JP5278722B2 - Method for producing a three-dimensional structure by three-dimensional free-form technology - Google Patents

Description

The present invention relates to a technology for three-dimensionally forming a paste-like ceramic or metal into a three-dimensional structure and integrating it in a microelement or the like. More specifically, the paste-like ceramic or metal is applied by a dispenser coating method. The present invention relates to a method for producing a three-dimensional structure by precision coating and three-dimensional molding. The present invention is to provide a way to utilize a dispenser coating method, to produce a three-dimensional structure by discharging pasty ceramic from the nozzle.

  The three-dimensional shape free-formation technique means a process of directly generating a three-dimensional shape (three-dimensional model) using shape data input on a three-dimensional CAD without machining. A typical example is a lamination molding technique, so-called rapid prototyping (RP) technique. This technology refers to the direct generation (three-dimensional stack molding) of a three-dimensional model (three-dimensional model) while layering one layer at a time without using machining, using shape data input on a three-dimensional CAD. Yes (see FIG. 1).

  In addition, this technology utilizes each technology, how to shorten the time from the start of product development to shipping, reduce costs as much as possible, and quickly and quickly produce high-quality products that meet consumer needs. It was called rapid prototyping because it was developed as a prototype molding technique with the proposition of whether it could be sent out.

  The most famous of these technologies is a method using a liquid UV curable resin called “photo molding method”. In addition to this, the "heat melting lamination method" that stacks while melting the thermoplastic resin, the "powder molding method" that forms while sintering the powder material, the "sheet lamination method" that stacks while cutting paper, Recently, there is an “inkjet method” that can be used as a simple and inexpensive three-dimensional printer.

  The basis of either method is the invention of the “three-dimensional figure creation device” of 1980 (Patent Document 1), basically 1) creating electronic three-dimensional information 2) This is divided into information obtained by slicing a three-dimensional solid called slice data. 3) An actual material is formed in a shape based on this information, and this is sequentially stacked to create an actual solid. (See FIG. 1).

  Among these, the ink jet method is a method of making a three-dimensional object by spraying and depositing a liquefied material such as a molten metal only on a necessary portion. In this method, a three-dimensional object can also be produced by dropping a bonding liquid onto a spread powder material. Initially, this name remains because it used an inkjet head for a printer. In this method, the shape of the nozzle to be sprayed and the flow rate control and the shape control of the droplet of the liquefied material to be sprayed are problems.

  The extrusion method is a method in which a material is melted with heat to give fluidity, extruded into a thin thread shape, and a three-dimensional object is made in the manner of a single stroke, and thermoplastic resins and metals are mainly used. In this method, since the thickness of the layer changes depending on the flow rate and movement amount of the nozzle to be extruded, control of the nozzle flow rate at the turning point becomes a problem. FIG. 2 shows a conceptual diagram of the extrusion method. However, in principle, it corresponds to the laminate molding method.

  However, some of the above-mentioned lamination molding methods are, in principle, constituted by forming a two-dimensional pattern on a plane and laminating them, and it is difficult to form a three-dimensional structure directly. is there.

  The dispenser coating method is a technique similar to the above-described extrusion method, but if a dispenser coating method capable of three-dimensional movement is used and the shape of the paste molded body can be maintained at the time of coating, it is directly 3 Dimensional (3D) three-dimensional molding is considered possible. The details of the pattern forming technique using the dispenser are described in the prior patent application (Patent Document 4) filed by the present inventor. However, this prior invention is a technique limited to a two-dimensional pattern and not a three-dimensional molding. .

JP 56-144478 A Japanese Patent No. 02783833 JP-A-7-227895 Japanese Patent Application No. 2005-067297

  Under such circumstances, in view of the above-described prior art, the present inventors use a dispenser coating method capable of three-dimensional movement, and realize the shape of the paste molded body at the time of coating 3 As a result of intensive research aimed at developing a fabrication technology for three-dimensional structures, it was found that three-dimensional molding can be controlled by using the dispenser coating method and combining the coating speed and paste coating speed, and the present invention was completed. It came to do.

