JP5163798B2 - Isolation device - Google Patents

Description

  The present invention relates to a vibration isolator that is mounted on a gantry such as a semiconductor manufacturing apparatus or a processing machine, and suppresses vibration of the gantry generated during operation by driving control such as positioning of a driving device mounted on the gantry.

  There is a semiconductor exposure apparatus in which a drive device such as an XY stage is mounted on a gantry provided with vibration absorbing means such as an air spring, a coil spring, or a vibration-proof rubber. In this gantry, there is a problem that even if the vibration propagating from the floor can be damped to some extent, the vibration generated by driving the XY stage mounted on the gantry cannot be damped effectively.

In order to solve the insulation of vibration propagating from the floor and the suppression performance of vibration caused by driving of the XY stage, an active braking device shown in Patent Document 1 has been proposed.
The active braking device shown in Patent Document 1 drives the counter mass in the direction opposite to the driving direction of the XY stage, thereby canceling the driving reaction force of the XY stage and the driving reaction force due to the movement of the counter mass. The vibration is not transmitted to the mounted base.

JP 2003-314610 A

  The active braking device described in Patent Document 1 described above receives a stage target speed, generates a target value that realizes a movement that generates a force that cancels a driving reaction force generated by driving the stage, and generates a counter mass. Drive speed control is performed. For this reason, in the case of the operation that repeats the movement in the same direction, the counter mass position is gradually added and reaches the stroke end. Therefore, suppression of vibration caused by the stage drive is suppressed by the counter mass stroke of the active braking device. There was a problem that it was constrained by.

  This invention was made in order to solve the above-described problems, and even in the case of an operation in which the operation of a stage (hereinafter referred to as a drive device) that is subject to vibration suppression repeatedly moves in the same direction, The vibration caused by the drive of the drive device can be suppressed without the counter mass (hereinafter referred to as the movable portion) position of the active braking device (hereinafter referred to as the vibration isolation device) exceeding the stroke end of the vibration isolation device movable portion. The purpose is to obtain a simple vibration isolator.

The vibration isolator according to the present invention controls the vibration isolator in a vibration isolator that performs vibration suppression control using the drive reaction force of the movable portion for vibration generated by driving the drive device mounted on the gantry. The vibration isolation side control unit drives the movable part of the vibration isolation device in order to obtain a drive reaction force corresponding to the drive reaction force of the drive device based on the information output from the excitation side control unit that controls the drive device. A vibration isolating control unit for controlling, a position / speed control unit for controlling the position and speed of the movable part of the vibration isolator according to the position command and the vibration isolation side feedback signal of the vibration isolator, and the vibration isolation The side control unit includes an interference component compensation unit that compensates for an interference component that hinders the effect of the vibration isolation control included in the position / speed control thrust command, and the counter thrust command for vibration isolation control output from the vibration isolation control unit. and, the position and speed And position and speed control thrust command output from control unit, is characterized in that so as to drive and control the movable part by the sum of the output from the interference component compensator.

  The vibration isolator according to the present invention is capable of relieving the driving reaction force generated by the driving device side even when the movement on the driving device side repeats the movement in the same direction beyond the stroke end of the vibration isolating movable portion. Vibration control can be performed efficiently.

It is a block diagram which shows the structure of the drive device and vibration isolator which concern on Embodiment 1 of this invention. FIG. 3 is a diagram showing a configuration of a vibration isolation side control unit in the vibration isolation device according to Embodiment 1 of the present invention. It is a figure which shows the waveform of various instructions of a drive device. It is a flowchart of the condition judgment performed by the condition judgment part 110a in the vibration isolation side control part of the vibration isolation apparatus which concerns on Embodiment 1 of this invention. It is a figure which shows the simulation result at the time of driving a drive device movable part, without using a vibration isolator. It is a figure which shows the simulation result at the time of canceling a driving reaction force with the conventional vibration isolator and not giving a vibration to a mount frame. It is a figure which shows the simulation result at the time of using the vibration isolator which concerns on Embodiment 1 of this invention. It is a figure which shows the structure of the vibration isolation side control part in the vibration isolator which concerns on Embodiment 2 of this invention. It is a flowchart of the condition judgment performed by the condition judgment part 110b in the vibration isolation side control part of the vibration isolator which concerns on Embodiment 2 of this invention. It is a figure which shows the simulation result at the time of using the vibration isolator which concerns on Embodiment 2 of this invention. It is a figure which shows the structure of the vibration isolation side control part in the vibration isolator which concerns on Embodiment 3 of this invention. It is a figure which shows the waveform of various instructions of a drive device (example of a command pattern with few constant speed areas and stop areas). FIG. 12 is a diagram illustrating a simulation result when the vibration isolation control and the movable part position control by the vibration isolation side command signal 10 are simultaneously performed without using the notch filter 201 in the configuration of FIG. 11. It is a figure which shows the simulation result at the time of using the vibration isolator which concerns on Embodiment 3 of this invention. It is a figure which shows the structure of the vibration isolation side control part in the vibration isolator which concerns on Embodiment 4 of this invention. It is a figure which shows the internal structure of the position / speed control part 102 which produces the position / speed control thrust command. In the vibration isolator which concerns on Embodiment 4 of this invention, it is a figure which shows the internal structure of the interference component compensation part 301a in a vibration isolation side control part. In the vibration isolator which concerns on Embodiment 4 of this invention, it is a figure which shows the variable gain 403 in the interference component compensation part 301a of the vibration isolation side control part. It is a figure which shows the simulation result at the time of using the vibration isolator which concerns on Embodiment 4 of this invention. In the vibration isolator which concerns on Embodiment 5 of this invention, it is a figure which shows the internal structure of the interference component compensation part 301b in a vibration isolation side control part. It is a figure which shows the simulation result at the time of using the vibration isolator which concerns on Embodiment 5 of this invention. In the vibration isolator which concerns on Embodiment 6 of this invention, it is a figure which shows the internal structure of the interference component compensation part 301c in a vibration isolation side control part. In the vibration isolator which concerns on Embodiment 7 of this invention, it is a figure which shows the internal structure of the interference component compensation part 301d in a vibration isolation side control part. It is a figure which shows the structure of the vibration isolation side control part in the vibration isolator which concerns on Embodiment 8 of this invention. It is a figure which shows the structure of the position command production | generation part 501 in the vibration isolation side control part of the vibration isolator which concerns on Embodiment 8 of this invention. It is a figure which shows the structure of the interference component compensation part 301 in the vibration isolation side control part of the vibration isolator which concerns on Embodiment 8 of this invention. It is a figure which shows the structure of the vibration isolation side control part in the vibration isolator which concerns on Embodiment 9 of this invention. It is a figure which shows the structure of the vibration isolation side control part in the vibration isolator which concerns on Embodiment 10 of this invention. It is a figure which shows the structure of the counter thrust command correction | amendment part 508 in the vibration isolation side control part of the vibration isolator which concerns on Embodiment 10 of this invention. It is a figure which shows the structure of the counter thrust command correction | amendment part 508 in the vibration isolation side control part of the vibration isolator which concerns on Embodiment 11 of this invention.

