JP5540354B2 - Method of measuring reflectance and reflection density with calibration function and system for implementing the method - Google Patents

Description

  The present invention is a technology relating to reflectance calibration in a reflectance densitometer, a reflectance meter that is incorporated in a printing press, a flue gas concentration measuring device, and the like and continuously measures reflectance and reflectance density.

A conventional example relating to the present invention will be described. In the measurement of the reflection density (symbol D), the object to be measured is irradiated with light, the reflected light is detected by an optical sensor to obtain the reflectance (symbol R), and the reflection density D is calculated from the reflectance R. According to the definition D = −log ₁₀ R ………………………… (Formula 1)
The reflection density is obtained as follows. 45 ° / 0 ° (or 0 ° / 45 °) shown in the standards of ANSI PH2.17, ISO 5-4, JISZ8722, JISB9623, etc. It is stipulated to be performed by an optical system. The 45 ° / 0 ° optical system irradiates the object to be measured from the circumference of an angle of 45 ° with respect to the vertical direction, and detects the amount of reflected light from the direction perpendicular to the irradiation point of the object to be measured. It is also possible to irradiate from vertically above and detect from a circumference at an angle of 45 ° to the vertical, and this is called a 0 ° / 45 ° optical system.
In the measurement for the same object, if the irradiation light quantity is not excessive, the irradiation light quantity and the reflected light quantity corresponding to the irradiation light quantity and the reflected light quantity sensor output have a linear relationship. When the measured object is measured, the reflectance is the ratio of the amount of light irradiated to the object to be measured and the amount of reflected light, so there is also a linear relationship between the reflectance and the output of the reflected light amount sensor.
When the irradiation light amount is I and the irradiation light amount I is a constant value I ₀ , this linear relationship is obtained when the reflectance of the object to be measured is R, the reflected light amount sensor output value is S, and a and b are constants. formula
S = aR + b (2)
a: Constant related to detection of reflected light of the object to be measured b: It can be expressed by a noise component when the object to be measured is detected.

Here, the constants a and b are 45 ° / 0 ° (or 0 ° / 45 °) optical systems with two known reflectance standards for calibration with reflectances R ₁ and R ₂ (R ₁ > R ₂ ). By calculating the reflected light sensor output values S ₁ and S ₂ of the plate, the calculation formula
a = (S ₁ −S ₂ ) / (R ₁ −R ₂ ), b = (R ₁ S ₂ −R ₂ S ₁ ) / (R ₁ −R ₂ ) (Formula 3)
Can be obtained from After a and b are determined, the reflected light amount sensor output value S is measured for the sample having an unknown reflectance R under the irradiation light amount I ₀ , and the calculation formula from (Expression 2)
R = S / a−b / a (4)
The reflectance R can be obtained by calculating in (5). This function is a reflectometer and reflection densitometer. However, in order for the relational expression of S = aR + b in (Equation 2) to always hold after a and b are determined, the measurement environment such as the amount of irradiation light and temperature is the same as that obtained when a and b are not changed. When the irradiation light quantity value or the environmental condition changes, it is necessary to obtain the constants a and b again under the new conditions. The calibration of reflectance measurement is to re-determine the values of the constants a and b. However, with respect to changes in environmental conditions, the reflected light amount sensor circuit is carefully designed so that it can be almost ignored with respect to environmental fluctuations such as temperature. For example, in the reflected light amount sensor circuit of the reflectometer used in the embodiment of the present invention, + 0.25% and -0.14% with respect to a value at 25 ° C. with respect to a change of 30 ° from 5 ° C. to 35 ° C. It has changed.
As a first conventional example in the calibration method, as described above, a commercially available reflection density measuring device prepares two calibration reference plates for calibration, which are known reference plates having significantly different reflectances, and does not change the irradiation light quantity. In addition, a method is adopted in which the reflected light quantity sensor output value is obtained with these two calibration reflectance reference plates and the values a and b are determined.
In the second conventional example of the calibration method, the reflectance is calculated from the reflected light amount sensor output when one calibration reference plate having a known reflectance is used and the reflected light amount sensor output when the irradiation light is turned off. There is a method for obtaining a and b in (Expression 2) S = aR + b in the relational expression with the reflected light amount sensor output.

JP 2006-222346 A "Calibration method of exposure apparatus, reference reflector, reflectance measurement sensor and manufacturing method of micro device" published on August 24, 2006

Issued by Ihara Denshi Kogyo Co., Ltd. Black and White Reflection Densitometer R700 Instruction Manual, pages 13-14

  The calibration method in the first conventional example uses two calibration reflectance reference plates, so the calibration is accurate. However, the calibration procedure becomes cumbersome and requires a little time. Since it is difficult to calibrate frequently, it is necessary to stabilize the irradiation light quantity as shown in FIG. In order to stabilize the irradiation light amount, a part of the irradiation light is fed back to control the irradiation output so that the irradiation light amount is always constant. This method eliminates significant fluctuations in irradiation output. However, with this method, in order to stabilize the feedback system, it is necessary to have a hysteresis width of about ± 1.0% or more with respect to the set value. Since this cannot be done below, a reflectance measurement error due to feedback control occurs by the hysteresis width. As described above, the hysteresis width of the feedback control is an impediment to high stabilization of irradiation output, that is, high accuracy of measurement. In addition, the adoption of this feedback method increases costs and increases the size of the measuring device.

Next, in the calibration method in the second conventional example, the sensor output when the irradiation light is extinguished is the same as the sensor output when an ideal pure black calibration reference plate having a reflectance R = 0 is used. However, since the measurement optical system including the light sensor cannot be made pure black, all the light irradiated to this measurement optical system cannot be absorbed and becomes a stray light. Therefore, an offset voltage, which is a noise component caused by stray light, is generated even when there is no reflected light from the reference plate. The sum of the noise component of this light and the electrical noise component of the light quantity sensor circuit is the noise component of the light quantity sensor output, which is the value b in (Equation 2).
b = (Optical noise component due to stray light generated by irradiation and reflected light amount with respect to reflected light measurement environment) + (Electric noise component of sensor circuit)
On the other hand, the sensor output when the irradiation light is extinguished is only the electric noise component of the light quantity sensor circuit without the above stray light component, and a large difference occurs. Therefore, the relational expression S = aR + b becomes inaccurate, and the calibration is insufficient, so that the reflectometer is not highly accurate.

  The problem of the present invention is to solve the above-mentioned problems of the conventional example, that is, accurate calibration can be easily performed in a short time, and to achieve high accuracy of measurement without stabilizing irradiation output by feedback control, The object is to present a reflectivity calibration method for a reflectometer and a reflection densitometer, which does not lead to an increase in cost due to stabilization of irradiation output and an increase in the size of a measuring apparatus.

The method of measuring the reflectance and the reflection density having the calibration function of the present invention uses two kinds of known reflectance reference plates for calibration with reflectances R ₁ and R ₂ (R ₁ > R ₂ ). The IS characteristic with the reflected light amount sensor output S corresponding to the irradiation light amount I for each is measured in advance, and the relationship between the a and b values of the relational expression S = aR + b and the variation factor is grasped and the causal relationship is obtained. Ia, b characteristics, Sa, b characteristics are stored in a memory, and the amount of irradiation light I ₀ at that time is detected at the time of calibration, and two types of reflectance reference for calibration are obtained from the stored causal relationship. The exact a and b values at the time of calibration based on the plate are specified to establish the relation S = aR + b, the reflected light sensor output value S of the object to be measured is then measured, and the formula R = S / from a-b / a, the reflectivity and calculates a density D = -log ₁₀ R from the above equation S = aR + b That. Note that a represents a constant related to detection of reflected light from the object to be measured, and b represents a noise component when the object to be measured is detected.
Light quantity I ₀ detected at the time of calibration, the two using any of reflectance reference plate for calibration, mount or white backing detectable amount of measurements or the object to be measured in a known reflectivity, the reflected light at that time The material was used as a regular reflectance reference plate, and the detected amount of reflected light at that time was measured or an irradiation light amount monitor was used.
Further, the method of measuring the reflectance and the reflection density having the calibration function of the present invention sets the reflected light amount sensor output value S (T ₀ ) of the measured object at the predetermined temperature T ₀ as S, and at the temperature T. The value S (T) before temperature correction is set to Snc, the temperature is changed, the temperature characteristics of Snc are measured, a graph of the temperature correction formula S / Snc = f (T) is created, and the correction formula is obtained from the graph. Next, a correction table is created from the graph and the equation, and the reflected light amount sensor output value S after temperature correction is obtained.

The system for measuring reflectance and reflection density with the calibration function of the present invention is a 45/0 optical system or a 0/45 equipped with means for detecting the irradiation light quantity and the irradiation light quantity and the reflected light quantity. Reflective light meter composed of an optical system, a non-volatile memory that can be mounted on or accessed from the reflected light meter, and a signal from the reflected light meter are input and input / output to / from the non-volatile memory for arithmetic control A microprocessor, and the nonvolatile memory uses two kinds of known reflectance reference plates for calibration with reflectances R ₁ and R ₂ (R ₁ > R ₂ ), and the amount of irradiation light for each of them in advance. The I-S characteristic with the reflected light amount sensor output S corresponding to I is measured, the relation between the a and b values of the relational expression S = aR + b and the variation factor is grasped, and the causal relation Ia and b characteristics , S-a, b characteristics are stored, The microprocessor establishes a relational expression S = aR + b by specifying the current a and b values based on the two kinds of calibration reflectance reference plates from the detected irradiation light quantity value I ₀ and the causal relationship stored in the memory. Next, the reflected light amount sensor output value S of the object to be measured is measured, and the reflectivity R is calculated from the formula R = S / ab / a of the reflectivity R, and the density D = − using the reflectivity R value. A calibration function for calculating log ₁₀ R was provided.
Further, the system for measuring reflectance and reflection density having the calibration function of the present invention is a 45/0 optical system that includes means for detecting the irradiation light quantity and detecting the irradiation light quantity and its reflected light quantity as different forms. System or 0/45 optical system reflected light meter, non-volatile memory attached to the reflected light meter or accessible from outside, and a signal from the reflected light meter are input, and calibration from the reflected light meter A controller for storing the light meter signal at the time and outputting the signal to the nonvolatile memory and outputting a signal from the reflected light meter at the time of measurement to the nonvolatile memory. Using known two types of reflectance reference plates for calibration whose rates are R ₁ and R ₂ (R ₁ > R ₂ ), the IS with the reflected light amount sensor output S corresponding to the irradiation light amount I for each of them in advance. Measure characteristics , Relational expression S = aR + b, the relationship between the a and b values and the variation factors, and the causal relations Ia, b characteristic, Sa, b characteristic table, and reflectance R expression R = S The calculation table of reflectance R and density D based on / a−b / a, density D = −log ₁₀ R is stored. The reflected light amount sensor output value S is input to the nonvolatile memory through the controller, and the reflectivity R and density D of the table output signal are output from the nonvolatile memory in accordance with the input.
The nonvolatile memory adopts a memory card that can freely input and change information from the outside as one form.
In addition, the system for measuring reflectance and reflection density with the calibration function of the present invention includes temperature characteristic information of the reflected light amount in the temperature sensor and the non-volatile memory, and compensates for variations in the reflected light amount due to the environmental temperature at the time of measurement. It was supposed to have the function to do.

The method of measuring reflectance and reflection density with the calibration function of the present invention is easy to calibrate at the time of measurement, but has an accuracy equivalent to high-precision calibration using two conventional reflectance reference plates for calibration. It is possible to provide a measuring instrument with a function to guarantee When calibrating, select a standard reflectance reference plate with a high reflectance such as a calibration reference plate for calibration or a mount of an object to be measured with a known reflectance such as filter paper or a white backing material. Especially when using the mount of the object to be measured or white backing material as the regular reflectance reference plate, the light sensor output of the regular reflectance reference plate can be measured and calibrated immediately before the reflectance measurement, so that high accuracy is always achieved. Can be maintained. By measuring the common reflectance reference plate before or after the measurement of the reflected light amount sensor output S of the object to be measured, and obtaining the a and b values and calculating the reflectance R from the values and the reflected light amount sensor output S of the object to be measured. A manual calibration operation is not necessary, and since the time from calibration to measurement is short, the amount of light and environmental changes are small, so that highly accurate measurement is possible. In addition, according to the method of monitoring the amount of irradiation light, calibration work in advance is unnecessary, and the a and b values corresponding to the amount of light irradiation at that time can be determined in real time when measuring the reflectance. It is possible to provide a highly accurate reflectometer and a reflection densitometer calibration method that are not performed.
The method of measuring reflectance and reflection density with the calibration function of the present invention knows the temperature characteristics of the reflected light amount of the device used in advance, measures the ambient temperature at the time of measurement, and changes the reflected light amount due to the temperature. Thus, it is possible to measure the reflectance and reflection density with high accuracy.
The system for measuring reflectance and reflection density having the calibration function of the present invention can realize the above-described effects at the time of measurement by adopting the above-described configuration.

It is a functional block diagram of the electric system of the reflectance meter or the reflection densitometer in the 1st Embodiment of this invention. It is a functional block diagram of the electric system of the reflectometer or reflection densitometer in the 2nd Embodiment of this invention. It is a functional block diagram of the ring light guide light source for irradiation of the reflectometer or the reflection densitometer in the first embodiment of the present invention. FIG. 3 is a cross-sectional view of a reflected light amount measurement unit using an annular light source in the first embodiment of the present invention. It is a characteristic view which shows the calibration function of the reflectometer or reflection densitometer in the 1st Embodiment of this invention. It is a characteristic view which shows the calibration function of the reflectometer or reflection densitometer in the 1st Embodiment of this invention. It is a characteristic view which shows the calibration function of the reflectometer or reflection densitometer in the 1st Embodiment of this invention. It is a block diagram of the light quantity control type ring light guide light source for irradiation of the reflectometer or reflection densitometer in the conventional example. It is a block diagram of the flue gas concentration measuring device in the embodiment of the present invention. It is a functional block diagram of the electric system of the reflectometer or reflection densitometer in the 3rd Embodiment of this invention. It is a functional block diagram of the electric system of the reflectometer or reflection densitometer in the 4th Embodiment of this invention. It is a functional block diagram of the electric system of the reflectometer or reflection densitometer in the 5th Embodiment of this invention. It is a functional block diagram of the electric system of the reflectometer or reflection densitometer in the 6th Embodiment of this invention. It is a block diagram of the ring light guide light source which added the light quantity monitoring function for irradiation of the reflectance meter or the reflection densitometer in the 7th Embodiment of this invention. It is a functional block diagram of the electric system of the reflectance meter or the reflection densitometer in the 7th Embodiment of this invention. It is a functional block diagram of the electric system of the reflectometer or reflection densitometer in the 8th Embodiment of this invention. It is a characteristic view which shows the calibration function of the reflectometer or reflection densitometer in the 7th Embodiment of this invention. It is a functional block diagram of the electrical system of the reflectometer or reflection densitometer in the ninth embodiment of the present invention. It is a functional block diagram of the electric system of the reflectance meter or the reflection densitometer in the 10th Embodiment of this invention. It is a functional block diagram of the electric system of the reflectometer or reflection densitometer in the eleventh embodiment of the present invention. It is a functional block diagram of the electric system of the reflectometer or reflection densitometer in the twelfth embodiment of the present invention. It is the figure which showed the structural example which actualized the reflectometer mechanism part by the 0/45 optical system.

Hereinafter, embodiments of the present invention will be described in detail.
A first embodiment of the present invention will be described. The present embodiment is incorporated in a flue gas concentration measuring apparatus for an aircraft engine as shown in FIG. 9, and the flue gas concentration is measured by a reflectometer or a reflection densitometer 93. The part enclosed with the dashed-dotted line in the figure is set to the heat insulation state. This aircraft engine smoke concentration measurement device uses a probe (not shown) to acquire exhaust gas discharged from the aircraft engine, and the exhaust gas that has passed through the pipe from the probe is fixed to the filter holder 92 with the roll filter paper 91 in between. The smoke, which is a flue gas solid matter, is deposited on the filter paper through the filter paper. Next, the filter holder 92 and the reflection densitometer holding part are opened, and the smoke portion filter paper collected by the filter holder 92 is moved to the reflection densitometer 93. The reflection densitometer 93 sandwiches and holds the smoke accumulation portion. After measuring the reflectance, it is converted into an SN (smoke number) value defined in the standards for smoke density meters for aircraft engines and displayed. The reflectometer and the reflection densitometer 93 used in this apparatus are not specific to this apparatus, but are of the same principle and structure as the commonly used reflectometers and reflection densitometers. ing. And the relationship between irradiation light and reflected light is 45 ° / 0 ° as shown in the standards such as US ANSIPH2.17, ISO 5-4, JISZ8722, etc. as with a general reflectometer or reflection densitometer. An optical system is adopted.

