JP5351347B1 - Method and apparatus for cleaning object to be cleaned - Google Patents
Method and apparatus for cleaning object to be cleaned Download PDFInfo
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- JP5351347B1 JP5351347B1 JP2013037120A JP2013037120A JP5351347B1 JP 5351347 B1 JP5351347 B1 JP 5351347B1 JP 2013037120 A JP2013037120 A JP 2013037120A JP 2013037120 A JP2013037120 A JP 2013037120A JP 5351347 B1 JP5351347 B1 JP 5351347B1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B2230/00—Other cleaning aspects applicable to all B08B range
- B08B2230/01—Cleaning with steam
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
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- Cleaning By Liquid Or Steam (AREA)
Abstract
【課題】被洗浄物を定位置に配置したまま被洗浄物に、浸漬洗浄、蒸気洗浄、乾燥等の複数種の洗浄作業を行うことを可能とする。そのため、被洗浄物の上下動機構が不要となり、洗浄装置を小型化し、配置面積、配置容積を減少できるとともに廉価な装置を得ることが可能となる。
【解決手段】洗浄槽1内の非冷却ゾーン11に被洗浄物4を定位置に配置し、この被洗浄物4の非冷却ゾーン11に供給部24から洗浄液13を導入して浸漬洗浄を行う。次に凝縮部8を洗浄液13で被覆する位置まで洗浄液13を排出し、非冷却ゾーン11内に洗浄蒸気7を導入して、被洗浄物4の蒸気洗浄を行う。次に、洗浄蒸気7の供給を停止し、凝縮部8が露出するまで洗浄液13を洗浄槽1から排出することにより、凝縮部8で洗浄蒸気を凝縮液化し、蒸気圧を下げて被洗浄物4を自熱乾燥する。
【選択図】図1An object of the present invention is to perform a plurality of types of cleaning operations such as immersion cleaning, steam cleaning, and drying on an object to be cleaned while the object to be cleaned is placed at a fixed position. This eliminates the need for a mechanism for moving the object to be cleaned, reduces the size of the cleaning apparatus, reduces the arrangement area and the arrangement volume, and provides an inexpensive apparatus.
An object to be cleaned 4 is arranged at a fixed position in a non-cooling zone 11 in a cleaning tank 1, and a cleaning liquid 13 is introduced from a supply unit 24 into the non-cooling zone 11 of the object to be cleaned 4 to perform immersion cleaning. . Next, the cleaning liquid 13 is discharged to a position where the condensing unit 8 is covered with the cleaning liquid 13, and the cleaning steam 7 is introduced into the non-cooling zone 11 to perform the steam cleaning of the object to be cleaned 4. Next, the supply of the cleaning vapor 7 is stopped, and the cleaning liquid 13 is discharged from the cleaning tank 1 until the condensing unit 8 is exposed, whereby the cleaning vapor is condensed and liquefied in the condensing unit 8, and the vapor pressure is lowered to be cleaned. 4 is autothermally dried.
[Selection] Figure 1
Description
本発明は被洗浄物の洗浄方法及びその装置に係るもので、被洗浄物の洗浄液による浸漬洗浄、蒸気洗浄、乾燥等の複数種の作業を、被洗浄物を定位置に配置したまま位置を移動することなく行う事を可能にしようとするものである。 The present invention relates to a method and apparatus for cleaning an object to be cleaned, and a plurality of types of operations such as immersion cleaning with a cleaning liquid, steam cleaning, and drying of the object to be cleaned are arranged with the object to be cleaned in place. It tries to make it possible to do without moving.
