JP5445217B2 - Linear motion guide device - Google Patents

Description

  The present invention relates to a linear motion guide device suitable for use in a clean environment such as a clean room.

Conventionally, when a linear motion guide device is used in a clean environment such as a semiconductor manufacturing factory, the lubrication grease of the linear motion guide device evaporates or wear powder generated by rolling of rolling elements is scattered. This may cause a problem of polluting the atmosphere.
Therefore, for example, a linear motion guide device that can cope with such a problem is disclosed in Patent Document 1.

FIGS. 5A and 5B are diagrams showing the configuration of the linear guide device described in Patent Document 1, in which FIG. 5A is a front view of a partially cut state, and FIG. 5B is a side view.
As shown in FIGS. 5A and 5B, the linear guide device 100 described in Patent Document 1 includes a long rail 101, a slider 110, and a rolling element 150. A rolling groove 102 is formed in the axial direction of the rail 101. The slider 110 is formed with a rolling groove 112 that faces the rolling groove 102. The rolling element 150 is fitted between the rolling groove 102 and the rolling groove 112 so as to allow rolling. The slider 110 is installed to be slidable in the axial direction of the rail 101 via the rolling element 150.

  The slider 110 also has a gas suction means connection port 160 that opens to the outer surface. The side plate 120 of the slider 110 is fitted in the rail 101 and has a slit-like gas inlet 170 on the inner surface portion facing the rail 101 with a slight gap. The gas suction means connection port 160 and the gas suction port 170 are communicated with each other inside the slider 110. Specifically, the gas suction means connection port 160 and the gas suction port 170 are communicated with each other through through holes 161 and 162 formed in the slider 110 and through holes 163 formed in the side plate 120.

  The linear guide device 100 configured in this manner sucks the ambient atmosphere from the gas suction port 170 by connecting a vacuum pump or the like to the gas suction means connection port 160, and generates dust (grease) generated inside the slider 110. Are evaporated, wear powder, etc.) are sucked and discharged to the outside of the slider 110, thereby suppressing contamination of the atmosphere.

Japanese Utility Model Publication No. 03-020575

However, in the conventional linear motion guide device including the linear guide device described in Patent Document 1, it is necessary to additionally install a suction device for discharging dust generated inside the slider. Therefore, in the conventional linear motion guide device, as a result of newly adding power such as a pump for sucking dust, there is a problem of cost increase due to enlargement and deterioration of work efficiency caused by complication of configuration. It sometimes occurred.
Therefore, the present invention has been made paying attention to the above-mentioned problems, and its purpose is to efficiently discharge dust between the guide rail and the slider with a simple configuration, and to save energy and space. It is in providing the linear motion guide apparatus which implement | achieves.

In order to achieve the above object, the invention according to claim 1 includes a guide rail extending in the axial direction and having rolling element rolling grooves extending in the axial direction on both sides, and the rolling element rolling of the guide rail. There is a rolling element rolling groove facing the groove, and it is straddled on the guide rail so as to be relatively movable along the axial direction through the rolling of the rolling element inserted between these rolling element rolling grooves. A linear motion guide device having a slider and suction means for sucking dust between the guide rail and the slider,
The suction means includes a penetrating variable capacity section, a first check valve provided near one opening of the variable capacity section, and opened when externally pressurized inside the variable capacity section; A second check valve provided in the vicinity of the other opening of the capacity variable portion and opened when pressurized from the inside of the capacity variable portion to the outside, the guide rail and the slider A through hole penetrating through the space is formed at at least one end in the moving direction of the slider, and the slider having the through hole connected to the one opening slides relative to the guide rail. Thus, a negative pressure is generated by changing the volume of the capacity variable portion, and dust between the guide rail and the slider is discharged from the other opening.

  According to the first aspect of the present invention, the suction for discharging the dust generated inside the slider by generating a negative pressure as the slider reciprocates as the power for discharging the dust generated inside the slider. Since the means is provided, the fluid can be sucked from the inside of the slider without additionally installing a large-scale suction device, so that it is possible to provide a linear motion guide device that realizes energy saving and space saving. .

  According to a second aspect of the present invention, in the linear motion guide device according to the first aspect, the through hole of the slider is formed through the slider along the moving direction of the slider, and the two suction means The one opening of each is connected to both ends of the through hole.

