JP5578615B2 - Drive mechanism of magnetically driven microtool in microfluidic chip - Google Patents

Description

The present invention relates to a driving mechanism for driving a magnetic body by magnetic force in a microfluidic chip.

  A series of operations such as separation, classification, processing, selection, and processing are performed on fine particles such as eggs, cells, and fungi mainly in the bio-based industrial fields such as the medical field, the pharmaceutical field, and breed improvement. Conventionally, as an apparatus for performing operations on such fine particles, a device that performs each operation on fine particles flowing through a micro flow path using a magnetic drive microtool processed from a magnetic material driven by a permanent magnet or an electromagnet. (For example, refer to Patent Document 1, 2 or 3).

JP 2008-148677 A JP 2009-216571 A Japanese Patent Application No. 2009-210903

  In an apparatus such as that described in Patent Document 1 or 2, a permanent magnet or an electromagnet is arranged with one end face facing a magnetic drive microtool, and the drive magnet is moved or the current flowing through the electromagnet is turned on / off. Driving a magnetic drive micro tool.

  However, in the region where the drive magnet and magnetic drive microtool overlap, the perpendicular component of the magnetic force is strongly generated with respect to the drive plane, so the magnetic drive microtool is strongly attracted to the drive plane and a large frictional force is generated. To do.

  Therefore, the static friction force exceeds the driving direction component of the magnetic force, and when the displacement of the driving magnet is very small, there is a problem that the magnetic driving micro tool does not move, the position accuracy is poor, and the movement of the magnetic driving micro tool is There was a problem that it was difficult to control accurately.

  FIG. 1 shows the driving principle of a conventional magnetic drive microtool. Since the drive magnet 5 is installed with one end 3 of the magnetic pole facing the magnetic drive microtool 1, the magnetic flux generated from the magnet 5 has a component perpendicular to the drive plane 2 with respect to the magnetic drive microtool 1. As a result, a large vertical drag is generated between the driving plane and the magnetic driving microtool.

  Therefore, when a static friction force is generated greatly and the displacement of the drive magnet 5 is very small, the static friction force is superior to the drive direction component of the magnetic force, and the magnetic drive microtool 1 does not move. When the distance between the drive magnet 5 and the magnetic drive microtool 1 increases, the drive direction component of the magnetic force received by the magnetic drive microtool 1 becomes relatively larger than the vertical component, and starts moving beyond the static friction force.

  FIG. 2 shows a magnetic drive microtool 8 when a disk-type magnetic drive microtool 8 made of nickel material with a diameter of 1 mm is driven by a conventional drive mechanism using a cylindrical neodymium magnet 9 having a diameter of 1 mm as a drive magnet. Indicates a region where does not react.

Under this condition, the magnetic drive microtool 8 did not move until the distance between the magnet 9 and the magnetic drive microtool 8 reached 0.534 mm.
On the other hand, there is one that reduces friction and improves controllability by vibrating a magnetically driven microtool by periodically changing a magnetic field using an electromagnet (see, for example, Patent Document 3).

  However, in the mechanism described in Patent Document 3, the magnetically driven microtool vibrates in order to periodically change the magnetic field, and the vibration causes breakage of the cut surface in cell operations such as egg cutting. was there.

  The present invention has been made paying attention to such a problem, and an object thereof is to provide a drive mechanism of a magnetic drive microtool that can accurately control the movement of the magnetic drive microtool without vibrating. .

  In order to achieve the above object, the drive mechanism of the magnetic drive microtool according to the present invention is characterized in that the frictional force applied to the magnetic drive microtool in the microfluidic chip is reduced.

  In order to achieve the above object, a drive mechanism of a magnetic drive microtool according to the present invention is a drive mechanism of a magnetic drive microtool for driving a magnetic drive microtool having magnetism, and applies an external force in the opposite direction. Or a means for causing the magnetic pole of the drive magnet to coincide with the drive direction of the magnetic drive microtool, thereby reducing the vertical drag that the magnetic drive microtool receives from the drive plane.

  In the drive mechanism of the magnetic drive microtool according to the present invention, a magnetic force in the direction opposite to the magnetic force component perpendicular to the drive plane emitted from the drive magnet is applied to the magnetic drive microtool from the outside, or driven. It is characterized by suppressing generation of magnetic flux in a direction perpendicular to the plane. The drive magnet may be a permanent magnet or an electromagnet.

