JP5372787B2 - electronic microscope - Google Patents

Description

  The present invention relates to an electron microscope having a structure in which the periphery is covered with a shield cover.

  An electron microscope is a type of electron microscope that observes an interference image created by irradiating an electron beam to a sample to be observed and transmitting or reflecting the electron beam. Widely used in science and medicine. This electron microscope has a problem that it is easily affected by external vibration, airflow, or dust in order to enlarge and observe an observation object with high resolution. Thus, recent electron microscopes have been proposed that have a structure in which the outer periphery of the apparatus is covered with a shield cover.

  Specifically, the structure is such that a lens barrel portion including an electron gun, a sample insertion portion, and the like, and the entire gantry housing on which the lens barrel portion is placed are covered with a shield cover. The shield cover is provided with an opening / closing door, and the specimen to be observed is set on the lens barrel through the opening / closing door. The image to be observed is observed with a monitor device.

JP 2008-34231 A JP-A-11-154478

  The electron microscope can be broadly divided into a transmission electron microscope (TEM) that applies an electron beam to the sample to be observed and magnifies the electrons that have passed through it, and an electron to the sample to be observed. There is known a scanning electron microscope (SEM) that observes an image obtained from electrons (or secondary electrons) reflected from a line. In recent years, a scanning transmission electron microscope (STEM), which has both features, has also attracted attention. In these electron microscopes, it is possible to easily obtain high resolution by covering the entire appearance of the electron microscope main body including the lens barrel and the gantry housing that supports the lens barrel with the cover.

  However, in a transmission electron microscope, not only an image to be observed is indirectly viewed on a monitor device, but also the image to be observed is directly observed from an observation window provided in the main body of the electron microscope. Specifically, a table surface is formed in the vicinity of the top surface of the gantry housing, and an observer sits so as to face the table surface and looks into the observation window portion.

  In this type of electron microscope that directly looks at the image to be observed, it is necessary for the observer to be able to take a comfortable sitting posture for a long time, but in the conventional structure in which the entire main body of the electron microscope is covered with a shield cover , This problem has not been solved. In addition, in the conventional structure in which the entire device is covered with the shield cover, the shape of the shield cover has a box-shaped or cylindrical upright wall surface, so that when the device is enlarged, the overall volume becomes more conspicuous. There is a problem. In addition, such a conventional structure has a problem in workability because there is no space for borrowing maintenance parts and observation objects.

  On the other hand, in a large-sized electron microscope, in order to more stably install the main body, it is necessary to increase the installation area of the gantry housing provided with the legs. Along with this, since the shield cover that covers the gantry housing is also enlarged, it is difficult to access the gantry housing when it is put in and out of the main body installed at the top of the gantry housing. There are challenges.

  Therefore, an object of the present invention is to provide an electron microscope with a compact shield cover having a table surface that can be used as a work table or an observation table without impairing the performance and handling of the electron microscope. is there.

  In order to solve the above problems, in the electron microscope of the present invention, the lens barrel and the outer periphery of the gantry housing that supports the lens barrel are covered with a shield cover, and the front portion of the shield cover is A first opening for exposing an electron gun disposed at the uppermost portion of the lens barrel, a second opening for exposing a sample insertion portion disposed in a middle stage of the lens barrel, and a lower portion of the lens barrel The first opening portion is divided into a concave space portion exposing the observation window portion disposed in the upper and lower portions and a concave lower limb space portion formed in the gantry housing that supports the lens barrel portion on the upper portion. Each of the second openings is provided with an opening / closing lid that constitutes a shield space, and a table surface in which a center is cut out in a concave shape between the recessed space portion and the lower limb space portion, and both sides project forward. I have.

  According to the present invention, it is possible to provide a compact electron microscope with a shield cover provided with a table surface that can also be used as a work table or an observation table without impairing the performance and handleability of the electron microscope.

1 is a schematic structural diagram of an electron microscope system according to the present invention. 1 is a schematic configuration diagram of a transmission electron microscope system according to the present invention. 1 is a structural diagram of an electron microscope according to the present invention. It is a longitudinal cross-sectional view which shows the usage condition of the electron microscope which concerns on this invention. It is a cross-sectional view which shows the opening / closing operation | movement of the door which concerns on this invention. It is an external appearance perspective view which shows the application example of the electron microscope which concerns on this invention.