According to a third aspect of the present invention, in the linear motion guide device according to the first or second aspect, a plurality of the sliders are disposed on the guide rail, and the through holes of the sliders extend along the moving direction of the slider. The one opening of the suction means is connected to each of the through-holes formed through the slider and positioned outside two sliders arranged outside the plurality of sliders, and the plurality of sliders End portions other than the end portions of the through holes connected to the suction means are connected by a tube.
According to a fourth aspect of the present invention, in the linear motion guide device according to any one of the first to third aspects, the capacity variable portion is any one of a bellows, a piston and a cylinder, and a telescopic cover. It is said.

  According to the present invention, as power for discharging dust generated inside the slider, there is provided suction means for generating negative pressure as the slider reciprocates and discharging dust generated inside the slider. Therefore, since the fluid can be sucked from the inside of the slider without additionally installing a large-scale suction device, it is possible to provide a linear motion guide device that realizes energy saving and space saving.

It is a figure which shows the structure in 1st Embodiment of the linear guide apparatus which concerns on this invention, (a) is a front view of the state which cut | disconnected a part, (b) follows the 1b-1b line | wire of (a). Sectional drawing, (c) is a front sectional view when the suction means is extended, and (d) is a front sectional view when the suction means is contracted. It is front sectional drawing which shows the modification of the structure of the suction means in 1st Embodiment of the linear guide apparatus which concerns on this invention, (a) is front sectional drawing when a suction means contracts, (b) is suction It is front sectional drawing when a means expand | extends. It is a front view of the state which cut a part showing composition in a 2nd embodiment of a linear guide device concerning the present invention, and (a) is when one suction means contracts and the other suction means expands (B) is a front sectional view when one suction means is extended and the other suction means is contracted. It is a front view of the state which cut a part showing composition in a 3rd embodiment of a linear guideway concerning the present invention. It is a front view in the state where a part showing the composition of the conventional linear motion guide device was cut.

Embodiments of a linear guide apparatus according to the present invention will be described below with reference to the drawings.
(First embodiment)
FIG. 1 is a diagram showing a configuration of a first embodiment of a linear guide device according to the present invention, in which (a) is a front view of a partially cut state, and (b) is 1b-1b of (a). Sectional drawing along a line, (c) is a front sectional view when the suction means is extended, (d) is a front sectional view when the suction means is contracted.

  As shown in FIGS. 1A and 1B, the linear guide apparatus 1 includes a long guide rail 2, a slider 3, and a rolling element 4. Roller grooves 2 a extending in the axial direction are formed on both sides of the guide rail 2. The slider 3 includes a slider main body 3A and end caps 5 and 5 installed at both ends of the slider main body 3A in the axial direction. The slider 3 is formed with a rolling groove 3a facing the rolling groove 2a.

A large number of rolling elements 4 are slidably loaded between the rolling elements 2a and 3a, and the slider 3 moves along the axial direction on the guide rail 2 through the rolling of these rolling elements 4. Relative movement is possible.
As the slider 3 slides with respect to the guide rail 2, the rolling element 4 interposed between the guide rail 2 and the slider 3 rolls and moves to the end of the slider 3 in the axial direction. In order to continue moving in the axial direction, it is necessary to circulate these rolling elements infinitely.

  For this reason, a hole 6 penetrating in the axial direction is formed in the sleeve 3B of the slider body 3A, and a circulation tube 7 whose inside is a passage (rolling member passage) 7a of the rolling element 4 is fitted into the hole 6. It is. A pair of end caps 5 and 5 as rolling element circulation parts are fixed to both ends of the slider body 3A in the axial direction via screws or the like. These end caps 5 and 5 are formed with a direction change path (not shown) curved in a semicircular arc shape that communicates between the rolling element rolling grooves 2a and 3a and the rolling element passage 7a. Thereby, the infinite circulation track of a rolling element is formed.

The slider 3 is formed with a through hole 3C that communicates the lower surface of the slider body 3A and the surface of the slider body 3A on the end cap 5 side. Further, the end cap 5 is formed with a through hole 5a that penetrates the outside of the slider 3 and the surface of the end cap 5 on the slider body 3A side.
Further, as shown in FIGS. 1C and 1D, the suction means 10 includes a tube-shaped capacity variable portion 11 whose peripheral surface is bellows and can contract in both opening directions, and the capacity variable portion 11. It has the 1st check valve 12 and the 2nd check valve 13 which are provided in the inside. One opening 11a of the variable capacity portion 11 is connected to the through hole 5a. Moreover, the other opening part 11b of the capacity | capacitance variable part 11 is connected with the external apparatus (for example, dust storage tank) which is not shown in figure. In the present embodiment, the inner diameters of the one opening portion 11 a and the other opening portion 11 b are set to be substantially the same as the inner diameter of the capacity variable portion 11.

