JP5179606B2 - Mobile component collection analyzer - Google Patents

Description

  The present invention relates to a mobile component collection analyzer.

  In general, modern foreign component analysis equipment such as FT-IR, ToF-SIMS, and SEM are limited in the size of a sample that can be analyzed. In most cases, when it is necessary to analyze foreign matter existing in products of several tens of centimeters or more, after cutting or separating only the part of the product to be analyzed from the entire product, only the foreign matter is separated or eluted or wiped off from the product. .

  Such a method can damage, lose or denature the product and the sample, and requires considerable know-how and highly skilled technicians. Further, analysis methods such as ToF-SIMS and SEM that require high vacuum cannot analyze (quasi) volatile samples.

  In order to solve such a problem, a method of vaporizing a specific part of a sample with a laser may be adopted. The substance vaporized by the laser is transferred to an analysis device such as a mass analyzer in a gaseous state and analyzed.

In general, the laser irradiation apparatus and the sample are located together in a fixed analysis chamber that is shielded from the outside. Therefore, in order to analyze a printed circuit board larger than the size of the analysis chamber, it is necessary to cut the substrate into a size that can be put into the analysis chamber, so it is possible to analyze without damaging the substrate during production or inspection. Can not.
On the other hand, if the size of the analysis chamber becomes too large, the concentration of the gas vaporized inside the analysis chamber decreases and the analysis sensitivity decreases.

  In addition, in order to analyze the bottom surface inside a via hole with a size of several to several hundreds of micrometers or the side surface inside the via hole, the laser must be accurately irradiated to the point to be analyzed inside the micro via, and the incident angle is adjusted. Must also be possible.

  However, in the case of a general vaporizer, it is difficult to accurately aim the laser because the optical axis of the optical device used for sample observation and the optical axis of the laser irradiation device do not coincide with each other. It is difficult to adjust the optical axis, and it is difficult to analyze the components located in the concealment structure such as the bottom corner of the via hole or the wall surface of the via hole.

  Therefore, the present invention is to solve such a problem, and the object thereof is portable and movable, and can be applied regardless of the size of the sample, and not only the surface of the sample but also the via hole. It is an object of the present invention to provide a mobile component collection and analysis apparatus capable of effectively collecting and analyzing components on the bottom surface of the plate.

  In order to achieve the above object, the present invention isolates a sample from the environment, collects a vaporized sample, and is installed in the collecting unit so that tilt and rotation can be applied, and a laser is applied to an observation point. A dichroic objective lens unit for irradiating a beam; a laser light source unit connected to the dichroic objective lens unit for generating a laser beam necessary for vaporizing a sample; and the dichroic objective lens unit A camera unit that acquires an optical image of the observation point of the sample, and controls the operation of the collection unit, the laser light source unit, and the camera unit to observe the sample, adjust the position and angle of the laser beam, and Provided is a mobile component collection and analysis device including a control unit that controls to perform laser irradiation.

Further, the collection unit of the present invention includes a small container having an open surface, a gimbal for rotating the dichroic objective lens unit to change the angle of optical observation and laser irradiation, and the dichroic objective lens unit The xyz-linear moving device that changes the position of optical observation and laser irradiation by linearly moving the X-axis coordinate, a gas collecting tube that collects components vaporized by the laser beam in close proximity, and the small container for external gas Attached to the opening of the small container and the phage gas nozzle that discharges the inert gas so that the vaporized components can effectively flow into the gas collection tube, and the sealing between the sample and the small container It is characterized by including a sealing device for raising and a phage gas discharge port for discharging a part of the phage gas to the outside of the small container to prevent an excessive increase in pressure.
The small container of the present invention is characterized by being made of a transparent material containing tempered glass or polycarbonate.

  Further, the gimbal of the present invention is attached between an upper end portion of the small container and the dichroic objective lens unit, and an optical axis can be adjusted with reference to a central axis of the small container. To do.

