JP5155346B2 - High-strength low-thermal-expansion alloy, manufacturing method thereof, and precision instrument - Google Patents

Description

  The present invention relates to an improvement of an Fe—Ni—Co alloy generally referred to as super invariant steel (super-invar), and more specifically, a low thermal expansion alloy having high mechanical strength, and its production The present invention relates to a method and a precision instrument using the alloy.

Patent document 1 (Japanese Examined Patent Publication No. 5-2319) in which the increased amount, which was the director of the present applicant / foundation, has become the inventor, is Fe-Ni-Co called super invariant steel (also called super invar). The claims of the present invention are as follows. “In the annealed state of alloys containing 46 to 70% Fe, Ni 20 to 54%, Co 34% or less (excluding 0%), the thermal expansion coefficient is in the range up to a value of 12 × 10 ⁻⁶ ° C. ^−1. A new alloy having a thermal expansion coefficient.

Conventionally, Fe-Ni-Co based alloy as a low thermal expansion alloy has a small coefficient of thermal expansion, so that the alloy is made into a bar, wire, thin wire, plate and thin plate, precision equipment such as standard scale, surveying instrument, It is used for distance meters, clocks, temperature control devices, laser light source equipment, shadow masks, IC lead frames, and the like.

Non-Patent Document 1 conducts a detailed study on the thermal expansion coefficient in the annealed state of an Fe-Ni-Co alloy called super invariant steel, and says that "Invar characteristics can be obtained with a composition having large magnetization and low Curie temperature". Masumoto's rule of thumb was derived. Also, according to this study,
Has obtained a very small coefficient of thermal expansion, but mechanical strength (tensile strength and hardness)
The low is a disadvantage.

  Non-Patent Document 2 “Materia” Vol. 36 (1977), 11, “Application of Invar Alloy to Various Precision Control Equipment”, Norio Kishida, Takeshi Masumoto, pp. 1108 to 1085, is a component material of recent precision equipment Describes that it is strongly desired that the coefficient of thermal expansion is small and the mechanical strength is high in a wide temperature range of -50 (223K) to 100 (373K) ° C. This document compares and organizes the characteristics of various Invar alloys, some of which are cited in the following table.

  Further, FIG. 1 of Non-Patent Document 2 is cited as FIG. 1 of the present application. As can be seen from FIG. 1, each Invar alloy has a composition in the γ-phase region.

Patent Document 2 (Patent No. 2,796,966) is an ultra-low thermal expansion alloy (new super invar) proposed by the applicant of the present invention, and its claim 1 is “Ni 29.5-35% by weight, Co 2.0-7.0. In the range of%, containing Cr 0.001 to 2.0% or less and Ti 0.001 to 2.0% or less simultaneously added, the balance is substantially made of Fe, and the coefficient of thermal expansion is −2.0 × 10 ⁻⁶ to + A low thermal expansion alloy characterized by being in the range of 0.5 × 10 ⁻⁶ . Furthermore, the manufacturing method is as follows: (A) After heating at a high temperature of 600 ° C. or higher and a melting point or lower for 1 minute or more to perform a homogeneous solution treatment, quenching or annealing at a rate of 1 ° C. or less per second is performed. A first step, (B) a second step of performing cold working of 10% or more after the quenching or annealing, and (C) 1C at a temperature of 50 ° C. or more and less than 300 ° C. after the cold working. And a third step of heating for at least 100 minutes and then slowly cooling at a rate of 1 ° C. or less per second. ” In this new super invar, thermal expansion characteristics and strength superior to those of super invar are realized, and a negative thermal expansion coefficient can be obtained by increasing the cold working rate. However, although performing cold working strength, tensile strength is up to 80 kg / mm ² weak.

Patent Document 1: Japanese Patent Publication No. 5-2319 Patent Document 2: Japanese Patent No. 2796966

Non-patent document 1: Increased amount, metal research 8 (1931), 237
Non-Patent Document 2: “Materia” Vol. 36 (1977), 11, “Application of Invar alloy to various precision control devices” Norio Kishida, Takeshi Masumoto, pp.

Conventional low thermal expansion alloys other than the new Super Invar proposed by Patent Document 2 have a relatively low thermal expansion coefficient in the annealed state, but the composition range having a low thermal expansion coefficient is narrow and the annealed state has low mechanical strength. . Furthermore, super invariant steel has a narrow temperature range with a low coefficient of thermal expansion. Although the composition range of the Fe-Co-Ni alloy of the new Super Invar is relatively wide, the addition of Cr and Ti is essential, and the mechanical strength is not yet satisfactory, so that improvement has been desired.
Furthermore, conventional low thermal expansion alloys including the new Super Invar have a problem of workability peculiar to the Co alloy, and it is difficult to mass-produce them with high reproducibility, and there is a strong demand for improvement. That is, the fluidity of the molten metal at the time of melting is poor, it is difficult to obtain a sound ingot, and further, forging, hot working and cold working are not easy, so the yield of the final product is also bad.
In view of the history of low thermal expansion alloy development from about 80 years ago to the present and the current state of the technology as described above, the present invention further improves the mechanical strength while maintaining the low thermal expansion coefficient of Fe-Ni-Co alloys. The main purpose is to do.

