JP5443204B2 - Air conditioning system - Google Patents

Description

  The present invention relates to an air conditioning system.

  The clean room is used as a manufacturing room for highly integrated circuits such as semiconductors, a genetic engineering laboratory, and the like. For this reason, it is necessary to supply clean air to the clean room to maintain the interior at a predetermined temperature and humidity, and to quickly replace the air to remove dust. In addition, it is necessary to keep the clean room at a positive pressure in order to prevent the entry of dust and the like from the outside, and to achieve precise temperature control by removing the draft. Thus, as a conventional example of an air conditioning system for supplying air to such a clean room, there is a system shown in FIG. 19, for example.

  In FIG. 19, 1a, 1b, and 1c are a plurality of clean rooms, and inner rooms 2a and 2b are installed in the clean rooms 1a and 1b. The inner chambers 2a and 2b are divided into six surfaces, and the floor surfaces 3a and 3b are made of a perforated plate such as punching metal, and the floor surfaces 3a and 3b of the inner chambers 2a and 2b and the clean room 1a, Air flow paths 4a and 4b are formed between the bottom surface of 1b. Axial fans 7a and 7b are installed in the ceiling portions 5a and 5b of the inner chambers 2a and 2b through high-performance filters 6a and 6b such as HEPA filters, and are cleaned by the high-performance filters 6a and 6b. The cooled air can be supplied to the inner chambers 2a and 2b.

  In the air flow passages 8a and 8b, which are spaces between the outer wall inner surfaces of the clean rooms 1a and 1b and the inner chambers 2a and 2b, the cooling coils 9a located near the floor surfaces 3a and 3b of the inner chambers 2a and 2b, 9b is installed, and in the cooling coils 9a and 9b, air is supplied by the cold water supplied from the cold water pipes 11a and 11b, which are lines provided with flow control valves 10a and 10b for controlling the flow rate of the cold water in the middle. The air passing through the flow passages 8a and 8b can be cooled. Reference numerals 12a and 12b denote cold water return pipes which are lines for returning the cold water sent from the cooling coils 9a and 9b to the cold heat source.

  Further, in the air flow passages 8a and 8b, a humidified water sprayer 14a provided with a plurality of humidified water spray nozzles 13a and 13b for humidifying and cooling the air downstream of the cooling coils 9a and 9b in the air flow direction. , 14b are arranged. The humidifying water sprayers 14a and 14b are connected to the humidifying water pipes 15a and 15b, respectively, and in the middle of the humidifying water pipes 15a and 15b, the spray for controlling the amount of humidified water sprayed by the humidifying water spray nozzles 13a and 13b. Quantity control valves 16a and 16b are arranged.

  A floor surface 3c made of a perforated plate such as punching metal is laid at a predetermined height above the bottom surface of the clean room 1c, and an air flow path 4c is formed between the floor surface 3c and the bottom surface of the clean room 1c. ing. A cooling coil 9c is installed in a casing 17 disposed on one side of the floor surface 3c. The cooling coil 9c is a line provided with a flow rate control valve 10c for controlling the flow rate of cold water in the middle. The cold water fed from the cold water pipe 11c can cool the air passing through the casing 17. A cold water return pipe 12c returns the cold water sent from the cooling coil 9c to the cold heat source. The cooling coils 9a, 9b, and 9c are dry coils that do not perform dehumidification.

  In the casing 17, a humidified water sprayer 14 c provided with a plurality of humidified water spray nozzles 13 c for humidifying and cooling the air is disposed downstream of the cooling coils 9 a and 9 b in the air flow direction. A humidifying water conduit 15c is connected to the humidifying water sprayer 14c, and a spray amount control valve 16c for controlling the amount of water to be humidified is disposed in the middle of the humidifying water conduit 15c.

  On the downstream side in the air flow direction in the casing 17, a fan 18 is installed close to the upper surface of the casing 17, and the cooling air cooled by the cooling coil 9 c is sprayed from the humidified water spray nozzle 13 c of the humidified water sprayer 14 c. The humidified water is humidified in a predetermined state, sent from the fan 18 to the duct 19 connected to the upper surface of the casing 17, and is sent to a high performance filter 20 such as a plurality of HEPA filters arranged in parallel in the upper part of the clean room 1 c. It is fed, cleaned by the high-performance filter 20, and supplied into the clean room 1c.

  Predetermined production apparatuses 21a, 21b, and 21c are installed in the inner rooms 2a and 2b of the clean rooms 1a and 1b and in the clean room 1c, and exhaust pipes 22a, 22b, and 22c are connected to the production apparatuses 21a, 21b, and 21c. Fans 23a, 23b, and 23c are connected to each other. Further, on the wall surface facing the inner chambers 2a and 2b of the clean rooms 1a and 1b and the wall surface facing the clean room 1c, the differential pressure is maintained so that the internal pressures of the inner chambers 2a and 2b and the clean room 1c can be maintained at a constant positive pressure. Dampers 24a, 24b, and 24c are provided.

  25a and 25b are temperature detectors for detecting the temperature in the inner rooms 2a and 2b installed in the clean rooms 1a and 1b, and 25c is a temperature detector for detecting the temperature in the clean room 1c installed in the clean room 1c. The temperatures (room temperature) ta, tb, tc detected by the temperature detectors 25a, 25b, 25c can be given to the chilled water controllers 26a, 26b, 26c provided outside the clean rooms 1a, 1b, 1c.

  The chilled water controllers 26a, 26b, and 26c subtract the set temperatures tao and tbo of the inner chambers 2a and 2b or the set temperature tco of the clean room 1c from the temperatures ta, tb, and tc detected by the temperature detectors 25a, 25b, and 25c. The temperature deviation is obtained, the valve opening adjustment amounts of the flow control valves 10a, 10b, 10c corresponding to the magnitude of the temperature deviation are obtained, and the valve opening commands Va, Vb, Vc corresponding to the valve opening adjustment amounts are obtained. The flow control valves 10a, 10b, and 10c can be given to control their opening degree. When the absolute value of the temperature deviation is large, the opening / closing amounts of the flow control valves 10a, 10b, 10c are increased, and when the absolute value of the temperature deviation is small, the opening / closing amounts of the flow control valves 10a, 10b, 10c are decreased.

  27a and 27b are humidity detectors that detect the humidity in the inner rooms 2a and 2b installed in the clean rooms 1a and 1b, and 27c is a humidity detector that is installed in the clean room 1c and detects the humidity in the clean room 1c. The humidity detected by the humidity detectors 27a, 27b, and 27c can be supplied to the humidified water controllers 28a, 28b, and 28c installed in the clean rooms 1a, 1b, and 1c.

  The humidifying water controllers 28a, 28b, 28c subtract the set humidity hao, hbo of the inner chambers 2a, 2b or the set humidity hco of the clean room 1c from the humidity ha, hb, hc detected by the humidity detectors 27a, 27b, 27c. Then, the humidity deviation is obtained, the valve opening adjustment amount of the spray amount control valves 16a, 16b, 16c corresponding to the magnitude of the humidity deviation is obtained, and the valve opening commands Wa, Wb, Wc is supplied to the spray amount control valves 16a, 16b, and 16c to control the opening thereof, so that the spray amount of the humidified water from the humidified water spray nozzles 13a, 13b, and 13c can be controlled. When the absolute value of the humidity deviation is large, the opening / closing amounts of the spray amount control valves 16a, 16b, 16c are increased, and when the absolute value of the humidity deviation is small, the opening / closing amounts of the spray amount control valves 16a, 16b, 16c are decreased.

  Reference numeral 29 denotes an air conditioner that feeds air (introduced outside air) whose temperature is adjusted to the inner rooms 2a and 2b and the clean room 1c of the clean rooms 1a and 1b as a supply air, a so-called outside air conditioner. In the casing 30 of the air conditioner 29, a steam humidifier 35 including a medium performance filter 31, a cooling / dehumidifying coil 32, a heating coil 33, and a steam spray nozzle 34 and a fan 36 are arranged from the upstream side to the downstream side in the air flow direction. A high performance filter 37 such as a HEPA filter is sequentially arranged.

  In the cooling and dehumidifying coil 32, the cold air fed from the cold water conduit 39 can dehumidify the outside air OA introduced into the casing 30 by the suction force of the fan 36 described later to a temperature below the dew point temperature. ing. The heating coil 33 is connected to a hot water pipe 41 provided with a flow rate control valve 40 for controlling the flow rate of hot water in the middle. The heating coil 33 is heated by hot water fed from the hot water pipe 41. In addition, the air that is supercooled and dehumidified by the cooling and dehumidifying coil 32 and adjusted to a predetermined dew point temperature required by the clean rooms 1a and 1b and the clean room 1c can be heated to a predetermined temperature and reheated. It has become. The steam humidifier 35 is connected to a steam line 43 provided with a spray amount control valve 42 for controlling the spray amount of steam from the steam spray nozzle 34 in the middle of the steam humidifier 35. The steam fed from the pipe 43 is sprayed from the steam spray nozzle 34 so that the air in the air conditioner 29 can be humidified to a predetermined humidity.

  In the clean rooms 1a, 1b, 1c, particularly in the case of a manufacturing room for semiconductor integrated circuits and a manufacturing room for flat panel displays, etc., the heat generation in the room is very large and the number of people working in the room is small. The latent heat load derived from indoor sweating and exhalation can be ignored. If the latent heat fluctuation derived from the outside air (same meaning as the dew point temperature fluctuation) can be adjusted by the air conditioner, the humidity fluctuation of precise temperature control can be prevented. The air conditioner 29 can realize this.

  A dew point temperature detector 44 is installed in the casing 30 so as to be positioned between the fan 36 and the high performance filter 37 and detects the dew point temperature of the air discharged from the fan 36. The detected dew point temperature Hr of air can be given to a dew point temperature controller 45 provided outside the casing 30. A humidity detector can be used instead of the dew point temperature detector 44.

  In the dew point temperature controller 45, the dew point temperature deviation is detected by subtracting the set dew point temperature Hsp of the air fixed at a constant value from the dew point temperature Hr of the air detected by the dew point temperature detector 44, and the magnitude of the dew point temperature deviation. The valve opening adjustment amount of the spray amount control valve 42 corresponding to the valve opening amount is obtained, the valve opening command Wx corresponding to the valve opening adjustment amount is given to the spray amount control valve 42, and the opening amount of the spray amount control valve 42 is adjusted. It has come to be able to do. When the absolute value of the humidity deviation is large, the opening / closing amount of the spray amount control valve 42 is increased, and when the absolute value of the humidity deviation is small, the opening / closing amount of the spray amount control valve 42 is decreased.

  A main duct 46 for supplying air cleaned by the high-performance filter 37 as supply air is connected to the outlet side of the casing 30. The main duct 46 is branched into ducts 46a, 46b, and 46c. The ducts 46a, 46b, and 46c allow air from the air conditioner 29 to flow below the cooling coils 9a, 9b, and 9c of the clean rooms 1a, 1b, and 1c (air flow direction). (Upstream side) can be supplied.

  Although not shown, the flow rate of cold water supplied to the cooling and dehumidifying coil 32 and the flow rate of hot water supplied to the heating coil 33 are flow rate control valves 38 and 40 based on the temperature at each predetermined position in the casing 30. The flow rate of the cold water or hot water is controlled by adjusting the opening degree of the water. In particular, the flow rate control valve 38 for adjusting the flow rate of the chilled water supplied to the cooling / dehumidifying coil 32 calculates the dew point temperature deviation from the set value based on the measured value of the air dew point temperature Hr detected by the dew point temperature detector 44. It is advantageous to control the opening degree. Thereby, the supply air dew point control by the overcooling and sensible heat cooling in the summer and intermediate periods is ensured.

  In the conventional air conditioning system shown in FIG. 19, the outside air OA introduced into the casing 30 from the outside is roughly cleaned by the medium performance filter 25, and in the summer, the cooling dehumidification coil 32 uses the inlet air of the cooling dehumidification coil 32. The air that has been decooled and dehumidified to a temperature below the dew point, dehumidified and adjusted to a predetermined dew point temperature is heated to a predetermined temperature by the heating coil 33 and heated to a predetermined temperature. Then, it is humidified to a predetermined state by the steam sprayed from the steam spray nozzle 34 of the steam humidifier 35. Thus, the air on the downstream side of the steam humidifier 35 is sent out after being pressurized by the fan 36, and sent out from the casing 30 as air that has been cleaned and air-conditioned by removing fine dust by the high-performance filter 37. Air is supplied from the duct 46 into the clean rooms 1a, 1b, and 1c through the ducts 46a, 46b, and 46c. In the summer, air is not humidified by the steam humidifier 35, and in the winter, the air is not supercooled and dehumidified by the cooling / dehumidifying coil 32.

  The outside air OA contains several million particles / cft of dust having a particle size of 0.5 μm or more. However, as a result of removal of dust by the medium performance filter 31 and the high performance filter 37, the air sent from the air conditioner 29 Is almost free of garbage. The reason why the outside air OA introduced into the casing 30 is supercooled by the cooling / dehumidifying coil 32 to dehumidify it is to control the dew point temperature of the introduced air, which is a main disturbance of temperature and humidity, to a predetermined value by precision air conditioning. For example, by setting the dew point temperature in the clean rooms 1a, 1b, and 1c to 10.5 ° C, the relative humidity is maintained at about 45% at a 23 ° C dry bulb temperature. Furthermore, the air is reheated to a predetermined temperature in the heating coil 33 when the clean room 1a, 1b and the clean room 1c are controlled to keep the temperature in the predetermined state in the clean room 1a. , 1b inner chambers 2a, 2b and clean room 1c inner chambers of clean rooms 1a, 1b so that they can be precisely adjusted by heat exchange with cooling water of cooling coils 9a, 9b, 9c even if the load in the clean room 1c fluctuates. This is because stable control is performed by reducing the amount of cooling due to a temperature difference from the circulating air return air of the introduced outside air (supply air) that is not normally interlocked with the room side load in 2a, 2b or the clean room 1c. Further, the steam humidifier 35 of the air conditioner 29 humidifies the air with steam by the jet of water from the humidified water sprayers 14a, 14b, 14c of the clean rooms 1a, 1b, 1c. When the humidity of the clean room 1a, 1b, 1c is kept small, the temperature of the clean room 1a, 1b, 1c is too low due to evaporation of the injected water, and the clean room 1a, 1b , 1c cannot be maintained at a predetermined temperature.

  Air (air supply) fed from the casing 30 of the air conditioner 29 to the clean rooms 1a and 1b through the main duct 46 and the ducts 46a and 46b is transferred from the inner chambers 2a and 2b of the clean rooms 1a and 1b to the inner chambers 2a and 2b. The cooling coils 9a, which are arranged in the air flow passages 8a, 8b, merge with the air (circulated air return air) sent to the air flow paths 4a, 4b through many holes formed in the floor surfaces 3a, 3b. After being cooled to a predetermined temperature by 9b, it is humidified by the water sprayed from the humidifying water spray nozzles 13a, 13b of the humidifying water sprayers 14a, 14b and cooled by evaporation of the sprayed water to rise up the air flow passage 8a. The dust is pressurized by the axial fans 7a and 7b, finer dust is removed by the high performance filters 6a and 6b, and blown into the inner chambers 2a and 2b. Thus, the air blown into the inner chambers 2a and 2b absorbs the heat generated from the production apparatuses 21a and 21b disposed in the inner chambers 2a and 2b to process the heat load, and the inner chambers 2a and 2b The inside of 2b is kept clean. The air (circulated air return air) sent from the inner chambers 2a, 2b through the holes of the floor surfaces 3a, 3b to the air flow paths 4a, 4b merges with the air (supply air) from the air conditioner 29, and again Circulate as described above.

  The air (air supply) sent from the casing 30 of the air conditioner 29 through the main duct 46 and the duct 46c to the clean room 1c passes through the many holes of the floor surface 3c in the clean room 1c and is sent to the air flow path 4c. (Circulated air return air) merged and cooled to a predetermined temperature by a cooling coil 9c disposed in a casing 17 installed in the clean room 1c, and then sprayed from the humidified water spray nozzle 13c of the humidified water sprayer 14c. Cooled by evaporation of water that has been humidified and sprayed, pressurized by the fan 17 and sent from the casing 17 to the duct 18, and fed from the duct 18 to the high-performance filter 19 to remove finer dust, Absorbs heat generated from the production apparatus 21c that is blown into the clean room 1c and disposed in the clean room 1c. While processing a load, it holds the clean room 1c clean. The air (circulated air return air) sent from above the clean room 1c through the hole in the floor surface 3c to the air flow path 4c merges with the air from the air conditioner 29 and circulates again as described above.

  The production apparatuses 21a and 21b installed in the inner chambers 2a and 2b in the clean rooms 1a and 1b are exhausted by the fans 23a and 23b, and the production apparatus 21c installed in the clean room 1c is exhausted by the fans 23c. Exhaust is performed, and the chamber pressure in the inner chambers 2a and 2b in the clean rooms 1a and 1b is adjusted by the differential pressure dampers 24a and 24b, and the chamber pressure in the clean room 1c is adjusted by the differential pressure damper 24c. For this reason, the chamber pressure in the inner chambers 2a and 2b in the clean rooms 1a and 1b and the chamber pressure in the clean room 1c are maintained at predetermined pressures.

  In the above equipment, dew point temperature control of air humidified by the steam humidifier 35, temperature control of air cooled by the cooling coils 9a, 9b, 9c in the clean rooms 1a, 1b, 1c, humidified water in the clean rooms 1a, 1b, 1c The humidity control of the air sprayed from the humidified water spray nozzles 13a, 13b, 13c of the sprayers 14a, 14b, 14c is performed as described below.

  That is, the dew point temperature Hr of air discharged from the fan 36 in the casing 30 of the air conditioner 29 and detected by the dew point temperature detector 44 is given to the dew point temperature controller 45, and the dew point temperature controller 45 uses the air dew point temperature Hr. The dew point temperature deviation is obtained by subtracting the set dew point temperature Hsp from the air, and the valve opening degree command Wx obtained by proportionally integrating the dew point temperature deviation is given to the spray amount control valve 42 to control the spray amount. The valve 42 is controlled to a predetermined opening. For this reason, the steam supplied from the steam line 43 to the steam spray nozzle 34 of the steam humidifier 35 is controlled to a predetermined flow rate, and the humidity of the air becomes a predetermined humidity. As a result, in the air conditioner 29, the air controlled to a predetermined temperature by the heating coil 33 is controlled by the steam humidifier 35 to a predetermined dew point temperature (if the dry bulb temperature is constant, the relative humidity becomes a constant value). The Although not shown, even on the dehumidifying side, the chilled water flow rate control valve 38 is controlled to a predetermined opening degree by a valve opening degree command obtained by another proportional integral calculation of the dew point temperature deviation. It is further advantageous to control the air supplied from the air conditioner 29 to a predetermined dew point temperature. Specifically, another proportional integration calculation may be performed by switching the proportional gradient centered on the dew point temperature in reverse depending on the outside air state.