The gas collecting tube of the present invention may be connected to the container via the upper end of the small container, and the inside of the tube may be coated with at least one of glass, silica, quartz, and Teflon. .
The gas collecting tube of the present invention includes a hole that allows the laser beam to enter and exit.
The xyz-linear mover of the present invention is attached near the center of the small container and moves the gimbal and the gas collecting tube.

  The present invention also provides a first flow rate controller for adjusting the amount of phage gas flowing into the phage gas nozzle, and a second flow rate control for adjusting the amount of phage gas discharged through the phage gas outlet. And a vessel.

  The dichroic objective lens unit of the present invention includes an objective lens for focusing a laser beam and enlarging an observation image, a laser beam incident on a sample, and an image of the sample input from the sample to the camera. Two dichroic mirrors that pass through the same optical path in the objective lens, and two linking between the dichroic objective lens unit, the laser light source unit, and the camera unit. And a pair of couplers to which optical fibers are respectively attached.

Further, the control unit of the present invention controls a motion controller that controls the collection unit and the dichroic objective lens unit, a laser controller that controls the laser light source unit, and the camera unit. A camera controller for processing the acquired image, a temperature controller for controlling the temperature of the collection unit, a monitor for displaying image and analysis data, the drive controller, the laser controller, and the camera controller And a central controller for controlling the temperature controller.
The present invention further includes an optical fiber for connecting the laser light source unit and the dichroic objective lens unit.
The present invention may further include an optical fiber that connects the camera unit and the dichroic objective lens unit.

In addition, the present invention further includes an analysis unit connected to the collection unit and analyzing the components of the sample collected and transmitted by the collection unit, and the control unit analyzes the operation and data of the analysis unit. It is characterized by including a vessel.
Further, the collection unit of the present invention includes a connection pipe that connects the collection unit and the analysis unit and moves the collected gas to the analysis unit.
The connecting pipe of the present invention is a flexible pipe, and the inside of the pipe is coated with at least one of glass, silica, quartz, and Teflon.

  The present invention further includes an adsorption unit that is connected to the collection unit and adsorbs the components of the sample collected and transmitted by the collection unit, and the control unit includes an adsorption controller that controls the operation of the adsorption unit. It is characterized by including.

In addition, the adsorption unit of the present invention includes an adsorption tube that adsorbs the sample components collected by the collection unit, a cooler that cools the temperature of the adsorption tube, and a vacuum pump that transfers a gas sample. Features.
Moreover, the said collection part of this invention connects the said collection part and the said adsorption | suction part, and includes the connection pipe which moves the collected gas to an adsorption | suction part.
The connecting pipe of the present invention is a flexible pipe, and the inside of the pipe is coated with at least one of glass, silica, quartz, and Teflon.

  According to the present invention described above, the collection unit capable of vaporizing and collecting a minute component regardless of the size of the sample, and the dichroic objective suitable for vaporizing the component located inside the fine concealment structure. The lens portion is provided, and minute trace components existing on the surface of the sample and in the via hole can be effectively collected and analyzed.

1 is a conceptual diagram of a mobile component collection analyzer according to a first embodiment of the present invention. It is a detailed block diagram of the sample collection tube of FIG. FIG. 2 is a conceptual diagram of a mobile component collection analyzer including a detailed configuration of a control unit in FIG. It is a whole block diagram of the movement type component collection analyzer based on 2nd Example of this invention. It is a figure which shows operation | movement in the 1st and 2nd Example of this invention when an analysis point exists in the inner wall of the via hole of a printed circuit board. It is a figure which shows operation | movement when there exists protrusions, such as a semiconductor package, in the sample surface of a board | substrate in the 1st and 2nd Example of this invention.

  Objects, specific advantages and novel features of the present invention will become more apparent from the following detailed description and preferred embodiments when taken in conjunction with the accompanying drawings.

  Prior to this, terms or words used in the specification and claims should not be construed in a normal and lexical sense, so that the inventor best describes the invention. Based on the principle that the concept of terms can be appropriately defined, it should be interpreted with a meaning and concept consistent with the technical idea of the present invention.

