JP5260849B2 - Touch probe - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a touch probe having: a long stylus with a small diameter; little probability of being damaged by impact generated by contact between a measuring object and the stylus; and excellent detection accuracy. <P>SOLUTION: This touch probe 1 is equipped with: a cylindrical probe body 10; a stylus support means 11 provided on the probe body 10; the rod-shaped stylus 12 whose approximate center position of gravity 122 is supported by the stylus support means 11; and a detection means 13 for detecting displacement of the stylus 12. The stylus support means 11 is equipped with a diaphragm 111 formed from an elastic member. The diaphragm 111 is equipped with; a center part 113 for supporting the stylus 12; an outer peripheral part 114 fixed to the probe body 10; and a plurality of rims 115 provided radially between the center part 113 and the outer peripheral part 114, for connecting the center part 113 to the outer peripheral part 114. <P>COPYRIGHT: (C)2008,JPO&amp;INPIT

Description

  The present invention relates to a touch probe. For example, it can be used when measuring the shape or the like of an object to be measured with a three-dimensional measuring machine or the like.

Height gauges (one-dimensional measuring machines), three-dimensional measuring machines, contour measuring machines, and the like are known as measuring machines that measure the shape, dimensions, etc. of an object to be measured. Such a measuring machine is equipped with a touch probe for detecting contact with the object to be measured in order to perform coordinate detection and position detection.
For example, in a three-dimensional measuring machine, a touch probe and an object to be measured placed on a mounting table are brought into contact with each other while moving relative to each other in a three-dimensional direction, and the coordinate values in the respective feed axis directions at the moment when both touch each other are read. . For this reason, in order to improve the measurement accuracy of the coordinate measuring machine, it is necessary to increase the detection accuracy of the touch probe.

  As a touch probe with good detection accuracy, a piezoelectric element is attached in the middle of the stylus, the stylus is vibrated by this piezoelectric element, and the contact state is detected from the decrease in amplitude when the tip of the stylus contacts the object to be measured. Is known (for example, Patent Document 1).

JP-A-6-221806

  In a touch probe for measuring a minute measurement location, it is essential to reduce the size of the probe. In particular, it is necessary to make the stylus long and small in diameter, but in the touch probe as described above, there is a limit in reducing the diameter of the stylus because a space for providing a piezoelectric element on the stylus is required. Also, if the stylus is lengthened, the detection accuracy is lowered because the tip of the stylus is separated from the position of the piezoelectric element. Furthermore, in the touch probe as described above, an impact generated by the contact between the object to be measured and the stylus may damage the piezoelectric element provided on the stylus and the probe body. There was a need.

  An object of the present invention is to provide a touch probe that has a long and small diameter stylus, has a low possibility of breakage due to an impact caused by contact between an object to be measured and the stylus, and has high detection accuracy.

The touch probe according to the present invention includes a probe main body, a stylus support means provided on the probe main body, a rod-like stylus supported by the stylus support means at a substantially center of gravity, and a detection means for detecting displacement of the stylus. The stylus support means is formed of an elastic member, and has two diaphragms whose outer periphery is fixed to the probe body and supports the stylus at the center, and the stylus is perpendicular to the diaphragm and supported, have a contact portion which is contacted with the object to be measured at one end, the two diaphragms are formed from an elastic member, the outer peripheral portion, with each other via a spacer ring having a thickness in the axial direction of the stylus Combined, the vicinity of the central part is curved in the direction close to each other, the central parts are connected to each other, and the central part is preloaded. Characterized by supporting the stylus state.

  According to the present invention, the stylus support means is formed of an elastic member, and has a diaphragm that supports the stylus at the center, and the stylus is supported perpendicularly to the diaphragm and is in contact with the object to be measured at one end. Therefore, when the contact portion comes into contact with the object to be measured, the stylus can move in the axial direction while elastically deforming the diaphragm, and tilts about the position of the center of gravity supported by the diaphragm. Can do. At this time, the detecting means detects the displacement of the stylus. And when a contact part leaves | separates from a to-be-measured object, a stylus and a diaphragm will return to the original position and shape.

