JP5236920B2 - Burner for producing inorganic spheroidized particles and method and apparatus for producing inorganic spheroidized particles - Google Patents

Description

  The present invention relates to a burner for producing inorganic spheroidized particles in which an inorganic powder raw material is supplied into a flame to produce inorganic spheroidized particles, and further, inorganic spheroidized particles are produced using the burner for producing inorganic spheroidized particles. The present invention relates to a production method and apparatus for producing inorganic spheroidized particles.

  The inorganic spheroidized particles are obtained by melting a pulverized raw material powder in a high-temperature flame and spheroidizing it by surface tension. For example, high-purity silica using silica as a raw material is widely used as a filler for epoxy encapsulants of semiconductor elements, such as improved fluidity of resin fillers due to spheroidization, high filling, improved wear resistance, etc. Various advantages can be obtained.

  In order to spheroidize the raw material powder in the production of inorganic spheroidized particles, a high-temperature flame is required, and therefore, an oxygen / gas combustion burner is usually used. This burner includes a premix burner and a diffusion burner. The premix burner mixes oxygen and combustion gas in advance and ejects them into the combustion field. , Oxygen, and LPG are well mixed, and raw material powder is supplied into a flame formed at the tip of a burner (see, for example, Patent Document 1).

  A diffusion type burner is a type in which oxygen and combustion gas are separately ejected and mixed in a combustion field. For example, a diffusion type burner arranged in a vertical furnace is composed of a concentric double tube, Many small pipes are provided between the inner pipe and the outer pipe, and the siliceous raw material is allowed to flow naturally (or under a pressurized flow) from the center pipe (inner pipe) of the burner, and combustible gas from the small pipe and oxygen gas from the outer pipe And manufacturing a fused silica sphere by introducing the raw material into a flame formed in (see, for example, Patent Document 2).

Further, as another diffusion burner, it is composed of concentric quintuple pipes, supplying raw material powder to the combustion chamber using oxygen gas or oxygen-enriched gas as a carrier gas from the center, and fuel gas from its outer periphery, Further, it is known that primary oxygen and secondary oxygen are supplied from the outer periphery, and a cooling jacket for cooling the burner is provided on the outermost periphery (see, for example, Patent Documents 3 and 4). ).
JP 62-241543 A JP 58-145613 A Japanese Patent No. 3331491 Japanese Patent No. 3322228

  In the diffusion burner described in Patent Document 2, there is no risk of backfire, but since the fuel supply pipe is provided in parallel with the raw material supply pipe, the raw material powder is in flame, mainly from the flame. When heated and melted by forced convection heat transfer and spheroidized by surface tension, particles fused in an aggregated state may be generated. Further, in the diffusion burner having the structure described in Patent Documents 3 and 4, since the combustion chamber is provided, the state of aggregation of the produced inorganic spheroidized particles is improved as compared with the burner described in Patent Document 2. Is seen.

  However, when the inorganic raw material powders having various average particle diameters were spheroidized with the same combustion amount, agglomeration progressed as the average particle diameter decreased, and the amount of spheroidizing treatment tended to decrease. Moreover, the tendency for the average particle diameter of the spheroidized particle after processing in a flame to become larger than the average particle diameter of a raw material was seen. Therefore, in order to obtain spheroidized particles having a smaller average particle diameter, the diffusion burners described in Patent Document 3 and Patent Document 4 are insufficient.

  Accordingly, the present invention provides a burner for producing inorganic spheroidized particles that can be spheroidized according to the characteristics of the raw material powder (particle size, density, specific heat, latent heat of melting, melting point, boiling point, etc.) and inorganic spheroidized particle production. An object of the present invention is to provide a manufacturing method and apparatus.

  In order to achieve the above object, a first configuration of the inorganic spheroidized particle manufacturing burner of the present invention is an inorganic spheroidized particle manufacturing burner that generates inorganic spheroidized particles by supplying an inorganic powder raw material into a flame. An inner dispersion gas supply path for supplying a dispersion gas for dispersing the inorganic powder raw material, and the inorganic powder using oxygen or oxygen-enriched air arranged outside the inner dispersion gas supply path as a carrier gas A raw material powder supply path for conveying a raw material, a primary oxygen supply path disposed outside the raw material powder supply path, a fuel fluid supply path disposed outside the primary oxygen supply path, and the fuel fluid supply A secondary oxygen supply passage disposed outside the passage is concentrically provided, and a tip opening of each of the supply passages is provided on a plane perpendicular to the burner central axis. as a feature That.