Here, the capacity variable unit 11 is not limited to the bellows, and may be any of a unit including a piston and a cylinder, and a telescopic cover. Further, the shape of the variable capacity portion 11 is not limited to a tube shape, and may be a square shape or the like, and is not particularly limited.
The first check valve 12 includes a main body portion 12a having an outer diameter substantially the same as the inner diameter of one opening portion 11a, and the main body portion 12a from the state in which the one opening portion 11a is closed to the inside of the capacity variable portion 11. In order to rotate, it has a hinge 12b provided in the vicinity of one opening 11a, and a stopper 12c that maintains the main body 12a in a state of closing the one opening 11a. That is, the first check valve 12 opens toward the inside when pressurized from the outside to the inside of the variable capacity portion 11 and is usually installed in the variable capacity portion 11 so as to close one of the openings 11a. Has been.

  The second check valve 13 includes a main body portion 13a having an outer diameter substantially the same as the inner diameter of the other opening portion 11b, and the main body portion 13a from the state in which the other opening portion 11b is closed to the outside of the variable capacity portion 11. In order to rotate, it has a hinge 13b provided in the vicinity of the other opening 11b and a stopper 13c that keeps the main body 13a in a state of closing the other opening 11b. That is, the second check valve 13 is opened when pressurized from the inside of the capacity variable section 11 to the outside, and is normally installed in the capacity variable section 11 so as to close the other opening 11b.

  In the suction means 10 configured in this way, the slider 3 connected to one opening portion 11a slides with respect to the guide rail 2 to move the capacity variable portion 11 in the length direction (both opening portions 11a and 11b). The volume of the capacity variable portion 10 is changed, negative pressure is generated in the capacity variable portion 11, and the dust between the guide rail 2 and the slider 3 from the other opening portion 11b. Is discharged.

Specifically, as shown in FIGS. 1C and 1D, the following (1) and (2) are repeated to discharge the dust between the guide rail 2 and the slider 3 to the outside.
(1) When the slider 3 moves to the opposite side to the suction means 10 with respect to the guide rail 2, the slider 3 pulls the suction means 10, and the capacity variable portion 11 extends, thereby the second check valve 13. Remains closed in the second opening 11b, the first check valve 12 is opened, and the air in the slider 3 (between the guide rail 2 and the slider 3) passes through the first opening 11a. It flows into the variable part 11.
(2) When the slider 3 moves toward the suction means 10 relative to the guide rail 2 and the slider 3 presses the suction means 10 and the capacity variable portion 11 contracts, the first check valve 12 The second check valve 13 is opened while the first opening 11a is closed, and the air in the variable capacity portion 11 is discharged to an external device (not shown) through the second opening 11b.
Accordingly, the dust between the guide rail 2 and the slider 3 that has flowed into the capacity variable portion 11 by the operation (1) is discharged to an external device (not shown) by the operation (2).

  FIG. 2 is a front sectional view showing a modified example of the configuration of the suction means in the present embodiment, where (a) is a front sectional view when the suction means is contracted, and (b) is a front view when the suction means is extended. It is sectional drawing. Since the present embodiment is different from the first embodiment described above only in the structure of the check valve, the description of the same configuration as that of the first embodiment described above will be omitted, and the difference will be described. Only explained.

As shown in FIGS. 2 (a) and 2 (b), in the present embodiment, the first check valve 12 and the second check valve which are installed so as to be able to close both the openings 11a and 11b of the capacity variable portion 11. The configuration of the valve 13 is different from that of the first embodiment.
The first check valve 12 includes a main body 12a, a holding unit 12e, and an urging unit 12f. In the modification of the present embodiment, the inner diameters of the one opening portion 11 a and the other opening portion 11 b are set smaller than the inner diameter of the capacity variable portion 11.