In the standard document, light is emitted from more than one direction, but in the present invention, a ring light guide as shown in FIG. 3 is used as irradiation light. As shown in the figure, light from a halogen lamp or the like is injected from one end of a flexible tube 32 in which a large number of thin fiber wires are bundled, and infrared rays are cut off, and the thin fibers are arranged in an annular shape in the hollow cylindrical portion 33 at the other end. An irradiation port 34 is provided in a ring shape at the inner lower part of the hollow cylindrical portion, and the irradiation port 34 is tapered so as to be emitted in a direction of 45 ° with respect to the vertical direction. FIG. 4 shows a cross-sectional view of the reflected light amount measurement unit of the reflectometer using this ring light guide. In FIG. 4, the hollow cylindrical portion 33 is a ring light head portion, in which the other end of the glass fiber is arranged in a ring shape. 40 is an irradiation port tapered so as to be emitted in the direction of 45 °, 41 is a filter paper as a measurement object mount, 42 is smoke fine particles of the measurement object filtered by the measurement object mount 41, and In the vicinity of the center of the measurement object 42, an aperture 43 for passing only the measurement point with respect to the light collected from the ring-shaped irradiation port 40 is provided, and the object to be measured at the center part of the aperture 43 has a ring shape. The light is designed to be the strongest because the light from the irradiation port 40 arranged at is collected. A reflected light amount sensor 44 for detecting the reflected light amount from the measurement object irradiated through the aperture 43 is provided vertically above the center of the aperture 43. According to the standards such as ANSIPH2.17, the distance from the center of the aperture 43 to the reflected light sensor 44 is arranged so that the angle connecting the center of the aperture 43 to the end of the light receiving surface 45 of the reflected light sensor 44 is within ± 5 °. Has been. The reflected light quantity sensor 44 is provided with a tristimulus green filter 46 in front of the internal light receiving surface 45 in order to detect an achromatic gray scale in accordance with the reflectance meter standard. The filter 46 may be installed outside the reflected light amount sensor 44. Furthermore, as shown in Fig. 4, the bank is constructed so as to block the reflected light from other than the aperture as much as possible, and the walls of the irradiation and reflection parts are matte black, but the irradiation light is not ideal black. The reflection from the wall cannot be prevented, and the light becomes stray light as shown in the figure, reaches the reflected light amount sensor 44 and becomes an optical noise component.
In this embodiment, a ring light is used as irradiation light. However, instead of a ring light, a plurality of light sources may be arranged in a ring shape to irradiate at an angle of 45 degrees below, and 0 ° / 45 ° as shown in FIG. The optical system may be an optical system in which the positions of the optical sensor and the light source are reversed, the light source is placed directly above the center of the cylinder and irradiated directly below, and the reflected light from the object to be measured is received by placing the optical sensor in the direction of 45 degrees vertically upward.

As described in the section of the background art, when the object having reflectance R is irradiated with light, the reflected light amount sensor output value S for detecting the reflected light and the reflectance R have a linear relationship. When b is a constant, it can be expressed by (Expression 2) S = aR + b. Therefore, when the irradiation light quantity is a fixed value, after the constants a and b are determined, the reflectance R is obtained by measuring the reflected light sensor output value S of the object whose reflectance R is unknown. = S / a−b / a The reflection density D is found by calculating (Equation 1) D = −log ₁₀ R.
The reflectance meter and the reflection densitometer perform measurement by such a method. In order to determine the a and b values, as one method, two known reflectance reference plates for calibration having reflectances R ₁ and R ₂ (R ₁ > R ₂ ) are used under a constant irradiation light amount value. After measuring the reflected light sensor output values S ₁ and S ₂ at (R ₁ , S ₁ ) and (R ₂ , S ₂ ), calculate S ₁ = aR ₁ + b and S ₂ = aR ₂ + b By doing so, a and b are (Equation 3) a = (S ₁ −S ₂ ) / (R ₁ −R ₂ ), b = (R ₁ S ₂ −R ₂ S ₁ ) / (R ₁ −R ₂ ) Confirm with. The calibration is to update the a and b values by measuring two kinds of calibration reference plates for calibration in this way.

Next, when the irradiation light quantity is I, and the irradiation ratio of the object to be measured in the aperture is P, the irradiation light quantity to the measurement object is IP, and the irradiation light quantity other than the measurement object is I (1-P ). Further, when the reflectance of the object to be measured is R, and the total average value of the reflectance by the wall, floor, etc. in the optical path of the reflectance meter viewed from the irradiation light side is r ₁ , the primary from the object to be measured The reflected light quantity is IPR, the primary stray light quantity from the irradiation light quantity is I (1-P) r ₁ , and the ratio of the primary stray light quantity incident on the reflected light quantity sensor is Q _1. The amount of reflected light is IPR, and the amount of primary stray light is I (1-P) r ₁ Q ₁ . Of the light quantity IP irradiated to the object to be measured, the reflectance in the vertical direction, that is, the reflected light quantity sensor direction is the reflectance R based on the reflectance criterion. Therefore, if the total reflectance of light reflected in directions other than the reflected light amount sensor direction, that is, the direction other than the vertical direction is Rx, Rx and R are in a proportional relationship, and when the proportionality constant is m, it can be expressed as Rx = mR. Therefore, the amount of light reflected in the direction other than the sensor direction among the amount of light IP irradiated to the object to be measured is IPRx = mIPR, and the total average of the reflectances reflected by the walls, floors, etc. of the reflectometer is r ₂ . In this case, the secondary stray light amount is mIPRr ₂ , and if the ratio of incidence to the reflected light amount sensor is Q ₂ , the secondary stray light amount incident on the reflected light amount sensor is mIPRr ₂ Q ₂ . Here, since the total average values r ₁ and r ₂ of the reflectance due to the walls and floors in the optical path of the reflectometer are small, the reflected light amount from the primary stray light amount, the reflected light amount thereafter, and the secondary light The amount of reflected light from the stray light amount and the amount of reflected light thereafter are negligible, and are ignored. Next, when the photoelectric conversion rate of the reflected light amount sensor is C and the electrical noise component of the reflected light amount sensor circuit is N, the reflected light amount sensor output value S is S = CIPR + CI (1-P) r ₁ Q ₁ + CmIPRr ₂ Q ₂ It can be expressed as + N. From this equation, S = CIP (1 + mr ₂ Q ₂ ) R + CI (1−P) r ₁ Q ₁ + N (Equation 5)
It becomes. When the irradiation light quantity I is a fixed value, a relation between a light quantity sensor output value S and a reflectance R of the object to be measured is established by using a and b as constants (Equation 2) S = aR + b. a = CIP (1 + mr ₂ Q ₂ ) = CP (1 + mr ₂ Q ₂ ) I (Equation 6)
b = CI (1-P) r ₁ Q ₁ + N = Cr ₁ Q ₁ (1-P) I + N (Equation 7)
It is expressed. Here, C, P, m, r ₁ , r ₂ , Q ₁ , Q ₂ , and N are fixed values (constants).
Now, since the irradiation light quantity I is a fixed value, a and b are constants. However, when the irradiation light quantity I is changed, it can be seen that a and b are linearly related to the irradiation light quantity I.

On the other hand, for the reflectance reference plate of R ₁ having a high reflectance among the two types of calibration reflectance reference plates with known reflectance, when the irradiation light quantity is a fixed value I ₀ , S ₁ = _{CI 0 P (1 + mr 2} Q 2) R 1 + CI 0 (1-P) r 1 Q 1 + N is satisfied. When if the irradiation light amount I is not a fixed value is _{S 1 = CIP (1 + mr} 2 Q 2) R 1 + CI (1-P) r 1 Q 1 + N is satisfied, to organize this equation for irradiation light amount I, the reflectance R ₁ The relational expression between the projected light quantity I and the reflected light quantity sensor output S _{1 in} the case of the reflectance reference plate is I = (S ₁ −N) / C {P (1 + mr ₂ Q ₂ ) R ₁ + (1−P) r ₁ Q ₁ } ……………… (Formula 8)
It becomes. Since C, M, m, r ₁ , r ₂ , Q ₁ , Q ₂ , R ₁ , and N are constants, (Equation 8), the irradiation light quantity I has a linear relationship with the reflected light quantity sensor output value S _1. I know that there is. From (Expression 6), (Expression 7), and (Expression 8), a = CP (1 + mr ₂ Q ₂ ) I
_{= P (1 + mr 2 Q} 2) (S 1 -N) / {P (1 + mr 2 Q 2) R 1 + (1-P) r 1 Q 1} ‥‥‥ ( Equation 9)
b = CCr ₁ Q ₁ (1-P) I + N
_{= {R 1 Q 1 (1} -P) S 1 + P (1 + mr 2 Q 2) R 1 N} / {P (1 + m 2 Q 2) R 1 + (1-P) r 1 Q 1}
(Formula 10)
Thus, it can be seen that a and b are linearly related to the reflected light amount sensor output value S _{1 in} the case of the reflectance reference plate having the reflectance R ₁ . The linear relational expressions of a and b with respect to S ₁ are a = g (S ₁ ) and b = h (S ₁ ).
In general, the following equation is established by setting R ₁ to R ₀ in (Equation 9) and (Equation 10) with respect to the known reflectance R ₀ .
a = CP (1 + mr ₂ Q ₂ ) I
= P (1 + r ₂ Q ₂ ) (S ₀ −) / {P (1 + mr ₂ Q ₂ ) R ₀ + (1−P) r ₁ Q ₁ } (Formula 11)
b = Cr ₁ Q ₁ (1-P) I + N
_{= {R 1 Q 1 (1} -P) S 0 + P (1 + mr 2 Q 2) R 0 N} / {P (1 + mr 2 Q 2) R 0 + (1-P) r 1 Q 1}
(Equation 12)
Here, (Expression 11) and (Expression 12) are simply expressed as linear expressions a = g (S ₀ ) and b = h (S ₀ ).

From the above, (Equation 9) and (Equation 10) are used for calibration preparation in advance by using two known reflectance reference plates for calibration with reflectances R ₁ and R ₂ (R ₁ > R ₂ ). , And a and b are calculated for each illumination light quantity, and the linear relational expression between S ₁ or S ₂ and a and b is grasped. By detecting the light sensor output S ₁ or S ₂ , it is possible to determine the high-accuracy a and b values obtained using the two types of reflectance reference plates for calibration and to carry out highly accurate calibration. To do.
In addition, (Equation 11) and (Equation 12) are the mount of the object to be measured and the white backing plate in addition to the two known reflectance reference plates for calibration with reflectances R ₁ and R ₂ (R ₁ > R ₂ ). If the reflected light amount sensor output value S ₀ of a reference plate having a known reflectivity R ₀ and always having this reflectivity R ₀ (this is referred to as a regular reflectivity reference plate) can be measured, the above-mentioned calibration preparation stage By changing the irradiation light quantity I, the linear relational expressions a = g (S ₀ ) and b = h (S ₀ ) between the reflected light quantity sensor output value S _{0 of the} regular reflectance reference plate and the a and b values are grasped. By measuring the reflected light amount sensor output value S of the object to be measured before or after measuring the reflected light amount sensor output value S ₀ of the regular reflectance reference plate, the a and b values are determined. This also means that the reflectance R can be obtained from the b value and the reflected light amount sensor output value S of the object to be measured based on (Equation 4) R = S / a−b / a. It is. As a result, calibration with a small time lag can be performed with respect to changes in the amount of irradiation light and environmental changes, and high-precision measurement can be performed. In this case, manual calibration is not required, so labor is saved, and it is also suitable for continuous measurement work.

5, 6 and 7 are graphs of relational expressions when the above items are confirmed by the reflectometer of the first embodiment of the present invention. The reference plate used here is a “white reference plate” which is a high-reflectance reference plate as two known calibration reference plates for calibration with reflectivity R of R ₁ and R ₂ (R ₁ > R ₂ ). ”(R ₁ = 0.90),“ black reference plate ”(R ₂ = 0.03), which is a low reflectance reference plate, and the object to be measured, which is a regular reflectance reference plate with a reflectance R ₀ used during actual calibration. It is a roll type “filter paper” (R ₀ = about 0.78) used as a mount. A characteristic diagram shown in FIG. 5 is obtained by measuring the reflected light amount sensor output value S by changing the light amount setting voltage of the ring light guide illuminating device of the irradiation light source using the reflectometer shown in FIG. 4 for these three kinds of reference plates. It is. As can be seen from FIG. 4, in the reflectometer, since the distance from the light source to the object to be measured is short, the reflected light sensor output value S greatly changes even if the distance changes by about 100 microns. Therefore, in the reflectance measurement, a constant force is applied to the back plate so that the distance is not changed at all times. FIG. 5 also shows the a and b characteristics calculated based on (Equation 3). Further, the light amount setting voltage E and the irradiation light amount I of the illuminating device that is the light emission drive unit have a linear relationship, and I / Ix = 0.192E + 0.04 (where Ix: light amount at the maximum set voltage value E = 5V ) Is described in the device manual. Therefore, the horizontal axis in the characteristic diagram of FIG. From FIG. 5, the reflected light amounts of the three kinds of reference plates change linearly with respect to the irradiated light amount I based on the reflectances R ₁ , R ₂ , and R ₀ , respectively. The a and b characteristics also change linearly with respect to the irradiation light quantity I, and it can be seen that they match (Equation 6) and (Equation 7). FIG. 6 is a characteristic diagram in which the reflected light amount sensor output value S ₁ of the white reference plate (R ₁ high reflectivity reference plate) is taken on the horizontal axis instead of the irradiation light amount I, and a and b are taken on the vertical axis. FIG. 7 is a characteristic diagram when the reflected light amount sensor output value S ₀ of the filter paper (R ₀ regular reflectance reference plate) is taken on the horizontal axis and a and b are taken on the vertical axis instead of the irradiation light amount I. is there. Since the light quantity I is proportional to the reflected light amount sensor output values S ₁ of the reference plate of the R ₁ in FIG. 6, a, b properties linearly changed with respect to the reflected light amount sensor output values S ₁ of the reference plate of R ₁ Since it matches the characteristics shown in (Equation 9) and (Equation 10), and in FIG. 7, the irradiation light amount I is proportional to the reflected light amount sensor output value S ₀ of the reference plate R ₀ , the a and b characteristics is changing linearly with respect to the reflection light amount sensor output value S ₀ of the reference plate of R _0, it can be seen that meets the characteristics shown in (equation 11), (equation 12). Therefore, at the time of calibration, the reflected light amount sensor output value S ₁ of the calibration reflectance reference plate having a high reflectance R ₁ of the two calibration reference plates or the regular reflectance reference plate having a reflectance R ₀ of a filter paper or the like. Alternatively, it is possible to obtain a and b using the above-mentioned graph simply by measuring S ₀ , and quick and accurate calibration can be performed.

From the above, the calibration procedure is performed in the following procedure. In this embodiment, an example in which a regular reflectance reference plate of a roll type filter paper of a “smoke” mount, which is an object to be measured of the smoke concentration measuring apparatus, is used as the reflectance reference plate will be described in detail. Roll-type filter paper can always obtain the reflection light amount sensor output value S ₀ at any time because it is attached to the reflectometer, and the reflectance is relatively large, since the substantially constant common reflection Suitable as a rate reference plate.
First, as preparation before calibration, the characteristics of the irradiation light quantity I and the reflectance reference plates of the reflectances R ₁ , R ₂ , and R ₀ are acquired by the following procedure, and then in the equation (2) for S ₀ The characteristics of a and b are obtained, and this characteristic formula and characteristic table are written in the memory.
1) High reflectance R ₁ “white reference plate”, low reflectance R ₂ “black reference plate” and reflectance R ₀ “ordinary reflectance reference plate” as calibration reflectance reference plates for calibration. Prepare “filter paper” as the mount.
2) The reflected light amount sensor output values of the “white reference plate”, “black reference plate” calibration reflectance reference plate, and “filter paper” “regular reflectance reference plate” for each light amount are changed. Measure and record S. From the reflected light amount sensor output values S ₁ and S ₂ of the “white reference plate” and “black reference plate” for each light amount, a and b are calculated using (Equation 3).
3) The projected light quantity setting voltage E is taken on the horizontal axis, “white reference plate”, “black reference plate”, a value and b value are taken on the vertical axis, and respective graphs are created. Next, the sensor output value S ₀ of the “regular reflectance reference plate” is taken on the horizontal axis, the a value and the b value are taken on the vertical axis, and a graph is created. = G (S ₀ ) and b = h (S ₀ ) are obtained.
4) Create a data table of the light amount sensor output values S _{0 of} the “regular reflectance reference plate”, the a value, and the b value from the linear formula a = g (S ₀ ), b = h (S ₀ ), or this graph. To do.
5) Write the linear expression and table for the a and b values to a rewritable nonvolatile memory such as an E-PROM or flash memory.
The above is preparation before calibration. The pre-calibration preparations 1) to 5) do not need to be performed every time the apparatus is started. Basically, if there is no significant change in the shape and position of the optical system in the measuring unit of the reflectometer or the black paint state. Since the linear equation and the value do not change, it is sufficient to perform the above-mentioned “preparation before calibration” when the reflectometer is repaired or the apparatus is maintained. Further, in the measurement of the reflected light amount sensor output values on the three types of reference plates in the pre-calibration preparation 2) stage, the reflected light amount sensor output values of the reference plates are linearly related to the projected light amount, so that the light amount values of two or more points Each should be measured.