  The temperatures ta, tb in the inner chambers 2a, 2b of the clean rooms 1a, 1b and the temperature tc in the clean room 1c are detected by the temperature detectors 25a, 25b, 25c and given to the chilled water controllers 26a, 26b, 26c, and the chilled water controller. In 26a, 26b, and 26c, preset temperature tao, tbo, and tco of clean room 1a, 1b and clean room 1c, which are preset from detected temperatures ta, tb, tc, are subtracted, resulting in temperature deviation. The valve opening commands Va, Vb, Vc obtained by the proportional integration calculation of the temperature deviation are given to the flow control valves 10a, 10b, 10c, and the flow control valves 10a, 10b, 10c are opened to a predetermined degree. Controlled at a time. For this reason, the flow rate of the cold water supplied from the cold water pipelines 11a, 11b, and 11c to the cooling coils 9a, 9b, and 9c is controlled to a predetermined flow rate. As a result, the air in the clean rooms 1a, 1b, and 1c is cooled. It is controlled to a predetermined temperature.

  Further, the humidity ha, hb in the inner chambers 2a, 2b of the clean room 1a, 1b and the humidity hc in the clean room 1c are detected by the humidity detectors 27a, 27b, 27c and given to the humidified water controllers 28a, 28b, 28c. In the humidifying water controllers 28a, 28b, 28c, preset internal chambers 2a, 2b of the clean rooms 1a, 1b and preset humidity hao, hbo, hco of the clean room 1c are subtracted from the detected humidity ha, hb, hc. A humidity deviation is obtained, and valve opening commands Wa, Wb, Wc obtained by proportionally integrating the humidity deviation are given to the spray amount control valves 16a, 16b, 16c, and the spray amount control valves 16a, 16b, 16c is controlled to a predetermined opening degree. For this reason, the water sprayed from the humidified water spray nozzles 13a, 13b, 13c of the humidified water sprayers 14a, 14b, 14c via the humidified water pipes 15a, 15b, 15c is controlled to a predetermined flow rate, and as a result, the clean room 1a, The air cooled to a predetermined temperature in 1b and 1c is humidified and controlled to a predetermined humidity, and is cooled to a predetermined temperature by evaporation of the sprayed water.

  Therefore, the heat loads of the production apparatuses 21a and 21b in the inner rooms 2a and 2b of the clean rooms 1a and 1b and the production apparatus 21c in the clean room 1c are processed, and the inner rooms 2a and 2b and the clean rooms 1c in the clean rooms 1a and 1b are processed. The temperature is precisely controlled to a predetermined temperature. The air is dehumidified by supercooling by the cooling / dehumidifying coil 32 in the air conditioner 29 in summer and adjusted to a predetermined dew point temperature. In the winter, the air is humidified by the steam humidifier 35 in the air conditioner 29 and predetermined dew point. Since the temperature is adjusted and introduced into the inner rooms 2a and 2b and the clean room 1c of the clean rooms 1a and 1b, the inner rooms 2a and 2b and the clean room 1c of the clean rooms 1a and 1b are precisely controlled to a predetermined humidity and temperature. The

  Although not shown in the air conditioning system of FIG. 19, temperature detectors are installed at a plurality of locations in the casing 30 of the air conditioner 29, and the cooling and dehumidifying coil 32 is based on the temperatures detected by the temperature detectors. The flow rate control valve 38 for supplying the cold water to the hot water pipe 39 and the flow rate control valve 40 for the hot water pipe 41 for supplying the hot water to the heating coil 33 are also appropriately controlled.

  Another conventional example of an air conditioning system is the system shown in FIG. 20 differs from the system of FIG. 19 in that the ducts 46a, 46b, 46c are provided with dampers 47a, 47b, 47c that can be opened and closed by a driving device (not shown), from the air conditioner 29 to the clean rooms 1a, 1b. This is the point that the flow rate of the air supplied to the chambers 2a, 2b and the clean room 1c can also be adjusted. In FIG. 20, reference numeral 48 denotes a pressure detector for detecting the pressure (room pressure: atmospheric reference differential pressure) Pa in the inner chamber 2a in the clean room 1a, and 49 is a PID calculator. In the embodiment of FIG. 20, especially in the case of a room for manufacturing a semiconductor, a liquid crystal substrate, etc., the inner rooms 2a and 2b of the clean room may be continuous as a large space, depending on the product manufacturing status in the production apparatus of the process. The air pressure of the exhaust system fans 23a, 23b, etc. changes, and the air supply sent from the fan 36 of the air conditioner 29 responsible for the external air introduction / supply air for the exhaust air is measured for the chamber pressure of the representative inner chamber 2a. Therefore, the dampers 47a, 47b, and 47c are controlled at the same opening degree by the amount of air supplied between the ducts 46a and 46b and the duct 46c that is indirectly influenced by the air flow between the inner chambers.

  20 is calculated by the PID calculator 49 to which the measurement signal of the inner chamber 2a (representative chamber) Pa is input, and the amount of exhaust from each production device is reduced, for example, a damper. If the introduced outside air is supplied with the total air volume of the ducts 46a, 46b, and 46c at the opening degree of 50%, when the deviation between the set value and the measured value of the pressure Pa becomes zero, the damper opening degree from the PID calculator 49 When Dpid is output, the damper PID opening Dpid of all the dampers 47a, 47b, 47c provided in the ducts 46a, 46b, 46c for supplying air from the air conditioner 29 to the clean rooms 1a, 1b, 1c is 50%. Flow rate control valves 10a, 10b, 10c, spray amount control valves 16a, 16b, 16c and dampers 47a, 47b, 47C, etc. Is detected instruction value and the like.

  In the case of the air conditioning system of FIG. 20, the operation is basically the same as that of the air conditioning system of FIG. That is, in the air conditioner 29, the opening amount of the spray amount control valve 42 is controlled to control the amount of steam sprayed from the steam spray nozzle 34 of the steam humidifier 35, which is introduced into the casing 30 and in the case of FIG. Similarly, the processed air is controlled to a predetermined dew point temperature, and in the clean rooms 1a, 1b, 1c, the openings of the flow control valves 10a, 10b, 10c are controlled, and the cold water supplied to the cooling coils 9a, 9b, 9c is controlled. By controlling the flow rate, the air introduced into the clean rooms 1a, 1b, 1c and the circulating air returning from the inner chambers 2a, 2b or the inside of the clean room 1c is cooled to a predetermined temperature. The flow rate is controlled by the humidified water spray nozzles 13a, 13b, 13c of the humidified water sprayers 14a, 14b, 14c by controlling the opening of the spray amount control valves 16a, 16b, 16c. The water after being sprayed and cooled by the cooling coils 9a, 9b, 9c is controlled to a predetermined humidity, and air is cooled to a predetermined temperature by evaporation of the water, and this air is introduced into the inner chambers 2a, 2b. Alternatively, the heat is supplied to the upper part of the clean room 1c to absorb the heat generated from the production apparatuses 21a, 21b, and 21c, and the heat load is processed.

  During such operation, the opening degree of the dampers 47a, 47b, and 47c is set so that the pressure in the inner chamber 2a as an external positive air pressure value appropriate as a clean room is preset in the PID calculator 49 as the set pressure Po. Yes. Thus, in the PID computing unit 49, the pressure deviation is obtained by taking the difference between the pressure Pa of the inner chamber 2a and the set pressure Po, and the obtained pressure deviation is proportionally integrated and adjusted, so that the dampers 47a, 47b, 47c The opening degree is determined. For example, when the opening degree of each of the dampers 47a, 47b, and 47c becomes 50% due to the reduction of the exhaust amount as described above, the damper opening degree adjustment value is obtained as described above. The opening degree of the dampers 47a, 47b, 47c is controlled to be a predetermined damper opening degree Dpid = 50%. Here, the damper opening Dpid = 50% is, for example, a linear characteristic damper having the same ratio of the opening and the flow rate, and when the flow rate when the dampers 47a, 47b, 47c are fully opened is 100%, The opening is half and the flow rate is also half.

  There are Patent Documents 1 to 3 as systems for controlling the temperature and humidity of a clean room. In the air conditioning system of Patent Document 1, an indoor unit that supplies heat-treated air to a corresponding air-conditioned space, an indoor unit control device that controls the operation of the corresponding indoor unit, and an indoor unit or air-conditioned unit that heats the outside air An external air conditioner to be supplied to the space, and a control device for controlling the operation of the external air conditioner. The external air conditioner control device includes an external air conditioner, an indoor air supply sensor, an internal sensor, an exhaust sensor, and an external air conditioner. The operation of the external air conditioner is controlled based on data such as indoor air supply temperature, internal temperature, exhaust temperature, external air conditioner air supply temperature, and set temperature received from the air supply sensor and the setting device.

  In the outdoor air cooling system of Patent Document 2, the temperature and absolute humidity of the supply air blown out by the outdoor air cooling are set from the temperature of the circulating indoor air and the absolute humidity of the indoor air, while the temperature and absolute humidity of the introduced outdoor air are set. From this state, the humidification amount of the return air in the room is determined, and the mixing amount of the return air and the outside air OA is controlled.

  In the air conditioning control system of Patent Document 3, when humidifying a constant temperature and humidity room such as a clean room, air conditioning that processes outside air in order to realize precise humidity control with high energy saving effect under stable control. Install a dew point temperature sensor and an air flow meter near the outlet of the machine, detect the absolute humidity of the outside air introduced through the air conditioner and the outside air volume, and calculate the humidity (absolute humidity) of the clean room and the outside air by calculating the humidity controller. The amount obtained by multiplying the difference in absolute humidity by the amount of introduced outside air is used as the required humidification amount, and the required humidification amount is added to the circulating air in the circulating air system by the humidifying means.

JP 2005-156148 A JP 2003-147872 A JP-A-8-82432

  In the conventional air conditioning system of FIG. 19, the ducts 46a, 46b, 46c extending from the air conditioner 29 to the clean rooms 1a, 1b, 1c are not provided with dampers for adjusting the air flow rate. In the air conditioning system, the dampers 47a, 47b, and 47c are provided in the ducts 46a, 46b, and 46c from the air conditioner 29 to the clean rooms 1a, 1b, and 1c. It was controlled to become. Accordingly, in any of the air conditioning systems of FIGS. 19 and 20, the distribution amount of the air supplied from the air conditioner 29 to each of the clean rooms 1a, 1b, 1c is uniform, and the heat load distribution of the clean rooms 1a, 1b, 1c It was constant regardless of the situation.

  Further, the set dew point temperature Hsp of air for controlling the spray amount control valve 42 provided in the steam line 43 for supplying steam to the steam humidifier 35 provided in the air conditioner 29 is the heat of the clean rooms 1a, 1b, 1c. It was a fixed fixed value (for example, 9 ° C.) regardless of the load distribution.

  Furthermore, the thermal load Q of each room of each clean room 1a, 1b, 1c is the air cooling amount A in the cooling coils 9a, 9b, 9c and the clean rooms 1a, 1b from the air conditioner 29 via the ducts 47a, 47b, 47c. , 1c cooling amount B of air (supply air) and cooling amount C cooled by evaporating water sprayed into the clean rooms 1a, 1b, 1c from the humidifying water sprayers 14a, 14b, 14c (Q = A + B + C). However, as described above, since the amount of air supplied to the clean rooms 1a, 1b, 1c from the air conditioner 29 is the same and constant, the cooling coils 9a, 9b, It is also necessary to reduce the air cooling amount by 9c and the air cooling amount by evaporation of water sprayed from the humidified water sprayers 14a, 14b, 14c.

Incidentally, when the load on the inner chamber 2a of the clean room 1a is large, the opening degree of the flow control valve 10a is increased, and the cooling of the air circulating in the clean room 1a by the cooling coil 9a is increased,
When the load of the inner chamber 2b of the clean room 1b is lower than the load of the inner chamber 2a, the opening of the flow control valve 10b is squeezed more than the flow control valve 10a and cooled by the cooling coil 9b of the air circulating in the clean room 1b. Needs to be slightly lower than in the case of the cooling coil 9a. Further, when the load of the clean room 1c is further lower than the load of the inner chamber 2b, the opening degree of the flow control valve 10c is further reduced than that of the flow control valve 10b to cool the air circulating in the clean room 1c. Cooling in the coil 9c must be further reduced to a substantially zero minimum as compared with the case of the air cooling coil 9b, and the amount of water sprayed from the humidified water sprayer 14c is reduced by reducing the spray amount control valve 16c. There must be. This is because it is required to maintain the room temperature ta, tb, tc in the clean rooms 1a, 1b and the room temperature ta, tb, tc in the clean room 1c at 23 ° C., but the heat load of the clean room 1c is the smallest among the three rooms. In this case, if the amount of water sprayed from the humidified water sprayer 14c is increased in order to secure the humidity, the clean room 1c becomes too cold due to water evaporation, and the room temperature tc cannot be secured at 23 ° C.

  Thus, in the clean room 1c with a small heat load, if the humidification by the humidifying water sprayer 14c is performed in order to set the relative humidity of the room to a predetermined value (humidity hc = 45%), the room temperature tc is too low due to water evaporation. Therefore, the humidification water sprayer 14c cannot be humidified. Therefore, in order to secure the humidity hc of the clean room 1c with a small heat load, it is necessary to increase the humidification of the steam humidifier 35 in the air conditioner 29. As a result, the consumption of steam in the steam humidifier 35 increases.

  Further, the humidification amount X in the steam humidifier 35 of the air conditioner 29 is changed from the steam loss amount α × B due to the exhaust from the clean rooms 1a, 1b, 1c by the fans 23a, 23b, 23c to the clean rooms 1a, 1b, 1c. Is subtracted from the humidification amount β × C (X = α × B−β × C). Here, B and C are the same as those in the above-described equation of Q, and α and β are coefficients. First, B will be described. Since the indoor temperature and humidity are constant and the temperature and humidity of the introduced outside air are also constant, the amount of cooling by the introduced outside air is proportional to the amount of the introduced outside air, and the leakage air that keeps the chamber at a positive pressure is also included. If it is considered as exhaust, it is equal to the amount of outside air introduced, and if the exhaust is constant indoor temperature and humidity, a constant dew point is obtained when there is no indoor latent heat. It is clear that when α × B is multiplied by the coefficient of α, it is proportional to the amount of water vapor contained in the air accompanying the exhaust. Next, C will be described. Since the introduced outside air has a constant dew point and the dew point of the circulating air is also constant because there is no room latent heat, the cooling amount C by the spray water sprayed in the clean room and adiabatically changed is proportional to the spray amount. It is clear that Therefore, the humidification amount in the clean room is proportional to C. Thus, the amount of air (air supply) introduced from the air conditioner 29 into the clean rooms 1a, 1b, 1c through the ducts 47a, 47b, 47c is constant in proportion to B, but the humidified water sprayers 14a, Assuming the case where the cooling amount C cooled by evaporation of water sprayed into the clean rooms 1a, 1b, 1c from 14b, 14c is reduced, the humidification amount X in the steam humidifier 35 is as described above. It is necessary to set a large set dew point temperature Hsp = 9 ° C.

  Further, when the heat load of the clean rooms 1a, 1b, 1c is large, the amount of water sprayed from the humidifying water sprayers 14a, 14b, 14c can be increased, so that the humidity of the chamber can be maintained at a predetermined value. When the thermal load of the clean rooms 1a, 1b, and 1c is reduced, the amount of water sprayed from the humidified water sprayers 14a, 14b, and 14c must be reduced in the corresponding chamber, and a predetermined room degree can be maintained. Therefore, in order to ensure the humidity of the clean rooms 1a, 1b, 1c with low heat load, the set dew point temperature Hs of the air conditioner 29 is set to a higher fixed value, and the amount of steam sprayed by the steam humidifier 35 is set. It is necessary to increase, and therefore it is difficult to achieve sufficient energy saving.

  In Patent Document 1, an indoor unit and an external air conditioner, and a control device for controlling the indoor unit and the external air conditioner are respectively provided and controlled independently, for example, energy consumption such as supercooling and reheating. In order to suppress the adverse effect of increasing the amount, the control device of the external air conditioner is provided with a parameter changing unit so that the control parameter of the external air conditioner can be changed according to the operation status of the indoor unit. In this parameter changing unit, the setting air supply temperature of the external air conditioner is set and changed as one of the parameters. However, when a precise temperature control is performed in a building with many areas and rooms where the exhaust and supply air fluctuate greatly depending on the movement of the production equipment by circulating a large air flow like a clean room in a factory, When humidifying with water on the side circulating the air, the temperature of the air decreases while adiabatic humidification is performed by humidification in the intermediate period and winter season, so that the area and the room can be cooled.

  However, since the types of production equipment installed in each area or room are generally different, the degree of heat load due to exhaust or heat generation is often different for each area or room. If the heat load in a room is high but the heat load in a certain area or room is small or negligible, the area or room should not be overcooled for precise temperature control. It is necessary to raise the set supply air temperature of the external air conditioner. If it does so, the setting air supply temperature of an external air conditioner cannot be lowered, and the minimum energy consumption cannot be aimed at.

  Also, in Cited Document 1, the setting of air supply distribution is not changed corresponding to a large number of areas and rooms, and the outside air is uniformly distributed to each area and room. Therefore, as described above, if there is an area or room with a small heat load, even if it is desired to humidify the area or room, there arises a problem that the temperature is too low due to cooling due to evaporation of the sprayed water. It is necessary to perform humidification in the conditioner, and as a result, there is a limit to reduction of energy consumption in the external conditioner. Further, in Patent Documents 2 and 3, there is one room for supplying air from the air conditioner, and it is not necessary to pay particular attention to the distribution of the air supply, so there is no direct relationship with the present invention.

  In view of the above-described circumstances, the present invention provides water in a clean room having a thermal load smaller than other clean rooms when water is sprayed on the clean room in order to keep the humidity at a predetermined value. This is intended to save energy by preventing the temperature of the clean room from becoming too low due to evaporation of the water and to improve the accuracy of temperature control of the clean room.

The air conditioning system according to claim 1 comprises:
First cooling means for supercooling the introduced air to dehumidify, heating means for heating the air cooled by the first cooling means, and steam for humidifying the air heated by the heating means with steam An air conditioner equipped with a humidifying means;
A second cooling means configured to cool the air circulated in the air supplied from the air conditioner; and at least one water humidifying means for humidifying the air cooled by the second cooling means. Equipped with air-conditioned space,
The opening degree of the spray amount control valve of the steam line through which steam is supplied to the steam humidifying means in the air conditioner is humidified by the steam humidifying means in the air conditioner or dehumidified by the first cooling means. Air dew point temperature, supply of cold water to the second cooling means, or valve opening command to a flow control valve provided in a cold water pipe for discharging the cold water, and supply of humidified water to the water humidifying means The control is based on the difference from the set dew point temperature obtained based on the valve opening command of the humidified water spray amount control valve provided in the humidified water pipe.

The air conditioning system according to claim 2 comprises:
First cooling means for supercooling the introduced air to dehumidify, heating means for heating the air cooled by the first cooling means, and steam for humidifying the air heated by the heating means with steam An air conditioner equipped with a humidifying means;
A second cooling means configured to cool the air circulated in the air supplied from the air conditioner; and at least one water humidifying means for humidifying the air cooled by the second cooling means. Equipped with air-conditioned space,
The opening degree of the spray amount control valve of the steam line through which steam is supplied to the steam humidifying means in the air conditioner is humidified by the steam humidifying means in the air conditioner or dehumidified by the first cooling means. Air dew point temperature, supply of cold water to the second cooling means, or valve opening command to a flow control valve provided in a cold water pipe for discharging the cold water, and supply of humidified water to the water humidifying means Configured to control based on the difference from the set dew point temperature obtained based on the valve opening command of the humidified water spray amount control valve provided in the humidified water pipe,
The opening degree of the damper provided in the line for sending air from the air conditioner to the air-conditioned space can be controlled corresponding to the valve opening degree command to the flow control valve of the second cooling means. .

