JP5354720B2 - Method for manufacturing liquid jet head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To easily and efficiently manufacture a plurality of liquid-jet heads with a small number of routings. <P>SOLUTION: The liquid-jet head manufacturing method includes: a bonding process to form a laminated substrate by bonding together an actuator substrate 130 having a plurality of discharge grooves 13 being open on one surface of the actuator substrate and arrayed in parallel at a distance from one another and having an electrode formed on each side wall, a cover plate substrate 150 including a plurality of cover plate opening portions 18 extending from the opening formed on one surface 150c toward the other surface 150d and arrayed at a predetermined pitch, and a flow path plate substrate 190 having a plurality of flow paths 21 being open on one surface and arrayed at a pitch nearly equal to that of the cover plate opening portions 18 so that the openings of the cover plate opening portions 18 may face the openings of the flow paths 21 and the arraying directions of the cover plate opening portions 18 and the flow paths 21 may be perpendicular to the arraying direction of the discharge grooves 13; and a cutting process to cut the laminated substrate along a plane crossing the discharge grooves 13 at the intermediate position between the adjacent cover plate opening portions 18. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a method for manufacturing a liquid jet head.

  2. Description of the Related Art Conventionally, there is known a liquid jet recording apparatus that records characters and images on a recording medium using a liquid jet head having a plurality of ejection nozzles that eject liquid such as ink. For example, in an inkjet head, an actuator substrate having a plurality of ejection grooves, a top plate for fixing sidewalls of the ejection grooves, and a flow path member that supplies ink to each ejection groove are arranged in a stacked state in the thickness direction. (For example, refer patent document 1).

  According to the method for manufacturing an inkjet head described in Patent Document 1, an actuator substrate and a top plate are bonded, and then divided into individual sizes to form inkjet head chips, and a flow path member is fixed to each inkjet head chip. It is supposed to be.

JP 2000-296618 A

  However, the conventional method for manufacturing an ink jet head has a problem that it takes time to apply an adhesive to individually divided ink jet head chips and flow path members, and to align each ink jet head chip. Further, if the flow path members are individually bonded to the inkjet head chip, a step is generated between the end surfaces of the actuator substrate and the cover plate substrate and the end surfaces of the flow path member, and a nozzle plate is attached to the end surfaces of the actuator substrate and the cover plate substrate. Even if it can be bonded, there is a problem that the nozzle plate may not be bonded to the end face of the flow path member.

  SUMMARY An advantage of some aspects of the invention is that it provides a method of manufacturing a liquid jet head capable of easily and efficiently manufacturing a plurality of liquid jet heads with a small number of work steps. To do.

In order to achieve the above object, the present invention provides the following means.
The present invention includes an actuator substrate having a plurality of variable volume liquid ejection grooves that are open on one surface and arranged at parallel intervals and electrodes are formed on each side wall, and the openings formed on the one surface penetrate the other surface. A cover plate substrate having a plurality of openings arranged at a predetermined pitch, and a flow path plate substrate having a plurality of groove-like channels that are open on one surface and arranged at substantially the same pitch as the openings. The openings of the openings and the openings of the flow paths are opposed to each other, and are laminated in the plate thickness direction so that the arrangement direction of the openings and the arrangement direction of the flow paths are orthogonal to the arrangement direction of the liquid ejection grooves. A bonding step of bonding and forming a laminated substrate; and a cutting step of cutting the laminated substrate formed by the bonding step along a plane intersecting the liquid ejection groove at an intermediate position between the adjacent openings. a, with a, before Openings were formed in a groove-like recess having an opening surface on the one surface of the cover plate substrate, and penetrated from the bottom surface of the recess to the other surface at a pitch substantially equal to or half the pitch of the liquid ejection grooves. A plurality of through holes, and the cover plate substrate has a foreign substance removing member at a position that substantially closes the opening and is separated from the bottom surface of the recess, and in the joining step, the through hole of the cover plate substrate providing said manufacturing method of the liquid discharge groove and the liquid ejecting head Ru is substantially matched to the actuator substrate.

