JP5204078B2 - Gas component measuring device in piping and flue for exhaust gas component measurement - Google Patents

Description

  The present invention relates to a gas component measuring device in a pipe and an exhaust gas component measuring flue by means of laser emission analysis.

  As a method for measuring the gas concentration in a gas pipe in a gas plant of an industrial facility, a method using a conventional semiconductor laser absorption method has been established and is JIS (JIS B 7993: Non-Patent Document 1).

An outline of a laser device by this semiconductor laser absorption method is shown in FIG.
As shown in FIG. 15, a laser beam L is irradiated from a laser device 110 to a sample pipe 101 branched from a gas pipe, and the gas component of the measurement target gas 102 is analyzed.
Here, reference numerals 101a and 101b denote quartz windows, 112 denotes a reflection mirror, 113 denotes a first detector, and 114 denotes a second detector.
The first detector 113 obtains the reference light (I ₀ ), and the second detector 114 obtains the intensity (I) of the light transmitted through the sample pipe 101, and the transmittance T = (I / I ₀ ). With this analysis technique, online analysis of various gas component concentrations has become possible.

JISB7993

  By the way, when analyzing a gas component, when measuring by the semiconductor laser absorption method using the sample pipe 101 branched from the pipe as shown in FIG. 15, there is no problem of light absorption, but FIG. When the length of the gas pipe 120 as shown is long, there is a problem in that the incident laser beam L is scattered, so that the second detector 114 cannot detect a sufficient light intensity. In FIG. 16, reference numerals 121a and 121b denote quartz windows.

  In addition, when the gas absorption amount is large, the incident laser beam is absorbed, and there is a problem that sufficient light intensity cannot be detected.

Therefore, there is an urgent need for a method that can analyze gas components online without absorbing incident laser light, even when the piping length of industrial plants is long or when the amount of gas absorption is large. Yes.
In addition to gas composition, components other than gas components derived from gas plants (for example, hydrocarbon (HC: oil), soot, alkali metals, etc.) can be measured at the same time, allowing multifaceted analysis by one measurement. Appearance of a gas component measuring device in a simple pipe is desired.

  In view of the above problems, the present invention provides a gas component measuring device and exhaust gas in a pipe that can analyze gas components online even when the pipe length at the site of an industrial equipment plant is long or when the gas absorption amount is large. An object is to provide a flue for component measurement.

  A first invention of the present invention for solving the above-described problem is a first wavelength conversion unit that converts the wavelength of a basic laser beam oscillated from a laser device into a first laser beam, and a wavelength of the basic laser beam. A second wavelength conversion unit that converts the light into a second laser beam, a gas measurement unit that introduces the first and second laser beams and irradiates a gas component in the gas to be measured, and irradiation. Amplified Spontaneous Emission Light (Amplified Spontaneous Emission) generated when the excited molecules excited to a higher level by the first laser beam and the second laser beam are electronically relaxed to a lower level. : ASE) and a fluorescence detection unit for measuring fluorescence generated by the hydrocarbon derived from the oil present in the gas to be measured. It is in.

  According to a second aspect of the present invention, in the first aspect of the invention, the gas component measuring device in the pipe is characterized in that the gas temperature of the gas to be measured is measured from the relative intensity of the fluorescence emitted from the gas component of the gas to be measured.

  3rd invention WHEREIN: Soot detection which measures the Mie scattered light which the soot which exists in to-be-measured gas emits using either 1st laser beam or 2nd laser beam in 1st or 2nd invention It is in the gas component measuring device in piping characterized by comprising a part.

  According to a fourth aspect of the present invention, in any one of the first to third aspects, the apparatus includes a metal component detection unit that measures the plasma light emitted from the metal component present in the gas to be measured using the laser beam. It is in the gas component measuring device in the pipe.