  Hereinafter, embodiments of the electron microscope according to the present invention will be described in detail with reference to FIGS. Here, FIG. 1 is a schematic structural diagram of the electron microscope system according to this embodiment. FIG. 2 is a schematic configuration diagram of a transmission electron microscope system according to this embodiment. FIG. 3 is a structural diagram of an electron microscope according to this embodiment. FIG. 4 is a longitudinal sectional view showing a usage pattern of the electron microscope according to this embodiment. FIG. 5 is a cross-sectional view showing the opening / closing operation of the open / close door according to this embodiment. FIG. 6 is an external perspective view showing an application example of an electron microscope. In addition, the same site | part, an arrow, etc. are shown with the same code | symbol, and the overlapping description is abbreviate | omitted.

  First, the schematic structure of the electron microscope system according to this embodiment will be described with reference to FIG. In FIG. 1, an electron microscope system generally indicated by reference numeral 1 is a transmission type electron microscope 20 that applies an electron beam to a sample 221 to be observed and magnifies and observes electrons that have passed through the electron beam, and the electron microscope. And a monitor device 50 for controlling the operation 20 to monitor the acquired enlarged image.

  The electron microscope 20 includes an electron microscope main body 30 configured to include a lens barrel 200 supported on the top of the gantry housing 100 and a shield cover 40 that covers the periphery of the electron microscope main body 30. Composed.

  In the electron microscope 20 according to this embodiment, the sample to be observed is set in the sample insertion unit 220 in which the electron beam generated by the electron gun 210 arranged at the uppermost part of the lens barrel unit 200 is arranged in the middle stage of the lens barrel unit 200. 221 is transmitted, and an image of the transmitted electron beam is formed on the fluorescent plate unit 230 disposed below the lens barrel unit 200, and the formed image is captured by the camera unit 240 disposed below the fluorescent plate unit 230. Thus, this can be observed with the monitor device 50, or an image formed on the fluorescent screen 230 can be directly observed from the observation window 250.

The shield cover 40 includes a lower shield cover 41 that covers the gantry housing 100 and an upper cover 42 that is disposed within a projected area on the upper surface of the lower shield cover 41 and has a slightly smaller area. The The shield cover 40 has a shield structure in which a frame body 300 formed of a steel material or the like is covered with a plate material 310 made of a metal material such as permalloy, an iron plate, or aluminum.
Further, the shield cover 40 has a structure that is structurally separated from the electron microscope main body 30. Thus, in this embodiment, by covering the electron microscope main body 30 with the shield cover 40, heat, airflow, magnetic field, sound waves, radio waves, dust, and vibrations received from the outside are shielded to remove disturbances. High resolution can be maintained.

  The monitor device 50 includes a display unit 51 for displaying various images and observation images, an input device 52 such as a keyboard and a mouse, and a control device 53 that controls the electron microscope system 1 in an integrated manner. The This monitor device 50 has a device configuration of an extremely general personal computer, and can include a storage device (not shown) for storing image information, various programs, and the like, and a communication device for connecting to another computer system. . According to the monitor device 50, the electron microscope 20 can be smoothly operated and controlled, and an enlarged image acquired by the electron microscope 20 is observed and analyzed, or transmitted to another system via a network. You can do it.

  One of the major features of the electron microscope 20 according to this embodiment is that the shield cover 40 that covers the electron microscope main body 30 is divided into a plurality of parts corresponding to the function of the electron microscope main body 30 and is divided into a plurality of parts. The structure of the front part of the partition part 321 is a structure corresponding to the function.

  In other words, the conventional shield cover that protects the main body of the electron microscope mainly focuses on observation with a monitor device, and therefore has an open / close lid for setting a sample in the sample insertion portion or for maintaining the lens barrel portion. Although provided, the outer periphery of the electron microscope main body is covered with a uniform box to prevent external disturbances such as vibration, dust or electromagnetic waves received from the outside.

