JP5156244B2 - Galvo system focus lens cooling system - Google Patents

Description

  The present invention is a lens for adjusting the focal length of a laser of a galvano system, which efficiently cools a lens that is movably adjusted in parallel to the optical axis and a lens holder that holds the lens. The present invention relates to a lens system cooling system for preventing the temperature of the lens holder from being raised as much as possible as compared with the temperature before laser irradiation.

  Techniques for sintering metal powder using a laser or processing the surface of a workpiece have been conventionally known, and such laser systems include, for example, metal stereolithography combined processing apparatuses and laser marker apparatuses. It is used in laser processing equipment represented by The laser is used to sinter the thinly deposited metal powder in the metal stereolithography combined processing apparatus, and is used to create a desired pattern on the workpiece surface in the laser marker apparatus.

  In the laser system used in the apparatus as described above, the depth of focus of the laser beam must be adjusted so that an appropriate laser beam strikes the workpiece processing surface or the like, for example, by making the laser spot diameter constant. Therefore, a lens for adjusting the focal depth of the laser is required. The lens is generally called a focus lens, and is movably adjusted in the laser optical axis direction to adjust the focal depth of the laser light.

  The laser beam described above is usually high in power to process or sinter the workpiece. Therefore, at the time of laser irradiation, the focus lens that is directly irradiated with the laser beam receives the energy of the laser and becomes very hot. If the lens is used without any cooling, it will expand due to the high temperature of the lens, which will adversely affect the depth of focus performance. Furthermore, if the lens and the lens holder are in a high temperature state for a long time, the peripheral device of the lens (for example, the lens holder mounting device and the driving device) is affected by the high temperature atmosphere, and the device is thermally distorted. There is also. If thermal distortion occurs in the peripheral device, the laser optical axis is displaced, and as a result, the shape accuracy in manufacturing the workpiece is adversely affected. Therefore, in order to always ensure highly accurate reliability of the laser system, it is necessary to maintain the temperature of the lens and the lens holder so as not to increase as much as possible as compared with the temperature before laser irradiation. That is, it is necessary to cool the lens and the lens holder at least during laser irradiation.

As a method of cooling the focus lens in the prior art, the cooled compressed air is directly blown onto the exposed lens and the lens holder (see FIG. 5) while being held in the driving device, so that the cooled compressed air is directly used. A method of performing forced cooling is known.

  However, in the prior art that cools the lens and the lens holder by using cooling compressed air blowing, a very large amount of cooled compressed air is required to obtain an appropriate cooling effect. When a large amount of cooling and compressed air is used, dust around the lens system rises, and in addition, there is dust that gets caught from the vicinity of the lens system, which is one of the factors that contaminate the lens. It turns out. If the contamination of the lens progresses to some extent, naturally, the operation of the apparatus must be stopped and the lens must be cleaned or replaced, which hinders continuous operation of the apparatus. Therefore, it is necessary to prevent lens contamination as much as possible. Furthermore, if a large amount of cooled compressed air is used, the consumption of compressed air and the cost for cooling the compressed air increase, which may cause a burden on the operation of the apparatus.

  In order to supply the cooled compressed air, a flexible tube, for example, a tube made of PVC is often used from the viewpoint of economy or ease of deformation, but the tubes are easily affected by the outside air temperature. Therefore, when the air supply distance is long, the cooling compressed air is affected by the outside air temperature, and when the cooling compressed air reaches the lens and the lens holder to be cooled, it may become equal to the outside air temperature. In such a case, there is a problem that sufficient effective cooling cannot be performed when the outside air temperature is originally high in summer or the like.

  Patent Document 1, Patent Document 2, and Patent Document 3 disclose a cooling system that cools a lens used in a laser system by using cooling water or the like and compressed air together as a cooling medium. In the cooling method disclosed in the patent documents, the lens fixing portion is cooled with cooling water or the like to indirectly cool the lens, and further, the lens is directly cooled with cooling compressed air. However, the lens used in the apparatus or system disclosed in the patent documents is fixed, and cannot be applied as it is to a lens that needs to move as in the present invention. Moreover, since the cooling compressed air is also characterized by having a direct cooling effect, the problem of the cooling effect due to the outside air temperature cannot be solved.