  According to a fifth invention, in the first invention, the gas measuring unit is a measuring unit composed of a long pipe, and the laser beam is irradiated in the same direction as the flow direction of the exhaust gas measured in the long pipe to the pipe. The gas component measuring device in the pipe is characterized in that the fluorescence derived from the hydrocarbon is detected by sequentially adjusting the focal point of the fluorescence detector for each measurement position of each zone at a predetermined interval along.

  A sixth invention is the measurement unit according to the fifth invention, wherein the gas measuring unit is a long pipe, and the pipe is irradiated with laser light in the same direction as the flow direction of the exhaust gas measured in the long pipe. A gas component in a pipe characterized in that a plurality of light detection ports for measuring fluorescence are provided at measurement positions for each zone at predetermined intervals along the same, and NO concentration is detected by a second fluorescence detector having a spectroscope from fluorescence. In the measuring device.

  A seventh invention is the measurement unit according to the fifth or sixth invention, wherein the gas measurement unit is a long pipe, and the laser beam is irradiated in the same direction as the flow direction of the exhaust gas measured in the long pipe, A gas component measuring device in a pipe characterized by providing a plurality of light detection ports for measuring Mie scattered light emitted by soot dust at measurement positions for each zone at a predetermined interval along the pipe to detect Mie scattered light derived from soot dust. It is in.

  The eighth invention is characterized in that, in the sixth or seventh invention, the laser beam is sequentially focused at the measurement positions of the predetermined intervals along the pipe, and the alkali metal component is detected from the generated plasma light. It is in the gas component measuring device in the pipe.

  According to a ninth aspect of the invention, there is provided a flue for measuring an exhaust gas component, comprising the gas component measuring device in the pipe according to any one of the fifth to eighth aspects of the invention.

According to the present invention, since the gas component can be measured by emission analysis in the infrared region of ASE, the gas component can be obtained even when the pipe length of the measurement target in the industrial facility is long or the gas absorption amount is large. The concentration analysis of can be analyzed online. In addition, since ASE oscillates as directional light, the ASE light emission component is easily condensed and the measurement sensitivity is high. Since ASE is light in the infrared region, separation from incident laser light (visible light, ultraviolet light) is facilitated, and detection with a high signal-to-noise ratio is possible.
Furthermore, components such as oil (hydrocarbon), dust, and metal components in the gas can be measured at the same time, and multi-faceted analysis can be performed with a single measurement.

FIG. 1 is a schematic diagram of a gas component measuring device in piping according to the first embodiment. FIG. 2 is a schematic diagram of the energy level of NO. FIG. 3 is a schematic diagram of the energy level of CO. FIG. 4 is a schematic diagram of a gas component measuring device in piping according to the second embodiment. FIG. 5 is a graph showing the relationship between the NO gas fluorescence signal intensity and the rotation amount index (J). Figure 6 is a LIF excitation spectrum intensity diagram of the energy of the pump light in the P ₁₂ branches in transition ^{"A 2 Σ + ← X2Π (0,0} ) " at a temperature of 300K and 1250K. FIG. 7 is a schematic diagram of a gas component measuring device in piping according to the third embodiment. FIG. 8 is a schematic diagram of a gas component measuring device in piping according to the third embodiment. FIG. 9 is a schematic diagram of a gas component measuring device in piping according to the fourth embodiment. FIG. 10 is a schematic diagram of a gas component measuring device in piping according to the fifth embodiment. FIG. 11 is a schematic diagram of a gas component measuring device in piping according to the sixth embodiment. FIG. 12 is a schematic diagram of a gas component measuring device in piping according to the seventh embodiment. FIG. 13 is a schematic diagram of a gas component measuring device in piping according to the eighth embodiment. FIG. 14 is a schematic diagram of a gas component measuring device in piping according to the ninth embodiment. FIG. 15 is a schematic view of a laser device according to a conventional semiconductor laser absorption method. FIG. 16 is a schematic diagram for measuring the flue by the semiconductor laser absorption method.

  Hereinafter, the present invention will be described in detail with reference to the drawings. Note that the present invention is not limited to the embodiments. In addition, constituent elements in the following embodiments include those that can be easily assumed by those skilled in the art or those that are substantially the same.

