JP5383887B2 - Displacement detection device, control device, machine tool device, irradiation device, and displacement detection method - Google Patents

Description

  The present invention relates to a displacement detection method and a motor control device, and more particularly, to a displacement detection method that corrects a detection angle and a motor control device that improves detection accuracy by correcting the detection angle.

  A small output electric motor called a galvano motor is used in machine tool devices such as a laser drilling machine, a laser trimmer device, and a laser repair device. The galvano motor is required to have a highly accurate angle detector, and an incremental encoder is employed.

  Optical incremental encoders and linear encoders are known as incremental encoders. Such an encoder detects displacement information such as a displacement amount and a displacement direction of an object to be detected by using two signals (a sine wave signal and a cosine wave signal) whose phases are different by 90 °.

  Conventionally, in many encoders, the amplitude, offset, and phase of an output signal are corrected in order to improve detection accuracy.

For example, Japanese Patent Application Laid-Open No. 8-145719 (Patent Document 1) discloses amplitude correction, offset correction, and phase based on information on the maximum and minimum values of an encoder output signal and the intersection of two-phase output signals. It is described that correction is performed. Japanese Patent Laid-Open No. 10-254549 (Patent Document 2) describes that amplitude correction and offset correction are performed based on the average value of the maximum value and the average value of the minimum value of the output signal of the encoder. .
JP-A-8-145719 JP-A-10-254549

  However, the conventional correction means performs correction on the assumption that the output signal of the encoder is an ideal sine wave signal. Actually, however, the output signal of the encoder is not an ideal sine wave signal because it includes harmonic components and nonlinear components. For this reason, even when the output signal of the encoder is corrected by the conventional correction means, the output signal of the encoder is not an ideal sine wave signal.

  Many encoders generate a plurality of divided pulses having a phase difference corresponding to a division unit from a sine wave signal and a cosine wave signal, thereby increasing the detection resolution of displacement information of an object to be detected. Such a method is called electric division, but the fact that the output signal of the encoder is not an ideal sine wave signal has caused an error in electric division.

  Further, the encoder is processed so that the scale pitch becomes equal intervals, but actually has a processing error.

  Therefore, the present invention reduces an error in displacement detected by a displacement detection means such as an encoder.

  A representative one of the present invention is a displacement detection device including displacement detection means for detecting displacement as an output of an actuator, and a vibration drive command is supplied to the actuator and detected by the displacement detection means. A plurality of ratios between the amplitude of the displacement and the amplitude of the drive command are obtained over a predetermined range of the displacement, and the displacement detected by the displacement detection means is corrected based on the obtained plurality of ratios. It is a displacement detection apparatus characterized by having the correction means to do.

  A representative one of the present invention is a displacement detection method using displacement detection means for detecting displacement as an output of an actuator, wherein a vibration drive command is supplied to the actuator to detect the displacement. A plurality of ratios between the amplitude of the displacement detected by the means and the amplitude of the drive command are obtained over a predetermined range of the displacement, and the detection of the displacement detected by the displacement detection means based on the obtained plurality of ratios The displacement detection method is characterized by correcting the displacement.

  According to the present invention, it is possible to reduce a displacement error detected by a displacement detection means such as an encoder.

1 is a control block diagram of a motor control device in Embodiment 1. FIG. It is a figure which shows the relationship between rotation angle (theta) m of the motor in Example 1, and detection angle (theta) m 'by an encoder. It is a figure which shows the relationship between rotation angle (theta) m of the motor in Example 1, and detection error (theta) m'-thetam. It is a figure which shows the amplitude spectrum of the drive torque Tm of the motor in Example 1. FIG. FIG. 5 is a diagram illustrating an amplitude spectrum of an angle response θm′p of a detected angle θm ′ of the motor in the first embodiment. It is a figure which shows the correction data in Example 1. FIG. FIG. 6 is a diagram illustrating a detection error θm′−θ before correction and a detection error θm ″ −θ after correction in the first embodiment. It is a figure which shows the relationship between rotation angle (theta) m of the motor in Example 2, and detection angle (theta) m 'by an encoder. It is a figure which shows the relationship between rotation angle (theta) m of the motor in Example 2, and detection error (theta) m'-thetam. It is a figure which shows the correction data in Example 2. FIG. FIG. 10 is a diagram illustrating a detection error θm′−θ before correction and a detection error θm ″ −θ after correction in the second embodiment. 6 is a flowchart illustrating a correction procedure in the first embodiment. It is the schematic which shows an example of a laser processing machine. It is the schematic which shows an example of a motor control apparatus. It is a top view which shows an example of the scale of a rotary encoder. It is a figure which shows the A phase signal and B phase signal of an encoder output.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  First, a configuration of a laser processing machine will be described as an example of a machine tool device. FIG. 13 shows a schematic diagram of the laser processing machine 100. The laser processing machine 100 is used for a wide range of applications such as cutting and drilling of substrates and welding between metals.