In the present invention, it is to be noted that when reference numerals are added to components in each drawing, the same components are given the same numbers as much as possible even if they are displayed on other drawings. . In the description of the present invention, when it is determined that there is a possibility that a specific description of a related known technique may unnecessarily disturb the gist of the present invention, a detailed description thereof will be omitted.
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a conceptual diagram of a mobile component collection and analysis apparatus according to a first embodiment of the present invention.

  Referring to FIG. 1, the mobile component collection and analysis apparatus according to the first embodiment of the present invention includes a collection unit 100, a dichroic objective lens unit 200, a laser light source unit 300, a camera unit 400, an analysis unit 500, and a control. Part 600 is provided.

Here, the collection unit 100 is an apparatus for isolating the sample 10 from the environment and collecting the vaporized sample 10. The collection unit 100 rotates the small container 110 opened at the bottom and the dichroic objective lens unit 200. A cymbal 120 for changing the optical observation and laser irradiation angle, and an xyz-linear mover for changing the position of the optical observation and laser irradiation by linearly moving the dichroic objective lens unit 200 on the xyz coordinates. translation system) 130, a gas collection tube 140 for collecting sample components vaporized by a laser beam, a phage gas inlet 150 for injecting phage gas as an inert gas, and a small container 110 for external gas Injected from the phage gas inlet 150 which prevents inflow into the gas and allows the vaporized components to effectively flow into the gas collection tube 140 A plurality of phage gas nozzles 160 that release phage gas as an active gas, a sealer 170 that is attached to the opening at the lower end of the small container 110 to enhance the sealing between the sample 10 and the small container 110, and a part of the phage gas Is released to the outside of the small container 110 to prevent an excessive increase in pressure.
Here, the small chamber 110 preferably has a cylindrical shape with an opening at the lower end and a diameter of less than 20 cm, but may take other shapes.

  The small container 110 is partially or entirely made of a transparent material such as tempered glass or polycarbonate so that the inside can be seen. Further, the small container 110 preferably uses a heavy metal material in the lower part in order to increase the stability by placing the weight center in the lower part.

The gimbal 120 of the collection unit 100 is installed at the uppermost end of the small container 110. By attaching the dichroic objective lens unit 200 to the small container 110 via the gimbal 120, the angle between the dichroic objective lens unit 200 and the central axis of the small container 110 can be adjusted. .
For such angle adjustment, other mechanical devices such as bellows can be used without limitation in addition to the gimbal 120.
Such a gimbal 120 may be moved manually or by a driving device such as a motor.

  Next, the xyz-linear mover 130 of the collection unit 100 is for moving the dichroic objective lens unit 200 linearly on the xyz coordinates to change the position of optical observation and laser irradiation. By attaching between the upper end portion and the lower end portion of 110, a portion attached to the upper end portion of the small container 110, for example, the gimbal 120, the dichroic objective lens portion 200, the gas collection tube 140, etc., is moved to a desired position. Move at the same time.

  Such an xyz-linear mover 130 may be moved manually or by a drive device such as a motor, and preferably has a resolution in micrometer units.

The gas collection tube 140 of the collection unit 100 is for collecting the components of the sample 10 vaporized by the laser beam oscillated from the laser light source 310 of the laser light source unit 300, preferably stainless steel having an inner diameter of 10 mm or less. This is a metal tube.
The gas collection tube 140 is connected to the container through the upper end of the small container 110 and can be moved by the xyz-linear mover 130.

  In addition, such a gas collection tube 140 has a temperature in Celsius through contact with a heat generating device or by passing a current through the collection tube 140 itself in order to prevent the vaporized sample 10 from being adsorbed on the surface of the tube. It is preferable to heat to 100 degrees or more and coat the inside of the tube with glass, silica, quartz, Teflon or the like.