  The main body portion 12 a includes a guide portion 12 d that is disposed inside the one opening portion 11 a, has an outer diameter larger than the inner diameter of the one opening portion 11 a, and protrudes to the inside of the variable capacity portion 11. The holding means 12 e is a member that holds the guide portion 12 d so that the main body portion 12 a can slide in the length direction of the capacity variable portion 11. The urging means 12f is installed between the holding means 12e and the inner surface of the main body 12a (the surface on the side facing the holding means 12e), and from the state where one opening 11a is blocked, It is a member that urges the main body portion 12a that moves under pressure. The urging means 12f is an elastic body such as a coil spring. That is, when the first check valve 12 is pressurized from the outside to the inside of the variable capacity portion 11, the main body portion 12a opens against the urging means 12f, and normally the urging force of the urging means 12f. Is installed in the variable capacity portion 11 so as to close the one opening portion 11a.

The second check valve 13 includes a main body 13a, a holding means 13e, and an urging means 13f. The main body 13a is disposed outside the other opening 11b (on the side of the external device not shown), and has a guide portion 13d that protrudes toward the external device (not shown) with an outer diameter larger than the inner diameter of the other opening 11b. Prepare. The holding means 13 e is a member that holds the guide portion 13 d so that the main body portion 13 a can slide in the length direction of the capacity variable portion 11. The urging means 13f is installed between the holding means 13e and the outer surface of the main body 13a (the surface on the side facing the holding means 13e) and closes the other opening 11b, so that the variable capacity section 11 is closed. It is a member that urges the main body portion 13a that is moved under pressure. The biasing means 13f is an elastic body, for example. That is, when the second check valve 13 is pressurized from the inside of the variable capacity portion 11 to the outside, the main body portion 13a opens against the urging means 13f, and normally the urging force of the urging means 13f. Is installed in the variable capacity portion 11 so as to close the other opening portion 11b.
In the suction means 10 configured as described above, the first check valve 12 and the second check valve 13 can be smoothly slid by the guide portions 12d and 13d and the urging means 12f and 13f, respectively. Thus, the efficiency of discharging dust between the guide rail 2 and the slider 3 is improved.

(Second Embodiment)
FIG. 3 is a front view of the linear motion guiding device according to the second embodiment of the present invention with a part thereof cut away, and FIG. 3 (a) shows that one suction means is contracted and the other suction means is Front sectional drawing when extended, (b) is a front sectional view when one suction means is extended and the other suction means is contracted. The present embodiment is different from the first embodiment described above only in the configuration of the suction means. Therefore, the description of the same configuration as the first embodiment described above is omitted, and only the differences are described. explain.

  As shown in FIGS. 3A and 3B, in the linear motion guide device 1 of the present embodiment, suction means 10 a and 10 b are respectively attached to the front and rear end portions of the slider 3. Specifically, the end caps 5 and 5 at both ends are formed with through holes 5a and 5b penetrating the outside of the slider 3 and the surface of the end caps 5 and 5 on the slider body 3A side, respectively. The slider 3 is formed with a through hole 3C that communicates the lower surface of the slider body 3A and the surface of the slider body 3A on the end caps 5 and 5 side. That is, the through hole 3C communicates with the suction means 10a and 10b via the through holes 5a and 5b.

  When the suction means 10 is attached to only one side of the slider 3 as in the first embodiment described above, the slider 3 reciprocates once to suck air from the slider 3 and discharge dust to the outside. Is called. However, by attaching the suction means 10a and 10b to both ends of the slider 3, one suction means 10a sucks air from the inside of the slider 3 into the suction means 10a, and dust from the other suction means 10b to the outside. During the discharge and the movement of the slider 3, air can always be sucked from the slider 3, and the amount of suction can be increased.

  Further, by attaching the suction means 10a to one side of the slider 3 and attaching the pressure feeding device to the other side, the suction and pressure feeding into the slider 3 can be performed simultaneously. By simultaneously performing suction and pressure feeding, the dust generated inside the slider 3 is sucked together with the air inside the slider 3, and cleaned air without dust can be supplied from the outside of the slider 3 to the inside of the slider 3. become.

(Third embodiment)
FIG. 4: is a front view of the state which cut | disconnected a part which shows the structure in 3rd Embodiment of the linear guide apparatus based on this invention. This embodiment is different from the first embodiment described above only in the configuration of the slider. Therefore, the description of the same configuration as the first embodiment described above is omitted, and only the difference is described. To do.