  The laser processing machine 100 of this embodiment includes rotary motors 101 and 102. The rotation motors 101 and 102 are provided to rotate the mirrors 103 and 104, respectively. The mirrors 103 and 104 are rotationally driven by the rotary motors 101 and 102, and their directions change.

  Thus, the traveling direction of the laser light L can be changed by changing the direction of the mirrors 103 and 104 using the rotary motors 101 and 102. As will be described later, the rotary motors 101 and 102 are provided with an encoder for detecting the rotational displacement amount of the motor. By accurately detecting the rotational displacement amount of the motor, the traveling direction of the laser light L can be accurately controlled.

  The laser beam L emitted from the laser oscillator 105 is applied to the laser processing surface 106 via the mirrors 103 and 104. A wide range of materials such as metal, glass, and plastic can be selected as the laser processed surface 106 to be processed.

  As described above, in the laser processing machine 100, the traveling direction of the laser light L can be accurately controlled by rotating the mirrors 103 and 104. For this reason, even when the laser processing surface 106 is not flat, the laser processing surface 106 can be processed with high accuracy.

  Next, the configuration of the motor control device used in the laser processing machine 100 will be described. FIG. 14 shows a schematic diagram of the motor control device. FIG. 15 is a schematic plan view of the encoder scale 201.

  The motor control device 200 of this embodiment has an optical encoder for detecting the rotational displacement amount of the rotary motor 101. The encoder includes a scale 201 having a rotating slit disk and a fixed slit disk, and a sensor unit 202 having a light emitting element (light emitting diode) and a light receiving element (photodiode). The rotary slit disk rotates with the rotation of the rotary motor 101, and the fixed slit disk is fixed. The encoder has a configuration in which a rotating slit disk and a fixed slit disk are disposed between a light emitting element and a light receiving element.

  A large number of slits are provided in the rotating slit disk and the fixed slit disk. The light of the light emitting element is transmitted or blocked by the rotation of the rotating slit disk. The fixed slit disk is divided into a plurality of fixed slits in order to make the encoder output signal into a plurality of phases. For this reason, a plurality of light emitting elements and light receiving elements are also provided.

  As shown in FIG. 15, the encoder scale 201 is provided with slits of an A-phase pattern 205 and a B-phase pattern 206. The scale 201 rotates around the rotation shaft 204. During rotation, when light from the light emitting element passes through the slits of the A phase pattern and the B phase pattern, each of the two light receiving elements detects light of the light emitting element. As a result, as shown in FIG. 16, an A-phase signal and a B-phase signal that are 90 ° out of phase with each other are generated. Note that the A-phase signal and the B-phase signal in FIG. 16 are rectangular wave signals obtained by waveform-shaping the sinusoidal encoder output by the waveform shaping circuit.

  The motor controller 203 controls the rotational drive of the rotary motor 101. The motor controller 203 compares the motor rotation angle that is the target value with the motor detection angle that is the actual measurement value, and performs feedback control so that the actual measurement value becomes equal to the target value. As a result, the direction of the mirror 103 can be changed to an angle as the target value.

  Note that the detection principle of the encoder is not limited to the optical method, and other methods such as a magnetic method may be employed.

  Next, a displacement detection method and a motor control device according to the first embodiment of the present invention will be described. FIG. 1 is a control block diagram executed by the controller of the motor control device.

The control block in FIG. 1 is a positioning control system that uses a rotary encoder as an angle detector for detecting the rotation angle θm of the motor. This figure shows a simple motor model in which the position response to the torque command is 1 / s ² and a proportional control positioning control system that performs position and speed feedback.

