JP5405446B2 - Substrate liquid processing equipment - Google Patents

Description

  The present invention relates to a substrate liquid processing apparatus for processing a substrate using a processing liquid.

  In a manufacturing process of a semiconductor product and a manufacturing process of a flat panel display (FPD), a process of supplying a processing liquid to a semiconductor wafer or a glass substrate which is a substrate to be processed and performing liquid processing is frequently used. As such a process, for example, there is a cleaning process for removing particles, contamination, and the like attached to the substrate.

  As a liquid processing apparatus that performs such liquid processing, a substrate such as a semiconductor wafer is held on a spin chuck, and a processing liquid (chemical solution, rinse liquid, etc.) is supplied to the front surface or front and back surfaces of the substrate while the substrate is rotated. A single-wafer type processing unit that performs processing is known.

  The processing liquid supplied to the substrate is shaken off from the rotating substrate and scattered as mist in the peripheral region of the substrate holding table. In order to prevent such mist from scattering, Patent Document 1 has a guide member for guiding the scattered processing liquid to the first drainage tank and the second drainage tank provided below. A substrate processing apparatus is disclosed. This guide member includes two inclined portions for guiding the processing liquid to the first drainage tank and the second drainage tank according to the application.

JP 2004-207755 A

  However, in the substrate processing apparatus shown in Patent Document 1, the second drainage tank is provided on the inner peripheral side of the first drainage tank, and the exhaust duct is provided on the inner peripheral side of the second drainage tank. ing. Further, the lower part of the inclined portion corresponding to the second drainage tank is greatly opened and communicated with the exhaust duct. For this reason, there is a problem that a part of the processing liquid (including the mist) shaken off from the substrate flows into the exhaust duct, and the recovery rate of the processing liquid decreases.

  The present invention has been made in consideration of such points, and an object of the present invention is to provide a substrate liquid processing apparatus capable of improving the recovery rate of the processing liquid scattered from the substrate.

  The present invention provides a substrate holding table for holding a substrate, a rotation driving unit for rotating the substrate holding table, and a processing liquid for selectively supplying a plurality of types of processing liquids to the substrate held on the substrate holding table. A first guide cup provided in order from the top in order to guide the processing liquid splashed from the supply unit and the substrate holding table, which is provided around the substrate holding table and scattered from the rotating substrate. And a second guide cup, the substrate holder, a position adjusting mechanism for adjusting a positional relationship between the first guide cup and the second guide cup, and the first guide cup and the second guide cup. A first processing liquid recovery tank provided in a lower region and recovering the processing liquid guided by the first guide cup; and provided on an inner peripheral side of the first processing liquid recovery tank, the second guide cup Guided by Provided between the second processing liquid recovery tank for recovering the processed processing liquid, the first processing liquid recovery tank and the second processing liquid recovery tank, and the atmosphere around the substrate is changed to the first processing liquid recovery tank. An exhaust member that discharges through the guide cup and the second guide cup, and a lower end of the second guide cup, guides the processing liquid from the first guide cup to the first processing liquid recovery tank. And a guide member that guides the processing liquid from the second guide cup to the second processing liquid recovery tank.

  In the substrate liquid processing apparatus described above, the guide member includes a guide member main body, an outer peripheral wall portion extending downward from the guide member main body, and an inner peripheral side from the outer peripheral wall portion. An inner peripheral wall portion extending downward, and the outer peripheral wall portion is disposed at a position corresponding to the first processing liquid recovery tank, and the inner peripheral wall portion is the second processing liquid recovery tank. It is preferable that it is arrange | positioned in the position corresponding to.

  In the substrate liquid processing apparatus described above, the position adjusting mechanism is configured to raise and lower the second guide cup with respect to the first guide cup, and the inner peripheral wall portion is formed from the outer peripheral wall portion. It is preferable that the lower end portion of the inner peripheral wall portion extends downward and is inserted into the second processing liquid recovery tank when the processing liquid is guided by the second guide cup.

  In the above-described substrate liquid processing apparatus, the first guide cup includes a first guide cup body and a downward extension extending downward from an inner peripheral end of the first guide cup body. The lower extension of the guide cup preferably closes the opening of the first guide cup when the processing liquid is guided by the second guide cup.

  Further, in the substrate liquid processing apparatus described above, a third guide cup that is provided below the second guide cup and guides the processing liquid scattered from the rotating substrate held and rotated by the substrate holding table, A third processing liquid recovery tank provided on an inner peripheral side of the second processing liquid recovery tank for recovering the processing liquid guided by the third guide cup; and the second processing liquid recovery from the second guide cup. It is preferable to further comprise a partition wall that partitions the flow path to the tank for use and the flow path from the third guide cup to the third treatment liquid recovery tank.

  In the substrate liquid processing apparatus described above, the third guide cup can be moved up and down together with the second guide cup. When the processing liquid is guided by the third guide cup, It is preferable that the space between the second guide cup is closed and the downward extension of the first guide cup closes the opening of the second guide cup.

  Further, in the substrate liquid processing apparatus described above, a second exhaust member that is provided on the inner peripheral side of the third processing liquid recovery tank and exhausts the atmosphere around the substrate through the third guide cup. Furthermore, it is preferable to provide.

  In the substrate liquid processing apparatus described above, the first processing liquid recovery tank, the exhaust member, the second processing liquid recovery tank, and the third processing liquid recovery tank have a ring-shaped planar cross section. And it is preferable that it is formed concentrically.

  According to the present invention, the recovery rate of each processing solution scattered from the substrate can be improved.

FIG. 1 is a block diagram schematically showing a substrate liquid processing apparatus in an embodiment of the present invention. FIG. 2 is a cross-sectional view showing details of the substrate liquid processing apparatus during acid processing in the embodiment of the present invention. FIG. 3 is a diagram showing a third guide cup in the substrate liquid processing apparatus according to the embodiment of the present invention. FIG. 4 is a cross-sectional view showing details of the substrate liquid processing apparatus during the alkaline processing in the embodiment of the present invention. FIG. 5 is a cross-sectional view showing details of the substrate liquid processing apparatus during the drying process in the embodiment of the present invention.