Embodiment 1 FIG.
1 is a block diagram showing the configuration of a drive device and a vibration isolator according to Embodiment 1 of the present invention.
In the figure, an excitation-side control unit 3 constituting the driving device 1 performs control using an excitation-side feedback signal 8 so as to follow an excitation-side command signal 7, outputs an excitation-side current 9, and a gantry (not shown) The excitation side movable part 4 mounted on top is driven. Moreover, the excitation side control part 3 outputs the information 13 to the vibration isolator 2 mentioned later.
The vibration isolation side control unit 5 that constitutes the vibration isolation device 2 uses the information 13 output from the drive device 1 to set the vibration isolation control counter thrust command, and the position as the vibration isolation side command signal. Position / speed control is performed by using the vibration isolation side feedback signal 11 so as to follow the command 10, the vibration isolation side current 12 is output, and the vibration isolation side movable mounted on the gantry (not shown). The unit 6 is driven.

FIG. 2 is a diagram showing a configuration of the vibration isolation side control unit in the vibration isolation device according to Embodiment 1 of the present invention.
In the vibration isolation side control unit 5a, the position command setting unit 101 that sets the position command of the vibration isolation device outputs a position command 10 as a vibration isolation side command signal. The position command 10 is set according to the operation specifications of the drive device 1 and is normally set at the center of the movable region of the excitation-side movable unit 4 in the vibration isolator 2. However, when information on the driving direction of the excitation-side movable unit 4 is obtained in advance, a position moved in a direction in which a stroke can be secured from the center of the movable region of the vibration isolation device may be set as the position command 10.
The position / speed control unit 102 performs position / speed control of the vibration isolation device 2, and the position / speed control thrust is based on the position command 10 as the vibration isolation side command signal output from the position command setting unit 101. A command is created, and the position of the vibration isolation side movable part 6 is controlled to the position specified by the position command 10.

The information setting unit 103 selects the type of data to be taken in as information 13 from the excitation side control unit 3, and examples of the data type include a speed command, an acceleration command, a thrust command, and a current command.
The vibration isolation control counter thrust setting unit 104 derives the excitation side driving reaction force using the information 106 set by the information setting unit 103 and outputs a vibration isolation control counter thrust command 107.
The vibration isolation control unit 14 includes an information setting unit 103 and a vibration isolation control counter thrust setting unit 104.
Based on the information 106, the condition determination unit 110 a selects one of the vibration isolation control counter thrust command 107 and the position / speed control thrust command 108 and switches the switch 111.
The thrust command selected by the switch 111 becomes the final thrust command 112, and is converted into the current 12a by the thrust / current conversion unit 105.

  FIG. 2 shows an example in which the vibration isolation control unit 14 includes the information setting unit 103 and the vibration isolation control counter thrust setting unit 104. However, the information setting unit 103, the vibration isolation control counter thrust setting unit 104, and the condition determination are illustrated. The unit 110a, the switch 111, and the thrust / current conversion unit 105 may be configured.

FIGS. 3A and 3B are diagrams showing waveforms of various commands of the drive device, where FIG. 3A is a diagram showing a waveform of a position command, FIG. 3B is a diagram showing a waveform of a speed command, and FIG. 3C is a diagram showing a waveform of an acceleration command. It is.
As shown in the figure, since the command pattern is generally composed of an acceleration region, a constant speed region, a deceleration region, and a stop region, and the driving reaction force occurs in the acceleration region and the deceleration region, in the first embodiment of the invention, the drive device The vibration isolation control is performed in the acceleration region and the deceleration region where the drive reaction force is generated in the above operation, and in the constant speed region and the stop region where the drive reaction force does not occur, the vibration isolation side is movable by the position command 10 from the position command setting unit 101. Control the part position.

FIG. 4 is a flowchart of condition determination performed by the condition determination unit 110a in the vibration isolation side control unit of the vibration isolation device according to Embodiment 1 of the present invention. A processing example of the condition determination unit 110a when the excitation side speed command is used as the information 106 will be described.
In step S101, information 106 is input, and it is determined whether or not excitation side speed command time change = 0.
If the excitation side speed command time change = 0 in step S101, the switch 111a is selected in step S102, and the position / speed control of the vibration isolator is executed in step S103.
If it is determined in step S101 that the excitation-side speed command time change is not zero, the switch 111b is selected in step S104, and the vibration isolation control is executed by the vibration isolation control counter thrust command in step S105.

In the above description, the case where the excitation side speed command is fetched as the information 13 from the excitation side control unit 3 has been described. However, an acceleration command, a thrust command, a current command, acceleration, thrust, and current may be used.
In the above description, the example in which it is determined whether or not the excitation-side speed command time change = 0 is described. However, the condition may be determined based on a threshold value.

  FIG. 5 is a diagram showing a simulation result when the driving device movable portion is driven without using the vibration isolator, and FIG. 6 is a conventional vibration isolator that cancels the driving reaction force so as not to give vibration to the gantry. It is a figure which shows the simulation result at the time of setting. In the figure, (a) is the excitation side command pattern, (b) is the excitation side speed deviation (difference between the excitation side command pattern and the actual speed), (c) is the gantry displacement, (d) is the position of the vibration isolation side movable part. Show.

In the case of FIG. 5 in which the driving device movable portion is driven without using the vibration isolator, when the driving device moving portion is driven according to the excitation side command pattern (a), the excitation side speed deviation (b) causes residual vibration. In addition, since the gantry displacement (c) also vibrates greatly, it is difficult to position the drive device at high speed and with high accuracy.
In addition, since the vibration isolator that cancels the drive reaction force is not used, the vibration isolation side movable portion position (d) is zero.

In the case of FIG. 6 in which the vibration isolator movable portion is driven in the direction opposite to the drive direction of the drive device movable portion, when the drive device movable portion is driven according to the excitation side command pattern (a), The vibration of deviation (b) and gantry displacement (c) is suppressed.
However, in the case of an operation in which the drive unit moving part repeatedly moves in the same direction, the vibration isolation side moving part position (d) is gradually added and reaches the stroke end, so that continuous driving in the same direction is limited. Will be.

7A and 7B are diagrams showing simulation results when the vibration isolator according to Embodiment 1 of the present invention is used. FIG. 7A is an excitation side command pattern, FIG. 7B is an excitation side speed deviation, and FIG. Displacement (d) indicates the position of the vibration isolation side movable part.
In the figure, when the drive unit movable part is driven according to the excitation side movable part command pattern (a), vibrations of the excitation side speed deviation (b) and the gantry displacement (c) are substantially suppressed. Further, in the vibration isolator according to the first embodiment, the vibration isolation control is performed in the acceleration region and the deceleration region where the drive reaction force is generated in the operation of the drive device, and in the constant speed region and the stop region where the drive reaction force is not generated. Since the vibration isolation side movable part position is controlled by the position command 10 from the position command setting unit 101, the vibration isolation side movable part position (d) is controlled to the position specified by the position command 10. Even if the movement in the same direction is repeated, the vibration isolation control can be performed.

