JP5190627B2 - Vacuum exhaust system safety structure - Google Patents

Description

  The present invention relates to a vacuum pump such as a turbo molecular pump having a rotor that rotates at a high speed, and more particularly to a vacuum exhaust apparatus in which a small vacuum pump is installed on a common base plate.

  FIG. 5 shows a longitudinal sectional view of an example of a conventional small vacuum pump (turbo molecular pump A), and FIG. 6 shows a side view of an example of a vacuum exhaust apparatus S incorporating the turbo molecular pump A.

  In the turbo molecular pump A shown in FIG. 5, a is a rotor having a plurality of moving blade stages, b is a stator having a plurality of stationary blade stages, and the stator b is an inner peripheral portion in a pump case c. The rotor a is pivotally supported in the stator b so as to be rotatable at high speed.

  In FIG. 6, the turbo molecular pump A is installed and fixed to a common base plate e via a mounting base d. The common base plate e is fixed to the floor via a vibration-proof rubber e1 fixed to a corner of the lower surface. It is installed on the surface.

  Furthermore, a turbo controller f for controlling the turbo molecular pump A is installed on the common base plate e.

  The vacuum exhaust device S sucks exhaust in the direction of arrow X, discharges exhaust in the direction of arrow Y, and evacuates from the vacuum tank of the exhaust source connected to the upper part of the turbo molecular pump A. Do.

  If the rotor a is damaged for some reason during the operation of the turbo molecular pump A, the fragments of the rotor a collide with the stator b with a large inertial force and give a large rotational torque to the stator b. . Further, in a turbo molecular pump having a rotor that rotates at a high speed, there is a risk that the broken pieces of the rotor scattered as a broken piece will break through the pump case and jump out.

  In order to prevent such a risk, the applicant previously described an inner casing provided in a cylindrical shape so as to be extrapolated to the outer peripheral portion of the stationary blade stage of the turbo molecular pump in the turbo molecular pump and / or the composite molecular pump. A safety structure of a molecular pump was proposed in which a cylindrical space portion that can be sealed is formed between the outer casing and the outer casing, and the cylindrical space portion is filled with a buffer material having fluidity (Patent Document 1). reference.).

JP 2004-263628 A

  The structure described in Patent Document 1 is formed in a double structure and is filled with a cushioning material therebetween, so that the spike-like rotational torque generated when the rotor is broken during operation is reduced, and Although it has the effect of not causing great damage, there is a problem that the manufacturing cost becomes expensive because the casing structure becomes complicated.

  On the other hand, in the small vacuum evacuation device S as shown in FIG. 6, when the rotor a breaks during the operation of the vacuum pump A, the rotor a gives shock torque to the stator b and is transmitted to the stator b. The shocking torque may cause a serious accident such as the vacuum exhaust device S toppling over or dropping off together with the lower common base plate e.

  The present invention copes with such problems, and reduces the torque generated when the pump rotor is broken to reduce the transmission torque to the entire small vacuum evacuation device, and the device is brilliant such that the entire vacuum evacuation device falls over. The purpose is to prevent accidents.

In order to achieve the above object, the present invention provides a vacuum evacuation apparatus comprising a vacuum pump having a rotor and a stator in a pump case of a vacuum pump, and the pump case standing on a mounting base. The pump case is formed to be slidably rotatable with respect to the mounting base, and a torque limiter portion is interposed between the pump case and the mounting base , and the torque limiter portion is a bottom surface of the pump case. A disc-shaped brake disk fixed to the upper part and a brake shoe installed on the upper part of the mounting base. The brake shoe holds the pump case on the mounting base by sandwiching the brake disk from both upper and lower surfaces. In addition, when a rotational torque exceeding a set value is generated in the pump case, the pump case The overcomes the static friction resistance force between the brake disc and, formed in the structure to initiate the sliding rotation on said mounting base.

  As an effect of the present invention, it is possible to provide a safe structure for a vacuum exhaust apparatus that does not cause a serious accident in which the entire vacuum exhaust apparatus falls or falls even if the rotor breaks during operation of the vacuum pump.

  Examples of the best mode for carrying out the present invention are shown below.

  A first embodiment of the present invention will be described with reference to FIGS.

  FIG. 1 is a side view of an evacuation apparatus 1 according to the present invention, and a part thereof is shown in cross section.

  Reference numeral 2a denotes a pump case of the vacuum pump 2, and the pump case 2a includes a rotor having moving blades that rotate at high speed and a stator (none of which is shown) outside the rotor.

  The pump case 2a is pivotally supported by the mounting base 4 through a torque limiter portion 3 described later so as to be slidable and rotatable.

  That is, the torque limiter 3 includes a disc-shaped brake disc 3a, an annular upper brake shoe 3b that contacts the upper surface of the outer peripheral portion of the brake disc 3a, and a cylindrical lower portion that contacts the lower surface of the outer peripheral portion of the brake disc 3a. The brake shoe 3c includes a bolt 3d for tightening the upper brake shoe 3b and the lower brake shoe 3c so as to sandwich the brake disc 3a with a predetermined force.

