JP5270712B2 - Assembled manifold - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an assembling type manifold 10 which is easily designed, constructed, disassembled and assembled and has high precision. <P>SOLUTION: A header part 12 includes: connection openings 20; smooth end faces 24 vertical to axial lines 22 of the connection openings 20; certain-length smooth inner walls 26; and steps 42 reducing the diameter of the inner walls 26. A branch pipe part 14 includes a branch opening 32 having one end 30 connected to the header part 12 and communicated with the header part 12. A sleeve 16 includes: a pair of sleeve parts 44 having an outer diameter inserted to the connection opening 20 of the adjacent header part 12 and length equal to or longer than a distance from the end face 24 of the connection opening 20 to the step part 42; and a mounting groove 40 for a seal ring 38 arranged between the inner face of the connection opening 20 of the header part 12 and the sleeve part 44. A header binding mechanism has a function of grasping the plurality of header parts 12 and fixing them in a connected condition. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a built-in manifold used for piping having a plurality of arbitrary branches.

  For example, a semiconductor manufacturing apparatus is always provided with a cooling process using cooling water. These pipes have a plurality of branches and have a complicated structure. In order to reduce the size of the apparatus, it is desired to save space for piping having branches. For example, the following technique is known for space saving of piping in a house (see Patent Document 1).

JP 2000-130679 A

The known prior art has the following problems to be solved.
When a complicated branch structure is required for piping, it is necessary to construct a cheese (T-branch) pipe or the like at an appropriate location and connect them to each other. However, the conventional piping technology has the following problems to be solved.

  Screwed pipes are used for pipe insertion. However, in the screwed pipe, the screwing pitch and the rotation angle of the branch pipe do not match, so that it is difficult to accurately position the branching place. That is, if priority is given to the branch position, the screwing amount is insufficient or the screwing is excessive. If the seal tape is used, the screwing position can be adjusted, but if the seal tape is exposed from the joint of the pipe, dust will be generated, which will adversely affect semiconductor manufacturing.

  Moreover, skill is required also in how to wind the seal tape. That is, the one using the seal tape is not suitable for a semiconductor manufacturing apparatus or the like. The screwed pipe ensures airtightness or watertightness by a taper provided at the screwed portion. However, it is a skillful work to select the screwing amount and predict the finished dimensions and perform appropriate construction, and there are large variations due to skill differences.

On the other hand, when the branch pipe is attached by welding, the attachment position can be freely set. However, when the piping becomes long, the man-hours and costs for machining are increased. Moreover, a skilled welder is required to weld the joint. In addition, there is a case where the welding thermal strain is large and the correction is necessary. Moreover, an oxide film treatment, a pickling treatment, etc. are needed. Furthermore, when welding leakage occurs, it is necessary to return to the previous process and start over. Further, there is a problem that the overall length becomes long because the joint interval is appropriately required.
The present invention has been made to solve the above-described problems, and an object of the present invention is to provide an assembly-type manifold and the like that are simple in design, construction, disassembly, and assembly and have high accuracy.

The following configuration is means for solving the above problems.
<Configuration 1> (Invention of Example 2)
A connecting opening at both ends, a smooth end surface perpendicular to the axis of the connecting opening, a smooth inner wall having a fixed length, a mother pipe portion having a step for reducing the diameter of the inner wall on the inner wall, and one end of the opening A branch pipe part having a branch opening connected to the mother pipe part and communicating with the mother pipe part, and a plurality of mother pipe parts are connected through the connection opening, and the adjacent mother pipe parts are connected. A pair of sleeve portions each having an outer diameter inserted into the connection opening and having a length equal to or longer than a distance from an end surface of the connection opening to the step, an inner surface of the connection opening of the mother pipe portion, and the sleeve portion A sleeve having a seal ring mounting groove disposed between the sleeve and a plurality of mother pipe portions that are connected via the sleeve and in which the orientations of the branch pipe portions are determined and fixed in a connected state. Assembled manifold characterized by having a mother tube binding mechanism having a function De.

A plurality of pipes are connected to obtain a pipe. The plurality of mother pipe portions are connected to each other through a connection opening. By connecting the main pipe portion of any number, it is possible to obtain a sufficiently compact hyperbranched pipe as a whole. On the inner wall of the connecting opening of the mother pipe, a step for reducing the diameter of the inner wall is provided to regulate the depth at which the sleeve portion of the sleeve is inserted.