  1 is a target angle command. The target angle command 1 commands a target value of the rotation angle θm output from the motor 17. Reference numeral 2 denotes a first adder. The first adder 2 feeds back the correction angle 19 output from the correction means 18 and adds the target value based on the target angle command 1 and the correction angle 19. Reference numeral 3 denotes a second adder. The second adder 3 adds the output signal of the first adder 2 and the speed feedback signal output from the differentiator 12.

  4 is a torque command. The torque command 4 is calculated by passing the target angle command 1 through the first adder 2 and the second adder 3. Reference numeral 5 denotes a third adder. The third adder 5 superimposes the sine wave signal generated by the signal generator 13 on the torque command 4. 6 is a driving torque. The driving torque 6 is output from the third adder 5 and supplied to the motor 17. As described above, the third adder functions as a driving unit that supplies the driving torque 6 to the motor.

Reference numeral 17 denotes a motor. The motor 17 includes integrators 7 and 8 and outputs a rotation angle 9 (θm) of the motor through these integrators. The reason why the motor 17 of this embodiment includes the two integrators 7 and 8 is that a motor model in which the position response to the torque command 4 is 1 / s ² is considered.

  Here, the rotation angle 9 (θm), which is the displacement amount of the motor, indicates the actual rotation angle of the motor. That is, the rotation angle 9 (θm) is an actual displacement amount of the motor. For this reason, it differs from the detected angle (actually measured value) detected by the encoder.

  Reference numeral 10 denotes an encoder. The encoder 10 is a displacement detection unit that detects an actual rotation angle 9 (θm) of the motor 17. Reference numeral 11 denotes a detection angle θm ′. The detection angle 11 (θm ′) is a displacement amount (angle) detected by the encoder 10 which is a displacement detection means. The encoder 10 detects the actual rotation angle 9 (θm) of the motor 17 and calculates the detection angle 11 (θm ′) of the motor 17. Note that the sine wave signal output from the encoder 10 includes a harmonic component. Further, there is a possibility that the scale of the encoder 10 has a processing error. Therefore, strictly speaking, the detected angle 11 (θm ′) of the motor obtained by the encoder 10 is different from the actual rotational angle 9 (θm) of the motor 17. That is, there is an error between the actual rotation angle 9 (θm) of the motor 17 and the detected angle (θm ′) of the motor 17 detected by the encoder 10.

  Reference numeral 12 denotes a differentiator. The differentiator 12 obtains the rotational speed of the motor by differentiating the correction angle 19 (θ ″) corrected by the correction means 18 with time. The rotational speed obtained by the differentiator 12 is input to the second adder 3 as a speed feedback signal.

  Reference numeral 13 denotes signal generation means. The signal generating means 13 of the present embodiment generates a sine wave signal having a predetermined amplitude and frequency, and supplies this sine wave signal to a third adder that is a driving means. The signal generating means 13 of the present embodiment generates a sine wave signal, but instead of this, other signals such as Gaussian noise and triangular wave may be generated and supplied to the third adder. .

  Reference numeral 14 denotes a first Fourier transformer. The first Fourier transformer 14 receives the drive torque 6 output from the third adder 5 and performs a Fourier transform of the drive torque 6. A first amplitude spectrum is output from the first Fourier transformer 14 as a result of performing a Fourier transform of the driving torque 6.

  Reference numeral 15 denotes a second Fourier transformer. The second Fourier transformer 15 receives the detection angle 11 (θm ′) of the motor obtained based on the output signal of the encoder, and performs a Fourier transform of the detection angle 11. A second amplitude spectrum is output from the second Fourier transformer 15 as a result of performing a Fourier transform of the detection angle 11.

  Reference numeral 16 denotes correction data generation means. The correction data generation unit 16 obtains an amplitude spectrum ratio between the first amplitude spectrum and the second amplitude spectrum. Further, the correction data generating means 16 generates correction data W [n] from the amplitude spectrum ratio. That is, the correction data generation means 16 generates correction data from the driving torque 6 when a predetermined sine wave signal is supplied to the third adder 5 and the detection angle θm ′ detected by the encoder 10.

