JP5526338B2 - Vacuum dryer - Google Patents

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JP5526338B2
JP5526338B2 JP2009190983A JP2009190983A JP5526338B2 JP 5526338 B2 JP5526338 B2 JP 5526338B2 JP 2009190983 A JP2009190983 A JP 2009190983A JP 2009190983 A JP2009190983 A JP 2009190983A JP 5526338 B2 JP5526338 B2 JP 5526338B2
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徹 戸島
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東京理化器械株式会社
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本発明は、真空乾燥器に関し、詳しくは、真空チャンバ内に設けた棚板上に試料を入れた容器を載置して試料の真空乾燥を行うための真空乾燥機に関する。   The present invention relates to a vacuum dryer, and more particularly, to a vacuum dryer for placing a container in which a sample is placed on a shelf plate provided in a vacuum chamber to vacuum dry the sample.

真空乾燥器として、真空チャンバ内の試料載置棚に載置したシャーレやバットなどの容器に入れた試料をあらかじめ設定した温度に保持するため、試料載置棚に電気ヒータを設け、該電気ヒータに外部から通電することにより、試料載置棚を介して試料を所定温度に制御するようにしたものが知られている(例えば、特許文献1,2参照。)。   As a vacuum dryer, in order to maintain a sample placed in a container such as a petri dish or a bat placed on a sample placement shelf in a vacuum chamber at a preset temperature, an electric heater is provided on the sample placement shelf, and the electric heater It is known that a sample is controlled to a predetermined temperature via a sample mounting shelf by energizing from the outside (see, for example, Patent Documents 1 and 2).

実開昭61−63692号公報Japanese Utility Model Publication No. 61-63692 特開2007−303707号公報JP 2007-303707 A

各特許文献に記載されているように、試料載置棚に電気ヒータを設けることにより、試料載置棚上に載置した容器を介して試料を所定温度に保持することはできるが、試料載置棚への通電に真空コネクタを使用した場合は、差し込みの不具合で通電部分が剥き出しになっていると、真空放電が起ったり、試料から発生した腐食性ガスによる劣化などの不具合が生ずることがあった。また、通電にコイルを使用した場合は、コイルから発生する電磁波を完全に遮蔽しないと制御器などが誤作動するおそれがあり、電磁波対策に要するコストが問題となる。   As described in each patent document, by providing an electric heater on the sample mounting shelf, the sample can be held at a predetermined temperature via a container placed on the sample mounting shelf. If a vacuum connector is used to energize the shelf, if the current-carrying part is exposed due to an improper insertion, problems such as vacuum discharge or deterioration due to corrosive gas generated from the sample may occur. was there. In addition, when a coil is used for energization, a controller or the like may malfunction if electromagnetic waves generated from the coil are not completely shielded, and the cost required for electromagnetic wave countermeasures becomes a problem.

さらに、試料を加熱真空乾燥した後は、試料の吸湿を防止するため、真空状態で試料の温度が常温に下がるまで、試料を真空チャンバに入れたまま長時間待たなければならなかった。また、高温の試料をシリカゲル入りのデシケータに移し替えて常温まで冷すこともできるが、この場合は、高温の真空チャンバ内に手を入れなければならず、作業に注意を要しており、デシケータに移し替えても試料温度が下がるまで長時間を要していた。このため、1日で処理できる試料数が限られるという問題があった。   Furthermore, after the sample was heated and vacuum dried, in order to prevent moisture absorption of the sample, the sample had to be kept in a vacuum chamber for a long time until the temperature of the sample dropped to room temperature in a vacuum state. In addition, it is possible to transfer the high-temperature sample to a desiccator containing silica gel and cool it to room temperature. Even if it was transferred to a desiccator, it took a long time for the sample temperature to drop. Therefore, there is a problem that the number of samples that can be processed in one day is limited.

そこで本発明は、試料載置棚を効率よく加熱、冷却することができ、試料の温度制御を良好に行うことができるとともに、高温の真空チャンバ内を短時間で冷却することもできる真空乾燥機を提供することを目的としている。   Accordingly, the present invention provides a vacuum dryer that can efficiently heat and cool the sample mounting shelf, can control the temperature of the sample satisfactorily, and can cool the inside of the high-temperature vacuum chamber in a short time. The purpose is to provide.