The present inventors have intensively studied on the miniaturization of the thermal expansion coefficient and the improvement of the mechanical strength accompanying the addition of the fluorine compound of the group IIa element of Mg, Ca, Sr, and Ba to the Fe—Ni—Co alloy.
As a result, in terms of weight ratio, Ni 30 to 38%, Co 1 to 7% and Mg, Ca, Sr, Ba, Group IIa element fluorine compounds, each 1% or less, or a total of 0.0001 to 3% , And the balance Fe, or if necessary, Cr, Mo, and W as subcomponents of 7% or less, V, Nb, Ta, Cu, Mn, Ti, Zr, and Hf, respectively, of 5% or less. A total of 0.001 to 10% of one or more of Al, Si, Be, 3% or less and B, C, respectively, 1% or less is added, and the remaining Fe alloy has a low thermal expansion coefficient and high strength. It was found. Such properties can be obtained in the cold-worked state of the above alloy or in a state of being heat-treated at a low temperature of 70 to 500 ° C. below the recrystallization temperature. In the process before reaching the cold working state, the hot working process such as casting and forging is performed, and then the cold working is performed. The fluidity, forgeability, heat of the molten metal required in these processes is performed. The cold workability and cold workability are remarkably improved by the addition of the fluorine compound.

The features of the present invention are as follows.
(1) 1st invention is Ni30-38%, Co1-7%, Mg, Ca, Sr, Ba by weight ratio.
1% or less of each of the fluorine compounds of group IIa elements of 0.001 to 3% in total,
And the balance Fe and inevitable impurities, having a tensile strength of 1000 MPa or more and a thermal expansion coefficient (-1 to +1) × 10 ⁻⁶ ° C. ⁻¹ at −50 to 100 ° C. Regarding alloys.

(2) The second invention is Ni 30-38%, Co1-7%, Mg, Ca, Sr,
1% or less total of 0.001% of each fluorine compound of group IIa element of Ba Total 0.0001
~ 3%, and Cr, Mo, W as subcomponents each 7% or less, V, Nb, Ta, Cu,
Mn, Ti, Zr, and Hf are each 5% or less, Al, Si, and Be are each 3% or less, B and C are each 1% or less, a total of 0.001 to 10%, and the balance Fe It consists of inevitable impurities, has a tensile strength of 1000 MPa or more, and a thermal expansion coefficient at -50 to 100 ° C (-1 to +1)
× relates to a high-strength low thermal expansion alloy characterized by having 10 ^-6 ° C ^-1 .

  (3) The third invention relates to a precision instrument using the high-strength, low-thermal-expansion alloy described in (1) or (2), which is processed into a rod, wire, plate or thin plate.

(4) In the fourth invention, an ingot of the alloy having the composition described in the above (1) or (2) is processed into an appropriate shape by hot forging and hot working, and the melting point is 900 ° C. or higher and lower than the melting point. After annealing at a temperature of 0.5 to 10 hours, cooling, and then drawing to a rod or wire with a desired thickness by drawing at a processing rate of 60% or more, at a tensile strength of 1000 MPa or more and -50 to 100 ° C The present invention relates to a method for producing a high-strength, low-thermal expansion alloy characterized by having a thermal expansion coefficient (−1 to +1) × 10 ⁻⁶ ° C. ⁻¹ .

  (5) The fifth invention relates to a method for producing a high-strength low thermal expansion alloy, characterized in that the rod or wire obtained in the fourth invention is heated at a temperature of 70 to 500 ° C. for 0.5 to 100 hours.

(6) In the sixth invention, an ingot of the alloy having the composition described in the above (1) or (2) is processed into an appropriate shape by hot forging and hot working, and the melting point is 900 ° C. or higher and lower than the melting point. After annealing at a temperature of 0.5 to 10 hours, cooling, and then rolling to a reduction ratio of 60% or more to obtain a plate or thin plate with a desired thickness, heat at a tensile strength of 1000 MPa or more and −50 to 100 ° C. The present invention relates to a method for producing a high-strength, low-thermal-expansion alloy having an expansion coefficient (−1 to +1) × 10 ⁻⁶ ° C. ⁻¹ .