  However, these conventional examples do not consider the work of direct observation through the observation window provided in the lens barrel. That is, in the conventional example, there is a problem that the observer cannot perform direct observation through the observation window portion while taking an easy standing posture or sitting posture for a long time. In addition, there is a problem that there is no work table or setting table for assisting tools when setting materials in the material insertion portion.

  Therefore, in this embodiment, in order to solve the above-described problem, the front surface portion of the shield cover 40 is exposed to the first opening 330 that exposes the electron gun 210 disposed at the top of the lens barrel portion 200, and the lens barrel portion 200. A second opening 340 exposing the sample insertion portion 220 disposed in the middle stage, a recessed space 350 exposing the observation window portion 250 disposed below the lens barrel portion 200, and the lens barrel portion 200 on the upper portion thereof. The first opening 330 and the second opening 340 are each provided with an opening / closing lid 370 that constitutes a shield space 320, and is divided into a concave lower limb space 360 formed in the gantry housing 100 that supports the A table surface 380 is provided between the concave space 350 and the lower limb space 360 so that the center is notched in a concave shape, and both sides project forward. Here, the concave space 350 has a lower surface constituted by a table surface 380 and a shield structure other than the lower surface.

  According to this embodiment, two open / close doors 370 (first open / close door 371 and second open / close door 372) that can open two openings 330 and 340 that open the shield space 320 are provided on the front surface of the shield cover 40. By providing, the shielding effect at the time of putting in and out of the sample 221 with frequent use can be minimized, and it can be greatly opened for maintenance. In addition, since the recessed space 350 is provided so as to project into the shield space 320, the recessed space 350 can be used as an observation equipment or equipment storage space. In addition, since only the vicinity of the observation window 250 in the lens barrel 200 is exposed to the recessed space 350, a shield structure in which only the vicinity of the observation window 250 is covered with permalloy is sufficient.

  In addition, the concave space 350 where the observation window 250 is exposed is configured by a table surface 380 serving as a work table on its lower surface. Since the table surface 380 is provided between the recessed space portion 350 and the lower limb space portion 360, the table surface 380 can be used as a wide work table when the observation window portion 250 is used. Further, since the table surface 380 has a shape in which the center is notched and both sides of the table surface 380 project forward, the operator can approach the observation window portion 250 and can mount the frame within the projected area of the table surface 380 projecting on both sides. A leg 110 of the body 100 can be placed.

  In particular, the electron microscope 20 requires a leg portion 110 that protrudes to the periphery for stably supporting the gantry housing 100. According to this embodiment, the upper part of the leg part 110 necessary for stable installation can be used as the table surface 380, and the center can be cut out so that the seating can be performed without hindering the function of stable installation. Lower limb space can be secured by posture, taking in and out of the sample 221 or maintenance. Then, by making this table surface 380 continuous with the lower part of the recessed space 350, the effective use of the table surface 380 can be further improved.

  Another major feature of this embodiment is that the recessed space 350 is provided with a third opening / closing door 373 that is continuous with the first and second opening / closing doors 371 and 372. is there. According to this structure, the observation window 250 can be used when the third door 373 is released, and the observation window 250 can be prevented from dust when the third door 373 is closed. The design property can also be improved. In addition, the recessed space 350 can be used as a storage space for tools and the like.

  Another major feature of this embodiment is that the first, second and third doors 371, 372 and 373 are double doors 370 which can be opened left and right at the center. . According to this structure, since the movable range of the opening / closing door 370 at the time of opening / closing can be reduced, the installation property can be improved.

  Another major feature of this embodiment is that a shield cover 40 that covers the electron microscope main body 30, a lower shield cover 41 that covers the gantry housing 100, and an electronic device that is installed above the gantry housing 100. By dividing into the upper cover 42 that covers the microscope main body 30, the gantry housing 100 that requires a large ground space for stable installation is covered with the large lower shield cover 41, and depends on the large lower shield cover 41. Without this, the upper shield cover 42 can be provided on the upper portion thereof. Thereby, it can be set as the structure which impresses a sense of stability with a low center of gravity. In this embodiment, the front portion of the upper cover 42 is divided into three parts, and the first opening / closing door 371 is provided at the top, the second opening / closing door 372 is provided at the lower middle thereof, and the concave space 350 is provided at the lower lower portion thereof. Yes. In this embodiment, a third opening / closing door 373 that is continuous with the first opening / closing door 371 and the second opening / closing door 372 can be provided in the recessed space 350.