Since the stylus is supported at the center of the diaphragm at a substantially center of gravity, the displacement of the stylus is only in the axial direction when a force is applied in the axial direction, and when the force is applied in a direction perpendicular to the axis. It is limited only to the inclination in one direction with the approximate center of gravity as the center. In addition, when a force is applied in the axial direction, a tilt around the approximate center of gravity is unlikely to occur, and when a force is applied in a direction perpendicular to the axis, a displacement in the axial direction occurs. Hateful. That is, since the independence of the movement is high, the stylus is displaced only in the direction in which a force is applied from the outside, and the movement in the other direction does not occur. That is, for a force in any direction, depending on the force component in the axial direction and the force component in the direction perpendicular to the axis, the displacement in the axial direction and the inclination in one direction centered on the approximate center of gravity position, respectively. Occurs. Therefore, a complex displacement that causes a detection error does not occur, and the detection unit can detect the contact of the contact portion with the object to be measured with high accuracy.
Further, when the contact portion comes into contact with the object to be measured, the stylus is displaced while elastically deforming the diaphragm, so that the possibility of damaging the component due to the impact of the contact is low. By detecting the displacement of the stylus, the contact between the contact portion and the object to be measured can be detected. Therefore, it is not necessary to provide a piezoelectric element in the stylus, and the stylus can be made long and small in diameter.

  The material of the stylus is not particularly limited, but is preferably a metal, and a material obtained by dispersing tungsten carbide powder in cobalt and sintering it is particularly preferably used. Sintered tungsten carbide powder dispersed in cobalt has a characteristic called carbide. Therefore, even when the stylus is formed long and small in diameter, the stylus is hardly deformed or broken.

In the present invention, the stylus support means includes two diaphragms whose outer peripheral portions are fixed to the probe body, and the two diaphragms are formed of an elastic member, and the outer peripheral portions are arranged in the axial direction of the stylus. to be coupled to each other via a spacer ring having a thickness, a center portion, characterized in that for supporting the stylus while being coupled to each other.
According to such a configuration, the two diaphragms formed from the elastic member are coupled to each other through the spacer ring having a thickness in the axial direction of the stylus, and the center is coupled to each other. Therefore, preloading is applied to the center portions of the two diaphragms, the rigidity of the center portions of the two diaphragms is increased, and the posture recovery of the stylus is improved. Therefore, the stylus support means can reliably support the stylus.

In the present invention, the diaphragm includes a central portion that supports the stylus, an outer peripheral portion that is fixed to the probe body, and is provided radially between the central portion and the outer peripheral portion. It is preferable to provide a plurality of rims connecting the two.
According to such a configuration, the diaphragm has a central portion that supports the stylus, an outer peripheral portion that is fixed to the probe body, and is radially provided between the central portion and the outer peripheral portion and connects the central portion and the outer peripheral portion. Since the center part with high rigidity firmly supports the stylus, the rim with low rigidity can be elastically deformed to allow displacement of the stylus.

As the diaphragm, for example, a rim that connects the outer peripheral portion and the central portion of the metal foil by etching or the like can be used at the radial intermediate portion of the circular metal foil. If the stylus is fixed to the central part of the metal foil, the rigidity of the central part of the metal foil can surely support the stylus, and the elastic deformation of the rim causes the stylus to be displaced in the axial direction. A tilt around the approximate center of gravity of the stylus is allowed.
Moreover, if the diameter of the diaphragm is reduced, the touch probe can be significantly reduced in size.