In addition, such a gas collecting tube 140 can be pushed or pulled out in the longitudinal direction so that the end portion can be brought very close to or close to the analysis position of the sample 10 when necessary. Preferably it is possible.
For this purpose, a method of inserting such a gas collection tube 140 into the small container 110 through an O-ring or the like can be used.

  In order to increase the collection efficiency and the analysis efficiency, FIG. 2 shows that the laser collection and optical observation are not hindered by the gas collection tube 140 even if such a gas collection tube 140 is brought very close to the sample 10. As shown, a hole 140-2 through which a laser beam and light for optical observation can pass can be formed on the side surface of the gas collection tube 140.

  A connecting tube 140-1 for transmitting the collected gas sample to the analysis unit 500 may be further attached to the gas collecting tube 140. Such a connecting pipe 140-1 is a flexible pipe having an inner diameter of 5 mm or less that is excellent in chemical resistance and heat resistance, and is preferably a metal flexible pipe such as stainless steel or a pipe made of a heat resistant polymer material such as Teflon. . In order to prevent gas adsorption and reaction, the inside of the tube can be coated with glass, quartz, Teflon, etc., and the outside of the tube is heated with a hot wire or heated by direct current flowing through a metal tube be able to.

Meanwhile, the phage gas nozzle 160 prevents the external gas from flowing into the small container 110 and releases the phage gas as an inert gas so that vaporized components can effectively flow into the gas collection tube 140. And symmetrically disposed at the lower end of the inner wall of the small container 110.
Such a phage gas nozzle 160 is directed downward so that the flow of the phage gas can move upward through the surface of the sample.

  As the phage gas, an inert gas such as high-purity nitrogen or argon can be used. Such phage gas is supplied from the phage gas nozzle 160 in the small container 110 at a flow rate controlled through a valve or flow controller attached to the phage gas inlet 150.

  Next, the sealing device 170 of the collecting unit 100 is attached to the opening at the lower end of the small container 110, and is for enhancing the sealing between the sample 10 and the small container 110, and is a dense elastic body such as synthetic rubber. The sample container 110 is fixed to the sample 10 to minimize the inflow of air from the outside and the outflow of the vaporized sample from the inside.

The phage gas discharge port 180 of the collection unit 100 is disposed at the upper end of the collection unit 100 so that the portion of the sample that has vaporized and phage gas that has not flowed into the gas collection tube 140 is discharged to the outside. Thus, the internal pressure of the collection unit 100 can be maintained constant.
A valve or a flow controller may be further attached to the phage gas outlet 180 so that the discharge flow rate can be adjusted.

  On the other hand, the dichroic objective lens unit 200 is a device for accurately irradiating a specific position optically observed with a laser beam, and is an objective for focusing the laser beam and enlarging an observation image. A dichroic mirror that allows the lens 210, the laser beam incident on the sample 10, and the optical image of the sample 10 input from the sample to the camera unit 400 to pass through the same path of the objective lens 210. 220, a coupler 230 to which two optical fibers 330 and 440 for connecting the dichroic objective lens unit 200 to the laser light source unit 300 and the camera unit 400 are respectively attached, and an illuminator that supplies illumination necessary for optical observation 240.

The objective lens 210 of the dichroic objective lens unit 200 can be manually operated and includes a driving device such as a motor. Therefore, the focal length, the magnification, and the like can be adjusted remotely.
The illuminator 240 of the dichroic objective lens unit 200 is preferably LED illumination attached to the objective lens 210 in a ring shape.

  On the other hand, the laser light source unit 300 generates a laser beam necessary for vaporizing the sample 10, and includes a laser light source 310 and a coupler 320, and further includes a flexible optical fiber 330. The chromaticity objective lens unit 200 is provided.

The camera unit 400 is used to obtain an optical image of a specific part of a sample, and includes a camera 410, an eye lens 420, a coupler 430, and an optical fiber 440.
The analysis unit 500 analyzes the components of the sample that are vaporized and transmitted by the collection unit 100.
The control unit 600 controls related portions so that sample observation, laser beam irradiation, component analysis process, and the like are performed as desired.