A gas component measuring device in piping according to an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic diagram of a gas component measuring device in piping according to the first embodiment. As shown in FIG. 1, the gas component measuring device 10 </ b> A in the pipe according to the present embodiment is a basic laser beam irradiated to the gas 11 to be measured in the flue 15 (the solid line indicates the optical axis). When an excited molecule excited to a higher level by 22 is electronically relaxed to a lower level, the gas in the measured gas 11 from amplified spontaneous emission (ASE) generated when the level lowers. The component is measured.

As a specific apparatus configuration, as shown in FIG. 1, the gas component measuring apparatus 10 </ b> A in the pipe according to the present embodiment uses the basic laser light (1064 nm) 22 oscillated from the laser apparatus 21 as the first laser light. (Wavelength: 226 nm) First wavelength conversion unit 23 that converts the wavelength to 22-1 and second laser light (wavelength: 600 nm) 22-2 that converts the wavelength of the oscillated laser light 22 to wavelength. A wavelength measuring unit 24 and a gas measuring unit that introduces a combined laser beam 22-3 of the first laser beam 22-1 and the second laser beam 22-2 and irradiates the gas component in the measured gas 11 25 and the number of excited molecules excited to a high level (E level) by the irradiated combined laser beam 22-3 (first laser beam 22-1 and second laser beam 22-2) is low. When electronically relaxing to a level (C level) A photodetector (for example, a photodiode, an MCT detector, etc.) 26 that measures a spontaneous emission amplified light (Amplified Spontaneous Emission: hereinafter referred to as “ASE”) 14 and a fluorescence 50 emitted from a component in the gas 11 to be measured are measured. The fluorescence detection part 51 which comprises is comprised.
In FIG. 1, 15a and 15b are quartz windows through which laser light is transmitted, 29 is a spectroscope, 31 is a condenser lens, 33 is an optical filter, and 34a to 34d are mirrors.

  Since the gas component measuring device in the pipe of the present invention uses the principle of ASE emission and is different from the conventional absorption analysis, the influence of the decrease in gas absorption light intensity of the gas to be measured 11 is eliminated.

Next, the light emission principle of ASE will be described with reference to a schematic diagram of the energy level of NO shown in FIG.
When, for example, nitric oxide (NO) in the measurement gas is irradiated with laser light and excited electronically, as shown in FIG. 2, the ground state (X) is excited (X level → A level → E level).

Specifically, it is excited from the X level to the A level at the excitation wavelength of the first laser beam (226 nm) 22-1 and then from the A level at the excitation wavelength of the second laser beam (600 nm) 22-2. Excited to E level.
At this time, when the number of molecules at the E level is larger than the number of molecules at the C level, an inversion distribution state occurs, and spontaneous emission from the E level to the C level occurs. Spontaneous radiation amplified light (ASE) of 1170 to 1184 nm, which is stimulated emission of the level, is generated.

As gas components to be measured in the gas to be measured, in addition to nitrogen monoxide (NO), for example, carbon monoxide (CO), water (H ₂ O), nitrogen dioxide (NO ₂ ), methane (CH ₄ ), Ammonia, benzene and the like can be exemplified.

FIG. 3 is a schematic diagram of energy levels of carbon monoxide (CO).
As shown in FIG. 3, carbon monoxide (CO) is excited from the X level to the E level by two-light excitation at 215 nm from the ground state.

  At this time, when the number of molecules at the E level is larger than the number of molecules at the B level, an inversion distribution state occurs, and spontaneous emission from the E level to the B level occurs. A spontaneous emission amplified light (ASE) of 1.7 μm, which is stimulated emission of the C level, is generated.

  Moreover, since ASE has a wavelength in the infrared region (for example, 1170 to 1184 nm in the case of NO), unlike the visible region and the ultraviolet region, separation by the filter 33 is easy, and measurement accuracy is improved.