  Hereinafter, a substrate liquid processing apparatus according to an embodiment of the present invention will be described with reference to the drawings.

  As shown in FIGS. 1 and 2, a substrate liquid processing apparatus 10 includes a liquid processing chamber 11 in which a substrate (for example, a semiconductor wafer, hereinafter simply referred to as a wafer W) is loaded and unloaded, A rotatable substrate holding table 12 that holds the wafer W is provided in the processing chamber 11. A rotation motor (rotation drive unit) 14 that rotates the substrate holding table 12 is connected to the substrate holding table 12 via a rotation drive shaft 13. The wafer W is held by the holding member 12 a at the peripheral edge of the substrate holding table 12, and is rotated in a horizontal plane by driving the rotation motor 14.

  The liquid processing chamber 11 is provided with a nozzle (processing liquid supply unit) 15 for selectively discharging (supplying) a plurality of types of processing liquids to the wafer W held on the substrate holder 12. That is, a supply source (not shown) of an acidic processing liquid, an alkaline processing liquid, a rinsing processing liquid, and an organic processing liquid is selectively connected to the nozzle 15, and these processing liquids Are selectively discharged onto the surface of the wafer W. As the acidic treatment liquid, for example, SPM liquid (mixed solution of sulfuric acid and hydrogen peroxide solution), HF liquid (hydrogen fluoride solution), or SC2 (mixed solution of hydrochloric acid and hydrogen peroxide solution) is used. As the alkaline treatment liquid, for example, SC1 liquid (ammonia peroxide) or aqueous ammonia can be used. Moreover, as a rinse process liquid, a pure water etc. can be used, for example, As an organic process liquid, an IPA liquid (isopropyl alcohol liquid) etc. can be used, for example.

  Around the substrate holding table 12, there is provided a guide rotation cup 21 that guides the processing liquid and its mist that are rotated together with the substrate holding table 12 and scattered from the rotating wafer W. The guide rotation cup 21 has an upper opening 21a, and is formed in a ring shape as a whole. The opening diameter of the lower end is larger than the opening diameter of the upper opening 21a. The curved shape is convex upward. That is, as shown in FIG. 2, the guide rotation cup 21 is formed so as to extend outward from the upper edge of the wafer W in the radial direction of the wafer W.

  The substrate holder 12 has an outer peripheral end portion 12 b that extends below the guide rotary cup 21. A gap portion 23 is formed between the outer peripheral end portion 12 b and the lower end portion of the guide rotation cup 21, and the processing liquid scattered from the wafer W and guided by the guide rotation cup 21 passes through the gap portion 23. It is guided to the outside of the guide rotation cup 21 through.

  As shown in FIG. 2, a holding table lower member 24 is provided below the substrate holding table 12. This holding base lower member 24 is fixed to the liquid processing chamber 11 so as to guide the processing liquid guided by a third guide cup 51 described later and the atmosphere around the wafer W at that time. It has become.

  In the vicinity of the guide rotation cup 21, a first guide cup (guide cup) 31, a second guide cup 41, and a third guide are provided in order to respectively guide the corresponding processing liquid guided by the guide rotation cup 21 downward. The cup 51 is provided in order from the top. Of these, the first guide cup 31 guides the acidic processing liquid, the second guide cup 41 guides the alkaline processing liquid, and the third guide cup 51 guides the organic processing liquid. . Note that the first guide cup 31 may guide the alkaline processing liquid, and the second guide cup may guide the acidic processing liquid. Each guide cup 31, 41, 51 is formed in a ring shape as a whole, the first guide cup 31 is fixed to the liquid processing chamber 11, and the second guide cup 41 is a lifting cylinder described later. The first guide cup 31 can be moved up and down. The third guide cup 51 is configured to be movable up and down together with the second guide cup 41 in a part of the up-and-down movement of the second guide cup 41.

  The first guide cup 31 includes a first guide cup body 32 and a first lower extension (downward extension) 33 extending downward from the inner peripheral end 32 a of the first guide cup body 32. Of these, the first guide cup body 32 includes an inclined portion extending obliquely downward on the outer peripheral side and a vertical portion extending vertically downward from the outer peripheral end of the inclined portion so as to guide the acidic treatment liquid downward. It has become. The inner peripheral end 32 a of the first guide cup main body 32 is located above the outer peripheral end region of the guide rotation cup 21. Further, the lower end portion 33 a of the first downward extension portion 33 is disposed close to the gap portion 23 and above the gap portion 23. In this way, the first downward extension 33 prevents the flow of the processing liquid from the gap 23 from being blocked, and a portion on the outer peripheral side of the guide rotation cup 21 (a portion on the first guide cup 31 side). To cover. The first downward extension 33 is configured to close the opening 31a of the first guide cup 31 when the alkaline processing liquid is guided by the second guide cup 41 (see FIG. 4). Furthermore, the first downward extension 33 is configured to close the opening 41a of the second guide cup 41 when the organic processing liquid is guided by the third guide cup 51 (see FIG. 5). At this time, the space between the first guide cup 31 and the second guide cup 41 is closed. Here, “closing” naturally does not mean that the opening is completely closed and sealed, but it can be considered that most of the opening is closed and that the processing liquid does not flow into the opening. It is used as a concept including a state having a clearance. Similarly, the term “blocking” does not mean that the two guide cups are completely closed, closed, and sealed. It is used as a concept including a state in which there is a clearance that can be regarded as not flowing between the two guide cups.