Referring to FIG. 3, the controller 600 includes a laser controller 610, a camera controller 620, a drive controller 630, a temperature controller 640, an analyzer controller 650, a central controller 660, and a monitor 670. Yes. Although omitted in FIG. 3, each of the controllers 610 to 660 includes the power supply device.
Hereinafter, the operation of the mobile sample collection and analysis apparatus according to the first embodiment of the present invention configured as described above will be considered.

  First, the user adjusts the temperature of the gas collection pipe 140 and the connection pipe 140-1 through the temperature controller 640. In general, a temperature of about 100 degrees Celsius is preferred, and various temperature measuring devices such as thermocouples can be used for temperature measurement without limitation.

Next, the user moves and positions the small container 110 of the collection unit 100 to a point where analysis is desired. The user adjusts a valve or the like attached to the phage gas inlet 150 to flow an appropriate flow rate of phage gas through the phage gas nozzle 160, so that the inside of the small container 110 is filled with the phage gas and sufficiently dried. To do.
Thereafter, the user performs optical observation using the camera unit 400 while controlling the objective lens 210 and the illuminator 240 of the dichroic objective lens unit 200.

  The user observes the magnified and processed image via the camera controller 620 via the monitor 670 of the controller 600 and moves the gimbal 120 and xyz-linear mover 130 via the drive controller 630 to accurately Determine the point of observation and analysis. If necessary, the objective lens 210 is controlled via the drive controller 630 to adjust the focal length and magnification.

  Next, the laser beam is emitted from the laser light source 310 after adjusting the power, pulse width, pulse period, and the like via the laser controller 610. In general, a UV laser or an IR laser is used. The laser beam passes through the objective lens 210 of the dichroic objective lens unit 200 and strikes the position of the optically observed sample accurately.

  Thereafter, the component vaporized by the laser irradiation is induced by the phage gas flow ejected from the phage gas nozzle 160 and flows into the gas collection tube 140. The inflowing gas passes through the connecting pipe 140-1 and is transferred to the analysis unit 500. The gas collecting tube 140 and the connecting tube 140-1 are heated by a temperature controller 640, and the inner surfaces thereof are coated with glass, quartz, Teflon or the like. Therefore, the vaporized component is not easily adsorbed on the surface of the tube and can be immediately transferred to the analysis unit 500.

  Next, the analysis unit 500 analyzes the component of the reached gas. As the analysis unit 500, various chemical component analyzers capable of analyzing components in a gaseous state, such as a mass analyzer and an infrared spectroscopic analyzer, can be used, and the operation of the analysis unit 500 is controlled via the analysis controller 650. Data processed by the analysis controller 650 is displayed via the monitor 670.

The operation process may be performed by an analyst operating each of the controllers sequentially, but by inputting control parameters to the central controller 660 in advance to control each controller in a predetermined manner. It may be done automatically.
FIG. 4 is an overall configuration diagram of a mobile component collection analyzer according to the second embodiment of the present invention.

  Referring to FIG. 4, in the mobile component collection and analysis apparatus according to the second embodiment of the present invention, in the configuration according to the first embodiment of the present invention shown in FIGS. Only 650 is excluded, and the suction unit 500 ′ and the suction controller 650 ′ replace it.

  Such an adsorbing unit 500 ′ includes an adsorbing tube 510 ′ that adsorbs the sample components transferred through the connecting tube, a cooler 520 ′ that lowers the temperature of the adsorbing tube 510 ′ and increases the adsorption efficiency, and It comprises a vacuum pump 530 ′ for transferring a gas sample.

The adsorption tube 510 ′ of the adsorption unit 500 ′ is made of Pyrex glass or quartz tube, and is filled with an adsorption material 510′-1 made of fiber or porous material such as glass fiber or activated carbon. Preferably it is.
The cooler 520 ′ of the adsorption unit 500 ′ is a heat exchanger connected to a thermoelectric element such as Peltier or a refrigerant circulator.