Luminescence analysis such as fluorescence and Raman is isotropic emission, so that light spreads in all directions and there is no directivity, whereas ASE has directivity (ASE14 is only in two directions, the incident direction and the outgoing direction of laser light 22). Light emission), and separation with high sensitivity becomes possible.
Therefore, in this embodiment, a light introduction line through which laser light is introduced into the gas measurement unit 25 and a light emission line in the same direction as the traveling direction of the laser light that emits the generated ASE 14 are provided.

As a result, the concentration analysis of the gas component can be performed online even when the pipe length of the measurement target in the industrial facility is long or the gas absorption amount is large.
In addition, since ASE oscillates as directional light, the ASE light emission component is easily condensed and the measurement sensitivity is high.
Furthermore, since ASE is light in the infrared region, separation from incident laser light (visible light, ultraviolet light) is facilitated, and detection with a high signal-to-noise ratio is possible.

In this embodiment, the fluorescence detection unit 51 measures the fluorescence 50 generated by the hydrocarbon (HC) derived from oil present in the gas.
Here, the detection of the hydrocarbon is provided with a spectroscope that excludes wavelengths other than the wavelength of 300 to 450 nm (more preferably 350 to 400 nm) in the fluorescence detection unit 51 to improve the detection of the hydrocarbon.
Thereby, the analysis of hydrocarbon (HC) present in the gas can be performed simultaneously with the measurement of the gas component by the measurement of ASE14.

  As a result, it is possible to perform multi-faceted analysis with a single measurement by simultaneously measuring hydrocarbon (HC) which is a component other than the gas component derived from the gas plant.

  As a result, when the amount of hydrocarbons contained in the exhaust gas is large, it is determined that there is a large amount of oil (particularly tar components) in the exhaust gas, and the control for reviewing the combustion conditions is performed by a control device (not shown). ing. As a result, the burden on the gas purification facility is reduced and the blockage of the piping is eliminated.

Next, in Example 2, a gas component measuring device in another pipe of the present invention will be described with reference to the drawings.
FIG. 4 is a schematic diagram of a gas component measuring device in piping according to the second embodiment. As shown in FIG. 4, the gas component measuring device 10A in the pipe according to the present embodiment measures the fluorescence (NO) 50A derived from NO in the gas component in the fluorescence detection unit 51 and measures it in advance. The temperature in the gas is measured against the temperature curve.
Here, in order to detect the NO-derived fluorescence (NO) 50A, the fluorescence detector 51 has a filter (preferably a filter having a wavelength of not more than 205 nm, for example, 227 nm) that transmits light having a wavelength of not more than 300 nm. The detection of NO-derived fluorescence (NO) 50A is good.
Thereby, the temperature in the gas can be measured simultaneously with the measurement of the gas component by the measurement of ASE14.

FIG. 5 is a graph showing the relationship between the fluorescence intensity of NO gas and the rotational quantum number (J). In FIG. 5, black circles are measured values at 300K, and square marks are measured values at 1250K. The line connecting these plots is fitting using the following equation (1).
This chart is an electronic excitation vibration rotation spectrum from the ground state to the first excited state in the electronic state.

FIG. 6 is a diagram of the LIF excitation spectrum intensity (pump light wavelength 44060 cm ⁻¹ ) of the energy of pump light in the P ₁₂ branch in the “A ² Σ ⁺ ← X ² Π (0, 0)” transition at temperatures 300K and 1250K. (It is drawn near the wavelength of 226 nm).

The relative intensity corresponding to the rotational quantum number (J) of this spectral line is measured, and the temperature of the measurement field can be calculated from the measurement result by applying the following equation (1) as a function of temperature.
N _j / N _{j = 0} = (2J + 1) exp (− [(kcBJ) · (J + 1)] / (kT)) (1)
here,
N _j : Number of molecules in the rotational quantum number J (number density)
N _{j = 0} : total number of molecules J: rotational quantum number k: Boltzmann constant c: speed of light B: rotational constant T: temperature (rotational temperature)
It is.

