cooling flow path 3 of the X-ray tube 1, an aqueous coolant L, a circulating device 5 for the aqueous coolant L, a joint 6, And an inert gas cylinder 7. In this embodiment, an aqueous glycol solution is used as the aqueous coolant L.

As the X-ray tube 1, the X-ray tube 1 shown in the first embodiment can be used. Here, the anode target is grounded and a high voltage is applied to the cathode.
The circulation device 5 circulates the water-based coolant L with the cooling flow path 3 via the airtight joint 6.
Here, the joint 6 includes a hose 11, a hose 12, a connector 13, a connector 14, a plug 15, and a plug 16. A connector 13 is connected to one end of the hose 11 in an airtight manner, and a plug 15 is connected to the other end in an airtight manner. A connector 14 is hermetically connected to one end of the hose 12 and a plug 16 is hermetically connected to the other end. The connector 13 and the connector 14 are hermetically connected to the X-ray tube 1.

  The circulation device 5 includes a housing 20, a circulation flow path 30, an air tray 50 as a bellows mechanism, a heat exchanger 60, a flow sensor 70, a case 90 as a container, a circulation pump 100, and a valve 131. And a valve 132.

  A socket 21 and a socket 22 are attached to the housing 20 in an airtight manner. A plug 15 is airtightly connected to the socket 21. The plug 16 is airtightly connected to the socket 22. The socket 21 and the plug 15 form a coupler 8 as a detachable coupler. The socket 22 and the plug 16 form a coupler 9 as a detachable coupler.

  The circulation channel 30 is communicated with the cooling channel 3 via the joint 6. The circulation flow path 30 accommodates the water-based coolant L and can maintain airtightness. The circulation flow path 30 includes a conduit 41, a conduit 42, a conduit 43 and a conduit 45. The conduit 41 is hermetically connected to the socket 22, and the conduit 45 is hermetically connected to the socket 21. The conduit 41, the conduit 42, the conduit 43, and the conduit 45 are made of a metal such as copper, iron, an iron alloy, or steel. Here, the conduit 42 is made of copper, and the conduit 41, the conduit 43 and the conduit 45 are made of stainless steel.

  The air basin 50 communicates with the circulation channel 30 in an airtight manner. The air basin 50 has a case 51 having an opening 51a. The opening 51 a is in airtight communication with the conduit 41 of the circulation channel 30. The air basin 50 has a bellows 52 that divides the inside of the case 51 into a first region 53 and a second region 54 connected to the opening 51a. The bellows 52 is attached to the case 51 in a liquid-tight manner. The bellows 52 is telescopic. Here, the bellows 52 is formed of rubber. The bellows 52 can absorb the expansion and contraction of the volume of the aqueous coolant L. The bellows 52 is preferably formed of a material that is impermeable to gas.

  The circulation pump 100 is attached to the circulation channel 30 in an airtight manner. Specifically, the circulation pump 100 is hermetically attached to the conduit 41 and the conduit 42. The circulation pump 100 circulates the aqueous coolant L between the circulation device 5 and the cooling flow path 3.

The heat exchanger 60 is formed by a part of the conduit 42 and the fan 62. The aqueous coolant L flowing through the conduit 42 is air-cooled by the fan 62.
The flow sensor 70 is hermetically connected between the conduit 42 and the conduit 43.

  The case 90 is airtightly attached to the circulation channel 30. Specifically, the case 90 is airtightly attached to the conduit 43 and the conduit 45. The case 90 has at least one gas filling region 91 filled with an inert gas, an inert gas inlet 92, and a gas outlet 93. Here, the case 90 has one gas filling region 91. The case 90 can maintain airtightness with the inlet 92 and the outlet 93 closed.

  The case 90 is provided with a hollow fiber membrane as a gas exchange membrane, an inert gas introduction pipe 96, and a gas discharge pipe 97. Here, for example, a hollow fiber membrane filter 94 is used as the hollow fiber membrane.

  The hollow fiber membrane filter 94 is provided in the case 90. The hollow fiber membrane filter 94 has a flow path 95 for the aqueous coolant L formed therein. The hollow fiber membrane filter 94 is for contacting and separating the aqueous coolant L and the inert gas, and has a property of allowing gas to permeate but not allowing the aqueous coolant L to permeate.

  That is, the hollow fiber membrane filter 94 divides the coolant-filled region 98 and the gas-filled region 91 where the water-based coolant L exists, shows impermeability to the water-based coolant L, and is permeable to gas. It is shown. The gas-filled region 91 is filled with an inert gas in a state where the gas-filled region 91 is in contact with and separated from the aqueous coolant L (flow path 95, coolant-filled region 98).

  In this embodiment, since the circulation device 5 includes the hollow fiber membrane filter 94, a membrane deaeration method as a gas replacement method can be adopted. For this reason, in this embodiment, the oxygen gas in the aqueous coolant L is replaced with an inert gas by the membrane degassing method, and the dissolved oxygen in the aqueous coolant L is removed.

  The inert gas introduction pipe 96 is airtightly attached to the introduction port 92. Here, one end of the inert gas introduction pipe 96 is hermetically attached to the introduction port 92, and the other end is drawn out of the housing 20.

  The gas discharge pipe 97 is attached to the discharge port 93 in an airtight manner. Here, one end of the gas discharge pipe 97 is airtightly attached to the discharge port 93, and the other end is drawn out of the housing 20.

  The valve 131 is airtightly attached to the inlet 92 of the case 90. Here, the valve 131 is airtightly attached to the inert gas introduction pipe 96 and is airtightly attached to the introduction port 92 via the inert gas introduction pipe 96. The other side of the valve 131 can be connected to an inert gas cylinder 7. The valve 131 can be switched between an open state in which an inert gas can be introduced from the inert gas cylinder 7 into the gas-filled region 91 and a closed state in which the gas-filled region 91 (case 90) can be kept airtight.

  The valve 132 is airtightly attached to the discharge port 93 of the case 90. Here, the valve 132 is airtightly attached to the gas discharge pipe 97 and is airtightly attached to the discharge port 93 via the gas discharge pipe 97. The other side of the valve 132 is open. The valve 132 can be switched between an open state in which gas can be discharged to the outside from the gas filling region 91 and a closed state in which the airtightness of the tank 80 can be maintained.

  In addition, a vacuum pump may be connected to the other side of the valve 132 as necessary. In this case, by opening the valve 132, the gas-filled region 91 can be evacuated with a vacuum pump.

  Here, the aqueous coolant L will be described. An inert gas is dissolved in the aqueous coolant L. In this embodiment, an inert gas is dissolved in the aqueous coolant L in a saturated state. The oxygen gas dissolved in the aqueous coolant L (pure water) is replaced with an inert gas.

Since the aqueous coolant L has a low dissolved oxygen content, corrosion of metal parts such as the circulation channel 30, the X-ray tube 1 and the cooling channel 3 can be suppressed.
The X-ray tube device is configured as described above.

Next, a method for starting up the X-ray tube apparatus will be described.
First, an X-ray tube device including an X-ray tube 1 and a circulation device 5 is prepared. In the circulation device 5 prepared here, the gas filling region 91 of the case 90 is not filled with the inert gas yet, and is filled with the atmosphere.

  Subsequently, the aqueous coolant L was introduced into the cooling channel 3, the joint 6, and the circulation device 5, and the circulation channel 30 was communicated with the cooling channel 3 via the joint 6, and the aqueous coolant L was introduced. Assemble the X-ray tube device into a module.

  Here, after introducing the water-based coolant L to the cooling flow path 3, the joint 6 and the circulation device 5, the cooling flow path 3 and the circulation flow path 30 are communicated, but the present invention is not limited to this, and various modifications are possible. It is. For example, at the time of maintenance for replacing the tube, the water-based coolant L is introduced only into the cooling flow path 3 of the X-ray tube 1 whose tube has been replaced, and has already been introduced into the joint 6 and the circulation device 5. The aqueous coolant L can be used continuously. Alternatively, in the joint 6 and the circulation device 5, the water-based coolant L may be replaced.

  Next, the circulation pump 100 is operated, and the aqueous coolant L is circulated between the circulation channel 30 and the cooling channel 3. Note that the heat exchanger 60 may not be operated while the circulation pump 100 is operated and the aqueous coolant L is circulated.

  Thereafter, the valve 131 and the valve 132 are each opened while the circulation of the aqueous coolant L is maintained. Here, the valve 131 and the valve 132 are respectively switched from the closed state to the open state.

  Then, an inert gas is caused to flow from the inert gas cylinder 7 connected to the valve 131 to the gas filling region 91 of the case 90 through the valve 131, the inert gas introduction pipe 96 and the introduction port 92. The hollow fiber membrane filter 94 can contact-separate the aqueous coolant L and the inert gas, dissolve the inert gas in the aqueous coolant L, and remove dissolved oxygen.

  Thereby, the inert gas and oxygen gas in the gas filling region 91 are discharged to the outside through the discharge port 93, the gas discharge pipe 97 and the valve 132. And the gas filling area | region 91 will be gradually filled with an inert gas.

  At this time, the amount of dissolved oxygen in the aqueous coolant L can be reduced by flowing an inert gas through the gas-filled region 91 for a certain period. Here, the above-mentioned fixed period is, for example, a period until the inert gas is dissolved in the aqueous coolant L to a saturation value.

The certain period may be shorter than the period until the inert gas is dissolved in the aqueous coolant L to the saturation value. That is, it may be a period in which the inert gas does not dissolve in the aqueous coolant L to the saturation value. In this case, the inert gas may be introduced to such an extent that the gas filling region 91 is filled with the inert gas, whereby the amount of dissolved oxygen in the aqueous coolant L can be gradually reduced.
Further, as described above, the period during which the inert gas flows through the gas-filled region 91 may overlap with the period during which the aqueous coolant L is circulated.

  Subsequently, the flow of the inert gas to the gas filling region 91 is stopped, and the valves 131 and 132 are respectively switched to the closed state. For this reason, the airtightness of the case 90 can be maintained. Thereby, start-up of the X-ray tube apparatus is completed.

  Here, before the inert gas is allowed to flow through the gas filling region 91, the gas filling region 91 may be further evacuated. For example, the gas-filled region 91 may be further evacuated after the aqueous coolant L is circulated and before the inert gas is allowed to flow through the gas-filled region 91. In this case, the valve 132 is opened while the circulation of the aqueous coolant L is maintained, and the gas-filled region 91 is evacuated for a certain period through the valve 132, the gas discharge pipe 97 and the discharge port 93 using a vacuum pump. To do.

  Then, after the gas-filled region 91 is evacuated, the valve 132 is switched to a closed state and the evacuation is stopped. As a result, it is possible to shorten the discharge time of oxygen and the dissolved oxygen of the aqueous coolant L to the outside in the gas-filled region 91 and the time for flowing the inert gas.

  The X-ray tube apparatus startup method may be performed after the X-ray tube apparatus is assembled into a module for the first time, or during maintenance of the X-ray tube apparatus such as tube replacement, and is not always required. Thereby, the state where the amount of dissolved oxygen of the aqueous coolant L is low can be maintained after the start-up.

  According to the X-ray tube apparatus and the startup method of the X-ray tube apparatus according to the fifth embodiment configured as described above, the X-ray tube apparatus includes the X-ray tube 1, the cooling flow path 3, and the circulation. And a device 5. The circulation device 5 includes a circulation flow path 30, a circulation pump 100, a case 90, a valve 131, and a valve 132.

  The amount of dissolved oxygen in the aqueous coolant L can be reduced by the membrane degassing method. For this reason, the oxygen gas in the aqueous coolant L can be removed at low cost. Moreover, corrosion of metal parts, such as the circulation flow path 30, the X-ray tube 1, and the cooling flow path 3, can be suppressed. Even when the metal portion is made of a material mainly composed of copper which is easily corroded, the occurrence of corrosion can be suppressed. That is, internal corrosion of the X-ray tube apparatus due to the aqueous coolant L can be reduced. Since defects caused by corrosion such as formation of holes in the anode target can be reduced, an X-ray tube apparatus having high reliability over a long period of time and a long product life can be obtained.

Since the aqueous coolant L can be used, an X-ray tube device having excellent cooling performance can be obtained as compared with the case where the coolant is an insulating oil.
Even when there is a path through which air (oxygen) slightly enters the sealed system of the cooling flow path 3, the joint 6, and the circulation device 5, such as the valve 131 and the valve 132, the gas filling region 91 is filled with an inert gas. Has been. Needless to say, the gas-filled region 91 is not in a vacuum state. Even when there is a slight intrusion of the atmosphere (oxygen) from the path such as the valve 131 and the valve 132, and the invading oxygen is dissolved in the aqueous coolant L, the oxygen naturally becomes an inert gas in the gas-filled region 91. Since it is replaced, it is possible to suppress an increase in the amount of dissolved oxygen in the aqueous coolant L, thereby reducing internal corrosion of the X-ray tube device.

  The air basin 50 can absorb the expansion and contraction of the volume of the aqueous coolant L. For this reason, even if this cooling flow path 3, the joint 6, and the circulation device 5 form a closed system, the leakage of the aqueous coolant L when the aqueous coolant L expands or the shrinkage of the aqueous coolant L occurs. Inhalation of air into the aqueous coolant L can be prevented.

  From the above, it is possible to reduce internal corrosion due to the aqueous coolant, and to obtain an X-ray tube device that is highly reliable over a long period of time and excellent in cooling performance, and a method for starting up the X-ray tube device.

  Next, an X-ray tube apparatus and a method for starting up the X-ray tube apparatus according to the sixth embodiment will be described in detail. In this embodiment, other configurations are the same as those of the above-described fifth embodiment, and the same reference numerals are given to the same portions, and detailed description thereof is omitted. The method for starting up the X-ray tube apparatus is the same as that in the fifth embodiment, and a detailed description thereof is omitted.