JP-A-62-242489 Microfilm of Japanese Utility Model No. 58-75432 (Japanese Utility Model Publication No. 59-180880) Microfilm of Japanese Utility Model No. 59-144204 (Japanese Utility Model Application No. 61-59366)

  In light of the above problems, the present invention prevents the compressed air from having a direct cooling effect, thereby providing a stable cooling effect to the lens and the lens holder while preventing a large amount of compressed air from being consumed. And a lens system cooling system for suppressing the temperature rise of the lens holder as much as possible.

According to the present invention , there is provided a cooling jacket having a tunnel-shaped cavity having an inverted C-shaped or crescent-shaped cross section , and configured to cover the movable region of the lens and the lens holder with the tunnel-shaped cavity. A cooling jacket and a compressed air flow path for supplying compressed air to the movable region, and the linear movement of the lens and the lens holder is performed by a drive unit located on the open side of the tunnel-shaped cavity. realized, the cooling jacket, using heat exchange by radiation between the lens and the lens holder, in order to cool the lens and the lens holder, the cooling oil passage for cooling the cooling jacket body therein is provided, the compressed air from the compressed airflow path, to replace the lens and the lens holder the surrounding atmosphere, and a cooling jacket, lenses and Through the clearance between the Nzuhoruda it is solved by the lens system cooling system.

Oil flowing through the cooling jacket is used to cool the lens and lens holder, but the cooling jacket does not directly contact the lens and lens holder. The cooling jacket is directly cooled by the cooling oil. In other words, the purpose of cooling the cooling jacket is to maintain the low temperature atmosphere around the movable region of the lens and the lens holder and to cool the lens and the lens holder by using radiation. In addition, the compressed air by substitution the lens and the lens holder ambient atmosphere always, although it is indirectly efficiently the lens 21 and the lens holder cooling, i.e. it is possible to suppress the temperature rise.

The compressed air is mainly used to replace the atmosphere around the lens holder movable region. As a result, the atmosphere around the lens and the lens holder, which is also heated, is always replaced by the compressed air under the influence of the temperature of the lens that has been heated by the laser irradiation, so that the lens and the lens holder are cooled. will always exposed is that the low temperature atmosphere between the jacket. In this way, the compressed air itself does not have a direct cooling effect, but is used to disperse the low temperature atmosphere of the cooling jacket cooled with cooling oil over the entire movable area of the lens. The amount of air consumed is sufficient for replacing the atmosphere around the lens holder, and the consumption of a large amount of compressed air can be suppressed.

  Further, in order to suitably use the cooling effect due to the radiation of the cooling jacket and to minimize the volume of the atmosphere replaced by the compressed air, the lens holder is provided between the outer peripheral surface of the lens holder and the inner peripheral surface of the cooling jacket. It is preferable to minimize the clearance or gap formed in the lens to the extent that does not affect the movement of the lens, that is, to the extent that the jacket does not contact the lens holder driving component and the lens holder body. As the clearance is increased, the cooling effect due to the cooling jacket is reduced, and the cooling effect according to the present invention is reduced. In other words, the present invention is achieved by effectively utilizing the cooling atmosphere of the cooling jacket by radiation.

  By configuring as described above, the consumption of compressed air can be suppressed to the minimum amount necessary to replace the atmosphere around the lens and the lens holder, and the lens and the lens holder can be efficiently cooled. It becomes possible to do.

  In addition, the low temperature atmosphere for cooling the lens and the lens holder is caused by the low temperature atmosphere of the cooling jacket adjacent to the lens holder, and even if the compressed air is affected by the outside air temperature, it has an effect on the lens cooling effect. It is possible to reduce the influence as much as possible.

In many cases, a condensing lens in which laser light collides after the focus lens is present downstream of the focus lens in the laser system. For this reason, when the compressed air is viewed in the traveling direction of the laser beam and blown from the upstream side to the downstream side, contaminants such as dust are driven to the downstream side, and as a result, the condensing lens may be contaminated. For this reason, the compressed air is preferably sent from the downstream side of the focus lens and the upstream side of the condenser lens toward the clearance between the cooling jacket and the lens and the lens holder .