In the vibration isolator according to the first embodiment, it is possible to switch between the vibration isolation control for the driving reaction force generated by the operation on the drive device side and the position / speed control of the vibration isolation device, and the vibration isolation control by the vibration isolation side movable unit. When there is no need, the vibration isolation side movable part can be moved to a predetermined position (for example, the center of the movable range)
Even when the movement on the drive device side repeats the movement in the same direction beyond the stroke end of the vibration isolation side movable portion, the vibration isolation control for the drive reaction force generated by the operation on the drive device side can be performed efficiently.

Embodiment 2. FIG.
FIG. 8 is a diagram showing the configuration of the vibration isolation side control unit in the vibration isolation device according to Embodiment 2 of the present invention. In the figure, 10, 11, 13, 14, 101, 102, 103, 104, 105, 106, 107, and 108 are the same as those in FIG.

The configuration from the creation of the vibration isolation control counter thrust command 107 to the creation of the position / speed control thrust command 108 is the same as that of the first embodiment, and the description thereof is omitted.
In the vibration isolation side control unit 5b, the condition determination unit 110b uses the information 106 to input the variable gain 113 as the first gain for inputting the vibration isolation control counter thrust command 107 and the second input of the position / speed control thrust command 108. The variable gain 114 as the gain is varied.
The anti-vibration control counter thrust command 115 adjusted by the variable gain 113 and the position / speed control thrust command 116 adjusted by the variable gain 114 are added to obtain a final thrust command 117, and the thrust / current conversion unit 105 uses the current. 12b.

The variable gain 113 fixes the variable gain 113 to 1 while the excitation side speed command time change ≠ 0, and outputs only the vibration isolation control counter thrust command to the thrust / current converter 105. When the excitation-side speed command time change = 0, the variable gain 113 is gradually changed from 1 to 0.
Further, the variable gain 114 fixes the variable gain 114 to 0 and sets the position / speed control thrust command 116 to 0 while the excitation side speed command time change ≠ 0. When the excitation side speed command time change = 0, the variable gain 114 is gradually changed from 0 to 1.

FIG. 9 is a flowchart of condition determination performed by the condition determination unit 110b in the vibration isolation side control unit of the vibration isolation device according to Embodiment 2 of the present invention. A processing example when the excitation side speed command is used as the information 106 will be described.
In step S201, the information 106 of the excitation side control unit is input to the condition determination unit 110b, and it is determined whether or not the excitation side speed command time change = 0.
If the excitation side speed command time change = 0 in step S201, the variable gain 113 is changed from 1 to 0 and the variable gain 114 is changed from 0 to 1 in step S202. Gradually switch to speed control thrust command.
If the excitation-side speed command time change ≠ 0 in step S201, the variable gain 113 is fixed to 1 and the variable gain 114 is fixed to 0 in step S203, and only the vibration isolation control counter thrust command is output.

10A and 10B are diagrams showing simulation results when the vibration isolator according to Embodiment 2 of the present invention is used. FIG. 10A is an excitation side command pattern, FIG. 10B is an excitation side speed deviation, and FIG. Displacement (d) indicates the position of the vibration isolation side movable part.
In the figure, when the drive unit movable part is driven according to the excitation side movable part command pattern (a), vibrations of the excitation side speed deviation (b) and the gantry displacement (c) are well suppressed.
The vibration isolation side movable part position (d) is controlled to the position specified by the position command 10, but the vibration isolation control counter thrust command 107 and the position / speed control using the variable gain 113 and the variable gain 114. Since the thrust command 108 is gradually switched, the response is delayed as compared with the vibration isolation side movable portion position (d) of FIG. 7 shown in the first embodiment.

In the first embodiment, the example in which the counter thrust command 107 for vibration isolation control and the position / speed control thrust command 108 are switched by the switch 111 is shown. However, the second embodiment uses the variable gain 113 and the variable gain 114 to The vibration control counter thrust command 107 and the position / speed control thrust command 108 are switched.
Since the switching from the vibration isolation control counter thrust command 107 to the position / speed control thrust command 108 is gradually switched using a variable gain, the shock at the time of switching can be reduced.

Embodiment 3 FIG.
FIG. 11 is a diagram showing the configuration of the vibration isolation side control unit in the vibration isolation device according to Embodiment 3 of the present invention. In the figure, 10, 11, 13, 14, 101, 102, 103, 104, 105, 106, 107, and 108 are the same as those in FIG.
In the vibration isolation side control unit 5c, a notch filter 201 is arranged in series with the position / speed control unit 102, and a position / speed control thrust command 202 passed through the notch filter 201 and a counter thrust command 107 for vibration isolation control are added. Thus, the final thrust command 203 is obtained, and the thrust / current conversion unit 105 converts the current into a current 12c.

12A and 12B are diagrams illustrating waveforms of various commands of the driving device, where FIG. 12A is a diagram illustrating a waveform of a position command, FIG. 12B is a diagram illustrating a waveform of a speed command, and FIG. 12C is a diagram illustrating a waveform of an acceleration command. It is. FIG. 12 shows an example of a command pattern that has fewer constant speed areas and stop areas as compared to FIG. 3 shown in the first embodiment.
In the first and second embodiments, the vibration isolation control is performed in the acceleration region and the deceleration region where the driving reaction force is generated in the operation of the drive device, and the position command setting unit 101 is used in the constant speed region and the stop region where the driving reaction force is not generated. The example which controls a movable part position by the position command 10 from is shown.
However, in the case of a command pattern with a small constant speed region and a stop region as shown in FIG. 12, there may be a case where there is not enough time for controlling the position of the movable part by the position command 10, The vibration isolation control and the position control of the movable part by the position command 10 are performed at the same time.

FIG. 13 is a diagram showing a simulation result when the vibration isolation control and the movable part position control by the position command 10 are simultaneously performed without using the notch filter 201 in the configuration of FIG. 11, and (a) shows the excitation side command. (B) shows excitation side speed deviation, (c) shows gantry displacement, and (d) shows vibration isolation side movable part position.
The position / speed control thrust command 108 output from the position / speed control unit 102 is a command to return the moved vibration isolation side movable unit to the position specified by the position command 10, and the vibration isolation control counter thrust command 107 and The thrust command has a different polarity. For this reason, if the vibration isolation control counter thrust command 107 and the position / speed control thrust command 108 are simultaneously performed, the effect of the vibration isolation control by the vibration isolation control counter thrust command 107 may be hindered to excite the gantry vibration.

