JP5564723B2 - Fluid distribution device and microplant - Google Patents

Description

  The present invention relates to a fluid distribution apparatus and a microplant.

  The micro chemical process technology is a technology for performing a chemical reaction using a micro flow path having an equivalent diameter of 1 mm or less, and is a technology suitable for producing a small amount of high value-added functional materials such as pharmaceuticals and fine chemicals. . A micro plant is a production plant that consists of process equipment (micro processing equipment) that performs chemical reactions using micro chemical process technology. Through a technique called numbering up, throughput is improved (increase in throughput per unit time). Is planned.

  Here, the technique called numbering up is a fluid to be processed through a plurality of micro-channels (parallel channels) connected to each of the micro-processing devices by arranging a plurality of micro-processors in parallel. Is supplied to each micro processing device, and the processed fluid is recovered from each micro processing device via a parallel flow path. When such a technique of numbering up is used, the fluid supplied through the micro flow path is processed simultaneously by a plurality of micro processing apparatuses, so that the throughput can be improved.

  Non-Patent Document 1 below realizes a uniform flow distribution between the microprocessing devices paralleled by the technique called numbering up, and enables early detection / diagnosis of the channel blockage. A technology that can enable stable and long-term continuous operation of a microplant is disclosed. Specifically, in the following Non-Patent Document 1, a uniform flow rate distribution between the micro processing devices is realized by adopting a flow collecting and distributing structure of the upstream and downstream sides of the micro processing device. ing. In addition, a flow meter is provided in any two parallel flow paths of a plurality of parallel flow paths connected to the micro-processing device, and a blockage point is identified by obtaining a flow rate change ratio from the measurement results of these two flow meters. Then, the blockage degree of the blockage portion is estimated by multiplying the flow rate change amount by the flow rate change amount.

Osamu Tonomura, 3 others, “Fluid collection and distribution structure and occlusion diagnosis of micro chemical process”, Abstracts of the 40th Autumn Meeting of the Chemical Engineering Society, p. L207

  By the way, if the technique disclosed in Non-Patent Document 1 is used, even if the number of parallel microprocessing devices is 3 or more, it is possible to identify a microprocessing device that is blocked only by the measurement results of two flow meters. Certainly it is possible. However, if the pressure loss of the micro processing device connected to the parallel flow path becomes large for some reason, a change occurs in the fluid flow on the upstream side and the downstream side of the micro processing device, and the closed micro processing device is identified. There is a problem that it becomes difficult. Then, it takes time to identify the closed micro processing apparatus, and there is a problem that stable long-term continuous operation of the micro plant becomes difficult.

  Further, the flow path of the fluid collection and distribution structure disclosed in Non-Patent Document 1 is designed in consideration of the characteristics of the micro processing device and the physical properties of the fluid, regardless of the characteristics of the micro processing device and the physical properties of the fluid. It is not a generic one that can be used. For this reason, for example, it is necessary to redesign a new flow path every time a new micro plant is installed or every time the type or amount of products produced in the micro plant is changed, and it is difficult to reduce costs. There is.

  In addition, the characteristics of the micro processing apparatus and the characteristics of the fluid may change due to a change in ambient temperature or a change with time. Then, similarly to the case where the pressure loss of the above-mentioned micro processing apparatus becomes large, it becomes difficult to identify the closed micro processing apparatus, and as a result, the problem that stable long-term continuous operation of the micro plant becomes difficult. There is.

  The present invention has been made in view of the above circumstances, and is stable by including a fluid distribution device capable of detecting a closed position with high accuracy regardless of the characteristics of the micro processing device and the physical properties of the fluid, and the device. An object is to provide a microplant capable of long-term continuous operation.

In order to solve the above problems, the fluid distributor of the present invention distributes the fluid (W1) supplied to the input channel (11) to three or more output channels (13). And a distribution flow path (12) that combines a plurality of branch flow paths (Rc21 to Rc55, Rs11 to Rs60) and distributes the fluid supplied to the input flow path by the number of the output flow paths. And a flow meter (14a, 14b) for measuring the flow rate of two branch channels among the plurality of branch channels constituting the distribution channel.
According to the present invention, the flow rate of two branch channels out of a plurality of branch channels constituting a distribution channel that distributes the fluid supplied to the input channels by the number of output channels is measured by the flow meter.
Further, in the fluid distribution device of the present invention, the distribution channel has a structure in which the number of distribution units (B11 to B33) for distributing the fluid sequentially increases from the input channel toward the output channel, The flowmeter is characterized in that it measures the flow rate of the branch flow channel located on the output flow channel side with respect to the portion where the number of the distribution units is half the number of the output flow channels.
Further, in the fluid distribution device of the present invention, the distribution channel has a structure in which the plurality of branch channels are combined symmetrically with respect to the input channel, and the flowmeter includes the plurality of branch channels. Among them, the flow rate of two branch channels that are line-symmetric with respect to the input channel is measured.
In addition, the fluid distribution device of the present invention includes a monitoring device (15) that identifies a blocked output flow channel among the output flow channels based on a measurement result of the flow meter.
In the fluid distribution device of the present invention, the monitoring device stores a determination table (T1) indicating a relationship between flow rate changes in the two branch flow paths according to the closed state of the output flow path. ) And a determination unit (23) for comparing the measurement result of the flowmeter and the determination table stored in the storage unit to determine the blocked output flow path.
The microplant of the present invention is a microplant (30) that performs a predetermined process on the fluid (W1), the fluid distribution device according to any one of the above that distributes the fluid, and the output flow of the fluid distribution device. And a plurality of micro-processing devices (33a to 33d) connected to the channel and processing the fluid distributed by the fluid distribution device.

  According to the present invention, the flow rate of two branch channels among a plurality of branch channels constituting a distribution channel that distributes the fluid supplied to the input channels by the number of output channels is measured by a flow meter. Therefore, for example, there is an effect that the closed portion can be detected with high accuracy regardless of the characteristics of the micro processing apparatus and the physical properties of the fluid. As a result, even if the characteristics of the micro-processing device or the characteristics of the fluid change due to changes in ambient temperature or changes over time, the blockage location of the output flow path can be specified, which enables stable and long-term continuous operation of the microplant. There is an effect.

It is a top view which shows the structure of the fluid distribution apparatus by 1st Embodiment of this invention. It is a figure which shows the principal part structure of the monitoring apparatus 15 in 1st Embodiment. In 1st Embodiment, it is a graph which shows the relationship of the flow velocity change in branch microchannel Rc31, Rc33. It is a figure which shows the principal part structure of the micro plant by 1st Embodiment of this invention. It is a flowchart which shows operation | movement of the micro plant by 1st Embodiment of this invention. It is a top view which shows the structure of the fluid distribution apparatus by 2nd Embodiment of this invention. In 2nd Embodiment, it is a graph which shows the relationship of the flow velocity change in branch microchannel Rs32, Rs35. It is a top view which shows the structure of the fluid distribution apparatus by 3rd Embodiment of this invention. In 3rd Embodiment, it is a graph which shows the relationship of the flow velocity change in branch microchannel Rc51, Rc55. In 3rd Embodiment, it is a graph which shows the relationship of the flow velocity change in branch microchannel Rs42, Rs47.