  As shown in FIG. 8, the X-ray tube device includes an X-ray tube 1, a cooling flow path 3 of the X-ray tube 1, an aqueous coolant L, an aqueous coolant circulating device 5, a joint 6, And an inert gas cylinder 7. In this embodiment, pure water is used for the aqueous coolant L. Here, a high voltage is applied to the anode target, and the cathode is grounded.

The circulation flow path 30 further includes a conduit 44, a hose 46, a hose 47, a coupler 48 as a coupler, and a coupler 49 as a coupler. The conduit 43 and the hose 46 are hermetically connected via a coupler 48 as a detachable coupler. The conduit 44 and the hose 47 are airtightly connected via a coupler 49 as a detachable connector.
The case 90 is airtightly attached to the conduit 44 and the conduit 45.

  The tank 80 is airtightly attached to the circulation flow path 30. Specifically, the tank 80 is airtightly attached to the hose 46 and the hose 47. The tank 80 has a water-based coolant filling region 81 that is filled with the water-based coolant L. The tank 80 is formed liquid-tight.

  The tank 80 is provided with an ion exchange resin filter 86 as an ion exchange resin.

  The ion exchange resin filter 86 is provided inside the tank 80. The ion exchange resin filter 86 is immersed in the aqueous coolant L. Here, the ion exchange resin filter 86 is attached to the tip of the hose 46, and the water-based coolant L generated when metal parts such as the circulation channel 30, the X-ray tube 1 and the cooling channel 3 are corroded. An increase in conductivity can be suppressed. Thereby, the non-conductivity of the aqueous coolant L which is pure water can be maintained, and electrical defects such as discharge generated in the X-ray tube 1 can be suppressed.

  According to the X-ray tube apparatus and the start-up method of the X-ray tube apparatus according to the sixth embodiment configured as described above, the X-ray tube apparatus includes the X-ray tube 1, the cooling flow path 3, and the circulation. And a device 5. The circulation device 5 includes a circulation flow path 30, a circulation pump 100, a tank 80, a case 90, a valve 131, and a valve 132.

  For this reason, the same effect as the fifth embodiment described above can be obtained. Since generation of metal ions and the like caused by corrosion of the metal portion can be suppressed, an increase in the conductivity of the aqueous coolant L can be suppressed, and the non-conductivity of the aqueous coolant L that is pure water can be maintained. be able to.

  Furthermore, since the circulation device 5 includes the ion exchange resin filter 86, it is possible to prevent an increase in ions such as metal ions in the aqueous coolant L, and to further maintain the non-conductivity of the aqueous coolant L. can do.

  From the above, it is possible to reduce internal corrosion due to the aqueous coolant, and to obtain an X-ray tube device that is highly reliable over a long period of time and excellent in cooling performance, and a method for starting up the X-ray tube device.

  Here, comparative examples of the X-ray tube apparatuses according to the fifth and sixth embodiments described above will be described. In this comparative example, other configurations are the same as those of the fifth embodiment described above, and the same parts are denoted by the same reference numerals and detailed description thereof is omitted.

  As shown in FIG. 10, the X-ray tube device includes an X-ray tube 1, a cooling flow path 3 of the X-ray tube 1, an aqueous coolant L, a circulating device 5 for the aqueous coolant L, a joint 6, And an inert gas cylinder 7. In this embodiment, an aqueous glycol solution is used as the aqueous coolant L. Here, the anode target is grounded and a high voltage is applied to the cathode. The circulation device 5 does not have the case 90.

  An atmospheric component (oxygen or the like) is dissolved in the aqueous coolant L. For this reason, corrosion of metal parts, such as the circulation flow path 30, the X-ray tube 1, and the cooling flow path 3, is accelerated | stimulated. For this reason, in the comparative example of the X-ray tube apparatus according to the fifth and sixth embodiments described above, the internal corrosion of the X-ray tube apparatus is caused like the X-ray tube apparatus according to the fifth and sixth embodiments. It cannot be suppressed.

  Next, an X-ray tube apparatus and a method for starting up the X-ray tube apparatus according to the seventh embodiment will be described in detail. In this embodiment, other configurations are the same as those of the above-described fifth embodiment, and the same reference numerals are given to the same portions, and detailed description thereof is omitted. The method for starting up the X-ray tube apparatus is the same as that in the fifth embodiment, and a detailed description thereof is omitted.

  As shown in FIG. 11, the X-ray tube device includes an X-ray tube 1, a cooling flow path 3 of the X-ray tube 1, an aqueous coolant L, an aqueous coolant circulating device 5, a joint 6, And an inert gas cylinder 7. In this embodiment, an aqueous glycol solution is used as the aqueous coolant L. An inert gas is dissolved in the aqueous coolant L. In this embodiment, an inert gas is dissolved in the aqueous coolant L in a saturated state. The oxygen gas dissolved in the aqueous coolant L (pure water) is replaced with an inert gas.

  The circulation device 5 includes a case 200 as a container and a bellows 210 as a bellows mechanism. Case 200 communicates with case 90 in an airtight manner. The bellows 210 is attached to the case 200 in an airtight manner. Bellows 210 is telescopic. The bellows 210 is impermeable to gas. The shape of the bellows 210 is not particularly limited. The bellows 210 may be, for example, a rubber balloon. The bellows 210 is preferably formed of a material that does not easily transmit gas, that is, a material that is impermeable to gas. The bellows 210 is preferably formed by coating the surface with a gas barrier film such as an amorphous carbon film. The bellows 52 can be similarly formed using the same material as the bellows 210.

  The case 200 and the bellows 210 together with the case 90 define the gas filling region 91. The volume of the gas-filled region 91 defined by the case 90, the case 200, and the bellows 210 is 25% or more of the total volume of the coolant-filled region where the water-based coolant L is present.

  Here, there is a slight intrusion of air (oxygen) from the outside from somewhere in the closed system during use, and even if the invading oxygen is dissolved in the aqueous coolant L, the oxygen is inactive in the gas-filled region 91. A mechanism that is naturally substituted with gas and that can suppress an increase in the amount of dissolved oxygen in the aqueous coolant L will be described.

  The gas filling region 91 and the coolant filling region 98 are in contact with each other through a gas permeable film. Focusing on oxygen that causes metal corrosion as a gas, assuming that the oxygen partial pressure in the gas-filled region 91 is P and the amount of oxygen dissolved in the entire coolant-filled region is n, according to Henry's law, The following formula is established.

n = P / K ・ R ・ T
Here, T is an absolute temperature, R is a gas constant, and K is an equilibrium constant at temperature T.

Thus, it can be seen that the amount of oxygen n dissolved in the entire coolant-filled region is proportional to the oxygen partial pressure P in the gas-filled region 91.

(When the inert gas is nitrogen)
Next, the case where the inert gas is nitrogen will be described. The volume of the entire coolant filling region (the volume of the total water-based coolant L) is V1 [cc], and the volume of the gas filling region 91 is V2 [cc]. It is assumed that the gas-filled region 91 is initially filled with nitrogen gas, and the all-water-based coolant L is initially dissolved in a saturated state.

  The cooling flow path 3, the joint 6 and the circulation device 5 are closed systems, but there is a possibility that air is mixed into the closed system as described below.

(1) There is a slight leak point somewhere in the closed system, and air gradually enters the closed system from there.

(2) Air diffuses through the resin parts and gradually enters the sealed system.

(3) A slight amount of air is mixed when connecting pipes.

  In addition, the total amount of air that has entered the aqueous coolant L at a certain point in time is defined as N [cc]. Since the partial pressure of oxygen in the air is 1/5 atm, the oxygen amount is n = N / 5 [cc]. The remaining 4N / 5 [cc] is nitrogen, but since nitrogen gas is already dissolved in the saturated state in the aqueous coolant L, it does not dissolve and exists as bubbles. Oxygen is once dissolved in the coolant, but a part of the oxygen is released as a gas into the gas-filled region according to Henry's law, and the equilibrium is maintained.

  Let Δn [cc] be the amount of oxygen dissolved in the total aqueous coolant in the equilibrium state. Here, assuming that the water coolant L is pure water or an aqueous glycol solution, the equilibrium dissolution amount of oxygen when in contact with 1 atmosphere of oxygen is about 0.025 per 1 [cc] of the water-based coolant L. [Cc]. Then, the following formula is established from Henry's law.

Δn = 0.025V1 (n−Δn) / (V2 + n−Δn)
And considering the fact that V1, V2 << n, solving the above equation for Δn,
Δn / n = 0.025V1 / V2
It becomes.

  From this equation, Δn / n <0.1, that is, in order to make the ratio of invading oxygen dissolved in the aqueous coolant L 10% or less, the volume V2 of the gas-filled region 91 is set to the volume of the entire coolant-filled region. It can be seen that it should be 25% or more of V1.

(When the inert gas is other than nitrogen)
Next, the case where the inert gas is other than nitrogen will be described. The total amount of air that has entered the aqueous coolant L at a certain time is defined as n [cc]. Initially, since nitrogen gas and oxygen gas are not dissolved in the aqueous coolant L, the air is once dissolved in the aqueous coolant L, but a part of the gas is gas in the gas-filled region according to Henry's law. Released and kept in equilibrium.

  Let Δn [cc] be the amount of air dissolved in the coolant-filled region in the equilibrium state. Here, when the aqueous coolant L is pure water or an aqueous glycol solution, the equilibrium dissolution amount of air when in contact with 1 atmosphere of air is approximately 0.025 [1] for each [cc] of the aqueous coolant L. cc]. Then, from Henry's law, the same formula is established as when the inert gas is nitrogen. In order to make Δn / n <0.1, that is, the ratio of the invading oxygen dissolved in the aqueous coolant L to 10% or less, the volume V2 of the gas-filled region 91 is 25% of the volume V1 of the entire coolant-filled region. You can see that this is what you need to do.

  According to the X-ray tube apparatus and the startup method of the X-ray tube apparatus according to the seventh embodiment configured as described above, the X-ray tube apparatus includes the X-ray tube 1, the cooling flow path 3, and the circulation. And a device 5. The circulation device 5 includes a circulation flow path 30, a circulation pump 100, a case 90, a valve 131, and a valve 132. For this reason, the same effect as the fifth embodiment described above can be obtained.

  The circulation device 5 includes a case 200 and a bellows 210. The volume V2 of the gas filling area 91 is 25% or more of the volume V1 of the entire cooling liquid filling area. For this reason, the dissolved oxygen in the aqueous coolant L can be removed at a low cost. In addition, even when there is a route through which oxygen enters slightly in the closed system, oxygen is automatically removed in the space filled with the inert gas and in contact with the aqueous coolant. Can be reduced. In addition, even when only the X-ray tube 1 is replaced, it is possible to easily carry out the work of removing dissolved oxygen from the water-based coolant L at the site where the apparatus is installed, thereby shortening the stop time of the apparatus. It becomes possible to do.

  Before flowing the inert gas through the gas-filled region 91, the gas-filled region 91 may be evacuated. As a result, the time required to start up the X-ray tube apparatus can be shortened by the amount of time for expelling dissolved oxygen in the aqueous coolant L that flows by flowing an inert gas. That is, the time for flowing the inert gas can be set to the time for which the inert gas is dissolved to the saturation value. For this reason, the volume of the inert gas dissolved in saturation, the bellows 210 only needs to be expanded, and it is not necessary to keep the inert gas flowing. In that case, it is also possible to start the operation of the X-ray tube apparatus without waiting for the inert gas to dissolve to the saturation value.

  The inert gas cylinder 7 is always connected to the valve 131, and it is not necessary to keep the inert gas flowing through the gas filling region 91. At least after the X-ray tube apparatus is assembled into a module and before the apparatus is operated, deoxidation treatment may be performed using an inert gas cylinder 7. Further, it may be additionally performed at regular maintenance inspections. The same applies when a vacuum pump is used.

  From the above, it is possible to reduce internal corrosion due to the aqueous coolant, and to obtain an X-ray tube device that is highly reliable over a long period of time and excellent in cooling performance, and a method for starting up the X-ray tube device.

  Next, an X-ray tube apparatus and an X-ray tube apparatus startup method according to the eighth embodiment will be described in detail. In this embodiment, other configurations are the same as those of the above-described sixth embodiment, and the same portions are denoted by the same reference numerals and detailed description thereof is omitted. The method for starting up the X-ray tube apparatus is the same as that in the sixth embodiment, and a detailed description thereof will be omitted.

  As shown in FIG. 12, the X-ray tube device includes an X-ray tube 1, a cooling flow path 3 of the X-ray tube 1, an aqueous coolant L, a circulating device 5 for the aqueous coolant L, a joint 6, And an inert gas cylinder 7. In this embodiment, an aqueous glycol solution is used as the aqueous coolant L. An inert gas is dissolved in the aqueous coolant L. In this embodiment, an inert gas is dissolved in the aqueous coolant L in a saturated state. The oxygen gas dissolved in the aqueous coolant L (pure water) is replaced with an inert gas. Here, the anode target 155 is grounded, and a high voltage is applied to the cathode 156.

  In this embodiment, the circulation device 5 does not include the case 90. The circulation device 5 includes a case 200 as a container and a bellows 210 as a bellows mechanism. The case 200 communicates with the case 51 in an airtight manner. The bellows 210 is attached to the case 200 in an airtight manner. Bellows 210 is telescopic. The bellows 210 is impermeable to gas. The shape of the bellows 210 is not particularly limited. The bellows 210 is preferably formed of a material that is impermeable to gas.

  The case 200 and the bellows 210 together with the case 51 define the second region 54 (gas full region). The volume of the second region 54 (gas-filled region) divided by the case 51, the case 200, and the bellows 210 is 25% or more of the total volume of the coolant-filled region where the water-based coolant L is present.