The present invention relates to a three-dimensional free-form technology, which uses a dispenser coating method to produce a three-dimensional structure by a method of discharging paste from a nozzle, and forms a fine pattern using the method. method, and by using conductive particles of the paste, it is an object to provide a method of making a three-dimensional electrode structure of three-dimensional structure using the above method.

The present invention for solving the above-described problems comprises the following technical means.
(1) In a method of manufacturing a three-dimensional structure by discharging a paste from a nozzle by a dispenser using a dispenser coating method, the fluid is easy to flow at the time of discharge, and becomes hard immediately after the discharge and maintains a predetermined shape. A method for producing a structure using a paste having both properties and producing a three-dimensional structure by controlling the three-dimensional molding by combining the coating speed and the paste flow rate,
The above-mentioned dispenser keeps fluid flowing continuously, and paste-like ceramics or metal is used as the above-mentioned paste, and in the range of a shear rate of 0.1 to 10 (1 / s), the relationship of formula 2 described later In the equation, when the viscosity at a certain shear rate is η _o and the viscosity at another shear rate is η, the power coefficient n of the shear rate γ represented by the ratio η / η _o of these viscosities is A method for producing the structure, wherein a viscoelastic paste of less than −0.5 is used.
(2) The method according to (1), wherein a three-dimensional structure having an aspect ratio in the vertical direction larger than 3 is produced using the paste.
(3) The method according to (1) or (2) above, wherein the moldability in the three-dimensional structure manufacturing process is supplemented by using a curing agent that is cured by ultraviolet rays or heat as a component of the paste.
(4) The method according to (3), wherein the directionality of the discharge is controlled by curing the paste from outside the paste that discharges UV irradiation.
(5) The method according to (1) or (4) above, wherein a three-dimensional structure having an aspect ratio in the vertical direction of at least 15 is produced.
(6) By the method according to any one of (1) to (5), a fine pattern is maintained in a state in which a predetermined fine structure including the shape and distribution state of particles that are main components of the paste material is controlled. Forming a fine pattern.

Next, the present invention will be described in more detail.
The present invention is a method for producing a three-dimensional structure by discharging a paste from a nozzle using a dispenser coating method, and is a fluid that easily flows during discharge, and it becomes hard immediately after discharge and maintains a predetermined shape. The present invention is characterized in that a three-dimensional structure is produced by controlling a three-dimensional molding by using a paste having both characteristics and adjusting a discharge speed and a paste application speed.

Further, the present invention is a method for forming a fine pattern, wherein the paste has a shear rate power coefficient η (formula 2 to be described later) within a shear rate range of 0.1 to 10 (1 / s). Is characterized in that a viscoelastic paste having a parameter n) of less than -0.5 is used. Furthermore, the present invention is one having the characteristic to the above method, the method of making a three-dimensional electrode composed of a three-dimensional structure using the conductive particles of the paste of the conductive particles mainly composed of silver points is there.

  In order to mold in the vertical direction, it is required to extrude the material to be shaped while being transferred in the vertical direction. For this purpose, a technique for matching the coating flow rate and the transfer rate of the fluid material to be applied is necessary. In addition, when a normal fluid material is used and transferred and extruded in the vertical direction, it hangs down in the middle of the coating process in the vertical direction, and molding cannot be performed. Therefore, it is necessary to make a three-dimensional structure using a lamination method for making the two dimensions into three dimensions after coating, but as a result, it is not different from the conventional lamination molding method.

  The movement of the drawing by the dispenser is three-dimensional, but if there is no paste raw material that satisfies the conditions such as not being cut off during the coating process, or hanging or being kept in shape during the coating process, the three-dimensional structure Can't make. Normally, a fluid having low viscoelasticity is suitable for an ink jet paste or the like, but in order to satisfy the above conditions, a paste having high viscoelasticity for maintaining the shape is required.

  However, a high-viscosity paste cannot be ejected from the nozzle, so that there is a contradiction that application becomes impossible. The paste conditions that seem to be contradictory at first glance are expressed as viscoelastic conditions required during the coating process. 1) It is a fluid that flows easily during discharge, and passes through a thin discharge port. 2) They become hard immediately after discharge and keep the shape. Understanding the fluidity or viscoelasticity of the paste is important in controlling its application.