Next, operation during calibration and measurement will be described according to the functional configuration diagram.
FIG. 1 is a functional block diagram of a reflectometer or a reflection densitometer that has a calibration function and calculates a reflectance R and a reflection density D according to the first embodiment of the present invention.
In FIG. 1, reference numeral 11 denotes a reflected light quantity meter, and the signal system includes a reflected light quantity sensor 44 and a reflected light quantity sensor circuit 47 as shown in FIG. This reflected light quantity meter 11 is designed so as to reduce the temperature fluctuation of the reflected light quantity sensor output, which is an output, by carefully selecting the parts with little temperature fluctuation and incorporating a temperature sensing element. The output fluctuation range is within 0.4% with respect to the temperature fluctuation from 5 ℃ to 35 ℃ with 25 ℃ as a reference. An arithmetic control circuit 12 includes an A / D converter and a microcomputer. Reference numeral 13 denotes a rewritable non-volatile memory such as an E-PROM or a flash memory, and a reflected light amount sensor for a regular reflectance reference plate, which is the reflectance calibration data obtained in the pre-calibration preparation. Data table of output value S ₀ −a, b characteristic linear characteristic equation data and linear equation a = g (S ₀ ), b = h (S ₀ ), S ₀ (input) −a, b (output) Has been written. The memory 13 may be rewritten in the apparatus, or may be inserted into the apparatus after data is written outside the apparatus, such as an E-PROM or a memory card. Next, the operation of the reflectometer with the above configuration will be described.

First, as shown in the block diagram of the smoke concentration measuring apparatus in FIG. 9, the roll type filter paper 91 passes through the filter holder 92 and is wound up through the reflection densitometer 93. Therefore, always supply clean filter paper free of dirt. Can do. Therefore, clean roll-type filter paper 91 is supplied to the filter holder 92 and the reflection densitometer 93, and a predetermined amount of exhaust gas is passed through the portion sandwiched by the filter holder 92 to deposit smoke smoke solid matter on the filter paper. The reflected light meter 11 in FIG. 1 in the reflection densitometer 93 almost simultaneously with the start of the smoke deposition measures the reflected light amount of a clean filter paper, which is a regular reflectance reference plate used for calibration, and the reflected light sensor output value of the measurement result and it sends the analog signal S ₀ to the arithmetic control circuit 12. The arithmetic control circuit 12 performs A / D conversion on the input reflected light amount sensor output value S ₀ , stores the digital value S ₀ in an S ₀ memory such as a microprocessor accumulator, and stores the memory output S ₀ as a rewritable nonvolatile memory. Output to 13. The memory 13 in which the data table of S ₀ (input) -a, b (output) is written outputs the a value and b value corresponding to the input S ₀ value to the arithmetic control circuit 12. The arithmetic control circuit 12 stores the a value and b value input from the memory 13 in the a value and b value memory in the circuit. Next, in FIG. 9, when a predetermined amount of exhaust gas is passed through the portion sandwiched between the filter holders 92 of the roll type filter paper 91, smoke smoke of solid smoke is deposited on the filter paper. 1 is moved to the reflectance measurement portion of the reflection densitometer 93, the reflected light quantity at that time is measured by the reflected light quantity meter 11 of FIG. 1, and the reflected light quantity sensor output S (analog quantity) is sent to the arithmetic circuit 12. The arithmetic control circuit 12 performs A / D conversion on the input reflected light amount sensor output value S, stores the digital value S in an S memory such as an accumulator of a microprocessor, and the a and b values previously stored in the memory. From (Equation 4), the reflectance R = S / a−b / a is calculated, and the value is output as the reflectance R of the smoke previously collected. If necessary, the reflection density is calculated from the reflection density D = −log ₁₀ R in (Equation 1) and output.

When smoke is continuously collected and calibration is performed for each measurement, when the reflected light sensor output value S of the first (first) smoke sample is started to be measured by the reflection densitometer 93 in FIG. At the same time, the next (second) smoke sample is started to be collected in the filter holder 92. The accumulation time of the flue gas is longer than the calculation time of the reflectance R. After the smoke accumulation, move the smoke sample to about half of it without moving to the reflection densitometer 93, and make the reflectance measurement part of the reflection densitometer 93 clean filter paper. The reflected light amount of a certain clean filter paper is measured, and the measurement result is output to the arithmetic control circuit 12 as a new next (second) reflected light amount sensor output value S ₀ . Next, the filter paper is further moved, and the second smoke sample is moved to the reflectance measuring portion of the reflection densitometer 93. During this movement period, the arithmetic control circuit 12 A / D converts the input sensor output value S ₀ of the second clean filter paper and then stores the S stored in the first (first) S ₀ memory. If it is within a predetermined ratio compared with ₀ , the second S ₀ is discarded, and therefore the a and b values use the value of the first S ₀ stored in the memory. memory for S ₀ the sensor output value S ₀ of the filter paper is defined two-th S ₀ instead of 1 -th S ₀ and S ₀ of 1 th long than a predetermined ratio relative of The a value and b value corresponding to the second S ₀ are input from the memory 13. Next, when the second smoke sample moves to the reflectance measurement portion of the reflection densitometer 93, the reflected light quantity sensor output value S of the second smoke sample starts to be measured and at the same time (3 in the filter holder 92). Start collecting the first smoke sample. The processing of the reflected light amount of the second smoke sample is as described above. In other words, the reflected light amount sensor output S (analog amount) measured by the reflected light amount meter 11 in FIG. 1 is sent to the arithmetic circuit 12, and the arithmetic control circuit 12 A / D converts the input reflected light amount sensor output value S to a digital value. Is stored in a memory such as an accumulator of a microprocessor, and the reflectance R = S / a−b / a in (Equation 4) is calculated from the a value and b value stored in the memory, and the value is calculated. Output as the reflectance R of the smoke collected earlier. If necessary, the reflection density is calculated from the reflection density D = −log ₁₀ R in (Equation 1) and output. When smoke is continuously collected and calibration is performed for each measurement, the above operation is repeated. Smoke is sampled continuously, but when performing calibration every multiple measurements, as described above, half-feed from the smoke sampling position to the reflectance measurement position is performed every multiple times as described above. All feed from the smoke sampling position to the reflectance measurement position may be performed.

In the above operation, the description has been made when the contents of the rewritable nonvolatile memory 13 are created tables. However, the characteristic expression a = having the contents of the memory 13 as a variable and S ₀ of the b value as a variable. When g (S ₀ ), b = h (S ₀ ), as item 5) for pre-calibration preparation 5) Linear equation a = g (S ₀ ), b = h (S ₀₎ ) In a rewritable nonvolatile memory such as an E-PROM or a flash memory.
9, the arithmetic control circuit 12 in FIG. 1 designates the address of the rewritable non-volatile memory 13 in which the characteristic equation is stored, and the characteristic equation for a value and b value a = G (S ₀ ) and b = h (S ₀ ) are fetched and stored in the respective designated memories. Next, when S ₀ is input at the measurement stage, it is substituted into the characteristic formulas a = g (S ₀ ), b = h (S ₀ ) to obtain a value and b value, and a predetermined value a, b Store each in a value memory. Next, when the reflected light amount sensor output value S of the smoke sample is input, the input reflected light amount sensor output value S is A / D converted in the same manner as the operation when referring to the table, and the digital value S is converted into an accumulator of the microprocessor. The reflectance R = S / a−b / a in (Equation 4) is calculated from the a value and b value previously stored in the memory for S, etc., and the value is extracted first. Is output as the reflectance R. If necessary, the reflection density is calculated from the reflection density D = −log ₁₀ R in (Equation 1) and output.

Next, FIG. 2 is a block diagram showing a configuration for calculating the reflectance R and the reflection density D having a calibration function of the reflectance meter in the second embodiment of the present invention.
1 and 2, the reflected light quantity meters 11 and 21 are the same, and the rewritable nonvolatile memories 13 and 23 have the same functions, although the written contents are different. 2 differs from FIG. 1 in that a controller 22 is used in FIG. 2 instead of the arithmetic control circuit 12 shown in FIG. 1. This controller 22 has an A / D converter and a memory, but has an arithmetic function. It has a control function of the apparatus and the reflected light meter. Therefore, the rewritable nonvolatile memory 23 is substituted for the arithmetic function portion instead of having no arithmetic function. In other words, the light amount sensor output value S ₀ of the “ordinary reflectance reference plate” and the reflected light amount sensor output value S of the object to be measured are input, and the table of the reflectance R or the reflection density D is the contents of the rewritable nonvolatile memory 23 as the output. It becomes. Therefore, item 4) of the pre-calibration preparation described above is changed as follows.
4) Create a calibration / reflectance table or a calibration / reflection density table.
Linear formula a = g (S ₀ ), b = h (S ₀ ) and calculation formula R = S / a−b / a = (S−b) / a, D = −log ₁₀ R, more calibration and reflectance For the table, the equation R = (S−b) / a = {S−h (S ₀ )} / g (S ₀ ) and from this graph, S ₀ and S (input) −reflectance R (output) Create a data table.
The calibration and reflection density table is expressed by the equation D = −log ₁₀ [{S−h (S ₀ )} / g (S ₀ )] and from this graph, S ₀ and S (input) −reflection density D (output). Create a data table.

Next, the operation will be briefly described with reference to FIG.
First, as shown in the block diagram of the smoke concentration measuring apparatus in FIG. 9, the roll type filter paper 91 passes through the filter holder 92 and is wound up through the reflection densitometer 93. Therefore, always supply clean filter paper free of dirt. Can do. Therefore, clean roll-type filter paper 91 is supplied to the filter holder 92 and the reflection densitometer 93, and a predetermined amount of exhaust gas is passed through the portion sandwiched by the filter holder 92 to deposit smoke smoke solid matter on the filter paper. The reflected light meter 21 in FIG. 2 in the reflection densitometer 93 almost simultaneously with the start of the smoke deposition measures the reflected light amount of a clean filter paper, which is a regular reflectance reference plate used for calibration, and the reflected light sensor output value of the measurement result An analog signal of S ₀ is sent to the controller 22. The controller 22 A / D converts the input reflected light sensor output value S ₀ , stores the digital value S ₀ in the S ₀ memory, and outputs the memory output S ₀ to the rewritable nonvolatile memory 23. Next, in FIG. 9, a predetermined amount of exhaust gas is passed through the filter paper 91 sandwiched between the filter holders 92, and smoke of solid smoke is deposited on the filter paper. Move the filter paper where smoke is deposited to the reflectance measurement part of the reflection densitometer 93, measure the amount of reflected light with the reflected light meter 21 in FIG. 2, and output the reflected light sensor output S (analog amount) to the controller. Send to 22. The controller 22 A / D-converts the input reflected light amount sensor output value S, stores the digital value S in the S memory, and outputs the memory output S to the rewritable nonvolatile memory 23. The memory 23 in which the data table of S ₀ and S (input) -R (output) or S ₀ and S (input) -D (output) is written is stored in the R corresponding to the input S ₀ value and S value. Value or D value is output as the reflectance R or the reflection density D of the smoke previously collected. When the smoke is collected continuously, the same operation method as that of the first embodiment may be used, and the description is omitted.

  In the first embodiment and the second embodiment, the reflected light amount sensor and the reflected light amount sensor circuit are supported by hardware so that the influence of ambient temperature fluctuations can be ignored. The ambient temperature is not taken into account. However, in the case of the reflected light quantity sensor and reflected light quantity sensor circuit that are not supported on the hardware side, it is necessary to correct the reflected light quantity sensor output due to temperature fluctuations, so a relational expression or table of temperature and reflected light quantity sensor output is created separately, After correcting the reflected light intensity sensor output with this relational expression or table, the pre-calibration preparation and calibration measurement procedures should be followed, or a temperature correction table or relational expression is incorporated into the calibration table or relational expression. As a configuration, it is necessary to follow the pre-calibration preparation and calibration measurement procedures, and examples thereof will be described as third to sixth embodiments.

As a temperature correction method, the reflected light amount sensor output value S (T ₀ ) of the object to be measured at a predetermined temperature T ₀ (eg, T ₀ = 25 ° C.) is set to S, and the value S before the temperature correction at the temperature T. Let (T) be Snc. Next, change the temperature, measure the temperature characteristics of Snc, create a graph of the temperature correction formula S / Snc = f (T), and find the correction formula. From the Snc measured at temperature T, the temperature at T ₀ As for the value S, the reflected light quantity sensor output value S after temperature correction can be obtained relatively easily by S = Snc × f (T). In addition, S = Snc × f (T) or directly from the characteristic graph, the temperature T and Snc value are input, and a table with the S value output is created. By referring to this table, the S value can be easily obtained. It is done. In this embodiment actually using the reflected light amount sensor output values S ₁ of the white reference plate of the reflectance reference plate when obtaining the temperature correction equation f (T) is a function of temperature T, the value at a temperature T ₀ S ₁ and by changing the temperature T as a value obtained by dividing _{S 1 / S 1 nc = f} (T) with a value S ₁ nc at temperature T was determined created f (T) graphs.
Therefore, the reflected light sensor output values S ₁ and S ₂ of the “white reference plate” and “black reference plate” and the sensor output value S ₀ of the “regular reflectance reference plate” in the preparation before calibration shown below are the temperatures obtained by the above method. S ₁ nc, S ₂ nc, and S ₀ nc before correction at T are corrected to values at temperature T ₀ .
First, as preparation before calibration, the characteristics of the irradiation light quantity I and the reflectance reference plates of the reflectances R ₁ , R ₂ , and R ₀ are acquired by the following procedure, and then in the equation (2) for S ₀ The characteristics of a and b are obtained, and the characteristic table of the characteristic formulas a = g (S ₀ ) and b = h (S ₀ ) is written in the memory.
1) High reflectance R ₁ “white reference plate”, low reflectance R ₂ “black reference plate” and reflectance R ₀ “ordinary reflectance reference plate” as calibration reflectance reference plates for calibration. Prepare “filter paper” as the mount.
2) The reflected light amount sensor output value S of the “white reference plate”, “black reference plate” calibration reflectance reference plate, and “filter paper” “regular reflectance reference plate” for each light amount is changed. Measure and record. The a and b values are calculated from the reflected light amount sensor output values S ₁ and S ₂ of the “white reference plate” and “black reference plate” for each light amount.
3) The projection light quantity setting voltage E is taken on the horizontal axis, “white reference plate”, “black reference plate”, a value and b value are taken on the vertical axis, and respective graphs are created. Next, the sensor output value S ₀ of the “regular reflectance reference plate” is taken on the horizontal axis, the a value and the b value are taken on the vertical axis, and a graph is created. = G (S ₀ ) and b = h (S ₀ ) are obtained.
4) A table of the light amount sensor output value S _{0 of} the “ordinary reflectance reference plate”, the a value, and the b value is created from this linear formula or this data. In this calibration table creation stage, the following four cases are created in consideration of the association with the temperature correction table described above.
A. The calibration table and the temperature correction table are separated, the calibration table is (input) S _0- (output) a, b, and the temperature correction table is (input) temperature T and Snc value- (output) S value.
A table is created based on the equations and graphs of temperature correction table: S = f (T) × Snc, calibration table: a = g (S ₀ ), b = h (S ₀ ).
B. A calibration / reflectance calculation table or a calibration / reflectance calculation / reflection density calculation table and a temperature correction table are created.
Linear formula a = g (S ₀ ), b = h (S ₀ ) and calculation formula R = S / a−b / a = (S−b) / a, D = −log ₁₀ R, and more calibration and reflectance The calculation table shows the reflectivity R = (S−b) / a = {S−h (S ₀ )} / g (S ₀ ) and this graph, (input) S ₀ and S− (output) reflectivity. R data table is created. The calibration / reflectance calculation / reflection density calculation table shows the reflection density D = −log ₁₀ [{S−h (S ₀ )} / g (S ₀ )] and (input) S ₀ and S− ( Output) Create a data table of reflection density D. The temperature correction table is created from the equation S = f (T) × Snc, S ₀ = f (T) × S ₀ nc and this graph, and the data table of (input) temperature T and Snc value-(output) S value To do.
C. A table is not created, but for calibration, the relational expression of linear expression of a, b and S ₀ a = g (S ₀ ), b = h (S ₀ ), for temperature correction, the relational expression f (T ) Is prepared.
D. A table in which the calibration table and the temperature correction table are combined into one is created.
R = S / a−b / a, D = −log ₁₀ R, S = f (T) × Snc, S ₀ = f (T) × S ₀ nc, a = g (S ₀ ), b = h ( From S ₀ ), the temperature correction / calibration / reflectance calculation table has the formula R = (S−b) / a = [f (T) × Snc−h {f (T) × S ₀ nc}] / g { f (T) x S ₀ nc} and from this graph [Input] Temperature T, S ₀ nc value (S ₀ value before temperature correction), Snc value (S value before temperature correction)-[Output] reflectance R Create a data table.
Temperature correction / calibration / reflectance calculation The reflection density calculation table has the following formula: D = −log ₁₀ [[f (T) × Snc−h {f (T) × S ₀ nc}] / g {f (T) × S ₀ nc}] and the graph [Input] temperature T, S ₀ nc value (S ₀ value before temperature correction), Snc value (S value before temperature correction)-[Output] Reflection density D data table create.
5) Item 4) a. ~ D. The table and the relational expression prepared in (1) are written in a rewritable nonvolatile memory such as an E-PROM or a flash memory according to each case.
The above is preparation before calibration. The pre-calibration preparations 1) to 5) do not need to be performed every time the apparatus is started. Basically, if there is no significant change in the shape and position of the optical system in the measuring unit of the reflectometer or the black paint state. Since the linear equation and the value do not change, it is sufficient to perform the above-mentioned “preparation before calibration” when the reflectometer is repaired or the apparatus is maintained. Further, in the measurement of the reflected light amount sensor output values on the three types of reference plates in the pre-calibration preparation 2) stage, the reflected light amount sensor output values of the reference plates are linearly related to the projected light amount, so that the light amount values of two or more points Each should be measured.