従来より、被洗浄物の洗浄方法として、洗浄液による浸漬洗浄、蒸気洗浄、乾燥等の如く一つの被洗浄物に異なる洗浄作業を加えることが一般的に行われている。この、被洗浄物に異なる洗浄作業を加える方法としては、浸漬洗浄槽、蒸気洗浄槽、乾燥槽の如く単一の作業を行う作業槽を、被洗浄物を順次移動させながら行う方法がある。この方法は大量の被洗浄物を迅速に処理する上で優れているが、装置を大型化し大きな設置面積を必要とするとともに少量の被洗浄物の洗浄には効率が悪い欠点を有している。 Conventionally, as a method for cleaning an object to be cleaned, different cleaning operations are generally applied to one object to be cleaned, such as immersion cleaning with a cleaning liquid, steam cleaning, and drying. As a method of adding different cleaning operations to the object to be cleaned, there is a method in which an operation tank that performs a single operation such as an immersion cleaning tank, a steam cleaning tank, and a drying tank is performed while sequentially moving the object to be cleaned. This method is excellent in rapidly processing a large amount of objects to be cleaned. However, this method has a disadvantage that the apparatus is enlarged and requires a large installation area and is inefficient for cleaning a small amount of objects to be cleaned. .
また、装置を小型化し小さな設置面積に配置し得るようにしたものは、特許文献1、2に記載の如く、被洗浄物に複数種の洗浄作業を加えるのに、一つの洗浄槽内で行う事が出来るようにしたものが存在する。この特許文献1、2に記載の発明は一つの洗浄槽内の上下方向に浸漬洗浄部、蒸気洗浄部、乾燥部を設け、行う洗浄作業に応じて被洗浄物を上下に移動することにより、被洗浄物の洗浄が完結できるようにしたものである。この洗浄装置は、装置の設置面積も少ないとともに少量の被洗浄物を経済的に洗浄するのに特に優れたものと成っている。 In addition, as described in Patent Documents 1 and 2, an apparatus that is reduced in size and can be arranged in a small installation area is used in a single washing tank in order to add a plurality of types of washing operations to an object to be washed. There are things that make things possible. The inventions described in Patent Documents 1 and 2 are provided with an immersion cleaning unit, a steam cleaning unit, and a drying unit in the vertical direction in one cleaning tank, and by moving an object to be cleaned up and down according to the cleaning operation to be performed, The cleaning of the object to be cleaned is completed. This cleaning device has a small installation area and is particularly excellent for economically cleaning a small amount of objects to be cleaned.
しかしながら、特許文献1、2に記載の発明では、洗浄槽内で被洗浄物を上下動させる機構が必要となり、この上下動機構の分だけ装置が大型化し、価格も高価なものとなっていた。また、特許文献1、2に記載の発明では、洗浄槽内で被洗浄物を上下動させるため、洗浄槽内に乱気流が発生し易いものとなり、この乱気流によって洗浄槽外に溶剤を拡散しやすいものとなっていた。 However, in the inventions described in Patent Documents 1 and 2, a mechanism for moving the object to be cleaned up and down in the cleaning tank is required, and the apparatus is increased in size by the amount of the vertical movement mechanism, and the price is also expensive. . Further, in the inventions described in Patent Documents 1 and 2, since the object to be cleaned is moved up and down in the cleaning tank, turbulence easily occurs in the cleaning tank, and the turbulent air easily diffuses the solvent outside the cleaning tank. It was a thing.
そこで本発明は、上述の如き課題を解決しようとするものであって、上下動機構を不要とし、一つの洗浄槽内で複数種の洗浄作業を行いながら、被洗浄物を定位置に保ち、被洗浄物を異なる洗浄場所に移動することなく、定位置で洗浄を完結しようとするものである。 Therefore, the present invention is intended to solve the above-described problems, eliminates the need for a vertical movement mechanism, and while performing a plurality of types of cleaning operations in one cleaning tank, keeps the object to be cleaned in place, It is intended to complete the cleaning at a fixed position without moving the object to be cleaned to a different cleaning place.