According to the present invention, the common flow path is configured by causing the flow path opening of the flow path plate substrate and the opening of the opening portion of the cover plate substrate to face each other, and the common flow path communicates with the plurality of liquid ejection grooves. A channel structure is formed on a plurality of laminated substrates at a predetermined pitch.
Then, by cutting the laminated substrate at an intermediate position between adjacent openings, it is possible to manufacture a liquid ejecting head in which one distribution channel structure is provided for each, and all liquid ejection grooves are opened in the cut surface. it can.

According to this liquid ejecting head, a voltage is applied to the electrode provided on the side wall of the liquid ejection groove, and the volume of the liquid ejection groove of the actuator substrate is changed to distribute and supply the liquid ejection groove from the common flow path. The liquid can be discharged from the opening of the cut surface by the pump effect.
In other words, according to the present invention, it is possible to simply and efficiently with a small number of work steps without joining and aligning each individual liquid ejecting head by simply joining and cutting three substrates. A plurality of liquid jet heads can be manufactured.

Further, the plurality of through holes of the cover plate substrate and the openings of the plurality of liquid ejection grooves of the actuator substrate are substantially matched, so that the common flow path is constituted by the flow path and the concave portion, and the common flow path passes through the through holes. Thus, the distribution channel structure communicates with the plurality of liquid discharge grooves. Therefore, for example, a liquid ejecting head for water-based ink can be manufactured by arranging every other through hole with respect to the liquid ejection groove.

Then, before Symbol cover plate substrate, between this with a foreign matter removing member in a position to substantially close the opening of the opening, the foreign matter removing member, dust and large air bubbles or the like contained in the liquid in the liquid discharge groove A liquid ejecting head that prevents intrusion can be manufactured. Examples of the foreign matter removing member include a filter.

In the above invention, the foreign matter removing member is disposed concavely with respect to the one surface of the cover plate substrate, and an adhesive is applied along the one surface of the cover plate substrate in the joining step. It is good to do.
By comprising in this way, it can prevent that an adhesive agent adheres to a filter and can apply | coat an adhesive agent collectively to the whole joining surface of a cover plate board | substrate collectively.

Further, in the above invention, the liquid discharge groove of the actuator substrate is formed so as to extend over each of the two adjacent openings, and terminate without crossing the cut surfaces formed on both outer sides thereof. It is good to be.
With this configuration, it is possible to easily form a plurality of liquid ejecting heads in which the liquid discharge groove is opened on the cut surface at one end and closed on the cut surface side at the other end.

In the above invention, a liquid discharge groove forming step for forming the liquid discharge groove of the actuator substrate is provided, and the liquid discharge groove forming step constitutes the actuator substrate while moving the milling cutter in the direction along the one surface. The liquid discharge groove may be cut by moving in the plate thickness direction of the substrate.
By comprising in this way, the liquid discharge groove | channel which straddled each two opening part and was closed at both ends can be formed easily.

  According to the present invention, it is possible to easily and efficiently manufacture a plurality of liquid jet heads with a small number of work steps.

Hereinafter, a method for manufacturing a liquid jet head according to an embodiment of the present embodiment will be described with reference to the drawings.
The manufacturing method of the liquid ejecting head according to the present embodiment is based on a large number of picking up a plurality of liquid ejecting heads from three substrates. In this manufacturing method, as shown in FIGS. 1 and 2, an actuator substrate 130 in which a plurality of rows of a pair of ejection grooves (liquid ejection grooves) 13 each having an opening 13a on one surface 130c are arranged at parallel intervals. A cover plate substrate 150 having four cover plate openings (openings) 18 arranged at a predetermined pitch and penetrating from one surface 150c to the other surface 150d, and a channel opening surface 21a on one surface 190d. A flow path plate substrate 190 having four groove-shaped flow paths 21 arranged at a pitch substantially equal to the pitch of the cover plate openings 18 is used.