The adsorption controller 650 ′ of the adsorption unit 500 ′ controls the cooler 520 ′ and the pump 530 ′ to control the temperature of the cooler 520 ′ and the pumping speed of the pump 530 ′.
The operation of the mobile sample collection / analysis apparatus according to the second embodiment of the present invention configured as described above is the same as the operation of the first embodiment of the present invention except for the process related to the analysis unit.

In the operation of the mobile sample collection and analysis apparatus according to the second embodiment of the present invention, the sample component that has passed through the connecting pipe is cooled by the cooler 520 ′ instead of flowing into the analyzer of the first embodiment. Into the adsorbing pipe 510 '.
Next, the sample component that has flowed in is adsorbed to the adsorbent 510′-1 through the adsorption tube 510 ′ maintained at a low temperature, and the phage gas passes through the adsorbent 510′-1.
Thereafter, when the collection by the adsorbent 510′-1 is finished, the chemical component of the sample can be analyzed by connecting to a separate analyzer such as GC-MS.

  5 and 6 show the case where the analysis point is on the inner wall of the via hole 20 of the printed circuit board or the projection 30 such as a semiconductor package is on the surface of the substrate sample in the first and second embodiments of the present invention. It is a figure which shows operation | movement of in detail.

  Referring to FIG. 5, in order to observe and vaporize the components of the side or bottom corners of the via hole 20, they must be tilted in the same direction and size with the optical observation axis and the laser beam overlapping.

  Referring to FIG. 6, in order to observe and vaporize components on the bottom surface of the via hole 20 in a situation where there is a protrusion 30 such as a semiconductor on the surface of the substrate and the entire collection unit 100 can only tilt, the collection unit 100 Even if the angle is tilted, the optical observation axis and the laser beam must be kept perpendicular to each other.

  In the present invention, such a requirement can be satisfied by tilting the dichroic objective lens unit 200 using the gimbal 120. Of course, if necessary, it is further necessary to finely adjust the position of the upper end of the small container 110 using the xyz-linear mover 130 and move the gas collection tube 140 closer to or behind the sample.

10 Sample 20 Via hole 30 Projection 100 Collection unit 110 Small container 120 Gimbal 130 Linear moving device 140 Gas collection tube 150 Phage gas injection port 160 Phage gas nozzle 170 Sealing device 180 Phage gas discharge port 200 Dichroic objective lens unit 210 Objective lens 220 Dichroic mirror 230 Coupler 240 Illuminator 300 Laser light source unit 310 Laser light source 320 Coupler 330 Optical fiber 400 Camera unit 410 Camera 420 Eye lens 430 Coupler 440 Optical fiber 500 Analyzing unit 500 ′ Adsorbing unit 510 Adsorbing tube 510′-1 Adsorbing material 520 'Cooler 530' Pump 600 Control unit 610 Laser controller 620 Camera controller 630 Drive controller 640 Temperature controller 650 Analysis controller 650 'Adsorption controller 660 Central controller 670 Monitor

Claims (19)