  Hereinafter, a fluid distribution device and a microplant according to an embodiment of the present invention will be described in detail with reference to the drawings.

[First Embodiment]
FIG. 1 is a plan view showing a configuration of a fluid distributor according to a first embodiment of the present invention. As shown in FIG. 1, the fluid distribution device 1 of the present embodiment includes an input flow path 11, a distribution flow path 12, an output flow path 13, micro flow meters 14 a and 14 b (flow meters), and a monitoring device 15. The processing target fluid W1 (fluid) supplied from the input flow path 11 is divided into four processing target fluids W11 to W14, and the blockage location of the output flow path 13 can be specified. The input channel 11 is composed of an input microchannel Rc11, the distribution channel 12 is composed of branch microchannels Rc21 to Rc33, Rs11 to Rs36 (branch channels), and the output channel 13 is an output microchannel. It consists of flow paths Rc41 to Rc44.

  The subscript “c” in each of the microchannels indicates that the microchannel extends in the X direction of the XY orthogonal coordinate system shown in the figure, and the subscript “s” It shows that the micro flow path extends in the Y direction in the XY orthogonal coordinate system. In addition, among the branch microchannels Rc21 to Rc33 and Rs11 to Rs36 constituting the distribution channel 12, the channel lengths Lc of the microchannels Rc21 to Rc33 extending in the X direction are all equal and extend in the Y direction. The flow path lengths Ls of the micro flow paths Rs11 to Rs36 are all equal.

  The input microchannel Rc11 constituting the input channel 11 is a microchannel having a predetermined length Lc11, a predetermined cross-sectional area Ac11, and a hydraulic equivalent diameter Dc11 and extending in the X direction, and is input from one end (left end). The processing target fluid W1 is output to a pair of branch microchannels Rs11 and Rs12 connected to the other end (right end). A processing target fluid W1 having a predetermined flow rate q11 is supplied from the outside to one end (left end) of the input micro flow path Rc11.

  Of the pair of branch microchannels Rs11 and Rs12 constituting the distribution channel 12, one branch microchannel Rs11 has a predetermined length Ls11, a predetermined cross-sectional area As11, and a hydraulic equivalent diameter Ds11 and extends in the Y direction. The processing target fluid input from one end (lower end) is output to the branch microchannel Rc21 from the other end (upper end). The other branch microchannel Rs12 is a microchannel having a predetermined length Ls12, a predetermined cross-sectional area As12, and a hydraulic equivalent diameter Ds12 and extending in the Y direction, and is input from one end (upper end). The target fluid is output from the other end (lower end) to the branch microchannel Rc22.

  The branch microchannel Rc21 is a microchannel having a predetermined length Lc21, a predetermined cross-sectional area Ac21, and a hydraulic equivalent diameter Dc21 and extending in the X direction, and a fluid to be processed input from one end (left end). It outputs to a pair of branch microchannel Rs21, Rs22 connected to the other end (right end). The branch microchannel Rc22 is a microchannel extending in the X direction having a predetermined length Lc22, a predetermined cross-sectional area Ac22, and a hydraulic equivalent diameter Dc22, and is a processing target input from one end (left end). The fluid is output to a pair of branch microchannels Rs23 and Rs24 connected to the other end (right end).

  Of the pair of branch microchannels Rs21 and Rs22 connected to the other end (right end) of the branch microchannel Rc21, one branch microchannel Rs21 has a predetermined length Ls21, a predetermined cross-sectional area As21, and a hydraulic equivalent diameter Ds21. And the process target fluid input from one end (lower end) is output to the branch microchannel Rc31 from the other end (upper end). The other branch microchannel Rs22 is a microchannel that has a predetermined length Ls22, a predetermined cross-sectional area As22, and a hydraulic equivalent diameter Ds22 and extends in the Y direction, and is input from one end (upper end). The target fluid is output from the other end (lower end) to the branch microchannel Rc32.

  Of the pair of branch microchannels Rs23 and Rs24 connected to the other end (right end) of the branch microchannel Rc22, one branch microchannel Rs23 has a predetermined length Ls23, a predetermined cross-sectional area As23, and a hydraulic equivalent diameter Ds23. And the process target fluid input from one end (lower end) is output to the branch microchannel Rc32 from the other end (upper end). The other branch microchannel Rs24 is a microchannel that has a predetermined length Ls24, a predetermined cross-sectional area As24, and a hydraulic equivalent diameter Ds24 and extends in the Y direction, and is a processing target fluid input from one end (upper end). Is output from the other end (lower end) to the branch microchannel Rc33.

  The branch microchannel Rc31 is a microchannel having a predetermined length Lc31, a predetermined cross-sectional area Ac31, and a hydraulic equivalent diameter Dc31 and extending in the X direction. It outputs to a pair of branch microchannel Rs31, Rs32 connected to the other end (right end). The branch microchannel Rc32 is a microchannel that has a predetermined length Lc32, a predetermined cross-sectional area Ac32, and a hydraulic equivalent diameter Dc32 and extends in the X direction, and receives a processing target fluid input from one end (left end). It outputs to a pair of branch microchannel Rs33, Rs34 connected to the other end (right end). The branch microchannel Rc33 is a microchannel that has a predetermined length Lc33, a predetermined cross-sectional area Ac33, and a hydraulic equivalent diameter Dc33 and extends in the X direction. It outputs to a pair of branch microchannel Rs35, Rs36 connected to the other end (right end).

  Of the pair of branch microchannels Rs31 and Rs32 connected to the other end (right end) of the branch microchannel Rc31, one branch microchannel Rs31 has a predetermined length Ls31, a predetermined cross-sectional area As31, and a hydraulic equivalent diameter Ds31. The fluid to be processed that is input from one end (lower end) is output to the output microchannel Rc41 from the other end (upper end). Also. The other branch microchannel Rs32 is a microchannel having a predetermined length Ls32, a predetermined cross-sectional area As32, and a hydraulic equivalent diameter Ds32 and extending in the Y direction, and is a processing target fluid input from one end (upper end). From the other end (lower end) to the output microchannel Rc42.

  Of the pair of branch microchannels Rs33 and Rs34 connected to the other end (right end) of the branch microchannel Rc32, one branch microchannel Rs33 has a predetermined length Ls33, a predetermined cross-sectional area As33, and a hydraulic equivalent diameter Ds33. The fluid to be processed that is input from one end (lower end) is output to the output microchannel Rc42 from the other end (upper end). The other branch microchannel Rs34 is a microchannel having a predetermined length Ls34, a predetermined cross-sectional area As34, and a hydraulic equivalent diameter Ds34 and extending in the Y direction, and is input from one end (upper end). The target fluid is output from the other end (lower end) to the output microchannel Rc43.