  A second configuration of the inorganic spheroidized particle manufacturing burner according to the present invention is the inorganic spheroidized particle manufacturing burner in which an inorganic spheroidized particle is generated by supplying an inorganic powder raw material into a flame. An inner dispersion gas supply passage for supplying a dispersion gas for dispersing the raw material, and a raw material for conveying the inorganic powder raw material using oxygen or oxygen-enriched air arranged outside the inner dispersion gas supply passage as a carrier gas A powder supply path, a fuel fluid supply path disposed outside the raw material powder supply path, a primary oxygen supply path disposed outside the fuel fluid supply path, and disposed outside the primary oxygen supply path A secondary oxygen supply path that is concentrically provided, and a combustion chamber having an enlarged diameter on the outlet side connected to the tip of each supply path, the inner dispersion gas supply path, the raw material powder supply path, The fuel fluid supply path is the fuel flow path. Each having a jet opening opening on a plane orthogonal to the burner central axis on the base end side of the chamber, and the primary oxygen supply passage opens to the expanded inner peripheral surface of the combustion chamber to form a swirling flow A secondary oxygen supply passage that blows out oxygen in a direction in which the secondary oxygen supply passage opens toward the outlet side of the primary oxygen outlet on the inner peripheral surface of the combustion chamber whose diameter has been expanded, It is characterized by having a secondary oxygen ejection port for ejecting oxygen toward the shaft.

  Furthermore, the inorganic spheroidized particle producing burner of the present invention is preferably configured such that, in the both configurations, the jet outlet of the raw material powder supply path is provided in a direction in which the jet direction of the raw material powder extends from the center of the burner. . In addition, an outer dispersion gas supply path is provided between the raw material powder supply path and the primary oxygen supply path, and in the first configuration, each of the supply paths is provided at the tip of the outer dispersion gas supply path. In the second configuration, the inner dispersion gas supply path and the raw material powder supply path are provided at the tip of the outer dispersion gas supply path. In addition, it is preferable to provide a jet port that opens on the same plane as each jet port of the fuel fluid supply path. Furthermore, it is preferable that the outer dispersion gas supply path is provided in a direction in which the ejection direction of the dispersion gas extends from the center of the burner in both configurations.

  In addition, the method for producing inorganic spheroidized particles of the present invention is the method for producing inorganic spheroidized particles in which the inorganic spheroidized particles are produced using the burner for producing inorganic spheroidized particles having the above-mentioned outer dispersion gas supply path. The flow rate of each dispersion gas supplied to the inner dispersion gas supply path and the outer dispersion gas supply path is individually controlled.

  Further, the inorganic spheroidizing production apparatus of the present invention is an inorganic spheroidizing particle manufacturing apparatus having a furnace equipped with the inorganic spheroidized particle manufacturing burner having the above-described configuration, wherein the raw material powder is accompanied by a carrier gas. Means for conveying to the burner for producing inorganic spheroidized particles, a path for supplying oxygen from the oxygen supply facility and fuel from the fuel supply facility to the burner for producing inorganic spheroidized particles, and a burner for producing inorganic spheroidized particles. The spheroidized particles are provided with a means for collecting, collecting, and recovering the spheroidized particles from the furnace with air for temperature dilution.

According to the burner for producing inorganic spheroidized particles of the present invention, the raw material powder is drawn into the dispersion gas by ejecting the dispersion gas from the inner peripheral side of the jet outlet of the raw material powder supply path. The spread angle of the flow is increased, the dispersibility of the raw material powder in the flame can be improved, and the processing performance can be improved. Further, the aggregation of the powder is suppressed, and the coarsening of the particle size can be reduced. Furthermore, the raw material powder can be more effectively dispersed in the flame by ejecting the raw material powder in the direction of spreading from the center of the burner. And by spreading the dispersion gas from the outer periphery of the outlet of the raw material powder supply path, the spread of the powder flow can be further increased, and the dispersibility of the raw material powder in the flame can be improved. Can be planned.