  (7) The seventh invention relates to a method for producing a high-strength, low-thermal-expansion alloy characterized by heating the plate or thin plate obtained in the sixth invention at a temperature of 70 to 500 ° C. for 0.5 to 100 hours.

(8) In the eighth invention, an ingot of the alloy having the composition described in the above (1) or (2) is processed into an appropriate shape by hot forging and hot working, and the melting point is 900 ° C. or higher and lower than the melting point. After annealing at a temperature for 0.5 to 10 hours, cooling, and then drawing a rod or wire of a desired thickness by drawing a rod with a processing rate of 40% or more, rolling the rod or wire further with a rolling reduction of 40% or more. By processing to make a plate or thin plate of the desired thickness, the tensile strength is 1000 MPa or more and the thermal expansion coefficient (-1 to +1) at -50 to 100 ° C. ×
The present invention relates to a method for producing a high-strength low thermal expansion alloy characterized by having 10 ⁻⁶ ° C. ⁻¹ .

(9) The ninth invention relates to a method for producing a high-strength low thermal expansion alloy, characterized in that the plate or thin plate obtained in the eighth invention is heated at a temperature of 70 to 500 ° C. for 0.5 to 100 hours.
Next, the present invention will be described in the order of the composition, characteristics and manufacturing method of the high-strength low thermal expansion alloy.

Composition The composition of the alloy of the present invention is Ni30-38%, Co1-7%, and Mg, Ca, Sr, Ba IIa
Fluorine compounds of group elements such as MgF ₂ , CaF ₂ , SrF ₂ and BaF ₂ are each 1% or less, or a total of 0.0001 to 3% of two or more, and the balance Fe and inevitable impurities. This component composition, the Fe-Ni-Co-based composition of a wider range than Super Invar shown in Table 1 and Figure 1, the thermal expansion coefficient at -50~100 ℃ (-1~ + 1) × 10 -6 ℃ - Tensile strength of ¹ and 1000 MPa or more can be obtained. Outside this composition range, the tensile strength is less than 1000 MPa, −50
Since the thermal expansion coefficient at ˜100 ° C. is less than −1 × 10 ⁻⁶ ° C.− ¹ or exceeds 1 × 10 ⁻⁶ ° C.− ¹ , a low thermal expansion alloy having a low thermal expansion coefficient cannot be obtained.

And it shows in the analytical value of Table 2 by adding 0.0001-3% in total in any 1 type or 2 types or less of each 1% or less of the fluorine compound of the IIa group element of Mg, Ca, Sr, and Ba In this way, it reacts well with impurity elements such as phosphorus, oxygen, sulfur and nitrogen contained in trace amounts, and the effects of dephosphorization / deoxidation / desulfurization / denitrogenation are noticeable, and these impurity elements are removed. Thus, the fluidity of the molten metal and hot working or cold working are remarkably improved. Furthermore, Fe-Ni 30-38%, Co1-7% alloy is a single phase (γ phase) of a face-centered cubic lattice that is homogeneous at room temperature, and this includes Mg, Ca, Sr, Ba IIa group elements. When a fluorine compound is added, the intermetallic compounds of these elements are finely dispersed and precipitated in the matrix of the γ phase, thereby strengthening the base, and further, the fluorine compound of the group IIa element is added to the crystal grain boundary. By segregating, the grain boundary was strengthened, and the mechanical strength could be increased by the effect of preventing the movement of dislocations at the grain boundary.
Furthermore, when the γ-phase matrix, in which intermetallic compounds of these elements are finely dispersed and precipitated, is subjected to cold working, a processing-induced transformation occurs, generating an α ′ phase of a body-centered cubic lattice at the base of the γ-phase. . The α ′ phase can obtain a low thermal expansion coefficient by changing the thermal expansion coefficient to the negative side (first and fourth inventions).

Fe—Ni—Co based alloy having a mixed structure of α ′ phase and γ phase in such cold working state is 70 to
A low thermal expansion coefficient within the range of ( ^-1 to +1) x 10 ^-6 ℃ ^-1 by heat treatment at a low temperature below the recrystallization temperature of 500 ℃ and adjusting the α 'phase to an appropriate amount. In addition, by heat-treating at a temperature below 70-500 ° C recrystallization, the work distortion caused by work hardening remains appropriately, and the mechanical properties are maintained while maintaining the strength of 1000 MPa or more. It can also be improved (5th, 7th and 9th inventions).

