JP5238042B2 - Fluid transfer device - Google Patents

Description

  The present invention relates to a fluid conveyance device, and more particularly to a fluid conveyance device that applies heat to a fluid that is an object to be conveyed.

  Conventionally, in a pipe for transporting a fluid, when it is necessary to control the temperature of the fluid transported through the pipe with high accuracy, the temperature of the fluid may be controlled by heating the pipe. For example, in a film forming apparatus, a pipe that connects a vaporizer that vaporizes a liquid raw material and a reaction chamber that supplies the vaporized gaseous raw material to the substrate and forms a film on the surface of the substrate. In order to prevent re-liquefaction and thermal decomposition of the reaction gas and stably supply the raw material to the reaction chamber, for example, a tape heater or the like is wound around the pipe and the pipe is heated (for example, Japanese Patent Laid-Open No. 2001-44186 ( See Patent Document 1)).

  FIG. 13 is a block diagram showing a configuration of a conventional film forming apparatus. FIG. 14 is a schematic diagram showing a configuration of a piping device used in the film forming apparatus shown in FIG. As shown in FIG. 13, the conventional film forming apparatus includes a vaporizer 201 that heats and vaporizes a liquid raw material 1 supplied from the outside, and a gaseous raw material is supplied. A reaction chamber 202 in which a predetermined reaction such as film formation on the surface is performed. The film forming apparatus also includes a carrier gas supply device 205 that supplies the vaporizer 201 with a carrier gas that conveys the raw material vaporized in the vaporizer 201 toward the reaction chamber 202.

  The vaporizer 201 and the reaction chamber 202 are connected by a pipe 203. As shown in FIG. 14, a tape heater 204 that heats the pipe 203 is wound around the outer periphery of the pipe 203 in order to prevent re-liquefaction and thermal decomposition of the gas vaporized by the vaporizer 201. Temperature control is performed.

  In order to control the entire length of the pipe 203 to a uniform temperature, it is necessary to uniformly wind the tape heater 204 around the outer peripheral surface of the pipe 203. However, the temperature of the pipe 203 may vary depending on how the tape heater 204 is wound or temperature unevenness when the tape heater 204 generates heat. When a part of the tape heater 204 is disconnected, it is necessary to remove the disconnected tape heater 204 and to rewind the tape heater 204 anew. However, it takes time to rewind the tape heater 204, and it is difficult to reproduce the same winding method of the tape heater 204 as before rewinding. Therefore, there is a problem that the temperature distribution of the pipe 203 at the time of heating changes from the state before the tape heater 204 is disconnected, and the film forming performance is affected.

For this reason, conventionally, a technology has been proposed in which the outer wall of a pipe is covered with a heat pipe, the temperature of the pipe is maintained at a predetermined temperature with good uniformity, and the temperature of the entire pipe is controlled with high accuracy without winding a heater around the entire length of the pipe. (See, for example, JP-A-6-168877 (Patent Document 2)).
JP 2001-44186 A JP-A-6-168877

  However, when the entire piping system for transporting fluid is covered with a heat pipe and heated, it is necessary to provide a heat source for heating the working fluid sealed in the heat pipe and a heating part of the heat pipe separately from the piping system There is. In addition, a mechanism for heating the piping system and returning the condensed liquid to the original heating unit is necessary. Therefore, there is a problem that the apparatus configuration becomes complicated, the apparatus becomes large, and the manufacturing cost increases.

  Further, the heat radiating part (condensing part) of the heat pipe covering the outer periphery of the pipe needs to be covered in accordance with the shape of the joint and the valve including the periphery of the joint and the valve. Therefore, the shape of the heat pipe that covers the piping system becomes extremely complicated, the manufacturing cost for forming the required heat pipe heat radiation part becomes extremely high, and the reliability of the heat pipe is caused by the complexity of the shape, There was a problem of lack of feasibility.

  The present invention has been made in view of the above problems, and a main object thereof is to provide a fluid conveyance device capable of accurately controlling the temperature of the entire piping without winding a heater around the entire length of the piping. .

  The fluid conveyance device according to the present invention includes a first pipe, a second pipe, a connecting part that connects the first pipe and the second pipe, a first outer pipe that covers the outer periphery of the first pipe, and a second pipe. A second outer tube covering the outer peripheral portion of the first outer tube, a heat transfer block covering the connection portion, an end portion on the connection portion side of the first outer tube and an end portion on the connection portion side of the second outer tube, and a heat transfer block The heating part which contacts is provided. A first space is formed between the first pipe and the first outer pipe. A second space is formed between the second pipe and the second outer pipe. The first space and the second space are sealed vacuum spaces in which a working fluid is sealed. The heating unit heats and vaporizes the working fluid.

  Here, “thermal contact” means that the heat transfer efficiency is sufficiently high between two members (in this case, between the heat transfer block and the heating unit), and the heat transfer efficiency is sufficiently high. It is not limited to the case where the two members are in direct mechanical contact with each other. For example, when the two members are integrated with each other, such as a configuration in which the heating unit is built in the heat transfer block, or when the two members are indirectly in contact with a substance having excellent thermal conductivity Are also included in the state of being in thermal contact.