本発明は、被洗浄物の洗浄を行う洗浄槽内に、洗浄蒸気の凝縮部を形成しない非冷却ゾーンを設け、この非冷却ゾーンに被洗浄物を定位置に配置し、この被洗浄物の非冷却ゾーンに供給部から洗浄液を導入して浸漬洗浄を行った後、非冷却ゾーンの下方に設けた凝縮部を洗浄液で被覆する位置まで非冷却ゾーンから洗浄液を排出し、この非冷却ゾーン内に洗浄蒸気を導入して、被洗浄物の蒸気洗浄を行い、この蒸気洗浄後に洗浄蒸気の供給を停止し、凝縮部が露出するまで洗浄液を洗浄槽から排出することにより、凝縮部で洗浄蒸気を凝縮液化することにより、蒸気圧を下げて被洗浄物を自熱乾燥することを特徴として成る被洗浄物の洗浄方法に関するものである。 The present invention provides a non-cooling zone that does not form a condensing part of cleaning vapor in a cleaning tank that cleans the object to be cleaned, and places the object to be cleaned in a fixed position in the non-cooling zone. After introducing the cleaning liquid from the supply section to the non-cooling zone and performing immersion cleaning, the cleaning liquid is discharged from the non-cooling zone to the position where the condensing section provided below the non-cooling zone is covered with the cleaning liquid. The cleaning steam is introduced into the cleaning section, and the object to be cleaned is steam cleaned. After the steam cleaning, the supply of cleaning steam is stopped, and the cleaning liquid is discharged from the cleaning tank until the condensing section is exposed. The present invention relates to a method for cleaning an object to be cleaned, characterized in that the object to be cleaned is dried by self-heating by reducing the vapor pressure.
また、上記の洗浄方法を実施するための装置としては、被洗浄物の洗浄を行う洗浄槽内に、洗浄蒸気の凝縮部を形成しない非冷却ゾーンを設け、この非冷却ゾーンに被洗浄物を定位置に配置する配置部を設け、この非冷却ゾーンの下方に洗浄蒸気の凝縮を行う凝縮部を形成するとともにこの非冷却ゾーンに洗浄蒸気を供給する蒸気発生部を接続し、また洗浄槽には洗浄液を洗浄槽内に供給する供給部を接続し、この供給部から洗浄液を洗浄槽内に供給可能とし、凝縮部又は凝縮部と非冷却ゾーン内を、洗浄液で被覆可能としてなるものである。 In addition, as an apparatus for carrying out the above-described cleaning method, a non-cooling zone that does not form a condensing part of cleaning vapor is provided in a cleaning tank that cleans the object to be cleaned, and the object to be cleaned is placed in this non-cooling zone. An arrangement part is provided at a fixed position, a condensing part for condensing the cleaning steam is formed below the non-cooling zone, a steam generating part for supplying the cleaning steam to the non-cooling zone is connected, and the cleaning tank is connected Is connected to a supply unit for supplying the cleaning liquid into the cleaning tank, and the cleaning liquid can be supplied into the cleaning tank from this supply unit, and the condensing unit or the condensing unit and the non-cooling zone can be covered with the cleaning liquid. .
「本発明は上述の如く構成したものであって、被洗浄物を定位置に配置したまま被洗浄物の浸漬洗浄作業、蒸気洗浄作業、自熱乾燥作業を行うことができるから、従来必要としていた被洗浄物の上下動機構が不要となり、洗浄装置を小型化し、配置面積、配置容積を減少できるとともに廉価な装置を得ることが可能となる。また、被洗浄物の上下動機構が不要となるため、上下動機構の保守が全く不要となり、装置の保守経費も減少させる事が出来る。」
"The present invention was constructed as described above, immersion cleaning work remains to be washed was placed to be cleaned in place, the steam washing operation, since it is possible to perform autothermal drying operation industry, requires prior This eliminates the need for the vertical movement mechanism for the object to be cleaned, reduces the size of the cleaning device, reduces the layout area and volume, and provides an inexpensive apparatus. Therefore, the maintenance of the vertical movement mechanism is completely unnecessary, and the maintenance cost of the device can be reduced. "
また、本願発明は上下動機構を備えないものであるから、上下動機構の作動に伴う被洗浄物の上下動によって洗浄槽内の乱気流を発生させることがない。被洗浄物は定位置に保たれたまま洗浄作業を完了するから、乱気流の発生は少ないものとなり洗浄槽外への溶剤の拡散を最小限とすることが可能となる。 In addition, since the present invention does not include a vertical movement mechanism, turbulence in the cleaning tank is not generated by the vertical movement of the object to be cleaned accompanying the operation of the vertical movement mechanism. Since the cleaning operation is completed while the object to be cleaned is maintained at a fixed position, the generation of turbulence is reduced, and the diffusion of the solvent to the outside of the cleaning tank can be minimized.
