JP5427526B2 - Structure of clamp type fitting - Google Patents

Description

The present invention relates to a clamping unit for clamping and fastening flange outer peripheral portions of pipe ends facing each other at three locations, and in particular, as a device for controlling the supply of a fluid such as a reaction gas in a semiconductor manufacturing facility. The present invention relates to a structure of a clamp-type fitting that can be used as an integrated gas stick in which a plurality of fluid control devices are connected in a row and a pipe for forming an integrated gas panel in which a large number of integrated gas sticks are arranged side by side on a base plate.

As a clamping unit for covering and fixing the flange outer periphery of a pipe end, for example, Patent Document 1 discloses a joint structure for connecting a pair of connecting pipes having a flange provided with an annular protrusion at an end. , A flat ring-shaped metal gasket that is press-contacted from both sides by each protrusion with the flanges of the pair of connecting pipes facing each other, and an engaging portion that engages with at least a part of the metal gasket. And a center ring that can be mounted so as to surround the outer periphery of both flanges in a state where the flanges of the pair of connection tubes face each other with a metal gasket interposed therebetween, It consists of a plurality of segments that are arranged side by side and are connected to each other so as to be able to swing, and the segment located at one end of the plurality of segments and the other end When the segments positioned are fixed to each other by the fastening member, each segment has a clamp ring that forms a ring shape that covers and holds the entire outer periphery of the flange facing each other across the metal gasket, Each flange has an inclined surface toward the end surface side of the connecting pipe as it goes to the outer peripheral side, and each segment of the clamp ring has a corresponding inclined surface corresponding to the inclined surface of each flange on the inner peripheral portion. The clamp ring is in a state of forming a ring shape that covers and holds the entire outer periphery of the flange that faces each other with a metal gasket in between, and the fastening member is connected to the segment at one end and the other. The closer the end segments are, the more each segment of the clamp ring has its corresponding inclined surface along each inclined surface of each flange. Moves radially inward while moving, more tightly structure capable of holding the pipe joint is disclosed flanges together.

On the other hand, as a device for controlling the supply and discharge of fluids such as gases in semiconductor manufacturing facilities, etc., integrated gas sticks that connect multiple fluid control devices in a row, and many such integrated gas sticks are arranged in parallel on the base plate. Such integrated gas panels are known.

  For example, Patent Document 2 includes a plurality of flow path blocks having a mounting hole and a recess on the upper surface, a gas inflow passage communicating with the recess on one side surface, and a gas outflow passage communicating with the recess on the other side surface. The gas flow path of the flow path block and the gas flow path are arranged in a row so that they communicate with each other, and these are sequentially connected by turnbuckle nuts and fixed on the base plate along the gas supply line. A chemical gas panel is shown.

In Patent Document 3, a plurality of fluid control devices are arranged in a row on a mounting plate, and a flow path block is arranged between adjacent fluid control devices between the fluid control device and the mounting plate. An integrated valve is shown in which the fluid is allowed to flow to the adjacent fluid control device by the flow path block.
Patent Document 4 discloses an integrated valve unit that includes a plurality of manual valves, and a flow path block in which a flow path communicating with these manual valves is formed while being attached in a row. Has been.

JP 2007-147011 A JP-A-10-169881 JP 2003-65462 A JP-A-2005-273868

In the clamp-type pipe joint disclosed in Patent Document 1 described above, as shown in FIG. 2, a clamp ring composed of three segments is used. Since the structure can be rotated approximately 180 degrees both inside and outside, it is compact when the fastening is completed, but in the fastening work, the work for attaching the clamp ring to the outer periphery of the fastened part is performed. The operator must use both hands to put the clamp ring on the outer periphery of the fastened part and then turn the clamp screw to perform clamping. In particular, in the application to the integrated gas panel disclosed in Patent Documents 2 to 4, since the respective fastening locations are spatially constrained, the efficiency of the mounting operation is extremely reduced, and therefore a dedicated mounting jig is used. There is a problem that you have to prepare and work. In addition, the outer periphery of the flange part is fastened in a wedge shape by segments divided almost entirely, but it is not always accurate that the screw tightening force is transmitted evenly to each segment, resulting in accurate centering of the pipe center. There is a difficulty that can not be done. In particular, when there are two segments, the piping itself may be deformed somewhat flat.
In addition, the structures of the integrated gas panels shown in Patent Documents 2 to 4 all have a structure having a flow path block at the bottom, and labor for processing and assembling the flow paths in this block is very large. Therefore, it is expensive. Moreover, since the pipe joint is formed inside the block, it is not a structure in which only the corresponding part can be easily removed, and there is a problem in maintenance. Further, since the flow path is formed in a V shape or a U shape in the block structure at the bottom, the flow path resistance of the fluid is large.

As a result of intensive studies to solve the various problems described above, the present inventor has adopted a clamp system that is fastened at three locations on the outer periphery of the flange, and directly mounts a rail for mounting and fixing each control device such as a valve on the floor. It was found that the above problems can be basically solved by arranging a pipe line on the upper surface of the mounting rail.