  The bellows 52 divides the first region 53 (coolant-filled region) and the second region 54 (gas-filled region) where the water-based coolant L exists, and is impervious to the water-based coolant L. It shows permeability to it.

  The case 200 has an inert gas inlet 201 and a gas outlet 202. The case 200 can maintain airtightness with the inlet 201 and the outlet 202 closed. The case 200 is provided with an inert gas introduction pipe 221 and a gas discharge pipe 222.

  The inert gas introduction pipe 221 is airtightly attached to the introduction port 201. Here, one end of the inert gas introduction pipe 221 is airtightly attached to the introduction port 201, and the other end is drawn out to the outside of the housing 20.

  The gas discharge pipe 222 is airtightly attached to the discharge port 202. Here, one end of the gas discharge pipe 222 is attached to the discharge port 202 in an airtight manner, and the other end is drawn to the outside of the housing 20.

  The valve 231 is airtightly attached to the inlet 201 of the case 200. Here, the valve 231 is airtightly attached to the inert gas introduction pipe 221 and is airtightly attached to the introduction port 201 via the inert gas introduction pipe 221. The other side of the valve 231 can be connected to the inert gas cylinder 7. The valve 231 can maintain the open state in which the inert gas can be introduced from the inert gas cylinder 7 into the gas filling region (second region 54) and the gas tightness of the gas filling region (case 51, case 200, and bellows 210). Switching to the closed state is possible.

  The valve 232 is airtightly attached to the discharge port 202 of the case 200. Here, the valve 232 is airtightly attached to the gas discharge pipe 222 and is airtightly attached to the discharge port 202 via the gas discharge pipe 222. The other side of the valve 232 is open. The valve 232 has an open state in which gas can be discharged to the outside from the gas filling region (second region 54) and a closed state in which the gas tightness of the gas filling region (case 51, case 200 and bellows 210) can be maintained. Switching is possible.

  In addition, a vacuum pump may be connected to the other side of the valve 232 as necessary. In this case, the gas-filled region can be evacuated with a vacuum pump by opening the valve 232.

  According to the X-ray tube apparatus and the startup method of the X-ray tube apparatus according to the eighth embodiment configured as described above, the X-ray tube apparatus includes the X-ray tube 1, the cooling flow path 3, and the circulation. And a device 5. The circulation device 5 includes a circulation flow path 30, a circulation pump 100, a tank 80, a valve 231, and a valve 232.

  For this reason, the substantially same effect as the sixth embodiment described above can be obtained. Since generation of metal ions and the like caused by corrosion of the metal portion can be suppressed, an increase in the conductivity of the aqueous coolant L can be suppressed, and the non-conductivity of the aqueous coolant L that is pure water can be maintained. be able to.

  The circulation device 5 includes a case 200 and a bellows 210. The volume V2 of the gas filling area 91 is 25% or more of the volume V1 of the entire cooling liquid filling area. For this reason, the same effect as the seventh embodiment described above can be obtained.

  From the above, it is possible to reduce internal corrosion due to the aqueous coolant, and to obtain an X-ray tube device that is highly reliable over a long period of time and excellent in cooling performance, and a method for starting up the X-ray tube device.

  Next, an X-ray tube apparatus and a startup method for the X-ray tube apparatus according to the ninth embodiment will be described in detail. In this embodiment, other configurations are the same as those of the first embodiment described above, and the same parts are denoted by the same reference numerals and detailed description thereof is omitted. The method for starting up the X-ray tube apparatus is the same as that in the first embodiment, and a detailed description thereof is omitted.

  As shown in FIG. 13, the X-ray tube device includes an X-ray tube 1, a cooling flow path 3 of the X-ray tube 1, an aqueous coolant L, a circulating device 5 for the aqueous coolant L, a joint 6, And an inert gas cylinder 7. In this embodiment, an aqueous glycol solution is used as the aqueous coolant L. An inert gas is dissolved in the aqueous coolant L. In this embodiment, an inert gas is dissolved in the aqueous coolant L in a saturated state. The oxygen gas dissolved in the aqueous coolant L (pure water) is replaced with an inert gas. Here, the anode target 155 is grounded, and a high voltage is applied to the cathode 156.

  In this embodiment, the circulation device 5 includes a case 200 as a container and a bellows 210 as a bellows mechanism. The case 200 communicates with the tank 80 in an airtight manner. The bellows 210 is attached to the case 200 in an airtight manner. Bellows 210 is telescopic. The bellows 210 is impermeable to gas. The shape of the bellows 210 is not particularly limited. The bellows 210 is preferably formed of a material that is impermeable to gas.

  The case 200 and the bellows 210 together with the tank 80 define a gas full area 82. The volume of the gas-filled region 82 defined by the tank 80, the case 200, and the bellows 210 is 25% or more of the entire volume of the coolant-filled region where the water-based coolant L is present.

  According to the X-ray tube apparatus and the startup method of the X-ray tube apparatus according to the ninth embodiment configured as described above, the X-ray tube apparatus includes the X-ray tube 1, the cooling flow path 3, and the circulation. And a device 5. The circulation device 5 includes a circulation flow path 30, a circulation pump 100, a tank 80, a valve 121, and a valve 122.

  For this reason, substantially the same effect as that of the first embodiment described above can be obtained. Since generation of metal ions and the like caused by corrosion of the metal portion can be suppressed, an increase in the conductivity of the aqueous coolant L can be suppressed, and the non-conductivity of the aqueous coolant L that is pure water can be maintained. be able to.

  The circulation device 5 includes a case 200 and a bellows 210. As in this embodiment, the case 200 and the bellows 210 may define a gas-filled region 82 that is contact-separated from the aqueous coolant L. The volume V2 of the gas filling area 91 is 25% or more of the volume V1 of the entire cooling liquid filling area. For this reason, the same effect as the seventh and eighth embodiments described above can be obtained.

  From the above, it is possible to reduce internal corrosion due to the aqueous coolant, and to obtain an X-ray tube device that is highly reliable over a long period of time and excellent in cooling performance, and a method for starting up the X-ray tube device.

  Next, an X-ray tube device, a startup method of the X-ray tube device, and a maintenance method of the X-ray tube device according to the tenth embodiment will be described in detail. In this embodiment, other configurations are the same as those of the first embodiment described above, and the same parts are denoted by the same reference numerals and detailed description thereof is omitted.

  As shown in FIG. 14, the X-ray tube device includes an X-ray tube 1, a cooling flow path 3 of the X-ray tube 1, an aqueous coolant L, a circulating device 5 for the aqueous coolant L, a joint 6, And an inert gas cylinder 7. In this embodiment, pure water is used for the aqueous coolant L.

  The X-ray tube apparatus includes an oxygen scavenger 310, an oxygen detector 320, a holding member 330, and a viewing window 340. The oxygen scavenger 310 is installed in the gas filling region 82 and removes oxygen present in the gas filling region 82 by an oxidation reaction. The oxygen scavenger 310 is generally used in food packaging. As the oxygen scavenger 310, a type that absorbs oxygen by utilizing oxidation of iron is the mainstream. As the oxygen scavenger 310, for example, AGELESS manufactured and sold by Mitsubishi Gas Chemical Co., Ltd. or Wonder Keep of Powder Tech Co., Ltd. can be used.

  The oxygen detecting agent 320 is installed in the gas filling region 82 and changes its color tone in response to oxygen present in the gas filling region 82. By using the oxygen detection agent 320, the oxygen concentration in the gas filling region 82 can be easily monitored. The oxygen detector 320 is also generally used in food packaging. As the oxygen detection agent 320, for example, Ageless Eye manufactured and sold by Mitsubishi Gas Chemical Co., Ltd., a Wonder sensor manufactured by Powder Tech Co., Ltd., or the like can be used.

  The holding member 330 is fixed to the tank 80 and is located in the gas filling region 82. The oxygen scavenger 310 and the oxygen detector 320 are held by a holding member 330. The holding member 330 is excellent in air permeability and is formed so as to hold the oxygen scavenger 310 and the oxygen detector 320. The shape of the holding member 330 is not particularly limited, but may be, for example, a mesh shape or a lattice shape.

  The viewing window 340 is airtightly attached to the tank 80 so as to airtightly close the opening of the tank 80. The viewing window 340 is for confirming the color tone of the oxygen detection agent 320 from the outside. In other words, the color tone of the oxygen detection agent 320 can be confirmed from the outside of the tank 80 through the observation window 340 that is airtightly attached to the tank 80. In this embodiment, the observation window 340 also serves as an openable / closable door for taking in and out the oxygen scavenger 310 and the oxygen detector 320.

When the viewing window 340 is attached to the tank 80, the viewing window 340 can be screwed to the tank 80 via an O-ring, for example.
The X-ray tube device is configured as described above.

Next, a method for starting up the X-ray tube apparatus will be described.
First, an X-ray tube device including an X-ray tube 1 and a circulation device 5 is prepared. In the circulation device 5 prepared here, the gas filling region 82 of the tank 80 is not filled with the inert gas yet, and is filled with the atmosphere.

  Subsequently, the aqueous coolant L was introduced into the cooling channel 3, the joint 6, and the circulation device 5, and the circulation channel 30 was communicated with the cooling channel 3 via the joint 6, and the aqueous coolant L was introduced. Assemble the X-ray tube device into a module.

  Here, after introducing the water-based coolant L to the cooling flow path 3, the joint 6 and the circulation device 5, the cooling flow path 3 and the circulation flow path 30 are communicated, but the present invention is not limited to this, and various modifications are possible. It is. For example, at the time of maintenance for replacing the tube, the water-based coolant L is introduced only into the cooling flow path 3 of the X-ray tube 1 whose tube has been replaced, and has already been introduced into the joint 6 and the circulation device 5. The aqueous coolant L can be used continuously. Alternatively, in the joint 6 and the circulation device 5, the water-based coolant L may be replaced.

  Next, the circulation pump 100 is operated, and the aqueous coolant L is circulated between the circulation channel 30 and the cooling channel 3. Note that the heat exchanger 60 may not be operated while the circulation pump 100 is operated and the aqueous coolant L is circulated.

  Thereafter, with the circulation of the aqueous coolant L maintained, the valve 121 and the valve 122 are opened. Here, the valve 121 and the valve 122 are respectively switched from the closed state to the open state. Then, an inert gas is allowed to flow from the inert gas cylinder 7 connected to the valve 121 to the gas filling region 82 of the tank 80 through the valve 121, the inert gas introduction pipe 87 and the introduction port 83 by the gas bubbling method. The dissolved oxygen in the liquid L is removed. Since the discharge port 87a of the inert gas introduction pipe 87 is submerged in the aqueous coolant L, the inert gas can be introduced into the gas filling region 82 after bubbling through the aqueous coolant L. .

  As a result, the inert gas dissolves in the aqueous coolant L and dissolved oxygen can be efficiently removed. The inert gas and oxygen gas in the gas filling region 82 are discharged to the outside through the discharge port 84, the gas discharge pipe 88 and the valve 122. And the gas filling area | region 82 will be gradually filled with an inert gas.

  At this time, the amount of dissolved oxygen in the aqueous coolant L can be reduced by flowing an inert gas through the gas-filled region 82 for a certain period. Here, the above-mentioned fixed period is, for example, a period until the inert gas is dissolved in the aqueous coolant L to a saturation value.

The certain period may be shorter than the period until the inert gas is dissolved in the aqueous coolant L to the saturation value. That is, it may be a period in which the inert gas does not dissolve in the aqueous coolant L to the saturation value. In this case, the inert gas may be introduced to such an extent that the gas filling region 82 is filled with the inert gas, more preferably, the bellows 85 is expanded by the inert gas, and thereby the aqueous coolant L is dissolved. The amount of oxygen can be gradually reduced.
Further, as described above, the period during which the inert gas flows through the gas-filled region 82 only needs to overlap with the period during which the aqueous coolant L is circulated.

  Further, after the amount of dissolved oxygen in the aqueous coolant L is reduced and before the flow of the inert gas to the gas filling region 82 is stopped (before the valves 121 and 122 are switched to the closed state). The observation window 340 is removed from the tank 80, and the oxygen scavenger 310 and the oxygen detector 320 are quickly installed in the gas filling region 82. When installing, the oxygen absorber 310 and the oxygen detector 320 are disposed on the holding member 330. Thereafter, the viewing window 340 is airtightly attached to the tank 80, and the flow of the inert gas to the gas filling region 82 is continued for a while to expel air (oxygen) brought into the gas filling region 82 from the outside.

  Subsequently, the flow of the inert gas to the gas filling region 82 is stopped, and the valve 121 and the valve 122 are respectively switched to the closed state. For this reason, the airtightness of the tank 80 can be maintained. Thereby, start-up of the X-ray tube apparatus is completed.

  Here, before the inert gas is allowed to flow through the gas-filled region 82, the gas-filled region 82 may be further evacuated. For example, the gas-filled region 82 may be further evacuated after the aqueous coolant L is circulated and before the inert gas is allowed to flow through the gas-filled region 82. In this case, with the circulation of the aqueous coolant L maintained, the valve 122 is opened, and a vacuum pump is used to evacuate the gas-filled region 82 through the valve 122, the gas discharge pipe 88 and the discharge port 84 for a certain period. To do. Then, after the gas-filled region 82 is evacuated, the valve 122 is switched to a closed state, and the evacuation is stopped. As a result, it is possible to shorten the time for discharging oxygen and the dissolved oxygen in the water-based coolant L to the outside in the gas-filled region 82 and the time for flowing the inert gas.

  The X-ray tube apparatus startup method may be performed after the X-ray tube apparatus is assembled into a module for the first time, or during maintenance of the X-ray tube apparatus such as tube replacement, and is not always required. Thereby, the state where the amount of dissolved oxygen of the aqueous coolant L is low can be maintained after the start-up.