本発明の実施例1を図1において詳細に説明すると、(1)は洗浄槽で、上端開口(2)を蓋体(3)で密閉可能とするとともに常圧で使用する構成と成っている。しかし、耐圧性のものを選択することは勿論可能である。この洗浄槽(1)には、被洗浄物(4)を定位置に配置し、洗浄作業の開始から完了まで位置を移動することがないように配置する配置部(5)を設けている。この配置部(5)の下方と洗浄槽(1)の底板(6)との間には一定の空間を設けて洗浄蒸気(7)の凝縮部(8)としている。この凝縮部(8)は、被洗浄物(4)の配置部(5)に至らない範囲で、洗浄槽(1)の内周に冷却コイル(10)を巻き回すことにより形成している。また凝縮部(8)は、洗浄槽(1)の内周に冷却コイル(10)を巻き回す方法ではなく、冷却パネルを洗浄槽(1)の底部に設けたものであっても良い。 Embodiment 1 of the present invention will be described in detail with reference to FIG. 1. (1) is a washing tank, and the upper end opening (2) can be sealed with a lid (3) and used at normal pressure. . However, it is of course possible to select a pressure-resistant one. The cleaning tank (1) is provided with an arrangement portion (5) for arranging the object to be cleaned (4) at a fixed position so that the position does not move from the start to the completion of the cleaning operation. A certain space is provided between the lower part of the arrangement part (5) and the bottom plate (6) of the cleaning tank (1) to form a condensing part (8) for the cleaning steam (7). This condensing part (8) is formed by winding the cooling coil (10) around the inner periphery of the cleaning tank (1) within a range not reaching the arrangement part (5) of the object to be cleaned (4). Further, the condensing unit (8) may be one in which a cooling panel is provided at the bottom of the cleaning tank (1) instead of the method of winding the cooling coil (10) around the inner periphery of the cleaning tank (1).
また、洗浄槽(1)は被洗浄物(4)の配置部(5)の外周を、凝縮部(8)を設けない非冷却ゾーン(11)としている。この非冷却ゾーン(11)は、上端および下端に洗浄液(13)を感知する液センサ(12)(14)を配置している。そして、この非冷却ゾーン(11)には、被洗浄物(4)の蒸気洗浄を行うための洗浄蒸気(7)を供給する蒸気発生部(15)を第1開閉弁(16)を介して接続している。この蒸気発生部(15)は、洗浄蒸気を発生させることができるものであれば特に構成は問題としない。図面に示す実施例では、蒸気発生部(15)の下端に洗浄液(13)を充填し、ヒータ(17)により加熱することによって被洗浄物(4)の洗浄蒸気(7)を発生させている。また、発生した蒸気層の上部には、密閉用の中蓋(18)を配置するとともにこの中蓋(18)の上方で蒸気発生部(15)の内周には冷却コイル(10)を巻き回して、洗浄蒸気(7)の漏洩を防止している。 Further, in the cleaning tank (1), the outer periphery of the arrangement part (5) of the object to be cleaned (4) is set as a non-cooling zone (11) in which the condensing part (8) is not provided. In the non-cooling zone (11), liquid sensors (12) and (14) for detecting the cleaning liquid (13) are arranged at the upper and lower ends. In this non-cooling zone (11), a steam generating section (15) for supplying cleaning steam (7) for performing steam cleaning of the object to be cleaned (4) is provided via a first on-off valve (16). Connected. The configuration of the steam generator (15) is not particularly limited as long as it can generate cleaning steam. In the embodiment shown in the drawing, the cleaning liquid (13) is filled at the lower end of the steam generating section (15), and the cleaning steam (7) of the object to be cleaned (4) is generated by heating with the heater (17). . Further, a sealing inner lid (18) is disposed above the generated steam layer, and a cooling coil (10) is wound around the inner periphery of the steam generating section (15) above the inner lid (18). Rotating to prevent leakage of cleaning steam (7).