  An inner peripheral extension 34 extends from the inner peripheral end 32 a of the first guide cup body 32 to the inner peripheral side of the first lower extension 33. A gas guide space 35 is formed by the first lower extension 33, the inner peripheral extension 34, and the guide rotation cup 21. This gas guide space 35 is for guiding the gas swirling downward as the guide rotation cup 21 rotates. That is, the gas in the gas guide space 35 receives centrifugal force and swirls along the first lower extension 33, but the inner peripheral side extension 34 is provided in the upper part of the gas guide space 35. The swirling gas is guided downward along the first lower extension 33. In the present embodiment, the inner peripheral extension 34 extends downward along the first lower extension 33 on the guide rotary cup 21 side, and extends from the inner peripheral extension 34 to the first lower extension 33. The cross section is formed in an inverted U shape. In addition, the tip of the inner peripheral extension 34 is close to the outer peripheral surface of the guide rotation cup 21, but there is a predetermined gap between the tip of the inner peripheral extension 34 and the outer peripheral surface of the guide rotary cup 21. A gap is formed to prevent interference with each other. An elevating groove 36 is formed at the outer peripheral end of the first guide cup body 32, and a connecting member 86 described later can be raised and lowered in the elevating groove 36.

  As shown in FIG. 4, the second guide cup 41 has a second guide cup main body 42 and a fitting groove 43 into which a fitting portion 85 of a guide member 81 described later is fitted. Of these, the second guide cup body 42 includes an inclined portion extending obliquely downward on the outer peripheral side and a vertical portion extending vertically downward from the outer peripheral end of the inclined portion so as to guide the alkaline processing liquid downward. It has become. The inner peripheral end 42a of the second guide cup main body 42 is disposed on the outer peripheral side from the first downward extension 33 of the first guide cup 31, and the vertical portion of the second guide cup main body 42 is the first guide The second guide cup 41 can be moved up and down in a region between the first downward extension 33 and the vertical portion of the first guide cup body 32. It has become. The fitting groove 43 is formed in a vertical portion of the second guide cup main body 42.

  As shown in FIG. 5, the third guide cup 51 is connected to the third guide cup main body 52, the third guide cup main body 52 via the contact portion 54, and a third lower extension 53 extending downward. have. Of these, the third guide cup body 52 includes an inclined portion extending obliquely downward on the outer peripheral side and a vertical portion extending vertically downward from the outer peripheral end of the inclined portion. The vertical portion is disposed on the inner peripheral side of the vertical portion of the second guide cup main body 42, and the inner peripheral end 52 a of the third guide cup main body 52 extends in the first downward direction of the first guide cup 31. The portion 33 and the holding base lower member 24 are arranged on the outer peripheral side. The third downward extension 53 is connected to the inclined portion of the third guide cup body 52 via an inclined contact portion 54, and the organic processing liquid is supplied together with the inclined portion and the contact portion 54. Guides you down. The third downward extension 53 is slidable with respect to a partition wall 88 described later. The abutting portion 54 is freely abutted on the upper end portion of the partition wall 88 (see FIG. 2), and when the abutting portion 54 abuts on the upper end portion of the partition wall 88, the third guide cup 51 is provided. Is supported by a partition wall 88.

  As shown in FIG. 3, a protrusion 55 is provided at the outer peripheral end (vertical portion) of the third guide cup main body 52 so as to be able to contact a guide member main body 82 of a guide member 81 described later. Several protrusions 55 are provided at predetermined intervals in the circumferential direction. The third guide cup 51 is supported by the second guide cup 41 by the protrusion 55 coming into contact with the guide member main body 82. When the third guide cup 51 is supported by the second guide cup 41, the second guide cup 41 moves up and down together with the third guide cup 51. When the third guide cup 51 is not supported by the second guide cup 41, that is, when supported by the partition wall 88, the second guide cup 41 is independent of the third guide cup 51. To go up and down. That is, the third guide cup 51 moves up and down together with the second guide cup 41 in a part of the up-and-down movement of the second guide cup 41.

  As shown in FIG. 1 and FIG. 2, the acidic treatment liquid guided by the first guide cup 31 is placed on the outer peripheral side of the lower region of the first guide cup 31, the second guide cup 41, and the third guide cup 51. A first treatment liquid recovery tank 61 for recovery is provided. A second processing liquid recovery tank 62 for recovering the alkaline processing liquid guided by the second guide cup 41 is provided on the inner peripheral side of the first processing liquid recovery tank 61. A third processing liquid recovery tank 63 that recovers the organic processing liquid guided by the third guide cup 51 is provided on the inner peripheral side of the second processing liquid recovery tank 62. Further, on the inner peripheral side of the third processing liquid recovery tank 63, a fourth processing liquid recovery tank 64 is provided for recovering each processing liquid in a mixed state when the substrate holder 12 rotates at a low speed. Yes.

  Between the first processing liquid recovery tank 61 and the second processing liquid recovery tank 62, a first exhaust for discharging the atmosphere around the wafer W through the first guide cup 31 and the second guide cup 41. A member (exhaust member) 71 is provided. The first exhaust member 71 preferably has a ring-shaped plane cross section and is formed concentrically with the treatment liquid recovery tanks 61 to 64. Further, a second exhaust member 72 for discharging the atmosphere around the wafer W through the third guide cup 51 is provided on the inner peripheral side of the fourth processing liquid recovery tank 64. The first exhaust member 71 and the second exhaust member 72 are integrally formed on the downstream side in the exhaust direction so that the exhaust from each of the exhaust members 71 and 72 merge, and in the first exhaust member 71 and the second exhaust member. 72 is connected to a suction drive unit 73 that sucks the inside of the 72.