  Of the pair of branch microchannels Rs35 and Rs36 connected to the other end (right end) of the branch microchannel Rc33, one branch microchannel Rs35 has a predetermined length Ls35, a predetermined cross-sectional area As35, and a hydraulic equivalent diameter Ds35. The fluid to be processed that is input from one end (lower end) is output to the output microchannel Rc43 from the other end (upper end). The other branch microchannel Rs36 is a microchannel that has a predetermined length Ls36, a predetermined cross-sectional area As36, and a hydraulic equivalent diameter Ds36 and extends in the Y direction, and is input from one end (upper end). The target fluid is output from the other end (lower end) to the output microchannel Rc44.

  The output micro-channel Rc41 constituting the output channel 13 is a micro-channel having a predetermined length Lc41, a predetermined cross-sectional area Ac41, and a hydraulic equivalent diameter Dc41 and extending in the X direction, and is input from one end (left end). The processing target fluid to be processed is output as the processing target fluid W11 from the other end (right end). The output microchannel Rc42 is a microchannel having a predetermined length Lc42, a predetermined cross-sectional area Ac42, a hydraulic equivalent diameter Dc42 and extending in the X direction, and is a processing target fluid input from one end (left end). Is output from the other end (right end) as the processing target fluid W12.

  The output microchannel Rc43 is a microchannel that has a predetermined length Lc43, a predetermined cross-sectional area Ac43, and a hydraulic equivalent diameter Dc43 and extends in the X direction, and is a processing target fluid that is input from one end (left end). Is output from the other end (right end) as the processing target fluid W13. The output microchannel Rc44 is a microchannel that has a predetermined length Lc44, a predetermined cross-sectional area Ac44, and a hydraulic equivalent diameter Dc44 and extends in the X direction, and is a fluid to be processed that is input from one end (left end). Is output from the other end (right end) as the processing target fluid W14.

  Note that the length Lc41 of the output microchannel Rc41 and the length Lc44 of the output microchannel Rc44 constituting the output channel 13 are equal, and the length Lc42 of the output microchannel Rc42 and the output microchannel Rc43 are the same. Is equal to the length Lc43. The output microchannels Rc42 and Rc42 are set longer than the output microchannels Rc41 and Rc44. This is for equalizing the flow rates of the processing target fluids W11 to W14 output from the output microchannels Rc41 to Rc44.

  As described above, the fluid distributor 1 includes the six diverters B11 to B33 (distributor) that divides the processing target fluid and the three merging sections G21 to G32 that merge the processing target fluid. The processing target fluid W1 supplied to the micro flow path Rc11 is split / merged at each of the branching portions B11 to B33 and the joining portions G21 to G32, and finally the processing target fluid W11 to the four output microchannels Rc41 to Rc44. Output to the outside as W14. As described above, the fluid distribution device 1 has a structure in which the number of flow dividing sections that distribute the fluid to be processed is sequentially increased from the input flow path 11 side to the output flow path 13 side, and the input flow path 11 is configured. The structure is symmetrical (line symmetric) with respect to an axis parallel to the X axis through the input microchannel Rc11.

  Note that the fluid distributor 1 has a cross-sectional area Ac11 to Ac44, As11 for all the microchannels, that is, the input microchannels Rc11, the branch microchannels Rc21 to Rc33, Rs11 to Rs36, and the output microchannels Rc41 to Rc44. -As36 are all equal, and hydraulic equivalent diameters Dc11-Dc44, Ds11-Ds36 are all set equal. The fluid distributor 1 is designed based on the pressure loss compartment model so that the flow rates of the processing target fluids W11 to W14 output to the outside are all equal.

  The micro flow meter 14a is attached to the branch micro flow channel Rc31 shown in FIG. 1, and measures the flow rate of the processing target fluid flowing through the branch micro flow channel Rc31. The micro flow meter 14b is attached to the branch micro flow channel Rc33 shown in FIG. 1, and measures the flow rate of the processing target fluid flowing through the branch micro flow channel Rc33. As described above, the micro flowmeters 14a and 14b are portions (the portion constituted by the four branch microchannels Rs21 to Rs24) in which the number of branching portions is half the number of output microchannels constituting the output channel 13. Branched microchannels Rc31 and Rc33 which are located closer to the output channel 13 than the other) and have a symmetric (axisymmetric) relationship with respect to an axis parallel to the X axis through the input microchannel Rc11 constituting the input channel 11 It arrange | positions so that the flow volume of the process target fluid which flows through may be measured. This is because a large flow rate change is expected when the flow of the processing target fluids W11 to W14 stagnate due to the blockage of the output microchannels Rc41 to Rc44.

  The monitoring device 15 monitors the presence or absence of blockage of the output microchannels Rc41 to Rc44 constituting the output channel 13 based on the measurement results of the micro flow meters 14a and 14b, and notifies the monitoring result. The blockage of the output microchannels Rc41 to Rc44 is, for example, clogging of foreign matter or the like in the output microchannels Rc41 to Rc44, or an abnormality in a device (for example, a micro processing device) connected to the output microchannels Rc41 to Rc44. Caused by

  FIG. 2 is a diagram illustrating a main configuration of the monitoring device 15 according to the first embodiment. As shown in FIG. 2, the monitoring device 15 includes A / D converters 21a and 21b, comparators 22a and 22b, a determination unit 23, a display unit 24, and a storage unit 25. The A / D converter 21a converts a signal (measurement signal) indicating a flow rate measurement result output from the micro flow meter 14a into a digital signal. Similarly, the A / D converter 21b converts the measurement signal output from the micro flow meter 14b into a digital signal.

  The comparators 22a and 22b compare the digital signals output from the A / D converters 21a and 21b with the reference flow rate Q1 stored in the storage unit 25, and output a signal indicating the comparison result. Here, the reference flow rate Q1 stored in the storage unit 25 is the flow rate of the fluid to be processed that flows through each of the branch microchannels Rc31 and Rc33 when the output microchannels Rc41 to Rc44 are not blocked. . That is, the comparators 22a and 22b indicate the difference (flow rate change amount) between the flow rate indicated by the measurement signal output from the micro flowmeters 14a and 14b and the flow rate of the branch microchannels Rc31 and Rc33 at the normal time. Output a signal.

  The determination unit 23 compares the signals output from the comparators 22a and 22b with the determination table T1 stored in the storage unit 25 to determine whether or not the output microchannels Rc41 to Rc44 are blocked. . Here, the determination table T1 stored in the storage unit 25 indicates the relationship between the flow rate changes in the branch microchannels Rc31 and Rc33 according to the closed state of the output microchannels Rc41 to Rc44 constituting the output channel 13. It is shown. This determination table T1 creates a simulated state in which the output microchannels Rc41 to Rc44 are closed, and shows the measurement results of the micro flow meters 14a and 14b obtained when each of the output microchannels Rc41 to Rc44 is closed. Created using.