In this invention, it is preferable that the said rim | limb connects the said center part and the said outer peripheral part of the said diaphragm via the folding structure to the circumferential direction or radial direction of the said diaphragm.
According to such a configuration, the rim of the diaphragm has a folded structure in the circumferential direction or the radial direction of the diaphragm, so that the rigidity of the rim is lowered, and the rim can be elastically deformed with a weak force. Accordingly, the stylus is easily displaced even with a small contact force, and the contact of the contact portion with the object to be measured can be detected with high accuracy.

In the present invention, the detection means is provided at the end of the stylus opposite to the contact portion and having three surfaces whose normal directions are perpendicular to each other, and facing the three surfaces of the electrode. And three capacitive displacement sensors for detecting a change in distance from the three surfaces of the electrode.
According to such a configuration, the detection means includes the electrodes having three surfaces that are provided at the end opposite to the contact portion of the stylus and whose normal directions are perpendicular to each other, and the three capacitive displacement sensors. Since it is provided, it is possible to detect displacement of the stylus in one predetermined direction due to contact of the contact portion with the object to be measured. Moreover, since the detection means includes a capacitive displacement sensor with low noise and high sensitivity, it is possible to detect the contact of the contact portion with the object to be measured with high accuracy.

In another touch probe of the present invention, the detecting means is provided at an end portion of the stylus opposite to the contact portion and provided with three mirror surfaces perpendicular to each other in a normal direction and facing the three mirror surfaces. And three optical displacement sensors for irradiating the three mirror surfaces with light rays.
According to the present invention, the detection means includes three mirror surfaces that are provided at an end opposite to the contact portion of the stylus and whose normal directions are perpendicular to each other, and three optical displacement sensors that irradiate the three mirror surfaces with light rays. Therefore, the displacement of the stylus in one predetermined direction due to the contact of the contact portion with the object to be measured can be detected. Moreover, since the detection means includes an optical displacement sensor with high sensitivity, the contact of the contact portion with the object to be measured can be detected with high accuracy.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[First Embodiment]
FIG. 1 is a perspective view of the touch probe 1 of the first embodiment, and FIG. 2 is a sectional view of the vicinity of the stylus support means 11 of the touch probe 1 of the first embodiment.
As shown in FIG. 1, the touch probe 1 includes a cylindrical probe main body 10, a stylus support means 11 provided on the probe main body 10, and a rod-like stylus 12 having a substantially center of gravity position 122 supported by the stylus support means 11. And detecting means 13 for detecting the displacement of the stylus 12.

The stylus support means 11 includes a diaphragm 111 formed from an elastic member, and a reinforcing plate 112.
As shown in FIGS. 1 and 2, the diaphragm 111 is provided radially between the central portion 113 that supports the stylus 12, the outer peripheral portion 114 fixed to the probe body 10, and the central portion 113 and the outer peripheral portion 114. And a plurality of rims 115 that connect the central portion 113 and the outer peripheral portion 114. The diaphragm 111 is formed by forming a rim 115 that connects the outer peripheral portion 114 and the central portion 113 of the metal foil by etching or the like at an intermediate portion in the radial direction of the circular metal foil.
The reinforcing plate 112 is a resin disk-like member that is provided at the central portion 113 of the diaphragm 111 and reinforces the rigidity of the central portion 113 of the diaphragm 111 and supports the stylus 12 together with the central portion 113.

As shown in FIG. 1, the stylus 12 has a rod-like contact portion 121 that is in contact with an object to be measured at one end opposite to the probe main body 10 and an electrode 131 of the detecting means 13 that will be described later at the other end. It is a member. The stylus 12 is supported by the center portion 113 of the diaphragm 111 so that the entire center of gravity 122 including the electrode 131 is positioned so that the axis of the stylus 12 is perpendicular to the diaphragm 111.
The stylus 12 is formed of a tungsten carbide powder dispersed in cobalt and sintered.

  As shown in FIG. 1, the detection means 13 includes an electrode 131 having three surfaces 131A, 131B, and 131C that are provided at the end opposite to the contact portion 121 of the stylus 12 and whose normal directions are perpendicular to each other. Three capacitance-type displacement sensors 132A, 132B, and 132C that are provided to face the three surfaces 131A, 131B, and 131C and that detect a change in distance from the three surfaces 131A, 131B, and 131C of the electrode 131. Prepare.