  The processing liquid from the first guide cup 31 is guided to the first processing liquid recovery tank 61 to the lower end portion 41b of the second guide cup 41, and the processing liquid from the second guide cup 41 is supplied to the second processing liquid recovery tank. A guide member 81 for guiding to 62 is provided. The guide member 81 is generally formed in a ring shape so as to cover the upper side of the first exhaust member 71, and has a U-shaped cross section that opens toward the first exhaust member 71. That is, the guide member 81 is provided on the inner peripheral side of the guide member main body 82 extending in the radial direction, the outer peripheral wall portion 83 extending downward from the outer peripheral end of the guide member main body 82, and the guide member main body 82. And an inner peripheral wall portion 84 extending downward from the inner peripheral end portion of 82. Of these, the outer peripheral wall 83 is disposed at a position corresponding to the first processing liquid recovery tank 61, that is, above the first processing liquid recovery tank 61. The inner peripheral wall portion 84 is disposed at a position corresponding to the second processing liquid recovery tank 62, and is disposed above the second processing liquid recovery tank 62 in the state shown in FIG. Further, the inner peripheral wall portion 84 extends downward from the outer peripheral wall portion 83, and the lower end portion 84a of the inner peripheral wall portion 84 is placed in the second processing liquid recovery tank 62 during alkaline processing, as shown in FIG. It is preferably inserted. Thus, when the alkaline processing liquid is guided, the alkaline processing liquid can be reliably guided to the second processing liquid recovery tank 62. Further, an insertion portion 85 extends upward from the guide member main body 82, and the insertion portion 85 is inserted into an insertion groove 43 provided at the lower portion of the second guide cup 41.

  The substrate liquid processing apparatus 10 includes a lift cylinder (position adjustment mechanism, lift drive unit) 87 that adjusts the positional relationship between the substrate holding table 12 and the guide cups 31, 41, 51. The elevating cylinder 87 in the present embodiment is configured to raise and lower the second guide cup 41 and the third guide cup 51 with respect to the first guide cup 31 fixed to the liquid processing chamber 11. As shown in FIGS. 1 and 2, the elevating cylinder 87 is connected to the guide member main body 82 via a connecting member 86. The connecting member 86 is slidable in the elevating groove 36 of the first guide cup 31. In this way, the second guide cup 41 is connected to the lift cylinder 87 via the guide member 81 and is lifted and lowered with respect to the first guide cup 31. In addition, the connection member 86 and the guide member main body 82 are connected at only a few places with a predetermined interval in the circumferential direction, and the flow of the acid treatment liquid guided by the first guide cup 31 is prevented from being hindered. doing.

  As shown in FIG. 2, the substrate liquid processing apparatus 10 includes a flow path from the second guide cup 41 to the second processing liquid recovery tank 62, and a flow from the third guide cup 51 to the third processing liquid recovery tank 63. A partition wall 88 that partitions the flow path is provided. The partition wall 88 is provided on the third downward extension 53 of the third guide cup 51 and the second guide cup main body 42 from between the second process liquid recovery tank 62 and the third process liquid recovery tank 63. The guide member 81 is formed so as to extend upward. In the partition wall 88, as described above, the third lower extension 53 of the third guide cup 51 is slidable, and the third guide cup 51 is lifted to perform a drying process. (See FIG. 5), and also when the acid treatment is performed by lowering (see FIG. 2), the third lower extension 53 abuts and the partition wall 88 and the third lower extension 53 are blocked. It has come to be. Further, the upper end portion of the partition wall 88 can be brought into contact with the contact portion 54 of the third guide cup 51 as described above.

  As shown in FIG. 1, a controller 91 is connected to the rotary motor 14 and the lift cylinder 87, and the rotary motor 14 and the lift cylinder 87 are controlled by the controller 91. In addition, the controller 91 selects each processing liquid to be discharged onto the wafer W through the nozzle 15. That is, the controller 91 discharges the acidic processing liquid from the nozzle 15 when the wafer W is acidic, and discharges the alkaline processing liquid from the nozzle 15 when the wafer W is alkaline. The rinse treatment liquid is discharged from the nozzle 15, and the organic treatment liquid is discharged from the nozzle 15 when the wafer W is dried.

  By the way, as shown in FIG. 1, in order to manage the substrate liquid processing apparatus 10 by the process manager or the like, the control unit 91 has a keyboard for performing a command input operation or the like, an operation status of the substrate liquid processing apparatus 10, etc. An input / output device 92 including a display or the like for visualizing and displaying the image is connected. In addition, the control unit 91 can access a recording medium 93 on which a program for realizing the processing executed by the substrate liquid processing apparatus 10 is recorded. The recording medium 93 can be configured by a known recording medium such as a memory such as a ROM and a RAM, a disk-shaped recording medium such as a hard disk, a CD-ROM, a DVD-ROM, and a flexible disk. In this way, the processing of the wafer W is performed in the substrate liquid processing apparatus 10 by the control unit 91 executing a program or the like recorded in advance on the recording medium 93.

  Next, the operation of the present embodiment having such a configuration, that is, the substrate liquid processing method according to the present embodiment will be described. The operation of each component for executing the substrate liquid processing method described below is controlled by a control signal from the control unit 91 based on a program recorded in advance on the recording medium 93.

  First, as shown in FIGS. 1 and 2, the wafer W is loaded into the liquid processing chamber 11 and held on the substrate holder 12 by the holding member 12a.

  Subsequently, the substrate holder 12 holding the wafer W is rotationally driven by the rotary motor 14 together with the guide rotary cup 21 and the like. As a result, the wafer W held on the substrate holder 12 rotates in a horizontal plane.

  Next, the wafer W is subjected to an acid treatment using an acid treatment liquid. In this case, the acidic processing liquid is supplied to the nozzle 15 from an acidic processing liquid supply source (not shown) and discharged onto the surface of the rotating wafer W.

  In this case, as shown in FIG. 2, the opening 31 a of the first guide cup 31 is disposed at a position corresponding to the gap portion 23 between the guide rotation cup 21 and the outer peripheral end portion 12 b of the substrate holding base 12. . As a result, the acidic treatment liquid containing the mist scattered from the wafer W and guided by the guide rotation cup 21 flows into the opening 31 a of the first guide cup 31.