Next, a maintenance method for the X-ray tube apparatus in use (after operation) will be described below.
First, an X-ray tube device in use (after operation) is prepared. In the circulation device 5 prepared here, an inert gas is dissolved in the aqueous coolant L. In the water-based coolant L, an inert gas may be dissolved in a saturated state.

  Next, the valve 121 and the valve 122 are opened, and an inert gas is allowed to flow through the gas filling region 82. Thereafter, the flow of the inert gas is stopped, and the valve 121 and the valve 122 are respectively switched to the closed state, and the airtightness of the tank 80 is maintained.

  Further, in the maintenance method for the X-ray tube apparatus, when it is confirmed that the color tone of the oxygen detecting agent 320 has changed in response to oxygen through the viewing window 340, the flow of the inert gas to the gas filling region 82 is stopped. It is also effective to replace at least one of the oxygen scavenger 310 and the oxygen detector 320 with an unused product before that. The time for replacement may be any time before the inert gas starts flowing in the gas-filled region 82 and during the period when the inert gas flows in the gas-filled region 82. By using the maintenance method for the X-ray tube apparatus, for example, the product life of the X-ray tube apparatus can be extended.

  According to the X-ray tube apparatus, the startup method of the X-ray tube apparatus, and the maintenance method of the X-ray tube apparatus according to the tenth embodiment configured as described above, the X-ray tube apparatus includes the X-ray tube 1 and The cooling channel 3 and the circulation device 5 are provided. The circulation device 5 includes a circulation flow path 30, a circulation pump 100, a tank 80, a valve 121, and a valve 122.

  Since the oxygen scavenger 310 is installed in the gas filled region 82, oxygen present in the gas filled region 82 can be removed by an oxidation reaction. Since the oxygen detection agent 320 is installed in the gas filling region 82, the oxygen concentration in the gas filling region 82 can be easily monitored.

  By the gas bubbling method, the amount of dissolved oxygen in the aqueous coolant L can be reduced. For this reason, the oxygen gas in the aqueous coolant L can be removed at low cost. Moreover, corrosion of metal parts, such as the circulation flow path 30, the X-ray tube 1, and the cooling flow path 3, can be suppressed. Even when the metal portion is made of a material mainly composed of copper which is easily corroded, the occurrence of corrosion can be suppressed. That is, internal corrosion of the X-ray tube apparatus due to the aqueous coolant L can be reduced. Since defects caused by corrosion such as formation of holes in the anode target 155 can be reduced, an X-ray tube apparatus having high reliability over a long period of time and a long product life can be obtained.

Moreover, since generation | occurrence | production of the metal ion etc. which arise by corrosion of a metal part can be suppressed, the lifetime of the ion exchange resin 86 can be extended.
Since the aqueous coolant L can be used, an X-ray tube device having excellent cooling performance can be obtained as compared with the case where the coolant is an insulating oil.

  Even when there is a path through which air (oxygen) slightly enters the sealed system of the cooling flow path 3, the joint 6, and the circulation device 5, such as the valve 121 and the valve 122, the gas filling region 82 is filled with an inert gas. Has been. Needless to say, the gas-filled region 82 is not in a vacuum state. Even if there is a slight intrusion of the atmosphere (oxygen) from the path such as the valve 121 and the valve 122 and the invading oxygen is dissolved in the aqueous coolant L, the oxygen is naturally replaced with an inert gas in the gas-filled region 82. Therefore, an increase in the amount of dissolved oxygen in the aqueous coolant L can be suppressed, and as a result, internal corrosion of the X-ray tube device can be reduced.

The bellows 85 provided in the tank 80 can absorb the expansion and contraction of the aqueous coolant L. For this reason, even if this cooling flow path 3, the joint 6, and the circulation device 5 form a closed system, the leakage of the aqueous coolant L when the aqueous coolant L expands or the shrinkage of the aqueous coolant L occurs. Inhalation of air into the aqueous coolant L can be prevented.
Since the circulation device 5 includes the ion exchange resin filter 86, an increase in ions such as metal ions in the aqueous coolant L can be prevented, and the non-conductivity of the aqueous coolant L can be further maintained.

  As described above, the internal corrosion due to the aqueous coolant can be reduced, and the X-ray tube apparatus, the startup method of the X-ray tube apparatus, and the maintenance of the X-ray tube apparatus are reliable over the long term and excellent in cooling performance. You can get the method.

  Next, an X-ray tube device, a startup method of the X-ray tube device, and a maintenance method of the X-ray tube device according to the eleventh embodiment will be described in detail. In this embodiment, other configurations are the same as those of the tenth embodiment described above, and the same reference numerals are given to the same portions, and detailed description thereof is omitted. Further, the startup method of the X-ray tube apparatus and the maintenance method of the X-ray tube apparatus are the same as those in the tenth embodiment, and detailed description thereof is omitted.

  As shown in FIG. 15, the X-ray tube device includes an X-ray tube 1, a cooling flow path 3 of the X-ray tube 1, an aqueous coolant L, a circulating device 5 for the aqueous coolant L, a joint 6, And an inert gas cylinder 7. In this embodiment, an aqueous glycol solution is used as the aqueous coolant L. Here, the anode target 155 is grounded, and a high voltage is applied to the cathode 156. In this embodiment, there is no problem even if the increase of ions in the aqueous coolant L is not prevented, so the circulation device 5 does not have the ion exchange resin filter 86.

  According to the X-ray tube device according to the eleventh embodiment configured as described above, the startup method of the X-ray tube device, and the maintenance method of the X-ray tube device, the X-ray tube device includes the X-ray tube 1 and The cooling channel 3 and the circulation device 5 are provided. The circulation device 5 includes a circulation flow path 30, a circulation pump 100, a tank 80, a valve 121, and a valve 122.

  For this reason, the same effect as the tenth embodiment described above can be obtained. Further, since the glycol target is used as the aqueous coolant L and the anode target is grounded, the circulation device 5 can be formed without the ion exchange resin filter 86.

  From the above, it is possible to reduce internal corrosion due to the aqueous coolant, and to obtain an X-ray tube device that is highly reliable over a long period of time and excellent in cooling performance, and a method for starting up the X-ray tube device.

  Next, an X-ray tube device, a startup method of the X-ray tube device, and a maintenance method of the X-ray tube device according to the twelfth embodiment will be described in detail. In this embodiment, other configurations are the same as those of the tenth embodiment described above, and the same reference numerals are given to the same portions, and detailed description thereof is omitted.

  As shown in FIG. 16, the X-ray tube device includes an X-ray tube 1, a cooling flow path 3 of the X-ray tube 1, an aqueous coolant L, a circulating device 5 for the aqueous coolant L, a joint 6, And an inert gas cylinder 7. In this embodiment, pure water is used for the aqueous coolant L. Here, a high voltage is applied to the anode target 155, and the cathode 156 is grounded.

  The circulation channel 30 further includes a conduit 34. The circulation pump 100 is airtightly attached to the conduit 34 and the conduit 35. The inert gas introduction pipe 87 does not have the discharge port 87a submerged in the aqueous coolant L. One end of the inert gas introduction pipe 87 is airtightly attached to the introduction port 83, and the other end is airtightly attached to the discharge port 93.

The circulation device 5 further includes a case 90 as a container and a valve 131 as a first opening / closing part.
The case 90 is airtightly attached to the circulation channel 30. Specifically, the case 90 is hermetically attached to the conduit 33 and the conduit 34. The case 90 has at least one gas filling region 91 filled with an inert gas, an inert gas inlet 92, and a gas discharge 93. Here, the case 90 has one gas filling region 91. The case 90 can maintain airtightness with the inlet 92 and the outlet 93 closed.

  The case 90 is provided with a hollow fiber membrane as a gas exchange membrane and an inert gas introduction pipe 96. Here, for example, a hollow fiber membrane filter 94 is used as the hollow fiber membrane.

  The hollow fiber membrane filter 94 is provided in the case 90. The hollow fiber membrane filter 94 has a flow path 95 for the aqueous coolant L formed therein. The hollow fiber membrane filter 94 is for contacting and separating the aqueous coolant L and the inert gas, and has a property of allowing gas to permeate but not allowing the aqueous coolant L to permeate. The gas-filled region 91 is filled with an inert gas in a state where the gas-filled region 91 is in contact with and separated from the aqueous coolant L (flow path 95, coolant-filled region 98).

  In this embodiment, since the circulation device 5 includes the hollow fiber membrane filter 94, a membrane deaeration method as a gas replacement method can be adopted. For this reason, in this embodiment, the oxygen gas in the aqueous coolant L is replaced with an inert gas by the membrane degassing method, and the dissolved oxygen in the aqueous coolant L is removed.

  Here, the hollow fiber membrane filter 94 shown in FIG. 16 is the same as the hollow fiber membrane filter shown in FIGS. 5, 6, 7, 8, and 11. In addition, in FIG.5, FIG.6, FIG.7, FIG.8 and FIG. 11, in order to demonstrate the concept of a hollow fiber membrane filter, the simplified hollow fiber membrane filter is shown. In addition, the hollow fiber membrane filter shown in FIGS. 5, 6, 7, 8, and 11 can be rephrased to correspond to an enlarged part of the hollow fiber membrane filter 94 shown in FIG.

  The inert gas introduction pipe 96 is airtightly attached to the introduction port 92. Here, one end of the inert gas introduction pipe 96 is hermetically attached to the introduction port 92, and the other end is drawn out of the housing 20.

  The valve 131 is airtightly attached to the inlet 92 of the case 90. Here, the valve 131 is airtightly attached to the inert gas introduction pipe 96 and is airtightly attached to the introduction port 92 via the inert gas introduction pipe 96. The other side of the valve 131 can be connected to an inert gas cylinder 7. The valve 131 can be switched between an open state in which an inert gas can be introduced from the inert gas cylinder 7 into the gas filling region 91 and the gas filling region 82 and a closed state in which the airtightness of the case 90 can be maintained.

  The valve 122 can be switched between an open state in which gas can be discharged to the outside from the gas filling region 82 and the gas filling region 91 and a closed state in which the airtightness of the tank 80 can be maintained. In addition, a vacuum pump may be connected to the other side of the valve 122 as necessary. In this case, by opening the valve 122, the gas filling region 82 and the gas filling region 91 can be evacuated by a vacuum pump.

Next, a method for starting up the X-ray tube apparatus will be described.
First, an X-ray tube device including an X-ray tube 1 and a circulation device 5 is prepared. In the circulation device 5 prepared here, the gas filling region 82 of the tank 80 and the gas filling region 91 of the case 90 are not filled with the inert gas yet, and are filled with the atmosphere.

  Subsequently, the aqueous coolant L was introduced into the cooling channel 3, the joint 6, and the circulation device 5, and the circulation channel 30 was communicated with the cooling channel 3 via the joint 6, and the aqueous coolant L was introduced. Assemble the X-ray tube device into a module.

  Here, after introducing the water-based coolant L to the cooling flow path 3, the joint 6 and the circulation device 5, the cooling flow path 3 and the circulation flow path 30 are communicated, but the present invention is not limited to this, and various modifications are possible. It is. For example, at the time of maintenance for replacing the tube, the water-based coolant L is introduced only into the cooling flow path 3 of the X-ray tube 1 whose tube has been replaced, and has already been introduced into the joint 6 and the circulation device 5. The aqueous coolant L can be used continuously. Alternatively, in the joint 6 and the circulation device 5, the water-based coolant L may be replaced.

  Next, the circulation pump 100 is operated, and the aqueous coolant L is circulated between the circulation channel 30 and the cooling channel 3. Note that the heat exchanger 60 may not be operated while the circulation pump 100 is operated and the aqueous coolant L is circulated.

  Thereafter, with the circulation of the aqueous coolant L maintained, the valves 122 and 131 are opened. Here, the valve 122 and the valve 131 are respectively switched from the closed state to the open state. Then, an inert gas is caused to flow from the inert gas cylinder 7 connected to the valve 131 to the gas filling region 82 of the tank 80 through the valve 131, the inert gas introduction pipe 96 and the introduction port 92.

  Accordingly, the inert gas and oxygen gas in the gas filling region 82 and the gas filling region 91 are discharged to the outside through the discharge port 84, the gas discharge pipe 88 and the valve 122. At the same time, dissolved oxygen in the aqueous coolant L is removed by the membrane degassing method. The hollow fiber membrane filter 94 can contact-separate the aqueous coolant L and the inert gas, dissolve the inert gas in the aqueous coolant L, and remove dissolved oxygen. For this reason, the gas filling area | region 82 and the gas filling area | region 91 will be gradually filled with an inert gas.

  At this time, the amount of dissolved oxygen in the aqueous coolant L can be reduced by flowing an inert gas through the gas-filled region 82 and the gas-filled region 91 for a certain period. Here, the above-mentioned fixed period is, for example, a period until the inert gas is dissolved in the aqueous coolant L to a saturation value.

The certain period may be shorter than the period until the inert gas is dissolved in the aqueous coolant L to the saturation value. That is, it may be a period in which the inert gas does not dissolve in the aqueous coolant L to the saturation value. In this case, the inert gas may be introduced to such an extent that the gas filling region 82 and the gas filling region 91 are filled with the inert gas, whereby the amount of dissolved oxygen in the aqueous coolant L can be gradually reduced.
Further, as described above, the period during which the inert gas flows through the gas-filled region 82 and the gas-filled region 91 only needs to overlap with the period during which the aqueous coolant L is circulated.

  Further, after the amount of dissolved oxygen in the aqueous coolant L is reduced and before the flow of the inert gas to the gas filling region 82 and the gas filling region 91 is stopped (the valve 122 and the valve 131 are closed). Before switching to), the viewing window 340 is removed from the tank 80, and the oxygen scavenger 310 and the oxygen detector 320 are quickly installed in the gas-filled region 82. When installing, the oxygen absorber 310 and the oxygen detector 320 are disposed on the holding member 330. Thereafter, the viewing window 340 is airtightly attached to the tank 80, and the flow of the inert gas to the gas filling region 82 is continued for a while to expel air (oxygen) brought into the gas filling region 82 from the outside.