  The actuator substrate 130 is made of a piezoelectric element and is polarized in the thickness direction. Each discharge groove 13 has a length substantially equal to the pitch of each two adjacent cover plate openings 18 of the cover plate substrate 150. The discharge groove 13 is formed so that the depth is constant along the longitudinal direction and both ends are gradually terminated. Each discharge groove 13 is separated by a side wall 15, and an electrode 16 for applying a driving voltage is formed on each side wall 15 by vapor deposition.

  The cover plate opening 18 of the cover plate substrate 150 is configured by a groove-like recess 17 having a recess opening surface 17a on one surface 150c, and a plurality of through holes 19 penetrating from the bottom surface of the recess 17 to the other surface 150d. Yes. The through holes 19 are provided at a pitch that is approximately half the pitch of the ejection grooves 13 of the actuator substrate 130. Further, the concave portion 17 is provided with a step portion 25 having an inner wall surface protruding inward in a direction away from the concave opening surface 17a.

  A filter (foreign matter removing member) 29 having a flat surface is fixed to the step portion 25 with an adhesive. The filter 29 has, for example, a mesh structure with a pore diameter of about 8 microns and a thickness of about 0.1 mm. The filter 29 is provided so as to substantially close the recess opening surface 17a, and is disposed at a substantially constant distance (for example, about 0.8 mm) from the end portions of all the through holes 19 on the other surface 150d.

  Further, the filter 29 is disposed in a concave shape with respect to the one surface 150 c of the cover plate substrate 150. Therefore, in the step of bonding the cover plate substrate 150 and the flow path plate substrate 190, when the adhesive is applied along the one surface 150c of the cover plate substrate 150, the adhesive is prevented from adhering to the filter 29. Can do. Thereby, for example, as shown in FIG. 3, the adhesive can be easily and collectively applied to the entire bonding surface of the cover plate substrate 150 by the rubber application roller 33. In addition, since the concave portion 17 is formed with high accuracy, an adhesive for adhering the filter 29 can be applied to the step portion 25 using a robot or the like.

  The flow path 21 of the flow path plate substrate 190 is formed in a groove shape by, for example, sandblasting. The channel opening surface 21 a of the channel 21 has the same shape and the same size as the concave opening surface 17 a of the cover plate 5. The flow path 21 is provided with a liquid introduction hole 21A penetrating the other surface 190c opposite to the one surface 190d.

  In this manufacturing method, the actuator substrate 130, the cover plate substrate 150, and the flow path plate substrate 190 are joined in a laminated state in the plate thickness direction to form a laminated substrate (joining step), and this laminated substrate is attached to the cover plate substrate 150. A plurality of liquid jet heads are manufactured by cutting at an intermediate position between adjacent recesses 17 (cutting step). Hereinafter, each step will be specifically described.

  First, in the bonding step, each substrate having an adhesive applied to the bonding surface is arranged with respect to the arrangement direction of the ejection grooves 13 of the actuator substrate 130 and the arrangement direction of the recesses 17 of the cover plate substrate 150 and the flow path plate substrate 190. The flow paths 21 are arranged so that the arrangement directions thereof are orthogonal to each other.

  Then, the recess opening surface 17 a of the recess 17 of the cover plate substrate 150 and the flow path opening surface 21 a of the flow channel 21 of the flow path plate substrate 190 are opposed to each other, and the through hole 19 of the cover plate substrate 150 is made to pass through the actuator substrate 130. Positioning is performed so as to substantially match the opening 13a of the discharge groove 13, and these three substrates are pressed and heated in a state where they are stacked in the thickness direction. Thereby, a laminated substrate in which the actuator substrate 130, the cover plate substrate 150, and the flow path plate substrate 190 are joined is formed.

  The common flow path is configured by causing the flow path opening surface 21a of the flow path 21 of the flow path plate substrate 190 and the concave opening face 17a of the concave portion 17 of the cover plate substrate 150 to face each other. In addition, by aligning the plurality of through holes 19 of the cover plate substrate 150 and the openings 13a of the plurality of discharge grooves 13 of the actuator substrate 130 so as to substantially coincide with each other, a plurality of through the through holes 19 from the common flow path. A plurality of distribution channel structures communicating with the discharge grooves 13 are formed at a predetermined pitch on the laminated substrate.