  FIG. 3 is a graph showing the relationship of flow velocity changes in the branch microchannels Rc31 and Rc33 in the first embodiment. In the graph shown in FIG. 3, the horizontal axis indicates the flow rate variation ΔV1 of the branch microchannel Rc31, and the vertical axis indicates the flow rate variation ΔV2 of the branch microchannel Rc33. Note that the flow rate change amount ΔV1 of the branch microchannel Rc31 is synonymous with the flow rate change amount of the branch microchannel Rc31 or the change amount of the measurement result of the micro flowmeter 14a, and the flow rate change amount ΔV2 of the branch microchannel Rc33. Is synonymous with the amount of change in the flow rate of the branch microchannel Rc33 or the amount of change in the measurement result of the microflow meter 14b.

  In FIG. 3, the points indicated by white squares indicate that the output microchannel Rc41 (Ch.1) is closed while the output ends (right ends) of the output microchannels Rc41 to Rc44 are open. This is a point indicating the relationship between the flow rate variations ΔV1 and ΔV2 when they are artificially created. The point indicated by the white diamond mark is a pseudo state in which the output microchannel Rc42 (Ch.2) is closed while the output ends (right end) of the output microchannels Rc41 to Rc44 are open. This is a point showing the relationship between the flow rate variation amounts ΔV1 and ΔV2 when they are created.

  Similarly, a point indicated by a white triangle mark represents a state in which the output microchannel Rc43 (Ch.3) is closed while the output ends (right ends) of the output microchannels Rc41 to Rc44 are opened. It is a point which shows the relationship of the flow-velocity variation | change_quantity (DELTA) V1 and (DELTA) V2 when it produces automatically. The point indicated by the white circle is a pseudo state in which the output microchannel Rc44 (Ch.4) is closed while the output ends (right end) of the output microchannels Rc41 to Rc44 are open. This is a point showing the relationship between the flow rate variation amounts ΔV1 and ΔV2 when they are created.

  An approximate curve L11 for a white square mark and an approximate curve L12 for a white diamond mark appear in the second quadrant of the graph shown in FIG. 3, and the magnitude (absolute value) of the slope is closer to that of the approximate curve L11. The curve L12 is larger. On the other hand, the approximate curve L13 for the white triangle mark and the approximate curve L14 for the white circle mark appear in the fourth quadrant of the graph shown in FIG. 3, and the magnitude (absolute value) of the slope is the approximate curve. The approximate curve L14 is larger than L13.

  In FIG. 3, the points indicated by black squares are the output ends of the output microchannels Rc41 to Rc44 in order to simulate the pressure loss of the micro processing apparatus connected to the output microchannels Rc41 to Rc44. This is a point showing the relationship between the flow rate variation amounts ΔV1 and ΔV2 when a state in which the output microchannel Rc41 (Ch.1) is closed in a state where a restriction is attached to the right end) is simulated. Also, the points indicated by the black rhombus marks simulate the state in which the output microchannel Rc42 (Ch.2) is closed while the aperture is attached to the output ends (right end) of the output microchannels Rc41 to Rc44. It is a point which shows the relationship of the flow-velocity variation | change_quantity (DELTA) V1 and (DELTA) V2 when it produces automatically.

  Similarly, the points indicated by black triangles indicate that the output microchannel Rc43 (Ch.3) is closed with the aperture attached to the output ends (right end) of the output microchannels Rc41 to Rc44. This is a point indicating the relationship between the flow rate variations ΔV1 and ΔV2 when they are artificially created. Further, the point indicated by the black circle represents a state in which the output microchannel Rc44 (Ch. 4) is closed while the aperture is attached to the output ends (right end) of the output microchannels Rc41 to Rc44. It is a point which shows the relationship of the flow-velocity variation | change_quantity (DELTA) V1 and (DELTA) V2 when it produces automatically.

  The approximate curve L21 for the black square mark and the approximate curve L22 for the black diamond mark appear in the second quadrant of the graph shown in FIG. 3, and the slope of the approximate curve L21 is substantially the same as the slope of the approximate curve L11. Yes, the slope of the approximate curve L22 is substantially the same as the slope of the approximate curve L12. Further, the approximate curve L23 for the black triangle and the approximate curve L24 for the black circle appear in the fourth quadrant of the graph shown in FIG. 3, and the slope of the approximate curve L23 is substantially the same as the slope of the approximate curve L13. The slope of the approximate curve L24 is substantially the same as the slope of the approximate curve L14.

  As described above, the relationship between the flow rate change amount ΔV1 of the branch microchannel Rc31 and the flow rate change amount ΔV2 of the branch microchannel Rc33 varies greatly depending on which of the output microchannels Rc41 to Rc44 is blocked. . Moreover, even if a micro processing device is connected to the output micro flow paths Rc41 to Rc44 and pressure loss occurs, the relationship between the flow rate variations ΔV1 and ΔV2 is almost the same as the relationship when no pressure loss occurs. This means that even if the characteristics of the micro processing apparatus connected to the output micro flow paths Rc41 to Rc44 and the physical properties of the fluid to be processed change, the relationship between the flow rate variation amounts ΔV1 and ΔV2 hardly changes. Therefore, if the flow velocity changes ΔV1 and ΔV2 generated in the branch microchannels Rc31 and Rc32 are obtained, the blockage location can be specified using the graph shown in FIG.

  The determination table T1 stored in the storage unit 25 is created in advance using a graph showing the relationship between the flow rate variation amounts ΔV1 and ΔV2 shown in FIG. The determination table T1 does not necessarily need to be newly created every time the characteristics of the micro processing device connected to the output micro flow paths Rc41 to Rc44 and the physical properties of the processing target fluid change, but the detection accuracy of the occluded portion is improved. From the standpoint of enhancement, a new one may be created each time the characteristics of the micro processing apparatus and the physical properties of the fluid to be processed change. The display unit 24 includes a display device such as a liquid crystal display device, and displays the determination result (closed portion) of the determination unit 23.

  Next, the microplant according to the first embodiment of the present invention will be described. FIG. 4 is a diagram showing a main configuration of the microplant according to the first embodiment of the present invention. As shown in FIG. 4, the micro plant 30 includes a micro supply tank 31, a micro pump 32, the above-described fluid distribution device 1, micro processing devices 33 a to 33 d, a fluid collection device 34, and a micro recovery tank 35. The processing target fluid supplied from the supply tank 31 is processed.

  The micro supply tank 31 is a tank that stores a processing target fluid that is a process raw material. The micropump 32 discharges the fluid to be processed from the micro supply tank 31 and supplies it to the input microchannel Rc11 of the fluid distributor 1. The fluid distributor 1 distributes the processing target fluid W1 supplied from the micropump 32 into four parts and supplies them from the output microchannels Rc41 to Rc44 to the microprocessors 33a to 33d, respectively.