  In the fluid transfer device, a gap is preferably formed between the outer peripheral surface of the second outer tube and the heat transfer block. The fluid conveyance device further includes a heat insulating material that covers the gap.

  Preferably, in the fluid transfer device, the heat transfer block is in thermal contact with the outer peripheral surface of the first outer tube and the outer peripheral surface of the second outer tube.

  Preferably, the fluid conveying device has a heat pipe extending along a direction in which the first pipe or the second pipe extends inside the heat transfer block.

  In the fluid conveying device, preferably, the connecting portion has a bent elbow.

  According to the fluid conveyance device of the present invention, the first space and the second space are formed into heat pipes, and the heat transfer block that is in thermal contact with the heating unit that heats the heat pipes is connected to the first pipe and the second pipe. It arrange | positions so that a part may be covered. Accordingly, it is possible to improve the temperature uniformity over the entire length of the piping system including the end portion on the connecting portion side of the first piping and the second piping through which the gaseous material passes and the connecting portion.

It is a block diagram which shows schematic structure of the substance supply system for supplying a gaseous substance to the reaction chamber provided with the fluid conveyance apparatus which concerns on this invention. FIG. 3 is a schematic cross-sectional view illustrating a configuration of the fluid conveyance device according to the first embodiment. It is a perspective view which shows the structure of a heat pipe. It is a figure which shows the cross section of the heat pipe which follows the IV-IV line | wire shown in FIG. It is a schematic diagram which shows the operating principle of a heat pipe. It is a cross-sectional schematic diagram which expands and shows the heating means periphery which has a heat-transfer block and a heating part. It is a cross-sectional schematic diagram which shows arrangement | positioning of the heating means which heats a heat pipe when piping is inclined with respect to a horizontal surface. FIG. 6 is a schematic cross-sectional view illustrating a configuration of a fluid conveyance device according to a second embodiment. FIG. 6 is a schematic cross-sectional view illustrating a configuration of a fluid conveyance device according to a third embodiment. FIG. 10 is a schematic cross-sectional view illustrating a configuration of a modified example of the fluid conveyance device according to the third embodiment. FIG. 6 is a schematic cross-sectional view illustrating a configuration of a fluid conveyance device according to a fourth embodiment. FIG. 10 is a schematic cross-sectional view showing a configuration of a modified example of the fluid conveyance device in the fourth embodiment. It is a block diagram which shows the structure of the conventional film-forming apparatus. It is a schematic diagram which shows the structure of the piping apparatus used for the film-forming apparatus shown in FIG.

Explanation of symbols

  1, 1a, 1b Raw material, 2 piping, 2a first piping, 2b second piping, 3 outer tube, 3a first outer tube, 3b second outer tube, 3c, 3d outer peripheral surface, 4 wick, 5 working fluid, 6 Steam flow, 7 liquid flow, 8, 8a to 8e Heat transfer block, 9, 9a to 9e Heating unit, 10 Heat flow, 13 Joint, 15 Heat pipe, 16 Elbow, 17a to 17d End plate, 20 Fluid conveyance device, 21 Heat insulation Material, 22 space, 22a 1st space, 22b 2nd space, 23 high temperature part, 24 low temperature part, 25 space, 25a clearance gap, 101 vaporizer, 102 reaction chamber.

  Embodiments of the present invention will be described below with reference to the drawings. In the following drawings, the same or corresponding parts are denoted by the same reference numerals, and description thereof will not be repeated.

  In the embodiments described below, each component is not necessarily essential for the present invention unless otherwise specified. In the following embodiments, when referring to the number, amount, etc., unless otherwise specified, the above number is an example, and the scope of the present invention is not necessarily limited to the number, amount, etc.

(Embodiment 1)
FIG. 1 is a block diagram showing a schematic configuration of a substance supply system for supplying a gaseous substance to a reaction chamber provided with a fluid conveyance device according to the present invention. The substance supply system shown in FIG. 1 receives a liquid raw material from the outside and supplies the liquid raw material supply device 110 to the vaporizer 101, and heats and vaporizes the liquid raw material supplied from the liquid raw material supply device 110. A vaporizer 101 that is in a gaseous state and a reaction chamber 102 in which a gaseous raw material is supplied and a predetermined reaction such as film formation on the surface of the substrate is performed. The substance supply system also includes a carrier gas supply device 120 that supplies the vaporizer 101 with a carrier gas that conveys the raw material vaporized in the vaporizer 101 toward the reaction chamber 102.