3 is an exploded view of the stylus 12 and the electrode 131, and FIG. 4 is a cross-sectional view of the detection means 13 as viewed from above.
The electrode 131 is a rectangular hollow member having a right-angled triangular cross section formed by bending a metal foil. In FIG. 3, the side surfaces 131 </ b> A, 131 </ b> B, and the upper surface 131 </ b> C of the electrode 131 are configured so that their normal directions intersect perpendicularly to each other, and the lower surface of the electrode 131 is an opening. As shown in FIG. 4, the other side surface 131 </ b> D of the electrode 131 is engaged with an electrode support groove 123 provided at the end opposite to the contact portion 121 of the stylus 12.

The three capacitive displacement sensors 132A, 132B, and 132C are provided to face the three surfaces 131A, 131B, and 131C of the electrode 131 so as to penetrate the probe body 10, and the three surfaces 131A, 131B is a sensor that detects a change in distance from 131B and 131C.
As shown in FIG. 1, the normal directions of the side surface 131A, the side surface 131B, and the upper surface 131C are X, Y, and R, where the touch probe 1 is moved relative to the object to be measured by the mounting table of the measuring instrument. Each is configured to be equal to the Z direction.

An operation when the contact portion 121 of the touch probe 1 is brought into contact with the object to be measured will be described.
The touch probe 1 is moved relative to the object to be measured in any one of the X, Y, and Z directions by the mounting table of the measuring instrument and the contact part 121 is brought into contact with the object to be measured.
When the touch probe 1 and the object to be measured are brought into contact with each other in the X direction, the contact portion 121 is pushed in the X direction, so that the stylus 12 is tilted in the X direction about the substantially center of gravity position 122. Then, the side surface 131A of the electrode 131 is moved in a direction away from the capacitance type displacement sensor 132A. At this time, the capacitive displacement sensor 132A detects a change in the distance from the side surface 131A, and notifies the measuring device that the contact portion 121 and the object to be measured are in contact.

When the touch probe 1 and the object to be measured are brought into contact with each other in the Y direction, the contact portion 121 is pushed in the Y direction, so that the stylus 12 is tilted in the Y direction about the substantially center of gravity position 122. Then, the side surface 131B of the electrode 131 is moved away from the capacitive displacement sensor 132B. At this time, the capacitance type displacement sensor 132B detects a change in the distance from the side surface 131B and notifies the measuring device that the contact portion 121 and the object to be measured are in contact with each other.
When the touch probe 1 and the object to be measured are contacted in the Z direction, the contact portion 121 is pushed in the Z direction, so that the stylus 12 is moved upward in the axial direction. Then, the upper surface 131C of the electrode 131 is moved in a direction approaching the capacitive displacement sensor 132C. At this time, the capacitive displacement sensor 132C detects a change in the distance from the upper surface 131C, and notifies the measuring device that the contact portion 121 and the object to be measured are in contact.
When the contact part 121 moves away from the object to be measured, the stylus 12 and the diaphragm 111 return to their original positions and shapes.

According to the present embodiment, there are the following effects.
(1) Since the stylus 12 is supported at the center portion 113 of the diaphragm 111 at the approximate center of gravity position 122, the displacement of the stylus 12 is moved in the axial direction and tilted in one direction around the approximately center of gravity position 122. Limited to any one. Therefore, the complex displacement causing the detection error does not occur, and the detection unit 13 can detect the contact of the contact portion 121 with the object to be measured with high accuracy.