When a fluorine compound of group IIa elements of Mg, Ca, Sr, and Ba is added to an Fe-Ni-Co alloy, it reacts with impurity elements such as oxygen, sulfur, phosphorus, and nitrogen contained in a trace amount, and desorbs. The action of acid, desulfurization, dephosphorization, and denitrification appears remarkably, and these impurity elements are well removed. For this reason, the flow of the molten metal becomes good, and inclusions in the ingot and segregation of impurities are reduced.
Therefore, forgeability, hot workability, and cold workability are remarkably improved, and the yield of the final product is greatly improved.
Table 2 shows impurity elements contained in the alloys of the present invention 11, 24, 68 and the ultra-invariant steel.

FIG. 2 shows a drawing process with a processing rate of 85% for an alloy obtained by adding MgF ₂ , CaF ₂ , SrF ₂ or BaF ₂ to an Fe-32% Ni-5% Co-based alloy having the same composition as that of the ultra-invariant steel. 6 is a graph showing the relationship between the respective addition amounts, thermal expansion coefficient α, and tensile strength σ when heated at 200 ° C. for 5 hours. As can be seen from the figure, the fluorine compound of the group IIa element imparts a positive thermal expansion coefficient and has the effect of increasing the tensile strength.

FIG. 3 shows an alloy in which the subcomponents Cr, Mo, W, or V are added to alloy number 11, FIG. 4 shows an alloy in which Nb, Ta, Cu, or Mn is added to alloy number 11, and FIG. Similarly, the amount of alloy No. 11 added with Ti, Zr, Hf, Al, Si, Be, B, or C when heated at 200 ° C for 5 hours after drawing at a processing rate of 85% And the thermal expansion coefficient α and the tensile strength σ. As can be seen from FIGS. 3, 4, and 5, the subcomponent imparts a positive coefficient of thermal expansion and has the effect of increasing the tensile strength.

  Further, as subcomponents, Cr, Mo, W are each 7% or less, V, Nb, Ta, Cu, Mn, Ti, Zr, Hf are each 5% or less, Al, Si, Be3% or less, B, C. Addition of 1% or less, or a total of 0.001% to 10% of each, as shown in Figs. 3, 4, and 5, the addition of these elements has the effect of reducing the absolute value of the thermal expansion coefficient. is there. Of these, the addition of Cr, Mo, W, V, Nb, Ta, Cu, Ti, Zr, Hf, Al, Si, Be, B, and C greatly increases the mechanical strength, and Mn, Al, Si When Ti, Zr and Hf are added, the effect of deoxidation / desulfurization is large.

Characteristic (1) Thermal expansion coefficient In the first invention, the effect of the fluorine compound imparting a positive thermal expansion coefficient and the α ′ phase imparting a negative thermal expansion coefficient allows a wide Fe-Co-Ni alloy composition range. -50
A small thermal expansion coefficient is obtained at (-1 to +1) × 10 ^-6 ° C ^-1 in the temperature range of -100 ° C.
In the second invention, due to the effect of the fluorine compound imparting a positive thermal expansion coefficient and the secondary component and the α ′ phase imparting a negative thermal expansion coefficient, in a wide Fe—Co—Ni alloy composition range, A small thermal expansion coefficient is obtained at (-1 to +1) × 10 ⁻⁶ ° C. ⁻¹ in the temperature range of 100 ° C.
Therefore , the alloys of the first and second inventions are suitable for precision instruments that require a low coefficient of thermal expansion.
(2) Mechanical strength The mechanical strength (tensile strength and hardness) of the alloy of the first invention is the same as that of conventional Fe-Ni-Co by cold work hardening, fine dispersion precipitation of fluorine compounds and grain boundary strengthening. It is larger than the low thermal expansion alloy. In the second invention, the subcomponent further contributes to strengthening. Therefore, the alloy of the present invention is suitable for precision instruments requiring low thermal expansion and mechanical strength.

Production Method (1) Melting To produce the alloy of the present invention, 1 to 30% by weight of Ni, 30% to 38%, Co1 to 7%, and 1% or less of each of the fluorine compounds of group IIa elements of Mg, Ca, Sr and Ba. Appropriate amount of raw material having a composition of seeds or a total of 0.0001 to 3% of two or more kinds and the balance Fe in air, preferably in a non-oxidizing atmosphere (gas such as hydrogen, argon, nitrogen) or in vacuum A melting furnace such as a high-frequency melting furnace or the like, and as it is, further, Cr, Mo, W as subcomponent elements are 7% or less respectively, V, Nb, Ta, Cu, Mn, Ti, Zr Pure metals, ferroalloys, etc. so that the total amount of Hf is 5% or less, Al, Si, Be is 3% or less, and B or C is 1% or less, or a total of 0.001-10%. Add a predetermined amount of raw material in an appropriate form such as an alloy of To build a compositionally homogeneous molten alloy.

(2) Forging and hot working Next, the molten alloy is poured into a mold of an appropriate shape and size to obtain a healthy ingot, and the ingot is 900 ° C. or higher and lower than the melting point, preferably 1000 to 1300. Forging, hot working, etc. are performed at ℃ to make the shape suitable for the next process.