Next, the functional configuration and operation during calibration and measurement will be described.
FIG. 10 shows a reflectometer according to the third embodiment of the present invention, which is a block diagram showing a configuration for calculating a reflectivity R and a reflection density D, having a calibration function. In the present embodiment, the reflected light amount sensor and the reflected light amount sensor circuit used in the reflectometer do not have a hardware temperature correction function, and thus are configured with a temperature correction function. The pre-measurement preparation in the present embodiment is the items 1) to 5) described above. This is equivalent to the case.
A. The calibration table and the temperature correction table are separated, the calibration table is S ₀ (input) −a, b (output), and the temperature correction table is temperature T and Snc value (input) −S value (output).
A table is created based on the equations and graphs of temperature correction table: S = f (T) × Snc, calibration table: a = g (S ₀ ), b = h (S ₀ ).
In FIG. 10, the reflected light quantity meter 101 does not have a hardware temperature correction function in the reflected light quantity sensor and the reflected light quantity sensor circuit which are constituent elements, but other functions are the same as the reflected light quantity meter 11 in FIG. Each of the arithmetic control circuits 102 and 12 has the same function. Reference numeral 103 denotes a rewritable non-volatile memory, which stores two tables for temperature correction and calibration at the stage of preparation before measurement. Since the number of inputs / outputs to the rewritable nonvolatile memory 103 is large, a multiplexer is actually provided in the input / output portion of the rewritable nonvolatile memory 103 of the arithmetic control circuit to switch between the input / output for temperature correction and the input / output for calibration. . Reference numeral 105 denotes a so-called temperature sensor whose output changes with temperature.

Next, the operation of the reflectometer or reflection densitometer having the above configuration will be described.
First, as shown in the block diagram of the smoke concentration measuring apparatus in FIG. 9, the roll type filter paper 91 passes through the filter holder 92 and is wound up through the reflection densitometer 93. Therefore, always supply clean filter paper free of dirt. Can do. Therefore, clean roll-type filter paper 91 is supplied to the filter holder 92 and the reflection densitometer 93, and a predetermined amount of exhaust gas is passed through the portion sandwiched by the filter holder 92 to deposit smoke smoke solid matter on the filter paper. The reflected light meter 101 in FIG. 10 in the reflection densitometer 93 almost simultaneously with the start of the smoke deposition measures the reflected light amount of a clean filter paper, which is a regular reflectance reference plate used for calibration, and reflects the reflection before temperature correction as a measurement result. An analog signal of the light sensor output value S ₀ nc is sent to the arithmetic control circuit 102. The arithmetic control circuit 102 A / D-converts the input reflected light amount sensor output value S ₀ nc and stores the digital value S ₀ nc in the S ₀ nc memory such as the accumulator of the microprocessor and the memory output S ₀ nc The data is output to the rewritable nonvolatile memory 103. Next, a temperature signal T is input from the temperature sensor 105 installed in the vicinity of the reflected light meter 101 to the arithmetic control circuit 102 and A / D converted, and the digital value T is stored in a T memory such as an accumulator of a microprocessor. The memory output T is output to the rewritable nonvolatile memory 103. In the temperature correction table inside the rewritable nonvolatile memory 103, the reflected light amount sensor output value S ₀ of the clean filter paper, which is a regular reflectance reference plate after temperature correction, is input to the arithmetic control circuit 102 from these two inputs T and S ₀ nc. Output. The arithmetic control circuit 102 stores the input S ₀ in the S ₀ memory, and sends the stored S ₀ to the calibration table input of the rewritable nonvolatile memory 103 again. The rewritable non-volatile memory 103 sends the a value and b value corresponding to the input S ₀ value to the arithmetic control circuit 102 and is stored in the a value and b value memory of the arithmetic control circuit 102. Next, in FIG. 9, when a predetermined amount of exhaust gas is passed through the portion sandwiched between the filter holders 92 of the roll type filter paper 91, smoke smoke of solid smoke is deposited on the filter paper. Is moved to the reflectance measurement portion of the reflection densitometer 93, the reflected light quantity at that time is measured by the reflected light quantity meter 101 in FIG. 10, and the reflected light quantity sensor output Snc (analog quantity) before temperature correction is sent to the arithmetic circuit 102. To do. The arithmetic control circuit 102 A / D converts the input reflected light amount sensor output value Snc, stores the digital value Snc in an Snc memory such as an accumulator of a microprocessor, and corrects the temperature of the rewritable nonvolatile memory 103. Send to table input. At the same time, the previously acquired temperature signal T is also sent to the input of the temperature correction table. In the temperature correction table of the rewritable non-volatile memory 103, the reflected light amount sensor output value S for the smoke, which is the measured object after temperature correction, is output from the two inputs T and Snc to the arithmetic control circuit 102. The arithmetic control circuit 102 stores the inputted S in the S memory, calculates the reflectance R = S / a−b / a in (Equation 4) from the a value and the b value previously stored in the memory, The value is output as the reflectance R of the smoke collected this time. If necessary, the reflection density is calculated from the reflection density D = −log ₁₀ R in (Equation 1) and output.
When smoke is continuously collected and calibration is performed for each reflectance measurement, the reflected light amount sensor output value S of the first (first) smoke sample is started to be measured by the reflection densitometer 93 in FIG. At the same time, the next (second time) smoke sample is started to be collected in the filter holder 92. The sampling time of the flue gas is longer than the calculation time of the reflectance R, but when the second sampling is completed, the smoke sample is moved to about half of it without moving to the reflection densitometer 93. Change the reflectance measurement part to clean filter paper, and measure the reflected light amount of the clean filter paper, which is the regular reflectance reference plate, as described above, and the measurement result is the new (second sample) reflected light amount before temperature correction. The sensor output value S ₀ nc is output to the arithmetic control circuit 102 as an analog signal. Next, the filter paper is further moved, and the second smoke sample is moved to the reflectance measurement portion of the reflection densitometer 93. During this movement period, the arithmetic control circuit 102 A / D converts the input sensor output value S ₀ nc of the second clean filter paper before temperature correction, and then converts the digital value S ₀ nc to a microprocessor accumulator or the like. The S ₀ nc is stored in the memory and the memory output S ₀ nc is output to the rewritable nonvolatile memory 103. Next, a temperature signal T is input from the temperature sensor 105 installed in the vicinity of the reflected light meter 101 to the arithmetic control circuit 102, and A / D conversion is performed to obtain a digital value T. The second temperature signal T is compared with the first T, and if it is within a predetermined range, the first temperature signal T is set as the current temperature signal T. T is stored in a T memory such as an accumulator of a microprocessor, and the memory output T is output to the rewritable nonvolatile memory 103. In the temperature correction table inside the rewritable nonvolatile memory 103, the reflected light amount sensor output value S ₀ of the clean filter paper, which is a regular reflectance reference plate after temperature correction, is input to the arithmetic control circuit 102 from these two inputs T and S ₀ nc. Output. The arithmetic control circuit 102 S ₀ of the inputted discard the S ₀ 2 nd S ₀ if it is within a predetermined ratio as compared with that stored in the S ₀ memory the initial (first), therefore a As the value and b value, the first S ₀ value stored in the memory is used. If the sensor output value S ₀ of the second filter paper is greater than a predetermined ratio compared with the first S ₀ , In place of the first S ₀ , the second S ₀ is re-stored in the determined S ₀ memory, and the stored S ₀ is sent again to the calibration table input of the rewritable nonvolatile memory 103, and the rewritable nonvolatile memory 103 Sends the a and b values corresponding to the second input S ₀ to the arithmetic control circuit 102 and stores them in the a and b value memory of the arithmetic control circuit 102.
Next, in FIG. 9, when the second smoke sample moves to the reflectance measurement portion of the reflection densitometer 93, the filter holder 92 starts measuring the reflected light amount sensor output value Snc before temperature correction of the second smoke sample. Start taking the next (third) smoke sample.
The processing of the reflected light amount of the second smoke sample is as described above. That is, the reflected light amount sensor output Snc (analog amount) before temperature correction measured by the reflected light amount meter 101 in FIG. 10 is sent to the arithmetic circuit 102, and the input reflected light amount sensor output value Snc is A / D by the arithmetic control circuit 102. The converted digital value Snc is stored in an Snc memory such as an accumulator of a microprocessor, and the Snc signal is sent to the input of the temperature correction table of the rewritable nonvolatile memory 103. At the same time, the previously acquired temperature signal T is also sent to the input of the temperature correction table. In the temperature correction table of the rewritable non-volatile memory 103, the reflected light amount sensor output value S for the smoke, which is the measured object after temperature correction, is output from the two inputs T and Snc to the arithmetic control circuit 102. The arithmetic control circuit 102 stores the inputted S in the S memory, calculates the reflectance R = S / a−b / a in (Equation 4) from the a value and the b value previously stored in the memory, The value is output as the reflectance R of the smoke collected this time. If necessary, the reflection density is calculated from the reflection density D = −log ₁₀ R in (Equation 1) and output. Thus, when smoke is continuously collected and calibration is performed for each measurement, the above operation is repeated.
Smoke is sampled continuously, but when performing calibration every multiple measurements, as described above, half-feed from the smoke sampling position to the reflectance measurement position is performed every multiple times as described above. All feed from the smoke sampling position to the reflectance measurement position may be performed.

FIG. 11 shows a reflectometer according to the fourth embodiment of the present invention, and is a block diagram showing a configuration for calculating a reflectivity R and a reflection density D having a calibration function. In the present embodiment, the reflected light amount sensor and the reflected light amount sensor circuit used in the reflectometer do not have a hardware temperature correction function, and thus are configured with a temperature correction function. The preparations before measurement in this embodiment are the items 1) to 5) described above. This is equivalent to the case.
B. A calibration / reflectance calculation table or a calibration / reflectance calculation / reflection density calculation table and a temperature correction table are created.
Linear formula a = g (S ₀ ), b = h (S ₀ ) and calculation formula R = S / a−b / a = (S−b) / a, D = −log ₁₀ R, more calibration and reflectance The calculation table shows the reflectivity R = (S−b) / a = {S−h (S ₀ )} / g (S ₀ ) and this graph, (input) S ₀ and S− (output) reflectivity. R data table is created.
The calibration / reflectance calculation / reflection density calculation table shows the reflection density D = −log ₁₀ [{S−h (S ₀ )} / g (S ₀ )] and (input) S ₀ and S− ( Output) A data table of reflection density D is created.
The temperature correction table is created from the equation S = f (T) × Snc, S ₀ = f (T) × S ₀ nc and this graph, and the data table of (input) temperature T and Snc value-(output) S value To do.

  In FIG. 11 and FIG. 10, which is a block diagram showing the configuration of the third embodiment of the present invention, the reflected light quantity meters 101 and 111 and the temperature sensors 105 and 115 are the same, and the rewritable nonvolatile memories 103 and 113 are The contents consist of a temperature correction table and a calibration table, but the written contents of the calibration table are different, but the memory function is the same. 11 differs from the third embodiment of the present invention in that a controller 112 is used as shown in FIG. 11 in the fourth embodiment of the present invention instead of the arithmetic control circuit 102 of FIG. The controller 112 has an A / D converter and a memory but does not have a calculation function, and has a control function for the apparatus and the reflected light meter. Therefore, the rewritable nonvolatile memory 113 is substituted for the arithmetic function portion instead of having no arithmetic function.

Next, the operation of the reflectometer configured as described above will be described.
First, as shown in the block diagram of the smoke concentration measuring apparatus in FIG. 9, the roll type filter paper 91 passes through the filter holder 92 and is wound up through the reflection densitometer 93. Therefore, always supply clean filter paper free of dirt. Can do. Therefore, clean roll-type filter paper 91 is supplied to the filter holder 92 and the reflection densitometer 93, and a predetermined amount of exhaust gas is passed through the portion sandwiched by the filter holder 92 to deposit smoke smoke solid matter on the filter paper. The reflected light meter 111 of FIG. 11 in the reflection densitometer 93 almost simultaneously with the start of the smoke deposition measures the reflected light amount of a clean filter paper, which is a regular reflectance reference plate used for calibration, and the reflection result before temperature correction is measured. An analog signal of the light amount sensor output value S ₀ nc is sent to the controller 112. The controller 112 in the input reflected light amount sensor output value S ₀ nc stored in S ₀ nc memory in the internal memory of the S ₀ nc of the A / D converted digital value rewritable nonvolatile its memory output S ₀ nc Output to the memory 113. Also, before and after the output of the reflected light meter 111 is input to the controller 112, the temperature signal T is input to the controller 112 from the temperature sensor 115 installed in the vicinity of the reflected light meter 111, and is A / D converted to a digital value. T is stored in the T memory in the built-in memory, and the memory output T is output to the rewritable nonvolatile memory 113. In the temperature correction table in the rewritable nonvolatile memory 113, the reflected light amount sensor output value S ₀ of the clean filter paper, which is a regular reflectance reference plate after temperature correction, is output to the controller 112 from these two inputs T and S ₀ nc. . The controller 112 stores the input S ₀ in the S ₀ memory.

Next, in FIG. 9, when a predetermined amount of exhaust gas is passed through the portion sandwiched between the filter holders 92 of the roll type filter paper 91, smoke smoke of solid smoke is deposited on the filter paper. Is moved to the reflectance measurement portion of the reflection densitometer 93, the reflected light amount at that time is measured by the reflected light meter 111 in FIG. 11, and the reflected light amount sensor output Snc (analog amount) before temperature correction is sent to the controller 112. . The controller 112 A / D converts the input reflected light sensor output value Snc, stores the digital value Snc in the Snc memory in the built-in memory, and inputs the Snc signal to the temperature correction table of the rewritable nonvolatile memory 113. To send. At the same time, the previously acquired temperature signal T is also sent to the input of the temperature correction table. In the temperature correction table of the rewritable nonvolatile memory 113, the reflected light amount sensor output value S for the smoke, which is the measured object after temperature correction, is output to the controller 112 from these two inputs T and Snc. The controller 112 stores the input S in the S memory. Then the S ₀ stored in the memory for S ₀ first, and S stored in the memory for S just sent to the input of the calibration and reflectance calculation table of the rewritable non-volatile memory 113, the output value of this table This is output as the reflectance R of the smoke collected this time. If necessary, S ₀ stored in the S ₀ memory and S previously stored in the S memory are sent to the input of the calibration / reflectance calculation / reflection density calculation table of the rewritable nonvolatile memory 113. The output value of the table is output as the reflection density D of the smoke collected this time.
When smoke is continuously collected and calibration is performed for each measurement or for each of a plurality of measurements, the same method as described in the third embodiment is used. Description is omitted.