  The acidic treatment liquid that has flowed into the opening 31 a of the first guide cup 31 is guided by the inclined portion and the vertical portion of the first guide cup body 32, and passes through the outer peripheral side of the outer peripheral wall portion 83 of the guide member 81. It is recovered in the processing liquid recovery tank 61. In this case, since the outer peripheral wall 83 of the guide member 81 is disposed above the first processing liquid recovery tank 61, the acidic processing liquid can be reliably guided to the first processing liquid recovery tank 61. . Further, the mist of the acidic treatment liquid can be liquefied by the guide member 81. Since the suction drive unit 73 is driven, the atmosphere around the wafer W is guided in the same manner as the acidic processing liquid and is discharged by the first exhaust member 71.

  While the acid treatment is performed, the inclined portion of the second guide cup body 42 and the inclined portion of the third guide cup body 52 are overlapped, and the second guide cup 41 and the third guide cup 51 are overlapped. Is blocked. Further, the inner peripheral end 52a of the third guide cup body 52 is close to the outer peripheral surface of the holding base lower member 24, and the opening 51a of the third guide cup 51 is closed. Accordingly, it is possible to suppress the acidic treatment liquid that has passed through the gap portion 23 from flowing into the second guide cup 41 and the third guide cup 51.

  Further, since the guide rotation cup 21 is rotating while the acid treatment is being performed, the gas in the gas guide space 35 is swung along the first lower extension 33 under the influence of centrifugal force. . The swirling gas is guided downward along the first lower extension 33 because the inner peripheral extension 34 is provided in the upper part of the gas guide space 35. In this case, since a gas flow from the gas guide space 35 into the first guide cup 31 is generated, the mist of the acidic treatment liquid rises between the first guide cup 31 and the guide rotation cup 21. Can be prevented. Further, since the first lower extension 33 extends from the inner peripheral end 32 a of the first guide cup body 32 to the vicinity of the gap 23, the first guide cup body 32 is swung off from the wafer W and rebounds on the inner surface of the first guide cup body 32. The mist of the acidic treatment liquid collides with the outer peripheral surface of the first lower extension 33 and is liquefied, and descends along the first lower extension 33. Further, even if the mist of the acidic treatment liquid that has rebounded from the inner surface of the first guide cup main body 32 adheres to the inner peripheral surface of the first lower extension portion 33, Since the flow is generated, the attached acidic treatment liquid descends along the first lower extension 33.

  After the acid treatment of the wafer W is completed, the wafer W is rinsed. In this case, the rinse treatment liquid is supplied to the nozzle 15 from a rinse treatment liquid supply source (not shown), and is discharged onto the surface of the rotating wafer W. During this time, the rinsing process liquid scattered from the wafer W is collected in the first process liquid recovery tank 61 in the same manner as the acidic process liquid, and the atmosphere around the wafer W is discharged by the first exhaust member 71. The

  Next, the elevating cylinder 87 is driven, and the second guide cup 41 and the third guide cup 51 are raised. In this case, first, the second guide cup 41 rises independently of the third guide cup 51. Subsequently, the protruding portion 55 of the third guide cup 51 abuts on the guide member main body 82 of the guide member 81, and the third guide cup 51 is supported by the second guide cup 41. Thereafter, the second guide cup 41 rises together with the third guide cup 51 until the opening 41 a of the second guide cup 41 faces the gap portion 23. In this way, the guide cups 31, 41, 51 are arranged in the form shown in FIG. In this case, the inclined portion of the first guide cup body 32 and the inclined portion of the second guide cup body 42 are separated, but the lower end portion 33a of the first downward extension 33 of the first guide cup 31 is The opening 31 a of the first guide cup 31 is closed by the first downward extension 33 near the inner peripheral end 42 a of the second guide cup body 42. Further, the inner peripheral end 52 a of the third guide cup body 52 is close to the outer peripheral surface of the holding base lower member 24, and the opening 51 a of the third guide cup 51 is closed. At this time, the lower end portion 84 a of the inner peripheral wall portion 84 of the guide member 81 is still inserted into the second processing liquid recovery tank 72.

  Thereafter, the wafer W is subjected to alkaline processing using an alkaline processing liquid. In this case, the alkaline processing liquid is supplied to the nozzle 15 from an alkaline processing liquid supply source (not shown) and discharged onto the surface of the rotating wafer W.

  As shown in FIG. 4, the alkaline processing liquid that has flowed into the opening 41 a of the second guide cup 41 is guided by the second guide cup body 42 and passes between the inner peripheral wall portion 84 and the partition wall 88 of the guide member 81. Then, it is recovered in the second processing liquid recovery tank 62. In this case, since the lower end portion 84 a of the inner peripheral wall portion 84 of the guide member 81 is inserted into the second processing liquid recovery tank 62, the alkaline processing liquid is reliably guided to the second processing liquid recovery tank 62. be able to. Moreover, the mist of the alkaline processing liquid can promote liquefaction by the guide member 81. Since the suction drive unit 73 is driven, the atmosphere around the wafer W is guided in the same manner as the alkaline processing liquid and is discharged by the first exhaust member 71.

  While the alkaline processing is being performed, the alkaline processing liquid containing the mist scattered from the wafer W and guided by the guide rotation cup 21 flows into the opening 41 a of the second guide cup 41. At this time, since the opening 31 a of the first guide cup 31 and the opening 51 a of the third guide cup 51 are closed, the alkaline processing liquid that has passed through the gap portion 23 is allowed to pass through the first guide cup 31 and the third guide cup 51. It can suppress flowing into the.

  In addition, while the alkaline treatment is being performed, the vertical positional relationship between the guide rotation cup 21 and the first guide cup 31 is not different from that during the acid treatment, so that the gas guide space 35 is similar to that during the acid treatment. Is formed. For this reason, a gas flow from the gas guide space 35 into the second guide cup 41 is generated.