A collection unit for isolating the sample from the environment and collecting the vaporized sample;
A dichroic objective lens unit that is installed in the collection unit so that tilt and rotation can be applied, and that the observation point is irradiated with a laser beam;
A laser light source unit connected to the dichroic objective lens unit and generating a laser beam necessary for vaporizing the sample;
A camera unit connected to the dichroic objective lens unit to obtain an optical image of the observation point of the sample;
A control unit for controlling the operation of the collection unit, the laser light source unit, and the camera unit to perform observation of the sample, adjustment of the position and angle of the laser beam, and laser irradiation. A mobile component collection and analysis device. The collection unit
A small container with one side open,
A gimbal for rotating the dichroic objective lens unit to change the angle of optical observation and laser irradiation;
An xyz-linear mover that linearly moves the dichroic objective lens unit on xyz coordinates to change the position of optical observation and laser irradiation;
A gas collection tube for collecting the components vaporized by the laser beam close to each other;
A phage gas nozzle that prevents the inflow of external gas into the small container and releases an inert gas so that the vaporized component can effectively flow into the gas collection tube;
A seal attached to the opening of the small container to enhance the sealing between the sample and the small container;
The mobile component collection and analysis apparatus according to claim 1, further comprising a phage gas discharge port for discharging a part of the phage gas to the outside of the small container to prevent an excessive increase in pressure.   The mobile component collection analyzer according to claim 2, wherein the small container is made of a transparent material containing tempered glass or polycarbonate.   The gimbal is attached between an upper end portion of the small container and the dichroic objective lens, and an optical axis can be adjusted with reference to a central axis of the small container. The mobile component collection and analysis apparatus described.   The gas collecting tube is connected to the container through an upper end portion of the small container, and the inside of the tube is coated with at least one of glass, silica, quartz, and Teflon. Mobile component collection and analysis equipment.   The mobile component collection analyzer according to claim 2, wherein the gas collection tube includes a hole that allows a laser beam to enter and exit.   The mobile component collection / analysis apparatus according to claim 2, wherein the xyz-linear movement device is attached near a center of the small container, and moves the gimbal and the gas collection tube. A first flow controller for adjusting the amount of phage gas flowing into the phage gas nozzle;
The mobile component collection / analysis apparatus according to claim 2, further comprising a second flow rate regulator that regulates a discharge amount of the phage gas discharged through the phage gas discharge port. The dichroic objective lens part is
An objective lens for focusing the laser beam and enlarging the observation image;
A dichroic mirror that allows a laser beam incident on the sample and an image of the sample input from the sample to the camera to pass through the same optical path in the objective lens;
The movable component according to claim 1, further comprising a pair of couplers to which two optical fibers for connecting the dichroic objective lens unit, the laser light source unit, and the camera unit are respectively attached. Collection analyzer. The controller is
A drive controller for controlling the collection unit and the dichroic objective lens unit;
A laser controller for controlling the laser light source unit;
A camera controller for controlling the camera unit and processing the acquired image;
A temperature controller for controlling the temperature of the collecting unit;
A monitor that displays image and analysis data;
The mobile component collection and analysis apparatus according to claim 1, further comprising a central controller that controls the drive controller, the laser controller, the camera controller, and the temperature controller.   The mobile component collection analyzer according to claim 1, further comprising an optical fiber connecting the laser light source unit and the dichroic objective lens unit.   The mobile component collection and analysis apparatus according to claim 1, further comprising an optical fiber connecting the camera unit and the dichroic objective lens unit. An analysis unit coupled to the collection unit and analyzing the components of the sample collected and transmitted by the collection unit;
The mobile component collection and analysis apparatus according to claim 1, wherein the control unit includes an analysis controller that processes operation and data of the analysis unit.   The mobile component collection and analysis apparatus according to claim 13, wherein the collection unit includes a connection pipe that connects the collection unit and the analysis unit and moves the collected gas to the analysis unit.   The mobile component collection analyzer according to claim 14, wherein the connecting tube is a flexible tube, and the inside of the tube is coated with at least one of glass, silica, quartz, and Teflon. An adsorption unit that is coupled to the collection unit and that adsorbs the components of the sample collected and transmitted by the collection unit;
The mobile component collection and analysis apparatus according to claim 1, wherein the control unit includes an adsorption controller that controls an operation of the adsorption unit. The adsorption part is
An adsorption tube for adsorbing the sample components collected in the collection unit;
A cooler for cooling the temperature of the adsorption tube;
The mobile component collection and analysis apparatus according to claim 16, further comprising a vacuum pump for transferring the gas sample.   The mobile component collection and analysis apparatus according to claim 16, wherein the collection unit includes a connection pipe that connects the collection unit and the adsorption unit and moves the collected gas to the adsorption unit.   The mobile component collection / analysis apparatus according to claim 18, wherein the connection tube is a flexible tube, and the inside of the tube is coated with at least one of glass, silica, quartz, and Teflon.

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