  As a method of applying a magnetic force in the direction opposite to the magnetic force component perpendicular to the driving plane emitted from the driving magnet to the magnetic driving micro tool from the outside, the magnetic driving micro tool is sandwiched between the magnetic driving micro tool and the opposite side of the driving magnet. An auxiliary magnet is embedded in the microfluidic chip.

  At this time, if the magnetic force of the additional magnet is sufficiently large, it may be applied from outside the chip without being embedded in the microfluidic chip. The drive magnet and the externally applied magnet may be either a permanent magnet or an electromagnet, as long as the direction and strength of the magnetic field do not change with time.

  As a method for suppressing the generation of magnetic flux in the direction perpendicular to the drive plane in the drive mechanism of the magnetic drive microtool according to the present invention, the magnetic poles of the magnets are installed in parallel with the drive direction. At this time, it is preferable that the thickness of the magnet in the magnetic pole direction is the same as that of the portion receiving the magnetic force of the magnetic drive microtool. The drive magnet may be a permanent magnet or an electromagnet.

  As a method of reducing the frictional force applied to the magnetic drive microtool by the drive mechanism of the magnetic drive microtool according to the present invention, a vibrating body such as a piezoelectric ceramic is provided on any surface of the microfluidic chip formed in a rectangular parallelepiped. There is a method in which the entire microfluidic chip or a part thereof is vibrated at a high frequency by attaching and vibrating the vibrating body at a high frequency of 100 Hz or more.

  As a result, a relatively small movement is caused on the contact surface between the magnetic drive microtool and the microfluidic chip. The magnetic drive microtool receives a magnetic force from the outside of the microfluidic chip and drives in accordance with the movement of the magnet while performing a relatively small movement between the magnetic drive microtool and the microfluidic chip.

ADVANTAGE OF THE INVENTION According to this invention, the drive mechanism of the magnetic drive microtool which can control a motion correctly, without vibrating a magnetic drive microtool can be provided.
By reducing the normal force that the magnetic drive microtool receives from the drive plane, the frictional force acting on the magnetic drive microtool can be reduced, so that the followability of the magnetic drive microtool against the drive magnet is improved and the movement is accurate. Can be controlled.

  By applying a magnetic force in the direction opposite to the magnetic force component perpendicular to the drive plane generated from the drive magnet to the magnetic drive microtool from the outside, the perpendicular drag of the magnetic drive microtool is canceled and reduced. .

  Further, since the magnetic body is pulled in both directions, the magnetic body is inclined obliquely in the microfluidic chip, and the contact area with the drive plane is reduced. Therefore, the frictional force that the magnetic drive microtool receives is reduced, the followability of the magnetic drive microtool with respect to the drive magnet is improved, and the movement can be accurately controlled.

  By setting the magnetic pole of the magnet parallel to the driving direction, the magnetic flux generated from the N pole of the magnet flows in the driving direction and flows in a loop to the S pole of the magnet via the magnetic drive microtool.

  Therefore, there is almost no magnetic flux flowing perpendicularly to the drive plane in the vicinity of the upper center of the installed magnet, and the magnetic force that the magnetic drive microtool is attracted to the drive plane is reduced, and friction is reduced.

  In addition, by adjusting the thickness of the magnet in the magnetic pole direction to the same size as that of the magnetic drive microtool receiving the magnetic force, the magnetic flux generated from the magnet flows from the drive direction to the magnetic drive microtool. The magnetic force received by the magnetic drive microtool when the is moved coincides with the drive direction, and the magnetic force can be efficiently converted into the drive force.

Thereby, the followability of the magnetic drive microtool with respect to the drive magnet is improved, and the movement can be accurately controlled.
By attaching piezoelectric ceramics to the bottom surface of the microfluidic chip, applying high-frequency vibrations of 100 Hz or more, and vibrating the contact surface between the magnetic drive microtool and the microfluidic chip, the direction of friction changes from tens of thousands to millions of times per second. Therefore, the apparent frictional force between the magnetic drive microtool and the microfluidic chip can be greatly reduced.

Due to this apparent reduction in frictional force, the magnetic drive microtool can accurately follow the drive magnet, and positioning accuracy can be achieved on the order of μm.
Further, as the followability of the magnetic drive microtool with respect to the drive magnet is improved, the magnetic drive microtool can be driven at a high speed in accordance with the movement of the drive magnet.