  After the alkaline processing of the wafer W is completed, the wafer W is rinsed. In this case, the rinse treatment liquid is supplied to the nozzle 15 from a rinse treatment liquid supply source (not shown), and is discharged onto the surface of the rotating wafer W. During this time, the rinsing process liquid scattered from the wafer W is recovered in the second process liquid recovery tank 62 in the same manner as the alkaline process liquid, and the atmosphere around the wafer W is discharged by the first exhaust member 71. The

  Next, the elevating cylinder 87 is driven, and the second guide cup 41 and the third guide cup 51 are raised. In this case, in a state where the third guide cup 51 is supported by the second guide cup 41, the second guide cup 41 and the third guide cup 51, the opening 31 a of the first guide cup 31 faces the gap portion 23. To rise. In this way, the guide cups 31, 41, 51 are arranged in the form shown in FIG. In this case, the inclined portion of the first guide cup body 32 and the inclined portion of the second guide cup body 42 are overlapped, and the first guide cup 31 and the second guide cup 41 are closed. Further, the inclined portion of the second guide cup body 42 and the inclined portion of the third guide cup body 52 are separated from each other, but the lower end portion 33a of the first downward extension 33 of the first guide cup 31 is The opening 41a of the second guide cup 41 is closed close to the inner peripheral end 52a of the third guide cup body 52.

  Thereafter, the wafer W is dried using an organic processing liquid. In this case, the organic processing liquid is supplied to the nozzle 15 from an organic processing liquid supply source (not shown) and discharged onto the surface of the rotating wafer W.

  The organic processing liquid that has flowed into the opening 51a of the third guide cup 51 is guided by the inclined portion of the third guide cup main body 52, the contact portion 54, and the third lower extension 53, and below the partition wall 88 and the holding base. It passes through the member 24 and is recovered in the third processing liquid recovery tank 63. Further, since the suction drive unit 73 is driven, the atmosphere around the wafer W is guided in the same manner as the organic processing liquid, and above the third processing liquid recovery tank 63 and the fourth processing liquid recovery tank. The second exhaust member 72 passes through the upper part 64 and is discharged.

  While the drying process is being performed, the space between the first guide cup 31 and the second guide cup 41 is closed, and the opening 41a of the second guide cup 41 is closed. Accordingly, it is possible to suppress the organic processing liquid that has passed through the gap portion 23 from flowing into the first guide cup 31 and the second guide cup 41.

  In addition, while the drying process is being performed, the vertical positional relationship between the guide rotation cup 21 and the first guide cup 31 is not different from that during the acid process, so that the gas guide space 35 is similar to that during the acid process. Is formed. For this reason, a gas flow from the gas guide space 35 into the third guide cup 51 is generated.

  In this way, the processing of the wafer W is completed. Thereafter, the wafer W is removed from the substrate holder 12 and unloaded from the liquid processing chamber 11.

  Thereafter, when an unprocessed wafer W is loaded and the wafer W is subjected to an acidic process, the elevating cylinder 87 is driven to lower the second guide cup 41 and the third guide cup 51. In this case, first, the second guide cup 41 moves down together with the third guide cup 51, and the contact portion 54 of the third guide cup 51 contacts the upper end portion of the partition wall 88. As a result, the third guide cup 51 is supported by the partition wall 88. Thereafter, the second guide cup 41 is further lowered independently of the third guide cup 51, and the opening 31 a of the first guide cup 31 faces the gap portion 23. In this case, the inner peripheral end 52a of the third guide cup body 52 is close to the outer peripheral surface of the holding base lower member 24, and the opening 51a of the third guide cup 51 is closed. Further, the second guide cup body 42 is overlapped with the third guide cup body 52, and the space between the second guide cup 41 and the third guide cup 51 is closed. In this way, the guide cups 31, 41, 51 are arranged in the form shown in FIG. At this time, the lower end portion 84 a of the inner peripheral wall portion 84 of the guide member 81 is inserted into the second processing liquid recovery tank 62.

  Thus, according to the present embodiment, the guide member 81 is provided on the lower end portion 41 b of the second guide cup 41. Thus, the acidic processing liquid guided by the first guide cup 31 can be prevented from going directly to the first exhaust member 71, and the acidic processing liquid can be guided to the first processing liquid recovery tank 61. Further, the alkaline processing liquid guided by the second guide cup 41 can be prevented from going directly to the first exhaust member 71, and the alkaline processing liquid can be guided to the second processing liquid recovery tank 62. In addition, since the outer peripheral wall portion 83 of the guide member 81 is located above the first processing liquid recovery tank 61, the acidic processing liquid guided by the first guide cup 31 is the outer peripheral wall portion of the guide member 81. 83, it is possible to reliably guide to the first processing liquid recovery tank 61. In addition, since the lower end portion 84a of the inner peripheral wall portion 84 of the guide member 81 is inserted into the second treatment liquid recovery tank 62 during the alkaline treatment, the alkaline treatment liquid guided by the second guide cup 41 is It is possible to reliably guide to the second processing liquid recovery tank 62. For this reason, the recovery rate of each processing liquid scattered from the wafer W can be improved.

  Further, according to the present embodiment, during the acid treatment of the wafer W, the space between the second guide cup 41 and the third guide cup 51 is closed, and the inner peripheral end 52a of the third guide cup main body 52 is closed. Close to the holding base lower member 24, the opening 51a of the third guide cup 51 is closed. Thus, the acidic processing liquid can be guided by the first guide cup 31 and reliably recovered in the first processing liquid recovery tank 61. Further, when the wafer W is subjected to alkaline processing, the first lower extension 33 of the first guide cup 31 closes the opening 31 a, and the inner peripheral end 52 a of the third guide cup main body 52 approaches the holding base lower member 24. The opening 51a of the third guide cup 51 is closed. As a result, the alkaline processing liquid can be guided by the second guide cup 41 and reliably recovered in the second processing liquid recovery tank 62. Furthermore, during the drying process of the wafer W, the space between the first guide cup 31 and the second guide cup 41 is closed, and the first downward extension portion 33 of the first guide cup 31 opens the second guide cup 41. 41a is blocked. Thus, the organic processing liquid can be guided by the third guide cup 51 and reliably recovered in the third processing liquid recovery tank 63. For this reason, the recovery rate of each processing liquid scattered from the wafer W can be improved.