  Subsequently, the flow of the inert gas to the gas filling region 82 and the gas filling region 91 is stopped, and the valve 122 and the valve 131 are respectively switched to the closed state. For this reason, the airtightness of the tank 80 and the case 90 can be maintained. Thereby, start-up of the X-ray tube apparatus is completed.

  Here, before the inert gas is allowed to flow through the gas filling region 82 and the gas filling region 91, the gas filling region 82 and the gas filling region 91 may be further evacuated. For example, after the water-based coolant L is circulated and before the inert gas is allowed to flow through the gas filling region 82 and the gas filling region 91, the gas filling region 82 and the gas filling region 91 are further evacuated. May be. In this case, with the circulation of the water-based coolant L maintained, the valve 122 is opened, and a vacuum pump is used to fill the gas filling region 82 and the gas filling region 91 via the valve 122, the gas discharge pipe 88 and the discharge port 84. Is evacuated for a certain period.

  And after evacuating the gas filling area | region 82 and the gas filling area | region 91, the valve | bulb 122 should be switched to a closed state and vacuuming may be stopped. As a result, it is possible to shorten the discharge time of oxygen and the dissolved oxygen of the aqueous coolant L in the gas filling region 82 and the gas filling region 91 to the outside and the time for flowing the inert gas.

  The X-ray tube apparatus startup method may be performed after the X-ray tube apparatus is assembled into a module for the first time, or during maintenance of the X-ray tube apparatus such as tube replacement, and is not always required. Thereby, the state where the amount of dissolved oxygen of the aqueous coolant L is low can be maintained after the start-up.

Next, a maintenance method for the X-ray tube apparatus in use (after operation) will be described below.
First, an X-ray tube device in use (after operation) is prepared. In the circulation device 5 prepared here, an inert gas is dissolved in the aqueous coolant L. In the water-based coolant L, an inert gas may be dissolved in a saturated state.

  Next, the valve 122 and the valve 131 are opened, and an inert gas is allowed to flow through the gas filling region 82 and the gas filling region 91. Thereafter, the flow of the inert gas is stopped, and the valve 122 and the valve 131 are respectively switched to the closed state, and the airtightness of the tank 80 is maintained.

  Further, in the maintenance method of the X-ray tube apparatus, when it is confirmed that the color tone of the oxygen detecting agent 320 has changed in response to oxygen through the viewing window 340, the inert gas to the gas filling region 82 and the gas filling region 91 is confirmed. It is also effective to replace at least one of the oxygen scavenger 310 and the oxygen detector 320 with an unused product before stopping the flow of gas. The time for replacement may be any time before the inert gas starts to flow into the gas-filled region 82 and the gas-filled region 91 and during the period when the inert gas is passed through the gas-filled region 82 and the gas-filled region 91. . By using the maintenance method for the X-ray tube apparatus, for example, the product life of the X-ray tube apparatus can be extended.

  According to the X-ray tube apparatus, the start-up method of the X-ray tube apparatus, and the maintenance method of the X-ray tube apparatus according to the twelfth embodiment configured as described above, the X-ray tube apparatus includes the X-ray tube 1 and The cooling channel 3 and the circulation device 5 are provided. The circulation device 5 includes a circulation flow path 30, a circulation pump 100, a tank 80, a case 90, a valve 122, and a valve 131.

  The amount of dissolved oxygen in the aqueous coolant L can be reduced by the membrane degassing method. For this reason, the oxygen gas in the aqueous coolant L can be removed at low cost. Moreover, corrosion of metal parts, such as the circulation flow path 30, the X-ray tube 1, and the cooling flow path 3, can be suppressed. Even when the metal portion is made of a material mainly composed of copper which is easily corroded, the occurrence of corrosion can be suppressed. That is, internal corrosion of the X-ray tube apparatus due to the aqueous coolant L can be reduced. Since defects caused by corrosion such as formation of holes in the anode target 155 can be reduced, an X-ray tube apparatus having high reliability over a long period of time and a long product life can be obtained.

Moreover, since generation | occurrence | production of the metal ion etc. which arise by corrosion of a metal part can be suppressed, the lifetime of the ion exchange resin 86 can be extended.
Since the aqueous coolant L can be used, an X-ray tube device having excellent cooling performance can be obtained as compared with the case where the coolant is an insulating oil.

  Even when there is a path through which air (oxygen) slightly enters the closed system of the cooling flow path 3, the joint 6, and the circulation device 5, such as the valve 122 and the valve 131, the gas filling region 82 and the gas filling region 91 are Filled with inert gas. Needless to say, the gas-filled region 82 and the gas-filled region 91 are not in a vacuum state. Even when there is a slight intrusion of the atmosphere (oxygen) from the path such as the valve 122 and the valve 131, and the invading oxygen is dissolved in the aqueous coolant L, the oxygen is not present in the gas filling region 82 and the gas filling region 91. Since it is naturally replaced by the active gas, it is possible to suppress an increase in the amount of dissolved oxygen in the aqueous coolant L, thereby reducing internal corrosion of the X-ray tube device.

The bellows 85 provided in the tank 80 can absorb the expansion and contraction of the aqueous coolant L. For this reason, even if this cooling flow path 3, the joint 6, and the circulation device 5 form a closed system, the leakage of the aqueous coolant L when the aqueous coolant L expands or the shrinkage of the aqueous coolant L occurs. Inhalation of air into the aqueous coolant L can be prevented.
Since the circulation device 5 includes the ion exchange resin filter 86, an increase in ions such as metal ions in the aqueous coolant L can be prevented, and the non-conductivity of the aqueous coolant L can be further maintained.

  As described above, the internal corrosion due to the aqueous coolant can be reduced, and the X-ray tube apparatus, the startup method of the X-ray tube apparatus, and the maintenance of the X-ray tube apparatus are reliable over the long term and excellent in cooling performance. You can get the method.

  Next, an X-ray tube device, a startup method of the X-ray tube device, and a maintenance method of the X-ray tube device according to the thirteenth embodiment will be described in detail. In this embodiment, other configurations are the same as those of the twelfth embodiment described above, and the same reference numerals are given to the same portions, and detailed description thereof is omitted. The X-ray tube apparatus startup method and X-ray tube apparatus maintenance method are the same as those in the twelfth embodiment, and a detailed description thereof will be omitted.

  As shown in FIG. 17, the X-ray tube device includes an X-ray tube 1, a cooling flow path 3 of the X-ray tube 1, an aqueous coolant L, a circulating device 5 for the aqueous coolant L, a joint 6, And an inert gas cylinder 7. In this embodiment, an aqueous glycol solution is used as the aqueous coolant L. Here, the anode target 155 is grounded, and a high voltage is applied to the cathode 156. In this embodiment, there is no problem even if the increase of ions in the aqueous coolant L is not prevented, so the circulation device 5 does not have the ion exchange resin filter 86.

  According to the X-ray tube apparatus, the start-up method of the X-ray tube apparatus, and the maintenance method of the X-ray tube apparatus according to the thirteenth embodiment configured as described above, the X-ray tube apparatus includes the X-ray tube 1 and The cooling channel 3 and the circulation device 5 are provided. The circulation device 5 includes a circulation flow path 30, a circulation pump 100, a tank 80, a case 90, a valve 122, and a valve 131.

  For this reason, the same effect as the twelfth embodiment described above can be obtained. Further, since the glycol target is used as the aqueous coolant L and the anode target is grounded, the circulation device 5 can be formed without the ion exchange resin filter 86.

  As described above, the internal corrosion due to the aqueous coolant can be reduced, and the X-ray tube apparatus, the startup method of the X-ray tube apparatus, and the maintenance of the X-ray tube apparatus are reliable over the long term and excellent in cooling performance. You can get the method.

Next, an X-ray tube device, a startup method of the X-ray tube device, and a maintenance method of the X-ray tube device according to the fourteenth embodiment will be described in detail. In this embodiment, other configurations are the same as those of the above-described eleventh embodiment, and the same portions are denoted by the same reference numerals and detailed description thereof is omitted. The X-ray tube apparatus startup method and X-ray tube apparatus maintenance method are the same as those in the eleventh embodiment, and a detailed description thereof will be omitted.
As shown in FIG. 18, the heat exchanger 60 is formed by a part of the conduit 31 and a fan 62. The aqueous coolant L flowing through the conduit 31 is air-cooled by the fan 62.

  According to the X-ray tube apparatus, the start-up method of the X-ray tube apparatus, and the maintenance method of the X-ray tube apparatus according to the fourteenth embodiment configured as described above, the X-ray tube apparatus includes the X-ray tube 1 and The cooling channel 3 and the circulation device 5 are provided. The circulation device 5 includes a circulation flow path 30, a circulation pump 100, a tank 80, a valve 121, and a valve 122.

  For this reason, the same effect as the eleventh embodiment described above can be obtained. Further, since the glycol target is used as the aqueous coolant L and the anode target is grounded, the circulation device 5 can be formed without the ion exchange resin filter 86.

  As described above, the internal corrosion due to the aqueous coolant can be reduced, and the X-ray tube apparatus, the startup method of the X-ray tube apparatus, and the maintenance of the X-ray tube apparatus are reliable over the long term and excellent in cooling performance. You can get the method.

  Next, an X-ray tube device, a startup method of the X-ray tube device, and a maintenance method of the X-ray tube device according to the fifteenth embodiment will be described in detail. In this embodiment, other configurations are the same as those of the above-described seventh embodiment, and the same portions are denoted by the same reference numerals and detailed description thereof is omitted.

  As shown in FIG. 19, the X-ray tube device includes an X-ray tube 1, a cooling flow path 3 of the X-ray tube 1, an aqueous coolant L, an aqueous coolant circulating device 5, a joint 6, And an inert gas cylinder 7. In this embodiment, an aqueous glycol solution is used as the aqueous coolant L. An inert gas is dissolved in the aqueous coolant L. In this embodiment, an inert gas is dissolved in the aqueous coolant L in a saturated state. The oxygen gas dissolved in the aqueous coolant L (pure water) is replaced with an inert gas.

  The case 200 has an inert gas inlet 201 and a gas outlet 202. The case 200 and the case 90 can maintain airtightness with the inlet 92 and the outlet 202 closed. The inlet 201 is in airtight communication with the gas outlet 93 of the case 90. The case 200 is provided with a gas discharge pipe 222. The gas discharge pipe 222 is airtightly attached to the discharge port 202. Here, one end of the gas discharge pipe 222 is attached to the discharge port 202 in an airtight manner, and the other end is drawn to the outside of the housing 20.

  The valve 232 is airtightly attached to the discharge port 202 of the case 200. Here, the valve 232 is airtightly attached to the gas discharge pipe 222 and is airtightly attached to the discharge port 202 via the gas discharge pipe 222. The other side of the valve 232 is open. The valve 232 has an open state in which gas can be discharged to the outside from the gas filling region 91 defined by the case 90, the case 200, and the bellows 210, and the gas tightness of the gas filling region 91 (case 90, case 200, and bellows 210). It can be switched between a closed state and a holdable state.

  In addition, a vacuum pump may be connected to the other side of the valve 232 as necessary. In this case, the gas-filled region can be evacuated with a vacuum pump by opening the valve 232.

  The valve 131 can be switched between an open state in which an inert gas can be introduced from the inert gas cylinder 7 into the gas-filled region 91 and a closed state in which the gas-tight region 91 can be kept airtight.

  The X-ray tube apparatus includes an oxygen scavenger 310, an oxygen detector 320, a holding member 330, and a viewing window 340. The oxygen scavenger 310 and the oxygen detector 320 are installed in the gas filling region 82. The holding member 330 is fixed to the tank 80 and is located in the gas filling region 82. The holding member 330 is excellent in air permeability and is formed so as to hold the oxygen scavenger 310 and the oxygen detector 320.

  The viewing window 340 is airtightly attached to the tank 80 so as to airtightly close the opening of the tank 80. The viewing window 340 is for confirming the color tone of the oxygen detection agent 320 from the outside. In this embodiment, the observation window 340 also serves as an openable / closable door for taking in and out the oxygen scavenger 310 and the oxygen detector 320.

  The bellows 210 is impermeable to gas. The shape of the bellows 210 is not particularly limited. The bellows 210 may be, for example, a rubber balloon. The bellows 210 is preferably formed of a material that does not easily transmit gas, that is, a material that is impermeable to gas. The bellows 210 is preferably formed by coating the surface with a gas barrier film such as an amorphous carbon film. The bellows 52 can be similarly formed using the same material as the bellows 210.

  The volume of the gas-filled region 91 defined by the case 90, the case 200, and the bellows 210 is 25% or more of the total volume of the coolant-filled region where the water-based coolant L is present. Even when there is a slight intrusion of air (oxygen) from the outside from somewhere in the closed system (circulation flow path 30) during use of the X-ray tube device, and the invading oxygen is dissolved in the aqueous coolant L, the oxygen Is the same as in the seventh embodiment, etc., because the mechanism that can naturally be replaced by the inert gas in the gas-filled region 91 and suppress the increase in the amount of dissolved oxygen in the aqueous coolant L is described. Is omitted.

  The X-ray tube device is configured as described above.

Next, a method for starting up the X-ray tube apparatus will be described.
First, an X-ray tube device including an X-ray tube 1 and a circulation device 5 is prepared. In the circulation device 5 prepared here, the gas filling regions 91 of the case 90, the case 200, and the bellows 210 are not filled with the inert gas yet, and are filled with the atmosphere.

  Subsequently, the aqueous coolant L was introduced into the cooling channel 3, the joint 6, and the circulation device 5, and the circulation channel 30 was communicated with the cooling channel 3 via the joint 6, and the aqueous coolant L was introduced. Assemble the X-ray tube device into a module.