上記目的を達成するため、本発明の真空乾燥器は、真空チャンバ内に着脱可能に設けた試料載置棚に載置した試料を真空下で加熱して乾燥させる真空乾燥器において、前記試料載置棚に温度調節用流体が流れる流体流路を設けるとともに、該流体流路の流体入口及び流体出口にそれぞれ連通するプラグを試料載置棚の基端部に設け、前記真空チャンバの側壁に、前記流体流路に温度調節用流体を供給する流体加熱流路と、該流体加熱流路内を流れる温度調節用流体及び前記真空チャンバ内を加熱する電気ヒータとを設け、前記流体加熱流路の流入口に、温度調節用流体を前記流体加熱流路に供給する流体供給路を設け、前記真空チャンバの後壁の流体入口及び流体出口のプラグに対応する位置に、前記流体入口のプラグを着脱可能に接続して前記流体流路へ温度調節用流体を供給する流体供給側ソケットを前記流体加熱流路の流出口に連通して設けるとともに、前記流体出口に連通するプラグを着脱可能に接続して前記流体流路を流れる温度調節用流体を排出する流体排出側ソケットを設けたことを特徴としている。 In order to achieve the above object, the vacuum dryer of the present invention is a vacuum dryer that heats and dries a sample placed on a sample placing shelf detachably provided in a vacuum chamber. A fluid flow path through which a temperature adjusting fluid flows is provided in the mounting shelf, and a plug communicating with a fluid inlet and a fluid outlet of the fluid flow path is provided at a base end portion of the sample mounting shelf, and a side wall of the vacuum chamber is provided . A fluid heating channel for supplying a temperature adjusting fluid to the fluid channel, a temperature adjusting fluid flowing in the fluid heating channel, and an electric heater for heating the vacuum chamber; A fluid supply passage for supplying a temperature adjusting fluid to the fluid heating passage is provided at the inlet, and the plug of the fluid inlet is attached to and detached from the fluid inlet and the outlet of the fluid in the rear wall of the vacuum chamber. Connect to possible A fluid supply side socket for supplying a temperature adjusting fluid to the fluid channel is provided in communication with the outlet of the fluid heating channel, and a plug connected to the fluid outlet is detachably connected to the fluid channel. A fluid discharge side socket for discharging the temperature adjusting fluid flowing through is provided.

た、前記流体供給路を流れる温度調節用流体と、前記流体排出路を流れる温度調節用流体とを熱交換させる熱交換器を設けることもできる。さらに、前記流体供給路は、第1切換弁及び熱交換器を有する加熱経路と、第2切換弁を有する冷却経路とを備え、前記熱交換器は、前記加熱経路を通って前記流体流路に供給される温度調節用流体と、前記流体流路から前記流体排出路に排出される温度調節用流体とを熱交換可能に形成されていることが好ましく、前記温度調節用流体が圧縮空気であっても良く、前記流体供給路は、該流体供給路から分岐して、先端にエアノズルを設けた洗浄経路を備えることもできる。 Also, it is also possible to pre-Symbol providing a temperature adjusting fluid flowing through the fluid supply passage, a heat exchanger for exchanging heat with a temperature adjusting fluid flow through the fluid discharge passage. Furthermore, the fluid supply path includes a heating path having a first switching valve and a heat exchanger, and a cooling path having a second switching valve, and the heat exchanger passes through the heating path and the fluid flow path. Preferably, the temperature adjusting fluid supplied to the fluid flow path and the temperature adjusting fluid discharged from the fluid flow path to the fluid discharge path are configured to be able to exchange heat, and the temperature adjusting fluid is compressed air. The fluid supply path may be provided with a cleaning path branched from the fluid supply path and provided with an air nozzle at the tip.