  Further, according to the present embodiment, the partition wall 88 is provided between the guide member 81 provided in the second guide cup 41 and the third downward extension 53 of the third guide cup 51. This prevents the alkaline processing liquid guided by the second guide cup 41 from flowing into the third processing liquid recovery tank 63 and allows the organic processing liquid guided by the third guide cup 51 to It is possible to prevent the two treatment liquid recovery tank 62 from flowing. For this reason, the recovery rate of each processing liquid scattered from the wafer W can be improved.

  In addition, according to the present embodiment, during the acid treatment, the gas in the gas guide space 35 is swung under the influence of the centrifugal force due to the rotation of the guide rotation cup 21, and the first downward extension portion. Guided downward along 33. Thus, a gas flow from the gas guide space 35 into the first guide cup 31 can be generated. In particular, since the cross section extending from the inner peripheral extension 34 to the first lower extension 33 is formed in an inverted U shape, the gas in the gas guide space 35 is reliably guided into the first guide cup 31. be able to. Moreover, since the 1st guide cup 31 is being fixed with respect to the liquid processing chamber 11, the positional relationship of the up-down direction of the guide rotation cup 21 and the 1st guide cup 31 at the time of an alkaline process and a drying process is an acid process. It is invariant to time. Accordingly, it is possible to generate a gas flow from the gas guide space 35 into the second guide cup 41 even during the alkaline treatment, and from the gas guide space 35 into the third guide cup 51 even during the drying treatment. A gas flow toward the can be generated. For this reason, each process liquid can be prevented from rising between the first guide cup 31 and the guide rotation cup 21. As a result, each processing liquid scattered from the wafer W can be prevented from reattaching to the wafer W, and the generation of particles can be suppressed. Further, in this case, each processing liquid is reliably guided to the corresponding processing liquid recovery tanks 61, 62, 63 via the corresponding guide cups 31, 41, 51. For this reason, the recovery rate of each processing liquid can be improved.

  Furthermore, according to the present embodiment, the first lower extension 33 extends from the inner peripheral end 32 a of the first guide cup body 32 to the vicinity of the gap 23. As a result, the acidic treatment liquid shaken off from the wafer W and rebounded from the inner surface of the first guide cup body 32 can collide with the outer peripheral surface of the first lower extension 33 to be liquefied and lowered. For this reason, even the acidic processing liquid that rebounds from the inner surface of the first guide cup body 32 can be guided to the first processing liquid recovery tank 61 through the first guide cup 31.

  As mentioned above, although embodiment by this invention has been described, naturally, various deformation | transformation are also possible within the range of the summary of this invention. Hereinafter, typical modifications will be described.

  That is, in the present embodiment, an example in which the guide member 81 has a U-shaped cross section that opens toward the first exhaust member 71 has been described. However, the present invention is not limited to this, and the guide member 81 may have a flat cross section that covers the top of the first exhaust member 71. Even in this case, the recovery rate of each processing solution can be improved.

  Moreover, in this Embodiment, the example of the 3 step | paragraph cup structure which has the 1st guide cup 31, the 2nd guide cup 41, and the 3rd guide cup 51 was demonstrated. However, the present invention is not limited to this, and the present invention is also applied to a two-stage cup configuration having only the first guide cup 31 and the second guide cup 41 or a one-stage cup configuration including only the first guide cup 31. can do.

  Moreover, in this Embodiment, the 3rd guide cup 51 demonstrated the example which raises / lowers with the 2nd guide cup 41 in a part of raising / lowering movement of the 2nd guide cup 41. FIG. However, the present invention is not limited to this, and the second guide cup 41 can always be configured to move up and down together with the third guide cup 51.

  In the present embodiment, the first guide cup 31 is fixed with respect to the liquid processing chamber 11, and the second guide cup 41 and the third guide cup 51 are moved relative to the first guide cup 31 by the lifting cylinder 87. An example of moving up and down has been described. However, the present invention is not limited to this, and the elevating cylinder 87 may be configured to raise and lower the first guide cup 31, the second guide cup 42, and the third guide cup 51. Further, the guide cups 31, 41, 51 may be fixed without moving up and down, and the substrate holder 12 may be moved up and down. Even in this case, each processing liquid scattered from the wafer W can be guided to the corresponding guide cups 31, 41, 51, and the guide member 81 can improve the recovery rate of each processing liquid. In this case, it is preferable that the first guide cup 31 does not have the first downward extension 33.

  Further, in the present embodiment, the inner peripheral extension 34 of the first guide cup 31 extends from the inner peripheral end 32 a of the first guide cup body 32 toward the guide rotary cup 21, and the inner peripheral extension 34. The example in which the cross section extending from the first downward extension portion 33 to the first downward extension portion 33 is formed in an inverted U shape has been described. However, the present invention is not limited to this, and extends from the first lower extension 33 of the first guide cup 31 to the inner peripheral side, and the guide rotary cup 21 rotates together with the guide rotary cup 21 and the first lower extension 33. In the meantime, if the gas in the gas guide space 35 can be guided downward, the shape of the inner peripheral extension 34 can be arbitrary.

  In the above description, the substrate liquid processing apparatus, the substrate liquid processing method, and the recording medium on which the computer program for executing the substrate liquid processing method is recorded are applied to the cleaning process of the semiconductor wafer W. An example is shown. However, the present invention is not limited to this, and the present invention can be applied to cleaning various substrates such as an LCD substrate or a CD substrate.