  <Configuration 2> (Invention of Example 2)
  An assembly-type manifold characterized in that a pair of sleeve portions at both ends of the sleeve is made equal to a distance from an end surface of a connection opening of the mother pipe portion to a step.

  When the sleeve portions at both ends of the sleeve are equal to the distance from the end surface of the connecting opening to the step, the end surfaces of the mother pipe portions are in close contact with each other, and the connection distance between the mother pipe portions can be minimized.

<Configuration 3> (Invention of Example 4)
In the assembly-type manifold according to any one of Configurations 1 and 2, the mother pipe bundling mechanism includes a pair of press fittings disposed at both ends of a plurality of mother pipe parts connected to each other, and the plurality of mother pipe parts Are arranged in parallel with each other in the connecting direction, and are arranged at a predetermined interval so as to be close to the outer surface of the mother pipe part, the connecting end faces of the mother pipe part are brought into close contact with each other, and the plurality And a connecting rod for sandwiching the mother pipe portion of the assembly type manifold.

  When the connecting end faces of the mother pipe part are brought into close contact with each other and force is applied in the connecting direction of the mother pipe part to fix it, the plurality of mother pipe parts maintain the same mechanical strength as a single pipe, such as bending There is no fear.

<Configuration 4> (Invention of Example 5)
In the assembly type manifold according to any one of the configurations 1 and 2, the connection opening of the mutually connected mother pipe portions is provided with a connection flange around the end face, and the flanges are connected to face each other. Is provided with a communicating hole, and the mother pipe portion is connected to each other by a stop pin driven into the communication hole and a taper pin driven into the through hole at the end of the stop pin. Assembled manifold.

  It is a structure with good workability for sequentially connecting a plurality of mother pipes to each other on site.

<Effect of Configuration 1>
A plurality of pipes are connected to obtain a pipe. The plurality of mother pipe portions are connected to each other through a connection opening. By connecting the main pipe portion of any number, it is possible to obtain a sufficiently compact hyperbranched pipe as a whole. On the inner wall of the connecting opening of the mother pipe, a step for reducing the diameter of the inner wall is provided to regulate the depth at which the sleeve portion of the sleeve is inserted.
<Effect of Configuration 2>
When the sleeve portions at both ends of the sleeve are equal to the distance from the end surface of the connecting opening to the step, the end surfaces of the mother pipe portions are in close contact with each other, and the connection distance between the mother pipe portions can be minimized.
<Effect of Configuration 3>
When the connecting end faces of the mother pipe part are brought into close contact with each other and force is applied in the connecting direction of the mother pipe part to fix it, the plurality of mother pipe parts maintain the same mechanical strength as a single pipe, such as bending There is no fear.
<Effect of Configuration 4>
It is a structure with good workability for sequentially connecting a plurality of mother pipes to each other on site.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the assembly-type manifold 10 of Example 1, (a) is a longitudinal cross-sectional view which shows the assembly principal part of the same manifold, (b) is the mother pipe part 12 and the branch pipe part 14 which are one part of the manifold. The longitudinal cross-sectional view shown, (c) is a front view which shows the sleeve 16 which is one part of the manifold, (d) is the side view. It is a figure which shows the mother pipe part 12 and the branch pipe part 14 which comprise the assembly-type manifold 10, (a) is a perspective view, (b) is a top view, (c) is a longitudinal cross-sectional view. It is a perspective view which shows the example which provided the two branch pipe parts in the mother pipe part. FIG. 5 is a diagram illustrating an assembly-type manifold 10 according to a second embodiment, where (a) is a longitudinal sectional view illustrating an essential part of the manifold, and (b) is a diagram illustrating a main pipe portion 12 and a branch pipe portion 14 that are parts of the manifold. The longitudinal cross-sectional view shown, (c) is a front view which shows the sleeve 16 which is one part of the manifold, (d) is the side view. Portions common to those shown in FIG. 1 are denoted by the same reference numerals. FIG. 4 is a diagram illustrating an assembly-type manifold 10 according to a third embodiment, where (a) is a longitudinal cross-sectional view illustrating an essential part of the manifold, and (b) is a diagram illustrating a main pipe portion 12 and a branch pipe portion 14 that are parts of the manifold. The longitudinal cross-sectional view shown, (c) is a front view showing a sleeve 16 which is a part of the manifold. Portions common to those shown in FIG. 1 are denoted by the same reference numerals. It is a figure which shows the whole structure of the assembly-type manifold 10 of Example 4, (a) is a front view, (b) It is a side view. FIG. 10 is an explanatory diagram illustrating a main part of an assembly type manifold 10 according to a fifth embodiment. Portions common to those shown in FIG. 1 are denoted by the same reference numerals. It is explanatory drawing of each assembly example of the assembly-type manifold of this invention.