  Reference numeral 18 denotes correction means. The correction unit 18 corrects the detected angle 11 (θm ′) of the motor detected by the encoder using the correction data W [n] generated by the correction data generation unit 16. The correction unit 18 corrects the detection angle 11 (θm ′) by the encoder serving as the displacement detection unit so as to be equal to the actual rotation angle 9 (θm) of the motor. For this reason, the correction angle 19 corrected by the correction means 18 is a value very close to the actual rotation angle (θm) of the motor. The correction angle 19 is fed back to the first adder 2 and the second adder 3.

  Next, a detection angle error generated in the control block of FIG. 1 and a correction method thereof will be described in detail below.

First, an error that an encoder signal including a harmonic component gives to the detection angle θm ′ of the motor will be described. In this embodiment, a rotary encoder is used as an angle detector in a rotary motor. The encoder functions as a motor displacement detection means.
The encoder outputs a sinusoidal two-phase signal at 140000 cycles per rotation of the motor. When the rotation angle of the motor is θm [rad], the phase angle θe of the encoder is

The two-phase signals Asig and Bsig of the encoder that outputs an ideal sine wave are

It becomes. Here, an encoder signal including the following third and fifth harmonics is considered.

Here, assuming that an encoder signal including harmonics is an ideal sine wave signal, an error in the case of electrical division by tan ⁻¹ (arc tangent) is considered. When the phase angle θe ′ of the encoder is obtained from the encoder signal including harmonics,

It becomes. Further, the detected angle of the motor θm ′ [rad] is determined from the phase angle θe ′ of the encoder.

It is represented by Here, since the encoder is a periodic function, the phase angle θe of the encoder is considered in the range of −π ≦ θe ≦ π.

  FIG. 2 shows the relationship between the detected angle θm ′ of the motor and the rotational angle θm of the motor at this time. In FIG. 2, the horizontal axis represents the motor rotation angle θm, and the vertical axis represents the motor detection angle θm ′ obtained by electrical division. In the ideal case where the detection error is zero, the graph shown in FIG. 2 is linear. However, since an error actually occurs, the graph shown in FIG. 2 is a distorted straight line.

  FIG. 3 shows the relationship between the detection error θm′−θm by the encoder and the rotation angle θm of the motor. In FIG. 3, the horizontal axis represents the motor rotation angle θm, and the vertical axis represents the detection error θm′−θm between the motor rotation angle θm and the motor detection angle θm ′ obtained by electrical division. In an ideal case where the detection error is zero, the detection error θm′−θm on the vertical axis always shows zero regardless of the rotation angle θm on the horizontal axis. However, since an error actually occurs, the graph shown in FIG. 3 changes in a sine wave shape.

  As described above, a detection error due to the harmonic component of the encoder output occurs between the actual rotation angle θm of the motor and the detection angle θm ′ detected by the encoder.

  Next, a correction method of the detection angle θm ′ detected by the encoder will be described with reference to a correction procedure flowchart shown in FIG. The correction method of this embodiment is performed in a state where the encoder is incorporated in the motor.

  In addition, the motor control device of the present embodiment has a correction mode for correcting the detection angle of the encoder and a control mode for performing actual motor control. The motor control device corrects the detection angle in the correction mode and then shifts to the control mode to perform normal motor control.

  In the control system shown in FIG. 1, a motor detection angle θm ′ is detected by an encoder to perform motor positioning control. here,

The correction coefficient at 360 points represented by

  First, in Equation (8), a position (angle) that satisfies θm ′ [0] = − π / 140000 (when n = 0) is detected (step S1). Then, the motor is controlled to be positioned at this position (step S2). Next, with the positioning controlled, the 100 Hz sine wave signal generated by the signal generating means 13 is superimposed on the torque command 4 (step S3). The frequency of the sine wave is not limited to 100 Hz, and other frequencies can be used.

  Based on this result, the driving torque 6 output from the third adder 5 is supplied to the motor 17 and the angular response of the driving torque 6 and the detected angle θm ′ is measured (step S4). The driving torque at this time is Tm [0], and the angle response of the detected angle θm ′ of the motor is θm′p [0].

  Here, it is determined whether or not the value of n is smaller than 360 (step S5). If the value of n is smaller than 360, 1 is added to n (step S6), and the operations from step S2 to step S4 are repeated. That is, in the case of n = 1, 2,... 358, 359 (n <360), similarly to the case of n = 0, the motor driving torque Tm [n] and the angle response θm of the detected angle θm ′. 'p [n] is obtained (step S4).