  In addition, by individually controlling the flow rates of the dispersion gas supplied to the inner dispersion gas supply path and the outer dispersion gas supply path, the ejection direction of the raw material powder can be controlled. For example, if the flow rate of the inner dispersion gas is increased, the spread of the raw material powder in the direction of the burner central axis increases, and if the flow rate of the outer dispersion gas is increased, the spread of the raw material powder toward the outer peripheral side is increased. . In this way, by adjusting the flow rates of the inner dispersion gas and the outer dispersion gas, it is possible to adjust the injection direction of the raw material powder and allow the raw material powder to pass through the high temperature region of the flame. Performance can be improved.

  1 and 2 show a first embodiment of the burner for producing inorganic spheroidized particles according to the present invention. FIG. 1 is a sectional view taken along the line II in FIG. 2, and FIG. 2 is a front view of the burner for producing inorganic spheroidized particles. FIG.

  The inorganic spheroidized particle manufacturing burner (hereinafter simply referred to as burner) 10 includes, in order from the center, an inner dispersion gas supply path 11 for supplying a dispersion gas for dispersing the inorganic powder raw material, and the inner dispersion gas. A raw material powder supply passage 12 for conveying the inorganic powder raw material using oxygen or oxygen-enriched air arranged outside the gas supply passage 11 as a carrier gas, and a primary disposed outside the raw material powder supply passage 12 An oxygen supply path 13, a fuel fluid supply path 14 disposed outside the primary oxygen supply path 13, a secondary oxygen supply path 15 disposed outside the fuel fluid supply path 14, and the secondary oxygen supply A water cooling jacket 16 disposed outside the path 15 is provided concentrically.

  In addition, a plurality of jet outlets 11a, 12a, 13a, 14a, and 15a that are open on one plane orthogonal to the burner central axis are concentrically formed at the tips of the supply passages 11, 12, 13, 14, and 15. Is provided. Each jet port other than the single jet port 11a provided at the center is provided with a predetermined diameter and a circumferential interval. Furthermore, the jet outlet 12a of the raw material powder supply path 12 is provided in a direction in which the jet direction of the raw material powder extends from the center of the burner.

  In such a burner 10, the dispersion gas is ejected from the ejection port 11 a of the inner dispersion gas supply passage 11 provided on the inner peripheral side of the ejection port 12 a of the raw material powder supply passage 12. The raw material powder ejected from the spout 12a of the raw material powder supply path 12 is drawn, and the spread angle of the powder flow can be increased, and each spout 13a of the primary oxygen supply path 13 and the secondary oxygen supply path 15 is provided. , 15a, and the raw material powder can be effectively dispersed in a flame formed by oxygen ejected from the fuel fluid supply passage 14 and fuel gas ejected from the fuel outlet 14a of the fuel fluid supply passage 14, for example, LPG. The production efficiency of the particles can be improved, and the aggregation of the particles that are heated to be in a molten state can be suppressed, and the coarsening of the particle size can be suppressed. Furthermore, dispersibility of the raw material powder can be further improved by providing the outlet 12a of the raw material powder supply path 12 in a direction in which the injection direction of the raw material powder extends from the center of the burner.

  3 and 4 show a second embodiment of the present invention. FIG. 3 is a sectional view taken along the line III-III in FIG. 4, and FIG. 4 is a front view of the burner for producing inorganic spheroidized particles.

  The burner 20 according to the present embodiment is arranged in order from the center on the inner dispersion gas supply passage 21 for supplying a dispersion gas for dispersing the inorganic powder raw material, and on the outer side of the inner dispersion gas supply passage 21. A raw material powder supply path 22 for conveying the inorganic powder raw material using oxygen or oxygen-enriched air as a carrier gas, an outer dispersion gas supply path 23 disposed outside the raw material powder supply path 22, and the outer side A primary oxygen supply path 24 arranged outside the dispersion gas supply path 23, a fuel fluid supply path 25 arranged outside the primary oxygen supply path 24, and an outside of the fuel fluid supply path 25. A secondary oxygen supply path 26 and a water cooling jacket 27 disposed outside the secondary oxygen supply path 26 are provided concentrically.