Therefore, the temperature of the exhaust gas can be predicted by obtaining and comparing the signal intensity using the NO-derived fluorescence (NO) 50A. As a result, in the past, for example, the temperature measurement inside the pipe in a thermocouple or the like was a spot temperature measurement, but the average temperature of the entire measurement field (the entire optical path length of the laser beam) can be obtained without contact. it can.
In addition, for separation from the fluorescence derived from hydrocarbon (HC), the fluorescence derived from HC is measured in the range of 350 to 400 nm, and thus the spectrum is dispersed using a spectroscope so as to be 300 nm or less. Thereby, both fluorescence of NO-derived fluorescence (NO) 50A and HC-derived fluorescence (HC) 50B can be measured.

Next, in Example 3, a gas component measuring device in another pipe of the present invention will be described with reference to the drawings.
FIG. 7 is a schematic diagram of a gas component measuring device in piping according to the third embodiment. As shown in FIG. 7, the gas component measuring device 10 </ b> B in the pipe according to the present embodiment further includes the first laser beam 22-1 or the second laser beam in addition to the fluorescence detection unit 51 illustrated in FIG. 1. The dust detection unit 61 that measures the Mie scattered light 60 emitted by the dust present in the gas is used. Thereby, the dust concentration can be obtained by measuring the intensity of the detection signal of the Mie scattered light 60 emitted by the dust by the dust detection unit 61. As the dust detection unit 61, for example, a photodiode (Si semiconductor type or the like) can be exemplified, but the present invention is not limited to this.

Here, when the first laser beam (wavelength: 226 nm) 22-1 having a short wavelength is used, the dust concentration with a small particle size can be measured.
On the other hand, when the second laser beam (wavelength: 600 nm) 22-2 having a long wavelength is used, the dust concentration having a large particle size can be measured.
Therefore, the first laser beam or the second laser beam is selected according to the desired particle size, and choppers 62-1 and 62-2 that block either line are provided.

  When combined with fluorescence analysis, as described in Example 1, first, fluorescence analysis is performed and ASE is measured, and then the first laser beam 22-1 or the second laser beam 22-2 is used. Use it to measure the dust concentration.

  Further, as shown in FIG. 8 showing a modification of the present embodiment, delay lines 63-1 and 63-2 having a time delay of about 30 cm / 1 ns, for example, are provided, and the first laser beam 22-1 and the second laser beam 22-1 are provided. First, the NO ASE due to fluorescence may be measured using the laser beam 22-2, and then the dust concentration may be measured at different timings. The delay lines 63-1 and 63-2 have the choppers 62-1 and 62-2, respectively.

Next, in Example 4, a gas component measuring device in another pipe of the present invention will be described with reference to the drawings.
FIG. 9 is a schematic diagram of a gas component measuring device in piping according to the fourth embodiment. As shown in FIG. 9, the gas component measuring device 10 </ b> C in the pipe according to the present embodiment uses the basic laser light 22 in addition to the fluorescence detection unit 51 shown in FIG. 1, and the alkali metal present in the gas. A metal component detector 71 for measuring the plasma light 70 emitted from the component is provided.
In the present embodiment, the basic laser light 22 having a wavelength of 1064 nm from the laser device 21 is irradiated to the metal component in the exhaust gas, and the plasma light 70 generated at this time is measured by the metal component detection unit 71.

  Thereby, after measuring the ASE of NO due to fluorescence, the metal oxides (Na, K, Li, Ca, Mg oxides, etc.) contained in the exhaust gas are measured with a time delay. As a result, the metal component concentration in the exhaust gas may be detected and a response may be made as necessary. Thus, since the discharge | release amount of a metal component can be grasped | ascertained, it can utilize as data regarding plant maintenance. For example, since Na and K components cause slugging and fouling, they can be data for prediction.