Accordingly, an object of the present invention is to provide a pipe joint structure that is a three-point clamp type that can be easily clamped and that eliminates the need for a bottom block in an integrated gas panel device.

In order to achieve the above object, the structure of the clamped pipe joint according to the present invention is as follows.
A flange portion is formed at each of a pair of opposing pipe member ends, and the outer peripheral surface of each flange portion is provided with an inclined surface having a downward slope in a direction opposite to the opposing side. A base piece having a pair of V-groove portions adjacent to each other at a predetermined angle and having a substantially inclined V-shaped cross section having opposed inclined surfaces having the same gradient as the inclined surface having the downward gradient, A holding piece formed with a V-groove portion having the same inclined surface as the base piece and having a substantially V-shaped cross section; a link piece rotatably coupled to one end side of the base piece and the holding piece; The shaft piece inserted in the through hole formed on the other end side of the base piece and the holding piece, the pair of pipe member end portions inserted and arranged in advance in each V groove portion of the base piece and the holding piece, Press the holding piece toward the base piece through the shaft In this case, the fastening means includes the shaft body, a means for fixing the coaxial body and the base piece, and a screw portion and an upper portion of the shaft body. A nut that engages with the screw portion is provided, and the pressing piece can be configured to be pressed toward the base piece by the rotation of the nut.
In this case, the fixing means includes a rail having a quadrangular cross section having a bottom fixed on the mounting surface and having an opening in the longitudinal direction of the center of the upper surface, and a lower end portion of the shaft body on the inner side of the rail upper surface. And a bottom portion of the base piece is disposed on the top surface of the rail, and a shaft body through-hole vicinity of the bottom portion is fitted into the opening portion, and the shaft body is interposed through the opening portion. The lower end part of this can reach the inside of the rail and be locked by the locking member.

According to the structure of the clamp type pipe joint of the present invention according to claim 1,
The fastening means includes the shaft body, means for fixing the coaxial body and the base piece, and a screw portion and a nut screwed to the screw portion are provided on the shaft body, and the pressing piece Since the nut is pressed toward the base piece by the rotation of the nut, the present invention can be implemented with a simple structure.
According to the structure of the clamp type pipe joint of the present invention according to claim 2,
The fixing means includes a rail having a square cross section having a bottom fixed on the mounting surface and having an opening in the longitudinal direction of the center of the upper surface, and a locking member that locks the lower end of the shaft body inside the rail upper surface. The bottom of the base piece is disposed on the top surface of the rail, the shaft through-hole vicinity of the bottom is fitted into the opening, and the lower end of the shaft is placed inside the rail through the opening. Therefore, the conventional bottom block is not required, the layout of the piping can be changed freely, and the integration is easy, greatly increasing the cost of the integrated gas panel. It is possible to reduce it.

The structure of the clamp type joint by this invention is shown, (a) is a top view of the clamp type pipe joint of the state which fastened the pair of pipe member end part which has a flange part, (b) is a pair of pipe member The front view of a clamp type pipe joint in the state where the end was fastened, (c) is an AA line arrow view of (b), and (d) is a side view of (b). The arrangement | positioning of the integrated gas panel to which this invention is applied is shown, (a) is the top view, (b) is the BB arrow line view of (a), (c) is the piping of (a). The top view which took out a part, (d) is CC line arrow directional view of (c). In FIG. 2, it is an arrow line view corresponding to the figure (b) at the time of using the integrated rail shape | molded by extrusion molding, such as aluminum, instead of each rail.

A preferred embodiment of the present invention will be described below with reference to FIGS.
FIG. 1 shows the structure of a clamp-type pipe joint according to the present invention. FIG. 1 (a) is a plan view of the clamp-type pipe joint in a state where a pair of pipe member end portions having flange portions are fastened, and FIG. The front view of the clamp type pipe joint in the state where the pipe line member end was fastened, (c) is an AA line arrow view of (b), (d) is a side view of (b).

In FIG. 1A, a clamp unit CU is disposed on a rail R fixed to a floor surface FL with bolts 20, and ends of a pair of pipes T1 and T2 parallel to the longitudinal axis L1 of the rail R. The part is hermetically connected and fixed. At the center of the rail R, an opening Ra along the direction L1 is formed. Reference numeral 12 is a holding piece for pressing the upper part of the outer periphery of the flange portion formed at each end of the pipes T1 and T2.

As shown in more detail in FIGS. 1B and 1D, thick flange portions T1f and T2f are formed at and opposed to the ends of the pair of pipes T1 and T2. An inclined surface SL having a downward slope is formed on the outer peripheral portion of each flange portion in the opposite direction to the facing surface, and the pressing piece 12 is substantially V-shaped inclined to face each inclined surface. A surface is provided and straddles both flange portions from above.