  Also, at the tip of each of the supply paths 21, 22, 23, 24, 25, 26, as in the first embodiment, a plurality of outlets 21a, 22a opened on the same plane orthogonal to the burner central axis. , 23a, 24a, 25a, 26a are provided concentrically. Each jet port other than the single jet port 21a provided at the center is provided with a predetermined diameter and a predetermined circumferential interval. Further, the jet outlet 22a of the raw material powder supply path 22 is provided in a direction in which the jet direction of the raw powder expands from the center of the burner, and the jet outlet 23a of the outer dispersion gas supply path 23 also has a jet direction of the dispersing gas. It is provided in a direction extending from the center of the burner.

  The inner dispersion gas supply passage 21 and the outer dispersion gas supply passage 23 are provided with control means for individually controlling the flow rates of the dispersion gas supplied to the supply passages 21 and 23.

  In the burner of the present embodiment, the dispersion of the raw material powder flow is made larger than that of the first embodiment by ejecting the dispersing gas from the inner peripheral side and the outer peripheral side of the jet outlet 22a of the raw material powder supply path 22, respectively. It can be further increased, and the dispersibility of the raw material powder in the flame can be improved.

  Further, by individually controlling the flow rates of the dispersion gas supplied to the inner dispersion gas supply passage 21 and the outer dispersion gas supply passage 23, the injection direction of the raw material powder is optimized according to the properties of the raw material powder. Can be controlled. That is, by increasing the flow rate of the dispersion gas ejected from the ejection port 21 a of the inner dispersion gas supply passage 21, the spread of the raw material powder in the center direction increases, and the ejection from the ejection port 22 a of the outer dispersion gas supply passage 23. By increasing the flow rate of the dispersing gas, the spread of the raw material powder in the outer peripheral direction can be increased. Therefore, since the raw material powder can be passed through the high temperature region of the flame, it can be processed under optimal conditions, and the characteristics of the raw material powder (particle size, density, specific heat, latent heat of melting, melting point, boiling point, etc.) The spheroidizing treatment according to the above can be performed more reliably, and the production efficiency of the inorganic spheroidized particles can be further improved.

  5 and 6 show a third embodiment of the present invention. FIG. 5 is a VV cross-sectional view of FIG. 6, and FIG. 6 is a front view of a burner for producing inorganic spheroidized particles. The burner 30 includes an inner dispersion gas supply passage 31 for supplying a dispersion gas for dispersing the inorganic powder raw material and oxygen or oxygen disposed outside the inner dispersion gas supply passage 31 in order from the center. A raw material powder supply path 32 that conveys the inorganic powder raw material using enriched air as a carrier gas, a fuel fluid supply path 33 disposed outside the raw material powder supply path 32, and a fuel fluid supply path 33 A primary oxygen supply path 34 disposed outside and a secondary oxygen supply path 35 disposed outside the primary oxygen supply path 34 are provided concentrically, and the supply paths 31, 32, 33, 34, 35 are provided. And a water cooling jacket 37 disposed so as to surround the outer periphery of the combustion chamber 36 and the secondary oxygen supply path 35.

  The combustion chamber 36 is formed in a cone shape whose diameter is increased on the outlet side, and at each end of the inner dispersion gas supply passage 31, the raw material powder supply passage 32, and the fuel fluid supply passage 33, the combustion chamber 36 is provided. A plurality of outlets 31a, 32a, 33a that are open on the same plane perpendicular to the central axis of the burner are provided concentrically in the central portion on the base end side of the nozzle, and the outlets excluding one outlet 31a provided in the center 32a and 33a are each provided with the predetermined | prescribed diameter and the predetermined | prescribed circumferential direction space | interval. Further, at the tip of the primary oxygen supply path 34, a plurality of primary oxygen outlets 34a that open to the inner peripheral surface of the combustion chamber 36 that expands and eject oxygen in a direction to form a swirling flow are equally spaced in the circumferential direction. A plurality of secondary oxygen supply passages 35 are provided at the front end of the secondary oxygen supply passage 35 so as to open to the outlet side of the primary oxygen outlet 34a on the inner peripheral surface of the combustion chamber 36 whose diameter is increased, and to eject oxygen toward the burner central axis. Secondary oxygen jet nozzles 35a are provided at equal intervals in the circumferential direction. Furthermore, the jet outlet 42a of the raw material powder supply path 42 is provided in a direction in which the jet direction of the raw material powder extends from the center of the burner.