Next, in Example 5, a gas component measuring device in another pipe of the present invention will be described with reference to the drawings.
FIG. 10 is a schematic diagram of a gas component measuring device in piping according to the fifth embodiment. As shown in FIG. 10, the gas component measuring device 10 </ b> D in the pipe according to the present embodiment is a measuring unit including the flue 15 a which is a long pipe in the device shown in FIG. 1, and is long. the flow direction in the same direction of the exhaust gas to be measured in the flue 15a, irradiating the combined laser beam 22-3, for each measurement position of each zone S ₁ to S _n of the predetermined intervals along the pipe 81, the The focus of the single fluorescence detector 51A is sequentially adjusted to detect the fluorescence (HC) 50B derived from the hydrocarbon.
In FIG. 10, reference numerals 15b and 15c denote quartz windows, 81 denotes a dichroic mirror that reflects light (ASE 14) having a specific wavelength and transmits light having other wavelengths (fluorescence 50), and 82 denotes received light. Among these, the filter cuts a predetermined wavelength.
In addition, the measurement of ASE14 is measured by the photodetector 26 as described above.

As the first fluorescence detecting section 51A, for example, using the ICCD camera, focused upon receiving each zone S ₁ to S _n, a combined laser beam 22-3 pulsed laser (e.g., 10 to 500) Is reached, the fluorescence intensity is sequentially measured for each zone by the ICCD camera. Sequentially perform measurement for each zone S ₁ to S _n, calculates the sum of the intensities to determine the average density.

Here, unlike ASE, fluorescence is light having no directivity (light that oscillates isotropically). Therefore, fluorescence is measured in each zone, the intensity is integrated, and an average is obtained. This makes it possible to check the concentration of hydrocarbon in the long pipe.
Here, the long pipe in the present invention refers to a pipe having (pipe length / pipe diameter)> 10. In the case of a pipe in various plants of industrial equipment, a pipe having a length of at least 5 m is generally shown.
Then, measured at least several places in each zone S ₁ to S _n, so obtaining the average, it is possible to more accurately grasp the exhaust gas state.

In addition, two types of filters 82 (filters that transmit light having a wavelength of 350 to 400 nm and filters that transmit light having a wavelength of 250 or less) are prepared. First, fluorescence (HC) is obtained using a filter that transmits light of 350 to 400 nm. ) Measure the hydrocarbon from 50B. Thereafter, the filter can be replaced with a filter that transmits light having a wavelength of 250 nm or less, the NO concentration is measured from the fluorescence (NO) 50A, and the temperature can be obtained in the same manner as described above.
Temperature information and the temperature distribution information of the pipe in each zone S ₁ to S _n, it is possible to determine both the average temperature information.
As shown in FIG. 6, measurement of NO concentration fluorescence (NO) 50A requires measurement of J = 16.5, measurement of J = 4.5, and two wavelength insertions. Become.

As a result, the hydrocarbon concentration and temperature in the exhaust gas can be measured not in the pinpoint but in the long flue 15a as in the second embodiment, and the state of the exhaust gas can be measured more.
Note that the temperature can also be measured by measuring the CO concentration instead of NO. In this case, the spectroscopic means may be one that can transmit only a wavelength of 107 to 108 nm. As this optical means, a spectroscope for vacuum ultraviolet can be exemplified, and since the measurement wavelength region is the vacuum ultraviolet region, it is necessary to be a measurement field without oxygen. Here, in order to measure the CO concentration, the filter is switched and measured.