  When the value of n reaches 360, each of the motor drive torque Tm and the angle response θm′p is Fourier-transformed to obtain each amplitude spectrum (step S7). FIG. 4 shows an amplitude spectrum of the motor driving torque Tm. Further, the amplitude spectrum of the angle response θm′p is shown in FIG. Note that the amplitude spectrum shown in FIGS. 4 and 5 represents only the term of the superimposed frequency 100 Hz of the sine wave signal.

  Here, when there is no detection error by the encoder, the angle response θm′p of the detection angle θm ′ of the motor 17 is constant with respect to the driving torque Tm. In other words, the amplitude spectrum (amplitude spectrum ratio) of the angle response with respect to the amplitude spectrum of the drive torque Tm is constant.

  However, in reality, a detection error by the encoder has occurred. For this reason, as shown in FIGS. 4 and 5, when the detection angle θm ′ is used, the amplitude spectrum ratio is not constant.

  Therefore, when a detection error occurs, correction data W [n] for making the amplitude spectrum ratio constant is created (step S8). The correction data W [n] is weight data when the detected angle θm ′ is θm ′ [n] ≦ θm ′ <θm ′ [n + 1], and satisfies the following formulas (9) and (10). Ask for.

    Here, K in Equation (9) is an arbitrary constant. DFT (θm′p) is an amplitude spectrum (100 Hz term) obtained by Fourier transform of the angle response θm′p of the detection angle θm. DFT (Tm) is an amplitude spectrum (100 Hz term) obtained by Fourier transforming the drive torque Tm. FIG. 6 shows the relationship between the correction data W and the detection angle θm ′. By performing correction using such correction data W, the amplitude spectrum ratio between the drive torque Tm and the angle response θm′p becomes constant. The measurement of the amplitude spectrum and the measurement of the amplitude spectrum ratio can also be performed immediately after the measurement of the drive torque Tm [n] and the angle response θm′p [n] (step S4 in FIG. 12).

  A correction angle θm ″ obtained by correcting the detection angle θm ′ is obtained by using the correction data W [n] (step S9). When the detection angle θm ′ satisfies (2π / 360) × (n−180) / 140000 ≦ θm ′ <(2π / 360) × ((n + 1) −180)) / 140000, the correction angle θm ″

It is represented by

FIG. 7 shows the detection error θm ″ −θm after correction and the detection error θm′−θm before correction with respect to the rotation angle θ of the motor. In FIG. 7, the horizontal axis represents the motor rotation angle θm, and the vertical axis represents the detection error. Further, the detection error θm′−θm between the rotation angle θm of the motor and the detection angle θm ′ before correction is indicated by a broken line,
A detection error θm ″ −θm between the motor rotation angle θm and the corrected detection angle θm ″ is indicated by a solid line.

  As shown in FIG. 7, the detection error θm′−θm before correction is large. However, the corrected detection error θm ″ −θm is extremely small. That is, the correction angle θm ″ calculated using the correction data W is very close to the actual motor rotation angle θm.

  As described above, in the displacement detection method of this embodiment, the amplitude spectrum is sequentially measured at a plurality of detection angles within the range to be corrected among the detection angles θm ′ of the motor. Then, the detection angle θm ′ is corrected so that the position response of the detection angle θm ′ with respect to an arbitrary driving torque is the same as the response of the driving torque.

  When the correction angle θm ″ is calculated in the correction mode, the motor control device shifts to a control mode in which normal motor control is performed. In the control mode, the third adder 5 which is a driving unit of the motor control device drives and controls the motor 17 using the correction angle θm ″ calculated in the correction mode.

  As described above, according to the present embodiment, the detection error for the output signal of the encoder including the harmonic signal can be effectively reduced by using the correction data W for making the amplitude spectrum ratio constant. As a result, it is possible to provide a displacement detection method that reduces errors due to harmonic components included in the output signal of the encoder. Further, since the detection angle of the encoder is corrected so as to reduce the detection error of the encoder, a highly accurate motor control device can be provided.

  In this embodiment, a case is considered in which there is a machining error in the encoder scale pitch. Similar to the first embodiment, a rotary encoder is used as an angle detector in the rotary motor.