It is a figure showing the drive mechanism of the conventional magnetic drive microtool. It is a figure showing the area | region where a magnetic drive microtool does not move in the conventional drive mechanism. It is a figure showing the structure at the time of applying the magnetic force of the opposite direction to the magnetic force of the direction perpendicular | vertical to the drive plane emitted from the drive magnet among the drive mechanisms of this invention. It is a figure showing the structure of the drive which suppresses generation | occurrence | production of the magnetic flux of the direction perpendicular | vertical to a drive plane among the drive mechanisms of this invention. It is a figure showing the structure of the drive which applies a high frequency vibration to a microfluidic chip and reduces friction among the drive mechanisms of this invention. It is the figure which showed the tracking property with respect to the drive magnet of the magnetic drive microtool in the drive mechanism by this invention, and the conventional drive mechanism. It is the figure which showed the structure of the magnetic drive microtool extended using the drive mechanism of this invention in 2 degrees of freedom, and a drive mechanism. It is the figure which showed the structure of the fine particle sorting chip | tip and magnetic drive microtool performed using the drive mechanism of this invention. FIG. 8 shows the results of drive evaluation with two degrees of freedom using the drive mechanism of the magnetic drive microtool in FIG. 7. FIG. 8 shows the results of drive evaluation with two degrees of freedom using the drive mechanism of the magnetic drive microtool in FIG. 7 and applying high frequency vibration to the microfluidic chip. It is the figure which showed the change of the positioning accuracy at the time of changing a drive speed and an applied vibration amplitude. It is the figure which showed the structure of the chip | tip for enucleation of an egg performed using the drive mechanism of this invention, and a magnetic drive microtool. It is the figure which showed the structure of the fine particle sorting chip | tip and magnetic drive microtool performed using the drive mechanism of this invention.

  In the drive mechanism of the magnetic drive microtool according to the present invention, FIG. 3 shows the configuration and principle when a magnetic force in the direction opposite to the magnetic force perpendicular to the drive plane generated from the drive magnet is applied from the outside. In FIG. 3, by applying a force in the direction opposite to the perpendicular component to the driving plane of the magnetic force received by the magnetic driving microtool 1 by the auxiliary magnet 6 incorporated in the microfluidic chip 7, the magnetic driving microtool 1 is driven by the driving plane. The normal drag received from 2 is reduced.

  Further, since the magnetic drive microtool 1 is pulled up and down, the magnetic drive microtool 1 is inclined obliquely in the microfluidic chip 7 and the contact area with the drive plane 2 is reduced, so that the frictional force applied to the magnetic drive microtool 1 is greatly reduced. The followability with respect to the drive magnet 5 is improved, and the movement can be accurately controlled.

  FIG. 4 shows the configuration and principle of driving that suppresses the generation of magnetic flux in the direction perpendicular to the driving plane in the driving mechanism of the magnetic driving microtool according to the present invention. The magnet 5 has the same thickness as the magnetic drive microtool in the magnetic pole direction, and the magnetic flux flowing from the magnetic pole 3 installed in the horizontal direction flows in a loop via the magnetic drive microtool 1, and the magnetic flux that diverges outside is generated. Very little.

  Therefore, the magnetic flux flowing perpendicularly to the drive plane 2 with respect to the magnetic drive microtool 1 is reduced, and the frictional force is reduced. Further, since the magnetic flux flows parallel to the driving direction with respect to the magnetic driving microtool 1, the magnetic force received by the magnetic driving microtool 1 when the driving magnet 5 is moved coincides with the driving direction, and the magnetic force is efficiently converted into the driving force. Therefore, the followability with respect to the drive magnet 5 is improved, and the movement can be accurately controlled.

FIG. 5 shows the configuration and principle when high-frequency vibration is applied to the microfluidic chip in the friction reducing method for the magnetically driven microtool according to the present invention.
A vibrating body 29 is installed on the driving plane 2, and the vibrating body is vibrated at a high frequency, thereby applying high-frequency vibration to the driving plane 2 and the microfluidic chip 7. The magnetic drive microtool 1 arranged in the microfluidic chip 7 causes relative movement with the drive plane 2 and the apparent frictional force is reduced.