As shown in FIG. 2B, reference numeral 10 denotes a base piece, which is formed so that two portions of substantially V-shaped inclined surfaces 10a and 10b similar to the holding piece 12 are disposed adjacent to each other. ing.
Reference numeral 14 denotes a link member, which is attached by caulking a pin 14 a to the left end side of the base piece 10 and the holding piece 12. On the other hand, a through hole through which the hexagonal head 16a of the bolt 16 passes downward is provided on the right end side of the base piece 10 and the holding piece 12. As illustrated, the hexagonal head 16a of the bolt 16 reaches the rail interior Rb through the opening Ra of the rail R, and is latched by the latching member 22 disposed in the rail interior Rb. That is, the hexagonal head 16 a of the bolt 16 is disposed in a parallel groove 22 a formed at the center of the locking member 22 so as to contact the side of the hexagonal head 16 a. A screw portion is provided at the upper end portion of the bolt 16, and a nut 18 is screwed.

Therefore, by turning the nut 18, the hexagonal head 16a presses the locking member 22 upward, whereby the locking member 22 contacts the upper inner surface of the rail R, and as a result, the base piece 10 is stopped. The ring 16b is fixed in a state where the vicinity of the through hole is fitted in the opening.
As shown in FIG. 3C, the locking member 22 has such a length that it cannot rotate in the rail interior Rb and is prevented from rotating by the rail. Since the width is smaller than the opening width W of the rail R, it can be inserted into the rail interior Rb together with the hexagonal head 16a of the bolt 16.
Further, when the nut 18 is turned, the holding piece 12 is urged downward, and as a result, the flange portion is supported and fixed at three points together with the two places of the base piece 10.

2A and 2B show the arrangement of an integrated gas panel to which the present invention is applied, in which FIG. 2A is a plan view, FIG. 2B is a view taken along the line B-B in FIG. ) Is a plan view of a part of the piping taken out, and (d) is a view taken along the line CC of (c).

As shown in FIG. 2A, valve units VU1 and VU2 are arranged between the pipes T on the rails R1 to R3. The clamp unit CU1 shows a case where the pipe T is parallel to the rail, the clamp unit CU2 is perpendicular to the rail R, and the clamp unit CU3 is inclined with respect to the direction of the rail R.
As shown in FIGS. (B) and (d), the height of the pipe is formed uniformly at the center position of the three-point clamp of each clamp unit, so that the conventional bottom block is not required. ing. The interval between the pipes is indicated by a pitch P, and the rail interval is indicated by 2P.
Further, as shown in FIG. 3C, one rail R2 can also serve as two series of integrated sticks.

FIG. 3 is an arrow view of the integrated gas panel corresponding to FIG. (B) in the case of using an integrated rail 50 formed by extrusion molding of aluminum or the like instead of the rail R.
In this case, the mounting work on the floor surface is reduced by the mounting work using the bolts 20 in FIG.

Although the preferred embodiments of the present invention have been described with reference to FIGS. 1 to 3, the present invention is not limited to those shown in these drawings. Those skilled in the art can variously modify the preferred embodiments disclosed in these drawings.

10 Base piece 12 Holding piece 14 Link member 16 Bolt 16a Hexagon head 16b Retaining ring 18 Nut 20 Bolt 22 Locking member 22a Groove 50 Integrated rail CU, CU1, CU2, CU3 Clamp unit FL Floor surface L1 Rail center line R , R1, R2, R3 Rail Ra Rail opening Rb Rail internal SL Inclined surface T, T1, T2 Piping T1f, T2f Flange VU1, VU2 Valve unit W Rail opening width

Claims (2)

A flange portion is formed at each of a pair of opposing pipe member ends, and the outer peripheral surface of each flange portion is provided with an inclined surface having a downward slope in a direction opposite to the opposing side. To conclude,
A base piece having a pair of V-grooves having an inclined surface opposite to the inclined surface having the same inclination and having a substantially V-shaped cross section adjacent to each other at a predetermined angle, and the same inclined surface as the base piece A pressing piece formed with a V-groove having a surface and a substantially V-shaped cross section, a link piece rotatably coupled to one end of the base piece and the holding piece, and the base piece and the holding piece A shaft body inserted through a through hole formed on the end side, and the end portions of the pair of duct members inserted and arranged in advance in the V-groove portions of the base piece and the holding piece are pressed through the shaft body. In the structure of a pipe joint having fastening means for fastening by pressing the piece toward the base piece,
The fastening means includes the shaft body, means for fixing the coaxial body and the base piece, and a screw portion and a nut screwed to the screw portion are provided on the shaft body, and the pressing piece Is pressed against the base piece by the rotation of the nut. The fixing means includes a rail having a square cross section having a bottom fixed on the mounting surface and having an opening in the longitudinal direction of the center of the upper surface, and a locking member that locks the lower end of the shaft body inside the rail upper surface. The bottom of the base piece is disposed on the top surface of the rail, the shaft through-hole vicinity of the bottom is fitted into the opening, and the lower end of the shaft is placed inside the rail through the opening. The pipe joint structure according to claim 1, wherein the pipe joint is locked by the locking member.

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