DESCRIPTION OF SYMBOLS 10 Substrate liquid processing apparatus 11 Liquid processing chamber 12 Substrate holding stand 12a Holding member 12b Outer peripheral end 13 Rotation drive shaft 14 Rotating motor 15 Nozzle 21 Guide rotation cup 21a Upper opening 23 Gap 24 Holding table lower member 31 First guide cup 31a Opening 32 First guide cup body 32a Inner peripheral end 33 First lower extension 33a Lower end 34 Inner peripheral extension 35 Gas guide space 36 Elevating groove 41 Second guide cup 41a Opening 41b Lower end 42 Second guide cup Main body 42a Inner peripheral end 43 Insertion groove 51 Third guide cup 51a Opening 52 Third guide cup main body 52a Inner peripheral end 53 Third lower extension 54 Contacting part 55 Protruding part 61 First treatment liquid recovery tank 62 First 2 Processing liquid recovery tank 63 Third processing liquid recovery tank 64 Fourth processing liquid recovery tank 71 First exhaust member 72 Second exhaust member 73 Suction drive portion 81 Guide member 82 Guide member main body 83 Outer peripheral wall portion 84 Inner peripheral wall portion 84a Lower end portion 85 Insertion portion 86 Connecting member 87 Elevating cylinder 88 Partition wall 91 Control unit 92 Input / output device 93 Recording medium W Wafer

Claims (8)

A substrate holder for holding the substrate;
A rotation driving unit for rotating the substrate holding table;
A processing liquid supply unit that selectively supplies a plurality of types of processing liquids to the substrate held on the substrate holding table;
A first guide cup and a second guide, which are provided around the substrate holding table and are provided in order from the top in order to guide the processing liquid splashed from the rotating substrate held and rotated by the substrate holding table downward. A cup,
A position adjusting mechanism that adjusts a positional relationship between the substrate holding table and the first guide cup and the second guide cup;
A first treatment liquid recovery tank provided in a lower region of the first guide cup and the second guide cup and for recovering the treatment liquid guided by the first guide cup;
A second processing liquid recovery tank that is provided on an inner peripheral side of the first processing liquid recovery tank and recovers the processing liquid guided by the second guide cup;
An exhaust member that is provided between the first processing liquid recovery tank and the second processing liquid recovery tank and exhausts the atmosphere around the substrate via the first guide cup and the second guide cup. When,
Provided at the lower end of the second guide cup, guides the processing liquid from the first guide cup to the first processing liquid recovery tank, and transfers the processing liquid from the second guide cup to the second processing liquid. A guide member for guiding to the recovery tank,
The second guide cup includes an inclined portion extending obliquely downward on the outer peripheral side, and a vertical portion extending vertically downward from the outer peripheral end of the inclined portion,
The guide member is provided at a lower end portion of the vertical portion and extends radially from a guide member main body, an outer peripheral wall portion extending downward from the guide member main body, and an inner peripheral side of the outer peripheral wall portion. And an inner peripheral wall portion extending downward from the guide member body,
The outer peripheral wall is disposed at a position corresponding to the first processing liquid recovery tank, and the inner peripheral wall is disposed at a position corresponding to the second processing liquid recovery tank ,
The outer peripheral wall portion of the guide member is disposed radially outward from the vertical portion of the second guide cup, and the inner peripheral wall portion of the guide member has a diameter larger than that of the vertical portion of the second guide cup. board liquid processing apparatus you characterized in that it is disposed inwardly. The position adjusting mechanism is configured to raise and lower the second guide cup relative to the first guide cup,
The inner peripheral wall portion extends downward from the outer peripheral wall portion,
The substrate liquid processing apparatus according to claim 1, wherein the lower end portion of the inner peripheral wall portion is inserted into the second processing liquid recovery tank when the processing liquid is guided by the second guide cup. The first guide cup has a first guide cup main body and a downward extension extending downward from an inner peripheral end of the first guide cup main body,
The substrate liquid processing apparatus according to claim 2, wherein the lower extension portion of the first guide cup closes an opening of the first guide cup when guiding the processing liquid by the second guide cup. A third guide cup which is provided below the second guide cup and guides the processing liquid scattered from the substrate held and rotated by the substrate holder downward;
A third processing liquid recovery tank that is provided on the inner peripheral side of the second processing liquid recovery tank and recovers the processing liquid guided by the third guide cup;
A partition wall that divides a flow path from the second guide cup to the second processing liquid recovery tank and a flow path from the third guide cup to the third processing liquid recovery tank; The substrate liquid processing apparatus according to claim 3. The third guide cup is movable up and down together with the second guide cup,
When the processing liquid is guided by the third guide cup, the space between the first guide cup and the second guide cup is closed, and the downward extension of the first guide cup is formed by the second guide cup. The substrate liquid processing apparatus according to claim 4, wherein an opening of the substrate is closed. A third guide cup which is provided below the second guide cup and guides the processing liquid scattered from the substrate held and rotated by the substrate holder downward;
A third processing liquid recovery tank that is provided on the inner peripheral side of the second processing liquid recovery tank and recovers the processing liquid guided by the third guide cup;
A partition wall that divides a flow path from the second guide cup to the second processing liquid recovery tank and a flow path from the third guide cup to the third processing liquid recovery tank; The substrate liquid processing apparatus according to claim 1.   2. The apparatus according to claim 1, further comprising a second exhaust member that is provided on an inner peripheral side of the third processing liquid recovery tank and exhausts the atmosphere around the substrate through the third guide cup. The substrate liquid processing apparatus according to any one of 4 to 6.   The first processing liquid recovery tank, the exhaust member, the second processing liquid recovery tank, and the third processing liquid recovery tank have a ring-shaped planar cross section and are formed concentrically. The substrate liquid processing apparatus according to claim 4, wherein:

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