In FIG. 13 which shows the simulation result when the counter thrust command for vibration isolation control 107 and the position / speed control thrust command 108 are added (when the notch filter 201 is omitted from the configuration of FIG. 11), the vibration isolation side movable portion 6 is shown. Since the position / speed control unit 102 controls the position specified by the position command 10, the vibration isolation side movable part position (d) does not reach the stroke end.
However, when the driving device movable portion is driven according to the excitation side movable portion command pattern (a), the position / speed control thrust command 108 prevents the effect of the vibration isolation control by the vibration isolation control counter thrust command 107. For speed deviation (b) and gantry displacement (c),
Compared with the simulation result of FIG. 5 in which the vibration isolator is not used, the vibration is suppressed,
Compared with the simulation result of FIG. 6 which is a case where the conventional vibration isolator is used, the vibration is increased.

Generally, when an excitation force is applied, the gantry vibrates at the natural mode frequency of the gantry. When the excitation force matches the natural mode frequency of the gantry, the vibration amplitude of the gantry is sustained or amplified, and when the excitation force does not include the natural mode frequency of the gantry, the gantry vibration amplitude attenuates and converges .
Therefore, in the third embodiment, the notch filter 201 arranged in series with the position / velocity control unit 102 is set to the same value as the natural mode frequency of the gantry, and the notch filter 201 uses the position / speed control thrust command 108 to A thrust command 202 from which the vibration component of the gantry is removed is created and added to the anti-vibration control counter thrust command 107.

14A and 14B are diagrams showing simulation results when the vibration isolator according to Embodiment 3 of the present invention is used. FIG. 14A is an excitation side command pattern, FIG. 14B is an excitation side speed deviation, and FIG. Displacement (d) indicates the position of the vibration isolation side movable part.
In FIG. 14, when the drive unit movable unit is driven according to the excitation side command pattern (a), vibrations of the excitation side speed deviation (b) and the gantry displacement (c) are controlled by the vibration isolation control and the position command 10. Are substantially suppressed as compared with the simulation result of FIG. The vibration isolation side movable part position (d) is controlled to the position specified by the position command 10.

  In the above, the example in which the vibration component of the gantry is removed from the position / speed control thrust command 108 by the notch filter 201 has been described, but a low-pass filter, a high-pass filter, and a band-pass filter may be used.

  In the third embodiment, the vibration suppression of the gantry and the position and speed control of the vibration isolator can be performed at the same time. Therefore, the vibration isolation control is efficiently performed even in a continuous command pattern having a short constant speed region and a short stop region stop period. Yes.

Embodiment 4 FIG.
FIG. 15 is a diagram showing a configuration of the vibration isolation side control unit in the vibration isolation device according to Embodiment 4 of the present invention. In the figure, reference numerals 10, 11, 13, 14, 101, 102, 103, 104, 105, 106, 107, and 108 are the same as those in FIG.
In the vibration isolation side control unit 5d, the interference component compensation unit 301 calculates an interference component that hinders the effect of the vibration isolation control included in the position / speed control thrust command 108 to be added to the vibration isolation control counter thrust command 107, and Post-processing for adjusting the output of interference component compensation is performed, and an interference component compensation thrust command 302 is output.
The anti-vibration control counter thrust command 107, the position / speed control thrust command 108, and the interference component compensation thrust command 302 are added to obtain a final thrust command 303, which is converted into a current 12d by the thrust / current converter 105.
In the fourth embodiment, the interference component compensation thrust command 302 is added to the anti-vibration control counter thrust command 107 and the position / speed control thrust command 108 by feedforward.

FIG. 16 is a diagram showing an internal configuration of the position / speed control unit 102 that creates the position / speed control thrust command 108.
In the figure, a position P (proportional) control unit 304 calculates a position P control command 308 by multiplying the difference between the position command 10 output from the position command setting unit 101 and the vibration isolation side feedback signal 11 by a gain coefficient.
The speed P (proportional) control unit 306 calculates a speed P control command 309 by multiplying the difference between the position P control command 308 and the value obtained by differentiating the vibration isolation side feedback signal 11 by the differential calculation unit 305 by a gain coefficient.
Further, the speed I (integration) control unit 307 adds up the difference between the position P control command 308 and the value obtained by differentiating the vibration isolation side feedback signal 11 by the differential calculation unit 305, and multiplies the sum by a gain coefficient to obtain the speed I The control command 310 is calculated.
The speed P control command 309 and the speed I control command 310 are added and output as a position / speed control thrust command 108.

FIG. 17 is a diagram showing an internal configuration of the interference component compensation unit 301 in the vibration isolation side control unit in the vibration isolation device according to Embodiment 4 of the present invention.
In the figure, the interference component compensation unit 301a uses a speed P control interference compensation thrust command 402a created by the speed P control interference compensation unit 401a based on the vibration isolation control counter thrust command 107 as a variable gain based on the vibration isolation side feedback signal 11. Then, the interference component compensation thrust command 302a is output.
In the fourth embodiment, the interference component compensation unit 301a performs the interference compensation for the speed P control command 309 in the latter half of the position / speed control unit 102.

In FIG. 17, the speed P control interference compensation unit 401 a derives the movable part speed estimated value vco using the vibration isolation control counter thrust command 107 and obtains the speed P control interference compensation thrust command 402 a.
The moving part speed estimated value vco is estimated using the vibration isolation control counter thrust command 107 as follows.
The thrust F, mass M, and acceleration a are expressed by the relationship of the following formula (1) from a general physical law.
F = M * a (1)
Here, when the vibration isolation counter thrust command Fc, the movable part mass Mc, and the movable part acceleration ac are defined, the movable part speed estimated value vco is obtained by the following equation (3).
Fc = Mc * ac (2)
vco = ac / s
= Fc / Mc * 1 / s (3)
In equation (3), 1 / s represents an integrator.

Also, the speed P control command 309 in FIG. 16 is obtained by the following expression (4) using the movable part speed estimated value vco.
Speed P control command 309 = Ksp * vco (4)
Here, Ksp is a speed P control gain, and is represented by Ksp = Mc * ωsc where the speed P control response frequency is ωsc.

Therefore, when the speed P control command 309 is the target of interference compensation, the speed P control interference compensation thrust command 402a is obtained by the following equation (5).
Speed P control interference compensation thrust command 402a
= Ksp * vco
= Mc * ωsc * vco
= Mc * ωsc * Fc / Mc * 1 / s
= Ωsc / s * Fc (5)
From the equation (5), the control content in the speed P control interference compensation unit 401a is ωsc / s.

  Further, the interference component compensator 301a adjusts the speed P control interference compensation thrust command 402a by the variable gain 403 corresponding to the vibration isolation side feedback signal 11, and outputs it as the interference component compensation thrust command 302a.

  FIG. 18 is a diagram showing a variable gain 403 in the interference component compensation unit 301a of the vibration isolation side control unit in the vibration isolation device according to Embodiment 4 of the present invention. In the figure, the horizontal axis represents the position of the vibration isolation side movable portion as the vibration isolation side feedback signal 11, the center of the movable range of the vibration isolation side movable portion is 0, and the left and right movable range maximum values (stroke ends) are ± Xmax. And The vertical axis represents gain, and the set value is changed from gain Ga to 0 depending on the position of the vibration isolation side movable portion.