  The burner 30 of this embodiment jets the gas for dispersion from the inner peripheral side of the jet outlet of the raw material powder supply path, and the primary oxygen jet outlet 34a starts from the expanded inner peripheral surface of the combustion chamber 36. The secondary oxygen jet port 35a is jetted from the outlet side of the combustion chamber 36 toward the central axis of the burner. Therefore, the combustion efficiency can be improved, the dispersibility of the raw material powder in the flame can be improved, and the processing performance can be greatly improved. Further, the aggregation of the powder is suppressed, and the coarsening of the particle size can be reduced.

  7 and 8 show a fourth embodiment of the present invention. FIG. 7 is a sectional view taken along the line VII-VII in FIG. 8, and FIG. 8 is a front view of the burner for producing inorganic spheroidized particles. The burner 40 according to this embodiment is disposed in order from the center, an inner dispersion gas supply passage 41 for supplying a dispersion gas for dispersing the inorganic powder raw material, and an outer side of the inner dispersion gas supply passage 41. A raw material powder supply path 42 for conveying the inorganic powder raw material using oxygen or oxygen-enriched air as a carrier gas, an outer dispersion gas supply path 43 disposed outside the raw material powder supply path 42, and the outer side A fuel fluid supply path 44 disposed outside the dispersion gas supply path 43, a primary oxygen supply path 45 disposed outside the fuel fluid supply path 44, and an outer side of the primary oxygen supply path 45. A secondary oxygen supply path 46 is provided concentrically, and a combustion chamber 47 whose outlet side is connected to the tip of each of the supply paths 41, 42, 43, 44, 45, 46 has an enlarged diameter, and a secondary oxygen supply path 46 It is arranged to surround the outer periphery of And a cold jacket 48.

  The combustion chamber 47 is formed in a cone shape having an enlarged outlet side, and includes an inner dispersion gas supply path 41, a raw material powder supply path 42, an outer dispersion gas supply path 43, and a fuel fluid supply path 44. A plurality of jet nozzles 41 a, 42 a, 43 a, 44 a that open on the same plane orthogonal to the burner central axis are provided at the distal end of the combustion chamber 47. Each jet port other than the jet port 41a provided at the center is provided with a predetermined diameter and a predetermined circumferential interval. Furthermore, the primary oxygen supply passage 45 is provided with a plurality of primary oxygen outlets 45a that open to the expanded inner peripheral surface of the combustion chamber 47 and eject oxygen in a direction in which a swirl flow is formed. At the tip of the oxygen supply passage 46, a plurality of secondary oxygen jets that open to the outlet side of the primary oxygen jet 45a on the inner peripheral surface of the combustion chamber 47 whose diameter has been expanded and jet oxygen toward the burner central axis 46a is provided. Further, the jet outlet 42a of the raw material powder supply path 42 is provided in a direction in which the jet direction of the raw material powder extends from the center of the burner, and the jet outlet 43a of the outer dispersion gas supply path 43 also has a jet direction of the dispersing gas. It is provided in a direction extending from the center of the burner.

  Further, the inner dispersion gas supply passage 41 and the outer dispersion gas supply passage 43 are provided with control means for individually controlling the flow rates of the dispersion gas supplied to the supply passages 41 and 43, respectively. .

  The burner 40 according to the present embodiment causes the gas for dispersion to be ejected from the inner peripheral side and the outer peripheral side of the jet outlet of the raw material powder supply path, and the primary oxygen jet outlet 45a is an inner peripheral surface in which the combustion chamber 47 is expanded. The secondary oxygen outlet 46a is formed so as to eject oxygen from the outlet side of the combustion chamber 47 toward the burner central axis. As a result, the combustion efficiency is improved as described above, the dispersibility of the raw material powder in the flame can be further improved, and the processing performance can be greatly improved. Further, the aggregation of the powder is suppressed, and the coarsening of the particle size can be reduced.