  Here, the brake disc 3a is fixed to the lower surface of the pump case 2a with bolts 3e.

  The upper brake shoe 3b and the lower brake shoe 3c are fixed to the upper end portion of the mounting base 4 by the bolt 3d via a disc-shaped flange 4a.

  Further, a round pin 4b is erected at the center of the flange 4a, and the upper portion of the pin 4b is inserted through the center of the brake disc 3a. The brake disc 3a is centered on the pin 4b. It can be rotated.

  The upper part of the pump case 2a is connected to an exhaust source pipe 6 via a fuse joint 5 described later.

  That is, the fuse joint 5 includes a circular first flange 5a fixed to the lower end portion of the pipe 6, a circular second flange 5b fixed to the upper end portion of the suction port of the pump case 2a, and the first, first A gastight holding packing 5c interposed between the two flanges 5a and 5b is connected to a pair of upper and lower brackets 5d and 5e for connecting the first and second flanges 5a and 5b, and the upper and lower brackets 5d and 5e. The fuse bolt 5f is engaged with the first and second flanges 5a and 5b at a plurality of locations in the circumferential direction.

  Here, the upper bracket 5d includes a columnar portion 5d1, a locking projection 5d2 projecting laterally from the columnar portion 5d1, and an insertion hole 5d3 formed in the columnar portion 5d1 through which the fuse bolt 5f is inserted. The tip of the locking projection 5d2 is locked to the upper surface of the first flange 5a.

  The lower bracket 5e also includes a columnar portion 5e1, a locking projection 5e2 projecting laterally from the columnar portion 5e1, and a screw hole 5e3 formed in the columnar portion 5e2 and into which the fuse bolt 5f is screwed. The front end of the locking projection 5e2 is locked to the lower surface of the second flange 5b.

  Further, the fuse bolt 5f has an intermediate portion formed as a narrow constricted portion 5f1, the fuse bolt 5f is inserted into the insertion hole 5d3 of the upper bracket 5d, and the tip end side of the bolt 5f is screwed into the lower bracket 5e. When threaded into the hole 5e3, the narrow constricted portion 5f1 is positioned in the gap between the brackets 5d and 5e.

  Here, when a shearing force of a set value or more is applied to the fuse bolt 5f, the fuse bolt 5f is formed to be cut at the constricted portion 5f1.

  The set value of the shearing force is a predicted calculation of the rotational torque value generated in the pump case when the rotor of the vacuum pump in operation is damaged and the fragments of the rotor collide with the stator in the pump case, This calculated value is used as a set value.

  Next, the arrangement, operation, and effects of the vacuum evacuation device 1 of this embodiment will be described.

  As shown in FIG. 6, the small vacuum evacuation apparatus is often used in an arrangement in which a small vacuum pump and a controller are installed on a common base plate.

  However, when the internal rotor is damaged for some reason during the operation of the vacuum pump 2, the fragments of the rotor have a large inertial force and collide with the stator and give a large rotational torque to the stator.

  This rotational torque is immediately transmitted to the pump case 2a, and the pump case 2a tries to rotate on the mounting base 4. However, the magnitude of the rotational torque can be controlled by adjusting the static frictional force between the brake shoe and the brake disc, that is, the rotational torque (= generated torque) generated when the rotor fragments collide with the stator can be controlled. .

  If the rotational torque exceeds a preset value, the fuse bolt 5f included in the fuse joint 5 is cut and the first flange 5a on the exhaust source 6 side and the second flange on the pump case 2a side are cut. The connection with 5b is cut off, and in the torque limiter portion 3, the brake disc 3a overcomes the static frictional resistance force between the upper and lower brake shoes 3b and 3c sandwiching the brake disc 3a and starts sliding rotation.

  That is, the kinetic energy is converted into thermal energy by the main body portion of the vacuum pump 2 slidingly rotating on the mounting base 4, but the static friction force between the brake shoe and the brake disc is optimally adjusted. The rotational torque can be extinguished in a short time, and the rotation can be set to, for example, about ¼ circle to ½ circle.

  In addition, since the torque generated when the rotor is broken is absorbed by the torque limiter unit 3, the transmitted torque of the entire vacuum evacuation device 1 is reduced and the entire vacuum evacuation device 1 is overturned. It is possible to prevent a serious accident.

  In the structure of the torque limiter portion 3, molybdenum disulfide 3f is applied to the contact surfaces of the brake disc 3a and the upper and lower brake shoes 3b, 3c as shown in FIG. The friction coefficient of the contact surface may be reduced by interposing a ring 3g of Teflon (registered trademark) between the brake disc 3a and the upper and lower brake shoes 3b, 3c as shown in FIG. You may make it aim at reduction.

  The fuse joint 5 is connected to the exhaust source pipe 6, but the fuse joint 5 can function effectively when the pipe 6 is rigidly connected to the exhaust source side device. When 6 is flexibly connected to the apparatus on the exhaust source side, it can be omitted.