The air conditioning system according to claim 3 is:
A first heating means for heating the introduced air, a first water humidifying means for humidifying the air heated by the first heating means, and air when not humidified by the first water humidifying means. An air conditioner comprising: a first cooling means for supercooling and dehumidifying the air; and a second heating means for heating air from the first cooling means;
A second cooling means configured to cool the air supplied from the air conditioner and circulated therein; and a second water humidifying means for humidifying the air cooled by the second cooling means. At least one air-conditioned space,
The opening degree of the flow rate control valve of the heat medium pipe line to which the heat medium is supplied to the first heating means is humidified by the first water humidifying means on the downstream side in the air flow direction of the second heating means in the air conditioner. Or the dew point temperature of the air dehumidified by the first cooling means, and supply of cold water to the second cooling means, or to a flow control valve provided in a cold water conduit for discharging the cold water Based on the difference between the valve opening command and the set dew point temperature obtained based on the valve opening command of the humidifying water spray amount control valve provided in the humidifying water conduit for supplying the humidifying water to the second water humidifying means. It is configured to control.

The air conditioning system of claim 4
A first heating means for heating the introduced air, a first water humidifying means for humidifying the air heated by the first heating means, and air when not humidified by the first water humidifying means. An air conditioner comprising: a first cooling means for supercooling and dehumidifying the air; and a second heating means for heating air from the first cooling means;
A second cooling means configured to cool the air supplied from the air conditioner and circulated therein; and a second water humidifying means for humidifying the air cooled by the second cooling means. At least one air-conditioned space,
The opening degree of the flow rate control valve of the heat medium pipe line to which the heat medium is supplied to the first heating means is humidified by the first water humidifying means on the downstream side in the air flow direction of the second heating means in the air conditioner. Or the dew point temperature of the air dehumidified by the first cooling means, and supply of cold water to the second cooling means, or to a flow control valve provided in a cold water conduit for discharging the cold water Control is performed based on the difference between the valve opening degree command and the set dew point temperature obtained based on the valve opening degree instruction of the humidifying water spray amount control valve provided in the humidifying water conduit for supplying the humidifying water to the second water humidifying means. Configured as
The opening degree of the damper provided in the line for sending air from the air conditioner to the air-conditioned space can be controlled corresponding to the valve opening degree command to the flow control valve of the second cooling means. .

The air conditioning system according to claim 5 is:
First, calculating a valve opening command of the flow control valve of the second cooling means corresponding to the deviation from the deviation between the detected temperature of the air-conditioned space and the set temperature of the air-conditioned space for a plurality of air-conditioned spaces Means of
A second means for calculating a valve opening command of the humidified water spray amount control valve of the water humidifying means corresponding to the deviation from the detected humidity of the air-conditioned space and the set humidity of the air-conditioned space;
A valve opening command for the flow control valve of the second cooling means from the first means, a valve opening command for the humidified water spray amount control valve of the water humidifying means from the second means, and the detected air-conditioned The temperature of the space, the set temperature of the air-conditioned space, the set temperature and humidity control level of the air-conditioned space, the flow control valve opening setting lower limit value of the flow control valve of the second cooling means, the steam humidifying means in the air conditioner Set dew point temperature lower limit value of air to be humidified, set dew point temperature upper limit value of air humidified by steam humidifying means in the air conditioner, set dew point temperature change amount, flow control valve open of flow control valve of second cooling means Dead band of temperature setting value, dead zone temperature difference of air-conditioned space with second temperature / humidity control level, dead zone temperature difference of air-conditioned space with lowest temperature / humidity control level, spray of spray amount control valve in water humidifying means Volume control valve opening setting lower limit and spray volume control A third means for calculating a set point temperature of the air conditioner from the valve opening degree set upper limit value,
The valve opening command of the spray amount control valve of the steam humidifying means is calculated from the deviation between the set dew point temperature from the third means and the dew point temperature of the air humidified by the steam humidifying means, and the spray of the steam humidifying means is calculated. A fourth means for giving to the quantity control valve is provided.

The air conditioning system according to claim 6 is:
First, calculating a valve opening command of the flow control valve of the second cooling means corresponding to the deviation from the deviation between the detected temperature of the air-conditioned space and the set temperature of the air-conditioned space for a plurality of air-conditioned spaces. One means,
Second means for calculating a valve opening command of the spray amount control valve of the second water humidifying means corresponding to the deviation from the detected humidity of the air-conditioned space and the set humidity of the air-conditioned space;
A valve opening command for the flow rate control valve of the second cooling means from the first means, a valve opening command for the spray amount control valve of the second water humidifying means from the second means, The temperature of the air-conditioned space, the set temperature of the air-conditioned space, the set temperature and humidity control level of the air-conditioned space, the flow control valve opening setting lower limit value of the second flow control valve, and humidified by the first water humidifying means Set dew point temperature lower limit value of air, set dew point temperature upper limit value of air humidified by the first water humidifying means, set dew point temperature change amount of air humidified by the first water humidifying means, second The dead zone of the flow control valve opening setting value of the flow control valve of the cooling means, the dead zone temperature difference of the second air-conditioned space where the temperature / humidity control level is the second, the dead zone temperature difference of the lower air-conditioned space where the temperature / humidity control level is the lowest, Spray amount control valve opening of the spray amount control valve in the second water humidifying means A third means for calculating a set point temperature of the air conditioner from the constant lower limit value and the spray amount control valve opening set upper limit value,
The set dew point temperature from the third means and the dew point temperature of the air that has been humidified by the first water humidifying means in the air conditioner or dehumidified by the first cooling means and then passed through the second heating means. The fourth arithmetic control means is provided for calculating the valve opening command of the flow control valve of the first heating means from the deviation and giving it to the flow control valve of the first heating means.

The air conditioning system according to claim 7 is:
Fifth means for calculating a damper PID opening corresponding to the deviation from the deviation between the detected pressure of the air-conditioned space and the set pressure of the air-conditioned space;
Damper PID opening from the fifth means, valve opening command of the flow control valve of the second cooling means, flow control valve opening setting lower limit value in the flow control valve of the second cooling means, second Dead zone of the flow control valve opening setting value in the flow control valve of the cooling means, damper upper limit value of damper, upper limit value of damper opening bias amount, lower limit value of damper opening bias amount, change of damper opening bias amount A sixth means for calculating the damper opening bias amount from the amount;
The damper opening is obtained from the damper opening bias amount from the sixth means and the damper PID opening from the fifth means, and the opening of the damper provided in the line from the air conditioner to the air-conditioned space is determined. A seventh means for controlling is provided.

   The air conditioning system according to claim 8 is configured such that the temperature of the supply air supplied from the air conditioner to the air-conditioned space is lower than the temperature of the air circulating in the air-conditioned space.

  According to the air conditioning system of claims 1 to 8 of the present invention, it is possible to know the thermal load from the information on the opening degree of the flow control valve of the second cooling means corresponding to the air-conditioned space, and Judging the heat load of the air-conditioned space comprehensively, even in the room with the smallest load, if the heat load is more than the predetermined value, the set dew point temperature is lowered. Energy saving can be achieved. In addition, this reduces the water vapor partial pressure in the air supplied from the air conditioner to the air-conditioned space and reduces the moisture in the supplied air volume, so when maintaining the humidity of the air-conditioned space at a predetermined value, The amount of water sprayed from the water humidifying means in the air-conditioned space increases, and the amount of cooling of the air-conditioned space increases due to evaporation of the sprayed water. It is possible to save energy by cooling, and to improve the accuracy of temperature control of the air-conditioned space.

  Further, in claims 2, 4, and 7, since the amount of air from the air conditioner can be adjusted according to the size of the heat load, in systems where the heat load is large and the air from the air conditioner is large, In the system where the flow control valve of the second cooling means is throttled and the heat load is small and the air from the air conditioner is small, the flow control valve of the second cooling means is controlled to open. Is done. For this reason, even if the heat load is different, the difference in valve opening of the flow control valve of the second cooling means of each system is reduced and made uniform, and the uneven distribution of the cooling amount by cold water can be smoothed and alleviated. it can.

Therefore, heating by the steam humidifying means in the air conditioner and reduction of humidifying energy can be achieved, and the amount of water sprayed by the water humidifying means in the air-conditioned space is appropriately increased, thereby evaporating the sprayed water. Therefore, the amount of air supplied from the air conditioner can be adjusted by the heat load of the air-conditioned space. Therefore, energy saving can be achieved more efficiently.

It is Example 1 of the air-conditioning system of this invention, and is a block diagram which shows the whole system. It is a block diagram of the control system in the air conditioning system of FIG. It is a flowchart at the time of control in the air conditioning system of FIG. (A) is a flowchart following the flowchart of FIG. 3, which is a flowchart in the case of the most severe temperature and humidity control, and (b) is a table summarizing calculation results of the flowchart of (a). (A) is a flowchart following the flowchart of FIG. 3, which is a flowchart in the case of the second severe temperature and humidity control, and (b) is a table summarizing the calculation results of the flowchart of (a). It is a flowchart following the flowchart of FIG. It is a flowchart following the flowchart shown to FIG. 4a, FIG. 5a, and FIG. It is a flowchart following the flowchart of FIG. It is a graph which shows the relationship between the actual opening degree Apvi of a flow control valve, and the individual determination command yi, and is a graph for demonstrating the dead zone which a flow control valve does not open and close. It is a graph which shows the relationship between the temperature Tpvi detected by the interior room of the clean room or the clean room and the individual determination command yi, and is a graph for explaining the dead zone temperature at which the flow control valve does not open and close in the temperature of the interior room of the clean room or the clean room. It is Example 2 of the air conditioning system of this invention, and is a block diagram which shows the whole system. It is a flowchart at the time of control of all the driving | running states in the air conditioning system of FIG. It is a block diagram of the control system in the air conditioning system of FIG. It is a flowchart at the time of performing control by the block diagram of FIG. In subroutine II of the second embodiment of the air conditioning system of the present invention shown in FIG. 10, the distribution of the flow rate of the air supplied from the air conditioner is changed by the thermal load of the clean room, and the flow control valve and the spray amount control valve are opened. This is a specific example regarding the reading of information, in which a numerical value is entered, and the dew point temperature at that position or the dew point temperature detected by the device or the indicated value is specifically described in the necessary part. In the subroutine II of the second embodiment of the air conditioning system of the present invention shown in FIG. 10, it is a specific example in which numerical values in the case where the set dew point temperature of the air supplied from the air conditioner is changed from the state shown in FIG. 14. The necessary part is an example in which the dew point temperature at the position or the dew point temperature detected by the device or the indicated value is specifically described. In Example 2 of the air-conditioning system of this invention shown in FIG. 10, it is a figure for demonstrating the position which measures the dry bulb temperature and absolute humidity of the state point at the time of creating an air diagram. In the air-conditioning system shown in FIG. 10, it is an air line figure obtained when it measures in the measurement point shown in FIG. 16a, and the conventional air-conditioning system shown in FIG. 20 in the same position. It is Example 3 of the air conditioning system of this invention, and is a block diagram which shows the whole system. It is a figure for demonstrating the position which measures the dry-bulb temperature and absolute humidity of the state point at the time of creating an air diagram in Example 3 of the air conditioning system of this invention shown in FIG. In the air conditioning system shown in FIG. 17, it is an air line diagram obtained when measuring in the conventional air conditioning system at the measurement point shown in FIG. 18a and the same position. It is an example of a conventional air conditioning system, and is a configuration diagram showing the entire air conditioning system in which a damper is not provided in a duct from an external air conditioner to a clean room. It is another example of a conventional air conditioning system in which a damper is provided in a duct from an external air conditioner to a clean room, and is a configuration diagram showing the entire system in which a damper is provided in a duct from the external air conditioner to the clean room.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. In the following description, “the heat load is large” means that the amount of heat generated in the production apparatuses 21a and 21b installed in the inner rooms 2a and 2b in the clean rooms 1a and 1b or the production apparatus 21c installed in the clean room 1c is a predetermined one. The amount of heat generated by the production devices 21a and 21b installed in the inner chambers 2a and 2b in the clean rooms 1a and 1b or the production device 21c installed in the clean room 1c is referred to as “low thermal load”. It means that it is less than other values smaller than the one value, and the intermediate value between the one value and the other value is a case where the heat load is between “large” and “small”. . Further, when the heat load of the production devices 21a, 21b, 21c is large, when the opening degree of the flow control valves 10a, 10b, 10c for controlling the flow rate of the cold water supplied to the cooling coils 9a, 9b, 9c is large, Or when the opening degree of the spray amount control valves 16a, 16b, 16c for controlling the amount of water sprayed from the humidified water sprayers 14a, 14b, 14c to the clean rooms 1a, 1b, 1c is large, or the temperature detector 25a. , 25b, the room temperature ta, tb of the inner chambers 2a, 2b of the clean room 1a, 1b, and the room temperature tc of the clean room 1c detected by the temperature detector 25c are high.

  1 to 9 show a first embodiment of the present invention corresponding to claims 1, 5, and 8. FIG. In the figure, the same components as those shown in FIG. In the description of the first embodiment, the clean rooms 1a, 1b and 1c are the “air-conditioned spaces” in claims 1, 4 and 7, the cooling and dehumidifying coil 32 is the “first cooling means” in claim 1, and the heating coil 33. Is the "heating means" of claim 1, the steam humidifier 35 is "steam humidification means" of claims 1 and 4, humidified water sprayers 14a, 14b and 14c are "water humidification means" of claims 1 and 4, and a cooling coil Reference numerals 9a, 9b, and 9c are "second cooling means" in claims 1 and 4, and spray amount control valves 16a, 16b, and 16c are "humidified water spray amount control valves" in claim 1. Further, the cold water controllers 26a, 26b and 26c are “first means” of claim 4, the humidified water controllers 28a, 28b and 28c are “second means” of claim 4, and the set dew point temperature controller 51 is claim 4. The third means, the dew point temperature controller 45 is the “fourth means” in claim 4.

  Thus, in the first embodiment, the ducts 46a, 46b and 46c are not provided with dampers, and the clean rooms 1a, 1b and 1c are supplied with an equal amount of air per unit time from the air conditioner 29. It is. Thus, the features of the illustrated example are as follows.

  That is, in the air conditioning system of the first embodiment, as shown in FIG. 1, a set dew point temperature controller 51 is provided, and the temperature ta of the inner chambers 2a and 2b in the clean rooms 1a and 1b detected by the temperature detectors 25a, 25b, and 25c. , Tb, tc can be given to the set dew point temperature controller 51 in addition to the cold water controllers 26a, 26b, 26c. Further, it is obtained from the temperatures ta, tb, tc and the set temperatures tao, tbo, tco by the chilled water controllers 26a, 26b, 26c and is given to the flow rate control valves 10a, 10b, 10c of the chilled water pipes 11a, 11b, 11c. The valve opening commands Va, Vb, Vc can also be given to the set dew point temperature controller 51. Further, in the humidifying water controllers 28a, 28b, 28c, the humidity ha, hb, hc and the set humidity hao, hbo, in the inner rooms 2a, 2b and the clean room 1c in the clean rooms 1a, 1b detected by the humidity detectors 27a, 27b, 27c, The valve opening commands Wa, Wb, Wc obtained from hco and given to the humidified water spray nozzles 13a, 13b, 13c of the humidified water sprayers 14a, 14b, 14c can also be given to the set dew point temperature controller 51.

  Thus, the set dew point temperature controller 51 obtains a set dew point temperature Hsp in the steam humidifier 35 of the air conditioner 29 based on the given data and set data described later, and this set dew point temperature Hsp is obtained. Steam is supplied to the steam humidifier 35 based on the set dew point temperature Hsp given to the dew point temperature controller 45 and the air dew point temperature Hr detected by the dew point temperature detector 44 on the outlet side of the fan 36 of the air conditioner 29. A valve opening command Wx for the spray amount control valve 42 of the steam line 43 to be obtained is obtained, and the opening of the spray amount control valve 42 can be controlled by this valve opening command Wx.

  Details of the chilled water controllers 26a, 26b and 26c, the humidified water controllers 28a, 28b and 28c, the set dew point temperature controller 51 and the dew point temperature controller 45 are shown in FIG. In the following description, because the figure is complicated, there are symbols shown in only one of FIGS. 1 and 2, but actually, it is necessary for both of the systems in FIGS. It is. Each set data is given from a host controller (not shown). Further, in FIG. 2, for simplification of the drawing, the three chilled water controllers 26a, 26b, and 26c are shown in one figure, and the three humidified water controllers 28a, 28b, and 28c are shown in one figure. In the illustrated example, there are actually three units.

  The chilled water controllers 26a, 26b, and 26c can set temperatures to be maintained in the inner rooms 2a and 2b of the clean rooms 1a and 1b and the clean room 1c as set temperatures tao, tbo, and tco (see FIG. 1, see FIG. 2), the temperatures ta and tb of the inner chambers 2a and 2b of the clean rooms 1a and 1b detected by the temperature detectors 25a and 25b, and the temperature tc of the clean room 1c detected by the temperature detector 25c can be given. (See FIGS. 1 and 2). Thus, the subtraction unit 52 of the chilled water controllers 26a, 26b, 26c obtains the temperature deviations Δta, Δtb, Δtc by obtaining the differences between the detected temperatures ta, tb, tc and the set temperatures tao, tbo, tco. The temperature deviations Δta, Δtb, Δtc can be given to a part having a function of controlling by proportional integral differential calculation (one type of proportional integral calculation), that is, to the PID control unit 53.

  In the PID control unit 53 of the chilled water controllers 26a, 26b, 26c, the temperature deviations Δta, Δtb, Δtc are subjected to proportional-integral-derivative calculation to obtain the valve opening commands Va, Vb, Vc, and the valve opening commands Va, Vb, Vc can be given to the flow control valves 10a, 10b, 10c of the chilled water pipes 11a, 11b, 11c for supplying the chilled water to the cooling coils 9a, 9b, 9c of the clean rooms 1a, 1b, 1c (see FIG. 1), and can be given to the set dew point temperature calculator 54 of the set dew point temperature controller 51 (see FIG. 2).

  In the humidity controllers 28a, 28b, 28c, the humidity to be maintained in the inner rooms 2a, 2b of the clean rooms 1a, 1b and the clean room 1c can be set as set humidity hao, hbo, hco (see FIG. 1, see FIG. 2), the humidity ha and hb of the inner chambers 2a and 2b of the clean rooms 1a and 1b detected by the humidity detectors 27a and 27b, and the humidity hc of the clean room 1c detected by the humidity detector 27c can be given. (See FIGS. 1 and 2). Thus, the subtraction unit 55 of the humidifying water controllers 28a, 28b, 28c obtains the humidity deviations Δha, Δhb, Δhc by taking the difference between the detected humidity ha, hb, hc and the set humidity hao, hbo, hco. The obtained humidity deviations Δha, Δhb, Δhc can be given to a part having a function of controlling by proportional-integral-derivative calculation, that is, to the PID control unit 56.