  Hereinafter, the electron microscope system 1 according to this embodiment will be further described based on FIGS. 2 to 6 with reference to FIG. Since the transmission electron microscope employed in this embodiment has a known structure, only a schematic structure will be described.

  First, in FIG. 2, the schematic structure of the transmission electron microscope 20 according to this embodiment is shown in FIG. The electron beam from the electron gun 210 disposed on the uppermost part of the lens barrel part 200 passes through a condenser lens 215 constituting an irradiation system, and the sample 221 set on the sample part 220 provided in the middle stage of the lens barrel part 200. Is irradiated. By this irradiation, the transmission electron beam that has passed through the sample 221 reaches the fluorescent plate 230 through the objective lens 225, the intermediate lens 226, and the projection lens 227 that constitute the imaging system. An image of the sample 221 based on the transmission electron beam is formed on the fluorescent plate unit 230. As an image formed at this time, a transmission image or a diffraction image is formed depending on the set observation conditions.

  Here, below the objective lens 225, the objective aperture means 228 is installed so as to be detachable with respect to the optical axis of the transmission electron beam. The objective aperture means 228 has an opening 229. When the objective aperture means 228 is positioned on the optical axis of the transmission electron beam, a part of the transmission electron beam passes through the opening 229. An image is formed on the fluorescent plate 230 based on the transmitted electron beam that has passed through the opening 229.

  The image formed on the fluorescent screen 230 in this way is acquired by the camera unit 240. The camera unit 240 includes an image sensor such as a CCD, and an image is captured by the image sensor. The image data of the image acquired by the camera unit 240 is sent to the monitor device 50. The control device 53 performs image processing on the image data and causes the display unit 51 to display the image data. Further, in this embodiment, an image formed on the fluorescent plate 230 can be directly observed through the observation window 250. The lens barrel 200 exposed to the concave space 350 including the observation window 250 is formed with a shield structure in which permalloy or the like is wound. In addition, a magnifying lens 351 can be attached to the concave space 350 where the observation window 250 is exposed, and an image formed on the fluorescent screen 230 is magnified and observed through the magnifying lens 351. Can do.

  In addition, the control device 53 controls the electron gun 210, controls the irradiation system including the condenser lens 215 disposed in the lens barrel 200, and forms an imaging system including the objective lens 225, the intermediate lens 226, and the projection lens 227. Control. The computer 31 can control the diaphragm drive unit 25 that moves the objective diaphragm 4 and the imaging unit 6. These control operations can be performed by instructing operation of the monitoring image displayed on the display unit 51 via the input device 52.

  1 and 3, in this embodiment, the lens barrel portion 200 is supported on the gantry housing 100 in an upright posture. The gantry housing 100 includes a box-shaped pedestal 120 and supports the lens barrel 200 via a damper (not shown) so as to prevent vibration so that the observation window 250 is positioned on the upper surface of the pedestal 120.

  As shown in the balloon of FIG. 2, leg portions 110 extending in the front-rear direction or the left-right direction are provided below both sides of the base portion 120. Thereby, since the ground contact area with respect to the floor surface of the gantry housing 100 can be increased, the gantry housing 100 that supports the lens barrel portion 200 in an upright posture can be stably installed.

  The inventors of this embodiment pay attention to the fact that the space 130 between the pair of leg portions 110 on both sides extending forward and the upper space 131 of the leg portion 110 become a dead space. The idea was to use the space 131 as a work space for the observer. In particular, if the space 130 is a large electron microscope, the space 130 can have a width that allows an observer to work sufficiently. Since this space 130 is also a position that can be accessed at a short distance from the lens barrel part 200 arranged at the substantially center of the upper surface of the gantry housing 100, the sample 221 can be taken in and out of the sample insertion part 220 and the observation window part 250. It is a very effective position for observation.