  In FIG. 18, (a) is an example in which the gain is set to Ga at the center of the movable range of the vibration isolation side movable part and is changed linearly so that the maximum movable range ± Xmax of the vibration isolation side movable part becomes zero. b) is set so that the gain is Ga at the center and the vicinity of the movable range of the vibration isolation side movable part, and is controlled to be 0 near the maximum movable range ± Xmax of the vibration isolation side movable part. This is an example in which the curve is changed.

  The speed P control interference compensation thrust command 402a is adjusted by the variable gain 403 in accordance with the vibration isolation side movable part position. 18A and 18B, the interference component compensation thrust command 302a decreases as it approaches the maximum movable range value (stroke end) ± Xmax, and becomes 0 at ± Xmax. At this time, the vibration isolation side movable part is controlled to the initial position by the position / speed control part 102.

FIGS. 19A and 19B are diagrams showing simulation results when using the vibration isolator according to Embodiment 4 of the present invention. FIG. 19A is an excitation side command pattern, FIG. 19B is an excitation side speed deviation, and FIG. Displacement (d) indicates the position of the vibration isolation side movable part.
In FIG. 19, when the drive unit movable portion is driven according to the excitation side command pattern (a), vibrations of the excitation side speed deviation (b) and the gantry displacement (c) are suppressed satisfactorily. The vibration isolation side movable part position (d) is controlled to the position specified by the position command 10.

  Since the vibration isolation side moving part speed is estimated from the vibration isolation control counter thrust command 107 and the interference component compensation 301 is derived and given to the position / speed control thrust command 108 by feedforward, the position / speed control is performed. Even if the response frequency of the unit 102 is increased, it does not become unstable. Therefore, even when the position / speed control unit of the vibration isolator is required to have a quick response with a continuous command pattern having a shorter stop period, a good gantry vibration suppressing effect can be obtained.

  In the above description, the example in which the interference component that prevents the vibration isolation control is removed from the output of the speed P control unit 306 has been described. However, the process of removing the interference component that prevents the vibration isolation control after adding the output of the speed I control unit 307 is performed. You can go.

Embodiment 5 FIG.
FIG. 20 is a diagram showing an internal configuration of the interference component compensation unit 301b in the vibration isolation side control unit in the vibration isolation device according to Embodiment 5 of the present invention.
In the figure, an interference component compensator 301b uses a position P / velocity PI control interference compensation thrust command 402b created by the position P / velocity PI control interference compensation unit 401b based on the anti-vibration control counter thrust command 107 as a high-pass filter 404. The adjustment is made by the limiter 405, and the interference component compensation thrust command 302b is output.
In the fifth embodiment, the interference component compensation unit 301 b performs interference compensation on the outputs of the position P control unit 304, the speed P control unit 306, and the speed I control unit 307 constituting the position / speed control unit 102.

The position P / speed PI control interference compensation unit 401b obtains the movable part speed estimated value vco and the vibration isolation side movable part position estimated value xco using the vibration isolation control counter thrust command 107.
The moving part speed estimated value vco is obtained by the equation (3) as described in the fourth embodiment,
vco = Fc / Mc * 1 / s (3)
Moreover, the vibration isolation side movable part position estimated value xco is obtained by the following equation (6).
xco = vco / s
= Fc / Mc * 1 / s ² (6)

The position P / velocity PI control interference compensation thrust command 402b is obtained by the following equation (7).
Position P / Speed PI control Interference compensation thrust command 402b
= (Ωpc * xco + vco) * Ksp (1 + ωspi / s) * Fc
= (Ωpc * Fc / Mc / s ² + Fc / Mc / s)
* Mc * ωsc * (1 + ωspi / s) * Fc
= Ωsc / s
* {1+ (ωpc + ωspi) / s + (ωpc * ωspi) / s ² } * Fc (7)
Here, ωpc is a position response frequency of position P control, ωspi is an integration time constant of speed PI control, ωsc is a speed P control response frequency, and Ksp is a speed P control gain represented by Ksp = Mc * ωsc.

Accordingly, the control contents in the position P / velocity PI control interference compensation unit 401b are as follows.
ωsc / s * {1+ (ωpc + ωspi) / s + (ωpc * ωspi) / s ² }

  When the position P / velocity PI control interference compensation thrust command 402b is used, the position / velocity control unit thrust command 108 is substantially cancelled, which is equivalent to driving with only the vibration isolation control counter thrust command 107. In the case of an operation in which the driving device movable portion repeats movement in the same direction, there is a problem that the position of the vibration isolation side movable portion is gradually updated and reaches the stroke end.

As a countermeasure, in the fifth embodiment, a high-pass filter 404 and a limiter 405 are provided in series with the position P / speed PI control interference compensation unit 401b.
In a band lower than the frequency set in the high pass filter 404, the position P / speed PI control interference compensation thrust command 402b is cut off, and the position / speed control is enabled. Further, in the band higher than the frequency set in the high-pass filter 404, the position P / velocity PI control interference compensation thrust command 402b is passed, which is equivalent to outputting only the vibration isolation counter thrust command. Suppress.
Further, the limiter 405 limits the interference component compensation amount to prevent overcompensation.

FIG. 21 is a diagram showing a simulation result when the vibration isolator according to Embodiment 5 of the present invention is used. (A) is an excitation side command pattern, (b) is an excitation side speed deviation, and (c) is a gantry. Displacement (d) indicates the position of the vibration isolation side movable part.
In FIG. 21, when the drive unit movable portion is driven according to the excitation side command pattern (a), the vibrations of the excitation side speed deviation (b) and the gantry displacement (c) are well suppressed. The vibration isolation side movable part position (d) is controlled to the position specified by the position command 10.

  In the above, the example in which the fundamental component of the counter thrust command for vibration isolation control is removed from the position P / velocity PI control interference compensation thrust command 402b by the high pass filter 404 has been described, but a low pass filter or a band pass filter may be used. good.

  Since the vibration isolation side moving part speed is estimated from the vibration isolation control counter thrust command 107 and the interference component compensation 301 is derived and given to the position / speed control thrust command 108 by feedforward, the position / speed control is performed. Even if the response frequency of the unit 102 is increased, it does not become unstable. Therefore, even when the position / speed control unit of the vibration isolator is required to have a quick response with a continuous command pattern having a shorter stop period, a good gantry vibration suppressing effect can be obtained.

Embodiment 6 FIG.
FIG. 22 is a diagram showing an internal configuration of the interference component compensation unit 301c in the vibration isolation side control unit in the vibration isolation device according to Embodiment 6 of the present invention.
In the figure, an interference component compensator 301c includes a position P / velocity PI control interference compensator 401c, a variable gain 403 that is variable according to the vibration isolation side feedback signal 11, and a variable gain selection switch that selects whether to use the variable gain 403. 406, a high-pass filter 404, a high-pass filter selection switch 407 that selects whether to use the high-pass filter 404, a limiter 405, and a limiter selection switch 408 that selects whether to use the limiter 405.
The position P / velocity PI control interference compensation unit 401c includes a position P interference compensation means, a speed P interference compensation means, and a speed I interference compensation means, and performs interference compensation by selecting one or more of them.