FIG. 12 shows a reflectometer according to the fifth embodiment of the present invention, which is a block diagram showing a configuration for calculating a reflectance R and a reflection density D having a calibration function. In the present embodiment, the reflected light amount sensor and the reflected light amount sensor circuit used in the reflectometer do not have a hardware temperature correction function, and thus are configured with a temperature correction function. The pre-measurement preparation in the present embodiment is the items 1) to 5) described above. This is equivalent to the case.
C. A table is not created, but for calibration, the relational expression of linear expression of a, b and S ₀ a = g (S ₀ ), b = h (S ₀ ), for temperature correction, the relational expression f (T ) Is prepared.
In FIG. 12 and FIG. 10, which is a block diagram showing the configuration of the third embodiment of the present invention, the reflected light quantity meters 121 and 101, the arithmetic control circuits 122 and 102, and the temperature sensors 125 and 105 are the same, and are rewritable. The non-volatile memories 123 and 103 have the same memory function, but in the third embodiment, the written contents are composed of a temperature correction table and a calibration table. In this embodiment, f (T) is used for temperature correction. For the calibration, a linear expression of a = g (S ₀ ) and b = h (S ₀ ) is written.

Next, the operation of the reflectometer configured as described above will be described.
First, in the initial state when the power of the apparatus as shown in FIG. 9 is turned on, the arithmetic control circuit 122 in FIG. 12 inputs the output setting signal En to the address of the rewritable nonvolatile memory 123 in which the characteristic equation is stored, thereby correcting the temperature. For the purpose of calibration, the equation of f (T) and for the purpose of calibration a linear equation of a = g (S ₀ ) and b = h (S ₀ ) are fetched and stored in respective designated memories.
Next, as shown in the block diagram of the smoke concentration measuring apparatus in FIG. 9, the roll-type filter paper 91 passes through the filter holder 92 and is wound up through the reflection densitometer 93. Therefore, always supply clean filter paper free of dirt. Can do. Therefore, clean roll-type filter paper 91 is supplied to the filter holder 92 and the reflection densitometer 93, and a predetermined amount of exhaust gas is passed through the portion sandwiched by the filter holder 92 to deposit smoke smoke solid matter on the filter paper. Almost simultaneously with the start of the smoke deposition, the reflected light meter 121 of FIG. 12 in the reflection densitometer 93 measures the reflected light amount of a clean filter paper, which is a regular reflectance reference plate used for calibration, and the reflection result before temperature correction is measured. An analog signal of the light amount sensor output value S ₀ nc is sent to the arithmetic control circuit 122. The arithmetic control circuit 122 A / D converts the input reflected light amount sensor output value S ₀ nc, and stores the digital value S ₀ nc in an S ₀ nc memory such as an accumulator of a microprocessor. Also, before and after the output of the reflected light meter 121 is input to the arithmetic control circuit 122, a temperature signal T is input to the arithmetic control circuit 122 from the temperature sensor 125 installed in the vicinity of the reflected light meter 121 and A / D. The converted digital value T is stored in a T memory such as an accumulator of a microprocessor. Next, it is taken out from the rewritable nonvolatile memory 123 at the time of power-on, and the temperature correction f (T) equation stored in the dedicated memory, the temperature signal T previously stored in the memory, and the common reflectance reference plate before temperature correction. The reflected light amount sensor output value S ₀ nc of the filter paper is output from each memory, S ₀ is calculated according to the equation S ₀ = f (T) × S ₀ nc, and stored in the S ₀ memory. Next, immediately after the power is turned on, the characteristic values a = g (S ₀ ), b = h (S ₀ ) for the calibration of a value and b value taken out from the rewritable nonvolatile memory 123 and stored in the dedicated memory are stored in the memory. The stored reflected light quantity sensor output value S ₀ after temperature correction is output from each memory, a value and b value are calculated, and stored in the dedicated memory for each of the a value and b value.
Next, in FIG. 9, when a predetermined amount of exhaust gas is passed through the portion sandwiched between the filter holders 92 of the roll type filter paper 91, smoke smoke of solid smoke is deposited on the filter paper. Is moved to the reflectance measurement portion of the reflection densitometer 93, the reflected light quantity at that time is measured by the reflected light quantity meter 121 in FIG. 12, and the reflected light quantity sensor output Snc (analog quantity) before temperature correction is sent to the arithmetic circuit 122. To do. The arithmetic control circuit 122 performs A / D conversion on the input reflected light amount sensor output value Snc and stores the digital value Snc in an Snc memory such as an accumulator of a microprocessor. Next, f (T) equation for temperature correction stored in the dedicated memory for temperature correction, the temperature signal T, and the reflected light quantity sensor output value Snc before smoke correction stored in the memory are output from each memory. , S = f (T) × Snc is calculated and stored.
The a value and b value previously stored in the calibration dedicated memory and the S value previously stored in the S memory are output from each memory. (Equation 4) R = S / a−b / a = (S -B) Substitute into / a, calculate the R value, and output that value as the reflectance R of the smoke collected this time. If necessary, the reflection density is calculated from the reflection density D = −log ₁₀ R in (Equation 1) and output.
When smoke is continuously collected and calibration is performed for each measurement or for each of a plurality of measurements, the same method as described in the third embodiment is used. Description is omitted.

FIG. 13 shows a reflectometer according to the sixth embodiment of the present invention, and is a block diagram showing a configuration for calculating a reflectivity R and a reflection density D having a calibration function. In the present embodiment, the reflected light amount sensor and the reflected light amount sensor circuit used in the reflectometer do not have a hardware temperature correction function, and thus are configured with a temperature correction function. The pre-measurement preparation in the present embodiment is the items 1) to 5) described above. This is equivalent to the case.
D. A table in which the calibration table and the temperature correction table are combined into one is created.
R = S / a−b / a, D = −log ₁₀ R, S = f (T) × Snc, S ₀ = f (T) × S ₀ nc, a = g (S ₀ ), b = h ( S ₀ )
The table for temperature correction / calibration / reflectance calculation is R = (S−b) / a = [f (T) × Snc−h {f (T) × S ₀ nc}] / g {f (T) × S ₀ nc} and this graph, [input] temperature T, S ₀ nc value (S ₀ value before temperature correction), Snc value (S value before temperature correction)-[output] reflectance R 1 data table Create
Temperature correction / calibration / reflectance calculation The reflection density calculation table has the following formula: D = −log ₁₀ [[f (T) × Snc−h {f (T) × S ₀ nc}] / g {f (T) × S ₀ nc}] and the graph, [input] temperature T, S ₀ nc value (S ₀ value before temperature correction), Snc value (S value before temperature correction)-[output] data table of reflection density D Create

In FIG. 13 of the block diagram showing the configuration of the present embodiment and FIG. 11 of the block diagram showing the configuration of the fourth embodiment of the present invention, the reflected light meters 131 and 111, the controllers 132 and 112, and the temperature sensors 135 and 115 are The rewritable nonvolatile memories 133 and 113 have the same memory function but different contents. In the fourth embodiment of the present invention, the rewritable nonvolatile memories 133 and 113 are composed of a temperature correction table and a calibration table. In the form, the temperature correction and calibration are within one table. For this reason, the table contents are complicated but simple in operation.
Next, the operation of the reflectometer configured as described above will be described.
First, as shown in the block diagram of the smoke concentration measuring apparatus in FIG. 9, the roll type filter paper 91 passes through the filter holder 92 and is wound up through the reflection densitometer 93. Therefore, always supply clean filter paper free of dirt. Can do. Therefore, clean roll-type filter paper 91 is supplied to the filter holder 92 and the reflection densitometer 93, and a predetermined amount of exhaust gas is passed through the portion sandwiched by the filter holder 92 to deposit smoke smoke solid matter on the filter paper. Almost simultaneously with the start of the smoke deposition, the reflected light meter 131 in FIG. 13 in the reflection densitometer 93 measures the reflected light amount of a clean filter paper, which is a regular reflectance reference plate used for calibration, and the reflection result before temperature correction is measured. An analog signal of the light amount sensor output value S ₀ nc is sent to the controller 132. Storing reflected light amount sensor output value S ₀ nc entered in the controller 132 to the S ₀ nc memory in the internal memory of the S ₀ nc of the A / D converted digital value. Also, before and after the output of the reflected light meter 131 is input to the controller 132, the temperature signal T is input from the temperature sensor 135 installed in the vicinity of the reflected light meter 131 to the controller 132 and A / D converted to a digital value. Are stored in the T memory in the built-in memory.
Next, in FIG. 9, a predetermined amount of exhaust gas is passed through the portion sandwiched between the filter holders 92 of the roll-type filter paper 91, and smoke of solid smoke is deposited on the filter paper. The accumulated filter paper is moved to the reflectance measurement portion of the reflection densitometer 93, and the amount of reflected light at that time is measured by the reflected light meter 131 of FIG. 13, and the reflected light amount sensor output Snc (analog amount) before temperature correction. Is sent to the controller 132. The controller 132 A / D-converts the input reflected light amount sensor output value Snc, and stores the digital value Snc in the Snc memory in the built-in memory.
Next, the reflected light amount sensor output value S ₀ nc before the temperature correction of the clean filter paper, which is the normal reflectance reference plate stored in the memory of the controller 132, the temperature signal T, and the reflected light amount sensor output before the temperature correction of the smoke. The three Snc signals are output to the rewritable nonvolatile memory 133.
D. of preparation items 4) before calibration at the stage of preparation before calibration. As shown in Fig. 2, the temperature correction / calibration / reflectance calculation table, which is a single table with the integration of the calibration table and the temperature correction table, and the reflectance calculation table, and the reflection density calculation table are also added. A temperature correction / calibration / reflectance calculation / reflection density calculation table in one table is created and pre-written in the rewritable nonvolatile memory 133. By inputting three signals S ₀ nc, T, and Snc, It is output as the reflectance R or reflection density D of the smoke collected this time, which has been temperature-corrected and calibrated.
When smoke is continuously collected and calibration is performed for each measurement or for each of a plurality of measurements, the same method as described in the third embodiment is used. Description is omitted.

Next, a seventh embodiment of the present invention will be described.
In the first to sixth embodiments, an embodiment using one reflectance reference plate or a regular reflectance reference plate that replaces this reference plate at the time of calibration is introduced. In particular, labor saving and time of calibration using the regular reflectance reference plate are introduced. Although the embodiment in which the shortening and high accuracy are maintained and the reflectance can be continuously obtained has been described, the roll type filter paper used as a regular reflectance reference plate in this embodiment has a substantially constant reflectance. When examined in detail, it is confirmed that it varies slightly depending on the measurement location. Therefore, roll-type filter paper can be used as a regular reflectance reference plate when a measurement accuracy higher than this reflectance fluctuation range is required under the conditions of labor saving and time reduction of calibration and continuous acquisition of reflectance. Disappear. In general, the shorter the time from calibration to reflectance measurement, the smaller the variation factor and the lower the variation value, so that the measurement accuracy is improved.
Therefore, in this embodiment, under the conditions of labor saving and time saving of calibration, and continuous acquisition of reflectance, the irradiation light quantity is monitored without using a regular reflectance reference plate in order to further improve measurement accuracy ( A reflectance measurement example in which the a value and the b value shown in (Expression 6) and (Expression 7) are obtained and calibrated will be described.

  FIG. 14 is a ring light guide showing a seventh embodiment of the present invention. The glass fiber incident light side base 141, the flexible tube 142, the ring light housing 143, and the ring light (annular light source) 144 are the same as those in FIG. 3 of the first embodiment. The difference from the first embodiment is that a monitor light guide 145 and an irradiation light amount monitor 146 that receives light from the monitor light guide 145 and converts it into an irradiation light amount monitor output of an electrical signal are provided. The monitor light guide 145 is almost uniformly extracted from a fiber bundle having a diameter of about 100 microns extending from the fiber light projection port to the ring light housing 143, and has the same light quantity characteristics as the ring light. The irradiation light amount monitor 146 includes a monitor light amount sensor 147 and a monitor light amount sensor circuit 148, and the tip of the monitor light guide 145 and the monitor light amount sensor 147 are connected to both ends of the light shielding tube 140 that blocks external light. If necessary, a filter 149 for attenuating light quantity having a flat light transmission characteristic is provided in the visible light region, particularly from 450 nm to 650 nm. The monitor light amount sensor 147 for receiving the monitor light from the monitor light guide 145 uses a sensor equivalent to the reflected light amount sensor 44 of the reflectometer of FIG. 4, and the monitor light amount sensor circuit 148 is equivalent to the reflected light amount sensor circuit 47. The monitor light quantity sensor circuit 148 outputs an irradiation light quantity monitor output M using the circuit. Therefore, the irradiation light quantity monitor output M and the reflected light quantity sensor output S have the same wavelength width of light to be detected, and the temperature characteristics of the sensor and circuit are also the same, so both outputs have the same environmental characteristics. Accurate monitor detection is possible.

In the above configuration, when the light amount of the monitor light is [Im], the irradiation light amount I and the monitor light amount [Im] are in a proportional relationship, and if the proportionality constant is k, I = k [Im] (where k >> 1) to [Im] = I / k.
Next, assuming that the attenuation amount of the light amount attenuation light amount filter 149 in FIG. 14 is j (j ≧ 1) and the irradiation light amount monitor output value is M, the monitor light amount sensor 147 and the monitor light amount sensor circuit 148 are as shown in FIG. Since the same light quantity sensor 44 and light quantity sensor circuit 45 of the reflectometer are used, the photoelectric conversion rate of the irradiation light quantity monitor sensor is C in (Equation 5), and the electrical noise component of the irradiation light quantity monitor output value M is Therefore, the irradiation light amount monitor output value M can be expressed by M = C [Im] / j + N, and [Im] = I / k, so that M = CI / jk + N. When this is expanded with respect to the irradiation light quantity I, I = jk (MN) / C (Equation 13)
From (Equation 13), it can be seen that the irradiation light amount I and the irradiation light amount monitor output value M have a linear relationship.
Further, (Expression 6) and (Expression 7) are a from (Expression 13), and b is a = CIP (1 + mr ₂ Q ₂ ) = jkP (1 + mr ₂ Q ₂ ) (MN) (Expression 14) )
b = CI (1-P) r ₁ Q ₁ + N
= Jk (1-P) r 1 Q 1 M + {1-jk (1-P) r 1 Q 1} N ‥‥‥‥‥ ( Formula 15)
Can be expressed as Here, since C, P, m, r ₁ , r ₂ , Q ₁ , Q ₂ , j, k, and N are fixed values (constants), a value and b value are obtained from (Expression 14) and (Expression 15). Are linearly related to the irradiation light amount monitor output value M. The linear relational expressions for M in (Expression 14) and (Expression 15) are simply expressed as a = v (M) and b = w (M).
(Expression 14) and (Expression 15) are the reflected light quantity sensor output values S ₁ and S ₂ of two known calibration reference plates for calibration whose reflectivities are R ₁ and R ₂ (R ₁ > R ₂ ). When the irradiation light amount monitor output value M can be measured, the irradiation light amount I is changed in the calibration preparation stage, and the linear relationship between the irradiation light amount monitor output value M and the a and b values a = v (M), b = w By grasping (M), the reflected light amount sensor output value S of the object to be measured is measured, and at the same time, the irradiated light amount monitor output value M is measured to determine the a and b values. It means that the reflectance R can be obtained from the reflected light amount sensor output value S of the object based on (Equation 4) R = S / a−b / a. As a result, calibration without time lag can be performed with respect to changes in the amount of irradiation light and environmental changes, and measurement with higher accuracy than in the first embodiment can be performed. In this case, manual calibration is not required, so labor is saved, and it is also suitable for continuous measurement work.