  Hereinafter, embodiments of the present invention will be described using specific examples.

  1A and 1B are diagrams showing an assembly-type manifold 10 according to the first embodiment, in which FIG. 1A is a longitudinal sectional view showing an assembly main part of the manifold, and FIG. 1B is a main pipe portion 12 and branch pipes which are parts of the manifold. The longitudinal cross-sectional view which shows the part 14, (c) is a front view which shows the sleeve 16 which is one part of the manifold, (d) is the side view. 2A and 2B are views showing the main pipe portion 12 and the branch pipe portion 14 constituting the assembly-type manifold 10, wherein FIG. 2A is a perspective view, FIG. 2B is a plan view, and FIG. FIG. 3 is a perspective view showing an example in which two branch pipe portions are provided in the mother pipe portion.

As shown in FIG. 1, the assembly-type manifold 10 according to the first embodiment includes a mother pipe part 12, a branch pipe part 14, a sleeve 16, and a mother pipe binding mechanism 18 (FIG. 6).
As shown in the figure, the mother pipe part 12 has connection openings 20 at both ends. The connection opening 20 is perpendicular to the axis 22 of the mother pipe part 12 and has a smooth end face 24 and a smooth inner wall 26 having a fixed length. And an enlarged-diameter portion 28 whose diameter is increased by a certain distance from the end surface 24 of the inner wall 26. The branch pipe part 14 has a branch opening 32 that connects one end 30 to the mother pipe part 12 and communicates with the inside of the mother pipe part 12.

  The sleeve 16 connects the plurality of mother pipe portions 12 via the connection openings 20, and includes a pair of small diameter portions 34 inserted into the connection openings 20 of the adjacent mother pipe portions 12 and a pair of small diameters. A seal disposed between the large diameter portion 36 in the middle of the portion 34 and accommodated in the enlarged diameter portion 28 of the adjacent mother pipe portion 12, and the inner diameter of the connection opening 20 of the mother pipe portion 12 and the small diameter portion 34. It has a mounting groove 40 for the ring 38 for use.

  As will be described later, the mother pipe bundling mechanism has a function of holding a plurality of mother pipe parts 12 that are connected through a sleeve 16 and whose branch pipe parts 14 have directions determined and fixed in a connected state. is there.

  In the assembly-type manifold 10, a plurality of mother pipe portions 12 are connected to obtain a pipe having an arbitrary number of branches. The plurality of mother pipe portions 12 are connected to each other through the connection opening 20. Since the connection opening 20 of each mother pipe part 12 has a smooth end surface 24 perpendicular to the axis 22 of the mother pipe part 12, the mutually connected mother pipe parts 12 can be freely rotated around the axis 22. Since the connecting opening 20 of the mother pipe part 12 has a smooth inner wall 26 having a fixed length, an airtight or watertight connection can be made using the sleeve 16. Any number of branch pipe portions 14 may be provided in any portion of the mother pipe portion 12. When the mother pipe part 12 is rotated about the axis 22, the branch pipe part 14 can be directed in an arbitrary direction.

  The connection between the mother pipe parts 12 can be kept airtight or watertight by the sealing ring 38 disposed between the inner surface of the connecting opening 20 of the mother pipe part 12 and the small diameter part 34. A seal ring 38 is disposed in the mounting groove 40 of the pair of small diameter portions 34, the sleeve 16 is disposed between the adjacent mother pipe portions 12, and the small diameter portions 34 are inserted into the connection openings 20 of the respective mother pipe portions 12. Then, connection work is completed easily. The large diameter portion 4636 of the sleeve 16 has a function of positioning the sleeve 16 at the center of the connecting portion of the mother pipe portion 12. An arbitrary number of mother pipe portions 12 can be connected to obtain a sufficiently small multi-branch pipe as a whole.