In this state, a magnetic force is applied to the magnetic drive microtool 1 by the permanent magnet 5 installed on the drive stage 30 and driven according to the movement of the permanent magnet 5.
Since the apparent frictional force between the magnetic drive microtool 1 and the drive plane 2 is greatly reduced by the high frequency vibration, the magnetic drive microtool 1 accurately follows the movement of the permanent magnet 5 and the positioning accuracy is greatly increased. improves.
[Example 1]
Experiments were conducted to evaluate the motion control performance of the drive mechanism of the magnetic drive microtool according to the present invention. The drive magnet was a neodymium cylindrical magnet with a diameter of 1.0 x 1.0 mm and was installed on a 1-axis linear stage.

The magnetic drive microtool was a nickel disk having a diameter of 1.0 × 0.05 mm, and the relative position between the drive magnet and the magnetic drive microtool was measured with a CCD camera attached to a microscope.
FIG. 6 shows the followability of the magnetic drive microtool when the drive magnet is displaced by a sine wave of 0.5 Hz with a stroke of ± 1.5 mm.

  The track 11 of the magnetic drive microtool in the conventional drive mechanism starts to move with a delay of about 0.3 seconds with respect to the track 10 of the drive magnet, and the deviation from the drive magnet 10 reaches a maximum of 1 mm. Yes.

  In such a state where the rising error is large, the magnetic drive microtool cannot keep up with the movement of the cells in the microfluidic chip. It also makes system automation very difficult.

  On the other hand, the drive mechanism 12 that incorporates a neodymium magnet as an auxiliary magnet in the microfluidic chip and reduces the direction component perpendicular to the drive plane of the magnetic force of the drive magnet has a rising response that is 10 times or more that of the conventional drive mechanism 11. It is fast and the amount of deviation from the drive magnet is very small.

Similarly, the drive mechanism 13 in which the magnetic poles of the drive magnet are installed parallel to the drive direction has a rising response that is 10 times faster than the conventional drive mechanism 11 and the amount of deviation from the drive magnet is very small. . The precise positioning and responsiveness of the magnetically driven microtool are very important not only for handling small objects but also for the automation of cell manipulation.
[Example 2]
By using the drive mechanism of the magnetic drive microtool according to the present invention, it is possible to improve the control of the movement of the magnetic drive microtool with two degrees of freedom.

  FIG. 7 shows a conceptual diagram of a two-degree-of-freedom magnetic drive microtool. The two permanent magnets 14 and 15 of the drive source are installed so that their poles are parallel to the drive plane on the same axis. Two permanent magnets 16 and 17 are installed so as to be orthogonal to the magnetic poles of the two permanent magnets 14 and 15, and a drive unit is formed so that the permanent magnets 16 and 17 are on the same axis.

  The magnetically driven microtool has four circular discs 18 and receives magnetic force from each permanent magnet. Each disk 18 part is connected by a thin support part 19 so that the relative positions of the four disks 18 do not shift.

An arm portion 20 is provided at one end of the disk, and cell manipulation can be performed here. As a result, in the magnetic drive microtool, the followability to the drive magnet unit is improved in two degrees of freedom, and the movement can be accurately controlled.
[Example 3]
Using the drive mechanism of the magnetic drive microtool according to the present invention, an experiment of fine particle sorting in a microfluidic chip was conducted. FIG. 8 shows the shape of a magnetically driven microtool and a microfluidic chip for sorting.

  The two two-degree-of-freedom magnetic drive microtool 22 installed in the microfluidic chip 21 has a disk portion 25 having a diameter of 1 mm, each receiving four magnetic forces, and an arm portion 26 for sorting fine particles at the tip thereof. The fine particles 27 that have flowed are sorted into a plurality of branched flow paths 28.

  The fine particles are introduced from the input port 23 and branched into the respective flow paths, and then the fine particles are observed by the observation unit 24. The drive magnets are installed at four locations below the disc portion 25 on the linear stage so that the magnetic poles are parallel to the drive plane, and the thickness in the magnetic pole direction is 1 mm, which is the same size as the diameter of the disc portion 25.

  As a result, the magnetic drive microtool 22 is driven with good followability with respect to the drive magnet, and the four magnets suppress the shake of the magnetic drive microtool, so that sorting can be performed in response to fast movement of the fine particles.