  Subsequently, in the cutting step, the laminated substrate formed by the bonding step is cut along the plane intersecting the discharge groove 13 of the actuator substrate 130 at an intermediate position between the adjacent concave portions 17 of the cover plate substrate 150. As a result, a liquid jet head is manufactured in which one distribution channel structure is provided for each, and all the ejection grooves 13 are opened in the cut surface. In addition, in order to make a cut surface into the adhesive surface of a nozzle plate (not shown), it is desirable to cut | disconnect so that a cut surface may become a flat shape by methods, such as dicing.

  According to the manufacturing method according to the present embodiment, a voltage is applied to the electrode 16 provided on the side wall 15 of the discharge groove 13, and the volume of the discharge groove 13 is changed by the piezoelectric thickness sliding effect, so that the through-hole is formed from the common flow path. Thus, it is possible to manufacture a liquid ejecting head in which the liquid distributed and supplied to the ejection groove 13 via 19 is ejected from the opening of the cut surface by the pump effect.

  That is, only by joining and cutting three substrates (the actuator substrate 130, the cover plate substrate 150, and the flow path plate substrate 190), without joining or aligning each individual liquid ejecting head, A plurality of liquid jet heads can be manufactured easily and efficiently with a small number of work steps. Further, since the bonding surface to which the nozzle plate is bonded is constituted by three substrates, a sufficient area of the bonding surface can be ensured. Therefore, the cover plate substrate 150 can be thinned.

  Further, each ejection groove 13 of the actuator substrate 130 is formed so as to straddle two adjacent recesses 17 of the cover plate substrate 150 and terminate without crossing the cut surfaces formed on both outer sides thereof. Therefore, it is possible to easily form a plurality of liquid ejecting heads in which the discharge groove 13 is opened on the cut surface at one end and is closed on the cut surface side at the other end.

  In addition, a liquid ejecting head that removes dust or the like contained in the liquid supplied to the ejection groove 13 through the recess 17 or prevents large bubbles from entering the ejection groove 13 by the filter 29 is provided. Can be manufactured. Further, the filter 29 can prevent dust and the like from entering the recess 17 when the substrates are joined.

Hereinafter, an example of a liquid jet head manufactured by the manufacturing method according to the present embodiment will be described with reference to the drawings.
The liquid ejecting head 10 is for ejecting, for example, water-based ink (liquid). As shown in FIGS. 4 to 7, the liquid ejecting head chip 1 and the flow path plate 9 formed from the flow path plate substrate 190 are used. And a wiring board (not shown) on which a drive circuit and the like for driving the liquid jet head chip 1 are mounted. Each of these members is fixed to a support plate 11 made of aluminum or the like, for example, and the members are coupled to each other with a heat conductive adhesive or double-sided tape.

  The liquid jet head chip 1 includes an actuator plate 3 formed from an actuator substrate 130, a cover plate 5 formed from a cover plate substrate 150 and bonded to one surface of the actuator plate 3, and the actuator plate 3 and the cover plate 5. And a nozzle plate 7 bonded to the end face.

  The actuator plate 3 includes a plurality of ejection grooves 13 having openings 13a on one surface where the cover plate 5 is provided. One end in the longitudinal direction of each discharge groove 13 extends to one end surface 3a of the actuator plate 3, and the other end does not extend to the other end surface 3b, and the depth gradually decreases at a midpoint. On both side walls 15 of each discharge groove 13, electrodes 16 extending in the longitudinal direction are formed from the opening 13 a of the discharge groove 13 to a midway position in the depth direction.