  In the PID control unit 56 of the humidifying water controllers 28a, 28b, 28c, the humidity deviations Δha, Δhb, Δhc are proportional-integral-derivative-calculated to obtain humidified water valve opening commands Wa, Wb, Wc. Wa, Wb, and Wc are supplied to the spray amount control valves 16a, 16b, and 16c provided in the humidified water pipes 15a, 15b, and 15c for supplying the humidified water to the humidified water sprayers 14a, 14b, and 14c of the clean rooms 1a, 1b, and 1c. It can be given (see FIG. 1), and can be given to the set dew point temperature calculation unit 54 of the set dew point temperature controller 51 (see FIG. 2).

  In the set dew point temperature calculation unit 54 of the set dew point temperature controller 51, set temperatures tao and tbo which are room temperature set values of the inner chambers 2a and 2b of the clean rooms 1a and 1b, and a set temperature tco which is a room temperature set value of the clean room 1c are set. (See FIG. 2). In addition, the set dew point temperature calculation unit 54 of the set dew point temperature controller 51 includes the temperatures ta and tb, which are the room temperatures of the inner rooms 2a and 2b of the clean rooms 1a and 1b, detected by the temperature detectors 25a, 25b and 25c, and the clean room 1c. A temperature tc which is room temperature can be given (see FIGS. 1 and 2).

  In the set dew point temperature calculation unit 54 of the set dew point temperature controller 51, flow control valve opening setting lower limit values Aau, Abu, Acu of the flow control valves 10a, 10b, 10c corresponding to the clean rooms 1a, 1b, 1c are set. (See FIG. 2). The flow control valve opening setting lower limit values Aau, Abu, Acu are, for example, about 20% of the opening (unit:%) when the flow control valves 10a, 10b, 10c are fully opened. This is because if the flow control valve opening setting lower limit value Aau, Abu, Acu is too small, the control of the flow control valves 10a, 10b, 10c may not be successful if the opening adjustment range of each flow control valve 10a, 10b, 10c becomes large. is there. Needless to say, the flow control valve opening setting lower limit values Aau, Abu, Acu differ depending on the type and valve characteristics of the flow control valve.

  Further, the set dew point temperature calculation unit 54 of the set dew point temperature controller 51 includes temperature and humidity control levels La1, La2, La3, Lb1, Lb2, Lb3, Lc1, Lc2 of the inner rooms 2a, 2b of the clean rooms 1a, 1b and the clean room 1c. , Lc3 can be set (see FIG. 2).

  Here, the temperature and humidity control levels La1, La2, La3, Lb1, Lb2, Lb3, Lc1, Lc2, and Lc3 are weights according to the temperature and humidity that the clean rooms 1a and 1b want to maintain and the clean room 1c. That is, La1 and Lb1 are temperature and humidity control levels in the clean rooms 1a and 1b of the clean rooms 1a and 1b, and Lc1 is a temperature and humidity control level in the clean room 1c. % ± 5%, where the product is exposed or the temperature control of the manufacturing equipment is most required (the most severe temperature and humidity control level). In addition, there are many manufacturing apparatuses in the zone where the temperature control is most required, and there is a tendency that the heat load due to heat generation is large. La2 and Lb2 are in the interior rooms 2a and 2b of the clean room 1a and 1b, and Lc2 is a temperature and humidity control level in the clean room 1c. This is the case where the product is isolated or in the maintenance-side zone of the manufacturing equipment (second severe temperature and humidity control level). La3 and Lb3 are the temperature and humidity control levels in the clean rooms 1a and 1b of the clean rooms 1a and 1b, and Lc3 is a temperature and humidity control level in the clean room 1c. In this case, the production apparatus is a spare line zone to be installed from now on (the third severest (loosest) temperature / humidity control level).

  Further, the set dew point temperature calculation unit 54 of the set dew point temperature controller 51 includes a set dew point temperature lower limit value Hspmin, a set dew point temperature upper limit value Hspmax, and a set dew point temperature change amount ΔHsp when the steam humidifier 35 humidifies air. In addition, the dead zone Adif of the flow control valve opening setting value related to the flow control valves 10a, 10b, and 10c, the inner chambers 2a and 2b of the clean rooms 1a and 1b, and the clean room 1c can be set. Of these, the dead zone temperatures of the second most severe temperature / humidity control levels La2, Lb2, Lc2 (dead zone temperature of the second room where the temperature / humidity control level is the second) T2difαi, T2difβi, dead zones of the loosest temperature / humidity control levels La3, Lb3, Lc3 Temperature (dead zone temperature of the third room where the temperature and humidity control level is the third) T3difαi and T3difβi can be set (See FIG. 2). However, T2difαi and T2difβi can be arbitrarily set, and 0 ≦ T2difαi <T2difβi ≦ 1. T3difαi and T3difβi can be arbitrarily set, and 1 ≦ T3difαi <T3difβi ≦ 1.5. The “dead zone” will be described later.

  Furthermore, the set dew point temperature calculation unit 54 of the set dew point temperature controller 51 includes the spray amount control valve opening setting lower limit value Wmin of the spray amount control valves 16a, 16b, and 16c corresponding to the clean rooms 1a, 1b, and 1c. An amount control valve opening setting upper limit value Wmax can be set (see FIG. 2).

  In the set dew point temperature calculation unit 54 of the set dew point temperature controller 51, the valve opening commands Va, Vb, Vc from the PID control unit 53 in the chilled water controllers 26a, 26b, 26c, the inner chambers 2a, 2b of the clean rooms 1a, 1b, and the clean room 1c set temperatures tao, tbo, tco, temperatures ta, tb, tc of the clean rooms 1a, 1b and clean rooms 1c detected by the temperature detectors 25a, 25b, 25c, humidity controllers 28a, 28b, 28c The valve opening degree commands Wa, Wb, Wc from the PID control unit 56, and the temperature and humidity control levels La1, La2, La3, Lb1, Lb2, Lb3, Lc1, Lc2 of the inner rooms 2a, 2b of the clean rooms 1a, 1b and the clean room 1c , Lc3, the flow control valve opening degree of each flow control valve 10a, 10b, 10c Set lower limit value Aau, Abu, Acu, set dew point temperature lower limit value Hspmin or set dew point temperature upper limit value Hspmax or set dew point temperature change amount ΔHsp, flow rate control valve opening dead zone Adif, clean room 1a, 1b inner chambers 2a, 2b, clean room 1c, the dead zone temperatures T2difαi and T2difβi of the second most severe temperature and humidity control levels La2, Lb2 and Lc2, the dead zone temperatures T3difαi and T3difβi of the loosest temperature and humidity control levels La3, Lb3 and Lc3, and the spray amount control valves 16a and 16b 16c, the set dew point temperature Hsp in the steam humidifier 35 of the air conditioner 29 is obtained based on the spray amount control valve opening setting lower limit value Wmin and the spray amount control valve opening setting upper limit value Wmax. The dew point temperature Hsp is given to the subtraction unit 57 of the dew point temperature controller 45. It has become the jar (see FIGS. 1 and 2).

  In addition to the set dew point temperature Hsp, the dew point temperature controller 45 can be supplied with the dew point temperature Hr of the air detected by the dew point temperature detector 44 on the downstream side of the fan 36 of the air conditioner 29. (See FIGS. 1 and 2).

  The subtraction unit 57 of the dew point temperature controller 45 takes the difference between the dew point temperature Hr of the humidified air detected by the dew point temperature detector 44 in the air conditioner 29 and the set dew point temperature Hsp from the set dew point temperature controller 51. Thus, a set dew point temperature deviation (Hr−Hsp = ΔH) of air is obtained, and the obtained set dew point temperature deviation ΔH is given to the PID control unit 58. Further, in the PID control unit 58, the opening degree of the spray amount control valve 42 of the steam line 43 that supplies the steam to the steam humidifier 35 of the air conditioner 29 by the proportional integral / derivative calculation of the set dew point temperature deviation ΔH of the air. The command Wx is obtained, and the opening degree of the spray amount control valve 42 can be adjusted to a predetermined opening degree by the obtained valve solution degree command Wx.

  Next, the operation of the first embodiment will be described with reference to FIG. The flow of outside air OA in the air conditioner 29, the operation of each device in the air conditioner 29, the flow of air (supply air) supplied from the air conditioner 29 to the inner rooms 2a and 2b of the clean rooms 1a and 1b and the clean room 1c, Since the flow of circulating air in the inner rooms 2a and 2b and the clean room 1c of the clean rooms 1a and 1b is substantially the same as that in FIG. 19, the description thereof is omitted. The clean room detected by the temperature detectors 25a, 25b, and 25c among the data inputted to the cold water controllers 26a, 26b, and 26c, the humidified water controllers 28a, 28b, and 28c, the set dew point temperature controller 51, and the dew point temperature controller 45. The temperatures ta, tb, tc of the inner chambers 2a, 2b and the clean room 1c of 1a, 1b, the humidity ha, hb of the inner rooms 2a, 2b of the clean room 1a, 1b and the clean room 1c detected by the humidity detectors 27a, 27b, 27c, hc, data other than the air dew point temperature Hr detected by the dew point temperature detector 44 in the air conditioner 29 is given from a host controller (not shown).

  During operation, the chilled water controllers 26a, 26b, and 26c are supplied with temperatures to be maintained in the inner rooms 2a and 2b of the clean rooms 1a and 1b and in the clean room 1c from the host controller (not shown), and set temperatures tao, tbo, and tco. And the temperatures ta and tb of the inner rooms 2a and 2b of the clean rooms 1a and 1b detected by the temperature detectors 25a and 25b, and the temperature tc of the clean room 1c detected by the temperature detector 25c are given. . Thus, the subtraction unit 52 of the chilled water controllers 26a, 26b, and 26c obtains the temperature deviations Δta, Δtb, and Δtc by taking the differences between the detected temperatures ta, tb, and tc and the set temperatures tao, tbo, and tco. The obtained temperature deviations Δta, Δtb, Δtc are given to the PID control unit 53 of the cold water controllers 26a, 26b, 26c.

  In the PID control unit 53, the temperature deviations Δta, Δtb, Δtc are subjected to proportional-integral-derivative calculation to obtain valve opening commands Va, Vb, Vc, and the valve opening commands Va, Vb, Vc are flow control valves 10a, The flow control valves 10a, 10b, and 10c are controlled to a predetermined opening degree given to 10b and 10c. For this reason, the flow rate of the cold water supplied to the cooling coils 9a, 9b, 9c is controlled, and the temperatures (room temperature) of the inner rooms 2a, 2b and the clean room 1c of the clean rooms 1a, 1b are controlled to a predetermined temperature. Further, the valve opening degree commands Va, Vb, Vc obtained by the PID control unit 53 are simultaneously given to the set dew point temperature calculation unit 54 of the set dew point temperature controller 51 (see FIG. 2).

  Further, during operation, the humidifying water controllers 28a, 28b, 28c are supplied with humidity to be maintained in the inner rooms 2a, 2b of the clean rooms 1a, 1b and the clean room 1c from the host controller (not shown). , Hco, and the humidity ha, hb of the inner rooms 2a, b of the clean rooms 1a, 1b detected by the humidity detectors 27a, 27b and the humidity hc of the clean room 1c are given. Thus, the subtraction unit 55 of the humidifying water controllers 28a, 28b, 28c obtains the humidity deviations Δha, Δhb, Δhc by taking the difference between the detected humidity ha, hb, hc and the set humidity hao, hbo, hco, The obtained humidity deviations Δha, Δhb, Δhc are given to the PID control unit 56 of the humidifying water controllers 28a, 28b, 28c.

  In the PID control unit 56, the humidity deviations Δha, Δhb, Δhc are subjected to proportional-integral-derivative calculation to obtain the valve opening commands Wa, Wb, Wc, and the valve opening commands Wa, Wb, Wc are used as the spray amount control valve 16a. , 16b, 16c, the spray amount control valves 16a, 16b, 16c are controlled to a predetermined opening degree. Therefore, the humidified water is supplied from the humidified water pipes 15a, 15b, 15c to the humidified water spray nozzles 13a, 14b, 14c of the humidified water spray nozzles 13a, 13b, 13c, and from the humidified water spray nozzles 13a, 13b, 13c to the clean room 1a. , 1b, 1c and the air circulating in the clean rooms 1a, 1b, 1c is humidified and controlled to a predetermined humidity. Further, the valve opening degree commands Wa, Wb, Wc obtained by the PID control unit 56 are simultaneously given to the set dew point temperature calculation unit 54 of the set dew point temperature controller 51 (see FIG. 2).

  In the set dew point temperature calculation unit 54 of the set dew point temperature controller 51, the set temperatures tao and tbo of the inner rooms 2a and 2b of the clean rooms 1a and 1b and the set temperature tco of the clean room 1c are set. In addition, the set dew point temperature calculation unit 54 of the set dew point temperature controller 51 includes the temperatures ta and tb, which are the room temperatures of the inner rooms 2a and 2b of the clean rooms 1a and 1b, detected by the temperature detectors 25a, 25b and 25c, and the clean room 1c. A temperature tc, which is room temperature, is given, and flow control valve opening setting lower limit values Aau, Abu, Acu of the flow control valves 10a, 10b, 10c are set.

  Further, the set dew point temperature calculation unit 54 of the set dew point temperature controller 51 includes the temperature and humidity control levels La1 and La2 or La3 of the clean rooms 1a and 1b and the clean room 1c, the temperature and humidity control levels Lb1 and Lb2 or Lb3, temperature / humidity control level Lc1 or Lc2 or Lc3 is set, set dew point temperature lower limit value Hspmin, set dew point temperature upper limit value Hspmax, set dew point temperature change amount ΔHsp, and flow control valve opening set value The dead zone Δdif is set. Furthermore, the set dew point temperature calculation unit 54 includes the dead zone temperatures T2difαi and T2difβi of the second most severe temperature / humidity control levels La2, Lb2 and Lc2 of the clean rooms 1a and 1b and the clean room 1c. Dead zone temperatures T3difαi and T3difβi of the third temperature / humidity control levels La3, Lb3, and Lc3 are set. Furthermore, the set dew point temperature calculation unit 54 includes a spray amount control valve opening setting lower limit value Wmin and a spray amount control valve opening setting for each of the spray amount control valves 16a, 16b, and 16c corresponding to the clean rooms 1a, 1b, and 1c. An upper limit value Wmax is set.

  In the set dew point temperature calculation unit 54 of the set dew point temperature controller 51, the valve opening commands Va, Vb, Vc from the PID control unit 53 in the chilled water controllers 26a, 26b, 26c, the inner chambers 2a, 2b of the clean rooms 1a, 1b, and the clean room The set temperatures tao, tbo, tco of 1c, the inner rooms 2a, 2b of the clean rooms 1a, 1b detected by the temperature detectors 25a, 25b, 25c, the temperatures ta, tb, tc of the clean room 1c, and the inner rooms of the clean rooms 1a, 1b 2a, 2b and the temperature / humidity control level La1 or La2 or La3 of the clean room 1c, the temperature / humidity control level Lb1 or Lb2 or Lb3, the temperature / humidity control level Lc1 or Lc2 or Lc3, and the flow rate control valves of the respective flow rate control valves 10a, 10b, 10c Opening setting lower limit values Aau, Abu, Acu, Constant dew point temperature lower limit value Hspmin or set dew point temperature upper limit value Hspmax or set dew point temperature change amount ΔHsp, dead zone Adif of flow control valve opening set value, dead zone temperatures T2, difαi, T2difβi, temperature and humidity control levels La2, Lb2, and Lc2. Air conditioning based on dead zone temperatures T3difαi and T3difβi of control levels La3, Lb3 and Lc3, spray amount control valve opening lower limit Wmin and spray amount control valve opening upper limit Wmax of spray amount control valves 16a, 16b and 16c A set dew point temperature Hsp for determining the amount of steam sprayed from the steam spray nozzle 34 in the steam humidifier 35 of the machine 29 is obtained, and the obtained set dew point temperature Hsp is given to the subtracting unit 57 of the dew point temperature controller 45. . Note that the set dew point temperature Hsp calculated by the set dew point temperature calculating unit 54 differs depending on the temperature and humidity control level. Details of the calculation of the set dew point temperature Hsp will be described later with reference to the flowcharts of FIGS. 3, 4A, 5A, 6, 7A, and 7B.

  In addition to the set dew point temperature Hsp from the set dew point temperature controller 51, the subtraction unit 57 of the dew point temperature controller 45 is humidified by steam detected by the dew point temperature detector 44 on the downstream side of the fan 36 in the air conditioner 29. The dew point temperature Hr of the air is given, and the subtracting unit 57 obtains the set dew point temperature deviation ΔH by taking the difference between the dew point temperature Hr of the air humidified by the steam and the set dew point temperature Hsp, and obtaining the determined setting. The dew point temperature deviation ΔH is given to the PID control unit 58, and the PID control unit 58 performs a proportional integral differential operation on the set dew point temperature deviation ΔH and supplies the steam to the steam humidifier 35 for spraying provided in the steam line 43. A valve opening command Wx of the amount control valve 42 is obtained, and the obtained valve opening command Wx is given to the spray amount control valve 42 of the air conditioner 29, and the opening is adjusted to a predetermined opening. It is. As a result, steam is sprayed from the steam spray nozzle 34 onto the air that has been supercooled by the cooling and dehumidifying coil 32 and reheated by the heating coil 33, and is humidified until the air reaches a predetermined dew point temperature. At this time, the dry-bulb temperature of the air downstream of the steam humidifier 35 of the air conditioner 29 is lower than the temperature of the circulating air return air from the air flow paths 4a, 4b, 4c of the clean rooms 1a, 1b, 1c. .

  Next, the procedure for calculating the set dew point temperature Hsp in the set dew point temperature calculation unit 54 of the set dew point temperature controller 51 is shown in FIGS. 3, 4 (a), 5 (a), 6, 7a, and 7b. This will be described with reference to FIG. In calculating the set dew point temperature Hsp, the weighting of the opening according to the temperature and humidity control levels La1, Lb1, Lc1, La2, Lb2, Lc2, La3, Lb3, and Lc3 of the flow rate control valves 10a, 10b, and 10c is also considered. Is done. That is, in the case of the temperature and humidity control levels La1, Lb1, and Lc1, the lower limit of the opening of the flow control valves 10a, 10b, and 10c is, for example, 10% as described above, and the controllability of the flow control valves 10a, 10b, and 10c is increased. The set dew point temperature Hsp is determined by the opening degree of the flow control valves 10a, 10b, 10c. In the case of the temperature and humidity control levels La2, Lb2, and Lc2, the lower limit of the opening of the flow rate control valves 10a, 10b, and 10c is 0%, and the set dew point temperature Hsp is the temperature of the inner chambers 2a and 2b of the clean rooms 1a and 1b or the clean room. Determined by the temperature of 1c. In the case of the temperature / humidity control levels La3, Lb3, and Lc3, the lower limit of the opening of the flow rate control valves 10a, 10b, and 10c is 0%, and the set dew point temperature Hsp is the same as in the case of the temperature and humidity control levels La2, Lb2, and Lc2. The temperature is determined by the temperatures of the inner rooms 2a and 2b of the clean rooms 1a and 1b and the temperature of the clean room 1c.