  For the purpose of efficiently distributing the compressed air to the lens holder movable region and for the purpose of increasing the area where the lens and the lens holder can use the radiation between the cooling jacket, the guide groove is formed on the outer periphery of the lens holder. It can also be provided on the surface. Providing the guide groove not only secures a reliable path of compressed air, but also allows the compressed air to flow uniformly to the lens movable area, and is further exposed to radiation from the cooling jacket. As the value increases, the cooling efficiency of the lens and the lens holder increases.

  According to the first aspect of the invention, the lens and the lens holder can be efficiently cooled without being affected by the outside air temperature, and adverse effects on the lens performance can be reduced. In addition, since the amount of compressed air can be minimized, it is possible to minimize contaminants such as dust scattered around the lens. Therefore, it is possible to reduce the maintenance frequency of the lens while maintaining high reliability.

According to the second aspect of the invention, compressed air is supplied from the downstream side of the focus lens and the upstream side of the condenser lens toward the clearance between the cooling jacket and the lens and the lens holder. As a result, it is possible to prevent contaminants from being sprayed onto the condenser lens on the downstream side of the focus lens. Accordingly, the lens maintenance frequency is further advantageous. Further, according to the invention according to claim 3, by providing the guide groove for circulating the compressed air on the outer peripheral surface of the guide holder, the flow of the compressed air in the lens holder can be made more uniform. Furthermore, since the area in which radiation can be used increases between the lens and the lens holder and the cooling jacket, more effective cooling can be performed.

  Hereinafter, an embodiment in which the present invention is applied to a laser system of a metal stereolithography composite processing apparatus will be described with reference to the drawings. The present invention is applicable to an apparatus having a movable focus lens and a lens holder, and is not limited to this embodiment. Therefore, description of the metal stereolithography combined machining apparatus is omitted, and only the periphery of the focus lens will be described.

FIG. 1 shows a cross-sectional view of a cooling jacket (1) according to the present invention, and FIG. 2 shows a front view of the lens system cooling system with the cooling jacket (1) attached. In the figure, reference numerals (3) and (4) indicate a lens and a lens holder, respectively, which are the objects of cooling of the present invention. As is clear from FIG. 1, the cooling jacket (1) has an inverted C-shaped or crescent-shaped cross-sectional shape close to an elliptical semicircular shape, and a tunnel-like shape is formed at the center of the cooling jacket (1). The cavity (2) exists. In the tunnel-like cavity (2), a lens (3) and a lens holder (4) that are movable in parallel to the optical axis are arranged, and the cooling jacket (1) is connected to the lens (3) and the lens holder ( 4) is configured to cover the movable region. As is clear from FIG. 1, the cooling jacket (1) is not in contact with the lens holder driving unit (5), but the movable regions of the lens (3) and the lens holder (4) are tunnel-shaped. Thus, it arrange | positions so that it may fit in a lens holder drive part (5).

  In FIGS. 1 and 2, a dotted line indicates a cooling oil flow path (6) provided inside the cooling jacket (1). The cooling oil flow path (6) shown in the present embodiment is constituted by one and is configured so as to draw a rectangular outer periphery inside the cooling jacket (1). ) Is not limited to this form. For example, a plurality of channels having a smaller channel diameter may be provided, and the cooling jacket (1) body is constituted by a cavity having a predetermined thickness, and cooling is performed while filling the cavity with cooling oil. Oil may be circulated. The role of the cooling oil flow path (6) in the present invention is to cool the cooling jacket (1) to a predetermined temperature, and to flow cooling oil for maintaining the cooling jacket (1) at the predetermined temperature. If the cooling jacket (1) can be cooled to the temperature and maintained at the temperature, the number, the diameter, or the shape of the cooling oil path (6) is not limited.