  The cover plate 5 is bonded to one surface of the actuator plate 3, that is, the surface where the opening 13a of the discharge groove 13 is formed. The cover plate 5 has a concave portion 17 having a concave opening surface 17a on the surface opposite to the actuator plate 3, and a plurality of through holes penetrating from the concave portion 17 to an end portion where the discharge groove 13 of the actuator plate 3 is shallow. 19. A step portion 25 is provided in the concave portion 17, and the filter 29 is fixed to the step portion 25 so as to substantially block the concave portion opening surface 17 a of the concave portion 17.

  In a state where the cover plate 5 is bonded to the actuator plate 3, a region other than the portion through which the through hole 19 of the recess 17 penetrates the opening 13 a of the discharge groove 13 is blocked by the cover plate 5. Independent discharge channels 23A and dummy channels 23B are formed.

  The discharge channel 23 </ b> A is an ink flow path formed by the discharge groove 13 through which the through hole 19 of the cover plate 5 passes, and is filled with ink through the recess 17 and the through hole 19. On the other hand, the dummy channel 23B is a hollow portion in which the opening 13a of the ejection groove 13 is closed by the cover plate 5, and is sealed so that ink does not flow in. The discharge channels 23A and the dummy channels 23B are alternately formed in the direction in which the discharge grooves 13 are arranged. By adopting such a configuration, for example, when ink or liquid having electrical conductivity is ejected, the ejection operation can be performed without causing a short-circuit phenomenon between the electrodes 16.

  The nozzle plate 7 is bonded to the entire one end surface of the liquid jet head 10 including the end surfaces of the actuator plate 3, the cover plate 5, and the flow path plate 9 so as to face the openings of the discharge channel 23A and the dummy channel 23B. Further, the nozzle plate 7 has nozzle holes 27 only at positions facing the openings of the discharge channels 23A. The opening of the dummy channel 23B is sealed by the nozzle plate 7.

  For example, the nozzle plate 7 is formed by forming a nozzle hole 27 on a polyimide film using an excimer laser device or the like. A water repellent film (not shown) having water repellency is formed on the surface of the nozzle plate 7 that faces the recording medium so as to prevent ink adhesion and the like.

  The nozzle plate 7 can be bonded to the end surfaces of the three plates by cutting so that the cut surface of the liquid jet head 10 becomes a flat shape by the manufacturing method according to the present embodiment. In addition, since the nozzle plate 7 is bonded to a range including the end surface of the flow path plate 9, a sufficient area of the bonding surface of the nozzle plate 7 can be ensured. Therefore, the cover plate 5 can be thinned.

  The flow path plate 9 supplies ink into the liquid jet head chip 1. The flow path plate 9 is bonded to the surface of the cover plate 5 where the concave opening surface 17a is formed, and includes a flow path 21 having a flow path opening surface 21a on the cover plate 5 side surface. The flow path opening surface 21 a of the flow path 21 is disposed to face the concave opening surface 17 a of the cover plate 5.

  The channel 21 is provided with a liquid introduction hole 21 </ b> A that penetrates the surface on the side opposite to the cover plate 5. The liquid introduction hole 21A is connected to a pressure adjustment chamber (not shown) that temporarily stores ink supplied from the ink cartridge 107 (see FIG. 8).

  The flow path opening surface 21a of the flow path 21 of the flow path plate 9 and the recess opening surface 17a of the recess 17 of the cover plate 5 face each other, whereby the ink introduced from the liquid introduction hole 21A is distributed and supplied to the discharge channel 23A. The common flow path (hereinafter, the common flow path is referred to as “common ink chamber”) 31 is configured.

The operation of the liquid jet head 10 configured as described above will be described.
The ink supplied from the ink cartridge 107 is temporarily stored in the pressure adjustment chamber and then introduced into the common ink chamber 31 from the liquid introduction hole 21 </ b> A of the flow path plate 9. The ink introduced into the common ink chamber 31 is distributed and supplied to all the ejection channels 23 </ b> A through the through holes 19.

  In this case, dust, large bubbles, and the like contained in the ink are removed by the filter 29 that is disposed at a position that substantially closes the recess opening surface 17a of the recess 17. As a result, ink that does not contain dust or large bubbles can be supplied to the ejection channel 23A.