  The micro processing devices 33a to 33d perform predetermined process processing on the processing target fluids W11 to W14 supplied via the output micro flow channels Rc41 to Rc44, and the input micro flow of the fluid collecting device 34 is processed fluids W21 to W24. Output to each of the paths R1 to R4. As shown in the figure, the fluid collection device 34 includes a flow channel obtained by inverting the fluid distribution device 1 left and right. The fluid collection device 34 collects processed fluids W21 to W24 input from the microprocessing devices 33a to 33d, respectively. Output from one output microchannel R5 to the microrecovery tank 35. The micro collection tank 35 collects and stores the processed fluid collected by the fluid collection device 34.

  Next, operation | movement of the micro plant 30 in the said structure is demonstrated. Note that the determination table T1 stored in the storage unit 25 of the monitoring device 15 provided in the fluid distribution device 1 forming a part of the microplant 30 indicates that the output microchannels Rc41 to Rc44 of the fluid distribution device 1 are closed. It is assumed that it is created in advance using the measurement results of the micro flow meters 14a and 14b when they are artificially created.

  FIG. 5 is a flowchart showing the operation of the microplant according to the first embodiment of the present invention. When the operation of the micro plant 30 is started, the processing target fluid W1 discharged from the micro supply tank 31 by the micro pump 32 is supplied to the input micro flow path Rc11 of the fluid distributor 1. The processing target fluid W1 supplied to the micro flow path Rc11 is divided / combined in the fluid distributor 1, and is output from the four output micro flow paths Rc41 to Rc44 as processing target fluids W11 to W14.

  These processing target fluids W11 to W14 are processed in the micro processing devices 33a to 33d, and are output to the input micro flow paths R1 to R4 of the fluid collecting device 34 as processed fluids W21 to W24, respectively. The processed fluids W21 to W24 output from the micro processing devices 33a to 33d are collected by the fluid collecting device 34 and output to the micro recovery tank 35 from one output micro flow path R5.

  When the above operation is started, the monitoring device 15 acquires the measurement results of the micro flow meters 14a and 14b, and stores the measurement results in the storage unit 25 as the reference flow rate Q1 (step S11). When the acquisition of the reference flow rate Q1 ends and a predetermined time elapses, the monitoring device 15 takes in the measurement results of the micro flow meters 14a and 14b as the evaluation flow rate (step S12). Then, the determination unit 23 of the evaluation device 15 determines whether or not the output microchannels Rc41 to Rc44 are blocked based on the signals output from the comparators 22a and 22b (step S13). Specifically, whether or not the values of the signals output from the comparators 22a and 22b exceed a preset threshold value (for example, the threshold value is “0”) (that is, the branch microchannel Rc31, Whether or not the blockage has occurred is determined based on whether or not the flow rate of Rc32 has changed from the reference flow rate Q1.

  When it is determined that the blockage has occurred (when the determination result of step S13 is “YES”), the determination unit 23 outputs the signals output from the comparators 22a and 22b and the determination table stored in the storage unit 25. Compared with T1, a process of identifying the blocked output microchannel from among the output microchannels Rc41 to Rc44 is performed (step S14). Specifically, the blocked output microchannel is identified based on changes in the flow rate variation ΔV1 of the branch microchannel Rc31 and the flow rate variation ΔV2 of the branch microchannel Rc33.

  For example, the change direction of the flow rate change amount ΔV1 of the branch microchannel Rc31 is the negative direction shown in FIG. 3, and the change direction of the flow rate change amount ΔV2 of the branch microchannel Rc33 is the positive direction shown in FIG. In this case, there is a possibility that the output microchannel Rc41 (Ch.1) or the output microchannel Rc42 (Ch.2) is blocked. The determination unit 23 obtains an inclination from the flow velocity change amount ΔV1 and the flow velocity change amount ΔV2, and determines that the output microchannel Rc41 is closed if the inclination is close to the inclination of the approximate curve L11, and if the inclination is close to the inclination of the approximate curve L12. It is determined that the output microchannel Rc42 is blocked. When the determination of the blocked flow path is completed, the determination result is displayed on the display unit 24 (step S15).

  Here, not only the determination result of the closed channel is displayed on the display unit 24, but also the cleaning or replacement of the micro processing device connected to the channel determined to be closed while the operation of the micro plant 30 is continued. It is possible to make it possible. Specifically, valves that open and close manually or automatically are provided on the upstream and downstream sides of the micro processing apparatus, and the valves on the upstream and downstream sides of the micro processing apparatus connected to the flow path determined to be closed are provided. Close manually or automatically, remove the blocked micro processor and perform cleaning or replacement. When the cleaning or replacement of the micro processing apparatus is completed, the upstream and downstream valves of the micro processing apparatus are opened manually or automatically. Thereby, since it is possible to clean or replace only the closed micro processing apparatus without interrupting the operation of the micro plant 30, it is possible to prevent a decrease in throughput as much as possible.

  When the above process is completed or when the determination result in step S13 is “NO”, the monitoring device 15 determines whether or not the operation of the microplant 30 is continued (step S16). When the operation is continued (when the determination result of step S16 is “YES”), the process of steps S12 to S16 described above is repeatedly performed, thereby periodically monitoring the blocked channel. On the other hand, when the operation ends (when the determination result of step S16 is “NO”), the monitoring process by the monitoring device 15 ends.

  In the above-described example, for the sake of simplicity, the monitoring device 15 only identifies the blocked output microchannel. However, the monitoring device 15 identifies the blocked output microchannel and outputs the output microchannel. The degree of blockage of the road may be obtained. Further, the blockage degree may not be calculated only when the blockage of the output microchannel is determined, but the blockage degree may be calculated periodically regardless of the determination result. By periodically calculating the degree of blockage, signs of blockage can be detected before any of the output microchannels is completely blocked, which is preferable in terms of stable operation of the microplant 30.

[Second Embodiment]
FIG. 6 is a plan view showing a configuration of a fluid distributor according to the second embodiment of the present invention. The fluid distributor 2 of the present embodiment shown in FIG. 6 and the fluid distributor 1 of the first embodiment shown in FIG. 1 are different in the attachment positions of the micro flow meters 14a and 14b. In the fluid distribution device 2 of the present embodiment, the micro flow meter 14a is attached to the branch micro flow channel Rs32 and measures the flow rate of the processing target fluid flowing through the branch micro flow channel Rs32. The micro flow meter 14b is attached to the branch micro flow channel Rs35, and measures the flow rate of the processing target fluid flowing through the branch micro flow channel Rs35.