  Here, after introducing the water-based coolant L to the cooling flow path 3, the joint 6 and the circulation device 5, the cooling flow path 3 and the circulation flow path 30 are communicated, but the present invention is not limited to this, and various modifications are possible. It is. For example, at the time of maintenance for replacing the tube, the water-based coolant L is introduced only into the cooling flow path 3 of the X-ray tube 1 whose tube has been replaced, and has already been introduced into the joint 6 and the circulation device 5. The aqueous coolant L can be used continuously. Alternatively, in the joint 6 and the circulation device 5, the water-based coolant L may be replaced.

  Next, the circulation pump 100 is operated, and the aqueous coolant L is circulated between the circulation channel 30 and the cooling channel 3. Note that the heat exchanger 60 may not be operated while the circulation pump 100 is operated and the aqueous coolant L is circulated.

  Thereafter, the valve 131 and the valve 232 are each opened while maintaining the circulation of the aqueous coolant L. Here, the valve 131 and the valve 232 are respectively switched from the closed state to the open state.

  Then, an inert gas is caused to flow from the inert gas cylinder 7 connected to the valve 131 to the gas filling region 91 of the case 90, the case 200, and the bellows 210 through the valve 131, the inert gas introduction pipe 96 and the introduction port 92. The hollow fiber membrane filter 94 can contact-separate the aqueous coolant L and the inert gas, dissolve the inert gas in the aqueous coolant L, and remove dissolved oxygen.

  Thereby, the inert gas and oxygen gas in the gas filling region 91 are discharged to the outside through the discharge port 202, the gas discharge pipe 222 and the valve 232. And the gas filling area | region 91 will be gradually filled with an inert gas.

  At this time, the amount of dissolved oxygen in the aqueous coolant L can be reduced by flowing an inert gas through the gas-filled region 91 for a certain period. Here, the above-mentioned fixed period is, for example, a period until the inert gas is dissolved in the aqueous coolant L to a saturation value.

The certain period may be shorter than the period until the inert gas is dissolved in the aqueous coolant L to the saturation value. That is, it may be a period in which the inert gas does not dissolve in the aqueous coolant L to the saturation value. In this case, the inert gas may be introduced to such an extent that the gas filling region 91 is filled with the inert gas, whereby the amount of dissolved oxygen in the aqueous coolant L can be gradually reduced.
Further, as described above, the period during which the inert gas flows through the gas-filled region 91 may overlap with the period during which the aqueous coolant L is circulated.

  Subsequently, the flow of the inert gas to the gas filling region 91 is stopped, and the valve 131 and the valve 232 are respectively switched to the closed state. For this reason, the airtightness of the case 90, the case 200, and the bellows 210 can be maintained. Thereby, start-up of the X-ray tube apparatus is completed.

  Here, before the inert gas is allowed to flow through the gas filling region 91, the gas filling region 91 may be further evacuated. For example, the gas-filled region 91 may be further evacuated after the aqueous coolant L is circulated and before the inert gas is allowed to flow through the gas-filled region 91. In this case, with the circulation of the aqueous coolant L maintained, the valve 232 is opened, and a vacuum pump is used to evacuate the gas-filled region 91 through the valve 232, the gas discharge pipe 222 and the discharge port 202 for a certain period. To do.

  Then, after the gas-filled region 91 is evacuated, the valve 232 is switched to a closed state and the evacuation is stopped. As a result, it is possible to shorten the discharge time of oxygen and the dissolved oxygen of the aqueous coolant L to the outside in the gas-filled region 91 and the time for flowing the inert gas.

  The X-ray tube apparatus startup method may be performed after the X-ray tube apparatus is assembled into a module for the first time, or during maintenance of the X-ray tube apparatus such as tube replacement, and is not always required. Thereby, the state where the amount of dissolved oxygen of the aqueous coolant L is low can be maintained after the start-up.

Next, a maintenance method for the X-ray tube apparatus in use (after operation) will be described below.
First, an X-ray tube device in use (after operation) is prepared. In the circulation device 5 prepared here, an inert gas is dissolved in the aqueous coolant L. In the water-based coolant L, an inert gas may be dissolved in a saturated state.

  Next, the valve 131 and the valve 232 are each opened, and an inert gas is allowed to flow through the gas filling region 91. Thereafter, the flow of the inert gas is stopped, and the valve 131 and the valve 232 are respectively switched to the closed state, and the airtightness of the case 90, the case 200, and the bellows 210 is maintained.

  Further, in the maintenance method for the X-ray tube apparatus, when it is confirmed that the color tone of the oxygen detecting agent 320 has changed in response to oxygen through the viewing window 340, the flow of the inert gas to the gas-filled region 91 is stopped. It is also effective to replace at least one of the oxygen scavenger 310 and the oxygen detector 320 with an unused product before that. The time for replacement may be any time before the inert gas starts flowing in the gas-filled region 91 and during the period when the inert gas flows in the gas-filled region 91. By using the maintenance method for the X-ray tube apparatus, for example, the product life of the X-ray tube apparatus can be extended.

  According to the X-ray tube apparatus, the start-up method of the X-ray tube apparatus, and the maintenance method of the X-ray tube apparatus according to the fifteenth embodiment configured as described above, the X-ray tube apparatus includes the X-ray tube 1 and The cooling channel 3 and the circulation device 5 are provided. The circulation device 5 includes a circulation flow path 30, a circulation pump 100, a case 90, a valve 131, and a valve 232. The circulation device 5 includes a case 200 and a bellows 210. For this reason, the same effect as the seventh embodiment described above can be obtained.

  Since the oxygen scavenger 310 is installed in the gas filled region 82, oxygen present in the gas filled region 82 can be removed by an oxidation reaction. Since the oxygen detection agent 320 is installed in the gas filling region 82, the oxygen concentration in the gas filling region 82 can be easily monitored.

  As described above, the internal corrosion due to the aqueous coolant can be reduced, and the X-ray tube apparatus, the startup method of the X-ray tube apparatus, and the maintenance of the X-ray tube apparatus are reliable over the long term and excellent in cooling performance. You can get the method.

  Next, an X-ray tube device, a startup method of the X-ray tube device, and a maintenance method of the X-ray tube device according to the sixteenth embodiment will be described in detail. In this embodiment, other configurations are the same as those of the fifteenth embodiment described above, and the same portions are denoted by the same reference numerals and detailed description thereof is omitted. The X-ray tube apparatus startup method and the X-ray tube apparatus maintenance method are the same as those in the fifteenth embodiment, and a detailed description thereof will be omitted.

  As shown in FIG. 20, the X-ray tube device includes an X-ray tube 1, a cooling flow path 3 of the X-ray tube 1, an aqueous coolant L, a circulating device 5 for the aqueous coolant L, a joint 6, And an inert gas cylinder 7. In this embodiment, pure water is used for the aqueous coolant L. Here, a high voltage is applied to the anode target, and the cathode is grounded.

The circulation flow path 30 further includes a conduit 44, a hose 46, a hose 47, a coupler 48 as a coupler, and a coupler 49 as a coupler. The conduit 43 and the hose 46 are hermetically connected via a coupler 48 as a detachable coupler. The conduit 44 and the hose 47 are airtightly connected via a coupler 49 as a detachable connector.
The case 90 is airtightly attached to the conduit 44 and the conduit 45.

  The tank 80 is airtightly attached to the circulation flow path 30. Specifically, the tank 80 is airtightly attached to the hose 46 and the hose 47. The tank 80 has a water-based coolant filling region 81 that is filled with the water-based coolant L. The tank 80 is formed liquid-tight.

  The tank 80 is provided with an ion exchange resin filter 86 as an ion exchange resin.

  The ion exchange resin filter 86 is provided inside the tank 80. The ion exchange resin filter 86 is immersed in the aqueous coolant L. Here, the ion exchange resin filter 86 is attached to the tip of the hose 46, and the water-based coolant L generated when metal parts such as the circulation channel 30, the X-ray tube 1 and the cooling channel 3 are corroded. An increase in conductivity can be suppressed. Thereby, the non-conductivity of the aqueous coolant L which is pure water can be maintained, and electrical defects such as discharge generated in the X-ray tube 1 can be suppressed.

  According to the X-ray tube apparatus, the start-up method of the X-ray tube apparatus, and the maintenance method of the X-ray tube apparatus according to the sixteenth embodiment configured as described above, the X-ray tube apparatus includes the X-ray tube 1 and The cooling channel 3 and the circulation device 5 are provided. The circulation device 5 includes a circulation flow path 30, a circulation pump 100, a tank 80, a case 90, a valve 131, and a valve 232. The circulation device 5 includes a case 200 and a bellows 210. An oxygen scavenger 310 and an oxygen detector 320 are installed in the gas filling region 82. For this reason, the same effect as the fifteenth embodiment described above can be obtained.

  Furthermore, since the circulation device 5 includes the ion exchange resin filter 86, it is possible to prevent an increase in ions such as metal ions in the aqueous coolant L, and to further maintain the non-conductivity of the aqueous coolant L. can do.

  As described above, the internal corrosion due to the aqueous coolant can be reduced, and the X-ray tube apparatus, the startup method of the X-ray tube apparatus, and the maintenance of the X-ray tube apparatus are reliable over the long term and excellent in cooling performance. You can get the method.

  Next, an X-ray tube device, a startup method of the X-ray tube device, and a maintenance method of the X-ray tube device according to the seventeenth embodiment will be described in detail. In this embodiment, other configurations are the same as those of the above-described eighth embodiment, and the same portions are denoted by the same reference numerals and detailed description thereof is omitted. The X-ray tube apparatus startup method and the X-ray tube apparatus maintenance method are the same as those in the fifteenth embodiment, and a detailed description thereof will be omitted.

As shown in FIG. 21, the X-ray tube device includes an X-ray tube 1, a cooling flow path 3 of the X-ray tube 1, an aqueous coolant L, an aqueous coolant circulating device 5, a joint 6, And an inert gas cylinder 7. In this embodiment, an aqueous glycol solution is used as the aqueous coolant L. An inert gas is dissolved in the aqueous coolant L. In this embodiment, an inert gas is dissolved in the aqueous coolant L in a saturated state. The oxygen gas dissolved in the aqueous coolant L (pure water) is replaced with an inert gas. Here, the anode target 155 is grounded, and a high voltage is applied to the cathode 156.
In this embodiment, the circulation device 5 does not include the tank 80, the conduit 44, the hose 46, the hose 47, the coupler 48, and the coupler 49.

The discharge port 202 of the case 200 communicates with the case 51 in an airtight manner. The case 200 and the bellows 210 together with the case 51 define the second region 54 (gas full region). The volume of the second region 54 (gas-filled region) divided by the case 51, the case 200, and the bellows 210 is 25% or more of the total volume of the coolant-filled region where the water-based coolant L is present.
The case 51 has a gas outlet 56. The case 51, the case 200, and the bellows 210 can maintain airtightness with the introduction port 201 and the discharge port 56 closed.

  The inert gas introduction pipe 221 is airtightly attached to the introduction port 201. Here, one end of the inert gas introduction pipe 221 is airtightly attached to the introduction port 201, and the other end is drawn out to the outside of the housing 20.

  The gas discharge pipe 222 is airtightly attached to the discharge port 56. Here, one end of the gas discharge pipe 222 is airtightly attached to the discharge port 56, and the other end is drawn out of the housing 20.

  The valve 231 is airtightly attached to the inlet 201 of the case 200. Here, the valve 231 is airtightly attached to the inert gas introduction pipe 221 and is airtightly attached to the introduction port 201 via the inert gas introduction pipe 221. The other side of the valve 231 can be connected to the inert gas cylinder 7. The valve 231 can maintain the open state in which the inert gas can be introduced from the inert gas cylinder 7 into the gas filling region (second region 54) and the gas tightness of the gas filling region (case 51, case 200, and bellows 210). Switching to the closed state is possible.

  The valve 232 is airtightly attached to the discharge port 56 of the case 51. Here, the valve 232 is airtightly attached to the gas discharge pipe 222 and is airtightly attached to the discharge port 56 via the gas discharge pipe 222. The other side of the valve 232 is open. The valve 232 has an open state in which gas can be discharged to the outside from the gas filling region (second region 54) and a closed state in which the gas tightness of the gas filling region (case 51, case 200 and bellows 210) can be maintained. Switching is possible.

  In addition, a vacuum pump may be connected to the other side of the valve 232 as necessary. In this case, the gas-filled region can be evacuated with a vacuum pump by opening the valve 232.

  The X-ray tube apparatus includes an oxygen scavenger 310, an oxygen detector 320, a holding member 330, and a viewing window 340. The oxygen scavenger 310 and the oxygen detector 320 are installed in the gas filling region 82. The holding member 330 is fixed to the tank 80 and is located in the gas filling region 82. The holding member 330 is excellent in air permeability and is formed so as to hold the oxygen scavenger 310 and the oxygen detector 320.

  The viewing window 340 is airtightly attached to the tank 80 so as to airtightly close the opening of the tank 80. The viewing window 340 is for confirming the color tone of the oxygen detection agent 320 from the outside. In this embodiment, the observation window 340 also serves as an openable / closable door for taking in and out the oxygen scavenger 310 and the oxygen detector 320.

  According to the X-ray tube apparatus, the start-up method of the X-ray tube apparatus, and the maintenance method of the X-ray tube apparatus according to the seventeenth embodiment configured as described above, the X-ray tube apparatus includes the X-ray tube 1 and The cooling channel 3 and the circulation device 5 are provided. The circulation device 5 includes a circulation flow path 30, a circulation pump 100, an air basin 50, a case 200, a valve 131, and a valve 232. The circulation device 5 includes a case 200 and a bellows 210. An oxygen scavenger 310 and an oxygen detector 320 are installed in the gas filling region 82. For this reason, the same effect as the fifteenth embodiment described above can be obtained.