FIG. 17 is a graph when (Equation 14) and (Equation 15) are confirmed by the reflectometer of the seventh embodiment of the present invention. The reference plate used here is a “white reference plate” which is a high-reflectance reference plate as two known calibration reference plates for calibration with reflectivity R of R ₁ and R ₂ (R ₁ > R ₂ ). (R ₁ = 0.90) and “black reference plate” (R ₂ = 0.03) which is a low reflectance reference plate. The reflectometer shown in FIG. 4 is used for these two types of reference plates, and the light amount setting voltage of the ring light guide illuminating device of the irradiation light source is changed, that is, the irradiation light amount I is changed to change the reflected light amount sensor output values S ₁ and S ₂ is measured, and at the same time, the irradiation light quantity monitor output value M is measured with the configuration shown in FIG. Based on this measurement result, a and b for each irradiation light quantity I were calculated based on (Equation 3). As described in the first embodiment, the reflected light amount sensor output values S ₁ and S ₂ of the two kinds of reference plates of reflectance R ₁ and R ₂ change linearly with respect to the irradiation light amount I, and the a and b characteristics also vary. It changed linearly with respect to the irradiation light quantity I, and it was confirmed that it matched with (Expression 6) and (Expression 7). Since the irradiation light quantity I and the irradiation light quantity monitor output value M are linearly related, FIG. 17 is a characteristic diagram when the irradiation light quantity monitor output value M is taken on the horizontal axis and a and b are taken on the vertical axis. In FIG. 17, since the irradiation light quantity I has a linear relationship with the irradiation light quantity monitor output value M, the a and b characteristics change linearly with respect to the irradiation light quantity monitor output value M. (Equation 14), (Equation 15) It can be seen that the characteristics shown in FIG.
Therefore, as a reflectance measurement, characteristic formulas a = v (M), b = w (M) of a value and b value with M as a reference as shown in FIG. 17 are obtained from a graph, and M (input) −a By preparing a table of values and b values (outputs), in the reflectance measurement of the object to be measured, the reflected light amount sensor output value S of the object to be measured is measured and simultaneously the irradiation light amount monitor output value M is also measured. The a value and b value are obtained from this M value by referring to the previously created table, or the characteristic values obtained by directly obtaining the M value from the graph of FIG. 17 a = v (M), b = w (M ) To determine the a and b values, and from the a and b values and the reflected light sensor output value S of the object to be measured, the reflectance R is calculated based on (Equation 4) R = S / a−b / a This indicates that it can be calculated, and quick and accurate calibration can be performed.

From the above, in the following procedure as preparation before calibration, the reflected light amount sensor output values S ₁ and S ₂ and the irradiated light amount monitor output value M of the reflected light reference plate of the irradiated light amount I and the reflectances R ₁ and R ₂ Next, the characteristics of a and b are obtained by (Equation 3) with respect to the irradiation light amount monitor output value M, and this characteristic equation and characteristic table are written in the memory.
1) Prepare a “white reference plate” with a high reflectance R _{1 and} a “black reference plate” with a low reflectance R ₂ as calibration reference plates for calibration.
2) The projection light quantity is changed, and the irradiation light quantity monitor output value M for each light quantity and the reflected light quantity sensor output value S of the calibration reflectance reference plate for the “white reference plate” and “black reference plate” are measured and recorded. From the reflected light amount sensor output values S ₁ and S ₂ of the “white reference plate” and “black reference plate” for each light amount, a and b are calculated.
3) Taking the projection light quantity setting voltage E on the horizontal axis, the irradiation light quantity monitor output value M, the reflected light quantity sensor output values S, a value, b of the calibration reference standard plate for “white reference board” and “black reference board” Take the values on the vertical axis, create each graph, confirm that each graph is a straight line, then take the irradiation light amount monitor output value M on the horizontal axis, and take the a value and b value on the vertical axis. A graph is created, and linear expressions a = v (M) and b = w (M) are obtained for the a value and the b value.
4) A table of irradiation light amount monitor output value M (input), a value, and b value (output) is created from this linear equation a = v (M), b = w (M) or this graph.
5) Write the linear expressions a = v (M), b = w (M) and the table for the a and b values into a rewritable nonvolatile memory such as an E-PROM or a flash memory.
The above is preparation before calibration. The pre-calibration preparations 1) to 5) do not need to be performed every time the apparatus is started. Basically, if there is no significant change in the shape and position of the optical system in the measuring unit of the reflectometer or the black paint state. Since the linear equation and the value do not change, it is sufficient to perform the above-mentioned “preparation before calibration” when the reflectometer is repaired or the apparatus is maintained. Further, in the measurement of the reflected light amount sensor output values on the two kinds of reference plates in the pre-calibration preparation 2) stage, the reflected light amount sensor output values of the reference plate are linearly related to the projected light amount, so that the light amount values of two or more points Each should be measured.

Next, the functional configuration and operation during calibration and measurement will be described according to the functional configuration diagram.
FIG. 15 is a circuit block diagram of a reflectometer or reflection densitometer according to the seventh embodiment of the present invention, and corresponds to FIG. 1 which is a circuit block diagram of the first embodiment of the present invention. In both figures, the reflected light quantity meters 151 and 11 are the reflected light quantity meters in FIG. 4, and the arithmetic control circuits 152 and 12 and the rewritable nonvolatile memories 153 and 13 are the same. The difference from the first embodiment is that an irradiation light amount monitor 154 is provided. The irradiation light amount monitor 154 has the function of the irradiation light amount monitor 146 of FIG. 14, and by detecting the monitor light from the monitor light guide 145, the irradiation light amount of the ring light is always detected and the received light amount of the monitor light is irradiated. The light quantity monitor output M is sent to the arithmetic control circuit 152. Next, the operation of the reflectometer functional block diagram of FIG. 15 configured as described above will be described.
First, as shown in FIG. 9, a predetermined amount of exhaust gas is passed through a filter holder 92 sandwiching a roll-type filter paper 91, and smoke of solid matter of exhaust gas is deposited on the filter paper. Move to the reflectance measurement part of the total 93. After the movement, the next smoke sample is collected through the exhaust gas again on the filter holder 92 side. Simultaneously with the start of this sampling operation, the analog irradiation amount monitor output M is output to the arithmetic control circuit 152 from the bright irradiation amount monitor 154 of FIG. input. In the arithmetic control circuit 152, the input irradiation light amount monitor output M is converted into a digital value by a built-in A / D converter, stored in an M memory such as an accumulator of a built-in microcomputer, and the memory output M is rewritable. The data is output to the nonvolatile memory 153. The memory 153 in which the M (input) -a, b (output) data table is written outputs the a value and b value corresponding to the inputted M value to the arithmetic control circuit 152. The arithmetic control circuit 152 stores the a value and b value input from the memory 153 in the a value and b value memory in the arithmetic control circuit 152.

Next, in FIG. 9, the reflected light amount of the filter paper obtained by moving the accumulated filter paper to the reflectance measuring portion of the reflection densitometer 93 is measured by the reflected light meter 151 of FIG. Analog amount) is sent to the arithmetic control circuit 152. The arithmetic control circuit 152 A / D-converts the input reflected light amount sensor output value S and stores the digital value S in an S memory such as an accumulator of a microprocessor. The a value and b value previously stored in the memory From (Equation 4), the reflectance R = S / a−b / a is calculated, and the value is output as the reflectance R of the smoke previously collected. If necessary, the reflection density D is calculated from the reflection density D = −log ₁₀ R in (Equation 1) and output.
Next, in FIG. 9, the second smoke sample is taken through the exhaust gas of a predetermined amount on the filter holder 92 side. When the collection is finished, the smoke portion is the same as described above. The filter paper is moved to a reflectometer, and the reflectivity is measured after monitoring the amount of irradiation light. Here, when the irradiation light amount monitor value is acquired, the a value and b value corresponding to the new monitor value can be used for calibration. However, in correspondence with the currently used a value and b value. If it is within a predetermined range compared with the monitor value, the same monitor value as before is used. When the value exceeds the predetermined range, this value is set as a new monitor value, and a corresponding to this value is used. The value and b value can also be used for calibration. In this way, the reflectance can be measured with high accuracy by monitoring the amount of irradiated light immediately before measuring the amount of reflected light and calibrating the reflectometer based on the amount of emitted light monitor output M. Also, this embodiment is suitable for continuous measurement because it is not necessary to do anything special during the continuous measurement of reflectance, and can be realized simply by repeating the above measurement method.
In the above operation, the description has been made when the contents of the rewritable nonvolatile memory 153 is a created table. However, the characteristic expression a = where the contents of the memory 153 are a value of the table and M of the b value are variables. In the case of v (M) and b = w (M), the reflectance R and the reflection density D are calculated as follows. In the apparatus as shown in FIG. 9, in the initial state when the power is turned on, the arithmetic control circuit 152 in FIG. 15 specifies the address of the rewritable nonvolatile memory 153 in which the characteristic equation is stored, and the characteristic equation for the a value and the b value. Are stored in respective designated memories. Next, when the irradiation light amount monitor output M is inputted at the measurement stage, M converted into a digital value is substituted into the characteristic equation to obtain a value and b value, and are stored in respective predetermined memories. Next, when the reflected light amount sensor output value S of the smoke sample is input, the reflectance R = S / a−b / a is obtained from the a value, the b value, and S from (Expression 4) in the same manner as in the table reference operation. The calculated value is output as the reflectance R of the smoke previously collected. If necessary, the reflection density is calculated from the reflection density D = −log ₁₀ R in (Equation 1) and output.

Next, FIG. 16 is a block diagram showing a configuration for calculating the reflectance R and the reflection density D having a calibration function of the reflectance meter according to the eighth embodiment of the present invention.
In FIG. 16 of the block diagram showing the configuration of the present embodiment and FIG. 15 of the block diagram showing the configuration of the seventh embodiment of the present invention, the reflected light quantity meters 151 and 161 are the same, and the rewritable nonvolatile memories 153 and 163 Have the same function, although the written contents are different. 16 differs from FIG. 15 in that a controller 162 is used in FIG. 16 instead of the arithmetic control circuit 152 in FIG. 15. This controller 162 has an A / D converter and a memory, but has an arithmetic function. It has a control function of the apparatus and the reflected light meter. Therefore, the rewritable nonvolatile memory 163 is substituted for the arithmetic function portion instead of having no arithmetic function. That is, the irradiation light amount monitor output M and the reflected light amount sensor output value S of the object to be measured are input, and the table of reflectance R or reflection density D is the contents of the rewritable nonvolatile memory 163 as output. Therefore, item 4) of the pre-calibration preparation described above is changed as follows.
4) This linear formula a = v (M), b = w (M) and reflectance R (formula 4) R = S / ab−a and reflection density D (formula 1) D = −log ₁₀ From R
Reflectance R = (S−b) / a = {S−w (M)} / v (M)
Reflection density D = −log ₁₀ R = −log ₁₀ [{S−w (M)} / v (M)]
From this equation, the irradiation light amount monitor output M and the reflectance table of the reflected light amount sensor output value S (input) -reflectance R (output) of the object to be measured, and the irradiation light amount monitor output M and the object to be measured A reflection density table having a reflected light amount sensor output value S (input) −reflection density (output) is created.
Next, the operation will be briefly described with reference to FIG.
First, as shown in FIG. 9, a predetermined amount of exhaust gas is passed through a filter holder 92 sandwiching a roll-type filter paper 91, and smoke of solid matter of exhaust gas is deposited on the filter paper. Move to the reflectance measurement part of the total 93. After the movement, the next smoke sample is collected through the exhaust gas again on the filter holder 92 side. Simultaneously with the start of the sampling operation, an irradiation light amount monitor output M of an analog amount is input to the controller 162 from the irradiation light amount monitor 164 of FIG. In the controller 162, the input irradiation light amount monitor output M is converted into a digital value by a built-in A / D converter, stored in the built-in memory for M, and the irradiation light amount monitor output M which is the memory output is rewritable nonvolatile. Output to the memory 163.

Next, in FIG. 9, the reflected light amount of the filter paper obtained by moving the accumulated filter paper to the reflectance measuring portion of the reflection densitometer 93 is measured by the reflected light meter 161 of FIG. Analog amount) is sent to the controller 162. The controller 162 A / D-converts the input reflected light amount sensor output value S, stores the digital value S in the memory, and outputs the reflected light amount sensor output S as the memory output to the rewritable nonvolatile memory 163. The memory 163 in which the data tables of M and S (input) -R (output) and M and S (input) -D (output) are written has an R value or D corresponding to the inputted M value and S value. The value is output as the reflectance R or reflection density D of the smoke collected this time.
Next, in FIG. 9, the second smoke sample is taken through the predetermined amount of exhaust gas on the filter holder 92 side. When the collection is completed, the same operation as described above is performed. Measure the reflectance.
As described above, when the reflectance measurement is performed in an environment where the irradiation light amount changes as in the seventh embodiment and the eighth embodiment, it is important to monitor the irradiation light amount, and a part of the optical fiber is used for the light amount monitoring. Separately, using the same sensor and optical filter as the reflectometer, the amount of irradiation is monitored at the time of reflected light measurement, and the reflectance meter is calibrated at the time of reflectance measurement by the irradiation light amount monitor output M. In addition, since these operations can be performed without using a human hand, it is suitable for automation and also suitable for continuous measurement.

In the seventh and eighth embodiments, the reflected light amount sensor, the reflected light amount sensor circuit, the monitor light amount sensor circuit, and the monitor light amount sensor circuit correspond in hardware so that the influence of the ambient temperature fluctuation can be ignored. As a variation factor, only the amount of irradiation light is used and the ambient temperature is not included. However, in the case of the reflected light quantity sensor, reflected light quantity sensor circuit, monitor light quantity sensor, and monitor light quantity sensor circuit that are not supported on the hardware side, it is necessary to correct the reflected light quantity sensor output due to temperature fluctuations. The above-mentioned relational expression or table is created separately, and the reflected light quantity sensor output and the irradiation light quantity monitor output are corrected for temperature with this relational expression or table, and then the pre-calibration preparation and calibration measurement procedures are performed, or the table at the time of calibration It is necessary to follow the pre-calibration preparation and calibration measurement procedures as a configuration in which a temperature correction table and relational expression are incorporated in the relational expression, and the embodiments are shown and described as ninth to twelfth embodiments. .
As a temperature correction method, the reflected light amount sensor output value S (T ₀ ) of the object to be measured at a predetermined temperature T ₀ (eg, T ₀ = 25 ° C.) is set to S, and the value S before the temperature correction at the temperature T. Let (T) be Snc. Next, change the temperature, measure the temperature characteristics of Snc, create a graph of the temperature correction formula S / Snc = f (T), and find the correction formula. From the Snc measured at temperature T, the temperature at T ₀ As for the value S, the reflected light quantity sensor output value S after temperature correction can be easily obtained by S = Snc × f (T). In addition, S = Snc × f (T) or directly from the characteristic graph, the temperature T and Snc value are input, and a table with the S value output is created. By referring to this table, the S value can be easily obtained. It is done. Similarly, for the irradiation light amount monitor output value M, the irradiation light amount monitor output value M (T ₀ ) is M, and the value M (T) before temperature correction at the temperature T is Mnc. In this embodiment, when the temperature correction equation f (T) that is actually a function of the temperature T is obtained, the reflected light amount sensor output value S ₁ of the white reference plate among the reflectance reference plates is used, and the value at the temperature T ₀ is used. S ₁ and by changing the temperature T as a value obtained by dividing _{S 1 / S 1 nc = f} (T) with a value S ₁ nc at temperature T was determined created f (T) graphs.
Therefore, the reflected light amount sensor output values S ₁ and S ₂ and the irradiation light amount monitor output value M of the “white reference plate” and “black reference plate” in the pre-calibration preparation shown below are the S ₁ before correction at the temperature T by the above method. nc, S ₂ nc, and Mnc are temperature-corrected to values at temperature T ₀ .