Next, in Example 6, a gas component measuring device in another pipe of the present invention will be described with reference to the drawings.
FIG. 11 is a schematic diagram of a gas component measuring device in piping according to the sixth embodiment. As shown in FIG. 11, a gas component measuring apparatus 10E in the piping according to the present embodiment, in the apparatus shown in FIG. 10, further, for each zone S ₁ to S _n of the predetermined intervals along the flue 15a A plurality of light detection ports 83-1 to 83-n for measuring fluorescence are provided at the measurement position, and the NO concentration is detected by the second fluorescence detection unit 51 B having the spectroscope 51 b from the fluorescence (NO) 50 A. In FIG. 11, reference numeral 84 denotes an optical fiber.
In this embodiment, by providing a plurality of optical detection ports 83-1~83-n for measuring the fluorescence measurement position of each zone S ₁ to S _n of the predetermined intervals along the flue 15a, in each zone The fluorescence (NO) 50A is detected at each port, and the fluorescence intensity is measured by the second fluorescence detector 51B having the spectroscope 51b. In the present embodiment, since the spectroscope 51b is provided, the measurement of J = 16.5, the measurement of J = 4.5 and the two-time wavelength subtraction shown in FIG. .
Therefore, the fluorescence (HC) 50B derived from the hydrocarbon can be measured by the first fluorescence detection unit 50A, and the fluorescence (NO) 50A derived from NO can be measured by the second fluorescence detection unit 50B.

Next, in Example 7, another gas component measuring apparatus of the present invention will be described with reference to the drawings.
FIG. 12 is a schematic diagram of a gas component measuring device in piping according to the seventh embodiment. As shown in FIG. 12, the gas component measuring device 10F in the pipe according to the present embodiment is a zone S _{1 having} a predetermined interval along the flue 15a in the gas component measuring device 10E in the pipe shown in the sixth embodiment. by providing a plurality of optical detection ports 83-1~83-n for measuring the fluorescence measurement position of each to S _n, Mie scattered light 60 in each zone respectively detected by the light detection port, Me emitted by dust The dust concentration is obtained by measuring the intensity of the detection signal of the scattered light 60 by the dust detector 61.
Therefore, the first fluorescence detection unit 51A can measure the fluorescence (HC) 50B derived from hydrocarbon and the fluorescence (NO) 50A derived from NO, and the soot detection unit 61 can measure the soot concentration.

Next, in Example 8, a gas component measuring device in another pipe of the present invention will be described with reference to the drawings.
FIG. 13 is a schematic diagram of a gas component measuring apparatus according to the eighth embodiment. As shown in FIG. 13, measuring device 10G of the gas component analyzer in the piping in the piping according to the present embodiment, the gas component measuring apparatus 10E in the piping shown in FIG. 11, further, in each zone S ₁ to S _n The Mie scattered light 60 is detected by the respective light detection ports 83-1 to 83 -n, and the Mie scattered light 60 generated by the dust is measured by the dust detection unit 61 to measure the intensity of the detection signal, thereby obtaining the dust concentration. I have to.
Therefore, the first fluorescence detection unit 51A measures the hydrocarbon-derived fluorescence (HC) 50B, the second fluorescence detection unit 51B measures the NO-derived fluorescence (NO) 50A, and the dust detection unit 61 further measures the fluorescence. The dust concentration can be measured.

  In this embodiment, the NO-derived fluorescence 50A is measured. However, when the soot concentration is low, the soot concentration can be measured from the Mie scattered light 60 in the second fluorescence detection unit 51B. However, since the intensity of the Mie scattered light is generally strong, it is preferable to detect the NO-derived fluorescence (NO) 50A and the Mie scattered light 60 with separate independent detectors.

Next, a gas component measuring device in another pipe of the present invention in Example 9 will be described with reference to the drawings.
FIG. 14 is a schematic diagram of a gas component measuring device in piping according to the ninth embodiment. As shown in FIG. 14, the gas component measuring device 10H in the pipe according to the present embodiment further includes a line for irradiating the basic laser beam (1064 nm) 22 in the gas component measuring device 10G in the pipe shown in FIG. a mobile condensing lens 90 is moved on the movement rails 91, focusing of the fundamental laser light (1064 nm) 22 for each zone S ₁ to S _n, so that each zone S ₁ ~ a plasma light 70 generated measured by S _n, a the optical fiber 85 it is sent to the metallic component detector 71, wherein the laser breaking down method, a metal component contained in the exhaust gas (Na, K, Li, Ca, Mg oxide and the like ) Is detected.