  As described above, the internal corrosion due to the aqueous coolant can be reduced, and the X-ray tube apparatus, the startup method of the X-ray tube apparatus, and the maintenance of the X-ray tube apparatus are reliable over the long term and excellent in cooling performance. You can get the method.

  Next, an X-ray tube device, an X-ray tube device startup method, and an X-ray tube device maintenance method according to an eighteenth embodiment will be described in detail. In this embodiment, other configurations are the same as those in the seventeenth embodiment described above, and the same portions are denoted by the same reference numerals and detailed description thereof is omitted. The X-ray tube apparatus startup method and the X-ray tube apparatus maintenance method are the same as those in the fifteenth embodiment, and a detailed description thereof will be omitted.

  As shown in FIG. 22, the circulation flow path 30 communicates with the cooling flow path 3 via the joint 6. The circulation flow path 30 accommodates the water-based coolant L and can maintain airtightness. The circulation channel 30 has a conduit 31, a conduit 36, and a conduit 37. The conduit 31 is hermetically connected to the socket 22 and the flow sensor 70. The conduit 36 is hermetically connected to the flow sensor 70 and the circulation pump 100. The conduit 37 is hermetically connected to the socket 21 and the circulation pump 100. The conduit 31, the conduit 36, and the conduit 37 are made of a metal such as copper, iron, an iron alloy, or steel. Here, the conduit 31 is made of copper, and the conduit 36 and the conduit 37 are made of stainless steel.

The opening 51 a of the air basin 50 is in airtight communication with the conduit 31 of the circulation channel 30.
The heat exchanger 60 is attached to the circulation channel 30 in an airtight manner, and discharges the heat of the aqueous coolant L to the outside. The heat exchanger 60 is formed by a part of the conduit 31 and the conduit 61. Both ends of the conduit 61 are drawn out of the housing 20. A valve 111 and a valve 112 are connected to both ends of the conduit 61. Here, tap water flows as a coolant in the conduit 61. When flowing tap water through the conduit 61, the valve 111 may be opened so that tap water can be introduced, and the valve 112 may be opened so that tap water can be discharged. Thereby, the heat of the aqueous coolant L flowing through the conduit 31 that is the secondary cooling system is conducted to the tap water flowing through the conduit 61 that is the primary cooling system, and the aqueous coolant L is cooled.

  According to the X-ray tube apparatus, the start-up method of the X-ray tube apparatus, and the maintenance method of the X-ray tube apparatus according to the eighteenth embodiment configured as described above, the X-ray tube apparatus includes the X-ray tube 1 and The cooling channel 3 and the circulation device 5 are provided. The circulation device 5 includes a circulation flow path 30, a circulation pump 100, an air basin 50, a case 200, a valve 131, and a valve 232. The circulation device 5 includes a case 200 and a bellows 210. An oxygen scavenger 310 and an oxygen detector 320 are installed in the gas filling region 82. For this reason, the same effect as the fifteenth embodiment described above can be obtained.

  As described above, the internal corrosion due to the aqueous coolant can be reduced, and the X-ray tube apparatus, the startup method of the X-ray tube apparatus, and the maintenance of the X-ray tube apparatus are reliable over the long term and excellent in cooling performance. You can get the method.

  Next, an X-ray tube device, a startup method of the X-ray tube device, and a maintenance method of the X-ray tube device according to the nineteenth embodiment will be described in detail. In this embodiment, other configurations are the same as those in the seventeenth embodiment described above, and the same portions are denoted by the same reference numerals and detailed description thereof is omitted. The X-ray tube apparatus startup method and the X-ray tube apparatus maintenance method are the same as those in the fifteenth embodiment, and a detailed description thereof will be omitted.

  As shown in FIG. 23, the X-ray tube device includes an X-ray tube 1, a cooling flow path 3 of the X-ray tube 1, an aqueous coolant L, a circulating device 5 for the aqueous coolant L, a joint 6, And an inert gas cylinder 7. In this embodiment, pure water is used for the aqueous coolant L. Here, a high voltage is applied to the anode target, and the cathode is grounded.

  The circulation flow path 30 further includes a conduit 44, a hose 46, a hose 47, a coupler 48 as a coupler, and a coupler 49 as a coupler. The conduit 43 and the hose 46 are hermetically connected via a coupler 48 as a detachable coupler. The conduit 44 and the hose 47 are airtightly connected via a coupler 49 as a detachable connector. The conduit 44 is hermetically connected to the socket 21 and the coupler 49.

  The tank 80 is airtightly attached to the circulation flow path 30. Specifically, the tank 80 is airtightly attached to the hose 46 and the hose 47. The tank 80 has a water-based coolant filling region 81 that is filled with the water-based coolant L. The tank 80 is formed liquid-tight.

  The tank 80 is provided with an ion exchange resin filter 86 as an ion exchange resin.

  The ion exchange resin filter 86 is provided inside the tank 80. The ion exchange resin filter 86 is immersed in the aqueous coolant L. Here, the ion exchange resin filter 86 is attached to the tip of the hose 46, and the water-based coolant L generated when metal parts such as the circulation channel 30, the X-ray tube 1 and the cooling channel 3 are corroded. An increase in conductivity can be suppressed. Thereby, the non-conductivity of the aqueous coolant L which is pure water can be maintained, and electrical defects such as discharge generated in the X-ray tube 1 can be suppressed.

  According to the X-ray tube apparatus, the start-up method of the X-ray tube apparatus, and the maintenance method of the X-ray tube apparatus according to the nineteenth embodiment configured as described above, the X-ray tube apparatus includes the X-ray tube 1 and The cooling channel 3 and the circulation device 5 are provided. The circulation device 5 includes a circulation flow path 30, a circulation pump 100, an air basin 50, a case 200, a valve 131, and a valve 232. The circulation device 5 includes a case 200 and a bellows 210. An oxygen scavenger 310 and an oxygen detector 320 are installed in the gas filling region 82. For this reason, the same effect as the fifteenth embodiment described above can be obtained.

  Furthermore, since the circulation device 5 includes the ion exchange resin filter 86, it is possible to prevent an increase in ions such as metal ions in the aqueous coolant L, and to further maintain the non-conductivity of the aqueous coolant L. can do.

  As described above, the internal corrosion due to the aqueous coolant can be reduced, and the X-ray tube apparatus, the startup method of the X-ray tube apparatus, and the maintenance of the X-ray tube apparatus are reliable over the long term and excellent in cooling performance. You can get the method.

  Next, a heat transfer system, a heat transfer system startup method, and a heat transfer system maintenance method according to the twentieth embodiment will be described. Here, a heat transfer system, a heat transfer system startup method, a cooling system as a heat transfer system maintenance method, a cooling system startup method, and a cooling system maintenance method will be described in detail. The cooling system startup method and the cooling system maintenance method are the same as the X-ray tube apparatus startup method and the X-ray tube apparatus maintenance method of the eleventh embodiment, and a detailed description thereof will be omitted. .

  As shown in FIG. 24, the cooling system includes an X-ray tube 1, a cooling flow path 3 of the X-ray tube 1, an aqueous coolant L, a circulating device 5 for the aqueous coolant L, an inert gas cylinder 7, An insulating oil IO, a circulating device 400 for the insulating oil IO, and a joint 6 are provided. In this embodiment, an aqueous glycol solution is used as the aqueous coolant L. Here, a high voltage is applied to the anode target, and the cathode is grounded.

The circulation device 5 is configured similarly to the circulation device of the fourteenth embodiment. The circulation device 5
It further includes a conduit 17 that is airtightly connected between the plug 15 and the plug 16 and is drawn out of the housing 20. The conduit | pipe 17 can be formed with metals, such as copper, iron, an iron alloy, and steel. The conduit 17 functions as a cooling flow path.

The circulation device 400 circulates the insulating oil IO with the cooling flow path 3 through the airtight joint 6.
Here, the joint 6 includes a hose 11, a hose 12, a connector 13, and a connector 14. A connector 13 is airtightly connected to one end of the hose 11, and a connector 14 is airtightly connected to one end of the hose 12. The connector 13 is airtightly connected to the introduction path C1 of the X-ray tube 1, and the connector 14 is airtightly connected to the discharge path C2 of the X-ray tube 1.

The circulation device 400 includes a circulation channel 410, an air basin 420 as a bellows mechanism, a circulation pump 430, a heat exchanger 440, and a flow sensor 450.
The circulation channel 410 is communicated with the cooling channel 3 via the joint 6. The circulation flow path 410 accommodates the insulating oil IO and can maintain airtightness. The circulation channel 410 has a conduit 411, a conduit 412, and a conduit 413. The conduit 411 is hermetically connected to the hose 12 via a coupler 417 as a detachable coupler, and the conduit 413 is hermetically connected to the hose 11 via a coupler 418 as a detachable coupler. The conduit | pipe 411, the conduit | pipe 412, and the conduit | pipe 413 are formed with metals, such as copper, iron, an iron alloy, and steel. Here, the conduit 411 is made of copper, and the conduit 412 and the conduit 413 are made of stainless steel.

  The air basin 420 is in airtight communication with the circulation channel 410. The air basin 420 has a case 421 having an opening 421a. The opening 421a communicates with the conduit 411 of the circulation channel 410 in an airtight manner. The air basin 420 includes a bellows 422 that divides the inside of the case 421 into a first region 423 and a second region 424 that are connected to the opening 421a. The bellows 422 is attached to the case 421 in a liquid-tight manner. Bellows 422 is telescopic. Here, the bellows 422 is formed of rubber. The bellows 422 can absorb the expansion and contraction of the volume of the insulating oil IO.

  The heat exchanger 440 is attached to the circulation channel 410 in an airtight manner and discharges the heat of the insulating oil IO to the outside. The heat exchanger 440 is formed by a part of the conduit 412 and the conduit 17. As described above, the aqueous coolant L flows in the conduit 17. As a result, the heat of the insulating oil IO flowing through the conduit 412 serving as the secondary cooling system is conducted to the aqueous coolant L flowing through the conduit 17 serving as the primary cooling system, and the insulating oil IO is cooled.

The circulation pump 430 is airtightly attached to the circulation channel 410. Specifically, the circulation pump 430 is hermetically attached to the conduit 411 and the conduit 412. The circulation pump 430 circulates the insulating oil IO between the circulation device 400 and the cooling flow path 3.
The flow sensor 450 is hermetically connected between the conduit 412 and the conduit 413.

  According to the cooling system, the cooling system startup method, and the cooling system maintenance method according to the twentieth embodiment configured as described above, the cooling system includes the X-ray tube 1, the cooling flow path 3, and the circulation. A device 5 and a circulation device 400 are provided. The circulation device 5 indirectly cools the X-ray tube 1 by cooling the insulating oil IO of the circulation device 400.

  The circulation device 5 includes a circulation flow path 30, a circulation pump 100, a tank 80, a valve 121, and a valve 122. The circulation device 5 includes a case 200 and a bellows 210. An oxygen scavenger 310 and an oxygen detector 320 are installed in the gas filling region 82. For this reason, the same effect as the eleventh embodiment described above can be obtained.

  As described above, internal corrosion due to the aqueous coolant can be reduced, and a cooling system that is highly reliable over the long term and has excellent cooling performance, a cooling system start-up method, and a cooling system maintenance method can be obtained. .

  Note that the present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. In addition, various inventions can be formed by appropriately combining a plurality of components disclosed in the embodiment. For example, some components may be deleted from all the components shown in the embodiment. Furthermore, constituent elements over different embodiments may be appropriately combined.

  For example, the cooling flow path 3 only needs to contain and seal an aqueous coolant L through which at least a part of heat released from the anode target is conducted. For this reason, as shown in FIG. 25, when the X-ray tube 1 is accommodated in the housing 2 and the inside of the housing 2 is filled with the aqueous coolant L, the cooling flow path 3 includes the inside of the X-ray tube 1 and the housing. 2 can be formed inside. As shown in FIG. 26, when the X-ray tube 1 does not have an intake port and a discharge port for the aqueous coolant L, the cooling flow path 3 can be formed inside the housing 2.

  The tank 80 may be separately provided with a vacuum exhaust pipe and a valve for evacuating the gas filling region 82. Similarly, the case 90 may be separately provided with a vacuum exhaust pipe or a valve for evacuating the gas filling region 91. The same applies to the case 200.

  Metal parts such as the circulation flow path 30, the X-ray tube 1, and the cooling flow path 3 that are in contact with the aqueous coolant L may be plated with noble metal such as gold. As a result, the product life of the X-ray tube apparatus can be prolonged.

  Although the case where an inert gas is allowed to flow in the gas-filled region has been described, SF6 or the like can be used as the insulating gas in the gas-filled region. In terms of performance, helium gas, neon gas, SF6, and the like are suitable. However, in consideration of manufacturing costs and maintenance costs, it is desirable to flow an inexpensive nitrogen gas in the gas filling region.

The volume of the gas-filled region is not limited to the X-ray tube apparatus according to the seventh to ninth and fifteenth to tenth embodiments and the cooling system according to the twentieth embodiment, but also in other embodiments. It may be 25% or more of the entire volume of the coolant-filled region where the water-based coolant L is present.
The X-ray tube apparatus maintenance method may be used for the X-ray tube apparatuses of the first to ninth embodiments.