  However, in the micro flowmeters 14a and 14b, as in the first embodiment, the number of branching portions is half the number of output microchannels constituting the output channel 13 (four branch microchannels Rs21˜ It is located closer to the output flow path 13 than the portion composed of Rs24. Similarly to the first embodiment, the micro flowmeters 14a and 14b include branch microchannels Rs32 and Rs35 that are symmetrical (line symmetric) with respect to an axis parallel to the X axis through the input microchannel Rc11. It arrange | positions so that the flow volume of the flowing process target fluid may be measured.

  FIG. 7 is a graph showing the relationship between flow velocity changes in the branch microchannels Rs32 and Rs35 in the second embodiment. In the graph shown in FIG. 7, the horizontal axis represents the flow rate variation ΔV3 of the branch microchannel Rs32, and the vertical axis represents the flow rate variation ΔV4 of the branch microchannel Rs35. The flow rate change amount ΔV3 of the branch microchannel Rs32 is synonymous with the flow rate change amount of the branch microchannel Rs32 or the change amount of the measurement result of the micro flowmeter 14a, and the flow rate change amount ΔV4 of the branch microchannel Rs35. Is synonymous with the amount of change in the flow rate of the branch microchannel Rs35 or the amount of change in the measurement result of the microflow meter 14b.

  In FIG. 7, the points indicated by white squares indicate that the output microchannel Rc41 (Ch.1) is closed while the output ends (right end) of the output microchannels Rc41 to Rc44 are open. This is a point showing the relationship between the flow rate variation amounts ΔV3 and ΔV4 when they are artificially created. The point indicated by the white diamond mark is a pseudo state in which the output microchannel Rc42 (Ch.2) is closed while the output ends (right end) of the output microchannels Rc41 to Rc44 are open. This is a point showing the relationship between the flow rate variation amounts ΔV3 and ΔV4 when they are created.

  Similarly, a point indicated by a white triangle mark represents a state in which the output microchannel Rc43 (Ch.3) is closed while the output ends (right ends) of the output microchannels Rc41 to Rc44 are opened. It is a point which shows the relationship between the flow-velocity variation | change_quantity (DELTA) V3 and (DELTA) V4 when producing automatically. The point indicated by the white circle is a pseudo state in which the output microchannel Rc44 (Ch.4) is closed while the output ends (right end) of the output microchannels Rc41 to Rc44 are open. This is a point showing the relationship between the flow rate variation amounts ΔV3 and ΔV4 when they are created.

  The approximate curve L31 for the white square mark appears in the fourth quadrant of the graph shown in FIG. Further, the approximate curve L32 for the white diamond mark and the approximate curve L33 for the white triangle mark appear in the third quadrant of the graph shown in FIG. 7, and the magnitude of the inclination (absolute value) is larger than that of the approximate curve L32. The approximate curve L33 is larger. Further, the approximate curve L34 for the white circle appears with a large slope in the second quadrant of the graph shown in FIG.

  In FIG. 7, the points indicated by black squares indicate the output ends of the output microchannels Rc41 to Rc44 in order to simulate the pressure loss of the micro processing apparatus connected to the output microchannels Rc41 to Rc44. This is a point showing the relationship between the flow rate variation amounts ΔV3 and ΔV4 when a state in which the output microchannel Rc41 (Ch.1) is closed in a state in which a restriction is attached to the right end) is simulated. Also, the points indicated by the black rhombus marks simulate the state in which the output microchannel Rc42 (Ch.2) is closed while the aperture is attached to the output ends (right end) of the output microchannels Rc41 to Rc44. It is a point which shows the relationship between the flow-velocity variation | change_quantity (DELTA) V3 and (DELTA) V4 when producing automatically.

  Similarly, the points indicated by black triangles indicate that the output microchannel Rc43 (Ch.3) is closed with the aperture attached to the output ends (right end) of the output microchannels Rc41 to Rc44. This is a point showing the relationship between the flow rate variation amounts ΔV3 and ΔV4 when they are artificially created. Further, the point indicated by the black circle represents a state in which the output microchannel Rc44 (Ch. 4) is closed while the aperture is attached to the output ends (right end) of the output microchannels Rc41 to Rc44. It is a point which shows the relationship between the flow-velocity variation | change_quantity (DELTA) V3 and (DELTA) V4 when producing automatically.

  The approximate curve L41 for the black square appears in the fourth quadrant of the graph shown in FIG. 7, and the slope of the approximate curve L41 is substantially the same as the slope of the approximate curve L31. Further, the approximate curve L42 for the black diamond mark and the approximate curve L43 for the black triangle mark appear in the third quadrant of the graph shown in FIG. 7, and the slope of the approximate curve L42 is substantially the same as the slope of the approximate curve L32. The slope of the approximate curve L43 is substantially the same as the slope of the approximate curve L33. Further, the approximate curve L44 for the black circle appears in the second quadrant of the graph shown in FIG. 7, and the slope of the approximate curve L44 is substantially the same as the slope of the approximate curve L34.

  Thus, the relationship between the flow rate change amount ΔV3 of the branch microchannel Rs32 and the flow rate change amount ΔV4 of the branch microchannel Rs35 varies greatly depending on which of the output microchannels Rc41 to Rc44 is blocked. . In addition, even if a micro processing device is connected to the output micro flow paths Rc41 to Rc44 and pressure loss occurs, the relationship between the flow rate variation amounts ΔV3 and ΔV4 is almost the same as that when no pressure loss occurs. Further, when the graph shown in FIG. 7 is compared with the graph shown in FIG. 3, the approximate curves L31 to L14 shown in FIG. 7 are smaller than the minimum angle formed by the approximate curves L11 to L14 (approximate curves L21 to L24) shown in FIG. Since the minimum angle formed by L34 (approximate curves L41 to L44) is larger, that is, the degree of separation of the approximate curve is higher, the closed portion can be identified with higher accuracy.

  In the present embodiment, the determination table T1 stored in the storage unit 25 is created in advance using a graph showing the relationship between the flow rate change amounts ΔV3 and ΔV4 shown in FIG. As described above, since the fluid distribution device 2 of the present embodiment is different only in the arrangement of the micro flow meters 14a and 14b and the content of the determination table T1, detailed description of the aspect and operation incorporated in the micro plant is as follows. Omitted.

[Third Embodiment]
FIG. 8 is a plan view showing the configuration of the fluid distribution apparatus according to the third embodiment of the present invention. As shown in FIG. 8, the fluid distributor 3 of this embodiment includes an input channel 11, a distribution channel 12, an output channel 13, micro flow meters 14a and 14b, and a monitoring device 15 (not shown in FIG. 8). The process target fluid W1 supplied from the input flow path 11 is distributed into six. The input flow path 11 is composed of an input micro flow path Rc11, the distribution flow path 12 is composed of branch micro flow paths Rc21 to Rc55, Rs11 to Rs60, and the output flow path 13 is output micro flow paths Rc61 to Rc66. It is composed of

  Of the branch microchannels Rc21 to Rc55 and Rs11 to Rs60 constituting the distribution channel 12, the channel lengths Lc of the microchannels Rc21 to Rc55 extending in the X direction are all equal and extend in the Y direction. The flow path lengths Ls of the micro flow paths Rs11 to Rs60 are all equal. The fluid distribution device 3 of the present embodiment also has a cross-sectional area for all the micro flow paths, that is, the input micro flow path Rc11, the branch micro flow paths Rc21 to Rc55, Rs11 to Rs60, and the output microflow paths Rc61 to Rc66. All hydraulic equivalent diameters are set equal.