  Moreover, although the leg part 110 extended to the front or both sides is effective for the stable installation of the gantry casing 100, there remains a problem in safety such as the operator getting caught in the foot. Further, if the entire leg portion 110 is covered with the box-shaped shield cover 40, the shield cover 40 is increased in size, and there remains a problem in grounding performance. Therefore, the inventors of this embodiment have conceived that an upper space 131 serving as a dead space above the leg portion 110 extending forward or on both sides is used as a work table.

  As a means for solving the problem of the two dead spaces, the present inventors have cut out a table surface that covers the upper part of the pair of leg portions 110 and is cut out corresponding to the space 130 between the pair of leg portions 110. Inspired to provide 380. The table surface 380 is formed so as to be continuous with the lower surface of the recessed space 350. As a result, the observer can observe through the observation window 250 by inserting the body into the notch 381 formed on the table surface 380. Similarly, the body can be inserted into the notch 381 so that the sample can be easily inserted into and removed from the sample insertion portion 220. In addition, a work surface that is continuous with the lower surface of the recess space 350 is formed on both sides of the notch 381, so that work on the wide table surface 380 is facilitated.

  In this embodiment, after the gantry casing 100 having the lens barrel portion 200 is installed on the ground surface, the shield cover 40 is grounded independently of the grounding of the electron microscope main body 30. Thereby, it is possible to reduce the vibration applied to the shield cover 40 from spreading to the electron microscope main body 30. Here, the shield cover 40 is composed of a frame housing 300 composed of L-shaped or square material and a plate material 310 surrounding the periphery. The frame housing 300 has a structure in which a plurality of divided units are assembled at an installation location, and a plate member 310 is stretched on the frame housing 300 after the assembly is completed.

  Here, the frame housing 300 according to this embodiment includes a table support portion 290 that supports the table surface 380 at a position above the front portion of the gantry housing 100 from the upper space 131 above the leg portion 110. The table surface 380 is attached to the part 290.

  Moreover, the frame housing 300 according to this embodiment includes a plurality of horizontal crosspieces 390 that divide the recessed space 350 and the shield space 320 in the vertical direction. Thereby, the 1st opening part 330, the 2nd opening part 340, and the recessed part space part 350 can be divided up and down. In this embodiment, the first opening 330 and the second opening 340 are divided by the first horizontal crosspiece 291, and the second opening 340 and the recess space 350 are divided by the second horizontal crosspiece 292.

  The pair of first opening / closing doors 371 covering the first opening 330 and the pair of second opening / closing doors 372 covering the second opening 340 can be opened and closed via the hinge mechanisms 400 provided on both sides of the frame housing 300. It is structured to be attached to. Here, when the third opening / closing door 373 (see FIG. 1) is attached to the recess space 350 so as to be openable / closable, it is attached via the hinge mechanisms 400 provided on both sides of the frame housing 300.

  In this embodiment, a partition wall 311 that divides the shield space 320 forward and backward is provided behind the first opening 330 and the second opening 340 that expose the lens barrel 200. As a result, when the electron gun 210 is maintained or when the sample 221 is inserted into or removed from the sample insertion portion 220, the operator carelessly touches equipment other than the lens barrel portion 200, or the work tool enters the rear shield space 320. While being able to reduce falling, the designability at the time of release can also be improved. Here, the partition wall 311 is structured to be easily detachably attached via a screw or the like.

  With reference to FIG. 4, the usage pattern of the electron microscope 20 according to this embodiment will be described. FIG. 4 shows an example in which the overall height H of the electron microscope 20 is 3100 mm in this embodiment. According to the electron microscope 20 of this size, the height H1 from the floor surface to the table surface 380 is 795 mm, the height H2 to the lower end of the second door 372 is 1470 mm, and the lower end of the first door 371 is reached. Is set to 2420 mm.

  FIG. 4 shows a model of a 5% tile (1475 mm) of an adult Asian woman and a model of an adult US male 95% tile (1895 mm). (A) The figure shows the sitting posture of each model, and (b) the figure shows the standing posture of each model. In general, when considering the application of anthropometric values to equipment, percentile tiles are used as reference values for average values. Especially for highly public devices with a large number of unspecified users, targeting a wide range of people from 95% tile value for males (higher people) to 5% tile value for females (lower people) Equipment is being developed. In this embodiment, this highly public percentage tile is used.