  Further, by individually controlling the flow rates of the dispersion gas supplied to the inner dispersion gas supply passage 41 and the outer dispersion gas supply passage 43, similarly to the above, from the jet outlet 41a of the inner dispersion gas supply passage 41. Increasing the flow rate of the dispersed gas to be ejected increases the spread of the raw material powder in the center direction, and increasing the flow rate of the dispersed gas ejected from the ejection port 42a of the outer dispersed gas supply path 43 increases the flow rate of the raw material powder. The spread in the outer peripheral direction can be increased. As a result, the injection direction of the raw material powder can be optimally controlled according to the properties of the raw material powder, and the raw material powder can be passed through the high temperature region of the flame. Spheroidizing treatment according to the characteristics of the raw material powder (particle size, density, specific heat, latent heat of melting, melting point, boiling point, etc.), and production of inorganic spheroidized particles Efficiency can be further improved.

  In each embodiment, the diameter and shape of each nozzle, the arrangement state, the shape of the combustion chamber in the third and fourth embodiments, etc. are the type of gas in each supply passage, the amount of gas supplied, and the balance thereof. Depending on conditions such as the properties and supply amount of the raw material powder, the diameter of the burner, and installation conditions, it can be set as appropriate. In addition, various gases including air can be used as the inner and outer dispersion gases, but it is usually preferable to use oxygen or oxygen-enriched air.

  The burner formed as shown in each embodiment is used by being attached to an inorganic spheroidized particle manufacturing apparatus 50 as shown in FIG. 9, for example. In the inorganic spheroidized particle manufacturing apparatus 50, the raw material powder is cut out from a normal feeder 51 and is accompanied by a carrier gas composed of oxygen or oxygen-enriched air supplied from a carrier gas introduction path 52 and has the above-described configuration. It is conveyed to the burner 53. The burner 53 is supplied with oxygen from the oxygen supply facility 54 and fuel gas such as LPG from the fuel supply facility 55, and the particles spheroidized in the flame in the furnace 56 are supplied to the air introduction path 57. Then, the temperature is diluted with the air introduced into the furnace 56 and extracted from the furnace 56, and the particles are collected and collected by the subsequent cyclone 58 and the bag filter 59.

  The burner 10 shown in the first embodiment was attached to the inorganic spheroidized particle manufacturing apparatus 50 shown in FIG. 9, and an experiment for spheroidizing silica powder was conducted.

LPG is used as the fuel, pure oxygen is used as the carrier gas, combustion-supporting gas, and dispersion gas, and a powder having an average particle size of 20 μm is used as the raw material powder. LPG: 30 Nm ³ / h, primary oxygen: 36Nm ³ / h, 2 primary oxygen: was 84Nm ³ / h, the carrier gas 30 Nm ³ / h. The flow rate of oxygen supplied to the inner dispersion gas supply passage 11 is adjusted to change the flow velocity of the dispersion gas ejected from the ejection port 11a. At each flow velocity, the vitrification rate of silica recovered by the cyclone 58 is 98% or more. The maximum throughput (powder throughput per unit LPG flow rate) obtained was examined. The result is shown in FIG. In addition, as a result of conducting an experiment under the same conditions using the inorganic spheroidizing production burner described in Patent Document 4, the maximum throughput was 6.7 kg / Nm ³ -LPG. Note that N in the unit Nm ³ is a symbol representing a standard state.

The burner 20 shown in the second embodiment was attached to the inorganic spheroidized particle manufacturing apparatus 50 shown in FIG. 9, and an experiment for spheroidizing silica powder was conducted. LPG is used as the fuel, pure oxygen is used as the carrier gas, combustion-supporting gas, and dispersion gas, and a powder having an average particle size of 20 μm is used as the raw material powder. LPG: 30 Nm ³ / h, primary oxygen: 36Nm ³ / h, 2 primary oxygen: was 84Nm ³ / h, the carrier gas 30 Nm ³ / h. Silica glass recovered by the cyclone 58 by supplying the dispersion gas to the inner dispersion gas supply passage 21 and the outer dispersion gas supply passage 23 so as to have the same ejection speed and changing the ejection flow velocity of the dispersion gas. The maximum processing amount at which a conversion rate of 98% or more was obtained was examined. The result is shown in FIG.