  In the fluid distribution device 3 of the present embodiment, the micro flow meter 14a is attached to the branch microchannel Rc51, and measures the flow rate of the processing target fluid flowing through the branch microchannel Rc51. The micro flow meter 14b is attached to the branch microchannel Rc55, and measures the flow rate of the processing target fluid flowing through the branch microchannel Rc55. Here, it is possible to attach the micro flow meter 14a to the branch micro flow channel Rs42 indicated by the reference symbol P1 in the drawing, and to attach the micro flow meter 14b to the branch micro flow channel Rs 47 indicated by the reference symbol P2 in the drawing. It is.

  That is, the micro flowmeters 14a and 14b have portions (six branches) in which the number of diverters is half the number of output microchannels constituting the output channel 13, as in the first and second embodiments described above. It is located on the output flow channel 13 side with respect to the portion formed by the micro flow channels Rs31 to Rs36. Similarly to the first and second embodiments, the micro flowmeters 14a and 14b pass through the input microchannel Rc11, and the branch microchannel Rc51 has a symmetric (line symmetric) relationship with respect to an axis parallel to the X axis. , Rc55, or the flow rate of the processing target fluid flowing through the branch microchannels Rs42, Rs47.

  FIG. 9 is a graph showing the relationship between flow velocity changes in the branch microchannels Rc51 and Rc55 in the third embodiment. FIG. 10 is a graph showing the relationship between flow velocity changes in the branch microchannels Rs42 and Rs47 in the third embodiment. In the graph shown in FIG. 9, the horizontal axis indicates the flow rate variation ΔV5 of the branch microchannel Rc51, and the vertical axis indicates the flow rate variation ΔV6 of the branch microchannel Rc55. In the graph shown in FIG. 10, the horizontal axis indicates the flow rate variation ΔV7 of the branch microchannel Rs42, and the vertical axis indicates the flow rate variation ΔV8 of the branch microchannel Rs47.

  The flow rate change amount ΔV5 of the branch microchannel Rc51 is synonymous with the flow rate change amount of the branch microchannel Rc51 or the change amount of the measurement result of the micro flowmeter 14a, and the flow rate change amount ΔV6 of the branch microchannel Rc55. Is synonymous with the amount of change in the flow rate of the branch microchannel Rc55 or the amount of change in the measurement result of the micro flowmeter 14b. The flow rate change amount ΔV7 of the branch microchannel Rs42 is synonymous with the flow rate change amount of the branch microchannel Rs42 or the change amount of the measurement result of the micro flowmeter 14a, and the flow rate change amount ΔV8 of the branch microchannel Rs47. Is synonymous with the amount of change in the flow rate of the branch microchannel Rs47 or the amount of change in the measurement result of the microflow meter 14b.

  9 and 10, the points indicated by the white diamonds indicate that the output microchannel Rc64 (Ch.4) is blocked while the output ends (right ends) of the output microchannels Rc61 to Rc66 are open. This is a point showing the relationship between the flow rate variation amounts ΔV5 and ΔV6 and the relationship between the flow rate variation amounts ΔV7 and ΔV8 when the state is simulated. The point indicated by the white triangle mark artificially creates a state in which the output microchannel Rc65 (Ch.5) is closed while the output ends (right end) of the output microchannels Rc61 to Rc66 are open. The relationship between the flow rate variation amounts ΔV5 and ΔV6 and the relationship between the flow rate variation amounts ΔV7 and ΔV8 is shown.

  The point indicated by the white square mark is a pseudo state in which the output microchannel Rc66 (Ch. 6) is closed while the output ends (right ends) of the output microchannels Rc61 to Rc66 are open. This is a point showing the relationship between the flow rate variation amounts ΔV5 and ΔV6 and the relationship between the flow rate variation amounts ΔV7 and ΔV8. In FIG. 9, the results when the output microchannels Rc61 (Ch.1) to Rc63 (Ch.3) are artificially closed are not shown.

  In FIGS. 9 and 10, the points indicated by the black diamonds are the points of the output microchannels Rc61 to Rc66 in order to simulate the pressure loss of the micro processing device connected to the output microchannels Rc61 to Rc66. The relationship between the flow rate variation amounts ΔV5 and ΔV6 and the flow rate variation amounts ΔV7 and ΔV8 when the output microchannel Rc64 (Ch.4) is closed in a pseudo manner with the throttle attached to the output end (right end). This is a point indicating the relationship. The points indicated by the black triangles indicate the state in which the output micro-channel Rc65 (Ch. 5) is closed in a state in which a restriction is attached to the output ends (right ends) of the output micro-channels Rc61 to Rc66. This is a point showing the relationship between the flow rate variation amounts ΔV5 and ΔV6 and the relationship between the flow rate variation amounts ΔV7 and ΔV8 when created.

  Also, the points indicated by the black squares indicate the state in which the output microchannel Rc66 (Ch. 6) is closed with the aperture attached to the output ends (right end) of the output microchannels Rc61 to Rc66. This is a point indicating the relationship between the flow rate variation amounts ΔV5 and ΔV6 and the relationship between the flow rate variation amounts ΔV7 and ΔV8. In FIG. 10 as well, the results when the output microchannels Rc61 (Ch.1) to Rc63 (Ch.3) are pseudo-created are not shown.

  First, referring to FIG. 9, an approximate curve L51 for a white diamond mark and an approximate curve L61 for a black diamond mark appear in the first quadrant of the graph shown in FIG. It can be said. FIG. 9 shows an approximate curve L52 for a white triangle mark, an approximate curve L62 for a black triangle mark, an approximate curve L53 for a white square mark, and an approximate curve L63 for a black square mark. The approximate curves L52 and L62 have substantially the same slope, and the approximate curves L53 and L63 have substantially the same slope.

  As described above, the relationship between the flow rate change amount ΔV5 of the branch microchannel Rc51 and the flow rate change amount ΔV6 of the branch microchannel Rc55 varies greatly depending on which of the output microchannels Rc61 to Rc66 is blocked. . Moreover, even if a micro processing device is connected to the output micro flow paths Rc61 to Rc66 and pressure loss occurs, the relationship between the flow rate variation amounts ΔV5 and ΔV6 is almost the same as that when no pressure loss occurs. Therefore, when the micro flow meters 14a and 14b are attached to the branch micro flow paths Rc51 and Rc55, the determination table T1 can be created using the graph showing the relationship between the flow rate variation amounts ΔV5 and ΔV6 shown in FIG. It becomes possible to identify the occluded part.