  The mother pipe part 12 and the sleeve 16 are connected so as to be detachable and rotatable by insertion. Therefore, in order to fix them, a mother tube binding mechanism is used. The structure of the mother tube bundling mechanism is arbitrary as long as it has a function of positioning and fixing the mother tube portion 12. Moreover, since it can apply only by cutting the main-tube part 12 marketed as a general purpose product, this assembly-type manifold 10 has the characteristics of implement | achieving at low cost.

Since the mother pipe parts 12 are butt-connected to each other, the dimensional accuracy is higher than that of the screw connection method, and the designed pipe can be assembled on site. Moreover, most can also be assembled in advance. Moreover, since no seal tape is used, there is no dust generation and it is optimal for piping of semiconductor manufacturing equipment.
As shown in FIG. 3, two or any number of branch pipe parts 14 may be provided with respect to the mother pipe part 12.

  4A and 4B are diagrams showing the assembly-type manifold 10 according to the second embodiment. FIG. 4A is a longitudinal cross-sectional view showing an essential part of the manifold, and FIG. 4B is a main pipe portion 12 and a branch pipe which are parts of the manifold. The longitudinal cross-sectional view which shows the part 14, (c) is a front view which shows the sleeve 16 which is one part of the manifold, (d) is the side view. Portions common to those shown in FIG. 1 are denoted by the same reference numerals.

  The mother pipe part 12 of the assembly type manifold 10 of the second embodiment has connection openings 20 at both ends. The connection opening 20 is perpendicular to the axis 22 of the mother pipe part 12 and has a smooth end face 24 and a fixed length. A smooth inner wall 26 and a step 42 on the inner wall 26 for reducing the diameter of the inner wall 26 are provided. The branch pipe part 14 has a branch opening 32 that connects one end 30 to the mother pipe part 12 and communicates with the mother pipe part 12.

  The sleeve 16 connects the plurality of mother pipe portions 12 via the connection openings 20, and has an outer diameter inserted into the connection openings 20 of the adjacent mother pipe portions 12. A pair of sleeve portions 44 having a length equal to or greater than the distance from the end face 24 of the 20 to the step 42 and a seal ring 38 disposed between the inner surface of the connection opening 20 of the mother pipe portion 12 and the sleeve portion 44. A groove 40 is provided. The mother pipe bundling mechanism has a function of holding a plurality of mother pipe parts 12 that are connected through a sleeve 16 and whose branch pipe parts 14 have directions determined and fixed in a connected state.

  At both ends of the mother pipe portion 12, a step 42 for reducing the diameter of the inner wall 26 is provided on the inner wall 26 of the connection opening 20 to regulate the depth at which the sleeve portion 44 of the sleeve 16 is inserted. Each of the pair of sleeve portions 44 at both ends of the sleeve 16 has a length equal to or longer than the distance from the end face 24 of the connection opening 20 to the step 42, so that both ends of the sleeve 16 are surely at the step 42 of the mother pipe portion 12 on both sides. It hits and is positioned. For example, when the sleeve portions 44 at both ends of the sleeve 16 are equal to the distance from the end surface 24 of the connecting opening 20 to the step 42, the end surfaces 24 of the mother pipe portion 12 are in close contact with each other, and the connection distance between the mother pipe portions 12 is minimized. Can be.

  FIGS. 5A and 5B are diagrams showing the assembly-type manifold 10 according to the third embodiment, in which FIG. 5A is a longitudinal sectional view showing an assembly main part of the manifold, and FIG. 5B is a main pipe portion 12 and a branch pipe which are parts of the manifold. FIG. 8C is a front sectional view showing a sleeve 16 which is a part of the manifold. Portions common to those shown in FIG. 1 are denoted by the same reference numerals.

  The mother pipe part 12 of the assembly type manifold 10 of the third embodiment has connection openings 20 at both ends. The connection opening 20 is perpendicular to the axis 22 of the mother pipe part 12 and has a smooth end face 24 and a fixed length. It has a smooth inner wall 26. The branch pipe part 14 has a branch opening 32 that connects one end 30 to the mother pipe part 12 and communicates with the mother pipe part 12.