(2) When the contact portion 121 comes into contact with the object to be measured, the stylus 12 is displaced while elastically deforming the diaphragm 111, so that the possibility of damaging the parts due to the impact of the contact is low.
(3) Since the detection means 13 provided at the end opposite to the contact portion 121 of the stylus 12 is configured to detect the contact of the contact portion 121 with the object to be measured, the contact is made by the piezoelectric element provided on the stylus. Unlike a touch probe that detects contact of a part with an object to be measured, it is not necessary to secure a space for providing a piezoelectric element, and the stylus 12 can be made long and small in diameter. As a result, it is possible to measure even minute measurement points that could not be measured with a thick and short touch probe, and widely correspond to various shapes of objects to be measured.
(4) Since the stylus 12 is formed from a tungsten carbide powder dispersed in cobalt and sintered, and has a characteristic called carbide, the stylus 12 is long and small in diameter. Less likely to deform or break.

(5) The diaphragm 111 is provided radially between the central portion 113 supporting the stylus 12, the outer peripheral portion 114 fixed to the probe main body 10, and the central portion 113 and the outer peripheral portion 114. 114, the central portion 113 firmly supports the stylus 12, and the low-rigid rim 115 can be elastically deformed to allow the stylus 12 to be displaced.
(6) If the diameter of the diaphragm 111 is reduced, the touch probe 1 can be significantly reduced in size.
(7) Since the reinforcing plate 112 provided in the central portion 113 of the diaphragm 111 reinforces the rigidity of the central portion 113 and supports the stylus 12 together with the central portion 113, the support of the stylus 12 may be ensured. it can. Further, since the resin reinforcing plate 112 is lightweight, the central portion 113 of the diaphragm 111 can be reinforced without hindering the displacement of the stylus 12.
(8) Since the detection unit 13 includes the capacitive displacement sensors 132A, 132B, and 132C with low noise and high sensitivity, it is possible to detect contact of the contact portion 121 with the object to be measured with high accuracy.

[Second Embodiment]
FIG. 5 is an exploded view and FIG. 6 is a cross-sectional view of the stylus support means 11 of the touch probe 1 according to the second embodiment of the present invention.
In this embodiment, the configuration of the stylus support means 11 is different from that of the first embodiment. Since other configurations and operations are the same, the same reference numerals are given and description thereof is omitted.

As shown in FIGS. 5 and 6, the stylus support means 11 includes two diaphragms 111 </ b> A and 111 </ b> B whose outer peripheral portions are fixed to the probe main body 10.
The two diaphragms 111 </ b> A and 111 </ b> B are coupled to each other via a spacer ring 116 having a thickness in the axial direction of the stylus 12, and the central portion 113 is coupled to each other and supports the stylus 12. A reinforcing plate 112 is provided on the upper surface of the central portion 113 of the diaphragm 111A and the lower surface of the central portion 113 of the diaphragm 111B.
The shapes and materials of the two diaphragms 111A and 111B and the reinforcing plate 112 are the same as those in the first embodiment. However, the vicinity of the central portion 113 of the rim 115 of the diaphragm 111A and the rim 115 of the diaphragm 111B is curved in a direction close to each other.

According to the present embodiment as described above, in addition to the effects (1) to (8) of the first embodiment, the following effects can be obtained.
(9) Since the outer peripheral portions 114 of the two diaphragms 111A and 111B are coupled to each other via the spacer ring 116 having a thickness in the axial direction of the stylus 12, and the central portion 113 is coupled to each other, FIG. As shown in FIG. 3, the central portions 113 of the two diaphragms 111A and 111B are preloaded , the rigidity of the central portions 113 of the two diaphragms 111A and 111B is increased, and the posture restoring property of the stylus 12 is improved. Therefore, the stylus support means 11 can support the stylus 12 more reliably. Moreover, when the contact part 121 leaves | separates from a to-be-measured object, the two diaphragms 111A and 111B are easy to return to the original shape.

[Third Embodiment]
FIG. 7 shows an enlarged perspective view of the detection means 13 of the touch probe 1 according to the third embodiment of the present invention, and FIG. 8 shows an end view of the detection means 13 as viewed from above.
Here, the present embodiment differs from the first embodiment described above in the configuration of the detection means 13. Since other configurations and operations are the same, the same reference numerals are given and description thereof is omitted.