  When ink is supplied into each discharge channel 23, a voltage is applied to the electrodes 16 on both side walls 15 of the predetermined discharge channel 23A. Thereby, the side wall 15 is shear-deformed by the piezoelectric thickness slip effect, and the volume in the discharge channel 23A changes. Then, the ink in the discharge channel 23A is discharged by the pump effect.

  For example, a voltage is applied in one direction orthogonal to the polarization direction so that both side walls 15 of the discharge channel 23A are deformed toward the outside of the discharge channel 23A, that is, are deformed toward the inside of the dummy channel 23B. . As a result, the ink is drawn into the discharge channel 23A as the volume in the discharge channel 23A increases.

  Next, the voltage applied to the side wall 15 is made zero. That is, the side walls 15 of the discharge channel 23A are not deformed before voltage application. As a result, the volume in the ejection channel 23 </ b> A decreases, the pressure increases, and ink is ejected from the nozzle holes 27.

Next, FIG. 8 shows an example of a specification mode in which the liquid ejecting head 10 is mounted and used in the liquid ejecting recording apparatus 100 which is an ink jet recording apparatus applied to a printer, a fax machine, or the like.
The liquid jet recording apparatus 100 includes a plurality of liquid jet heads 10 provided for each color, a carriage 103 in which a plurality of liquid jet heads 10 are mounted side by side in the main scanning direction, and an ink supply pipe 105 formed of a flexible tube. And an ink cartridge 107 for supplying ink to the liquid ejecting head 10.

  The carriage 103 is mounted so as to be movable in the long axis direction of the pair of guide rails 109A and 109B. A drive motor 111 is provided on one end side of the guide rails 109A and 109B. The driving force by the driving motor 111 is transmitted to the timing belt 115 spanned between the pulley 113A connected to the driving motor 111 and the pulley 113B provided on the other end side of the guide rails 109A and 109B. A carriage 103 fixed at a predetermined position of the timing belt 115 is conveyed.

  A pair of transport rollers 119 are provided along the guide rails 109A and 109B on both ends of the case 117 indicated by a chain line in a direction orthogonal to the transport direction of the carriage 103. These transport rollers 119 transport the recording medium S in a direction below the carriage 103 and perpendicular to the transport direction of the carriage 103.

  In the liquid jet recording apparatus 100 configured as described above, the liquid jet head 10 is scanned by scanning the carriage 103 in a direction perpendicular to the feeding direction of the recording medium S while feeding the recording medium S by the transport roller 119. Thus, characters and images are recorded on the recording medium S.

  In the present embodiment, the cover plate substrate 150 and the flow path plate substrate 190 are formed with the four concave portions 17 and the flow paths 17 respectively. The substrate 190 may be formed with four or more recesses 17 and flow paths 17, or may be formed with only four or less. The actuator substrate 130 is formed with a pair of discharge grooves 13 that are terminated at both ends in the longitudinal direction. The number and arrangement of the discharge grooves 13 of the actuator substrate 130 are the same as the cover plate substrate. Any number may be used as long as it corresponds to the number and arrangement of the 150 recesses 17 and the channel 17 of the channel plate substrate 190.

  Further, in this embodiment, the actuator substrate 130, the cover plate substrate 150, and the flow path plate substrate 190 are bonded together by pressing and heating at a time in a state where they are overlapped. The cover plate substrate 150 is overlapped and pressurized and heated to join, and then the actuator plate 130 and the cover plate substrate 150 are overlapped and bonded to the cover plate substrate 150 by pressing and heating, A laminated substrate may be formed.

  In the present embodiment, for example, the manufacturing method may include a liquid discharge groove forming step for forming the discharge grooves 13 of the actuator substrate 130. In this case, if the liquid discharge groove forming step moves the discharge groove 13 by moving the milling cutter or the like in the thickness direction of the actuator substrate 130 while moving it in the direction along the one surface 130 c of the actuator substrate 130. Good. By doing in this way, the discharge groove | channel 13 which straddled each two recessed parts 17 and was closed at both ends can be formed easily.