また、蒸気発生部(15)の下部には液センサ(20)を配置するとともに、下底(21)には液抜用の排出バルブ(22)を設けている。また、蒸気発生部(15)の上端は密閉蓋(23)にて密閉している。また、洗浄液(13)は、塩素系溶剤、フッ素系溶剤、臭素系溶剤、フッ素系液、アルコール類、揮発性溶剤、炭化水素系溶剤の一種又は複数種を選択的に使用するものである。 A liquid sensor (20) is disposed below the steam generating section (15), and a discharge valve (22) for draining liquid is provided on the lower bottom (21). Moreover, the upper end of the steam generation part (15) is sealed with a sealing lid (23). The cleaning liquid (13) selectively uses one or a plurality of chlorine-based solvents, fluorine-based solvents, bromine-based solvents, fluorine-based liquids, alcohols, volatile solvents, and hydrocarbon-based solvents.
また、洗浄槽(1)には、洗浄液(13)を供給し被洗浄物(4)の浸漬洗浄をするための、リザーブタンク等の供給部(24)を下底に接続している。この洗浄槽(1)と供給部(24)の接続は、中間部に洗浄液(13)の濾過用のフイルタ(25)と液送用のポンプ(26)とを配管により接続して行うが、供給部(24)から第2開閉弁(27)、ポンプ(26)、フイルタ(25)、第3開閉弁(28)、洗浄槽(1)を配管で接続する液導入回路(30)と、洗浄槽(1)から第4開閉弁(31)、ポンプ(26)、フイルタ(25)、第5開閉弁(32)、供給部(24)を配管で接続する液導出回路(33)とから構成されている。なお、この液導出回路(33)と液導入回路(30)とは、ポンプ(26)、フイルタ(25)及び一部の配管を共通としている。 In addition, a supply section (24) such as a reserve tank for supplying the cleaning liquid (13) and immersing the object to be cleaned (4) is connected to the lower tank in the cleaning tank (1). The connection between the cleaning tank (1) and the supply section (24) is made by connecting a filter (25) for filtering the cleaning liquid (13) and a pump (26) for liquid feeding to the middle section by piping. A liquid introduction circuit (30) for connecting a second on-off valve (27), a pump (26), a filter (25), a third on-off valve (28), and a cleaning tank (1) from the supply unit (24) by piping; From the washing tank (1) to the fourth open / close valve (31), the pump (26), the filter (25), the fifth open / close valve (32), and the liquid lead-out circuit (33) connecting the supply section (24) by piping. It is configured. The liquid lead-out circuit (33) and the liquid introduction circuit (30) share a pump (26), a filter (25), and some piping.