In addition, since the magnetic drive microtool 22 moves in response to a minute movement of the drive magnet, the number of branch flow paths 28 for sorting can be increased without changing the size of the microfluidic chip 21.
[Example 4]
9 and 10, the magnetic drive microtool drive mechanism shown in FIG. 7 was used to evaluate the drive of the magnetic drive microtool with and without high frequency vibration applied to the microfluidic chip.

  In the high frequency vibration, a vibration of 55 kHz is applied to the lower surface of the microfluidic chip by piezoelectric ceramics. When the vibration shown in FIG. 9 is not applied, the magnetic drive microtool locus 32 has an error average of 84 μm and a standard deviation of 28 μm with respect to the drive magnet locus 31.

On the other hand, when vibration is applied to the microfluidic chip shown in FIG. 10, the error in the magnetic drive microtool trajectory 33 relative to the drive magnet trajectory 31 is greatly reduced, and a circle with a diameter of 1 is drawn. The average error when measuring the deviation of the trajectory at this time was 9.4 μm, and the standard deviation was 0.1 μm, which is 10 times higher than that in FIG.
[Example 5]
Friction is generally known to change depending on speed, and also changes depending on the magnitude of vibration applied to the microfluidic chip, which affects the positioning accuracy of magnetically driven microtools in the microfluidic chip. give.

  FIG. 11 shows the positioning accuracy of the magnetic drive microtool when the drive speed and the vibration amplitude are changed. As the speed increases, the positioning accuracy deteriorates at any vibration amplitude, and the rate of deterioration decreases as the vibration amplitude increases.

However, in a region where the driving speed is very low, the positioning accuracy approaches the vibration amplitude as much as possible, so that the smaller the amplitude, the better the positioning accuracy is maintained. The best positioning accuracy at that time was improved 100 times or more compared with the case where no vibration was applied, and 1.1 μm was achieved.
[Example 6]
The egg enucleation work was performed using the drive mechanism of the magnetic drive microtool according to the present invention. Oocyte enucleation requires a force sufficient to cut cells and positioning accuracy to select and cut only the nucleus.

  According to the present invention, the magnetically driven microtool can have a strong force of mN order obtained from the force of the permanent magnet, and it is easy to select and cut only the nuclear site thanks to the positioning accuracy of μm order. Achievable.

  FIG. 12 shows a microfluidic chip for enucleation and a magnetically driven microtool. The egg 34 is put together with the culture solution into the microfluidic chip 40 from the inlet 37 and flows to the area where the magnetically driven microtool 36 is arranged by the fluid force, and the position of the nucleus 35 is moved by the magnetically driven microtool 36. The position of the core 35 is cut out by the magnetic drive microtool 36 after rotating while checking and controlling the posture.

The removed nuclei flow into the flow path following the nuclear discharge port 38 and are discarded. On the other hand, the cut ovum flows to the flow path that continues to the collection port 39, is collected, and is sent to the subsequent process.
[Example 7]
Experiments of fine particle sorting in a microfluidic chip were performed using a drive mechanism of a magnetically driven microtool that applies high-frequency vibration to the microfluidic chip to reduce friction. FIG. 13 shows the shape of a magnetically driven microtool and a microfluidic chip for sorting.

  The fine particles are introduced into the microfluidic chip from the inlet 41 and flow to the area where the magnetic drive microtool 42 for sorting is disposed by the fluid force. By closing all the channels other than the channels to be sorted by the magnetic drive microtool 42, the fluid flow can be guided to the desired channel, and the particles flowing therethrough can be sorted.

  By applying the high frequency vibration, the positioning accuracy of the magnetic drive microtool 42 is dramatically improved by the present invention, and the order of μm can be achieved. Therefore, the number of flow paths branching into the chip can be dramatically increased.

  In the example of FIG. 13, it is possible to provide 100 branches in a 3 mm × 3 mm microfluidic chip with a flow path interval of 10 μm. Further, when the speed of the fine particles is increased to increase the processing speed of the sorting, the fluid pressure applied to the magnetic drive microtool increases and the resistance increases, but the magnetic drive microtool according to the present invention has a strong generation force of a permanent magnet. It becomes possible to drive against high flow pressure.