  In the present embodiment, the discharge channels 23A and the dummy channels 23B are alternately formed in the arrangement direction of the discharge grooves 13, but instead of this, all the discharge grooves 13 penetrate the cover plate 5. Only the discharge channel 23A may be formed through the hole 19. In this case, the nozzle plate 7 should just form the nozzle hole 27 with the pitch which opposes all the discharge channels 23A. Further, in the manufacturing method, a cover plate substrate in which a plurality of through holes 19 are formed to penetrate at a pitch substantially equal to the pitch of the ejection grooves 13 of the actuator substrate 130 may be employed.

  In the present embodiment, the cover plate opening 18 of the cover plate substrate 150 is configured by the concave portion 17 and the plurality of through holes 19. For example, the cover plate opening 18 itself has one through hole. It may be a hole having a size communicating with all the discharge grooves 13. By doing so, for example, a liquid jet head having a simple configuration using oil-based ink or the like can be manufactured.

In the present embodiment, the driving method is described in which the voltage applied to the side wall 15 is set to zero and the side walls 15 of the discharge channel 23A are not deformed before voltage application. The voltage is applied in the other direction orthogonal to the polarization direction so that both side walls 15 of the discharge channel 23A are deformed toward the inside of the discharge channel 23A, that is, are deformed toward the outside of the dummy channel 23B. May be applied. As a result, the volume in the ejection channel 23 </ b> A decreases, the pressure increases, and ink is ejected from the nozzle holes 27.
As described above, different driving methods have been described. However, in these methods, in order to stably eject ink, when further pressurization of ink is required, the side wall 15 is projected to the channel side for ejecting. To be deformed. This operation further increases the pressure inside the ejection channel, so that the ink can be further pressurized. However, as described above, this operation is intended to stably eject ink, and thus is not an essential operation and may be used as needed. In addition, optimal ink ejection can be realized by executing the above-described operations in combination as necessary.

  In the present embodiment, an ink jet recording apparatus has been described as an example of the liquid ejecting apparatus, but the present invention is not limited to a printer. For example, a fax machine or an on-demand printer may be used. In the present embodiment, the plurality of nozzle holes 27 are arranged in a line in a line in the arrangement direction. Instead, the plurality of nozzle holes 27 are not arranged in a line but in the vertical direction. They may be arranged in a shifted manner. For example, the plurality of nozzle holes 27 may be arranged obliquely, or may be arranged in a staggered manner. Further, the shape of the nozzle hole 27 is not limited to a circle. For example, a polygonal shape such as a triangle, an elliptical shape, or a star shape may be used.

  In this embodiment, the case where conductive ink is used has been described. However, for example, nonconductive oil-based ink, solvent ink, UV ink, or the like may be used. In the case where oil-based ink is used, the liquid ejecting head 10 may have a configuration in which only the ejection channel 23A is formed by penetrating the through holes 19 of the cover plate 5 in all the ejection grooves 13 described above. By configuring the liquid ejecting head in this way, ink having any property can be used properly. Therefore, recording can be performed using water-based ink. In particular, even conductive ink can be used without any problem, and the added value of the liquid jet recording apparatus can be increased. In addition, there can exist the same effect as others.

In the present embodiment, the recess 17 is formed in the cover plate substrate 150. However, as a reference example, the actuator substrate 130 may be formed with a recess. For example, a recess having a concave cross section extending in the arrangement direction of the discharge grooves 13 is formed on the back surface of the actuator substrate 130 (the surface opposite to the surface where the discharge grooves 13 are formed), and the bottom surface of the recess communicates with the discharge grooves. The structure in which the through-hole to be formed may be sufficient. In this case, the position of the support plate 11 may be exchanged and the support plate 11 may be disposed so as to overlap the cover plate 5.
In the present embodiment, the method of applying the adhesive using the rubber application roller 33 has been described. Instead, a sheet-like adhesive is installed between the substrates 130, 150, and 190, You may adhere | attach by combining each board | substrate 130,150,190.