  Next, referring to FIG. 10, the approximate curve L71 for the white diamond mark and the approximate curve L81 for the black diamond mark appear in the third quadrant of the graph shown in FIG. 10 and have substantially the same slope. This is the range. Also, an approximate curve L72 for a white triangle mark, an approximate curve L82 for a black triangle mark, an approximate curve L73 for a white square mark, and an approximate curve L83 for a black square mark are shown in FIG. The approximate curves L72 and L82 have substantially the same slope, and the approximate curves L73 and L83 have substantially the same slope.

  Thus, the relationship between the flow rate change amount ΔV7 of the branch microchannel Rs42 and the flow rate change amount ΔV8 of the branch microchannel Rs47 varies greatly depending on which of the output microchannels Rc61 to Rc66 is blocked. . Moreover, even if a micro processing device is connected to the output micro flow paths Rc61 to Rc66 and pressure loss occurs, the relationship between the flow rate variation amounts ΔV7 and ΔV8 is almost the same as that when no pressure loss occurs. Therefore, when the micro flow meters 14a and 14b are attached to the branch micro flow paths Rs42 and Rs47, the determination table T1 can be created using the graph showing the relationship between the flow rate variation amounts ΔV7 and ΔV8 shown in FIG. It becomes possible to identify the occluded part.

  As described above, the fluid distributors 1 to 3 of the present embodiment have a plurality of branch microchannels that form the distribution channel 12 that distributes the treatment target fluid W1 supplied to the input channel 11 by the number of the output channels 13. The flow rate of two branch microchannels is measured by the microflowmeters 14a and 14b, and the blockage location of the output channel 13 is specified based on the amount of change in the measurement results of the microflowmeters 14a and 14b. . For this reason, even if the characteristics of the micro processing device and the physical properties of the fluid have changed, it is possible to identify the occluded portion (robust against changes in the properties of the micro processing device and the physical properties of the fluid to be processed). Regardless of the characteristics of the micro-processing apparatus and the physical properties of the fluid, it is possible to detect the blockage with high accuracy. In addition, by incorporating the fluid distributors 1 to 3 in the micro plant, it is possible to specify the blockage location of the output flow path 13 even if the characteristics of the micro processing apparatus or the characteristics of the fluid change due to changes in ambient temperature or changes over time. Therefore, stable and long-term continuous operation of the microplant becomes possible.

  The fluid distribution device and the microplant according to the embodiment of the present invention have been described above. However, the present invention is not limited to the above embodiment, and can be freely changed within the scope of the present invention. For example, in the above-described embodiment, the fluid distribution devices 1 and 2 that distribute the processing target fluid W1 supplied to the input flow path 11 to 4 and the fluid distribution device 3 that distributes 6 are described as examples. The present invention is applicable to a fluid distribution device having a distribution number of 3 or more.

  Further, the attachment positions of the micro flow meters 14a and 14b are the branch micro flow paths Rc31 and Rc33 in the distribution flow path 12 shown in FIG. 1, and the branch micro flow paths Rs32 and Rs35 in the distribution flow path 12 shown in FIG. 8 are not limited to the branch microchannels Rc51 and Rc55 in the distribution channel 12 shown in FIG. 8 and the branch microchannels Rs42 and Rs47 in the distribution channel 12 shown in FIG. Any of the two branch microchannels may be used.

  However, the micro flowmeters 14a and 14b have branch microchannels positioned on the output channel 12 side of the distribution channel 12 where the number of flow dividing portions (distribution units) is half the number of the output channels 12. It is desirable to be attached to. Furthermore, it is desirable that the input microchannel Rc11 constituting the input channel 11 is attached to a branch microchannel having a symmetric (line symmetric) relationship with respect to an axis parallel to the X axis.

  In the above embodiment, in FIGS. 3, 7, 9, and 10, the relationship between the flow rate change amounts ΔV 1 and ΔV 2, the relationship between the flow rate change amounts ΔV 3 and ΔV 4, the relationship between the flow rate change amounts ΔV 5 and ΔV 6, and the flow rate change. Although the example in which the relationship between the amounts ΔV7 and ΔV8 is approximated by a curve has been described, the relationship may be approximated by a straight line. If the determination table T1 is created using a graph approximated by a straight line, the determination table T1 can be simplified, and the processing of the determination unit 23 can be reduced.

  The microplant 30 described in the above-described embodiment has a configuration including the fluid distribution device 1, the micro processing devices 33 a to 33 d, and the fluid collection device 34. However, the fluid collection device 34 is not necessarily required and can be omitted as appropriate. The microplant 30 includes the fluid distribution device 1 described in the first embodiment. Instead of the fluid distribution device 1, the microplant 30 includes the fluid distribution devices 2, 3 described in the second and third embodiments. The structure provided may be sufficient.

1 to 3 Fluid distributor 11 Input channel 12 Distribution channel 13 Output channel 14a, 14b Micro flow meter 15 Monitoring device 23 Judgment unit 25 Storage unit 30 Micro plant 33a to 33d Micro processing device 34 Fluid collection device B11 to B33 Part Rc21 to Rc55 Branch microchannel Rs11 to Rs60 Branch microchannel T1 Judgment table W1 Process target fluid

Claims (4)

A fluid distribution device that distributes a fluid supplied to an input flow path to three or more output flow paths,
A distribution channel that combines a plurality of branch channels, and distributes the fluid supplied to the input channel by the number of the output channels;
A flow meter for measuring a flow rate of two branch channels of the plurality of branch channels forming the distribution channel;
A monitoring device for identifying a blocked output flow path among the output flow paths based on the measurement result of the flow meter,
The monitoring device stores a determination table indicating a relationship between flow rate changes in the two branch flow paths according to the closed state of the output flow path,
A determination unit that determines a blocked output flow path by comparing the measurement result of the flow meter with the determination table stored in the storage unit;
Fluid dispensing device, characterized in that it comprises a. The distribution channel has a structure in which the number of distribution units that distribute fluid sequentially increases from the input channel toward the output channel,
2. The fluid according to claim 1, wherein the flow meter measures a flow rate of a branch flow channel located on the output flow channel side with respect to a portion where the number of the distribution units is half of the number of the output flow channels. Dispensing device. The distribution channel is a structure in which the plurality of branch channels are combined in line symmetry with respect to the input channel,
3. The fluid distributor according to claim 2, wherein the flow meter measures a flow rate of two branch channels that are line-symmetric with respect to the input channel among the plurality of branch channels. . A microplant that performs a predetermined treatment on a fluid,
The fluid distribution device according to any one of claims 1 to 3 , wherein the fluid is distributed.
A microplant comprising: a plurality of microprocessing devices that are connected to an output flow path of the fluid distribution device and that process fluid distributed by the fluid distribution device.

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