  The liquid material supply device 110 and the vaporizer 101 are connected by a fluid transport path 111, a valve 112, and a fluid transport path 114. The fluid transport paths 111 and 114 between the liquid raw material supply device 110 and the vaporizer 101 are joined via a valve 112. The carrier gas supply device 120 and the vaporizer 101 are connected by a fluid transport path 121, a valve 122, and a fluid transport path 124. Fluid transport paths 121 and 124 between the carrier gas supply device 120 and the vaporizer 101 are joined via a valve 122. The vaporizer 101 and the reaction chamber 102 are connected by a first pipe 2a and a second pipe 2b that constitute a fluid transport path. The 1st piping 2a and the 2nd piping 2b are connected by the coupling 13 as an example of a connection part. The joint 13 is covered with the heating unit 9.

  The liquid raw material supplied from the liquid raw material supply apparatus 110 is heated in the vaporizer 101 to rise in temperature, and changes its state to gas when it reaches the boiling point. The gaseous raw material vaporized in the vaporizer 101 (referred to as a reaction gas) is passed through the first pipe 2a, the joint 13 and the second pipe 2b by the carrier gas supplied from the carrier gas supply device 120. A reaction gas is supplied to the reaction chamber 102.

  The substance supply system also includes a control unit 130. The supply amount of the raw material from the liquid raw material supply apparatus 110 to the vaporizer 101 is determined by the controller 130 by opening the valve 112 between the fluid transport paths 111 and 114 that connect the liquid raw material supply apparatus 110 and the vaporizer 101. It is controlled by controlling. The flow rate of the carrier gas is controlled by controlling the opening degree of the valve 122 between the fluid transport paths 121 and 124 connecting the carrier gas supply device 120 and the vaporizer 101 with the control unit 130.

  The temperature inside the vaporizer 101 is controlled by the control unit 130 controlling the amount of heat supplied by a heating unit such as a heater (not shown) disposed inside the vaporizer 101. The temperature inside the reaction chamber 102 is also controlled by controlling the amount of heat supplied by a heating unit (not shown) disposed inside the reaction chamber 102 by the control unit 130. The control unit 130 controls the amount of heat supplied to the heating unit 9, whereby the temperature of the reaction gas passing through the joint 13 is controlled. A dotted line arrow shown in FIG. 1 indicates a path of a control signal from the control unit 130.

  FIG. 2 is a schematic cross-sectional view illustrating the configuration of the fluid conveyance device 20 according to the first embodiment. FIG. 2 illustrates a fluid transfer device 20 that includes a pipe 2 (that is, a first pipe 2a and a second pipe 2b) that connects the vaporizer 101 and the reaction chamber 102. The fluid conveyance device 20 conveys the gaseous raw materials 1 a and 1 b supplied from the liquid raw material supply device 110 and vaporized by the vaporizer 101 in the direction from the vaporizer 101 to the reaction chamber 102.

  The first pipe 2 a connects the vaporizer 101 and the joint 13. The outer periphery of the first pipe 2a is covered with the first outer pipe 3a. The first outer pipe 3a is disposed on the outer periphery of the first pipe 2a. The first outer tube 3a has a hollow tube shape, and is formed so that the diameter of the inner peripheral surface of the hollow portion is larger than the diameter of the outer peripheral surface of the first pipe 2a. The first pipe 2a and the first outer pipe 3a form a double pipe structure.

  An end plate 17a is provided at one end of the first outer pipe 3a on the joint 13 side in the extending direction of the first pipe 2a. An end plate 17c is provided at the other end of the first outer pipe 3a on the vaporizer 101 side in the extending direction of the first pipe 2a. In the outer periphery of the first pipe 2a, a first space 22a surrounded by the first pipe 2a, the first outer pipe 3a, and the end plates 17a and 17c is formed. The first space 22a is formed between the first pipe 2a and the first outer pipe 3a.

  The second pipe 2 b connects the joint 13 and the reaction chamber 102. The outer periphery of the second pipe 2b is covered with the second outer pipe 3b. The second outer pipe 3b is disposed on the outer periphery of the second pipe 2b. The second outer tube 3b has a hollow tube shape, and is formed such that the diameter of the inner peripheral surface of the hollow portion is larger than the diameter of the outer peripheral surface of the second pipe 2b. The second pipe 2b and the second outer pipe 3b form a double pipe structure.

  An end plate 17b is provided at one end of the second outer pipe 3b on the joint 13 side in the extending direction of the second pipe 2b. An end plate 17d is provided at the other end of the second outer pipe 3b on the reaction chamber 102 side in the extending direction of the second pipe 2b. In the outer periphery of the second pipe 2b, a second space 22b surrounded by the second pipe 2b, the second outer pipe 3b, and the end plates 17b and 17d is formed. The second space 22b is formed between the second pipe 2b and the second outer pipe 3b.

  Around the joint 13, heating means having a heat transfer block 8 a and a heating part 9 a is disposed. The heat transfer block 8a is formed using a material having good thermal conductivity, typified by a metal material such as aluminum or copper. If the heat transfer block 8a is made of aluminum, the heat transfer block 8a can be reduced in weight, and heat transfer efficiency by radiation can be improved by alumite treatment described later, which is desirable. In addition, it is desirable that the heat transfer block 8a be made of copper because the heat conductivity can be further increased. Any heating source can be used as the heating unit 9a. Typically, for example, an electric heater, a heating medium circulation heater, an induction heating heater, or the like can be applied to the heating unit 9a.