本発明の真空乾燥器によれば、試料載置棚の流体流路に、所定温度に加熱した温度調節用流体を流通させることにより、試料載置棚全体の表面を迅速かつ均一に加熱することができるとともに、常温又は冷却した温度調節用流体を流体流路に流通させることにより、試料載置棚を含めた真空チャンバ内を迅速に冷却することができる。   According to the vacuum dryer of the present invention, the surface of the entire sample mounting shelf is rapidly and uniformly heated by circulating the temperature adjusting fluid heated to a predetermined temperature through the fluid flow path of the sample mounting shelf. In addition, the inside of the vacuum chamber including the sample mounting shelf can be rapidly cooled by circulating the temperature adjusting fluid at room temperature or cooled through the fluid flow path.

また、前記流体供給路から試料載置棚の流体流路へ供給する温度調節用流体を、チャンバ加熱用ヒータによって加熱する流体加熱流路を設けることにより、温度調節用流体を加熱するための専用のヒータを設ける必要がなくなる。   Further, by providing a fluid heating channel for heating the temperature adjusting fluid supplied from the fluid supply channel to the fluid channel of the sample mounting shelf by a chamber heater, a dedicated temperature heating fluid is heated. There is no need to provide a heater.

さらに、試料載置棚の流体流路を接続手段によって着脱可能に形成することにより、真空チャンバから試料載置棚を簡単に取り外したり、取り付けたりすることができ、真空チャンバや試料載置棚の清掃を容易に行うことができる。   Furthermore, by forming the fluid flow path of the sample mounting shelf so as to be detachable by the connecting means, the sample mounting shelf can be easily removed from or attached to the vacuum chamber. Cleaning can be performed easily.

また、供給側の温度調節用流体と排出側の温度調節用流体とを熱交換させる熱交換器を設けることにより、熱エネルギーを回収して再利用することができ、試料載置棚の流体流路に供給する温度調節用流体を加熱するためのコストを低減できるとともに、高温の温度調節用流体が排出されることもなくなり、安全性の向上も図れる。   Further, by providing a heat exchanger that exchanges heat between the temperature adjusting fluid on the supply side and the temperature adjusting fluid on the discharge side, the heat energy can be recovered and reused, and the fluid flow of the sample mounting shelf can be recovered. The cost for heating the temperature adjusting fluid supplied to the passage can be reduced, and the high temperature adjusting fluid is not discharged, thereby improving safety.

特に、温度調節用流体を圧縮空気とすることにより、温度調節用流体のコストを低減できるとともに、温度調節用流体が漏れても真空チャンバの内部や周囲を汚染することはほとんどなく、温度調節用流体を回収する設備も不要となる。さらに、先端にエアノズルを設けた洗浄経路を設けておくことにより、エアノズルから噴出させた圧縮空気によって真空チャンバ内を容易に清掃することができる。   In particular, by using compressed air as the temperature adjusting fluid, the cost of the temperature adjusting fluid can be reduced, and even if the temperature adjusting fluid leaks, the inside and surroundings of the vacuum chamber are hardly contaminated. A facility for collecting the fluid is also unnecessary. Furthermore, by providing a cleaning path having an air nozzle at the tip, the inside of the vacuum chamber can be easily cleaned by compressed air ejected from the air nozzle.

本発明の一形態例を示す真空乾燥器の説明図である。It is explanatory drawing of the vacuum dryer which shows one example of this invention. 同じく真空チャンバの断面正面図である。It is the cross-sectional front view of a vacuum chamber similarly. 同じく真空チャンバの断面側面図である。It is the cross-sectional side view of a vacuum chamber similarly. 同じく試料載置棚の平面図である。It is a top view of a sample mounting shelf similarly.

真空乾燥器11は、真空ポンプに接続されるステンレス製の真空チャンバ12と、該真空チャンバ12内に着脱可能に設けられる複数の試料載置棚13とを備えるもので、真空チャンバ12の側壁12aには流体加熱流路14が設けられ、各試料載置棚13には流体流路15が設けられている。さらに、真空チャンバ12の前面には扉12bが設けられ、側壁12aには真空チャンバ12内を加熱するとともに、前記流体加熱流路14内を流れる流体を加熱するための電気ヒータ16が設けられている。また、側壁12aの内面には試料載置棚13を着脱可能に支持するガイドレール17が上下3段に設けられている。   The vacuum dryer 11 includes a stainless steel vacuum chamber 12 connected to a vacuum pump, and a plurality of sample placement shelves 13 detachably provided in the vacuum chamber 12, and a side wall 12 a of the vacuum chamber 12. Is provided with a fluid heating channel 14, and each sample mounting shelf 13 is provided with a fluid channel 15. Furthermore, a door 12b is provided on the front surface of the vacuum chamber 12, and an electric heater 16 is provided on the side wall 12a for heating the inside of the vacuum chamber 12 and heating the fluid flowing in the fluid heating flow path 14. Yes. In addition, guide rails 17 are provided on the inner surface of the side wall 12a so as to detachably support the sample mounting shelf 13 in three stages.