  Also in the present invention, application control is performed using a paste having viscoelasticity that satisfies the above conditions. Examples of the paste used in the present invention include paste-like ceramics and paste-like metals. Specifically, examples of the paste-like ceramics include oxides such as alumina, silica, and cobalt oxide, and ceramics that carry a noble metal on these oxides, and examples of the paste-like ceramics include conductive metals such as silver. Is exemplified.

Hereinafter, the viscoelasticity of the paste will be described in detail. As shown in FIG. 3, when the fluid is sandwiched between two plates, the lower plate is fixed, and the upper plate is moved at a certain speed, flow resistance is generated in the fluid. For example, the upper part of the fluid in contact with the area A (m ² ) is caused to flow at a velocity V (m / s). The flow resistance at that time is defined as F (N; Newton). Shear stress or stress, τ (Pa; Pascal) is resistance / area, F / A. If the thickness or height of the fluid is h, the shear rate γ (1 / s) at that time is V / h.

  Viscosity is defined as shear stress / shear rate and is given by:

  In the case of a liquid such as water, the viscosity does not depend on the shear rate and is almost constant, and such a fluid is called linear. However, the viscosity of a fluid such as a paste varies depending on the shear rate. Such fluid behavior is called non-linearity (FIG. 4).

As shown in FIG. 4, the viscosity of the paste changes depending on the shear rate, and exhibits a non-linear behavior. This nonlinear characteristic will be described in more detail, and parameters relating to the nonlinearity will be described. When the viscosity at a certain shear rate is η _o and the viscosity at another shear rate is η, the nonlinearity is expressed by a parameter n that indicates how much the change in η _o and η varies depending on the shear rate. be able to. When this is expressed by an expression, it becomes as shown in Expression 2.

  This parameter n is important in the properties of the paste. In general, n is a negative value. Incidentally, since Newtonian fluid does not change η even if the shear rate is changed, n = 0.

In controlling the viscosity of a paste, generally, a method of increasing viscosity by dissolving a polymer of a thickener in a dispersant and adjusting the amount of solids (metal or ceramic particles in the technical field of the present invention) are adjusted. The method of doing is mentioned. In general, when a paste is prepared, a large amount of particles are added to the dispersant, and the viscosity increases as the particle content increases. Since the particle content is φ, the maximum particle content is φ _M, and φ _M is assumed to be 0.7 when the particles are assumed to be spherical, a relational expression such as Equation 3 is obtained.

  However, in Equation 3, the effect when using the shear rate (control of nonlinear parameters) cannot be obtained. Pastes in which ceramics are dispersed exhibit complex behavior that cannot be explained by such modeling. In practice, various additives and the amount of particles can be changed and adjusted so as to obtain the effect of Formula 2 (for example, related documents: Principles of ceramic processing 2nd Ed. By J. S. Reed 1995 John). Wiley & Sons, Inc. pp. 279 16.2 Rheological models and properties).

In the present invention, the viscoelasticity of the paste can be controlled by making good use of the shear rate dependence of the clay of the paste. If the properties of the paste will be considered against the requirements at the time of the dispenser application, there is a need for the following requirements. By controlling the ratio of dispersant and particles, the same paste can be 1. A fluid that flows easily during discharge and passes through a thin discharge port. It is to coexist the two characteristics of hardening immediately after discharge and maintaining the shape.

A non-linear parameter n will be described in detail with reference to FIG. The shear rate when the paste passes through the dispenser nozzle and has a viscosity η ₃ is determined by the coating flow rate. As shown in FIG. 5, the shear rate is a high value, and the fluid is easy to flow. After ejection, the shear rate for drained rapidly, the viscosity eta _1. Assuming the case of paste application, when the paste passes through the nozzle, the paste has sufficiently high fluidity and low viscosity, but after discharging from the nozzle, the shear rate decreases rapidly and the viscosity decreases. Design to be high. Furthermore, it is necessary to make the difference in viscoelasticity at this time sufficiently large. For this reason, the parameter n of how much the change in η ₃ and η ₁ changes depending on the shear rate is important and needs to increase in the negative direction (FIG. 5).