(3) By heating the material made in the pre-annealing process at a temperature of 900 ° C. or higher and lower than the melting point, preferably 950 to 1300 ° C. for an appropriate period of time, preferably 0.5 to 5 hours and then cooling, Homogenizes and softens the inter-processed structure.

(4) Drawing or rolling process As shown in FIGS. 6 (A), 7 (A) and 8 (A) (alloy compositions and processing methods are described in paragraph numbers 0040, 0044 and 0048), When the α ′ phase of the body-centered cubic lattice is generated at the base of the γ phase by rolling-induced transformation by rolling, the tensile strength σ increases. Furthermore, a negative thermal expansion coefficient α can be obtained. It is desirable that the drawing rate (that is, the cross-sectional area reduction rate) or rolling reduction (thickness reduction rate) of the drawing process is 60% or more (fourth and sixth inventions). When the rolling process is performed after the drawing process, the rolling reduction is preferably 40% or more (eighth invention). Moreover, the effect which raises the mechanical strength by work hardening is large with the increase in a processing rate and a rolling reduction.
The dimensions of the wire, bar, plate and thin plate are determined by the type of precision equipment.The diameter of the wire is 0.01 to 10.0 mm, the rod is 10.0 to 50.0 mm, the thickness is 0.001 to 1.0 mm, the width is 0.01 to 10 mm, The plate generally has a thickness of 1.0 to 10.0 mm and a width of 10.0 to 100.0 mm.

(5) Heat treatment after processing As shown in FIGS. 6 (B), 7 (B) and 8 (B) (alloy composition and processing method will be described in paragraph numbers 0040, 0044 and 0048), After the rolling process, heat treatment is performed at a temperature lower than the recrystallization temperature of 70 to 500 ° C., preferably 100 to 450 ° C. for an appropriate time, preferably 0.1 to 100 hours, and (−1 to +1) × 10 ⁻ Smaller in the range of ⁶ ℃ ^-1 , low thermal expansion is obtained, and heat treatment is performed at a temperature lower than the recrystallization temperature (70 to 500 ℃), so that processing strain due to work hardening remains and mechanical strength is maintained. The Furthermore, the coefficient of thermal expansion α changes in the positive direction because the α ′ phase generated by processing disappears by heat treatment (5th, 7th and 9th inventions). However, in the case of heating at a temperature of less than 70 ° C., even if heating is performed for 100 hours, the α ′ phase due to processing is not lost, and a sufficient effect of making the thermal expansion coefficient positive cannot be obtained. Further, when heated at a temperature of 500 ° C. or higher, the α ′ phase is completely extinguished and the coefficient of thermal expansion is increased, and recrystallization occurs, so that processing strain due to work hardening is removed and mechanical strength is reduced.

The alloy of the present invention has a small thermal expansion coefficient of (−1 to +1) × 10 ⁻⁶ ° C. ⁻¹ , an excellent low thermal expansion coefficient, and a high mechanical strength of 1000 MPa or more. Suitable for use with scales, surveying instruments, distance meters, watches, temperature control devices, laser light source equipment, shadow masks, IC lead frames, etc., and other precision equipment that requires a low coefficient of thermal expansion It is also suitable as a low thermal expansion material to be used.

Next, examples of the present invention will be described.
Example 1
Alloy of alloy number 11 (composition Ni = 32.0%, Co = 5.0%, SrF ₂ = 0.10%, Fe = remainder); that is, an alloy in which a fluorine compound is added to an Fe—Ni—Co alloy having the same composition as that of super invariant steel As a raw material, 99.9% purity electrolytic iron, electrolytic nickel, electrolytic cobalt, and a strontium fluorine compound (SrF ₂ ) were used. To make the sample, 800 g of the total weight of the raw material was placed in an alumina crucible, melted in a high-frequency induction electric furnace in vacuum, and then stirred well to obtain a homogeneous molten alloy. Next, this was poured into a mold having a hole with a diameter of 25 mm and a height of 170 mm, and the resulting ingot was forged at about 1100 ° C. to obtain an 18 mm square bar. Furthermore, after hot rolling using a hot rolling mill for round bars up to a diameter of 10 mm at about 1050 ° C., the round bars were heated at 1000 ° C. for 1 hour and annealed. Next, after cold drawing at room temperature to form a 5 mm wire, the wire was heated in a vacuum of 1050 ° C. for 2 hours and annealed to obtain a wire with an appropriate diameter at various processing rates. Thereafter, heat treatment was performed at an appropriate temperature and time, various characteristics were measured, and characteristic values as shown in Table 3 were obtained.