  Using the long flue 15a having the gas component measuring device in the pipe as described above, a part of the exhaust gas from the existing exhaust flue is bypassed into the long flue 15a, and the long flue 15a In, exhaust gas components can be efficiently measured by measuring fluorescence, ASE, and plasma light.

  As described above, according to the gas component measuring device in the pipe according to the present invention, the gas component can be measured by the emission analysis. Therefore, when the pipe length of the measurement target in the industrial facility is long, the gas absorption amount is Even when it is large, the concentration of gas components in the entire pipe can be analyzed, and at the same time, components such as oil (hydrocarbon), dust, alkali metals, etc. in the gas can be measured. Can be provided.

10A-10H Gas component measuring device in piping 11 Gas to be measured 14 ASE
DESCRIPTION OF SYMBOLS 21 Laser apparatus 22 Basic laser light 22-1 1st laser light 22-2 2nd laser light 23 1st wavelength conversion part 24 2nd wavelength conversion part 25 Gas measurement part 26 Photodetector 50 Fluorescence 50A Fluorescence ( NO)
50B fluorescence (HC)
51 Fluorescence detection part 51A 1st fluorescence detection part 51B 2nd fluorescence detection part 60 Mie scattered light 61 Dust detection part

Claims (9)

A first wavelength converter that converts the wavelength of the basic laser beam oscillated from the laser device into a first laser beam;
A second wavelength converter that converts the wavelength of the basic laser light into a second laser light;
A gas measuring unit 25 for introducing the first and second laser beams and irradiating the gas component in the gas to be measured;
When excited molecules excited to a high level by the first laser light and the second laser light to be irradiated are electronically relaxed to a low level, spontaneously amplified light generated when the level is lowered ( A photodetector that measures Amplified Spontaneous Emission (ASE);
A gas component measuring device in a pipe, comprising: a fluorescence detecting unit that measures fluorescence generated by hydrocarbon derived from oil present in the gas to be measured. In claim 1,
A gas component measuring device in a pipe which measures the gas temperature of a gas to be measured from the relative intensity of fluorescence emitted from the gas component of the gas to be measured. In claim 1 or 2,
A gas component in a pipe having a dust detection unit for measuring Mie scattered light emitted by dust present in the gas to be measured using either the first laser light or the second laser light Measuring device. In any one of Claims 1 thru | or 3,
A gas component measuring device in a pipe, comprising a metal component detecting unit that measures plasma light emitted from a metal component present in a gas to be measured using the laser beam. In claim 1,
The gas measuring unit is a measuring unit comprising a long pipe;
Irradiate the laser beam in the same direction as the flow direction of the exhaust gas measured in the long pipe,
A gas component measuring device in a pipe, wherein the fluorescence derived from the hydrocarbon is detected by sequentially adjusting the focus of the fluorescence detector for each measurement position of each zone at a predetermined interval along the pipe. In claim 5,
The gas measuring unit is a measuring unit comprising a long pipe;
Irradiate the laser beam in the same direction as the flow direction of the exhaust gas measured in the long pipe,
In the piping, wherein a plurality of light detection ports for measuring fluorescence are provided at measurement positions for each zone at a predetermined interval along the piping, and the NO concentration is detected by a second fluorescence detector having a spectroscope from the fluorescence. Gas component measuring device. In claim 5 or 6,
The gas measuring unit is a measuring unit comprising a long pipe;
Irradiate the laser beam in the same direction as the flow direction of the exhaust gas measured in the long pipe,
Gas component measurement in piping characterized by providing a plurality of light detection ports for measuring Mie scattered light emitted by soot dust at measurement positions for each zone at a predetermined interval along the pipe to detect Mie scattered light derived from soot dust apparatus. In claim 6 or 7,
A gas component measuring device in a pipe, wherein a laser component is sequentially focused at a measurement position for each zone at a predetermined interval along the pipe, and an alkali metal component is detected by a metal component detector from generated plasma light. .   A flue for measuring an exhaust gas component, comprising the gas component measurement device in the pipe according to any one of claims 5 to 8.

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