  The heat transfer block 8a covers the joint 13, the end plate 17a disposed at the joint 13 side end of the first outer tube 3a, and the end plate 17b disposed at the joint 13 side end of the second outer tube 3b. The joint 13 is included. For example, the heat transfer block 8a can be configured to have a plurality of semi-cylindrical members and to form a hollow cylindrical shape by combining the plurality of members.

  The heating unit 9a is disposed in contact with the outer peripheral side of the heat transfer block 8a. The heating unit 9a is in thermal contact with the heat transfer block 8a. The heat transfer block 8a is in thermal contact with the end of the first outer tube 3a on the end plate 17a side. Apart from the heating means including the heat transfer block 8a and the heating part 9a, another heating means that is in thermal contact with the end portion of the second outer tube on the end plate 17d side is provided. The heat transfer block 8 and the heating unit 9 shown in FIG. 2 are included.

  The entire apparatus from the vaporizer 101 to the reaction chamber 102 through the first pipe 2a, the heating means and the second pipe 2b is covered from the outside with the heat insulating material 21. Heat transfer between the fluid transfer device 20 and the outside is suppressed by the heat insulating material 21, and re-liquefaction and thermal decomposition of the gaseous raw materials 1 a and 1 b flowing from the vaporizer 101 to the reaction chamber 102 can be suppressed, and energy loss can be suppressed. It can be reduced. The heat insulating material 21 may be anything as long as it has a low thermal conductivity that acts as a barrier to suppress heat conduction. For example, a large amount of gas bubbles are contained in a solid such as glass wool or polystyrene foam. It is formed with the material which has.

  The configuration of the heat pipe formed in the first space 22a and the second space 22b will be described in detail. FIG. 3 is a perspective view showing the configuration of the heat pipe. FIG. 4 is a view showing a cross section of the heat pipe taken along line IV-IV shown in FIG. 3.

  In the fluid conveyance device 20 according to the present embodiment, as shown in FIGS. 3 and 4, the outer pipe 3 is provided outside the pipe 2, and the pipe 2 is inserted into the hollow space in the outer pipe 3. A tube structure is formed. The outer tube 3 is made of a metal material such as copper, aluminum, and stainless steel. A wick 4 formed of a porous material having a capillary force is provided on the inner surface of the outer tube 3. As the wick 4, a wire mesh or a sintered metal may be attached to the inner surface of the outer tube 3, and fine grooves may be formed on the inner surface of the outer tube 3.

  A space 22 is formed between the outer peripheral surface of the pipe 2 and the inner peripheral surface of the outer tube 3. The interior of the space 22 is a hermetically sealed space, which is formed as a vacuum space that has been vacuum depressurized. An appropriate amount of the liquid working fluid 5 is injected into the space 22. The working fluid 5 injected into the space 22 has a property (condensability) of being heated and evaporated and radiating and condensing. Thus, a heat pipe structure can be provided between the pipe 2 and the outer pipe 3 in which the working fluid 5 having condensability is enclosed in a vacuum-depressurized sealed space.

  FIG. 5 is a schematic diagram showing the operation principle of the heat pipe. A part of the heat pipe structure shown in FIGS. 3 and 4 is disposed in the high temperature part 23 having a relatively high ambient temperature, and the other part is disposed in the low temperature part 24 having a relatively low ambient temperature. The high temperature part 23 is heated by the heating part 9 a and has a higher temperature than the low temperature part 24. As shown in the heat flow 10, the outer tube 3 is heated by transferring heat from the surroundings in the high temperature portion 23. Therefore, the working fluid 5 sealed between the pipe 2 and the outer tube 3 is also heated and absorbs heat as latent heat, and the working fluid 5 evaporates into a gaseous state.

  In the fluid conveyance device 20 of the present embodiment shown in FIG. 2, specifically, the fluid that connects the vaporizer 101 and the reaction chamber 102 by the heating unit 9a applying heat to the heat transfer block 8a from the outer peripheral side. The part including the joint 13 in the transport path is heated, and the high temperature part 23 is formed. When the heat transfer block 8a is heated by the heating unit 9a, the heat from the heating unit 9a is transferred from the outer periphery to the inner periphery of the heat transfer block 8a, and heats the first outer tube 3a. The end near the end plate 17a of the first outer tube 3a that is in thermal contact with the heat transfer block 8a is heated from the heating portion 9a to become high temperature, and is enclosed in the first space 22a and filled in the wick 4. The liquid working fluid 5 is heated while taking heat of evaporation from the first outer tube 3a, and the working fluid 5 is vaporized.