In the interference component compensation unit 301c, the position P / velocity PI control interference compensation unit 401c creates the interference compensation thrust command 402c by the selected interference compensation means based on the vibration isolation control counter thrust command 107.
When the variable gain selection contact 406a is further selected by the variable gain selection switch 406 with respect to the interference compensation thrust command 402c, adjustment by using the variable gain 403 is executed. However, when the variable gain rejection selection contact 406b is selected, adjustment by using the variable gain 403 is not performed.
Further, when the high-pass filter selection contact 407a is selected by the high-pass filter selection switch 407, adjustment by using the high-pass filter 404 is executed. However, when the high-pass filter rejection selection contact 407b is selected, the adjustment by using the high-pass filter 404 is not performed.
Further, when the limiter selection contact 408a is selected by the limiter selection switch 408, adjustment by using the limiter 405 is executed. However, when the limiter rejection selection contact 408b is selected, adjustment by using the limiter 405 is not performed.
The interference compensation thrust command 402c is selected and processed by the variable gain selection switch 406, the high pass filter selection switch 407, and the limiter selection switch 408 to generate and output the interference component compensation thrust command 302c.

  In the sixth embodiment, as in the fourth and fifth embodiments, the counter vibration control counter thrust command 107 as the vibration isolation control and the position / speed control thrust command 108 as the position / speed control are executed at the same time. The interference component compensator 301 calculates an interference component that hinders the vibration isolation control included in the position / velocity control thrust command 108 and adds it to the vibration isolation control thrust thrust command 107 in a feedforward manner. An interference component that hinders control is removed.

A position P (proportional) control unit 304, a speed P (proportional) control unit 306, and a speed I (integration) control unit that constitute the position / speed control unit 102 that generates a position / speed control thrust command 108 as position / speed control. 307,
In the fourth embodiment, an example of removing an interference component that hinders vibration isolation control from the output of the speed P control unit 306 or the outputs of the speed P control unit 306 and the speed I control unit 307. In the fifth embodiment, Although an example in which an interference component that hinders vibration isolation control has been described from the output of the position P control unit 304, the output of the speed P control unit 306, and the output of the speed I control unit 307 has been described.
In the sixth embodiment, it is possible to appropriately select a target for removing an interference component that hinders vibration isolation control from the position P control unit 304, the speed P control unit 306, and the speed I control unit 307 constituting the position / speed control unit 102. It is a thing.

  In the above description, the example in which the fundamental component of the anti-vibration control counter thrust command is removed from the interference compensation thrust command 402c by the high-pass filter 404 has been described. However, a low-pass filter or a band-pass filter may be used.

  In the sixth embodiment, among the position P control unit 304, the speed P control unit 306, and the speed I control unit 307 constituting the position / speed control unit 102 that creates the position / speed control thrust command 108 as position / speed control. Therefore, it is possible to appropriately select the target for removing the interference component that hinders the vibration isolation control, so that a good gantry vibration suppressing effect corresponding to the load specification and the command pattern can be obtained.

Embodiment 7 FIG.
FIG. 23 is a diagram showing an internal configuration of the interference component compensation unit 301d in the vibration isolation side control unit in the vibration isolation device according to Embodiment 7 of the present invention.
In the figure, the interference component compensation unit 301d receives the vibration isolation control counter thrust command 107 and adjusts the interference compensation thrust commands calculated by the interference compensation units 410a, 410b, and 410c by the high-pass filters 411a, 411b, and 411c, respectively. In addition, the adder 412 performs addition, and further, in order to prevent overcompensation, the interference component compensation amount is limited by a limiter 405 and is output as an interference component compensation thrust command 302d.

Ωsc / s * {1+ which is the control content of the position P / velocity PI control interference compensation thruster 402b that outputs the position P / velocity PI control interference compensation thrust command 402b described as the expression (7) in the fifth embodiment. In (ωpc + ωspi) / s + (ωpc * ωspi) / s ² },
Position P speed PI control interference compensation is divided into three terms, focusing on the order of s in the denominator.
Here, ωpc is a position response frequency of position P control, ωspi is an integration time constant of speed PI control, and ωsc is a speed P control response frequency.

Here, the control content of the speed P control interference compensation unit 410a is ωsc / s,
The control content of the position P / velocity I control interference compensation unit 410b as the first position P / velocity I control interference compensation unit is as follows.
ωsc / s * (ωpc + ωspi) / s,
The control content of the position P / velocity I control interference compensator 410c as the second position P / velocity I control interference compensator is as follows:
ωsc / s * (ωpc * ωspi) / s ² .
As a feature of each interference compensation unit 410a, 410b, 410c,
The speed P control interference compensation unit 410a has an effect of improving adaptability,
The position P / velocity I control interference compensation unit 410b has an effect of eliminating deviation by overshoot, suppression friction compensation, etc.
Further, the position P / velocity I control interference compensation unit 410c has an effect of realizing highly accurate position control.

  Further, in the above description, the output of the interference compensation units 410a, 410b, and 410c is adjusted by the high-pass filters 411a, 411b, and 411c, added by the addition unit 412, and then the interference component compensation amount is limited by the limiter 405. However, at least one of the high-pass filters 411a, 411b, 411c and the limiter 405 may be omitted.

  In the above description, the example in which the outputs of the interference compensation units 410a, 410b, and 410c are adjusted by the high-pass filters 411a, 411b, and 411c has been described. However, a low-pass filter and a band-pass filter may be used.

Embodiment 8 FIG.
FIG. 24 is a diagram showing a configuration of the vibration isolation side control unit in the vibration isolation device according to Embodiment 8 of the present invention. In the figure, 10, 11, 13, 14, 102, 103, 104, 105, 106, 107, 108, 301, 302, and 303 are the same as those in FIG.
In the vibration isolation side control unit, the position command generation unit 501 inputs the vibration isolation control counter command 107 and outputs the position command 10 to the position / speed control unit 102.

FIG. 25 is a diagram showing the configuration of the position command generation unit 501 in the vibration isolation side control unit of the vibration isolation device according to Embodiment 8 of the present invention. In the figure, the position command generation unit 501 calculates the value obtained by multiplying the value obtained by second-order integration of the vibration isolation control counter thrust command 107 by the integrator 502 and the integrator 503 by -1 / mc by the thrust-acceleration conversion unit 504. A position command 10 is output by adding the vibration isolation side movable part reference position (= 0) 506 output from the vibration side movable part reference position setting unit 505. Here, mc is the mass [kg] of the vibration isolation side movable part.
That is, the counter thrust command 107 for vibration isolation control is converted into an acceleration command, the converted acceleration command is converted into a position command by second-order integration, and the converted position command is used as a position command for the position / speed control unit in the reverse direction. input.