  As is apparent from the figure, with an electron microscope of this size, an adult American male can easily perform observation work through the observation window 250 in the sitting position, and in the standing position, the sample insertion section The sample 221 can be taken in and out of 220. On the other hand, in the case of an adult Asian woman, the observation work through the observation window portion 250 is impossible in the sitting position, but a good observation position can be obtained in the standing position. In addition, when an adult Asian woman observes with a sitting posture, it can respond by adjusting the height of a chair. In addition, in the case of an adult Asian woman, it is impossible to put the sample 221 into and out of the sample insertion portion 220 in a standing posture, and thus the work is performed using a table. In this case, a table can be installed using the notch 381.

  Here, according to this embodiment, in the sitting position, the concave lower limb space portion 360 is formed below the table surface 380, so that a good sitting position can be obtained.

  In this embodiment, the example in which the overall height H of the electron microscope 20 is 3100 mm has been described. However, the height H is designed to be 2800 mm to 4000 mm in response to a change in resolution performance. However, these height changes can be set to substantially the same height up to the height H2 up to the lower end of the second opening / closing door 372. Therefore, even if the resolution performance is different, the working posture of the observation window 250 can be performed in the same posture as described above. However, if the resolution performance differs, the position of the sample insertion portion 220 increases. For this reason, it is assumed that the sample 221 is taken in and out using a table if necessary.

  Further, in this embodiment, the maintenance in the shield space 320 is performed in a standing posture on the floor or a table. In this case, the work is performed by opening and closing the opening / closing lid 370. In particular, in a standing posture on a table, it is assumed that the scaffolding is poor and that the opening / closing operation and the maintenance operation must be performed separately. This will be described with reference to FIG.

  5A is a cross-sectional view of the state in which the open / close lid 370 according to this embodiment is occupied. FIG. 5B is a cross-sectional view of the state in which the open / close lid 370 is released. The figure is a cross-sectional view of a state in which one door is opened.

  In this embodiment, the lateral width W of the upper cover 42 is set to about 1300 mm. (C) As shown in the figure, when such a lateral width W is opened and closed by a single opening / closing door 370, the range in which the opening / closing door 370 is movable becomes large. Therefore, in order to open and close such an open / close door 370, an operator performs an initial stage of the release operation on the table, then descends from the table to widely open the open / close door 370, and then gets on the table again. Maintenance work must be continued.

  On the other hand, according to this embodiment, the opening / closing door 370 has a pair of double doors arranged on the left and right, so that the opening / closing operation of FIG. That is, as shown in FIG. 5B, since the operator on the table can release the other door 370 after releasing one of the doors 370, the release work can be greatly improved. . Moreover, in this embodiment, a handle handle recess 411 is formed in which the central dividing portion 410 of the pair of opening / closing lids 370 is concave, and a handle portion 412 extending to the full height of the opening / closing lid 370 is provided in the handle recess 411. Therefore, the release operation can be performed from any position in the height direction. Moreover, in this open / close lid 370, the handle recesses 411 and the handle portions 412 are formed so that the plurality of open / close lids 370 that are divided into upper and lower layers and are continuously arranged in the upper and lower directions. Can also be improved.

  Next, another application example of the electron microscope 20 will be described with reference to FIG. The electron microscope 20 shown in FIG. 6 includes a shield cover 40 having a structure in which an upper cover 42 having a slightly smaller area is installed within the projected area of the upper portion of the lower shield cover 41. According to this structure, the gantry housing 100 provided in the lower shield cover 41 having a large grounding area can be employed, so that the electron microscope 20 can be stably installed. In this case, it is possible to use the surface of the lower shield cover 41 that is not covered by the upper cover 42 of the lower shield cover 41 as a mounting surface 295 for assisting tools or samples.

  In general, when the lower shield cover 41 is enlarged, problems occur in maintenance of the electron gun 210 provided in the upper cover 42 and in and out of the sample 221 to and from the sample insertion portion 220. However, in this embodiment, the above problem can be improved by the table surface 380 provided with the notch 381 provided in the lower shield cover 41.