  As the vapor of the evaporated working fluid 5 moves in the flow space 22 from the high-temperature part 23 side to the low-temperature part 24 side as shown by a white arrow 6 in FIG. 6 is carried as steam in the flowing direction. At this time, the vapor of the working fluid 5 is condensed by releasing latent heat on the outer surface of the pipe 2 and the inner surface of the outer pipe 3 to heat the pipe 2 to a uniform temperature over the entire length thereof. The liquid-phase working fluid 5 condensed on the surface of the pipe on the low temperature part 24 side drops on the inner surface of the outer tube 3, penetrates the wick 4, and as shown in the liquid flow 7, by the capillary force of the wick 4. It refluxs to the original high temperature part 23 side.

  In this manner, the temperature of the pipe 2 is equalized by heat transport by vaporization and liquefaction of the working fluid 5 filled between the pipe 2 and the outer pipe 3. In this way, the temperature uniformity of the gaseous raw material 1 can be improved over the entire length of the pipe 2, and the temperature of the raw material 1 flowing in the pipe 2 can be maintained at a constant temperature.

  Further, the liquid working fluid 5 condensed on the surface of the pipe 2 can be returned to any position on the inner surface of the outer tube 3 by the capillary action of the wick 4 attached to the inner surface of the outer tube 3. The position of the heating means may be provided at an arbitrary position of the outer tube 3. In other words, by heating only a part of the outer tube 3, it is possible to achieve the uniform temperature of the entire pipe 2, so that it is easy and highly accurate without winding a heater such as a tape heater over the entire length of the pipe 2. Temperature management can be realized. In addition, since the number of rewinding portions of the heater may be minimized even when the heater is disconnected (only the heat transfer block 8a portion in this embodiment), maintenance can be performed in a short time, and the downtime of the fluid conveyance device 20 Can be minimized.

  Next, the configuration around the heating unit of the fluid conveyance device 20 will be described in detail. FIG. 6 is an enlarged schematic sectional view showing the vicinity of the heating means having the heat transfer block 8a and the heating section 9a. As shown in FIG. 6, the heat transfer block 8a is arranged so as to surround the first outer tube 3a, the joint 13, and the second outer tube 3b. The first pipe 2a and the second pipe 2b are connected with a joint 13 interposed.

  The inside of the heat transfer block 8a is formed hollow and a space 25 is formed. The joint 13 is disposed in the space 25, and the joint 13 is in a non-contact state with respect to the heat transfer block 8a. The heat transfer block 8a heated by the heat transmitted from the heating unit 9a is connected to the joint 13 and the first pipe 2a and the first pipe 2a disposed in the space 25 by heat conduction through the air in the space 25 and radiant heat transfer. The two pipes 2b are heated.

  That is, the joint 13 connecting the first pipe 2a and the second pipe 2b is covered with the heat transfer block 8a, and the temperature of the joint 13 is accurately controlled by heating the joint 13 with the heat transfer block 8a interposed. Can do. Therefore, the first pipe 2a heated by the heat pipe formed in the first space 22a and the second pipe 2b heated by the heat pipe formed in the second space 22b are comparable. It becomes easy to maintain the joint 13 at temperature. The heat transfer block 8a covering the joint 13 having a shape projecting radially outward with respect to the first pipe 2a and the second pipe 2b can be formed, for example, as an integral part of a metal material. High-precision temperature control can be performed.

  A gap is provided between the heat transfer block 8 a and the joint 13. The gap is provided as a gap that keeps the heat transfer block 8a and the joint 13 in non-contact and does not cause convection of air interposed between the heat transfer block 8a and the joint 13. For example, the heat transfer block 8a can be formed in accordance with the shape of the joint 13 such that a gap of about several millimeters is formed between the inner peripheral surface of the heat transfer block 8a and the outer peripheral surface of the joint 13. .

  In this way, the heat transfer from the heat transfer block 8a to the joint 13 is not convective heat transfer via air, but heat transfer by heat conduction and radiation, thereby suppressing temperature unevenness due to air convection. be able to. Therefore, the joint 13 can be heated more uniformly, and more accurate temperature control is possible.

  The inner peripheral surface of the heat transfer block 8a facing the joint 13 may be subjected to a radiation rate improving process. For example, alumite treatment that forms microscopic depressions on the inner peripheral surface of the hollow heat transfer block 8a, or blackening treatment that coats the inner peripheral surface of the heat transfer block 8a so as to become a black body. Can be performed. If it does in this way, since heat transfer efficiency by radiation from heat transfer block 8a to joint 13 can be improved, it will become possible to heat joint 13 more efficiently.

  The outer peripheral surface 3c of the first outer tube 3a covering the outer peripheral portion of the first pipe 2a is in contact with the inner surface of the heat transfer block 8a, and the heat generated in the heating unit 9a is conducted through the heat transfer block 8a. Therefore, it can be directly transmitted to the first outer tube 3a. On the other hand, a gap 25a is formed between the outer peripheral surface 3d of the second outer pipe 3b covering the outer peripheral portion of the second pipe 2b and the heat transfer block 8a. In the portion where the heat transfer block 8a extends so as to face the outer peripheral surface 3d of the second outer tube 3b, the heat transfer block 8a and the second outer tube 3b are arranged with a slight gap 25a.