From Table 3, it can be seen that the wire rods of the examples of the present invention have a very high tensile strength exceeding 1000 MPa and a γ + α ′ mixed structure by the drawing process, so that low thermal expansion characteristics are obtained.
Except for (Comparative Example) in Table 3, the examples of the first and fifth inventions are shown, the manufacturing conditions in the first to third rows are the examples of the fourth invention, and the manufacturing conditions in the fourth to sixth rows are the first. 5 is an embodiment of the invention.

  Further, FIG. 6 (A) shows the relationship between the thermal expansion coefficient α and the tensile strength σ and the drawing rate when the alloy number 11 is drawn at various processing rates other than those shown in Table 3. Is shown. FIG. 6 (B) shows the coefficient of thermal expansion α and the tensile strength when heated at various temperatures other than those shown in Table 3 after drawing with a processing rate of 85% shown in the second row of Table 3. It shows the relationship between the strength σ and the heating temperature.

Example 2
Production of alloy No. 24 (composition Ni = 31.0%, Co = 5.5%, CaF ₂ = 0.15%, Mo = 3.0%, Fe = balance).
99.9% purity electrolytic iron, electrolytic nickel, electrolytic cobalt, electrolytic chromium, calcium fluoride compound (CaF ₂ ), and molybdenum were used as raw materials. To make the sample, 800 g of the total weight of the raw material was placed in an alumina crucible, melted in a high-frequency induction electric furnace in vacuum, and then stirred well to obtain a homogeneous molten alloy. Next, this was poured into a mold having a hole with a diameter of 25 mm and a height of 170 mm, and the obtained ingot was forged at about 1200 ° C. to obtain an 18 mm square bar. Furthermore, after making into a plate using a hot rolling mill at about 1150 ° C. to a thickness of 10 mm, the plate was heated at 1100 ° C. for 1 hour and annealed. Next, after rolling into a 3 mm plate at room temperature using a cold rolling mill, the plate is annealed by heating in a vacuum at 1100 ° C. for 2 hours, and with an appropriate thickness at various processing rates. After forming a thin plate, heat treatment was performed at an appropriate temperature and time, and various characteristics were measured, and characteristic values as shown in Table 4 were obtained.

From Table 4, it can be seen that the thin plate of the embodiment of the present invention has a very high tensile strength exceeding 1000 MPa and has a γ + α ′ mixed structure by rolling, so that low thermal expansion characteristics can be obtained.
The manufacturing conditions other than the comparative examples in Table 4 are the examples of the sixth and seventh inventions, and the manufacturing conditions in the first to third lines of Table 4 are the examples of the sixth invention, and the fourth to sixth lines. The manufacturing conditions are the embodiment of the seventh invention.

  Further, FIG. 7A shows the thermal expansion coefficient α and the alloy number 24 when the rolling process is performed with various rolling reduction ratios for the samples in the first to third rows of Table 4 while changing the rolling reduction ratio. It shows the relationship between the tensile strength σ and the rolling reduction. FIG. 7B shows the coefficient of thermal expansion α and tensile strength when the samples in the 4th to 6th rows of the table were subjected to rolling with the rolling reduction changed to 90% and then heated at various temperatures. The relationship between (sigma) and heating temperature is shown.

Example 3
Production of alloy No. 68 (composition Ni = 33.0%, Co = 6.0%, BaF ₂ = 0.32%, Cr = 2.5%, Nb = 2.5%, Fe = balance).
As raw materials, electrolytic iron, electrolytic nickel, electrolytic cobalt, electrolytic chromium, barium fluorine compound (BaF ₂ ) and niobium having a purity of 99.9% were used. To make the sample, 800 g of the total weight of the raw material was put in an alumina crucible, melted in a high-frequency induction electric furnace in argon gas with a total pressure of 10 ⁻¹ MPa, and then stirred well to obtain a homogeneous molten alloy. Subsequently, this was poured into a mold having a hole with a diameter of 25 mm and a height of 170 mm, and the obtained ingot was forged at about 1200 ° C. to obtain a round bar with a diameter of 18 mm. Furthermore, after hot rolling at about 1100 ° C. to a diameter of 10 mm using a hot rolling mill for round bars, the round bars were heated at 1100 ° C. for 1 hour and annealed. Next, after cold drawing at room temperature to form a 5 mm wire, the wire was heated and annealed in a vacuum at 1100 ° C. for 1 hour, and further at various processing rates using a cold drawing machine. The wire was of an appropriate diameter. Further, the wire was rolled to an appropriate thickness using a cold rolling mill to form a thin plate. Next, the thin plate was subjected to heat treatment at an appropriate temperature and time, and various characteristics were measured, and characteristic values as shown in Table 5 were obtained.