  FIG. 26 is a diagram showing the configuration of the interference component compensation unit 301 in the vibration isolation side control unit of the vibration isolation device according to Embodiment 8 of the present invention. In the figure, the interference component compensation unit 301e outputs the output 402b of the position P / velocity PI control interference compensation unit 401b as it is as the output 302e of the interference component compensation unit. The position P / velocity PI control interference compensation unit 401b is the same as the position P / velocity PI control interference compensation unit 401b of FIG. 20 in the fifth embodiment, and a description thereof will be omitted.

The sum of the vibration isolation control counter thrust command 107, the output 302e of the interference component compensation unit 301e, and the position / speed control thrust command 108, which is the output of the position / speed control unit 102, is used as the vibration isolation side final thrust command 303, and the thrust / current It inputs into the conversion part 105, and converts into the electric current 12f.
In the eighth embodiment, since a position command for canceling the vibration isolation side displacement caused by the vibration isolation control counter thrust is input to the vibration isolation side position / speed control unit, even in a command pattern that continuously operates in the same direction. Vibration control can be performed efficiently.

Embodiment 9 FIG.
FIG. 27 is a diagram showing a configuration of the vibration isolation side control unit in the vibration isolation device according to Embodiment 9 of the present invention. In the figure, 10, 11, 13, 14, 102, 103, 104, 105, 106, 107, 108, and 501 are the same as those in FIG.
In the vibration isolation side control unit, the position command 10 output from the position command generation unit 501 is input to the position / speed control unit 102 as the vibration isolation side position command 507 after passing through the notch filter 201 for removing the gantry vibration component. The notch filter 201 is the same as the filter described in FIG. 11 of the third embodiment.
The filter for removing the gantry vibration component may be configured using a low-pass filter, a high-pass filter, or a band-pass filter.

  In the ninth embodiment, in addition to inputting a position command for canceling the vibration isolation side displacement caused by the counter thrust for vibration isolation control to the vibration isolation side position / speed control unit, the base is determined from the position command for canceling the vibration isolation side displacement. Since the vibration component is removed, even better vibration isolation control can be performed even in a command pattern that continuously operates in the same direction.

Embodiment 10 FIG.
FIG. 28 is a diagram showing a configuration of the vibration isolation side control unit in the vibration isolation device according to Embodiment 10 of the present invention. In the figure, reference numerals 10, 11, 13, 14, 101, 102, 103, 104, 105, 106, 107, and 108 are the same as those in FIG.
The vibration isolation side control unit includes a counter thrust command correction unit 508 that corrects the counter thrust command 107 for vibration isolation control, and is configured to output a counter thrust command correction unit output 509, instead of the position command generation unit 501. The position command setting unit 101 is used. The position command setting unit 101 is the same as that in FIG. 2 of the first embodiment, and a description thereof is omitted.

FIG. 29 is a diagram showing the configuration of the counter thrust command correction unit 508 in the vibration isolation side control unit of the vibration isolation device according to Embodiment 10 of the present invention. In the figure, reference numeral 510 denotes a filter (from position to speed control unit input to output) obtained by multiplying the transfer function from the position command of the position / speed control unit to the output of the position / speed control unit 102 by 1 / (mc * s ² ). Filter determined from the transfer characteristics of
In the tenth embodiment, the output 509 of the counter thrust command correction unit 508 is input to the interference component compensation unit 301 instead of the vibration isolation control counter thrust command 107, the output 302 of the interference component compensation unit 301, and the counter thrust command correction. The sum of the output 509 of the unit 508 and the output 108 of the position / speed control unit 102 is input to the thrust / current conversion unit 105.

  In the tenth embodiment, in order to perform a correction corresponding to inputting a position command for canceling the vibration isolation side displacement generated by the counter vibration for vibration isolation control to the vibration isolation position / speed control unit, it is continuously performed in the same direction. Even in command patterns that operate, vibration isolation control can be performed efficiently.

Embodiment 11 FIG.
FIG. 30 is a diagram showing a configuration of a counter thrust command correction unit 508 in the vibration isolation side control unit of the vibration isolation device according to Embodiment 11 of the present invention. In the figure, reference numerals 107, 509, and 510 are the same as those in FIG.
The vibration isolation control counter thrust command 107 is input to the filter (filter determined from the transfer characteristics from the input to the output of the position / speed control unit) 510 through the notch filter 201 for removing the gantry vibration component. It is a thing. The notch filter 201 is the same filter as in the third embodiment.
The filter for removing the gantry vibration component may be configured using a low-pass filter, a high-pass filter, or a band-pass filter.

  In the eleventh embodiment, in addition to performing a correction corresponding to inputting a position command for canceling the vibration isolation side displacement generated by the vibration isolation control counter thrust to the vibration isolation side position / speed control unit, Since the gantry vibration component is removed, even better vibration isolation control can be performed even in a command pattern that continuously operates in the same direction.

  The vibration isolator according to the present invention can perform the vibration isolation control efficiently even when the movement on the drive device side repeats the movement in the same direction beyond the stroke end of the vibration isolation side movable portion. Since the addition of the vibration isolation control counter thrust command 107 as the vibration isolation control and the position / speed control thrust command 108 as the position / speed control can be adjusted, the optimum vibration isolation device according to the machine specification and the operation specification can be obtained. Easy to build.

  DESCRIPTION OF SYMBOLS 1 Drive device, 2 Isolation device, 3 Excitation side control part, 4 Excitation side movable part, 5, 5a, 5b, 5c, 5d Isolation side control part, 6 Isolation drive part, 7 Excitation side command signal, 8 Excitation side feedback signal, 9 Excitation side current, 10 Position command as isolation command signal, 11 Isolation side feedback signal, 12, 12a, 12b, 12c, 12d, 12e, 12f Excitation side current, 13 Excitation side control Information from the part, 14 Isolation control part, 101 Isolation side position command setting part, 102 Isolation side position / speed control part, 103 Information setting part, 104 Counter thrust setting part for vibration isolation control, 105 From thrust to current Conversion coefficient, 106 setting information from the excitation side control unit, 107 counter thrust command for vibration isolation control, 108 position / speed control thrust command, 109 vibration isolation control force Final thrust command when performing vibration isolation control by the motor thrust command and position / speed control of the vibration isolation side movable unit at the same time, 110a, 110b condition determination unit, 111 vibration isolation control counter thrust and vibration isolation side position / speed control switching Switch, 111a Contact point when vibration isolation side position / speed control output is selected, 111b Contact point when vibration control counter thrust is selected, 112 Final thrust command, 113 Counter vibration command variable gain control for vibration isolation, 114 Vibration isolation side position / speed control unit Thrust command variable gain, 115 post-vibration counter thrust variable gain thrust command, 116 vibration isolation position / speed control unit variable gain thrust command, 117 final thrust command, 201 notch filter, 202 position through notch filter 201 Speed control thrust command, 203 Final thrust command, 301, 301a, 301b, 301c , 301d, 301e Interference component compensation unit for movable part drive of vibration isolation side position / speed control, interference component compensation term, 302, 302a, 302b, 302c, 302d, 302e Interference component compensation thrust command, 303 Isolation side final thrust Command, 304 position P control of vibration isolation side control unit, 305 differential term, 306 speed P control of vibration isolation side control unit, 307 speed I control of vibration isolation side control unit, 308 position P control output of vibration isolation side control unit 309 Speed P control output of the vibration isolation side control unit 310 Speed I control output of the vibration isolation side control unit 401a Speed P control interference compensation unit 401b Position P / speed PI control interference compensation unit 402a Speed P control interference compensation Thrust command, 402b position P / speed PI control interference compensation thrust command, 402c interference compensation thrust command, 403 404 high-pass filter, 405 limiter, 406 variable gain selection switch, 406a variable gain selection contact, 406b variable gain non-selection contact, 407 high-pass filter selection switch, 407a high-pass filter selection contact, 407b high-pass filter non-selection contact 408a Limiter selection switch, 408a Limiter selection contact, 408b Limiter non-selection contact, 410a Speed P control interference compensation unit, 410b Position P / speed I control interference compensation unit, 410c Position P / speed I control interference compensation unit, 411a , 411b, 411c, high-pass filter, 412 addition unit, 501 position command generation unit, 502 integrator, 503 integrator, 504 thrust-acceleration conversion unit, 505 vibration isolation side movable unit reference position setting unit, 506 Isolation side movable part reference position, 507 Isolation side position command, 508 Counter thrust command correction part, 509 Counter thrust command correction part output, 510 Filter (filter determined from transfer characteristics from input to output of position / speed control part) ), 511 Position command generation unit.