First, as a preparation before calibration, the characteristics of the irradiation light quantity I, the reflectance reference plate of the reflectances R ₁ and R ₂ and the irradiation light quantity monitor output value M are acquired in the following procedure, and then the irradiation light quantity monitor output is obtained. The characteristics of a and b in (Expression 2) with respect to the value M are obtained, and the characteristic tables of the characteristic expressions a = v (M) and b = w (M) are written in the memory.
1) Prepare a “white reference plate” with a high reflectance R _{1 and} a “black reference plate” with a low reflectance R ₂ as calibration reference plates for calibration.
2) The projection light quantity is changed, and the irradiation light quantity monitor output value M for each light quantity and the reflected light quantity sensor output value S of the calibration reflectance reference plate for the “white reference plate” and “black reference plate” are measured and recorded. From the reflected light amount sensor output values S ₁ and S ₂ of the “white reference plate” and “black reference plate” for each light amount, a and b are calculated.
3) Taking the projection light amount setting voltage E on the horizontal axis, the irradiation light amount monitor output value M, the reflected light amount sensor output values S ₁ , S ₂ , and the calibration reference plate for calibration of the “white reference plate” and “black reference plate” Taking the a and b values on the vertical axis, creating respective graphs, confirming that each graph is a straight line, and then taking the irradiation light amount monitor output value M on the horizontal axis to obtain the a and b values. Is plotted on the vertical axis, and linear expressions a = v (M) and b = w (M) are obtained for the a value and the b value.
4) A table of irradiation light quantity monitor output value M (input), a value, and b value (output) is created from this linear expression or this data. In this calibration table creation stage, the following four cases are created in consideration of the association with the temperature correction table described above.
A. The calibration table and the temperature correction table are separated, the calibration table is (input) M- (output) a, b, and the temperature correction table is (input) temperature T and Snc value- (output) S value.
Both tables are created based on the equations and graphs of temperature correction table: S = f (T) × Snc and calibration table: a = v (M), b = w (M).
B. A calibration / reflectance calculation table or a calibration / reflectance calculation / reflection density calculation table and a temperature correction table are created.
Linear formula a = v (M), b = w (M) and calculation formula R = S / a−b / a = (S−b) / a, D = −log ₁₀ R, for calibration and reflectance calculation The table shows the reflectivity R = (S−b) / a = {S−w (M)} / v (M) and from this graph, the data table of (input) M and S− (output) reflectivity R 1 is obtained. create.
The calibration / reflectance calculation / reflection density calculation table shows the reflection density D = −log ₁₀ [{S−w (M)} / v (M)] and this graph (input) M and S− (output) reflection A data table for density D is created.
The temperature correction table creates a data table of (input) temperature T and Snc value− (output) S value from the equations S = f (T) × Snc, M = f (T) × Mnc and this graph.
C. A table is not created. For calibration, a relational expression a = v (M), b = w (M) for linear expression of a, b and M, and a relational expression f (T) for temperature are prepared for temperature correction. To do.
D. A table in which the calibration table and the temperature correction table are combined into one is created.
R = S / a−b / a, D = −log ₁₀ R, S = f (T) × Snc, M = f (T) × Mnc, a = v (M), b = w (M) The correction / calibration / reflectance calculation table is as follows: reflectivity R = (S−b) / a = [f (T) × Snc−w {f (T) × Mnc}] / v {f (T) × Mnc } And from this graph, a data table of [input] temperature T, Mnc value (M value before temperature correction), Snc value (S value before temperature correction) − [output] reflectance R 1 is created.
The table for temperature correction / calibration / reflectance calculation / reflection density calculation is: reflection density D = −log ₁₀ [[f (T) × Snc−w {f (T) × Mnc}] / v {f (T) × Mnc}] and a graph of [input] temperature T, Mnc value (M value before temperature correction), Snc value (S value before temperature correction)-[output] reflection density D.
5) Item 4) a. ~ D. The table and the relational expression prepared in (1) are written in a rewritable nonvolatile memory such as an E-PROM or a flash memory according to each case.
The above is preparation before calibration. The pre-calibration preparations 1) to 5) do not need to be performed every time the apparatus is started. Basically, if there is no significant change in the shape and position of the optical system in the measuring unit of the reflectometer or the black paint state. Since the linear equation and the value do not change, it is sufficient to perform the above-mentioned “preparation before calibration” when the reflectometer is repaired or the apparatus is maintained. Further, in the measurement of the reflected light amount sensor output values on the two kinds of reference plates in the pre-calibration preparation 2) stage, the reflected light amount sensor output values of the reference plate are linearly related to the projected light amount, so that the light amount values of two or more points Each should be measured.

Next, the functional configuration and operation during calibration and measurement will be described.
FIG. 18 is a block diagram showing a reflectometer according to the ninth embodiment of the present invention, having a calibration function, and calculating a reflectivity R and a reflection density D. In this embodiment, the reflected light amount sensor and the reflected light amount sensor circuit, the monitor light amount sensor circuit, and the monitor light amount sensor circuit used in the reflectometer are not provided with a hardware temperature correction function, and thus a temperature correction function is added. It is an embodiment in configuration. The pre-measurement preparation in the present embodiment is the items 1) to 5) described above. This is equivalent to the case.
A. The calibration table and the temperature correction table are separated, the calibration table is (input) M- (output) a, b, and the temperature correction table is (input) temperature T and Snc value- (output) S value.
Both tables are created based on the temperature correction table: S = f (T) × Snc and the calibration table: a = v (M), b = w (M).

Next, the functional configuration and operation during calibration and measurement will be described.
FIG. 18 is a circuit block diagram of a reflectometer or reflection densitometer according to the ninth embodiment of the present invention, and corresponds to FIG. 15 which is a circuit block diagram of the seventh embodiment of the present invention. In both figures, the reflected light quantity meter 181 does not have a hardware temperature correction function in the reflected light quantity sensor 44 and the reflected light quantity sensor circuit 47 shown in FIG. 4, but the other functions are the same as the reflected light quantity meter 151. Similarly, the irradiation light amount monitor 184 does not have a hardware temperature correction function in the monitor light amount sensor 147 and the monitor light amount sensor circuit 148 shown in FIG. Is the same. The irradiation light amount monitor 184 is provided at a location relatively close to the reflected light amount meter 181 and has almost the same atmosphere. The arithmetic control circuits 182 and 152 have the same function. A rewritable nonvolatile memory 183 stores two tables for temperature correction and calibration at the stage of preparation before measurement. Since the number of inputs and outputs to the rewritable nonvolatile memory 183 is large, a multiplexer is provided in the input / output portion of the rewritable nonvolatile memory 183 of the arithmetic control circuit to switch between temperature correction input and output and calibration input and output. . Reference numeral 185 denotes a so-called temperature sensor whose output changes with temperature change, and is provided in the vicinity of the reflected light meter 181.

Next, the operation of the reflectometer function block diagram of FIG. 18 configured as described above will be described.
First, as shown in FIG. 9, a predetermined amount of exhaust gas is passed through a filter holder 92 sandwiching a roll-type filter paper 91, and smoke of solid matter of exhaust gas is deposited on the filter paper. Move to the reflectance measurement part of the total 93. After the movement, the next smoke sample is collected again through the exhaust gas on the filter holder 92 side. At almost the same time as this sampling operation is started, an irradiation amount monitor output Mnc of an analog amount is output to the arithmetic control circuit 182 from the irradiation amount monitor 184 of FIG. input. In the arithmetic control circuit 182, the input irradiation light amount monitor output Mnc is converted into a digital value by a built-in A / D converter, stored in an Mnc memory such as an accumulator of a built-in microcomputer, and the memory output Mnc is rewritable. The data is output to the nonvolatile memory 183. Next, a temperature signal T is input from the temperature sensor 185 installed in the vicinity of the reflected light meter 181 to the arithmetic control circuit 182 and A / D converted, and the digital value T is stored in a T memory such as an accumulator of a microprocessor. The memory output T is output to the rewritable nonvolatile memory 183. In the temperature correction table inside the rewritable nonvolatile memory 183, the irradiation light quantity monitor output value M after temperature correction is output to the arithmetic control circuit 182 from these two inputs T and Mnc. The arithmetic control circuit 182 stores the input M in the M memory, and then switches to a new output and input using a multiplexer incorporating the output and input to the rewritable nonvolatile memory 193. The stored M is sent again to the calibration table input of the rewritable nonvolatile memory 183 as a new output. (Input) M- (Output) The rewritable nonvolatile memory 183 in which the data tables a and b are written outputs the a value and b value corresponding to the input M value to the arithmetic control circuit 182. The arithmetic control circuit 182 stores the a value and the b value input from the memory 183 in the a value and b value memory in the arithmetic control circuit 182.

Next, in FIG. 9, the reflected light amount of the filter paper obtained by moving the accumulated filter paper to the reflectance measurement portion of the reflection densitometer 93 is measured by the reflected light meter 181 of FIG. Analog amount) is sent to the arithmetic control circuit 182. The arithmetic control circuit 182 performs A / D conversion on the input reflected light amount sensor output value Snc, stores the digital value Snc in an Snc memory such as an accumulator of a microprocessor, and outputs the memory output Snc to the rewritable nonvolatile memory 183. . The temperature T signal is first stored in the T memory of the arithmetic control circuit 182, and the memory output T is output to the rewritable nonvolatile memory 183. Accordingly, in the temperature correction table inside the rewritable nonvolatile memory 183, the reflected light amount sensor output value S after temperature correction is output to the arithmetic control circuit 182 from these two inputs T and Snc. The arithmetic control circuit 182 stores the input S in the S memory, and the reflectance R = S / ab−a / b / a from the S value and the a and b values previously stored in the memory. And the value is output as the reflectance R of the smoke sampled earlier. If necessary, the reflection density D is calculated from the reflection density D = −log ₁₀ R in (Equation 1) and output.
Next, in FIG. 9, the second smoke sample is collected through the exhaust gas of a predetermined amount on the filter holder 92 side, but when the collection is completed, the same operation as described above is performed. And reflectivity is measured. When collecting smoke samples continuously and measuring the reflectance Snc, the above operation is repeated. In this way, the reflectance can be measured with high accuracy by monitoring the amount of irradiated light immediately before measuring the amount of reflected light and calibrating the reflectometer with the output of the amount of irradiated light monitor M. Also, this embodiment is suitable for continuous measurement because it is not necessary to do anything special during the continuous measurement of reflectance, and can be realized simply by repeating the above measurement method.
Next, FIG. 19 shows a reflectance meter according to the tenth embodiment of the present invention, which has a calibration function and is a block diagram showing a configuration for calculating reflectance R and reflection density D. In the present embodiment, the reflected light amount sensor and the reflected light amount sensor circuit used in the reflectometer do not have a hardware temperature correction function, and thus are configured with a temperature correction function. The preparations before measurement in this embodiment are the items 1) to 5) described above. This is equivalent to the case.
B. A calibration / reflectance calculation table or a calibration / reflectance calculation / reflection density calculation table and a temperature correction table are created.
Linear formula a = v (M), b = w (M) and calculation formula R = S / a−b / a = (S−b) / a, D = −log ₁₀ R, for calibration and reflectance calculation The table shows the reflectivity R = (S−b) / a = {S−w (M)} / v (M) and from this graph, the data table of (input) M and S− (output) reflectivity R create.
The calibration / reflectance calculation / reflection density calculation table shows the reflection density D = −log ₁₀ [{S−w (M)} / v (M)] and this graph (input) M and S− (output) reflection A data table for density D is created.
The temperature correction table creates a data table of (input) temperature T and Snc value− (output) S value from the equations S = f (T) × Snc, M = f (T) × Mnc and this graph.

Next, the functional configuration and operation during calibration and measurement will be described.
FIG. 19 is a circuit block diagram of a reflectometer or reflection densitometer according to the tenth embodiment of the present invention, and corresponds to FIG. 16 which is a circuit block diagram of the eighth embodiment of the present invention. In both figures, the reflected light quantity meter 191 does not have a hardware temperature correction function in the reflected light quantity sensor 44 and the reflected light quantity sensor circuit 47 shown in FIG. 4, but the other functions are the same as the reflected light quantity meter 161. Similarly, the irradiation light quantity monitor 194 does not have a hardware temperature correction function in the monitor light quantity sensor 147 and the monitor light quantity sensor circuit 148 shown in FIG. Is the same. The irradiation light amount monitor 194 is provided in a place relatively close to the reflected light amount meter 191 and has almost the same atmosphere. The controllers 192 and 162 have the same function. The rewritable nonvolatile memory 193 stores two tables for temperature correction and calibration at the stage of preparation before measurement. Since the number of inputs and outputs to the rewritable nonvolatile memory 193 is large, a multiplexer is actually provided in the input and output part of the rewritable nonvolatile memory 193 of the arithmetic control circuit. Yes. Reference numeral 195 denotes a so-called temperature sensor whose output changes with temperature change, and is provided in the vicinity of the reflected light meter 191.

Next, the operation of the reflectometer functional block diagram of FIG. 19 configured as described above will be described.
First, as shown in FIG. 9, a predetermined amount of exhaust gas is passed through a filter holder 92 sandwiching a roll-type filter paper 91, and smoke of solid matter of exhaust gas is deposited on the filter paper. Move to the reflectance measurement part of the total 93. After the movement, the next smoke sample is collected again through the exhaust gas on the filter holder 92 side, and at the same time as this sampling operation is started, an analog amount of irradiation light amount monitor output Mnc is input to the controller 192 from the irradiation light amount monitor 194 of FIG. . The controller 192 converts the input irradiation light amount monitor output Mnc into a digital value by the built-in A / D converter, stores it in the built-in Mnc memory, and outputs the memory output Mnc to the rewritable nonvolatile memory 193. . Next, a temperature signal T is input from the temperature sensor 195 installed in the vicinity of the reflected light meter 191 to the controller 192, A / D-converted, and stored in a T memory containing a digital value T, and its memory output T Is output to the rewritable nonvolatile memory 193. In the temperature correction table inside the rewritable nonvolatile memory 193, the irradiation light quantity monitor output value M after temperature correction is output to the controller 192 from these two inputs T and Mnc. The controller 192 stores the input M in the M memory.

  Next, in FIG. 9, the reflected light amount of the filter paper obtained by moving the accumulated filter paper to the reflectance measurement portion of the reflection densitometer 93 is measured by the reflected light meter 191 of FIG. 19, and the reflected light amount sensor output Snc ( Analog amount) is sent to the controller 192. The controller 192 A / D converts the input reflected light amount sensor output value Snc, stores the digital value Snc in the built-in Snc memory, and outputs the memory output Snc to the rewritable nonvolatile memory 193. On the other hand, the temperature T signal is first stored in the T memory of the controller 192, and the memory output T is output to the rewritable nonvolatile memory 193. Accordingly, in the temperature correction table inside the rewritable nonvolatile memory 193, the reflected light amount sensor output value S after temperature correction is output to the controller 192 from these two inputs T and Snc. The controller 192 stores the input S in the S memory. Next, the output and input to the rewritable non-volatile memory 193 are switched to a new output and input using a multiplexer. Then, the M stored in the M memory and the S previously stored in the S memory as new outputs are sent to the calibration / reflectance calculation table input of the rewritable nonvolatile memory 193, and the output value of this table is output. Is output as the reflectance R of the smoke collected this time. If necessary, the M stored in the M memory and the S stored in the S memory are sent to the input of the calibration / reflectance calculation / reflection density calculation table of the rewritable nonvolatile memory 193. The output value is output as the reflection density D of the smoke collected this time.

  Next, in FIG. 9, the second smoke sample is collected through the exhaust gas of a predetermined amount on the filter holder 92 side, but when the collection is completed, the same operation as described above is performed. And reflectivity or reflection density is measured. When collecting smoke samples continuously and measuring the reflectance Snc, the above operation is repeated. In this way, the reflectance can be measured with high accuracy by monitoring the amount of irradiated light immediately before measuring the amount of reflected light and calibrating the reflectometer based on the amount of emitted light monitor output M. Also, since these operations can be performed without using human hands, it is suitable for automation, and in this embodiment, there is no need to do anything special in continuous measurement of reflectance, and it can be realized by simply repeating the above measurement method. So it is suitable for continuous measurement.

Next, FIG. 20 shows a reflectometer according to the eleventh embodiment of the present invention, which is a block diagram showing a configuration for calculating a reflectivity R and a reflection density D having a calibration function. In the present embodiment, the reflected light amount sensor and the reflected light amount sensor circuit used in the reflectometer do not have a hardware temperature correction function, and thus are configured with a temperature correction function. The pre-measurement preparation in the present embodiment is the items 1) to 5) described above. This is equivalent to the case.
C. A table is not created. For calibration, a relational expression a = v (M), b = w (M) for linear expression of a, b and M, and a relational expression f (T) for temperature are prepared for temperature correction. To do.
FIG. 20 is a block diagram showing the configuration of the present embodiment, and FIG. 18 is a block diagram showing the configuration of the ninth embodiment of the present invention. In FIG. 204 and 184 and temperature sensors 205 and 185 are the same, and the rewritable nonvolatile memories 203 and 183 have the same memory function. In this embodiment, a temperature correction equation f (T) is written for temperature correction, and a linear equation a = v (M) and b = w (M) is written for calibration. .