It is a figure which shows a mode that an actuator board | substrate, a cover plate board | substrate, and a flow-path plate board | substrate are joined by the manufacturing method of the liquid jet head which concerns on one Embodiment of this invention. It is a longitudinal cross-sectional view of the actuator substrate, cover plate substrate, and flow path plate substrate of FIG. It is the figure which showed a mode that an adhesive agent was apply | coated to the whole surface of the cover plate board | substrate of FIG. FIG. 5 is an exploded perspective view illustrating an example of a liquid jet head manufactured by a method of manufacturing a liquid jet head according to an embodiment of the invention. FIG. 5 is a longitudinal sectional view of the liquid ejecting head of FIG. 4 cut along a plane along a discharge groove. FIG. 5 is an exploded perspective view of the state in which the liquid ejecting head or nozzle plate of FIG. 4 is removed as seen from another angle. FIG. 7 is a longitudinal sectional view of the liquid ejecting head of FIG. 6 cut along a plane in a direction intersecting with the ejection grooves. FIG. 5 is a schematic perspective view of a liquid ejecting apparatus equipped with the liquid ejecting head of FIG. 4.

Explanation of symbols

10 Liquid ejecting head 13 Discharge groove (liquid discharge groove)
18 Cover plate opening (opening)
17 Concave portion 19 Through hole 21 Flow path 29 Filter (foreign matter removing member)
130 Actuator substrate 150 Cover plate substrate 190 Flow path plate substrate

Claims (5)

An actuator substrate having a plurality of variable volume liquid ejection grooves which are open on one surface and arranged at parallel intervals and are formed with electrodes on each side wall, and a predetermined pitch penetrating from the opening formed on one surface to the other surface A cover plate substrate having a plurality of openings arranged in a plurality of openings, and a flow path plate substrate having a plurality of groove-like channels that are open on one surface and arranged at substantially the same pitch as the openings. And the openings of the flow paths are opposed to each other, and are laminated in a laminated state in the plate thickness direction so that the arrangement direction of the openings and the arrangement direction of the flow paths are orthogonal to the arrangement direction of the liquid ejection grooves. A bonding step of forming a substrate;
Cutting the laminated substrate formed by the bonding step along a plane intersecting the liquid ejection groove at an intermediate position between the adjacent openings , and
The opening is formed in a groove-like recess having an opening surface on the one surface of the cover plate substrate, and penetrating from the bottom surface of the recess to the other surface at a pitch substantially equal to or half the pitch of the liquid ejection groove. A plurality of through holes,
The cover plate substrate has a foreign substance removing member at a position substantially closing the opening and spaced from the bottom surface of the recess,
A method of manufacturing a liquid ejecting head, wherein, in the joining step, the through hole of the cover plate substrate and the liquid discharge groove of the actuator substrate are substantially matched . The foreign matter removing member is arranged in a concave relative to the one surface of the cover plate substrate, in the joining step, according to claim 1 for applying adhesive along the one surface of the cover plate substrate A method for manufacturing a liquid jet head. The liquid discharge groove of the actuator substrate, straddles each two of said openings adjacent and claim 1 or claim is formed to be terminated without exceeding the cut surfaces formed on both outer side 3. A method for manufacturing a liquid jet head according to 2 . A liquid discharge groove forming step of forming a liquid discharge groove of the actuator substrate;
4. The liquid discharge groove forming step of cutting the liquid discharge groove by moving the milling cutter in the thickness direction of the substrate constituting the actuator substrate while moving the milling cutter in the direction along the one surface . A method of manufacturing a liquid jet head according to any one of the above. 5. A step of adhering a nozzle plate to the entire one end surface of each end surface of the actuator substrate, the cover plate substrate, and the flow path plate substrate cut by the cutting step. A method of manufacturing the liquid jet head according to claim.

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