The burner 30 shown in the third embodiment was attached to the inorganic spheroidized particle manufacturing apparatus 50 shown in FIG. 9, and an experiment for spheroidizing silica powder was conducted. LPG is used as the fuel, pure oxygen is used as the carrier gas, combustion-supporting gas, and dispersion gas, and a powder having an average particle size of 20 μm is used as the raw material powder. LPG: 30 Nm ³ / h, primary oxygen: 36Nm ³ / h, 2 primary oxygen: 84Nm ³ / h, and the carrier gas flow rate 30 Nm ³ / h. The maximum amount of treatment with which the vitrification rate of silica recovered by the cyclone 58 can be obtained at 98% or more at each flow rate by changing the flow rate from the jet port 31a by adjusting the flow rate of oxygen supplied to the inner dispersion gas supply passage 31. I investigated. The result is shown in FIG.

The burner 40 shown in the fourth embodiment was attached to the inorganic spheroidized particle manufacturing apparatus 50 shown in FIG. 9, and an experiment for spheroidizing silica powder was conducted. LPG is used as the fuel, pure oxygen is used as the carrier gas, combustion-supporting gas, and dispersion gas, and a powder having an average particle size of 20 μm is used as the raw material powder. LPG: 30 Nm ³ / h, primary oxygen: 36Nm ³ / h, 2 primary oxygen: 84Nm ³ / h, and the carrier gas flow rate 30 Nm ³ / h.

The dispersion gas was supplied to the inner dispersion gas supply passage 41 and the outer dispersion gas supply passage 43 so as to have the same ejection speed, and the flow velocity of the dispersion gas was changed, and the cyclone 58 was collected at each flow velocity. The maximum processing amount at which the vitrification rate of silica was 98% or more was examined. The result is shown in FIG.

It is II sectional drawing of FIG. It is a front view of the burner for inorganic spheroidized particle manufacture which shows the 1st form example of this invention. It is III-III sectional drawing of FIG. It is a front view of the burner for inorganic spheroidized particle manufacture which shows the 2nd form example of this invention. It is VV sectional drawing of FIG. It is a front view of the burner for inorganic spheroidized particle manufacture which shows the 3rd form example of this invention. It is VII-VII sectional drawing of FIG. It is a front view of the burner for inorganic spheroidized particle manufacture which shows the 4th example of this invention. It is a systematic diagram which shows an example of an inorganic spheroidized particle manufacturing apparatus. It is a figure which shows the relationship between the flow rate of the gas for inner dispersion | distribution in Example 1, and the maximum processing amount. It is a figure which shows the relationship between the flow rate of the inner side dispersion | distribution gas in Example 2, and the outer side dispersion | distribution gas, and the maximum processing amount. FIG. 10 is a diagram showing the relationship between the flow rate of the inner dispersion gas and the maximum throughput in Example 3. It is a figure which shows the relationship between the flow rate of the inner side dispersion | distribution gas in Example 4, and the outer side dispersion | distribution gas, and the maximum processing amount.

Explanation of symbols

  10, 20, 30, 40 ... burner, 11, 21, 31, 41 ... inner dispersion gas supply path, 12, 22, 32, 42 ... raw material powder supply path, 13, 24, 34, 45 ... primary oxygen supply , 14, 25, 33, 44 ... fuel fluid supply passage, 15, 26, 35, 46 ... secondary oxygen supply passage, 16, 27, 37, 48 ... water cooling jacket, 23, 43 ... gas supply passage for outer dispersion 36, 47 ... Combustion chamber, 50 ... Inorganic spheroidized particle production apparatus, 51 ... Feeder, 52 ... Carrier gas introduction path, 53 ... Burner, 54 ... Oxygen supply equipment, 55 ... Fuel supply equipment, 56 ... Furnace, 57 ... Air introduction path, 58 ... cyclone, 59 ... bag filter

Claims (11)