  As can be seen from FIGS. 1-4, a cooling oil inlet (8) and a cooling oil outlet (9) are provided in the cooling jacket (1). In the present embodiment, normally known joints having appropriate sizes are attached to the inlet (8) and the outlet (9) (see FIG. 4). The cooling oil enters from the cooling oil inlet (8) provided on the wall surface of the cooling jacket (1), passes through the cooling jacket (1), and is discharged from the cooling oil outlet (9). In the present embodiment, the cooling oil flowing through the cooling oil flow path (6) is configured to branch and use oil for adjusting the temperature of the entire metal stereolithography composite processing apparatus (not shown). With such a configuration, the cooling jacket (1) is cooled to the adjusted temperature of the whole metal stereolithography composite processing apparatus by the cooling oil, and is maintained at the temperature. As a result of the cooling jacket (1) being maintained at the regulated temperature of the entire metal stereolithography complex processing apparatus, the lens (3) and the lens holder (4) are cooled so as to be as close as possible to the temperature before laser irradiation. become.

Since the lens (3) and the lens holder (4) operate in parallel with the lens optical axis, the lens holder (4) and the cooling jacket (1) are configured not to be in direct contact with each other. However, it is preferable that the clearance provided between the lens holder (4) and the cooling jacket (1) in the tunnel-shaped cavity (2) is configured to be as small as possible. The smaller the clearance, the higher the cooling efficiency of the lens (3) and the lens holder (4), and the required amount of compressed air can be reduced. Clearance scan which is adopted in this embodiment is 3 mm, the cooling jacket (1), the heat exchange by radiation between the lens (3) and the lens holder (4) is the amount of clearance is present if available It is not limited to the embodiment.

  FIG. 3 is a cross-sectional view for explaining the cooling system of the present invention from a top view. As can be seen from the figure, the cooling jacket (1) is positioned and held by the holding plate (12) on the downstream side when viewed in the direction of travel of the laser beam. In this embodiment, the cooling jacket (1) is provided with a step on the downstream holding plate abutting surface on the left side in FIG. 3, so as to form a cylindrical opening (see FIG. 4) and is positioned (not shown in detail). However, even if the cooling jacket is held and positioned using a generally known positioning pin or the like, the object of the present invention can be achieved. For more accurate positioning of the cooling jacket (1), it is preferred that it is also connected and held with the upstream holding plate (11).

The compressed air flow path (7) in the present embodiment has the downstream holding plate (12) so that compressed air can be sent obliquely from the downstream side toward the lens movable region when viewed from the traveling direction of the laser beam. It is provided so as to penetrate diagonally from the lateral direction. In order to assist the understanding of the invention, in FIG. 3, the flow of compressed air is described using arrows, but the compressed air does not flow only in the direction of the arrows, but the lens holder (4) and the cooling jacket. It flows through the entire clearance formed between (1) and (1). Purpose of the compressed air of the present invention, since the lens (3) and the lens holder (4) surrounding atmosphere and child replacement lens (3) and the lens holder (4) suitable compressed air around blown The configuration of the compressed air flow path (7) is not limited to this embodiment as long as it is configured as possible. For example, it may be used in combination air passing through the compressed air of the air and cooling the jacket from the top Symbol diagonally (1). Further, the object of the present invention can be achieved even when compressed air is supplied from the upstream side to the downstream side as viewed from the laser traveling direction.

As described above, the compressed air is an atmosphere around the lens (3) and the lens holder (4), which is warmed when the lens (3) is at a high temperature, and the cooled atmosphere of the cooling jacket (1). and it is always used to replace.

  FIG. 4 is a perspective view showing the cooling system of the present invention in more detail. In the figure, a compressed air passage inlet, a cooling oil inlet (8) and an outlet (9) are described. Projecting in a cylindrical shape on the lens holder driving section (5) is a driving motor for the lens holder (4). A focus lens system including the cooling system of the present invention is fixed at a predetermined position in the metal stereolithography composite processing apparatus by a plate attached to the back surface of the lens holder driving section (5). The laser light is irradiated in the direction of the arrow in FIG. 4 and proceeds to a condenser lens (not shown) through a lens (3) covered with a cooling jacket (1). The cylindrical penetrating portion of the downstream holding plate (12) visible on the left hand side of FIG. 4 is provided for the path of the laser beam. It can be seen that a jet hole (15) for compressed air is provided on the side surface along the circumferential surface of the penetrating portion. From the ejection hole (15), compressed air is supplied to the movable region of the lens (3) and the lens holder (4).