From Table 5, the thin plate of the embodiment of the present invention has a very high tensile strength exceeding 1000 MPa and has a mixed structure of γ + α ′ by drawing and rolling, so that low thermal expansion characteristics are obtained. I understand.
Except for the comparative examples in Table 5, the examples show the manufacturing conditions of the eighth and ninth inventions, the manufacturing conditions of the first to third rows are the examples of the eighth invention, and the manufacturing conditions of the fourth to sixth rows are the ninth invention. This is an example.

Further, FIG. 8A shows the alloy number 68 in which the conditions in the first to third rows of Table 5 are changed, and after drawing the wire at a processing rate of 50% to form a wire, 3 shows the relationship between the thermal expansion coefficient α and the tensile strength σ and the rolling reduction when rolling is made into a thin plate at various rolling reductions. From this figure, it can be seen that a tensile strength σ of 1000 MPa or more and a thermal expansion coefficient α of (−1 to +1) × 10 ⁻⁶ ° C. ⁻¹ are obtained at a rolling reduction of 40% or more.
FIG. 8 (B) is the one in which the conditions in the fourth to sixth rows of Table 5 are changed, and a wire subjected to a drawing process with a processing rate of 50% is further subjected to a rolling process with a reduction rate of 90%. Thereafter, the relationship between the thermal expansion coefficient α and the tensile strength σ and the heating temperature when heated at various temperatures is shown.
From this figure, it can be seen that a tensile strength σ of 1000 MPa or more and a thermal expansion coefficient α of (−1 to +1) × 10 ⁻⁶ ° C. ⁻¹ are obtained in the heating temperature range of 70 to 500 ° C.

Example 4
Wire samples were made for alloys having the compositions shown in Table 6. In the table, the alloy number in which the reduction ratio column is “−” is processed in accordance with the steps of Example 1, except that the annealing of the conditions shown in the table is performed instead of “1100 ° C., 2 hour annealing” of Example 1. I did it. The alloy number in which the column of the drawing rate in the table is “−” was processed according to the process of Example 2, except that “1100 ° C., annealing for 2 hours” was replaced with the conditions shown in the table. .
Table 7 shows the characteristic values of the wire or the thin plate.

From Tables 6 and 7, it can be seen that excellent thermal expansion coefficient, tensile strength and Vickers hardness can be obtained for a wide range of Ni and Co contents and various fluorine compound and auxiliary component addition compositions.
Further, the ultra-invariant steel shown as a comparative example has remarkably inferior mechanical properties. In addition, since no fluorine compound was added, the ultra-invariant steel was not excellent in hot water flow during pouring into the mold. For this purpose, the temperature of the tapping water was increased by about 50 ° C. from the example. Furthermore, in hot working such as forging, cracking was likely to occur, so forging was performed by performing reheating several times during the working.

The alloy of the present invention has a small thermal expansion coefficient of (-1 to +1) × 10 ⁻⁶ ° C. ⁻¹ , excellent low thermal expansion, and higher mechanical strength. Suitable for machine, distance meter, watch pendulum and hairspring, temperature control device, laser light source equipment, shadow mask, IC lead frame, container and precision standard, etc., low thermal expansion coefficient and mechanical Since it is also suitable as a low thermal expansion material used for other precision instruments that require strength, it greatly contributes to the industry.

FIG. 4 is a diagram showing the positional relationship between the α⇔γ transformation line (room temperature, 200 K) of the Fe—Ni—Co-based alloy shown in Non-Patent Document 2 and various invar type alloys. A characteristic diagram showing the relationship between the addition amount of an alloy obtained by adding MgF ₂ , CaF ₂ , SrF ₂ or BaF ₂ to the Fe-32% Ni-5% Co system, and the thermal expansion coefficient α and tensile strength σ. is there. It is a characteristic view which shows the relationship between the addition amount of the alloy which respectively added Cr, Mo, W, or V to the alloy number 11, and thermal expansion coefficient (alpha) and tensile strength (sigma). It is a characteristic view which shows the relationship between the addition amount of the alloy which respectively added Nb, Ta, Cu, or Mn to the alloy number 11, and thermal expansion coefficient (alpha) and tensile strength (sigma). It is a characteristic view which shows the relationship between the addition amount of the alloy which respectively added Ti, Zr, Hf, Al, Si, Be, B, or C to the alloy number 11, and thermal expansion coefficient (alpha) and tensile strength (sigma). (A) It is a characteristic view which shows the relationship between the wire drawing rate, thermal expansion coefficient (alpha), and tensile strength (sigma) at the time of performing wire drawing to the alloy number 11. FIG. (B) A characteristic diagram showing the relationship between the heating temperature, the thermal expansion coefficient α, and the tensile strength σ when the alloy No. 11 is drawn at a processing rate of 85% and then heated at various heating temperatures. is there. (A) It is a characteristic view which shows the relationship between the rolling reduction, the thermal expansion coefficient α, and the tensile strength σ when the alloy number 24 is rolled. (B) It is a characteristic view which shows the relationship between heating temperature, thermal expansion coefficient (alpha), and tensile strength (sigma) at the time of heating at various heating temperature after giving rolling processing of 90% of reduction ratio to alloy number 24. . (A) Characteristic diagram showing the relationship between the reduction ratio, thermal expansion coefficient α and tensile strength σ when the alloy No. 68 is drawn at a reduction ratio of 50% and then rolled at various reduction ratios. It is. (B) Heating temperature, thermal expansion coefficient α and tension when alloy No. 68 was drawn at a reduction rate of 50% and then rolled at a reduction rate of 90% and heated at various heating temperatures. It is a characteristic view which shows the relationship with strength (sigma).