DESCRIPTION OF SYMBOLS 1 Magnetic drive microtool 2 Drive plane 3 One magnetic pole of a drive magnet 4 The other magnetic pole of a drive magnet 5 Drive magnet 6 Auxiliary magnet 7 Microfluidic chip 8 Magnetic drive microtool comprised of nickel having a diameter of 1 mm × 0.05 mm 9 Driving magnet composed of neodymium with a diameter of 1 mm × 1 mm 10 Trajectory of driving magnet 11 Trajectory of magnetic driving microtool in conventional driving mechanism 12 Trajectory of magnetic driving microtool when using auxiliary magnet 13 Magnetic pole of driving magnet Trajectory 14 of magnetic drive microtool when installed parallel to drive direction Drive magnet 1 for expanding to 2 degrees of freedom
15 Driving magnet 2 for expanding to 2 degrees of freedom
16 Driving magnet 3 for expanding to 2 degrees of freedom
17 Drive magnet 4 for expanding to 2 degrees of freedom
18 Disk part 19 in which magnetic drive microtool receives magnetic force 19 Support part 20 that connects disk parts in magnetic drive microtool Cell operation part 21 in magnetic drive microtool Microfluidic chip 22 for particle sorting Magnetic drive microtool 23 for particle sorting Particulate loading port part 24 Particulate observation port part 25 Disk part 26 receiving magnetic force in magnetically driven microtool for particulates sorting Sorting arm part 27 in magnetically driven microtool for particulates sorting Particulate 28 Flow path 29 for sorting particulates Vibrating body 30 Driving Stage 31 Trajectory of drive magnet 32 Trajectory of magnetic drive microtool when vibration is not applied 33 Trajectory of magnetic drive microtool when vibration is applied 34 Egg 35 Core 36 Blade type magnetic drive micro Tool 37 Oocyte inlet 38 Nuclear outlet 39 Enucleated egg recovery port 40 Microfluidic chip 41 for egg enucleation 42 Particle inlet 42 Magnetically driven micro tool 43 for particle sorting Particle 44 A flow path 45 for sorting particles 45 Particle observation port section

Claims (9)

In a drive mechanism that drives magnetically in a non-contact manner by disposing a magnetically driven microtool with magnetism in the microfluidic chip and displacing the drive magnet, it is opposite to the magnetic force component emitted from the drive magnet in the direction perpendicular to the drive plane Applying a magnetic force in any direction from the outside, or setting the magnetic pole of the drive magnet in parallel with the drive direction to generate a magnetic flux parallel to the drive direction, thereby reducing the normal drag applied to the magnetic drive microtool . Or the drive mechanism characterized by reducing the frictional force concerning a magnetic drive microtool by applying a vibration to a microfluidic chip.   Compared to the case where a magnetic drive microtool with magnetism is placed in the microfluidic chip and the drive magnet is displaced in a non-contact manner by displacing the drive magnet so that the magnetic pole of the drive magnet is placed toward the magnetic drive microtool. Then, by having means for applying an external force in the opposite direction, or having means for matching the magnetic pole of the drive magnet with the drive direction of the magnetic drive microtool, the normal drag received from the drive plane applied to the magnetic drive microtool is obtained. A drive mechanism characterized in that the magnetic drive microtool is driven in a non-contact manner by reducing.   3. The drive mechanism according to claim 2, wherein a magnet is disposed on the opposite side of the drive magnet across the magnetic drive microtool to reduce a direction component perpendicular to the drive plane among the magnetic force received by the magnetic drive microtool. A drive mechanism characterized by:   4. The drive mechanism according to claim 3, wherein at least one of the magnets is a permanent magnet or an electromagnet.   The drive mechanism according to any one of claims 2 to 4, wherein the magnetic pole of the drive magnet is installed in parallel with the drive direction of the magnetic drive microtool.   6. The drive mechanism according to claim 5, wherein the magnetic pole direction length of the drive magnet is the same as the drive direction length of the magnetic drive microtool.   The drive mechanism according to claim 5 or 6, wherein the drive magnet is a permanent magnet or an electromagnet.   2. The drive mechanism according to claim 1, wherein friction between the magnetic drive microtool and the microfluidic chip is reduced by applying high-frequency micro vibrations of 100 Hz or more to the entire microfluidic chip or a part thereof. Drive mechanism.   9. The drive mechanism according to claim 8, wherein a vibrating body such as piezoelectric ceramics is attached to any one of the six surfaces of the microfluidic chip formed in a rectangular parallelepiped, and the vibrating body is vibrated at a high frequency of 100 Hz or more. A drive mechanism characterized by applying high-frequency vibration to a microfluidic chip.