Thus, in the case of the temperature / humidity control levels La1, Lb1, and Lc1, the temperature control width is as severe as 23 ° C. ± 0.5 ° C. Therefore, the lower limit of the opening considering the controllability of the valve, for example, 10% It is given as a weight according to the humidity control level. In the case of the temperature / humidity control levels La2, Lb2, Lc2 and the temperature / humidity control levels La3, Lb3, Lc3, the temperature control width is 23 ° C. ± 1 ° C., 23 ° C. ± Since it is as gentle as 2 ° C., the lower limit of the opening degree 0% is given as a weight according to the temperature and humidity control level without considering the controllability of the valve. Thus, in the case of the temperature and humidity control levels La1, Lb1, and Lc1, an opening lower limit value that takes into account the controllability of the flow rate control valves 10a, 10b, and 10c, for example, 10%, is given, and the flow rate control valves 10a, 10b, By using the opening degree of 10c as a control signal, the flow rate control valves 10a, 10b, 10c are compared with the other temperature / humidity control levels La2, Lb2, Lc2 and the temperature / humidity control levels La3, Lb3, Lc3. It is clear that weighting is given to the control signal of the opening degree. ′

  The case where the set dew point temperature Hsp of the air conditioner 29 is calculated according to the flowcharts of FIGS. 3, 4 (a), 5 (a), 6, 7a, and 7b will be described. 2a, 2b, clean room 1c, temperature / humidity control levels given by the host computer La1, Lb1, Lc1, La2, Lb2, Lc2, La3, Lb3, Lc3 to clean room 1a, 1b inner rooms 2a, 2b, clean room 1c, a predetermined calculation is sequentially performed for the opening degree and the room temperature of the flow control valves 10a, 10b, and 10c according to the procedure described below, and the present set dew point temperature Hsp is determined based on a comprehensive judgment from the results. Then, in accordance with the same procedure as described above, the inner rooms 2a and 2b of the clean rooms 1a and 1b, the cleanle The next calculation is sequentially completed for all the rooms in the room 1c, and the next set dew point temperature Hsp is determined based on a comprehensive judgment from those results. Thereafter, the same procedure is used to perform a fixed time interval (for example, every 10 minutes). ) To determine the set dew point temperature Hsp at that time. In the following description of FIGS. 2, 4A, 5A, 6, 7A, and 7B, the same symbols as those shown in FIG. 2 have the same significance.

  When the operation of each device is started, the set dew point temperature controller 51 sends the temperature / humidity control level La1 or La2 or the internal room 2a of the clean room 1a which is the first room from the host computer. Any one of La3 is given and the temperature and humidity control level Lb1, Lb2 or Lb3 is given for the inner room 2b of the clean room 1b, i = second room, and i = third room. For the clean room 1c, either the temperature / humidity control level Lc1, Lc2 or Lc3 is given (S1 in FIG. 3).

  For example, when the temperature / humidity control level of the inner room 2a of the clean room 1a is the most severe temperature / humidity control level La1, first, in the i-th study, the opening degree Apvi of the flow control valve 10a is examined * 1 Is performed (S2 in FIG. 4A). That is, in the examination * 1, it is examined whether the opening degree Apvi of the flow control valve 10a is actually Apvi> Aau + Adif. If YES, in order to lower the set dew point temperature Hsp, the individual determination command yi = 2 Is output. In the case of NO, examination * 2 of the opening degree Apvi of the flow control valve 10a that is actually open is performed (S3 in FIG. 4A). That is, in the examination * 2, it is examined whether or not the opening degree Apvi of the flow control valve 10a is actually Apvi> Aau. If YES, in order to maintain the set dew point temperature Hsp, the individual determination command yi = 1 is output. In the case of NO, in order to raise the set dew point temperature Hsp, an individual determination command yi = 0 is output. In the case of the temperature / humidity control level La1, control is performed in consideration of the actual opening of the flow control valve 10a, the flow control valve opening setting lower limit Aau and the dead zone Adif of the flow control valve opening setting value. Means that the opening degree of the flow control valve 10a is weighted. Here, the case where the calculation is performed with the temperature and humidity control level of the inner room 2a of the clean room 1a set to the strictest La1, but the temperature and humidity control levels of the inner room 2b of the clean room 1b and the clean room 1c are The same calculation is performed in the case of the strictest Lb1 and Lc1. Further, in the case of the temperature / humidity control level La1, as is apparent from the step of S2, room for opening of the flow rate control valves 10a, 10b, 10c is left. The calculation results shown in the flowchart of FIG. 4A are summarized as shown in the table of FIG.

  When the temperature / humidity control level of the inner room 2a of the clean room 1a is the second most severe temperature / humidity control level La2, for example, first, the actual temperature of the inner room 2a of the clean room 1a detected in the i-th examination (room temperature (FIG. 1 2) Tpvi is examined * 3 (S4 in FIG. 5A). That is, in the examination * 3, it is examined whether or not the actual temperature Tpvi of the inner room 2a of the clean room 1a is Tpvi> Tio−T2difαi. In the case of YES, the set dew point temperature Hsp is lowered. Is output. In the case of NO, examination * 4 of the actual temperature Tpvi of the inner chamber 2a of the clean room 1a is performed (S5 in FIG. 5A). That is, in the examination * 4, it is examined whether or not the actual temperature Tpvi of the inner room 2a of the clean room 1a is Tpvi> Tio−T2difβi, and in the case of YES, in order to maintain the set dew point temperature Hsp, the individual determination command yi = 1 Is output. In the case of NO, in order to raise the set dew point temperature Hsp, an individual determination command yi = 0 is output. In the case of the temperature / humidity control level La2, the opening degree of the flow control valves 10a, 10b, 10c is allowed to be 0%. In FIG. 5A, the case where the i-th examination is performed on the inner room 2a of the clean room 1a is described. However, in fact, Tio is the inner room 2a, 2b or the set temperature of the clean room 1c, which corresponds to any of the set temperatures tao, tbo, tco. The calculation results shown in the flowchart of FIG. 5A are summarized as shown in the table of FIG.

  When the temperature / humidity control level of the inner room 2a of the clean room 1a is the third severest (the loosest) temperature / humidity control level La3, for example, first, the temperature of the inner room 2a of the clean room 1a detected in the i-th examination (room temperature ( (Corresponding to ta in FIGS. 1 and 2)) Tpvi is examined * 5 (S6 in FIG. 6). That is, in the examination * 5, it is examined whether or not the actual temperature Tpvi of the inner room 2a of the clean room 1a is Tpvi> Tio−T3difαi. If YES, the set dew point temperature Hsp is lowered. Is output. In the case of NO, examination * 6 of the actual temperature Tpvi of the inner chamber 2a of the clean room 1a is performed (S7 in FIG. 6). That is, in the examination * 6, it is examined whether or not the actual temperature Tpvi of the inner room 2a of the clean room 1a is Tpvi> Tio−T3difβi. If YES, the set dew point temperature Hsp is maintained. Is output. In the case of NO, in order to raise the set dew point temperature Hsp, an individual determination command yi = 0 is output. In the case of the temperature and humidity control level La3, only the numerical value of the dead zone temperature is different from the temperature and humidity control level La2. In FIG. 6, the i-th study is described for the inner room 2a of the clean room 1a, but in fact, Tio is the inner room 2a, 2b of the clean room 1a, 1b at the time of the i-th study or the clean room. The set temperature of 1c corresponds to any of the set temperatures tao, tbo, and tco. Further, when the temperature and humidity control levels of the inner rooms 2b and 2c of the clean rooms 1b and 1c and the clean room 1c are Lb2, Lc2, Lb3 and Lc3, calculation is performed as shown in FIGS. 4a, 5a and 6 described above. The calculation results shown in the flowchart of FIG. 6 are summarized as shown in the table of FIG.

  Individual determination commands yi obtained based on the temperature and humidity control levels La1, Lb1, Lc1, La2, Lb2, Lc2, La3, Lb3, Lc3, the openings of the flow control valves 10a, 10b, 10c, and the room temperature ta, tb, tc. = 0, 1, 2 are accumulated as shown in FIG. 7a for comprehensive judgment. That is, for example, the comprehensive judgment command Yi = Y (i−1) × yi for the inner room 2a of the i-th clean room 1a. Y (i-1) is the (i-1) th comprehensive judgment command. Thus, the data is sequentially stored in the order of i = 1, 2, 3,... N with the data of the clean room 1a, the data of the clean room 1b, the data of the clean room 1c, and i = N (S8 in FIG. 7a). If i = N (N is the total number for all rooms, and in this example, the interior rooms 2a and 2b of the clean rooms 1a and 1b and the clean room 1c in total 3 rooms) is NO Are not yet obtained for the individual judgment command yi of all the rooms (clean rooms 1a and 1b, 2a and 2b, clean room 1c), and hence the comprehensive judgment command Yi = Y (i-1) × yi. Returning to S1 of FIG. 3 in order to obtain the individual determination command y (i + 1) of the room, for example, for the inner room 2b of the next clean room 1b, calculation is performed in the same procedure as the inner room 2a of the clean room 1a, The Individual decision direction yi inner chamber 2b of Nrumu 1b, clean room 1a by extension, overall judgment command Yi = Y (i-1) of the sum of 1b × yi is obtained.

  Further, if i = N is NO in S8, the individual judgment command yi for the next room, the clean room 1c, and the total judgment command Yi for the total of the clean rooms 1a, 1b and the clean room 1c are performed as described above. = Y (i-1) * yi is obtained. If i = N is YES in S8, a comprehensive judgment command Yi = Y (i−1) × yi based on the individual judgment commands yi of all the rooms (three rooms) is obtained, and the process proceeds to the next step. Then, as shown in S9 of FIG. 7a, the final determination command Y for determining whether to increase, maintain or decrease the current set dew point temperature Hsp is determined as 0, 1 or 2 or more.

  Thus, when the final judgment command Y = 0 in S9 of FIG. 7a, the upper limit value * 7 for the operation of the set dew point temperature Hsp on the downstream side of the fan 36 outlet of the air conditioner 29 is examined (7). S10 in FIG. 7a). That is, whether or not Hsp (j) <Hspmax is examined in S10. If YES, in S11 of FIG. 7b, the valve opening commands Wa, Wb, and Wc of the spray amount control valves 16a, 16b, and 16c are examined * 8. Is done. In the examination * 8, it is examined whether or not the valve opening commands Wa, Wb, Wc> Wmin of the spray amount control valves 16a, 16b, 16c in the clean rooms 1a, 1b, 1c. If YES, the set dew point temperature Hsp (j) Is increased by Hsp (j) = Hsp (j−1) + ΔHsp. Here, Wmin is the spray amount control valve opening setting lower limit value, the set dew point temperature Hsp (j) is the same as the set dew point temperature Hsp in FIG. 2, and Hsp (j-1) is the previous ( J-1) The set dew point temperature, ΔHsp obtained for the second time, is the dew point temperature change to be changed this time.

  When the final determination command Y = 1 in S9, as shown in FIG. 7b, the set dew point temperature Hsp (j) is the same as the previous set dew point temperature Hsp (j-1), and the set dew point temperature Hsp is maintained as it is. become. That is, Hsp (j) = Hsp (j-1).

  When the final determination command Y ≧ 2 in S9 of FIG. 7a, the lower limit value in the jth operation of the set dew point temperature Hsp on the downstream side of the fan 36 outlet of the air conditioner 29 is examined * 9 (S12 of FIG. 7a). ). That is, whether or not Hsp (j)> Hspmin is examined in S12. If YES, the valve opening commands Wa, Wb, and Wc of the spray amount control valves 16a, 16b, and 16c are examined in S13 of FIG. Is done. Examination * 10 examines whether or not the valve opening commands Wa, Wb, Wc <Wmax of the spray amount control valves 16a, 16b, 16c in the clean rooms 1a, 1b, 1c. If YES, the set dew point temperature Hsp (j) Is reduced by Hsp (j) = Hsp (j−1) −ΔHsp.

  When S10, S11, S12, and S13 are NO, the set dew point temperature Hsp (j) is the same as the previous set dew point temperature Hsp (j-1), and Hsp (j) = Hsp, as in the case of Y = 1. (J-1), and the set dew point temperature Hsp is maintained as it is.

  Note that when calculating the comprehensive judgment command Yi as Y1, the first term Y (i-1) on the left side of the equation requires Y (1-1), that is, Y0. Y0 is set to Y0 = 1. The implication is that the current set dew point temperature is maintained as it is. The characteristic of this general judgment command Yi = Y (i−1) × yi is that the individual judgment command yi of each room uses 0, 1 and 2, and these are multiplied to obtain at least one individual judgment command. If yi is 0, that is, if there is one room where the set dew point temperature is too low, the overall judgment command is also 0 and a command to raise the set dew point temperature can be issued, and if the individual judgment command yi for all the rooms is 1. That is, when the current set dew point temperature is suitable for all the rooms, the comprehensive judgment command Yi is also 1 and the set temperature dew point degree is maintained, otherwise the comprehensive judgment command Yi is a solution of 2 or more and the set dew point is set. The operation to lower the temperature is surely possible.

  When the clean room is the inner room 2a of the clean room 1a, the inner room 2b of the clean room 1b, and the three rooms of the clean room 1c as in the first embodiment, as a result of calculation according to the above procedure, specifically, the final judgment command Y is It becomes as follows. That is, i = 1 (in the case of one room in the clean room 1a) Y1 = Y0 × y1 = 1 × y1 (in this case, Y0 = 1, y1 is an individual determination command for the clean room 1a), i = 2 (clean room) Comprehensive judgment command Y2 = Y1 * y2 = Y0 * y1 * y2 = 1 * y1 * y2 (in this case, y2 is an individual judgment command for the inner room 2b of the clean room 1b), i = 3 (in the case of three rooms of clean rooms 1a, 1b, 1c) Y3 = Y2 * y3 = Y0 * y1 * y2 * y3 = 1 * y1 * y2 * y3 = y1 * y2 * y3 The comprehensive judgment command Y3 becomes the final judgment command Y. Therefore, Y = y1 × y2 × y3. The reason why the final determination command Y is 2 or more is, for example, when the individual determination command yi is y1 = y2 = y3 = 2 and the comprehensive determination command Y3 = 8.

When the final determination command Y = 0 in S9, as described above, is the jth (current) set dew point temperature Hsp (j) and the upper limit value Hspmax of the operation set dew point temperature Hsp (j) <Hspmax? (S10), if YES, it is examined whether Wa, Wb, Wc> Wmin (S11), and if the final judgment command Y ≧ 2 in S9, the jth (current) set dew point temperature It is examined whether or not the lower limit value Hspmin in operation of Hsp (j) and the set dew point temperature is Hsp (j)> Hspmin (S12). If YES, it is examined whether Wa, Wb, Wc <Wmax. (S13).

  Thus, if Y = 0, Hsp (j) <Hspmax is YES in S10, and Wa, Wb, Wc> Wmin is YES in S11, the individual determination command yi is 0 even in one room. And the set dew point temperature Hsp (j) is lower than the upper limit value Hspmax of the set dew point temperature (humidity is low). For this reason, the amount of humidified water sprayed from the humidifying water sprayers 14a, 14b, 14c increases so that the corresponding chamber can maintain the humidity, and there is a risk of overcooling due to evaporation of the sprayed water. That is, the dew point temperature on the downstream side of the fan 36 of the air conditioner 29 must be increased. For this reason, the set dew point temperature Hsp is revised to, for example, Hsp (j) = Hsp (j−1) + ΔHsp (for example, the dew point temperature is increased by 0.1 ° C.).

  That is, in the case where S10 and S11 are YES, the current set dew point temperature Hsp (j) is higher by ΔHsp than the previous set dew point temperature Hsp (j−1) (10 minutes before in the illustrated example), and the air conditioner If the amount of steam sprayed is increased in 29 steam humidifiers 35, the dew point temperature of the air will be increased from the previous time. This is because any of the inner rooms 2a and 2b and the clean room 1c of the clean rooms 1a and 1b may be overcooled, so that the room is prevented from being overcooled and the humidity of the room is secured. . The current set dew point temperature Hsp (j) and the previous set dew point temperature Hsp (j-1) are both displayed as Hsp in FIGS. 1 and 2 (the same applies to the following description). Note that j is a time term that changes at a constant time interval (10 minutes in the illustrated example) with j = 1, 2,... J. In the illustrated example, as described above, for example, the set dew point is set at 10 minute intervals. The temperature Hsp will be changed. Specifically, for example, when J = 1, the above-described calculation of the three rooms (i = 1 to 3) of the clean rooms 1a and 1b and the clean room 1c (i = 1 to 3) is performed all at once, and the comprehensive judgment command Y is issued. After 10 minutes, next time J = 2, the calculation of the inner rooms 2a and 2b of the clean room 1a and 1b and the three rooms (i = 1 to 3) of the clean room 1c are performed all at once in the same manner as described above, and the comprehensive judgment command Y The calculation is repeated in the same manner.

  If the final determination command Y = 1 in S9, or if Hsp (j) <Hspmax is NO in S10, if Wa, Wb, Wc> Wmin is NO in S11, then Hsp (j)> Hspmin in S12. In the case of NO, if Wa, Wb, Wc <Wmax is NO in S13, the set dew point temperature Hsp is equal to the previous ((j−1) th) set dew point temperature, and Hsp (j) = Hsp (j−1) ) Is as described above. That is, the current set dew point temperature Hsp (j) is equal to the previous set dew point temperature Hsp (j−1) (10 minutes before in the illustrated example), and the amount of steam sprayed from the steam humidifier 35 of the air conditioner 29. Maintains the current spraying amount and does not change it. This is because the flow control valves 10a, 10b, and 10c are at the optimum valve opening, or the inner chambers 2a and 2b of the clean rooms 1a and 1b and the clean room 1c are at the optimum temperature and humidity.

  If the final determination command Y ≧ 2 in S9 and Hsp (j)> Hspmin is YES in S12, and Wa, Wb, Wc <Wmax is YES in S13, the set dew point temperature Hsp is changed to Hsp (j) = Hsp. (J-1) −ΔHsp, which is lower than the previously set dew point temperature by ΔHsp (for example, 0.1 ° C.). That is, the current set dew point temperature Hsp (j) is lower than the previous set dew point temperature Hsp (j−1) (in the illustrated example, 10 minutes before), and the amount of steam sprayed in the steam humidifier 35 of the air conditioner 29. Lowers the dew point temperature by less than the amount sprayed so far. This is a state in which the valve openings of the flow control valves 10a, 10b, and 10c are large and the spray amount control valves 16a, 16b, and 16c are large, or the inner chambers 2a and 2b and the clean room 1c of the clean rooms 1a and 1b are set. This is because the temperature is higher than the temperatures tao, tbo, and tco.