  Regarding the parameter range and application speed, when using a dispenser application method capable of three-dimensional application, it is a fluid that flows easily during discharge, passes through a thin discharge port, becomes hard immediately after discharge, and maintains its shape. There is a range for controlling the viscoelasticity of pastes that coexist two properties. The shear rate at which the nonlinear and linear behavior of the paste switches is determined. In an actual dispenser application, the shear rate is determined by the inner diameter of the nozzle to be applied and the flow rate of the fluid.

  As can be seen from FIG. 6, since this switching occurs at a specific shear rate, the above control cannot be performed unless the flow rate of the paste to be applied matches. In some cases, it is necessary to change the size of the nozzle. In this case, there is a limit to the structure to be formed. When performing three-dimensional molding, it is necessary to match the moving speed of the nozzle to be applied while moving in the three-axis directions of X, Y, and Z with the flow speed of the paste.

  In the case of a dispenser, for example, when the moving speed is too fast than the coating speed, it is conceivable that the applied paste molded body is pulled and broken. On the other hand, when the speed is too slow, the molded body expands in the direction perpendicular to the coating direction, and the shape control fails. First, considering the relationship between the moving speed and the coating speed from the shear rate, the relational expression as shown in Expression 4 is shown.

Here, Q is the flow rate of the paste. r is half the inner diameter of the nozzle. For example, at a flow rate of ^{35X10 -6 (cm 3 / s)} , when the nozzle inner diameter 0.12 mm, shear rate, shear rate = 4 × 35 × 10 -6 (cm 3 / s) / (π × 0. 0 06 ³ (cm ³ )) = 200 (1 / s) .

  As shown in FIG. 7, in order to freely apply to the space, it is necessary to match the transfer speed and the discharge speed in addition to the paste conditions for maintaining the shape after being discharged from the nozzle. As described above, the three-dimensional molding can be controlled by combining the size of the molded body applied to the target molding, the coating speed, and the paste flow rate. In the present invention, for example, it is important to control the amount of ceramic particles in accordance with the viscoelastic properties of the paste, and it is important to design the paste in accordance with the molding process conditions.

  As a method of maintaining the shape at the time of application, in addition to the technique of applying a fluid that has the above fluidity and can maintain the shape, a method of applying external energy is adopted. In the present invention, for example, using the above-described fluid that has fluidity and can maintain its shape, a molding technique using a curing agent that cures the fluid by external energy (ultraviolet rays or heat) is used. Is possible.

  As the UV curing agent, for example, an acrylic oligomer (or acrylate oligomer) or a commercially available material obtained by mixing various additives into an acrylic monomer is used. This UV curing agent consists of a low molecular weight oligomer, and cures by accelerating the polymerization reaction by applying UV or heat. When UV light is irradiated non-uniformly at the time of application, stress is generated in the paste molded body due to the curing speed, and the paste molded body is deformed. In order to prevent this, it is necessary to irradiate UV more uniformly. When the paste to be discharged comes out of the nozzle, it will harden in the discharge direction if it is evenly applied to the surface of the paste.

  Here, uniformly irradiating the surface of the paste with UV means that the surface is uniformly exposed to light in the normal direction with respect to the discharge direction (for example, light is irradiated from the side when discharging downward). Contrary to the shape manipulation by UV irradiation, conversely, if the direction is to be changed, the direction can be solidified by changing the direction three-dimensionally by increasing the UV irradiation intensity on the opposite side of the direction to be directed. The polymer material that is cured by ultraviolet rays or heat used in the present invention is preferably, for example, an acrylic UV curing agent, but is not limited thereto, and is equivalent or similar thereto. Any material having characteristics can be used in the same manner.