  The sleeve 16 connects the plurality of mother pipe portions 12 via the connection openings 20, and includes a pair of small diameter portions 34 inserted into the connection openings 20 of the adjacent mother pipe portions 12 and a pair of small diameters. Between the large diameter portion 36 sandwiched between the end faces 24 of the connecting opening 20 of the adjacent mother pipe portion 12 and the inner diameter of the connecting opening 20 of the mother pipe portion 12 and the small diameter portion 34. It has a mounting groove 40 for the sealing ring 38 to be used. The mother pipe bundling mechanism has a function of holding a plurality of mother pipe parts 12 that are connected through a sleeve 16 and whose branch pipe parts 14 have directions determined and fixed in a connected state.

  Since the large diameter portion 36 of the sleeve 16 is sandwiched between the connecting portions of the mother pipe portion 12, the structure of the inner wall 26 of the connecting opening 20 of the mother pipe portion 12 is simplified. By adjusting the size of the large-diameter portion 4636 of the sleeve 16, a sufficiently small multi-branch pipe can be obtained as a whole.

6A and 6B are diagrams showing the overall configuration of the assembly-type manifold 10 of the fourth embodiment, where FIG. 6A is a front view and FIG. 6B is a side view.
The mother pipe bundling mechanism 18 includes a pair of presser fittings 48 and a plurality of connecting rods 50. The pair of presser fittings 48 are disposed at both ends of the plurality of mother pipe portions 12 connected to each other. The connecting rod 50 is disposed in parallel to the connecting direction of the plurality of mother pipe portions 12. A plurality of connecting rods 50 are arranged at predetermined intervals so as to be close to the outer surface of the mother pipe portion 12. When the bolts of the connecting rod 50 are tightened, the plurality of mother pipe portions 12 are sandwiched via the presser fitting 48.

  If a connecting rod 50 having an appropriate length is used in accordance with the entire length of the plurality of mother pipe portions 12 connected to each other, a multi-branch pipe having an arbitrary configuration can be easily assembled. Since a plurality of rods are arranged at a predetermined interval so as to be close to the outer surface of the mother pipe part 12 and arranged parallel to the connecting direction of the mother pipe part 12, the connecting rod 50 can be accurately positioned, and the holding metal fitting 48 is in an appropriate posture. Can be linked with. Since the presser fittings 48 are disposed at both ends of the plurality of mother pipe portions 12 connected to each other, they can also be used as a support for fixing the multi-branch pipe to a wall surface or the like. When the connecting end surfaces 24 of the mother pipe part 12 are brought into close contact with each other and force is applied in the connecting direction of the mother pipe part 12 to fix them, the plurality of mother pipe parts 12 maintain the same mechanical strength as a single pipe. There is no risk of bending.

FIG. 7 is an explanatory view showing a main part of the assembly-type manifold 10 of the fifth embodiment. Portions common to those shown in FIG. 1 are denoted by the same reference numerals.
A connecting flange 55 is provided around the end face 24 of the mother pipe part 12 connected to each other. Both flanges 55 connected to face each other are provided with communication holes 56 communicating in the axial direction. The mother pipe portion 12 is connected to each other by a stop pin 58 driven into the communication hole 56 and a taper pin 57 locked to the end of the stop pin 58. As shown in FIG. 7C, a head 58A is provided at one end of the stop pin 58, and a through hole 58B for inserting the taper pin 57 is provided at the other end. As shown in FIG. 7D, a small hole 57 </ b> A for screwing a setscrew 59 for preventing loosening is provided below the taper pin 57. The taper pin 57 driven into the through hole 58B of the set pin 58 is fixed by being loosened by a set screw 59 that is screwed into the small hole 57A and presses the side surface of the flange 55.

  A connecting flange 55 is provided around the end surface 24 of the mother pipe portion 12, and a stop pin 58 is driven into a communication hole 56 provided in communication with both flanges 55 connected to face each other. Thus, the mother pipe portions 12 can be sequentially connected individually. Further, when the taper pin 57 is driven into the through hole 58B at the end of the stop pin 58, both flanges 55 can be firmly fixed. This is a structure with good workability for sequentially connecting the plurality of mother pipe parts 12 to each other on site.