また、洗浄槽(1)内の上部及び蒸気発生部(15)の中蓋(18)の上部には上部冷却部(34)を設け、洗浄蒸気(7)の外部への流出を防止している。洗浄蒸気(7)は空気よりも密度が大きいため、上部へ拡散することが少なく、洗浄槽(1)の下部に設けた凝縮部(8)の如く洗浄蒸気(7)を急激に凝縮することはない。また、供給部(24)と蒸気発生部(15)とは、オーバーフロー管(35)によって接続している。また、供給部(24)と洗浄槽(1)とは、液圧調整バルブ(36)を介して接続し、供給部(24)と洗浄槽(1)の間での洗浄液(13)の出入に伴う圧力変化を調整している。 An upper cooling part (34) is provided in the upper part of the cleaning tank (1) and the upper part of the inner lid (18) of the steam generating part (15) to prevent the cleaning steam (7) from flowing out to the outside. Yes. Since the cleaning steam (7) has a density higher than that of air, it is less likely to diffuse upward, and the cleaning steam (7) is rapidly condensed like the condensing part (8) provided at the lower part of the cleaning tank (1). There is no. The supply unit (24) and the steam generation unit (15) are connected by an overflow pipe (35). The supply unit (24) and the cleaning tank (1) are connected via a hydraulic pressure adjusting valve (36), and the cleaning liquid (13) enters and exits between the supply unit (24) and the cleaning tank (1). The pressure change accompanying the adjustment is adjusted.
上述の如く構成したものに於いて、被洗浄物(4)の洗浄を行うには、洗浄槽(1)の蓋体(3)を開放し、人手または洗浄槽(1)とは別個に設けた昇降機等により、上端開口(2)から被洗浄物(4)を洗浄槽(1)内に設けたテーブル等の配置部(5)に、定位置に配置する。この被洗浄物(4)は洗浄が完了するまで配置部(5)を移動することがなく定位置に保たれている。被洗浄物(4)を収納したら蓋体(3)で上端開口(2)を密閉する。 To clean the object to be cleaned (4), the lid (3) of the cleaning tank (1) is opened and provided separately from the hand or the cleaning tank (1). The object to be cleaned (4) is arranged at a fixed position from the upper end opening (2) on the arrangement part (5) such as a table provided in the washing tank (1) by an elevator or the like. The object to be cleaned (4) is kept in a fixed position without moving the arrangement part (5) until the cleaning is completed. When the object to be cleaned (4) is stored, the upper end opening (2) is sealed with the lid (3).
次に、洗浄液(13)を供給部(24)から洗浄槽(1)内に導入して、図1に示す如く被洗浄物(4)を浸漬し、被洗浄物(4)を浸漬洗浄する。この洗浄槽(1)への洗浄液(13)の導入は、液導入回路(30)の第2開閉弁(27)、第3開閉弁(28)を開放し、第4開閉弁(31)、第5開閉弁(32)を閉止してポンプ(26)を作動すれば、洗浄液(13)は液導入回路(30)、ポンプ(26)、第3開閉弁(28)を介して洗浄槽(1)に導入される。洗浄液(13)は図1に示す如く、非冷却ゾーン(11)に配置した被洗浄物(4)を被覆浸漬するまで洗浄槽(1)に導入することにより被洗浄物(4)の浸漬液洗浄を行う。この浸漬液洗浄は超音波洗浄を伴うものであっても良い。 Next, the cleaning liquid (13) is introduced from the supply section (24) into the cleaning tank (1), and the object to be cleaned (4) is immersed as shown in FIG. 1, and the object to be cleaned (4) is immersed and cleaned. . The cleaning liquid (13) is introduced into the cleaning tank (1) by opening the second on-off valve (27) and the third on-off valve (28) of the liquid introduction circuit (30), the fourth on-off valve (31), When the fifth on-off valve (32) is closed and the pump (26) is operated, the cleaning liquid (13) is passed through the liquid introduction circuit (30), the pump (26), and the third on-off valve (28). Introduced in 1). As shown in FIG. 1, the cleaning liquid (13) is introduced into the cleaning tank (1) until the object to be cleaned (4) arranged in the non-cooling zone (11) is covered and immersed, so that the cleaning liquid (4) is immersed in the cleaning liquid (13). Wash. This immersion liquid cleaning may be accompanied by ultrasonic cleaning.