前記流体流路15は、各試料載置棚13の内部に折り返された状態で試料載置棚13の全面にわたって配置されるとともに、試料載置棚13の基端部には、流体流路15の入口側と出口側とに連通する一対のプラグ18a,18bが設けられている。また、真空チャンバ12の後壁内面には、各試料載置棚13のプラグ18a,18bにそれぞれ対応する位置に一対のソケット19a,19bが設けられている。   The fluid flow path 15 is disposed over the entire surface of the sample mounting shelf 13 in a state of being folded inside each sample mounting shelf 13, and the fluid flow path 15 is disposed at the base end of the sample mounting shelf 13. A pair of plugs 18a, 18b communicating with the inlet side and the outlet side are provided. A pair of sockets 19 a and 19 b are provided on the inner surface of the rear wall of the vacuum chamber 12 at positions corresponding to the plugs 18 a and 18 b of each sample mounting shelf 13.

流体加熱流路14を介して流体流路15に温度調節用流体を供給するための流体供給路21は、第1切換弁22及び熱交換器23を有する加熱経路24と、第2切換弁25を有する冷却経路26と、第3切換弁27及びエアノズル28を有する清浄経路29とを備えており、前記熱交換器23は、加熱経路24を通って流体流路15に供給される温度調節用流体と、流体流路15から流体排出路30に排出される温度調節用流体とを熱交換可能に形成されている。   A fluid supply path 21 for supplying a temperature adjusting fluid to the fluid flow path 15 via the fluid heating path 14 includes a heating path 24 having a first switching valve 22 and a heat exchanger 23, and a second switching valve 25. And a cleaning path 29 having a third switching valve 27 and an air nozzle 28, and the heat exchanger 23 is used for adjusting the temperature supplied to the fluid flow path 15 through the heating path 24. The fluid and the temperature adjusting fluid discharged from the fluid flow path 15 to the fluid discharge path 30 are formed to be able to exchange heat.

試料載置棚13を上段と下段とに装着して試料の真空乾燥を行う場合、上段及び下段のガイドレール17,17に試料載置棚13,13をそれぞれ挿入し、各試料載置棚13の入口側のプラグ18aをソケット19aに、出口側のプラグ18bをソケット19bにそれぞれ挿入して流体流路15を流体供給路21と流体排出路30とに接続する。また、試料載置棚13を装着しない中段のソケット19a,19bには栓を嵌め込んで塞いでおく。   When the sample mounting shelves 13 are mounted on the upper and lower stages and the sample is vacuum-dried, the sample mounting shelves 13 and 13 are inserted into the upper and lower guide rails 17 and 17, respectively, and the respective sample mounting shelves 13 are inserted. The plug 18a on the inlet side is inserted into the socket 19a and the plug 18b on the outlet side is inserted into the socket 19b, and the fluid flow path 15 is connected to the fluid supply path 21 and the fluid discharge path 30. In addition, plugs are fitted into the middle sockets 19a and 19b on which the sample mounting shelf 13 is not mounted.

試料を入れた試料容器を試料載置棚13,13にそれぞれ載置し、扉12bを閉じてから真空ポンプを作動させて真空チャンバ12内を真空状態に保持した後、電気ヒータ16を作動させるとともに、第2切換弁25及び第3切換弁27を閉じた状態のままで第1切換弁22を開き、温度調節用流体、例えば圧縮空気の供給を開始する。   The sample containers containing the samples are placed on the sample placement shelves 13 and 13, respectively, the door 12b is closed, the vacuum pump is activated to maintain the vacuum chamber 12 in a vacuum state, and then the electric heater 16 is activated. At the same time, the first switching valve 22 is opened while the second switching valve 25 and the third switching valve 27 are closed, and supply of a temperature adjusting fluid, for example, compressed air, is started.