Claims (12)

In the vibration isolator which performs vibration suppression control using the driving reaction force of the movable part, the vibration generated by the driving of the driving device mounted on the gantry,
The vibration isolation side control unit for controlling the vibration isolation device is:
A vibration isolation control unit that drives and controls the movable part of the vibration isolation device in order to obtain a drive reaction force corresponding to the drive reaction force of the drive device based on information output from the excitation side control unit that controls the drive device; ,
A position / speed control unit for controlling the position / speed of the movable part of the vibration isolator according to the position command and the vibration isolation side feedback signal of the vibration isolator, and
The vibration isolation side control unit
An interference component compensator that compensates for an interference component that hinders the effect of vibration isolation control included in the position / speed control thrust command;
The movable vibration control counter thrust command output from the vibration isolation control unit, the position / speed control thrust command output from the position / velocity control unit, and the output from the interference component compensation unit are used as the movable unit. A vibration isolation device characterized in that the drive of the unit is controlled. The interference component compensator is
An interference compensator for calculating an interference component in the speed proportional control of the position / speed controller;
A gain that is variable depending on the position of the vibration isolator movable unit connected in series with the interference compensation unit,
The vibration isolator according to claim 1, further comprising: The interference compensation unit
3. The vibration isolator according to claim 2, wherein an interference component in speed proportional control and speed integral control of the position / speed control unit is calculated. The interference component compensator is
An interference compensator for calculating an interference component in position proportional control, speed proportional control and speed integral control of the position / speed control unit;
A filter for blocking / passing the calculated interference component by a frequency band;
A limiter that limits the compensation amount of the interference component;
The vibration isolator according to claim 1, comprising: The interference component compensator is
An interference compensation unit that calculates an interference component in any of position proportional control, velocity proportional control, velocity integral control, or a plurality of controls of the position / velocity control unit, and
A gain that is variable depending on the position of the vibration isolator movable unit connected in series with the interference compensation unit,
A gain selection means for selecting whether to use this gain;
A filter for blocking / passing the calculated interference component by a frequency band;
A filter selection means for selecting whether to use this filter;
A limiter that limits the compensation amount of the interference component;
Limiter selection means for selecting whether to use this limiter,
The vibration isolator according to claim 1, comprising: The interference component compensator is
A speed proportional control interference compensator for calculating an interference component in the speed proportional control of the position / speed control unit;
A first position proportional / velocity integral control interference compensator for calculating an interference component in position proportional control and velocity integral control of the position / velocity control unit;
A second position proportional / velocity integral control interference compensator for calculating an interference component in position proportional control and velocity integral control of the position / velocity control unit;
A limiter for limiting a compensation amount of an interference component calculated by the speed proportional control interference compensation unit, the first position proportional / velocity integral control interference compensation unit, and the second position proportional / velocity integral control interference compensation unit;
Limiter selection means for selecting whether to use this limiter,
The vibration isolator according to claim 1, comprising: The interference component compensator is
A filter that cuts off / passes the interference component calculated by the speed proportional control interference compensator by a frequency band;
A filter for blocking / pass by frequency band interference component calculated by the first position proportional-speed integral control interference compensation unit,
A filter for blocking / pass by frequency band interference components calculated by the second position proportional-speed integral control interference compensation unit,
A filter selection means for selecting whether to use these filters;
The vibration isolator according to claim 6 provided with. The vibration isolation side control unit
A position command generation unit that generates a position command based on the second order integration of the vibration isolation control counter thrust command output from the vibration isolation control unit;
The position / speed control unit calculates a position / speed control thrust command based on the position command output from the position command generation unit and the vibration isolation side feedback signal,
The movable vibration control counter thrust command output from the vibration isolation control unit, the position / speed control thrust command output from the position / velocity control unit, and the output from the interference component compensation unit are used as the movable unit. 2. The vibration isolator according to claim 1, wherein the drive of the unit is controlled. The vibration isolator according to claim 8, further comprising a filter that removes a gantry vibration component connected in series with the position command generation unit. The vibration isolation side control unit
It has a filter determined from the transfer characteristics from the input to the output of the position / speed control unit, and includes a counter thrust command correction unit that corrects the counter thrust command for vibration isolation control,
The movable portion is calculated by the sum of the counter thrust command correction unit output output from the vibration isolation control unit, the position / speed control thrust command output from the position / speed control unit, and the output from the interference component compensation unit. 2. The vibration isolator according to claim 1, wherein the drive is controlled. The vibration isolator according to claim 10, further comprising a filter for removing a gantry vibration component inside the counter thrust command correction unit. In the vibration isolator which performs vibration suppression control using the driving reaction force of the movable part, the vibration generated by the driving of the driving device mounted on the gantry,
The vibration isolation side control unit for controlling the vibration isolation device is:
A vibration isolation control unit that drives and controls the movable part of the vibration isolation device in order to obtain a drive reaction force corresponding to the drive reaction force of the drive device based on information output from the excitation side control unit that controls the drive device; ,
A position / speed control unit for controlling the position / speed of the movable part of the vibration isolator according to the position command and the vibration isolation side feedback signal of the vibration isolator, and
The vibration isolation side control unit
The filter is connected in series with the position / speed control unit and removes a vibration component of a gantry from the position / speed control thrust command,
The movable part is driven by the sum of the counter thrust command for vibration isolation control output from the vibration isolation control part and the position / speed control thrust instruction output from the position / speed control part via the output of the filter. A vibration isolator characterized by being controlled.

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