  In FIG. 6, the description has been given of the case where both sides of the lower shield cover 41 are formed to protrude outward so that the placement surface 295 is formed on the upper surface thereof. However, as shown in FIG. 3, even if both side surfaces of the lower shield cover 41 and the upper cover 42 are formed so as to be continuous, the same operation and effect can be obtained by providing the table surface 380.

  Thus, in the electron microscope 20 according to this embodiment, the shield cover 40 that covers the electron microscope main body 20, the lower shield cover 41 that covers the gantry housing 100, and the lens barrel that is installed on the top of the gantry housing 100. A first opening 330 having a first opening / closing door 371 corresponding to the front surface of the electron gun 210 disposed on the shield space 320. A second opening 340 provided with a second opening / closing door 372 corresponding to the sample insertion part 220 for taking in and out the observation object arranged on the shield space 320, and an inside of the shield space 320 corresponding to the observation window part 250. And the front portion of the gantry housing 100 is disposed on the projected area of the leg portion 110 projecting on both sides of the gantry housing 100. Comprising a table surface 380, the table surface 380 with a central portion of the front is cut out, so that formed continuously with the bottom of the concave space portion 350. Here, the recessed space 350 may be configured with a third opening / closing door 373 that is continuous with the second opening / closing door 372 at the front thereof. In addition, the first, second, and third opening / closing doors 371, 372, and 373 may be door-opening opening / closing doors 370 that can be opened to the left and right at the center.

  According to this embodiment, the shield cover 40 that covers the electron microscope main body 30, the lower shield cover 41 that covers the gantry housing 100, and the upper cover 41 that covers the lens barrel 200 installed on the gantry housing 100. The base frame 100 that requires a large ground space for stable installation is covered with a large lower shield cover 41, and the upper shield cover 42 is not affected by the large lower shield cover 41. It can be provided on the top. Thereby, it can be set as the structure which impresses a sense of stability with a low center of gravity.

  Further, two open / close doors (first open / close door 371, second openable) that can open two openings (first opening 330 and second opening 340) that release the shield space 320 are provided on the front surface of the upper shield cover 42. By providing the open / close door 372), it is possible to minimize the shielding effect at the time of loading and unloading a frequently used sample, and to greatly open it for maintenance. In addition, since the recessed space 350 is provided so as to protrude from the shield space 320, the recessed space 350 can be used as an observation equipment or equipment storage space.

  In addition, the upper part of the leg 110 necessary for stable installation can be used as the table surface 380, and the center of the leg 110 is notched so that the seating posture and the sample can be taken in and out without hindering the function of the stable installation. And lower limb space can be secured for maintenance. And by making this table surface 380 continuous with the lower part of the recessed space 350, the effective use of the table surface 380 can be improved.

  Further, by providing the opening / closing door (third opening / closing door 373) in the recessed space 350, it is possible to secure a blindfolded space while revealing the influence of dust and the like. In addition, the opening and closing door (the third opening and closing door 373) is a door to the door, so that the trajectory at the time of release can be minimized.

  In the above, in an example of the present invention, an electron microscope in which the outer periphery of a lens barrel portion and a gantry housing that supports the lens barrel portion is covered with a shield cover, the shield cover is opened and closed to expose the sample insertion portion A lower leg space portion having a concave shape formed in the gantry housing, the lower limb space portion having a shape in which the center is cut out in a concave shape and both sides thereof protrude forward. An electron microscope characterized by being has been described.

  More specifically, the shield cover that covers the main body of the electron microscope is divided into a lower shield cover that covers the gantry housing and an upper shield cover that covers the lens barrel that is installed on the top of the gantry housing. A front opening portion of the shield cover has a first opening provided with a first opening / closing door corresponding to a front portion of the electron gun disposed on the shield space, and a sample to be observed disposed on the shield space is taken in and out. A structure having a second opening provided with a second opening / closing door corresponding to the sample insertion portion, and a recessed space formed to project into the shield space corresponding to the observation window, The front part is provided with a table surface arranged on the projected area of the leg part projecting on both sides of the gantry housing. The table surface is notched at the front center part and is continuous with the lower part of the recessed space part. The electron microscope formed It has been described Te.