圧縮空気供給源CAから供給される圧縮空気は、開状態の第1切換弁22を通って熱交換器23を経て加熱経路24を流れ、前記流体加熱流路14に流入する。この流体加熱流路14を流れる圧縮空気は、前記電気ヒータ16によって所定温度に加熱された後、入口側のソケット19a及びプラグ18aを介して流体流路15に流入し、試料載置棚13を所定温度に加熱した後、出口側のプラグ18b及びソケット19bを介して流体排出路30に排出され、前記熱交換器23を通って外部に排出される。   The compressed air supplied from the compressed air supply source CA passes through the first switching valve 22 in the open state, flows through the heat exchanger 23, passes through the heating path 24, and flows into the fluid heating flow path 14. The compressed air flowing through the fluid heating channel 14 is heated to a predetermined temperature by the electric heater 16, and then flows into the fluid channel 15 via the inlet-side socket 19a and the plug 18a. After being heated to a predetermined temperature, it is discharged to the fluid discharge path 30 through the outlet side plug 18b and the socket 19b, and then discharged to the outside through the heat exchanger 23.

このとき、流体流路15が試料載置棚13の全面にわたって設けられていることから、試料載置棚13の全面を確実に加熱することができ、上下の各試料載置棚13の表面温度を均一にすることができる。これにより、各試料載置棚13上にそれぞれ載置した各試料容器を、試料載置棚13上の位置に関係なく、試料載置棚13からの熱伝導で均一な温度に保持することができるので、電気ヒータ16のみで試料容器を加熱する場合に比べて、試料の温度制御を確実に行うことが可能になる。したがって、各試料載置棚13上に載置した各試料容器の温度を均一にすることができるので、一度に大量の試料を同じ条件で真空乾燥することが可能となる。   At this time, since the fluid flow path 15 is provided over the entire surface of the sample mounting shelf 13, the entire surface of the sample mounting shelf 13 can be reliably heated, and the surface temperature of each of the upper and lower sample mounting shelves 13. Can be made uniform. Accordingly, each sample container placed on each sample placement shelf 13 can be held at a uniform temperature by heat conduction from the sample placement shelf 13 regardless of the position on the sample placement shelf 13. Therefore, it is possible to reliably control the temperature of the sample as compared with the case where the sample container is heated only by the electric heater 16. Therefore, since the temperature of each sample container placed on each sample placement shelf 13 can be made uniform, a large amount of samples can be vacuum-dried under the same conditions at the same time.

また、試料載置棚13を加熱した後に流体流路15から流体排出路30に排出された高温の圧縮空気を前記熱交換器23に導入し、圧縮空気供給源CAから供給される圧縮空気と熱交換させることにより、供給する圧縮空気の温度を上昇させるとともに、排出される圧縮空気の温度を低下させるようにしているので、高温の圧縮空気が外部に流出することがなくなり、安全性を向上させることができ、さらに、流体流路15に供給する圧縮空気を加温することができるので、電気ヒータ16の負荷を低減することができ、消費電力の削減も図れる。   Further, after the sample mounting shelf 13 is heated, high-temperature compressed air discharged from the fluid flow path 15 to the fluid discharge path 30 is introduced into the heat exchanger 23, and compressed air supplied from the compressed air supply source CA By exchanging heat, the temperature of the compressed air to be supplied is raised and the temperature of the compressed air to be discharged is lowered, so that high-temperature compressed air will not flow out to the outside, improving safety. Furthermore, since the compressed air supplied to the fluid flow path 15 can be heated, the load on the electric heater 16 can be reduced, and the power consumption can be reduced.