FIG. 8 is an explanatory view of an assembly example of the assembly type manifold of the present invention. Portions common to those shown in FIG. 1 are denoted by the same reference numerals.
In the example shown in FIG. 8A, a plurality of branch pipe portions 14 are arranged in a certain direction as described above. Further, as shown in FIG. 8B, an arbitrary branch pipe portion 14A can be directed in a different direction from other branch pipe portions. In FIG. 8C, the middle two branch pipe portions 14A and 14B are directed in different directions. Further, a mother pipe part 12A provided with two branch pipe parts 14C and 14D is also used.

  In FIG. 8D, a valve 11 is attached to each branch pipe portion 14. The valve 11 opens and closes the branch pipe portion 14 by operating the handle 13, but may be opened and closed electromagnetically. As shown in this figure, the operation of attaching the valve 11 to the branch pipe portion 14 is very difficult after assembly. Therefore, if the valves 11 attached in advance are arranged as shown in the figure and connected using the sleeve 16 as already described, the structure shown in this figure can be easily assembled.

  As described above, the mother pipe portion 12 can be manufactured by performing processing for forming the smooth inner wall 26 on the joint of the cast-shaped general-purpose product. If an existing O (O) ring is used for the sealing ring 38, there is no need to worry about gas leakage and water leakage. In addition, the space between the joints can be reduced in spite of the complicated branching, so that the assembly space can be reduced. Assembly and disassembly is easy, and the branch direction can be adjusted freely. In addition, since the number of pipes can be freely selected, design and piping work can be shortened.

  The joint includes cheese (T-shaped branch), atypical cheese, cross (cross-shaped branch), and the like, which can be freely combined. When the mother pipe bundling mechanism using the presser fitting 48 and the four connecting rods 50 is used, for example, a known tie-bolt is used to complete the work in four tightening processes. There is an effect that assembly is easy because no skill is required. At this time, if a valve, a solenoid valve, or other piping parts are previously attached to the branch pipe portion, piping work at the site can be simplified.

DESCRIPTION OF SYMBOLS 10 Assembling type manifold 12 Mother pipe part 14 Branch pipe part 16 Sleeve 18 Mother pipe bundling mechanism 20 Connection opening 22 Axis 24 End face 26 Inner wall 28 Wide diameter part 30 One end 32 Branching opening 34 Small diameter part 36 Large diameter part 38 Seal ring 40 Mounting groove 42 Step 44 Sleeve 48 Presser fitting 50 Connecting rod

Claims (1)

A connecting opening at both ends, a smooth end face perpendicular to the axis of the connecting opening, a smooth inner wall having a fixed length, and a mother pipe having a step for reducing the diameter of the inner wall on the inner wall,
A branch pipe part having one end connected to the mother pipe part and having a branch opening communicating with the mother pipe part;
A plurality of mother pipe parts are connected through the connection openings, each having an outer diameter inserted into a connection opening of an adjacent mother pipe part, and a distance from an end surface of each connection opening to a step. A pair of sleeves having the above length, and a sleeve having a groove for attaching a seal ring disposed between the inner surface of the connection opening of the mother pipe and the sleeve;
A mother tube bundling mechanism having a function of holding and fixing in a connected state by gripping a plurality of mother pipe portions that are connected via the sleeve and in which the orientations of the branch pipe portions are respectively determined;
A pair of sleeve portions at both ends of the sleeve is made equal to the distance from the end face of the connection opening of the mother pipe portion to the step,
The mother pipe bundling mechanism is disposed in parallel to a pair of holding metal fittings arranged at both ends of a plurality of mother pipe parts connected to each other and a connection direction of the plurality of mother pipe parts, and is close to the outer surface of the mother pipe part A plurality of the rods are arranged at a predetermined interval, the connecting end faces of the mother pipe parts are closely attached to each other, and a connecting rod for sandwiching the plurality of mother pipe parts via the pressing metal fittings,
The connecting openings of the mutually connected mother pipe portions are provided with connecting flanges around the end faces thereof, and the flanges connected to face each other are provided with communication holes that communicate with each other. An assembly-type manifold, wherein the mother pipe portion is connected to each other by a driven stop pin and a taper pin driven into a through hole at an end portion of the stop pin .

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