In the present invention, the shape data input on the three-dimensional CAD is used as a technique for three-dimensionally forming a ceramic paste or a metal paste by combining both 1 and 2 in the above paragraph 0015 and integrating them in a microelement or the like. Thus, it is possible to directly form a three-dimensional shape without machining. The present invention utilizes a dispenser coating method capable of three-dimensional coating, is a fluid that easily flows during ejection, passes through a narrow ejection port, becomes hard immediately after ejection, and maintains two shapes, coexisting with two characteristics This is a three-dimensional molding method for a molded body that uses a paste and controls the three-dimensional molding by matching the coating speed and the paste discharge speed. Here, the matching of the coating speed and the paste discharge speed is not limited to making both speeds completely coincident with each other, but is within the range where three-dimensional molding is possible, so that both speeds are almost matched. Any object that can achieve the above object is included in the scope of the present invention.

  In the present invention, as a paste used in the above method, a shear rate power coefficient η (parameter n in Formula 2) in the range of a shear rate of 0.1 to 10 (1 / s) is −0. It is important to use a viscoelastic paste of less than .5. In the present invention, a three-dimensional structure having an aspect ratio of 3 or more or 15 or more in the vertical direction is formed using the molding technique and paste, and a polymer material that is cured by ultraviolet rays or heat is used as a component of the paste. In the method of using and complementing the moldability in the process, it is preferable to control the directionality by uniformly applying from the outside of the paste for discharging UV irradiation.

  In addition, the present invention forms a fine pattern in a state in which a predetermined microstructure including the shape and distribution state of particles that are the main components of the functional paste material is controlled by the above-described method. For example, a three-dimensional electrode structure is produced using a paste of conductive particles mainly composed of silver. In the present invention, a three-dimensional structure having an aspect ratio in the vertical direction of 3 or more, for example, an aspect ratio of 3 to 15, or an aspect ratio of 15 or more in the case of UV curing can be produced with a normal paste. . In the present invention, for example, a conductive particle paste containing silver as a main component is suitable as an electrode material. However, the present invention is not limited to this, and a conductive particle paste equivalent or similar to this is used. It is possible as appropriate.

The present invention has the following effects.
(1) According to the present invention, a three-dimensional structure can be produced by three-dimensional molding control using a dispenser coating method.
(2) As a structure that can be realized by the technique of the present invention, for example, a paste is freely applied to a space by the nozzle of FIG. 6, and the shape is maintained as it is, and a three-dimensional structure that performs various functions. Can be produced.
(3) For example, a wiring structure can be produced by using a paste containing conductive particles as a paste material.
(4) By this method, a three-dimensional electrode array can be formed and produced in the direction perpendicular to the electronic substrate.
(5) This makes it possible to produce a biocell structure such as nerve cell wiring, for example, in which a three-dimensional electrode structure as shown in FIG. 7 is advantageous.

  EXAMPLES Next, although this invention is demonstrated concretely based on an Example, this invention is not limited at all by the following Examples.

As a paste component, a raw material composed of catalyst powder, terpineol and ethocel, that is, a mixture of platinum and an alumina catalyst in a vehicle in which 5 wt% of etose was added to terpineol was prepared. Next, regarding paste viscoelasticity control data, using a powder catalyst in which platinum is supported on α-Al ₂ O ₃ by an impregnation method, and using terpineol and polymer etcel as an organic solvent, ceramics having different mixing ratios. A paste was prepared, and the effect of polymer and particle amount on the shear rate dependence of viscosity was investigated. When viscoelasticity was examined under various conditions, it was found that the point of viscoelasticity control of the ceramic paste was switching from the non-linear region to the linear region.

As shown in FIG. 8, it was confirmed that the dynamic hardness of the paste can be positively controlled by using a suitable amount of ceramic powder. From this, a guideline for designing the dependence of viscoelasticity on the shear rate, that is, the parameter n in Equation 2, was obtained so that the high molecular weight and the particle amount exhibited linear behavior at a certain shear rate or higher. For about 13.8% particle paste, ^35X10 -6 at a flow rate of ^(cm 3 / s), when the nozzle inner diameter 0.12 mm, shear rate, shear rate = 4 × 35 × 10 -6 (cm 3 / s) / (π × 0.06 ³ (cm ³ )) = 0.2 (1 / s). This is consistent with the change in the viscosity of the paste due to the above-described shear rate dependence, and the method of the present invention can be realized. From this pace and the results obtained from the measurement of viscoelasticity, 0.1-10 (1 / A shear rate in the range of s) was found to be suitable.