  Thus, by forming the clearance gap 25a, it can suppress that the heat-transfer block 8a interferes with the 2nd outer tube | pipe 3b. That is, the heat pipe formed in the second space 22b inside the second outer tube 3b is heated by the heating unit 9 (see FIG. 2), but when the heat transfer block 8a comes into contact with the second outer tube 3b. The problem of disturbing the temperature control of the heating unit 9 arises. By forming the gap 25a and suppressing the occurrence of contact between the heat transfer block 8a and the second outer tube 3b, the accuracy of temperature control of the heat pipe in the second space 22b can be improved.

  Further, by forming the gap 25a, the arrangement of the second outer tube 3b is not restricted by the heat transfer block 8a, and the heating unit 9 and the second outer tube 3b that directly heats the second outer tube 3b. Concentricity can be ensured. Therefore, the heat contact state between the heat transfer block 8 (see FIG. 2) for transferring the heat generated in the heating unit 9 to the second outer tube 3b and the second outer tube 3b can be kept good.

  The gap 25a is covered and closed by a heat insulating material 21 that covers each part of the fluid conveyance device 20 from the outside. By closing the gap 25a in this way, air can be prevented from flowing into the space 25 from the outside, and the flow of air inside the space 25 can be prevented. Accordingly, heat transfer from the heat transfer block 8a to the joint 13 by heat conduction and radiation via air can be performed more uniformly, and thus the uniformity of the temperature distribution around the joint 13 can be further improved.

  FIG. 7 is a schematic cross-sectional view showing the arrangement of heating means for heating the heat pipe when the pipe 2 is inclined with respect to the horizontal plane. In general, the heat pipe is advantageously operated in a bottom heat mode in which heat is transferred from bottom to top. That is, the action of gravity greatly affects the return of the liquid working fluid 5 to the high temperature portion 23 side. Therefore, when the high temperature part 23 is installed below (bottom heat mode), the maximum heat transport amount is most improved. On the other hand, when the high temperature part 23 is turned up (top heat mode), it is necessary for the liquid working fluid 5 to move to the high temperature part 23 against gravity, and only the capillary force of the wick 4 causes the working fluid 5 to move. Since it is necessary to perform reflux, the performance degradation of the heat pipe is inevitable.

  Therefore, for example, when the extending direction of the pipe 2 shown in FIG. 7 is inclined so as to form an angle θ with respect to the horizontal plane, the heating unit 9 is arranged on the lower side (that is, the right side in FIG. 7) in the arrangement of the pipe 2. And a heating means having a heat transfer block 8 can be arranged. If it does in this way, since the heat pipe formed in the space 22 can be made into bottom heat mode, the performance of a heat pipe can be improved and the piping 2 by a heat pipe can be heated more efficiently.

(Embodiment 2)
FIG. 8 is a schematic cross-sectional view illustrating the configuration of the fluid conveyance device 20 according to the second embodiment. The fluid conveyance device 20 in the second embodiment is compared with the fluid conveyance device 20 in the first embodiment described above, in the heat transfer block 8a, along the direction in which the first pipe 2a and the second pipe 2b extend. The difference is that an extended heat pipe 15 is provided.

  The heating unit 9 a that heats the heat transfer block 8 a from the outer peripheral side may cause temperature unevenness in the extending direction of the pipe 2. For example, when a tape heater is used as the heating portion 9a, the temperature distribution of the heat transfer block 8a may be generated in the extending direction of the pipe 2 due to the temperature unevenness of the tape heater or the tape heater itself.

  On the other hand, the temperature of the heat pipe 15 is extended by extending the pipe 2 by heating the heat pipe 15 provided inside the heat transfer block 8a along the extending direction of the pipe 2 using the heating unit 9a as a heat source. Uniform in direction. That is, since the uniformity of the temperature of the heat transfer block 8a in the extending direction of the pipe 2 can be improved by the configuration of the fluid conveyance device 20 of the second embodiment, the joint heated through the heat transfer block 8a The temperature uniformity of 13 can be further improved. Since the other configuration of the fluid conveyance device 20 is as described in the first embodiment, the description thereof will not be repeated.

(Embodiment 3)
FIG. 9 is a schematic cross-sectional view illustrating the configuration of the fluid conveyance device 20 according to the third embodiment. In the fluid conveyance device 20 in the third embodiment, the first outer tube 3a and the second outer tube 3b are both in thermal contact with the heat transfer block 8b as compared with the fluid conveyance device 20 in the first embodiment. Is different. Specifically, as shown in FIG. 9, the joint 13 side of the first outer pipe 3 a provided with the end plate 17 a is centered on the joint 13 connecting the first pipe 2 a and the second pipe 2 b. The outer peripheral surface 3c at one end and the outer peripheral surface 3d at one end on the joint 13 side of the second outer tube 3b provided with the end plate 17b are in contact with the inner peripheral surface of the heat transfer block 8b, respectively. A heat transfer block 8b is formed.