  Of the set dew point temperature Hsp (j) obtained as described above, a predetermined set dew point temperature Hsp (j corresponding to the temperature and humidity control levels La1, La2, La3, Lb1, Lb2, Lb3, Lc1, Lc2, and Lc3. ) Is output from the set dew point temperature controller 51 as the set dew point temperature Hsp and is given to the dew point temperature controller 45. The operation when the set dew point temperature Hsp is given to the dew point temperature controller 45 is as described above. In addition, it is determined whether or not the system is stopped (S14 in FIG. 7b). If YES, the operation is terminated, and if NO, the next order (after 10 minutes in this example) The process proceeds to S1 in FIG. 3 again to start calculation for the room 2a of the clean room 1a and continue the control.

  In the first embodiment, when the heat load in the clean rooms 1a, 1b, and 1c increases, the valve opening commands Va, Vb, and Vc increase, and the opening amounts of the flow control valves 10a, 10b, and 10c increase. Thus, cooling in the cooling coils 9a, 9b, 9c increases. Therefore, in this case, the amount of water sprayed from the humidifying water sprayers 14a, 14b, 14c in the clean rooms 1a, 1b, 1c is increased to increase the cooling due to the evaporation of the water. The humidity in the clean rooms 1a, 1b, 1c also increases due to the spraying. For this reason, in order to keep the humidity in the clean rooms 1a, 1b, and 1c constant, the set dew point temperature Hsp and the spray amount control valve 42 are used to reduce the amount of steam sprayed by the steam humidifier 35 of the air conditioner 29. The valve opening command Wx becomes smaller, the spray amount control valve 42 is throttled, and the steam sprayed from the steam humidifier 35 of the air conditioner 29 is controlled to decrease. For this reason, the amount of water sprayed from the humidifying water sprayers 14a, 14b, 14c increases, and cooling due to water evaporation in the clean rooms 1a, 1b, 1c increases, so the flow control valves 10a, 10b, 10c are throttled. Since the flow rate of cold water is reduced, the consumption of cold water is saved.

  Further, when the thermal load in the clean rooms 1a, 1b, 1c decreases, the valve opening commands Va, Vb, Vc become smaller, the opening of the flow control valves 10a, 10b, 10c is reduced, and the cooling coils 9a, The cooling at 9b and 9c will decrease. However, if the opening degree of the flow control valves 10a, 10b, and 10c is excessively reduced, it is difficult to control the temperature and humidity of the clean rooms 1a, 1b, and 1c satisfactorily. On the other hand, when the amount of humidified water sprayed from the humidifier sprayers 14a, 14b, 14c in the clean rooms 1a, 1b, 1c is decreased to reduce cooling due to water evaporation, the clean rooms 1a, 1b, 1c are sprayed with humidified water. The humidity inside is low. For this reason, in order to keep the humidity in the clean rooms 1a, 1b, and 1c constant, in order to increase the amount of vapor sprayed by the steam humidifier 35 of the air conditioner 29, the set dew point temperature Hsp and the spray amount control valve 42 are increased. Since the valve opening command Wx becomes larger and the spray amount control valve 42 is opened, the steam sprayed from the steam humidifier 35 of the air conditioner 29 is controlled to increase. For this reason, control is performed so that the amount of humidified water sprayed from the humidifying water sprayers 14a, 14b, 14c for setting the humidity of the clean rooms 1a, 1b, 1c to a predetermined value is reduced, and the clean rooms 1a, 1b, 1c Since cooling due to water evaporation is reduced, the flow control valves 10a, 10b, and 10c are opened.

  In the first embodiment, since the set dew point temperature Hsp of the air conditioner 29 can be changed, the flow rate control valves 10a, 10b for controlling the flow rate of cold water to the cooling coils 9a, 9b, 9c for cooling the air in the clean rooms 1a, 1b, 1c, The set dew point temperature Hsp in the air conditioner 29 can be determined based on the information of the valve opening commands Va, Vb, and Vc of 10c. That is, when the opening degree of the flow control valves 10a, 10b, 10c is smaller than a predetermined value even in one of the clean rooms 1a, 1b, 1c, the set dew point temperature Hsp is raised and the flow control of the clean rooms 1a, 1b, 1c is performed. When the opening degree of the valves 10a, 10b, 10c is larger than a predetermined value, the set dew point temperature Hsp of the air conditioner 29 is lowered, and the opening degree of the flow control valves 10a, 10b, 10c in all the clean rooms 1a, 1b, 1c. In the case where the value is intermediate between the case where the value is small and the case where the value is large, the set dew point temperature Hsp of the air conditioner 29 is not changed.

  From the above, in Example 1, the heat load can be known from the opening information of the flow control valves 10a, 10b, 10c corresponding to the clean rooms 1a, 1b, 1c, and the heat load of the clean rooms 1a, 1b, 1c. When the heat load is equal to or higher than a predetermined value even in the room with the smallest load, the set dew point temperature Hsp is lowered, so that energy saving is achieved for the heating and humidification energy of the air conditioner 29. Can be planned. Further, this reduces the amount of steam supplied from the air conditioner 29 to the clean rooms 1a, 1b, 1c. Therefore, to keep the humidity of the clean rooms 1a, 1b, 1c at a predetermined value, the clean rooms 1a, 1b, 1c Since the amount of water sprayed from the humidifying water sprayers 14a, 14b, 14c increases, and the amount of cooling of the clean rooms 1a, 1b, 1c increases due to evaporation of the sprayed water, the clean room 1a, 1b, 1c side Cooling with cold water can be reduced to save energy by cooling with cold water, and the accuracy of temperature control of the clean rooms 1a, 1b, and 1c can be improved.

  Next, the dead zone Adif of the flow control valve opening set value described above will be described with reference to FIG. 8. In FIG. 8, the horizontal axis represents the actual opening Apvi of the flow control valves 10a, 10b, 10c (= valve opening command Va). , Vb, Vc), and the vertical axis indicates the individual determination command yi of the set dew point temperature Hsp. Thus, in the flowchart of FIG. 4A, when S2 is YES (Apvi> Aau + Adif), an individual determination command yi = 2 is indicated. In this case, the set dew point temperature Hsp is lowered, for example, the flow rate The valve opening command Va of the control valve 10a corresponds to a range from “flow control valve opening setting lower limit value Aau + insensitive zone Adif of flow control valve opening setting value” to valve opening 100% (in FIG. reference).

  In the flowchart of FIG. 4A, when S2 is NO (not Apvi> Aau + Adif) and S3 is YES (Avi> Aau), the individual determination command yi = 1 is indicated. In this case, the set dew point temperature Hsp is maintained as it is. For example, the valve opening command Va of the flow control valve 10a is the flow control valve opening setting lower limit value Aau, “flow control valve opening setting lower limit value Aau + dead zone Adif of the flow control valve opening setting value”. (See line opening in FIG. 8). This range of line B is called the dead zone Adif of the flow control valve opening set value, and when the opening of the flow control valves 10a, 10b, 10c is between the lines B, the set dew point temperature Hsp is maintained. Become.

  In the flowchart of FIG. 4A, when S2 is NO (not Apvi> Aau + Adif) and S3 is NO (not Avi> Aau), an individual determination command yi = 0 is indicated. In this case, the set dew point temperature Hsp For example, the valve opening command Va of the flow control valve 10a corresponds to a range between the fully closed state (0%) and the flow control valve opening setting lower limit value Aau (see the line C in FIG. 8). The same applies to the opening degree Apvi (= valve opening degree commands Vb, Vc) of the flow control valves 10b, 10c.

  Next, the dead zone temperature differences T2difαi, T2difβi, T3difαi, and T3difβi described above will be described with reference to FIG. 9. In FIG. 9, the horizontal axis represents the temperature Tpvi (= room temperature ta, room temperature ta, tb, tc), the vertical axis represents the set dew point temperature individual determination command yi. Thus, in the flowchart of FIG. 5A, if S4 is YES (Tpvi> Tio-T2difαi (or Tpvi> Tio-T3difαi)), the temperature of the inner rooms 2a, 2b of the clean rooms 1a, 1b or the clean room 1c. Since Tpvi is high, the individual determination command yi = 2, and the set dew point temperature Hsp is lowered (see the line D in FIG. 9).

  In the flowchart of FIG. 5A, S4 is NO (Tpvi> Tio-T2difαi (or Tpvi> Tio-T3difαi)) and S5 is YES (Tpvi> Tio-T2difβi (or Tpvi> Tio-T3difβi)). In this case, the individual determination command yi = 1, and the temperature Tpvi of the inner rooms 2a, 2b of the clean rooms 1a, 1b or the clean room 1c is an appropriate temperature, so that the set dew point temperature Hsp is maintained (see the line E in FIG. 9). ). Thus, when the temperature Tpvi is between Tio-T2difαi and Tio-T2difβi (or Tspi-T3difαi and Tspi-T3difβi), the temperatures ta and tb of the inner rooms 2a and 2b of the clean rooms 1a and 1b and the clean room 1c , Tc changes, the set dew point temperature Hsp is maintained without change (see line E in FIG. 9). The T2difαi and T2difβi are referred to as the dead zone temperature difference of the second chamber having the temperature and humidity control level, and the T3difαi and T3difβi are referred to as the dead zone temperature difference of the third chamber having the temperature and humidity control level.

  In the flowchart of FIG. 5A, when S4 is NO (Tpvi> Tio-T2difαi (or not Tpvi> Tio-T3difαi)), S5 is not NO (Tpvi> Tio-T2difβi (or Tpvi> Tio-T3difβi). Is not))), the individual determination command yi = 0 is indicated, and in this case, the set dew point temperature Hsp is increased (see the line in FIG. 9).

  10 to 15, 16 a, and 16 b are Embodiment 2 of the present invention corresponding to claims 2, 5, 7, and 8. In the figure, the same components as those in FIG. In the description of the second embodiment, the clean rooms 1a, 1b, and 1c are the "air-conditioned spaces" in claims 2, 4, 6, and 7, and the cooling and dehumidifying coil 32 is the "first cooling means" in claim 2, and heating The coil 33 is the “heating means” of claim 2, the steam humidifier 35 is the “steam humidifying means” of claims 2 and 4, and the humidified water sprayers 14 a, 14 b and 14 c are the “water humidifying means” of claims 2 and 4, The cooling coils 9a, 9b, and 9c are “second cooling means” according to claims 2, 4, and 6. Further, the cold water controllers 26a, 26b and 26c are “first means” of claim 4, the humidified water controllers 28a, 28b and 28c are “second means” of claim 4, and the set dew point temperature controller 51 is claim 4. The third means, the dew point temperature controller 45 is the “fourth means” in claim 4. Further, the PID detector 49 is the “fifth means” of claim 6, and the damper opening bias amount calculation unit 65 in the set dew point temperature controller 51 is the “sixth means” of claim 6, the damper opening controller. 62a, 62b and 62c are “seventh means” of claim 6.

  Thus, the feature of the illustrated example is that, like the conventional air conditioning system of FIG. 20, the dampers 47a, 47b, 47c that can be opened and closed by the driving device are provided in the ducts 46a, 46b, 46c in the air conditioning system of FIG. By adjusting the opening degree of the dampers 47a, 47b, 47c, the flow rate of air supplied from the air conditioner 29 to the inner rooms 2a, 2b of the clean rooms 1a, 1b and the clean room 1c is also adjusted. The amount of chilled water supplied to the flow rate control valves 10a, 10b, and 10c is reduced by adjusting the valve opening degree of the flow rate control valves 10a, 10b, and 10c to save energy, and the inner chambers 2a, 2b and the clean room 1c This is to ensure that the chamber pressure can be maintained at a predetermined value.

  That is, the temperature of the air (supply air) introduced from the air conditioner 29 to the inner rooms 2a, 2b and the clean room 1c of the clean room 1a, 1b through the main duct 46, the ducts 46a, 46b, 46c is about 20 ° C. at the maximum. is there. In addition, the circulating air return air passing through the air flow paths 4a and 4b of the inner chambers 2a and 2b of the clean rooms 1a and 1b and the air flow path 4c of the clean room 1c rises to about 23 ° C. or more in a room with a large heat load. Have been. Therefore, it is preferable to use air at 20 ° C. and a temperature lower than the circulating air return air even after being reheated by the heating coil 33 of the air conditioner 29. For this purpose, the flow control valves 10a and 1b are used. In addition to the valve opening of 10c, it is desirable to control the flow control valve 42 of the steam line 43 for supplying steam to the steam humidifier 35 in consideration of the opening of the dampers 47a, 47b, 47c. is there.

  10, the pressure detector 48 and the PID calculator 49 for detecting the pressure (room pressure) Pa of the inner chamber 2a in the clean room 1a are provided as in the conventional air conditioning system shown in FIG. However, the control system is different from the air conditioning system of FIG. Details of the PID calculator 49, the set dew point temperature controller 51, and the damper opening controllers 62a, 62b, and 62c are shown in FIG. In the following description, because the figure is complicated, there are symbols shown only in either of FIGS. 10 and 12, but actually, it is necessary for both of the systems in FIGS. 10 and 12. It is. Each set data is given from a host controller (not shown). In FIG. 12, for simplification of the drawing, three damper opening controllers 62a, 62b, and 62c are shown as one unit, but in the illustrated example, there are actually three units.

  As shown in FIG. 12, the PID computing unit 49 is a subtractor 63 that obtains a pressure deviation ΔP that is a difference between the pressure Pa of the inner chamber 2a given from the pressure detector 48 and the set pressure Po of the set inner chamber 2a. And a PID controller 64 that obtains a damper PID opening Dpid by performing a proportional integral differential operation on the pressure deviation ΔP obtained by the subtractor 63. As shown in FIG. 12, in the second embodiment, the set dew point temperature controller 51 includes a damper opening bias amount calculation unit 65 in addition to the set dew point temperature calculation unit 54 shown in FIG. Thus, the damper opening bias amount calculator 65 of the set dew point temperature controller 51 includes the damper PID opening Dpid from the PID controller 64 in the PID calculator 49 and the damper opening of the flow control valves 10a, 10b, 10c. The flow control valve opening setting lower limit values Bau, Bbu, Bcu used in the degree calculation, the dead zones Badif, Bbdif, Bcdif of the flow control valve opening setting values, and the valve opening commands Va of the flow control valves 10a, 10b, 10c. , Vb, Vc, damper opening upper limit value Do of dampers 47a, 47b, 47cc, damper opening bias amount upper limit value Dbmax, damper opening bias amount lower limit value Dbmin, and damper opening bias amount change amount Db are set. You can get it.

  In the damper opening bias amount calculation unit 65 of the set dew point temperature controller 51, the damper PID opening Dpid given from the PID control unit 64 of the PID calculator 49, the set flow control valve opening setting lower limit values Bau, Bbu, Bcu, dead zone of flow control valve opening set value Badif, Bbdif, Bcdif, valve opening commands Va, Vb, Vc of flow control valves 10a, 10b, 10c, damper opening upper limit value Do, damper opening bias amount upper limit value The damper opening bias amounts Dbia, Dbib, Dbic are calculated from Dbmax, the damper opening bias amount lower limit Dbmin, and the damper opening bias amount change amount ΔDb, and the calculated damper opening bias amounts Dbia, Dbib, Dbic are the damper opening amounts. The controller 62a, 62b, 62c can be given to the damper opening calculation unit 66.Further, the damper PID opening Dpid from the PID controller 64 of the PID calculator 49 is also supplied to the damper opening calculator 66 of the damper opening controllers 62a, 62b, 62c.

  The damper opening calculation unit 66 of the damper opening controllers 62a, 62b, 62c calculates the damper opening Dca, Dcb, Dcc based on the damper PID opening Dpid and the damper opening bias amounts Dbia, Dbib, Dbic, The calculated damper opening Dca, Dcb, Dcc can be given as a damper opening command to the driving devices of dampers 47a, 47b, 47c provided in the ducts 46a, 46b, 46c.

  A schematic operation procedure in the air conditioning system of the second embodiment is shown in FIG. 11. When the operation is started, the energy saving operation setting ON is first examined (S21). Thus, when the energy saving operation setting is YES, the operation of the subroutine I is started. In the subroutine I, the set dew point temperature is changed for the air (supply air) introduced from the air conditioner 29 to the inner rooms 2a and 2b of the clean room 1a and 1b and the clean room 1c through the main duct 46 and the ducts 46a, 46b and 46c. Do. Specifically, the opening degree of the spray amount control valve 42 provided in the hot water pipeline 41 that supplies steam to the steam humidifier 35 of the air conditioner 29 by looking at the opening degree of the flow control valves 10a, 10b, 10c. And the dew point temperature of the air humidified by the steam humidifier 35 is controlled by adjusting the flow rate of the steam supplied to the steam humidifier 35. As described above, the clean room 1a, This is useful for improving the accuracy of temperature control of 1b and 1c. The procedure is the same as in Example 1.

  Further, after the subroutine I is completed, the process proceeds to the subroutine II. In this case, the flow rate of the air (supply air) distributed to the inner rooms 2a and 2b of the clean rooms 1a and 1b and the clean room 1c is adjusted by the dampers 47a, 47b and 47c. That is, for example, in a room with a high heat load, the circulating air return air is cooled, the opening degree of the flow rate control valves 10a, 10b, 10c is increased, and a large amount of cold water is required. However, the dampers 47a, 47b, 47c If the amount of air (air supply) distributed to the inner chambers 2a, 2b and the clean room 1c of 1a, 1b is increased, the air supply is returned to the circulating air in the air flow paths 4a, 4b, 4c in the clean rooms 1a, 1b, 1c. Since it is lower than the temperature of the air, it can be used to cool the circulating air return air. For this reason, the opening degree of the flow control valves 10a, 10b, and 10c can be reduced, and the flow rate of cold water can be reduced.

  In the subroutine II, for example, whether or not 30 minutes have passed since the subroutine II was started is examined (S22). If YES, the process returns to before the energy saving operation setting ON to prepare for the next energy saving operation setting ON. In the case of NO, the operation of the subroutine II is continued until 30 minutes have passed. Needless to say, this elapsed time is changed depending on the case, but if it is less than 1 minute, hunting may occur, so a minute unit is desirable.

  Next, in the second embodiment, the procedure for obtaining the damper opening degrees Dca, Dcb, Dcc will be described with reference to FIGS. 12 and 13. Here, the operation of the subroutine II is performed. In the following description, the unit of the symbol related to the opening degree of the damper is%. In FIG. 13, the range indicated by Z1 is calculated by the damper opening bias amount calculation unit 65 in the set dew point temperature controller 51 of FIG. 12, and the range indicated by Z2 is the damper opening controller 62a, 62b, The calculation is performed by the damper opening calculation unit 66 at 62c. Further, the same symbols in FIG. 12 and FIG. 13 indicate the same components. Furthermore, the subscript k of each symbol in FIG. 13 collectively indicates that the loop operation is performed in the order of the subscripts a, b, and c of each symbol in FIG.

  During operation, the i-th various data are given at regular time intervals (for example, every 10 minutes). The i-th data includes, for example, the set pressure Po of the inner chamber 2a of the clean room 1a, the pressure Pa of the inner chamber 2a detected by the pressure detector 48, the flow control valve opening setting lower limit values Bau, Bbu, Bcu, and the flow rate control. Dead zone Badif, Bbdif, Bcdif of valve opening set value, valve opening commands Va, Vb, Vc of flow control valves 10a, 10b, 10c, damper opening upper limit Do of dampers 47a, 47b, 47c, damper opening bias There are an amount upper limit value Dbmax, a damper opening bias amount lower limit value Dbmin, and a damper opening bias amount change amount ΔDb (see FIG. 12). Thus, the i-th predetermined operation is performed from these data.