  Similar to the first embodiment, the encoder of the present embodiment outputs a sinusoidal two-phase signal at 140000 cycles per rotation of the motor. Assuming that the actual rotation angle of the motor is θm [rad], the phase angle θe of the encoder is similar to Equation (1),

It is represented by Further, the two-phase sine wave signals Asig and Bsig of the encoder are as follows, similarly to the equations (2) and (3).

However, when there is a processing error in the scale pitch, the relationship of Expression (12) is not satisfied, and an accurate position cannot be detected. In this embodiment, a procedure for correcting the detected angle θm ′ of the motor when there is a processing error of the scale pitch as described above will be described.

  First, an error that an encoder output signal having a processing error in the scale pitch gives to the detected angle of the motor will be described.

  Consider a scale that satisfies Equations (15) and (16) with respect to the rotation angle θm of the motor. When the rotation angle range of the motor is (−π / 140000) × 1.2 ≦ θm <0, the phase angle θe ′ of the encoder is

It is represented by When the rotation angle range of the motor is 0 ≦ θm <(π / 140000) × 0.8, the phase angle θe ′ of the encoder is

It is represented by At this time, a processing error that satisfies the relationship of Expressions (15) and (16) occurs in the scale of the encoder of the present embodiment. It is assumed that there is no scale processing error in a range other than the above. Assuming that the output signal of the encoder is an ideal one that does not include harmonics, the detected angle θm ′ of the motor is

It becomes.

  FIG. 8 shows the relationship between the detected angle θm ′ of the motor and the rotational angle θm of the motor at this time. In FIG. 8, the horizontal axis represents the motor rotation angle θm, and the vertical axis represents the motor detection angle θm ′ detected by the encoder having a scale processing error. In an ideal case where the processing error is zero, the graph shown in FIG. 8 is linear. However, since a processing error that satisfies Equations (15) and (16) occurs in the scale of this embodiment, the graph shown in FIG. 2 is a distorted straight line.

  FIG. 9 shows the relationship between the detection error θm′−θm by the encoder having a scale processing error and the rotation angle θm of the motor. In FIG. 9, the horizontal axis represents the rotation angle θm of the motor, and the vertical axis represents the detection error θm′−θm between the rotation angle θm of the motor and the detection angle θm ′ of the motor detected by the encoder having a scale processing error. In an ideal case where the processing error is zero, the detection error θm′−θm on the vertical axis always shows zero regardless of the rotation angle θm on the horizontal axis. However, since a machining error has actually occurred, it changes as shown in FIG.

  Next, a method of correcting the detection error θm′−θm accompanying the scale processing error will be described. The correction method is the same as the correction method in the first embodiment. First, in a state where positioning control is performed, a 100 Hz sine wave signal is superimposed on the torque command to the motor. A driving torque superimposed with a sine wave signal is applied to the motor, and the driving torque Tm and the motor angular response θm′p are measured. Thereafter, correction data is created using Equations (8) to (10).

  FIG. 10 shows the correction data W created in this embodiment. The vertical axis represents the correction data W, and the horizontal axis represents the detection angle θm ′. Since the processing error of the scale of the present embodiment satisfies Expressions (15) and (16), the correction data W indicates 1.2 when the detection angle θm ′ is smaller than 0. The correction data W indicates 0.8 when the detection angle θm ′ is 0 or more.

  Next, the correction angle θm ″ obtained by correcting the detection angle θm ′ using the correction data W will be described.

  FIG. 11 shows a detection error θm ″ −θm after correction and a detection error θm′−θm before correction with respect to the rotation angle θ of the motor. In FIG. 11, the horizontal axis represents the motor rotation angle θm, and the vertical axis represents the detection error. A detection error θm′−θm between the motor rotation angle θm and the detection angle θm ′ before correction is indicated by a broken line, and a detection error θm ″ − between the motor rotation angle θm and the correction detection angle θm ″ is corrected. θm is indicated by a solid line.

  As shown in FIG. 11, the detection error θm′−θm before correction is large. However, the corrected detection error θm ″ −θm is extremely small. That is, the correction angle θm ″ calculated using the correction data W is very close to the actual motor rotation angle θm.