  As a component of the paste used in the method of the present invention for applying a fluid that can maintain a fluid shape, alumina and a UV curing agent (acrylic UV adhesive, purchased from Kyoritsu Chemical Co., Ltd. Of the prototype G-6116A, viscosity (640 mPa · s), no solvent component) was prepared. The UV curing agent does not contain a solvent, and the adhesive itself simultaneously serves as a dispersant and a polymer (particle surface modifier). Since the molecular weight of the material is not changed, the amount of polymer and the length of the molecule are fixed. In this embodiment, only the size and mixing amount of alumina particles are parameters. As the alumina, α-alumina (average particle diameter of about 100 nm), θ-alumina (average particle diameter of about 70 nm), and γ-alumina (average particle diameter of about 14 nm) were used with different sizes. Details are shown in Table 1 below.

  FIG. 9 (left) shows the results of examining the viscoelastic characteristics by changing the kind and mixing amount of alumina particles. It can be seen that in some combinations, the paste can be controlled nonlinearly and linearly as shown in FIG. FIG. 9 (right) shows the results of examining the viscoelastic yield characteristics of these pastes. Corresponding to FIG. 9 (left), the yield stress of each paste can be predicted. Here, α-alumina was selected and the coating process was performed. From the yield characteristics, the shear stress was about 100 (Pa), and the corresponding shear rate was about 1 (1 / s).

  As a dispenser application, 0.15 mm precision nozzle was used and applied by a dispenser (Musashi Engineering Co., Ltd. ML808FX desktop robot FAD320S). An example of the application protocol was as follows. 1) Lower the Z-axis 2) Start application (application pressure designation, 50 kPa, application time designation, 2 seconds) 3) Raise the 4 mm Z-axis at a speed of 2.0 mm / s (according to application time 2 seconds) 4) At the end of application, the Z-axis is raised by 2 mm.

  For observation and evaluation of the molded body after coating, the shape was observed with a contact angle measuring device, and the width and height of the molded body were measured (Kyowa Interface Science Co., Ltd. Contact Angle Meter DropMaster 500). A structure with a high aspect ratio could be produced by combining dispenser application and paste with controlled viscoelasticity. Further, as shown in FIGS. 10 and 11, it was found that the length can also be controlled. Using this molding method and paste, it was found that a three-dimensional structure having an aspect ratio of 3 or more in the vertical direction can be produced.

  The pillar array is useful as a structure for controlling microfluids and as a support for functional particles. A pillar array was produced as a ceramic structure (FIGS. 12 and 13). Since the interval between the pillars is narrowed, the aspect ratio is adjusted to be lower in accordance with the shape of the nozzle of the dispenser used. It has been found that a structure with a higher density and a higher aspect ratio can be produced by changing the nozzle shape.

Ceramic paste has a limit in its ability to maintain its shape, and deformation due to its own weight becomes a problem. In order to make a three-dimensional structure with a higher degree of freedom, it is effective to harden the paste with an external factor immediately after discharging from the nozzle tip. It was applied to a paste mixed with a UV curing agent used as a dispersant while irradiating with UV, and the effect was examined. Application conditions are 0.15 mm precision nozzle, application conditions: 50 kPa, V = 2 mm / s (Z-axis ascending speed), h = 5 mm, and a structure that is long in the vertical direction is applied without UV irradiation. When the coating was performed by irradiating UV and when the UV intensity was maximized, the conditions were changed. Table 2 shows a comparison of αAl ₂ O ₃ 24 vol% long sample applied with and without UV.