  A second embodiment of the present invention will be described with reference to FIG.

  In the present embodiment, the torque limiter portion 3 'is used in place of the torque limiter portion 3 in the first embodiment, and the brake disc 3a is composed of the upper brake shoe 3b and the lower brake shoe 3c1 by utilizing the elastic force of the coil spring 3h. This is different from the first embodiment in that a pressure-bonding force for sandwiching the sheet is obtained.

  That is, the lower brake shoe 3c1 is formed in an annular shape and is rotatably supported on the shoulder portion of the cylindrical brake shoe holder 3c2.

  The brake shoe 3c1 support surface of the brake shoe holder 3c2 is provided with a plurality of cylindrical round holes 3i, and the coil springs 3h are inserted into the round holes 3i so as to expand and contract. The spring 3h has a head protruding above the round hole 3i.

  Thus, the brake shoe 3c1 is placed on the coil spring 3h, the brake disk 3a is interposed between the brake shoe 3c1 and the upper brake shoe 3b, and the brake shoes 3b and 3c1 are fastened by the bolt 3d.

  In this case, the elastic force of the coil spring 3h can be adjusted by adjusting the tightening stroke of the bolt 3d.

  That is, in the evacuation apparatus according to the second embodiment, the coil spring 3h is used for the torque limiter portion 3 ', so that the adjustment range of the stroke by the bolt 3d is widened, and the force for holding the brake disc 3a can be finely adjusted. The effect becomes.

  Alternatively, by appropriately selecting the material, wire diameter, number of turns, etc. of the coil spring 3h, the spring constant of the coil spring can be changed to adjust the elasticity without depending on the adjustment of the tightening stroke of the bolt 3d. .

  That is, in the evacuation apparatus according to the second embodiment, since the coil spring 3h is used for the torque limiter portion 3 ', the elastic force can be adjusted only by selecting an appropriate coil spring. It is also possible to eliminate the adjustment.

  In the second embodiment, the elastic force of the coil spring is used to obtain a crimping force for sandwiching the brake shoe and the brake disc. However, the same action is replaced with the coil spring, and the repulsive force and attraction of the permanent magnet are used. It is also possible to obtain a crimping force by using force.

  The present invention is used in a vacuum exhaust apparatus using a small vacuum pump.

It is a side view of the vacuum exhaust apparatus of Example 1. It is a partial cross section figure of the torque limiter part of a vacuum exhaust apparatus same as the above. It is a partial cross section figure of the other torque limiter part of an evacuation device same as the above. It is a partial cross section figure of the torque limiter part of the vacuum exhaust apparatus of Example 2. FIG. It is a longitudinal cross-sectional view of an example of the conventional turbo-molecular pump. It is a side view of an example of the conventional vacuum exhaust apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Vacuum exhaust apparatus 2 Vacuum pump 2a Pump case 3, 3 'Torque limiter part 3a Brake disk 3b, 3c, 3c1 Brake shoe 3d Tightening bolt 3f Molybdenum sulfide 3g Teflon (registered trademark) sheet 4 Mounting base 5 Fuse joint

Claims (5)

In a vacuum exhaust apparatus comprising a vacuum pump comprising a rotor and a stator in a pump case of a vacuum pump, and the pump case being erected on a mounting base, the pump case is connected to the mounting base The torque limiter portion is formed between the pump case and the mounting base so as to be slidable and rotatable. The torque limiter portion is a disc-shaped brake disk fixed to the bottom surface of the pump case. The brake shoe is installed at the upper part of the mounting base, and the brake shoe holds the pump case on both the upper and lower surfaces of the brake disc and holds the pump case on the mounting base. When rotational torque is generated, the pump case is placed between the brake shoe and the brake disc. Overcomes the locking frictional resistance, safety structure of the evacuation device formed in a structure to start sliding rotation on said mounting base. The set value of the rotational torque is equal to or less than the rotational torque value generated in the pump case when the rotor of the vacuum pump in operation is broken and the fragments of the rotor collide with the stator in the pump case. The safety structure of the vacuum exhaust apparatus according to claim 1 , which is set to be The brake shoe is composed of upper and lower annular bodies having a disk shape or a cylindrical shape. The brake disc is disposed between the upper and lower annular bodies, and the upper and lower annular bodies are tightened with a plurality of tightening bolts. The safety structure of the vacuum exhaust apparatus according to claim 1 or 2 , wherein the brake disk is sandwiched and a static friction force between the brake shoe and the brake disk is adjusted. Between mutually abutting surfaces of the brake shoes and the brake disc, Teflon according to any one of (R) sheet or claim 1 is interposed a friction reducing member molybdenum sulfide powder and the like to claim 3 Vacuum exhaust system safety structure.   2. A fuse joint that operates so that the pipe is cut up and down when receiving a rotational torque greater than the set value is interposed in a pipe portion of the pipe connected to an exhaust source above the pump case. The safety structure of the vacuum exhaust apparatus as described in 1.

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