所定時間の真空乾燥処理を終了したら、真空チャンバ12内を真空に保ちながら、電気ヒータ16を停止するとともに、第1切換弁22を閉じて第2切換弁25を開き、圧縮空気供給源CAから供給される圧縮空気を加熱することなく、常温のまま流体加熱流路14及び各流体流路15に導入し、真空チャンバ12及び試料載置棚13を冷却することによって試料容器を冷却する。試料容器の温度が常温に低下したら、真空チャンバ12内を大気圧に戻して試料容器を取り出す。   When the vacuum drying process for a predetermined time is completed, the electric heater 16 is stopped while the vacuum chamber 12 is kept in vacuum, the first switching valve 22 is closed and the second switching valve 25 is opened, and the compressed air supply source CA is opened. The supplied compressed air is introduced into the fluid heating channel 14 and each fluid channel 15 at room temperature without heating, and the sample chamber is cooled by cooling the vacuum chamber 12 and the sample mounting shelf 13. When the temperature of the sample container decreases to room temperature, the inside of the vacuum chamber 12 is returned to atmospheric pressure, and the sample container is taken out.

このようにして流体流路15に常温の圧縮空気を導入することにより、試料載置棚13上の試料容器を熱伝導によって冷却することができるので、試料容器や試料容器中の試料を短時間で冷却することができる。したがって、1回の真空乾燥処理に要する時間を大幅に短縮することができ、試料の真空乾燥処理の効率が大幅に向上するだけでなく、真空乾燥処理後の試料を次工程に迅速に供給することができる。   By introducing normal temperature compressed air into the fluid flow path 15 in this way, the sample container on the sample mounting shelf 13 can be cooled by heat conduction, so that the sample container and the sample in the sample container can be removed for a short time. Can be cooled. Accordingly, the time required for one vacuum drying process can be greatly shortened, and not only the efficiency of the vacuum drying process of the sample is greatly improved, but also the sample after the vacuum drying process is rapidly supplied to the next process. be able to.

また、流体供給路21及び流体排出路30と試料載置棚13の流体流路15とを着脱可能に接続しているので、試料載置棚13を簡単に真空チャンバ12から取り外すことができ、試料載置棚13の清掃や装着位置の変更が簡単に行えるとともに、真空チャンバ12内の清掃も簡単に行うことができる。特に、エアノズル28を備えた清浄経路29を設けていることにより、第1切換弁22及び第2切換弁25を閉じた状態で第3切換弁27を開き、圧縮空気供給源CAから供給される圧縮空気をエアノズル28から洗浄用ガスとして噴出させることで、真空チャンバ12の内部を隅々まで容易に清掃することができ、真空チャンバ12や試料載置棚13を清浄に保つことができる。   Further, since the fluid supply path 21 and the fluid discharge path 30 and the fluid flow path 15 of the sample mounting shelf 13 are detachably connected, the sample mounting shelf 13 can be easily detached from the vacuum chamber 12, The sample mounting shelf 13 can be easily cleaned and the mounting position can be changed, and the vacuum chamber 12 can be easily cleaned. In particular, by providing the clean path 29 provided with the air nozzle 28, the third switching valve 27 is opened with the first switching valve 22 and the second switching valve 25 closed, and the compressed air supply source CA supplies the air. By jetting the compressed air as the cleaning gas from the air nozzle 28, the inside of the vacuum chamber 12 can be easily cleaned to every corner, and the vacuum chamber 12 and the sample mounting shelf 13 can be kept clean.

このように、本形態例に示す真空乾燥器11によれば、各切換弁22,25,27を切り替えることにより、圧縮空気を用いた試料の加熱乾燥、乾燥後の試料の冷却、真空チャンバ12内の清掃を良好に行うことができ、真空乾燥器11の利用効率を向上させることができるとともに、1日で処理可能な試料数を大幅に増加させることができる。   Thus, according to the vacuum dryer 11 shown in the present embodiment, by switching the switching valves 22, 25, and 27, the sample is heated and dried using compressed air, the sample is cooled after being dried, and the vacuum chamber 12. The inside can be cleaned well, the utilization efficiency of the vacuum dryer 11 can be improved, and the number of samples that can be processed in one day can be greatly increased.