  As shown in FIG. 14, it was found that the aspect ratio can be dramatically increased by UV irradiation using a UV curing agent. By changing the conditions, a structure with a higher aspect ratio (about 15 times or more) could be produced (shown in FIG. 15). It has been found that other three-dimensional structures can be produced without problems if the aspect ratio is not more than the vertical. Production conditions: (substrate: silicon substrate without polishing), 0.10 mm precision nozzle, UV Intensity 100%, 80 kPa, V = 0.2 mm / s, h = 1.0 mm.

In this example, a three-dimensional electrode structure was produced. A commercially available Ag light curable paste was applied and irradiated with UV to prepare a three-dimensional electrode. Production conditions: 24 vol% αAl ₂ O ₃ (Al ₂ O ₃ : UVB = 1.25: 1), UV intensity Int 98%, V = 3 mm / s, 35 kPa, h = 2 mm. FIG. 16 shows the produced electrode array (using Ag paste).

As described above in detail, the present invention relates to a method for producing a three-dimensional structure by a three-dimensional free-form technology, and uses a dispenser coating method capable of three-dimensional coating according to the present invention. by controlling the dimensions molding, it is possible to provide a way of making a three-dimensional structure. Further, the present invention, the by manufacturing method, the shape of the particles which is the main component of the paste and a method predetermined microstructure comprising a distribution state to form a fine pattern in a state of being controlled and elevational Ri by the method A method for producing a body electrode structure can be provided. INDUSTRIAL APPLICABILITY The present invention is useful as a technique for providing a new three-dimensional structure manufacturing technique that enables direct three-dimensional molding of a three-dimensional structure using a dispenser coating method.

An overview of the layering technology (rapid prototyping) is shown. A conceptual diagram of the extrusion method is shown. Indicates the flow resistance generated in the fluid. It shows the linear and nonlinear behavior of the fluid. The relationship between fluid viscosity and shear rate is shown. 1 shows a nozzle of a dispenser that can be freely applied to a space. A three-dimensional electrode array is shown. The viscoelasticity of the paste is shown. The viscoelasticity of the paste is shown. An example will be shown in which the molding time is increased to increase the length in the vertical direction. The correlation between coating time and vertical height is shown. An alumina pillar array is shown. 1 shows an alumina ceramic pillar array (8 × 8). An example of manufacturing a structure in which an aspect ratio is increased by UV irradiation using a UV curing agent is shown. From left to right, there is no UV, UV is present (Int 20%), and UV is present (Int 98%). Application condition is 0.15mm precision nozzle, application with Ch11. 50 kPa, V = 2 mm / s (Z-axis rising speed), h = 5 mm. 1 shows a high aspect ratio electrode structure. An electrode array (Ag paste) is shown.

Claims (6)

In the method of making a three-dimensional structure by using a dispenser coating method and discharging a paste from a nozzle with a dispenser, the fluid is easy to flow at the time of discharge, and has two characteristics: it becomes hard immediately after discharge and maintains a predetermined shape. A method for producing a structure using a paste having both, and producing a three-dimensional structure by controlling the three-dimensional molding by combining the coating speed and the paste flow rate,
The dispenser keeps flowing a fluid continuously, and uses paste-like ceramics or metal as the paste, and the relationship of the above chemical formula 1 within a shear rate of 0.1 to 10 (1 / s). In the equation, when the viscosity at a certain shear rate is η _o and the viscosity at another shear rate is η, the power coefficient n of the shear rate γ represented by the ratio η / η _o of these viscosities is A method for producing the structure, wherein a viscoelastic paste of less than −0.5 is used.   The method according to claim 1, wherein a three-dimensional structure having a vertical aspect ratio larger than 3 is produced using the paste.   The method according to claim 1 or 2, wherein a molder during a three-dimensional structure manufacturing process is supplemented by using a curing agent that is cured by ultraviolet rays or heat as a component of the paste.   The method according to claim 3, wherein the directionality of discharge is controlled by curing the paste by performing UV irradiation from the outside of the paste.   The method according to claim 1, wherein a three-dimensional structure having a vertical aspect ratio of at least 15 is produced.   6. The method according to claim 1, wherein a fine pattern is formed in a state in which a predetermined microstructure including a shape and a distribution state of particles that are main components of the paste material is controlled. A fine pattern forming method.