As shown in FIGS. 7 and 8, the detection means 13 includes three mirror surfaces 12A, 12B, and 12C that are provided at the end opposite to the contact portion 121 of the stylus 12 and whose normal directions are perpendicular to each other, and three mirror surfaces. Three optical displacement sensors 133A, 133B, and 133C that irradiate rays 12A, 12B, and 12C with light rays. In FIG. 8, the optical displacement sensor 133C is not shown because it exists on the front side of the sheet.
The three optical displacement sensors 133A, 133B, 133C irradiate the three mirror surfaces 12A, 12B, 12C with light rays, receive the reflected light reflected by the three mirror surfaces 12A, 12B, 12C, and change the amount of received light. To detect.

The operation of the detection means 13 when the contact portion 121 of the touch probe 1 of the third embodiment is brought into contact with the object to be measured will be described.
The touch probe 1 is moved relative to the object to be measured in any one of the X, Y, and Z directions by the mounting table of the measuring instrument and the contact part 121 is brought into contact with the object to be measured.
When the touch probe 1 and the object to be measured are brought into contact with each other in the X direction, the contact portion 121 is pushed in the X direction, so that the stylus 12 is tilted in the X direction about the substantially center of gravity position 122. Then, the mirror surface 12A is moved in a direction away from the optical displacement sensor 133A. At this time, the optical displacement sensor 133A detects a change in the light receiving position and amount of light reflected from the mirror surface 12A, and notifies the measuring device that the contact portion 121 and the object to be measured have come into contact.

When the touch probe 1 and the object to be measured are brought into contact with each other in the Y direction, the contact portion 121 is pushed in the Y direction, so that the stylus 12 is tilted in the Y direction about the substantially center of gravity position 122. Then, the mirror surface 12B is moved in a direction away from the optical displacement sensor 133B. At this time, the optical displacement sensor 133B detects a change in the light receiving position and amount of light reflected from the mirror surface 12B, and notifies the measuring device that the contact portion 121 and the object to be measured are in contact with each other.
When the touch probe 1 and the object to be measured are contacted in the Z direction, the contact portion 121 is pushed in the Z direction, so that the stylus 12 is moved upward in the axial direction. Then, the mirror surface 12C is moved in a direction approaching the optical displacement sensor 133C. At this time, the optical displacement sensor 133C detects a change in the light receiving position and amount of light reflected from the mirror surface 12C, and notifies the measuring device that the contact portion 121 and the object to be measured are in contact with each other.

According to the present embodiment as described above, in addition to the effects (1) to (7) of the first embodiment described above, the following effects are obtained.
(10) Since the detection unit 13 includes the optical displacement sensors 133A, 133B, and 133C having high sensitivity, it is possible to detect the contact of the contact portion 121 with the object to be measured with high accuracy.

Note that the present invention is not limited to the above-described embodiments, and includes other configurations that can achieve the object of the present invention, and includes the following modifications and the like.
(I) The diaphragm 111 has rigidity to support the approximate centroid position 122 of the stylus 12 and elasticity to allow the stylus 12 to move in the axial direction or to tilt in one direction around the approximate centroid position 122. The shape and material are not limited to those in the above embodiments.
For example, as shown in FIG. 9, the rim 115 may have a folded structure in the radial direction of the diaphragm 111 (A), or the rim 115 may have a folded structure in the circumferential direction of the diaphragm 111. Good (B). In such a diaphragm 111, the rigidity of the rim 115 is lowered, and the diaphragm 111 can be elastically deformed with a weak force. Thereby, the displacement of the stylus 12 is likely to occur, and the contact of the contact portion 121 with the object to be measured can be detected with high accuracy.