上記の浸漬洗浄が完了したら、図2に示す如く洗浄液(13)を被洗浄物(4)が露出するまで供給部(24)に排出する。この排出は凝縮部(8)の冷却コイル(10)を露出しない限度で行う。この洗浄槽(1)からの洗浄液(13)の排出は、液導出回路(33)の第4開閉弁(31)、第5開閉弁(32)を開放するとともに、第3開閉弁(28)、第2開閉弁(27)を閉鎖して、ポンプ(26)を作動することにより、洗浄液(13)は第4開閉弁(31)、ポンプ(26)、フイルタ(25)、第5開閉弁(32)を介して供給部(24)に導入される。次に、蒸気発生部(15)から第1開閉弁(16)を開放して洗浄蒸気(7)を洗浄槽(1)の非冷却ゾーン(11)に導入する。 When the above immersion cleaning is completed, the cleaning liquid (13) is discharged to the supply section (24) until the object to be cleaned (4) is exposed as shown in FIG. This discharge is performed as long as the cooling coil (10) of the condenser (8) is not exposed. The discharge of the cleaning liquid (13) from the cleaning tank (1) opens the fourth on-off valve (31) and the fifth on-off valve (32) of the liquid derivation circuit (33) and the third on-off valve (28). By closing the second on-off valve (27) and operating the pump (26), the cleaning liquid (13) is supplied to the fourth on-off valve (31), the pump (26), the filter (25), and the fifth on-off valve. It is introduced into the supply section (24) via (32). Next, the first open / close valve (16) is opened from the steam generating section (15) to introduce the cleaning steam (7) into the non-cooling zone (11) of the cleaning tank (1).
洗浄槽(1)の非冷却ゾーン(11)に導入された洗浄蒸気(7)は、被洗浄物(4)と接触して凝縮し被洗浄物(4)の蒸気洗浄を行う。洗浄蒸気(7)が導入される被洗浄物(4)の配置位置は、冷却機能のない非冷却ゾーン(11)となっているとともに、被洗浄物(4)の下方に設けた凝縮部(8)は洗浄液(13)で被覆されているから、被洗浄物(4)との接触以外で凝縮されることが少なく、効率的に被洗浄物(4)と接触して蒸気洗浄を行うことができる。 The cleaning steam (7) introduced into the non-cooling zone (11) of the cleaning tank (1) comes into contact with the object to be cleaned (4) and condenses to perform steam cleaning of the object to be cleaned (4). The position of the object to be cleaned (4) into which the cleaning vapor (7) is introduced is an uncooled zone (11) having no cooling function, and a condensing section (below the object to be cleaned (4)) ( Since 8) is coated with the cleaning liquid (13), it is less likely to condense except in contact with the object to be cleaned (4), and efficiently performs steam cleaning by contacting the object to be cleaned (4). Can do.
この蒸気洗浄完了後は、図3に示す如く、凝縮部(8)を被覆している洗浄液(13)を凝縮部(8)が露出するまで、好ましくは洗浄槽(1)から全て供給部(24)に排出する。この洗浄液(13)の排出により凝縮部(8)が露出すると、空気よりも密度が大きい洗浄蒸気(7)は配置部(5)の下方に設けた凝縮部(8)で凝縮され、洗浄槽(1)内の蒸気圧を急激に低くすることができ、被洗浄物(4)の自熱乾燥を可能とすることができる。 After completion of the steam cleaning, as shown in FIG. 3, the cleaning liquid (13) covering the condensing unit (8) is preferably all supplied from the cleaning tank (1) until the condensing unit (8) is exposed. To 24). When the condensing part (8) is exposed by the discharge of the cleaning liquid (13), the cleaning vapor (7) having a density higher than that of air is condensed in the condensing part (8) provided below the arrangement part (5), and the washing tank The vapor pressure in (1) can be drastically lowered, and the object to be cleaned (4) can be dried by heating.