  If it does in this way, piping 2 which connects vaporizer 101 and reaction room 102 can be heated by one heating part 9b. That is, the heat generated in the heating unit 9b is transmitted to the heat transfer block 8b, and heat pipes formed in the first space 22a and the second space 22b are heated by the heat transfer block 8b, and the periphery of the joint 13 Is heated. Therefore, since the whole fluid conveyance apparatus 20 can be heated using one heating part 9b, temperature control of heating becomes easier and temperature uniformity can be further improved. In addition, since the number of heating units can be reduced as compared with the fluid conveyance device 20 of the first embodiment including the plurality of heating units 9 and 9a, the cost of the fluid conveyance device 20 can be reduced. it can.

  As described in the first embodiment, when the heat pipe is in the top heat mode, the performance of the heat pipe may be reduced. When the pipe 2 of the fluid conveyance device 20 of the third embodiment shown in FIG. 9 is inclined with respect to the horizontal plane, either the heat pipe that heats the first pipe 2a or the heat pipe that heats the second pipe 2b Will be placed in the top heat mode. In order to avoid performance degradation due to the heat pipe being arranged in the top heat mode, the fluid conveyance device 20 of the third embodiment is desirably applied when the pipe 2 is arranged substantially horizontally.

  To bring the outer peripheral surface 3c of the first outer tube 3a covering the first pipe 2a and the outer peripheral surface 3d of the second outer tube 3b covering the second pipe 2b into surface contact with the inner surface of the heat transfer block 8b. The first outer tube 3a and the second outer tube 3b need to be accurately centered (centered). However, for accurate centering, it is necessary to eliminate errors such as processing accuracy and assembly accuracy, and the manufacturing cost increases. Therefore, accurate centering is often difficult.

  Therefore, the heat transfer grease can be filled between the outer peripheral surface 3c of the first outer tube 3a, the outer peripheral surface 3d of the second outer tube 3b, and the heat transfer block 8b. If it does in this way, since the accuracy error of the 1st outer tube 3a and the 2nd outer tube 3b can be permitted, manufacturing cost can be reduced, and the 1st outer tube 3a and the 2nd outer tube 3b are made into a heat transfer block. The effect that the heat pipe formed in the space 22 can be efficiently heated and brought into thermal contact with 8b can be obtained similarly.

  FIG. 10 is a schematic cross-sectional view illustrating a configuration of a modified example of the fluid conveyance device 20 according to the third embodiment. In the fluid conveyance device 20 shown in FIG. 10, as described in the second embodiment, the heat pipe 15 is provided inside the heat transfer block 8c. If it does in this way, since the uniformity of the temperature of the heat transfer block 8c in the extending direction of the pipe 2 can be improved, the first pipe 2a and the second pipe 2b heated through the heat transfer block 8c can be improved. The temperature uniformity can be further improved, and the temperature uniformity of the joint 13 can be further improved.

(Embodiment 4)
FIG. 11 is a schematic cross-sectional view illustrating the configuration of the fluid conveyance device 20 according to the fourth embodiment. Compared with the fluid conveyance device 20 in the first embodiment, the fluid conveyance device 20 in the fourth embodiment is formed by bending a connecting portion that connects the first pipe 2a and the second pipe 2b instead of the joint 13. The difference is that it has an elbow 16. Specifically, an L-shaped space 25 bent by 90 ° is formed inside the heat transfer block 8d. The first pipe 2a is inserted into the heat transfer block 8d from one side of the L-shaped space 25, and the second pipe 2b is inserted into the heat transfer block 8d from the other side of the space 25.

  An elbow 16 is disposed inside the space 25. A through hole having a diameter corresponding to the inner diameter of the first pipe 2a and the second pipe 2b is formed in the elbow 16, and the through hole is formed to be bent at 90 °. The first pipe 2a and the second pipe 2b are connected with an elbow 16 interposed. The elbow 16 has a function as a connecting portion that connects the first pipe 2a and the second pipe 2b.

  When the elbow 16 formed to be bent is heated by winding a tape heater around the outer periphery, it is difficult to make the winding method of the tape heater uniform between the inner peripheral side and the outer peripheral side of the bent portion. It is difficult to heat 16 uniformly. Further, if the outer periphery of the elbow 16 is covered with a heat pipe, it is necessary to provide a heat pipe having a complicated shape, which causes an increase in cost and a decrease in the reliability of the heat pipe. On the other hand, as shown in FIG. 11, the heat transfer block 8d covering the elbow 16 is configured to transmit heat to the elbow 16 by heat conduction and radiation via air, so that the temperature of the elbow 16 can be accurately adjusted. Can be managed. Therefore, the elbow 16 can be uniformly heated by an inexpensive device.