Next, the operation of the reflectometer configured as described above will be described.
First, in the initial state when the power of the apparatus as shown in FIG. 9 is turned on, the arithmetic control circuit 202 in FIG. 20 inputs the output setting signal En to the address of the rewritable nonvolatile memory 203 in which the characteristic equation is stored, thereby correcting the temperature. For the purpose of calibration, the equation of f (T), and for calibration, the primary equations of a = v (M) and b = w (M) are fetched and stored in the designated memory inside the arithmetic control circuit 202, respectively.
Next, in the measurement operation, as shown in FIG. 9, a predetermined amount of exhaust gas is passed through a filter holder 92 sandwiching a roll-type filter paper 91, and smoke of solid matter of exhaust gas is deposited on the filter paper. Is moved to the reflectance measurement portion of the reflection densitometer 93. After the movement, the next smoke sample is collected through the exhaust gas again on the filter holder 92 side. Simultaneously with the start of this sampling operation, the irradiation light amount monitor output Mnc before temperature correction of the analog amount is calculated and controlled from the irradiation light amount monitor 204 in FIG. Input to the circuit 202. In the arithmetic control circuit 202, the input pre-correction irradiation light quantity monitor output Mnc is converted into a digital value by a built-in A / D converter and stored in a memory for Mnc such as an accumulator of a built-in microcomputer. Next, a temperature signal T is input from the temperature sensor 205 installed in the vicinity of the reflected light meter 201 to the arithmetic and control circuit 202, and A / D conversion is performed. . Next, take out from the rewritable nonvolatile memory 203 when the power is turned on and output the f (T) equation for temperature correction stored in the dedicated memory, the temperature signal T previously stored in the memory, and the irradiation light intensity monitor output Mnc before correction from each memory. Then, M is calculated according to the formula of irradiation light intensity monitor output value M = f (T) × Mnc after temperature correction, and stored in the M memory. Next, it is taken out from the rewritable non-volatile memory 203 immediately after the power is turned on and stored in the memory with the characteristic expressions a = v (M), b = w (M) for the calibration of the a value and b value stored in the dedicated memory. The irradiation light quantity monitor output value M after temperature correction is output from each memory, a value and b value are calculated, and stored in dedicated memories for the a value and b value, respectively.

Next, in FIG. 9, the reflected light amount of the filter paper at the location where the smoke has been moved to the reflectance measuring portion of the reflection densitometer 93 is measured by the reflected light meter 201 of FIG. 20, and the reflected light amount before temperature correction. The sensor output Snc (analog amount) is sent to the arithmetic circuit 202. The arithmetic control circuit 202 A / D-converts the input reflected light amount sensor output value Snc and stores the digital value Snc in an Snc memory such as an accumulator of a microprocessor. Next, the f (T) equation for temperature correction stored in the dedicated memory for temperature correction, the temperature signal T, and the smoke reflected light quantity sensor output value Snc before temperature correction stored in the memory are output from each memory. Then, S is calculated according to the equation of reflected light amount sensor output value S = f (T) × Snc after temperature correction, and stored in the S memory.
The a and b values previously stored in the dedicated calibration memory and the S value previously stored in the S memory are output from each memory. (Equation 4) R = S / a−b / a = (S Substituting into -b) / a, calculating the R value, and outputting that value as the reflectance R of the smoke collected this time. If necessary, the reflection density is calculated from the reflection density D = −log ₁₀ R in (Equation 1) and output.
Repeat the above operation to collect smoke continuously. In the present embodiment, the contents of the rewritable nonvolatile memory 203 are only mathematical expressions, and it is not necessary to create and write a table, so that preparation before calibration is simplified. Also, this method embodiment is suitable for continuous measurement because it is not necessary to do anything special in continuous measurement of reflectance, and can be realized simply by repeating the above measurement method.

FIG. 21 shows a reflectometer according to the twelfth embodiment of the present invention, which is a block diagram showing a configuration for calculating a reflectivity R and a reflection density D having a calibration function. In the present embodiment, the reflected light amount sensor and the reflected light amount sensor circuit used in the reflectometer do not have a hardware temperature correction function, and thus are configured with a temperature correction function. The pre-measurement preparation in the present embodiment is the items 1) to 5) described above. This is equivalent to the case.
D. A table in which the calibration table and the temperature correction table are combined into one is created.
R = S / a−b / a, D = −log ₁₀ R, S = f (T) × Snc, M = f (T) × Mnc, a = v (M), b = w (M) The correction / calibration / reflectance calculation table is as follows: reflectivity R = (S−b) / a = [f (T) × Snc−w {f (T) × Mnc}] / v {f (T) × Mnc } And from this graph, a data table of [input] temperature T, Mnc value (M value before temperature correction), Snc value (S value before temperature correction)-[output] reflectivity R is created.
The table for temperature correction / calibration / reflectance calculation / reflection density calculation is: reflection density D = −log ₁₀ [[f (T) × Snc−w {f (T) × Mnc}] / v {f (T) × Mnc}] and a graph of [input] temperature T, Mnc value (M value before temperature correction), Snc value (S value before temperature correction)-[output] reflection density D.

Next, the functional configuration and operation during calibration and measurement will be described.
FIG. 21 is a circuit block diagram of a reflectometer or reflection densitometer according to the twelfth embodiment of the present invention, and corresponds to FIG. 19 which is a circuit block diagram of the tenth embodiment of the present invention. In both figures, the reflected light quantity meters 211 and 191, the irradiation light quantity monitors 214 and 194, the controllers 212 and 192, and the temperature sensors 215 and 195 are the same. The reflected light quantity meter and the irradiation light quantity monitor each have a temperature correction function in the sensor and the circuit. Absent. The rewritable non-volatile memories 213 and 193 are functionally the same, but if the table of the contents of the memory is a reflectance output in the rewritable non-volatile memory 193, there are two for temperature correction and for calibration and reflectance calculation In the case of the reflectance output in the rewritable nonvolatile memory 213, the tables for temperature correction and calibration / reflectance calculation are integrated into one, and in the case of the reflection density output Each table for temperature correction, calibration / reflectance calculation, and reflection density calculation is integrated into one.

Next, the operation of the reflectometer functional block diagram of FIG. 21 configured as described above will be described.
First, as shown in FIG. 9, a predetermined amount of exhaust gas is passed through a filter holder 92 sandwiching a roll-type filter paper 91, and smoke of solid matter of exhaust gas is deposited on the filter paper. Move to the reflectance measurement part of the total 93. After the movement, the next smoke sample is collected through the exhaust gas again on the filter holder 92 side, and simultaneously with the start of this sampling operation, an irradiation light amount monitor output Mnc of an analog amount is input to the controller 212 from the irradiation light amount monitor 214 of FIG. The controller 212 converts the input irradiation light amount monitor output Mnc before temperature correction into a digital value by a built-in A / D converter and stores it in a built-in Mnc memory.
Next, a temperature signal T is input from the temperature sensor 215 installed in the vicinity of the reflected light meter 211 to the controller 212, A / D converted, and stored in a T memory having a digital value T therein.

Next, in FIG. 9, the reflected light amount of the filter paper obtained by moving the accumulated filter paper to the reflectance measurement portion of the reflection densitometer 93 is measured by the reflected light meter 211 of FIG. 21, and the reflected light amount sensor output Snc ( Analog amount) is sent to the controller 212. The controller 212 A / D-converts the input reflected light amount sensor output value Snc before temperature correction and stores the digital value Snc in a built-in Snc memory.
Next, the three signals of the irradiation light amount monitor output Mnc before temperature correction, the temperature signal T, and the reflected light amount sensor output Snc before smoke temperature correction stored in the memory of the controller 212 are output to the rewritable nonvolatile memory 213. To do.
D. of preparation items 4) before calibration at the stage of preparation before calibration. As shown in the table, the calibration table and the temperature correction table are integrated, and the reflectance calculation table is added to form a single table for the temperature correction / calibration and reflectance calculation table, and the reflection density calculation table is also added. The temperature correction / calibration / reflectance calculation / reflection density calculation table in one table is created and pre-written in the rewritable nonvolatile memory 133. By inputting three signals of Mnc, T, and Snc, temperature correction is performed. Then, it is output as the reflectance R or the reflection density D of the smoke collected this time that has been corrected and calibrated.
Next, in FIG. 9, the second smoke sample is collected through the predetermined amount of exhaust gas on the filter holder 92 side. When the collection is completed, the same operation as described above is performed. And reflectivity or reflection density is measured.
In this way, the reflectance can be measured with high accuracy by monitoring the amount of irradiated light immediately before measuring the amount of reflected light and calibrating the reflectometer based on the amount of emitted light monitor output M. Moreover, since these operations can be performed without using human hands, it is suitable for automation, and this method is also suitable for continuous measurement of reflectance.

In the above embodiment, the calibration characteristic formulas and tables are corrected when the optical system change or the positional relation change between irradiation and reception occurs due to maintenance inside the reflectometer, etc. Since the characteristic, that is, the calibration characteristic needs to be changed and the table needs to be changed, the memory for storing the calibration characteristic and the table uses a rewritable nonvolatile memory. Originally, the non-volatile memory means a memory whose stored contents are not lost even when the power is turned off. However, the non-volatile memory in the present invention may be a power source of the main unit even if a volatile memory such as a RAM is used. Even when the power is turned off, a stored power source such as a backup battery may be used to keep the stored contents from erasing.
Further, when calibrating a reflectometer and a reflection densitometer, two or more calibration reference plates for calibration have been used, but if the method of the present invention using the relational expression of the calibration characteristic graph is used, 1 The a and b values are obtained by calibration with a single reference plate, and it can be seen that calibration can be performed with the same accuracy as when two or more calibration reference plates for calibration are used.

  In the embodiment described in the present specification, reflection with a configuration using a 45/0 optical system (: irradiates the object to be measured from the direction of 45 degrees and detects reflected light from the object to be measured from the vertical direction). Although the rate meter has been described, the present invention is not limited to this, and a 0/45 optical system (: irradiates the object to be measured from the vertical direction and detects reflected light from the object to be measured from the 45 degree direction). But it is possible. An example of the configuration is shown in FIG. The reflected light amount output and the irradiation light amount monitor output output from this drawing correspond to FIGS. 15 and 16, respectively. When the irradiation light amount monitor output is eliminated, FIG. It corresponds to 10-13 and FIGS. In FIG. 22, a convex lens can be provided between the lamp and the half mirror or between the half mirror and the measurement object to prevent the radiated light from divergence and to improve the irradiation efficiency.

11, 21, 101, 111, 121, 131, 151, 161, 181, 191, 201, 211 Reflective light meter
12, 102, 122, 152, 182, 202 Arithmetic control circuit
22, 112, 132, 162, 192, 212 controller
13, 23, 103, 113, 123, 133, 153, 163, 183, 193, 203, 213 Rewritable nonvolatile memory
184, 194, 204, 214 Irradiation quantity monitor
105, 115, 125, 135, 185, 195, 205, 215 Temperature sensor
31, 81, 141 Glass fiber incident light side cap
32, 82, 142 Flexible tube
33, 83, 143 ring light housing
34, 84, 144 Ring light (annular light source)
140 Shading tube 145 Monitor light guide
146 Irradiation light intensity monitor 147 Monitor light intensity sensor
148 Monitor light intensity sensor circuit 149 Light attenuation filter
40 Annular light source 41 Object mount
42 DUT 43 Aperture
44 Reflected light intensity sensor 45 Reflected light intensity sensor circuit
46 Tristimulus Green Filter 91 Roll Type Filter Paper
92 Filter holder 93 Reflectance densitometer

Claims (9)

Two known types of reflectance reference plates for calibration having reflectances R ₁ and R ₂ (R ₁ > R ₂ ) are used, and I− with the reflected light amount sensor output S corresponding to the irradiation light amount I for each of them in advance. S characteristics are measured, the relation between the a and b values of the relational expression S = aR + b and the fluctuation factors is grasped, and the causal relations Ia and b characteristics, and Sa and b characteristics are stored in the memory. At the time of calibration, the irradiation light quantity I ₀ at that time is detected, and the exact a and b values at the time of calibration based on the two types of reflectance reference plates for calibration are specified from the value and the stored causal relationship. = AR + b is established, then the reflected light amount sensor output value S of the object to be measured is measured, and the reflectance R and the reflectance R value are calculated from the equation R = S / ab−a of the reflectance R. Method for measuring reflectance and reflection density, which is used to calculate density D = −log ₁₀ R.
Here, a represents a constant related to detection of reflected light from the object to be measured, and b represents a noise component when detecting the object to be measured. The reflectance and reflection density according to claim 1, wherein the irradiation light quantity I ₀ detection at the time of calibration is performed by measuring the amount of reflected light detected at that time using one of the two types of calibration reflectance reference plates. How to measure. The detection of the irradiation light quantity I ₀ at the time of calibration is performed by measuring a detection amount of reflected light at that time using a mount of a measured object having a known reflectance or a white backing material as a regular reflectance reference plate. A method of measuring the reflectance and reflection density described. The method of measuring reflectance and reflection density according to claim 1, wherein the irradiation light quantity I ₀ detection at the time of calibration is performed by an irradiation light quantity monitor. The reflected light amount sensor output value S (T ₀ ) of the object to be measured at a predetermined temperature T ₀ is set to S, and the value S (T) before temperature correction at the temperature T is set to Snc. 5. A temperature correction table is created from a temperature correction equation of S / Snc = f (T) by measuring characteristics, and the reflected light amount sensor output value S after temperature correction is obtained. Of measuring the reflectance and reflection density of a liquid. A 45/0 optical system equipped with a means to detect the amount of light irradiated and the amount of reflected light to be measured and a means for detecting the amount of irradiated light. A non-volatile memory that can be accessed from, and a microprocessor that inputs a signal from the reflected light meter, inputs and outputs to the non-volatile memory, and performs arithmetic control,
The nonvolatile memory uses two kinds of known reflectance reference plates for calibration with reflectances R ₁ and R ₂ (R ₁ > R ₂ ), and the reflected light amount sensor corresponding to the irradiation light amount I for each of them in advance. The I-S characteristic with the output S is measured, the relation between the a and b values of the relational expression S = aR + b and the variation factor is grasped, and the causal relations Ia, b characteristic, Sa, b characteristic And the microprocessor specifies the a and b values at that time based on the two kinds of calibration reference plates for calibration from the detected irradiation light quantity value I ₀ and the causal relationship stored in the memory. The equation S = aR + b is established, and then the reflected light amount sensor output value S of the object to be measured is measured. From the equation R = S / ab−a of the reflectance R, the reflectance R and the reflectance R Reflectance characterized by having a calibration function for calculating density D = −log ₁₀ R using the value And reflection density measurement system.
Here, a represents a constant related to detection of reflected light from the object to be measured, and b represents a noise component when detecting the object to be measured. A 45/0 optical system equipped with a means to detect the amount of light irradiated and the amount of reflected light to be measured and a means for detecting the amount of irradiated light. A non-volatile memory that can be accessed from, and a signal from the reflected light meter, the light meter signal at the time of calibration from the reflected light meter is stored, and the signal is output to the nonvolatile memory and at the time of measurement A controller for outputting a reflected light meter signal to the nonvolatile memory;
The nonvolatile memory uses two kinds of known reflectance reference plates for calibration with reflectances R ₁ and R ₂ (R ₁ > R ₂ ), and the reflected light amount sensor corresponding to the irradiation light amount I for each of them in advance. The I-S characteristic with the output S is measured, the relation between the a and b values of the relational expression S = aR + b and the variation factor is grasped, and the causal relations Ia, b characteristic, Sa, b characteristic Table and reflectance R formula R = S / a−b / a, density formula D = −log ₁₀ R based calculation table of reflectance R and density D is stored, and the nonvolatile memory is calibrated The signal stored at the time and the reflected light amount sensor output value S from the reflected light meter at the time of measurement are input to the nonvolatile memory through the controller, and the reflectivity R and density D of the table output signal are input from the nonvolatile memory according to the input. Reflectivity characterized by output function Fine reflection density measurement system.
Here, a represents a constant related to detection of reflected light from the object to be measured, and b represents a noise component when detecting the object to be measured.   The reflectometer or reflection densitometer system according to claim 6 or 7, wherein the non-volatile memory is a memory card capable of freely inputting and changing information from the outside.   9. The temperature sensor and the nonvolatile memory include temperature characteristic information of a reflected light amount, and a function of compensating for a reflected light amount variation due to an environmental temperature at the time of measurement. Reflectance and reflection density measurement system.

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