  FIG. 5 illustrates a conventionally known lens cooling method. It can be seen that the lens (3) and the lens holder (4) are arranged in place, ie without the cooling jacket (1). An air nozzle for blowing cooling compressed air is attached above the lens holder (4). Although cooling and compressed air is blown from the nozzle to cool the lens, since it is exposed, the lens (3) is easily contaminated by surrounding dust and the like, and the cooling efficiency is also higher than that of the present invention. It will be understood that it is very low.

  By configuring the lens system cooling system as described above according to the present invention, there is no inferiority compared to the amount of temperature drop of the lens cooled by at least the conventional cooling system as shown in FIG. In addition, it is possible to ensure a sufficiently effective temperature decrease amount, and the object of the present invention is achieved.

  FIG. 6 illustrates an improved lens holder (4) of the present invention. (A) in a figure shows the lens holder (4) used for the said embodiment, and what kind of processing is not given to the outer periphery of the said lens holder (4). Guide grooves (12) and (13) through which compressed air flows are provided on the outer peripheral surface of the lens holder (4) shown in (b) and (c), respectively. The guide groove (12) is formed by cutting the outer peripheral surface of the lens holder (4) and providing a semicircular recess on the outer peripheral surface. The guide groove (13) is formed by cutting a plurality of grooves along the outer peripheral surface of the lens holder (4), and arranging depressions communicating between the grooves at appropriate positions. The guide grooves (12, 13) make it possible to make the flow of compressed air in the lens holder (4) more uniform, and the lens (3), the lens holder (4), and the cooling jacket (1). More effective cooling can be performed since the area where radiation can be used increases.

1 is a schematic cross-sectional view of a cooling system equipped with a cooling jacket according to the present invention. 1 is a schematic front view of a cooling system equipped with a cooling jacket according to the present invention. 1 is a cross-sectional view schematically showing a cooling system equipped with a cooling jacket according to the present invention as viewed from above. 2 is a more specific perspective view of a cooling system according to the present invention. It is a figure which shows the conventional cooling method for cooling a lens and a lens holder. It is a figure which shows the lens holder used for this invention, (a) shows the lens holder of the type which does not provide a guide groove, b) and c) show the lens holder which each provided another guide groove.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Cooling jacket 2 Cooling jacket cavity part 3 Lens 4 Lens holder 5 Lens holder drive part 6 Cooling oil flow path 7 Compressed air flow path 8 Cooling oil inlet 9 Cooling oil outlet 10 Cooling jacket wall surface 11 Upstream holding plate 12 Downstream holding plate 13 Compressed air guide groove 14 Compressed air guide groove 15 Compressed air ejection hole

Claims (3)

A lens system cooling system for cooling the lens (3) and the lens holder (4) moving parallel to the optical axis in the galvano system,
The lens system cooling system includes a cooling jacket (1) having a tunnel-shaped cavity having a cross-sectional shape of an inverted C shape or a crescent shape, and the movable region of the lens (3) and the lens holder (4) is provided in the tunnel-shaped cavity. A cooling jacket (1) configured to be covered with a portion , and a compressed air flow path (7) for supplying compressed air to the movable region,
The linear movement of the lens (3) and the lens holder (4) is realized by a drive unit located on the open side of the tunnel-shaped cavity,
Wherein the cooling jacket (1) utilizes the heat exchange by radiation between the lens (3) and the lens holder (4), in order to cool the lens (3) and the lens holder (4), the interior A cooling oil passage (6) for cooling the cooling jacket (1) main body is provided;
Compressed air from the compressed air channel (7) penetrates the clearance between the cooling jacket and the lens and lens holder to replace the atmosphere around the lens and lens holder.
Lens system cooling system.   The lens (3) is a focus lens, a condenser lens is arranged on the downstream side when viewed in the laser traveling direction, and the compressed air flow path (7) is connected to the focus lens (3) and the lens holder (4). 2. The lens system cooling system according to claim 1, wherein compressed air is supplied toward the clearance from the downstream side and from the upstream side of the condenser lens. The lens system cooling system according to claim 1 or 2, wherein guide grooves (12, 13) for allowing compressed air to flow are provided on an outer peripheral surface of the guide holder (4).

Images