また、冷却経路26に冷水などを用いた熱交換器を設けて圧縮空気を常温以下に冷却できるように形成しておき、試料冷却時に常温以下に冷却した圧縮空気を流体加熱流路14及び各流体流路15に供給することにより、試料の冷却時間をさらに短縮することができる。さらに、真空乾燥処理時に電気ヒータ16を使用せずに、常温あるいは常温以下に冷却した圧縮空気を供給することにより、試料を常温以下に保った状態で真空乾燥することもできる。   In addition, a heat exchanger using cold water or the like is provided in the cooling path 26 so that the compressed air can be cooled to room temperature or lower. By supplying the fluid to the fluid channel 15, the cooling time of the sample can be further shortened. Furthermore, the sample can be vacuum-dried while keeping the sample at room temperature or lower by supplying compressed air cooled to room temperature or below room temperature without using the electric heater 16 during the vacuum drying process.

なお、温度調節用流体としては、水や油などの液体も使用可能であり、窒素ガスなどの不活性ガスを使用することも可能であるが、温度調節用流体に空気を使用することにより、温度調節用流体に要するコストを不要とすることができ、簡単な構造のポンプやファンを使用して流体流路15に温度調節用流体を供給することが可能となり、さらに、温度調節用流体である空気が漏れても真空チャンバの内部や周囲を汚染することはほとんどなく、温度調節用流体を回収する設備も不要となることから、他の流体を温度調節用流体に用いた場合に比べて装置コストの低減を図れ、洗浄用ガスとして手軽に利用できる。   As the temperature adjusting fluid, liquids such as water and oil can be used, and an inert gas such as nitrogen gas can be used, but by using air as the temperature adjusting fluid, The cost required for the temperature adjusting fluid can be eliminated, and the temperature adjusting fluid can be supplied to the fluid flow path 15 using a pump or fan having a simple structure. Even if some air leaks, the inside and surroundings of the vacuum chamber are hardly contaminated, and equipment for recovering the temperature adjustment fluid is unnecessary, so compared with the case where other fluids are used for the temperature adjustment fluid. The cost of the apparatus can be reduced and it can be easily used as a cleaning gas.

また、流体供給路21及び流体排出路30と試料載置棚13の流体流路15とを着脱可能に接続する手段は、温度調節用流体が漏れ出さない構造のものなら任意に選択することができる。例えば、市販の各種継手、ワンタッチカプラを用いることができ、ホースを介して接続することもできる。   Further, the means for detachably connecting the fluid supply path 21 and the fluid discharge path 30 to the fluid flow path 15 of the sample mounting shelf 13 can be arbitrarily selected as long as the temperature control fluid does not leak out. it can. For example, various commercially available joints and one-touch couplers can be used, and they can be connected via a hose.

さらに、真空チャンバ12に設けられている電気ヒータ16によって流体加熱流路14を流れる温度調節用流体を加熱することによって温度調節用流体の加熱を効率よく行うことができるが、流体加熱流路14を設けずに、例えば、加熱経路24の熱交換器23の下流側に専用のヒータを設けるようにしても良い。   Further, the temperature adjusting fluid can be efficiently heated by heating the temperature adjusting fluid flowing through the fluid heating channel 14 by the electric heater 16 provided in the vacuum chamber 12. For example, a dedicated heater may be provided on the downstream side of the heat exchanger 23 in the heating path 24.

11…真空乾燥器、12…真空チャンバ、12a…側壁、12b…扉、13…試料載置棚、14…流体加熱流路、15…流体流路、16…電気ヒータ、17…ガイドレール、18a,18b…プラグ、19a,19b…ソケット、21…流体供給路、22…第1切換弁、23…熱交換器、24…加熱経路、25…第2切換弁、26…冷却経路、27…第3切換弁、28…エアノズル、29…清浄経路、30…流体排出路
DESCRIPTION OF SYMBOLS 11 ... Vacuum dryer, 12 ... Vacuum chamber, 12a ... Side wall, 12b ... Door, 13 ... Sample mounting shelf, 14 ... Fluid heating flow path , 15 ... Fluid flow path , 16 ... Electric heater, 17 ... Guide rail, 18a , 18b ... plug, 19a, 19b ... socket, 21 ... fluid supply path, 22 ... first switching valve, 23 ... heat exchanger, 24 ... heating path, 25 ... second switching valve, 26 ... cooling path, 27 ... first 3 switching valve, 28 ... air nozzle, 29 ... clean path, 30 ... fluid discharge path