The present invention is not limited to the above-described X-ray tube device, X-ray tube device startup method, X-ray tube device maintenance method, cooling system, cooling system startup method, and cooling system maintenance method. However, the present invention can be applied to various heat transfer systems, a heat transfer system startup method, and a heat transfer system maintenance method. Needless to say, the present invention can also be applied to various X-ray tube apparatuses other than those described above, methods for starting up X-ray tube apparatuses, and maintenance methods for X-ray tube apparatuses .
Hereinafter, the invention described in the scope of claims of the present application will be appended.
[1] A water-based coolant through which heat from the outside is conducted is stored, and a sealed cooling flow path;
A circulation flow path that is communicated with the cooling flow path through an airtight joint, contains the aqueous coolant, and can maintain airtightness;
A circulation pump that is airtightly attached to the circulation flow path and circulates the water-based coolant between the cooling flow path and
At least one gas-filled region that is airtightly attached to the circulation flow path and is separated by contact with the aqueous coolant and filled with an inert gas, an inlet for the inert gas, and a gas exhaust. An outlet, and a container capable of maintaining airtightness with the inlet and the outlet closed.
A first opening / closing portion that is airtightly attached to the inlet of the container and is switchable between an open state in which the inert gas can be introduced into the gas-filled region and a closed state in which the airtightness of the container can be maintained; ,
A second opening / closing portion that is airtightly attached to the discharge port of the container, and is switchable between an open state in which the gas can be discharged from the gas-filled region to the outside and a closed state in which the airtightness of the container can be maintained. A heat transfer system comprising:
[2] The heat transfer system according to [1], further comprising an extendable bellows mechanism that is airtightly attached to the container and divides the gas-filled area together with the container.
[3] Provided in the container, divides the coolant-filled region and the gas-filled region where the water-based coolant is present, shows impermeability to the water-based coolant, and is permeable to the gas The heat transfer system according to [1] or [2], further including a gas exchange membrane showing
[4] The heat transfer system according to [3], wherein the gas exchange membrane is a hollow fiber membrane.
[5] The heat transfer system according to [3], wherein the gas exchange membrane is a bellows.
[6] The heat transfer system according to [2], wherein the volume of the gas-filled region is 25% or more of the total volume of the coolant-filled region where the aqueous coolant is present.
[7] The heat transfer system according to [1], further comprising an oxygen scavenger that is installed in the gas filling region and removes oxygen present in the gas filling region by an oxidation reaction.
[8] The apparatus according to [1] or [7], further comprising an oxygen detector that is installed in the gas-filled region and changes a color tone in response to oxygen existing in the gas-filled region. The described heat transfer system.
[9] The heat transfer system according to [8], further comprising a viewing window that is airtightly attached to the container and for checking the color tone of the oxygen detection agent from the outside.
[10] The heat transfer system according to [1], further including a heat exchanger that is airtightly attached to the circulation channel and discharges heat of the aqueous coolant to the outside.
[11] The heat transfer system according to [1], further comprising an extendable bellows mechanism that is airtightly attached to the circulation flow path.
[12] The heat transfer system according to [2] or [11], wherein the bellows mechanism is impermeable to the gas.
[13] The heat transfer system according to any one of [1] to [12], wherein the aqueous coolant includes a glycol aqueous solution as a main component.
[14] The heat transfer system according to any one of [1] to [12], wherein the aqueous coolant is pure water.
[15] An ion exchange resin provided in at least one of the inside of the container and the inside of another container airtightly attached to the circulation flow path is further provided [1] to [14] The heat transfer system according to any one of the above.
[16] An inert gas introduction pipe that is attached to the introduction port and has a discharge port that discharges the inert gas that is submerged in the aqueous coolant in the container and introduced from the introduction port. The heat transfer system according to any one of [1] to [15], wherein
[17] The heat transfer system according to any one of [1] to [16], wherein at least a part of the member in contact with the aqueous coolant is formed of a material mainly composed of copper. .
[18] A vacuum envelope partially formed with an output window that transmits X-rays, a cathode provided in the vacuum envelope for emitting electrons, and the cathode provided in the vacuum envelope An X-ray tube having an anode target that emits X-rays when irradiated with electrons emitted from
The heat transfer according to any one of [1] to [17], wherein the external heat conducted to the aqueous coolant is at least part of the heat released from the X-ray tube. system.
[19] Aqueous coolant that conducts heat from the outside is accommodated, and is communicated with a sealed cooling channel and an airtight joint to the cooling channel, accommodates the aqueous coolant, and is airtight. A circulation channel that is capable of maintaining the characteristics, and a circulation pump that is airtightly attached to the circulation channel, and that circulates the water-based coolant between the cooling channel and the circulation channel, and is airtightly attached to the circulation channel. The inlet having at least one gas-filled region which is divided by being separated from the aqueous coolant and filled with an inert gas, an inlet for the inert gas, and a gas outlet. And a container capable of maintaining hermeticity with the discharge port closed, an open state that is hermetically attached to the inlet of the container and can introduce the inert gas into the gas-filled region, and the hermeticity of the container 1st opening and closing that can be switched between a closed state that can maintain stability And a second opening / closing switch that is airtightly attached to the discharge port of the container and can be switched between an open state in which the gas can be discharged to the outside from the gas-filled region and a closed state in which the airtightness of the container can be maintained. And a heat transfer system comprising
Operate the circulation pump, circulate the water-based coolant between the circulation channel and the cooling channel,
Including a period overlapping with a period of circulating the aqueous coolant, each of the first opening and closing part and the second opening and closing part are in an open state, and the inert gas is allowed to flow through the gas-filled region,
After flowing the inert gas in the gas-filled region, the flow of the inert gas is stopped, the first opening and closing part and the second opening and closing part are respectively switched to a closed state, and the hermeticity of the container is maintained. A method for starting up a heat transfer system.
[20] Before flowing the inert gas through the gas-filled region,
The first opening / closing part is closed, the second opening / closing part is opened, and the gas-filled region is evacuated through the second opening / closing part and the discharge port,
[19] The heat transfer system startup method according to [19], wherein after the gas-filled region is evacuated, the second opening / closing part is switched to a closed state and the evacuation is stopped.
[21] Before stopping the flow of the inert gas to the gas-filled region,
The heat transfer system start-up method according to [19], wherein an oxygen scavenger that removes oxygen present in the gas-filled region by an oxidation reaction is installed in the gas-filled region.
[22] Before stopping the flow of the inert gas to the gas-filled region,
The method for starting up a heat transfer system according to [19], wherein an oxygen detector whose color tone changes in response to oxygen present in the gas-filled region is installed in the gas-filled region.
[23] A vacuum envelope partially formed with an output window that transmits X-rays, a cathode provided in the vacuum envelope and emitting electrons, and the cathode provided in the vacuum envelope A heat transfer system start-up method, further comprising an X-ray tube having an anode target that emits X-rays when irradiated with electrons emitted from
The heat transfer according to any one of [19] to [22], wherein the external heat conducted to the aqueous coolant is at least a part of the heat released from the X-ray tube. How to set up the system.
[24] A water-based coolant in which heat from the outside is conducted and inactive gas is dissolved is accommodated, and the water-cooled coolant is communicated with a sealed cooling flow path and an airtight joint to the cooling flow path. A circulation channel that can maintain airtightness, a circulation pump that is airtightly attached to the circulation channel and circulates the aqueous coolant between the cooling channel and the circulation channel. At least one gas-filled region that is airtightly attached and separated by contact with the aqueous coolant and filled with an inert gas, an inlet for the inert gas, and a gas outlet are provided. A container capable of maintaining hermeticity with the inlet and the outlet closed, and an open state that is hermetically attached to the inlet of the container and can introduce the inert gas into the gas-filled region. The container is in a closed state capable of maintaining the airtightness of the container. A first openable / closable portion, an open state that is airtightly attached to the discharge port of the container, can discharge the gas to the outside from the gas-filled region, and a closed state that can maintain the airtightness of the container, A heat transfer system including a second opening / closing portion that can be switched to
Opening each of the first opening / closing part and the second opening / closing part, and flowing the inert gas through the gas-filled region,
After flowing the inert gas in the gas-filled region, the flow of the inert gas is stopped, the first opening and closing part and the second opening and closing part are respectively switched to a closed state, and the hermeticity of the container is maintained. A maintenance method for a heat transfer system.
[25] An oxygen scavenger that is installed in the gas filling region and removes oxygen present in the gas filling region by an oxidation reaction; An oxygen detector whose color tone changes in response, and the container is a maintenance method for a heat transfer system further comprising a viewing window for confirming the color tone of the oxygen detector from outside,
When it is confirmed that the color tone of the oxygen detecting agent has changed in response to oxygen through the viewing window, before stopping the flow of the inert gas to the gas-filled region,
The maintenance method for a heat transfer system according to [24], wherein at least one of the oxygen scavenger and the oxygen detector is replaced with an unused product.
[26] A vacuum envelope partially formed with an output window that transmits X-rays, a cathode provided in the vacuum envelope and emitting electrons, and the cathode provided in the vacuum envelope A heat transfer system maintenance method, further comprising an X-ray tube having an anode target that emits X-rays when irradiated with electrons emitted from
The heat transfer system maintenance method according to [24] or [25], wherein the external heat conducted to the aqueous coolant is at least a part of the heat released from the X-ray tube. .

  DESCRIPTION OF SYMBOLS 1 ... X-ray tube, 3 ... Cooling flow path, 5 ... Circulation apparatus, 6 ... Joint, 20 ... Case, 30 ... Circulation flow path, 17, 31, 32, 33, 34, 35, 36, 37, 41, 42, 43, 44, 45 ... conduit, 46, 47 ... hose, 48, 49 ... coupler, 50 ... air basin, 56 ... outlet, 60 ... heat exchanger, 61 ... conduit, 62 ... fan, 70 ... flow sensor 80 ... Tank, 81 ... Water-based coolant filling region, 82 ... Gas filling region, 83 ... Inlet, 84 ... Discharge port, 85 ... Bellows, 86 ... Ion exchange resin filter, 87 ... Inert gas introduction pipe, 87a ... Discharge port, 88 ... gas discharge pipe, 90 ... case, 91 ... gas filling region, 92 ... inlet port, 93 ... discharge port, 94 ... hollow fiber membrane filter, 95 ... flow path, 96 ... inert gas introduction pipe, 97 ... gas discharge pipe, 98 ... coolant filling region, 100 Circulating pump 121, 122, 131, 132 ... valve, 200 ... case, 201 ... inlet, 202 ... outlet, 210 ... bellows, 221 ... inert gas inlet pipe, 222 ... gas outlet pipe, 231, 232 ... valve 310 ... Deoxygenating agent, 320 ... Oxygen detecting agent, 330 ... Holding member, 340 ... Viewing window, 400 ... Circulating device, 410 ... Circulating channel, 420 ... Air basin, 430 ... Circulating pump, 440 ... Heat exchanger, 450 ... Flow sensor, L ... Water-based coolant, IO ... Insulating oil, V1, V2 ... Volume.

Claims (14)

Contains a water-based coolant that conducts heat from the outside, and has a sealed cooling channel,
A circulation flow path that is communicated with the cooling flow path through an airtight joint, contains the aqueous coolant, and can maintain airtightness;
A circulation pump that is airtightly attached to the circulation flow path and circulates the water-based coolant between the cooling flow path and
The attached airtightly to the circulation flow path, and at least one gas filled region inert gas filled, before Symbol inlet of the inert gas opening into the gas filled region, moths opened in the gas filled region A container capable of maintaining airtightness in a state in which the introduction port and the discharge port are closed ,
A gas that is provided in the vessel, divides the coolant-filled region where the water-based coolant is present and the gas-filled region, is impermeable to the water-based coolant, and is permeable to the gas An exchange membrane,
A first opening / closing portion that is airtightly attached to the inlet of the container and is switchable between an open state in which the inert gas can be introduced into the gas-filled region and a closed state in which the airtightness of the container can be maintained; ,
A second opening / closing portion that is airtightly attached to the discharge port of the container, and is switchable between an open state in which the gas can be discharged from the gas-filled region to the outside and a closed state in which the airtightness of the container can be maintained. A heat transfer system comprising: Attached hermetically to said container, communicating with the gas filled region, heat transfer according with the previous SL vessel to claim 1, characterized in that it further comprises a retractable bellows mechanism that zone the gas filled region system. The heat transfer system according to claim 1, wherein the gas exchange membrane is a hollow fiber membrane. The heat transfer system according to claim 1, wherein the gas exchange membrane is a bellows.   3. The heat transfer system according to claim 2, wherein a volume of the gas-filled region is 25% or more of a total volume of the coolant-filled region where the aqueous coolant exists.   2. The heat transfer system according to claim 1, further comprising an oxygen scavenger installed in the gas filling region and removing oxygen existing in the gas filling region by an oxidation reaction. Installed in the gas filled region, heat transfer according to claim 1 or 6, characterized in that the color tone in response to the oxygen present in the gas filled region is further provided with an oxygen detecting agent which changes system. The heat transfer system according to claim 7, further comprising a viewing window attached to the container in an airtight manner for confirming a color tone of the oxygen detection agent from the outside.   2. The heat transfer system according to claim 1, further comprising a heat exchanger that is airtightly attached to the circulation flow path and discharges heat of the aqueous coolant to the outside. Wherein the water-based coolant, the heat transfer system according to any one of claims 1乃optimum 9, characterized in that a main component glycol solution. Wherein the water-based coolant, the heat transfer system according to any one of claims 1乃optimum 9, characterized in that pure water. Mounting et is hermetically prior Symbol circulation channel, accommodating the water-based coolant, and the other container is capable of holding air tightness,
Heat transfer system according to any one of claims 1乃optimum 11, characterized in that it further comprises a an ion-exchange resins provided on the inner portion of the other container. Wherein at least a portion of the member in contact with the water-based coolant, the heat transfer system according to any one of claims 1乃optimum 12, characterized in that it is formed of a material mainly containing copper. A vacuum envelope partially formed with an output window that transmits X-rays, a cathode that is provided in the vacuum envelope and emits electrons, and is provided in the vacuum envelope and emitted from the cathode. An X-ray tube having an anode target that emits X-rays when irradiated with electrons,
External heat to be conducted to the water-based coolant, heat transfer according to any one of claims 1乃optimum 13, characterized in that at least part of the heat released from the X-ray tube system.

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