Claims (9)

By weight ratio, Ni30-38%, Co1-7%, Mg, Ca, Sr, Ba group IIa element fluorine compounds of 1% or less each, or a total of 0.0001-3%, and the balance A high-strength, low-thermal expansion alloy comprising Fe and inevitable impurities and having a tensile strength of 1000 MPa or more and a thermal expansion coefficient (-1 to +1) × 10 ⁻⁶ ° C. ⁻¹ at −50 to 100 ° C. In a weight ratio, Ni30-38%, Co1-7%, Mg, Ca, Sr, Ba group IIa element fluorine compound each 1% or less of one or two or more total 0.0001-3%, and sub Components of Cr, Mo, and W are each 7% or less, V, Nb, Ta, Cu, Mn, Ti, Zr,
Hf is 5% or less, Al, Si, and Be are 3% or less, B and C are 1% or less, respectively, and a total of 0.001 to 10%, and the balance Fe and inevitable impurities. , A high strength low thermal expansion alloy characterized by having a tensile strength of 1000 MPa or more and a thermal expansion coefficient (-1 to +1) × 10 ^-6 ° C ^-1 at -50 to 100 ° C. A precision instrument using the high-strength low-thermal-expansion alloy according to claim 1 or 2 processed into a rod, wire, plate or thin plate. The ingot of the alloy having the composition according to claim 1 or 2 is processed into an appropriate shape by hot forging and hot working, annealed at a temperature of 900 ° C. or higher and lower than the melting point for 0.5 to 10 hours, and then cooled, Next, by drawing to a rod or wire with a desired thickness by drawing a wire with a processing rate of 60% or more, a thermal expansion coefficient (-1 to +1) × 10 ^{− at} tensile strength of 1000 MPa or more and −50 to 100 ° C. ^A method for producing a high-strength, low-thermal-expansion alloy, characterized by having ⁶ ° C ^-1 . 5. The method for producing a high-strength low-thermal-expansion alloy according to claim 4, wherein the bar or wire is heated at a temperature of 70 to 500 ° C. for 0.5 to 100 hours. The ingot of the alloy having the composition according to claim 1 or 2 is processed into an appropriate shape by hot forging and hot working, annealed at a temperature of 900 ° C. or higher and lower than the melting point for 0.5 to 10 hours, and then cooled, Next, a rolling process with a rolling reduction of 60% or more is performed to form a plate or thin plate with a desired thickness, thereby obtaining a thermal expansion coefficient (-1 to +1) × 10 ^{− at} a tensile strength of 1000 MPa or more and −50 to 100 ° C. ^A method for producing a high-strength, low-thermal-expansion alloy, characterized by having ⁶ ° C ^-1 . 7. The method for producing a high-strength low thermal expansion alloy according to claim 6, wherein the plate or the thin plate is heated at a temperature of 70 to 500 ° C. for 0.5 to 100 hours. The alloy ingot having the composition according to claim 1 or 2 is processed into an appropriate shape by hot forging and hot working, annealed at a temperature of 900 ° C. or higher and lower than the melting point for 0.5 to 10 hours, and then cooled. Next, after drawing to a bar or wire having a desired thickness by performing a drawing process with a processing rate of 40% or more, the bar or wire is further subjected to a rolling process with a reduction rate of 40% or more to obtain a plate or sheet having a desired thickness. By doing
A method for producing a high-strength, low-thermal-expansion alloy having a tensile strength of 1000 MPa or more and a thermal expansion coefficient (-1 to +1) x 10 ^-6 ° C ^-1 at -50 to 100 ° C. The method for producing a high strength and low thermal expansion alloy according to claim 8, wherein the plate or the thin plate is heated at a temperature of 70 to 500 ° C for 0.5 to 100 hours.

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