In an inorganic spheroidized particle production burner for supplying inorganic powder raw material into a flame to produce inorganic spheroidized particles, an inner dispersion gas supply path for supplying a dispersion gas for dispersing the inorganic powder raw material, A raw material powder supply path for conveying the inorganic powder raw material using oxygen or oxygen-enriched air as a carrier gas, which is disposed outside the inner dispersion gas supply path, and a primary disposed outside the raw material powder supply path An oxygen supply path, a fuel fluid supply path disposed outside the primary oxygen supply path, and a secondary oxygen supply path disposed outside the fuel fluid supply path are provided concentrically, and each of the supply paths A burner for producing inorganic spheroidized particles, characterized in that, at the tip of each, a jet outlet opening on a plane perpendicular to the central axis of the burner is provided. 2. The burner for producing inorganic spheroidized particles according to claim 1, wherein the jet outlet of the raw material powder supply path is provided in a direction in which the jet direction of the raw material powder extends from the center of the burner. An outer dispersion gas supply path is provided between the raw material powder supply path and the primary oxygen supply path, and the front end of the outer dispersion gas supply path is flush with the outlets of the supply paths. A burner for producing inorganic spheroidized particles according to claim 1 or 2, wherein a jet nozzle is provided. 4. The burner for producing inorganic spheroidized particles according to claim 3, wherein the ejection port of the outer dispersion gas supply path is provided in a direction in which the ejection direction of the dispersion gas extends from the center of the burner. In an inorganic spheroidized particle production burner for supplying inorganic powder raw material into a flame to produce inorganic spheroidized particles, an inner dispersion gas supply path for supplying a dispersion gas for dispersing the inorganic powder raw material, A raw material powder supply path for transporting the inorganic powder raw material using oxygen or oxygen-enriched air as a carrier gas disposed outside the inner dispersion gas supply path, and a fuel disposed outside the raw material powder supply path A fluid supply path, a primary oxygen supply path disposed outside the fuel fluid supply path, and a secondary oxygen supply path disposed outside the primary oxygen supply path are provided concentrically. A combustion chamber having an enlarged diameter on the outlet side connected to the distal end, and at the distal end of the inner dispersion gas supply passage, the raw material powder supply passage, and the fuel fluid supply passage, on the proximal end side of the combustion chamber, Open on a plane perpendicular to the burner central axis The primary oxygen supply passage is provided with a primary oxygen jet opening at the tip of the primary oxygen supply passage, which opens to the expanded inner peripheral surface of the combustion chamber and jets oxygen in a direction to form a swirling flow. The secondary oxygen supply passage is opened at the tip of the inner peripheral surface of the combustion chamber, which is closer to the outlet side than the primary oxygen jet outlet, and ejects oxygen toward the burner central axis. A burner for producing inorganic spheroidized particles, characterized in that a jet nozzle is provided. 6. The burner for producing inorganic spheroidized particles according to claim 5, wherein the jet outlet of the raw material powder supply path is provided in a direction in which the jet direction of the raw material powder extends from the center of the burner. An outer dispersion gas supply path is provided between the raw material powder supply path and the fuel fluid supply path, and the inner dispersion gas supply path and the raw material powder supply are provided at the tip of the outer dispersion gas supply path. The burner for producing inorganic spheroidized particles according to claim 5 or 6, wherein a jet opening that is open on the same plane as each jet nozzle of the channel and the fuel fluid supply channel is provided. 8. The burner for producing inorganic spheroidized particles according to claim 7, wherein the ejection port of the outer dispersion gas supply passage is provided in a direction in which the ejection direction of the dispersion gas extends from the center of the burner. In the manufacturing method of the inorganic spheroidized particle which manufactures the inorganic spheroidized particle using the burner for manufacturing an inorganic spheroidized particle according to claim 3 or 4, the supply to the inner dispersion gas supply path and the outer dispersed gas supply path A method for producing inorganic spheroidized particles, wherein the flow rate of each dispersing gas is individually controlled. 9. The method for producing inorganic spheroidized particles using the burner for producing inorganic spheroidized particles according to claim 7 or 8, wherein the inorganic spheroidized particles are supplied to the inner dispersion gas supply passage and the outer dispersion gas supply passage. A method for producing inorganic spheroidized particles, wherein the flow rate of each dispersing gas is individually controlled. An inorganic spheroidized particle manufacturing apparatus comprising a furnace equipped with the burner for manufacturing inorganic spheroidized particles according to any one of claims 1 to 8, wherein the inorganic spheroidized particles are entrained in a carrier gas with a carrier gas. Sphericalized by means for conveying to the production burner, a path for supplying oxygen from the oxygen supply facility and fuel from the fuel supply facility to the inorganic spheroidized particle production burner, and the inorganic spheroidized particle production burner. An apparatus for producing inorganic spheroidized particles, comprising means for entraining the particles with air for temperature dilution, extracting the particles from the furnace, and collecting and collecting the particles.

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