  FIG. 12 is a schematic cross-sectional view illustrating a configuration of a modified example of the fluid conveyance device 20 according to the fourth embodiment. In the fluid conveyance device 20 shown in FIG. 12, as described in the second embodiment, the heat pipe 15 is provided inside the heat transfer block 8e. In this way, since the uniformity of the temperature of the heat transfer block 8e can be improved, the uniformity of the temperature of the first pipe 2a and the second pipe 2b heated via the heat transfer block 8e is further improved. The temperature uniformity of the elbow 16 can be further improved.

  Furthermore, if the heating unit 9e heats a part of the heat pipe 15 as in the operation principle of the heat pipe described in the first embodiment, the entire heat pipe 15 is heated uniformly. Compared to FIGS. 11 and 12, in FIG. 11, the heating unit 9d is provided on the right side of the heat transfer block 8d, whereas in the modification shown in FIG. 12, only the upper and lower sides of the heat transfer block 8e in the figure. A heating unit 9e is provided, and no heating unit is provided on the right side of the heat transfer block 8e. Therefore, part of the heating unit 9e can be omitted, and the manufacturing cost reduction and the reliability improvement of the fluid conveyance device 20 can be achieved.

  In the description of the first to fourth embodiments, two pipes, a first pipe 2a and a second pipe 2b, are provided between the vaporizer 101 and the reaction chamber 102, and the first pipe 2a and the second pipe. The example in which 2b is combined using the joint 13 or the elbow 16 has been described. The fluid conveyance device of the present invention is not limited to this configuration, and a plurality of arbitrary pipes may be appropriately connected to pipe joints (in addition to the straight joint 13 and the bent elbow 16, other joints such as a trifurcated joint and cheese). Can also be applied to those connected through the interposition.

  Moreover, it is not restricted to the structure where several piping was connected with the pipe joint, and several piping may be connected through arbitrary valves. Even in the case of piping connected by a valve, a space is formed inside the heat transfer block, and a slight gap is provided between the heat transfer block and the valve is installed by the heat transfer block. If it is set as the structure which covers this outer periphery, similarly to Embodiment 1-4 mentioned above, a valve | bulb can be heated uniformly and efficiently.

  In the first to fourth embodiments, the heating of the pipe using the heat pipe has been described. However, the cooler that actively takes heat from the heat pipe and cools the working fluid of the heat pipe is replaced with the heat pipe and the heat. You may provide so that it may contact. As the cooler, for example, any cooler such as a water cooling circuit or a Peltier element can be applied.

  If the heat pipe is cooled by a cooler after stopping the heating of the heat pipe by the heating unit, the entire heat pipe can be efficiently cooled by cooling a part of the heat pipe. That is, it is not necessary to cool the entire heat pipe by the heat transport operation of the heat pipe described in the first embodiment, and the heat pipe can be efficiently cooled. In this way, when it is desired to lower the temperature of the pipe during maintenance, etc., the pipe can be lowered at a uniform temperature at a higher speed, so the time required to lower the temperature of the pipe can be shortened and the maintenance time can be shortened. Can do.

  Although the embodiments of the present invention have been described above, the configurations of the embodiments may be appropriately combined. In addition, it should be considered that the embodiment disclosed this time is illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  The fluid conveyance device of the present invention is particularly suitable for a fluid conveyance device that conveys a substance that requires high-precision temperature management, such as a reaction gas when a film formation target is formed on a semiconductor wafer, a liquid crystal glass substrate, or the like. It can be advantageously applied.

Claims (5)

A first pipe (2a);
A second pipe (2b);
A connecting portion (13) for connecting the first pipe (2a) and the second pipe (2b);
A first outer pipe (3a) covering the outer periphery of the first pipe (2a);
A second outer pipe (3b) covering the outer periphery of the second pipe (2b);
The connecting portion (13), the end portion (17a) on the connecting portion (13) side of the first outer tube (3a), and the end portion on the connecting portion (13) side of the second outer tube (3b) ( Heat transfer block (8a) covering 17b),
A heating section (9a) in thermal contact with the heat transfer block (8a),
A first space (22a) is formed between the first pipe (2a) and the first outer pipe (3a), and between the second pipe (2b) and the second outer pipe (3b). A second space (22b) is formed,
The first space (22a) and the second space (22b) are sealed vacuum spaces, in which a working fluid (5) is enclosed,
The said heating part (9a) is a fluid conveyance apparatus (20) which heats and vaporizes the said working fluid (5). A gap (25a) is formed between the outer peripheral surface (3d) of the second outer pipe (3b) and the heat transfer block (8a),
The fluid conveyance device (20) according to claim 1, further comprising a heat insulating material (21) covering the gap (25a).   The heat transfer block (8b) is in thermal contact with the outer peripheral surface (3c) of the first outer tube (3a) and the outer peripheral surface (3d) of the second outer tube (3b). The fluid conveyance device (20) according to item.   The heat transfer block (8a) has a heat pipe (15) extending along a direction in which the first pipe (2a) or the second pipe (2b) extends inside the heat transfer block (8a). The fluid transfer device (20) described.   The fluid conveyance device (20) according to claim 1, wherein the connecting portion (16) has a bent elbow.

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