(Ii) In each of the embodiments described above, the stylus 12 is formed from a tungsten carbide powder dispersed and sintered in cobalt, but is not limited thereto.
For example, other metals, resins, and the like may be used as long as they are made of a material having a rigidity that does not cause deformation or breakage due to contact of the contact portion 121 with the object to be measured.

(Iii) In each of the above embodiments, the central portion 113 has a disk-shaped reinforcing plate 112 made of resin, but the reinforcing plate 112 may not be provided. For example, if the central portion 113 of the diaphragm 111 is thickened, the rigidity of the central portion 113 can be increased without providing the reinforcing plate 112.
The reinforcing plate 112 is not limited to a resin plate as long as it has high rigidity and can reinforce the central portion 113 of the diaphragm 111. For example, the reinforcing plate 112 may be formed of metal, ceramics, or the like.

  The present invention can be used as a touch probe for detecting contact with an object to be measured.

1 is a perspective view of a touch probe according to a first embodiment of the present invention. Sectional drawing of the stylus support means of the touch probe which concerns on 1st Embodiment of this invention. 1 is an exploded view of a stylus and electrodes of a touch probe according to a first embodiment of the present invention. The sectional view which looked at the detecting means of the touch probe concerning a 1st embodiment of the present invention from the top. The exploded view of the stylus support means of the touch probe which concerns on 2nd Embodiment of this invention. Sectional drawing of the stylus support means of the touch probe which concerns on 2nd Embodiment of this invention. The enlarged view of the detection means of the touch probe which concerns on 3rd Embodiment of this invention. The end view which looked at the detection means of the touch probe concerning a 3rd embodiment of the present invention from the top. The figure which shows the diaphragm of the modification of the touch probe of this embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Touch probe 10 Probe main body 11 Stylus support means 12 Stylus 12A, 12B, 12C Mirror surface 13 Detection means 111 Diaphragm 113 Center part 114 Outer part 115 Rim 116 Spacer ring 121 Contact part 131 Electrodes 132A, 132B, 132C Capacitive displacement sensor 133A, 133B, 133C Optical displacement sensor

Claims (5)

A probe body;
Stylus support means provided on the probe body;
A rod-like stylus supported at a substantially center of gravity by the stylus support means;
Detecting means for detecting the displacement of the stylus,
The stylus support means is formed of an elastic member, and has two diaphragms whose outer peripheral part is fixed to the probe main body and supports the stylus at the center part,
The stylus is supported perpendicular to the diaphragm, it has a contact portion which is contacted with the object to be measured at one end,
The two diaphragms are formed of an elastic member, and the outer peripheral portions are coupled to each other via a spacer ring having a thickness in the axial direction of the stylus, and the central portions are curved in directions close to each other. The touch probes are coupled to each other and support the stylus in a state where the preload is applied to the central portion . The touch probe according to claim 1 ,
The diaphragm is
A central portion supporting the stylus;
An outer periphery fixed to the probe body;
A touch probe comprising a plurality of rims provided radially between the central portion and the outer peripheral portion and connecting the central portion and the outer peripheral portion. The touch probe according to claim 2 ,
The touch probe according to claim 1, wherein the rim connects the central portion and the outer peripheral portion of the diaphragm through a structure in which the diaphragm is folded in a circumferential direction or a radial direction. The touch probe according to any one of claims 1 to 3 ,
The detection means includes
An electrode provided at an end of the stylus opposite to the contact portion and having three surfaces whose normal directions are perpendicular to each other;
A touch probe comprising: three capacitive displacement sensors provided to face the three surfaces of the electrode and detecting a change in distance from the three surfaces of the electrode. The touch probe according to any one of claims 1 to 3 ,
The detection means includes
Three mirror surfaces that are provided at the end of the stylus opposite to the contact portion and whose normal directions are perpendicular to each other;
A touch probe comprising: three optical displacement sensors provided to face the three mirror surfaces and irradiating the three mirror surfaces with light rays.

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