Claims (5)

真空チャンバ内に着脱可能に設けた試料載置棚に載置した試料を真空下で加熱して乾燥させる真空乾燥器において、
前記試料載置棚に温度調節用流体が流れる流体流路を設けるとともに、該流体流路の流体入口及び流体出口にそれぞれ連通するプラグを試料載置棚の基端部に設け、
前記真空チャンバの側壁に、前記流体流路に温度調節用流体を供給する流体加熱流路と、該流体加熱流路内を流れる温度調節用流体及び前記真空チャンバ内を加熱する電気ヒータとを設け、
前記流体加熱流路の流入口に、温度調節用流体を前記流体加熱流路に供給する流体供給路を設け、
前記真空チャンバの後壁の流体入口及び流体出口のプラグに対応する位置に、前記流体入口のプラグを着脱可能に接続して前記流体流路へ温度調節用流体を供給する流体供給側ソケットを前記流体加熱流路の流出口に連通して設けるとともに、前記流体出口に連通するプラグを着脱可能に接続して前記流体流路を流れる温度調節用流体を排出する流体排出側ソケットを設けた
ことを特徴とする真空乾燥器。
In a vacuum dryer that heats and dries a sample placed on a sample placement shelf detachably provided in a vacuum chamber,
A fluid flow path through which the temperature adjusting fluid flows is provided in the sample mounting shelf, and a plug communicating with a fluid inlet and a fluid outlet of the fluid flow path is provided at a base end portion of the sample mounting shelf,
On the side wall of the vacuum chamber, wherein the fluid flow path to a temperature regulating fluid fluid heating flow channel for supplying, an electric heater for heating the temperature regulating fluid and the vacuum chamber through the fluid heating flow path is provided ,
A fluid supply path for supplying a temperature adjusting fluid to the fluid heating flow path is provided at the inlet of the fluid heating flow path,
A fluid supply side socket for removably connecting a plug of the fluid inlet to a position corresponding to a fluid inlet and a fluid outlet plug on the rear wall of the vacuum chamber and supplying a temperature adjusting fluid to the fluid flow path. A fluid discharge side socket is provided that communicates with the outlet of the fluid heating channel and detachably connects a plug that communicates with the fluid outlet to discharge the temperature adjusting fluid that flows through the fluid channel. Features a vacuum dryer.
前記流体供給路を流れる温度調節用流体と、前記流体排出路を流れる温度調節用流体とを熱交換させる熱交換器を備えていることを特徴とする請求項1記載の真空乾燥器。 The vacuum dryer according to claim 1 , further comprising a heat exchanger for exchanging heat between the temperature adjusting fluid flowing through the fluid supply path and the temperature adjusting fluid flowing through the fluid discharge path . 前記流体供給路は、第1切換弁及び熱交換器を有する加熱経路と、第2切換弁を有する冷却経路とを備え、前記熱交換器は、前記加熱経路を通って前記流体流路に供給される温度調節用流体と、前記流体流路から前記流体排出路に排出される温度調節用流体とを熱交換可能に形成されていることを特徴とする請求項1記載の真空乾燥器。 The fluid supply path includes a heating path having a first switching valve and a heat exchanger, and a cooling path having a second switching valve, and the heat exchanger supplies the fluid flow path through the heating path. a temperature adjusting fluid, vacuum dryer according to claim 1 Symbol mounting, characterized in that it is heat-exchangeably formed a temperature adjusting fluid discharged into the fluid discharge passage from the fluid flow path. 前記温度調節用流体が圧縮空気であることを特徴とする請求項1乃至3のいずれか1項記載の真空乾燥器。 The vacuum dryer according to any one of claims 1 to 3, wherein the temperature adjusting fluid is compressed air . 前記流体供給路は、該流体供給路から分岐して、先端にエアノズルを設けた洗浄経路を備えていることを特徴とする請求項記載の真空乾燥器。 The vacuum dryer according to claim 4 , wherein the fluid supply path includes a cleaning path branched from the fluid supply path and provided with an air nozzle at a tip .
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