  When the correction angle θm ″ is calculated in the correction mode, the motor control device shifts to a control mode in which normal motor control is performed. In the control mode, the third adder 5 which is a driving unit of the motor control device drives and controls the motor 17 using the correction angle θm ″ calculated in the correction mode.

  As described above, according to the present embodiment, it is possible to effectively reduce the detection error due to the encoder scale processing error by using the correction data W for making the amplitude spectrum ratio constant. As a result, it is possible to provide a displacement detection method that reduces detection errors due to scale processing errors. In addition, a highly accurate motor control device can be provided by correcting the detected angle of the encoder based on the scale processing error.

  The present invention has been specifically described above based on the embodiments. However, the present invention is not limited to the above-described embodiments, and can be appropriately changed within the scope of the technical idea of the present invention.

  For example, in the first and second embodiments, a rotating mechanism is used as the movable mechanism, but a linear motion mechanism can be used instead. Therefore, the present invention can be applied to both a rotary encoder and a linear encoder. Further, although a motor is used as the movable mechanism, an actuator such as a piezo can be used instead.

  Further, an encoder is used as the displacement detection means, but instead of this, a capacitance sensor or PSD (Position Sensitive Detector) can be used. If a capacitance sensor or PSD is used, it is possible to perform linearity correction for displacement detection.

  Further, a differential value of the first or higher order of the driving force or the displacement amount or an integral value thereof may be used so that the displacement amount has a fixed relationship with the driving force.

  In the second embodiment, even if the encoder scale pitch is inhomogeneous, displacement correction can be performed by setting an angle or position range including inhomogeneity and obtaining a correction weighting factor.

  Further, according to the galvano motor positioning device using the correction method of the above embodiment, or the laser processing machine and the machine tool using the same, the detection accuracy of the encoder can be easily improved and the positioning accuracy can be improved. it can. This can improve the performance of the machine and improve the quality of the workpiece and workpiece.

DESCRIPTION OF SYMBOLS 1 Target angle instruction | command 2 1st adder 3 2nd adder 4 Torque instruction | command 5 3rd adder 6 Driving torque 7, 8 Integrator 9 Rotation angle 10 Encoder 11 Detection angle 12 Differentiator 13 Signal generation means 14 1st 1 Fourier transform 15 Second Fourier transform 16 Correction data generation means 17 Motor 18 Correction means 19 Correction angle 100 Laser processing machine 101, 102 Rotation motor 103, 104 Mirror 105 Laser transmitter 106 Laser processing surface 200 Motor controller 201 Scale 202 Sensor unit 203 Controller

Claims (10)

A displacement detection device including displacement detection means for detecting displacement as an output of an actuator,
A plurality of drive commands to be oscillated are supplied to the actuator, and a plurality of ratios of the amplitudes of the displacements detected by the displacement detection means and the drive commands are obtained over a predetermined range of the displacements. A displacement detection apparatus comprising correction means for correcting the displacement detected by the displacement detection means based on the ratio.   The correction means generates correction data so that the ratio is constant over the range, and corrects the displacement detected by the displacement detection means using the correction data. The displacement detection device described in 1.   The displacement detection apparatus according to claim 1, wherein the drive command is a sine wave signal.   The said correction | amendment means calculates | requires the amplitude spectrum of the said displacement detected by the said displacement detection means, and the amplitude spectrum of the said drive command, The said ratio is obtained, The any one of Claim 1 thru | or 3 characterized by the above-mentioned. The displacement detection device described in 1.   The displacement detection device according to any one of claims 1 to 4, wherein the displacement detection means is an encoder.   The displacement detection device according to any one of claims 1 to 5, wherein the actuator is a motor. An actuator,
The displacement detection device according to any one of claims 1 to 6, wherein displacement as an output of the actuator is detected.
And a control means for controlling the actuator based on the displacement detected by the displacement detection device.   A machine tool device comprising the control device according to claim 7. A control device according to claim 7;
A mirror driven by the actuator,
An irradiation apparatus for irradiating a target with light through the mirror. A displacement detection method using displacement detection means for detecting displacement as an output of an actuator,
A plurality of drive commands to be oscillated are supplied to the actuator, and a plurality of ratios of the amplitudes of the displacements detected by the displacement detection means and the drive commands are obtained over a predetermined range of the displacements. A displacement detection method comprising correcting the displacement detected by the displacement detection means based on a ratio.