  Here, the concave space portion may be configured by a third opening / closing door that is continuous with the second opening / closing door at a front portion thereof. The first, second, and third opening / closing doors may be double doors that can be opened to the left and right at the center.

  In this embodiment, the shield cover that covers the electron microscope main body is divided into a lower shield cover that covers the gantry housing and an upper cover that covers the electron microscope main body installed on the top of the gantry housing. A frame housing that requires a large ground space for installation can be covered with a large lower shield cover, and the upper shield cover can be provided on the upper portion without being influenced by the large lower shield cover. Thereby, it can be set as the structure which impresses a sense of stability with a low center of gravity.

  In addition, by providing two openable doors that can open two openings to release the shield space on the front of the upper shield cover, the shielding effect when loading and unloading frequently used samples is minimized, It can be greatly opened for maintenance. In addition, since the recessed space portion is provided so as to protrude into the shield space, the recessed space portion can be used as an observation equipment or equipment storage space.

  In addition, the upper part of the legs necessary for stable installation can be used as a table surface, and by cutting out the center, the seating posture, taking in and out of the sample, and maintenance can be performed without hindering the function of stable installation. The leg space can be secured. And the effective use of a table surface can be improved by making this table surface continue with the lower part of a recessed part space part.

  Further, by providing the opening / closing door in the recessed space, it is possible to secure a blindfolded space while revealing the influence of dust and the like. In addition, the opening and closing door is a kannon door, so that the trajectory during release can be minimized.

DESCRIPTION OF SYMBOLS 1 ... Electron microscope system, 20 ... Electron microscope, 30 ... Electron microscope main-body part, 40 ... Shield cover, 41 ... Lower shield cover, 42 ... Upper cover, 50 ... Monitor apparatus, 51 ... Display part, 52 ... Input device, 53 DESCRIPTION OF SYMBOLS ... Control apparatus, 100 ... Mounting frame, 110 ... Leg part, 120 ... Base part, 130 ... Space, 131 ... Upper space, 200 ... Lens barrel part, 210 ... Electron gun, 215 ... Condenser lens, 220 ... Sample insertion part 221 ... Sample, 225 ... Objective lens, 226 ... Intermediate lens, 227 ... Projection lens, 228 ... Object stop means, 230 ... Fluorescent plate part, 240 ... Camera part, 250 ... Observation window part, 300 ... Frame body, 310 ... Plate material 311 ... Partition wall, 320 ... Shield space, 321 ... Partition, 330 ... First opening, 340 ... Second opening, 350 ... Recessed space, 360 ... Limb space part, 370 ... Opening / closing lid, 371 ... First opening / closing door, 372 ... Second opening / closing door, 373 ... Third opening / closing door, 380 ... Table surface, 381 ... Notch part, 390 ... Horizontal crosspiece part, 291 ... First Horizontal cross section, 292 ... second horizontal cross section, 295 ... mounting surface, 400 ... hinge mechanism, 410 ... dividing part, 411 ... hand recess, 412 ... hand hook

Claims (3)

An electron microscope in which the outer periphery of the lens barrel and the frame housing that supports the lens barrel are covered with a shield cover,
The front surface of the shield cover includes a first opening that exposes an electron gun disposed at the top of the lens barrel, and a second opening that exposes a sample insertion portion disposed in the middle of the lens barrel. And a concave space portion exposing the observation window portion disposed below the lens barrel portion, and a concave lower limb space portion formed on the gantry housing that supports the lens barrel portion on the upper portion thereof. And
The first opening and the second opening are each provided with an opening / closing lid that constitutes a shield space, and a center is cut out in a concave shape between the recess space and the lower limb space, and both sides are forward. An electron microscope comprising a table surface projecting over the surface. The electron microscope according to claim 1,
An electron microscope comprising: an opening / closing door that is continuous with the opening / closing door disposed in an upper portion of the recessed space portion. The electron microscope according to claim 1 or 2,
An electron characterized in that the shield cover that covers the electron microscope main body is divided into a lower shield cover that covers the gantry housing and an upper cover that covers the lens barrel portion installed on the top of the gantry housing. microscope.

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