As shown in FIG. 4, the linear motion guide device 1 of the present embodiment is provided with two units each including a slider 3 and a suction means 10. One unit is a slider 3 ′ and the other unit is a slider 3 ″. Are connected by a tube 20. Specifically, the tube 20 is a flexible tube that allows the through hole 5c in the slider 3 ′ of one unit to communicate with the through hole 5d of the slider 3 ″ of another unit. The through holes 5c and 5d are formed on the end caps 5 ′ and 5 ″ on the outside of the sliders 3 ′ and 3 ″ and the surfaces of the end caps 5 ′ and 5 ″ on the slider main bodies 3A ′ and 3A ″. It is a through-hole which penetrates. Further, the sliders 3 'and 3''communicate with the lower surfaces of the slider bodies 3A' and 3A "and the surfaces of the slider bodies 3A 'and 3A" on the side of the end caps 5' and 5 ", respectively. Through holes 3C ′ and 3C ″ are formed. That is, the through holes 3C ′ and 3C ″ communicate with each other through the tube 20 through the through holes 5c and 5d.
In this way, by connecting the adjacent sliders 3 ′ and 3 ″ with the tube 20, the air inside the plurality of sliders 3 ′ and 3 ″ can be sucked from the suction means 10 attached to one slider. it can.

As described above, according to the linear motion guide device according to the present invention, the capacity variable portion 11 expands and contracts when the slider 3 to which the suction means 10 is attached strokes against the guide rail 2, and the capacity variable portion. 11 increases in volume, and negative pressure is generated inside the capacity variable section 11. Since the air can be sucked from the inside of the slider 3 by the pressure, dust between the guide rail 2 and the slider 3 can be discharged.
As described above, according to the linear motion guide device according to the present invention, the expansion and contraction of the capacity variable portion 11 is brought about by the power for causing the slider 3 to stroke back and forth, so that it is not necessary to separately prepare the power.

Moreover, it is not necessary to prepare a suction pump or the like separately, and the apparatus does not become excessively large. Therefore, it is possible to provide a linear motion guide device that exhibits the effects of energy saving and space saving.
The present invention is not limited to the above embodiment, and various modifications can be made without departing from the spirit of the present invention. For example, the check valve provided inside the suction means is: "Since the slider connected to one opening slides against the guide rail, the negative pressure is generated by changing the volume of the variable capacity section. If it has a function of `` exhausting dust between the guide rail and the slider from the other opening part '', it may not be provided in the vicinity of both opening parts of the suction means, The intermediate portion may be provided.

1 linear motion guide device 2 guide rail 2a rolling element rolling groove (guide rail side)
3 Slider 3A Slider body 3a Rolling element rolling groove (slider side)
DESCRIPTION OF SYMBOLS 4 Rolling body 5 End cap 10 Suction means 11 Capacity variable part 12 1st check valve 13 2nd check valve

Claims (4)

A guide rail extending in the axial direction with rolling element rolling grooves extending in the axial direction on both sides, and a rolling element rolling groove facing the rolling element rolling groove of the guide rail, and A slider straddling the guide rail so as to be relatively movable along the axial direction via rolling of the rolling elements inserted between the rolling grooves of the both rolling elements, and dust between the guide rail and the slider A linear motion guide device having suction means for sucking
The suction means includes a penetrating variable capacity section, a first check valve provided near one opening of the variable capacity section, and opened when externally pressurized inside the variable capacity section; A second check valve provided in the vicinity of the other opening of the capacity variable portion and opened when pressurized from the inside of the capacity variable portion to the outside, the guide rail and the slider A through hole penetrating through the space is formed at at least one end in the moving direction of the slider, and the slider having the through hole connected to the one opening slides relative to the guide rail. Thus, a negative pressure is generated by changing the volume of the capacity variable portion, and the dust between the guide rail and the slider is discharged from the other opening portion.   A through hole of the slider is formed through the slider along a moving direction of the slider, and the one opening of each of the two suction means is connected to both ends of the through hole. The linear guide apparatus according to claim 1.   A plurality of the sliders are arranged on the guide rail, and a through hole of the slider is formed through the slider along the moving direction of the slider, and outside the two sliders arranged outside the plurality of sliders. The one opening of the suction means is connected to each of the through-holes located at the ends, and ends other than the ends of the through-holes connected to the suction means of the plurality of sliders are connected by a tube. The linear motion guide device according to claim 1, wherein the linear motion guide device is a linear motion guide device.   The linear motion guide device according to any one of claims 1 to 3, wherein the capacity variable portion is any one of a bellows, a piston and a cylinder, and a telescopic cover.

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