  That is, the set pressure Po of the inner chamber 2a of the clean room 1a is set from the host controller and the pressure Pa of the inner chamber 2a detected by the pressure detector 48 is given to the subtraction unit 63 of the PID calculator 49. Thus, in the subtraction unit 63 of the PID computing unit 49, the difference between the pressure Pa and the set pressure Po is taken to obtain the pressure deviation ΔP, and the obtained pressure deviation ΔP is calculated by the PID control unit 64 in proportional integral differential calculation. Thus, the damper PID opening Dpid is calculated, and the damper PID opening Dpid is given to the damper opening bias amount calculation unit 65 of the set dew point temperature controller 51. At the same time, the damper PID opening Dpid is also given from the PID calculator 49 to the damper opening controllers 62a, 62b, 62c (see FIG. 12).

  Accordingly, the calculation of the range of Z1 in FIG. 13 is performed by the damper opening bias amount calculation unit 65 in the set dew point temperature controller 51 of FIG. 12, and the calculation of the range of Z2 in FIG. 13 is performed by the damper opening controller 62a. , 62b, 62c is performed by the damper opening calculation unit 66.

  In the damper opening bias amount calculation unit 65 of the set dew point temperature controller 51, in addition to the damper PID opening Dpid, the flow control valve opening setting lower limit values Bau, Bbu, Bcu, and the dead zone Badif of the flow control valve opening setting value are set. Bbdif, Bcdif, valve opening commands Va, Vb, Vc of the flow rate control valves 10a, 10b, 10c, damper opening upper limit value Do of the dampers 47a, 47b, 47c, damper opening bias amount upper limit value Dbmax, damper opening bias The amount lower limit value Dbmin and the damper opening bias amount change amount ΔDb are inputted, and the damper opening bias amounts Dbia, Dbib, Dbic are calculated from these data and are given to the damper opening controllers 62a, 62b, 62c ( (See FIG. 12).

  For example, it is examined whether or not the i-th damper PID opening Dpid and the damper opening upper limit value Do are Dpid> Do (S31 in FIG. 13). If YES, priority processing is performed. In other words, in the case of priority processing, the damper opening bias amounts Dbia, Dbib, Dbic are obtained as “previous value + ΔDb”. Here, the priority processing means that when the indicated value of the PID computing unit 49 is large and the PID computing unit 49 requests a large opening from the dampers 47a, 47b, 47c, the positive processing in the clean rooms 1a, 1b, 1c is performed. In order to ensure the pressure, a large amount of air is required in the chamber. Therefore, since it is dangerous to reduce the opening of the dampers 47a, 47b, 47c by the bias and restrict the supply air, processing for increasing the bias in all systems is performed.

  The damper opening bias amounts Dbia, Dbib, Dbic calculated in the priority processing are added to the damper PID opening Dpid, and are calculated as the damper opening Dca or Dcb or Dcc = Dpid + Dbia or Dbib or Dbic. The opening degree of the dampers 47a, 47b, 47c is controlled by Dca, Dcb, Dcc.

When Dpid> Do is NO, individual processing for each of the dampers 47a, 47b, 47c is performed as the loop operation k. k is repeated in a loop of a, b, c corresponding to the inner chambers 2a, 2b of the clean rooms 1a, 1b and the dampers 47a, 47b, 47c of the clean room 1c. That is, if Dpid> Do is NO in S31, it is examined whether or not the valve opening degree command Vk <Bku-Bkdif (S32 in FIG. 13). Here, k means any one of a, b, and c, and is repeated sequentially. Vk is the valve opening command Va, Vb, or Vc in FIG. 12, and Bku is the flow control valve opening setting lower limit value Bau, Bbu, or Bcu in FIG.

  If Vk <Bku−Bkdif is YES in S32, it is examined whether or not the damper opening bias amount Dbik> Dbmin (S33 in FIG. 13). If YES, the damper opening bias amount is “Dbik = previous value. -ΔDb ". Here, k collectively shows the ones circulated in the order of a, b, or c. The same applies to the following description.

  If Vk <Bku−Bkdif is NO in S32, it is examined whether or not the valve opening command Vk <Bku (S34 in FIG. 13). If YES, the damper opening bias amount is “Dbik = previous value”. It becomes.

  If Vk <Bku is NO in S34, it is examined whether or not the damper opening bias amount Dbik <Dbmax (S35 in FIG. 13). If YES, the damper opening bias amount is “Dbik = previous value + ΔDb”. Is calculated as

  If Dbik> Dbmin is NO in S33, and Dbik> Dbmin is NO in S35, the damper opening bias amount is “Dbik = previous value” as in S34 where Vk <Bku is YES.

  After k is sequentially looped with a and b, if k = c, the loop calculation is terminated, and the damper opening Dca or Dcb or Dcc = Dpid + Dbia or Dbib or Dbic is calculated, and the damper opening Dca, The opening degree of the dampers 47a, 47b, 47c is controlled by Dcb, Dcc.

  When the calculation of the damper opening degree Dca, Dcb, Dcc is completed, it is examined whether or not the operation is completed (S36). If YES, the control is completed until the next adjustment of the damper opening degree is performed. , The input of the (i + 1) th data is started, and the above-described procedure is repeated.

  In the second embodiment, the same operational effects as in the first embodiment can be obtained, and the valve opening commands Va, Vb, Vc and the humidified water sprayers 14a, 14b, 14c for the flow control valves 10a, 10b, 10c for cold water are provided. The spray amount control valve of the steam line 43 for supplying steam to the steam humidifier 35 according to the valve opening commands Wa, Wb, Wc of the spray amount control valves 16a, 16b, 16c for controlling the flow rate of the humidified water supplied to the steam 42, the set dew point temperature Hsp is controlled, and the damper opening degrees Dca, Dcb of the dampers 47a, 47b, 47c are controlled by the valve opening commands Va, Vb, Vc of the flow rate control valves 10a, 10b, 10c. , Dcc are controlled to control the flow rate per unit time of the air distributed and supplied to the clean rooms 1a, 1b, 1c. In this case, the temperature of the air distributed and supplied to the clean rooms 1a, 1b, 1c is supercooled by the cooling / dehumidifying coil 32, dehumidified, and heated by the heating coil 33 to 20 ° C. The temperature is lower than the circulating air return air (23 ° C.) of 1a, 1b, and 1c.

  Therefore, in the clean room 1a, 1b, 1c of the clean room 1a, 1b, 1c, the air from the air conditioner 29 introduced into the clean room 1a, 1b, 1c by opening the dampers 47a, 47b, 47c By increasing (supply air), the cooling effect of the clean rooms 1a and 1b and the clean room 1c by the supplied air is improved. Therefore, the flow rate of the cold water is reduced by restricting the valve opening commands Va, Vb, Vc of the flow control valves 10a, 10b, 10c of the system in which the dampers Dca, Dcb, Dcc are increased and the air supplied is increased. It becomes possible to decrease.

  Further, in the clean room 1a, 1b, 1c system having a small heat load, the opening of the dampers 47a, 47b, 47c is reduced and air (air supply) from the air conditioner 29 introduced into the clean rooms 1a, 1b, 1c is supplied. The cooling effect of the clean rooms 1a and 1b and the clean room 1c by the supplied air decreases. For this reason, the valve opening commands Va, Vb, and Vc of the flow control valves 10a, 10b, and 10c of the system in which the damper opening amounts Dca, Dcb, and Dcc are reduced to reduce the supplied air are opened and increased. , The flow rate of cold water increases.

  Accordingly, the air supplied from the air conditioners 29 of the clean rooms 1a, 1b, and 1c is evenly distributed so that the cooling by the air is the same regardless of the magnitude of the heat load. 2, since the amount of air from the air conditioner 29 can be adjusted depending on the size of the heat load, in the system where the heat load is large and the air from the air conditioner 29 is large, the flow control valves 10a, 10b, In the system in which the valve opening commands Va, Vb, Vc of 10c are throttled and the heat load is small and the air from the air conditioner 29 is small, the valve opening commands Va, Vb, 10c of the flow control valves 10a, 10b, 10c Vc is controlled to open. For this reason, even if the heat load is different, the difference in valve opening between the flow control valves 10a, 10b, and 10c of each system is reduced and made uniform, and the uneven distribution of the cooling amount by the cold water can be smoothed and alleviated. .

  As described above, in the clean rooms 1a, 1b, and 1c having a large heat load, the flow rate of the air supplied from the air conditioner 29 increases, so that the air is exhausted from the clean rooms 1a, 1b, and 1c by the fans 23a, 23b, and 23c. The amount of wet air that flows out and the amount of wet air that leaks out of the clean rooms 1a, 1b, and 1c from gaps such as partitions increases (the amount of supplied air and the amount of exhausted air are the same) To control.). On the other hand, the humidity in the clean rooms 1a, 1b, 1c needs to be maintained at a predetermined value (45%), but the humidity of the air supplied from the air conditioner 29 is the circulating air in the clean rooms 1a, 1b, 1c. Since the humidity is lower than the return air, the amount of wet air discharged by the fans 23a, 23b, 23c and the amount of wet air leaking out of the clean rooms 1a, 1b, 1c from gaps such as partitions increase. The humidity in the clean rooms 1a, 1b, 1c is lowered. For this reason, it is necessary to increase the amount of water sprayed from the humidifier sprayers 14a, 14b, 14c of the clean rooms 1a, 1b, 1c, and the opening of the spray amount control valves 16a, 16b, 16c is controlled to increase. . Accordingly, the water sprayed from the spray amount control valves 16a, 16b, and 16c maintains the inside of the clean rooms 1a, 1b, and 1c at a predetermined humidity, and the air cooling amount due to the evaporation of the humidified water increases. Control valve 10a, 10b, 10c is controlled so that the valve opening degree becomes small.

  Similarly, in the clean rooms 1a, 1b, and 1c having a small heat load, the flow rate of air supplied from the air conditioner 29 decreases, so that the wet air exhausted from the clean rooms 1a, 1b, and 1c by the fans 23a, 23b, and 23c. The amount of air outflow and the amount of wet air leaking out of the clean rooms 1a, 1b, 1c through gaps such as partitions are reduced. On the other hand, the humidity in the clean rooms 1a, 1b, 1c needs to be maintained at a predetermined value (45%), but the humidity of the air supplied from the air conditioner 29 is the circulating air in the clean rooms 1a, 1b, 1c. Since the humidity is lower than the return air, if the amount of wet air exhausted by the fans 23a, 23b, 23c and the amount of wet air leaking out of the clean rooms 1a, 1b, 1c from the gaps such as partitions are reduced, The humidity in the clean rooms 1a, 1b, 1c increases. For this reason, it is necessary to reduce the amount of water spray from the humidifier sprayers 14a, 14b, 14c of the clean rooms 1a, 1b, 1c, and the opening of the spray amount control valves 16a, 16b, 16c is controlled to be reduced. . Accordingly, the clean rooms 1a, 1b, and 1c are maintained at a predetermined humidity by a small amount of water sprayed from the spray amount control valves 16a, 16b, and 16c, and the amount of cooling air by evaporation of the humidified water is reduced. As a result, the valve openings of the flow control valves 10a, 10b, and 10c are controlled to increase.

  Therefore, in the second embodiment, similarly to the first embodiment, heating by the steam humidifier 35 and reduction of humidification energy can be achieved, and the amount of water sprayed by the humidifying water sprayers 14a, 14b, and 14c can be reduced. Therefore, the clean rooms 1a, 1b, 1c can be cooled by evaporation of the sprayed water, so that the cooling water flow in the cooling coils 9a, 9b, 9c can be reduced and the cooling energy can be saved. In addition, since the amount of air supplied from the air conditioner 29 is adjusted by the heat load of each of the clean rooms 1a, 1b, and 1c, energy saving can be achieved more efficiently.

  Next, the operation flow of the air conditioning system of the second embodiment shown in FIG. 10 will be described with reference to FIGS. FIGS. 14 and 15 show the subroutine II of the second embodiment by adjusting the openings of the dampers 47a, 47b and 47c corresponding to the thermal loads of the clean rooms 1a, 1b and 1c, so that the clean room 1a, The case where the distribution of the flow rate of the air supplied to 1b and 1c is changed is shown. 14 and 15, the flow rate control valves 10a, 10b, 10c and the spray amount control valve 16a, for controlling the opening degree of all the dampers 47a, 47b, 47c provided in the ducts 46a, 46b, 46c, A specific example is shown in which numerical values specifically describing the opening information of 16b, 16c and dampers 47a, 47b, 47c, the dew point temperature, the indicated value detected by the device, and the like are shown.

  When the dampers 47a, 47b, 47c are provided in the ducts 46a, 46b, 46c for supplying air from the air conditioner 29 to the clean rooms 1a, 1b, 1c, the damper PID opening degree of all the dampers 47a, 47b, 47c is provided. When the Dpid is 50%, the flow rate control valves 10a, 10b, 10c, the spray amount control valves 16a, 16b, 16c and the opening information of the dampers 47a, 47b, 47c, the dew point temperature, or the instructions detected by the device Examples of numerical values that specifically describe values and the like are shown in the conventional air conditioning system of FIG.

  Accordingly, in FIG. 14, since the opening degree of the flow control valve 10c (valve opening degree command Vc = 20%) of the system of the clean room 1c having the smallest heat load among the clean rooms 1a, 1b, 1c is small, the damper is opened. The degree bias amount Dbic is reduced by 10%, and the damper opening degree Dcc = Dpid + Dbic = 50% -10% = 40%. Further, by reducing the damper opening degree Dcc, the flow rate of the air supplied from the air conditioner 29 (temperature and humidity are lower than the circulating air return air in the clean room 1c) is reduced and discharged by the fan 23c. Therefore, the amount of water loss from the circulating air return air in the clean room 1c is also reduced. For this reason, the opening of the spray amount control valve 16c in the humidified water conduit 15c (valve opening command Wc) Is smaller than the opening degree of the spray amount control valves 16a, 16b of the other clean rooms 1a, 1b, and Wc = 10%. Thereby, the humidity adjustment of the clean room 1c is performed satisfactorily. Furthermore, in order to cool the clean room 1c to a predetermined temperature by reducing the opening of the spray amount control valve 16c, the opening of the flow control valve 10c is the air supplied from the air conditioner 29 as shown in FIG. In the case where the damper PID opening Dpid of the ducts 47a, 47b, 47c shown is equally distributed to the clean rooms 1a, 1b, 1c, the opening of the flow control valve 10c is Vc = 10%, whereas Vc = 10%. Increased to 20%.

  In the clean room 1a having a large heat load, the operation is the reverse of the system of the clean rooms 1b and 1c having a smaller heat load than the clean room 1a. Therefore, the variation in the opening degree of the flow control valves 10a, 10b, 10c is a flow control valve in the case where the air supplied from the air conditioner 29 is evenly distributed to the clean rooms 1a, 1b, 1c as shown in FIG. 10a, 10b, and 10c (Va = 70%, Vb = 40%, Vc = 10%), and since the opening of the flow control valve 10c is increased, the air supply from the air conditioner 29 is increased. The set dew point temperature Hsp can be lowered as shown in FIG. 15 in comparison with the case where the air to be distributed is evenly distributed to the clean rooms 1a, 1b, 1c.

  The set dew point temperature Hsp in FIG. 15 is changed as follows. That is, in the control shown in FIG. 14, the valve opening degree command Vc of the flow control valve 10c increases from 10% to 20% shown in FIG. 20, and the flow rate of cold water increases. Thus, in order to reduce the flow rate of the cold water, it is necessary to increase the amount of humidified water sprayed from the humidified water sprayer 14c in the clean room 1c. However, if the amount of humidified water sprayed from the humidifying water sprayer 14c is increased, the humidity of the clean room 1c increases and cannot be maintained at a predetermined humidity. Therefore, the set dew point temperature Hsp is lowered (in FIG. 14, Hsp = 7 ° C., FIG. 15 Hsp = 5 ° C.) The amount of steam sprayed from the steam humidifier 35 in the air conditioner 29 is reduced. Further, the opening degree of the spray amount control valve 42 of the steam humidifier 35 in the air conditioner 29 is reduced (Wx = 80% in FIG. 14 and Wx = 70% in FIG. 15), and humidification by steam is reduced. , 1b, 1c, the opening degree of the spray amount control valves 16a, 16b, 16c of the humidified water sprayers 14a, 14b, 14c in the clean rooms 1a, 1b, 1c is increased (Wa = 30 in FIG. 14). %, Wb = 20%, Wc = 10%, in FIG. 15, Wa = 40%, Wb = 30%, Wc = 20%)

  As a result, the consumption of steam in the steam humidifier 35 in the air conditioner 29 is reduced (in FIG. 14, the valve opening command Wx = 80% of the spray amount control valve 42, and in FIG. 15, the valve opening command Wx = 70). %) And the total chilled water flow rate of the flow rate control valves 10a, 10b, 10c is also reduced (in FIG. 14, Va + Vb + Vc = 70% + 40% + 10% = 120%, in FIG. 15, Va + Vb + Vc = 50% + 30% + 10). % = 90%). Furthermore, these effects are further enhanced by optimizing the distribution of air supplied from the air conditioner 29 and distributed to the clean rooms 1a, 1b, and 1c.

  FIG. 16b shows an air diagram in the case of performing control in the second embodiment in comparison with the conventional air conditioning system shown in FIG. 20 for the clean room 1b. The measurement points of the current air conditioning system are shown as ● I to ● VII in FIG. 16A, and the conventional measurement points are shown as ◆ I to ◆ VII in FIG. The state of each measurement point is plotted in FIG. 16b. In both of the marks ● and ◆, I is the state of the outside air OA introduced into the air conditioner 29, and II is taken into the air conditioner 29. The state of air after being heated by the heating coil 33, III is the state of air after being humidified by the steam humidifier 35, and IV is the air supplied from the air conditioner 29 into the clean room 1b and the air flow of the clean room 1b The state of the air mixed with the circulating air return air circulated from the passage 4b, V is the state of the air after being cooled by the cold water passing through the flow control valve 10b, and VI is humidified by the water from the spray amount control valve 16b At the same time, VII is the state of air after water has evaporated and cooled, and is the state of air discharged to the inner chamber 2b of the clean room 1b and flowing through the air flow path 4b.

  From FIG. 16b, the difference H1 between ◆ III and ● III is the difference in the amount of steam used in the steam humidifier 35 of the air conditioning system of the second embodiment of FIG. 10 and the conventional air conditioning system of FIG. In the case of Example 2, it is clear that the amount of steam used can be reduced by the difference H1 compared to the case of FIG. The difference T1 between V and ◆ V is the difference in the cooling amount due to the evaporation amount of water sprayed in the humidifying water sprayer 14b of the air conditioning system of the second embodiment of FIG. 10 and the conventional air conditioning system of FIG. In the case of Example 2, it is apparent that the amount of cold water used in the cooling coils 9a, 9b, 9c can be reduced by the difference T1 compared to the case of FIG. In the clean rooms 1a and 1b, the air diagram is as shown in FIG. 16b. However, the differences H1 and T1 differ depending on the heat load.