本発明に於いては、上述の如く被洗浄物(4)の浸漬洗浄、蒸気洗浄、乾燥の異なる洗浄作業を、洗浄槽(1)内に於いて位置を移動することなく定位置で行う事が出来るから、廉価で簡易な機構によって迅速な被洗浄物(4)の一貫した洗浄を可能とするものである。尚、被洗浄物(4)の定位置での洗浄とは、被洗浄物(4)の洗浄効率を上げるために、被洗浄物(4)に上下左右に振動を加えたり、被洗浄物(4)を回転したり、被洗浄物(4)を揺動したり、超音波振動を与えたりすることを含むものである。被洗浄物(4)の定位置での洗浄とは、浸漬洗浄、蒸気洗浄、乾燥等の異なる洗浄作業を行うために、それぞれの作業位置に被洗浄物(4)を移動する必要がない事を意味するものである。 In the present invention, as described above, different cleaning operations such as immersion cleaning, steam cleaning, and drying of the object to be cleaned (4) are performed in place in the cleaning tank (1) without moving the position. Therefore, the object to be cleaned (4) can be quickly and consistently cleaned by an inexpensive and simple mechanism. The cleaning of the object to be cleaned (4) at a fixed position means that the object to be cleaned (4) is vibrated vertically and horizontally or the object to be cleaned ( This includes rotating 4), swinging the object to be cleaned (4), and applying ultrasonic vibration. The cleaning of the object to be cleaned (4) at a fixed position means that it is not necessary to move the object to be cleaned (4) to each work position in order to perform different cleaning operations such as immersion cleaning, steam cleaning and drying. Means.
また、本発明は被洗浄物(4)の浸漬洗浄、蒸気洗浄、乾燥を定位置で一貫して行うものであるが、洗浄目的に応じて被洗浄物(4)の浸漬洗浄のみに、被洗浄物(4)の蒸気洗浄のみに、被洗浄物(4)の乾燥のみに使用することは勿論可能である。 In addition, the present invention consistently performs immersion cleaning, steam cleaning, and drying of the object to be cleaned (4) at a fixed position, but only the object to be cleaned (4) is subjected to immersion cleaning depending on the purpose of cleaning. Of course, it is possible to use it only for the cleaning of the object to be cleaned (4) and only for drying the object to be cleaned (4).
1 洗浄槽
4 被洗浄物
5 配置部
7 洗浄蒸気
8 凝縮部
11 非冷却ゾーン
13 洗浄液
15 蒸気発生部
24 供給部
DESCRIPTION OF SYMBOLS 1 Washing tank 4 To-be-washed object 5 Arrangement | positioning part 7 Washing steam 8 Condensing part 11 Non-cooling zone 13 Cleaning liquid 15 Steam generating part 24 Supply part
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JP2013037120A JP5351347B1 (en) | 2013-02-27 | 2013-02-27 | Method and apparatus for cleaning object to be cleaned |
PCT/JP2013/005831 WO2014132299A1 (en) | 2013-02-27 | 2013-10-01 | Method and device for cleaning article to be cleaned |
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JP2013037120A JP5351347B1 (en) | 2013-02-27 | 2013-02-27 | Method and apparatus for cleaning object to be cleaned |
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JP2014161829A JP2014161829A (en) | 2014-09-08 |
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JPS62193686A (en) * | 1986-02-21 | 1987-08-25 | ジヤパン・フイ−ルド株式会社 | Washing apparatus |
JP2784157B2 (en) * | 1995-06-13 | 1998-08-06 | ジャパン・フィールド株式会社 | Cleaning equipment |
JP3447881B2 (en) * | 1996-01-29 | 2003-09-16 | コマツ電子金属株式会社 | Method for drying semiconductor wafer |
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