  17, 18 a, and 18 b are Embodiment 3 of the present invention corresponding to claims 3, 4, 6, 6, 7, and 8. In the figure, the same components as those in FIG. In the description of the third embodiment, the clean rooms 1a, 1b, and 1c are “air-conditioned spaces” in claims 3, 5, 6, and 7, and the heating coil 70 is “first heating means” in claims 3 and 5. The washer 67 is “first water humidifying means” of claim 3, the cooling coil 71 is “first cooling means” of claim 3, and the reheating coil 72 is “second heating means” of claim 3, hot water The pipe 75 is the "heat medium pipe" of claim 3, the humidified water sprayers 14a, 14b, 14c are the "second water humidifying means" of claims 3, 5, and the cooling coils 9a, 9b, 9c are the claims 3. 5 and 6 are “second cooling means”. Further, the cold water controllers 26a, 26b, and 26c are “first means” of claim 5, the humidified water controllers 28a, 28b, and 28c are “second means” of claim 5, and the set dew point temperature controller 51 is claim 5. The third means, the dew point temperature controller 45 is the “fourth means” in claim 5. Further, the PID detector 49 is the “fifth means” of claim 6, and the damper opening bias amount calculation unit 65 in the set dew point temperature controller 51 is the “sixth means” of claim 6, the damper opening controller. 62a, 62b and 62c are “seventh means” of claim 6.

  Thus, in the third embodiment, the main difference from the second embodiment is that a washer 67 for water humidification is used in place of the steam humidifier 35 of the second embodiment in order to humidify the air in the air conditioner 29. This is what I did. Further, by using the washer 67, the arrangement of the equipment on the upstream side of the fan 36 of the air conditioner 29 is different from that of the second embodiment. Thus, in the casing 30 of the air conditioner 29, the medium performance filter 68, the preheating coil 69, and the heating coil 70 are sequentially arranged from the upstream side in the air flow direction toward the washer 67 side. Further, a cooling coil 71 and a reheating coil 72 are sequentially arranged on the downstream side of the washer 67 in the air flow direction.

  In the preheating coil 69, the outside air OA introduced into the casing 30 by the suction force of the fan 36 is preheated by hot water supplied from a hot water pipe 74 provided with a flow rate control valve 73 for controlling the flow rate of hot water in the middle. It has come to be able to do. The heating coil 70 can heat the air that has been preheated by the preheating coil 69 and supplied by hot water supplied from a hot water pipe 76 having a flow rate control valve 75 that controls the flow rate of hot water in the middle. It is like that. The flow control valve 75 can be given a valve opening command Wx obtained by the dew point temperature controller 45 based on the set dew point temperature Hsp and the air dew point temperature Hr to control the opening of the flow control valve 75. It is like that.

  The washer 67 can spray the air supplied by being heated by the heating coil 70 with water supplied from a hot water pipe 78 provided with a flow rate control valve 77 for controlling the flow rate of water in the middle. It has become. In the cooling coil 71, the air from the washer 67 can be decooled and dehumidified below the dew point temperature by cold water fed from a cold water pipe 80 provided with a flow rate control valve 79 for controlling the flow rate of cold water in the middle. It is like that. In the reheating coil 72, the clean rooms 1a and 1b are supercooled and dehumidified in the cooling coil 71 by hot water supplied from a hot water pipe 82 provided with a flow rate control valve 81 for controlling the flow rate of hot water in the middle. The air adjusted to a predetermined dew point temperature required by the inner chambers 2a, 2b and the clean room 1c can be heated to a predetermined temperature and reheated. In the figure, the same reference numerals as those shown in FIG. 10 denote the same parts.

Also in the third embodiment, the flow control valves 10a, 10b, 10c on the clean rooms 1a, 1b, 1c side, the spray amount control valves 16a, 16b, 16c, and the dampers 47a, 47b, 47c are controlled by the air conditioning system shown in the second embodiment. Is almost the same. Thus, in the third embodiment, the flow control valve 77 of the washer 67 system is fully opened, and the control of the set dew point temperature Hsp is adjusted by the heating amount of the heating coil 70 in front of the washer 67. That is, the dew point temperature controller 45 obtains a set dew point deviation by taking the difference between the set dew point temperature Hsp from the set dew point temperature controller 51 and the air dew point temperature Hr on the downstream side of the fan 36 in the air conditioner 29. Is proportionally integrated to obtain a valve opening command Wx, this valve opening command Wx is given to the flow control valve 75 to control the opening, and the flow rate of hot water supplied to the heating coil 70 is controlled. Is heated to a predetermined temperature. That is, the outside air OA taken into the air conditioner 29 is roughly debris removed by the medium performance filter 68, preheated by the preheating coil 69, heated to a predetermined temperature by the heating coil 70, and washed by the washer 67 with water. Gas components such as NH ₃ , NOx, and SOx are removed, supercooled by the cooling coil 71, dehumidified to a saturated state, heated to a predetermined temperature by the reheating coil 72, and pressurized by the fan 36 to be high performance. Fine dust is removed by the filter 37 and supplied to the clean rooms 1a, 1b, 1c. Further, the air in the air conditioner 29 is cooled by evaporation of water sprayed from the washer 67.

  In the third embodiment, the same operational effects as those of the first and second embodiments can be obtained, and the following operational effects can also be achieved. That is, when the airline diagram in the case of performing control in the third embodiment is shown in comparison with the conventional air conditioning system for the clean room 1b, it is as shown in FIG. 18b. Although the conventional air conditioning system is not shown here, the difference from the air conditioning system of FIG. 17 is that the set dew point temperature controller 51 is not provided and the set dew point temperature Hsp is a fixed value.

  The measurement points of this air conditioning system are shown as ● XI to ● XVIII in FIG. 18a, and the conventional measurement points are also shown as ◆ XI to ◆ XVIII in FIG. 18a is used for the sake of convenience although it differs from 18a, such as the absence of the set dew point temperature controller 51. In the air diagram of FIG. 18b, the state of each measurement point is plotted. In both of the marks ● and ♦, XI is the state of the outside air OA introduced into the air conditioner 29, and XII is the air conditioner. 29, the state of the air after being heated by the heating coil 70, XIII is the state of the air after being washed with the washer 67, XIV is the state of the air after being reheated by the reheating coil 72, XV is a state of air mixed with air supplied from the air conditioner 29 into the clean room 1b and circulating air return air circulated from the air flow path 4b of the clean room 1b, and XVI is cooled by cold water passing through the flow control valve 10b. The air state after XVIII is humidified by the water from the spray amount control valve 16b, and the air state after the water is evaporated and cooled, XVIII is discharged to the inner chamber 2b of the clean room 1b. Sky It is a state of the air flowing through the flow passage 4b.

  From FIG. 18b, the difference Hll between ◆ XII and ● XII indicates that the heating amount in the heating coil 70 is small in the third embodiment, and that hot water (or steam) can be reduced. In addition, since the heating with the heating coil 70 is required to be 23 ° C. or higher, high-quality heat is required. Further, the difference H12 between ● XIII and ◆ XIII indicates that the amount of heating of the air after being washed by the washer 67 is increased. Here, since the temperature is 23 ° C. or less, the low-quality heat It is good, and it is thought that there is little influence. Moreover, there exists an advantage that water can be used conversely as cooling water of the production apparatus 21b. The difference H13 between ● XIV and ◆ XIV in FIG. 18b shows the state of the air after being cooled by the cooling coil 9b of the cooling room 1b, and the amount of cold water supplied to the cooling coil 9b can be reduced. Show.

  In the embodiment of the present invention, the spray amount control valve 42 of the steam humidifier 35 and the flow rate control valve 75 of the heating coil 70 are controlled by the valve opening command Wx, and the humidifier sprayers 14a, 14b, 14c are controlled. Although the case where the valve opening commands Wa, Wb, Wc are performed has been described, it can also be performed based on the valve opening time (in this case, for example, a timer is provided in the dew point temperature controller 45 or the humidified water controllers 28a, 28b, 28c). Of course, various modifications can be made without departing from the scope of the present invention.

1a, 1b, 1c Clean room (air-conditioned space)
9a, 9b, 9c Cooling coil (second cooling means)
10a, 10b, 10c Flow rate control valves 11a, 11b, 11c Chilled water pipes 14a, 14b, 14c Humidified water sprayer (water humidifying means) (second water humidifying means)
16a, 16b, 16c Spray amount control valve 26a, 26b, 26c Cold water controller (first means)
28a, 28b, 28c Humidity controller (second means)
29 Air conditioner 32 Coil (first cooling means)
33 Reheating coil (reheating means)
35 Steam humidifier (steam humidifier)
42 Spray amount control valve 43 Steam line 45 Dew point temperature controller (fourth means)
46a, 46b, 46c Duct (line)
47a, 47b, 47c Damper 49 PID computing unit (fifth means)
51 Set dew point temperature controller (third means)
62a, 62b, 62c Damper opening controller (seventh means)
65 Damper opening bias amount calculation unit (sixth means)
67 Washer (first humidification means)
70 Heating coil (first heating means)
71 Cooling coil (first cooling means)
72 Reheating coil (heating means)
73 Flow control valve 74 Hot water pipe 75 Flow control valve 76 Hot water pipe (heat medium pipe)
ta, tb, tc Temperature (room temperature)
tao, tbo, tco Set temperature Δta, Δtb, Δtc Temperature deviation (deviation)
ha, hb, hc Humidity hao, hbo, hco Set humidity Δha, Δhb, Δhc Humidity deviation (deviation)
Hsp Set dew point temperature Hr Dew point temperature ΔH Dew point deviation (deviation)
Wa, Wb, Wc Valve opening command Wx Valve opening command Wmin Spray amount control valve opening setting lower limit value Wmix Spray amount control valve opening setting upper limit value Bau, Bbu, Bcu Flow control valve opening setting lower limit value La1, La2 , La3, Lb1, Lb2, Lb3, Lc1, Lc2, Lc3 Temperature / humidity control level Aau, Abu, Acu Flow control valve opening setting lower limit value Adif Flow control valve opening setting value dead zone Bau, Bbu, Bcu Flow control valve opening Setting lower limit value Badif, Bbdif, Bcdif Dead zone T2difαi, T2difβi, T3difαi, T3difβi Dead zone temperature difference Hspmax Setting dew point temperature upper limit value Hspmin Setting dew point temperature lower limit value ΔHsp Setting dew point temperature change amount Pa Pressure Po setting Pressure ΔP Pressure deviation (deviation)
Va, Vb, Vc Valve opening command Do Damper opening upper limit value Dpid Damper PID opening Dbia, Dbib, Dbic Damper opening bias amount Dbmax Damper bias amount upper limit value Dbmin Damper bias amount lower limit value ΔDb Damper bias amount change amount Dca, Dcb, Dcc Damper opening

Claims (8)

First cooling means for supercooling the introduced air to dehumidify, heating means for heating the air cooled by the first cooling means, and steam for humidifying the air heated by the heating means with steam An air conditioner equipped with a humidifying means;
A second cooling means configured to cool the air circulated in the air supplied from the air conditioner; and at least one water humidifying means for humidifying the air cooled by the second cooling means. Equipped with air-conditioned space,
The opening degree of the spray amount control valve of the steam line through which steam is supplied to the steam humidifying means in the air conditioner is humidified by the steam humidifying means in the air conditioner or dehumidified by the first cooling means. Air dew point temperature, supply of cold water to the second cooling means, or valve opening command to a flow control valve provided in a cold water pipe for discharging the cold water, and supply of humidified water to the water humidifying means An air conditioning system configured to perform control based on a difference from a set dew point temperature obtained based on a valve opening command of a humidified water spray amount control valve provided in a humidified water pipe. First cooling means for supercooling the introduced air to dehumidify, heating means for heating the air cooled by the first cooling means, and steam for humidifying the air heated by the heating means with steam An air conditioner equipped with a humidifying means;
A second cooling means configured to cool the air circulated in the air supplied from the air conditioner; and at least one water humidifying means for humidifying the air cooled by the second cooling means. Equipped with air-conditioned space,
The opening degree of the spray amount control valve of the steam line through which steam is supplied to the steam humidifying means in the air conditioner is humidified by the steam humidifying means in the air conditioner or dehumidified by the first cooling means. Air dew point temperature, supply of cold water to the second cooling means, or valve opening command to a flow control valve provided in a cold water pipe for discharging the cold water, and supply of humidified water to the water humidifying means Configured to control based on the difference from the set dew point temperature obtained based on the valve opening command of the humidified water spray amount control valve provided in the humidified water pipe,
The configuration is such that the opening degree of a damper provided in a line for sending air from the air conditioner to the air-conditioned space can be controlled in response to a valve opening degree command to the flow rate control valve of the second cooling means. Air conditioning system. A first heating means for heating the introduced air, a first water humidifying means for humidifying the air heated by the first heating means, and air when not humidified by the first water humidifying means. An air conditioner comprising: a first cooling means for supercooling and dehumidifying the air; and a second heating means for heating air from the first cooling means;
A second cooling means configured to cool the air supplied from the air conditioner and circulated therein; and a second water humidifying means for humidifying the air cooled by the second cooling means. At least one air-conditioned space,
The opening degree of the flow rate control valve of the heat medium pipe line to which the heat medium is supplied to the first heating means is humidified by the first water humidifying means on the downstream side in the air flow direction of the second heating means in the air conditioner. Or the dew point temperature of the air dehumidified by the first cooling means, and supply of cold water to the second cooling means, or to a flow control valve provided in a cold water conduit for discharging the cold water Based on the difference between the valve opening command and the set dew point temperature obtained based on the valve opening command of the humidifying water spray amount control valve provided in the humidifying water conduit for supplying the humidifying water to the second water humidifying means. An air conditioning system characterized by being configured to control. ,
A first heating means for heating the introduced air, a first water humidifying means for humidifying the air heated by the first heating means, and air when not humidified by the first water humidifying means. An air conditioner comprising: a first cooling means for supercooling and dehumidifying the air; and a second heating means for heating air from the first cooling means;
A second cooling means configured to cool the air supplied from the air conditioner and circulated therein; and a second water humidifying means for humidifying the air cooled by the second cooling means. At least one air-conditioned space,
The opening degree of the flow rate control valve of the heat medium pipe line to which the heat medium is supplied to the first heating means is humidified by the first water humidifying means on the downstream side in the air flow direction of the second heating means in the air conditioner. Or the dew point temperature of the air dehumidified by the first cooling means, and supply of cold water to the second cooling means, or to a flow control valve provided in a cold water conduit for discharging the cold water Control is performed based on the difference between the valve opening degree command and the set dew point temperature obtained based on the valve opening degree instruction of the humidifying water spray amount control valve provided in the humidifying water conduit for supplying the humidifying water to the second water humidifying means. Configured as
The configuration is such that the opening degree of a damper provided in a line for sending air from the air conditioner to the air-conditioned space can be controlled in response to a valve opening degree command to the flow rate control valve of the second cooling means. Air conditioning system. First, calculating a valve opening command of the flow control valve of the second cooling means corresponding to the deviation from the deviation between the detected temperature of the air-conditioned space and the set temperature of the air-conditioned space for a plurality of air-conditioned spaces Means of
A second means for calculating a valve opening command of the humidified water spray amount control valve of the water humidifying means corresponding to the deviation from the detected humidity of the air-conditioned space and the set humidity of the air-conditioned space;
A valve opening command for the flow control valve of the second cooling means from the first means, a valve opening command for the humidified water spray amount control valve of the water humidifying means from the second means, and the detected air-conditioned The temperature of the space, the set temperature of the air-conditioned space, the set temperature and humidity control level of the air-conditioned space, the flow control valve opening setting lower limit value of the flow control valve of the second cooling means, the steam humidifying means in the air conditioner Set dew point temperature lower limit value of air to be humidified, set dew point temperature upper limit value of air humidified by steam humidifying means in the air conditioner, set dew point temperature change amount, flow control valve open of flow control valve of second cooling means Dead band of temperature setting value, dead zone temperature difference of air-conditioned space with second temperature / humidity control level, dead zone temperature difference of air-conditioned space with lowest temperature / humidity control level, spray of spray amount control valve in water humidifying means Volume control valve opening setting lower limit and spray volume control A third means for calculating a set point temperature of the air conditioner from the valve opening setting an upper limit value,
The valve opening command of the spray amount control valve of the steam humidifying means is calculated from the deviation between the set dew point temperature from the third means and the dew point temperature of the air humidified by the steam humidifying means, and the spray of the steam humidifying means is calculated. The air conditioning system according to claim 1 or 2, further comprising a fourth means for giving to the quantity control valve. ,
First, calculating a valve opening command of the flow control valve of the second cooling means corresponding to the deviation from the deviation between the detected temperature of the air-conditioned space and the set temperature of the air-conditioned space for a plurality of air-conditioned spaces. One means,
Second means for calculating a valve opening command of the spray amount control valve of the second water humidifying means corresponding to the deviation from the detected humidity of the air-conditioned space and the set humidity of the air-conditioned space;
A valve opening command for the flow rate control valve of the second cooling means from the first means, a valve opening command for the spray amount control valve of the second water humidifying means from the second means, The temperature of the air-conditioned space, the set temperature of the air-conditioned space, the set temperature and humidity control level of the air-conditioned space, the flow control valve opening setting lower limit value of the second flow control valve, and humidified by the first water humidifying means Set dew point temperature lower limit value of air, set dew point temperature upper limit value of air humidified by the first water humidifying means, set dew point temperature change amount of air humidified by the first water humidifying means, second The dead zone of the flow control valve opening setting value of the flow control valve of the cooling means, the dead zone temperature difference of the second air-conditioned space where the temperature / humidity control level is the second, the dead zone temperature difference of the lower air-conditioned space where the temperature / humidity control level is the lowest, Spray amount control valve opening of the spray amount control valve in the second water humidifying means A third means for calculating a set point temperature of the air conditioner from the constant lower limit value and the spray amount control valve opening set upper limit value,
The set dew point temperature from the third means and the dew point temperature of the air that has been humidified by the first water humidifying means in the air conditioner or dehumidified by the first cooling means and then passed through the second heating means. 5. A fourth arithmetic control means is provided, which calculates a valve opening command of the flow control valve of the first heating means from the deviation and gives it to the flow control valve of the first heating means. Air conditioning system. Fifth means for calculating a damper PID opening corresponding to the deviation from the deviation between the detected pressure of the air-conditioned space and the set pressure of the air-conditioned space;
Damper PID opening from the fifth means, valve opening command of the flow control valve of the second cooling means, flow control valve opening setting lower limit value in the flow control valve of the second cooling means, second Dead zone of the flow control valve opening setting value in the flow control valve of the cooling means, damper upper limit value of damper, upper limit value of damper opening bias amount, lower limit value of damper opening bias amount, change of damper opening bias amount A sixth means for calculating the damper opening bias amount from the amount;
The damper opening is obtained from the damper opening bias amount from the sixth means and the damper PID opening from the fifth means, and the opening of the damper provided in the line from the air conditioner to the air-conditioned space is determined. The air conditioning system according to claim 2 or 4, further comprising a seventh means for controlling.    The air conditioning system according to any one of claims 1 to 7, wherein a temperature of supply air supplied from the air conditioner to the air-conditioned space is configured to be lower than a temperature of air circulating in the air-conditioned space.

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